WO2018008073A1 - Appareil laser et machine de traitement laser - Google Patents

Appareil laser et machine de traitement laser Download PDF

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Publication number
WO2018008073A1
WO2018008073A1 PCT/JP2016/069823 JP2016069823W WO2018008073A1 WO 2018008073 A1 WO2018008073 A1 WO 2018008073A1 JP 2016069823 W JP2016069823 W JP 2016069823W WO 2018008073 A1 WO2018008073 A1 WO 2018008073A1
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WIPO (PCT)
Prior art keywords
laser
light
laser beam
intensity
optical axis
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PCT/JP2016/069823
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English (en)
Japanese (ja)
Inventor
望 平山
智毅 桂
秀則 深堀
Original Assignee
三菱電機株式会社
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Filing date
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Application filed by 三菱電機株式会社 filed Critical 三菱電機株式会社
Priority to JP2016574481A priority Critical patent/JP6104489B1/ja
Priority to PCT/JP2016/069823 priority patent/WO2018008073A1/fr
Priority to KR1020187027014A priority patent/KR20180108853A/ko
Priority to CN201680087341.4A priority patent/CN109478758B/zh
Priority to TW106115968A priority patent/TWI641439B/zh
Publication of WO2018008073A1 publication Critical patent/WO2018008073A1/fr

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
    • H01S3/102—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling the active medium, e.g. by controlling the processes or apparatus for excitation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/02—Optical fibres with cladding with or without a coating
    • G02B6/036—Optical fibres with cladding with or without a coating core or cladding comprising multiple layers
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating

Definitions

  • the present invention relates to a laser device and a laser processing machine that generate laser light.
  • the laser processing machine uses a laser device that generates laser light irradiated from a processing head onto a processing target (see Patent Document 1).
  • the laser device disclosed in Patent Document 1 includes a laser medium, a light source that generates excitation light, an excitation optical system, a high reflection mirror, and an output mirror.
  • the laser device disclosed in Patent Document 1 uses a fiber-coupled semiconductor laser as a light source, and makes the laser medium optically incident on the laser medium through the pumping optical system with the pumping light emitted from the optical fiber. Excited to.
  • the intensity distribution of the excitation light incident on the laser medium from the excitation optical system of the laser device disclosed in Patent Document 1 is a top hat shape in which the intensity at the center including the optical axis is constant, or the intensity is a Gaussian distribution. Gaussian shape.
  • the laser medium when excitation light is incident on the laser medium, the laser medium absorbs the excitation light and generates heat.
  • the temperature at the center of the cross section passing through the optical axis of the excitation light of the laser medium and parallel to the optical axis is higher than the peripheral edge of the optical axis.
  • the refractive index of a laser medium is proportional to temperature.
  • the refractive index when a temperature gradient occurs in a cross section passing through the optical axis of the laser medium and parallel to the optical axis, the refractive index also has a gradient, and optically functions as a lens.
  • the function of the laser medium as a lens due to a temperature gradient is called a thermal lens.
  • the curvature of the high reflection mirror, the curvature of the output mirror, the distance between the laser medium and the high reflection mirror, and the distance between the laser medium and the output mirror are constant.
  • the stable operating range is determined by the action of the thermal lens of the laser medium.
  • the laser device disclosed in Patent Document 1 can weaken the action of the thermal lens of the laser medium, the output of the excitation light can be increased, and high-power laser oscillation can be achieved.
  • the laser apparatus disclosed in Patent Document 1 can weaken the action of the thermal lens of the laser medium by increasing the beam diameter of the excitation light.
  • the beam diameter of the excitation light is increased with respect to the oscillation light reciprocating between the high reflection mirror and the output mirror, the beam quality of the oscillation light is degraded.
  • the laser apparatus disclosed in Patent Document 1 has a problem that it is difficult to obtain high-power oscillation light without degrading the beam quality.
  • the present invention has been made in view of the above, and an object of the present invention is to obtain a laser device capable of obtaining high-power oscillation light without deteriorating beam quality.
  • the present invention provides a light source that emits laser light that is excitation light, a laser medium that receives laser light emitted from the light source, and laser light that is emitted from the light source. And a pumping optical system that makes the laser beam incident on the laser medium.
  • the excitation optical system distributes the intensity distribution of the laser beam at the end face where the laser beam of the laser medium is incident, over the entire circumference in the circumferential direction around the optical axis of the laser beam, than the intensity of the laser beam on the optical axis.
  • An intensity forming member that forms a strong intensity distribution in the outer peripheral direction of the optical axis is provided.
  • the laser apparatus according to the present invention has an effect that high-power oscillation light can be obtained without degrading the beam quality.
  • the figure which shows the structure of the light source and excitation optical system of the laser apparatus shown by FIG. The figure which shows the excitation optical system and laser beam which were shown by FIG.
  • the top view which shows intensity distribution of the laser beam which injects into the end surface of the laser medium of the laser apparatus shown by FIG. The figure which shows the intensity distribution of the laser beam along the VV line in FIG.
  • the top view which shows intensity distribution of the laser beam in the end surface into which the laser beam which is excitation light of a comparative example injects The figure which shows the intensity distribution of the laser beam along the IX-IX line in FIG.
  • FIG. 1 The figure which shows the excitation optical system and laser beam which were shown by FIG.
  • FIG. 6 The figure which shows the hardware constitutions of the control apparatus of the laser beam machine which concerns on Embodiment 6.
  • FIG. 6 The figure which shows the
  • FIG. 1 is a diagram illustrating a configuration of a laser apparatus according to the first embodiment.
  • FIG. 2 is a diagram showing a configuration of a light source and an excitation optical system of the laser apparatus shown in FIG.
  • FIG. 3 is a diagram showing the excitation optical system and laser light shown in FIG.
  • a laser apparatus 1 shown in FIG. 1 constitutes a laser processing machine 100 that irradiates a laser beam Lb on a processing object and laser-processes the processing object.
  • the laser device 1 is a laser resonator of the laser processing machine 100, but may be a laser amplifier.
  • the laser device 1 includes a light source 2 that emits laser light La that is excitation light, a laser medium 3 that receives laser light La that is excitation light emitted from the light source 2, and a light source 2. And an excitation optical system 4 that causes the laser beam La, which is the emitted excitation light, to enter the laser medium 3.
  • the light source 2 includes one or more semiconductor lasers that emit laser light La. In the first embodiment, two light sources 2 are provided.
  • the laser medium 3 is a solid-state laser medium in which a rare earth element or titanium is added to laser crystal, glass, or ceramics.
  • the laser crystal constituting the laser medium 3 is YAG (Yttrium Aluminum Garnet), YVO 4 (Yttrium Vanadate), GdVO 4 (Gadolinium Vanadate), sapphire (Al 2 O 3 ), KGW (potassium gadolinium tungsten), or KYW (potassium). Yttrium tungsten).
  • the rare earth element is Nd (neodymium), Yb (ytterbium), Er (erbium), Ho (holmium), Tm (thulium), or Pr (praseodymium).
  • the laser light La emitted from one light source 2a is incident on one end face 3a of the laser medium 3 via one excitation light coupling mirror 5a.
  • the laser beam La emitted from the other light source 2b is incident on the other end surface 3b located behind the one end surface 3a of the laser medium 3 via the other excitation light coupling mirror 5b.
  • One end surface 3a and the other end surface 3b are parallel to each other.
  • One excitation light coupling mirror 5a is arranged between one light source 2a and one end face 3a and spaced from the high reflection mirror 6.
  • the other excitation light coupling mirror 5b is disposed between the other light source 2b and the other end surface 3b and at a distance from the output mirror 7.
  • the laser medium 3 absorbs laser light La that is excitation light incident from one end face 3a and the other end face 3b, and passes laser light Lb that is oscillation light through one end face 3a (or the other end face 3b). Then, it is emitted toward one excitation light coupling mirror 5a (or the other excitation light coupling mirror 5b).
  • the laser light Lb which is oscillation light emitted toward one excitation light coupling mirror 5a, is reflected toward the high reflection mirror 6 by one excitation light coupling mirror 5a, and one excitation light coupling is performed by the high reflection mirror 6. Reflected toward the mirror 5a.
  • the laser light Lb which is the oscillation light emitted toward the other excitation light coupling mirror 5b, is reflected toward the output mirror 7 by the other excitation light coupling mirror 5b, and a part of the other excitation light is reflected by the output mirror 7. Reflected toward the coupling mirror 5b.
  • the laser medium 3 amplifies the laser light Lb that is oscillation light while reciprocating between the high reflection mirror 6 and the output mirror 7, and emits part of the laser light Lb that is oscillation light through the output mirror 7.
  • the laser device 1 is configured such that the laser light La is incident on both the one end surface 3a and the other end surface 3b of the laser medium 3.
  • the laser device 1 is a laser medium.
  • the laser beam La may be incident on one of the one end surface 3a and the other end surface 3b.
  • the wavelength of the laser beam Lb, which is the oscillation light emitted from the laser medium 3 composed of YVO 4 to which Nd is added, is 1064 nm (nanometers), and the wavelength of the laser beam La, which is the excitation light, is 808 nm, It is 879 nm or 888 nm.
  • two excitation optical systems 4 are provided.
  • One excitation optical system 4a is disposed between one light source 2a and one excitation light coupling mirror 5a
  • the other excitation optical system 4b is disposed between the other light source 2b and the other excitation light coupling mirror 5b.
  • the present specification will be described by taking one pumping optical system 4a as a representative, and the other pumping optical system 4b will be referred to as one pumping optical system.
  • 4a is indicated by the same reference numerals as the constituent parts.
  • one excitation optical system 4 a receives an optical fiber 41 in which the laser beam La emitted from the light source 2 enters one end 41 a and a laser beam La emitted from the optical fiber 41 enters.
  • a collimator lens 42 and a condenser lens 43 that condenses the laser beam La emitted from the collimator lens 42 are provided.
  • the optical fiber 41 has a cylindrical core that transmits the laser light La.
  • the optical fiber 41 transmits the laser beam La incident from one end 41a to the other end 41b, and emits the laser beam La toward the collimating lens 42 from the other end 41b.
  • the optical fiber 41 is configured by a multimode optical fiber or a single mode optical fiber. When the optical fiber 41 is composed of a multimode optical fiber, the core is a graded index type, a multi-step index type, or a step index type.
  • the collimating lens 42 converts the laser light La incident from the optical fiber 41 into parallel light and emits it toward the condenser lens 43.
  • the condensing lens 43 condenses the laser light La, which is parallel light incident from the collimating lens 42, and emits the laser light La toward one end face 3a of the laser medium 3 through one excitation light coupling mirror 5a.
  • the collimating lens 42 and the condenser lens 43 are spherical lenses having aberration.
  • the collimating lens 42 converts the laser light La incident from the optical fiber 41 into parallel light, but does not need to be parallel light.
  • the excitation optical system 4 includes two spherical lenses. However, in the present invention, the excitation optical system 4 may include one or more spherical lenses.
  • the spherical lenses used as the collimating lens 42 and the condenser lens 43 have an emission NA (Numerical Aperture) of 0.15 or more and a focal length of 100 nm or less. It is not limited to these.
  • the excitation optical system 4 transfers the other end 41b of the optical fiber 41 to the transfer point CP by the collimator lens 42 and the condenser lens 43 as shown in FIG.
  • the laser light La is emitted from the other end 41b of the optical fiber 41, passes through the collimating lens 42, the condenser lens 43, and the excitation light coupling mirror 5a, and passes through one end face 3a on which the laser light La of the laser medium 3 is incident.
  • a transfer point CP is formed. It does not matter whether the other end surface 3b is upstream or downstream of the transfer point CP.
  • One excitation optical system 4 a causes laser light La closer to the light source 2 than the transfer point CP, that is, upstream of the transfer point CP to enter one end surface 3 a of the laser medium 3.
  • the transfer point CP is a point where the spot shape of the laser light La emitted from the condenser lens 43 is the same as the spot shape of the laser light La emitted from the other end 41b of the optical fiber 41.
  • the excitation optical system 4 converts the beam diameter of the laser light La into a beam diameter suitable for laser oscillation.
  • the beam diameter of the laser beam La which is excitation light can be defined by D4 ⁇ defined by ISO (International Organization for Standardization).
  • FIG. 4 is a plan view showing the intensity distribution of the laser light incident on the end face of the laser medium of the laser apparatus shown in FIG.
  • FIG. 5 is a diagram showing the intensity distribution of the laser beam along the line VV in FIG.
  • the collimating lens 42 and the condenser lens 43 are spherical lenses.
  • the excitation optical system 4 is disposed at a position where the laser light La closer to the light source 2 than the transfer point CP, that is, upstream of the transfer point CP is incident on the end faces 3 a and 3 b of the laser medium 3.
  • the collimating lens 42 and the condensing lens 43 of the excitation optical system 4 indicate the intensity distribution Da of the laser light La on the end faces 3a and 3b, as shown in FIGS. 4 and 5, and the optical axis P of the laser light La.
  • the intensity Dab on the outer peripheral side of the optical axis P is formed in an intensity distribution that is stronger than the intensity Daa of the laser light La on the optical axis P over the entire circumference in the circumferential direction. That is, the collimating lens 42 and the condenser lens 43 of the excitation optical system 4 center the intensity distribution Da of the laser light La on the end faces 3a and 3b around the optical axis P of the laser light La as shown in FIGS.
  • An intensity distribution stronger than the intensity Daa of the laser beam La on the optical axis P is formed in the outer peripheral direction of the optical axis P over the entire circumference in the circumferential direction.
  • the collimating lens 42 and the condensing lens 43 are strength forming members that form the intensity distribution Da of the laser light La on the end faces 3a and 3b as shown in FIGS.
  • the intensity distribution Da of the laser light La on the end faces 3a and 3b is formed in an axisymmetric shape with respect to the optical axis P over the entire circumference.
  • the optical axis P indicates the optical axis P of the laser light La emitted from the light source 2.
  • the planar shape of the intensity distribution Da of the laser beam La on the end faces 3a and 3b on which the laser beam La of the laser medium 3 is incident is centered on the optical axis P as shown in FIGS. It is formed in a circular shape. Further, the maximum intensity position Dac having the highest intensity in the intensity distribution Da of the laser beam La is formed in a circle centered on the optical axis P as shown in FIG. 5 indicates the distance from the optical axis P with the optical axis P as the origin, and the vertical axis indicates the intensity of the laser light La.
  • the intensity distribution Da of the laser light La which is excitation light on the end faces 3a and 3b on which the laser light La of the laser medium 3 is incident, has an optical axis greater than the intensity Daa on the optical axis P.
  • a collimating lens 42 and a condensing lens 43 that form an intensity distribution in which the intensity Dab on the outer peripheral side of P is strong are provided.
  • the laser apparatus 1 according to the first embodiment is configured so that the laser beam La having the same output and the same beam diameter as that of the comparative example having the top hat shape or the Gaussian shape is incident on the laser medium 3.
  • the temperature of the central portion including the optical axis P of the medium 3 can be suppressed as compared with the comparative example, and the temperature gradient in the cross section orthogonal to the optical axis P of the laser light La of the laser medium 3 can be suppressed.
  • the laser apparatus 1 according to Embodiment 1 can suppress the thermal lens of the laser medium 3 more than the comparative example.
  • the laser device 1 is stable due to the curvature of the high reflection mirror 6, the curvature of the output mirror 7, the distance between the high reflection mirror 6 and the laser medium 3, and the distance between the output mirror 7 and the laser medium 3.
  • the upper limit of the strength of action of the thermal lens of the laser medium 3 that can operate is determined.
  • the intensity distribution Da of the laser light La that is excitation light on the end faces 3a and 3b on which the laser light La of the laser medium 3 is incident is more optical than the intensity Daa on the optical axis P. Since the intensity Dab on the outer peripheral side of P is a strong intensity distribution, the action of the thermal lens of the laser medium 3 can be suppressed.
  • the laser apparatus 1 can increase the output of the laser beam La up to the upper limit of the strength of the action of the thermal lens of the laser medium 3 that can operate stably. As a result, the laser device 1 can obtain the laser light Lb that is high-power oscillation light.
  • the end faces 3a and 3b of the laser medium 3 are distorted.
  • the beam quality of the laser beams La and Lb passing through the end faces 3a and 3b is deteriorated.
  • the intensity distribution Da of the laser light La that is excitation light on the end faces 3a and 3b on which the laser light La of the laser medium 3 is incident is more optical than the intensity Daa on the optical axis P. Since the intensity Dab on the outer peripheral side of P is a strong intensity distribution, the heat generation density in the central portion including the optical axis P of the end faces 3a and 3b of the laser medium 3 can be suppressed as compared with the comparative example.
  • the intensity distribution Da of the laser light La that is the excitation light on the end faces 3a and 3b on which the laser light La of the laser medium 3 is incident has the intensity Daa on the optical axis P.
  • the intensity Dab on the outer peripheral side of the optical axis P has a stronger intensity distribution, the distortion of the end faces 3a and 3b can be suppressed, and the laser beam Lb with high beam quality can be obtained.
  • the laser apparatus 1 according to the first embodiment can obtain the high-power laser beam Lb without degrading the beam quality.
  • the intensity distribution Da of the laser light La that is excitation light on the end faces 3a and 3b on which the laser light La of the laser medium 3 is incident has an axisymmetric shape with respect to the optical axis P. Therefore, the axially symmetric laser beam Lb can be easily obtained, and the processing quality using the laser beam Lb can be improved.
  • the laser device 1 makes the laser light La incident on the end surfaces 3a and 3b of the laser medium 3 closer to the light source 2 than the transfer point CP, that is, upstream from the transfer point CP.
  • the intensity distribution Da of the laser beam La which is excitation light at the end faces 3a and 3b on which the laser beam La of the laser medium 3 is incident, has an axisymmetric shape with respect to the optical axis P and has an optical axis P greater than the intensity Daa on the optical axis P
  • An intensity distribution with a strong intensity Dab on the outer peripheral side can be obtained.
  • the laser apparatus 1 according to the first embodiment can obtain the high-power laser beam Lb without degrading the beam quality.
  • the collimating lens 42 and the condenser lens 43 of the excitation optical system 4 are spherical lenses, the cost can be reduced.
  • FIG. 6 is a plan view showing the intensity distribution of the laser beam on the end face on which the laser beam that is the excitation light of the product of the present invention is incident.
  • FIG. 7 is a diagram showing the intensity distribution of the laser beam along the line VII-VII in FIG.
  • FIG. 8 is a plan view showing the intensity distribution of the laser light on the end face on which the laser light that is the excitation light of the comparative example is incident.
  • FIG. 9 is a diagram showing the intensity distribution of the laser beam along the line IX-IX in FIG.
  • FIG. 10 is a diagram showing the temperature distribution at the end faces of the product of the present invention and the comparative example
  • FIG. 11 is a diagram showing the output of laser light of the product of the present invention and the comparative example.
  • the product of the present invention is the laser device 1 according to the first embodiment.
  • the collimating lens 42 and the condensing lens 43 of the laser device 1 according to the first embodiment are aspherical lenses in which aberrations are suppressed more than spherical lenses.
  • the intensity distributions Dai and Dae shown in FIG. 6 and FIG. 8 portions with high intensity are shown in dark black, and portions with low intensity are shown in light black. The part where the intensity is zero is shown in white.
  • the horizontal axis indicates the distance from the optical axis P with the optical axis P as the origin, and the vertical axis indicates the intensity of the laser light La.
  • the horizontal axis indicates the distance from the optical axis P with the optical axis P as the origin, and the vertical axis indicates the temperature.
  • the intensity distribution Dai of the laser beam La of the present invention is an intensity distribution Da in which the intensity Dab on the outer peripheral side of the optical axis P is stronger than the intensity Daa on the optical axis P.
  • the intensity distribution Dae of the laser beam La of the comparative example has a top hat shape in which the intensity of the central portion including the optical axis P is constant.
  • the collimating lens 42 and the condensing lens 43 which are intensity forming members, are spherical lenses, so that the intensity distribution Da of the laser light La is greater on the outer periphery of the optical axis P than the intensity Daa on the optical axis P. It was revealed that the side intensity Dab can be formed in a strong intensity distribution. Further, according to the result shown in FIG. 10, the intensity distribution Da of the laser beam La is formed into an intensity distribution in which the intensity Dab on the outer peripheral side of the optical axis P is stronger than the intensity Daa on the optical axis P as in the present invention product. This means that the temperature of the central portion including the optical axis P of the laser medium 3 can be suppressed more than that of the comparative example, and the temperature gradient in the cross section perpendicular to the optical axis P can be suppressed. It became.
  • the horizontal axis in FIG. 11 indicates the output of the laser light La, which is excitation light, in arbitrary units
  • the vertical axis in FIG. 11 indicates the output of the laser light Lb, which is oscillation light, in arbitrary units.
  • the output of the laser beam La in which the output of the laser beam Lb in the comparative example is saturated is 0.82, whereas the output of the laser beam Lb in the present invention is saturated.
  • the output of is 1.
  • the maximum value of the output of the laser beam Lb in the comparative example is about 0.66, whereas the maximum value of the output of the laser beam Lb in the present invention is 1.
  • the product of the present invention can increase the output of the laser beam La in which the output of the laser beam Lb is saturated as compared with the comparative example. It became clear that Lb can be obtained.
  • the M 2 (em square) value indicating the beam quality of the laser beam Lb of the present invention is 1.8, whereas the M 2 value indicating the beam quality of the laser beam of the comparative example is 2.2. there were.
  • the M 2 value is a value larger than 1, and the closer to 1, the better the beam quality. Therefore, it is apparent that the laser apparatus 1 can obtain the high-power laser beam Lb without degrading the beam quality by using the spherical lenses as the collimating lens 42 and the condensing lens 43 that are the strength forming members. became.
  • FIG. 12 is a diagram illustrating a configuration of a laser apparatus according to the second embodiment.
  • the same parts as those in the first embodiment are denoted by the same reference numerals, and description thereof is omitted.
  • the laser apparatus 1-2 includes a Q switch 8 for emitting the laser beam Lb in a pulse shape, an aperture 9 for limiting the mode of the laser beam Lb, and a laser beam.
  • the configuration is the same as that of the first embodiment except that the wavelength conversion element 10 that converts the wavelength of Lb is provided.
  • the Q switch 8 is a switch element for emitting the laser beam Lb in a pulse shape.
  • the Q switch 8 is disposed between the other excitation light coupling mirror 5b and the output mirror 7.
  • the position of the Q switch 8 is not limited to this.
  • the aperture 9 is disposed between the other excitation light coupling mirror 5b and the output mirror 7.
  • the position of the aperture 9 is not limited to this.
  • the wavelength conversion element 10 converts the wavelength of the laser light Lb emitted from the output mirror 7.
  • the wavelength conversion element 10 converts the wavelength of the laser light Lb emitted from the output mirror 7 to 355 nm, but the wavelength of the laser light Lb after the conversion by the wavelength conversion element 10 is not limited to 355 nm. .
  • the laser apparatus 1-2 according to the second embodiment uses the intensity distribution Da of the laser light La, which is the excitation light, on the end faces 3a and 3b on which the laser light La of the laser medium 3 is incident.
  • a collimating lens 42 and a condensing lens 43 are provided to form an intensity distribution in which the intensity Dab on the outer peripheral side of the optical axis P is stronger than the intensity Daa on the axis P. For this reason, the laser apparatus 1-2 according to the second embodiment can obtain the high-power laser beam Lb without degrading the beam quality, as in the first embodiment.
  • the laser device 1-2 according to the second embodiment includes the Q switch 8, a high-power pulsed laser beam Lb can be obtained and high-quality processing can be performed.
  • the laser device 1-2 according to the second embodiment includes the aperture 9, the convergence is generated by the higher-order oscillation mode laser light of the laser light Lb and the aberration of the action of the thermal lens. Since it is possible to remove laser light with poor properties, it becomes easier to obtain laser light Lb with higher beam quality.
  • the aperture 9 is disposed between the high reflection mirror 6 and the output mirror 7, it is possible to suppress a decrease in output of the laser light Lb due to the arrangement of the aperture 9. it can.
  • the wavelength conversion element 10 converts the wavelength of the laser light Lb emitted from the output mirror 7 to 355 nm, high-quality UV light with high beam quality is used. High-quality and high-speed processing becomes possible.
  • FIG. 13 is a diagram illustrating the configuration of the light source and the excitation optical system of the laser apparatus according to the third embodiment.
  • FIG. 14 is a cross-sectional view of the optical fiber taken along line XIII-XIII in FIG.
  • FIG. 15 is a diagram showing the refractive index of the optical fiber along the line XIV-XIV in FIG.
  • FIG. 16 is a diagram showing the excitation optical system and laser light shown in FIG.
  • FIG. 17 is a plan view showing the intensity distribution of the laser beam emitted from the other end of the optical fiber of the laser apparatus shown in FIG.
  • FIG. 14 is a cross-sectional view of the optical fiber taken along line XIII-XIII in FIG.
  • FIG. 15 is a diagram showing the refractive index of the optical fiber along the line XIV-XIV in FIG.
  • FIG. 16 is a diagram showing the excitation optical system and laser light shown in FIG.
  • FIG. 17 is a plan view showing the intensity distribution of the laser beam emitted from
  • FIG. 18 is a diagram showing the intensity distribution of the laser light along the line XVII-XVII in FIG.
  • FIG. 19 is a plan view showing the intensity distribution of laser light incident on the end face of the laser medium of the laser device according to the third embodiment.
  • FIG. 20 is a diagram showing the intensity distribution of the laser beam along the XIX-XIX line in FIG. 13 to 20, the same parts as those of the first embodiment are denoted by the same reference numerals and the description thereof is omitted.
  • the intensity distributions Db and Da-3 shown in FIG. 17 and FIG. 19 a portion with high intensity is shown in dark black, and a portion with low intensity is shown in white.
  • the horizontal axis indicates the distance from the optical axis P with the optical axis P as the origin, and the vertical axis indicates the intensity of the laser light La.
  • the core 41c of the optical fiber 41-3 shown in FIG. 13 has the light of the laser light La emitted from the light source 2 as shown in FIG. It is formed in a cylindrical shape arranged at a position that is coaxial with the axis P.
  • the refractive index of the optical fiber 41-3 has a portion with the highest refractive index on the outer peripheral side of the optical axis P as shown in FIG.
  • the horizontal axis in FIG. 15 indicates the distance from the optical axis P with the optical axis P as the origin, and the vertical axis in FIG. 15 indicates the refractive index.
  • the collimating lens 42-3 and the condensing lens 43-3 shown in FIG. 16 of the excitation optical system 4-3 are aspherical lenses in which aberrations are suppressed more than spherical lenses. It is.
  • the laser apparatus 1 according to the third embodiment has the same configuration as that of the first embodiment except that the core 41c is formed in a cylindrical shape and the collimating lens 42-3 and the condenser lens 43-3 are aspherical lenses.
  • the laser apparatus 1 includes the collimating lens 42-3 and the condensing lens 43-3 in which the excitation optical system 4-3 is an aspherical lens.
  • the excitation optical system 4-3 emits the laser light La closer to the light source 2 than the transfer point CP, that is, upstream from the transfer point CP.
  • the laser medium 3 is disposed at a position where it is incident on the end faces 3a and 3b.
  • the core 41c of the optical fiber 41-3 is formed in a cylindrical shape, so that the intensity distribution Db of the laser light La at the other end 41b of the optical fiber 41-3 is shown in FIG. And as shown in FIG. 18, intensity
  • the excitation optical system 4-3 makes laser light La closer to the light source 2 than the transfer point CP, that is, upstream from the transfer point CP, to the end faces 3a and 3b of the laser medium 3.
  • the intensity distribution Da-3 of the laser beam La on the end faces 3a and 3b on which the laser beam La of the laser medium 3 enters is arranged on the optical axis P.
  • the intensity Daa is stronger than zero, and the intensity Dab on the outer peripheral side of the optical axis P is stronger than the intensity Daa on the optical axis P.
  • the optical fiber 41-3 having the cylindrical core 41c of the laser device 1 according to the third embodiment has the laser beam La on the end faces 3a and 3b on which the laser beam La of the laser medium 3 is incident.
  • the intensity distribution Da-3 has an intensity Dab on the outer peripheral side of the optical axis P with respect to the intensity Daa of the laser light La on the optical axis P over the entire circumference in the circumferential direction centering on the optical axis P of the laser light La. It is a strength forming member formed in a strong strength distribution.
  • the laser device 1 according to the third embodiment uses the intensity distribution Da-3 of the laser light La that is excitation light at the end faces 3a and 3b on which the laser light La of the laser medium 3 is incident,
  • the optical fiber 41-3 is formed so as to have an intensity distribution in which the intensity Dab on the outer peripheral side of the optical axis P is stronger than the intensity Daa on the axis P. For this reason, the laser apparatus 1 according to the third embodiment can obtain the high-power laser beam Lb without degrading the beam quality, as in the first embodiment.
  • FIG. 21 is a diagram illustrating a configuration of a light source and an excitation optical system of a laser device according to the fourth embodiment.
  • the same parts as those of the first embodiment are denoted by the same reference numerals, and the description thereof is omitted.
  • the collimating lens 42-4 and the condenser lens 43-4 of the excitation optical system 4-4 are aspherical lenses in which aberrations are suppressed more than spherical lenses, and an intensity forming member
  • the configuration is the same as that of the first embodiment except that the axicon lens 44-4 is provided.
  • the laser apparatus 1 includes the collimating lens 42-4 and the condensing lens 43-4 in which the excitation optical system 4-4 is an aspherical lens.
  • a combined lens that has a smaller aberration than that of the spherical lens and includes a plurality of lenses may be provided.
  • the axicon lens 44-4 is disposed between the collimating lens 42-4 and the condenser lens 43-4.
  • the axicon lens 44-4 according to Embodiment 4 is a concave axicon lens having a recess 44-4a, and a flat flat surface 44-4b faces the collimator lens 42-4, and the recess 44-4a It faces the condenser lens 43-4.
  • the axicon lens 44-4 emits the laser light La incident from the collimating lens 42-4 from the inner surface of the recess 44-4a toward the outer edge of the condenser lens 43-4.
  • the axicon lens 44-4 has an intensity distribution Da of the laser beam La on the end faces 3a and 3b on which the laser beam La of the laser medium 3 is incident, the outer circumference of the optical axis P more than the intensity Daa on the optical axis P.
  • the intensity Dab on the side is formed in a strong intensity distribution.
  • the laser device 1 according to the fourth embodiment uses the optical axis P to indicate the intensity distribution Da of the laser light La that is excitation light on the end faces 3a and 3b on which the laser light La of the laser medium 3 is incident.
  • An axicon lens 44-4 is provided which forms an intensity distribution in which the intensity Dab on the outer peripheral side of the optical axis P is stronger than the upper intensity Daa. For this reason, the laser device 1 according to the fourth embodiment can obtain the high-power laser beam Lb without degrading the beam quality, as in the first embodiment.
  • FIG. 22 is a diagram showing the configuration of the light source and the excitation optical system of the laser apparatus according to the fifth embodiment.
  • the same parts as those in the first embodiment are denoted by the same reference numerals, and the description thereof is omitted.
  • the collimating lens 42-5 and the condensing lens 43-5 of the excitation optical system 4-5 are aspherical lenses in which aberrations are suppressed more than spherical lenses, and an intensity forming member
  • the configuration is the same as that of the first embodiment except that the axicon lens 44-5 is provided.
  • the laser apparatus 1 includes the collimating lens 42-5 and the condenser lens 43-5 in which the excitation optical system 4-5 is an aspherical lens.
  • a combined lens constituted by a plurality of lenses, the aberration of which is suppressed more than that of a spherical lens may be provided.
  • the axicon lens 44-5 is disposed between the collimating lens 42-5 and the condenser lens 43-5.
  • the axicon lens 44-5 according to the fifth embodiment is a convex axicon lens having a convex portion 44-5a, and a flat flat surface 44-5b faces the collimator lens 42-5, and the convex portion 44 is provided.
  • ⁇ 5a faces the condenser lens 43-5.
  • the axicon lens 44-5 emits the laser light La incident from the collimator lens 42-5 from the surface of the convex portion 44-5a toward the outer edge of the condenser lens 43-5.
  • the axicon lens 44-5 has an intensity distribution Da of the laser beam La on the end faces 3a and 3b on which the laser beam La of the laser medium 3 is incident, and the outer circumference of the optical axis P is higher than the intensity Daa on the optical axis P.
  • the intensity Dab on the side is formed in a strong intensity distribution.
  • the laser device 1 according to the fifth embodiment uses the optical axis P to indicate the intensity distribution Da of the laser light La that is excitation light on the end faces 3a and 3b on which the laser light La of the laser medium 3 is incident.
  • An axicon lens 44-5 is provided which forms an intensity distribution in which the intensity Dab on the outer peripheral side of the optical axis P is stronger than the upper intensity Daa. For this reason, the laser device 1 according to the fifth embodiment can obtain the high-power laser beam Lb without degrading the beam quality, as in the first embodiment.
  • FIG. 23 is a diagram illustrating a configuration of a laser beam machine according to the sixth embodiment.
  • the same parts as those in the first to fifth embodiments are denoted by the same reference numerals and description thereof is omitted.
  • the laser beam machine 100 includes either one of the laser devices 1 and 1-2 according to the first to fifth embodiments and a workpiece that supports the workpiece W.
  • the object support part 300 is provided.
  • the laser processing machine 100 includes a processing head 200 that irradiates a processing target W with a laser beam Lb that is oscillation light emitted from one of the laser devices 1 and 1-2, and the processing head 200 and the processing target.
  • a relative movement unit 400 that relatively moves the support unit 300 and a control device 500 that controls operations of the relative movement unit 400 and the laser devices 1 and 1-2 are provided.
  • the processing object support unit 300 supports the processing object W on which the processing object W is placed.
  • the workpiece W is a flexible printed circuit board (FPC: Flexible Printed Circuits) or a multilayer circuit board in which a printed wiring board (PCB: Printed Circuit Board) is multilayered, but is not limited thereto.
  • the flexible printed board and the printed wiring board are made of resin and copper. For this reason, it is preferable that the wavelength of the laser beam Lb emitted from the laser beam machine 100 according to Embodiment 6 is in the ultraviolet region that is absorbed by both the resin and copper.
  • the machining head 200 includes a beam adjustment optical system 201, a light guide mirror 202, a condenser lens 203, and a casing 204 that houses the beam adjustment optical system 201, the light guide mirror 202, and the condenser lens 203.
  • the processing head 200 adjusts the laser beam Lb emitted from the laser apparatus 1 to a desired beam diameter and intensity distribution set in advance by the beam adjustment optical system 201.
  • the processing head 200 guides the laser beam Lb, the beam diameter and intensity distribution of which have been adjusted by the beam adjustment optical system 201, by the light guide mirror 202, and condenses the laser beam Lb on the workpiece W by the condenser lens 203.
  • the relative movement unit 400 relatively moves the laser beam Lb irradiated by the machining head 200 and the workpiece support unit 300 along at least one of the X direction and the Y direction.
  • the relative movement unit 400 moves the workpiece support unit 300 along at least one of the X direction and the Y direction, but moves the machining head 200 along both the X direction and the Y direction. It may be moved, and both the machining head 200 and the workpiece support 300 may be moved along at least one of the X direction and the Y direction.
  • the relative moving unit 400 includes a motor, a lead screw that moves the workpiece support 300 by the rotational driving force of the motor, and a linear guide that guides the moving direction of the workpiece support 300.
  • the structure of the relative movement part 400 is not limited to the structure by a motor, a lead screw, and a linear guide.
  • the relative movement unit 400 is controlled by the control device 500.
  • the relative movement unit 400 may include a galvano mirror or a polygon mirror, and may scan the laser light Lb with the galvano mirror or the polygon mirror.
  • the condenser lens 203 is composed of an F ⁇ lens.
  • the laser beam machine 100 irradiates the laser beam Lb from the machining head 200 while moving the workpiece support unit 300 by the relative movement unit 400 and causes the laser beam Lb to be irradiated on the workpiece W. Scan.
  • the laser processing machine 100 forms a minute processing hole Wa at a predetermined desired position of the processing target W.
  • the processing hole Wa is a blind hole or a through hole.
  • the size of the processing hole Wa can be set as appropriate.
  • the laser beam machine 100 according to the sixth embodiment includes any one of the laser devices 1 and 1-2 according to the first to fifth embodiments, a high-power laser beam is obtained without degrading the beam quality. Lb can be obtained. Further, since the laser beam machine 100 according to the sixth embodiment includes any one of the laser devices 1 and 1-2 according to the first to fifth embodiments, the laser beam Lb having high output and high beam quality. Thus, the workpiece W can be machined, and the workpiece W can be machined at high speed and with high quality.
  • FIG. 24 is a diagram illustrating a hardware configuration of a control device for a laser beam machine according to the sixth embodiment.
  • the control device 500 of the laser beam machine 100 according to the sixth embodiment is a computer that executes a computer program on an OS (Operating System) 501 and includes an input device 502, a display device 503, and the like as shown in FIG.
  • the CPU 505, RAM 506, ROM 507, storage device 504, input device 502, display device 503, and communication interface 508 are connected via a bus B.
  • the function of the control device 500 is realized by the CPU 505 executing programs stored in the ROM 507 and the storage device 504 while using the RAM 506 as a work area.
  • the program is realized by software, firmware, or a combination of software and firmware.
  • the storage device 504 is an SSD (Solid State Drive) or HDD (Hard Disk Drive), but the storage device 504 is not limited to an SSD or HDD.
  • Display device 503 displays characters and images.
  • the display device 503 is exemplified by a liquid crystal display device.
  • the input device 502 is configured by a touch panel, a keyboard, a mouse, a trackball, or a combination thereof.
  • the communication interface 508 communicates with the laser devices 1 and 1-2 and the relative movement unit 400.
  • the configuration described in the above embodiment shows an example of the contents of the present invention, and can be combined with another known technique, and can be combined with other configurations without departing from the gist of the present invention. It is also possible to omit or change the part.

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  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Lasers (AREA)
  • Laser Beam Processing (AREA)

Abstract

Un appareil laser (1) comporte : une source de lumière (2) qui émet un faisceau laser (La) qui est une lumière d'excitation; un support laser (3) sur lequel le faisceau laser (La) émis par la source de lumière (2) est incidente; et un système optique de lumière d'excitation (4) qui amène le faisceau laser (la) émis à partir de la source de lumière (2) incidente sur le support laser (3). Le système optique de lumière d'excitation (4) est pourvu d'une lentille de collimation et d'une lentille de condenseur qui forment La distribution d'intensité du faisceau laser (La) sur les surfaces d'extrémité (3a, 3b) du support laser (3) sur lequel le faisceau laser (La) est rendue incidente, La distribution d'intensité étant supérieure à l'intensité du faisceau laser (La) sur un axe optique, dans la direction périphérique externe de l'axe optique sur toute la périphérie dans la direction périphérique autour de l'axe optique du faisceau laser (La) La lentille de collimation et la lentille de condenseur sont des lentilles sphériques.
PCT/JP2016/069823 2016-07-04 2016-07-04 Appareil laser et machine de traitement laser WO2018008073A1 (fr)

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JP2016574481A JP6104489B1 (ja) 2016-07-04 2016-07-04 レーザ装置及びレーザ加工機
PCT/JP2016/069823 WO2018008073A1 (fr) 2016-07-04 2016-07-04 Appareil laser et machine de traitement laser
KR1020187027014A KR20180108853A (ko) 2016-07-04 2016-07-04 레이저 장치 및 레이저 가공기
CN201680087341.4A CN109478758B (zh) 2016-07-04 2016-07-04 激光装置及激光加工机
TW106115968A TWI641439B (zh) 2016-07-04 2017-05-15 雷射裝置及雷射加工機

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PCT/JP2016/069823 WO2018008073A1 (fr) 2016-07-04 2016-07-04 Appareil laser et machine de traitement laser

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2020088110A (ja) * 2018-11-22 2020-06-04 株式会社アマダホールディングス レーザ発振器及びレーザ加工機
JP2021100092A (ja) * 2019-12-19 2021-07-01 一哲 高橋 レーザ装置

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2021005805A (ja) * 2019-06-26 2021-01-14 パナソニックＩｐマネジメント株式会社 光電センサ、レーザ樹脂溶着における樹脂透過率の測定方法、レーザ樹脂溶着方法、レーザ加工装置
JP7426656B2 (ja) * 2020-03-31 2024-02-02 パナソニックＩｐマネジメント株式会社 焦点距離調整装置及びレーザ加工装置
CN113751862A (zh) * 2020-05-29 2021-12-07 方强 基于两片透镜的变焦对焦激光切割头

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5026556A (fr) * 1973-07-06 1975-03-19
JPS50118734A (fr) * 1974-02-28 1975-09-17
JPS51133041A (en) * 1975-05-14 1976-11-18 Sumitomo Electric Ind Ltd Light transmission fiber
JPH05145148A (ja) * 1991-11-25 1993-06-11 Sony Corp 固体レーザ共振器
JP2009259860A (ja) * 2008-04-11 2009-11-05 Sumitomo Heavy Ind Ltd レーザ加工装置、及び、レーザ加工方法
JP2014161902A (ja) * 2013-02-27 2014-09-08 Mitsubishi Heavy Ind Ltd 加工装置、加工方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8542712B2 (en) * 2009-01-21 2013-09-24 University Of Dundee Photonic devices based on conical refraction
CN103594918B (zh) * 2013-11-04 2016-08-31 华中科技大学 一种输出空心激光光束的方法和装置

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5026556A (fr) * 1973-07-06 1975-03-19
JPS50118734A (fr) * 1974-02-28 1975-09-17
JPS51133041A (en) * 1975-05-14 1976-11-18 Sumitomo Electric Ind Ltd Light transmission fiber
JPH05145148A (ja) * 1991-11-25 1993-06-11 Sony Corp 固体レーザ共振器
JP2009259860A (ja) * 2008-04-11 2009-11-05 Sumitomo Heavy Ind Ltd レーザ加工装置、及び、レーザ加工方法
JP2014161902A (ja) * 2013-02-27 2014-09-08 Mitsubishi Heavy Ind Ltd 加工装置、加工方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2020088110A (ja) * 2018-11-22 2020-06-04 株式会社アマダホールディングス レーザ発振器及びレーザ加工機
JP7186071B2 (ja) 2018-11-22 2022-12-08 株式会社アマダ レーザ発振器及びレーザ加工機
JP2021100092A (ja) * 2019-12-19 2021-07-01 一哲 高橋 レーザ装置

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CN109478758A (zh) 2019-03-15
CN109478758B (zh) 2020-06-02
JPWO2018008073A1 (ja) 2018-07-12
TW201801837A (zh) 2018-01-16
TWI641439B (zh) 2018-11-21
KR20180108853A (ko) 2018-10-04

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