WO2017188114A3 - エンコーダ装置、駆動装置、ステージ装置、及びロボット装置 - Google Patents
エンコーダ装置、駆動装置、ステージ装置、及びロボット装置 Download PDFInfo
- Publication number
- WO2017188114A3 WO2017188114A3 PCT/JP2017/015880 JP2017015880W WO2017188114A3 WO 2017188114 A3 WO2017188114 A3 WO 2017188114A3 JP 2017015880 W JP2017015880 W JP 2017015880W WO 2017188114 A3 WO2017188114 A3 WO 2017188114A3
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- WIPO (PCT)
- Prior art keywords
- encoder
- stage
- robot
- drive
- scale
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
Abstract
【課題】 【解決手段】所定方向に配列されたパターン12を有するスケール11と、パターン12の情報を取得する取得部20と、所定方向とは異なる方向におけるスケール11又は取得部20の一方の移動に対し、スケール11又は取得部20の他方を異なる方向に移動可能に支持する支持部40と、を備える。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201780016417.9A CN108713129B (zh) | 2016-04-25 | 2017-04-20 | 编码器装置、驱动装置、载台装置及机械手装置 |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2016086723A JP6794654B2 (ja) | 2016-04-25 | 2016-04-25 | エンコーダ装置、駆動装置、ステージ装置、及びロボット装置 |
JP2016-086723 | 2016-04-25 |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2017188114A2 WO2017188114A2 (ja) | 2017-11-02 |
WO2017188114A3 true WO2017188114A3 (ja) | 2017-12-21 |
Family
ID=60161405
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2017/015880 WO2017188114A2 (ja) | 2016-04-25 | 2017-04-20 | エンコーダ装置、駆動装置、ステージ装置、及びロボット装置 |
Country Status (3)
Country | Link |
---|---|
JP (1) | JP6794654B2 (ja) |
CN (1) | CN108713129B (ja) |
WO (1) | WO2017188114A2 (ja) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP7098924B2 (ja) * | 2017-12-19 | 2022-07-12 | 株式会社ニコン | エンコーダ装置、駆動装置、ステージ装置、及びロボット装置 |
KR101963893B1 (ko) * | 2018-09-04 | 2019-04-01 | 엘아이지넥스원 주식회사 | 엔코더 자동 정렬장치 및 이의 제어 방법 |
CN112805536A (zh) * | 2018-09-24 | 2021-05-14 | 株式会社尼康 | 编码器、驱动装置、机器人装置、控制系统及其控制方法 |
CN109737912B (zh) * | 2019-03-21 | 2021-04-02 | 博奥生物集团有限公司 | 一种偏心检测方法和偏心检测装置 |
KR102478238B1 (ko) * | 2021-01-22 | 2022-12-19 | 주식회사 푸른기술 | 협동로봇 관절의 엔코더 정렬장치 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003004483A (ja) * | 2001-06-26 | 2003-01-08 | Canon Inc | 回転位置検出装置 |
JP2004104889A (ja) * | 2002-09-09 | 2004-04-02 | Yaskawa Electric Corp | エンコーダの結合装置 |
WO2013146371A1 (ja) * | 2012-03-30 | 2013-10-03 | 株式会社デンソーウェーブ | エンコーダ、エンコーダの取り付け方法、トルク制限機構、駆動装置及びロボット装置 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
SG185261A1 (en) * | 2007-12-11 | 2012-11-29 | Nikon Corp | Movable body apparatus, exposure apparatus and pattern formation apparatus, and device manufacturing method |
CN202260867U (zh) * | 2011-09-23 | 2012-05-30 | 北京动力源科技股份有限公司 | 一种电机主轴和编码器的连接装置 |
JP5374607B2 (ja) * | 2012-03-28 | 2013-12-25 | ファナック株式会社 | オルダム継手とその製造方法及び該オルダム継手による軸の結合方法 |
JP5692147B2 (ja) * | 2012-04-18 | 2015-04-01 | 株式会社安川電機 | 回転電機 |
JP2016003947A (ja) * | 2014-06-17 | 2016-01-12 | 株式会社ニコン | エンコーダ装置、駆動装置、ステージ装置、及びロボット装置 |
JP2016057215A (ja) * | 2014-09-11 | 2016-04-21 | 株式会社ニコン | エンコーダ、駆動装置、及びロボット装置 |
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2016
- 2016-04-25 JP JP2016086723A patent/JP6794654B2/ja active Active
-
2017
- 2017-04-20 WO PCT/JP2017/015880 patent/WO2017188114A2/ja active Application Filing
- 2017-04-20 CN CN201780016417.9A patent/CN108713129B/zh active Active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003004483A (ja) * | 2001-06-26 | 2003-01-08 | Canon Inc | 回転位置検出装置 |
JP2004104889A (ja) * | 2002-09-09 | 2004-04-02 | Yaskawa Electric Corp | エンコーダの結合装置 |
WO2013146371A1 (ja) * | 2012-03-30 | 2013-10-03 | 株式会社デンソーウェーブ | エンコーダ、エンコーダの取り付け方法、トルク制限機構、駆動装置及びロボット装置 |
Also Published As
Publication number | Publication date |
---|---|
JP2017198456A (ja) | 2017-11-02 |
CN108713129A (zh) | 2018-10-26 |
CN108713129B (zh) | 2021-03-12 |
WO2017188114A2 (ja) | 2017-11-02 |
JP6794654B2 (ja) | 2020-12-02 |
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