WO2017187787A1 - オゾンガスの濃縮方法、およびオゾンガスの濃縮装置 - Google Patents

オゾンガスの濃縮方法、およびオゾンガスの濃縮装置 Download PDF

Info

Publication number
WO2017187787A1
WO2017187787A1 PCT/JP2017/008615 JP2017008615W WO2017187787A1 WO 2017187787 A1 WO2017187787 A1 WO 2017187787A1 JP 2017008615 W JP2017008615 W JP 2017008615W WO 2017187787 A1 WO2017187787 A1 WO 2017187787A1
Authority
WO
WIPO (PCT)
Prior art keywords
container
concentration
gas
adsorption
ozone gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2017/008615
Other languages
English (en)
French (fr)
Japanese (ja)
Inventor
中村　貞紀
泉　浩一
尚久 牧平
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Iwatani Corp
Original Assignee
Iwatani Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Iwatani Corp filed Critical Iwatani Corp
Priority to CN201780025392.9A priority Critical patent/CN109071224B/zh
Priority to KR1020187030309A priority patent/KR102180199B1/ko
Priority to US16/092,220 priority patent/US11123679B2/en
Publication of WO2017187787A1 publication Critical patent/WO2017187787A1/ja
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Images

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
    • B01D53/04—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
    • B01D53/047—Pressure swing adsorption
    • B01D53/053—Pressure swing adsorption with storage or buffer vessel
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B13/00—Oxygen; Ozone; Oxides or hydroxides in general
    • C01B13/10—Preparation of ozone
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2253/00—Adsorbents used in seperation treatment of gases and vapours
    • B01D2253/10—Inorganic adsorbents
    • B01D2253/106—Silica or silicates
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2256/00—Main component in the product gas stream after treatment
    • B01D2256/14—Ozone
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2257/00—Components to be removed
    • B01D2257/10—Single element gases other than halogens
    • B01D2257/104—Oxygen
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2259/00—Type of treatment
    • B01D2259/40—Further details for adsorption processes and devices
    • B01D2259/40011—Methods relating to the process cycle in pressure or temperature swing adsorption
    • B01D2259/40058—Number of sequence steps, including sub-steps, per cycle
    • B01D2259/40062—Four
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2259/00—Type of treatment
    • B01D2259/40—Further details for adsorption processes and devices
    • B01D2259/403—Further details for adsorption processes and devices using three beds

Definitions

  • the present invention relates to an ozone gas concentration method and an ozone gas concentration device.
  • ⁇ Ozone gas has a strong oxidizing power and is excellent in deodorizing power and sterilizing power. Moreover, it does not remain toxic after degradation. Therefore, it is widely used for deodorizing agents, bactericides, and semiconductor oxidation treatments.
  • Ozone gas can be generated, for example, by discharge in an atmosphere containing oxygen gas.
  • the ozone gas generated in this way has a low concentration, it is necessary to increase the concentration of ozone by concentrating the ozone gas for practical use.
  • the adsorption tower is depressurized by a vacuum pump connected to the adsorption tower, thereby desorbing ozone gas from the adsorbent, A method for concentrating and purifying the protein has been proposed (for example, see Patent Document 1).
  • JP 2013-56810 A International Publication No. 2008/062534
  • An object of the present invention is to provide an ozone gas concentration method and an ozone gas concentration device capable of achieving stable operation.
  • the ozone gas concentration method includes a step of adsorbing ozone gas to the adsorbent in the first adsorption vessel, a step of depressurizing the inside of the first concentration vessel, and a gas in the first adsorption vessel.
  • a step of discharging a part a step of introducing the first concentrated mixed gas from the first adsorption vessel into the first concentration vessel, a step of adsorbing ozone gas to the adsorbent in the second adsorption vessel, Introducing a second concentrated mixed gas from the second adsorption container into the first concentration container.
  • a raw material mixed gas containing ozone gas is introduced into the first adsorption container holding the adsorbent, and the adsorbent in the first adsorption container Adsorb ozone gas.
  • the inside of the first concentration container is depressurized without being communicated with the first adsorption container.
  • a part of the gas in the first adsorption container is exhausted by exhausting the inside of the first adsorption container holding the adsorbent adsorbed by the ozone gas.
  • the first concentration container whose pressure is reduced is communicated with the first adsorption container from which a part of the internal gas is discharged. Switch to state. Then, the ozone gas adsorbed by the adsorbent in the first adsorption container is desorbed due to the pressure difference between the first concentration container and the first adsorption container, and is transported into the first concentration container. As a result, the first concentrated mixed gas having a higher ozone gas concentration than the raw material mixed gas is introduced into the first concentrated container.
  • a raw material mixed gas containing ozone gas is introduced into a second adsorption container different from the first adsorption container, and the inside of the second adsorption container Adsorb ozone gas to the adsorbent.
  • the first concentrated container into which the first concentrated mixed gas has been introduced and the adsorbent to which ozone gas has been adsorbed are retained. Switch to a state of communicating with the second adsorption container.
  • the ozone gas adsorbed by the adsorbent in the second adsorption container is desorbed due to the pressure difference between the first concentration container and the second adsorption container, and is transported into the first concentration container.
  • the second concentrated mixed gas having a lower ozone concentration than the first concentrated mixed gas but a higher ozone gas concentration than the raw material mixed gas is introduced into the first concentrated container.
  • the first concentration container and the first or second adsorption container are communicated with each other after the pressure inside the first concentration container is reduced without communicating with the adsorption container.
  • a decompression device such as a vacuum pump.
  • the first step is to connect the first concentration container whose internal pressure is reduced to the first adsorption container from which a part of the internal gas has been exhausted, so that a high concentration is contained in the first concentration container. It is a step of introducing a first concentrated mixed gas containing ozone.
  • the second step the first concentration container into which the first concentrated mixed gas is introduced and the second adsorption container holding the adsorbent adsorbed with ozone gas are switched to a state in which the first concentration container is communicated.
  • This is a step of introducing a sufficient amount of the second concentrated mixed gas into the concentration container.
  • the step of discharging a part of the gas in the first adsorption container may include a step of exhausting the gas in the first adsorption container without reaching the first concentration container. By including this step, a gas having a low ozone concentration can be discarded without reaching the concentration container. As a result, a gas containing a higher concentration of ozone can be recovered in the first concentration container.
  • the step of discharging a part of the gas in the first adsorption container is performed by communicating the first adsorption container holding the adsorbent adsorbed with the ozone gas and the atmosphere, so that the gas in the first adsorption container A step of discharging a part may be included. By including this step, the step of discharging part of the gas in the first adsorption container can be performed with simple equipment.
  • the step of discharging a part of the gas in the first adsorption container includes the step of causing the gas in the first adsorption container holding the adsorbent adsorbed by the ozone gas to reach the concentration container without causing the first adsorbent to reach the concentration container.
  • a step of evacuating so that the pressure in the adsorption container is ⁇ 80 kPa ⁇ G or less may be included.
  • the ozone gas concentration method according to the present invention further includes a step of depressurizing the inside of the second concentration container different from the first concentration container in a state where it does not communicate with either of the first and second adsorption containers. May be. At this time, in the step of discharging a part of the gas in the first adsorption container, the second concentration container whose inside is decompressed communicates with the first adsorption container holding the adsorbent to which the ozone gas is adsorbed.
  • a step of introducing a part of the gas in the first adsorption container into the second concentration container may be included.
  • the step of introducing the first concentrated mixed gas into the first concentration vessel and the step of introducing the second concentrated mixed gas into the first concentration vessel are performed without heating the first and second adsorption vessels. May be implemented. In order to heat the adsorption container, a heating device is necessary, and the device becomes large. By not performing the heating, a large-scale apparatus is not required and the facilities can be simplified.
  • the first adsorption container holding the adsorbent adsorbed with the ozone gas and the third adsorption container holding the adsorbent are communicated with each other in the first adsorption container.
  • a step of discharging a part of the gas into the third adsorption container may be included.
  • the first adsorbing vessel and the third adsorbing vessel are communicated, the first adsorbing vessel is moved from the first adsorbing vessel whose pressure is increased by adsorbing ozone gas to the adsorbent to the third adsorbing vessel. A part of the gas is discharged.
  • the ozone concentration in the gas discharged at the beginning of the discharge process is relatively low, by discharging the gas having a low ozone concentration from the first adsorption container, finally, a higher concentration is obtained from the first adsorption container. Ozone gas can be recovered. Further, the gas led out to the third adsorption container is used to increase the pressure in the third adsorption container, and ozone contained in the gas is further transferred to the adsorbent in the third adsorption container. Since it is adsorbed, the amount of ozone gas discarded without being used can be reduced.
  • the ozone gas concentration apparatus includes first and second adsorption containers, a first concentration container, a first decompression device, and a flow path control device.
  • the first and second adsorption containers each hold an adsorbent that adsorbs ozone gas when a raw material mixed gas containing ozone gas is introduced.
  • the first concentration container is connected to each of the first and second adsorption containers.
  • the first decompression device is a decompression device connected to the first concentration container and capable of decompressing the inside of the first concentration container.
  • the flow path control device switches communication states of the first and second adsorption containers, the first concentration container, and the first decompression device.
  • the flow path control device switches the following six states.
  • the first state is a state in which the raw material mixed gas containing ozone gas is introduced into the first adsorption container holding the adsorbent, and the adsorbent in the first adsorption container adsorbs the ozone gas.
  • the second state is a state in which the inside of the first concentration container is depressurized without being communicated with the first adsorption container and the second adsorption container.
  • the third state is a state in which part of the gas in the first adsorption container is discharged by exhausting the inside of the first adsorption container holding the adsorbent adsorbed with ozone gas.
  • the fourth state is switched to a state in which the first concentrating container whose inside is decompressed and the first adsorption container from which a part of the gas inside is communicated are communicated with each other in the first concentrating container and the first concentrating container.
  • the ozone gas adsorbed by the adsorbent in the first adsorption container is desorbed due to the pressure difference from the inside of the first adsorption container and transported into the first concentration container, so that the raw material mixed gas is introduced into the first concentration container. Also, the first concentrated mixed gas having a high ozone gas concentration is introduced.
  • the fifth state is a state in which a raw material mixed gas containing ozone gas is introduced into the second adsorption vessel and the adsorbent in the second adsorption vessel adsorbs the ozone gas.
  • the sixth state is switched to a state in which the first concentration container into which the first concentrated mixed gas is introduced and the second adsorption container holding the adsorbent adsorbed with ozone gas are communicated with each other.
  • the ozone gas adsorbed by the adsorbent in the second adsorption container due to the pressure difference between the inside of the container and the second adsorption container is desorbed and transported into the first concentration container, so that the first concentration container contains the ozone gas.
  • This is a state where a second concentrated mixed gas having a higher ozone gas concentration than the raw material mixed gas but having a lower ozone concentration than the first concentrated mixed gas is introduced.
  • the ozone gas concentrating device In the ozone gas concentrating device according to the present invention, after reducing the pressure inside the first concentrating container without communicating with the adsorbing container, the first concentrating container and the first adsorbing container or the second adsorbing container Is switched to a communication state, and the concentrated mixed gas is introduced into the concentration container. Therefore, the introduction of the concentrated mixed gas into the first concentration container can be performed without passing ozone through the inside of a decompression device such as a vacuum pump. As a result, it is possible to reduce the frequency of maintenance such as repair and replacement of a decompression device such as a vacuum pump and achieve stable operation.
  • the ozone gas concentrating device can switch the above-described six states by the flow path control device.
  • the first concentration container whose pressure is reduced and the first adsorption container whose inside is evacuated communicate with each other in the first concentration container from the mixed gas.
  • the first concentrated mixed gas having a high ozone gas concentration is introduced into the first concentration container.
  • a sufficient amount of the second concentration container is introduced by the communication between the first concentration container into which the first concentrated mixed gas is introduced and the second adsorption container holding the adsorbent to which the ozone gas is adsorbed.
  • the ozone gas concentrating device can introduce an ozone-containing gas having a high ozone concentration and sufficient to be supplied to the supply object into the first concentration container.
  • the ozone gas concentrating device may further include an exhaust path connected to the first adsorption container and exhausting the gas inside the first adsorption container without reaching the first concentration container. Good.
  • an exhaust path connected to the first adsorption container and exhausting the gas inside the first adsorption container without reaching the first concentration container. Good.
  • the ozone gas concentration apparatus further includes a second concentration container different from the first concentration container, and a second concentration container connected to the second concentration container and capable of reducing the pressure inside the second concentration container.
  • the decompression device may be provided.
  • the flow path control device includes a state in which the inside of the second concentration container is depressurized without being communicated with the first adsorption container and the second adsorption container, and a second concentration container in which the inside is decompressed,
  • the first adsorption container holding the adsorbent adsorbed with ozone gas is switched to a state of communication, and the adsorption in the first adsorption container is caused by the pressure difference between the second concentration container and the first adsorption container.
  • the ozone gas adsorbed by the agent is desorbed and transported into the second concentration container to further switch the state in which a part of the gas in the first adsorption container is introduced into the second concentration container. Also good. By doing so, a part of the gas in the first adsorption container is introduced into the second concentration container.
  • a higher concentration ozone gas is finally recovered from the first adsorption vessel. be able to.
  • the gas led out from the first adsorption container into the second concentration container can be used to increase the pressure in the second concentration container. Therefore, the amount of ozone gas discarded without being used can be reduced.
  • FIG. 3 is a diagram showing a control connection state in an example of a configuration of an ozone gas concentrator in Embodiment 1.
  • 3 is a flowchart showing an example of control of the adsorption container in the first embodiment.
  • 4 is a flowchart showing an example of control of the concentration container in the first embodiment.
  • 3 is a timing chart illustrating an example of an ozone gas concentration procedure in the first embodiment.
  • 6 is a schematic diagram illustrating an example of a configuration of an ozone gas concentrator in Embodiment 2.
  • FIG. 1 shows a connection state by piping of an ozone concentrator 1 that is an ozone gas concentrator in the first embodiment.
  • FIG. 2 shows a control connection state of the ozone concentrator 1 which is the ozone gas concentrator in the first embodiment.
  • FIG. 1 includes an oxygen source 40, an ozone generator 10, adsorption containers 20A, 20B, and 20C, and concentration containers 30A, 30B, and 30C.
  • oxygen gas is sent from the oxygen source 40 to the ozone generator 10.
  • a part of the oxygen gas delivered from the oxygen source 40 is converted into ozone in the ozone generator 10 to generate a raw material mixed gas containing ozone.
  • the raw material mixed gas containing ozone is sent from the ozone generator 10 to the adsorption containers 20A, 20B, or 20C.
  • the ozone in the raw material mixed gas sent to the adsorption container 20A, 20B, or 20C is adsorbed by the adsorbent in the adsorption container 20A, 20B, or 20C.
  • the ozone adsorbed by the adsorbent is then desorbed, and a concentrated mixed gas with an increased ozone concentration is generated in the adsorption containers 20A, 20B, and 20C.
  • the concentrated mixed gas is introduced from the adsorption container 20A, 20B, or 20C into the concentrated container 30A, 30B, or 30C.
  • the concentrated mixed gas introduced into the concentration container 30A, 30B, or 30C is supplied to the supply object. Details will be described below with reference to FIG.
  • the oxygen source 40 and the first mass flow controller 41 are connected by a pipe 152.
  • the oxygen source 40 for example, a cylinder that holds oxygen, LGC (Liquid Gas Container), CE (Cold Evaporator), or the like can be used.
  • the pipe 152 is an oxygen gas outflow path from the oxygen source 40.
  • a valve 61 is installed in the pipe 152.
  • a pipe 154 is connected to the first mass flow controller 41.
  • a valve 62 is installed in the pipe 154.
  • the pipe 154 is connected to the ozone generator 10.
  • the pipe 154 is an inflow path of the raw material gas to the ozone generator 10.
  • the oxygen source 40 is connected to the ozone generator 10 via the piping.
  • a pipe 155 is connected to the ozone generator 10.
  • the pipe 155 is an outflow path for the raw material mixed gas containing ozone generated in the ozone generator 10.
  • a pipe 156, a pipe 157, and a pipe 158 are connected to the pipe 155.
  • a valve 65 is installed in the pipe 156.
  • a valve 67 is installed in the pipe 157.
  • a valve 69 is installed in the pipe 158.
  • the piping 151 is connected between the position where the valve 61 of the piping 152 is installed and the position where the oxygen source 40 is connected.
  • the pipe 151 is connected to the second mass flow controller 42.
  • a valve 63 is installed in the pipe 151.
  • a pipe 153 is connected to the second mass flow controller 42.
  • a pipe 160, a pipe 162, and a pipe 164 are connected to the pipe 153.
  • a valve 64 is installed in the pipe 160.
  • a valve 66 is installed in the pipe 162.
  • a valve 68 is installed in the pipe 164.
  • the pipe 156 and the pipe 160 are connected to the pipe 159.
  • the pipe 157 and the pipe 162 are connected to the pipe 161.
  • the pipe 158 and the pipe 164 are connected to the pipe 163.
  • the pipe 159 is connected to the first adsorption container 20A.
  • the pipe 161 is connected to the second adsorption container 20B.
  • the pipe 163 is connected to the third adsorption container 20C.
  • An adsorbent (first adsorbent) made of silica gel is held in the first adsorption container 20A.
  • An adsorbent (second adsorbent) made of silica gel is held in the second adsorption container 20B.
  • an adsorbent (third adsorbent) made of silica gel is held.
  • Each silica gel constituting the first adsorbent, the second adsorbent, and the third adsorbent is adjusted to a purity of 99.99% by mass or more, for example.
  • a pipe 165 is connected to the first adsorption container 20A.
  • a pipe 166 is connected to the second adsorption container 20B.
  • a pipe 167 is connected to the third adsorption container 20C.
  • the pipe 165 and the pipe 166 are connected by a pipe 143.
  • a valve 89 is installed in the pipe 143.
  • the pipe 166 and the pipe 167 are connected by a pipe 144.
  • a valve 90 is installed in the pipe 144.
  • the pipe 165 and the pipe 167 are connected by a pipe 145.
  • a valve 91 is installed in the pipe 145.
  • a pipe 168 and a pipe 169 are connected to the pipe 165.
  • a pipe 170 and a pipe 171 are connected to the pipe 166.
  • a pipe 172 and a pipe 173 are connected to the pipe 167.
  • a valve 70 is installed in the pipe 168.
  • a valve 71 is installed in the pipe 169.
  • a valve 72 is installed in the pipe 170.
  • a valve 73 is installed in the pipe 171.
  • a valve 74 is installed in the pipe 172.
  • a valve 75 is installed in the pipe 173.
  • the pipe 168, the pipe 170, and the pipe 172 are connected to the pipe 174.
  • the pipe 169, the pipe 171, and the pipe 173 are connected to the pipe 175.
  • the end of the pipe 174 opposite to the side connected to the pipe 168, the pipe 170, and the pipe 172 forms an exhaust path for discharging the gas in the ozone concentrator 1.
  • a back pressure valve 88, an ozonolysis device 54, and an exhaust pump 51 are installed in the pipe 174.
  • the back pressure valve 88 can control the pressure in the process of discharging part of the gas in the adsorption container 20.
  • the ozone decomposition device 54 decomposes ozone contained in the atmosphere exhausted from the exhaust path.
  • the back pressure valve 88 and the exhaust pump 51 can be omitted. .
  • the pipe 175 is connected with a pipe 176, a pipe 178, and a pipe 180.
  • the pipe 176 is disposed so as to extend to the inside of the first concentration container 30A.
  • a valve 76 is installed in the pipe 176.
  • the pipe 178 is disposed so as to extend to the inside of the second concentration container 30B.
  • a valve 77 is installed in the pipe 178.
  • the pipe 180 is disposed so as to extend to the inside of the third concentration container 30C.
  • a valve 78 is installed in the pipe 180.
  • the pipe 175 is provided with a valve 85, a back pressure valve 86, and a throttle valve 87.
  • the back pressure valve 86 and the throttle valve 87 control the pressure and flow rate of the concentrated mixed gas when ozone gas is desorbed.
  • the pipe 177 is arranged so as to extend from the inside of the first concentration container 30A to the outside.
  • a valve 82 is installed in the pipe 177.
  • the pipe 179 is disposed so as to extend from the inside of the second concentration container 30B to the outside.
  • a valve 83 is installed in the pipe 179.
  • the pipe 181 is disposed so as to extend from the inside of the third concentration container 30C to the outside.
  • a valve 84 is installed in the pipe 181.
  • the pipe 177, the pipe 179, and the pipe 181 are connected to the pipe 185.
  • the concentration containers 30A, 30B, and 30C receive ozone gas desorbed from the first adsorbent in the first adsorption container 20A, the second adsorbent in the second adsorption container 20B, or the third adsorbent in the third adsorption container 20C. Contains the concentrated gas mixture.
  • the concentration containers 30A, 30B, and 30C are containers made of a material having ozone resistance (for example, a resin or metal having ozone resistance).
  • the third mass flow controller 43 is connected to the pipe 185.
  • a pipe 186 is connected to the third mass flow controller 43.
  • the pipe 186 is connected to a discharge unit (not shown) that discharges ozone gas to a supply target to which ozone gas is to be supplied.
  • a pipe 182 is connected to the pipe 177.
  • a valve 79 is installed in the pipe 182.
  • a pipe 183 is connected to the pipe 179.
  • a valve 80 is installed in the pipe 183.
  • a pipe 184 is connected to the pipe 181.
  • a valve 81 is installed in the pipe 184.
  • the pipe 175, the pipe 182, the pipe 183, and the pipe 184 are connected to the pipe 187.
  • the pipe 187 is connected to the pipe 188.
  • the piping 188 is provided with an ozonolysis device 53 and a concentration container decompression pump 50 as a first decompression device.
  • the concentration container depressurization pump 50 is connected to a first concentration container selected from the concentration containers 20A, 20B, and 20C, and functions as a first depressurization device capable of depressurizing the inside of the first concentration container.
  • a plurality of concentration container decompression pumps 50 may be provided. That is, a second decompression device connected to the second concentration container and capable of decompressing the inside of the second concentration container may be further provided.
  • the concentration containers 30A, 30B, and 30C may share one decompression pump.
  • the concentration container decompression pump 50 also functions as both the first decompression device and the second decompression device.
  • a plurality of decompression pumps (not shown) corresponding to the concentration containers 30A, 30B, and 30C may be provided.
  • the concentration container decompression pump 50 is connected to the pipe 189.
  • the pipe 189 constitutes an exhaust pipe that exhausts the atmosphere inside the concentration container 30A, 30B, or 30C during decompression.
  • the ozone decomposition device 53 decomposes ozone contained in the exhausted atmosphere.
  • the ozone concentrator 1 includes a control unit 12, pumps 50 and 51, valves 61 to 91, an ozone generator 10, a first mass flow controller 41 as a first flow rate adjustment unit, A second mass flow controller 42 as a second flow rate adjustment unit and a third mass flow controller 43 as a third flow rate adjustment unit are provided.
  • the control unit 12 functions as a flow path control device, and controls the entire ozone gas concentrating device including the route from the ozone gas source to the supply route to the supply target.
  • the control unit 12 controls the flow path by controlling the open / close state of each valve.
  • the control unit 12 controls the operation of the concentration container decompression pump 50 as the decompression device and the exhaust pump 51 as the exhaust device. Furthermore, the control unit 12 controls the operation of the ozone generator 10.
  • the concentration container decompression pump 50 is connected to a pipe 189 constituting an exhaust pipe for exhausting the atmosphere inside the concentration container.
  • the concentration container 30A, 30B, or 30C is decompressed by operating the concentration container decompression pump 50 and opening the valve 79, 80, or 81 corresponding to each concentration container 30A, 30B, or 30C.
  • the exhaust pump 51 is installed in a pipe 174 having an exhaust port to the outside. By operating the exhaust pump 51 and opening the valves 70, 72, or 74 corresponding to the respective adsorption containers 20A, 20B, or 20C, a part of the gas in the adsorption containers 20A, 20B, or 20C is obtained. Exhausted.
  • the first mass flow controller 41 controls the flow rate of oxygen gas supplied from the oxygen source 40 to the ozone generator 10.
  • the second mass flow controller 42 adjusts the flow rate of oxygen gas supplied from the oxygen source 40 into the adsorption container 20A, 20B, or 20C as the purge gas.
  • the third mass flow controller 43 controls the flow rate of the concentrated mixed gas supplied from the concentration container 30A, 30B, or 30C to the supply target.
  • Valves 61 to 91 are openable and closable valves, and control the flow path by opening or closing the valves.
  • the ozone generator 10 includes a discharge unit including a plurality of electrodes. A part of oxygen is converted into ozone by discharging the oxygen gas introduced into the ozone generator 10 between the electrodes of the discharge unit. In this way, a raw material mixed gas containing ozone is generated.
  • FIG. 3 is a flowchart showing an example of the control of the adsorption container in the first embodiment.
  • FIG. 4 is a flowchart showing an example of control of the concentration container in the first embodiment.
  • FIG. 5 is a timing chart showing an example of an ozone gas concentration procedure in the first embodiment. The concentration method is performed without heating the adsorption container 20.
  • control flow in the adsorption containers 20A, 20B, and 20C will be described below. Referring to FIG. 3, steps S10 to S50 are performed in each of the adsorption containers 20A, 20B, and 20C. Of the adsorption containers 20A, 20B, and 20C, the control flow in the first adsorption container 20A will be described as a representative example.
  • ozone gas is adsorbed to the first adsorbent held in the first adsorption container 20A (S10).
  • the valve 61 and the valve 62 are opened.
  • the oxygen gas supplied from the oxygen source 40 reaches the first mass flow controller 41 via the pipe 152.
  • the oxygen gas adjusted to a desired flow rate in the first mass flow controller 41 is delivered to the ozone generator 10 via the pipe 154.
  • Ozone gas is generated by the discharge in the oxygen gas that has reached the ozone generator 10.
  • the valve 65 When the valve 65 is opened here, the raw material mixed gas containing the ozone gas generated in the ozone generator 10 is discharged from the ozone generator 10 and is first adsorbed via the pipe 155, the pipe 156, and the pipe 159. It is introduced into the container 20A. The introduction of the raw material mixed gas into the first adsorption vessel 20A is continued as it is, and the pipe 165 is used to circulate (pass) ozone in the first adsorption vessel 20A at a predetermined timing as necessary. Is opened, and the internal pressure of the first adsorption container 20A is kept at a predetermined pressure. When a predetermined timing is reached after the introduction of the raw material mixed gas containing ozone gas into the first adsorption container 20A is reached, the valve 65 and the valve 70 (or the open / close valve for flow piping) are closed.
  • the first adsorbent held in the first adsorption container 20A selectively adsorbs ozone in the introduced raw material mixed gas.
  • the gas that has not been adsorbed by the first adsorbent has a low ozone concentration. Therefore, the gas in the first adsorption container 20A is exhausted in order to discard the gas having a low ozone concentration and collect only the portion having the high ozone concentration (S20). Examples of the exhaust method include the following several methods.
  • the valve 70 is opened with the valves 64, 65, 71 closed.
  • the back pressure valve 88 is opened, the first adsorption container 20 ⁇ / b> A and the external atmosphere communicate with each other via the pipes 165, 168, and 174. Since the pressure inside the first adsorption vessel 20A is higher than the atmospheric pressure due to the introduction of the raw material mixed gas, the first adsorption vessel 20A on the side where the pressure is higher from the inside of the first adsorption vessel 20A to the outside of the atmospheric pressure. A part of the gas in the adsorption container 20A is discharged.
  • part of the gas discharged at this time is a gas having a low ozone concentration. Further, when this method is adopted, the back pressure valve 88 and the exhaust pump 51 can be omitted, and the apparatus can be simplified.
  • the valve 70 is opened with the valves 64, 65, 71 closed.
  • the first adsorption vessel 20A is controlled by operating the exhaust pump 51 and controlling the internal pressure of the first adsorption vessel 20A to be lower than the atmospheric pressure, specifically, ⁇ 80 kPa ⁇ G or less by the back pressure valve 88. A part of the gas inside can also be discharged. According to this method, among the gas accommodated in the first adsorption container 20A, a portion having a lower ozone concentration can be discharged more, and only a portion having a higher concentration can be left in the first adsorption container 20A. .
  • Step S10 Method of discharging part of gas in the first adsorption container 20A to another adsorption container 20B (or 20C)
  • Step S10 Method of discharging part of gas in the first adsorption container 20A to another adsorption container 20B (or 20C)
  • the valve 89 is opened while the valves 64, 65, 66, 67, 70, 71, 72, 73 are closed, the pressure is lowered from the inside of the first adsorption vessel 20A having a higher pressure. Gas is discharged into the second adsorption container 20B. If left as it is, the internal pressure of the first adsorption container 20A and the internal pressure of the second adsorption container 20B finally become the same.
  • valve 89 is closed. Thereby, the part with low ozone concentration in the first adsorption container 20A is led out from the first adsorption container 20A to the second adsorption container 20B. Thereby, higher concentration ozone gas can be collect
  • (D) Method of discharging a part of the gas in the first adsorption container 20A to the decompressed concentration container 30B or 30C First, the interior of the second concentration container 30B is communicated with any of the adsorption containers 20A, 20B, and 20C. Reduce the pressure without using it. Next, the inside of the second concentration container 30B in which the inside is decompressed is switched to a state in which the second concentration container 30B in which the inside is decompressed and the first adsorption container 20A holding the adsorbent to which the ozone gas is adsorbed are communicated.
  • the ozone gas adsorbed by the adsorbent in the first adsorption container 20A is desorbed due to the pressure difference from the first adsorption container 20A and conveyed into the second concentration container 30B, so that the gas in the first adsorption container 20A A part is introduced into the second concentration container 30B.
  • the first adsorption container 20A is introduced into the second concentration container 30B through the pipes 165, 169, 175, and 178. Therefore, in this method, each of the pipes 165, 169, 175, and 178 constitutes an exhaust part.
  • the first concentrated mixed gas is derived (S30).
  • the concentrated mixed gas derived from the first adsorption container 20A in the first concentrated mixed gas is introduced into a predetermined concentrated container among the concentrated containers 30A, 30B, and 30C.
  • the concentration container is decompressed, and the internal pressure of the concentration container into which the concentrated mixed gas is introduced is kept lower than the internal pressure of the first adsorption container 20A. Therefore, when the valve 71 on the first adsorption container 20A side and the valve 76 (or 77, 78) on the concentration container side are opened, the concentrated mixed gas derived from the first adsorption container 20A having a high pressure passes through the pipe 175. Then, it is introduced into a predetermined concentration container 30 having a low pressure.
  • the second concentrated mixed gas is derived (S40).
  • the internal pressure of the concentration container 30 into which the second concentrated gas mixture is introduced is kept lower than the internal pressure of the container into which the first concentrated gas mixture is introduced. Therefore, the ozone remaining in the first adsorption container 20A is derived without being derived in the first deriving of the concentrated mixed gas while being adsorbed by the first adsorbent. Therefore, in S40, a concentrated mixed gas having a higher ozone concentration than the concentrated mixed gas derived in S30 is derived.
  • step S50 when the supply of the ozone gas to the supply object is completed (YES in step S50), the operation of the ozone concentrator 1 is stopped and the concentration of the ozone gas is completed. If the supply of ozone gas to the supply object has not been completed (NO in step S50), the operations of S10 to S40 are repeated again. In addition, about process S20 which discharges a part of gas in an adsorption container, it is also omissible.
  • the cycle of S10 to S50 is the adsorption container of each of the first adsorption container 20A, the second adsorption container 20B, and the third adsorption container 20C.
  • the cycles of S10 to S50 in each adsorption vessel are performed at different timings so that the supply of the concentrated mixed gas is performed without any delay.
  • FIG. 5 is a timing chart showing an example of an ozone gas concentration procedure in the first embodiment.
  • the exhaust step of S20 time t 10 to t 11
  • the first derivation step of S30 time t 10 to t t 11
  • the second derivation step time t 12 to t 13
  • the adsorption step of S10 is performed in the first adsorption container 20A and the third adsorption container 20C.
  • S20 to S40 are performed in the third adsorption container 20C.
  • the adsorption step of S10 is performed in the first adsorption container 20A and the second adsorption container 20B. From time t 16 to t 19 , S20 to S40 are performed in the first adsorption container 20A. At this time, the adsorption step of S10 is performed in the second adsorption container 20B and the third adsorption container 20C. As described above, while one of the three adsorption containers is performing the steps S20 to S40, the above two cycles are repeated while the remaining two are performing S10.
  • the inside of the first concentration container 30A is depressurized (T10).
  • the concentration container decompression pump 50 is operated with the valve 76 and the valve 82 closed, and then the valve 79 is turned on. Open the valve. By doing so, the atmosphere inside the first concentration container 30A is discharged to the outside through the pipes 177, 182, 187, 188, and 189, and the inside of the first concentration container 30A is decompressed.
  • the operation of the concentration container depressurization pump 50 is stopped and the valve 79 is closed. In this way, the inside of the first concentration container 30A is kept in a reduced pressure state.
  • the first concentrated gas mixture is introduced (T20).
  • the valve 76 is opened to switch the second adsorption container 20B and the first concentration container 30A to the communication state.
  • a concentrated mixed gas having a higher ozone concentration than the raw material mixed gas is introduced into the first concentrated container 30A from the second adsorption container 20B via the pipes 175 and 176 due to a pressure difference. be introduced.
  • the valve 76 is opened to cause a pressure difference from the second adsorption container 20B.
  • a concentrated mixed gas containing high-concentration ozone gas can be introduced into the first concentration container 30A.
  • the first concentrated container 30A is still filled at a pressure sufficient to supply ozone gas. Absent.
  • the internal pressure of the first concentration container 30A slightly increases, the state still lower than the internal pressure of another adsorption container, for example, the third adsorption container 20C.
  • the second concentrated gas mixture is introduced (T30).
  • the internal pressure of the first concentration container 30A is slightly higher than that at the first introduction of the concentrated mixed gas. Therefore, the concentrated mixed gas introduced at the second time has a higher ozone concentration than the raw material mixed gas, but has a slightly lower ozone concentration than the concentrated mixed gas introduced at the first time.
  • the inside of the first concentration container 30A is filled with a pressure sufficient to supply ozone gas.
  • the concentrated mixed gas introduced in the first time and the concentrated mixed gas introduced in the second time are temporarily stored in the first concentration container 30A, and the concentration is made uniform, thereby supplying a gas with a more stable ozone concentration. It becomes possible to do.
  • the concentrated mixed gas containing ozone is supplied to the supply target (T40).
  • the valve 82 When the valve 82 is opened, the concentrated mixed gas flows out from the first concentration container 30 ⁇ / b> A and reaches the third mass flow controller 43 via the pipe 177 and the pipe 185. Thereafter, ozone is supplied to the supply object via the pipe 186 in a state adjusted to a desired flow rate by the third mass flow controller 43.
  • step T50 when the supply of the ozone gas to the supply object is completed (YES in step T50), the operation of the ozone concentrator 1 is stopped and the concentration of the ozone gas is completed. If the supply of ozone gas to the supply object has not been completed (NO in step T50), the operations of S10 to S40 are repeated again.
  • the adsorption containers of the first concentration container 30A, the second concentration container 30B, and the third concentration container 30C are used.
  • the cycles of T10 to T50 in each adsorption vessel are performed at different timings so that the supply of the concentrated mixed gas is performed without any delay.
  • step T10 for depressurizing the inside of the concentration container is performed in the first concentration container 30A.
  • step T40 for supplying the concentrated mixed gas to the supply target is performed in the second concentration container 30B.
  • step T30 for introducing the second concentrated mixed gas is performed at time t 11 to t 12 .
  • the concentrated mixed gas introduced into the third concentration container 30C is a gas derived from the second adsorption container 20B at the same time (S30).
  • step T20 for introducing the first concentrated gas mixture is performed in the first concentration container 30A.
  • the concentrated mixed gas introduced into the first concentration container 30A is a gas derived from the second adsorption container 20B at the same time (S40).
  • step T30 for introducing the second concentrated mixed gas is performed.
  • the concentrated mixed gas introduced into the first concentration container 30A is a gas derived from the third adsorption container 20C at the same time (S30).
  • the first concentrator vessel 30A finishing the introduction of first and second enriched gas mixture inside is filled with concentrated gas mixture.
  • step T10 for depressurizing the inside of the concentration container is performed in the second concentration container 30B.
  • step T40 for supplying the concentrated mixed gas to the supply object is performed in the third concentration container 30C.
  • a supply step T40 for supplying the concentrated mixed gas filled in the container to the supply target is performed.
  • a step T20 for introducing the first concentrated mixed gas and a step T30 for introducing the second concentrated mixed gas are performed (the waiting time from time t 16 to t 17 is set between them). Including).
  • step T10 of decompression is implemented concentrated container.
  • Step T10 the concentration in the container Step T10 is performed.
  • a supply step T40 is performed in which the concentrated mixed gas is supplied to the supply object from time t 18 to t 19 and further to the beginning of the cycle, and from time t 10 to t 12 .
  • Step T20 for introducing the first concentrated gas mixture is performed from time t 18 to time t 19 . Thereafter, this cycle is repeated until the supply of the concentrated mixed gas to the supply object is completed.
  • step T40 is performed in any of the concentration containers at any time from time t 10 to t 19 .
  • step T40 is performed in any of the concentration containers at any time from time t 10 to t 19 .
  • it is possible to continuously supply the concentrated mixed gas containing ozone without providing a standby time.
  • the ozone gas concentrator in the second embodiment is the structure of the ozone gas concentrator in the first embodiment after the pipe 191 on the downstream side of the pipes 169, 171 and 173 in FIG. Is a change. Similar to the ozone gas concentrating device in the first embodiment, the ozone gas concentrating device in the second embodiment includes three adsorption containers and three concentrating containers. Hereinafter, differences from the case of the first embodiment will be described.
  • the ozone gas concentrator in the second embodiment includes a pipe 169 connected to a pipe 169, a pipe 171, and a pipe 173.
  • the pipe 191 is connected to the pipe 192, the pipe 193, the pipe 194, and the pipe 195.
  • a valve 92 In the pipe 192, a valve 92, a back pressure valve 93, and a throttle valve 94 are installed.
  • the back pressure valve 93 and the throttle valve 94 control the pressure and flow rate of the concentrated mixed gas when ozone gas is desorbed.
  • a valve 95 is installed in the pipe 193.
  • the pipe 193 is disposed so as to extend to the inside of the first concentration container 30A.
  • a valve 96 is installed in the pipe 194.
  • the pipe 194 is disposed so as to extend to the inside of the second concentration container 30B.
  • a valve 97 is installed in the pipe 195.
  • the pipe 195 is disposed so as to extend to the inside of the third concentration container 30C.
  • the pipe 196 is disposed so as to extend from the inside of the first concentration container 30A to the outside.
  • a valve 101 is installed in the pipe 193.
  • the pipe 197 is disposed so as to extend from the inside of the second concentration container 30B to the outside.
  • a valve 102 is installed in the pipe 197.
  • the pipe 198 is disposed so as to extend from the inside of the third concentration container 30C to the outside.
  • a valve 103 is installed in the pipe 198.
  • the pipe 196, the pipe 197, and the pipe 198 are connected to the pipe 199.
  • the piping 199 is provided with an ozonolysis device 53 and a concentration container decompression pump 50.
  • the concentration container decompression pump 50 is connected to the pipe 205.
  • the pipe 205 constitutes an exhaust pipe for exhausting the atmosphere inside the container when the concentration container 30A, 30B, or 30C is decompressed.
  • the ozonolysis device 53 decomposes ozone contained in the exhausted atmosphere so that ozone does not flow through the concentration container decompression pump 50.
  • the ozonolysis device 53 and the concentration container decompression pump 50 are connected by a pipe 204.
  • the pipe 200 is connected to the pipe 196.
  • a valve 98 is installed in the pipe 200.
  • a pipe 201 is connected to the pipe 197.
  • a pipe 202 is connected to the pipe 198.
  • the pipe 201 and the pipe 202 are connected to the pipe 200.
  • the third mass flow controller 43 is installed in the pipe 200.
  • a pipe 203 is connected to the third mass flow controller 43.
  • the pipe 203 is connected to a discharge unit that discharges ozone gas to a supply target to which ozone gas is to be supplied. Even when such a structure is adopted, the concentrated mixed gas containing ozone can be continuously supplied without providing a waiting time, as in the first embodiment.
  • the example of the ozone gas concentrating device used in the ozone gas concentrating method of the present invention has been described.
  • the ozone gas concentrator of the invention is not limited to such a configuration.
  • the arrangement of the adsorption container and the concentration container, the arrangement of the piping, the arrangement of the valves, etc. are appropriately changed within a range that does not impede the implementation of the present invention in consideration of the ease of construction and the situation of the installation space. be able to.
  • the number of adsorption containers and concentration containers is not limited. Further, the number of adsorption containers and concentration containers may not be the same.
  • the ozone gas concentrating device of the present invention may include a larger number of concentration containers than the number of adsorption containers.
  • the concentrated mixed gas can be efficiently led to the concentration container without waiting time when the adsorption step is completed in the adsorption container.
  • a concentrated gas mixture having a high ozone concentration can be repeatedly introduced into the concentration container 30 to recover a high concentration ozone gas.
  • ozone is contained at a higher concentration by evacuating the pressure in the adsorption container 20 to be sufficiently low, for example, ⁇ 90 kPa ⁇ G or less.
  • a concentrated gas mixture can be obtained.
  • the concentration container 30 for example, the first concentration container 30A
  • the introduction is repeated a plurality of times, thereby increasing the pressure at a higher pressure. Concentration ozone gas can be recovered.
  • the ozone gas concentrating method and ozone gas concentrating device of the present invention can be applied particularly advantageously to an ozone gas concentrating method and an ozone gas concentrating device in which the ozone resistance of the gas contact part of the pump is a problem.

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Separation Of Gases By Adsorption (AREA)
  • Oxygen, Ozone, And Oxides In General (AREA)
PCT/JP2017/008615 2016-04-28 2017-03-03 オゾンガスの濃縮方法、およびオゾンガスの濃縮装置 Ceased WO2017187787A1 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
CN201780025392.9A CN109071224B (zh) 2016-04-28 2017-03-03 臭氧气体的浓缩方法以及臭氧气体的浓缩装置
KR1020187030309A KR102180199B1 (ko) 2016-04-28 2017-03-03 오존 가스의 농축 방법, 및 오존 가스의 농축 장치
US16/092,220 US11123679B2 (en) 2016-04-28 2017-03-03 Method for concentrating ozone gas and apparatus for concentrating ozone gas

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2016091888A JP6632464B2 (ja) 2016-04-28 2016-04-28 オゾンガスの濃縮方法、およびオゾンガスの濃縮装置
JP2016-091888 2016-04-28

Publications (1)

Publication Number Publication Date
WO2017187787A1 true WO2017187787A1 (ja) 2017-11-02

Family

ID=60160254

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2017/008615 Ceased WO2017187787A1 (ja) 2016-04-28 2017-03-03 オゾンガスの濃縮方法、およびオゾンガスの濃縮装置

Country Status (6)

Country Link
US (1) US11123679B2 (https=)
JP (1) JP6632464B2 (https=)
KR (1) KR102180199B1 (https=)
CN (1) CN109071224B (https=)
TW (1) TWI742056B (https=)
WO (1) WO2017187787A1 (https=)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113501503B (zh) * 2021-07-01 2024-04-02 光大水务科技发展（南京）有限公司 一种基于解吸臭氧再吹扫生成高浓度臭氧的臭氧分离系统及其方法
JP7543622B1 (ja) 2023-02-27 2024-09-03 明電ナノプロセス・イノベーション株式会社 オゾンガス供給システム
CN119330308B (zh) * 2024-12-20 2025-03-21 山东志伟环保科技有限公司 应用于半导体材料清洗刻蚀的高纯度臭氧浓缩工艺及装置

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11335102A (ja) * 1998-05-22 1999-12-07 Iwatani Internatl Corp 高濃度オゾン連続発生方法及びその装置
JP2002128509A (ja) * 2000-10-20 2002-05-09 Iwatani Internatl Corp 高濃度オゾンガスの定圧供給方法
WO2008062534A1 (en) * 2006-11-24 2008-05-29 Iwatani Corporation Method of concentrating ozone gas and apparatus therefor
JP2013056810A (ja) * 2011-09-09 2013-03-28 Iwatani Internatl Corp オゾンガスの濃縮方法及びその装置

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2683806B2 (ja) * 1988-03-17 1997-12-03 住友精化株式会社 濃縮酸素回収方法
JP3766983B2 (ja) * 1994-09-14 2006-04-19 石川島播磨重工業株式会社 オゾン発生濃縮装置
KR101185708B1 (ko) * 2007-11-30 2012-09-24 도시바 미쓰비시덴키 산교시스템 가부시키가이샤 고농도 오존 가스 생성 장치 및 고농도 오존 가스 생성 방법
CN101878182B (zh) * 2007-11-30 2013-01-09 三菱电机株式会社 臭氧浓缩装置
US7819947B2 (en) * 2008-02-12 2010-10-26 Air Products And Chemical, Inc. Ozone production by pressure swing adsorption using a protective adsorbed component
JP5010532B2 (ja) 2008-05-20 2012-08-29 三菱重工業株式会社 高濃度オゾンガスの製造方法とその装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11335102A (ja) * 1998-05-22 1999-12-07 Iwatani Internatl Corp 高濃度オゾン連続発生方法及びその装置
JP2002128509A (ja) * 2000-10-20 2002-05-09 Iwatani Internatl Corp 高濃度オゾンガスの定圧供給方法
WO2008062534A1 (en) * 2006-11-24 2008-05-29 Iwatani Corporation Method of concentrating ozone gas and apparatus therefor
JP2013056810A (ja) * 2011-09-09 2013-03-28 Iwatani Internatl Corp オゾンガスの濃縮方法及びその装置

Also Published As

Publication number Publication date
US20190126191A1 (en) 2019-05-02
TWI742056B (zh) 2021-10-11
US11123679B2 (en) 2021-09-21
JP2017197423A (ja) 2017-11-02
KR102180199B1 (ko) 2020-11-18
TW201808435A (zh) 2018-03-16
CN109071224A (zh) 2018-12-21
JP6632464B2 (ja) 2020-01-22
CN109071224B (zh) 2022-03-08
KR20180122450A (ko) 2018-11-12

Similar Documents

Publication Publication Date Title
TWI534074B (zh) Ozone gas concentration method and device thereof
JP5506396B2 (ja) オゾン濃縮装置
JP7292554B1 (ja) オゾン供給装置およびオゾン供給方法
WO2017187787A1 (ja) オゾンガスの濃縮方法、およびオゾンガスの濃縮装置
WO2017187786A1 (ja) オゾンガスの濃縮方法、およびオゾンガスの濃縮装置
KR101525505B1 (ko) 오존가스 농축 방법 및 그 장치
JP5427412B2 (ja) オゾンガス濃縮方法及びその装置
WO2019234882A1 (ja) オゾン供給装置およびオゾン供給方法
JP2017197423A5 (https=)
JP7203293B1 (ja) オゾン供給装置及びオゾン供給方法
JP2025041392A (ja) ガス分離方法及びガス分離装置
JP6905508B2 (ja) 濃縮された目的ガスの製造方法

Legal Events

Date Code Title Description
ENP Entry into the national phase

Ref document number: 20187030309

Country of ref document: KR

Kind code of ref document: A

NENP Non-entry into the national phase

Ref country code: DE

121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 17789076

Country of ref document: EP

Kind code of ref document: A1

122 Ep: pct application non-entry in european phase

Ref document number: 17789076

Country of ref document: EP

Kind code of ref document: A1