JP6632464B2 - オゾンガスの濃縮方法、およびオゾンガスの濃縮装置 - Google Patents

オゾンガスの濃縮方法、およびオゾンガスの濃縮装置 Download PDF

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JP6632464B2
JP6632464B2 JP2016091888A JP2016091888A JP6632464B2 JP 6632464 B2 JP6632464 B2 JP 6632464B2 JP 2016091888 A JP2016091888 A JP 2016091888A JP 2016091888 A JP2016091888 A JP 2016091888A JP 6632464 B2 JP6632464 B2 JP 6632464B2
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adsorption
gas
concentration
vessel
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JP2017197423A (ja
JP2017197423A5 (https=
Inventor
中村　貞紀
貞紀 中村
泉　浩一
浩一 泉
尚久 牧平
尚久 牧平
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Iwatani Corp
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Iwatani Corp
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Priority to JP2016091888A priority Critical patent/JP6632464B2/ja
Application filed by Iwatani Corp filed Critical Iwatani Corp
Priority to US16/092,220 priority patent/US11123679B2/en
Priority to CN201780025392.9A priority patent/CN109071224B/zh
Priority to KR1020187030309A priority patent/KR102180199B1/ko
Priority to PCT/JP2017/008615 priority patent/WO2017187787A1/ja
Priority to TW106109990A priority patent/TWI742056B/zh
Publication of JP2017197423A publication Critical patent/JP2017197423A/ja
Publication of JP2017197423A5 publication Critical patent/JP2017197423A5/ja
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
    • B01D53/04—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
    • B01D53/047—Pressure swing adsorption
    • B01D53/053—Pressure swing adsorption with storage or buffer vessel
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B13/00—Oxygen; Ozone; Oxides or hydroxides in general
    • C01B13/10—Preparation of ozone
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2253/00—Adsorbents used in seperation treatment of gases and vapours
    • B01D2253/10—Inorganic adsorbents
    • B01D2253/106—Silica or silicates
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2256/00—Main component in the product gas stream after treatment
    • B01D2256/14—Ozone
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2257/00—Components to be removed
    • B01D2257/10—Single element gases other than halogens
    • B01D2257/104—Oxygen
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2259/00—Type of treatment
    • B01D2259/40—Further details for adsorption processes and devices
    • B01D2259/40011—Methods relating to the process cycle in pressure or temperature swing adsorption
    • B01D2259/40058—Number of sequence steps, including sub-steps, per cycle
    • B01D2259/40062—Four
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2259/00—Type of treatment
    • B01D2259/40—Further details for adsorption processes and devices
    • B01D2259/403—Further details for adsorption processes and devices using three beds

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  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Separation Of Gases By Adsorption (AREA)
  • Oxygen, Ozone, And Oxides In General (AREA)
JP2016091888A 2016-04-28 2016-04-28 オゾンガスの濃縮方法、およびオゾンガスの濃縮装置 Active JP6632464B2 (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP2016091888A JP6632464B2 (ja) 2016-04-28 2016-04-28 オゾンガスの濃縮方法、およびオゾンガスの濃縮装置
CN201780025392.9A CN109071224B (zh) 2016-04-28 2017-03-03 臭氧气体的浓缩方法以及臭氧气体的浓缩装置
KR1020187030309A KR102180199B1 (ko) 2016-04-28 2017-03-03 오존 가스의 농축 방법, 및 오존 가스의 농축 장치
PCT/JP2017/008615 WO2017187787A1 (ja) 2016-04-28 2017-03-03 オゾンガスの濃縮方法、およびオゾンガスの濃縮装置
US16/092,220 US11123679B2 (en) 2016-04-28 2017-03-03 Method for concentrating ozone gas and apparatus for concentrating ozone gas
TW106109990A TWI742056B (zh) 2016-04-28 2017-03-24 臭氧氣體的濃縮方法、以及臭氧氣體的濃縮裝置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2016091888A JP6632464B2 (ja) 2016-04-28 2016-04-28 オゾンガスの濃縮方法、およびオゾンガスの濃縮装置

Publications (3)

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JP2017197423A JP2017197423A (ja) 2017-11-02
JP2017197423A5 JP2017197423A5 (https=) 2019-04-11
JP6632464B2 true JP6632464B2 (ja) 2020-01-22

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JP2016091888A Active JP6632464B2 (ja) 2016-04-28 2016-04-28 オゾンガスの濃縮方法、およびオゾンガスの濃縮装置

Country Status (6)

Country Link
US (1) US11123679B2 (https=)
JP (1) JP6632464B2 (https=)
KR (1) KR102180199B1 (https=)
CN (1) CN109071224B (https=)
TW (1) TWI742056B (https=)
WO (1) WO2017187787A1 (https=)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113501503B (zh) * 2021-07-01 2024-04-02 光大水务科技发展（南京）有限公司 一种基于解吸臭氧再吹扫生成高浓度臭氧的臭氧分离系统及其方法
JP7543622B1 (ja) 2023-02-27 2024-09-03 明電ナノプロセス・イノベーション株式会社 オゾンガス供給システム
CN119330308B (zh) * 2024-12-20 2025-03-21 山东志伟环保科技有限公司 应用于半导体材料清洗刻蚀的高纯度臭氧浓缩工艺及装置

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2683806B2 (ja) * 1988-03-17 1997-12-03 住友精化株式会社 濃縮酸素回収方法
JP3766983B2 (ja) * 1994-09-14 2006-04-19 石川島播磨重工業株式会社 オゾン発生濃縮装置
JPH11335102A (ja) * 1998-05-22 1999-12-07 Iwatani Internatl Corp 高濃度オゾン連続発生方法及びその装置
JP3806590B2 (ja) * 2000-10-20 2006-08-09 岩谷産業株式会社 高濃度オゾンガスの定圧供給方法
WO2008062534A1 (en) * 2006-11-24 2008-05-29 Iwatani Corporation Method of concentrating ozone gas and apparatus therefor
KR101185708B1 (ko) * 2007-11-30 2012-09-24 도시바 미쓰비시덴키 산교시스템 가부시키가이샤 고농도 오존 가스 생성 장치 및 고농도 오존 가스 생성 방법
CN101878182B (zh) * 2007-11-30 2013-01-09 三菱电机株式会社 臭氧浓缩装置
US7819947B2 (en) * 2008-02-12 2010-10-26 Air Products And Chemical, Inc. Ozone production by pressure swing adsorption using a protective adsorbed component
JP5010532B2 (ja) 2008-05-20 2012-08-29 三菱重工業株式会社 高濃度オゾンガスの製造方法とその装置
JP5888908B2 (ja) 2011-09-09 2016-03-22 岩谷産業株式会社 オゾンガスの濃縮方法

Also Published As

Publication number Publication date
US20190126191A1 (en) 2019-05-02
TWI742056B (zh) 2021-10-11
US11123679B2 (en) 2021-09-21
WO2017187787A1 (ja) 2017-11-02
JP2017197423A (ja) 2017-11-02
KR102180199B1 (ko) 2020-11-18
TW201808435A (zh) 2018-03-16
CN109071224A (zh) 2018-12-21
CN109071224B (zh) 2022-03-08
KR20180122450A (ko) 2018-11-12

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