JP2017197423A5 - - Google Patents
Download PDFInfo
- Publication number
- JP2017197423A5 JP2017197423A5 JP2016091888A JP2016091888A JP2017197423A5 JP 2017197423 A5 JP2017197423 A5 JP 2017197423A5 JP 2016091888 A JP2016091888 A JP 2016091888A JP 2016091888 A JP2016091888 A JP 2016091888A JP 2017197423 A5 JP2017197423 A5 JP 2017197423A5
- Authority
- JP
- Japan
- Prior art keywords
- container
- concentration
- gas
- adsorption
- ozone gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001179 sorption measurement Methods 0.000 claims description 62
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 claims description 51
- 239000003463 adsorbent Substances 0.000 claims description 28
- 230000006837 decompression Effects 0.000 claims description 12
- 238000007599 discharging Methods 0.000 claims description 9
- 238000000034 method Methods 0.000 claims description 7
- 239000002994 raw material Substances 0.000 claims 9
- 238000010438 heat treatment Methods 0.000 claims 1
- 238000005949 ozonolysis reaction Methods 0.000 description 1
Priority Applications (6)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2016091888A JP6632464B2 (ja) | 2016-04-28 | 2016-04-28 | オゾンガスの濃縮方法、およびオゾンガスの濃縮装置 |
| CN201780025392.9A CN109071224B (zh) | 2016-04-28 | 2017-03-03 | 臭氧气体的浓缩方法以及臭氧气体的浓缩装置 |
| KR1020187030309A KR102180199B1 (ko) | 2016-04-28 | 2017-03-03 | 오존 가스의 농축 방법, 및 오존 가스의 농축 장치 |
| PCT/JP2017/008615 WO2017187787A1 (ja) | 2016-04-28 | 2017-03-03 | オゾンガスの濃縮方法、およびオゾンガスの濃縮装置 |
| US16/092,220 US11123679B2 (en) | 2016-04-28 | 2017-03-03 | Method for concentrating ozone gas and apparatus for concentrating ozone gas |
| TW106109990A TWI742056B (zh) | 2016-04-28 | 2017-03-24 | 臭氧氣體的濃縮方法、以及臭氧氣體的濃縮裝置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2016091888A JP6632464B2 (ja) | 2016-04-28 | 2016-04-28 | オゾンガスの濃縮方法、およびオゾンガスの濃縮装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2017197423A JP2017197423A (ja) | 2017-11-02 |
| JP2017197423A5 true JP2017197423A5 (https=) | 2019-04-11 |
| JP6632464B2 JP6632464B2 (ja) | 2020-01-22 |
Family
ID=60160254
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2016091888A Active JP6632464B2 (ja) | 2016-04-28 | 2016-04-28 | オゾンガスの濃縮方法、およびオゾンガスの濃縮装置 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US11123679B2 (https=) |
| JP (1) | JP6632464B2 (https=) |
| KR (1) | KR102180199B1 (https=) |
| CN (1) | CN109071224B (https=) |
| TW (1) | TWI742056B (https=) |
| WO (1) | WO2017187787A1 (https=) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113501503B (zh) * | 2021-07-01 | 2024-04-02 | 光大水务科技发展（南京）有限公司 | 一种基于解吸臭氧再吹扫生成高浓度臭氧的臭氧分离系统及其方法 |
| JP7543622B1 (ja) | 2023-02-27 | 2024-09-03 | 明電ナノプロセス・イノベーション株式会社 | オゾンガス供給システム |
| CN119330308B (zh) * | 2024-12-20 | 2025-03-21 | 山东志伟环保科技有限公司 | 应用于半导体材料清洗刻蚀的高纯度臭氧浓缩工艺及装置 |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2683806B2 (ja) * | 1988-03-17 | 1997-12-03 | 住友精化株式会社 | 濃縮酸素回収方法 |
| JP3766983B2 (ja) * | 1994-09-14 | 2006-04-19 | 石川島播磨重工業株式会社 | オゾン発生濃縮装置 |
| JPH11335102A (ja) * | 1998-05-22 | 1999-12-07 | Iwatani Internatl Corp | 高濃度オゾン連続発生方法及びその装置 |
| JP3806590B2 (ja) * | 2000-10-20 | 2006-08-09 | 岩谷産業株式会社 | 高濃度オゾンガスの定圧供給方法 |
| WO2008062534A1 (en) * | 2006-11-24 | 2008-05-29 | Iwatani Corporation | Method of concentrating ozone gas and apparatus therefor |
| KR101185708B1 (ko) * | 2007-11-30 | 2012-09-24 | 도시바 미쓰비시덴키 산교시스템 가부시키가이샤 | 고농도 오존 가스 생성 장치 및 고농도 오존 가스 생성 방법 |
| CN101878182B (zh) * | 2007-11-30 | 2013-01-09 | 三菱电机株式会社 | 臭氧浓缩装置 |
| US7819947B2 (en) * | 2008-02-12 | 2010-10-26 | Air Products And Chemical, Inc. | Ozone production by pressure swing adsorption using a protective adsorbed component |
| JP5010532B2 (ja) | 2008-05-20 | 2012-08-29 | 三菱重工業株式会社 | 高濃度オゾンガスの製造方法とその装置 |
| JP5888908B2 (ja) | 2011-09-09 | 2016-03-22 | 岩谷産業株式会社 | オゾンガスの濃縮方法 |
-
2016
- 2016-04-28 JP JP2016091888A patent/JP6632464B2/ja active Active
-
2017
- 2017-03-03 US US16/092,220 patent/US11123679B2/en active Active
- 2017-03-03 WO PCT/JP2017/008615 patent/WO2017187787A1/ja not_active Ceased
- 2017-03-03 CN CN201780025392.9A patent/CN109071224B/zh active Active
- 2017-03-03 KR KR1020187030309A patent/KR102180199B1/ko active Active
- 2017-03-24 TW TW106109990A patent/TWI742056B/zh active
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| TWI581855B (zh) | 製造高純度氣體的方法及裝置 | |
| CN101878182B (zh) | 臭氧浓缩装置 | |
| TWI534074B (zh) | Ozone gas concentration method and device thereof | |
| US20170246588A1 (en) | Adsorption system with circulating adsorbent arrangement | |
| JP2017197423A5 (https=) | ||
| KR20180028492A (ko) | 오리피스들에 의한 흐름 조절을 갖는 압력 스윙 흡착기들 | |
| CN103596661B (zh) | 目标气体分离方法和目标气体分离装置 | |
| JP6384960B2 (ja) | ヘリウムガスの精製方法および精製システム | |
| TWI742056B (zh) | 臭氧氣體的濃縮方法、以及臭氧氣體的濃縮裝置 | |
| TWI720164B (zh) | 臭氧氣體的濃縮方法、以及臭氧氣體的濃縮裝置 | |
| US20160129387A1 (en) | Device for producing purified oxygen | |
| CN112742169A (zh) | 一种吸附工艺方法 | |
| JP5427412B2 (ja) | オゾンガス濃縮方法及びその装置 | |
| PH12016501880A1 (en) | Purification method and purification device for target gas | |
| RU2597600C1 (ru) | Разделение газовых смесей способом короткоцикловой безнагревной адсорбции с использованием трех адсорбционных колонн | |
| JP2014073461A (ja) | 混合ガスの精製方法及び精製装置 | |
| JP7149573B2 (ja) | 圧力スイング吸着装置 | |
| CN111417451A (zh) | 气体提炼装置、气体提炼方法、丙烯制备装置及丙烷制备装置 | |
| JP6905508B2 (ja) | 濃縮された目的ガスの製造方法 | |
| CN103998112A (zh) | 具有减小的空隙容积和均匀的流动分布的吸附容器 | |
| JP2014000241A (ja) | 酸素濃縮装置 | |
| JP2013240728A (ja) | 混合ガスの分離装置および方法 | |
| JP2017202447A (ja) | ガス分離装置 |