WO2017146200A1 - 被覆工具 - Google Patents
被覆工具 Download PDFInfo
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- WO2017146200A1 WO2017146200A1 PCT/JP2017/007048 JP2017007048W WO2017146200A1 WO 2017146200 A1 WO2017146200 A1 WO 2017146200A1 JP 2017007048 W JP2017007048 W JP 2017007048W WO 2017146200 A1 WO2017146200 A1 WO 2017146200A1
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- layer
- titanium carbonitride
- coated tool
- tool according
- carbonitride layer
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
- C23C28/042—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material including a refractory ceramic layer, e.g. refractory metal oxides, ZrO2, rare earth oxides
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23B—TURNING; BORING
- B23B27/00—Tools for turning or boring machines; Tools of a similar kind in general; Accessories therefor
- B23B27/14—Cutting tools of which the bits or tips or cutting inserts are of special material
- B23B27/16—Cutting tools of which the bits or tips or cutting inserts are of special material with exchangeable cutting bits or cutting inserts, e.g. able to be clamped
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23B—TURNING; BORING
- B23B27/00—Tools for turning or boring machines; Tools of a similar kind in general; Accessories therefor
- B23B27/14—Cutting tools of which the bits or tips or cutting inserts are of special material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/34—Nitrides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/36—Carbonitrides
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/40—Oxides
- C23C16/403—Oxides of aluminium, magnesium or beryllium
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
- C23C28/044—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material coatings specially adapted for cutting tools or wear applications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C30/00—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process
- C23C30/005—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process on hard metal substrates
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23B—TURNING; BORING
- B23B2224/00—Materials of tools or workpieces composed of a compound including a metal
- B23B2224/32—Titanium carbide nitride (TiCN)
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23B—TURNING; BORING
- B23B2228/00—Properties of materials of tools or workpieces, materials of tools or workpieces applied in a specific manner
- B23B2228/10—Coatings
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23C—MILLING
- B23C2224/00—Materials of tools or workpieces composed of a compound including a metal
- B23C2224/32—Titanium carbide nitride (TiCN)
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23C—MILLING
- B23C2228/00—Properties of materials of tools or workpieces, materials of tools or workpieces applied in a specific manner
- B23C2228/10—Coating
Definitions
- the present disclosure relates to a coated tool having a coating layer on a surface of a substrate.
- a coated tool in which a coating layer having a structure in which a titanium carbonitride layer and an aluminum oxide layer are laminated on the surface of a substrate such as cemented carbide, cermet, or ceramic is known.
- the efficiency of cutting has been improved, and the above-mentioned coated tool is increasingly used for cutting that requires a large impact on the cutting edge such as heavy interrupted cutting.
- the coating layer is required to have improved fracture resistance in addition to wear resistance.
- Patent Document 1 discloses that a titanium carbonitride layer and an aluminum oxide layer are formed, and a region in which fine pores are distributed exists in a specific region in the titanium carbonitride layer. In recent years, the coating layer is required to be further improved in wear resistance and fracture resistance.
- the coating tool includes a base and a coating layer positioned on the surface of the base.
- the coating layer includes a first titanium carbonitride layer located on the substrate side, a second titanium carbonitride layer located on the first titanium carbonitride layer, and the second titanium carbonitride layer. And an aluminum oxide layer located on the surface.
- the first titanium carbonitride layer has a plurality of first protrusions protruding toward the aluminum oxide layer
- the second titanium carbonitride layer is a plurality of second protrusions protruding toward the aluminum oxide layer.
- the number of the second protrusions is larger than the number of the first protrusions.
- FIG. 3 It is a schematic perspective view of the covering tool (cutting tool) concerning one embodiment. It is a schematic diagram of the cross section of the covering tool shown in FIG. FIG. 3 is an enlarged view of the vicinity of a first layer and a second layer in the coated tool shown in FIG. 2.
- a cutting tool (hereinafter simply referred to as a tool) 1 as a coated tool according to an embodiment will be described with reference to the drawings.
- the tool 1 includes a base 2 and a coating layer 3 positioned on the surface of the base 2.
- the covering layer 3 includes a first titanium carbonitride layer 4 containing titanium carbonitride (TiCN) (hereinafter simply referred to as the first layer 4), and a second titanium carbonitride layer 5 containing titanium carbonitride (hereinafter referred to as the first carbonitride layer 5) And the aluminum oxide layer 6 containing aluminum oxide (Al 2 O 3 ) (hereinafter simply referred to as the third layer 6), and the plurality of layers are It has a laminated structure.
- the first layer 4 to the third layer 6 the first layer 4 is located closest to the substrate 2, and the third layer 6 is located farthest from the substrate 2.
- the second layer 5 is located between the first layer 4 and the third layer 6.
- the covering layer 3 may have another layer in addition to the first layer 4, the second layer 5, and the third layer 6. This other layer may be located closer to the substrate 2 than the first layer 4, or may be located farther from the substrate 2 than the third layer 6.
- the first layer 4 in the present embodiment contains so-called MT (moderate temperature) -titanium carbonitride.
- the thickness of the first layer 4 can be set to 2 to 15 ⁇ m, for example.
- the particle size of MT-titanium carbonitride can be set to 0.08 ⁇ m or less, for example.
- the first layer 4 is made of a raw material containing, for example, titanium tetrachloride (TiCl 4 ) gas, nitrogen (N 2 ) gas, acetonitrile (CH 3 CN) gas, etc. It can be formed by forming a film at a low temperature.
- TiCl 4 titanium tetrachloride
- N 2 nitrogen
- CH 3 CN acetonitrile
- the second layer 5 in the present embodiment contains so-called HT (high temperature) -titanium carbonitride.
- the thickness of the second layer 5 can be set to 30 nm to 900 nm, for example. When the thickness of the second layer 5 is in the above range, the adhesion of the second layer 5 is high and the fracture resistance of the second layer 5 is improved.
- the second layer 5 is formed of MT-titanium carbonitride using a raw material containing, for example, titanium tetrachloride gas, nitrogen gas, methane (CH 4 ) gas, oxygen (O 2 ) gas, etc., but not acetonitrile gas. It can be formed by forming a film at 900 ° C. to 1050 ° C., which is higher than the conditions.
- first layer 4 and the second layer 5 are merely examples, and are not limited to this configuration.
- first layer 4 and the second layer 5 may both contain MT (moderate temperature) -titanium carbonitride, and the composition of the additives may be different from each other.
- the third layer 6 in this embodiment contains aluminum oxide.
- the configuration of aluminum oxide in the third layer 6 is not particularly limited, but in this embodiment, it has an ⁇ -type crystal structure. Yes.
- the thickness of the third layer 6 can be set to 1 to 15 ⁇ m, for example.
- the tool 1 includes a first surface 7, a second surface 8 positioned opposite to the first surface 7, and a third surface 9 positioned between the first surface 7 and the second surface 8. And has a square plate shape. Accordingly, in the present embodiment, the first surface 7 and the third surface 9 intersect.
- the first surface 7 may be referred to as an upper surface
- the second surface 8 may be referred to as a lower surface
- the third surface 9 may be referred to as a side surface in accordance with FIG.
- At least a part of the third surface 9 functions as a so-called flank. Further, at least a part of the first surface 7 has a function as a so-called rake face that scrapes off chips generated by cutting.
- the cutting blade 10 is located at least at a part of the portion where the first surface 7 and the third surface 9 intersect.
- the cutting edge 10 is generally located at a portion where the rake face and the flank face intersect. By cutting the cutting edge 10 against the work material, the work material can be cut.
- the coated tool of the present embodiment is a cutting tool, but the coated tool can be applied to various uses such as an excavating tool and a blade in addition to the cutting tool. Reliability.
- the first layer 4 has a plurality of first protrusions 11 protruding toward the third layer 6 as shown in FIG. Since the first layer 4 has the plurality of first protrusions 11, the area of the interface between the first layer 4 and the second layer 5 increases. Thereby, since the bondability of the 1st layer 4 and the 2nd layer 5 improves, the possibility that the 2nd layer 5 peels from the 1st layer 4 can be made small.
- the size of the first protrusion 11 is not limited to a specific value.
- the average width of the first protrusion 11 can be set to 80 nm to 600 nm, and the average height of the first protrusion 11 can be set to 30 nm to 200 nm. .
- the height h1 of the first protrusion 11 is, for example, as shown in FIG. 3, two valleys p and q positioned between the first protrusion 11 adjacent to the target first protrusion 11.
- the distance in the thickness direction from the valley portion p on the side farther from the base body 2 (the side having a higher height from the base body 2) to the top portion of the target first protrusion 11 is meant.
- the average height of the first protrusions 11 is measured by the average value of the heights h1 of three or more adjacent first protrusions 11.
- the width w1 of the first protrusion 11 is the length of the first protrusion 11 in the direction perpendicular to the thickness direction at the height position of the valley part p located higher of the two valley parts p and q. Means.
- the average width of the first protrusions 11 is measured by the average value of the widths w1 of three or more adjacent first protrusions 11.
- the second layer 5 has a plurality of second protrusions 12 protruding to the third layer 6 side. Since the second layer 5 includes the plurality of second protrusions 12, the area of the interface between the second layer 5 and the third layer 6 increases. Thereby, since the bondability of the 2nd layer 5 and the 3rd layer 6 improves, the possibility that the 3rd layer 6 peels from the 2nd layer 5 can be made small.
- the size of the second protrusion 12 is not limited to a specific value.
- the average width of the second protrusion 12 is set to 80 nm to 300 nm, and the average height of the second protrusion 12 is set to 50 nm to 200 nm. it can.
- the height h2 of the second protrusion 12 includes two valleys r and s located between the second protrusion 12 adjacent to the target second protrusion 12 respectively. Means the distance in the thickness direction from the trough r on the side away from the base 2 (the side having a high height from the base 2) to the top of the target second protrusion 12.
- the average height of the second protrusions 12 is measured by the average value of the heights h2 of three or more adjacent second protrusions 12.
- the width w2 of the second protrusion 12 is the length of the second protrusion 12 in the direction orthogonal to the thickness direction at the height position of the trough r that is higher of the two troughs r and s. Means.
- the average width of the second protrusions 12 is measured by the average value of the widths w2 of three or more adjacent second protrusions 12.
- the number of the second protrusions 12 is larger than the number of the first protrusions 11. While the first layer 4 and the second layer 5 both contain titanium carbonitride, the third layer 6 contains aluminum oxide. Therefore, the bonding properties of the second layer 5 and the third layer 6 are likely to be lower than the bonding properties of the first layer 4 and the second layer 5. However, since the number of the second protrusions 12 is larger than the number of the first protrusions 11, the bondability of the second layer 5 and the third layer 6 is improved, and the durability of the entire coating layer 3 is also improved.
- the number of the first protrusions 11 and the second protrusions 12 does not necessarily have to be evaluated for all of the first layer 4 and the second layer 5, and may be evaluated in a cross section as shown in FIG. Specifically, as shown in FIG. 2, the number of the first protrusions 11 and the second protrusions 12 may be calculated and compared in a cross section where ten or more first protrusions 11 are shown.
- the first protrusion 11 and the second protrusion 12 each have a convex shape whose width becomes narrower as the distance from the base body 2 increases.
- the tip angle of the second protrusion 12 is smaller than the tip angle of the first protrusion 11, the durability of the coating layer 3 as a whole is enhanced.
- the tip angle of the first protrusion 11 is relatively small, so that the thickness of the second layer 5 can be secured stably.
- the anchor effect to the 3rd layer 6 by the 2nd protrusion 12 can be heightened because the front-end
- the tip angles of the first protrusion 11 and the second protrusion 12 are evaluated at the respective tip portions of the first protrusion 11 and the second protrusion 12 in a cross section orthogonal to the surface of the base 2. That's fine.
- the tip angle of the first protrusion 11 is indicated by ⁇ 1
- the tip angle of the second protrusion 12 is indicated by ⁇ 2.
- ⁇ 1 is an obtuse angle
- ⁇ 2 is an acute angle.
- the first crystal 13, which is a titanium carbonitride crystal contained in the first layer 4, consists of columnar crystals that are elongated in the thickness direction of the coating layer 3.
- the first crystal 13 in the present embodiment has a twin structure, and the twin boundary 14 extends in the thickness direction of the coating layer 3. Further, the top of the first protrusion 11 is located on the twin boundary 14.
- the entire first crystal 13 is not shown because it is an enlarged view of the main part, but the first crystal 13 in the first layer 4 is elongated in the thickness direction of the coating layer 3.
- the columnar crystal simply has a configuration elongated in the thickness direction of the coating layer 3 and refers to a state in which the ratio of the average crystal width to the length of the coating layer 3 in the thickness direction is 0.3 or less on average. Therefore, the columnar crystal may have a configuration in which the width in the direction orthogonal to the thickness direction is substantially constant, or may have a configuration in which the width in the direction orthogonal to the thickness direction changes as the distance from the substrate 2 increases.
- the fracture resistance of the first layer 4 is improved.
- the average aspect ratio is expressed by (average crystal length) / (average crystal width).
- the average length is an average of dimensions in the thickness direction of the coating layer 3
- the average crystal width is a dimension in a direction parallel to the substrate 2, in other words, a dimension orthogonal to the thickness direction of the coating layer 3. Average.
- the toughness of the first layer 4 is increased and the impact applied to the coating layer 3 can be absorbed by the first layer 4.
- the fracture resistance of the layer 3 is improved.
- the chipping resistance of the coating layer 3 is further improved.
- the second crystal 15 does not extend so as to strictly reflect the shape of the upper end of the first layer 4.
- the first layer 4 has a valley located between the adjacent first protrusions 11, and a part of the second crystal 15 located above the valley of the first layer 4 is the coating layer 3. It extends greatly in the thickness direction. Therefore, in the present embodiment, the number of the second protrusions 12 is larger than the number of the first protrusions 11.
- a void 16 may exist on the valley, and the second crystal 15 may be located immediately above the void 16. There is a tendency to extend easily. Therefore, when there are a plurality of voids 16 on at least one of the plurality of valleys, the number of the second protrusions 12 can be increased by greatly extending the second crystal 15 located immediately above the voids 16. it can. At this time, when the gap 16 is present not on the top of the first protrusion 11 but on the valley, it is possible to avoid a significant decrease in the bondability between the first layer 4 and the second layer 5.
- the second protrusions 12 are located directly above the gaps 16 that are half or more of the plurality of gaps 16, the number of the second protrusions 12 can be increased efficiently.
- the bondability of the layer 6 can be further enhanced.
- the fact that the second protrusion 12 is located immediately above the gap 16 means that the top of the second protrusion 12 is located on a virtual region where the gap 16 is extended in the thickness direction of the coating layer 3.
- the size of the void 16 is not limited to a specific value.
- the area of the circle of 100 nm is equivalent, when the size of the air gap 16 is in the above range, the effect of increasing the second protrusion 12 is high, and the first layer 4, the second layer 5, etc. Impact resistance can be increased.
- the first layer 4 and the second layer 5 each contain titanium carbonitride.
- the content ratio of carbon with respect to the total content of carbon and nitrogen in the first layer 4 is defined as a first ratio
- the content ratio of carbon with respect to the total content of carbon and nitrogen in the second layer 5 is defined as a second ratio.
- the second ratio is smaller than the first ratio
- the hardness of the first layer 4 is improved and the bonding properties of the second layer 5 and the third layer 6 are improved.
- the wear resistance and fracture resistance of the coating layer 3 are improved.
- the wear resistance and fracture resistance of the coating layer 3 are further improved.
- the first layer 4 may contain 0.5 atomic% or less of oxygen as an inevitable impurity.
- the bondability between the second layer 5 and the third layer 6 can be further enhanced while increasing the strength of the second layer 5.
- the second layer 5 may contain 1 to 10 atomic% of oxygen as an inevitable impurity.
- the voids 16 are more easily formed. It is possible to form.
- the carbon and nitrogen contents in the first layer 4 and the second layer 5 can be measured using an energy dispersive X-ray spectrometer (EDS) attached to a transmission electron microscope (TEM).
- EDS energy dispersive X-ray spectrometer
- TEM transmission electron microscope
- the first layer 4 and the second layer 5 may be directly bonded, but the covering layer 3 is located between the first layer 4 and the second layer 5 in order to improve the bondability of these layers.
- the first intermediate layer 17 containing the components constituting the first layer 4 and the second layer 5 may be included.
- the first intermediate layer 17 in this embodiment contains 30 to 70 atomic% titanium, 24 to 30 atomic% carbon, 16 to 23 atomic% nitrogen, and 2 to 5 atomic% oxygen.
- the composition of the first intermediate layer 17 is the above, the voids 16 can be formed.
- the titanium carbonitride crystals in the first intermediate layer 17 and the second layer 5 have a twin crystal structure, and the first layer 4 and the second layer 2
- the crystal twin boundaries 14 in the layer 5 and the first intermediate layer 17 are continuous, the connectivity of the first layer 4, the second layer 5, and the first intermediate layer 17 is further enhanced.
- the second layer 5 and the third layer 6 may be directly bonded, but contain components constituting the second layer 5 and the third layer 6 between the second layer 5 and the third layer 6.
- the second intermediate layer 18 may be included.
- the second intermediate layer 18 contains 30 to 70 atomic percent of titanium, 0 to 70 atomic percent of carbon, 0 to 35 atomic percent of nitrogen, and 3 to 20 atomic percent of oxygen.
- the adhesion between the second layer 5 and the third layer 6 is improved, and the aluminum oxide crystal in the third layer 6 is easily formed into an ⁇ -type crystal structure.
- the adhesion between the second intermediate layer 18 and the third layer 6 is improved.
- the fracture resistance of 1 is improved.
- the acicular crystal 19 means that the aspect ratio is 3 or more and a tapered shape.
- the aspect ratio means (the length of the needle crystal 19) / (the width in the direction perpendicular to the extending direction of the needle crystal 19 in the middle of the length of the needle crystal 19).
- the number of acicular crystals 19 is not particularly limited, but when there are three or more acicular crystals 19 on average per one first protrusion 11, the second intermediate layer 18 and the third layer 6 can be stably improved.
- the length of the needle crystal 19 is 20 nm to 300 nm, particularly when the average length of the needle crystal 19 is 40 nm to 100 nm, the anchor effect of the needle crystal 19 on the third layer 6 can be enhanced. it can.
- the second intermediate layer 18 is used. And the adhesiveness of the 3rd layer 6 is improved further.
- the thickness of the second intermediate layer 18 when the thickness of the second intermediate layer 18 is 10 nm to 40 nm, it is easy to make the aluminum oxide crystal in the third layer 6 have an ⁇ -type crystal structure while ensuring the strength of the second intermediate layer 18.
- the thickness of the second intermediate layer 18 means a thickness in a portion excluding the needle crystal 19.
- the boundary between these regions can be easily distinguished, and the portion excluding the needle-like crystal 19
- the thickness of the second intermediate layer 18 can be evaluated. Further, the length of the needle crystal 19 can be easily evaluated by discriminating the above-mentioned bending point.
- the covering layer 3 in the present embodiment includes a base layer 20 and a surface layer 21 in addition to the first layer 4, the second layer 5, the third layer 6, the first intermediate layer 17 and the second intermediate layer 18. ing.
- the underlayer 20 is located between the base 2 and the first layer 4 and is the lowermost layer in the coating layer 3.
- the underlayer 20 contains titanium nitride (TiN) or titanium carbonitride.
- TiN titanium nitride
- the thickness of the underlayer 20 can be set to 0.1 ⁇ m to 1 ⁇ m, for example.
- the surface layer 21 is located on the third layer 6 and is the uppermost layer in the coating layer 3.
- the material of the surface layer 21 include titanium nitride, titanium carbonitride, titanium carbonitride (TiCNO), and chromium nitride (CrN).
- TiCNO titanium carbonitride
- CrN chromium nitride
- the thickness of the surface layer 21 can be set to 0.1 ⁇ m to 3 ⁇ m, for example.
- the coating layer 3 does not need to have the 1st intermediate
- each layer in the covering layer 3 is set such that 10 or more measurement points are set at equal intervals in a visual field in which three or more first protrusions 11 exist, and the thickness is measured at these measurement points. Can be evaluated by average value.
- each layer in the coating layer 3 are measured by observing an electron micrograph (scanning electron microscope (SEM) photograph or transmission electron microscope (TEM) photograph) in the cross section of the tool 1. It is possible.
- the average crystal width of each crystal is a value obtained by calculating a width in a direction parallel to the surface of the substrate 2 at an intermediate length in the thickness direction of each crystal and averaging this.
- the material constituting the substrate 2 examples include hard alloys, ceramics, and metals.
- the hard alloy may be, for example, a cemented carbide containing tungsten carbide (WC) and an iron group metal such as cobalt (Co) or nickel (Ni).
- Other hard alloys may be, for example, titanium carbonitride and Ti-based cermets containing iron group metals such as cobalt and nickel.
- the ceramic include silicon nitride (Si 3 N 4 ), aluminum oxide, diamond, and cubic boron nitride (cBN).
- Examples of the metal include carbon steel, high speed steel, and alloy steel. Among the above materials, when the substrate 2 is made of cemented carbide or cermet, the chipping resistance and wear resistance of the substrate 2 are improved.
- the tool 1 of the present embodiment performs cutting by applying the cutting edge 10 formed on at least a part of the portion where the rake face and the flank face to the workpiece, and exhibits the above-described excellent effects. Can do. Moreover, as a coated tool, in addition to the cutting tool of this embodiment, it can be applied to various uses such as wear parts such as sliding parts and molds, tools such as excavation tools, blades, and impact resistant parts. Also in this case, it has excellent mechanical reliability.
- a metal powder, a carbon powder, etc. are appropriately added and mixed to an inorganic powder selected from carbides, nitrides, carbonitrides, oxides, and the like that can be formed by firing a hard alloy to be the base 2, and a mixed powder Is made.
- the mixed powder is formed into a predetermined tool shape by using a known forming method to produce a formed body. Examples of the molding method include press molding, cast molding, extrusion molding, and cold isostatic pressing.
- the base body 2 is produced by firing the molded body in a vacuum or in a non-oxidizing atmosphere. In addition, you may perform a grinding
- the coating layer 3 is formed on the surface of the substrate 2 by chemical vapor deposition (CVD).
- the underlayer 20 is formed. Hydrogen (H 2 ) gas is mixed with 0.5 to 10% by volume of titanium tetrachloride gas and 10 to 60% by volume of nitrogen gas to produce a first mixed gas used as a reaction gas. The first mixed gas is introduced into the chamber, and the underlayer 20 containing titanium nitride is formed.
- Hydrogen (H 2 ) gas is mixed with 0.5 to 10% by volume of titanium tetrachloride gas and 10 to 60% by volume of nitrogen gas to produce a first mixed gas used as a reaction gas.
- the first mixed gas is introduced into the chamber, and the underlayer 20 containing titanium nitride is formed.
- the first layer 4 is formed.
- Hydrogen gas is mixed with 0.5 to 10% by volume of titanium tetrachloride gas, 5 to 60% by volume of nitrogen gas, and 0.1 to 3% by volume of acetonitrile gas to produce a second mixed gas.
- a second mixed gas is introduced into the chamber to form a first layer 4 containing MT-titanium carbonitride.
- the first intermediate layer 17 is formed. 3% to 30% by volume of titanium tetrachloride gas, 3% to 15% by volume of methane gas, 5% to 10% by volume of nitrogen gas, 0.5% to 10% by volume of hydrogen gas
- a third mixed gas is produced by mixing the carbon dioxide (CO 2 ) gas.
- the third mixed gas is introduced into the chamber, and the first intermediate layer 17 is formed.
- the third mixed gas contains carbon dioxide gas, the gap 16 is easily formed.
- the film formation chamber is once cooled, the sample is taken out into the atmosphere, and then the sample is again placed in the film formation chamber.
- the second layer may be deposited by setting and heating the deposition chamber. Thereby, the interface of the 1st layer 4 and the 2nd layer 5 appears clearly.
- the second layer 5 is formed.
- hydrogen gas 1 to 4 volume% titanium tetrachloride gas, 5 to 20 volume% nitrogen gas, 0.1 to 10 volume% methane gas, and 0.5 volume% to 10 volume% carbon dioxide gas are mixed to produce a fourth mixed gas.
- a fourth mixed gas is introduced into the chamber to form a second layer 5 containing HT-titanium carbonitride.
- the voids 16 are easily formed on the valleys in the first layer 4 and the second layer 5 has the second Defects in the two crystals 15 can be reduced.
- the second intermediate layer 18 is formed.
- Hydrogen gas, 3-15 volume% titanium tetrachloride gas, 3-10 volume% methane gas, 3-25 volume% nitrogen gas, and 0.5-2 volume% carbon monoxide (CO) gas are mixed to produce a fifth mixed gas.
- the fifth mixed gas is introduced into the chamber, and the second intermediate layer 18 is formed.
- the film forming temperature is 950 ° C. to 1100 ° C.
- the gas pressure is 5 kPa to 20 kPa
- the composition of the reaction gas is hydrogen gas, 5 volume% to 15 volume% aluminum trichloride (AlCl 3 ) gas, and 0.5 volume.
- % To 2.5% by volume hydrogen chloride (HCl) gas, 0.5% to 5.0% by volume carbon dioxide gas, 0% to 1% by volume hydrogen sulfide (H 2 S) gas, Are mixed to prepare a sixth mixed gas.
- the sixth mixed gas is introduced into the chamber, and the third phase 6 is formed.
- a seventh mixed gas is produced by mixing hydrogen gas with 0.1 to 10% by volume of titanium tetrachloride gas and 10 to 60% by volume of nitrogen gas.
- the seventh mixed gas is introduced into the chamber, and the surface layer 21 is formed.
- the part where the cutting edge 10 is located on the surface of the deposited coating layer 3 is polished.
- the tool 1 is further excellent in fracture resistance.
- the SEM observation of the cross section including the coating layer was performed on the sample, and the thickness of each layer and the average crystal width of the first crystal in the first layer were measured.
- TEM observation is performed in the vicinity of the second intermediate layer in the cross section, and the thickness of each layer, the average width and average height of the first protrusion and the second protrusion, the number and size of the voids, and the intermediate layer The number of needle-like crystals and the average length were measured.
- the composition of the first layer, the first intermediate layer, the second layer, and the second intermediate layer was analyzed by EDS (Energy Dispersive X-ray Spectroscopy).
- the numbers of the first protrusions, the second protrusions, and the gaps are numerical values converted to the number per 1 ⁇ m length in the width direction perpendicular to the thickness direction of the coating layer.
- the size of the gap is indicated by the average diameter (diameter d) when the area of the gap observed with a microscope is converted into a circle.
- the first layer has the first protrusion
- the air gap exists above the valley of the first layer
- the second layer has the second protrusion
- Sample No. whose number is larger than the number of the first protrusions.
- the flank wear width was small, and the number of impacts exceeded 6000.
- the second protrusion was generated immediately above 50% of the void.
- Cutting tool 2 Substrate 3 Covering layer 4 First layer 5 Second layer 6 Third layer 7 First surface 8 Second surface 9 Third surface 10
- Cutting edge 11 First protrusion 12
- Second protrusion 13 First crystal 14
- Twin boundary 15 First 2 crystal 16 void 17 first intermediate layer 18 second intermediate layer 19 acicular protrusion 20 underlayer 21 surface layer
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Abstract
Description
今般において、被覆層には、耐摩耗性及び耐欠損性の更なる改善が求められている。
(連続切削条件)
被削材 :ダクタイル鋳鉄(FCD700)
切削速度:300m/分
送り速度:0.3mm/rev
切り込み:1.5mm
切削時間:6分
その他 :水溶性切削液使用
評価項目:走査型電子顕微鏡にて刃先ホーニング部分を観察し、実際に摩耗している部分において、逃げ面におけるフランク摩耗幅を測定。
(断続切削条件)
被削材 :ダクタイル鋳鉄(FCD700 8本溝入り鋼材)
工具形状:CNMG120408
切削速度:150m/分
送り速度:0.3mm/rev
切り込み:1.5mm
その他 :水溶性切削液使用
評価項目:欠損に至る衝撃回数を測定。
2 基体
3 被覆層
4 第1層
5 第2層
6 第3層
7 第1面
8 第2面
9 第3面
10 切刃
11 第1突起
12 第2突起
13 第1結晶
14 双晶境界
15 第2結晶
16 空隙
17 第1中間層
18 第2中間層
19 針状突起
20 下地層
21 表層
Claims (15)
- 基体と、該基体の表面に位置する被覆層とを備えた被覆工具であって、
前記被覆層は、前記基体の上に位置する第1炭窒化チタン層と、該第1炭窒化チタン層の上に位置する第2炭窒化チタン層と、該第2炭窒化チタン層の上に位置する酸化アルミニウム層とを有し、
前記第1炭窒化チタン層は、前記酸化アルミニウム層の側に突出した複数の第1突起を有し、
前記第2炭窒化チタン層は、前記酸化アルミニウム層の側に突出した複数の第2突起を有し、
前記第2突起の数が前記第1突起の数よりも多い被覆工具。 - 前記基体の表面に直交する断面において、前記第2突起の先端角が、前記第1突起の先端角よりも小さい請求項1記載の被覆工具。
- 前記第1炭窒化チタン層は、隣り合う前記第1突起の間に位置する谷部に空隙が存在し、
該空隙の直上に前記第2突起が位置する請求項1又は2記載の被覆工具。 - 前記空隙が複数存在し、前記基体の表面に直交する断面において、前記空隙の面積の平均値が、直径が32~100nmの円の面積に相当する請求項3記載の被覆工具。
- 前記第1炭窒化チタン層における炭素及び窒素の合計含有量に対する炭素の含有比率を第1比率、前記第2炭窒化チタン層における炭素及び窒素の合計含有量に対する炭素の含有比率を第2比率としたとき、前記第2比率が前記第1比率よりも小さい請求項1乃至4のいずれか記載の被覆工具。
- 前記第1比率が0.3~0.57であり、前記第2比率が0.27~0.51である請求項5記載の被覆工具。
- 前記第1炭窒化チタン層における炭素の含有量が15~29原子%、かつ窒素の含有量が22~35原子%であり、
前記第2炭窒化チタン層における炭素の含有量が13~24原子%、かつ窒素の含有量が23~35原子%である請求項5又は6記載の被覆工具。 - 前記第1炭窒化チタン層は、平均アスペクト比が2以上である炭窒化チタン結晶の柱状結晶を有している請求項1乃至7のいずれか記載の被覆工具。
- 前記第1炭窒化チタン層の厚みが2~15μmである請求項1乃至8のいずれか記載の被覆工具。
- 前記第2炭窒化チタン層の厚みが30~900nmである請求項1乃至9のいずれか記載の被覆工具。
- 前記被覆層は、前記第1炭窒化チタン層と前記第2炭窒化チタン層との間に位置する第1中間層をさらに有し、
該第1中間層は、チタンを30~70原子%、炭素を24~30原子%、窒素を16~23原子%、酸素を2~5原子%の割合で含有している請求項1乃至10のいずれか記載の被覆工具。 - 前記被覆層は、前記第2炭窒化チタン層と前記酸化アルミニウム層との間に位置する第2中間層をさらに有し、
該第2中間層は、チタンを30~70原子%、炭素を0~70原子%、窒素を0~35原子%、酸素を3~20原子%の割合で含有している請求項1乃至11のいずれか記載の被覆工具。 - 前記第2中間層は、前記酸化アルミニウム層に向かって突出する針状結晶を有する請求項12記載の被覆工具。
- 前記第2中間層における前記針状結晶を除く部分の厚みが10~40nmである請求項13記載の被覆工具。
- 前記第1炭窒化チタン層及び前記第2炭窒化チタン層のうち少なくとも前記第1炭窒化チタン層が、酸素を含有しており、
前記第2炭窒化チタン層中に存在する酸素含有量が前記第1炭窒化チタン層中に存在する酸素含有量よりも多い請求項1乃至14のいずれか記載の被覆工具。
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US16/079,581 US10717135B2 (en) | 2016-02-24 | 2017-02-24 | Coated tool |
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Publication number | Publication date |
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JP6940580B2 (ja) | 2021-09-29 |
KR102176903B1 (ko) | 2020-11-10 |
US10717135B2 (en) | 2020-07-21 |
CN108698136B (zh) | 2021-03-23 |
US20190039148A1 (en) | 2019-02-07 |
JP6633736B2 (ja) | 2020-01-22 |
KR20180104711A (ko) | 2018-09-21 |
DE112017000972T5 (de) | 2018-11-29 |
DE112017000972B4 (de) | 2024-02-22 |
CN108698136A (zh) | 2018-10-23 |
JP2020062745A (ja) | 2020-04-23 |
JPWO2017146200A1 (ja) | 2018-11-29 |
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