WO2017090437A1 - カメラモジュールおよび電子機器 - Google Patents
カメラモジュールおよび電子機器 Download PDFInfo
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- WO2017090437A1 WO2017090437A1 PCT/JP2016/083324 JP2016083324W WO2017090437A1 WO 2017090437 A1 WO2017090437 A1 WO 2017090437A1 JP 2016083324 W JP2016083324 W JP 2016083324W WO 2017090437 A1 WO2017090437 A1 WO 2017090437A1
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- Prior art keywords
- lens
- substrate
- camera module
- light receiving
- light
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- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
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- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
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- H01L27/14634—Assemblies, i.e. Hybrid structures
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- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14683—Processes or apparatus peculiar to the manufacture or treatment of these devices or parts thereof
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- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
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- H01L27/14683—Processes or apparatus peculiar to the manufacture or treatment of these devices or parts thereof
- H01L27/1469—Assemblies, i.e. hybrid integration
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- H04N23/00—Cameras or camera modules comprising electronic image sensors; Control thereof
- H04N23/45—Cameras or camera modules comprising electronic image sensors; Control thereof for generating image signals from two or more image sensors being of different type or operating in different modes, e.g. with a CMOS sensor for moving images in combination with a charge-coupled device [CCD] for still images
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- H04N23/55—Optical parts specially adapted for electronic image sensors; Mounting thereof
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- H04N23/95—Computational photography systems, e.g. light-field imaging systems
- H04N23/957—Light-field or plenoptic cameras or camera modules
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- H04N25/10—Circuitry of solid-state image sensors [SSIS]; Control thereof for transforming different wavelengths into image signals
- H04N25/11—Arrangement of colour filter arrays [CFA]; Filter mosaics
- H04N25/13—Arrangement of colour filter arrays [CFA]; Filter mosaics characterised by the spectral characteristics of the filter elements
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
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- G02B1/11—Anti-reflection coatings
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
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- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14683—Processes or apparatus peculiar to the manufacture or treatment of these devices or parts thereof
- H01L27/14685—Process for coatings or optical elements
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Definitions
- the present technology relates to a camera module and an electronic device, and particularly to a camera module and an electronic device that can provide a camera module that can be used for various purposes.
- Patent Document 1 proposes a method of laminating a wafer substrate by using a lens material as an adhesive as it is when a lens is formed by filling a through hole formed in the substrate with a lens material.
- the present technology has been made in view of such circumstances, and is intended to provide a camera module that can be used for various purposes.
- the camera module includes a first pixel array in which pixels that receive light having a wavelength of R, G, or B are two-dimensionally arranged in a matrix, and light in a wavelength region of visible light
- a second pixel array in which pixels receiving light are two-dimensionally arranged in a matrix, a first optical unit for condensing incident light on the first pixel array, and the incident light on the second pixel
- a second optical unit for collecting light on the array.
- the electronic device includes a first pixel array in which pixels that receive light having a wavelength of R, G, or B are two-dimensionally arranged in a matrix, and light in a wavelength region of visible light
- a second pixel array in which pixels receiving light are two-dimensionally arranged in a matrix, a first optical unit for condensing incident light on the first pixel array, and the incident light on the second pixel
- a camera module including a second optical unit for focusing on the array.
- incident light is incident on the first pixel array in which pixels that receive light of R, G, or B wavelengths are two-dimensionally arranged in a matrix.
- incident light is collected by the second pixel array on the second pixel array in which pixels that receive light in the wavelength region of visible light and are two-dimensionally arranged in a matrix are collected by the unit.
- the camera module and the electronic device may be independent devices or may be modules incorporated in other devices.
- a camera module that can be used for various purposes can be provided.
- FIG. 2 is a cross-sectional structure diagram of a laminated lens structure of the camera module of FIG. 1. It is a figure explaining the direct joining of the board
- FIG. 10 is a cross-sectional view of a lens array substrate as Comparative Structure Example 2.
- FIG. It is a figure explaining the manufacturing method of the lens array board
- FIG. It is a figure explaining the manufacturing method of the lens array board
- FIG. It is a figure explaining the effect
- FIG. It is sectional drawing of the laminated lens structure as the comparative structure example 7. It is a figure explaining the effect
- FIG. 62 is a diagram illustrating a method of manufacturing the lens-attached substrate in A of FIG. 61.
- FIG. 62 is a diagram illustrating a method of manufacturing the lens-attached substrate in B of FIG. 61. It is a figure showing the example of the planar shape of the aperture plate with which a camera module is equipped. It is a figure explaining the structure of the light-receiving area
- FIG. 67 is a diagram showing a modification of the pixel array shown in FIG. 66.
- FIG. 69 is a diagram showing a modification of the pixel array in FIG. 68.
- FIG. 70 is a diagram showing a modification of the pixel array in FIG. 69. It is a figure which shows the 5th example of the pixel array of the light-receiving area
- FIG. 1 is a diagram illustrating a first embodiment of a camera module using a laminated lens structure to which the present technology is applied.
- FIG. 1A is a schematic diagram showing a configuration of a camera module 1A as a first embodiment of the camera module 1.
- FIG. 1B is a schematic cross-sectional view of the camera module 1A.
- the camera module 1A includes a laminated lens structure 11 and a light receiving element 12.
- the laminated lens structure 11 includes five optical units 13 in total, five in each of the vertical and horizontal directions.
- the light receiving element 12 is a solid-state imaging device having a plurality of light receiving regions (pixel arrays) corresponding to the optical unit 13.
- the optical unit 13 includes a plurality of lenses 21 in the direction of one optical axis, and collects incident light on the corresponding light receiving element 12.
- the camera module 1 ⁇ / b> A is a compound eye camera module including a plurality of optical units 13.
- the optical axes of the plurality of optical units 13 provided in the camera module 1A are arranged so as to spread toward the outside of the module, thereby enabling wide-angle image shooting. Yes.
- the laminated lens structure 11 has a structure in which only three layers of lenses 21 are laminated, but it goes without saying that more lenses 21 may be laminated.
- the camera module 1A in FIG. 1 can create a single wide-angle image by stitching together a plurality of images taken via a plurality of optical units 13.
- high precision is required for the formation and arrangement of each optical unit 13 that captures each image.
- high accuracy is required for the positional relationship and arrangement of the lenses 21 in the optical unit 13.
- FIG. 2 is a cross-sectional structure diagram of a laminated lens structure disclosed in Patent Document 1 using a resin fixing technique.
- a resin 513 is used as means for fixing the substrates 512 provided with the lenses 511 together.
- the resin 513 is an energy curable resin such as UV curable resin.
- a resin 513 layer is formed on the entire surface of the substrate 512. Thereafter, the substrates 512 are bonded together, and the resin 513 is cured. Thereby, the bonded substrates 512 are fixed to each other.
- the resin 513 when the resin 513 is cured, the resin 513 is cured and contracted. In the case of the structure shown in FIG. 2, the resin 513 is cured after the resin 513 layer is formed on the entire substrate 512, so that the displacement amount of the resin 513 is increased.
- the laminated lens structure 500 provided in the camera module is shown in FIG. 2 even after the laminated lens structure 500 formed by bonding the substrates 512 is separated into individual pieces and the camera module is formed by combining the imaging elements.
- the resin 513 is present between the entire substrates 512 including the lenses 511. For this reason, when the camera module is mounted in a camera casing and actually used, there is a concern that the resin between the substrates of the laminated lens structure 500 may thermally expand due to a temperature rise due to heat generated by the device.
- FIG. 3 is a cross-sectional structure diagram showing only the laminated lens structure 11 of the camera module 1A of FIG.
- the laminated lens structure 11 of the camera module 1A is also formed by laminating a plurality of lens-equipped substrates 41 including the lenses 21.
- the fixing is completely different from that shown in the laminated lens structure 500 of FIG. 2 and other prior art documents. Means are used.
- the two lens-attached substrates 41 to be laminated are between an oxide or nitride surface layer formed on one substrate surface and an oxide or nitride surface layer formed on the other substrate surface. It is directly joined by covalent bond.
- a silicon oxide film or a silicon nitride film is formed as a surface layer on the surface of each of the two lens-attached substrates 41 to be laminated.
- the two lens-attached substrates 41 are bonded to each other, heated to dehydrate and condense.
- a silicon-oxygen covalent bond is formed between the surface layers of the two lens-attached substrates 41.
- the two lens-attached substrates 41 are directly bonded.
- the elements contained in the two surface layers may directly form a covalent bond.
- the two lens-attached substrates 41 are fixed through the inorganic layer disposed between the two lens-attached substrates 41, or the surfaces of the two lens-attached substrates 41.
- the two inorganic substrates 41 are fixed to each other by chemical bonding between the inorganic layers arranged on the surface, or by dehydration condensation between the inorganic layers respectively arranged on the surfaces of the two lens substrates 41.
- the two lens-attached substrates 41 are fixed by forming a covalent bond between the elements contained in each layer, or arranged on the surfaces of the two lens-attached substrates 41, respectively.
- the silicon oxide layer or silicon nitride layer was silicon - oxygen covalent bond or a silicon - fixing the two lenses with the substrate 41 by forming a silicon covalent bond, referred to as direct bonding.
- a lens is formed in a substrate state using a substrate used in the field of manufacturing semiconductor devices and flat display devices, and bonding is performed in the substrate state. Then, dehydration condensation is performed by raising the temperature, and covalent bonding is performed in the substrate state.
- a structure in which the inorganic layers formed on the surfaces of the two lens-attached substrates 41 are bonded by covalent bonding is a concern when the technique described in FIG. 2 disclosed in Patent Document 1 is used.
- transformation by the thermal expansion of the resin 513 at the time of actual use is brought about.
- 5 and 6 are diagrams showing a process of forming the camera module 1A of FIG. 1 in which the laminated lens structure 11 and the light receiving element 12 are combined.
- a plurality of lens-attached substrates 41W on which a plurality of lenses 21 (not shown) are formed in the plane direction are prepared and laminated.
- a laminated lens structure 11W in a substrate state in which a plurality of substrates 41W with a lens in a substrate state are laminated is obtained.
- a sensor substrate 43W in a substrate state in which a plurality of light receiving elements 12 are formed in the planar direction is prepared separately from the laminated lens structure 11W in the substrate state shown in FIG. Is done.
- the sensor module 43W in the substrate state and the laminated lens structure 11W in the substrate state are laminated, and an external terminal is attached to each module of the bonded substrates, whereby the camera module 44W in the substrate state is obtained.
- the camera module 44W in the substrate state is divided into modules or chips.
- the individual camera module 44 is enclosed in a separately prepared housing (not shown), whereby the final camera module 44 is obtained.
- a component with “W” added to the symbol indicates that it is in a substrate state (wafer state).
- the case where “W” is not attached as in the above indicates that the module is divided into modules or chips. The same applies to the sensor substrate 43W, the camera module 44W, and the like.
- FIG. 7 is a diagram illustrating another process of forming the camera module 1A of FIG. 1 in which the laminated lens structure 11 and the light receiving element 12 are combined.
- a laminated lens structure 11W in a substrate state in which a plurality of substrate 41W with a lens in a substrate state are laminated is manufactured.
- the laminated lens structure 11W in the substrate state is singulated.
- a sensor substrate 43W in the substrate state is produced and prepared.
- the individual laminated lens structures 11 are mounted one by one on each light receiving element 12 of the sensor substrate 43W in the substrate state.
- the sensor substrate 43W in the substrate state on which the individual laminated lens structures 11 are mounted is separated into modules or chips.
- the laminated lens structure 11 is mounted, and the separated sensor substrate 43 is enclosed in a separately prepared housing (not shown), and further external terminals are attached, whereby the final camera module 44 is obtained. It is done.
- the sensor substrate 43W in the substrate state shown in FIG. 1 the laminated lens structure 11 after being separated into individual light receiving elements 12 may be mounted to obtain individual camera modules 44.
- FIG. 8 is a diagram illustrating the configuration of the lens-equipped substrate 41 in the camera module 1A.
- FIG. 8A is a schematic diagram showing the configuration of the camera module 1A, similar to A of FIG.
- 8B is a schematic cross-sectional view of the camera module 1A, similar to B of FIG.
- the camera module 1A is a compound eye camera module that is formed by combining a plurality of lenses 21 and includes a plurality of optical units 13 each having a single optical axis.
- the laminated lens structure 11 includes five optical units 13 in total, five in each of the vertical and horizontal directions.
- the optical axes of the plurality of optical units 13 are arranged so as to spread toward the outside of the module, thereby enabling wide-angle image shooting.
- the laminated lens structure 11 has a structure in which only three layers of the substrate 41 with a lens are laminated, but it goes without saying that a larger number of substrate 41 with a lens may be laminated. .
- FIG. 8C to 8E are diagrams showing the planar shapes of the three-layer lens-attached substrates 41 constituting the laminated lens structure 11.
- FIG. 8C to 8E are diagrams showing the planar shapes of the three-layer lens-attached substrates 41 constituting the laminated lens structure 11.
- FIG. 8C is a plan view of the uppermost lens-equipped substrate 41 of the three layers
- FIG. 8D is a plan view of the middle-layer lens-equipped substrate 41
- FIG. 8D is the lowermost layer. It is a top view of substrate 41 with a lens. Since the camera module 1 is a compound-eye wide-angle camera module, the diameter of the lens 21 increases and the pitch between the lenses increases as it becomes an upper layer.
- 8F to 8H are plan views of the lens-equipped substrate 41W in the substrate state for obtaining the lens-equipped substrate 41 shown in C to E of FIG.
- a substrate 41W with a lens shown in FIG. 8F shows a substrate state corresponding to the substrate 41 with a lens in FIG. 8C
- the substrate 41W with a lens shown in FIG. 8G has a lens with a lens D in FIG.
- a substrate state corresponding to the substrate 41 is shown
- a lens-attached substrate 41W shown in FIG. 8H shows a substrate state corresponding to the lens-attached substrate 41 of FIG.
- the substrate 41W with a lens in the substrate state shown in FIGS. 8F to 8H is configured to obtain eight camera modules 1A shown in A of FIG. 8 per substrate.
- the pitch between the lenses in the module-equipped lens-equipped substrate 41 differs between the upper-layer lens-equipped substrate 41W and the lower-layer lens-equipped substrate 41W. It can be seen that in the lens-attached substrate 41W, the pitch of the module-unit lens-attached substrates 41 is constant from the upper lens-attached substrate 41W to the lower-layer lens-attached substrate 41W.
- FIG. 9 is a diagram illustrating a second embodiment of a camera module using a laminated lens structure to which the present technology is applied.
- FIG. 9A is a schematic diagram showing an appearance of a camera module 1B as a second embodiment of the camera module 1.
- FIG. 9B is a schematic cross-sectional view of the camera module 1B.
- the camera module 1B includes two optical units 13.
- the two optical units 13 include a diaphragm plate 51 in the uppermost layer of the laminated lens structure 11.
- the aperture plate 51 is provided with an opening 52.
- the camera module 1B includes two optical units 13, but the optical parameters of these two optical units 13 are different. That is, the camera module 1B includes two types of optical units 13 having different optical performance.
- the two types of optical units 13 can be, for example, an optical unit 13 having a short focal length for photographing a close view and an optical unit 13 having a long focal length for photographing a distant view.
- the lens 21 in the same layer of the laminated lens structure 11 provided in the two optical units 13 can be configured to have different diameters, thicknesses, surface shapes, volumes, or distances between adjacent lenses. It has become.
- the planar shape of the lens 21 in the camera module 1B is, for example, as shown in FIG. 9C, the two optical units 13 may be provided with lenses 21 having the same diameter.
- the lens 21 may have a different shape, or as shown in FIG. 9E, one of the structures may be a cavity 21X that does not include the lens 21.
- 9F to 9H are plan views of the lens-equipped substrate 41W in the substrate state for obtaining the lens-equipped substrate 41 shown in C to E of FIG.
- a substrate 41W with a lens shown in FIG. 9F shows a substrate state corresponding to the substrate 41 with a lens in FIG. 9C
- a substrate 41W with a lens shown in FIG. 9G has a lens with a lens D in FIG.
- the substrate state corresponding to the substrate 41 is shown
- the lens-attached substrate 41W shown in FIG. 9H shows the substrate state corresponding to the lens-attached substrate 41 of FIG.
- a substrate 41W with a lens in the substrate state shown in F to H of FIG. 9 is configured to obtain 16 camera modules 1B shown in A of FIG. 9 per substrate.
- a lens having the same shape or a lens having a different shape is formed on the entire surface of the substrate 41W with the lens in the substrate state. It is also possible to form a lens or not.
- FIG. 10 is a diagram illustrating a third embodiment of a camera module using a laminated lens structure to which the present technology is applied.
- FIG. 10A is a schematic diagram showing an appearance of a camera module 1C as a third embodiment of the camera module 1.
- FIG. 10B is a schematic cross-sectional view of the camera module 1C.
- the camera module 1C includes four optical units 13 in total, two vertically and two on the light incident surface.
- the shape of the lens 21 is the same between the four optical units 13.
- the four optical units 13 are provided with a diaphragm plate 51 in the uppermost layer of the laminated lens structure 11, but the size of the opening 52 of the diaphragm plate 51 is different among the four optical units 13.
- the camera module 1C can implement
- planar shape of the lens 21 in one camera module 1C is the same as the diameter of the lenses 21 included in the four optical units 13, as shown in FIG. 10C, for example.
- the size of the opening 52 of the diaphragm plate 51 differs depending on the optical unit 13.
- FIG. 10E is a plan view of the lens-attached substrate 41W in the substrate state for obtaining the lens-attached substrate 41 shown in FIG. 10C.
- FIG. 10F is a plan view showing a diaphragm plate 51W in a substrate state for obtaining the diaphragm plate 51 shown in FIG. 10D.
- FIG. 11 is a diagram illustrating a fourth embodiment of a camera module using a laminated lens structure to which the present technology is applied.
- FIG. 11A is a schematic diagram showing an appearance of a camera module 1D as a fourth embodiment of the camera module 1.
- FIG. 11B is a schematic cross-sectional view of the camera module 1D.
- the camera module 1D is provided with a total of four optical units 13 in the vertical and horizontal directions on the light incident surface in the same manner as the camera module 1C.
- the shape of the lens 21 and the size of the opening 52 of the diaphragm plate 51 are the same.
- the optical axes of the optical units 13 arranged in the vertical direction and the horizontal direction of the light incident surface extend in the same direction.
- a one-dot chain line shown in B of FIG. 11 represents the optical axis of each optical unit 13.
- the camera module 1 ⁇ / b> D having such a structure is suitable for capturing an image with a higher resolution than when capturing with a single optical unit 13 using the super-resolution technique.
- an image is taken by a plurality of light receiving elements 12 arranged at different positions with the optical axis facing the same direction in each of the vertical direction and the horizontal direction, or one light receiving element 12
- a plurality of images that are not necessarily the same can be obtained while the optical axes are directed in the same direction by taking images with light receiving pixels in different regions of the.
- the planar shape of the lens 21 in the single camera module 1D is the same in the four optical units 13 as shown in FIG. 11C.
- FIG. 11D is a plan view of the lens-attached substrate 41W in the substrate state for obtaining the lens-attached substrate 41 shown in FIG. 11C.
- the substrate 41W with a lens in a substrate state is configured to obtain eight camera modules 1D shown in FIG. 11A per substrate.
- the camera module 1D in the substrate 41W with a lens in the substrate state, includes a plurality of lenses 21 in order to form the camera module 1D, and a lens group for this one module is provided. A plurality of them are arranged on the substrate at a constant pitch.
- FIG. 12 is a diagram illustrating a fifth embodiment of a camera module using a laminated lens structure to which the present technology is applied.
- FIG. 12A is a schematic diagram showing an appearance of a camera module 1E as a fifth embodiment of the camera module 1.
- B of FIG. 12 is a schematic cross-sectional view of the camera module 1E.
- the camera module 1E is a monocular camera module provided with one optical unit 13 having one optical axis in the camera module 1E.
- the 12C is a plan view of the lens-equipped substrate 41 showing the planar shape of the lens 21 in the camera module 1E.
- the camera module 1E includes one optical unit 13.
- FIG. 12D is a plan view of the lens-attached substrate 41W in the substrate state for obtaining the lens-attached substrate 41 shown in FIG. 12C.
- the substrate 41W with a lens in a substrate state is configured to obtain 32 camera modules 1E shown in FIG. 12A per substrate.
- a plurality of lenses 21 for the camera module 1E are arranged on the substrate at a constant pitch.
- FIG. 13 is a cross-sectional view of the camera module 1D shown in FIG. 11B.
- the camera module 1D includes a laminated lens structure 11 in which a plurality of lens-attached substrates 41a to 41e are laminated, and a light receiving element 12.
- the laminated lens structure 11 includes a plurality of optical units 13.
- a one-dot chain line 84 represents the optical axis of each optical unit 13.
- the light receiving element 12 is disposed below the laminated lens structure 11. In the camera module 1 ⁇ / b> D, light that has entered the camera module 1 ⁇ / b> D from above passes through the laminated lens structure 11 and is received by the light receiving element 12 disposed below the laminated lens structure 11.
- the laminated lens structure 11 includes five laminated substrates 41a to 41e with lenses. When the five lens-attached substrates 41a to 41e are not particularly distinguished, they are simply described as the lens-attached substrate 41.
- the cross-sectional shape of the through-hole 83 of each lens-attached substrate 41 constituting the laminated lens structure 11 is a so-called bottom depression shape in which the opening width decreases toward the lower side (side where the light receiving element 12 is disposed). Yes.
- a diaphragm plate 51 is disposed on the laminated lens structure 11.
- the diaphragm plate 51 includes, for example, a layer formed of a material having a light absorbing property or a light shielding property.
- the aperture plate 51 is provided with an opening 52.
- the light receiving element 12 is composed of, for example, a front-side irradiation type or a back-side irradiation type CMOS (Complementary Metal Oxide Semiconductor) image sensor.
- An on-chip lens 71 is formed on the upper surface of the light receiving element 12 on the laminated lens structure 11 side, and an external terminal 72 for inputting and outputting signals is formed on the lower surface of the light receiving element 12. ing.
- the laminated lens structure 11, the light receiving element 12, the diaphragm plate 51 and the like are housed in a lens barrel 74.
- a structural material 73 is disposed on the upper side of the light receiving element 12.
- the laminated lens structure 11 and the light receiving element 12 are fixed via the structural material 73.
- the structural material 73 is, for example, an epoxy resin.
- the laminated lens structure 11 includes five laminated substrates 41a to 41e with lenses, but the number of laminated substrates 41 with lenses is not particularly limited as long as it is two or more.
- Each lens-attached substrate 41 constituting the laminated lens structure 11 has a configuration in which a lens resin portion 82 is added to a carrier substrate 81.
- the carrier substrate 81 has a through hole 83, and a lens resin portion 82 is formed inside the through hole 83.
- the lens resin portion 82 includes the lens 21 described above, and also includes a portion that extends to the carrier substrate 81 and carries the lens 21, and represents a portion that is integrated with the material constituting the lens 21.
- the carrier substrate 81, the lens resin portion 82, or the through hole 83 of each of the lens-equipped substrates 41a to 41e as shown in FIG. 13, corresponding to the lens-equipped substrates 41a to 41e, The carrier substrates 81a to 81e, the lens resin portions 82a to 82e, or the through holes 83a to 83e are described and described.
- lens resin portion 82 ⁇ Detailed description of lens resin part> Next, the shape of the lens resin portion 82 will be described using the lens resin portion 82a of the substrate with lens 41a as an example.
- FIG. 14 is a plan view and a cross-sectional view of the carrier substrate 81a and the lens resin portion 82a constituting the lens-attached substrate 41a.
- FIG. 14 is a cross-sectional view taken along line B-B 'and line C-C' shown in the plan view of the carrier substrate 81a and the lens resin portion 82a.
- the lens resin part 82 a is a part formed integrally with the material constituting the lens 21, and includes a lens part 91 and a carrying part 92.
- the lens 21 corresponds to the entire lens portion 91 or the lens resin portion 82a.
- the lens unit 91 is a part having a performance as a lens, in other words, "a part that refracts light to converge or diverge", or "a part that has a curved surface such as a convex surface, a concave surface, or an aspheric surface, or a Fresnel lens, This is a “part where a plurality of polygons used in a lens using a diffraction grating are continuously arranged”.
- the supporting part 92 is a part that extends from the lens part 91 to the carrier substrate 81a and supports the lens part 91.
- the support portion 92 includes an arm portion 101 and a leg portion 102 and is located on the outer periphery of the lens portion 91.
- the arm portion 101 is a portion that is disposed outside the lens portion 91 so as to be in contact with the lens portion 91 and extends from the lens portion 91 toward the outside with a constant film thickness.
- the leg portion 102 is a portion including a portion other than the arm portion 101 in the supporting portion 92 and a portion in contact with the side wall of the through hole 83a.
- the leg portion 102 is preferably thicker than the arm portion 101.
- the planar shape of the through hole 83a formed in the carrier substrate 81a is circular, and the cross-sectional shape is naturally the same regardless of the diameter direction.
- the shape of the lens resin portion 82a which is a shape determined by the shape of the upper die and the lower die at the time of lens formation, is also formed so that the cross-sectional shape is the same regardless of the direction of the diameter.
- FIG. 15 is a cross-sectional view showing the laminated lens structure 11 and the diaphragm plate 51 which are part of the camera module 1D of FIG.
- the light receiving element 12 (FIG. 15) is spread inside the laminated lens structure 11 and arranged below the laminated lens structure 11. (Not shown). That is, when the entire laminated lens structure 11 is overviewed, the light incident on the module travels from the opening 52 of the diaphragm plate 51 to the lower side and spreads in a substantially divergent manner. Therefore, as an example of the size of the lens resin portion 82 provided in the laminated lens structure 11, in the laminated lens structure 11 of FIG. 15, the lens resin portion provided in the lens-equipped substrate 41 a disposed immediately below the diaphragm plate 51. 82a is the smallest, and the lens resin portion 82e provided in the lens-attached substrate 41e disposed in the lowermost layer of the laminated lens structure 11 is the largest.
- the thickness of the lens resin portion 82 of the substrate 41 with a lens is made constant, it is more difficult to make a larger lens than a smaller lens. This is because, for example, the lens is easily deformed by a load applied to the lens when the lens is manufactured, and the strength is difficult to maintain due to its large size. For this reason, it is preferable that the lens having a large size is thicker than the lens having a small size. Therefore, in the laminated lens structure 11 of FIG. 15, the lens resin portion 82 is thickest in the lens resin portion 82e provided in the lens-attached substrate 41e disposed in the lowermost layer.
- the laminated lens structure 11 of FIG. 15 further includes at least one of the following features in order to increase the degree of freedom in lens design.
- the thickness of the carrier substrate 81 is different between at least the plurality of lens-attached substrates 41 constituting the laminated lens structure 11.
- the thickness of the carrier substrate 81 is thicker in the lower substrate 41 with the lens.
- the opening width of the through-hole 83 provided in the lens-attached substrate 41 is different among at least the plurality of lens-attached substrates 41 constituting the laminated lens structure 11.
- the opening width of the through hole 83 is larger in the lower substrate 41 with the lens.
- the diameter of the lens portion 91 provided in the lens-attached substrate 41 is different among at least the plurality of lens-attached substrates 41 constituting the laminated lens structure 11.
- the diameter of the lens unit 91 is larger in the lens unit 91 of the lower substrate 41 with the lens.
- the thickness of the lens portion 91 provided in the lens-equipped substrate 41 is different among at least the plurality of lens-equipped substrates 41 constituting the laminated lens structure 11.
- the lens unit 91 is thicker in the lens unit 91 of the lower substrate 41 with the lens.
- the distance between the lenses provided on the lens-attached substrate 41 is different among at least the plurality of lens-attached substrates 41 constituting the laminated lens structure 11.
- the volume of the lens resin portion 82 provided in the lens-attached substrate 41 is different among at least the plurality of lens-attached substrates 41 constituting the laminated lens structure 11.
- the volume of the lens resin portion 82 is larger in the lens resin portion 82 of the lower substrate 41 with the lens.
- the material of the lens resin portion 82 provided in the lens-attached substrate 41 is different among at least the plurality of lens-attached substrates 41 constituting the laminated lens structure 11.
- incident light incident on a camera module includes both vertical incident light and incident light. Most of the incident light hits the diaphragm plate 51, where it is absorbed or reflected to the outside of the camera module 1D. Incident incident light that could not be stopped by the stop plate 51 hits the side wall of the through hole 83 depending on the incident angle, and may be reflected there.
- the direction in which the reflected light of the incident light travels is determined by the incident angle of the incident light 85 and the angle of the side wall of the through hole 83 shown in FIG.
- incident light 85 having a specific incident angle that could not be narrowed by the diaphragm plate 51 is transmitted through the through hole.
- incident light 85 When it hits the side wall 83, it is reflected in the direction of the light receiving element 12, which may become stray light or noise light.
- the through-hole 83 has a smaller opening width toward the lower side (side on which the light receiving element 12 is disposed). It has a hollow shape. In the case of this shape, the incident light 85 hitting the side wall of the through hole 83 is reflected not in the lower direction, that is, the direction of the light receiving element 12 but in the upper direction, that is, the so-called incident direction. Thereby, the effect
- the through-hole 83 of the lens-equipped substrate 41 in order to reduce the light reflected by the side wall, it is better to arrange a light absorbing material on the side wall.
- the camera module 1D when using the camera module 1D as a camera, light having a wavelength desired to be received (for example, visible light) is used as first light, and light having a wavelength different from that of the first light (for example, UV light) is used as the first light.
- a resin in which carbon particles are dispersed as a first light (visible light) absorbing material is applied to the surface of the carrier substrate 81 in a resin that is cured by the second light (UV light).
- UV light the second light
- the laminated lens structure 11 shown in FIG. 15 is an example of a structure in which a diaphragm plate 51 is disposed on the top of a plurality of laminated substrates 41 with lenses.
- the diaphragm plate 51 may be inserted and arranged somewhere in the intermediate lens-attached substrate 41 instead of the top of the plurality of laminated lens-attached substrates 41.
- the plate-shaped diaphragm plate 51 is not provided separately from the lens-equipped substrate 41, but a layer of light-absorbing material is formed on the surface of the lens-equipped substrate 41, and this serves as a diaphragm. You may let them.
- a resin in which carbon particles are dispersed as a first light (visible light) absorbing material in a resin that is cured by the second light (UV light) is applied or sprayed onto the surface of the lens-equipped substrate 41.
- the resin in other regions is irradiated with the second light (UV light) to leave the resin cured and not cured That is, the diaphragm may be formed on the surface of the lens-equipped substrate 41 by removing the resin in a region where light is to be transmitted when functioning as a diaphragm.
- the lens-equipped substrate 41 that forms a diaphragm on the surface may be the lens-equipped substrate 41 disposed in the uppermost layer of the laminated lens structure 11 or may be equipped with a lens that is an inner layer of the laminated lens structure 11.
- the substrate 41 may be used.
- 15 has a structure in which a lens-attached substrate 41 is laminated.
- the laminated lens structure 11 may have a structure including a plurality of substrates 41 with lenses and at least one carrier substrate 81 that does not include the lens resin portion 82.
- the carrier substrate 81 that does not include the lens resin portion 82 may be disposed in the lowermost layer or the uppermost layer of the laminated lens structure 11 or may be disposed as an inner layer in the laminated lens structure 11.
- This structure includes, for example, a distance between a plurality of lenses included in the laminated lens structure 11 and a light receiving element disposed below the lens resin portion 82 and the laminated lens structure 11 in the lowermost layer of the laminated lens structure 11. This brings about an action or an effect that the distance to 12 can be arbitrarily set.
- the opening width of the carrier substrate 81 that does not include the lens resin portion 82 is appropriately set, and a material having a light absorption property is disposed in a region excluding the opening portion, thereby restricting this. An effect or an effect of being able to function as a plate is brought about.
- FIG. 16 is a diagram illustrating a sixth embodiment of a camera module using a laminated lens structure to which the present technology is applied.
- the incident light is squeezed by the diaphragm plate 51 and then spreads inside the laminated lens structure 11 to form a laminated lens structure.
- the light enters the light receiving element 12 disposed below the body 11. That is, when the entire laminated lens structure 11 is overviewed, the light travels from the opening 52 of the aperture plate 51 downward and spreads outward.
- the cross-sectional shape of the through hole 83 of each lens-equipped substrate 41 constituting the laminated lens structure 11 has an opening width that increases toward the lower side (side on which the light receiving element 12 is disposed).
- the camera module 1D shown in FIG. 13 is different from the camera module 1D shown in FIG.
- the laminated lens structure 11 of the camera module 1F has a structure in which incident light travels from the opening 52 of the diaphragm plate 51 so as to spread downward toward the lower side, so that the opening width of the through-hole 83 is directed downward.
- the carrier substrate 81 is less likely to obstruct the optical path than the downwardly concave shape in which the opening width of the through-hole 83 decreases downward. This brings about the effect that the degree of freedom in lens design is high.
- the cross-sectional area of the lens resin portion 82 including the support portion 92 in the substrate plane direction is a downwardly concave shape in which the opening width of the through hole 83 decreases downward, and on the lower surface of the lens resin portion 82,
- the lens 21 has a specific size so as to transmit light incident on the lens 21, and its cross-sectional area increases from the lower surface to the upper surface of the lens resin portion 82.
- the cross-sectional area on the lower surface of the lens resin portion 82 is substantially the same as in the case of the lower dent shape, but the lens resin portion 82.
- the cross-sectional area becomes smaller from the lower surface to the upper surface.
- the structure in which the opening width of the through-hole 83 increases toward the lower side brings about an action or an effect that the size of the lens resin portion 82 including the supporting portion 92 can be reduced.
- This also provides an effect or effect that the difficulty of lens formation that occurs when the lens described above is large can be reduced.
- FIG. 17 is a diagram illustrating a seventh embodiment of a camera module using a laminated lens structure to which the present technology is applied.
- FIG. 17 parts corresponding to those in FIG. 13 are denoted by the same reference numerals, and description will be made by paying attention to parts different from the camera module 1D shown in FIG.
- the camera module 1G in FIG. 17 is also different from the camera module 1D shown in FIG. 13 in the shape of the lens resin portion 82 and the through-hole 83 of each lens-equipped substrate 41 constituting the laminated lens structure 11.
- the laminated lens structure 11 of the camera module 1G has a lens-attached substrate 41 in which the shape of the through-hole 83 is a so-called lower depression shape in which the opening width decreases toward the lower side (side where the light receiving element 12 is disposed). And the shape of the through-hole 83 includes both the lens-equipped substrate 41 having a so-called divergent shape in which the opening width increases toward the lower side.
- the light is reflected in the upward direction, that is, the incident side direction, thereby bringing about an action or an effect of suppressing generation of stray light or noise light.
- the through-hole 83 is formed on the lower side of the plurality of lens-attached substrates 41 constituting the laminated lens structure 11, particularly in the upper (incident side) plural sheets.
- a lens-equipped substrate 41 having a shape of a so-called lower dent in which the opening width becomes smaller is used.
- the carrier substrate 81 provided in the lens-equipped substrate 41 obstructs the optical path. This makes it possible to increase the degree of freedom in designing the lens, or to reduce the size of the lens resin portion 82 including the supporting portion 92 provided on the lens-equipped substrate 41.
- the lens resin portion 82 provided in some of the arranged substrates 41 with a lens is large. In such a large lens resin portion 82, when the diverging through-hole 83 is used, the effect of suppressing the size of the lens resin portion 82 appears greatly.
- the through-holes 83 are opened downward in the plurality of substrates 41 with a lens constituting the laminated lens structure 11, particularly in the lower plurality.
- the lens-equipped substrate 41 having a so-called divergent shape with a large width is used.
- FIG. 18 is a cross-sectional view showing a detailed configuration of the lens-equipped substrate 41.
- FIG. 18 the uppermost lens-equipped substrate 41a among the five lens-equipped substrates 41a to 41e is shown, but the other lens-equipped substrates 41 are configured in the same manner.
- any one of A to C in FIG. 18 can be adopted.
- a lens resin portion 82 is formed so as to close the through-hole 83 when viewed from above the through-hole 83 provided in the carrier substrate 81.
- the lens resin portion 82 includes a central lens portion 91 (not shown) and a peripheral supporting portion 92 (not shown).
- a film 121 having a light absorbing property or a light shielding property is formed on the side wall to be the through hole 83 of the substrate 41 with lens in order to prevent ghost and flare caused by light reflection. These films 121 are referred to as light shielding films 121 for convenience.
- An upper surface layer 122 containing an oxide, nitride or other insulator is formed on the upper surface of the carrier substrate 81 and the lens resin portion 82, and on the lower surface of the carrier substrate 81 and the lens resin portion 82, A lower surface layer 123 containing oxide, nitride or other insulator is formed.
- the upper surface layer 122 constitutes an antireflection film in which a plurality of low refractive films and high refractive films are alternately stacked.
- the antireflection film can be constituted by, for example, laminating a total of four layers of low refractive films and high refractive films alternately.
- the low refractive film is composed of an oxide film such as SiOx (1 ⁇ x ⁇ 2), SiOC, or SiOF
- the high refractive film is composed of a metal oxide film such as TiO, TaO, or Nb2O5.
- the configuration of the upper surface layer 122 only needs to be designed so as to obtain a desired antireflection performance using optical simulation, for example, the material of the low refractive film and the high refractive film, the film thickness, the number of layers, etc. Is not particularly limited.
- the outermost surface of the upper surface layer 122 is a low-refractive film
- the film thickness is, for example, 20 to 1000 nm
- the density is, for example, 2.2 to 2.5 g / cm 3
- the flatness is
- the root mean square roughness Rq (RMS) is about 1 nm or less.
- the upper surface layer 122 may be an antireflection film in which a plurality of low refractive films and high refractive films are alternately laminated, and may be an inorganic antireflection film.
- the upper surface layer 122 may be a single-layer film containing an oxide, nitride, or other insulator, and may be an inorganic film.
- the lower surface layer 123 may be an antireflection film in which a plurality of low refractive films and high refractive films are alternately laminated, and may be an inorganic antireflection film.
- the lower surface layer 123 may be a single-layer film containing an oxide, nitride, or other insulator, and may be an inorganic film.
- the film formed on the lower surface of the carrier substrate 81 and the lens resin portion 82 is different from the substrate 41 with the lens shown in FIG.
- a lower surface layer 124 containing an oxide, nitride, or other insulator is formed on the lower surface of the carrier substrate 81, while the lens resin portion 82
- the lower surface layer 124 is not formed on the lower surface.
- the lower surface layer 124 may be the same material as the upper surface layer 122 or may be a different material.
- Such a structure is formed by, for example, a manufacturing method in which the lower surface layer 124 is formed on the lower surface of the carrier substrate 81 before the lens resin portion 82 is formed, and then the lens resin portion 82 is formed. Can do.
- a mask is formed on the lens resin portion 82, and the film constituting the lower surface layer 124 is formed on the carrier substrate 81 without using a mask, for example, by PVD. It can be formed by depositing on the lower surface of the substrate 81.
- an upper surface layer 125 containing an oxide, nitride, or other insulator is formed on the upper surface of the carrier substrate 81, while the upper surface of the lens resin portion 82 is formed.
- the upper surface layer 125 is not formed.
- the lower surface layer 124 containing an oxide, nitride, or other insulator is formed on the lower surface of the carrier substrate 81, while the lens resin portion.
- the lower surface layer 124 is not formed on the lower surface of 82.
- Such a structure is obtained by, for example, a manufacturing method in which the upper surface layer 125 and the lower surface layer 124 are formed on the carrier substrate 81 before the lens resin portion 82 is formed, and then the lens resin portion 82 is formed. Can form.
- a film is formed on the upper surface layer 125 and the lower surface layer 124 in a state where a mask is formed on the lens resin portion 82 and no mask is formed on the carrier substrate 81.
- it can be formed by depositing on the surface of the carrier substrate 81 by PVD.
- the lower surface layer 124 and the upper surface layer 125 may be made of the same material or different materials.
- the lens-equipped substrate 41 can be configured as described above.
- a substrate substrate 81W in a substrate state in which a plurality of through holes 83 are formed is prepared.
- the carrier substrate 81W for example, a silicon substrate used in a normal semiconductor device can be used.
- the shape of the carrier substrate 81W is, for example, a circle as shown in FIG. 19A, and its diameter is, for example, 200 mm or 300 mm.
- the carrier substrate 81W is not a silicon substrate, and may be, for example, a glass substrate, a resin substrate, or a metal substrate.
- the planar shape of the through hole 83 is circular as shown in FIG. 19A, but as shown in FIG. 19B, the planar shape of the through hole 83 is For example, it may be a polygon such as a rectangle.
- the opening width of the through hole 83 may be, for example, about 100 ⁇ m to about 20 mm. In this case, for example, about 100 to about 5 million pieces can be arranged on the carrier substrate 81W.
- the size of the through hole 83 in the planar direction of the substrate 41 with lens is referred to as an opening width.
- the opening width means the length of one side when the planar shape of the through hole 83 is a square, and the diameter when the planar shape of the through hole 83 is a circle unless otherwise specified.
- the through-hole 83 has a second opening width 132 on the second surface opposed to the first surface, rather than the first opening width 131 on the first surface of the carrier substrate 81W. Is smaller.
- the through hole 83 may have the shape of a truncated cone shown in FIG.
- the shape of a polygonal truncated pyramid may be used.
- the cross-sectional shape of the side wall of the through hole 83 may be a straight line as shown in FIG. 20A or a curve as shown in B of FIG. Alternatively, there may be a step as shown in FIG.
- the through hole 83 having a shape in which the second opening width 132 is smaller than the first opening width 131 supplies a resin into the through hole 83, and the resin is supplied from each of the first and second surfaces.
- the lens resin part 82 is formed by pressing it in the opposite direction with the mold member, the resin that becomes the lens resin part 82 receives the force from the two opposite mold members and is pressed against the side wall of the through hole 83. .
- substrate used as the lens resin part 82 becomes high can be brought about.
- the first opening width 131 and the second opening width 132 may have the same shape, that is, a shape in which the cross-sectional shape of the side wall of the through hole 83 is vertical.
- the through hole 83 of the carrier substrate 81W can be formed by etching the carrier substrate 81W by wet etching. Specifically, before etching the carrier substrate 81W, an etching mask for preventing the non-opening region of the carrier substrate 81W from being etched is formed on the surface of the carrier substrate 81W.
- an insulating film such as a silicon oxide film or a silicon nitride film is used.
- the etching mask is formed by forming a layer of an etching mask material on the surface of the carrier substrate 81W and opening a pattern having a planar shape of the through hole 83 in this layer. After the etching mask is formed, the through hole 83 is formed in the carrier substrate 81W by etching the carrier substrate 81W.
- crystal anisotropic wet etching using an alkaline solution such as KOH is employed to form the through hole 83. can do.
- etching is performed so that a (111) plane appears on the opening side wall. proceed.
- the opening shape of the opening of the etching mask is a circle or a rectangle
- the plane shape is a rectangle
- the opening width of the through hole 83 is a second opening width larger than the first opening width 131. 132 is smaller, and a through hole 83 in which the three-dimensional shape of the through hole 83 is a truncated pyramid or a similar shape is obtained.
- the angle of the side wall of the through-hole 83 serving as a truncated pyramid is about 55 ° with respect to the substrate plane.
- etching for forming a through-hole a chemical solution disclosed in International Publication No. 2011/017039 or the like that can etch silicon into an arbitrary shape without being restricted by crystal orientation is used. You may perform by wet etching.
- this chemical solution for example, a chemical solution in which at least one of surfactants polyoxyethylene alkylphenyl ether, polyoxyalkylene alkyl ether, polyethylene glycol is added to a TMAH (tetramethylammonium hydroxide) aqueous solution, or KOH A chemical solution obtained by adding isopropyl alcohol to an aqueous solution can be employed.
- TMAH tetramethylammonium hydroxide
- the planar shape of the opening of the etching mask is circular.
- the planar shape is circular
- the second opening width 132 is smaller than the first opening width 131
- the three-dimensional shape is a through-hole 83 having a truncated cone or similar shape. can get.
- planar shape of the opening of the etching mask is a quadrangle
- the planar shape is a quadrangle
- the opening width is smaller in the second opening width 132 than in the first opening width 131
- the three-dimensional shape is A through-hole 83 having a truncated pyramid shape or a similar shape is obtained.
- the angle of the side wall of the through-hole 83 serving as the truncated cone or the truncated pyramid is about 45 ° with respect to the substrate plane.
- an etching mask 141 is formed on one surface of the carrier substrate 81W.
- the etching mask 141 has a mask pattern in which a portion for forming the through hole 83 is opened.
- the carrier substrate 81W is predetermined by dry etching. Etched at a depth of.
- the protective film 142 on the surface of the carrier substrate 81W and the surface of the etching mask 141 is removed by the dry etching process, the protective film 142 on the side surface of the etching mask 141 remains, and the side walls of the etching mask 141 are protected.
- the protective film 142 on the side wall is removed, and the etching mask 141 is retracted in the direction of increasing the pattern size of the opening pattern.
- the protective film forming process, the dry etching process, and the etching mask receding process of B to D in FIG. 21 are repeated a plurality of times.
- the carrier substrate 81W is etched so as to have a stepped shape (uneven shape) having a periodic step.
- through holes 83 having stepped side walls are formed in the carrier substrate 81W.
- the width in the planar direction of the step shape of the through hole 83 (one step width) is, for example, about 400 nm to 1 ⁇ m.
- the protective film forming step, the dry etching step, and the etching mask receding step are repeatedly performed.
- the side wall of the through-hole 83 has a periodic staircase shape (uneven shape), reflection of incident light can be suppressed.
- the side wall of the through-hole 83 has an irregular shape with a random size, a void (void) is generated in the adhesion layer between the lens and the side wall formed in the through-hole 83, Due to voids, adhesion to the lens may be reduced.
- the side wall of the through-hole 83 has a periodic uneven shape, so that the adhesion is improved and a change in optical characteristics due to a lens position shift can be suppressed.
- the carrier substrate 81W is single crystal silicon
- the etching mask 141 is a photoresist
- the protective film 142 is a fluorocarbon polymer formed using gas plasma such as C4F8 or CHF3
- the etching process may be plasma etching using a gas containing F such as SF6 / O2, C4F8 / SF6, and the mask retreat process may be plasma etching containing O2 such as O2 gas and CF4 / O2.
- the carrier substrate 81W is single crystal silicon
- the etching mask 141 is SiO2
- the etching is a plasma containing Cl2
- the protective film 142 is an oxide film obtained by oxidizing the material to be etched using O2 plasma
- the etching process is Cl2
- the plasma etching mask receding process using a gas containing can be plasma etching using a gas containing F such as CF4 / O2.
- a plurality of through holes 83 can be simultaneously formed in the carrier substrate 81W by wet etching or dry etching. However, as shown in FIG. The through groove 151 may be formed in a region where the hole 83 is not formed.
- FIG. 22A is a plan view of a carrier substrate 81W in which a through groove 151 is formed in addition to the through hole 83.
- FIG. 22A is a plan view of a carrier substrate 81W in which a through groove 151 is formed in addition to the through hole 83.
- the through-groove 151 avoids the plurality of through-holes 83 arranged in a matrix and is partly formed between the respective through-holes 83 in the row direction and the column direction. Just placed.
- the through groove 151 of the carrier substrate 81W can be arranged at the same position between the substrates 41 with lenses constituting the laminated lens structure 11.
- a plurality of the through grooves 151 of the plurality of carrier substrates 81W are formed as shown in the cross-sectional view of FIG. The structure penetrates between the carrier substrates 81W.
- the through-groove 151 of the carrier substrate 81W as a part of the lens-equipped substrate 41 relieves deformation of the lens-equipped substrate 41 due to stress when the stress that deforms the lens-equipped substrate 41 works from outside the lens-equipped substrate 41 May have an effect or effect.
- the through-groove 151 can bring about an action or an effect of relaxing deformation of the lens-attached substrate 41 due to stress when, for example, a stress that deforms the lens-attached substrate 41 is generated from the inside of the lens-attached substrate 41.
- a carrier substrate 81W having a plurality of through holes 83 is prepared.
- a light shielding film 121 is formed on the side wall of the through hole 83.
- FIG. 23 Although only two through holes 83 are shown in FIG. 23 due to space limitations, in practice, as shown in FIG. 19, a large number of through holes 83 are formed in the plane direction of the carrier substrate 81W. Has been.
- An alignment mark (not shown) for alignment is formed in a region near the outer periphery of the carrier substrate 81W.
- the front flat portion 171 on the upper side of the carrier substrate 81W and the lower flat portion 172 on the lower side are flat surfaces formed so as to be capable of plasma bonding performed in a later step.
- the thickness of the carrier substrate 81W is finally singulated as a lens-equipped substrate 41, and also serves as a spacer that determines the inter-lens distance when the substrate is overlapped with another substrate 41 with a lens.
- a low thermal expansion coefficient base material having a thermal expansion coefficient of 10 ppm / ° C. or less for the carrier substrate 81W.
- a carrier substrate 81W is arranged on a lower mold 181 in which a plurality of concave optical transfer surfaces 182 are arranged at regular intervals. More specifically, the back side flat portion 172 of the carrier substrate 81W and the flat surface 183 of the lower mold 181 are overlapped so that the concave optical transfer surface 182 is positioned inside the through hole 83 of the carrier substrate 81W.
- the optical transfer surface 182 of the lower mold 181 is formed so as to correspond one-to-one with the through hole 83 of the carrier substrate 81W, and the center of the corresponding optical transfer surface 182 and the through hole 83 coincides in the optical axis direction.
- the lower mold 181 is formed of a hard mold member, and is made of, for example, metal, silicon, quartz, or glass.
- the energy curable resin 191 is filled (dropped) inside the overlapped lower mold 181 and the through hole 83 of the carrier substrate 81W.
- the lens resin portion 82 is formed using this energy curable resin 191. Therefore, it is preferable that the energy curable resin 191 has been defoamed in advance so as not to include bubbles.
- the defoaming treatment is preferably a vacuum defoaming treatment or a defoaming treatment by centrifugal force.
- the vacuum defoaming treatment is preferably performed after filling. By performing the defoaming process, the lens resin portion 82 can be molded without embedding bubbles.
- the upper mold 201 is disposed on the lower mold 181 and the carrier substrate 81W which are overlapped.
- the upper mold 201 has a plurality of concave optical transfer surfaces 202 arranged at regular intervals, and the center of the through-hole 83 and the center of the optical transfer surface 202 are the optical axes, as in the case where the lower mold 181 is arranged.
- the upper mold 201 is arranged after being positioned with high precision so as to coincide with each other.
- a control device that controls the distance between the upper mold 201 and the lower mold 181 so that the distance between the upper mold 201 and the lower mold 181 becomes a predetermined distance.
- the position of the upper mold 201 is fixed.
- the space between the optical transfer surface 202 of the upper mold 201 and the optical transfer surface 182 of the lower mold 181 is equal to the thickness of the lens resin portion 82 (lens 21) calculated by optical design.
- the flat surface 203 of the upper die 201 and the front flat portion 171 of the carrier substrate 81W may be overlapped as in the case where the lower die 181 is arranged.
- the distance between the upper mold 201 and the lower mold 181 is equivalent to the thickness of the carrier substrate 81W, and high-precision alignment in the planar direction and the height direction is possible.
- the distance between the upper mold 201 and the lower mold 181 is controlled to be a preset distance, the energy curable resin dropped into the inside of the through hole 83 of the carrier substrate 81W in the process of FIG. 23C described above.
- the filling amount of 191 is controlled so as not to overflow from the space surrounded by the through hole 83 of the carrier substrate 81W and the upper and lower upper molds 201 and 181 thereof. Thereby, the manufacturing cost can be reduced without wasting the material of the energy curable resin 191.
- the energy curable resin 191 is cured in the state shown in FIG.
- the energy curable resin 191 is cured, for example, by applying heat or UV light as energy and leaving it for a predetermined time.
- the upper mold 201 is pushed downward or aligned, so that deformation due to contraction of the energy curable resin 191 can be minimized.
- thermoplastic resin instead of the energy curable resin 191, a thermoplastic resin may be used. In that case, in the state shown in FIG. 23E, the energy curable resin 191 is formed into a lens shape by raising the temperature of the upper mold 201 and the lower mold 181 and is cured by cooling.
- the control device that controls the positions of the upper mold 201 and the lower mold 181 moves the upper mold 201 upward and the lower mold 181 downward to move the upper mold 201.
- the lower mold 181 is released from the carrier substrate 81W.
- the lens resin portion 82 including the lens 21 is formed inside the through hole 83 of the carrier substrate 81W.
- the surfaces of the upper mold 201 and the lower mold 181 that are in contact with the carrier substrate 81W may be coated with a release agent such as fluorine or silicon. By doing so, the carrier substrate 81W can be easily released from the upper mold 201 and the lower mold 181. Further, as a method of easily releasing from the contact surface with the carrier substrate 81W, various coatings such as fluorine-containing DLC (Diamond Like Carbon) may be performed.
- a release agent such as fluorine or silicon.
- the upper surface layer 122 is formed on the surfaces of the carrier substrate 81W and the lens resin portion 82, and the lower surface layer 123 is formed on the back surfaces of the carrier substrate 81W and the lens resin portion 82. It is formed. Even if the upper surface layer 122 and the lower surface layer 123 are formed before and after the film formation, CMP (Chemical-Mechanical-Polishing) or the like is performed as necessary to flatten the front flat portion 171 and the back flat portion 172 of the carrier substrate 81W. Good.
- CMP Chemical-Mechanical-Polishing
- the lens resin portion 82 is formed by press-molding (imprinting) the energy curable resin 191 into the through hole 83 formed in the carrier substrate 81W using the upper mold 201 and the lower mold 181.
- the lens-equipped substrate 41 can be manufactured.
- the shapes of the optical transfer surface 182 and the optical transfer surface 202 are not limited to the above-described concave shape, and are appropriately determined according to the shape of the lens resin portion 82.
- the lens shapes of the lens-equipped substrates 41a to 41e can take various shapes derived by optical system design, for example, a biconvex shape, a biconcave shape, a planoconvex shape, a flat shape.
- a concave shape, a convex meniscus shape, a concave meniscus shape, or a higher-order aspherical shape may be used.
- the shape of the optical transfer surface 182 and the optical transfer surface 202 may be a shape in which the lens shape after the formation has a moth-eye structure.
- the variation in the distance in the plane direction between the lens resin portions 82 due to the curing shrinkage of the energy curable resin 191 can be cut off by the interposition of the carrier substrate 81W. Can be controlled.
- the energy curable resin 191 having low strength is reinforced by the carrier substrate 81W having high strength. Accordingly, it is possible to provide a lens array substrate in which a plurality of lenses with good handling properties are arranged, and it is possible to suppress the warp of the lens array substrate.
- the planar shape of the through hole 83 may be a polygon such as a quadrangle, for example.
- FIG. 24 is a plan view and a cross-sectional view of the carrier substrate 81a and the lens resin portion 82a of the lens-attached substrate 41a when the planar shape of the through hole 83 is a quadrangle.
- 24 is a cross-sectional view taken along line B-B ′ and line C-C ′ of the plan view.
- the through hole 83a is square, the distance from the center of the through hole 83a to the upper outer edge of the through hole 83a, and the through hole The distance from the center of the hole 83a to the lower outer edge of the through hole 83a is different in the side direction and the diagonal direction of the through hole 83a that is a quadrangle, and is larger in the diagonal direction.
- the planar shape of the through-hole 83a is a square
- the lens portion 91 is circular
- the distance from the outer periphery of the lens portion 91 to the side wall of the through-hole 83a, in other words, the length of the support portion 92 is set to the side direction of the square. And different lengths in the diagonal direction.
- the lens resin portion 82a shown in FIG. 24 has the following structure. (1) The length of the arm portion 101 arranged on the outer periphery of the lens portion 91 is the same in the side direction of the quadrangle and the diagonal direction. (2) The length of the leg portion 102 arranged outside the arm portion 101 and extending to the side wall of the through hole 83a is longer than the length of the leg portion 102 in the side direction of the quadrangle. The direction is longer.
- the leg portion 102 is not in direct contact with the lens portion 91, while the arm portion 101 is in direct contact with the lens portion 91.
- the length and thickness of the arm portion 101 that is in direct contact with the lens portion 91 are made constant over the entire outer periphery of the lens portion 91, so that the entire lens portion 91 is kept constant.
- the entire lens unit 91 by supporting the entire lens unit 91 with a constant force without bias, for example, when stress is applied from the carrier substrate 81a surrounding the through hole 83a to the entire outer periphery of the through hole 83a, this is applied to the lens.
- a constant force without bias for example, when stress is applied from the carrier substrate 81a surrounding the through hole 83a to the entire outer periphery of the through hole 83a.
- FIG. 25 is a plan view and a cross-sectional view of the carrier substrate 81a and the lens resin portion 82a of the lens-attached substrate 41a, showing another example of the through hole 83 having a quadrangular planar shape.
- 25 is a cross-sectional view taken along lines B-B ′ and C-C ′ of the plan view.
- the distance from the center of the through hole 83a to the upper outer edge of the through hole 83a, and the distance from the center of the through hole 83a to the lower outer edge of the through hole 83a are rectangular.
- the side direction of the hole 83a is different from the diagonal direction, and the diagonal direction is larger.
- the planar shape of the through-hole 83a is a square
- the lens portion 91 is circular
- the distance from the outer periphery of the lens portion 91 to the side wall of the through-hole 83a in other words, the length of the support portion 92 is set to the side direction of the square. And different lengths in the diagonal direction.
- the lens resin portion 82a shown in FIG. 25 has the following structure.
- positioned on the outer periphery of the lens part 91 is made constant along the four sides of the square of the through-hole 83a.
- the length of the arm portion 101 is set to be longer in the diagonal direction than in the side direction of the square. .
- the leg portion 102 is thicker than the arm portion 101. Therefore, the volume per unit area in the plane direction of the lens-equipped substrate 41 a is also larger than that of the arm portion 101.
- FIG. 26 is a cross-sectional view showing another embodiment of the lens resin portion 82 and the through hole 83 of the substrate 41 with lens.
- the lens resin portion 82 and the through hole 83 shown in FIG. 26 have the following structure.
- the side wall of the through hole 83 has a stepped shape including a stepped portion 221.
- the leg portion 102 of the supporting portion 92 of the lens resin portion 82 is not only disposed above the side wall of the through hole 83 but also on the stepped portion 221 provided in the through hole 83. It extends in the plane direction.
- an etching stop film 241 having resistance to wet etching at the time of opening a through hole is formed on one surface of the carrier substrate 81W.
- the etching stop film 241 can be a silicon nitride film, for example.
- a hard mask 242 having resistance to wet etching at the time of opening the through hole is formed on the other surface of the carrier substrate 81W.
- the hard mask 242 can also be a silicon nitride film, for example.
- a predetermined region of the hard mask 242 is opened for the first etching.
- the upper portion of the stepped portion 221 of the through hole 83 is etched. Therefore, the opening of the hard mask 242 for the first etching is a region corresponding to the opening on the upper substrate surface of the lens-attached substrate 41 shown in FIG.
- the carrier substrate 81W is etched by a predetermined depth according to the opening of the hard mask 242 by wet etching.
- a hard mask 243 is formed again on the surface of the carrier substrate 81W after the etching, and the hard mask corresponding to the portion below the stepped portion 221 of the through hole 83 is formed.
- a mask 243 is opened.
- the second hard mask 243 for example, a silicon nitride film can be adopted.
- the carrier substrate 81W is etched by wet etching until the etching stop film 241 is reached according to the opening of the hard mask 243.
- the step-shaped through-hole 83 shown in FIG. 26 is obtained by performing the etching of the carrier substrate 81W for forming the through-hole by wet etching in two steps.
- FIG. 28 is a plan view and a sectional view of the carrier substrate 81a and the lens resin portion 82a of the lens-attached substrate 41a when the through hole 83a has a stepped portion 221 and the planar shape of the through hole 83a is circular. It is.
- the cross-sectional shape of the through hole 83a is naturally the same regardless of the diameter direction.
- the cross-sectional shapes of the outer edge of the lens resin portion 82a, the arm portion 101, and the leg portion 102 are formed to be the same regardless of the diameter direction.
- the through hole 83a having the stepped shape of FIG. 28 has a leg portion 102 of the support portion 92 of the lens resin portion 82, compared to the through hole 83a of FIG. 14 that does not include the stepped portion 221 in the through hole 83a.
- action or effect that the area which contacts the side wall of the through-hole 83a can be enlarged is brought about. This also brings about an action or an effect of increasing the adhesion strength between the lens resin portion 82 and the side wall of the through hole 83a, in other words, the adhesion strength between the lens resin portion 82a and the carrier substrate 81W.
- FIG. 29 is a plan view and a cross-sectional view of the carrier substrate 81a and the lens resin portion 82a of the lens-attached substrate 41a when the through hole 83a has a stepped portion 221 and the planar shape of the through hole 83a is a quadrangle. It is.
- 29 is a cross-sectional view taken along lines B-B ′ and C-C ′ of the plan view.
- the lens resin portion 82 and the through hole 83 shown in FIG. 29 have the following structure. (1) The length of the arm portion 101 arranged on the outer periphery of the lens portion 91 is the same in the side direction of the quadrangle and the diagonal direction. (2) The length of the leg portion 102 that is arranged outside the arm portion 101 and extends to the side wall of the through hole 83a is longer than the length of the leg portion 102 in the side direction of the square. Long.
- the leg portion 102 is not in direct contact with the lens portion 91, while the arm portion 101 is in direct contact with the lens portion 91.
- the length and thickness of the arm portion 101 that is in direct contact with the lens portion 91 are constant over the entire outer periphery of the lens portion 91, as in the lens resin portion 82a shown in FIG. By doing so, the action or effect of supporting the entire lens unit 91 with a constant force without bias can be brought about.
- the entire lens unit 91 by supporting the entire lens unit 91 with a constant force without bias, for example, when stress is applied from the carrier substrate 81a surrounding the through hole 83a to the entire outer periphery of the through hole 83a, this is applied to the lens.
- a constant force without bias for example, when stress is applied from the carrier substrate 81a surrounding the through hole 83a to the entire outer periphery of the through hole 83a.
- the structure of the through hole 83a in FIG. 29 is such that the leg portion 102 of the support portion 92 of the lens resin portion 82a is compared with the through hole 83a in FIG. 24 or the like that does not include the stepped portion 221 in the through hole 83a.
- action or effect that the area which contacts the side wall of the through-hole 83a can be enlarged is brought about.
- the adhesion strength between the lens resin portion 82a and the side wall portion of the through hole 83a in other words, the adhesion strength between the lens resin portion 82a and the carrier substrate 81a is increased.
- the lens-equipped substrate 41W in which the plurality of lens-equipped substrates 41a is formed is referred to as a lens-equipped substrate 41W-a, and the plurality of lens-equipped substrates 41b is formed.
- the substrate 41W with the lens in the substrate state is described as a substrate 41W-b with a lens. The same applies to the other lens-equipped substrates 41c to 41e.
- the portions of the lens-attached substrate 41W-b corresponding to the respective portions of the lens-attached substrate 41W-a are described with the same reference numerals as the lens-attached substrate 41W-a.
- the upper surface layer 122 or 125 is formed on the upper surfaces of the lens-equipped substrate 41W-a and the lens-equipped substrate 41W-b.
- a lower surface layer 123 or 124 is formed on the lower surface of the lens-equipped substrate 41W-a and the lens-equipped substrate 41W-b. Then, as shown in FIG. 31A, the entire lower surface including the back flat portion 172 of the lens-attached substrate 41W-a, which is a surface to which the lens-attached substrates 41W-a and 41W-a are joined, and A plasma activation process is performed on the entire upper surface including the front flat portion 171 of the lens-attached substrate 41W-b.
- the gas used for the plasma activation treatment may be any gas that can be plasma treated, such as O2, N2, He, Ar, and H2. However, if the same gas as the constituent element of the upper surface layer 122 and the lower surface layer 123 is used as the gas used for the plasma activation process, the deterioration of the films of the upper surface layer 122 and the lower surface layer 123 is suppressed. This is preferable.
- the OH group hydrogen on the surface of the lower surface layer 123 or 124 of the lens-attached substrate 41W-a and the OH of the surface of the upper surface layer 122 or 125 of the lens-attached substrate 41W-b are obtained.
- a hydrogen bond is formed with the hydrogen of the group.
- the substrate with lens 41W-a and the substrate with lens 41W-b are fixed.
- the bonding process between the substrates with lenses can be performed under atmospheric pressure conditions.
- Annealing treatment is applied to the lens-attached substrate 41W-a and lens-attached substrate 41W-b that have been subjected to the above-described bonding process.
- dehydration condensation occurs from the state in which the OH groups are hydrogen-bonded, and between the lower surface layer 123 or 124 of the lens-equipped substrate 41W-a and the upper surface layer 122 or 125 of the lens-equipped substrate 41W-b.
- a covalent bond through oxygen is formed.
- the element contained in the lower surface layer 123 or 124 of the lens-attached substrate 41W-a and the element contained in the upper surface layer 122 or 125 of the lens-attached substrate 41W-b are covalently bonded.
- the two lens-attached substrates are firmly fixed.
- a covalent bond is formed between the lower surface layer 123 or 124 of the lens-equipped substrate 41W arranged on the upper side and the upper surface layer 122 or 125 of the lens-equipped substrate 41W arranged on the lower side, thereby Fixing the two lens-attached substrates 41W is referred to as direct bonding in this specification.
- the method of fixing a plurality of lens-attached substrates disclosed in Patent Document 1 over the entire surface of the substrate with a resin has a concern about the curing shrinkage and thermal expansion of the resin and the resulting lens deformation.
- the direct bonding of the present technology does not use a resin when fixing the plurality of lens-attached substrates 41W, the plurality of lens-attached substrates 41W can be formed without causing curing shrinkage or thermal expansion.
- action or effect that it can fix is brought about.
- the annealing treatment can also be performed under atmospheric pressure conditions. This annealing treatment can be performed at 100 ° C. or higher, 150 ° C. or higher, or 200 ° C. or higher because dehydration condensation is performed. On the other hand, this annealing treatment is performed at 400 ° C. or lower, 350 ° C. or lower, from the viewpoint of protecting the energy curable resin 191 for forming the lens resin portion 82 from heat and suppressing degassing from the energy curable resin 191. It can be performed at 300 ° C. or lower.
- the bonding process between the lens substrates 41W or the direct bonding process between the lens substrates 41W is performed under conditions other than atmospheric pressure, the bonded lens substrate 41W-a and the lens substrate are bonded.
- 41W-b is returned to the atmospheric pressure environment, a pressure difference between the space between the lens resin portion 82 and the lens resin portion 82 joined to the outside of the lens resin portion 82 is generated. Due to this pressure difference, there is a concern that pressure is applied to the lens resin portion 82 and the lens resin portion 82 is deformed.
- plasma bonding for example, fluidity and thermal expansion as in the case of using a resin as an adhesive can be suppressed. It is possible to improve the positional accuracy when bonding -a and the lens-attached substrate 41W-b.
- the upper surface layer 122 or the lower surface layer 123 is formed on the back flat portion 172 of the lens-attached substrate 41W-a and the front flat portion 171 of the lens-attached substrate 41W-b.
- the upper surface layer 122 and the lower surface layer 123 dangling bonds are easily formed by the plasma activation process previously performed. That is, the lower surface layer 123 formed on the back flat portion 172 of the substrate with lens 41W-a and the upper surface layer 122 formed on the front flat portion 171 of the substrate with lens 41W-b increase the bonding strength. It also has a role.
- the lens resin portion 82 is not corroded by plasma because it is not affected by the film quality change due to the plasma (O2). It also has the effect of suppressing the above.
- the surface activity by plasma is caused by the substrate 41W-a with a lens in which a plurality of substrates 41a with a lens is formed and the substrate 41W- with a lens in a state with a plurality of substrates 41b with a lens formed. It joins directly after performing a heat treatment, in other words, it joins using plasma joining.
- FIG. 32 shows a state in which the five lens-attached substrates 41a to 41e corresponding to the laminated lens structure 11 of FIG. 13 are in the substrate state by using the bonding method of the substrate 41W with the lens in the substrate state described with reference to FIG. The 1st lamination method of laminating is shown.
- a substrate 41W-e with a lens in a substrate state located in the lowermost layer in the laminated lens structure 11 is prepared.
- the substrate with lens 41W-d in the substrate state located in the second layer from the bottom in the laminated lens structure 11 is placed on the substrate with lens 41W-e in the substrate state. Be joined.
- the substrate with lens 41W-c located in the third layer from the bottom in the laminated lens structure 11 is placed on the substrate with lens 41W-d in the substrate state. Be joined.
- the substrate with lens 41W-b in the substrate state located in the fourth layer from the bottom in the laminated lens structure 11 is placed on the substrate with lens 41W-c in the substrate state. Join.
- the substrate with lens 41W-a located in the fifth layer from the bottom in the laminated lens structure 11 is placed on the substrate with lens 41W-b in the substrate state. Be joined.
- the diaphragm plate 51W positioned in the upper layer of the lens-attached substrate 41a in the laminated lens structure 11 is bonded onto the substrate 41W-a with the lens in the substrate state.
- the five substrate 41W-a to 41W-e in the substrate state are sequentially placed one by one from the lower lens substrate 41W to the upper lens substrate 41W in the laminated lens structure 11.
- the laminated lens structure 11W in the substrate state is obtained.
- FIG. 33 shows a state in which the five lens-attached substrates 41a to 41e corresponding to the laminated lens structure 11 of FIG. 13 are in the substrate state by using the bonding method of the substrate 41W with the lens in the substrate state described with reference to FIG. The 2nd lamination method of laminating is shown.
- a diaphragm plate 51W is prepared which is positioned in the upper layer of the lens-attached substrate 41a in the laminated lens structure 11.
- the lens-attached substrate 41W-a located in the uppermost layer in the laminated lens structure 11 is turned upside down and joined onto the diaphragm plate 51W. Is done.
- the substrate with lens 41W-b located in the second layer from the top in the laminated lens structure 11 is turned upside down, and then the lens in the substrate state is placed. Bonded onto the attached substrate 41W-a.
- the substrate with lens 41W-c located in the third layer from the top in the laminated lens structure 11 is turned upside down, and then the lens in the substrate state is placed. Bonded on the attached substrate 41W-b.
- the lens-equipped substrate 41W-d located in the fourth layer from the top in the laminated lens structure 11 is turned upside down, and then the lens in the substrate state is obtained. Bonded on the attached substrate 41W-c.
- the lens-equipped substrate 41W-e located in the fifth layer from the top in the laminated lens structure 11 is turned upside down, and then the lens in the substrate state is obtained. Bonded onto the attached substrate 41W-d.
- the five lens-equipped substrates 41W-a to 41W-e in the substrate state are sequentially arranged one by one from the upper-layer lens-equipped substrate 41W in the laminated lens structure 11 to the lower-layer lens-equipped substrate 41W.
- the laminated lens structure 11W in the substrate state is obtained.
- the five lens-attached substrates 41W-a to 41W-e in the substrate state laminated by the lamination method described in FIG. 32 or FIG. 33 are separated into modules or chips using a blade or a laser.
- the laminated lens structure 11 in which the five lens-attached substrates 41a to 41e are laminated is obtained.
- FIG. 34 is a diagram illustrating an eighth embodiment of a camera module using a laminated lens structure to which the present technology is applied.
- FIG. 35 is a diagram illustrating a ninth embodiment of the camera module using the laminated lens structure to which the present technology is applied.
- the camera module 1H of FIG. 34 and the camera module 1J of FIG. 35 are replaced with structures having different structures 73 in the camera module E shown in FIG.
- the structure material 73 in the camera module 1J is replaced with the structure materials 301a and 301b and the light-transmitting substrate 302.
- the structural material 301 a is disposed on a part of the upper side of the light receiving element 12.
- the light receiving element 12 and the light transmitting substrate 302 are fixed via the structural material 301a.
- the structural material 301a is, for example, an epoxy resin.
- a structural material 301b is disposed on the upper side of the light-transmitting substrate 302.
- the light transmissive substrate 302 and the laminated lens structure 11 are fixed via the structural material 301b.
- the structural material 301b is, for example, an epoxy resin.
- the portion of the structural material 301a of the camera module 1H of FIG. 34 is replaced with a resin layer 311 having light transmittance.
- the resin layer 311 is disposed on the entire upper surface of the light receiving element 12.
- the light receiving element 12 and the light transmitting substrate 302 are fixed via the resin layer 311.
- the resin layer 311 disposed on the entire upper surface of the light receiving element 12 is applied in a concentrated manner on a part of the light receiving element 12 when stress is applied to the light transmitting substrate 302 from above the light transmitting substrate 302. This is effective in that the stress is dispersed and received over the entire surface of the light receiving element 12.
- a structural material 301b is disposed on the upper side of the light-transmitting substrate 302.
- the light transmissive substrate 302 and the laminated lens structure 11 are fixed via the structural material 301b.
- the camera module 1H in FIG. 34 and the camera module 1J in FIG. 35 include a light-transmitting substrate 302 on the upper side of the light receiving element 12.
- the light-transmitting substrate 302 has an action or an effect of suppressing the light receiving element 12 from being damaged during the manufacturing of the camera module 1H or 1J.
- FIG. 36 is a diagram illustrating a tenth embodiment of the camera module using the laminated lens structure to which the present technology is applied.
- the laminated lens structure 11 is housed in a lens barrel 74.
- the lens barrel 74 is fixed by a moving member 332 that moves along the shaft 331 and a fixed member 333.
- a drive motor By moving the lens barrel 74 in the axial direction of the shaft 331 by a drive motor (not shown), the distance from the laminated lens structure 11 to the imaging surface of the light receiving element 12 is adjusted.
- the lens barrel 74, the shaft 331, the moving member 332, and the fixed member 333 are accommodated in the housing 334.
- a protective substrate 335 is disposed on the light receiving element 12, and the protective substrate 335 and the housing 334 are connected by an adhesive 336.
- the mechanism for moving the laminated lens structure 11 has an effect or effect that enables a camera using the camera module 1J to perform an autofocus operation when taking an image.
- FIG. 37 is a diagram illustrating an eleventh embodiment of a camera module using a laminated lens structure to which the present technology is applied.
- 37 is a camera module to which a focus adjustment mechanism using a piezoelectric element is added.
- the structural material 301a is disposed on a part of the upper side of the light receiving element 12.
- the light receiving element 12 and the light transmitting substrate 302 are fixed via the structural material 301a.
- the structural material 301a is, for example, an epoxy resin.
- a piezoelectric element 351 is disposed on the upper side of the light transmitting substrate 302.
- the light transmissive substrate 302 and the laminated lens structure 11 are fixed via the piezoelectric element 351.
- the laminated lens structure 11 can be moved in the vertical direction by applying and blocking a voltage to the piezoelectric element 351 disposed below the laminated lens structure 11.
- the means for moving the laminated lens structure 11 is not limited to the piezoelectric element 351, and other devices whose shape is changed by applying and blocking voltage can be used.
- a MEMS device can be used.
- the mechanism for moving the laminated lens structure 11 has an effect or an effect that enables a camera using the camera module 1L to perform an autofocus operation when taking an image.
- the laminated lens structure 11 has a structure (hereinafter referred to as the present structure) in which the lens-attached substrates 41 are fixed to each other by direct bonding. The operation and effect of this structure will be described in comparison with other structures of the lens-equipped substrate on which the lens is formed.
- FIG. 38 shows a first substrate structure (hereinafter referred to as Comparative Structure Example 1) for comparison with the present structure, which is disclosed in Japanese Patent Application Laid-Open No. 2011-138089 (hereinafter referred to as Comparative Document 1). It is sectional drawing of the wafer level laminated structure disclosed as b).
- each lens array substrate 1021 includes a lens-equipped substrate 1031 and a lens 1032 formed in a plurality of through-hole portions formed in the lens-equipped substrate 1031.
- FIG. 39 shows a second substrate structure for comparison with the present structure (hereinafter referred to as Comparative Structure Example 2), which is disclosed in Japanese Patent Laid-Open No. 2009-279790 (hereinafter referred to as Comparative Document 2). It is sectional drawing of the lens array board
- a lens 1053 is provided in each of the plurality of through holes 1052 provided in the plate-like substrate 1051.
- Each lens 1053 is formed of a resin (energy curable resin) 1054, and the resin 1054 is also formed on the upper surface of the substrate 1051.
- FIG. 40A shows a state in which a substrate 1051 having a plurality of through-holes 1052 is placed on the lower mold 1061.
- FIG. The lower mold 1061 is a mold that pushes the resin 1054 upward from below in the subsequent process.
- resin 1054 is applied to the inside of the plurality of through-holes 1052 and the upper surface of the substrate 1051, and then the upper die 1062 is placed on the substrate 1051, and the upper die 1062 and the lower die 1061 are used for pressurization.
- the molding state is shown.
- the upper mold 1062 is a mold that pushes the resin 1054 downward from above.
- the resin 1054 is cured.
- 40C shows a state where the lens array substrate 1041 is completed by releasing the upper mold 1062 and the lower mold 1061 after the resin 1054 is cured.
- the resin 1054 formed at the position of the through hole 1052 of the substrate 1051 becomes a lens 1053, and a plurality of lenses 1053 are formed on the substrate 1051, and (2) the plurality of these A feature is that a thin layer of resin 1054 is formed on the entire upper surface of the substrate 1051 positioned between the lenses 1053.
- a thin layer of resin 1054 formed on the entire upper surface of the substrate 1051 provides an action or effect as an adhesive that bonds the substrates together.
- the area for bonding the substrates can be increased as compared with the wafer level laminated structure 1000 shown in FIG.
- the substrates can be bonded with a stronger force.
- an energy curable resin is used as the resin 1054.
- a photocurable resin is used as the energy curable resin.
- the resin 1054 is cured when the resin 1054 is irradiated with UV light. Due to this curing, the resin 1054 undergoes curing shrinkage.
- the substrate 1051 is interposed between the plurality of lenses 1053.
- the variation in the distance between the lens array substrate 1041 and the lens array substrate 1041 provided with a plurality of lenses 1053 can be suppressed.
- FIG. 41 shows a third substrate structure for comparison with the present structure (hereinafter referred to as Comparative Structure Example 3), which is shown in FIG. 1 in Japanese Patent Laid-Open No. 2010-256563 (hereinafter referred to as Comparative Document 3). It is sectional drawing of the disclosed lens array board
- a lens 1093 is provided in each of the plurality of through holes 1092 provided in the plate-like substrate 1091.
- Each lens 1093 is formed of a resin (energy curable resin) 1094, and the resin 1094 is also formed on the upper surface of the substrate 1091 in which the through hole 1092 is not provided.
- FIG. 42A shows a state where a substrate 1091 having a plurality of through holes 1092 formed thereon is placed on the lower mold 1101.
- FIG. The lower mold 1101 is a mold that pushes the resin 1094 upward from below in the subsequent process.
- the upper mold 1102 is placed on the substrate 1091, and the upper mold 1102 and the lower mold 1101 are used for pressurization.
- the molding state is shown.
- the upper mold 1102 is a mold that pushes the resin 1094 downward from above. In the state shown in FIG. 42B, the resin 1094 is cured.
- 42C shows a state where the lens array substrate 1081 is completed by releasing the upper mold 1102 and the lower mold 1101 after the resin 1094 is cured.
- the resin 1094 formed at the position of the through hole 1092 of the substrate 1091 becomes the lens 1093, and a plurality of the lenses 1093 are formed on the substrate 1091.
- a feature is that a thin layer of resin 1094 is formed on the entire upper surface of the substrate 1091 located between the lenses 1093.
- an energy curable resin is used as the resin 1094.
- a photocurable resin is used as the energy curable resin.
- the resin 1094 is irradiated with UV light, the resin 1094 is cured. This curing causes curing shrinkage in the resin 1094.
- the substrate 1091 is interposed between the plurality of lenses 1093.
- the variation in the distance between the lens array substrate 1081 and the lens array substrate 1081 on which a plurality of lenses 1093 are arranged can be suppressed.
- Comparative Documents 2 and 3 disclose that curing shrinkage occurs when the photocurable resin is cured.
- JP-A-2013-1091 discloses that curing shrinkage occurs when the photocurable resin is cured.
- the resin when the resin is molded into the shape of a lens and the molded resin is cured, the resin is subject to curing shrinkage and is not limited to the photocurable resin.
- the resin in the case of a thermosetting resin which is a kind of energy curable resin as well as a photocurable resin, there is a problem that curing shrinkage occurs during curing. This is also disclosed in, for example, Comparative Documents 1 and 3 and Japanese Patent Application Laid-Open No. 2010-204631.
- FIG. 43 shows a fourth substrate structure for comparison with this structure (hereinafter referred to as comparative structure example 4), which is a cross-sectional view of the lens array substrate disclosed as FIG. 6 in Comparative Document 2 described above. .
- lens array substrate 1143 is different from the lens array substrate 1041 shown in FIG. 39 in that the shape of the substrate 1141 other than the through-hole 1042 portion protrudes not only on the upper side but also on the lower side.
- the resin 1144 is also formed on part of the lower surface of the substrate 1141.
- Other configurations of the lens array substrate 1121 are the same as those of the lens array substrate 1041 shown in FIG.
- FIG. 44 is a diagram for explaining a manufacturing method of the lens array substrate 1121 of FIG. 43, and corresponds to FIG. 40B.
- FIG. 44 shows a state in which a resin 1144 is applied to the inside of the plurality of through holes 1142 and the upper surface of the substrate 1141, and then pressure molding is performed using the upper mold 1152 and the lower mold 1151.
- the resin 1144 is also injected between the lower surface of the substrate 1141 and the lower mold 1151. In the state shown in FIG. 44, the resin 1144 is cured.
- the resin 1144 formed at the position of the through hole 1142 of the substrate 1141 becomes a lens 1143, and a plurality of the lenses 1143 are formed on the substrate 1141, and (2) the plurality of these A thin layer of resin 1144 is formed not only on the entire upper surface of the substrate 1141 positioned between the lenses 1143, but also on a part of the lower surface of the substrate 1141. It is a feature.
- a photocurable resin which is an example of an energy curable resin is used as the resin 1144. Then, when the resin 1144 is irradiated with UV light, the resin 1144 is cured. This curing causes curing shrinkage in the resin 1144 as in Comparative Structure Examples 2 and 3.
- the resin 1144 is thin not only on the entire upper surface of the substrate 1141 positioned between the plurality of lenses 1143 but also on a certain region of the lower surface of the substrate 1141. A layer is formed.
- the warp direction of the entire lens array substrate 1121 can be offset.
- a thin layer of the resin 1054 is formed on the entire upper surface of the substrate 1051 located between the plurality of lenses 1053. No thin layer of resin 1054 is formed on the lower surface of the substrate 1051.
- the lens array substrate 1121 in FIG. 43 can provide a lens array substrate with a smaller amount of warpage than the lens array substrate 1041 in FIG.
- FIG. 45 shows a fifth substrate structure for comparison with the present structure (hereinafter referred to as comparative structure example 5), which is a cross-sectional view of the lens array substrate disclosed as FIG. 9 in Comparative Document 2 described above. .
- lens array substrate 1161 is different from the lens array substrate 1041 shown in FIG. 39 in that a resin protruding region 1175 is provided on the back surface of the substrate in the vicinity of the through hole 1172 formed in the substrate 1171.
- the other configuration of the lens array substrate 1161 is the same as that of the lens array substrate 1041 shown in FIG.
- lens array substrate 1161 of FIG. 45 shows a state after being separated into pieces.
- the resin 1174 formed at the position of the through hole 1172 of the substrate 1171 becomes a lens 1173, and a plurality of the lenses 1173 are formed on the substrate 1171.
- a thin layer of the resin 1174 is formed not only on the entire upper surface of the substrate 1171 located between the lenses 1173 but also on a part of the lower surface of the substrate 1171. It is a feature.
- a photocurable resin which is an example of an energy curable resin is used as the resin 1174.
- the resin 1174 is irradiated with UV light, the resin 1174 is cured. As a result of this curing, curing shrinkage occurs in the resin 1174 as in Comparative Structure Examples 2 and 3.
- the resin 1174 is thin not only on the entire upper surface of the substrate 1171 positioned between the plurality of lenses 1173 but also on a certain region of the lower surface of the substrate 1171.
- a layer (resin protrusion region 1175) is formed. Accordingly, it is possible to provide a lens array substrate in which the warp direction of the entire lens array substrate 1171 is canceled and the amount of warpage is further reduced.
- FIG. 46 is a diagram schematically showing a structure in which a resin layer is disposed on the entire top surface of the lens array substrate, as in Comparative Structure Examples 2 and 3, and is a diagram for explaining an effect brought about by a resin serving as a lens. is there.
- the layer of the photo-curable resin 1212 disposed on the upper surface of the lens array substrate 1211 is irradiated with UV light for curing. Curing shrinkage occurs. Thereby, in the layer of photocurable resin 1212, the force of the shrinkage direction resulting from photocurable resin 1212 generate
- the lens array substrate 1211 itself does not contract or expand even when irradiated with UV light. That is, the lens array substrate 1211 itself does not generate a force due to the substrate. As a result, the lens array substrate 1211 warps in a downwardly convex shape as shown in FIG. 46C.
- FIG. 47 is a diagram schematically showing a structure in which resin layers are arranged on both the upper surface and the lower surface of the lens array substrate as in Comparative Structure Examples 4 and 5, and explains the effect of the resin serving as the lens. It is a figure to do.
- the lens array substrate 1211 itself does not contract or expand even when irradiated with UV light. That is, the lens array substrate 1211 itself does not generate a force due to the substrate.
- the force to act works to be offset.
- the warpage amount of the lens array substrate 1211 in the comparative structure examples 4 and 5 is reduced more than the warpage amount in the comparative structure examples 2 and 3 shown in FIG. .
- the force to warp the lens array substrate and the amount of warpage of the lens array substrate are (1) the direction and magnitude of the force acting on the lens array substrate on the upper surface of the lens array substrate; (2) the direction and magnitude of the force acting on the lens array substrate on the lower surface of the lens array substrate; Affected by the relative relationship of
- ⁇ Comparative structure example 6> Therefore, for example, as shown in FIG. 48A, the layer and area of the photocurable resin 1212 disposed on the upper surface of the lens array substrate 1211 and the layer of the photocurable resin 1212 disposed on the lower surface of the lens array substrate 1211.
- a lens array substrate structure having the same area can be considered.
- This lens array substrate structure is referred to as a sixth substrate structure for comparison with the present structure (hereinafter referred to as comparative structure example 6).
- a force in the contraction direction due to the photocurable resin 1212 is generated.
- the lens array substrate 1211 itself does not generate a force due to the substrate. For this reason, on the lower surface side of the lens array substrate 1211, a force acts to warp the lens array substrate 1211 into a convex shape.
- the shapes of the lens-equipped substrates constituting the laminated lens structure incorporated in the camera module are not all the same. More specifically, the plurality of lens-attached substrates constituting the laminated lens structure are different in, for example, the thickness of the substrate with lenses and the size of the through hole, or the thickness and shape of the lens formed in the through hole. , Volume etc. may be different. Furthermore, the film thickness of the photocurable resin formed on the upper surface and the lower surface of the lens-equipped substrate may be different for each lens-equipped substrate.
- FIG. 49 is a cross-sectional view of a laminated lens structure configured by laminating three substrates with lenses as a seventh substrate structure (hereinafter referred to as Comparative Structure Example 7).
- Comparative Structure Example 7 the layers and areas of the photocurable resin disposed on the upper and lower surfaces of each lens-equipped substrate are formed in the same manner as in Comparative Structure Example 6 shown in FIG. .
- the laminated lens structure 1311 shown in FIG. 49 includes three substrates with lenses 1321 to 1323.
- This lens-equipped substrate 1323 is referred to as a third lens-equipped substrate 1323.
- the second lens-equipped substrate 1322 arranged in the uppermost layer and the third lens-equipped substrate 1323 arranged in the lowermost layer are different in the thickness of the substrate and the thickness of the lens.
- the third lens-equipped substrate 1323 is formed to be thicker than the second lens-equipped substrate 1322, and accordingly, the thickness of the substrate is also increased with the second lens.
- the third lens-attached substrate 1323 is formed to be thicker than the substrate 1322.
- Resin 1341 covers the entire contact surface between the first lens-equipped substrate 1321 and the second lens-equipped substrate 1322 and the contact surface between the first lens-equipped substrate 1321 and the third lens-equipped substrate 1323. Is formed.
- the cross-sectional shape of the through holes of the three lens-equipped substrates 1321 to 1323 is a so-called divergent shape in which the lower surface of the substrate is wider than the upper surface of the substrate.
- 50A to 50C are diagrams schematically showing the laminated lens structure 1311 shown in FIG.
- the second lens-equipped substrate 1322 and the third lens-equipped substrate 1323 having different substrate thicknesses are arranged on the upper and lower surfaces of the first lens-equipped substrate 1321 as in the laminated lens structure 1311, A force that warps the laminated lens structure 1311 depending on where in the thickness direction of the laminated lens structure 1311 the layer of the resin 1341 that exists over the entire contact surface of the one of the lens-attached substrates 1321 to 1323 is present.
- the amount of warpage of the laminated lens structure 1311 changes.
- the layer of the resin 1341 existing over the entire contact surface of the three lens-equipped substrates 1321 to 1323 passes through the center line of the laminated lens structure 1311, that is, the midpoint of the laminated lens structure 1311 in the thickness direction. 48, the action of the force generated by the curing shrinkage of the resin 1341 arranged on the upper surface and the lower surface of the first lens-equipped substrate 1321 is shown in FIG. As shown in Fig. 2, it cannot be completely offset. As a result, the laminated lens structure 1311 warps in either direction.
- the two layers of the resin 1341 on the upper surface and the lower surface of the first lens-attached substrate 1321 are arranged so as to be shifted upward from the center line in the thickness direction of the laminated lens structure 1311, the two layers of the resin 1341.
- the laminated lens structure 1311 warps in a downward convex shape as shown in FIG.
- the second lens-equipped substrate 1322 and the third lens-equipped substrate 1323 a shape in which the cross-sectional shape of the through-hole of the thinner substrate increases toward the first lens-equipped substrate 1321. In such a case, there is an increased concern that the lens will be lost or damaged.
- the cross-sectional shape of the through hole of the second lens-equipped substrate 1322 having the smaller thickness among the second lens-equipped substrate 1322 and the third lens-equipped substrate 1323 is the first shape. It has a divergent shape that increases toward the direction of the lens-equipped substrate 1321.
- the laminated lens structure 1311 has a lower side as shown in FIG. A force that warps the convex shape acts, and as shown in FIG. 50D, this force acts as a force in the direction in which the lens and the substrate are separated from each other in the second substrate 1322 with a lens. This action increases the concern that the lens 1332 of the second lens-attached substrate 1322 will be lost or damaged.
- FIG. 51 is a cross-sectional view of a laminated lens structure including a laminated structure of three lens-attached substrates as an eighth substrate structure (hereinafter referred to as comparative structure example 8).
- comparative structure example 8 the layers and areas of the photocurable resin disposed on the upper and lower surfaces of each lens-equipped substrate are formed in the same manner as in Comparative Structure Example 6 shown in FIG. .
- Comparative Structure Example 8 of FIG. 51 only the point that the cross-sectional shape of the through holes of the three lens-equipped substrates 1321 to 1323 is a so-called bottom recess shape that is narrower on the lower surface of the substrate than on the upper surface of the substrate. Different from Comparative Structure Example 7.
- 52A to 52C are diagrams schematically showing the laminated lens structure 1311 shown in FIG.
- the temperature inside the camera casing rises due to the increase in power consumption accompanying the operation, and the temperature of the camera module also rises. Due to this temperature rise, in the laminated lens structure 1311 of FIG. 51, the resin 1341 disposed on the upper and lower surfaces of the first lens-equipped substrate 1321 thermally expands.
- the entire contact surface of the three lens-attached substrates 1321 to 1323 is formed.
- the layer of the resin 1341 existing across the center line of the laminated lens structure 1311 that is, the line running in the thickness direction of the laminated lens structure 1311 and symmetrically arranged with respect to the line running in the plane direction of the substrate. Otherwise, the action of the force generated by the thermal expansion of the resin 1341 disposed on the upper surface and the lower surface of the first lens-equipped substrate 1321 can be completely canceled as shown in FIG. Can not. As a result, the laminated lens structure 1311 warps in either direction.
- the two layers of the resin 1341 on the upper surface and the lower surface of the first lens-attached substrate 1321 are arranged so as to be shifted upward from the center line in the thickness direction of the laminated lens structure 1311, the two layers of the resin 1341.
- the laminated lens structure 1311 warps in an upwardly convex shape as shown in FIG. 52C.
- the cross-sectional shape of the through hole of the second lens-equipped substrate 1322 having the smaller thickness among the second lens-equipped substrate 1322 and the third lens-equipped substrate 1323 is It is a downward dent shape that decreases toward the direction of the first lens-equipped substrate 1321.
- a force that warps upward is exerted on the laminated lens structure 1311.
- this force acts as a force in the direction in which the lens and the substrate are separated from each other in the second substrate 1322 with a lens. This action increases the concern that the lens 1332 of the second lens-attached substrate 1322 will be lost or damaged.
- FIG. 53 is a view showing a laminated lens structure 1371 composed of three lens-attached substrates 1361 to 1363 adopting this structure.
- FIG. 53A is a structure corresponding to the laminated lens structure 1311 of FIG. 49, and the cross-sectional shape of the through hole is a so-called divergent shape.
- B in FIG. 53 is a structure corresponding to the laminated lens structure 1311 in FIG. 51, and the cross-sectional shape of the through hole is a so-called bottom dent structure.
- FIG. 54 is a diagram schematically showing the laminated lens structure 1371 of FIG. 53 in order to explain the action brought about by this structure.
- the second lens-attached substrate 1362 is arranged above the first first lens-equipped substrate 1361, and the third lens-equipped substrate 1363 is arranged below the first lens-equipped substrate 1361. Structure.
- the second lens-equipped substrate 1362 arranged in the uppermost layer and the third lens-equipped substrate 1363 arranged in the lowermost layer are different in the thickness of the substrate and the thickness of the lens. More specifically, the thickness of the lens is formed so that the third lens-equipped substrate 1363 is thicker than the second lens-equipped substrate 1362, and accordingly, the thickness of the substrate is also increased with the second lens.
- the third substrate 1363 with a lens is formed to be thicker than the substrate 1362.
- the laminated lens structure 1371 of this structure direct bonding between the substrates is used as a means for fixing the substrates with lenses.
- the plasma activation process is performed on the substrate with lens to be fixed, and the two substrates with lens to be fixed are plasma-bonded.
- a silicon oxide film is formed on the surface of each of the two lens-attached substrates to be laminated, and after hydroxyl groups are bonded thereto, the two lens-attached substrates are bonded together, and the temperature is raised. Dehydrated and condensed. In this way, the two lens-attached substrates are directly bonded by the silicon-oxygen covalent bond.
- the laminated lens structure 1371 of this structure resin bonding is not used as a means for fixing the substrates with lenses. For this reason, a lens forming resin or a resin for bonding the substrate is not disposed between the lens-equipped substrate and the lens-equipped substrate. Further, since the resin is not disposed on the upper and lower surfaces of the lens-equipped substrate, the resin does not thermally expand or cure and shrink on the upper and lower surfaces of the lens-equipped substrate.
- the second lens-equipped substrate 1362 and the third lens-equipped substrate 1363 are different in the thickness of the lens and the thickness of the substrate on the upper layer and the lower layer of the first lens-equipped substrate 1351, respectively.
- the warpage of the substrate due to curing shrinkage and the warpage of the substrate due to thermal expansion as in the comparative structure examples 1 to 8 described above do not occur.
- this structure in which the lens-attached substrates are fixed to each other by direct bonding is not limited to the above-mentioned comparative structure examples, even when the lens-attached substrates with different lens thicknesses and substrate thicknesses are stacked above and below.
- a cover glass may be provided on the upper part of the laminated lens structure 11 in order to protect the surface of the lens 21 of the laminated lens structure 11.
- the cover glass can have an optical aperture function.
- FIG. 55 is a diagram showing a first configuration in which the cover glass has an optical aperture function.
- a cover glass 1501 is further laminated on the upper part of the laminated lens structure 11.
- a lens barrel 74 is disposed outside the laminated lens structure 11 and the cover glass 1501.
- a light shielding film 1502 is formed on the surface of the cover glass 1501 on the lens-attached substrate 41a side (the lower surface of the cover glass 1501 in the figure).
- a predetermined range from the lens center (optical center) of each of the lens-equipped substrates 41a to 41e is an opening 1503 where the light shielding film 1502 is not formed, and the opening 1503 functions as an optical diaphragm.
- the diaphragm plate 51 constituted by the camera module 1D and the like of FIG. 13 is omitted.
- FIG. 56 is a diagram for explaining a method of manufacturing the cover glass 1501 on which the light shielding film 1502 is formed.
- a light-absorbing material is spin-coated on one surface of a cover glass (glass substrate) 1501W in the form of a wafer or a panel, whereby a light shielding film 1502 is formed. Is formed.
- a resin having a light absorbing property in which a carbon black pigment or a titanium black pigment is internally added is used.
- a predetermined region of the light shielding film 1502 is removed by a lithography technique or an etching process, so that a plurality of openings 1503 are formed at predetermined intervals as shown in FIG.
- the arrangement of the openings 1503 corresponds one-to-one with the arrangement of the through holes 83 of the carrier substrate 81W in FIG.
- a method for forming the light shielding film 1502 and the opening portion 1503 a method in which a light absorbing material that becomes the light shielding film 1502 is ejected to a region excluding the opening portion 1503 by inkjet can be used.
- the cover glass 1501W in the substrate state manufactured as described above and the plurality of substrate 41W with a lens in the same substrate state are bonded to each other and then separated into pieces by dicing using a blade or a laser. . Thereby, the laminated lens structure 11 shown in FIG. 55 in which the cover glass 1501 having a diaphragm function is laminated is completed.
- the cover glass 1501 as one step of the semiconductor process, it is possible to suppress the occurrence of dust defects that are a concern when the cover glass is formed in another assembly step.
- the light shielding film 1502 can be formed with a thin film thickness of about 1 ⁇ m, and the diaphragm mechanism has a predetermined thickness. It is possible to suppress deterioration of optical performance (peripheral light reduction) due to shielding of incident light.
- the cover glass 1501W is separated after being joined to the plurality of lens-attached substrates 41W, but may be performed before joining.
- the cover glass 1501 provided with the light shielding film 1502 and the five lens-attached substrates 41a to 41e may be joined at the wafer level or at the chip level.
- the surface of the light shielding film 1502 may be roughened. In this case, since the surface reflection of the surface of the cover glass 1501 on which the light shielding film 1502 is formed can be reduced and the surface area of the light shielding film 1502 can be increased, the bonding strength between the cover glass 1501 and the lens-equipped substrate 41 can be improved. it can.
- a method for making the surface of the light shielding film 1502 rough for example, after applying a light absorbing material to be the light shielding film 1502, a method of processing to a rough surface by etching or the like, a cover glass 1501 before applying the light absorbing material is roughened.
- a method of applying a light absorbing material a method of forming irregularities on the surface after film formation by aggregating light absorbing material, a surface having irregularities after film formation by a light absorbing material containing solid content
- a method of applying a light absorbing material for example, after applying a light absorbing material to be the light shielding film 1502, a method of processing to a rough surface by etching or the like, a cover glass 1501 before applying the light absorbing material is roughened.
- a method of applying a light absorbing material a method of forming irregularities on the surface after film formation by aggregating light absorbing material, a surface having irregularities after film formation by a light absorbing material containing solid content
- an antireflection film may be formed between the light shielding film 1502 and the cover glass 1501.
- the cover glass 1501 also serves as a support substrate for the diaphragm, the size of the camera module 1 can be reduced.
- FIG. 57 is a diagram showing a second configuration in which the cover glass has an optical aperture function.
- the cover glass 1501 is arranged at the position of the opening of the lens barrel 74.
- Other configurations are the same as those of the first configuration example shown in FIG.
- FIG. 58 is a diagram showing a third configuration in which the cover glass has an optical aperture function.
- the light shielding film 1502 is formed on the upper surface of the cover glass 1501, in other words, on the side opposite to the lens-attached substrate 41a.
- Other configurations are the same as those of the first configuration example shown in FIG.
- the light shielding film 1502 may be formed on the upper surface of the cover glass 1501 even in the configuration in which the cover glass 1501 is disposed in the opening of the lens barrel 74 shown in FIG.
- FIG. 59A is a diagram showing a first configuration example in which the opening of the through hole 83 itself is used as a diaphragm mechanism.
- FIG. 59 In the description of FIG. 59, only the parts different from the laminated lens structure 11 shown in FIG. 58 will be described, and the description of the same parts will be omitted as appropriate. Further, in FIG. 59, only symbols necessary for explanation are shown in order to avoid complication of the drawing.
- a laminated lens structure 11f shown in FIG. 59A is closest to the light incident side among the five lens-attached substrates 41a to 41e constituting the laminated lens structure 11 shown in FIG.
- the lens-equipped substrate 41a at the farthest position is replaced with a lens-equipped substrate 41f.
- the lens-fitted substrate 41f Comparing the lens-fitted substrate 41f with the lens-fitted substrate 41a in FIG. 58, the lens-fitted substrate 41a in FIG. In the substrate 41f, the hole diameter D1 on the upper surface is smaller than the hole diameter D2 on the lower surface. That is, the cross-sectional shape of the through hole 83 of the lens-attached substrate 41f is a so-called divergent shape.
- the height position of the outermost surface of the lens 21 formed in the through hole 83 of the lens-attached substrate 41f is lower than the position of the uppermost surface of the lens-attached substrate 41f indicated by a one-dot chain line in FIG. .
- the hole diameter on the light incident side of the through hole 83 of the uppermost lens-attached substrate 41f among the plurality of lens-attached substrates 41 is minimized, so that the hole diameter of the through hole 83 is reduced.
- the smallest part (the part having the hole diameter D1) functions as an optical diaphragm that restricts the ray of incident light.
- FIG. 59B is a diagram showing a second configuration example in which the opening of the through hole 83 itself is used as a diaphragm mechanism.
- the laminated lens structure 11g shown in B of FIG. 59 is, of the five lens-attached substrates 41a to 41e constituting the laminated lens structure 11 shown in FIG. It is configured to be replaced with a lens-attached substrate 41g.
- the substrate 1511 is further laminated on the lens-attached substrate 41g.
- the hole diameter of the through-hole 83 of the lens-attached substrate 41g has a smaller divergent shape on the light incident side, similar to the lens-attached substrate 41f shown in FIG.
- the substrate 1511 has a through hole 83 but does not hold the lens 21.
- the cross-sectional shapes of the lens-attached substrate 41g and the through hole 83 of the substrate 1511 are so-called divergent shapes.
- the hole diameter D3 on the upper surface of the substrate 1511 is configured to be smaller than the diameter D4 of the curved surface portion (lens portion 91) of the lens 21.
- the portion with the smallest hole diameter of the through-hole 83 of the substrate 1511 functions as an optical diaphragm that restricts the rays of incident light.
- the position of the optical diaphragm is as far as possible from the uppermost lens 21 in the laminated lens structure 11g, so that the exit pupil position can be separated and shading can be suppressed.
- the position of the optical diaphragm can be changed to the uppermost surface in the laminated lens structure 11g.
- the lens 21 can be positioned far away from the lens 21 of the lens-equipped substrate 41g in the direction opposite to the light incident direction, and shading can be suppressed.
- FIG. 59C is a diagram illustrating a third configuration example in which the opening of the through hole 83 itself is used as a diaphragm mechanism.
- a laminated lens structure 11h shown in FIG. 59C has a substrate 1512 further above the lens-equipped substrate 41a among the five lens-equipped substrates 41a to 41f constituting the laminated lens structure 11 shown in FIG. It is set as the structure laminated
- the substrate 1512 has a through hole 83 but does not hold the lens 21.
- the through hole 83 of the substrate 1512 has a so-called divergent shape in which the hole diameter is different between the uppermost surface and the lowermost surface of the substrate 1512 and the hole diameter D5 on the upper surface is smaller than the hole diameter D5 on the lower surface.
- the hole diameter D5 on the uppermost surface of the substrate 1512 is configured to be smaller than the diameter of the curved surface portion (lens portion 91) of the lens 21.
- the portion having the smallest hole diameter (the portion having the hole diameter D5) of the through hole 83 functions as an optical diaphragm that restricts the light beam of the incident light.
- a so-called bottom recess shape in which the hole diameter D5 on the upper surface is larger than the hole diameter D5 on the lower surface may be used.
- the lens-mounted substrate on the uppermost surface (the position farthest from the light receiving element 12) among the plurality of lens-mounted substrates 41 constituting the laminated lens structure 11.
- the hole diameter of the through hole 83 of 41f is configured as an optical diaphragm, or the hole diameter of the through hole 83 of the substrate 1511 or 1512 disposed in the uppermost layer is configured as an optical diaphragm.
- the diameter of the through-hole 83 of any of the lens-attached substrates 41b to 41e other than the uppermost surface among the plurality of lens-attached substrates 41 constituting the laminated lens structure 11 is set to the lens-attached substrate 41f or the substrate described above. It may be configured as 1511 or 1512 and function as an optical diaphragm.
- the lens-attached substrate 41 having the function of the optical diaphragm is the uppermost layer, or as far as possible (position farthest from the light receiving element 12). It is better to place it in
- a predetermined one lens-equipped substrate 41 among the plurality of lens-equipped substrates 41 constituting the laminated lens structure 11 or the substrate 1511 or 1512 not holding the lens 21 is an optical aperture.
- the positional accuracy of the lens curved surface closest to the diaphragm that affects the imaging performance and the optical diaphragm is improved, and the imaging performance is improved. Can do.
- the lens-attached substrates 41W in which the lenses 21 are formed in the through-holes 83 are bonded together by plasma bonding, but may be bonded using metal bonding.
- FIG. 60 is a diagram for explaining bonding at the wafer level using metal bonding.
- a lens-attached substrate 1531W-a in which a lens 1533 is formed in each of a plurality of through-holes 1532 is prepared, and the lens-attached substrate 1531W-a is prepared.
- An antireflection film 1535 is formed on the upper surface and the lower surface.
- This lens-attached substrate 1531W corresponds to the lens-attached substrate 41W described above.
- the antireflection film 1535 corresponds to the upper surface layer 122 and the lower surface layer 123 described above.
- the upper surface of the lens-attached substrate 1531W-a is a surface that is bonded to the lens-attached substrate 1531W-b in the process of FIG.
- a metal film 1542 is formed on the upper surface of the lens-attached substrate 1531W-a that serves as a bonding surface with the lens-attached substrate 1531W-b.
- the portion of the through hole 1532 where the lens 1533 is formed is masked using the metal mask 1541 so that the metal film 1542 is not formed.
- the metal film 1542 As a material of the metal film 1542, for example, Cu that is often used for metal bonding can be used. As a method for forming the metal film 1542, a PVD method such as an evaporation method, a sputtering method, or an ion plating method that can be formed at a low temperature can be used.
- a PVD method such as an evaporation method, a sputtering method, or an ion plating method that can be formed at a low temperature can be used.
- the metal film 1542 in addition to Cu, Ni, Co, Mn, Al, Sn, In, Ag, Zn, or the like, or an alloy material of two or more of these may be used. Further, any material other than those exemplified may be used as long as it is a metal material that is easily plastically deformed.
- an inkjet method using metal nanoparticles such as silver particles may be used in addition to the PVD method and the metal mask.
- an oxide film formed on the surface of the metal film 1542 when released to the atmosphere is reduced with a reducing property such as formic acid, hydrogen gas, or hydrogen radical.
- a reducing property such as formic acid, hydrogen gas, or hydrogen radical.
- Ar ions in the plasma may be incident on the metal surface and the oxide film may be physically removed by sputtering.
- a substrate with lens 1531W-b which is a substrate with lens 1531W in the other substrate state to be joined, is prepared by the same steps as A to C in FIG.
- a foreign substance 1543 is also mixed into the lower surface of the lens-attached substrate 1531W-b, which is a bonding surface of the lens-attached substrate 1531W-b.
- a metal material that is easily plastically deformed is used as the metal film 1542. Therefore, the metal film 1542 is deformed, and the substrate with lens 1531W-a and the substrate with lens 1531W-b Are joined.
- the lens-attached substrates 1531W in which the lens 1533 is formed in each of the plurality of through holes 1532 can be bonded together using metal bonding.
- a film serving as an adhesion layer can be formed between the lens-attached substrate 1531W-a and the metal film 1542.
- the adhesion layer is formed on the upper side (outside) of the antireflection film 1535, in other words, between the antireflection film 1535 and the metal film 1542.
- Ti, Ta, or W can be used as the adhesion layer.
- a nitride or oxide such as Ti, Ta, or W, or a stacked structure of nitride and oxide may be used. The same applies to the bonding between the lens-attached substrate 1531W-b and the metal film 1542.
- the material of the metal film 1542 formed on the lens-attached substrate 1531W-a and the material of the metal film 1542 formed on the lens-attached substrate 1531W-b may be different metal materials.
- the metal film 1542 has excellent sealing properties and is from the side. Since inflow of light and moisture can be prevented, the highly reliable laminated lens structure 11 and the camera module 1 can be manufactured.
- FIG. 61 is a cross-sectional view of lens-equipped substrates 41a′-1 and 41a′-2, which are modifications of the lens-equipped substrate 41a.
- a substrate 41a′-1 with a lens shown in FIG. 61A is a highly doped substrate in which B (boron) is diffused (ion implantation) at a high concentration in a silicon substrate.
- the impurity concentration of the lens-attached substrate 41a′-1 is, for example, about 1 ⁇ 10 19 cm ⁇ 3 , and the lens-attached substrate 41a′-1 can efficiently absorb light in a wide range of wavelengths. .
- lens-equipped substrate 41a'-1 are the same as those of the lens-equipped substrate 41a described above.
- the region of the silicon substrate is divided into two regions having different impurity concentrations, that is, a first region 1551 and a second region 1552.
- the first region 1551 is formed at a predetermined depth (for example, about 3 ⁇ m) from the substrate surface on which light is incident.
- the impurity concentration of the first region 1551 is as high as about 1 ⁇ 10 16 cm ⁇ 3 , for example.
- the impurity concentration of the second region 1552 is, for example, about 1 ⁇ 10 10 cm ⁇ 3, and is lower than the first concentration.
- the ions diffused (ion-implanted) into the first region 1551 and the second region 1552 are, for example, B (boron), like the lens-attached substrate 41a′-1.
- the impurity concentration of the first region 1551 on the light incident side of the lens-attached substrate 41a′-2 is about 1 ⁇ 10 16 cm ⁇ 3
- the impurity concentration of the lens-attached substrate 41a′-1 (for example, 1 ⁇ 10 10). Lower than 19 cm ⁇ 3 ). Therefore, in the substrate with lens 41a′-2, the film thickness of the light shielding film 121 ′ formed on the side wall of the through hole 83 is formed thicker than the light shielding film 121 of the substrate with lens 41a′-1 in FIG. ing. For example, assuming that the thickness of the light shielding film 121 of the substrate with lens 41a′-1 is 2 ⁇ m, the thickness of the light shielding film 121 ′ of the substrate with lens 41a′-2 is 5 ⁇ m.
- lens-attached substrate 41a'-2 are the same as those of the lens-attached substrate 41a described above.
- the doping amount may be set as appropriate depending on the amount of light reaching the substrate and the film thickness of the light shielding film 121 and the upper surface layer 122, as long as the light reaching the substrate can be absorbed.
- the silicon substrates easy to handle are used as the lens-equipped substrates 41a'-1 and 41a'-2, handling is easy.
- Light that has passed through the light shielding film 121 and the upper surface layer 122 and reached the substrate can be absorbed by the base material itself, so that the thickness of the light shielding film 121, the upper surface layer 122, and the stacked substrate itself is reduced. It is possible to reduce the thickness and simplify the structure.
- the ions doped into the silicon substrate are not limited to B (boron), and other examples include phosphorus (P), arsenic (As), or antimony ( Sb) may be used, and more specifically, any element can be used as long as it can have a band structure in which the amount of light absorption increases.
- the other lens-attached substrates 41b to 41e constituting the laminated lens structure 11 can also have the same configuration as the lens-attached substrates 41a'-1 and 41a'-2.
- a highly doped substrate 1561W in a substrate state in which B (boron) is diffused (ion-implanted) at a high concentration is prepared.
- the impurity concentration of the heavily doped substrate 1561W is, for example, about 1 ⁇ 10 19 cm ⁇ 3 .
- a through hole 83 is formed by etching at a predetermined position of the highly doped substrate 1561W.
- FIG. 62 only two through-holes 83 are shown due to space limitations, but in practice, a large number of through-holes 83 are formed in the planar direction of the highly doped substrate 1561W.
- a black resist material is applied to the side wall of the through-hole 83 by spray coating to form a light shielding film 121.
- the lens resin portion 82 including the lens 21 is formed inside the through hole 83 by pressure molding using the upper mold 201 and the lower mold 181 described with reference to FIG. Formed.
- the upper surface layer 122 is formed on the upper surface of the high concentration doped substrate 1561W and the lens resin portion 82, and the lower surface layer is formed on the lower surface of the high concentration doped substrate 1561W and the lens resin portion 82.
- 123 is formed and separated into individual pieces. Thereby, the lens-attached substrate 41a'-1 shown in FIG. 61A is completed.
- a doped substrate 1571W in a substrate state in which B (boron) is diffused (ion-implanted) at a predetermined concentration is prepared.
- the impurity concentration of the doped substrate 1571W is, for example, about 1 ⁇ 10 10 cm ⁇ 3 .
- through holes 83 are formed by etching at predetermined positions of the doped substrate 1571W.
- FIG. 63 only two through holes 83 are shown due to space limitations, but in reality, a large number of through holes 83 are formed in the planar direction of the doped substrate 1571W.
- B boron
- a predetermined depth for example, about 3 ⁇ m
- Heat treatment is applied.
- a first region 1551 having a high impurity concentration and a second region 1552 having a lower concentration are formed.
- the light shielding film 121 is formed by apply
- the lens resin portion 82 including the lens 21 is formed inside the through hole 83 by pressure molding using the upper mold 201 and the lower mold 181 described with reference to FIG. Formed.
- the upper surface layer 122 is formed on the upper surface of the doped substrate 1571W and the lens resin portion 82, and the lower surface layer 123 is formed on the lower surface of the doped substrate 1571W and the lens resin portion 82. And is singulated. Thereby, the lens-attached substrate 41a'-2 shown in FIG. 61B is completed.
- Each of the lens-attached substrates 41a to 41e constituting the laminated lens structure 11 shown in FIG. 1 can be a highly doped substrate as shown in FIG. Thereby, the light absorption amount of the substrate itself can be increased.
- FIG. 64 is a diagram illustrating an example of a planar shape of the diaphragm plate 51 provided in the camera module 1 illustrated in FIGS. 10 and 11.
- the diaphragm plate 51 includes a shielding region 51a that prevents incidence by absorbing or reflecting light and an opening region 51b that transmits light.
- the four optical units 13 provided in the camera module 1 shown in FIGS. 10 and 11 have the same opening diameter of the opening region 51b of the diaphragm plate 51 as shown in FIGS. 64A to 64D. It may be a different size. “L”, “M”, and “S” in the drawing of FIG. 64 indicate that the opening diameter of the opening region 51b is “large”, “medium”, and “small”.
- the opening diameters of the four opening regions 51b are the same.
- the diaphragm plate 51 shown in B of FIG. 64 is a standard diaphragm opening in which the size of the opening diameter of the two opening regions 51b is “medium”.
- the diaphragm plate 51 may be slightly overlapped with the lens 21 of the substrate 41 with the lens.
- the opening region 51 b of the diaphragm plate 51 is larger than the diameter of the lens 21. Slightly small.
- the remaining two opening regions 51b of the diaphragm plate 51 shown in FIG. 64B have a larger opening diameter than that having the opening diameter of “medium” described above.
- the opening diameter is large.
- the large opening area 51b has an effect of allowing more light to enter the light receiving element 12 provided in the camera module 1 when the illuminance of the subject is low, for example.
- the diaphragm plate 51 shown in FIG. 64C is a standard diaphragm opening in which the size of the opening diameter of the two opening regions 51b is “medium”.
- the remaining two opening regions 51b of the diaphragm plate 51 shown in FIG. 64C have a smaller opening diameter than that having the opening diameter of “medium” described above. Also, the opening diameter is small.
- the small opening area 51b has, for example, high illuminance on the subject, and light from the object enters the light receiving element 12 included in the camera module 1 through the opening area 51b having a medium opening diameter. When the charge generated in the photoelectric conversion unit provided exceeds the saturation charge amount of the photoelectric conversion unit, the amount of light incident on the light receiving element 12 is reduced.
- the diaphragm plate 51 shown in D of FIG. 64 is a standard diaphragm opening in which the size of the opening diameter of the two opening regions 51b is “medium”. In the remaining two opening regions 51b of the diaphragm plate 51 shown in FIG. 64D, one opening diameter is “large” and one is “small”. These opening regions 51b have the same effect as the opening regions 51b whose opening diameters are “large” and “small” described in FIG. 64B and FIG. 64C.
- FIG. 65 shows the structure of the light receiving area of the camera module 1 shown in FIGS.
- the camera module 1 includes four optical units 13 (not shown) as shown in FIG. Then, the light incident on these four optical units 13 is received by the light receiving means corresponding to each of the optical units 13.
- the light receiving element 12 includes four light receiving regions 1601a1 to 1601a4.
- the light receiving element 12 includes one light receiving region 1601a for receiving light incident on one optical unit 13 provided in the camera module 1, and the camera module 1 is configured in such a manner.
- the number of the light receiving elements 12 may be the same as the number of the optical units 13 provided in the camera module 1, for example, four in the case of the camera module 1 illustrated in FIGS. 10 and 11.
- the light receiving areas 1601a1 to 1601a4 include pixel arrays 1601b1 to 1601b4 in which pixels that receive light are arranged in an array.
- FIG. 65 for simplicity, a circuit for driving pixels included in the pixel array and a circuit for reading pixels are omitted, and the light receiving regions 1601a1 to 1601a4 and the pixel arrays 1601b1 to 1601b4 have the same size. Represents.
- the pixel arrays 1601b1 to 1601b4 provided in the light receiving regions 1601a1 to 1601a4 include pixel repeating units 1602c1 to 1602c4 each including a plurality of pixels, and a plurality of these repeating units 1602c1 to 1602c4 are arranged in both the vertical and horizontal directions. As a result, pixel arrays 1601b1 to 1601b4 are configured.
- the four optical units 13 are respectively arranged.
- the four optical units 13 include a diaphragm plate 51 as a part thereof.
- FIG. 65 as an example of the opening diameters of the four opening regions 51b of the diaphragm plate 51, the opening regions 51b of the diaphragm plate 51 shown in D of FIG. 64 are indicated by broken lines.
- super-resolution technology is known as a technology for obtaining an image with higher resolution by adapting to an original image.
- One example is disclosed in, for example, Japanese Patent Application Laid-Open No. 2015-102794.
- the camera module 1 shown in FIGS. 10 and 11 can take the structures shown in FIGS. 13, 16, 17, and FIGS. 34, 35, 37, and 55 as cross-sectional structures.
- the optical axes of the two optical units 13 arranged in each of the vertical direction and the horizontal direction of the surface of the module 1 serving as a light incident surface extend in the same direction. Accordingly, a plurality of images that are not necessarily the same can be obtained using different light receiving regions while the optical axes are directed in the same direction.
- the camera module 1 having such a structure has a resolution higher than that of one image obtained from one optical unit 13 by using the super-resolution technique based on the obtained plural original images. Is suitable for obtaining high images.
- G pixel represents a pixel that receives green wavelength light
- R pixel represents a pixel that receives red wavelength light
- B pixel represents a blue wavelength light.
- the C pixel represents a pixel that receives light in the entire wavelength region of visible light.
- FIG. 66 shows a first example of a pixel array of four pixel arrays 1601b1 to 1601b4 provided in the light receiving element 12 of the camera module 1.
- the repeating units 1602c1 to 1602c4 are repeatedly arranged in the row direction and the column direction, respectively.
- Each of the repeating units 1602c1 to 1602c4 in FIG. 66 includes R, G, B, and G pixels.
- the pixel arrangement in FIG. 66 is suitable for obtaining an image composed of RGB three colors by splitting incident light from a subject irradiated with visible light into red (R), green (G), and blue (B). Bring.
- FIG. 67 shows a second example of the pixel array of four pixel arrays 1601b1 to 1601b4 provided in the light receiving element 12 of the camera module 1.
- FIG. 67 shows a second example of the pixel array of four pixel arrays 1601b1 to 1601b4 provided in the light receiving element 12 of the camera module 1.
- each of the repeating units 1602c1 to 1602c4 is composed of R, G, B, and C pixels.
- the pixel array in FIG. 67 includes C pixels that receive light in the entire wavelength region of visible light without being split into R, G, and B as described above.
- the C pixel receives more light than the R, G, and B pixels that receive a portion of the dispersed light. For this reason, for example, even when the illuminance of the subject is low, this configuration uses information obtained from the C pixel having a large amount of received light, for example, luminance information of the subject, for example, for a higher brightness image or luminance level. This brings about an effect that an image with more tonality can be obtained.
- FIG. 68 shows a third example of the pixel array of four pixel arrays 1601b1 to 1601b4 provided in the light receiving element 12 of the camera module 1.
- FIG. 68 shows a third example of the pixel array of four pixel arrays 1601b1 to 1601b4 provided in the light receiving element 12 of the camera module 1.
- each of the repeating units 1602c1 to 1602c4 is composed of R, C, B, and C pixels.
- the pixel repeating units 1602c1 to 1602c4 shown in FIG. 68 do not include G pixels.
- Information corresponding to the G pixel is obtained by calculating information from the C, R, and B pixels. For example, it is obtained by subtracting the output values of the R pixel and the B pixel from the output value of the C pixel.
- the pixel repeating units 1602c1 to 1602c4 illustrated in FIG. 68 include two C pixels that receive light in the entire wavelength region, which are twice the repeating units 1602c1 to 1602c4 illustrated in FIG. 68.
- the pitch of the C pixel in the pixel array 1601b provided in FIG. 68 is twice the pitch of the C pixel in the pixel array 1601b shown in FIG. 67 in both the vertical and horizontal directions of the pixel array 1601b.
- the pixel repeating units 1602c1 to 1602c4 shown in FIG. 68 have two C pixels arranged in the diagonal direction of the outline of the repeating unit 1602c.
- the configuration shown in FIG. 68 has, for example, information obtained from C pixels with a large amount of received light, for example, luminance information, when the illuminance of the subject is low, twice the resolution compared to the configuration shown in FIG. This provides an effect that a clear image can be obtained with a resolution twice as high.
- FIG. 69 shows a fourth example of the pixel array of four pixel arrays 1601b1 to 1601b4 provided in the light receiving element 12 of the camera module 1.
- FIG. 69 shows a fourth example of the pixel array of four pixel arrays 1601b1 to 1601b4 provided in the light receiving element 12 of the camera module 1.
- each of the repeating units 1602c1 to 1602c4 is composed of R, C, C, and C pixels.
- the configuration shown in FIG. 69 is provided with an R pixel to recognize a red brake lamp of an automobile and a red signal of a traffic light installed on a road, and a C pixel having a large amount of received light is shown in FIG.
- R pixel to recognize a red brake lamp of an automobile and a red signal of a traffic light installed on a road
- a C pixel having a large amount of received light is shown in FIG.
- any of the camera modules 1 including the light receiving element 12 shown in FIGS. 66 to 69 may use any of the configurations shown in FIGS. 64A to 64D as the shape of the diaphragm plate 51.
- the camera module 1 shown in FIGS. 10 and 11 including any one of the light receiving elements 12 shown in FIGS. 66 to 69 and any one of the diaphragm plates 51 shown in FIGS.
- the optical axes of the optical units 13 arranged in the vertical direction and the horizontal direction on the surface of the module 1 extend in the same direction.
- the camera module 1 having such a structure brings about an effect that an image with higher resolution can be obtained by applying a super-resolution technique to a plurality of obtained original images.
- FIG. 70 shows a modification of the pixel array shown in FIG.
- the repeating units 1602c1 to 1602c4 in FIG. 66 are composed of R, G, B, and G pixels, and the structures of two G pixels of the same color are the same, whereas in FIG. 70, the repeating units 1602c1 to 1602c4 are the same. Is composed of R, G1, B, and G2 pixels, and two G pixels of the same color, that is, the G1 pixel and the G2 pixel, have different pixel structures.
- G1 pixels and G2 pixels have signal operation means (for example, photodiodes) provided with the pixels, G2 pixels have higher proper operation limits than G1 pixels (for example, have a larger saturation charge amount) ).
- the generation signal conversion means for example, charge-voltage conversion capacitor
- the generation signal conversion means provided in the pixel is also larger in the G2 pixel than in the G1 pixel.
- the output signal when a certain amount of signal (for example, charge) is generated per unit time is suppressed to be smaller than that of the G1 pixel, and the saturation charge amount is large. Even when the illuminance of the subject is high, the pixel does not reach the operation limit, and this brings about an effect that an image having high gradation can be obtained.
- a certain amount of signal for example, charge
- the G1 pixel produces a larger output signal than the G2 pixel when a certain amount of signal (for example, electric charge) is generated per unit time, so it is high even when the illuminance of the subject is low.
- a certain amount of signal for example, electric charge
- the light receiving element 12 shown in FIG. 70 includes the G1 pixel and the G2 pixel, an image having a high gradation can be obtained in a wide illuminance range, and a so-called wide dynamic range image can be obtained. This brings about the effect.
- FIG. 71 shows a modification of the pixel arrangement of FIG.
- the repeating units 1602c1 to 1602c4 in FIG. 68 are composed of R, C, B, and C pixels, and the two C pixels having the same color have the same structure, whereas in FIG. 71, the repeating units 1602c1 to 1602c4 are the same. Is composed of R, C1, B, and C2 pixels, and two C pixels of the same color, that is, the C1 pixel and the C2 pixel have different pixel structures.
- the C2 pixel has a higher operating limit (for example, has a higher saturation charge amount) than the C1 pixel as the signal generation means (for example, photodiode) provided in the pixel.
- the generation signal conversion means for example, charge-voltage conversion capacitor
- the generation signal conversion means for example, charge-voltage conversion capacitor
- FIG. 72 shows a modification of the pixel arrangement of FIG.
- the repeating units 1602c1 to 1602c4 in FIG. 69 are composed of R, C, C, and C pixels, and the structure of three C pixels of the same color is the same, whereas in FIG. 72, the repeating units 1602c1 to 1602c4 are the same. Is composed of R, C1, C2, and C3 pixels, and the three C pixels of the same color, that is, C1 to C3 pixels, have different pixel structures.
- the signal generation means for example, a photodiode included in the pixels
- the C2 pixel is higher than the C1 pixel
- the C3 pixel is higher in operation limit than the C2 pixel ( For example, it has a large saturation charge amount).
- the generation signal conversion means for example, charge-voltage conversion capacitor
- the generation signal conversion means provided in the pixel also includes a C2 pixel larger than the C1 pixel and a C3 pixel larger than the C2 pixel.
- the light receiving element 12 shown in FIGS. 71 and 72 has the above-described configuration, as in the light receiving element 12 shown in FIG. 70, an image having a high gradation can be obtained in a wide illuminance range. The effect is that a wide image can be obtained.
- the configuration of the diaphragm plate 51 of the camera module 1 including the light receiving element 12 shown in FIGS. 70 to 72 As the configuration of the diaphragm plate 51 of the camera module 1 including the light receiving element 12 shown in FIGS. 70 to 72, the configurations of various diaphragm plates 51 shown in A to D of FIG. 64 and modifications thereof are adopted. be able to.
- the camera module 1 shown in FIGS. 10 and 11 including any one of the light receiving elements 12 shown in FIGS. 70 to 72 and any one of the diaphragm plates 51 shown in FIGS. 64A to 64 becomes a light incident surface.
- the optical axes of the two optical units 13 arranged in the vertical direction and the horizontal direction on the surface of the camera module 1 extend in the same direction.
- the camera module 1 having such a structure brings about an effect that an image with higher resolution can be obtained by applying a super-resolution technique to a plurality of obtained original images.
- FIG. 73A shows a fifth example of the pixel array of the four pixel arrays 1601b1 to 1601b4 provided in the light receiving element 12 of the camera module 1.
- FIG. 73A shows a fifth example of the pixel array of the four pixel arrays 1601b1 to 1601b4 provided in the light receiving element 12 of the camera module 1.
- the four pixel arrays 1601b1 to 1601b4 included in the light receiving element 12 are not necessarily the same structure as described above, and may have different structures as shown in FIG. 73A.
- the pixel arrays 1601b1 and 1601b4 have the same structure, and the repeating units 1602c1 and 1602c4 constituting the pixel arrays 1601b1 and 1601b4 have the same structure.
- the structures of the pixel array 1601b2 and the pixel array 1601b3 are different from the structures of the pixel array 1601b1 and the pixel array 1601b4.
- the pixel sizes included in the repeating units 1602c2 and 1602c3 of the pixel arrays 1601b2 and 1601b3 are larger than the pixel sizes of the repeating units 1602c1 and 1602c4 of the pixel arrays 1601b1 and 1601b4.
- the size of the photoelectric conversion unit included in the pixel is large. Since the pixel size is large, the area size of the repeating units 1602c2 and 1602c3 is also larger than the area size of the repeating units 1602c1 and 1602c4. For this reason, the pixel array 1601b2 and the pixel array 1601b3 have the same area but a smaller number of pixels than the pixel array 1601b1 and the pixel array 1601b4.
- the configuration of the diaphragm plate 51 of the camera module 1 including the light receiving element 12 of FIG. 73 is shown in the configurations of various diaphragm plates 51 shown in FIGS. 64A to 64, or B to D of FIG.
- the configuration of the diaphragm plate 51 or a modification thereof can be adopted.
- a light receiving element using a large pixel brings about an effect that an image having a better signal noise ratio (S / N ratio) can be obtained than a light receiving element using a small pixel.
- the magnitude of noise in a signal readout circuit or a circuit that amplifies the readout signal is almost the same for a light receiving element using a large pixel and a light receiving element using a small pixel, whereas the signal generation provided in the pixel
- the magnitude of the signal generated by the unit increases as the pixel size increases.
- a light receiving element using a large pixel has an effect that an image having a better signal noise ratio (S / N ratio) can be obtained than a light receiving element using a small pixel.
- the light receiving element using small pixels has a higher resolution than the light receiving element using large pixels.
- a light receiving element using small pixels has an effect that an image with higher resolution can be obtained than a light receiving element using large pixels.
- the above configuration of the light receiving element 12 shown in FIG. 73A is, for example, a light receiving region 1601a1 having a small pixel size and a high resolution when the illuminance of the subject is high and therefore a large signal is obtained at the light receiving element 12. It is possible to obtain an image with a high resolution by using 1601a4, and further to obtain an image with a higher resolution by applying a super-resolution technique to these two images.
- the camera module 1 including the light receiving element 12 illustrated in FIG. 73A has, as the shape of the diaphragm plate 51, among the three plates related to the shape of the diaphragm plate 51 illustrated in FIGS.
- the shape of the diaphragm plate 51 described in B of FIG. 73 may be used.
- the diaphragm plate 51 of FIG. 73 is a diaphragm plate 51 used in combination with the light receiving regions 1601a2 and 1601a3 using large pixels.
- the opening area 51b is larger than the opening area 51b of the diaphragm plate 51 used in combination with other light receiving areas.
- the camera module using the diaphragm plate 51 of FIG. 73 in combination with the light receiving element 12 shown in FIG. 1 is, for example, lower in illuminance of the subject than the camera module 1 that uses the diaphragm plate 51 of FIG. 73 in combination with the light receiving element 12 shown in A of FIG. If this is not the case, it is possible to obtain an image with a higher S / N ratio in the light receiving regions 1601a2 and 1601a3.
- the diaphragm plate 51 of FIG. 73 is used in combination with the light receiving areas 1601a2 and 1601a3 using large pixels. Is smaller than the opening area 51b of the diaphragm plate 51 used in combination with other light receiving areas.
- the camera module using the diaphragm plate 51 of FIG. 73 in combination with the light receiving element 12 shown in FIG. 1 is a camera module that uses the diaphragm plate 51 of FIG. 73B in combination with the light receiving element 12 shown in FIG. 73A among the three plates related to the shape of the diaphragm plate 51 described in FIGS.
- the illuminance of the subject is high and therefore a large signal is obtained at the light receiving element 12, the amount of light incident on the light receiving regions 1601a2 and 1601a3 is suppressed.
- FIG. 74A shows a sixth example of the pixel array of four pixel arrays 1601b1 to 1601b4 provided in the light receiving element 12 of the camera module 1.
- FIG. 74A shows a sixth example of the pixel array of four pixel arrays 1601b1 to 1601b4 provided in the light receiving element 12 of the camera module 1.
- the area size of the repeating unit 1602c1 of the pixel array 1601b1 is smaller than the area size of the repeating units 1602c1 and 1602c2 of the pixel arrays 1601b2 and 1601b3.
- the area size of the repeating unit 1602c4 of the pixel array 1601b4 is larger than the area size of the repeating units 1602c1 and 1602c2 of the pixel arrays 1601b2 and 1601b3.
- the configuration of the diaphragm plate 51 of the camera module 1 including the light receiving element 12 of FIG. 74 the configurations of various diaphragm plates 51 shown in A to C of FIG. 64 or B to D of FIG.
- the configuration of the diaphragm plate 51 or a modification thereof can be adopted.
- the above-described configuration of the light receiving element 12 illustrated in A of FIG. 74 has the light receiving region 1601a1 with a small pixel size and high resolution when, for example, the illuminance of the subject is high and thus a large signal is obtained at the light receiving element 12. Use of this has the effect that an image with high resolution can be obtained.
- the S / N is obtained by using the light receiving region 1601a4 where an image with a higher S / N ratio is obtained. It is possible to obtain an image with a higher ratio.
- the camera module 1 including the light receiving element 12 shown in A of FIG. 74 has, as the shape of the diaphragm plate 51, among the three sheets related to the shape of the diaphragm plate 51 shown in B to D of FIG.
- the shape of the diaphragm plate 51 shown in B of FIG. 74 may be used.
- the diaphragm plate 51 of FIG. 74C is a diaphragm plate 51 used in combination with the light receiving regions 1601a2 and 1601a3 using large pixels. Is larger than the opening area 51b of the diaphragm plate 51 used in combination with the light receiving area 1601a1 using a small image. In addition, the aperture region 51b of the diaphragm plate 51 used in combination with the light receiving region 1601a4 using larger pixels is even larger.
- the camera module using the diaphragm plate 51 of FIG. 74C in combination with the light receiving element 12 shown in FIG. 1 is a camera module that uses the diaphragm plate 51 of FIG. 74B in combination with the light receiving element 12 shown in FIG. 74A among the three plates related to the shape of the diaphragm plate 51 described in FIGS.
- the camera module using the diaphragm plate 51 of FIG. 74C in combination with the light receiving element 12 shown in FIG. 1 is a camera module that uses the diaphragm plate 51 of FIG. 74B in combination with the light receiving element 12 shown in FIG. 74A among the three plates related to the shape of the diaphragm plate 51 described in FIGS.
- the diaphragm plate 51 of FIG. 74 is used in combination with the light receiving areas 1601a2 and 1601a3 using large pixels. Is smaller than the opening area 51b of the diaphragm plate 51 used in combination with the light receiving area 1601a1 using a small image. In addition, the aperture region 51b of the diaphragm plate 51 used in combination with the light receiving region 1601a4 using larger pixels is even smaller.
- the camera module using the diaphragm plate 51 of FIG. 74 in combination with the light receiving element 12 shown in FIG. 1 is a camera module that uses the diaphragm plate 51 of FIG. 74B in combination with the light receiving element 12 shown in FIG. 74A among the three plates related to the shape of the diaphragm plate 51 described in FIGS.
- the illuminance of the subject is high and therefore a large signal is obtained at the light receiving element 12, the amount of light incident on the light receiving regions 1601a2 and 1601a3 is suppressed.
- the amount of light incident on the light receiving region 1601a4 is further suppressed, and thereby excessive light is incident on the pixels included in the light receiving region 1601a4, thereby exceeding the proper operation limit of the pixels included in the light receiving region 1601a4. (For example, exceeding the saturation charge amount) is also suppressed.
- an aperture region is formed using a structure similar to a diaphragm that combines a plurality of plates and changes the size of the aperture by changing its positional relationship.
- the camera module may include a diaphragm plate 51 in which 51b is variable, and the size of the aperture of the diaphragm may be changed according to the illuminance of the subject.
- the diaphragm plate 51 shown in B to D of FIG. 73 and B to D of FIG. 73 of FIG. 73 and C of FIG. 74 are used, and when the illuminance of the subject is higher than this, the shapes of B of FIG. 73 and B of FIG. 74 are used.
- the structure of using the shapes D in FIG. 73 and D in FIG. 74 may be used.
- FIG. 75 shows a seventh example of the pixel array of four pixel arrays 1601b1 to 1601b4 provided in the light receiving element 12 of the camera module 1.
- all the pixels of the pixel array 1601b1 are composed of pixels that receive light having a green wavelength.
- All the pixels of the pixel array 1601b2 are configured by pixels that receive light having a blue wavelength.
- All the pixels of the pixel array 1601b3 are configured by pixels that receive light having a red wavelength.
- All the pixels of the pixel array 1601b4 are composed of pixels that receive light having a green wavelength.
- FIG. 76 shows an eighth example of the pixel array of four pixel arrays 1601b1 to 1601b4 provided in the light receiving element 12 of the camera module 1.
- all the pixels of the pixel array 1601b1 are composed of pixels that receive light having a green wavelength.
- All the pixels of the pixel array 1601b2 are configured by pixels that receive light having a blue wavelength.
- All the pixels of the pixel array 1601b3 are configured by pixels that receive light having a red wavelength.
- All the pixels of the pixel array 1601b4 are composed of pixels that receive light having a wavelength in the entire visible light region.
- FIG. 77 shows a ninth example of the pixel array of four pixel arrays 1601b1 to 1601b4 provided in the light receiving element 12 of the camera module 1.
- all the pixels of the pixel array 1601b1 are composed of pixels that receive light having a wavelength in the entire visible light region.
- All the pixels of the pixel array 1601b2 are configured by pixels that receive light having a blue wavelength.
- All the pixels of the pixel array 1601b3 are configured by pixels that receive light having a red wavelength.
- All the pixels of the pixel array 1601b4 are composed of pixels that receive light having a wavelength in the entire visible light region.
- FIG. 78 shows a tenth example of the pixel array of four pixel arrays 1601b1 to 1601b4 provided in the light receiving element 12 of the camera module 1.
- all the pixels of the pixel array 1601b1 are composed of pixels that receive light having a wavelength in the entire visible light region.
- All the pixels of the pixel array 1601b2 are composed of pixels that receive light in the entire visible light region.
- All the pixels of the pixel array 1601b3 are configured by pixels that receive light having a red wavelength.
- All the pixels of the pixel array 1601b4 are composed of pixels that receive light having a wavelength in the entire visible light region.
- the pixel arrays 1601b1 to 1601b4 of the light receiving element 12 can be configured to receive light having a wavelength in the same band for each pixel array.
- a conventionally known RGB 3 plate type solid-state imaging device has three light receiving elements, and each light receiving element captures only an R image, only a G image, and only a B image.
- a conventionally known RGB 3 plate type solid-state imaging device separates light incident on one optical unit in three directions by a prism and then receives light using three light receiving elements. For this reason, the positions of the subject images incident on the three light receiving elements are the same among the three. For this reason, it is difficult to obtain a highly sensitive image by applying the super-resolution technique to these three images.
- Two optical units 13 are arranged in each of the vertical direction and the horizontal direction, and the optical axes of these four optical units 13 are parallel and extend in the same direction.
- a plurality of images that are not necessarily the same can be obtained using the four different light receiving regions 1601a1 to 1601a4 included in the light receiving element 12 while the optical axes are directed in the same direction.
- the camera module 1 having such a structure is based on a plurality of images obtained from the four optical units 13 having the above-described arrangement, and uses a super-resolution technique for the images. This brings about an effect that an image having a higher resolution than that of a single obtained image can be obtained.
- the structure which acquires four images of G, R, G, B by the light receiving element 12 shown in FIG. 75 is G, R, G, B, four pieces in the light receiving element 12 shown in FIG. The same effect as that obtained by the configuration in which the pixel is a repeating unit is brought about.
- R, C, C, C, and 4 images are obtained by using the R, C, C, C, and 4 pixels in the light receiving element 12 shown in FIG. The same effect as the effect brought about by the constitution of the repeating unit is brought about.
- the configuration of the diaphragm plate 51 of the camera module 1 including any one of the light receiving elements 12 shown in FIGS. 75 to 78 includes various configurations of the diaphragm plates 51 shown in FIGS. Can be adopted.
- FIG. 79A shows an eleventh example of the pixel array of the four pixel arrays 1601b1 to 1601b4 provided in the light receiving element 12 of the camera module 1.
- FIG. 79A shows an eleventh example of the pixel array of the four pixel arrays 1601b1 to 1601b4 provided in the light receiving element 12 of the camera module 1.
- each pixel array 1601b1 to 1601b4 has a different pixel size or wavelength of light received by each pixel.
- the pixel array 1601b1 is the smallest, the pixel arrays 1601b2 and 1601b3 are the same size, larger than the pixel array 1601b1, and the pixel array 1601b4 is configured to be larger than the pixel arrays 1601b2 and 1601b3.
- the size of the pixel size is proportional to the size of the photoelectric conversion unit included in each pixel.
- the pixel arrays 1601b1, 1601b2, and 1601b4 are configured by pixels that receive light having wavelengths in the entire visible light region, and the pixel array 1601b3 receives light having red wavelengths. It is made up of pixels that
- 79A includes the light receiving region 1601a1 having a small pixel size and a high resolution when, for example, the illuminance of the subject is high and thus a large signal can be obtained in the light receiving device 12. Use of this has the effect that an image with high resolution can be obtained.
- the S / N is obtained by using the light receiving region 1601a4 where an image with a higher S / N ratio is obtained. It is possible to obtain an image with a higher ratio.
- the configuration using the combination of the diaphragm plate 51 of FIG. 74 As the three elements related to the shape of the diaphragm plate 51 described in FIGS. 79B to D to the light receiving element 12 illustrated in FIG. 79A, the configuration using the combination of the diaphragm plate 51 of FIG. 74.
- FIG. 80 is a diagram illustrating a twelfth embodiment of the camera module using the laminated lens structure to which the present technology is applied.
- FIG. 80A is a schematic diagram showing an appearance of a camera module 1M as the twelfth embodiment of the camera module 1.
- FIG. 80B is a schematic cross-sectional view of the camera module 1M.
- the camera module 1M includes two optical units 13 as in the camera module 1B of the second embodiment shown in FIG.
- the camera module 1M is different from the camera module 1B of FIG. 9 in that the optical parameters of the two optical units 13 are different in the camera module 1B of the second embodiment.
- the optical parameters of the two optical units 13 are the same. That is, in the two optical units 13 provided in the camera module 1M, the number of lenses 21, the diameter of the lens 21, the thickness of the lens 21, the surface shape of the lens 21, the material of the lens 21, and the two adjacent lenses up and down. The distance between 21 is the same.
- 80C is a diagram showing a planar shape of a predetermined one-layer lens-equipped substrate 41 constituting the laminated lens structure 11 of the camera module 1M.
- 80D is a plan view of the lens-equipped substrate 41W in the substrate state for obtaining the lens-equipped substrate 41 shown in FIG. 80C.
- FIG. 81 is a diagram for explaining the structure of the light receiving element 12 of the camera module 1M shown in FIG.
- the light receiving element 12 of the camera module 1M includes two light receiving areas 1601a1 and 1601a2.
- the light receiving regions 1601a1 and 1601a2 include pixel arrays 1601b1 and 1601b2 in which pixels that receive light are arranged in an array.
- the pixel arrays 1601b1 and 1601b2 include repeating units 1602c1 and 1602c2 composed of a plurality or a single pixel. More specifically, the pixel array 1601b1 is configured by arranging a plurality of repeating units 1602c1 in both the vertical and horizontal directions, and the pixel array 1601b2 includes the repeating units 1602c2 in both the vertical and horizontal directions. Are arranged in a plurality of arrays.
- the repeating unit 1602c1 is four pixels composed of R, G, B, and G pixels, and the repeating unit 1602c2 is composed of one C pixel.
- the camera module 1M outputs a set of sensor units that output a color image signal, that is, a set of a pixel array 1601b1 having R, G, and B pixels and an optical unit 13, and a set that outputs a monochrome image signal.
- Sensor unit that is, a set of a pixel array 1601 b 2 having C pixels and the optical unit 13.
- a standard ITU-R BT. which converts R, G, and B pixel signals into luminance signals and color difference signals.
- the luminance signal Y of 601-7 among the R, G, and B pixel signals, the G signal has the highest sensitivity for luminance, and the B signal has the sensitivity for luminance. The lowest.
- Y 0.299R + 0.587G + 0.114B Formula (1)
- FIG. 82 is a diagram showing a place where pixels that can obtain luminance information with high sensitivity are arranged in the light receiving element 12 shown in FIG.
- the G pixel is the only pixel that can obtain luminance information with high sensitivity in the light receiving region 1601a1.
- all pixels constituting the pixel array 1601b2 are C pixels in which luminance information can be obtained with high sensitivity by receiving light in all visible wavelength regions. .
- FIG. 83 shows the arrangement pitch of pixels (hereinafter also referred to as high luminance pixels) that can obtain luminance information with high sensitivity in the light receiving element 12 shown in FIG. FIG.
- the common arrangement pitch P_LEN1 is obtained in the row direction and the column direction.
- the arrangement pitch P_LEN2 of the light receiving regions 1601a1 and the arrangement pitch P_LEN3 of the light receiving regions 1601a2 are different in the oblique direction that is 45 ° with respect to the row direction and the column direction.
- the arrangement pitch P_LEN3 of the light receiving area 1601a2 is 1 ⁇ 2 the arrangement pitch P_LEN2 of the light receiving area 1601a1.
- the light receiving region 1601a2 can obtain an image that is twice as high as the resolution of the light receiving region 1601a1.
- the two-lens structure camera module 1M described with reference to FIGS. 80 to 83 includes a pixel array in addition to a so-called Bayer array light receiving area 1601a1 having a pixel array of R, G, B, and G as a repeating unit 1602c1.
- a light receiving region 1601a2 in which all the pixels constituting the 1601b2 are C pixels is also provided.
- Such a structure of the camera module 1M has an effect that a clearer image can be obtained than an image obtained only from the light receiving region 1601a1.
- information on luminance change for each pixel can be obtained from the light receiving region 1601a2. Complementing the luminance information obtained from the light receiving area 1601a1 based on this information brings about an effect that an image having a higher resolution than that obtained only from the light receiving area 1601a1 can be obtained.
- the resolution in the oblique direction is doubled compared to the case of only the pixel information obtained from the light receiving region 1601a1, so that by combining the pixel information of both the light receiving region 1601a1 and the light receiving region 1601a2, 2 Double lossless zoom (enlarged image without image quality degradation) can be realized.
- the luminance signal obtained from the light receiving area 1601a2 that does not include RGB three types of color filters has a signal level that is approximately 1.7 times that of the luminance signal obtained from the light receiving area 1601a1 that includes color filters. Therefore, by combining the pixel information of both the light receiving area 1601a1 and the light receiving area 1601a2, for example, by replacing the G luminance signal obtained in the light receiving area 1601a1 with the luminance signal of the corresponding pixel obtained in the light receiving area 1601a2, It is possible to generate and output a pixel signal with an improved SN ratio (Signal ⁇ to Noise ratio).
- the camera module 1M can capture the light receiving area 1601a1 and the light receiving area 1601a2 in synchronization, it can generate an image with a high SN ratio in a short time, and is suitable for capturing moving images and moving objects.
- a super-resolution image having a resolution twice that of an image obtained from only 1601a1 can be obtained.
- the pixel position of the light receiving area 1601a2 is shifted by 1/2 pixel in the horizontal and vertical directions with respect to the light receiving area 1601a1 as described above.
- an 8Kx4K super-resolution video equivalent to 32 megapixels can be obtained.
- Images for various purposes such as resolution images can be generated.
- the type of image to be generated is selected and determined, for example, by setting the operation mode of the imaging apparatus in which the camera module 1M is incorporated.
- FIG. 84 is a diagram illustrating a thirteenth embodiment of a camera module using a laminated lens structure to which the present technology is applied.
- FIG. 84A is a schematic diagram showing an appearance of a camera module 1N as a thirteenth embodiment of the camera module 1.
- FIG. B in FIG. 84 is a schematic cross-sectional view of the camera module 1N.
- the camera module 1N includes three optical units 13 having the same optical parameters as shown in FIG. 84B.
- 84C is a diagram for explaining the structure of the light receiving element 12 of the camera module 1N.
- the light receiving element 12 of the camera module 1N includes three light receiving areas 1601a1 to 1601a3 at positions corresponding to the three optical units 13 arranged on the upper side thereof.
- the light receiving areas 1601a1 to 1601a3 include pixel arrays 1601b1 to 1601b3 in which pixels are arranged in an array.
- the pixel arrays 1601b1 to 1601b3 include repeating units 1602c1 to 1601c3 made up of a plurality of or single pixels. More specifically, the pixel array 1601b1 is configured by arranging a plurality of repeating units 1602c1 in both the vertical and horizontal directions, and the pixel array 1601b2 includes the repeating units 1602c2 in both the vertical and horizontal directions. The pixel array 1601b3 is configured by arranging a plurality of repeating units 1602c3 in both the vertical direction and the horizontal direction.
- the repeating unit 1602c1 is four pixels including R, G, B, and G pixels, and the repeating units 1602c2 and 1601c3 are configured by one C pixel.
- the camera module 1N has a set of sensor units that output color image signals, that is, a set of the pixel array 1601b1 having R, G, and B pixels and the optical unit 13, and two sets that output monochrome image signals.
- Sensor units ie, a pixel array 1601b2 having C pixels and an optical unit 13, and a pixel array 1601b3 having C pixels and an optical unit 13 are provided.
- Such a structure of the camera module 1N has an effect that a clearer image can be obtained than an image obtained only from the light receiving region 1601a1 as in the case of the two-lens camera module 1M described above. That is, pixel information from a light receiving region 1601a2 having a pixel array 1601b2 composed of C pixels and a light receiving region 1601a3 having a pixel array 1601b3 composed of C pixels, for example, information on luminance change for each pixel. If the luminance information obtained from the Bayer array light receiving area 1601a1 having the R, G, B, G pixel array as the repeating unit 1602c1 is complemented, the resolution is higher than that of the image obtained only from the light receiving area 1601a1.
- the three-lens camera module 1N similarly to the two-lens camera module 1M described above, it is possible to capture a moving image and a moving object with a high S / N ratio by imaging the light receiving areas 1601a1 to 1601a3 in synchronization.
- pixel information by superimposing pixel information by shifting the pixel positions of the light receiving regions 1601a2 and 1601a3 by 1/2 pixel in the horizontal and vertical directions with respect to the light receiving region 1601a1, a super-resolution image with double resolution can be obtained. .
- the structure of the camera module 1N is disclosed in, for example, Japanese Patent Application Laid-Open No. 2008-286527 and International Publication No. 2011-058876, using image information from the light receiving areas 1601a2 and 1601a3 formed of C pixels. Similar to the distance measuring device, the distance information can be obtained as a compound eye distance measuring device.
- the distance information can be obtained quickly and accurately even in a shooting environment where the illuminance of the subject is low and the luminance of the subject is low. Bring. Using this distance information, for example, in an imaging apparatus using the camera module 1N, an autofocus operation can be performed at high speed and accurately.
- a single-lens reflex camera generally uses a dedicated autofocus sensor, and a compact digital camera or the like uses a combination of an image plane phase difference method in which a phase difference pixel is arranged in a part of an image sensor and a contrast AF method.
- an image plane phase difference method in which a phase difference pixel is arranged in a part of an image sensor
- a contrast AF method used. Since the phase difference pixel is composed of a pixel whose light receiving area is, for example, half that of a normal pixel, the image plane phase difference method has a drawback that it is weak against low illuminance.
- the contrast AF method has a drawback that the focusing time is slow, and the autofocus dedicated sensor has a disadvantage that the apparatus size is increased.
- all the pixels of the two light receiving areas 1601a2 and 1601a3 that acquire the distance information are composed of normal pixels whose light receiving areas are not reduced.
- imaging of the light receiving areas 1601a2 and 1601a3 for obtaining distance information can be performed in synchronization with imaging of the light receiving area 1601a1 from which a color image can be acquired. Therefore, according to the camera module 1N, it is compact, strong against low illuminance, and can perform autofocus at high speed.
- the structure of the camera module 1N expresses the distance according to the degree of shading using the distance information, like the distance image disclosed in, for example, Japanese Patent Application Laid-Open No. 2006-31860 and Japanese Patent Application Laid-Open No. 2012-15642. This brings about an effect that a distance image can be output.
- the three-lens camera module 1N using the pixel information obtained by the three light receiving areas 1601a1 to 1601a3, an enlarged image without image quality degradation, an image with improved SN ratio, and super-resolution Images for various purposes such as images and distance images can be generated. Distance information based on the parallax between the light receiving areas 1601a2 and 1601a3 can also be generated.
- the use of the pixel information obtained from the three light receiving areas 1601a1 to 1601a3 is selected and determined by, for example, the setting of the operation mode of the imaging device in which the camera module 1N is incorporated.
- FIG. 85 shows a substrate configuration example of the light receiving element 12 used in the three-lens camera module 1N.
- the light receiving element 12 used in the three-lens camera module 1N can be formed in a three-layer structure in which three semiconductor substrates 1701 to 1703 are stacked.
- three light receiving regions 1601 a 1 to 1601 a 3 corresponding to the three optical units 13 are formed on the first semiconductor substrate 1701 on the light incident side.
- Three memory regions 1631a1 to 1631a3 corresponding to the three light receiving regions 1601a1 to 1601a3 are formed in the second semiconductor substrate 1702 in the middle.
- the memory regions 1631a1 to 1631a3 hold pixel signals supplied via the control regions 1642a1 to 1642a3 of the third semiconductor substrate 1703 for a predetermined time, for example.
- logic regions 1641a1 to 1641a3 and control regions 1642a1 to 1642a3 corresponding to the three light receiving regions 1601a1 to 1601a3 are formed.
- the control areas 1642a1 to 1642a3 perform read control for reading out pixel signals from the light receiving areas 1601a1 to 1601a3, AD conversion processing for converting analog pixel signals into digital, and output of pixel signals to the memory areas 1631a1 to 1631a3.
- the logic areas 1641a1 to 1641a3 perform predetermined signal processing such as gradation correction processing of AD-converted image data, for example.
- the three semiconductor substrates 1701 to 1703 are electrically connected to each other by, for example, through vias or Cu-Cu metal bonds.
- the light receiving element 12 includes the memory regions 1631a1 to 1631a3, the logic regions 1641a1 to 1641a3, and the control regions 1642a1 to 1642a3 corresponding to the three light receiving regions 1601a1 to 1601a3, and the three semiconductor substrates 1701 to 1703. It can comprise by the 3 layer structure arrange
- the exposure time of one frame is shortened, so that the SN ratio is degraded.
- the imaging start timing is shifted by 1/2 exposure time to perform the imaging operation, thereby doubling at the same frame rate as the monocular color imaging sensor. The exposure time can be ensured.
- the three memory areas 1631a1 to 1631a3 can be used for one light receiving area 1601.
- Memory capacity is three times the normal capacity.
- the imaging time can be increased by a factor of three in a super slow movie or the like in which the exposure time is set to a short time.
- the AD conversion processing can also use each ADC (analog / digital converter) in the three control regions 1642a1 to 1642a3, so that nearly three times higher speed driving is possible.
- the light receiving element 12 includes memory areas 1631a1 to 1631a3 corresponding to the three light receiving areas 1601a1 to 1601a3, so that, for example, as shown in FIG. Processing such as outputting only the image signal to the subsequent stage becomes possible. Thereby, since the amount of data to be transmitted can be compressed, there are effects such as reducing the load of data transfer, improving the transfer speed, and reducing power consumption.
- the application of the image obtained from the light receiving element 12 is expanded.
- FIG. 87 is a diagram illustrating a fourteenth embodiment of a camera module using a laminated lens structure to which the present technology is applied.
- FIG. 87A is a schematic diagram showing the appearance of a camera module 1P as a fourteenth embodiment of the camera module 1.
- FIG. B in FIG. 87 is a schematic cross-sectional view of the camera module 1P.
- the camera module 1P includes four optical units 13 having the same optical parameters.
- 87C is a diagram for explaining the structure of the light receiving element 12 of the camera module 1P.
- the light receiving element 12 of the camera module 1P includes four light receiving areas 1601a1 to 1601a4 at positions corresponding to the four optical units 13 arranged on the upper side thereof.
- the light receiving areas 1601a1 to 1601a4 include pixel arrays 1601b1 to 1601b4 in which pixels that receive light are arranged in an array.
- the pixel arrays 1601b1 to 1601b4 include repeating units 1602c1 to 1601c4 made up of a plurality of or single pixels. More specifically, the pixel array 1601b1 is configured by arranging a plurality of repeating units 1602c1 in both the vertical and horizontal directions, and the pixel array 1601b2 includes the repeating units 1602c2 in both the vertical and horizontal directions. Are arranged in a plurality of arrays.
- the pixel array 1601b3 is configured by arranging a plurality of repeating units 1602c3 in both the vertical direction and the horizontal direction, and the pixel array 1601b4 includes the repeating units 1602c4 in both the vertical direction and the horizontal direction. It is configured by arranging a plurality of arrays.
- the repeating units 1602c1 and 1602c4 are four pixels each composed of R, G, B, and G pixels, and the repeating units 1602c2 and 1601c3 are configured by one C pixel.
- the camera module 1P includes two sets of sensor units that output color image signals, that is, a set of the pixel array 1601b1 having each pixel of R, G, and B and the optical unit 13, and each pixel of R, G, and B.
- a set of optical units 13 is, a set of optical units that output color image signals, that is, a set of the pixel array 1601b1 having each pixel of R, G, and B and the optical unit 13, and each pixel of R, G, and B.
- Such a structure of the camera module 1P brings about an effect that a clearer image can be obtained than an image obtained only from the light receiving region 1601a1 as in the case of the two-lens camera module 1M described above. That is, pixel information from a light receiving region 1601a2 having a pixel array 1601b2 composed of C pixels and a light receiving region 1601a3 having a pixel array 1601b3 composed of C pixels, for example, information on luminance change for each pixel.
- the luminance information obtained from the Bayer array light receiving area 1601a1 or 1601a4 having the R, G, B, G pixel array as the repeating unit 1602c1 is complemented using an image obtained only from the light receiving area 1601a1 or 1601a4 This also brings about an effect that an image with high resolution can be obtained. Further, since the resolution in the oblique direction is twice that of a monocular or compound eye color imaging sensor, combining the pixel information of the light receiving areas 1601a1 to 1601a4 results in a double lossless zoom (enlarged image without image quality degradation). ) Can be realized. There is a method of realizing lossless zoom by using a lens having a different imaging range, but in this case, the height of the camera module is different. According to the camera module 1P, lossless zoom can be realized without changing the height of the module.
- the signal amount is doubled and the noise is 1.4 times, so that the SN ratio of the pixel signal can be improved.
- the signal level of the luminance signal is about 1.7 times that of the light receiving areas 1601a1 and 1601a4 for capturing the color image, so the SN ratio is further improved.
- the SN ratio is improved by about 2.7 times compared to a monocular color imaging sensor. Since the camera module 1P can capture the light receiving area 1601a1 and the light receiving area 1601a2 in synchronization, it can generate an image with a high SN ratio in a short time, and is suitable for capturing moving images and moving objects.
- the structure of the camera module 1P is disclosed in, for example, Japanese Patent Application Laid-Open No. 2008-286527 and International Publication No. 2011-058876, using image information from the light receiving areas 1601a2 and 1601a3 formed of C pixels. Similar to the distance measuring device, the distance information can be obtained as a compound eye distance measuring device.
- the distance information can be obtained at high speed and accurately.
- an autofocus operation can be performed at high speed and accurately.
- all the pixels in the two light receiving areas 1601a2 and 1601a3 that acquire the distance information are not regular pixels such as phase difference pixels but normal pixels.
- the light receiving areas 1601a2 and 1601a3 from which distance information can be obtained can be imaged in synchronization with the light receiving areas 1601a1 and 1601a4 from which color images can be acquired. Therefore, according to the camera module 1N, it is compact, strong against low illuminance, and can perform autofocus at high speed.
- the structure of the camera module 1P expresses the distance according to the degree of shading using the distance information, like the distance image disclosed in, for example, Japanese Patent Application Laid-Open No. 2006-31860 and Japanese Patent Application Laid-Open No. 2012-15642. This brings about an effect that a distance image can be output.
- the camera module 1P can obtain an image with a wide dynamic range (high dynamic range image) by changing the pixel driving method.
- FIG. 88 is a diagram for explaining a pixel driving method for obtaining a high dynamic range image.
- a light receiving area 1601a1 including a pixel array 1601b1 configured with R, G, B, and G pixels and a light receiving area 1601a3 including a pixel array 1601b3 configured with C pixels are specific to a subject.
- a predetermined exposure time hereinafter referred to as a first exposure time.
- the subject is under the specific illuminance.
- an image is taken with an exposure time shorter than the first exposure time (hereinafter referred to as a second exposure time).
- the first exposure time is also referred to as a long second exposure time
- the second exposure time is also referred to as a short second exposure time.
- the pixel that has taken a subject with high brightness will be photographed in a state that exceeds the appropriate operating limit of the pixel (for example, the saturation charge amount).
- the operation is performed, and the image data obtained as a result of photographing sometimes loses the gradation, so-called an image may be in a state of being overexposed.
- an image taken with a short second exposure time from the light receiving area 1601a2 and the light receiving area 1601a4, in other words, within an appropriate operating range of the pixel (for example, below the saturation charge amount). An image taken in a state can be obtained.
- the camera module 1P discloses an image taken with the long exposure time and an image taken with the short exposure time obtained in this way, for example, in JP-A-11-75118 and JP-A-11-27583. By synthesizing in the same manner as the pixel signal synthesizing method for expanding the dynamic range, it is possible to obtain a high dynamic range image.
- a high dynamic range image generation method uses a monocular color imaging sensor or the like to acquire and synthesize an image photographed with a long second exposure time and an image photographed with a short second exposure time with a time difference.
- the pixel array is imaged separately for long-second exposure pixels and short-second exposure pixels.
- the method of combining two images, an image shot with a long second exposure time and an image shot with a short second exposure time, is not suitable for moving objects and moving images, and the pixel array is divided into a long second exposure pixel and a short second exposure pixel.
- resolution degradation occurs.
- the method of generating a high dynamic range image using the four-lens camera module 1P there is no deterioration in resolution and no decrease in frame rate, so it is suitable for moving objects and moving images.
- the four-eye camera module 1P using the pixel information obtained from the four light receiving areas 1601a1 to 1601a4, an enlarged image without image quality degradation, an image with improved SN ratio, and super-resolution Images for various applications such as images, distance images, and high dynamic range images can be generated.
- Distance information based on the parallax between the light receiving areas 1601a2 and 1601a3 can also be generated.
- the use of the pixel information obtained from the four light receiving areas 1601a1 to 1601a4 is selected and determined by, for example, the setting of the operation mode of the imaging apparatus in which the camera module 1P is incorporated.
- FIG. 89 shows a substrate configuration example of the light receiving element 12 used in the four-eye camera module 1P.
- the light receiving element 12 used in the four-eye camera module 1P can be formed by a three-layer structure in which three semiconductor substrates 1701 to 1703 are stacked as shown in FIG.
- four light receiving regions 1601a1 to 1601a4 corresponding to the four optical units 13 are formed on the first semiconductor substrate 1701 on the light incident side.
- the exposure time of one frame is shortened, so that the SN ratio is deteriorated.
- the camera module 1P by using the four light receiving areas 1601a1 to 1601a4 and performing the imaging operation by shifting the imaging start timing by 1 ⁇ 4 exposure time, at the same frame rate as the monocular color imaging sensor, Four times the exposure time can be secured.
- the high frame rate can be obtained.
- the four memory areas 1631a1 to 1631a4 can be used for one light receiving area 1601.
- the memory capacity is four times the normal capacity.
- the imaging time can be increased by a factor of four in a super slow movie that is captured with the exposure time set to a short time.
- the AD conversion processing can use each ADC in the four control regions 1642a1 to 1642a4, high-speed driving nearly four times is possible.
- the light receiving element 12 includes memory areas 1631a1 to 1631a4 corresponding to the four light receiving areas 1601a1 to 1601a4, and as described with reference to FIG. Processing such as output becomes possible. Thereby, since the amount of data to be transmitted can be compressed, there are effects such as reducing the load of data transfer, improving the transfer speed, and reducing power consumption.
- the light receiving element 12 of the camera module 1P by configuring the light receiving element 12 of the camera module 1P to have a three-layer structure in which three semiconductor substrates 1701 to 1703 are stacked, the application of an image obtained from the light receiving element 12 is also expanded.
- the lens 21 of at least one lens-attached substrate 41 among the plurality of laminated lenses-provided substrates 41 can be a shape variable lens 21 ⁇ / b> V capable of deforming the lens shape.
- FIG. 90 is a schematic cross-sectional view of the camera module 1D shown in FIG. 11 in which the lens 21 of the single lens substrate 41 of the laminated lens structure 11 is replaced with the first variable shape lens 21V-1.
- FIG. 90 is a schematic cross-sectional view of the camera module 1D shown in FIG. 11 in which the lens 21 of the single lens substrate 41 of the laminated lens structure 11 is replaced with the first variable shape lens 21V-1.
- 90A shows a configuration example in which the lens 21 of the uppermost lens-attached substrate 41 among the plurality of laminated substrates 41 with lenses is replaced with the first variable shape lens 21V-1.
- 90B shows a configuration example in which the lens 21 of the lowermost lens-attached substrate 41 among the plurality of laminated substrates 41 with lenses is replaced with the first variable shape lens 21V-1.
- the first variable shape lens 21V-1 includes a lens material 1721 using a reversibly changeable material, a cover material 1722 disposed on the upper surface and the lower surface so as to sandwich the lens material 1721, and an upper cover. And a piezoelectric material 1723 disposed in contact with the material 1722.
- the lens material 1721 is, for example, a soft polymer (U.S. Patent Application Publication No. 2011/149409), a flexible polymer (U.S. Patent Application Publication No. 2011/158617), a moving fluid such as silicone oil (Japanese Patent Laid-Open No. 2000-158617). No. 081504), fluids such as silicon oil, elastic rubber, jelly, and water (Japanese Patent Laid-Open No. 2002-243918).
- the cover material 1722 includes, for example, a cover glass made of a flexible material (U.S. Patent Application Publication No. 2011/149409), a bendable transparent cover (U.S. Patent Application Publication No. 2011/158617), silicic acid, and the like.
- An elastic film made of glass Japanese Patent Laid-Open No. 2000-081504
- a soft substrate using a synthetic resin or an organic material Japanese Patent Laid-Open No. 2002-243918
- the first shape variable lens 21V-1 can change the shape of the lens material 1721 by applying a voltage to the piezoelectric material 1723, thereby changing the focal point.
- FIG. 90 shows an example in which a single lens-attached substrate 41 using the first variable shape lens 21V-1 is arranged on the uppermost layer or the lowermost layer of the plurality of lens-provided substrates 41 constituting the laminated lens structure 11. However, it may be arranged in an intermediate layer between the uppermost layer and the lowermost layer. In addition, the number of the lens-equipped substrates 41 using the first variable shape lens 21V-1 may be plural instead of one.
- FIG. 91 is a schematic cross-sectional view of the camera module 1D shown in FIG. 11 in which the lens 21 of the lens-attached substrate 41 of the laminated lens structure 11 is replaced with the second variable shape lens 21V-2.
- FIG. 91 is a schematic cross-sectional view of the camera module 1D shown in FIG. 11 in which the lens 21 of the lens-attached substrate 41 of the laminated lens structure 11 is replaced with the second variable shape lens 21V-2.
- 91A shows a configuration example in which the lens 21 of the uppermost lens-attached substrate 41 among the plurality of laminated substrates 41 with lenses is replaced with the second variable shape lens 21V-2.
- FIG. 91B shows a configuration example in which the lens 21 of the lowermost lens-attached substrate 41 among the plurality of laminated substrates 41 with lenses is replaced with the second variable shape lens 21V-2.
- the second variable shape lens 21V-2 includes a pressure application unit 1731, a base material 1732 having a recess and a light transmission property, and a film 1733 having a light transmission property disposed above the recess portion of the base material 1732. And a fluid 1734 enclosed between the film 1733 and the recess of the base material 1732.
- the film 1733 is made of, for example, polydimethylsiloxane, polymethyl methacrylate, polyterephthalate ethylene, polycarbonate, parylene, epoxy resin, photosensitive polymer, silicon, silicon, silicon oxide, silicon nitride, silicon carbide, polycrystalline silicon, titanium nitride, It is composed of diamond carbon, indium tin oxide, aluminum, copper, nickel, piezoelectric material, and the like.
- the fluid 1734 is composed of, for example, propylene carbonate, water, refractive index liquid, optical oil, ionic liquid, gas such as air, nitrogen, helium, or the like.
- the central part of the film 1733 rises.
- the shape of the fluid 1734 in the raised portion can be deformed, and thereby the focal point can be varied.
- the structure of the second variable shape lens 21V-2 is disclosed in, for example, US Patent Application Publication No. 2012/170920.
- FIG. 91 shows an example in which a single lens-attached substrate 41 using the second shape variable lens 21V-2 is arranged on the uppermost layer or the lowermost layer of the plurality of lens-provided substrates 41 constituting the laminated lens structure 11. However, it may be arranged in an intermediate layer between the uppermost layer and the lowermost layer. In addition, the number of the lens-attached substrates 41 using the second shape variable lens 21V-2 may be plural instead of one.
- FIG. 92 is a schematic cross-sectional view of the camera module 1D shown in FIG. 11 in which the lens 21 of the lens-attached substrate 41 of the laminated lens structure 11 is replaced with the third variable shape lens 21V-3.
- FIG. 92 is a schematic cross-sectional view of the camera module 1D shown in FIG. 11 in which the lens 21 of the lens-attached substrate 41 of the laminated lens structure 11 is replaced with the third variable shape lens 21V-3.
- 92A shows a configuration example in which the lens 21 of the uppermost lens-attached substrate 41 among the plurality of laminated substrates 41 with lenses is replaced with the third variable shape lens 21V-3.
- FIG. 92B shows a configuration example in which the lens 21 of the lowermost lens-attached substrate 41 among the plurality of laminated substrates 41 with lenses is replaced with the third variable shape lens 21V-3.
- the third variable shape lens 21V-3 includes a base material 1741 having a concave portion and having a light transmitting property, an electroactive material 1742 having a light transmitting property disposed above the concave portion of the base material 1741, and an electrode 1743. It consists of and.
- the central portion of the electroactive material 1742 is raised.
- the shape of the central portion of the electroactive material 1742 can be deformed, and thereby the focal point can be varied.
- the structure of the third variable shape lens 21V-3 is disclosed in, for example, Japanese Patent Publication No. 2011-530715.
- FIG. 92 shows an example in which one lens-attached substrate 41 using the third variable shape lens 21V-3 is arranged on the uppermost layer or the lowermost layer of the plurality of lens-attached substrates 41 constituting the laminated lens structure 11. However, it may be arranged in an intermediate layer between the uppermost layer and the lowermost layer. Further, the number of the lens-attached substrates 41 using the third variable shape lens 21V-3 may be a plurality instead of one.
- FIG. 93 is a schematic cross-sectional view of the camera module 1D shown in FIG. 11 in which the lens 21 of the single lens substrate 41 of the laminated lens structure 11 is replaced with the fourth variable shape lens 21V-4.
- FIG. 93 is a schematic cross-sectional view of the camera module 1D shown in FIG. 11 in which the lens 21 of the single lens substrate 41 of the laminated lens structure 11 is replaced with the fourth variable shape lens 21V-4.
- 93A shows a configuration example in which the lens 21 of the uppermost lens-attached substrate 41 among the plurality of laminated substrates 41 with lenses is replaced with a fourth variable shape lens 21V-4.
- FIG. 93B shows a configuration example in which the lens 21 of the lowermost lens-attached substrate 41 among the plurality of laminated substrates 41 with lenses is replaced with the fourth variable shape lens 21V-4.
- the fourth variable shape lens 21V-4 includes a liquid crystal material 1751 and two electrodes 1752 that sandwich the liquid crystal material 1751 vertically.
- variable shape lens 21V-4 when two electrodes 1752 apply a predetermined voltage to the liquid crystal material 1751, the orientation of the liquid crystal material 1751 is changed, whereby the refraction of light transmitted through the liquid crystal material 1751 is refraction.
- the rate changes.
- the focal point can be varied by changing the refractive index of light by controlling the magnitude of the voltage applied to the liquid crystal material 1751.
- the structure of the fourth variable shape lens 21V-4 is disclosed in, for example, US Patent Application Publication No. 2014/0036183.
- FIG. 93 shows an example in which one lens-attached substrate 41 using the fourth variable shape lens 21V-4 is arranged on the uppermost layer or the lowermost layer of the plurality of lens-attached substrates 41 constituting the laminated lens structure 11. However, it may be arranged in an intermediate layer between the uppermost layer and the lowermost layer. In addition, the number of the lens-attached substrates 41 using the fourth shape variable lens 21V-4 may be a plurality instead of one.
- the above-described camera module 1 is an image capturing unit (photoelectric conversion unit) such as an imaging device such as a digital still camera or a video camera, a portable terminal device having an imaging function, a copying machine using a solid-state imaging device as an image reading unit, or the like. It can be used in a form incorporated in an electronic device using a solid-state imaging device.
- an image capturing unit photoelectric conversion unit
- an imaging device such as a digital still camera or a video camera
- a portable terminal device having an imaging function a copying machine using a solid-state imaging device as an image reading unit, or the like. It can be used in a form incorporated in an electronic device using a solid-state imaging device.
- FIG. 94 is a block diagram illustrating a configuration example of an imaging apparatus as an electronic apparatus to which the present technology is applied.
- the 94 includes a camera module 2002 and a DSP (Digital Signal Processor) circuit 2003 which is a camera signal processing circuit.
- the imaging apparatus 2000 also includes a frame memory 2004, a display unit 2005, a recording unit 2006, an operation unit 2007, and a power supply unit 2008.
- the DSP circuit 2003, the frame memory 2004, the display unit 2005, the recording unit 2006, the operation unit 2007, and the power supply unit 2008 are connected to each other via a bus line 2009.
- the image sensor 2001 in the camera module 2002 takes in incident light (image light) from a subject, converts the amount of incident light imaged on the imaging surface into an electric signal for each pixel, and outputs it as a pixel signal.
- the camera module 1 described above is employed as the camera module 2002, and the image sensor 2001 corresponds to the light receiving element 12 described above.
- the display unit 2005 includes a panel type display device such as a liquid crystal panel or an organic EL (Electro Luminescence) panel, and displays a moving image or a still image captured by the image sensor 2001.
- the recording unit 2006 records a moving image or a still image captured by the image sensor 2001 on a recording medium such as a hard disk or a semiconductor memory.
- the operation unit 2007 issues operation commands for various functions of the imaging apparatus 2000 under the operation of the user.
- the power supply unit 2008 appropriately supplies various power sources serving as operation power sources for the DSP circuit 2003, the frame memory 2004, the display unit 2005, the recording unit 2006, and the operation unit 2007 to these supply targets.
- the camera module 1 including the laminated lens structure 11 that is positioned and bonded (laminated) with high accuracy as the camera module 2002 high image quality and miniaturization can be realized. . Therefore, in the imaging device 2000 such as a video camera, a digital still camera, and a camera module for mobile devices such as a mobile phone, both the downsizing of the semiconductor package and the high quality of the captured image can be achieved.
- FIG. 95 is a diagram illustrating a usage example in which the image sensor configured as the camera module 1 is used.
- the image sensor configured as the camera module 1 can be used in various cases for sensing light such as visible light, infrared light, ultraviolet light, and X-ray as follows.
- Devices for taking images for viewing such as digital cameras and mobile devices with camera functions
- Devices used for traffic such as in-vehicle sensors that capture the back, surroundings, and interiors of vehicles, surveillance cameras that monitor traveling vehicles and roads, and ranging sensors that measure distances between vehicles, etc.
- Equipment used for home appliances such as TVs, refrigerators, air conditioners, etc. to take pictures and operate the equipment according to the gestures ⁇ Endoscopes, equipment that performs blood vessel photography by receiving infrared light, etc.
- Equipment used for medical and health care ⁇ Security equipment such as security surveillance cameras and personal authentication cameras ⁇ Skin measuring instrument for photographing skin and scalp photography Such as a microscope to do beauty Equipment used for sports-Equipment used for sports such as action cameras and wearable cameras for sports applications-Used for agriculture such as cameras for monitoring the condition of fields and crops apparatus
- Embodiments of the present technology are not limited to the above-described embodiments, and various modifications can be made without departing from the gist of the present technology.
- the present technology is not limited to application to a solid-state imaging device that senses the distribution of the amount of incident light of visible light and captures it as an image.
- solid-state imaging devices physical quantity distribution detection devices
- fingerprint detection sensors that detect the distribution of other physical quantities, such as pressure and capacitance, and take images as images.
- this technique can also take the following structures.
- a second pixel array comprising: a first optical unit that collects incident light on the first pixel array; and a second optical unit that collects incident light on the second pixel array.
- the camera module according to (1) comprising: one set of the first pixel array and the first optical unit; and two sets of the second pixel array and the second optical unit. .
- the camera module according to (1) comprising two sets of the first pixel array and the first optical unit, and two sets of the second pixel array and the second optical unit. .
- the first pixel array and the second pixel array are formed on the first semiconductor substrate of three semiconductor substrates in which first to third semiconductor substrates are stacked, In the second semiconductor substrate, a memory region for holding a pixel signal generated by the first pixel array and the second pixel array for a predetermined time is formed.
- Each of the first optical unit and the second optical unit includes: Any of the above (1) to (4), which is configured by a laminated lens structure in which a lens-attached substrate in which a lens is disposed inside a through hole formed in the substrate is joined and laminated by direct joining.
- the camera module as described in.
- Each of the first optical unit and the second optical unit includes: At least three lens-attached substrates, ie, first to third lens-attached substrates, each of which is a lens-attached substrate in which a through-hole is formed in the substrate and a lens is formed inside the through-hole,
- the second lens-attached substrate is disposed above the first lens-attached substrate
- the third lens-attached substrate is disposed below the first lens-attached substrate
- the substrate with the second lens and the substrate with the third lens have different substrate thicknesses or thicknesses of the lenses
- the substrates of the first and second lens-attached substrates and the substrates of the first and third lens-attached substrates are configured by a laminated lens structure in which the substrates are joined by direct joining.
- the camera module according to any one of (4) to (4).
- (7) The camera according to (5) or (6), wherein, among the lens-attached substrates on which the laminated lens structure is laminated, the lens of at least one of the lens-attached substrates is configured by a shape variable lens. module.
- (8) A first pixel array in which pixels that receive light of R, G, or B wavelengths are two-dimensionally arranged in a matrix, and a pixel that receives light in the visible light wavelength region are two-dimensionally arranged in a matrix A second pixel array;
- An electronic apparatus comprising: a camera module comprising: a first optical unit that collects incident light on the first pixel array; and a second optical unit that collects incident light on the second pixel array.
- 1 camera module 11 laminated lens structure, 12 light receiving element, 13 optical unit, 21 lens, 21V variable shape lens, 41 (41a to 41g) lens substrate, 43 sensor substrate, 51 aperture plate, 52 aperture, 81 carrier Substrate, 82 lens resin part, 83 through-hole, 121 light shielding film, 122 upper surface layer, 123 lower surface layer, 141 etching mask, 142 protective film, 1501 cover glass, 1502 light shielding film, 1503 opening, 1511, 1512 substrate , 1531 substrate with lens, 1542 metal film, 1551 first region, 1552 second region, 1561 W highly doped substrate, 1631a1 to 1631a3 memory region, 1641a1 Optimum 1641a4 logic region, 1642A1 or 1642a4 control region, 1701 a first semiconductor substrate, 1702 the second semiconductor substrate, 1703 the third semiconductor substrate, 2000 the imaging device, 2001 an image sensor, 2002 a camera module
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Abstract
Description
1.カメラモジュールの第1の実施の形態
2.カメラモジュールの第2の実施の形態
3.カメラモジュールの第3の実施の形態
4.カメラモジュールの第4の実施の形態
5.カメラモジュールの第5の実施の形態
6.第4の実施の形態のカメラモジュールの詳細構成
7.カメラモジュールの第6の実施の形態
8.カメラモジュールの第7の実施の形態
9.レンズ付き基板の詳細構成
10.レンズ付き基板の製造方法
11.レンズ付き基板どうしの直接接合
12.カメラモジュールの第8及び第9の実施の形態
13.カメラモジュールの第10の実施の形態
14.カメラモジュールの第11の実施の形態
15.他の構造と比較した本構造の効果
16.各種の変形例
17.受光素子の画素配列と絞り板の構造と用途説明
18.カメラモジュールの第12の実施の形態
19.カメラモジュールの第13の実施の形態
20.カメラモジュールの第14の実施の形態
21.形状可変レンズを有する積層レンズ構造体の例
22.電子機器への適用例
23.イメージセンサの使用例
図1は、本技術を適用した積層レンズ構造体を用いたカメラモジュールの第1の実施の形態を示す図である。
図9は、本技術を適用した積層レンズ構造体を用いたカメラモジュールの第2の実施の形態を示す図である。
図10は、本技術を適用した積層レンズ構造体を用いたカメラモジュールの第3の実施の形態を示す図である。
図11は、本技術を適用した積層レンズ構造体を用いたカメラモジュールの第4の実施の形態を示す図である。
図12は、本技術を適用した積層レンズ構造体を用いたカメラモジュールの第5の実施の形態を示す図である。
次に、図13を参照して、図11に示した第4の実施の形態に係るカメラモジュール1Dの詳細構成について説明する。
次に、レンズ付き基板41aのレンズ樹脂部82aを例に、レンズ樹脂部82の形状について説明する。
(1) 担体基板81の厚さが、積層レンズ構造体11を構成する少なくとも複数枚のレンズ付き基板41の間で異なる。例えば、担体基板81の厚さが、下層のレンズ付き基板41の方が厚い。
(2) レンズ付き基板41に備わる貫通孔83の開口幅が、積層レンズ構造体11を構成する少なくとも複数枚のレンズ付き基板41の間で異なる。例えば、貫通孔83の開口幅が、下層のレンズ付き基板41の方が大きい。
(3) レンズ付き基板41に備わるレンズ部91の直径が、積層レンズ構造体11を構成する少なくとも複数枚のレンズ付き基板41の間で異なる。例えば、レンズ部91の直径が、下層のレンズ付き基板41のレンズ部91の方が大きい。
(4) レンズ付き基板41に備わるレンズ部91の厚さが、積層レンズ構造体11を構成する少なくとも複数枚のレンズ付き基板41の間で異なる。例えば、レンズ部91の厚さが、下層のレンズ付き基板41のレンズ部91の方が厚い。
(5) レンズ付き基板41に備わるレンズ間の距離が、積層レンズ構造体11を構成する少なくとも複数枚のレンズ付き基板41の間で異なる。
(6) レンズ付き基板41に備わるレンズ樹脂部82の体積が、積層レンズ構造体11を構成する少なくとも複数枚のレンズ付き基板41の間で、異なる。例えば、レンズ樹脂部82の体積が、下層のレンズ付き基板41のレンズ樹脂部82の方が大きい。
(7) レンズ付き基板41に備わるレンズ樹脂部82の材料が、積層レンズ構造体11を構成する少なくとも複数枚のレンズ付き基板41の間で異なる。
図16は、本技術を適用した積層レンズ構造体を用いたカメラモジュールの第6の実施の形態を示す図である。
図17は、本技術を適用した積層レンズ構造体を用いたカメラモジュールの第7の実施の形態を示す図である。
次に、レンズ付き基板41の詳細構成について説明する。
次に、図19乃至図29を参照して、レンズ付き基板41の製造方法を説明する。
担体基板81Wの貫通孔83は、担体基板81Wをウェットエッチングにより、エッチングすることによって形成することができる。具体的には、担体基板81Wをエッチングする前に、担体基板81Wの非開口領域がエッチングされることを防ぐためのエッチングマスクが、担体基板81Wの表面に形成される。エッチングマスクの材料には、例えばシリコン酸化膜あるいはシリコン窒化膜などの絶縁膜が用いられる。エッチングマスクは、エッチングマスク材料の層を担体基板81Wの表面に形成し、この層に貫通孔83の平面形状となるパターンを開口することで、形成される。エッチングマスクが形成された後、担体基板81Wをエッチングすることにより、担体基板81Wに貫通孔83が形成される。
また、貫通孔83形成のエッチングには、上述したウェットエッチングではなく、ドライエッチングを用いることも可能である。
次に、図23を参照して、基板状態のレンズ付き基板41Wの製造方法について説明する。
図19のBに示したように、貫通孔83の平面形状は、例えば四角形などの多角形であっても良い。
(1)レンズ部91の外周に配置した腕部101の長さは、四角形の辺方向と対角線方向とで同じである。
(2)腕部101の外側に配置し、貫通孔83a側壁まで延在する脚部102の長さは、四角形の辺方向の脚部102の長さよりも対角線方向の脚部102の長さの方を、長くしている。
(1)レンズ部91の外周に配置した脚部102の長さを、貫通孔83aの四角形の4つの辺に沿って、一定にしている。
(2)上記(1)の構造を実現するために、腕部101の長さは、四角形の辺方向の腕部の長さよりも対角線方向の腕部の長さの方を、長くしている。
(1)貫通孔83の側壁は、段付き部221を備える段付き形状である。
(2)レンズ樹脂部82の担持部92の脚部102が、貫通孔83の側壁上方に配置されるだけでなく、貫通孔83に備わる段付き部221の上にも、レンズ付き基板41の平面方向に延在している。
(1)レンズ部91の外周に配置した腕部101の長さは、四角形の辺方向と対角線方向とで同じである。
(2)腕部101の外側に配置し、貫通孔83aの側壁まで延在する脚部102の長さは、四角形の辺方向の脚部102の長さよりも、対角線方向の脚部102の長さが長い。
次に、複数のレンズ付き基板41が形成された基板状態のレンズ付き基板41Wどうしの直接接合について説明する。
図34は、本技術を適用した積層レンズ構造体を用いたカメラモジュールの第8の実施の形態を示す図である。
図36は、本技術を適用した積層レンズ構造体を用いたカメラモジュールの第10の実施の形態を示す図である。
図37は、本技術を適用した積層レンズ構造体を用いたカメラモジュールの第11の実施の形態を示す図である。
積層レンズ構造体11は、レンズ付き基板41どうしを直接接合により固着させた構造(以下、本構造という。)である。本構造の作用及び効果について、レンズが形成されたレンズ付き基板のその他の構造と比較して説明する。
図38は、本構造と比較するための第1の基板構造(以下、比較構造例1という。)であって、特開2011-138089号公報(以下、比較文献1という。)において図14(b)として開示されたウエハレベル積層構造の断面図である。
図39は、本構造と比較するための第2の基板構造(以下、比較構造例2という。)であって、特開2009-279790号公報(以下、比較文献2という。)において図5(a)として開示されたレンズアレイ基板の断面図である。
比較構造例2である図39のレンズアレイ基板1041が開示されている比較文献2では、レンズ1053となる樹脂1054の作用として、以下のことが開示されている。
図41は、本構造と比較するための第3の基板構造(以下、比較構造例3という。)であって、特開2010-256563号公報(以下、比較文献3という。)において図1として開示されたレンズアレイ基板の断面図である。
比較構造例3である図41のレンズアレイ基板1081が開示されている比較文献3では、レンズ1093となる樹脂1094の作用として、以下のことが開示されている。
図43は、本構造と比較するための第4の基板構造(以下、比較構造例4という。)であって、上述した比較文献2において図6として開示されたレンズアレイ基板の断面図である。
比較構造例4である図43のレンズアレイ基板1121が開示されている比較文献2では、レンズ1143となる樹脂1144の作用として、以下のことが開示されている。
図45は、本構造と比較するための第5の基板構造(以下、比較構造例5という。)であって、上述した比較文献2において図9として開示されたレンズアレイ基板の断面図である。
比較構造例5である図45のレンズアレイ基板1161が開示されている比較文献2では、レンズ1173となる樹脂1174の作用として、以下のことが開示されている。
比較構造例2乃至5において樹脂がもたらす作用についてまとめると、次のようになる。
(1)当該レンズアレイ基板の上面において当該レンズアレイ基板に作用する力の方向および大きさと、
(2)当該レンズアレイ基板の下面において当該レンズアレイ基板に作用する力の方向および大きさと、
の相対関係の影響を受ける。
そこで、例えば、図48のAに示されるように、レンズアレイ基板1211の上面に配置する光硬化性樹脂1212の層及び面積と、レンズアレイ基板1211の下面に配置する光硬化性樹脂1212の層及び面積とを、同一にするレンズアレイ基板構造が考えられる。このレンズアレイ基板構造を、本構造と比較するための第6の基板構造(以下、比較構造例6という。)と呼ぶ。
ところで、実際には、カメラモジュールに組み込まれる積層レンズ構造体を構成するレンズ付き基板の形状は全て同じではない。より具体的には、積層レンズ構造体を構成する複数のレンズ付き基板どうしは、例えば、レンズ付き基板の厚さや貫通孔の大きさが異なっていたり、貫通孔に形成されるレンズの厚みや形状、体積などが異なる場合がある。さらに言えば、レンズ付き基板の上面及び下面に形成される光硬化性樹脂の膜厚なども、各レンズ付き基板で異なる場合もある。
図51は、第8の基板構造(以下、比較構造例8という。)としての、3枚のレンズ付き基板の積層で構成される積層レンズ構造体の断面図である。この積層レンズ構造体では、図48で示した比較構造例6と同様に、各レンズ付き基板の上面及び下面に配置された光硬化性樹脂の層及び面積が同一に形成されているものとする。
図53は、本構造を採用した3枚のレンズ付き基板1361乃至1363からなる積層レンズ構造体1371を示す図である。
上述した各実施の形態のその他の変形例について、以下説明する。
積層レンズ構造体11の上部には、積層レンズ構造体11のレンズ21の表面を保護するため、カバーガラスを設ける場合がある。この場合、カバーガラスに、光学絞りの機能を持たせるようにすることができる。
次に、上述した絞り板51やカバーガラス1501を用いた絞りに代えて、レンズ付き基板41の貫通孔83の開口自体を絞り機構とする例について説明する。
上述した実施の形態では、貫通孔83にレンズ21が形成されたレンズ付き基板41Wどうしを、プラズマ接合により貼り合わせるようにしたが、金属接合を用いて貼り合わせるようにすることもできる。
図61は、上述したレンズ付き基板41aの変形例であるレンズ付き基板41a’-1と41a’-2の断面図である。
図62を参照して、図61のAに示したレンズ付き基板41a’-1の製造方法について説明する。
次に、図10と図11で示したカメラモジュール1が備える受光素子12の画素配列と絞り板51の構成についてさらに説明する。
図80は、本技術を適用した積層レンズ構造体を用いたカメラモジュールの第12の実施の形態を示す図である。
Y=0.299R+0.587G+0.114B ・ ・ ・式(1)
図84は、本技術を適用した積層レンズ構造体を用いたカメラモジュールの第13の実施の形態を示す図である。
図87は、本技術を適用した積層レンズ構造体を用いたカメラモジュールの第14の実施の形態を示す図である。
積層レンズ構造体11は、積層された複数枚のレンズ付き基板41のうちの少なくとも1つのレンズ付き基板41のレンズ21を、レンズ形状を変形させることができる形状可変レンズ21Vとすることができる。
図90は、図11で示したカメラモジュール1Dにおいて、積層レンズ構造体11の1枚のレンズ付き基板41のレンズ21を、第1の形状可変レンズ21V-1に置き換えたカメラモジュール1Dの概略断面図である。
図91は、図11で示したカメラモジュール1Dにおいて、積層レンズ構造体11の1枚のレンズ付き基板41のレンズ21を、第2の形状可変レンズ21V-2に置き換えたカメラモジュール1Dの概略断面図である。
図92は、図11で示したカメラモジュール1Dにおいて、積層レンズ構造体11の1枚のレンズ付き基板41のレンズ21を、第3の形状可変レンズ21V-3に置き換えたカメラモジュール1Dの概略断面図である。
図93は、図11で示したカメラモジュール1Dにおいて、積層レンズ構造体11の1枚のレンズ付き基板41のレンズ21を、第4の形状可変レンズ21V-4に置き換えたカメラモジュール1Dの概略断面図である。
上述したカメラモジュール1は、デジタルスチルカメラやビデオカメラ等の撮像装置や、撮像機能を有する携帯端末装置や、画像読取部に固体撮像装置を用いる複写機など、画像取込部(光電変換部)に固体撮像装置を用いる電子機器に組み込んだ形で使用することが可能である。
図95は、カメラモジュール1として構成されたイメージセンサを使用する使用例を示す図である。
・自動停止等の安全運転や、運転者の状態の認識等のために、自動車の前方や後方、周囲、車内等を撮影する車載用センサ、走行車両や道路を監視する監視カメラ、車両間等の測距を行う測距センサ等の、交通の用に供される装置
・ユーザのジェスチャを撮影して、そのジェスチャに従った機器操作を行うために、TVや、冷蔵庫、エアーコンディショナ等の家電に供される装置
・内視鏡や、赤外光の受光による血管撮影を行う装置等の、医療やヘルスケアの用に供される装置
・防犯用途の監視カメラや、人物認証用途のカメラ等の、セキュリティの用に供される装置
・肌を撮影する肌測定器や、頭皮を撮影するマイクロスコープ等の、美容の用に供される装置
・スポーツ用途等向けのアクションカメラやウェアラブルカメラ等の、スポーツの用に供される装置
・畑や作物の状態を監視するためのカメラ等の、農業の用に供される装置
(1)
R,G、またはBの波長の光を受光する画素が行列状に2次元配置された第1の画素アレイ、及び、可視光の波長領域の光を受光する画素が行列状に2次元配置された第2の画素アレイと、
入射光を前記第1の画素アレイに集光させる第1の光学ユニット、及び、前記入射光を前記第2の画素アレイに集光させる第2の光学ユニットと
を備えるカメラモジュール。
(2)
前記第1の画素アレイと前記第1の光学ユニットの組を1個と、前記第2の画素アレイと前記第2の光学ユニットの組を2個とを備える
前記(1)に記載のカメラモジュール。
(3)
前記第1の画素アレイと前記第1の光学ユニットの組を2個と、前記第2の画素アレイと前記第2の光学ユニットの組を2個とを備える
前記(1)に記載のカメラモジュール。
(4)
前記第1の画素アレイ及び前記第2の画素アレイは、第1乃至第3の半導体基板が積層された3枚の半導体基板の前記第1の半導体基板に形成されており、
前記第2の半導体基板には、前記第1の画素アレイ及び前記第2の画素アレイで生成された画素信号を所定時間保持するメモリ領域が形成されており、
前記第3の半導体基板には、前記画素信号の読み出し制御とAD変換処理を行う制御領域が形成されている
前記(1)乃至(3)のいずれかに記載のカメラモジュール。
(5)
前記第1の光学ユニットと前記第2の光学ユニットそれぞれは、
基板に形成された貫通孔の内側にレンズが配置されたレンズ付き基板どうしが直接接合により接合されて積層されている積層レンズ構造体で構成されている
前記(1)乃至(4)のいずれかに記載のカメラモジュール。
(6)
前記第1の光学ユニットと前記第2の光学ユニットそれぞれは、
基板に貫通孔が形成され、その貫通孔の内側にレンズが形成されたレンズ付き基板である第1乃至第3のレンズ付き基板の3枚のレンズ付き基板が少なくとも積層され、
前記第1のレンズ付き基板の上方に、前記第2のレンズ付き基板が配置され、
前記第1のレンズ付き基板の下方に、前記第3のレンズ付き基板が配置され、
前記第2のレンズ付き基板と第3のレンズ付き基板とでは、基板の厚さまたは前記レンズの厚さが異なり、
前記第1と第2のレンズ付き基板の基板どうし、および、前記第1と第3のレンズ付き基板の基板どうしが、直接接合により接合されている積層レンズ構造体で構成されている
前記(1)乃至(4)のいずれかに記載のカメラモジュール。
(7)
前記積層レンズ構造体の積層されている前記レンズ付き基板のうち、少なくとも1枚の前記レンズ付き基板の前記レンズは、形状可変レンズで構成されている
前記(5)または(6)に記載のカメラモジュール。
(8)
R,G、またはBの波長の光を受光する画素が行列状に2次元配置された第1の画素アレイ、及び、可視光の波長領域の光を受光する画素が行列状に2次元配置された第2の画素アレイと、
入射光を前記第1の画素アレイに集光させる第1の光学ユニット、及び、前記入射光を前記第2の画素アレイに集光させる第2の光学ユニットと
を備えるカメラモジュール
を備える電子機器。
Claims (8)
- R,G、またはBの波長の光を受光する画素が行列状に2次元配置された第1の画素アレイ、及び、可視光の波長領域の光を受光する画素が行列状に2次元配置された第2の画素アレイと、
入射光を前記第1の画素アレイに集光させる第1の光学ユニット、及び、前記入射光を前記第2の画素アレイに集光させる第2の光学ユニットと
を備えるカメラモジュール。 - 前記第1の画素アレイと前記第1の光学ユニットの組を1個と、前記第2の画素アレイと前記第2の光学ユニットの組を2個とを備える
請求項1に記載のカメラモジュール。 - 前記第1の画素アレイと前記第1の光学ユニットの組を2個と、前記第2の画素アレイと前記第2の光学ユニットの組を2個とを備える
請求項1に記載のカメラモジュール。 - 前記第1の画素アレイ及び前記第2の画素アレイは、第1乃至第3の半導体基板が積層された3枚の半導体基板の前記第1の半導体基板に形成されており、
前記第2の半導体基板には、前記第1の画素アレイ及び前記第2の画素アレイで生成された画素信号を所定時間保持するメモリ領域が形成されており、
前記第3の半導体基板には、前記画素信号の読み出し制御とAD変換処理を行う制御領域が形成されている
請求項1に記載のカメラモジュール。 - 前記第1の光学ユニットと前記第2の光学ユニットそれぞれは、
基板に形成された貫通孔の内側にレンズが配置されたレンズ付き基板どうしが直接接合により接合されて積層されている積層レンズ構造体で構成されている
請求項1に記載のカメラモジュール。 - 前記第1の光学ユニットと前記第2の光学ユニットそれぞれは、
基板に貫通孔が形成され、その貫通孔の内側にレンズが形成されたレンズ付き基板である第1乃至第3のレンズ付き基板の3枚のレンズ付き基板が少なくとも積層され、
前記第1のレンズ付き基板の上方に、前記第2のレンズ付き基板が配置され、
前記第1のレンズ付き基板の下方に、前記第3のレンズ付き基板が配置され、
前記第2のレンズ付き基板と第3のレンズ付き基板とでは、基板の厚さまたは前記レンズの厚さが異なり、
前記第1と第2のレンズ付き基板の基板どうし、および、前記第1と第3のレンズ付き基板の基板どうしが、直接接合により接合されている積層レンズ構造体で構成されている
請求項1に記載のカメラモジュール。 - 前記積層レンズ構造体の積層されている前記レンズ付き基板のうち、少なくとも1枚の前記レンズ付き基板の前記レンズは、形状可変レンズで構成されている
請求項5に記載のカメラモジュール。 - R,G、またはBの波長の光を受光する画素が行列状に2次元配置された第1の画素アレイ、及び、可視光の波長領域の光を受光する画素が行列状に2次元配置された第2の画素アレイと、
入射光を前記第1の画素アレイに集光させる第1の光学ユニット、及び、前記入射光を前記第2の画素アレイに集光させる第2の光学ユニットと
を備えるカメラモジュール
を備える電子機器。
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Also Published As
Publication number | Publication date |
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EP3383019A1 (en) | 2018-10-03 |
TWI781085B (zh) | 2022-10-21 |
CN107431746B (zh) | 2021-12-14 |
KR20180084629A (ko) | 2018-07-25 |
TW201719916A (zh) | 2017-06-01 |
EP3383019A4 (en) | 2019-10-09 |
US10375282B2 (en) | 2019-08-06 |
JPWO2017090437A1 (ja) | 2018-09-13 |
JP6859263B2 (ja) | 2021-04-14 |
CN107431746A (zh) | 2017-12-01 |
US20180270404A1 (en) | 2018-09-20 |
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