WO2017076583A1 - Verfahren zur herstellung einer korrosionsschutzschicht für wärmedämmschichten aus hohlen aluminiumoxidkugeln und äusserster glasschicht und bauteil sowie materialmischung - Google Patents

Verfahren zur herstellung einer korrosionsschutzschicht für wärmedämmschichten aus hohlen aluminiumoxidkugeln und äusserster glasschicht und bauteil sowie materialmischung Download PDF

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Publication number
WO2017076583A1
WO2017076583A1 PCT/EP2016/074278 EP2016074278W WO2017076583A1 WO 2017076583 A1 WO2017076583 A1 WO 2017076583A1 EP 2016074278 W EP2016074278 W EP 2016074278W WO 2017076583 A1 WO2017076583 A1 WO 2017076583A1
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WO
WIPO (PCT)
Prior art keywords
layer
aluminum
corrosion protection
protection layer
component according
Prior art date
Application number
PCT/EP2016/074278
Other languages
German (de)
English (en)
French (fr)
Inventor
Mathias GALETZ
Xabier MONTERO
Werner Stamm
Original Assignee
Siemens Aktiengesellschaft
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens Aktiengesellschaft filed Critical Siemens Aktiengesellschaft
Priority to KR1020187015446A priority Critical patent/KR102161752B1/ko
Priority to EP16784424.0A priority patent/EP3334851A1/de
Priority to CN201680064538.6A priority patent/CN108350560A/zh
Priority to US15/771,103 priority patent/US20180305824A1/en
Publication of WO2017076583A1 publication Critical patent/WO2017076583A1/de

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B15/00—Layered products comprising a layer of metal
    • B32B15/04—Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material
    • B32B15/043—Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material of metal
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B18/00—Layered products essentially comprising ceramics, e.g. refractory products
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C10/00—Solid state diffusion of only metal elements or silicon into metallic material surfaces
    • C23C10/18—Solid state diffusion of only metal elements or silicon into metallic material surfaces using liquids, e.g. salt baths, liquid suspensions
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C10/00—Solid state diffusion of only metal elements or silicon into metallic material surfaces
    • C23C10/18—Solid state diffusion of only metal elements or silicon into metallic material surfaces using liquids, e.g. salt baths, liquid suspensions
    • C23C10/26—Solid state diffusion of only metal elements or silicon into metallic material surfaces using liquids, e.g. salt baths, liquid suspensions more than one element being diffused
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C10/00—Solid state diffusion of only metal elements or silicon into metallic material surfaces
    • C23C10/60—After-treatment
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C24/00—Coating starting from inorganic powder
    • C23C24/08—Coating starting from inorganic powder by application of heat or pressure and heat
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
    • C23C28/34—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
    • C23C28/34—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates
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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
    • C23C28/34—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates
    • C23C28/345—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates with at least one oxide layer
    • C23C28/3455—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates with at least one oxide layer with a refractory ceramic layer, e.g. refractory metal oxide, ZrO2, rare earth oxides or a thermal barrier system comprising at least one refractory oxide layer
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
    • C23C28/34—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates
    • C23C28/347—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates with layers adapted for cutting tools or wear applications
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01D—NON-POSITIVE DISPLACEMENT MACHINES OR ENGINES, e.g. STEAM TURBINES
    • F01D5/00—Blades; Blade-carrying members; Heating, heat-insulating, cooling or antivibration means on the blades or the members
    • F01D5/12—Blades
    • F01D5/28—Selecting particular materials; Particular measures relating thereto; Measures against erosion or corrosion
    • F01D5/288—Protective coatings for blades
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    • F05D2300/20—Oxide or non-oxide ceramics
    • F05D2300/21—Oxide ceramics
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    • Y10T428/12771—Transition metal-base component
    • Y10T428/12806—Refractory [Group IVB, VB, or VIB] metal-base component
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/12—All metal or with adjacent metals
    • Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
    • Y10T428/12771—Transition metal-base component
    • Y10T428/12861—Group VIII or IB metal-base component
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24942—Structurally defined web or sheet [e.g., overall dimension, etc.] including components having same physical characteristic in differing degree
    • Y10T428/2495—Thickness [relative or absolute]

Definitions

  • the invention relates to the protection of a thermal barrier coating against corrosion comprising hollow aluminum oxide spheres and further comprising a glassy outermost protective layer.
  • the object is achieved by a method according to claim 1 with a component according to claim 2.
  • FIGS 1, 2, 3 schematically Schichtsys ⁇ inventive systems with a corrosion protection layer.
  • the inventive step is the application of a layer of aluminum particles, in particular by a slurry.
  • Semi-metal in particular boron, silicon or germanium applied by spraying a slurry.
  • Aluminum particles / Zirkonoxidpelle can one
  • Particle layer can be between 5 and 150 ⁇ . This layer is optimally applied as a slip. But other methods are possible. By a suitable
  • Coating system consisting of base material,
  • Adhesive layer and TBC are formed from the
  • the titanium group oxides increase the mechanical compatibility and the resistance to CMAS attack.
  • a second optional layer has the composition of a low-melting, viscous glass whose
  • Melting point is preferably lower or in the range of the melting point of the diffusing metal in the underlying layer.
  • the glass is especially in
  • Substantially S1O 2 and preferably contains for the
  • melting point relevant accompanying elements such as Magnesium (Mg), calcium (Ca) or boron (B) and / or
  • the glass can also be formed during the heat treatment in an oxygen-containing atmosphere from a silazane, siloxane or silicone polymer as a precursor. These precursors can be used to adjust the shrinkage and
  • oxidation of the aluminum particles can be performed by the additional layer of glass without the pure aluminum particles running along the surface of the system clogging component holes during aging.
  • the "hiking" of the aluminum particles can be performed by the additional layer of glass without the pure aluminum particles running along the surface of the system clogging component holes during aging.
  • Aluminum / Titanium group metal particles (which belong to a
  • Blockage of the cooling air bores can lead to
  • the SiO 2 layer will then largely delaminate during operation due to brittleness and the actual protective layer may take over the protective effect.
  • the inventive step is the composition and application of the aluminum / titanium group metal particles in
  • Clog cooling air holes during removal The use of polymer masking may alternatively be performed. Boron enhances the chemical bonding of the additional layer.
  • FIG. 1 shows a layer system 1 according to the invention which has a substrate 4.
  • the substrate 4 is in particular metallic, wherein it has in particular ⁇ a special nickel or cobalt-based superalloy.
  • an optional metallic adhesion promoter ⁇ mid layer 7 is present on the substrate 4 .
  • this is one
  • Coating layer in particular based on NiCoCrAlY.
  • an oxide layer (TGO) is formed during the further coating or by deliberate oxidation or at least during operation, which is not shown here in detail.
  • a ceramic thermal barrier coating 10 is present on this thermally grown oxide layer (TGO) or on the metallic adhesion promoter layer 7, a ceramic thermal barrier coating 10 is present.
  • This may be single-layered, in particular of zirconium oxide or double-layered with zirconium oxide and a pyrochlore or "DVC" layers.
  • Alumina particularly of alumina hollow spheres 14 ( Figure 1), but optionally as the outermost one
  • a layer of aluminum particles, in particular with grain sizes of lym to 50ym applied, in particular by a slip, vapor deposition, sputtering, etc . This layer may have a layer thickness between some
  • Additions to aluminum (Al) are preferred: in particular at least one element Z selected from the group I boron (B), gallium (Ga) and / or germanium (Ge) and / or
  • Corrosion layer (13 13 ⁇ ⁇ , 13 ⁇ ⁇ ⁇ ) applied and / or oxidized as a material mixture or is oxidized.
  • silicon (Si) and / or magnesium (Mg) can be applied and / or be present in the material mixture.
  • Ge / Ga means: germanium and / or gallium, ie Ge, Ga or Ge + Ga.
  • This layer should prevent the penetration of the CMAS (CMAF) layer and react with the CMAS (CMAF).
  • CMAF CMAS
  • the alumina thus applied has a lower coefficient of expansion, and in conjunction with the nickel (Ni) originating from the compressor abradable, part of the alumina breaks off. The remaining layer then protects against the penetration of liquid deposits.
  • the inventive step is also in the application of the different particle sizes of the alumina
  • the glass can in particular represent silicon oxide, in particular S1O 2 .
  • zirconium (Zr) reduces the viscosity of the CMAS and prevents or
  • At least one element from the group boron (B), gallium (Ga) and / or germanium (Ge) and optionally silicon (Si) is additionally present.
  • alumina / zirconia or over the metallic aluminum / zirconium or over aluminum and an element Z may be a glass layer as explained above
  • the heat treatment for the formation of alumina or alumina / zirconia or alumina and oxide of the element Z may be effected by a first use of the component or by an upstream heat treatment prior to the first use or after being placed in a machine for a

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Ceramic Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Laminated Bodies (AREA)
  • Other Surface Treatments For Metallic Materials (AREA)
PCT/EP2016/074278 2015-11-05 2016-10-11 Verfahren zur herstellung einer korrosionsschutzschicht für wärmedämmschichten aus hohlen aluminiumoxidkugeln und äusserster glasschicht und bauteil sowie materialmischung WO2017076583A1 (de)

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KR1020187015446A KR102161752B1 (ko) 2015-11-05 2016-10-11 중공 알루미늄 산화물 구체들 및 최외부 유리층으로 구성된 단열층을 위한 부식 방지층을 제조하는 방법 및 구성요소와 재료 혼합물
EP16784424.0A EP3334851A1 (de) 2015-11-05 2016-10-11 Verfahren zur herstellung einer korrosionsschutzschicht für wärmedämmschichten aus hohlen aluminiumoxidkugeln und äusserster glasschicht und bauteil sowie materialmischung
CN201680064538.6A CN108350560A (zh) 2015-11-05 2016-10-11 制造用于由空心的氧化铝球和最外部的玻璃层构成的隔热层的防腐蚀保护层的方法和构件以及材料混合物
US15/771,103 US20180305824A1 (en) 2015-11-05 2016-10-11 Method for producing a corrosion protection layer for thermal insulation layers made of hollow aluminum oxide balls and glass layer and component as well as material mixture

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DE102015221751.5A DE102015221751A1 (de) 2015-11-05 2015-11-05 Verfahren zur Herstellung einer Korrosionsschutzschicht für Wärmedämmschichten aus hohlen Aluminiumoxidkugeln und äußerster Glasschicht und Bauteil sowie Materialmischung

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CN113511802B (zh) * 2021-04-20 2022-12-20 成都光明光电股份有限公司 玻璃制品生产用软化垫片及其制作方法

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US20180305824A1 (en) 2018-10-25
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KR20180077254A (ko) 2018-07-06
KR102161752B1 (ko) 2020-10-05

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