WO2017056392A1 - 研磨パッドのコンディショニング方法及び研磨装置 - Google Patents
研磨パッドのコンディショニング方法及び研磨装置 Download PDFInfo
- Publication number
- WO2017056392A1 WO2017056392A1 PCT/JP2016/003963 JP2016003963W WO2017056392A1 WO 2017056392 A1 WO2017056392 A1 WO 2017056392A1 JP 2016003963 W JP2016003963 W JP 2016003963W WO 2017056392 A1 WO2017056392 A1 WO 2017056392A1
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- WIPO (PCT)
- Prior art keywords
- surface plate
- conditioning
- head
- polishing
- distance
- Prior art date
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- 238000005498 polishing Methods 0.000 title claims abstract description 224
- 230000003750 conditioning effect Effects 0.000 title claims abstract description 202
- 238000000034 method Methods 0.000 title claims abstract description 24
- 230000007246 mechanism Effects 0.000 claims description 10
- 235000012431 wafers Nutrition 0.000 abstract description 35
- 230000004886 head movement Effects 0.000 abstract 1
- 230000001143 conditioned effect Effects 0.000 description 18
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 8
- 229910052710 silicon Inorganic materials 0.000 description 8
- 239000010703 silicon Substances 0.000 description 8
- 230000006866 deterioration Effects 0.000 description 6
- 239000006061 abrasive grain Substances 0.000 description 5
- 238000004140 cleaning Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 5
- 230000000052 comparative effect Effects 0.000 description 4
- 230000014509 gene expression Effects 0.000 description 4
- 238000003825 pressing Methods 0.000 description 4
- 239000002344 surface layer Substances 0.000 description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
- 230000008859 change Effects 0.000 description 3
- 239000002002 slurry Substances 0.000 description 3
- JOYRKODLDBILNP-UHFFFAOYSA-N Ethyl urethane Chemical compound CCOC(N)=O JOYRKODLDBILNP-UHFFFAOYSA-N 0.000 description 2
- 239000003795 chemical substances by application Substances 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 2
- 229910003460 diamond Inorganic materials 0.000 description 2
- 239000010432 diamond Substances 0.000 description 2
- 239000004745 nonwoven fabric Substances 0.000 description 2
- 238000005507 spraying Methods 0.000 description 2
- 230000004075 alteration Effects 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000007517 polishing process Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 238000007790 scraping Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/005—Control means for lapping machines or devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
- B24B37/07—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool
- B24B37/08—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for double side lapping
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
- B24B37/07—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool
- B24B37/10—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for single side lapping
- B24B37/105—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for single side lapping the workpieces or work carriers being actively moved by a drive, e.g. in a combined rotary and translatory movement
- B24B37/107—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for single side lapping the workpieces or work carriers being actively moved by a drive, e.g. in a combined rotary and translatory movement in a rotary movement only, about an axis being stationary during lapping
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B53/00—Devices or means for dressing or conditioning abrasive surfaces
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B53/00—Devices or means for dressing or conditioning abrasive surfaces
- B24B53/017—Devices or means for dressing, cleaning or otherwise conditioning lapping tools
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B53/00—Devices or means for dressing or conditioning abrasive surfaces
- B24B53/12—Dressing tools; Holders therefor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67092—Apparatus for mechanical treatment
Definitions
- the present invention relates to a polishing pad conditioning method and a polishing apparatus.
- a polishing apparatus such as a single-side polishing apparatus or a double-side polishing apparatus has been used.
- a polishing pad made of foamed urethane or non-woven fabric is attached to a disk-shaped surface plate that is driven to rotate, and a polishing slurry for increasing the polishing efficiency flows. Then, polishing is performed by pressing the wafer held by the polishing head against the polishing pad.
- the wafer can be attached to the polishing head with wax, vacuum or liquid surface tension.
- a disk-shaped planetary gear called a carrier is arranged between disk-shaped upper and lower surface plates to which a polishing pad made of foamed urethane or nonwoven fabric is attached.
- the work is penetrated and held in the holding hole of the planetary gear, and the sun gear and the internal gear meshing with the planetary gear are mutually rotated, thereby causing the planetary gear to rotate and revolve.
- the double-side polishing apparatus simultaneously polishes the upper and lower surfaces of the wafer by this rotation, revolution, and rotation of the upper and lower surface plates and sliding with the wafer.
- polishing slurry is supplied from a plurality of holes provided in the upper surface plate in order to perform polishing efficiently.
- clogging occurs in a polishing pad used in such a polishing apparatus.
- the clogging means that a residue of a polished wafer, a solid contained in a polishing slurry, or a mixture thereof is deposited on the surface layer of the polishing pad or accumulated inside the polishing pad.
- the clogging deteriorates the polishing efficiency and deteriorates the flatness and surface quality of the polished workpiece.
- the polishing pad is subjected to various conditioning depending on the purpose against the above-described alteration of the polishing pad.
- Conditioning includes, for example, a method of removing clogging by spraying high-pressure water from the cleaning nozzle head onto the polishing pad surface.
- polishing including clogging is caused by friction between the abrasive grains obtained by rotating a surface plate by pressing a dress head in which abrasive grains made of diamond are scattered and pressed against the surface of the polishing pad.
- a method of scraping off the surface layer of the pad is mentioned.
- the cleaning nozzle head and the dress head When the polishing pad is conditioned, the cleaning nozzle head and the dress head often have a clearly smaller area than the surface (polishing surface) used for polishing the polishing pad. Therefore, in order to clean and dress the entire polishing surface of the polishing pad, these conditioning heads are attached to the arm, and the arm moves linearly or pivotally, so that from the outermost periphery to the innermost periphery of the surface plate The head can be moved (see, for example, Patent Document 1). Furthermore, as described in Patent Document 1, by rotating the surface plate simultaneously with the movement of the head, the head can clean or dress the entire polishing surface of the polishing pad.
- the polishing apparatus is also enlarged, and the area of the polishing pad tends to increase.
- the polishing pad was not uniform and in good condition.
- the present invention has been made in view of the above-described problems, and an object thereof is to provide a polishing pad conditioning method and polishing apparatus capable of appropriately conditioning the entire polishing surface of the polishing pad.
- the present invention provides a method for conditioning a polishing pad for polishing a wafer attached to a rotatable disk-shaped surface plate using a conditioning head, the surface plate
- the conditioning pad is rotated while moving the conditioning head in the radial direction of the surface plate while rotating the polishing pad attached to the surface plate, and the number of rotations of the surface plate and the conditioning are adjusted.
- a polishing pad conditioning method is provided, wherein a moving speed of the head in the radial direction of the surface plate is controlled in accordance with a distance of the conditioning head from a center of the surface plate.
- the entire polishing surface of the polishing pad can be appropriately adjusted. Can be conditioned.
- the rotational speed of the surface plate satisfies the following equation (1)
- the movement operation of the conditioning head in the radial direction of the surface plate satisfies the following equations (2) and (3): It is preferable to control the rotational speed of the surface plate and the moving speed of the conditioning head in the radial direction of the surface plate.
- Tr 0 surface plate rotation speed (rpm) when the distance from the center of the surface plate of the conditioning head is r
- Tr 0 surface plate rotation speed (rpm) at the start of conditioning
- r 0 distance (m) from the center of the surface plate of the conditioning head at the start of conditioning
- r distance (m) from the center of the surface plate of the conditioning head
- V (r) the distance from the center of the conditioning head
- V 0 In the radial direction of the surface plate of the conditioning head at the start of conditioning Moving speed (m / sec)
- D radial size (m) of the surface plate of the conditioning head
- Q the surface plate Distance said conditioning
- the present invention is a polishing apparatus including a conditioning head for conditioning a polishing pad for polishing a wafer attached to a rotatable disk-shaped surface plate.
- the conditioning is carried out while moving the conditioning head in the radial direction of the surface plate while rotating the polishing pad attached to the surface plate by rotating the surface plate, It comprises a control mechanism for controlling the rotational speed of the surface plate and the moving speed of the conditioning head in the radial direction of the surface plate in accordance with the distance of the conditioning head from the center of the surface plate.
- a polishing apparatus is provided.
- the polishing apparatus can control the rotational speed of the surface plate and the moving speed of the surface of the conditioning head in the radial direction according to the distance from the center of the surface plate of the conditioning head, the polishing of the polishing pad is performed. Conditions that allow the entire surface to be properly conditioned can be set.
- the rotational speed of the surface plate satisfies the following equation (1), and the control head moves the conditioning head in the radial direction of the surface plate according to the following equations (2) and (3). It is preferable that the rotational speed of the surface plate and the moving speed of the conditioning head in the radial direction of the surface plate are controlled so as to satisfy.
- Tr 0 surface plate rotation speed (rpm) when the distance from the center of the surface plate of the conditioning head is r
- Tr 0 surface plate rotation speed (rpm) at the start of conditioning
- r 0 distance (m) from the center of the surface plate of the conditioning head at the start of conditioning
- r distance (m) from the center of the surface plate of the conditioning head
- V (r) the distance from the center of the conditioning head
- V 0 In the radial direction of the surface plate of the conditioning head at the start of conditioning Moving speed (m / sec)
- D radial size (m) of the surface plate of the conditioning head
- Q the surface plate Distance said conditioning
- conditioning can be performed under conditions that simultaneously satisfy the equations (1), (2), and (3), the entire polishing surface of the polishing pad can be uniformly conditioned.
- polishing pad conditioning method and polishing apparatus of the present invention it is possible to set conditions that allow the entire polishing surface of the polishing pad to be properly conditioned, and to suppress deterioration of the flatness of the wafer after polishing. it can.
- the present inventors have intensively studied to solve such problems. As a result, it was found that the effect of conditioning changes according to the distance from the center of the surface plate of the conditioning head. Then, according to this distance, the rotation speed of the surface plate and the moving speed of the conditioning head in the radial direction of the surface plate are controlled to adjust the effect of conditioning in each part of the polishing pad so that the entire polishing surface is in a uniform state. Thus, the present inventors have completed the present invention by conceiving that conditions for enabling conditioning can be set and deterioration of the flatness of the wafer after polishing can be suppressed.
- the polishing apparatus of the present invention may be a single-side polishing apparatus that polishes one side of a wafer, or a double-side polishing apparatus that simultaneously polishes both sides of a wafer.
- a single-side polishing apparatus 1 includes a rotatable disk-shaped surface plate 2, a polishing pad 3 attached to the surface plate 2, a polishing head 4 for holding a wafer W, a polishing A polishing agent supply mechanism 5 for supplying a polishing agent to the pad 3 and a conditioning head 6 for conditioning the polishing pad 3 are provided.
- the surface of the wafer W is polished by pressing the wafer W held by the polishing head 4 against the polishing pad 3 rotated by the surface plate 2.
- the abrasive is supplied from the abrasive supply mechanism 5 to the surface of the polishing pad 3.
- the conditioning of the polishing pad 3 is performed at the time of starting up a polishing pad that is not used for polishing in a state where it can be used for polishing, and between polishing batches from the end of polishing to the start of the next polishing.
- a cleaning nozzle head that removes clogging by spraying high-pressure water onto the surface of the polishing pad 3 can be used.
- a dress head in which abrasive grains made of diamond are scattered can be used.
- the dressing head is a dressing that scrapes off the surface layer of the polishing pad including clogging by pressing abrasive grains against the surface of the polishing pad 3 while rotating the surface plate 2 and generating friction between the abrasive grains and the polishing pad 3. Do.
- the polishing apparatus of the present invention moves the conditioning head 6 in the radial direction of the platen 2 while rotating the polishing pad 3 attached to the platen 2 by rotating the platen 2 during this conditioning. While conditioning.
- the conditioning head 6 is moved in the radial direction of the surface plate 2 by the arm 7.
- the single-side polishing apparatus 1 controls the rotational speed of the surface plate 2 and the moving speed of the conditioning head 6 in the radial direction of the surface plate 2 according to the distance from the center of the surface plate 2 of the conditioning head 6. 8 is provided.
- the effect of conditioning in each part of the polishing pad varies depending on the distance from the center of the surface plate 2 of the conditioning head 6. Therefore, as in the present invention, the number of rotations of the surface plate 2 and the moving speed of the surface plate 2 in the radial direction of the surface plate 2 are controlled according to the distance from the center of the surface plate 2 of the conditioning head 6.
- the control mechanism 8 controls the rotation speed of the surface plate 2 and the moving speed of the conditioning head 6 in the radial direction of the surface plate 2 during the conditioning.
- the polishing surface of the polishing pad 3 can be conditioned, and deterioration of the flatness of the polished wafer can be suppressed.
- control mechanism 8 is such that the rotational speed of the surface plate 2 satisfies the following equation (1), and the moving operation of the conditioning head 6 in the radial direction of the surface plate 2 is represented by the following equations (2) and (3 It is preferable to control the rotational speed of the surface plate 2 and the moving speed of the conditioning head 6 in the radial direction of the surface plate 2 so as to satisfy the above.
- Tr 0 surface plate rotation speed (rpm) when the distance from the center of the surface plate 2 of the conditioning head 6 is r
- Tr 0 surface plate rotation speed (rpm) at the start of conditioning
- r 0 distance (m) from the center of the surface plate 2 of the conditioning head 6 at the start of conditioning
- r distance (m) from the center of the surface plate 2 of the conditioning head 6
- V (r) constant of the conditioning head 6
- V 0 In the radial direction of the surface plate 2 of the conditioning head 6 at the start of conditioning Moving speed (m / sec)
- D Radial size (m) of the surface plate of the conditioning head 6
- Q Conditioning
- the polishing pad 3 can be reliably conditioned under uniform conditions.
- the present inventors considered that it is important to find conditions that can be conditioned under the same conditions at any position on the polishing surface of the polishing pad. This is because the quality of the polishing surface is not uniform over the entire surface of the polishing pad, but it is only necessary to increase the strength of conditioning in a region where the quality is greatly altered based on the condition that the entire surface can be uniformly conditioned.
- the dressing head as the conditioning head 6 performs dressing of the polishing pad 3 while moving in the radial direction of the surface plate 2.
- the amount by which the dress head scrapes the surface layer of the polishing pad, the so-called removal allowance is generally (removal allowance) ⁇ (pressure) ⁇ (contact speed) ⁇ (time) (4) It can be expressed as Regarding the pressure, since it is easy to obtain a constant load even with a general apparatus, the contact speed of the surface plate with the polishing pad 3 of the dress head is constant, and any place on the polishing pad.
- dressing can be performed under more uniform conditions at any location of the polishing pad 3, and the polishing pad 3 can be more evenly conditioned. be able to.
- the rotational speed of the surface plate may be controlled so as to satisfy the above formula (1). The reason will be described below.
- FIG. 3 is a graph showing the relationship between the surface plate rotation speed and the distance from the center of the surface plate of the dress head when the rotation speed of the surface plate is controlled so as to satisfy Expression (1). Note that the “surface plate rotation speed (relative value)” on the vertical axis of the graph shown in FIG. Relative value. If the surface plate rotation speed is controlled as shown in FIG. 3, the contact speed between the polishing pad and the dress head within the same time will not change according to the position of the dress head.
- the moving speed of the dress head in the radial direction of the surface plate so as to satisfy the above formulas (2) and (3). Should be controlled. The reason will be described below.
- the rotation speed of the surface plate only satisfies the above formula (1), it is not sufficient to make the contact time with the dress head constant at any place on the polishing pad.
- the dress head moves at a constant linear velocity from the inside to the outside of the surface plate on the radius of the surface plate.
- Expression (1) the rotational speed of the surface plate changes according to the position of the dress head.
- the dress head 9 when the dress head 9 is located at a distance r from the center of the surface plate, the dress head 9 needs to act on the polishing pad 3 on the entire circumference of a concentric circle having a radius r. It is necessary to perform dressing on the entire circumference of the radius r. As shown in FIG.
- FIG. 5 is a graph showing the relationship between the moving speed of the dressing head in the radial direction and the distance from the center of the dressing head when the above equation (2) is satisfied. Note that the “head moving speed (relative value)” on the vertical axis of the graph shown in FIG. 5 is the dress head surface plate at each position relative to the moving speed of the dress head in the radial direction at the start of dressing. Is the relative value of the moving speed in the radial direction.
- equation (3) will be described with reference to FIG.
- a case is shown in which a cylindrical dress head having a diameter D moves from right to left on the radius of the surface plate.
- the two dress heads shown here indicate the position of the dress head when the surface plate starts the N-th turn and the position of the dress head when the N + 1-th turn starts. That is, the distance between the two dress heads indicates the distance Q that the dress head moves in the radial direction of the surface plate while the surface plate makes one round.
- FIG. 6 shows an aspect in which the dress heads overlap (overlap) in the Nth and N + 1th cycles.
- r 0 is the radius of the inner periphery of the surface plate
- D is the size of the dress head Therefore, for example, it is input as a constant in the program of the control mechanism 8, and V 0 , Tr 0 and Q can be input arbitrary values on the program, and are optimized values. May be used.
- the rotational speed of the surface plate and the moving speed of the surface plate of the conditioning head in the radial direction may be controlled by software included in the control mechanism 8.
- more uniform conditioning can be performed if the pressure of the dress head against the polishing pad 3 is constant.
- the pressure of the dress head against the polishing pad 3 can be easily made constant as long as the dress head can control the pressure applied to the pad to be constant. Further, when a cleaning nozzle head is provided as a conditioning head, it is sufficient that the water ejection pressure is constant.
- the amount of conditioning at that position may be arbitrarily set.
- the deterioration of the polishing pad does not occur uniformly over the entire surface of the polishing pad, but has a distribution and a peak due to the locus of the wafer on the polishing surface plate. Therefore, if the amount of conditioning at an arbitrary position can be adjusted in addition to the condition that the conditioning effect is constant over the entire surface, the polishing pad can be kept in a more uniform state.
- conditioning in order to perform conditioning intensively at an arbitrary position of the polishing pad, (a) a method of increasing the rotation speed of the surface plate at that position to increase the efficiency of conditioning, and (b) the moving speed of the conditioning head at that position. And a method for increasing the conditioning time for lowering, and (c) a method for increasing the dressing pressure and water pressure at that position to increase the efficiency of conditioning.
- conditioning can be intensively performed at a position where the deterioration of the polishing pad is particularly remarkable.
- the conditioning head is moved in the radial direction according to the distance from the center of the surface of the conditioning head as shown in FIG. Control the speed.
- P shown in FIG. 7 indicates the distance from the center of the surface of the conditioning head at an arbitrary position of the polishing pad, and 1 / n indicates the condition of the conditioning head obtained under the condition that the entire surface of the polishing pad can be uniformly conditioned.
- the speed ratio with respect to the moving speed in the radial direction of the surface plate that is, the speed ratio with respect to the moving speed in the radial direction of the surface plate of the conditioning head obtained under the conditions satisfying the above equations (1) and (2) simultaneously is shown.
- 1 / n ⁇ 1 is a condition under which denser conditioning can be performed with P
- 1 / n> 1 is a condition under which more sparse conditioning can be performed.
- r 0 in FIG. 7 represents the distance from the center of the surface plate of the conditioning head at the start of conditioning
- r E represents the distance from the center of the surface plate of the conditioning head at the end of conditioning. In this way, if n can be set when the conditioning head reaches P, the conditioning density can be set at any point according to the distance of the conditioning head from the center of the surface plate.
- the polishing apparatus of the present invention may be a double-side polishing apparatus.
- a double-side polishing apparatus 80 as shown in FIG. 8, a disk-shaped planetary gear called a carrier 84 is disposed between disk-shaped upper and lower surface plates 82 and 83 to which a polishing pad 81 is attached.
- the wafer W is held through the holding hole of the carrier 84, and a sun gear (not shown) and an internal gear (not shown) meshing with the carrier 84 are rotated to generate rotation and revolution of the planetary gear.
- the double-side polishing apparatus 80 simultaneously polishes the upper and lower surfaces of the wafer by sliding between the wafer W and the polishing pad 81 generated by the rotation, revolution, and rotation of the upper and lower surface plates.
- the double-side polishing apparatus 80 can condition the polishing pad 81 attached to the upper surface plate 82 and the polishing pad 81 attached to the lower surface plate 83 by the conditioning head 85.
- the conditioning head 85 can be moved in the radial direction of the surface plate by the arm 86.
- a specific conditioning method is the same as that of the single-side polishing apparatus 1 described above. That is, the control mechanism 87 controls the rotation speed of the upper and lower surface plates 82 and 83 and the moving speed of the conditioning head 85 in the radial direction according to the distance from the center of the surface plates 82 and 83 of the conditioning head 85. Can be controlled.
- the present invention is a method of conditioning a polishing pad for polishing a wafer attached to a rotatable disk-shaped surface plate using a conditioning head. More specifically, it is a method of conditioning the polishing pad attached to the surface plate of the above-described single-side polishing apparatus or the upper and lower surface plates of the double-side polishing apparatus.
- the conditioning is carried out while moving the conditioning head in the radial direction of the surface plate while rotating the polishing pad attached to the surface plate by rotating the surface plate.
- the rotational speed of the surface plate and the moving speed of the conditioning head in the radial direction of the surface plate are controlled according to the distance of the conditioning head from the center of the surface plate. In this way, the polishing surface of the polishing pad can be conditioned under optimum conditions.
- conditioning can be performed at the time of starting up a polishing pad that is not used for polishing so that it can be used for polishing, and between polishing batches from the end of polishing to the start of the next polishing.
- a cleaning nozzle head or a dress head can be used as described above.
- the rotational speed of the surface plate satisfies the above formula (1)
- the moving operation of the conditioning head in the radial direction of the surface plate is the above formula (2), (3). It is preferable to control the rotational speed of the surface plate and the moving speed of the conditioning head in the radial direction of the surface plate so as to satisfy the above condition. If the control conditions satisfy the above equations (1), (2), and (3) at the same time, the polishing pad can be uniformly conditioned more reliably.
- the silicon wafer was double-side polished while conditioning the polishing pads of the upper and lower surface plates of the double-side polishing apparatus between the polishing batches.
- the double-side polishing apparatus of the present invention as shown in FIG. 8 was used as the double-side polishing apparatus.
- a silicon wafer having a diameter of 300 mm was polished.
- a dress head was used as a conditioning head. That is, dressing was performed as conditioning.
- GBIR Global Backsurface-referred Ideal Plane / Range
- the polishing pad was dressed while moving the dress head from the center side of the surface plate toward the outside.
- the rotational speed of the surface plate and the moving speed of the dress head in the radial direction were controlled as follows. First, the rotational speed of the surface plate was made inversely proportional to the distance from the center of the surface plate of the conditioning head so as to satisfy the above formula (1). The transition of the rotation speed of the surface plate at this time is as shown by the curve in FIG.
- the moving speed of the dressing head surface plate in the radial direction is set to satisfy the conditions (2) and (3) on the innermost periphery and outermost periphery of the surface plate. Then, as the dress head approaches the position Pr, the speed is decreased linearly, and in the vicinity of the position Pr where the change in the polishing pad due to polishing is maximized, the condition that the 1 / n is 1/2, that is, the position Pr
- the dressing was controlled to be twice dense.
- FIG. 9 shows the moving speed in the radial direction of the surface plate of the dress head controlled in accordance with the distance from the center of the surface plate of the dress head.
- the GBIR of the example was improved by 8% compared to the comparative example.
- the present invention is not limited to the above embodiment.
- the above-described embodiment is an exemplification, and the present invention has any configuration that has substantially the same configuration as the technical idea described in the claims of the present invention and that exhibits the same effects. Are included in the technical scope.
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- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Grinding-Machine Dressing And Accessory Apparatuses (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
Abstract
Description
T(r)=Tr0×(r0/r) ・・・(1)
V(r)=(r0/r)V0 ・・・(2)
D÷Q=n ・・・(3)
(ここで、T(r):前記コンディショニングヘッドの前記定盤の中心からの距離がrの時の定盤回転数(rpm)、Tr0:コンディショニング開始時の定盤回転数(rpm)、r0:コンディショニング開始時の前記コンディショニングヘッドの前記定盤の中心からの距離(m)、r:前記コンディショニングヘッドの前記定盤の中心からの距離(m)、V(r):前記コンディショニングヘッドの前記定盤の中心からの距離がrの時の前記コンディショニングヘッドの前記定盤の半径方向への移動速度(m/sec)、V0:コンディショニング開始時の前記コンディショニングヘッドの前記定盤の半径方向への移動速度(m/sec)、D:前記コンディショニングヘッドの前記定盤の半径方向のサイズ(m)、Q:前記定盤が1回転する時の前記コンディショニングヘッドが前記定盤の半径上を移動する距離(m)、n:正の整数である。)
T(r)=Tr0×(r0/r) ・・・(1)
V(r)=(r0/r)V0 ・・・(2)
D÷Q=n ・・・(3)
(ここで、T(r):前記コンディショニングヘッドの前記定盤の中心からの距離がrの時の定盤回転数(rpm)、Tr0:コンディショニング開始時の定盤回転数(rpm)、r0:コンディショニング開始時の前記コンディショニングヘッドの前記定盤の中心からの距離(m)、r:前記コンディショニングヘッドの前記定盤の中心からの距離(m)、V(r):前記コンディショニングヘッドの前記定盤の中心からの距離がrの時の前記コンディショニングヘッドの前記定盤の半径方向への移動速度(m/sec)、V0:コンディショニング開始時の前記コンディショニングヘッドの前記定盤の半径方向への移動速度(m/sec)、D:前記コンディショニングヘッドの前記定盤の半径方向のサイズ(m)、Q:前記定盤が1回転する時の前記コンディショニングヘッドが前記定盤の半径上を移動する距離(m)、n:正の整数である。)
T(r)=Tr0×(r0/r) ・・・(1)
V(r)=(r0/r)V0 ・・・(2)
D÷Q=n ・・・(3)
(ここで、T(r):コンディショニングヘッド6の定盤2の中心からの距離がrの時の定盤回転数(rpm)、Tr0:コンディショニング開始時の定盤回転数(rpm)、r0:コンディショニング開始時のコンディショニングヘッド6の定盤2の中心からの距離(m)、r:コンディショニングヘッド6の定盤2の中心からの距離(m)、V(r):コンディショニングヘッド6の定盤2の中心からの距離がrの時のコンディショニングヘッド6の定盤2の半径方向への移動速度(m/sec)、V0:コンディショニング開始時のコンディショニングヘッド6の定盤2の半径方向への移動速度(m/sec)、D:コンディショニングヘッド6の定盤の半径方向のサイズ(m)、Q:定盤が1回転する時のコンディショニングヘッド6が定盤の半径上を移動する距離(m)、n:正の整数である。)
(取り代)∝(圧力)×(接触速度)×(時間) ・・・(4)
と表現することができる。圧力に関しては、一般的な装置でも一定の荷重を得ることは容易であるので、これにドレスヘッドの研磨パッド3との定盤の接触速度が一定であること、研磨パッド上のいかなる場所においてもドレスヘッドとの接触時間が一定であること、の2つの要件を付加した場合に、研磨パッド3のいかなる場所でも、より均一な条件でドレッシングでき、より確実に研磨パッド3の均一なコンディショニングを行うことができる。
本発明のコンディショニング方法に従って、シリコンウェーハの両面研磨工程において、研磨バッチ間に両面研磨装置の上下定盤の研磨パッドのコンディショニングを行いながら、シリコンウェーハを両面研磨した。このとき、両面研磨装置として、図8に示したような本発明の両面研磨装置を使用した。また、直径300mmのシリコンウェーハを研磨した。コンディショニングヘッドとして、ドレスヘッドを用いた。すなわち、コンディショニングとしてドレッシングを行った。このようにして、両面研磨工程を連続操業した後、両面研磨されたシリコンウェーハのGBIR(Global Backsurface-referenced Ideal plane/Range)を測定し、平坦度を評価した。
ドレッシング中の定盤回転数とドレスヘッドの定盤半径方向への移動速度を制御せず、両者を常に一定としたこと以外、実施例と同様な条件で、研磨バッチ間にドレッシングを行いながら、シリコンウェーハの両面研磨を実施した。その後、実施例と同様に、両面研磨されたシリコンウェーハのGBIRを測定し、平坦度を評価した。図3、9に、それぞれドレッシング中の定盤回転数とドレスヘッドの定盤半径方向への移動速度を示す(図3、9の破線)。
Claims (4)
- 回転可能な円盤状の定盤に貼り付けられたウェーハを研磨するための研磨パッドを、コンディショニングヘッドを用いてコンディショニングする方法であって、
前記定盤を回転させることで該定盤に貼り付けられた前記研磨パッドを回転させながら、前記コンディショニングヘッドを前記定盤の半径方向に移動させつつ前記コンディショニングを実施し、
前記定盤の回転数及び前記コンディショニングヘッドの前記定盤の半径方向への移動速度を、前記コンディショニングヘッドの前記定盤の中心からの距離に応じて制御することを特徴とする研磨パッドのコンディショニング方法。 - 前記定盤の回転数が下記式(1)を満たし、かつ、前記コンディショニングヘッドの前記定盤の半径方向への移動動作が下記式(2)及び(3)を満たすように、前記定盤の回転数及び前記コンディショニングヘッドの前記定盤の半径方向への移動速度を制御することを特徴とする請求項1に記載の研磨パッドのコンディショニング方法。
T(r)=Tr0×(r0/r) ・・・(1)
V(r)=(r0/r)V0 ・・・(2)
D÷Q=n ・・・(3)
(ここで、T(r):前記コンディショニングヘッドの前記定盤の中心からの距離がrの時の定盤回転数(rpm)、Tr0:コンディショニング開始時の定盤回転数(rpm)、r0:コンディショニング開始時の前記コンディショニングヘッドの前記定盤の中心からの距離(m)、r:前記コンディショニングヘッドの前記定盤の中心からの距離(m)、V(r):前記コンディショニングヘッドの前記定盤の中心からの距離がrの時の前記コンディショニングヘッドの前記定盤の半径方向への移動速度(m/sec)、V0:コンディショニング開始時の前記コンディショニングヘッドの前記定盤の半径方向への移動速度(m/sec)、D:前記コンディショニングヘッドの前記定盤の半径方向のサイズ(m)、Q:前記定盤が1回転する時の前記コンディショニングヘッドが前記定盤の半径上を移動する距離(m)、n:正の整数である。) - 回転可能な円盤状の定盤に貼り付けられたウェーハを研磨するための研磨パッドを、コンディショニングするためのコンディショニングヘッドを具備する研磨装置であって、
前記定盤を回転させることで該定盤に貼り付けられた前記研磨パッドを回転させながら、前記コンディショニングヘッドを前記定盤の半径方向に移動させつつ前記コンディショニングを実施するものであり、
前記定盤の回転数及び前記コンディショニングヘッドの前記定盤の半径方向への移動速度を、前記コンディショニングヘッドの前記定盤の中心からの距離に応じて制御する制御機構を具備するものであることを特徴とする研磨装置。 - 前記制御機構が、前記定盤の回転数が下記式(1)を満たし、かつ、前記コンディショニングヘッドの前記定盤の半径方向への移動動作が下記式(2)及び(3)を満たすように、前記定盤の回転数及び前記コンディショニングヘッドの前記定盤の半径方向への移動速度を制御するものであることを特徴とする請求項3に記載の研磨装置。
T(r)=Tr0×(r0/r) ・・・(1)
V(r)=(r0/r)V0 ・・・(2)
D÷Q=n ・・・(3)
(ここで、T(r):前記コンディショニングヘッドの前記定盤の中心からの距離がrの時の定盤回転数(rpm)、Tr0:コンディショニング開始時の定盤回転数(rpm)、r0:コンディショニング開始時の前記コンディショニングヘッドの前記定盤の中心からの距離(m)、r:前記コンディショニングヘッドの前記定盤の中心からの距離(m)、V(r):前記コンディショニングヘッドの前記定盤の中心からの距離がrの時の前記コンディショニングヘッドの前記定盤の半径方向への移動速度(m/sec)、V0:コンディショニング開始時の前記コンディショニングヘッドの前記定盤の半径方向への移動速度(m/sec)、D:前記コンディショニングヘッドの前記定盤の半径方向のサイズ(m)、Q:前記定盤が1回転する時の前記コンディショニングヘッドが前記定盤の半径上を移動する距離(m)、n:正の整数である。)
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