WO2017040979A1 - Ultrasound transducer assembly - Google Patents

Ultrasound transducer assembly Download PDF

Info

Publication number
WO2017040979A1
WO2017040979A1 PCT/US2016/050171 US2016050171W WO2017040979A1 WO 2017040979 A1 WO2017040979 A1 WO 2017040979A1 US 2016050171 W US2016050171 W US 2016050171W WO 2017040979 A1 WO2017040979 A1 WO 2017040979A1
Authority
WO
WIPO (PCT)
Prior art keywords
layer
kerfs
transducer assembly
transducer
matching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/US2016/050171
Other languages
English (en)
French (fr)
Inventor
Wei Li
Gregg FREY
Simon Hsu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujifilm Sonosite Inc
Original Assignee
Fujifilm Sonosite Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujifilm Sonosite Inc filed Critical Fujifilm Sonosite Inc
Priority to KR1020187005215A priority Critical patent/KR102633430B1/ko
Priority to EP16843099.9A priority patent/EP3344147B1/en
Priority to EP23163129.2A priority patent/EP4219026A1/en
Priority to JP2018511677A priority patent/JP6911013B2/ja
Priority to CN201680049560.3A priority patent/CN107920797B/zh
Publication of WO2017040979A1 publication Critical patent/WO2017040979A1/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61BDIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B8/00Diagnosis using ultrasonic, sonic or infrasonic waves
    • A61B8/44Constructional features of the ultrasonic, sonic or infrasonic diagnostic device
    • A61B8/4483Constructional features of the ultrasonic, sonic or infrasonic diagnostic device characterised by features of the ultrasound transducer
    • A61B8/4494Constructional features of the ultrasonic, sonic or infrasonic diagnostic device characterised by features of the ultrasound transducer characterised by the arrangement of the transducer elements
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61BDIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B8/00Diagnosis using ultrasonic, sonic or infrasonic waves
    • A61B8/44Constructional features of the ultrasonic, sonic or infrasonic diagnostic device
    • A61B8/4483Constructional features of the ultrasonic, sonic or infrasonic diagnostic device characterised by features of the ultrasound transducer
    • A61B8/4488Constructional features of the ultrasonic, sonic or infrasonic diagnostic device characterised by features of the ultrasound transducer the transducer being a phased array
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B06GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06BMETHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • B06B1/0607Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements
    • B06B1/0622Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements on one surface
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B06GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06BMETHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • B06B1/0644Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a single piezoelectric element
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B06GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06BMETHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • B06B1/0644Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a single piezoelectric element
    • B06B1/0662Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a single piezoelectric element with an electrode on the sensitive surface
    • B06B1/067Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a single piezoelectric element with an electrode on the sensitive surface which is used as, or combined with, an impedance matching layer
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22Details, e.g. general constructional or apparatus details
    • G01N29/24Probes
    • G01N29/2406Electrostatic or capacitive probes, e.g. electret or cMUT-probes
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22Details, e.g. general constructional or apparatus details
    • G01N29/24Probes
    • G01N29/2437Piezoelectric probes
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00Piezoelectric or electrostrictive devices
    • H10N30/01Manufacture or treatment
    • H10N30/07Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base
    • H10N30/072Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by laminating or bonding of piezoelectric or electrostrictive bodies
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00Piezoelectric or electrostrictive devices
    • H10N30/01Manufacture or treatment
    • H10N30/08Shaping or machining of piezoelectric or electrostrictive bodies
    • H10N30/085Shaping or machining of piezoelectric or electrostrictive bodies by machining
    • H10N30/088Shaping or machining of piezoelectric or electrostrictive bodies by machining by cutting or dicing
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00Piezoelectric or electrostrictive devices
    • H10N30/20Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/206Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using only longitudinal or thickness displacement, e.g. d33 or d31 type devices
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61BDIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B8/00Diagnosis using ultrasonic, sonic or infrasonic waves
    • A61B8/44Constructional features of the ultrasonic, sonic or infrasonic diagnostic device
    • A61B8/4444Constructional features of the ultrasonic, sonic or infrasonic diagnostic device related to the probe
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00Indexing codes associated with group G01N29/00
    • G01N2291/02Indexing codes associated with the analysed material
    • G01N2291/023Solids
    • G01N2291/0231Composite or layered materials

Definitions

  • the disclosed technology relates generally to ultrasound transducers, and more specifically ultrasound transducer assemblies configured for use with ultrasound imaging systems.
  • FIG. 1A is a side view of an ultrasound probe having an ultrasound transducer assembly and configured in accordance with an embodiment of the disclosed technology.
  • FIG. 1 B is a schematic isometric view of a portion of the ultrasound transducer assembly of FIG. 1 A.
  • FIG. 2 is a schematic section view of the ultrasound transducer assembly of FIGS. 1 A and 1 B along the 2-2' line shown in FIG. 1 B.
  • FIG. 3 is a schematic section view of the ultrasound transducer assembly of FIGS. 1 A and 1 B along the 3-3' line shown in FIG. 1 B.
  • FIG. 4A is a schematic section view of an ultrasound transducer assembly along the 3-3' line shown in FIG. 1 B and configured in accordance with another embodiment of the disclosed technology.
  • FIG. 4B is an enlarged view of a portion of FIG. 4A.
  • FIG. 5A is schematic section view of an ultrasound transducer assembly along the 3-3' line shown in FIG. 1 B and configured in accordance with another
  • FIG. 5B is an enlarged view of a portion of FIG. 5A.
  • FIG. 6A is a schematic section view of an ultrasound transducer assembly along the 3-3' line shown in FIG. 1 B and configured in accordance with another embodiment of the disclosed technology.
  • FIG. 6B is an enlarged view of a portion of FIG. 6A.
  • FIG. 7 is a schematic section view of an ultrasound transducer assembly along the 3-3' line shown in FIG. 1 B and configured in accordance with another embodiment of the disclosed technology.
  • FIG. 8 is a flow diagram of a method of constructing an ultrasound transducer assembly configured in accordance with an embodiment of the disclosed technology.
  • the present technology is generally directed to ultrasound transducer assemblies configured for use with ultrasound imaging systems.
  • ultrasound transducer assemblies configured for use with ultrasound imaging systems.
  • one embodiment for example,
  • FIGS. 1 A-8 Certain details are set forth in the following description and in FIGS. 1 A-8 to provide a thorough understanding of various embodiments of the invention. Other details describing well-known methods and systems often associated with ultrasound imaging, however, are not set forth below to avoid unnecessarily obscuring the description of the various embodiments of the invention. Many of the details, dimensions, angles and other features shown in the Figures are merely illustrative of particular embodiments of the disclosure. Accordingly, other embodiments can have
  • FIG. 1A is a side view of an ultrasound transducer probe 100 having an ultrasound transducer assembly 120 configured in accordance with an embodiment of the disclosed technology.
  • FIG. 1 B is a schematic isometric side view of a portion of the transducer assembly 120 showing the azimuthal (e.g., along an x-axis), elevation (e.g. , along a y-axis) and axial (e.g. , along a z-axis) dimensions of the transducer assembly 120.
  • the probe 100 includes an enclosure 1 10 extending between a distal end portion 1 12 and a proximal end portion 1 14.
  • the enclosure 1 10 is configured to carry or house system electronics 1 16 (e.g., one or more processors, integrated circuits, ASICs, FPGAs, beamformers, batteries and/or other power sources) disposed in an interior portion or cavity of the enclosure 1 10.
  • system electronics 1 16 e.g., one or more processors, integrated circuits, ASICs, FPGAs, beamformers, batteries and/or other power sources.
  • a transducer assembly 120 having one or more transducer elements is electrically coupled to the system electronics 1 16.
  • the transducer assembly 120 transmits ultrasound energy from the one or more transducer elements toward a subject and receives ultrasound echoes from the subject.
  • the ultrasound echoes are converted into electrical signals by the one or more transducer elements and electrically transmitted to the system electronics 1 16 and to electronics (e.g., one or more processors, memory modules, beamformers, FPGAs) in the ultrasound imaging system
  • 1 17 configured to process the electrical signals and form one or more ultrasound images.
  • Capturing ultrasound data from a subject using an exemplary transducer assembly (e.g., the transducer assembly 120) generally includes generating ultrasound,
  • 132592299.1 transmitting ultrasound into the subject, and receiving ultrasound reflected by the subject.
  • a wide range of frequencies of ultrasound may be used to capture ultrasound data, such as, for example, low frequency ultrasound (e.g., less than 15 MHz) and/or high frequency ultrasound (e.g., greater than or equal to 15 MHz) can be used.
  • low frequency ultrasound e.g., less than 15 MHz
  • high frequency ultrasound e.g., greater than or equal to 15 MHz
  • Those of ordinary skill in the art can readily determine which frequency range to use based on factors such as, for example, but not limited to, depth of imaging and/or desired resolution.
  • FIG. 2 is a schematic section view of the transducer assembly 120 of FIGS. 1 A and 1 B shown along the 2-2' line shown in FIG. 1 B.
  • a transducer layer 230 includes one or more transducer elements configured to emit ultrasound energy at a center operating frequency (e.g., between 1 MHz and about 10 MHz).
  • the transducer layer 230 is comprises a piezoelectric material (e.g. , lead zirconate titanate, i.e. PZT).
  • the transducer layer 230 comprises a piezoelectric micromachined ultrasound transducer (PMUT) or a capacitive micromachined ultrasound transducer (CMUT).
  • the transducer layer 230 comprises an electrostrictive ceramic material.
  • the transducer layer 230 comprises another suitable transducer material.
  • An acoustic lens 222 overlies the transducer layer 230 and comprises an acoustically transparent material such as, for example, room temperature vulcanization silicone (RTV) or another suitable acoustic material.
  • RTV room temperature vulcanization silicone
  • a plurality of matching layers 224 is positioned between the lens 222 and the transducer layer 230.
  • a backing layer 240 underlies the transducer layer 230 and is configured to absorb and dissipate acoustic and thermal energy produced by transducer elements of the transducer layer 230.
  • the backing layer 240 comprises a loaded epoxy (e.g., an epoxy loaded with tungsten particles) and/or another suitable material having one or more plates (not shown) extending therethrough.
  • a dematching layer 234 is positioned between the transducer layer 230 and the backing layer 240.
  • the dematching layer 234 is configured to reflect rearward propagating ultrasound energy from the transducer layer 230 (i.e. , toward the backing layer 240) back toward the front of the transducer assembly 120 (i.e., toward the lens 222) and away from the backing layer 240.
  • the dematching layer 234 comprises a material that has an acoustic impedance significantly different
  • the dematching layer 234 comprises tungsten carbide (WC), which has an acoustic impedance of approximately 100 MRayls-significantly greater than the acoustic impedance of PZT (approximately 34 MRayls).
  • WC tungsten carbide
  • the dematching layer 234 includes one or more materials having a lower acoustic impedance than the acoustic impedance of WC (e.g., approximately 100 MRayls) and the transducer layer 230.
  • the dematching layer 234 comprises aluminum nitride (AIN), which has an acoustical impedance of approximately 33 MRayls.
  • the dematching layer 234 comprises polycrystalline silicon, which has an acoustical impedance of approximately 22 MRayls.
  • the dematching layer 234 comprises copper loaded graphite having an acoustical impedance between about 8MRayls and about 15MRayls, or about 10.7MRayls. In some embodiments, another suitable dematching layer can be used.
  • a plurality of matching layers 224 are positioned between the transducer layer 230 and the lens 222.
  • an acoustical impedance e.g., between about 20 MRayls and about 35 MRayls
  • an acoustical impedance e.g., between about 10 MRayls and about 20 MRayls
  • the acoustic impedance of the first matching layer 224A is greater than an acoustical impedance (e.g., between about 5 MRayls and about 10 MRayls) of the second matching layer 224B. In some embodiments, the acoustical impedance of the second matching layer 224B is greater than an acoustical impedance (between about 2 MRayls and about 5 MRayls) of the third matching layer 224C.
  • the transducer assembly 120 includes three matching layers 224. In some embodiments, however, the transducer assembly 120 includes two or fewer matching layers 224. In other embodiments, the transducer assembly 120 includes four or more matching layers 224.
  • FIG. 3 is a schematic section view of the transducer assembly 120 of FIG. 1 B along the 3-3' line shown in FIG. 1 B (i.e. , parallel to the azimuthal axis), and configured in accordance with various embodiments of the disclosed technology.
  • first kerfs 342 and the second kerfs 344 can be configured to isolate individual elements of the transducer layer 230 and/or attenuate acoustic crosstalk between the individual elements.
  • the first kerfs 342 and the second kerfs 344 are at least partially filled with a filler 348.
  • the first kerfs 342 extend through the matching layers 224 while the second kerfs 344 extend through the matching layers 224, the transducer layer 230 and the dematching layer 234, and extend into the backing layer 240.
  • the first kerfs 342 and the second kerfs 344 can extend to lesser or greater depths relative to the axial direction than shown in FIG. 3.
  • the first kerfs 342 and the second kerfs 344 have the same depths relative to the axial direction but are filled with different materials.
  • the first kerfs 342 and the second kerf 344 have a same or similar width (e.g., between about 0.01 mm and about 0.1 mm). In other embodiments, however, the first kerfs 342 have a first width that differs from a second width of the second kerfs 344.
  • the filler 348 comprises one or more materials that fill at least a portion of the first kerfs 342 and the second kerfs 344.
  • the depths of the filler 348 in individual first kerfs 342 is substantially the same.
  • the depths of the filler 348 in individual second kerfs 344 is also substantially the same.
  • the depths of the filler material 348 in the individual first kerfs 342 and in the individual second kerfs vary in an elevation direction.
  • an apodized (stepped or curved) depth profile from the edges towards center of the transducer assembly 120 can be utilized.
  • the first kerfs 342 and the second kerfs 344 are filled with different filler materials.
  • the filler 348 comprises a composite material that includes microballoons suspended in an epoxy or a polymer.
  • the microballoons can
  • 132592299.1 include glass or plastic microspheres surrounding or encapsulating a gas (e.g., air, or a hydrocarbon gas) or be solid microspheres.
  • the microballoons or microspheres can be mixed with an epoxy or polymer in varying ratios to achieve composite materials having varying consistencies and densities.
  • a "slurry" composite material is mixed with microballoons and epoxy or a polymer.
  • the filler 348 includes a composite material comprising one or more materials, for example, having a density between about 0.0005 g/cm 3 and about 0.1 g/cm 3 or between about 0.001 g/cm 3 and about 0.01 g/cm 3 or about 0.0012 g/cm 3 .
  • the filler material comprises a composite material having an acoustical impedance within 10% or less of an acoustical impedance of air.
  • the filler 348 comprises microballoons, an aerogel or a foam.
  • the filler 348 comprises a composite material that has a graduated acoustical impedance such that the material has an acoustical impedance that varies in the axial direction of the transducer assembly 120.
  • the graduated acoustical impedance material has an acoustical impedance that decreases with increasing height in the axial direction.
  • conventional transducer assemblies may include piezoelectric transducers, two matching layers, no dematching layer and kerfs filled with conventional material (e.g., a lens material such as RTV). Such conventional transducer assemblies can have a typical -6dB bandwidth of 75%.
  • Embodiments of the disclosed technology are expected to provide a benefit of a significant performance increase in bandwidth and efficiency compared to conventional piezoelectric transducer assemblies.
  • Certain embodiments of the disclosed technology for example, include transducer assemblies that include a -6dB fractional bandwidth of up to 120% and upto a 8dB sensitivity gain relative to conventional piezoelectric transducer designs.
  • Embodiments of the disclosed technology are expected to provide an additional benefit of higher mechanical indices (and thus deeper imaging penetration) with lower transmit voltages with similar or identical surface temperatures as conventional piezoelectric transducer assemblies.
  • FIGS 4A, 5A, 6A and 7 are schematic section views along the 3-3' line shown in FIG. 1 B (i.e., parallel to the azimuthal direction) of transducer assemblies
  • FIGS. 4B, 5B and 6B are enlarged views of corresponding portions FIGS. 4A, 5A and 6A.
  • a transducer assembly 420 includes the first kerfs 342 and the second kerfs 344 having a groove 452 formed in the filler 348.
  • the groove 452 has a width in the azimuthal direction substantially similar to widths of the first kerfs 342 and the second kerfs 344.
  • the first kerfs 342 and the second kerfs 344 can have different groove depths.
  • the groove 452 is filled with the same material (e.g., RTV) as the lens 222. In other embodiments, however, another material may be used.
  • a transducer assembly 520 includes the first kerfs 342 and the second kerfs having a portion or groove 554 formed in the filler 348.
  • the groove 554 has a smaller width in the azimuthal direction (e.g., 1/2 as wide, 1/4 as wide, 1/8 as wide) than the widths of the first kerfs 342 and the second kerfs 344.
  • the first kerfs 342 and the second kerfs 344 can have differing groove depths.
  • the groove 554 is filled with the same material (e.g., RTV) as the lens 222. In other embodiments, however, another material may be used.
  • an ultrasound transducer assembly 620 includes the first kerfs 342 and the second kerfs having a portion or groove 656 formed in the filler 348.
  • the groove 656 has a smaller width in the azimuthal direction (e.g., 1/2 as wide, 1/4 as wide, 1/8 as wide) than the widths of the first kerfs 342 and the second kerfs 344.
  • the first kerfs 342 and the second kerfs 344 can have differing groove depths.
  • the groove 656 is filled with the same material (e.g., RTV) as the lens 222. In other embodiments, however, another material may be used.
  • an ultrasound transducer assembly 720 includes the first kerfs 342 and the second kerfs having a first filler material 752 (e.g. , a polymer) above a second filler material 754 (e.g., a composite material comprising microballoons).
  • first filler material 752 e.g. , a polymer
  • second filler material 754 e.g., a composite material comprising microballoons.
  • grooves can be formed in the first filler material 752 as described above in reference to FIGS. 4A-6B.
  • FIG. 8 is a flow diagram of a process 800 of constructing an ultrasound transducer assembly in accordance with an embodiment of the disclosed technology.
  • the process 800 begins.
  • the process 800 bonds a lower surface of a transducer layer (e.g., the transducer layer 230 of FIG. 2) to an upper surface of the dematching layer using an adhesive (e.g., an epoxy, a polymer).
  • the process 800 bonds a first matching layer to the transducer layer and bonds one or more additional matching layer to the first matching layer.
  • the process 800 can optionally bond a lower surface of a dematching layer (e.g., the dematching layer 234 of FIG. 2) to an upper surface of a backing layer (e.g., the backing layer 240 of FIG. 2) using an epoxy.
  • the process 800 performs one or more cuts to form one or more kerfs (e.g., the first kerfs 342 or the second kerfs 344 of FIG. 3) in the transducer assembly.
  • the process 800 inserts or otherwise fills at least a portion of the kerfs formed at block 850 with a filler material (e.g., a filler material comprising microballoons).
  • the process 800 determines whether one or more grooves is to be formed in the filler material inserted into the kerfs formed at block 860. If so, then the process 800 proceeds to block 875 and one or more kerfs are formed in the filler material inserted into the kerfs at block 860 (e.g., the grooves 452 of FIGS. 4A and 4B, the grooves 554 of FIGS. 5A and 5B and/or the grooves 656 of FIGS. 6A and 6B).
  • a lens material e.g., RTV or another suitable lens material
  • transducer assemblies configured in accordance with the disclosed technology may include fewer than three matching layers or four or more matching layers. In other implementations, transducer assemblies can be configured in accordance with the disclosed technology without a dematching layer.

Landscapes

  • Health & Medical Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Physics & Mathematics (AREA)
  • General Health & Medical Sciences (AREA)
  • Pathology (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Molecular Biology (AREA)
  • Veterinary Medicine (AREA)
  • Heart & Thoracic Surgery (AREA)
  • Medical Informatics (AREA)
  • Radiology & Medical Imaging (AREA)
  • Surgery (AREA)
  • Animal Behavior & Ethology (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Public Health (AREA)
  • Biomedical Technology (AREA)
  • Biophysics (AREA)
  • Gynecology & Obstetrics (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Chemical & Material Sciences (AREA)
  • Transducers For Ultrasonic Waves (AREA)
  • Ultra Sonic Daignosis Equipment (AREA)
PCT/US2016/050171 2015-09-03 2016-09-02 Ultrasound transducer assembly Ceased WO2017040979A1 (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
KR1020187005215A KR102633430B1 (ko) 2015-09-03 2016-09-02 초음파 변환기 조립체
EP16843099.9A EP3344147B1 (en) 2015-09-03 2016-09-02 Ultrasound transducer assembly
EP23163129.2A EP4219026A1 (en) 2015-09-03 2016-09-02 Ultrasound transducer assembly
JP2018511677A JP6911013B2 (ja) 2015-09-03 2016-09-02 超音波変換器アセンブリ
CN201680049560.3A CN107920797B (zh) 2015-09-03 2016-09-02 超声波换能器组件

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US201562214185P 2015-09-03 2015-09-03
US62/214,185 2015-09-03

Publications (1)

Publication Number Publication Date
WO2017040979A1 true WO2017040979A1 (en) 2017-03-09

Family

ID=58188539

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2016/050171 Ceased WO2017040979A1 (en) 2015-09-03 2016-09-02 Ultrasound transducer assembly

Country Status (6)

Country Link
US (3) US10716542B2 (enExample)
EP (2) EP3344147B1 (enExample)
JP (1) JP6911013B2 (enExample)
KR (1) KR102633430B1 (enExample)
CN (1) CN107920797B (enExample)
WO (1) WO2017040979A1 (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2020190593A1 (en) * 2019-03-15 2020-09-24 EchoNous, Inc. Ultrasound transducer assembly having low viscosity kerf fill material
WO2020198257A1 (en) 2019-03-25 2020-10-01 Exo Imaging, Inc. Handheld ultrasound imager
JP2021533707A (ja) * 2018-07-31 2021-12-02 レゾナント・アコースティックス・インターナショナル・インコーポレーテッド 超音波トランスデューサ

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9808830B2 (en) * 2013-12-27 2017-11-07 General Electric Company Ultrasound transducer and ultrasound imaging system with a variable thickness dematching layer
KR20170090304A (ko) * 2016-01-28 2017-08-07 삼성메디슨 주식회사 초음파 트랜스듀서 및 이를 포함하는 초음파 프로브
USD831219S1 (en) * 2017-07-31 2018-10-16 Edan Instruments, Inc. Transducer
US11678865B2 (en) 2017-12-29 2023-06-20 Fujifilm Sonosite, Inc. High frequency ultrasound transducer
WO2020043898A1 (en) * 2018-08-31 2020-03-05 Koninklijke Philips N.V. Non-rectangular transducer arrays and associated devices, systems, and methods
WO2020107283A1 (zh) * 2018-11-28 2020-06-04 深圳先进技术研究院 换能器组件及其制备方法
CN109530196B (zh) * 2018-11-28 2023-10-27 深圳先进技术研究院 换能器组件及其制备方法
US11583259B2 (en) 2018-12-19 2023-02-21 Fujifilm Sonosite, Inc. Thermal conductive layer for transducer face temperature reduction
TWI869258B (zh) * 2019-08-01 2025-01-01 加拿大商共振聲學國際股份有限公司 超音波傳感器
TWI840394B (zh) * 2019-08-01 2024-05-01 加拿大商共振聲學國際股份有限公司 超音波傳感器
US20240017294A1 (en) * 2019-11-18 2024-01-18 Resonant Acoustics International Inc. Ultrasonic transducers, backing structures and related methods
JP2021136675A (ja) * 2020-02-28 2021-09-13 学校法人早稲田大学 圧電素子
CN113180727B (zh) * 2021-03-29 2023-03-03 聚融医疗科技(杭州)有限公司 一种填缝材料可自由选择的超声换能器及其制备方法
CN115414068B (zh) * 2022-09-26 2025-07-18 武汉联影医疗科技有限公司 一种用于超声换能器的匹配层和制备方法
US20230201876A1 (en) * 2021-12-23 2023-06-29 Fujifilm Sonosite, Inc. Array architecture and interconnection for transducers
CN116553469A (zh) * 2022-03-24 2023-08-08 台湾积体电路制造股份有限公司 混合超声换能器系统

Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5925500A (ja) 1982-08-02 1984-02-09 Matsushita Electric Ind Co Ltd 超音波探触子の製造方法
JPS6139700A (ja) 1984-07-30 1986-02-25 Shimadzu Corp 超音波探触子の製造方法
US5142187A (en) * 1988-08-23 1992-08-25 Matsushita Electric Industrial Co., Ltd. Piezoelectric composite transducer for use in ultrasonic probe
US5311095A (en) * 1992-05-14 1994-05-10 Duke University Ultrasonic transducer array
EP0707898A2 (en) 1994-10-21 1996-04-24 Hewlett-Packard Company Method of forming integral transducer and impedance matching layers
US6359375B1 (en) 1998-05-06 2002-03-19 Siemens Medical Solutions Usa, Inc. Method to build a high bandwidth, low crosstalk, low EM noise transducer
US20050042424A1 (en) 2003-08-22 2005-02-24 Siemens Medical Solutions Usa, Inc. Electrically conductive matching layers and methods
US20060028099A1 (en) 2004-08-05 2006-02-09 Frey Gregg W Composite acoustic matching layer
US20090093722A1 (en) 2007-10-03 2009-04-09 Takashi Takeuchi Ultrasonic probe and ultrasonic diagnostic apparatus
US20130169818A1 (en) * 2012-01-02 2013-07-04 Samsung Electronics Co., Ltd. Ultrasonic transducer, ultrasonic probe, and ultrasound image diagnosis apparatus
US20130293066A1 (en) * 2011-01-28 2013-11-07 Toshiba Medical Systems Corporation Ultrasound transducer, ultrasound probe and manufacturing method of ultrasound transducer

Family Cites Families (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5315486U (enExample) 1976-07-21 1978-02-08
JPS6029731B2 (ja) * 1977-04-26 1985-07-12 旭化成株式会社 重縮合方法
JPS6139700U (ja) 1984-08-15 1986-03-13 三菱重工業株式会社 機関室給気装置
EP0379229B1 (en) 1985-05-20 1994-07-27 Matsushita Electric Industrial Co., Ltd. Ultrasonic probe
US5648942A (en) * 1995-10-13 1997-07-15 Advanced Technology Laboratories, Inc. Acoustic backing with integral conductors for an ultrasonic transducer
JP3673035B2 (ja) * 1996-10-25 2005-07-20 株式会社東芝 超音波トランスジューサ
JP2003175036A (ja) * 2001-12-11 2003-06-24 Aloka Co Ltd 超音波探触子及び超音波診断装置
JP3908595B2 (ja) * 2002-05-17 2007-04-25 アロカ株式会社 超音波探触子
US20040190377A1 (en) * 2003-03-06 2004-09-30 Lewandowski Robert Stephen Method and means for isolating elements of a sensor array
US7285897B2 (en) * 2003-12-31 2007-10-23 General Electric Company Curved micromachined ultrasonic transducer arrays and related methods of manufacture
US20070222339A1 (en) * 2004-04-20 2007-09-27 Mark Lukacs Arrayed ultrasonic transducer
JP2005340903A (ja) * 2004-05-24 2005-12-08 Olympus Corp 超音波トランスデューサとその製造方法
JP4933392B2 (ja) * 2007-04-02 2012-05-16 富士フイルム株式会社 超音波探触子及びその製造方法
US8378557B2 (en) * 2010-07-09 2013-02-19 General Electric Company Thermal transfer and acoustic matching layers for ultrasound transducer
JP5468564B2 (ja) * 2011-03-30 2014-04-09 富士フイルム株式会社 超音波探触子および超音波診断装置
JP6548201B2 (ja) * 2011-09-16 2019-07-24 ゼネラル・エレクトリック・カンパニイ 超音波変換器のための熱移動および音響整合層
KR101269459B1 (ko) * 2011-12-13 2013-05-30 삼성전자주식회사 초음파 프로브 및 그 제조방법
EP2671515A4 (en) * 2012-01-30 2015-11-11 Olympus Corp ULTRASONIC TRANSMITTER GROUP, METHOD FOR PRODUCING THE ULTRASONIC TRANSMITTER GROUP AND ULTRASOUND DOSCOPE
JP6029731B2 (ja) 2012-02-07 2016-11-24 富士フイルム株式会社 超音波探触子
JP5924298B2 (ja) * 2013-03-19 2016-05-25 コニカミノルタ株式会社 超音波探触子及び超音波画像診断装置
JP2014188009A (ja) * 2013-03-26 2014-10-06 Konica Minolta Inc 超音波探触子、超音波画像診断装置及び超音波探触子の製造方法
JP6214333B2 (ja) * 2013-10-23 2017-10-18 三菱鉛筆株式会社 音響整合層とその製造方法
JP5665948B1 (ja) * 2013-11-14 2015-02-04 株式会社フジクラ 携帯型電子機器の冷却構造
CN105917157B (zh) 2013-12-02 2019-08-16 株式会社东芝 漏水抑制装置、漏水抑制系统及计算机可读取的存储介质
JP6641723B2 (ja) 2015-05-08 2020-02-05 コニカミノルタ株式会社 超音波振動子およびその製造方法、超音波探触子ならびに超音波撮像装置

Patent Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5925500A (ja) 1982-08-02 1984-02-09 Matsushita Electric Ind Co Ltd 超音波探触子の製造方法
JPS6139700A (ja) 1984-07-30 1986-02-25 Shimadzu Corp 超音波探触子の製造方法
US5142187A (en) * 1988-08-23 1992-08-25 Matsushita Electric Industrial Co., Ltd. Piezoelectric composite transducer for use in ultrasonic probe
US5311095A (en) * 1992-05-14 1994-05-10 Duke University Ultrasonic transducer array
EP0707898A2 (en) 1994-10-21 1996-04-24 Hewlett-Packard Company Method of forming integral transducer and impedance matching layers
US6359375B1 (en) 1998-05-06 2002-03-19 Siemens Medical Solutions Usa, Inc. Method to build a high bandwidth, low crosstalk, low EM noise transducer
US20050042424A1 (en) 2003-08-22 2005-02-24 Siemens Medical Solutions Usa, Inc. Electrically conductive matching layers and methods
US20060028099A1 (en) 2004-08-05 2006-02-09 Frey Gregg W Composite acoustic matching layer
US20090093722A1 (en) 2007-10-03 2009-04-09 Takashi Takeuchi Ultrasonic probe and ultrasonic diagnostic apparatus
US20130293066A1 (en) * 2011-01-28 2013-11-07 Toshiba Medical Systems Corporation Ultrasound transducer, ultrasound probe and manufacturing method of ultrasound transducer
US20130169818A1 (en) * 2012-01-02 2013-07-04 Samsung Electronics Co., Ltd. Ultrasonic transducer, ultrasonic probe, and ultrasound image diagnosis apparatus

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2021533707A (ja) * 2018-07-31 2021-12-02 レゾナント・アコースティックス・インターナショナル・インコーポレーテッド 超音波トランスデューサ
US12390835B2 (en) 2018-07-31 2025-08-19 Resonant Acoustics International Inc. Ultrasonic transducer
WO2020190593A1 (en) * 2019-03-15 2020-09-24 EchoNous, Inc. Ultrasound transducer assembly having low viscosity kerf fill material
WO2020198257A1 (en) 2019-03-25 2020-10-01 Exo Imaging, Inc. Handheld ultrasound imager
EP3946065A4 (en) * 2019-03-25 2023-03-15 Exo Imaging Inc. PORTABLE ULTRASOUND IMAGING DEVICE
US12059300B2 (en) 2019-03-25 2024-08-13 Exo Imaging, Inc. Handheld ultrasound imager
EP3946065B1 (en) 2019-03-25 2024-09-25 Exo Imaging Inc. Handheld ultrasound imager

Also Published As

Publication number Publication date
US20170065253A1 (en) 2017-03-09
US20240164754A1 (en) 2024-05-23
US11890140B2 (en) 2024-02-06
US10716542B2 (en) 2020-07-21
EP3344147A1 (en) 2018-07-11
EP3344147A4 (en) 2019-05-22
US20200345328A1 (en) 2020-11-05
CN107920797B (zh) 2021-02-12
JP2018532307A (ja) 2018-11-01
KR102633430B1 (ko) 2024-02-02
CN107920797A (zh) 2018-04-17
KR20180038467A (ko) 2018-04-16
EP3344147B1 (en) 2023-11-01
JP6911013B2 (ja) 2021-07-28
EP4219026A1 (en) 2023-08-02

Similar Documents

Publication Publication Date Title
US20240164754A1 (en) Ultrasound transducer assembly
JP6373024B2 (ja) 微細加工超音波トランスデューサのための音響レンズ
US11800806B2 (en) Method for manufacturing a multi-cell transducer
US20100317972A1 (en) Ultrasound transducer with improved acoustic performance
US8378557B2 (en) Thermal transfer and acoustic matching layers for ultrasound transducer
CN103429359A (zh) 用于超声换能器阵列的具有高导热性的高孔隙率声背衬
US9799818B2 (en) Ultrasound probe with heat collecting portion
KR20130030226A (ko) 초음파 트랜스듀서를 위한 열적 전송 및 음향 정합층
US11691177B2 (en) Ultrasound probe with acoustic amplifier
US9566612B2 (en) Ultrasonic probe
US20200289093A1 (en) Ultrasound transducer assembly having low viscosity kerf fill material
JP2012249777A5 (enExample)
KR20160096935A (ko) 음향특성 및 열특성을 향상시키는 초음파 트랜스듀서
HK40074991B (en) Multi-cell transducer
HK40074991A (en) Multi-cell transducer

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 16843099

Country of ref document: EP

Kind code of ref document: A1

ENP Entry into the national phase

Ref document number: 20187005215

Country of ref document: KR

Kind code of ref document: A

ENP Entry into the national phase

Ref document number: 2018511677

Country of ref document: JP

Kind code of ref document: A

NENP Non-entry into the national phase

Ref country code: DE

WWE Wipo information: entry into national phase

Ref document number: 2016843099

Country of ref document: EP