WO2016204114A1 - 硬化性組成物、接着シート、硬化物、積層物、接着シートの製造方法、及び装置 - Google Patents
硬化性組成物、接着シート、硬化物、積層物、接着シートの製造方法、及び装置 Download PDFInfo
- Publication number
- WO2016204114A1 WO2016204114A1 PCT/JP2016/067524 JP2016067524W WO2016204114A1 WO 2016204114 A1 WO2016204114 A1 WO 2016204114A1 JP 2016067524 W JP2016067524 W JP 2016067524W WO 2016204114 A1 WO2016204114 A1 WO 2016204114A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- group
- formula
- substituted
- structural unit
- unsubstituted
- Prior art date
Links
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G59/00—Polycondensates containing more than one epoxy group per molecule; Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups
- C08G59/18—Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups ; e.g. general methods of curing
- C08G59/20—Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups ; e.g. general methods of curing characterised by the epoxy compounds used
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J183/00—Adhesives based on macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing silicon, with or without sulfur, nitrogen, oxygen, or carbon only; Adhesives based on derivatives of such polymers
- C09J183/04—Polysiloxanes
- C09J183/06—Polysiloxanes containing silicon bound to oxygen-containing groups
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J183/00—Adhesives based on macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing silicon, with or without sulfur, nitrogen, oxygen, or carbon only; Adhesives based on derivatives of such polymers
- C09J183/10—Block or graft copolymers containing polysiloxane sequences
- C09J183/12—Block or graft copolymers containing polysiloxane sequences containing polyether sequences
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B27/00—Layered products comprising a layer of synthetic resin
- B32B27/28—Layered products comprising a layer of synthetic resin comprising synthetic resins not wholly covered by any one of the sub-groups B32B27/30 - B32B27/42
- B32B27/283—Layered products comprising a layer of synthetic resin comprising synthetic resins not wholly covered by any one of the sub-groups B32B27/30 - B32B27/42 comprising polysiloxanes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B7/00—Layered products characterised by the relation between layers; Layered products characterised by the relative orientation of features between layers, or by the relative values of a measurable parameter between layers, i.e. products comprising layers having different physical, chemical or physicochemical properties; Layered products characterised by the interconnection of layers
- B32B7/04—Interconnection of layers
- B32B7/12—Interconnection of layers using interposed adhesives or interposed materials with bonding properties
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
- C08K5/00—Use of organic ingredients
- C08K5/54—Silicon-containing compounds
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
- C08L83/00—Compositions of macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon only; Compositions of derivatives of such polymers
- C08L83/04—Polysiloxanes
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
- C08L83/00—Compositions of macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon only; Compositions of derivatives of such polymers
- C08L83/04—Polysiloxanes
- C08L83/06—Polysiloxanes containing silicon bound to oxygen-containing groups
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
- C08L83/00—Compositions of macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon only; Compositions of derivatives of such polymers
- C08L83/10—Block- or graft-copolymers containing polysiloxane sequences
- C08L83/12—Block- or graft-copolymers containing polysiloxane sequences containing polyether sequences
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J163/00—Adhesives based on epoxy resins; Adhesives based on derivatives of epoxy resins
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J183/00—Adhesives based on macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing silicon, with or without sulfur, nitrogen, oxygen, or carbon only; Adhesives based on derivatives of such polymers
- C09J183/04—Polysiloxanes
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J7/00—Adhesives in the form of films or foils
- C09J7/30—Adhesives in the form of films or foils characterised by the adhesive composition
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G77/00—Macromolecular compounds obtained by reactions forming a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon in the main chain of the macromolecule
- C08G77/04—Polysiloxanes
- C08G77/045—Polysiloxanes containing less than 25 silicon atoms
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
- C08K5/00—Use of organic ingredients
- C08K5/16—Nitrogen-containing compounds
- C08K5/17—Amines; Quaternary ammonium compounds
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
- C08K5/00—Use of organic ingredients
- C08K5/16—Nitrogen-containing compounds
- C08K5/34—Heterocyclic compounds having nitrogen in the ring
Definitions
- the present invention provides a curable composition, an adhesive sheet having an adhesive layer formed using the curable composition, a cured product of the curable composition, and an adhesive layer on the adhesive layer of the adhesive sheet. It is related to the stuck laminate.
- the present invention also relates to an adhesive sheet, a method for producing the adhesive sheet, and a laminate in which an adhesive layer is attached to an adhesive layer of the adhesive sheet.
- this invention relates to the apparatus which has the said laminated body.
- Adhesives are used for stacking semiconductors and bonding electronic components.
- a thermosetting adhesive containing benzocyclobutene (BCB), a novolac epoxy resin, or polyorganosilsesquioxane is known (see Patent Documents 1 and 2).
- thermosetting adhesive containing BCB it is necessary to heat at a high temperature of about 200 to 350 ° C., and the adherend may be damaged by being exposed to the high temperature. was there.
- a thermosetting adhesive containing a novolac epoxy resin decomposes the adhesive when it is subjected to a high-temperature process (for example, 260 to 280 ° C.) such as lead-free solder reflow, thereby generating outgas. There was a problem that the adhesiveness was lowered.
- thermosetting adhesive containing polyorganosilsesquioxane can be cured at a lower temperature than the thermosetting adhesive containing BCB, and has excellent adhesion and adhesion to the substrate.
- a cured product can be formed.
- adhesion can be maintained even when subjected to a high temperature process.
- a curable adhesive containing polyorganosilsesquioxane is applied to the adhesive layer by partially curing the adhesive during drying to remove the solvent contained in the adhesive after applying the adhesive. In some cases, adhesion failure occurred when the adherend was bonded.
- the objective of this invention is providing the curable composition which can form the hardened
- Another object of the present invention is to provide a curable composition that can be cured at a low temperature to form a cured product having excellent heat resistance and crack resistance (or cold shock resistance).
- the other object of this invention is to provide the hardened
- Another object of the present invention is to provide a cured product excellent in heat resistance and crack resistance (or cold shock resistance).
- the other object of this invention is to provide the adhesive sheet which has the adhesive bond layer formed using the said curable composition. Furthermore, the other object of this invention is to provide the laminated body obtained by adhere
- the adhesion of the adhesive to the semiconductor is improved by using a silane coupling agent, but when a thermal shock such as a cooling cycle (repeating heating and cooling periodically) is applied, a crack ( Cracks) may occur.
- a thermal shock such as a cooling cycle (repeating heating and cooling periodically) is applied, a crack ( Cracks) may occur.
- thermosetting adhesive containing polyorganosilsesquioxane can maintain adhesiveness even when subjected to a high temperature process.
- the cured product of the thermosetting adhesive containing polyorganosilsesquioxane also has a problem that cracks are easily generated by applying a thermal shock.
- another object of the present invention is to provide a curable composition capable of forming a cured product excellent in crack resistance (or thermal shock resistance), heat resistance, adhesion to an adherend and adhesion. There is to do. Furthermore, another object of the present invention is to provide a cured product excellent in crack resistance (or cold shock resistance), heat resistance, adhesion to an adherend and adhesion. Furthermore, the other object of this invention is to provide the adhesive sheet which has the adhesive bond layer formed using the said curable composition. Furthermore, another object of the present invention is to provide an adhesive sheet excellent in crack resistance (or cold shock resistance), heat resistance, adhesion to an adherend and adhesion, and a method for producing the same. Furthermore, the other object of this invention is to provide the laminated body obtained by adhere
- the present inventors have used a specific polysilsesquioxane and a specific epoxy group-containing silane compound for adhesion of an adherend, thereby providing crack resistance (or It has been found that an adhesive sheet excellent in (cold thermal shock resistance), heat resistance, adhesion to an adherend and adhesion can be obtained. Moreover, it discovered that the hardened
- the present invention provides the following formula (X) [In the formula (X), r1 represents an integer of 4 to 20.
- L represents a group containing at least one group selected from the group consisting of an epoxy group, an oxetanyl group, and a vinyl ether group.
- R 11 and R 12 each represents a hydrocarbon group that may have a substituent.
- s1 represents an integer of 1 to 3
- t1 represents an integer of 0 to 2
- s1 + t1 is 3.
- R 13 and R 14 each represent a hydrogen atom or a hydrocarbon group that may have a substituent.
- a curable composition containing a polyorganosilsesquioxane which is 0.0 is provided.
- R a is a group containing an epoxy group, a substituted or unsubstituted aryl group, a substituted or unsubstituted aralkyl group, a substituted or unsubstituted cycloalkyl group, a substituted or unsubstituted alkyl group. Represents a substituted or unsubstituted alkenyl group or a hydrogen atom.
- R b represents an epoxy group-containing group, a substituted or unsubstituted aryl group, a substituted or unsubstituted aralkyl group, a substituted or unsubstituted cycloalkyl group, a substituted or unsubstituted alkyl group.
- R c represents a hydrogen atom or an alkyl group having 1 to 4 carbon atoms.
- the ratio of the structural unit represented by [the structural unit represented by the formula (I) / the structural unit represented by the formula (II)] is 5 or more, and is represented by the above formula (1) with respect to the total amount of the siloxane structural unit.
- Unit and the following formula (4) [In formula (4), R 1 is the same as that in formula (1). R c is the same as in formula (II). ]
- the proportion of the structural unit represented by is 55 to 100 mol%
- the polyorganosilsesquioxane further comprises the following formula (2) [In the formula (2), R 2 represents a substituted or unsubstituted aryl group, a substituted or unsubstituted aralkyl group, a substituted or unsubstituted cycloalkyl group, a substituted or unsubstituted alkyl group, or a substituted or unsubstituted group.
- R 2 represents a substituted or unsubstituted aryl group, a substituted or unsubstituted aralkyl group, a substituted or unsubstituted cycloalkyl group, a substituted or unsubstituted alkyl group, or a substituted or unsubstituted group.
- An alkenyl group of It is preferable to have the structural unit represented by these.
- R 2 is preferably a substituted or unsubstituted aryl group.
- the R 1 is represented by the following formula (1a) [In Formula (1a), R 1a represents a linear or branched alkylene group. ] A group represented by formula (1b): [In formula (1b), R 1b represents a linear or branched alkylene group. ] A group represented by formula (1c): [In Formula (1c), R 1c represents a linear or branched alkylene group. ] And a group represented by the following formula (1d): [In formula (1d), R 1d represents a linear or branched alkylene group. ] It is preferable that it is 1 or more types of groups selected from the group which consists of group represented by these.
- the compound (A) is represented by the following formula (X1) [In the formula (X1), r2 represents an integer of 4 to 20. R 15 and R 16 each represents a hydrocarbon group which may have a substituent. s2 represents an integer of 1 to 3, t2 represents an integer of 0 to 2, and s2 + t2 is 3. R 17 and R 18 each represent a hydrogen atom or a hydrocarbon group that may have a substituent. ] And a compound represented by the following formula (X2) [In the formula (X2), r3 represents an integer of 4 to 20. R 19 and R 20 each represents a hydrocarbon group that may have a substituent.
- R 21 and R 22 each represent a hydrogen atom or a hydrocarbon group that may have a substituent. ] It is preferable that it is at least 1 type of epoxy group containing silane compound selected from the group which consists of a compound represented by these.
- the curable composition further contains a polymerization initiator.
- the curable composition containing a polymerization stabilizer (B) preferably further contains a silane coupling agent.
- the curable composition is preferably an adhesive composition.
- the present invention also provides an adhesive sheet having an adhesive layer formed from the curable composition on at least one surface of a substrate.
- the present invention also provides a cured product obtained by curing the curable composition.
- the present invention provides the following formula (X) on at least one surface of the substrate.
- r1 represents an integer of 4 to 20.
- L represents a group containing at least one group selected from the group consisting of an epoxy group, an oxetanyl group, and a vinyl ether group.
- R 11 and R 12 each represents a hydrocarbon group that may have a substituent.
- s1 represents an integer of 1 to 3
- t1 represents an integer of 0 to 2
- s1 + t1 is 3.
- R 13 and R 14 each represent a hydrogen atom or a hydrocarbon group that may have a substituent.
- an anchor coat layer containing the compound (A) represented by formula (1), and a number average molecular weight of 1000 to 3000 and a molecular weight dispersity (weight average molecular weight / number average molecular weight) of 1.0 to 3.
- R a is a group containing an epoxy group, a substituted or unsubstituted aryl group, a substituted or unsubstituted aralkyl group, a substituted or unsubstituted cycloalkyl group, a substituted or unsubstituted alkyl group. Represents a substituted or unsubstituted alkenyl group or a hydrogen atom.
- R b represents an epoxy group-containing group, a substituted or unsubstituted aryl group, a substituted or unsubstituted aralkyl group, a substituted or unsubstituted cycloalkyl group, a substituted or unsubstituted alkyl group.
- R c represents a hydrogen atom or an alkyl group having 1 to 4 carbon atoms.
- the ratio of the structural unit represented by [the structural unit represented by the formula (I) / the structural unit represented by the formula (II)] is 5 or more, and is represented by the above formula (1) with respect to the total amount of the siloxane structural unit.
- Unit and the following formula (4) [In formula (4), R 1 is the same as that in formula (1). R c is the same as in formula (II). ]
- the proportion of the structural unit represented by is 55 to 100 mol%
- the present invention provides a laminate in which an adherend layer is attached to the adhesive layer of the adhesive sheet.
- the present invention provides the following formula (X) on at least one surface of the substrate.
- r1 represents an integer of 4 to 20.
- L represents a group containing at least one group selected from the group consisting of an epoxy group, an oxetanyl group, and a vinyl ether group.
- R 11 and R 12 each represents a hydrocarbon group that may have a substituent.
- s1 represents an integer of 1 to 3
- t1 represents an integer of 0 to 2
- s1 + t1 is 3.
- R 13 and R 14 each represent a hydrogen atom or a hydrocarbon group that may have a substituent.
- a method for producing the adhesive sheet is provided.
- R a is a group containing an epoxy group, a substituted or unsubstituted aryl group, a substituted or unsubstituted aralkyl group, a substituted or unsubstituted cycloalkyl group, a substituted or unsubstituted alkyl group. Represents a substituted or unsubstituted alkenyl group or a hydrogen atom.
- R b represents an epoxy group-containing group, a substituted or unsubstituted aryl group, a substituted or unsubstituted aralkyl group, a substituted or unsubstituted cycloalkyl group, a substituted or unsubstituted alkyl group.
- R c represents a hydrogen atom or an alkyl group having 1 to 4 carbon atoms.
- the ratio of the structural unit represented by [the structural unit represented by the formula (I) / the structural unit represented by the formula (II)] is 5 or more, and is represented by the above formula (1) with respect to the total amount of the siloxane structural unit.
- Unit and the following formula (4) [In formula (4), R 1 is the same as that in formula (1). R c is the same as in formula (II). ]
- the proportion of the structural unit represented by is 55 to 100 mol%
- the present invention also provides an apparatus having the above laminate.
- r1 represents an integer of 4 to 20.
- L represents a group containing at least one group selected from the group consisting of an epoxy group, an oxetanyl group, and a vinyl ether group.
- R 11 and R 12 each represents a hydrocarbon group that may have a substituent.
- s1 represents an integer of 1 to 3
- t1 represents an integer of 0 to 2
- s1 + t1 is 3.
- R 13 and R 14 each represent a hydrogen atom or a hydrocarbon group that may have a substituent.
- composition of polyorganosilsesquioxane which is 0.0.
- Composition of polyorganosilsesquioxane Formula (1) below [In Formula (1), R ⁇ 1 > shows group containing an epoxy group.
- R a is a group containing an epoxy group, a substituted or unsubstituted aryl group, a substituted or unsubstituted aralkyl group, a substituted or unsubstituted cycloalkyl group, a substituted or unsubstituted alkyl group. Represents a substituted or unsubstituted alkenyl group or a hydrogen atom.
- R b represents an epoxy group-containing group, a substituted or unsubstituted aryl group, a substituted or unsubstituted aralkyl group, a substituted or unsubstituted cycloalkyl group, a substituted or unsubstituted alkyl group.
- R c represents a hydrogen atom or an alkyl group having 1 to 4 carbon atoms.
- the ratio of the structural unit represented by [the structural unit represented by the formula (I) / the structural unit represented by the formula (II)] is 5 or more, and is represented by the above formula (1) with respect to the total amount of the siloxane structural unit.
- Unit and the following formula (4) [In formula (4), R 1 is the same as that in formula (1). R c is the same as in formula (II).
- the polyorganosilsesquioxane is further represented by the following formula (2): [In the formula (2), R 2 represents a substituted or unsubstituted aryl group, a substituted or unsubstituted aralkyl group, a substituted or unsubstituted cycloalkyl group, a substituted or unsubstituted alkyl group, or a substituted or unsubstituted group. An alkenyl group of ] The curable composition as described in [1] which has a structural unit represented by these. [3] The curable composition according to [2], wherein R 2 is a substituted or unsubstituted aryl group.
- R 1 is represented by the following formula (1a) [In Formula (1a), R 1a represents a linear or branched alkylene group. ] A group represented by formula (1b): [In formula (1b), R 1b represents a linear or branched alkylene group. ] A group represented by formula (1c): [In Formula (1c), R 1c represents a linear or branched alkylene group. ] And a group represented by the following formula (1d): [In formula (1d), R 1d represents a linear or branched alkylene group.
- the compound (A) is represented by the following formula (X1) [In the formula (X1), r2 represents an integer of 4 to 20.
- R 15 and R 16 each represents a hydrocarbon group which may have a substituent.
- s2 represents an integer of 1 to 3
- t2 represents an integer of 0 to 2
- s2 + t2 is 3.
- R 17 and R 18 each represent a hydrogen atom or a hydrocarbon group that may have a substituent.
- a compound represented by the following formula (X2) [In the formula (X2), r3 represents an integer of 4 to 20.
- R 19 and R 20 each represents a hydrocarbon group that may have a substituent.
- s3 represents an integer of 1 to 3
- t3 represents an integer of 0 to 2
- s3 + t3 is 3.
- R 21 and R 22 each represent a hydrogen atom or a hydrocarbon group that may have a substituent.
- R 2 represents a substituted or unsubstituted aryl group, a substituted or unsubstituted aralkyl group, a substituted or unsubstituted cycloalkyl group, a substituted or unsubstituted alkyl group, or a substituted or unsubstituted group.
- An alkenyl group of R c represents a hydrogen atom or an alkyl group having 1 to 4 carbon atoms.
- the content (blending amount) of the polyorganosilsesquioxane in the curable composition is 70% by weight or more and 100% by weight with respect to the total amount (100% by weight) of the curable composition excluding the solvent.
- r1 represents an integer of 4 to 20.
- L represents a group containing at least one group selected from the group consisting of an epoxy group, an oxetanyl group, and a vinyl ether group.
- R 11 and R 12 each represents a hydrocarbon group that may have a substituent.
- s1 represents an integer of 1 to 3
- t1 represents an integer of 0 to 2
- s1 + t1 is 3.
- R 13 and R 14 each represent a hydrogen atom or a hydrocarbon group that may have a substituent.
- an anchor coat layer containing the compound (A) represented by formula (1), and a number average molecular weight of 1000 to 3000 and a molecular weight dispersity (weight average molecular weight / number average molecular weight) of 1.0 to 3.
- R a is a group containing an epoxy group, a substituted or unsubstituted aryl group, a substituted or unsubstituted aralkyl group, a substituted or unsubstituted cycloalkyl group, a substituted or unsubstituted alkyl group. Represents a substituted or unsubstituted alkenyl group or a hydrogen atom.
- R b represents an epoxy group-containing group, a substituted or unsubstituted aryl group, a substituted or unsubstituted aralkyl group, a substituted or unsubstituted cycloalkyl group, a substituted or unsubstituted alkyl group.
- R c represents a hydrogen atom or an alkyl group having 1 to 4 carbon atoms.
- the ratio of the structural unit represented by [the structural unit represented by the formula (I) / the structural unit represented by the formula (II)] is 5 or more, and is represented by the above formula (1) with respect to the total amount of the siloxane structural unit.
- Unit and the following formula (4) [In formula (4), R 1 is the same as that in formula (1). R c is the same as in formula (II).
- the polyorganosilsesquioxane further comprises a compound represented by the following formula (2): [In the formula (2), R 2 represents a substituted or unsubstituted aryl group, a substituted or unsubstituted aralkyl group, a substituted or unsubstituted cycloalkyl group, a substituted or unsubstituted alkyl group, or a substituted or unsubstituted group.
- An alkenyl group of ] The adhesive sheet according to [15], having a structural unit represented by: [17] The adhesive sheet according to [16], wherein R 2 is a substituted or unsubstituted aryl group.
- R 1 is represented by the following formula (1a) [In Formula (1a), R 1a represents a linear or branched alkylene group. ] A group represented by formula (1b): [In formula (1b), R 1b represents a linear or branched alkylene group. ] A group represented by formula (1c): [In Formula (1c), R 1c represents a linear or branched alkylene group. ] And a group represented by the following formula (1d): [In formula (1d), R 1d represents a linear or branched alkylene group.
- R 2 represents a substituted or unsubstituted aryl group, a substituted or unsubstituted aralkyl group, a substituted or unsubstituted cycloalkyl group, a substituted or unsubstituted alkyl group, or a substituted or unsubstituted group.
- An alkenyl group of R c represents a hydrogen atom or an alkyl group having 1 to 4 carbon atoms.
- the adhesive sheet according to any one of [15] to [18], wherein a ratio (total amount) of structural units represented by: is 60 to 100 mol%.
- the content (blending amount) of the polyorganosilsesquioxane in the curable composition is 70% by weight or more and 100% by weight with respect to the total amount (100% by weight) of the curable composition excluding the solvent.
- the content (compounding amount) of the compound (A) in the anchor coat layer is 90% by weight or more with respect to the weight (100% by weight) of the anchor coat layer.
- r1 represents an integer of 4 to 20.
- L represents a group containing at least one group selected from the group consisting of an epoxy group, an oxetanyl group, and a vinyl ether group.
- R 11 and R 12 each represents a hydrocarbon group that may have a substituent.
- s1 represents an integer of 1 to 3
- t1 represents an integer of 0 to 2
- s1 + t1 is 3.
- R 13 and R 14 each represent a hydrogen atom or a hydrocarbon group that may have a substituent.
- the method for producing an adhesive sheet according to any one of [15] to [22].
- Composition of polyorganosilsesquioxane Formula (1) below [In Formula (1), R ⁇ 1 > shows group containing an epoxy group.
- R a is a group containing an epoxy group, a substituted or unsubstituted aryl group, a substituted or unsubstituted aralkyl group, a substituted or unsubstituted cycloalkyl group, a substituted or unsubstituted alkyl group. Represents a substituted or unsubstituted alkenyl group or a hydrogen atom.
- R b represents an epoxy group-containing group, a substituted or unsubstituted aryl group, a substituted or unsubstituted aralkyl group, a substituted or unsubstituted cycloalkyl group, a substituted or unsubstituted alkyl group.
- R c represents a hydrogen atom or an alkyl group having 1 to 4 carbon atoms.
- the ratio of the structural unit represented by [the structural unit represented by the formula (I) / the structural unit represented by the formula (II)] is 5 or more, and is represented by the above formula (1) with respect to the total amount of the siloxane structural unit.
- Unit and the following formula (4) [In formula (4), R 1 is the same as that in formula (1). R c is the same as in formula (II). ] A device having the laminate according to [25] [23], wherein the proportion of the structural unit represented by the formula is 55 to 100 mol%.
- the curable composition of this invention has the said structure, the hardened
- the curable composition of the present invention (the curable composition of the first present invention described later) containing the compound (A) represented by the above formula (X) has crack resistance, heat resistance, and adherend. A cured product having excellent adhesion and adhesion to the body can be formed.
- the curable composition of the present invention containing the polymerization stabilizer (B) (the curable composition of the second present invention described later) is a cured product excellent in adhesion and adhesion to an adherend (further, Can be cured at a low temperature to form a cured product having excellent heat resistance and crack resistance.
- the curable composition of this invention can be preferably used as an adhesive composition (adhesive).
- an adhesive sheet and a laminated body can be obtained by using the said curable composition.
- the adhesive sheet of this invention has the said structure, it is excellent in heat resistance, crack resistance, the adhesiveness with respect to a to-be-adhered body, and adhesiveness.
- a laminate obtained by using the curable composition or adhesive sheet of the present invention is more highly integrated and power saving than conventional semiconductors, A high-performance electronic device can be provided while improving the mounting density.
- cracking or peeling of the adhesive layer in the laminate may cause wiring breakdown in the manufacture of the laminate or in the manufactured semiconductor chip, wafer, etc., resulting in failure of the laminate or the apparatus using the laminate.
- the adhesive agent with high adhesiveness, adhesiveness, heat resistance, and crack resistance with respect to a to-be-adhered body is very important as a material which comprises a laminated body. Therefore, according to the curable composition of the present invention, a highly reliable laminate can be obtained.
- thermogravimetric analysis result shows the evaluation method of the heat resistance of hardened
- the adhesive sheet of the present invention comprises a compound (A) represented by the following formula (X) (hereinafter sometimes simply referred to as “compound (A)”) or a polymerization stabilizer (B), and polyorganosilsesquioki. Sun is used.
- Examples of such an adhesive sheet include (1) an adhesive sheet having an adhesive layer formed from the curable agent composition of the present invention on at least one surface of the substrate, and (2) at least one of the substrates. On the surface, an anchor coat layer containing the compound (A) and an adhesive layer formed of a curable composition containing polyorganosilsesquioxane, wherein the adhesive layer is the anchor coat layer There may be mentioned an adhesive sheet provided on the surface.
- the curable composition of the present invention is a curable composition containing polyorganosilsesquioxane and a compound (A) or a polymerization stabilizer (B).
- the curable composition of this invention containing a compound (A) may be called “the curable composition of 1st this invention.”
- the curable composition of this invention containing a polymerization stabilizer (B) may be called “the curable composition of 2nd this invention.”
- the curable composition of 1st this invention and the curable composition of 2nd this invention are named generically, and “the curable composition of this invention” is called.
- the curable composition of this invention contains at least one of a compound (A) and a polymerization stabilizer (B), it may contain both.
- the polyorganosilsesquioxane has a structural unit represented by the following formula (1); a structural unit represented by the following formula (I) (sometimes referred to as “T3 body” And the ratio of the structural unit represented by the following formula (II) (sometimes referred to as “T2 body”) [the structural unit represented by the formula (I) / the structural unit represented by the formula (II) "May be described as” T3 body / T2 body "] is 5 or more; the structural unit represented by the following formula (1) with respect to the total amount (100 mol%) of the siloxane structural unit, and the formula (4) described later.
- the ratio (total amount) of the structural units represented by the formula is 55 to 100 mol%; the number average molecular weight is 1000 to 3000; the molecular weight dispersity [weight average molecular weight / number average molecular weight] is 1.0 to 3.0. It is.
- the polyorganosilsesquioxane is sometimes referred to as “polyorganosilsesquioxane of the present invention”.
- the structural unit represented by the above formula (1) is a silsesquioxane structural unit (so-called T unit) generally represented by [RSiO 3/2 ].
- R represents a hydrogen atom or a monovalent organic group, and the same applies to the following.
- the structural unit represented by the above formula (1) is formed by hydrolysis and condensation reaction of a corresponding hydrolyzable trifunctional silane compound (specifically, for example, a compound represented by the following formula (a)). Is done.
- R 1 in the formula (1) represents a group (monovalent group) containing an epoxy group. That is, the polyorganosilsesquioxane of the present invention is a cationic curable compound (cationic polymerizable compound) having at least an epoxy group in the molecule. Examples of the group containing an epoxy group include known or commonly used groups having an oxirane ring, and are not particularly limited.
- the following formula (1a) Group represented by the following formula (1b), a group represented by the following formula (1c), and a group represented by the following formula (1d) are preferable, and more preferably the following formula (1a): A group represented by the following formula (1c), more preferably a group represented by the following formula (1a).
- R 1a represents a linear or branched alkylene group.
- the linear or branched alkylene group include a methylene group, a methylmethylene group, a dimethylmethylene group, an ethylene group, a propylene group, a trimethylene group, a tetramethylene group, a pentamethylene group, a hexamethylene group, and a decamethylene group.
- Examples thereof include a linear or branched alkylene group having 1 to 10 carbon atoms.
- R 1a is preferably a linear alkylene group having 1 to 4 carbon atoms or a branched alkylene group having 3 or 4 carbon atoms, more preferably ethylene, from the viewpoint of curability of the curable composition.
- R 1b represents a linear or branched alkylene group, and examples thereof include the same groups as R 1a .
- R 1b is preferably a linear alkylene group having 1 to 4 carbon atoms or a branched alkylene group having 3 or 4 carbon atoms, more preferably ethylene, from the viewpoint of curability of the curable composition.
- R ⁇ 1c> shows a linear or branched alkylene group, and the group similar to R ⁇ 1a> is illustrated.
- R 1c is preferably a linear alkylene group having 1 to 4 carbon atoms or a branched alkylene group having 3 or 4 carbon atoms, more preferably ethylene, from the viewpoint of curability of the curable composition.
- R 1d represents a linear or branched alkylene group, and examples thereof include the same groups as R 1a .
- R 1d is preferably a linear alkylene group having 1 to 4 carbon atoms or a branched alkylene group having 3 or 4 carbon atoms, more preferably ethylene, from the viewpoint of curability of the curable composition.
- R 1 in formula (1) is particularly a group represented by the above formula (1a), wherein R 1a is an ethylene group [in particular, a 2- (3,4-epoxycyclohexyl) ethyl group ] Is preferable.
- the polyorganosilsesquioxane of the present invention may have only one type of structural unit represented by the above formula (1), or two or more types of structural units represented by the above formula (1). You may have.
- the polyorganosilsesquioxane of the present invention is represented by the following formula (2) in addition to the structural unit represented by the above formula (1) as the silsesquioxane structural unit [RSiO 3/2 ]. You may have a unit.
- the structural unit represented by the above formula (2) is a silsesquioxane structural unit (T unit) generally represented by [RSiO 3/2 ]. That is, the structural unit represented by the above formula (2) is a hydrolysis and condensation reaction of a corresponding hydrolyzable trifunctional silane compound (specifically, for example, a compound represented by the following formula (b)). It is formed by.
- R 2 represents a substituted or unsubstituted aryl group, a substituted or unsubstituted aralkyl group, a substituted or unsubstituted cycloalkyl group, a substituted or unsubstituted alkyl group, or a substituted or unsubstituted group
- An alkenyl group is shown.
- aryl group a phenyl group, a tolyl group, a naphthyl group etc. are mentioned, for example.
- the aralkyl group include a benzyl group and a phenethyl group.
- Examples of the cycloalkyl group include a cyclobutyl group, a cyclopentyl group, a cyclohexyl group, and the like.
- Examples of the alkyl group include linear or branched alkyl groups such as methyl group, ethyl group, propyl group, n-butyl group, isopropyl group, isobutyl group, s-butyl group, t-butyl group, and isopentyl group. Groups.
- alkenyl group linear or branched alkenyl groups, such as a vinyl group, an allyl group, and an isopropenyl group, are mentioned, for example.
- the above-mentioned substituted aryl group, substituted aralkyl group, substituted cycloalkyl group, substituted alkyl group, and substituted alkenyl group are each a hydrogen atom or main chain. Part or all of the case is an ether group, ester group, carbonyl group, siloxane group, halogen atom (fluorine atom, etc.), acrylic group, methacryl group, mercapto group, amino group, and hydroxy group (hydroxyl group). And a group substituted with at least one selected.
- R 2 is preferably a substituted or unsubstituted aryl group, a substituted or unsubstituted alkyl group, a substituted or unsubstituted alkenyl group, more preferably a substituted or unsubstituted aryl group, more preferably a phenyl group. is there.
- the proportion of each of the above silsesquioxane structural units (the structural unit represented by the formula (1) and the structural unit represented by the formula (2)) It is possible to adjust appropriately according to the composition of the raw material (hydrolyzable trifunctional silane) for forming the slag.
- the polyorganosilsesquioxane of the present invention is not limited to the structural unit represented by the above formula (1) and the structural unit represented by the formula (2), and is further represented by the above structural formula (1).
- the structural unit etc. which are represented by following formula (3) etc. are mentioned, for example. Can be mentioned.
- Ratio of the structural unit (T3 body) represented by the above formula (I) and the structural unit (T2 body) represented by the above formula (II) in the polyorganosilsesquioxane of the present invention [T3 body / T2 body] ] Is 5 or more as described above, preferably 5 to 18, more preferably 6 to 16, and still more preferably 7 to 14.
- R a in the above formula (I) (formula (I ') in the R a same) and formula (II) in the R b (wherein (II') in the R b versa), respectively, an epoxy group A group containing, substituted or unsubstituted aryl group, substituted or unsubstituted aralkyl group, substituted or unsubstituted cycloalkyl group, substituted or unsubstituted alkyl group, substituted or unsubstituted alkenyl group, or hydrogen atom Show.
- R a and R b are the same as R 1 in the above formula (1) and R 2 in the above formula (2).
- R a in the formula (I) and R b in the formula (II) were bonded to silicon atoms in the hydrolyzable trifunctional silane compound used as a raw material of the polyorganosilsesquioxane of the present invention, respectively. It is derived from a group (a group other than an alkoxy group and a halogen atom; for example, R 1 , R 2 and a hydrogen atom in the following formulas (a) to (c)).
- R c in the formula (II) is a hydrogen atom or an alkyl group having 1 to 4 carbon atoms.
- alkyl group having 1 to 4 carbon atoms include linear or branched alkyl groups having 1 to 4 carbon atoms such as a methyl group, an ethyl group, a propyl group, an isopropyl group, a butyl group, and an isobutyl group. .
- the alkyl group represented by R c in the formula (II) is generally an alkoxy group in the hydrolyzable silane compound used as a raw material of the polyorganosilsesquioxane of the present invention (for example, X 1 to X 3 described later). Derived from an alkyl group forming an alkoxy group or the like.
- the ratio [T3 body / T2 body] in the polyorganosilsesquioxane of the present invention can be determined, for example, by 29 Si-NMR spectrum measurement. 29 In the Si-NMR spectrum, the silicon atom in the structural unit (T3 form) represented by the formula (I) is different from the silicon atom in the structural unit (T2 form) represented by the formula (II). In order to show a signal (peak) in (chemical shift), the ratio [T3 body / T2 body] can be obtained by calculating the integration ratio of these respective peaks.
- the polyorganosilsesquioxane of the present invention has a structural unit represented by the above formula (1) and R 1 is a 2- (3,4-epoxycyclohexyl) ethyl group.
- R 1 is a 2- (3,4-epoxycyclohexyl) ethyl group.
- the silicon atom signal appears at ⁇ 64 to ⁇ 70 ppm
- the silicon atom signal in the structure (T2 form) represented by the above formula (II) is Appears at -54 to -60 ppm.
- the ratio [T3 body / T2 body] can be obtained by calculating the integral ratio of the signal (T3 body) of ⁇ 64 to ⁇ 70 ppm and the signal (T2 body) of ⁇ 54 to ⁇ 60 ppm. it can.
- the 29 Si-NMR spectrum of the polyorganosilsesquioxane of the present invention can be measured, for example, with the following apparatus and conditions.
- Measuring apparatus Trade name “JNM-ECA500NMR” (manufactured by JEOL Ltd.)
- Solvent Deuterated chloroform Accumulated times: 1800 times Measurement temperature: 25 ° C
- the ratio [T3 body / T2 body] of the polyorganosilsesquioxane of the present invention is 5 or more.
- a certain amount or more of T2 body is present with respect to the T3 body.
- Means that Examples of such a T2 body include a structural unit represented by the following formula (4), a structural unit represented by the following formula (5), a structural unit represented by the following formula (6), and the like.
- R 2 in R 1 and the following formula (5) in the following equation (4) is the same as R 2 in R 1 and the formula in the formula (1) (2).
- R c in the following formulas (4) to (6) represents a hydrogen atom or an alkyl group having 1 to 4 carbon atoms, like R c in the formula (II).
- a complete cage silsesquioxane is a polyorganosilsesquioxane composed only of a T3 form, and no T2 form exists in the molecule. That is, the above ratio [T3 body / T2 body] is 5 or more, the number average molecular weight is 1000 to 3000, the molecular weight dispersity is 1.0 to 3.0, and in the FT-IR spectrum as described later. It is suggested that the polyorganosilsesquioxane of the present invention having one intrinsic absorption peak around 1100 cm ⁇ 1 has an incomplete cage silsesquioxane structure.
- the polyorganosilsesquioxane of the present invention has a cage-type (incomplete cage-type) silsesquioxane structure.
- the polyorganosilsesquioxane of the present invention has a FT-IR spectrum of around 1050 cm ⁇ 1 and 1150 cm. respectively in the vicinity of -1 it does not have a specific absorption peak is confirmed by the fact that with a single specific absorption peak in the vicinity of 1100 cm -1 [ref: R. H. Raney, M.M. Itoh, A.D. Sakakibara and T. Suzuki, Chem. Rev. 95, 1409 (1995)].
- the FT-IR spectrum when the FT-IR spectrum has intrinsic absorption peaks near 1050 cm ⁇ 1 and 1150 cm ⁇ 1 , it is identified as having a ladder-type silsesquioxane structure.
- the FT-IR spectrum of the polyorganosilsesquioxane of the present invention can be measured, for example, with the following apparatus and conditions.
- Measuring device Trade name “FT-720” (manufactured by Horiba, Ltd.) Measurement method: Transmission method Resolution: 4 cm -1 Measurement wavenumber range: 400-4000cm -1 Integration count: 16 times
- the total amount of siloxane structural units in the polyorganosilsesquioxane of the present invention [total siloxane structural units; total amount of M units, D units, T units, and Q units] (100 mol%).
- the proportion (total amount) of the structural unit and the structural unit represented by the above formula (4) is 55 to 100 mol%, preferably 65 to 100 mol%, more preferably 80 to 99, as described above. Mol%.
- hardenability of a curable composition improves and the adhesiveness of hardened
- the ratio of each siloxane structural unit in the polyorganosilsesquioxane of this invention is computable by the composition of a raw material, NMR spectrum measurement, etc., for example.
- the total amount of siloxane structural units in the polyorganosilsesquioxane of the present invention [total siloxane structural units; total amount of M units, D units, T units, and Q units] (100 mol%).
- the proportion (total amount) of the structural units represented by the above formula (5) is not particularly limited, but is preferably 0 to 70 mol%, more preferably 0 to 60 mol%, and still more preferably 0 to It is 40 mol%, particularly preferably 1 to 15 mol%.
- the ratio of the structural unit represented by the formula (1) and the structural unit represented by the formula (4) can be relatively increased by setting the ratio to 70 mol% or less, the curable composition There is a tendency that the curability of the cured product is improved and the adhesiveness of the cured product becomes higher.
- the total amount of siloxane structural units in the polyorganosilsesquioxane of the present invention [total siloxane structural units; total amount of M units, D units, T units, and Q units] (100 mol%).
- the ratio (total amount) of the structural unit represented by the structural unit represented by the formula (2), the structural unit represented by the formula (4), and the structural unit represented by the formula (5) is particularly limited. However, it is preferably 60 to 100 mol%, more preferably 70 to 100 mol%, still more preferably 80 to 100 mol%. There exists a tendency for the adhesiveness of hardened
- the number average molecular weight (Mn) in terms of standard polystyrene by gel permeation chromatography of the polyorganosilsesquioxane of the present invention is 1000 to 3000 as described above, preferably 1000 to 2800, more preferably 1100 to 2600.
- Mn number average molecular weight
- the heat resistance and adhesiveness of the cured product are further improved.
- the number average molecular weight to 3000 or less, compatibility with other components in the curable composition is improved, and the heat resistance of the cured product is further improved.
- the molecular weight dispersity (Mw / Mn) in terms of standard polystyrene by gel permeation chromatography of the polyorganosilsesquioxane of the present invention is 1.0 to 3.0, preferably 1.1. To 2.0, more preferably 1.2 to 1.9, and still more preferably 1.45 to 1.80.
- the molecular weight dispersity is 1.0 or more (particularly 1.1 or more), it tends to be liquid and the handling property tends to be improved.
- the number average molecular weight and molecular weight dispersity of the polyorganosilsesquioxane of this invention can be measured with the following apparatus and conditions.
- Measuring apparatus Trade name “Alliance HPLC system 2695” (manufactured by Waters), trade name “Refractive Index Detector 2414” (manufactured by Waters)
- the 5% weight loss temperature (T d5 ) in the air atmosphere of the polyorganosilsesquioxane of the present invention is not particularly limited, but is preferably 330 ° C. or higher (for example, 330 to 450 ° C.), more preferably 340 ° C. or higher. More preferably, it is 350 ° C. or higher.
- the 5% weight reduction temperature is 330 ° C. or higher, the heat resistance of the cured product tends to be further improved.
- the polyorganosilsesquioxane of the present invention has a ratio [T3 / T2] of 5 or more, a number average molecular weight of 1000 to 3000, and a molecular weight dispersity of 1.0 to 3.0.
- the 5% weight loss temperature is controlled to 330 ° C. or more by having one intrinsic peak in the vicinity of 1100 cm ⁇ 1 .
- the 5% weight reduction temperature is a temperature at the time when 5% of the weight before heating is reduced when heated at a constant rate of temperature increase, and serves as an index of heat resistance.
- the 5% weight loss temperature can be measured by TGA (thermogravimetric analysis) under an air atmosphere at a temperature rising rate of 5 ° C./min.
- the polyorganosilsesquioxane of the present invention can be produced by a known or conventional polysiloxane production method, and is not particularly limited.
- one or two or more hydrolyzable silane compounds are hydrolyzed and It can be produced by a method of condensation.
- a hydrolyzable trifunctional silane compound compound represented by the following formula (a)
- a hydrolyzable trifunctional silane compound for forming the structural unit represented by the above formula (1) is essential. It is necessary to use it as a hydrolyzable silane compound.
- a compound represented by the following formula (a) which is a hydrolyzable silane compound for forming a silsesquioxane structural unit (T unit) in the polyorganosilsesquioxane of the present invention.
- the polyorganosilsesquioxane of the present invention can be produced by hydrolysis and condensation of a compound represented by the following formula (b) and a compound represented by the following formula (c). .
- the compound represented by the above formula (a) is a compound that forms the structural unit represented by the formula (1) in the polyorganosilsesquioxane of the present invention.
- R 1 in the formula (a) like that of R 1 in the formula (1), a group containing an epoxy group. That is, R 1 in the formula (a) is a group represented by the above formula (1a), a group represented by the above formula (1b), a group represented by the above formula (1c), or the above formula (1d).
- X 1 in the above formula (a) represents an alkoxy group or a halogen atom.
- the alkoxy group for X 1 include an alkoxy group having 1 to 4 carbon atoms such as a methoxy group, an ethoxy group, a propoxy group, an isopropyloxy group, a butoxy group, and an isobutyloxy group.
- the halogen atom in X 1 for example, a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom.
- X 1 is preferably an alkoxy group, more preferably a methoxy group or an ethoxy group.
- the three X 1 may be the same or different.
- the compound represented by the above formula (b) is a compound that forms the structural unit represented by the formula (2) in the polyorganosilsesquioxane of the present invention.
- R 2 in formula (b) like the R 2 in the formula (2), a substituted or unsubstituted aryl group, a substituted or unsubstituted aralkyl group, a substituted or unsubstituted cycloalkyl group, a substituted or unsubstituted An alkyl group, or a substituted or unsubstituted alkenyl group.
- R 2 in formula (b) is preferably a substituted or unsubstituted aryl group, a substituted or unsubstituted alkyl group, a substituted or unsubstituted alkenyl group, more preferably a substituted or unsubstituted aryl group, More preferred is a phenyl group.
- the compound represented by the above formula (c) is a compound that forms the structural unit represented by the formula (3) in the polyorganosilsesquioxane of the present invention.
- X 3 in the above formula (c) represents an alkoxy group or a halogen atom.
- Specific examples of X 3 include those exemplified as X 1 .
- X 3 is preferably an alkoxy group, more preferably a methoxy group or an ethoxy group.
- the three X 3 may be the same or different.
- hydrolyzable silane compound a hydrolyzable silane compound other than the compounds represented by the above formulas (a) to (c) may be used in combination.
- hydrolyzable trifunctional silane compounds other than the compounds represented by the above formulas (a) to (c) hydrolyzable monofunctional silane compounds that form M units, hydrolyzable bifunctional silanes that form D units
- hydrolyzable tetrafunctional silane compounds that form compounds and Q units.
- the amount of the compound represented by the above formula (b) is not particularly limited, but is preferably 0 to 70 mol%, more preferably based on the total amount (100 mol%) of the hydrolyzable silane compound to be used. Is 0 to 60 mol%, more preferably 0 to 40 mol%, particularly preferably 1 to 15 mol%.
- the ratio of the compound represented by the formula (a) and the compound represented by the formula (b) (the ratio of the total amount) to the total amount (100 mol%) of the hydrolyzable silane compound to be used is not particularly limited.
- the amount is preferably 60 to 100 mol%, more preferably 70 to 100 mol%, still more preferably 80 to 100 mol%.
- hydrolysis and condensation reaction of these hydrolysable silane compounds can also be performed simultaneously, or can also be performed sequentially.
- the order which performs reaction is not specifically limited.
- the hydrolysis and condensation reaction of the hydrolyzable silane compound can be performed in the presence or absence of a solvent.
- a solvent examples include aromatic hydrocarbons such as benzene, toluene, xylene and ethylbenzene; ethers such as diethyl ether, dimethoxyethane, tetrahydrofuran and dioxane; ketones such as acetone, methyl ethyl ketone and methyl isobutyl ketone; methyl acetate and ethyl acetate.
- aromatic hydrocarbons such as benzene, toluene, xylene and ethylbenzene
- ethers such as diethyl ether, dimethoxyethane, tetrahydrofuran and dioxane
- ketones such as acetone, methyl ethyl ketone and methyl isobutyl ketone
- the amount of the solvent used is not particularly limited, and can be appropriately adjusted in the range of 0 to 2000 parts by weight with respect to 100 parts by weight of the total amount of the hydrolyzable silane compound, depending on the desired reaction time. .
- the hydrolysis and condensation reaction of the hydrolyzable silane compound is preferably allowed to proceed in the presence of a catalyst and water.
- the catalyst may be an acid catalyst or an alkali catalyst.
- the acid catalyst include mineral acids such as hydrochloric acid, sulfuric acid, nitric acid, phosphoric acid and boric acid; phosphoric acid esters; carboxylic acids such as acetic acid, formic acid and trifluoroacetic acid; methanesulfonic acid, trifluoromethanesulfonic acid, p -Sulfonic acids such as toluenesulfonic acid; solid acids such as activated clay; Lewis acids such as iron chloride.
- alkaline earth metal organic acid salts such as magnesium acetate (for example, Acetate); lithium methoxide, sodium methoxide, sodium ethoxide Alkali metal alkoxides such as sodium phenoxide, sodium isopropoxide, potassium ethoxide, potassium t-butoxide; alkali metal phenoxides such as sodium phenoxide; triethylamine, N-methylpiperidine, 1,8-diazabicyclo [5.4.0] Amines such as undec-7-ene and 1,5-diazabicyclo [4.3.0] non-5-ene (tertiary amine, etc.); pyridine, 2,2′-bipyridyl, 1,10-phenanthroline, etc.
- a catalyst can also be used individually by 1 type and can also be used in combination of 2 or more type. Further, the catalyst can be used in a state dissolved or dispersed in water, a solvent or the like.
- the amount of the catalyst used is not particularly limited and can be appropriately adjusted within a range of 0.002 to 0.200 mol with respect to 1 mol of the total amount of the hydrolyzable silane compound.
- the method for adding water is not particularly limited, and the total amount of water to be used (total amount used) may be added all at once or sequentially. When adding sequentially, you may add continuously and may add intermittently.
- the reaction conditions for carrying out the hydrolysis and condensation reaction of the hydrolyzable silane compound in particular, the reaction in which the ratio [T3 body / T2 body] in the polyorganosilsesquioxane of the present invention is 5 or more. It is important to select the conditions.
- the reaction temperature of the hydrolysis and condensation reaction is not particularly limited, but is preferably 40 to 100 ° C, more preferably 45 to 80 ° C. By controlling the reaction temperature within the above range, the ratio [T3 / T2] tends to be more efficiently controlled to 5 or more.
- the reaction time for the hydrolysis and condensation reaction is not particularly limited, but is preferably 0.1 to 10 hours, more preferably 1.5 to 8 hours.
- the hydrolysis and condensation reaction can be performed under normal pressure, or can be performed under pressure or under reduced pressure.
- the atmosphere at the time of performing the hydrolysis and condensation reaction is not particularly limited, and may be any of, for example, in an inert gas atmosphere such as a nitrogen atmosphere or an argon atmosphere, or in the presence of oxygen such as in the air.
- an inert gas atmosphere is preferred.
- the polyorganosilsesquioxane of the present invention is obtained by hydrolysis and condensation reaction of the hydrolyzable silane compound. After completion of the hydrolysis and condensation reaction, it is preferable to neutralize the catalyst in order to suppress the ring opening of the epoxy group.
- the polyorganosilsesquioxane of the present invention can be combined with, for example, separation means such as water washing, acid washing, alkali washing, filtration, concentration, distillation, extraction, crystallization, recrystallization, column chromatography, and the like. It may be separated and purified by a separation means or the like.
- the compound (A) is a compound represented by the following formula (X).
- the said compound (A) may be used individually by 1 type, and may be used in combination of 2 or more type.
- r1 represents an integer of 4 to 20, preferably an integer of 5 to 15, more preferably an integer of 6 to 12.
- r1 represents an integer of 4 to 20, preferably an integer of 5 to 15, more preferably an integer of 6 to 12.
- R 11 and R 12 each represents a hydrocarbon group that may have a substituent.
- the hydrocarbon group which may have a substituent include an alkyl group [eg, methyl group, ethyl group, propyl group, butyl group, pentyl group, hexyl group, etc.], cycloalkyl group [eg, cyclopropyl group, etc.
- Examples of the group containing an oxetanyl group include a (3-ethyl-3-oxetanyl) methyloxy group, a (3-ethyl-3-oxetanyl) oxy group, and the like.
- Examples of the group containing the vinyl ether group include a vinyl ether group.
- R 13 and R 14 each represent a hydrogen atom or a hydrocarbon group that may have a substituent.
- the hydrocarbon group which may have a substituent include the same as those exemplified and explained as R 11 and R 12 in the above formula (X).
- R 13 is preferably a hydrogen atom or a linear or branched C 1-10 (particularly C 1-4 ) alkyl group, more preferably a hydrogen atom.
- R 14 is preferably a hydrogen atom or a linear or branched C 1-10 (particularly C 1-4 ) alkyl group, more preferably a hydrogen atom. Note that r1 R 13 and R 14 may be the same or different.
- At least one epoxy group-containing silane compound selected from the group consisting of a compound represented by the following formula (X1) and a compound represented by the following formula (X2) is preferable.
- R 15 and R 16 each represents a hydrocarbon group that may have a substituent.
- the hydrocarbon group which may have a substituent include the same as those exemplified and explained as R 11 and R 12 in the above formula (X).
- R 15 is preferably a linear or branched C 1-10 alkyl group (particularly, a linear or branched C 1-4 alkyl group).
- R 16 is preferably a linear or branched C 1-10 alkyl group (particularly a linear or branched C 1-4 alkyl group).
- s2 represents an integer of 1 to 3
- t2 represents an integer of 0 to 2. Note that s2 + t2 is 3.
- R 17 and R 18 each represent a hydrogen atom or a hydrocarbon group that may have a substituent.
- the hydrocarbon group which may have a substituent include the same as those exemplified and explained as R 13 and R 14 in the above formula (X).
- R 17 is preferably a hydrogen atom or a linear or branched C 1-10 (particularly C 1-4 ) alkyl group, more preferably a hydrogen atom.
- R 18 is preferably a hydrogen atom or a linear or branched C 1-10 (particularly C 1-4 ) alkyl group, more preferably a hydrogen atom.
- the r2 R 17 and R 18 may be the same or different.
- Examples of the compound represented by the formula (X1) include 6-glycidoxyhexyltrimethoxysilane, 6-glycidoxyhexylmethyldimethoxysilane, 6-glycidoxyhexyltriethoxysilane, and 6-glycidoxyhexyl.
- Examples include methyldiethoxysilane, 8-glycidoxyoctyltrimethoxysilane, 8-glycidoxyoctylmethyldimethoxysilane, 8-glycidoxyoctyltriethoxysilane, and 8-glycidoxyoctylmethyldiethoxysilane.
- r3 represents an integer of 4 to 20, preferably an integer of 5 to 15, more preferably an integer of 6 to 12.
- r3 represents an integer of 4 to 20, preferably an integer of 5 to 15, more preferably an integer of 6 to 12.
- R 21 and R 22 each represent a hydrogen atom or a hydrocarbon group that may have a substituent.
- the hydrocarbon group which may have a substituent include the same as those exemplified and explained as R 13 and R 14 in the above formula (X).
- R 21 is preferably a hydrogen atom or a linear or branched C 1-10 (particularly C 1-4 ) alkyl group, more preferably a hydrogen atom.
- R 22 is preferably a hydrogen atom or a linear or branched C 1-10 (particularly C 1-4 ) alkyl group, more preferably a hydrogen atom.
- the r3 R 21 and R 22 may be the same or different.
- Examples of the compound represented by the formula (X2) include 6- (3,4-epoxycyclohexyl) hexyltrimethoxysilane, 6- (3,4-epoxycyclohexyl) hexylmethyldimethoxysilane, and 6- (3,4 -Epoxycyclohexyl) hexyltriethoxysilane, 6- (3,4-epoxycyclohexyl) hexylmethyldiethoxysilane, 8- (3,4-epoxycyclohexyl) octyltrimethoxysilane, 8- (3,4-epoxycyclohexyl) Examples include octylmethyldimethoxysilane, 8- (3,4-epoxycyclohexyl) octyltriethoxysilane, and 8- (3,4-epoxycyclohexyl) octylmethyldiethoxysilane.
- the polyorganosilsesquioxane of the present invention can be used singly or in combination of two or more.
- the content (blending amount) of the compound (A) is not particularly limited, but is 0.01 with respect to 100 parts by weight of the polyorganosilsesquioxane of the invention. Is preferably 10 to 10 parts by weight, more preferably 0.1 to 7 parts by weight, still more preferably 0.5 to 5 parts by weight.
- the content is 0.01 parts by weight or more, the cured product tends to be more excellent in crack resistance, adhesion to an adherend and adhesion. There exists a tendency which is excellent by the adhesiveness and adhesiveness with respect to the to-be-adhered body of cured
- the ratio of the polyorganosilsesquioxane of the present invention to the total amount (100% by weight) of the cationic curable compound contained in the curable composition of the present invention is not particularly limited, but is preferably 70 to 100% by weight, more preferably Is 75 to 100% by weight, more preferably 80 to 100% by weight.
- the polymerization initiator includes a cationic polymerization initiator and an anionic polymerization initiator.
- the cationic polymerization initiator is a compound that generates cationic species by heating to initiate a curing reaction of the polymerizable compound, and the anionic polymerization initiator generates anionic species by heating to generate a polymerizable compound. It is a compound that initiates the curing reaction.
- the curable composition of the present invention contains a polymerization initiator, the curing time until tack-free can be shortened.
- a polymerization initiator can be used individually by 1 type or in combination of 2 or more types.
- an adhesive layer can be quickly formed without causing a curing reaction to proceed, and at less than 50 ° C., it has no adhesiveness and can suppress damage to the semiconductor chip. It is preferable to use a polymerization initiator having the following curing characteristics in that an adhesive layer is obtained that exhibits adhesiveness by heating at a certain temperature and then quickly cures until tack-free. .
- the heat curing time at 130 ° C. of the composition obtained by adding 1 part by weight of the cationic polymerization initiator is 3.5 minutes or more (for example, 3.5 to 7.0 minutes, preferably 4.5 to 6.0). It is preferable to use a polymerization initiator that is
- thermosetting time in the present invention is obtained by a method based on JIS K5909 (1994) until the curable composition is heated on a hot plate to become a rubbery form (more specifically, curing). Until the needle tip no longer rises on the needle tip).
- a polymerization initiator with a heat curing time of 3.5 minutes or more it is difficult to generate an anionic species when a cationic polymerization initiator is used and a cationic polymerization initiator is used when drying by heating. Thereafter, the polymerization does not easily proceed at room temperature, and thus an adhesive layer having a better storage stability tends to be obtained.
- the cationic polymerization initiator includes a cation portion that absorbs heat and an anion portion that is a source of acid generation.
- Examples of the cationic polymerization initiator include arylsulfonium salts, aryliodonium salts, allene-ion complexes, quaternary ammonium salts, aluminum chelates, and boron trifluoride amine complexes. Of these, arylsulfonium salts are preferred.
- anion moiety in the arylsulfonium salt examples include SbF 6 ⁇ , PF 6 ⁇ , BF 4 ⁇ , (CF 3 CF 2 ) 3 PF 3 ⁇ , (CF 3 CF 2 CF 2 ) 3 PF 3 ⁇ , and (C 6 F 5 ) 4 B ⁇ , (C 6 F 5 ) 4 Ga ⁇ , sulfonate anion (trifluoromethanesulfonate anion, pentafluoroethanesulfonate anion, nonafluorobutanesulfonate anion, methanesulfonate anion, benzenesulfonate anion , P-toluenesulfonate anion), (CF 3 SO 2 ) 3 C ⁇ , (CF 3 SO 2 ) 2 N ⁇ , perhalogenate ion, halogenated sulfonate ion, sulfate ion, carbon
- anionic polymerization initiator examples include primary amines, secondary amines, tertiary amines, imidazoles, and boron trifluoride-amine complexes.
- the imidazoles include 2-ethyl-4-methylimidazole, 2-phenylimidazole, 1- (2-cyanoethyl) -2-ethyl-4-methylimidazole, 2,4-diamino-6- [2- Methylimidazolyl- (1)] ethyl-s-triazine, 2-phenylimidazoline, 2,3-dihydro-1H-pyrrolo [1,2-a] benzimidazole, 1-cyanoethyl-2-methylimidazole, 1-cyanoethyl- 2-undecylimidazole and the like are included.
- the tertiary amine examples include tris (dimethylaminomethyl) phenol, benzyldimethylamine, DBU (1,8-d
- the content (blending amount) of the polymerization initiator is not particularly limited, but with respect to 100 parts by weight of the polyorganosilsesquioxane of the present invention. 0.01 to 3.0 parts by weight is preferable, more preferably 0.05 to 3.0 parts by weight, still more preferably 0.1 to 1.0 parts by weight, and particularly preferably 0.3 to 0.8 parts by weight. It is.
- the content of the polymerization initiator is 0.01 parts by weight or more, the curing reaction can be efficiently and sufficiently advanced, and the adhesiveness of the cured product tends to be further improved.
- the content of the polymerization initiator is 3.0 parts by weight or less, the storability of the curable composition tends to be improved, and coloring of the cured product tends to be suppressed.
- an alicyclic epoxy compound (alicyclic) Epoxy resin), aromatic epoxy compounds (aromatic epoxy resins), aliphatic epoxy compounds (aliphatic epoxy resins), and the like can be used, although it does not specifically limit,
- Examples of the alicyclic epoxy compound include known or conventional compounds having one or more alicyclic rings and one or more epoxy groups in the molecule, and are not particularly limited.
- a compound having an epoxy group (referred to as “alicyclic epoxy group”) composed of two adjacent carbon atoms and oxygen atoms constituting the alicyclic ring; (2) the epoxy group is directly bonded to the alicyclic ring by a single bond.
- compounds having an alicyclic ring and a glycidyl ether group in the molecule (glycidyl ether type epoxy compound) and the like.
- Examples of the divalent hydrocarbon group include a linear or branched alkylene group having 1 to 18 carbon atoms, a divalent alicyclic hydrocarbon group, and the like.
- Examples of the linear or branched alkylene group having 1 to 18 carbon atoms include a methylene group, a methylmethylene group, a dimethylmethylene group, an ethylene group, a propylene group, and a trimethylene group.
- divalent alicyclic hydrocarbon group examples include 1,2-cyclopentylene group, 1,3-cyclopentylene group, cyclopentylidene group, 1,2-cyclohexylene group, 1,3-cyclopentylene group, And divalent cycloalkylene groups (including cycloalkylidene groups) such as cyclohexylene group, 1,4-cyclohexylene group and cyclohexylidene group.
- alicyclic epoxy compound represented by the above formula (i) include 3,4,3 ′, 4′-diepoxybicyclohexane, and the following formulas (i-1) to (i-10): The compound etc. which are represented by these are mentioned.
- l and m each represents an integer of 1 to 30.
- R ′ in the following formula (i-5) is an alkylene group having 1 to 8 carbon atoms, and among them, a linear or branched chain having 1 to 3 carbon atoms such as a methylene group, an ethylene group, a propylene group, an isopropylene group -Like alkylene groups are preferred.
- Examples of the compound (2) in which the epoxy group is directly bonded to the alicyclic ring with a single bond include compounds represented by the following formula (ii).
- R ′′ is a group obtained by removing p hydroxyl groups (—OH) from the structural formula of p-valent alcohol (p-valent organic group), and p and n each represent a natural number.
- the divalent alcohol [R ′′ (OH) p ] include polyhydric alcohols (such as alcohols having 1 to 15 carbon atoms) such as 2,2-bis (hydroxymethyl) -1-butanol.
- p is preferably 1 to 6
- n is preferably 1 to 30.
- n in each group in () (inside the outer parenthesis) may be the same or different.
- Examples of the compound (3) having an alicyclic ring and a glycidyl ether group in the molecule include glycidyl ethers of alicyclic alcohols (particularly, alicyclic polyhydric alcohols). More specifically, for example, 2,2-bis [4- (2,3-epoxypropoxy) cyclohexyl] propane, 2,2-bis [3,5-dimethyl-4- (2,3-epoxypropoxy) Compound obtained by hydrogenating bisphenol A type epoxy compound such as cyclohexyl] propane (hydrogenated bisphenol A type epoxy compound); bis [o, o- (2,3-epoxypropoxy) cyclohexyl] methane, bis [o , P- (2,3-epoxypropoxy) cyclohexyl] methane, bis [p, p- (2,3-epoxypropoxy) cyclohexyl] methane, bis [3,5-dimethyl-4- (2, 3-Epoxypropoxy)
- aromatic epoxy compound examples include epibis type glycidyl ether type epoxy resins obtained by condensation reaction of bisphenols [for example, bisphenol A, bisphenol F, bisphenol S, fluorene bisphenol and the like] and epihalohydrin; High molecular weight epibis type glycidyl ether type epoxy resin obtained by addition reaction of bis type glycidyl ether type epoxy resin with the above bisphenols; phenols [eg, phenol, cresol, xylenol, resorcin, catechol, bisphenol A, bisphenol F, bisphenol S, etc.] and aldehyde [eg, formaldehyde, acetaldehyde, benzaldehyde, hydroxybenzaldehyde, salicy A novolak alkyl type glycidyl ether type epoxy resin obtained by further condensing a polyhydric alcohol obtained by condensation reaction with aldehyde and the like with an epihalohydrin; two phenol skeleton
- Examples of the aliphatic epoxy compound include a glycidyl ether of an alcohol having no q-valent cyclic structure (q is a natural number); a monovalent or polyvalent carboxylic acid [for example, acetic acid, propionic acid, butyric acid, stearic acid, Adipic acid, sebacic acid, maleic acid, itaconic acid, etc.] glycidyl ester; epoxidized oils and fats having double bonds such as epoxidized linseed oil, epoxidized soybean oil, epoxidized castor oil; polyolefins such as epoxidized polybutadiene (poly Epoxidized product of alkadiene).
- a monovalent or polyvalent carboxylic acid for example, acetic acid, propionic acid, butyric acid, stearic acid, Adipic acid, sebacic acid, maleic acid, itaconic acid, etc.
- glycidyl ester e
- Examples of the alcohol having no q-valent cyclic structure include monohydric alcohols such as methanol, ethanol, 1-propyl alcohol, isopropyl alcohol and 1-butanol; ethylene glycol, 1,2-propanediol, 1 Divalent alcohols such as 1,3-propanediol, 1,4-butanediol, neopentyl glycol, 1,6-hexanediol, diethylene glycol, triethylene glycol, tetraethylene glycol, dipropylene glycol, polyethylene glycol, polypropylene glycol; Examples include trihydric or higher polyhydric alcohols such as glycerin, diglycerin, erythritol, trimethylolethane, trimethylolpropane, pentaerythritol, dipentaerythritol, and sorbitol. That.
- the q-valent alcohol may be polyether polyol, polyester polyol, polycarbonate polyo
- Examples of the other oxetane compounds include known or commonly used compounds having one or more oxetane rings in the molecule, and are not particularly limited.
- vinyl ether compounds known or commonly used compounds having one or more vinyl ether groups in the molecule can be used, and are not particularly limited.
- 2-hydroxyethyl vinyl ether ethylene glycol monovinyl ether
- 3 -Hydroxypropyl vinyl ether 2-hydroxypropyl vinyl ether
- 2-hydroxyisopropyl vinyl ether 4-hydroxybutyl vinyl ether, 3-hydroxybutyl vinyl ether, 2-hydroxybutyl vinyl ether, 3-hydroxyisobutyl vinyl ether, 2-hydroxyisobutyl vinyl ether, 1-methyl -3-hydroxypropyl vinyl ether, 1-methyl-2-hydroxypropyl vinyl ether, 1-hydroxymethylpropyl vinyl Ether
- 4-hydroxycyclohexyl vinyl ether 1,6-hexanediol monovinyl ether, 1,6-hexanediol divinyl ether, 1,8-octanediol divinyl ether, 1,4-cyclohexanedimethanol mono
- cationic curable compounds particularly when the vinyl ether compound having one or more hydroxyl groups in the molecule is used among the above-mentioned other vinyl ether compounds, heat-resistant yellowing (characteristic that yellowing due to heating hardly occurs) ) Has an advantage that an excellent cured product (adhesive layer) can be obtained.
- the number of hydroxyl groups in the molecule of the vinyl ether compound having one or more hydroxyl groups in the molecule is not particularly limited, but is preferably 1 to 4, more preferably 1 or 2.
- the content (blending amount) of the other cationic curable compound in the curable composition of the present invention is not particularly limited, but the total amount of the polyorganosilsesquioxane of the present invention and the other cationic curable compound (100% by weight). Preferably 50% by weight or less (for example, 0 to 50% by weight), more preferably 30% by weight or less (for example, 0 to 30% by weight), still more preferably 10% by weight, based on the total amount of the cationically curable compound. % Or less (for example, 0 to 10% by weight).
- desired performance for example, fast curability and viscosity adjustment for the curable composition
- desired performance for example, fast curability and viscosity adjustment for the curable composition
- the curable composition of the present invention may preferably further contain a solvent.
- the solvent include water, organic solvents, and the like.
- the solvent can dissolve the polyorganosilsesquioxane of the present invention and additives used as necessary, and does not inhibit polymerization. There is no particular limitation.
- the solvent it is preferable to use a solvent that can impart fluidity suitable for application by spin coating and can be easily removed by heating at a temperature at which the progress of polymerization can be suppressed.
- a solvent that can impart fluidity suitable for application by spin coating and can be easily removed by heating at a temperature at which the progress of polymerization can be suppressed.
- one or more solvents whose atmospheric pressure is 170 ° C. or lower (for example, toluene, butyl acetate, methyl isobutyl ketone, xylene, mesitylene, propylene glycol monomethyl ether, propylene glycol monomethyl ether acetate, cyclohexanone, etc.) preferable.
- the solvent may be used in such a manner that the concentration of the nonvolatile content contained in the curable composition is, for example, about 30 to 80% by weight, preferably 40 to 70% by weight, particularly preferably 50 to 60% by weight. It is preferable in that it is excellent in coatability.
- the amount of the solvent used is excessive, the viscosity of the curable composition tends to be low, and it becomes difficult to form a layer having an appropriate film thickness (for example, about 0.5 to 30 ⁇ m).
- the amount of the solvent used is too small, the viscosity of the curable composition becomes too high and it tends to be difficult to uniformly apply it to the support or adherend.
- the curable composition of the present invention further includes, as other optional components, precipitated silica, wet silica, fumed silica, calcined silica, titanium oxide, alumina, glass, quartz, aluminosilicate, iron oxide, zinc oxide, calcium carbonate.
- Inorganic fillers such as carbon black, silicon carbide, silicon nitride and boron nitride, inorganic fillers obtained by treating these fillers with organosilicon compounds such as organohalosilanes, organoalkoxysilanes and organosilazanes; silicone resins, epoxy resins , Organic resin fine powder such as fluororesin; filler such as conductive metal powder such as silver and copper, curing agent (amine curing agent, polyaminoamide curing agent, acid anhydride curing agent, phenol curing agent, etc.
- organosilicon compounds such as organohalosilanes, organoalkoxysilanes and organosilazanes
- silicone resins epoxy resins
- Organic resin fine powder such as fluororesin
- filler such as conductive metal powder such as silver and copper, curing agent (amine curing agent, polyaminoamide curing agent, acid anhydride curing agent, phenol curing agent, etc.
- Curing aids curing accelerators (imidazoles, alkali metal or alkaline earth metal alkoxides, Sphins, amide compounds, Lewis acid complex compounds, sulfur compounds, boron compounds, condensable organometallic compounds, etc.), stabilizers (antioxidants, UV absorbers, light stabilizers, heat stabilizers, heavy metal deactivation) Agents), flame retardants (phosphorous flame retardants, halogen flame retardants, inorganic flame retardants, etc.), flame retardant aids, reinforcing materials (other fillers, etc.), nucleating agents, coupling agents (compound (A)) Other silane coupling agents, etc.), lubricants, waxes, plasticizers, mold release agents, impact resistance improvers, hue improvers, clearing agents, rheology modifiers (fluidity improvers, etc.), processability improvers, coloring Agents (dyes, pigments, etc.), antistatic agents, dispersants, surface conditioners (leveling agents, anti-
- the curable composition of the present invention is not particularly limited, but can be prepared by stirring and mixing each of the above components at room temperature or while heating as necessary.
- the curable composition of the present invention can be used as a one-component composition in which each component is mixed in advance, for example, two or more components stored separately.
- the curable composition of the present invention is not particularly limited, but is preferably liquid at normal temperature (about 25 ° C.).
- the viscosity of the curable composition of the present invention is not particularly limited, but is preferably adjusted according to the film thickness when applied by spin coating, for example, when applied at a film thickness of 0.1 to 50 ⁇ m. It is preferably 1 to 5000 mPa ⁇ s. When the viscosity of the curable composition of the present invention is within the above range, for example, it becomes easy to form a coating film having a uniform film thickness on a substrate such as a silicon wafer.
- the viscosity of the curable composition of the present invention was measured using a viscometer (trade name “MCR301”, manufactured by Anton Paar) with a swing angle of 5%, a frequency of 0.1 to 100 (1 / s), and temperature: It is measured at 25 ° C.
- the curable composition can be cured, and the cured product ("present" May be referred to as “the cured product of the invention”).
- the cured product of the present invention can be obtained, for example, as a cured product formed on a substrate by bonding the adhesive sheet 1 of the present invention described later to an adherend and then curing the curable composition.
- the curing method can be appropriately selected from well-known methods and is not particularly limited, and examples thereof include a method of irradiation with active energy rays and / or heating.
- the active energy ray for example, any of infrared rays, visible rays, ultraviolet rays, X-rays, electron beams, ⁇ rays, ⁇ rays, ⁇ rays and the like can be used.
- ultraviolet rays are preferable in terms of excellent handleability.
- Conditions for curing the curable composition of the present invention by irradiation with active energy rays depend on the type and energy of the active energy rays to be irradiated, the shape and size of the cured product, etc. Although it can be appropriately adjusted and is not particularly limited, it is preferably about 1 to 1000 mJ / cm 2 , for example, when irradiated with ultraviolet rays.
- irradiation with active energy rays for example, a high-pressure mercury lamp, an ultrahigh-pressure mercury lamp, a xenon lamp, a carbon arc, a metal halide lamp, sunlight, an LED lamp, a laser, or the like can be used.
- a heating treatment annealing and aging
- conditions for curing the curable composition of the present invention by heating are not particularly limited, but are preferably 30 to 200 ° C., and more preferably 50 to 190 ° C., for example.
- the curing time can be appropriately set.
- the thermal decomposition temperature of the cured product of the present invention is not particularly limited, but is preferably 200 ° C. or higher (eg, 200 to 500 ° C.), more preferably 260 ° C. or higher, and further preferably 300 ° C. or higher.
- the thermal decomposition temperature is calculated
- the cured product obtained by curing the curable composition of the present invention has excellent adhesion and adhesion to an adherend. Therefore, the curable composition of the present invention can be preferably used as an adhesive (sometimes referred to as an “adhesive composition”), particularly as a thermosetting adhesive, and by curing it, adhesion to an adherend is achieved. And an adhesive having excellent adhesion (further, an adhesive having excellent crack resistance, heat resistance, adhesion to an adherend and adhesion).
- an adhesive layer formed from the curable composition of the present invention on at least one surface of the substrate.
- An adhesive sheet (sometimes referred to as “adhesive sheet 1 of the present invention”).
- the adhesive sheet 1 of this invention is not specifically limited, For example, it can obtain by apply
- the application method is not particularly limited, and well-known and commonly used means can be used.
- the means and conditions for drying are not particularly limited, and conditions under which volatile components such as solvents can be removed as much as possible can be set, and well-known and commonly used means can be used.
- the thermosetting time at 130 ° C. of the composition obtained by adding 1 part by weight of the curable composition of the present invention to 100 parts by weight of Celoxide 2021P (manufactured by Daicel Corporation) is 3.5 minutes or more.
- the adhesive layer can be formed by quickly removing volatile components such as a solvent while suppressing the progress of the curing reaction by heating and drying.
- the adhesive layer thus obtained does not have adhesiveness at less than 50 ° C., and exhibits adhesiveness by heating at a temperature at which damage to electronic components such as semiconductor chips can be suppressed. Has the property of curing.
- the adhesive sheet 1 of the present invention may be a single-sided adhesive sheet having an adhesive layer only on one side of the substrate, or a double-sided adhesive sheet having an adhesive layer on both sides of the substrate.
- the adhesive sheet 1 of the present invention is a double-sided adhesive sheet
- at least one of the adhesive layers may be the adhesive layer of the present invention, and the other may be the adhesive layer of the present invention. It may be an adhesive layer other than the adhesive layer (other adhesive layer).
- an adhesive sheet excellent in crack resistance, heat resistance, adhesion to an adherend and adhesion can be obtained. it can.
- an anchor coat layer containing the compound (A) and an adhesive layer formed from the curable composition containing the polyorganosilsesquioxane of the present invention on at least one surface of the substrate.
- An adhesive sheet (which may be referred to as “the adhesive sheet 2 of the present invention”) in which the adhesive layer is provided on the surface of the anchor coat layer has crack resistance, heat resistance, and an adherend. Excellent adhesion and adhesion.
- the adhesive sheet 1 of the present invention and the adhesive sheet 2 of the present invention may be collectively referred to as “adhesive sheet of the present invention”.
- a step of forming an anchor coat layer on at least one surface of a substrate using a composition containing the compound (A) (sometimes referred to as “anchor coat agent”). And it can manufacture by the manufacturing method including at least the process of forming an adhesive bond layer using the curable composition containing the polyorgano silsesquioxane of this invention on the surface of the said anchor coat layer.
- the method for applying the anchor coating agent and the curable composition is not particularly limited, and well-known and conventional means can be used.
- the drying means and conditions for forming the anchor coat layer and the adhesive layer are not particularly limited, and conditions that can remove volatile components such as a solvent as much as possible can be set. it can.
- the anchor coating agent and the curable composition may further include components exemplified and explained as other components that may be included in the curable composition of the present invention, such as the solvent and the additive. Good.
- the content (blending amount) of the compound (A) in the anchor coat layer is not particularly limited, but is 90% by weight or more (for example, 90 to 100% by weight) with respect to the weight (100% by weight) of the anchor coat layer. ), More preferably 95% by weight or more.
- the adhesive layer (that is, the adhesive layer included in the adhesive sheet 2 of the present invention) is formed by using a curable composition (adhesive composition) containing the polyorganosilsesquioxane of the present invention. If it is an agent layer, it will not specifically limit, The adhesive bond layer of this invention may be sufficient, and other adhesive bond layers (adhesive layers other than the adhesive bond layer of this invention) may be sufficient.
- a curable composition containing the polyorganosilsesquioxane of the present invention.
- adhesive bond layer of this invention may be sufficient, and other adhesive bond layers (adhesive layers other than the adhesive bond layer of this invention) may be sufficient.
- an adhesive composition which forms the said other adhesive bond layer the composition etc. which remove
- the content (blending amount) of the polyorganosilsesquioxane of the present invention in the curable composition is not particularly limited, It is preferably 70% by weight or more (for example, 70 to 100% by weight), more preferably 80% by weight or more, and further preferably 90% by weight or more with respect to the total amount (100% by weight) of the curable composition excluding the solvent. is there.
- the content of the polyorganosilsesquioxane of the present invention is not particularly limited, It is preferably 70% by weight or more (for example, 70 to 100% by weight), more preferably 80% by weight or more, and further preferably 90% by weight or more with respect to the total amount (100% by weight) of the curable composition excluding the solvent. is there.
- the adhesive sheet of the present invention includes not only a sheet shape but also a form similar to a sheet shape such as a film shape, a tape shape, and a plate shape.
- a base material in the adhesive sheet of the present invention a well-known and commonly used base material (a base material used in the adhesive sheet) can be used, and is not particularly limited.
- plastic base material, metal base material, ceramic base material Examples include materials, semiconductor substrates, glass substrates, paper substrates, wood substrates, and substrates whose surfaces are painted surfaces.
- the base material in the adhesive sheet of the present invention may be a so-called release liner.
- the adhesive sheet of the present invention may have only one layer of the base material, or may have two or more layers.
- the thickness of the base material is not particularly limited, and can be appropriately selected within a range of 1 to 10,000 ⁇ m, for example.
- the adhesive sheet 1 of the present invention may have only one adhesive layer of the present invention, or may have two or more kinds. Further, the thickness of the adhesive layer (the adhesive layer of the present invention and other adhesive layers) in the adhesive sheet of the present invention is not particularly limited, and can be appropriately selected within a range of, for example, 0.1 to 10,000 ⁇ m.
- the adhesive sheet 2 of the present invention may have only one anchor coat layer or two or more kinds.
- the thickness of the anchor coat layer is not particularly limited, and can be appropriately selected within a range of 0.001 to 10,000 ⁇ m, for example.
- the adhesive sheet of the present invention may have other layers (for example, an intermediate layer, an undercoat layer, etc.) in addition to the base material, the adhesive layer, and the anchor coat layer.
- the laminate By using the adhesive sheet of the present invention, a laminate in which an adhesive layer (adhered body) is adhered to the adhesive layer of the adhesive sheet of the present invention (sometimes referred to as “the laminate of the present invention”) is obtained. be able to.
- the laminate is a laminate (laminated body) composed of three or more layers (at least three layers), between two adherend layers (base material and adherend layer) and these adherend layers. It is a laminate having at least an adhesive layer (a layer that bonds the adherend layers together).
- the adhesive sheet of the present invention when the adhesive sheet of the present invention is a single-sided adhesive sheet, the adhesive sheet of the present invention is bonded to a layer to be adhered, and then subjected to heat treatment, thereby the It can be obtained by curing the adhesive layer. In this case, a laminate in which the substrate in the adhesive sheet of the present invention hits the adherend layer is obtained. Furthermore, the laminate of the present invention is, for example, when the adhesive sheet of the present invention is a double-sided adhesive sheet and a release liner as a base material is adhered to both surfaces of the adhesive layer.
- the adhesive layer of the invention is bonded to the layer to be bonded to the adhesive layer exposed by peeling one of the release liners, and then the other adhesive layer exposed by peeling the other release liner Can be obtained by bonding the adherend layer and then curing the adhesive layer by heat treatment.
- the manufacturing method of the laminate of the present invention is not limited to these methods.
- the adhesive sheet of the present invention is the adhesive sheet 1 of the present invention
- the adhesive layer existing between the two layers to be bonded is the adhesive layer of the present invention.
- the laminate of the present invention may have only one adhesive layer (the adhesive layer of the present invention and the adhesive layer in the adhesive sheet 2 of the present invention) or two or more types. May be. Further, the thickness of the adhesive layer is not particularly limited, and can be appropriately selected within a range of, for example, 0.1 to 10,000 ⁇ m.
- laminate of the present invention include semiconductor chips and wafers.
- the adhesive layer is excellent in adhesion and adhesion to the adherend, as well as crack resistance and heat resistance. Therefore, when the laminate of the present invention is, for example, a three-dimensional laminate of semiconductor chips, it has higher integration and power saving than conventional semiconductors, and thus provides high-performance electronic equipment while improving mounting density. be able to.
- cracking or peeling of the adhesive layer in the laminate may cause wiring breakdown in the manufacture of the laminate or in the manufactured semiconductor chip, wafer, etc., resulting in failure of the laminate or the apparatus using the laminate.
- the adhesive agent with high adhesiveness, adhesiveness, heat resistance, and crack resistance with respect to a to-be-adhered body is very important as a material which comprises a laminated body. Therefore, the laminate of the present invention has high reliability.
- the laminate of the present invention for example, a semiconductor chip, a wafer, or the like
- a highly integrated microprocessor, semiconductor memory, power supply IC, communication IC, semiconductor sensor, MEMS, or the like, or A combined semiconductor can be obtained.
- These semiconductors are used in devices such as high-performance servers, workstations, in-vehicle computers, personal computers, communication devices, photographing devices, and image display devices. That is, the apparatus has the laminate of the present invention.
- the molecular weight of the product was measured using Alliance HPLC system 2695 (manufactured by Waters), Refractive Index Detector 2414 (manufactured by Waters), column: Tskel GMH HR- M ⁇ 2 (manufactured by Tosoh Corporation), guard column: Tskel guard column H HR L (manufactured by Tosoh Corp.), column oven: COLUMN HEATER U-620 (manufactured by Sugai), solvent: THF, measurement conditions: 40 ° C. Further, the ratio of T2 body to T3 body [T3 body / T2 body] in the product was measured by 29 Si-NMR spectrum measurement using JEOL ECA500 (500 MHz).
- Example 1 Preparation of anchor coating agent 3 parts by weight of 8-glycidoxyoctyltrimethoxysilane (trade name “KBM-4803”, manufactured by Shin-Etsu Chemical Co., Ltd.) and 7 parts by weight of propylene glycol monomethyl ether acetate are mixed to obtain an anchor coating agent (1). It was.
- the anchor coating agent (1) was applied on one side of a silicon wafer (4 inches, manufactured by SUMCO Corporation) by spin coating, and heated at 150 ° C. for 5 minutes to form an anchor coating layer. Subsequently, the adhesive composition (1) is applied onto the surface of the anchor coat layer by spin coating, heated at 80 ° C. for 4 minutes, and then heated at 100 ° C. for 2 minutes to remove the solvent. An adhesive layer (thickness 5 ⁇ m) was formed to obtain an adhesive sheet (1) [silicon wafer / anchor coat layer / adhesive layer].
- the anchor coating agent (1) was applied to one side of a glass plate (4 inches, manufactured by SCHOTT Japan Co., Ltd.) by spin coating, and heated at 150 ° C. for 5 minutes to form an anchor coating layer. Subsequently, the adhesive composition (1) is applied onto the surface of the anchor coat layer by spin coating, heated at 80 ° C. for 4 minutes, and then heated at 100 ° C. for 2 minutes to remove the solvent. An adhesive layer (thickness 5 ⁇ m) was formed to obtain a glass plate with an adhesive layer [glass plate / anchor coat layer / adhesive layer]. The anchor coat agent (1) is applied on one side of another glass plate (4 inches, manufactured by SCHOTT Japan Co., Ltd.) by spin coating, and heated at 150 ° C.
- Example 2 (Preparation of adhesive composition) 100 parts by weight of a 75 wt% solution of the epoxy group-containing polyorganosilsesquioxane (1) obtained in Preparation Example 1, 8-glycidoxyoctyltrimethoxysilane (trade name “KBM-4803”, Shin-Etsu Chemical ( 1.25 parts by weight of an antimony-based sulfonium salt (trade name “Sun-Aid SI-150L”, manufactured by Sanshin Chemical Industry Co., Ltd., Celoxide 2021P (manufactured by Daicel Corporation)) 0.375 parts by weight (in terms of solid content) of 0.375 parts by weight of a composition obtained by adding a part (heat curing time at 130 ° C .: 5.4 minutes) and 50 parts by weight of propylene glycol monomethyl ether acetate are mixed, 2) was obtained.
- 8-glycidoxyoctyltrimethoxysilane trade name “KBM-4803”, Shin-Ets
- the adhesive composition (2) is applied on one side of a silicon wafer (4 inches, manufactured by SUMCO Corporation) by spin coating, heated at 80 ° C. for 4 minutes, and then heated at 100 ° C. for 2 minutes to obtain a solvent. Was removed to form an adhesive layer to obtain an adhesive sheet (2) [silicon wafer / epoxy group-containing silane compound-containing adhesive layer].
- Adhesion was carried out in the same manner as in Example 1, except that the anchor coating agent (2) was used instead of the anchor coating agent (1), and the adhesive composition (3) was used instead of the adhesive composition (1).
- Sheet (3) Silicon wafer / anchor coat layer / epoxy group-containing silane compound-containing adhesive layer] was obtained.
- Adhesive sheet (4) [silicon wafer / epoxy group-containing silane compound-containing adhesive layer] In the same manner as in Example 2, except that the adhesive composition (3) was used instead of the adhesive composition (2). ] was obtained.
- Comparative Example 3 (Preparation of adhesive sheet) An adhesive sheet (5) [silicon wafer / adhesive layer] was obtained in the same manner as in Example 2 except that the adhesive composition (1) was used instead of the adhesive composition (2).
- Laminate (5) [Glass plate] In the same manner as in Example 2, except that the anchor coat layer was not provided and the adhesive composition (1) was used instead of the adhesive composition (2). / Adhesive layer / glass plate].
- Example 3 (Preparation of adhesive composition) 100 parts by weight of the epoxy group-containing polyorganosilsesquioxane (1) obtained in Preparation Example 1, 50 parts by weight of propylene glycol monomethyl ether acetate, an antimony sulfonium salt (trade name “SI-150L”, Sanshin Chemical Industry ( Co., Ltd., Celoxide 2021P (manufactured by Daicel Co., Ltd.) 100 parts by weight of a composition obtained by adding 1 part by weight of a composition obtained by thermosetting at 130 ° C.
- an antimony sulfonium salt trade name “SI-150L”, Sanshin Chemical Industry ( Co., Ltd., Celoxide 2021P (manufactured by Daicel Co., Ltd.
- a silane coupling agent (trade name “KBE403”, manufactured by Shin-Etsu Chemical Co., Ltd.) is applied to a glass plate (4 inches, manufactured by SCHOTT Japan Co., Ltd.) by spin coating, heated at 120 ° C. for 5 minutes, and silane A glass plate with a coupling agent layer was obtained. Under reduced pressure, the silane coupling agent layer surface of the obtained glass plate with a silane coupling agent layer was stored on the silicon plate with the adhesive layer (I) obtained above (preparation of the adhesive layer) (stored at room temperature for 24 hours). After bonding with the adhesive layer (I) surface of the latter), heating at 60 ° C. and applying pressure of 200 g / cm 2 , heating at 150 ° C. for 30 minutes, then heating at 170 ° C. for 30 minutes Thus, a laminate (I) [silicon plate / silane coupling agent layer / adhesive layer (I) / silane coupling agent layer / glass plate] was obtained.
- the adhesive composition (I), adhesive layer (I), and laminate (I) obtained in Example 3 were evaluated as follows.
- (Heat-resistant) For the cured product obtained by heating the adhesive composition (I) at 150 ° C. for 30 minutes and then at 170 ° C. for 30 minutes, a thermal analyzer (trade name “TG-DTA6300”, Seiko Instruments Inc. As a result of thermogravimetric analysis using (made by)), it was found that the thermal decomposition temperature (T) was 260 ° C. or higher, and the heat resistance was excellent.
- the thermal decomposition temperature (T) is a tangential line where there is no initial weight loss or is gradually decreasing (range indicated by A in the figure), and a sudden weight reduction.
- a silicon plate with an adhesive layer (II) was obtained in the same manner as in Example 3 except that the adhesive composition (II) was used instead of the adhesive composition (I).
- the film thickness of the adhesive layer (II) was 5 to 6 ⁇ m.
- Silicone with an adhesive layer (II) obtained in the above is used for the silane coupling agent layer surface of a glass plate with a silane coupling agent layer produced in the same manner as in Example 3 under reduced pressure.
- the adhesive layer (II) surface of the plate (stored at room temperature for 72 hours), bonded together by applying a pressure of 200 g / cm 2 while heating to 60 ° C, then heated at 150 ° C for 30 minutes, By heating at 170 ° C. for 30 minutes, a laminate (II) [silicon plate / silane coupling agent layer / adhesive layer (II) / silane coupling agent layer / glass plate] was obtained.
- the adhesive composition (II), adhesive layer (II), and laminate (II) obtained in Example 4 were evaluated in the same manner as in Example 3 as follows.
- the thermal decomposition temperature (T) was 260 ° C. or higher, which was found to be excellent in heat resistance.
- Adhesion No peeling from the silicon plate was observed, and it was confirmed that the adhesiveness was excellent.
- Adhesiveness It was confirmed that peeling at the interface did not occur and the adhesive layer was excellent in adhesiveness.
- Comparative Example 4 (Preparation of adhesive composition) 100 parts by weight of the epoxy group-containing polyorganosilsesquioxane (1) obtained in Preparation Example 1, 50 parts by weight of propylene glycol monomethyl ether acetate, antimony sulfonium salt (trade name “SI-150L”, and Sanshin Chemical Industry) Co., Ltd., Celoxide 2021P (manufactured by Daicel Co., Ltd.) 100 parts by weight of a composition obtained by adding 1 part by weight of a composition obtained by thermosetting at 130 ° C. at 5.4 minutes: 0.5 part by weight (solid Minute conversion) was mixed to obtain an adhesive composition (III).
- Silicone with an adhesive layer (III) obtained in the above (Preparation of adhesive layer) is used for the silane coupling agent layer surface of a glass plate with a silane coupling agent layer produced in the same manner as in Example 3 under reduced pressure. It was combined with the adhesive layer (III) surface of the plate (after storage at room temperature for 72 hours) and applied with a pressure of 200 g / cm 2 while heating to 60 ° C., but the bonding could not be performed.
- the curable composition of the present invention can be preferably used as an adhesive, particularly a thermosetting adhesive, and by curing it, an adhesive excellent in adhesion and adhesion to an adherend (and crack resistance) , Adhesive having excellent heat resistance, adhesion to an adherend and adhesion).
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Health & Medical Sciences (AREA)
- Medicinal Chemistry (AREA)
- Polymers & Plastics (AREA)
- Epoxy Resins (AREA)
- Adhesives Or Adhesive Processes (AREA)
- Laminated Bodies (AREA)
- Adhesive Tapes (AREA)
- Silicon Polymers (AREA)
- Compositions Of Macromolecular Compounds (AREA)
Abstract
Description
さらに、本発明の他の目的は、被接着体に対する接着性及び密着性に優れた硬化物を提供することにある。また、本発明の他の目的は、耐熱性、耐クラック性(若しくは耐冷熱衝撃性)に優れた硬化物を提供することにある。
さらに、本発明の他の目的は、前記硬化性組成物を用いて形成された接着剤層を有する接着シートを提供することにある。さらに、本発明の他の目的は、前記硬化性組成物で被接着体を接着して得られる積層物、及び該積層物を有する装置を提供することにある。
さらに、本発明の他の目的は、耐クラック性(若しくは耐冷熱衝撃性)、耐熱性、被接着体に対する接着性及び密着性に優れた硬化物を提供することにある。さらに、本発明の他の目的は、前記硬化性組成物を用いて形成された接着剤層を有する接着シートを提供することにある。さらに、本発明の他の目的は、耐クラック性(若しくは耐冷熱衝撃性)、耐熱性、被接着体に対する接着性及び密着性に優れた接着シート及びその製造方法を提供することにある。さらに、本発明の他の目的は、前記接着シートで被接着体を接着して得られる積層物、及び該積層物を有する装置を提供することにある。
で表される化合物(A)又は重合安定剤(B)、並びに、下記構成を有し、数平均分子量が1000~3000、分子量分散度(重量平均分子量/数平均分子量)が1.0~3.0であるポリオルガノシルセスキオキサンを含有することを特徴とする硬化性組成物を提供する。
ポリオルガノシルセスキオキサンの構成:下記式(1)
で表される構成単位を有し、下記式(I)
で表される構成単位と、下記式(II)
で表される構成単位の割合[式(I)で表される構成単位/式(II)で表される構成単位]が5以上であり、シロキサン構成単位の全量に対する上記式(1)で表される構成単位及び下記式(4)
で表される構成単位の割合が55~100モル%である
で表される構成単位を有することが好ましい。
で表される基、下記式(1b)
で表される基、下記式(1c)
で表される基、及び、下記式(1d)
で表される基からなる群より選択される1種以上の基であることが好ましい。
で表される化合物及び下記式(X2)
で表される化合物からなる群より選択される少なくとも1種のエポキシ基含有シラン化合物であることが好ましい。
で表される化合物(A)を含有するアンカーコート層、及び、下記構成を有し、数平均分子量が1000~3000、分子量分散度(重量平均分子量/数平均分子量)が1.0~3.0であるポリオルガノシルセスキオキサンを含有する硬化性組成物により形成された接着剤層を有し、前記接着剤層が前記アンカーコート層の表面上に設けられていることを特徴とする接着シートを提供する。
ポリオルガノシルセスキオキサンの構成:下記式(1)
で表される構成単位を有し、下記式(I)
で表される構成単位と、下記式(II)
で表される構成単位の割合[式(I)で表される構成単位/式(II)で表される構成単位]が5以上であり、シロキサン構成単位の全量に対する上記式(1)で表される構成単位及び下記式(4)
で表される構成単位の割合が55~100モル%である
で表される化合物(A)を含有する組成物を用いてアンカーコート層を形成する工程、及び、前記アンカーコート層の表面上に、下記構成を有し、数平均分子量が1000~3000、分子量分散度(重量平均分子量/数平均分子量)が1.0~3.0であるポリオルガノシルセスキオキサンを含有する硬化性組成物を用いて接着剤層を形成する工程を含むことを特徴とする前記の接着シートの製造方法を提供する。
ポリオルガノシルセスキオキサンの構成:下記式(1)
で表される構成単位を有し、下記式(I)
で表される構成単位と、下記式(II)
で表される構成単位の割合[式(I)で表される構成単位/式(II)で表される構成単位]が5以上であり、シロキサン構成単位の全量に対する上記式(1)で表される構成単位及び下記式(4)
で表される構成単位の割合が55~100モル%である
[1]下記式(X)
で表される化合物(A)又は重合安定剤(B)、並びに、下記構成を有し、数平均分子量が1000~3000、分子量分散度(重量平均分子量/数平均分子量)が1.0~3.0であるポリオルガノシルセスキオキサンを含有することを特徴とする硬化性組成物。
ポリオルガノシルセスキオキサンの構成:下記式(1)
で表される構成単位を有し、下記式(I)
で表される構成単位と、下記式(II)
で表される構成単位の割合[式(I)で表される構成単位/式(II)で表される構成単位]が5以上であり、シロキサン構成単位の全量に対する上記式(1)で表される構成単位及び下記式(4)
で表される構成単位の割合が55~100モル%である
[2]前記ポリオルガノシルセスキオキサンが、さらに、下記式(2)
で表される構成単位を有する[1]に記載の硬化性組成物。
[3]上記R2が、置換若しくは無置換のアリール基である[2]に記載の硬化性組成物。
[4]上記R1が、下記式(1a)
で表される基、下記式(1b)
で表される基、下記式(1c)
で表される基、及び、下記式(1d)
で表される基からなる群より選択される1種以上の基である[1]~[3]のいずれか1つに記載の硬化性組成物。
[5]化合物(A)が、下記式(X1)
で表される化合物及び下記式(X2)
で表される化合物からなる群より選択される少なくとも1種のエポキシ基含有シラン化合物である、[1]~[4]のいずれか1つに記載の硬化性組成物。
[6]ポリオルガノシルセスキオキサンにおけるシロキサン構成単位の全量(100モル%)に対する、上記式(1)で表される構成単位、上記式(2)で表される構成単位、上記式(4)で表される構成単位、及び下記式(5)
で表される構成単位の割合(総量)が60~100モル%である、[1]~[5]のいずれか1つに記載の硬化性組成物。
[7]さらに、重合開始剤を含有する[1]~[6]のいずれか1つに記載の硬化性組成物。
[8]重合安定剤(B)を含有し、さらにシランカップリング剤を含有する[1]~[7]のいずれか1つに記載の硬化性組成物。
[9]硬化性組成物における上記ポリオルガノシルセスキオキサンの含有量(配合量)が、溶媒を除く硬化性組成物の全量(100重量%)に対して、70重量%以上、100重量%未満である、[1]~[8]のいずれか1つに記載の硬化性組成物。
[10]化合物(A)の含有量(配合量)が、上記ポリオルガノシルセスキオキサン100重量部に対して、0.01~10重量部である、[1]~[9]のいずれか1つに記載の硬化性組成物。
[11]重合安定剤(B)の含有量(配合量)が、上記ポリオルガノシルセスキオキサン100重量部に対して、0.005重量部以上である、[1]~[10]のいずれか1つに記載の硬化性組成物。
[12]接着剤組成物である[1]~[11]のいずれか1つに記載の硬化性組成物。
[13]基材の少なくとも一方の面に、[12]に記載の硬化性組成物から形成された接着剤層を有する接着シート。
[14][1]~[12]のいずれか1つに記載の硬化性組成物を硬化させて得られる硬化物。
[15]基材の少なくとも一方の面に、下記式(X)
で表される化合物(A)を含有するアンカーコート層、及び、下記構成を有し、数平均分子量が1000~3000、分子量分散度(重量平均分子量/数平均分子量)が1.0~3.0であるポリオルガノシルセスキオキサンを含有する硬化性組成物により形成された接着剤層を有し、前記接着剤層が前記アンカーコート層の表面上に設けられていることを特徴とする接着シート。
ポリオルガノシルセスキオキサンの構成:下記式(1)
で表される構成単位を有し、下記式(I)
で表される構成単位と、下記式(II)
で表される構成単位の割合[式(I)で表される構成単位/式(II)で表される構成単位]が5以上であり、シロキサン構成単位の全量に対する上記式(1)で表される構成単位及び下記式(4)
で表される構成単位の割合が55~100モル%である
[16]前記ポリオルガノシルセスキオキサンが、さらに、下記式(2)
で表される構成単位を有する[15]に記載の接着シート。
[17]上記R2が、置換若しくは無置換のアリール基である[16]に記載の接着シート。
[18]上記R1が、下記式(1a)
で表される基、下記式(1b)
で表される基、下記式(1c)
で表される基、及び、下記式(1d)
で表される基からなる群より選択される1種以上の基である[15]~[17]のいずれか1つに記載の接着シート。
[19]ポリオルガノシルセスキオキサンにおけるシロキサン構成単位の全量(100モル%)に対する、上記式(1)で表される構成単位、上記式(2)で表される構成単位、上記式(4)で表される構成単位、及び下記式(5)
で表される構成単位の割合(総量)が60~100モル%である、[15]~[18]のいずれか1つに記載の接着シート。
[20]硬化性組成物が、さらに、重合開始剤を含有する[15]~[19]のいずれか1つに記載の接着シート。
[21]硬化性組成物における上記ポリオルガノシルセスキオキサンの含有量(配合量)が、溶媒を除く硬化性組成物の全量(100重量%)に対して、70重量%以上、100重量%未満である、[15]~[20]のいずれか1つに記載の接着シート。
[22]アンカーコート層中の化合物(A)の含有量(配合量)が、アンカーコート層の重量(100重量%)に対して、90重量%以上である、[15]~[21]のいずれか1つに記載の接着シート。
[23][13]及び[15]~[22]のいずれか1つに記載の接着シートの接着剤層に被接着層が貼付された積層物。
[24]基材の少なくとも一方の面に、下記式(X)
で表される化合物(A)を含有する組成物を用いてアンカーコート層を形成する工程、及び、前記アンカーコート層の表面上に、下記構成を有し、数平均分子量が1000~3000、分子量分散度(重量平均分子量/数平均分子量)が1.0~3.0であるポリオルガノシルセスキオキサンを含有する硬化性組成物を用いて接着剤層を形成する工程を含むことを特徴とする[15]~[22]のいずれか1つに記載の接着シートの製造方法。
ポリオルガノシルセスキオキサンの構成:下記式(1)
で表される構成単位を有し、下記式(I)
で表される構成単位と、下記式(II)
で表される構成単位の割合[式(I)で表される構成単位/式(II)で表される構成単位]が5以上であり、シロキサン構成単位の全量に対する上記式(1)で表される構成単位及び下記式(4)
で表される構成単位の割合が55~100モル%である
[25][23]に記載の積層物を有する装置。
そして、本発明の硬化性組成物や接着シートを使用して得られた積層物(例えば、半導体チップの三次元積層体等)は、従来の半導体よりもより高集積、省電力であるため、実装密度を向上させつつ高性能な電子機器を提供することができる。特に、積層物中の接着層のクラックや剥離は、積層物の製造時や製造された半導体チップ、ウエハ等において配線の破壊の原因となり、結果として積層物や該積層物を用いた装置の故障の原因となる。このため、被接着体に対する接着性、密着性、耐熱性、耐クラック性の高い接着剤は積層物を構成する材料として非常に重要である。従って、本発明の硬化性組成物によれば、信頼性の高い積層物を得ることができる。
上記ポリオルガノシルセスキオキサン(シルセスキオキサン)は、下記式(1)で表される構成単位を有し;下記式(I)で表される構成単位(「T3体」と称する場合がある)と、下記式(II)で表される構成単位(「T2体」と称する場合がある)の割合[式(I)で表される構成単位/式(II)で表される構成単位;「T3体/T2体」と記載する場合がある]が5以上であり;シロキサン構成単位の全量(100モル%)に対する下記式(1)で表される構成単位及び後述の式(4)で表される構成単位の割合(総量)が55~100モル%であり;数平均分子量が1000~3000であり;分子量分散度[重量平均分子量/数平均分子量]が1.0~3.0である。なお、本明細書では、上記ポリオルガノシルセスキオキサンを、「本発明のポリオルガノシルセスキオキサン」と称する場合がある。
測定装置:商品名「JNM-ECA500NMR」(日本電子(株)製)
溶媒:重クロロホルム
積算回数:1800回
測定温度:25℃
測定装置:商品名「FT-720」((株)堀場製作所製)
測定方法:透過法
分解能:4cm-1
測定波数域:400~4000cm-1
積算回数:16回
測定装置:商品名「Alliance HPLCシステム 2695」(Waters製)、商品名「Refractive Index Detector 2414」(Waters製)
カラム:Tskgel GMHHR-M×2(東ソー(株)製)
ガードカラム:Tskgel guard column HHRL(東ソー(株)製)
カラムオーブン:COLUMN HEATER U-620(Sugai製)
溶媒:THF
測定条件:40℃
分子量:標準ポリスチレン換算
本発明の硬化性組成物における重合安定剤(B)は、カチオンをトラップすることによりカチオン重合の進行を抑制し、重合安定剤によるカチオンのトラップ能が飽和し、失活した段階で重合を進行させる作用を有する化合物である。第二の本発明の硬化性組成物は重合安定剤(B)を含有するため、塗布・乾燥して接着剤層を形成した後、長期に亘って重合の進行を抑制することができ、接着性が求められるタイミングで加熱することで優れた接着性を発現する、保存安定性に優れた接着剤層を形成することができる。
第一の本発明の硬化性組成物は、化合物(A)及び本発明のポリオルガノシルセスキオキサンを必須成分として含む硬化性組成物(硬化性樹脂組成物)である。第一の本発明の硬化性組成物は、このような特定のポリオルガノシルセスキオキサンと特定の構成を有する化合物(A)とを組み合わせて用いることにより、耐クラック性、耐熱性、被接着体に対する接着性及び密着性に優れた硬化物を形成することができる。第二の本発明の硬化性組成物は、重合安定剤(B)及び本発明のポリオルガノシルセスキオキサンを必須成分として含む硬化性組成物(硬化性樹脂組成物)である。後述のように、本発明の硬化性組成物は、さらに、重合開始剤(特にカチオン重合開始剤)や表面調整剤あるいは表面改質剤等のその他の成分を含んでいてもよい。
上記重合開始剤にはカチオン重合開始剤とアニオン重合開始剤が含まれる。前記カチオン重合開始剤は加熱することによってカチオン種を発生して、重合性化合物の硬化反応を開始させる化合物であり、前記アニオン重合開始剤は加熱することによってアニオン種を発生して、重合性化合物の硬化反応を開始させる化合物である。本発明の硬化性組成物が重合開始剤を含有すると、タックフリーとなるまでの硬化時間を短縮することができる。尚、重合開始剤は、1種を単独で、又は2種以上を組み合わせて使用することができる。
本発明の硬化性組成物には、好ましくは溶剤がさらに含有されていてもよい。溶剤としては、例えば、水、有機溶剤等が挙げられ、本発明のポリオルガノシルセスキオキサン、及び必要に応じて使用される添加物を溶解することができ、且つ重合を阻害しないものであれば特に制限されることはない。
本発明の硬化性組成物におけるカチオン硬化性化合物(本発明のポリオルガノシルセスキオキサン等)の重合反応を進行させることにより、該硬化性組成物を硬化させることができ、硬化物(「本発明の硬化物」と称する場合がある)を得ることができる。本発明の硬化物は、例えば、後述の本発明の接着シート1を被接着体に接着した後、硬化性組成物を硬化させることによって、基材上に形成された硬化物として得ることができる。硬化の方法は、周知の方法より適宜選択でき、特に限定されないが、例えば、活性エネルギー線の照射、及び/又は、加熱する方法が挙げられる。上記活性エネルギー線としては、例えば、赤外線、可視光線、紫外線、X線、電子線、α線、β線、γ線等のいずれを使用することもできる。中でも、取り扱い性に優れる点で、紫外線が好ましい。
本発明の硬化性組成物(接着剤組成物)を用いることにより、基材の少なくとも一方の面に、本発明の硬化性組成物から形成された接着剤層(「本発明の接着剤層」と称する場合がある)を有する接着シート(「本発明の接着シート1」と称する場合がある)を得ることができる。本発明の接着シート1は、特に限定されないが、例えば、基材に本発明の硬化性組成物を塗布し、さらに、必要に応じて乾燥させることによって得ることができる。塗布の方法は特に限定されず、周知慣用の手段を利用することができる。また、乾燥の手段や条件も特に限定されず、溶媒等の揮発分をできるだけ除去できる条件を設定することができ、周知慣用の手段を用いることができる。特に、本発明の硬化性組成物が、セロキサイド2021P((株)ダイセル製)100重量部に対して1重量部添加して得られる組成物の130℃における熱硬化時間が3.5分以上である重合開始剤を含有する場合は、加熱乾燥することにより、硬化反応の進行を抑制しつつ、速やかに溶媒等の揮発分を除去して接着剤層を形成することができる。そのようにして得られた接着剤層は50℃未満では接着性を有さず、半導体チップ等の電子部品へのダメージを抑制可能な温度で加熱することにより接着性を発現し、その後、速やかに硬化する特性を有する。
本発明の接着シートを用いることにより、本発明の接着シートの接着剤層に被接着層(被接着体)が貼付された積層物(「本発明の積層物」と称する場合がある)を得ることができる。上記積層物は、3層以上(少なくとも3層)で構成される積層物(積層体)であって、2層の被接着層(基材及び被接着層)と、これらの被接着層の間に位置する接着剤層(上記被接着層同士を接着する層)とを少なくとも有する積層物である。本発明の積層物は、例えば、本発明の接着シートが片面接着シートである場合には、本発明の接着シートを被接着層に貼り合わせ、次いで、加熱処理を施すことによって上記接着シート中の接着剤層を硬化させることによって、得ることができる。この場合、本発明の接着シートにおける基材が被接着層に当たる積層物が得られる。さらに、本発明の積層物は、例えば、本発明の接着シートが両面接着シートであって、接着剤層の両面に基材としての剥離ライナーが貼着されているものである場合には、本発明の接着シートの一方の剥離ライナーを剥離して露出させた接着剤層に対して被接着層に貼り合わせ、次いで、もう一方の剥離ライナーを剥離して露出させた接着剤層に対して他の被接着層を貼り合わせ、その後、加熱処理を施すことによって接着剤層を硬化させることによって、得ることができる。但し、本発明の積層物の製造方法は、これらの方法に限定されない。なお、本発明の積層物において、本発明の接着シートが本発明の接着シート1である場合、2層の被接着層間に存在する接着剤層は本発明の接着剤層である。一方、本発明の積層物において、本発明の接着シートが本発明の接着シート2である場合、被接着層は、上記アンカーコート層、及び本発明のポリオルガノシルセスキオキサンを含有する硬化性組成物(接着剤組成物)により形成された接着剤層が設けられている側に貼り合わせられる。
温度計、攪拌装置、還流冷却器、及び窒素導入管を取り付けた300mLのフラスコ(反応容器)に、窒素気流下で2-(3,4-エポキシシクロヘキシル)エチルトリメトキシシラン161.5ミリモル(39.79g)、フェニルトリメトキシシラン9ミリモル(1.69g)、及びアセトン165.9gを仕込み、50℃に昇温した。このようにして得られた混合物に、5%炭酸カリウム水溶液4.70g(炭酸カリウムとして1.7ミリモル)を5分で滴下した後、水1700ミリモル(30.60g)を20分かけて滴下した。なお、滴下の間、著しい温度上昇は起こらなかった。その後、50℃のまま、重縮合反応を窒素気流下で4時間行った。
重縮合反応後の反応溶液中の生成物を分析したところ、数平均分子量は1911であり、分子量分散度は1.47であった。上記生成物の29Si-NMRスペクトルから算出されるT2体とT3体の割合[T3体/T2体]は10.3であった。
その後、反応溶液を冷却し、下層液が中性になるまで水洗を行い、上層液を分取した後、1mmHg、50℃の条件で溶媒量が25重量%になるまで上層液から溶媒を留去して、無色透明の液状樹脂(エポキシ基含有ポリオルガノシルセスキオキサン(1)の75重量%溶液)を得た。
(アンカーコート剤の調製)
8-グリシドキシオクチルトリメトキシシラン(商品名「KBM-4803」、信越化学工業(株)製)3重量部及びプロピレングリコールモノメチルエーテルアセテート7重量部を混合し、アンカーコート剤(1)を得た。
調製例1で得られたエポキシ基含有ポリオルガノシルセスキオキサン(1)の75重量%溶液100重量部、アンチモン系スルホニウム塩(商品名「サンエイド SI-150L」、三新化学工業(株)製、セロキサイド2021P((株)ダイセル製)100重量部に対して1重量部添加して得られる組成物の130℃における熱硬化時間:5.4分)0.375重量部(固形分換算)、及びプロピレングリコールモノメチルエーテルアセテート50重量部を混合し接着剤組成物(1)を得た。
シリコンウエハ(4インチ、(株)SUMCO製)の片面に上記アンカーコート剤(1)をスピンコートで塗布し、150℃で5分加熱してアンカーコート層を形成した。続いて、上記アンカーコート層の表面に、上記接着剤組成物(1)をスピンコートで塗布し、80℃で4分加熱し、次いで、100℃で2分加熱することによって溶媒を除去して接着剤層(厚み5μm)を形成し、接着シート(1)[シリコンウエハ/アンカーコート層/接着剤層]を得た。
ガラス板(4インチ、SCHOTT日本(株)製)の片面に上記アンカーコート剤(1)をスピンコートで塗布し、150℃で5分加熱してアンカーコート層を形成した。続いて、上記アンカーコート層の表面に、上記接着剤組成物(1)をスピンコートで塗布し、80℃で4分加熱し、次いで、100℃で2分加熱することによって溶媒を除去して接着剤層(厚み5μm)を形成し、接着剤層付きガラス板[ガラス板/アンカーコート層/接着剤層]を得た。
別のガラス板(4インチ、SCHOTT日本(株)製)の片面に上記アンカーコート剤(1)をスピンコートで塗布し、150℃で5分加熱してアンカーコート層を形成し、アンカーコート層付きガラス板[ガラス板/アンカーコート層]を得た。
減圧下で、上記アンカーコート層付きガラス板のアンカーコート層面を、上記接着剤層付きガラス板の接着剤層面と合わせ、60℃に加熱しながら200g/cm2の圧力をかけて貼り合わせた後、150℃で30分加熱し、次いで、170℃で30分加熱することにより、積層物(1)[ガラス板/アンカーコート層/接着剤層/アンカーコート層/ガラス板]を得た。
(接着剤組成物の調製)
調製例1で得られたエポキシ基含有ポリオルガノシルセスキオキサン(1)の75重量%溶液100重量部、8-グリシドキシオクチルトリメトキシシラン(商品名「KBM-4803」、信越化学工業(株)製)2.25重量部、アンチモン系スルホニウム塩(商品名「サンエイド SI-150L」、三新化学工業(株)製、セロキサイド2021P((株)ダイセル製)100重量部に対して1重量部添加して得られる組成物の130℃における熱硬化時間:5.4分)0.375重量部(固形分換算)、及びプロピレングリコールモノメチルエーテルアセテート50重量部を混合し、接着剤組成物(2)を得た。
シリコンウエハ(4インチ、(株)SUMCO製)の片面に上記接着剤組成物(2)をスピンコートで塗布し、80℃で4分加熱し、次いで、100℃で2分加熱することによって溶媒を除去して接着剤層を形成し、接着シート(2)[シリコンウエハ/エポキシ基含有シラン化合物含有接着剤層]を得た。
ガラス板(4インチ、SCHOTT日本(株)製)の片面に上記接着剤組成物(2)をスピンコートで塗布し、80℃で4分加熱し、次いで、100℃で2分加熱することによって溶媒を除去して接着剤層(厚み5μm)を形成し、接着剤層付きガラス板[ガラス板/エポキシ基含有シラン化合物含有接着剤層]を得た。
別のガラス板(4インチ、SCHOTT日本(株)製)の片面に上記アンカーコート剤(1)をスピンコートで塗布し、150℃で5分加熱してアンカーコート層を形成し、アンカーコート層付きガラス板[ガラス板/アンカーコート層]を得た。
減圧下で、上記アンカーコート層付きガラス板のアンカーコート層面を、上記エポキシ基含有シラン化合物含有接着剤層付きガラス板のエポキシ基含有シラン化合物含有接着剤層面と合わせ、60℃に加熱しながら200g/cm2の圧力をかけて貼り合わせた後、150℃で30分加熱し、次いで、170℃で30分加熱することにより、積層物(2)[ガラス板/アンカーコート層/エポキシ基含有シラン化合物含有接着剤層/ガラス板]を得た。
(アンカーコート剤の調製)
3-グリシドキシプロピルトリエトキシシラン(商品名「KBE-403」、信越化学工業(株)製)3重量部、及びプロピレングリコールモノメチルエーテルアセテート7重量部を混合し、アンカーコート剤(2)を得た。
調製例1で得られたエポキシ基含有ポリオルガノシルセスキオキサン(1)の75重量%溶液100重量部、3-グリシドキシプロピルトリエトキシシラン(商品名「KBE-403」、信越化学工業(株)製)2.25重量部、アンチモン系スルホニウム塩(商品名「サンエイド SI-150L」、三新化学工業(株)製、セロキサイド2021P((株)ダイセル製)100重量部に対して1重量部添加して得られる組成物の130℃における熱硬化時間:5.4分)0.375重量部(固形分換算)、及びプロピレングリコールモノメチルエーテルアセテート50重量部を混合し、接着剤組成物(3)を得た。
アンカーコート剤(1)の代わりにアンカーコート剤(2)を、接着剤組成物(1)の代わりに接着剤組成物(3)を用いたこと以外は、実施例1と同様にして、接着シート(3)[シリコンウエハ/アンカーコート層/エポキシ基含有シラン化合物含有接着剤層]を得た。
アンカーコート剤(1)の代わりにアンカーコート剤(2)を、接着剤組成物(1)の代わりに接着剤組成物(3)を用いたこと以外は、実施例1と同様にして、積層物(3)[ガラス板/アンカーコート層/エポキシ基含有シラン化合物含有接着剤層/アンカーコート層/ガラス板]を得た。
(接着シートの作製)
接着剤組成物(2)の代わりに接着剤組成物(3)を用いたこと以外は、実施例2と同様にして、接着シート(4)[シリコンウエハ/エポキシ基含有シラン化合物含有接着剤層]を得た。
アンカーコート剤(1)の代わりにアンカーコート剤(2)を、接着剤組成物(2)の代わりに接着剤組成物(3)を用いたこと以外は、実施例2と同様にして、積層物(4)[ガラス板/アンカーコート層/エポキシ基含有シラン化合物含有接着剤層/ガラス板]を得た。
(接着シートの作製)
接着剤組成物(2)の代わりに接着剤組成物(1)を用いたこと以外は、実施例2と同様にして、接着シート(5)[シリコンウエハ/接着剤層]を得た。
アンカーコート層を設けなかったこと、及び接着剤組成物(2)の代わりに接着剤組成物(1)を用いたこと以外は、実施例2と同様にして、積層物(5)[ガラス板/接着剤層/ガラス板]を得た。
実施例及び比較例で得られた接着剤組成物を150℃で30分加熱し、次いで、170℃で30分加熱して得られた接着剤層の硬化物について、熱分析装置(商品名「TG-DTA6300」、セイコーインスツル(株)製)を用いて熱重量分析し、熱分解温度を測定した。尚、熱分解温度とは、図1に示すように、初期の重量減少のない、或いは漸減しているところ(図中のAで示される範囲)の接線と、急激に重量減少が起こっているところ(図中のBで示される範囲)の変曲点の接線が交叉するところの温度である。そして、耐熱性を下記基準で評価した。結果を表1の「耐熱性」の欄に示す。
〇(良好):熱分解温度が260℃以上
×(不良):熱分解温度が260℃未満
実施例及び比較例で得られた接着シートを150℃で30分加熱し、次いで、170℃で30分加熱して接着剤層を硬化させた。得られた接着剤層の硬化物について、碁盤目テープ試験(JIS K5400-8.5準拠)によってガラス板への密着性を評価した。そして、以下の基準で評価した。結果を表1の「密着性」の欄に示す。
○(良好):シリコンウエハからの接着剤層の剥離は見られない
×(不良):シリコンウエハからの接着剤層の剥離があった
実施例及び比較例で得られた積層物の接着界面にカミソリ刃(商品名「片刃トリミング用カミソリ」、日新EM(株)製)を挿入し、積層物の接着界面を観察し、以下の基準で評価した。結果を表1の「接着性」の欄に示す。なお、実施例2及び比較例2については、アンカーコート層を有する側の接着界面を観察した。
○(良好):界面での剥離は生じなかった
×(不良):界面で剥離が発生した
実施例及び比較例で得られた接着シートを150℃で30分加熱し、次いで、170℃で30分加熱して接着剤層を硬化させた。硬化後の接着剤層に冷熱衝撃を付与し、クラックの発生の有無を確認し、以下の基準で評価した。なお、耐クラック性は、200℃で30分加熱し、続いて室温まで急冷して冷熱衝撃を付与したものと、250℃で30分加熱し、続いて室温まで急冷して冷熱衝撃を付与したものについて評価を行った。結果を表1の「耐クラック性(200℃)」、及び「耐クラック性(250℃)」の欄にそれぞれ示す。
○(良好):接着剤層にクラックの発生は見られなかった
×(不良):接着剤層にクラックが発生した
(接着剤組成物の調製)
調製例1で得られたエポキシ基含有ポリオルガノシルセスキオキサン(1)100重量部、プロピレングリコールモノメチルエーテルアセテート50重量部、アンチモン系スルホニウム塩(商品名「SI-150L」、三新化学工業(株)製、セロキサイド2021P((株)ダイセル製)100重量部に対して1重量部添加して得られる組成物の130℃における熱硬化時間:5.4分)0.45重量部(固形分換算)、及び(4-ヒドロキシフェニル)ジメチルスルホニウムメチルサルファイト(商品名「サンエイドSI助剤」、三新化学工業(株)製)0.05重量部を混合し、接着剤組成物(I)を得た。
シリコン板(サイズ:2cm×5cm、(株)SUMCO製、直径100mmのシリコンウエハをダイシングして得た)にシランカップリング剤(商品名「KBE403」、信越化学工業(株)製)をスピンコートで塗布し、120℃で5分加熱して、シランカップリング剤層付きシリコン板を得た。
シランカップリング剤層付きシリコン板のシランカップリング剤層表面に接着剤組成物(I)をスピンコートで塗布し、80℃で4分、次いで100℃で2分加熱して残留する溶剤を除去して、接着剤層(I)付きシリコン板[接着剤層(I)/シランカップリング剤層/シリコン板]を得た。接着剤層(I)の膜厚は5~6μmであった。
ガラス板(4インチ、SCHOTT日本(株)製)にシランカップリング剤(商品名「KBE403」、信越化学工業(株)製)をスピンコートで塗布し、120℃で5分加熱して、シランカップリング剤層付きガラス板を得た。
減圧下で、得られたシランカップリング剤層付きガラス板のシランカップリング剤層面を、上記(接着剤層の作製)で得られた接着剤層(I)付きシリコン板(室温で24時間保管後)の接着剤層(I)面と合わせ、60℃に加熱しながら200g/cm2の圧力をかけて貼り合わせた後、150℃で30分加熱し、次いで、170℃で30分加熱することにより、積層物(I)[シリコン板/シランカップリング剤層/接着層(I)/シランカップリング剤層/ガラス板]を得た。
(耐熱性)
接着剤組成物(I)を150℃で30分加熱し、次いで、170℃で30分加熱して得られた硬化物について、熱分析装置(商品名「TG-DTA6300」、セイコーインスツル(株)製)を用いて熱重量分析した結果、熱分解温度(T)は、260℃以上であり、耐熱性に優れていることがわかった。尚、熱分解温度(T)とは、図1に示すように、初期の重量減少のない、或いは漸減しているところ(図中のAで示される範囲)の接線と、急激に重量減少が起こっているところ(図中のBで示される範囲)の変曲点の接線が交叉するところの温度である
(密着性)
接着剤層(I)付きシリコン板における接着剤層(I)を150℃で30分加熱し、次いで、170℃で30分加熱して硬化させた。得られた接着剤層(I)の硬化物について、碁盤目テープ試験(JIS K5400-8.5準拠)によってシリコン板への密着性を評価した。その結果、シリコン板からの剥離は見られず、密着性に優れることが確認された。
(接着性)
積層物(I)の接着界面にカミソリ刃(商品名「片刃トリミング用カミソリ」、日新EM(株)製)を挿入したところ、界面での剥離は生じず、接着層は接着性に優れることが確認された。
(接着剤組成物の調製)
調製例1で得られたエポキシ基含有ポリオルガノシルセスキオキサン(1)100重量部、プロピレングリコールモノメチルエーテルアセテート50重量部、アンチモン系スルホニウム塩(商品名「SI-150L」、三新化学工業(株)製、セロキサイド2021P((株)ダイセル製)100重量部に対して1重量部添加して得られる組成物の130℃における熱硬化時間:5.4分)0.45重量部(固形分換算)、(4-ヒドロキシフェニル)ジメチルスルホニウムメチルサルファイト(商品名「サンエイドSI助剤」、三新化学工業(株)製)0.05重量部、及び3,9-ビス(2,6-ジ-t-ブチル-4-メチルフェノキシ)-2,4,8,10-テトラオキサ-3,9-ジホスファスピロ[5.5]ウンデカン(商品名「アデカスタブ PEP-36」、(株)ADEKA製)0.5重量部を混合し、接着剤組成物(II)を得た。
接着剤組成物(I)に代えて接着剤組成物(II)を使用した以外は実施例3と同様にして接着剤層(II)付きシリコン板を得た。接着剤層(II)の膜厚は5~6μmであった。
減圧下で、実施例3と同様の方法で作製したシランカップリング剤層付きガラス板のシランカップリング剤層面を、上記(接着剤層の作製)で得られた接着剤層(II)付きシリコン板(室温で72時間保管後)の接着剤層(II)面と合わせ、60℃に加熱しながら200g/cm2の圧力をかけて貼り合わせた後、150℃で30分加熱し、次いで、170℃で30分加熱することにより、積層物(II)[シリコン板/シランカップリング剤層/接着層(II)/シランカップリング剤層/ガラス板]を得た。
(耐熱性)
熱分解温度(T)は、260℃以上であり、耐熱性に優れていることがわかった。
(密着性)
シリコン板からの剥離は見られず、密着性に優れることが確認された。
(接着性)
界面での剥離は生じず、接着層は接着性に優れることが確認された。
(接着剤組成物の調製)
調製例1で得られたエポキシ基含有ポリオルガノシルセスキオキサン(1)100重量部、プロピレングリコールモノメチルエーテルアセテート50重量部、アンチモン系スルホニウム塩(商品名「SI-150L」、及び三新化学工業(株)製、セロキサイド2021P((株)ダイセル製)100重量部に対して1重量部添加して得られる組成物の130℃における熱硬化時間:5.4分)0.5重量部(固形分換算)を混合し、接着剤組成物(III)を得た。
接着剤組成物(I)に代えて接着剤組成物(III)を使用した以外は実施例3と同様にして接着剤層(III)付きシリコン板を得た。接着剤層(III)の膜厚は5~6μmであった。
減圧下で、実施例3と同様の方法で作製したシランカップリング剤層付きガラス板のシランカップリング剤層面を、上記(接着剤層の作製)で得られた接着剤層(III)付きシリコン板(室温で72時間保管後)の接着剤層(III)面と合わせ、60℃に加熱しながら200g/cm2の圧力をかけて貼り合わせようとしたが、貼り合わせができなかった。
Claims (14)
- 下記式(X)
で表される化合物(A)又は重合安定剤(B)、並びに、下記構成を有し、数平均分子量が1000~3000、分子量分散度(重量平均分子量/数平均分子量)が1.0~3.0であるポリオルガノシルセスキオキサンを含有することを特徴とする硬化性組成物。
ポリオルガノシルセスキオキサンの構成:下記式(1)
で表される構成単位を有し、下記式(I)
で表される構成単位と、下記式(II)
で表される構成単位の割合[式(I)で表される構成単位/式(II)で表される構成単位]が5以上であり、シロキサン構成単位の全量に対する上記式(1)で表される構成単位及び下記式(4)
で表される構成単位の割合が55~100モル%である - 上記R2が、置換若しくは無置換のアリール基である請求項2に記載の硬化性組成物。
- 化合物(A)が、下記式(X1)
で表される化合物及び下記式(X2)
で表される化合物からなる群より選択される少なくとも1種のエポキシ基含有シラン化合物である、請求項1~4のいずれか1項に記載の硬化性組成物。 - さらに、重合開始剤を含有する請求項1~5のいずれか1項に記載の硬化性組成物。
- 重合安定剤(B)を含有し、さらにシランカップリング剤を含有する請求項1~6のいずれか1項に記載の硬化性組成物。
- 接着剤組成物である請求項1~7のいずれか1項に記載の硬化性組成物。
- 基材の少なくとも一方の面に、請求項8に記載の硬化性組成物から形成された接着剤層を有する接着シート。
- 請求項1~8のいずれか1項に記載の硬化性組成物を硬化させて得られる硬化物。
- 基材の少なくとも一方の面に、下記式(X)
で表される化合物(A)を含有するアンカーコート層、及び、下記構成を有し、数平均分子量が1000~3000、分子量分散度(重量平均分子量/数平均分子量)が1.0~3.0であるポリオルガノシルセスキオキサンを含有する硬化性組成物により形成された接着剤層を有し、前記接着剤層が前記アンカーコート層の表面上に設けられていることを特徴とする接着シート。
ポリオルガノシルセスキオキサンの構成:下記式(1)
で表される構成単位を有し、下記式(I)
で表される構成単位と、下記式(II)
で表される構成単位の割合[式(I)で表される構成単位/式(II)で表される構成単位]が5以上であり、シロキサン構成単位の全量に対する上記式(1)で表される構成単位及び下記式(4)
で表される構成単位の割合が55~100モル%である - 請求項9又は11に記載の接着シートの接着剤層に被接着層が貼付された積層物。
- 基材の少なくとも一方の面に、下記式(X)
で表される化合物(A)を含有する組成物を用いてアンカーコート層を形成する工程、及び、前記アンカーコート層の表面上に、下記構成を有し、数平均分子量が1000~3000、分子量分散度(重量平均分子量/数平均分子量)が1.0~3.0であるポリオルガノシルセスキオキサンを含有する硬化性組成物を用いて接着剤層を形成する工程を含むことを特徴とする請求項11に記載の接着シートの製造方法。
ポリオルガノシルセスキオキサンの構成:下記式(1)
で表される構成単位を有し、下記式(I)
で表される構成単位と、下記式(II)
で表される構成単位の割合[式(I)で表される構成単位/式(II)で表される構成単位]が5以上であり、シロキサン構成単位の全量に対する上記式(1)で表される構成単位及び下記式(4)
で表される構成単位の割合が55~100モル%である - 請求項12に記載の積層物を有する装置。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2017525217A JP6778679B2 (ja) | 2015-06-17 | 2016-06-13 | 硬化性組成物、接着シート、硬化物、積層物、接着シートの製造方法、及び装置 |
KR1020177035299A KR102616534B1 (ko) | 2015-06-17 | 2016-06-13 | 경화성 조성물, 접착 시트, 경화물, 적층물, 접착 시트의 제조 방법, 및 장치 |
CN201680035123.6A CN107683299B (zh) | 2015-06-17 | 2016-06-13 | 固化性组合物、粘接片、固化物、叠层物、粘接片的制造方法及装置 |
EP16811588.9A EP3312211A4 (en) | 2015-06-17 | 2016-06-13 | CURABLE COMPOSITION, ADHESIVE SHEET, CURED PRODUCT, LAMINATE, METHOD FOR PRODUCING ADHESIVE SHEET, AND DEVICE |
US15/737,229 US11066586B2 (en) | 2015-06-17 | 2016-06-13 | Curable composition, adhesive sheet, cured product, laminate, method for producing adhesive sheet, and device |
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2015-122344 | 2015-06-17 | ||
JP2015122347 | 2015-06-17 | ||
JP2015122344 | 2015-06-17 | ||
JP2015-122347 | 2015-06-17 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2016204114A1 true WO2016204114A1 (ja) | 2016-12-22 |
Family
ID=57545348
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2016/067524 WO2016204114A1 (ja) | 2015-06-17 | 2016-06-13 | 硬化性組成物、接着シート、硬化物、積層物、接着シートの製造方法、及び装置 |
Country Status (7)
Country | Link |
---|---|
US (1) | US11066586B2 (ja) |
EP (1) | EP3312211A4 (ja) |
JP (1) | JP6778679B2 (ja) |
KR (1) | KR102616534B1 (ja) |
CN (1) | CN107683299B (ja) |
TW (1) | TWI766838B (ja) |
WO (1) | WO2016204114A1 (ja) |
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2017226746A (ja) * | 2016-06-22 | 2017-12-28 | 株式会社ダイセル | シルセスキオキサン |
JP2018095818A (ja) * | 2016-12-16 | 2018-06-21 | 株式会社ダイセル | 硬化性組成物、接着シート、硬化物、積層物、接着シートの製造方法、及び装置 |
WO2018212257A1 (ja) * | 2017-05-17 | 2018-11-22 | 株式会社ダイセル | 接着剤組成物、硬化物、積層体、及び装置 |
KR20200007893A (ko) * | 2017-05-17 | 2020-01-22 | 주식회사 다이셀 | 접착제용 경화성 조성물, 접착 시트, 경화물, 적층물 및 장치 |
JP2020194820A (ja) * | 2019-05-24 | 2020-12-03 | 株式会社ダイセル | 半導体装置 |
US11149118B2 (en) * | 2017-05-09 | 2021-10-19 | Daicel Corporation | Insulating film forming composition, insulating film, and semiconductor device provided with insulating film |
WO2023276638A1 (ja) * | 2021-06-30 | 2023-01-05 | ダイキン工業株式会社 | 積層体の製造方法および積層体 |
WO2023008492A1 (ja) * | 2021-07-28 | 2023-02-02 | 株式会社カネカ | ハードコートフィルムおよびその製造方法、ならびにディスプレイ |
WO2024034379A1 (ja) * | 2022-08-08 | 2024-02-15 | 日東シンコー株式会社 | 絶縁シート及びモータ |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR102143690B1 (ko) * | 2018-06-07 | 2020-08-11 | 대한폴리텍(주) | 준불연 단열재 및 이의 제조방법 |
EP3628700B1 (de) * | 2018-09-27 | 2022-06-01 | Evonik Operations GmbH | 3-glycidyloxypropylalkoxysilanoligomere-enthaltende zusammensetzung, verfahren zu deren herstellung und deren verwendung |
WO2020067452A1 (ja) * | 2018-09-28 | 2020-04-02 | リンテック株式会社 | 硬化性組成物、硬化物、及び、硬化性組成物の使用方法 |
WO2020175338A1 (ja) * | 2019-02-27 | 2020-09-03 | 富士フイルム株式会社 | ポリオルガノシルセスキオキサン、及びハードコート層形成用組成物 |
Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006131850A (ja) * | 2004-11-09 | 2006-05-25 | Toagosei Co Ltd | 熱硬化性組成物 |
CN101787132A (zh) * | 2010-03-29 | 2010-07-28 | 中科院广州化学有限公司 | 一种有机硅杂化环氧树脂及其制备方法和应用 |
JP2011256326A (ja) * | 2010-06-11 | 2011-12-22 | Nippon Kayaku Co Ltd | 硬化性樹脂組成物およびその硬化物 |
JP2012087249A (ja) * | 2010-10-21 | 2012-05-10 | Nippon Kayaku Co Ltd | 硬化性樹脂組成物およびその硬化物 |
JP2012172014A (ja) * | 2011-02-18 | 2012-09-10 | Yokohama Rubber Co Ltd:The | 複合樹脂シート |
JP2014169433A (ja) * | 2013-02-08 | 2014-09-18 | Toray Fine Chemicals Co Ltd | シロキサン共重合体およびその製造方法 |
WO2015053397A1 (ja) * | 2013-10-11 | 2015-04-16 | 関西ペイント株式会社 | 光カチオン硬化性塗料組成物及び塗膜形成方法、その塗装物品 |
WO2015087686A1 (ja) * | 2013-12-13 | 2015-06-18 | 株式会社ダイセル | ポリオルガノシルセスキオキサン、ハードコートフィルム、接着シート、及び積層物 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5066484B2 (ja) | 2008-05-22 | 2012-11-07 | シーアイ化成株式会社 | 積層体及びその製造方法 |
JP5201048B2 (ja) | 2009-03-25 | 2013-06-05 | 富士通株式会社 | 半導体装置とその製造方法 |
US9617449B2 (en) * | 2012-06-12 | 2017-04-11 | Korea Advanced Institute Of Science And Technology | Siloxane hard coating resin |
KR101546729B1 (ko) * | 2013-12-11 | 2015-08-24 | 한국과학기술원 | 에폭시 실록산 수지 조성물을 이용한 하드코팅막 및 이의 제조 방법 |
JP6317978B2 (ja) * | 2014-03-31 | 2018-04-25 | 株式会社ダイセル | 硬化性組成物及び成形体 |
-
2016
- 2016-06-13 US US15/737,229 patent/US11066586B2/en active Active
- 2016-06-13 CN CN201680035123.6A patent/CN107683299B/zh active Active
- 2016-06-13 WO PCT/JP2016/067524 patent/WO2016204114A1/ja active Application Filing
- 2016-06-13 JP JP2017525217A patent/JP6778679B2/ja active Active
- 2016-06-13 KR KR1020177035299A patent/KR102616534B1/ko active IP Right Grant
- 2016-06-13 EP EP16811588.9A patent/EP3312211A4/en active Pending
- 2016-06-17 TW TW105119148A patent/TWI766838B/zh active
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006131850A (ja) * | 2004-11-09 | 2006-05-25 | Toagosei Co Ltd | 熱硬化性組成物 |
CN101787132A (zh) * | 2010-03-29 | 2010-07-28 | 中科院广州化学有限公司 | 一种有机硅杂化环氧树脂及其制备方法和应用 |
JP2011256326A (ja) * | 2010-06-11 | 2011-12-22 | Nippon Kayaku Co Ltd | 硬化性樹脂組成物およびその硬化物 |
JP2012087249A (ja) * | 2010-10-21 | 2012-05-10 | Nippon Kayaku Co Ltd | 硬化性樹脂組成物およびその硬化物 |
JP2012172014A (ja) * | 2011-02-18 | 2012-09-10 | Yokohama Rubber Co Ltd:The | 複合樹脂シート |
JP2014169433A (ja) * | 2013-02-08 | 2014-09-18 | Toray Fine Chemicals Co Ltd | シロキサン共重合体およびその製造方法 |
WO2015053397A1 (ja) * | 2013-10-11 | 2015-04-16 | 関西ペイント株式会社 | 光カチオン硬化性塗料組成物及び塗膜形成方法、その塗装物品 |
WO2015087686A1 (ja) * | 2013-12-13 | 2015-06-18 | 株式会社ダイセル | ポリオルガノシルセスキオキサン、ハードコートフィルム、接着シート、及び積層物 |
Non-Patent Citations (1)
Title |
---|
See also references of EP3312211A4 * |
Cited By (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2017226746A (ja) * | 2016-06-22 | 2017-12-28 | 株式会社ダイセル | シルセスキオキサン |
JP2018095818A (ja) * | 2016-12-16 | 2018-06-21 | 株式会社ダイセル | 硬化性組成物、接着シート、硬化物、積層物、接着シートの製造方法、及び装置 |
JP7069448B2 (ja) | 2016-12-16 | 2022-05-18 | 株式会社ダイセル | 硬化性組成物、接着シート、硬化物、積層物、接着シートの製造方法、及び装置 |
US11149118B2 (en) * | 2017-05-09 | 2021-10-19 | Daicel Corporation | Insulating film forming composition, insulating film, and semiconductor device provided with insulating film |
KR20200007893A (ko) * | 2017-05-17 | 2020-01-22 | 주식회사 다이셀 | 접착제용 경화성 조성물, 접착 시트, 경화물, 적층물 및 장치 |
JP7198747B2 (ja) | 2017-05-17 | 2023-01-04 | 株式会社ダイセル | 接着剤組成物、硬化物、積層体、及び装置 |
JPWO2018212257A1 (ja) * | 2017-05-17 | 2020-03-26 | 株式会社ダイセル | 接着剤組成物、硬化物、積層体、及び装置 |
KR102587545B1 (ko) * | 2017-05-17 | 2023-10-11 | 주식회사 다이셀 | 접착제 조성물, 경화물, 적층체 및 장치 |
CN110651016A (zh) * | 2017-05-17 | 2020-01-03 | 株式会社大赛璐 | 粘接剂组合物、固化物、叠层体以及装置 |
WO2018212257A1 (ja) * | 2017-05-17 | 2018-11-22 | 株式会社ダイセル | 接着剤組成物、硬化物、積層体、及び装置 |
CN110651016B (zh) * | 2017-05-17 | 2022-06-24 | 株式会社大赛璐 | 粘接剂组合物、固化物、叠层体以及装置 |
KR20200010317A (ko) * | 2017-05-17 | 2020-01-30 | 주식회사 다이셀 | 접착제 조성물, 경화물, 적층체 및 장치 |
KR102560345B1 (ko) | 2017-05-17 | 2023-07-28 | 주식회사 다이셀 | 접착제용 경화성 조성물, 접착 시트, 경화물, 적층물 및 장치 |
JP7324049B2 (ja) | 2019-05-24 | 2023-08-09 | 株式会社ダイセル | 半導体装置 |
JP2020194820A (ja) * | 2019-05-24 | 2020-12-03 | 株式会社ダイセル | 半導体装置 |
WO2023276638A1 (ja) * | 2021-06-30 | 2023-01-05 | ダイキン工業株式会社 | 積層体の製造方法および積層体 |
WO2023008492A1 (ja) * | 2021-07-28 | 2023-02-02 | 株式会社カネカ | ハードコートフィルムおよびその製造方法、ならびにディスプレイ |
WO2024034379A1 (ja) * | 2022-08-08 | 2024-02-15 | 日東シンコー株式会社 | 絶縁シート及びモータ |
Also Published As
Publication number | Publication date |
---|---|
EP3312211A1 (en) | 2018-04-25 |
US11066586B2 (en) | 2021-07-20 |
TWI766838B (zh) | 2022-06-11 |
JPWO2016204114A1 (ja) | 2018-05-10 |
KR102616534B1 (ko) | 2023-12-26 |
EP3312211A4 (en) | 2019-01-23 |
CN107683299B (zh) | 2020-04-07 |
JP6778679B2 (ja) | 2020-11-04 |
TW201706390A (zh) | 2017-02-16 |
KR20180018530A (ko) | 2018-02-21 |
CN107683299A (zh) | 2018-02-09 |
US20180171193A1 (en) | 2018-06-21 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP6778679B2 (ja) | 硬化性組成物、接着シート、硬化物、積層物、接着シートの製造方法、及び装置 | |
JP6557522B2 (ja) | ハードコート層形成用硬化性組成物、ハードコートフィルム、ハードコートフィルムの製造方法、接着剤組成物、硬化物、接着シート、積層物、及び装置 | |
JP6796582B2 (ja) | 硬化物の製造方法、硬化物、及び前記硬化物を含む積層物 | |
JP6557521B2 (ja) | ポリオルガノシルセスキオキサン、ハードコートフィルム、接着シート、積層物及び装置 | |
JP7160803B2 (ja) | 接着剤用硬化性組成物、接着シート、硬化物、積層物、及び装置 | |
JP6957132B2 (ja) | シルセスキオキサン | |
JP7161013B2 (ja) | 硬化性組成物、接着シート、硬化物、積層物、接着シートの製造方法、及び装置 | |
JP6785538B2 (ja) | ポリオルガノシルセスキオキサン、硬化性組成物、接着シート、積層物及び装置 | |
JP6652791B2 (ja) | 硬化性組成物、接着シート、積層物及び装置 | |
JP6847597B2 (ja) | シルセスキオキサン | |
JP6740226B2 (ja) | 硬化性組成物 | |
JP7069449B2 (ja) | 硬化性組成物、接着シート、硬化物、積層物、及び装置 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
121 | Ep: the epo has been informed by wipo that ep was designated in this application |
Ref document number: 16811588 Country of ref document: EP Kind code of ref document: A1 |
|
ENP | Entry into the national phase |
Ref document number: 2017525217 Country of ref document: JP Kind code of ref document: A |
|
ENP | Entry into the national phase |
Ref document number: 20177035299 Country of ref document: KR Kind code of ref document: A |
|
WWE | Wipo information: entry into national phase |
Ref document number: 15737229 Country of ref document: US |
|
NENP | Non-entry into the national phase |
Ref country code: DE |
|
WWE | Wipo information: entry into national phase |
Ref document number: 2016811588 Country of ref document: EP |