WO2016178480A1 - 진공밸브 - Google Patents
진공밸브 Download PDFInfo
- Publication number
- WO2016178480A1 WO2016178480A1 PCT/KR2016/003883 KR2016003883W WO2016178480A1 WO 2016178480 A1 WO2016178480 A1 WO 2016178480A1 KR 2016003883 W KR2016003883 W KR 2016003883W WO 2016178480 A1 WO2016178480 A1 WO 2016178480A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- vertical
- blade
- moving
- movement
- horizontal
- Prior art date
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Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
- F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
- F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
- F16K3/0218—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with only one sealing face
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
- F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
- F16K3/0254—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor being operated by particular means
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
- F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
- F16K3/16—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together
- F16K3/18—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
- F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
- F16K3/16—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together
- F16K3/18—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members
- F16K3/184—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members by means of cams
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
- F16K3/30—Details
- F16K3/314—Forms or constructions of slides; Attachment of the slide to the spindle
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
- F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67126—Apparatus for sealing, encapsulating, glassing, decapsulating or the like
Definitions
- Vertical moving unit 400 for moving to; and horizontal movement unit coupled to the vertical movement unit 400, the vertical movement guide grooves (510, 510 ⁇ ) are formed on each side in the vertical direction perforated respectively ( 500); And, provided in the horizontal moving unit 500, by the pneumatic phase, A second piston 610 moved in a direction, a movement guide block 620 formed under the second piston 610, and formed on both sides of the movement guide block 620 so that the vertical movement guide groove 510 is formed.
- a horizontal moving unit 600 having cam rollers 630 and 630 ⁇ passing through 510 ', respectively; and the vertical moving part 400 and the horizontal moving part 500 are disposed below the valve housing 100.
- the cam rollers 630 and 630 ⁇ passed through the vertical movement guide grooves 510 and 510 ⁇ are inserted into both inner side surfaces thereof so that the blades move up and down of the horizontal movement unit 600.
- the opening and closing guide grooves 710 and 710 ⁇ for guiding the 200 to be moved forward and backward are characterized in that they are composed of a main body bracket 700 which is formed to be inclined.
- the vertical movement portion and the horizontal movement portion to serve as a cylinder formed to accommodate the inside of the body bracket, there is an advantage that can be made in a compact type to receive less space constraints.
- Figure 6 is a state diagram showing a state before operation of the vacuum valve according to an embodiment of the present invention
- the main shaft 300 is a component that is coupled to the valve blade 100 through the shaft insertion hole (not shown), as shown in Figure 3 or 4, the vertical moving part 400 and the horizontal
- the driving force of the moving part 500 is transmitted to the blade 200 to enable movement of the blade 200 in the vertical or horizontal direction.
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Sliding Valves (AREA)
- Details Of Valves (AREA)
- Mechanically-Actuated Valves (AREA)
- Fluid-Driven Valves (AREA)
Abstract
Description
Claims (5)
- 내측에 구동공간(110)이 형성되고, 양측면에는 대상물이 이동되도록 이동통로부(120, 120`)가 각각 타공형성되는 밸브하우징(100);상기 구동공간(110)에 설치되어 내측으로부터 상기 이동통로부(120)를 개폐하는 블레이드(200);상기 블레이드(200) 후면에 결합되는 메인샤프트(300);상기 밸브하우징(100) 하부에 형성되되, 내부에 공압에 의해 상, 하방향으로 이동되는 제1 피스톤(410)과 상기 메인샤프트(300)가 연결되어 상기 블레이드(200)를 상, 하방향으로 이동시키는 수직이동부(400);상기 수직이동부(400) 하부에 결합되되, 양측면에 수직방향으로 각각 타공형성되는 수직이동가이드홈(510, 510`)이 구비되는 수평이동부(500);상기 수평이동부(500) 내부에 구비되되, 공압에 의해 상, 하방향으로 이동되는 제2 피스톤(610)와, 상기 제2 피스톤(610) 하부에 형성되는 이동가이드블럭(620)과, 상기 이동가이드블럭(620) 양측에 형성되어 상기 수직이동가이드홈(510, 510`)을 각각 통과하는 캠롤러(630, 630`)가 구비되는 수평이동유닛(600);상기 밸브하우징(100) 하부에 상기 수직이동부(400)와 수평이동부(500)가 수용되도록 형성되되, 양내측면에는 상기 수직이동가이드홈(510, 510`)으로부터 통과된 상기 캠롤러(630, 630`)가 삽입되어 상기 수평이동유닛(600)의 상, 하 이동에 따라 상기 블레이드(200)가 전, 후방향으로 이동되는 것을 가이드하는 개폐유도홈(710, 710`)이 각각 경사지게 형성되는 본체브라켓(700);으로 구성되는 것을 특징으로 하는 진공밸브(1).
- 청구항 1에 있어서,상기 개폐유도홈(710, 710`)의 하부는 상기 밸브하우징(100)의 후면방향으로 함몰형성되는 폐쇄홈구간(710a, 710a`)이 구성되고,상기 개폐유도홈(710, 710`)의 상부는 상기 폐쇄홈구간(710a, 710a`)으로부터 연장형성되어 상기 밸브하우징(100)의 전면방향으로 함몰형성되는 개방홈구간(710b, 710b`)이 구성되는 것을 특징으로 하는 진공밸브(1).
- 청구항 2에 있어서,상기 폐쇄홈구간(710a, 710a`)과 개방홈구간(710b, 710b`)의 경계면에는 상기 캠롤러(630, 630`)가 상기 개방홈구간(710b, 710b`)에 위치한 상태에서 상기 캠롤러(630, 630`)가 상기 개방홈구간(710b, 710b`)으로부터 임의적으로 이탈하는 것을 방지하도록 이탈방지돌기(711, 711`)가 돌출형성되는 것을 특징으로 하는 진공밸브(1).
- 청구항 1에 있어서,상기 본체브라켓(700)의 양내측면에는 삽입홈(720, 720`)이 각각 함몰형성되고,상기 수직이동부(400)의 양외측면에는 상기 삽입홈(720, 720`)에 삽입되어 상기 삽입홈(720, 720`)을 중심으로 상기 수직이동부(400)가 축회전되도록 회전롤러부(420, 420`)가 각각 형성되는 것을 특징으로 하는 진공밸브(1).
- 청구항 1에 있어서,상기 블레이드(200) 후면에는 상기 블레이드(200)의 상, 하방향의 이동을 가이드하는 가이드샤프트(310, 310`)가 대칭을 이루며 각각 형성되고,상기 이동가이드블럭(620)에는 가이드홈(621, 621`)이 대칭을 이루며 각각 수직방향으로 타공형성되고,상기 수평이동부(500) 하부 내측에는 상기 가이드홈(621, 621`)에 각각 삽입되어 상기 수평이동유닛(600)의 수직이동을 가이드하는 고정축부재(640, 640`)이 돌출형성되는 특징으로 하는 진공밸브(1).
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2017557382A JP6758717B2 (ja) | 2015-05-04 | 2016-04-14 | 真空バルブ |
US15/571,713 US10563775B2 (en) | 2015-05-04 | 2016-04-14 | Vacuum valve |
CN201680029799.4A CN107667241B (zh) | 2015-05-04 | 2016-04-14 | 真空阀 |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR10-2015-0062477 | 2015-05-04 | ||
KR1020150062477A KR101725251B1 (ko) | 2015-05-04 | 2015-05-04 | 진공밸브 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2016178480A1 true WO2016178480A1 (ko) | 2016-11-10 |
Family
ID=57218508
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/KR2016/003883 WO2016178480A1 (ko) | 2015-05-04 | 2016-04-14 | 진공밸브 |
Country Status (5)
Country | Link |
---|---|
US (1) | US10563775B2 (ko) |
JP (1) | JP6758717B2 (ko) |
KR (1) | KR101725251B1 (ko) |
CN (1) | CN107667241B (ko) |
WO (1) | WO2016178480A1 (ko) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR102133008B1 (ko) * | 2018-05-31 | 2020-07-10 | 주식회사 에이씨엔 | 공간 절약형 멀티 플런저 게이트 밸브 시스템 |
DE102019001115A1 (de) * | 2019-02-15 | 2020-08-20 | Vat Holding Ag | Torventil mit Kulissenführung |
WO2020225844A1 (ja) * | 2019-05-07 | 2020-11-12 | 入江工研株式会社 | ゲートバルブ |
DE102021129883A1 (de) * | 2021-11-16 | 2023-05-17 | Vat Holding Ag | Ventilplatte |
KR102574233B1 (ko) * | 2023-03-14 | 2023-09-04 | 주식회사 에스알티 | U motion 게이트밸브 |
Citations (5)
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JP3033529B2 (ja) * | 1997-06-13 | 2000-04-17 | 日本電気株式会社 | 真空用ゲートバルブ |
JP2002323149A (ja) * | 2001-04-23 | 2002-11-08 | Smc Corp | ゲートバルブ |
KR100390030B1 (ko) * | 1999-06-14 | 2003-07-04 | 에스엠씨 가부시키 가이샤 | 게이트 밸브 |
KR100596332B1 (ko) * | 2004-01-05 | 2006-07-06 | 주식회사 에이디피엔지니어링 | 게이트 밸브 |
KR101376045B1 (ko) * | 2012-04-06 | 2014-03-18 | 프리시스 주식회사 | 게이트 밸브 |
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JPS62131805A (ja) * | 1985-12-04 | 1987-06-15 | Ohtsu Tire & Rubber Co Ltd | タイヤの滑止具 |
JP3033529U (ja) | 1996-07-12 | 1997-01-28 | 富垣 徐 | 口腔治療用補助装置 |
US6237892B1 (en) * | 2000-02-18 | 2001-05-29 | V Tex Corporation | Gate valve |
US6431518B1 (en) * | 2001-01-11 | 2002-08-13 | Vat Holding Ag | Vacuum valve |
US6629682B2 (en) * | 2001-01-11 | 2003-10-07 | Vat Holding Ag | Vacuum valve |
KR20030050409A (ko) | 2001-12-18 | 2003-06-25 | 주식회사 엠지아이 | 마운팅형 사각 게이트밸브 |
JP4238255B2 (ja) * | 2006-05-16 | 2009-03-18 | 株式会社ブイテックス | 真空用ゲートバルブおよび該真空用ゲートバルブの開閉方法 |
TWI388754B (zh) * | 2006-06-16 | 2013-03-11 | Vat Holding Ag | 真空閥 |
DE102008049353A1 (de) * | 2008-09-29 | 2010-04-08 | Vat Holding Ag | Vakuumventil |
DE102008051349B3 (de) * | 2008-10-15 | 2009-11-12 | Vat Holding Ag | Vakuumventil |
JP2011127190A (ja) * | 2009-12-18 | 2011-06-30 | Showa Denko Kk | インライン式成膜装置、磁気記録媒体の製造方法、及びゲートバルブ |
JP5533839B2 (ja) * | 2011-11-04 | 2014-06-25 | Smc株式会社 | 無摺動型ゲートバルブ |
KR101293590B1 (ko) * | 2011-12-16 | 2013-08-13 | 주식회사 뉴파워 프라즈마 | 양방향 게이트 밸브 및 이를 구비한 기판 처리 시스템 |
KR101384965B1 (ko) * | 2012-07-23 | 2014-04-14 | 에스엔유 프리시젼 주식회사 | 경사 구동을 이용하는 게이트 밸브 |
KR101505165B1 (ko) * | 2013-07-01 | 2015-03-24 | 권복화 | 게이트 밸브 |
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2015
- 2015-05-04 KR KR1020150062477A patent/KR101725251B1/ko active IP Right Grant
-
2016
- 2016-04-14 CN CN201680029799.4A patent/CN107667241B/zh active Active
- 2016-04-14 WO PCT/KR2016/003883 patent/WO2016178480A1/ko active Application Filing
- 2016-04-14 US US15/571,713 patent/US10563775B2/en active Active
- 2016-04-14 JP JP2017557382A patent/JP6758717B2/ja active Active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
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JP3033529B2 (ja) * | 1997-06-13 | 2000-04-17 | 日本電気株式会社 | 真空用ゲートバルブ |
KR100390030B1 (ko) * | 1999-06-14 | 2003-07-04 | 에스엠씨 가부시키 가이샤 | 게이트 밸브 |
JP2002323149A (ja) * | 2001-04-23 | 2002-11-08 | Smc Corp | ゲートバルブ |
KR100596332B1 (ko) * | 2004-01-05 | 2006-07-06 | 주식회사 에이디피엔지니어링 | 게이트 밸브 |
KR101376045B1 (ko) * | 2012-04-06 | 2014-03-18 | 프리시스 주식회사 | 게이트 밸브 |
Also Published As
Publication number | Publication date |
---|---|
KR20160130575A (ko) | 2016-11-14 |
JP2018514721A (ja) | 2018-06-07 |
CN107667241A (zh) | 2018-02-06 |
JP6758717B2 (ja) | 2020-09-23 |
US10563775B2 (en) | 2020-02-18 |
US20180156340A1 (en) | 2018-06-07 |
KR101725251B1 (ko) | 2017-04-11 |
CN107667241B (zh) | 2019-06-14 |
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