JP6326458B2 - 両方向ゲートバルブ - Google Patents
両方向ゲートバルブ Download PDFInfo
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- JP6326458B2 JP6326458B2 JP2016155870A JP2016155870A JP6326458B2 JP 6326458 B2 JP6326458 B2 JP 6326458B2 JP 2016155870 A JP2016155870 A JP 2016155870A JP 2016155870 A JP2016155870 A JP 2016155870A JP 6326458 B2 JP6326458 B2 JP 6326458B2
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- 230000002457 bidirectional effect Effects 0.000 title claims description 22
- 238000007789 sealing Methods 0.000 claims description 39
- 238000000034 method Methods 0.000 claims description 23
- 230000008878 coupling Effects 0.000 claims description 22
- 238000010168 coupling process Methods 0.000 claims description 22
- 238000005859 coupling reaction Methods 0.000 claims description 22
- 230000008569 process Effects 0.000 claims description 22
- 238000000926 separation method Methods 0.000 claims description 17
- 230000009467 reduction Effects 0.000 claims description 6
- 230000000994 depressogenic effect Effects 0.000 claims description 5
- 238000004519 manufacturing process Methods 0.000 description 6
- 239000004065 semiconductor Substances 0.000 description 5
- 230000007547 defect Effects 0.000 description 4
- 230000008602 contraction Effects 0.000 description 3
- 238000003780 insertion Methods 0.000 description 3
- 230000037431 insertion Effects 0.000 description 3
- 239000007789 gas Substances 0.000 description 2
- 230000008439 repair process Effects 0.000 description 2
- 230000001174 ascending effect Effects 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000003749 cleanliness Effects 0.000 description 1
- 230000009194 climbing Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 239000013013 elastic material Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
Images
Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
- F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
- F16K3/16—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together
- F16K3/18—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members
- F16K3/184—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members by means of cams
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
- F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
- F16K3/0218—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with only one sealing face
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
- F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
- F16K3/0281—Guillotine or blade-type valves, e.g. no passage through the valve member
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
- F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
- F16K3/029—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with two or more gates
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
- F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
- F16K3/16—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together
- F16K3/18—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members
- F16K3/182—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members by means of toggle links
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
- F16K3/30—Details
- F16K3/314—Forms or constructions of slides; Attachment of the slide to the spindle
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
- F16K3/30—Details
- F16K3/316—Guiding of the slide
- F16K3/3165—Guiding of the slide with rollers or balls
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
- F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Sliding Valves (AREA)
- Details Of Valves (AREA)
Description
100 上部ハウジング
110 第1移動通路
120 第2移動通路
130 仕上げハウジング
140 安着部
200 第1ブレード
300 第1シャフト
400 下部ハウジング
410 回転ガイド溝
420 L−モーションブロック移動溝
421 垂直移動溝
422 閉鎖溝
430 ムービングユニット案内溝
500 L−モーションブロック
510 第1ローラー
520 結合部
530 ガイドリンク
531 第2ローラー
540 第1シャフト連結部
550 挿入突起
600 ムービングユニット
610 リンク
620 第3ローラー
700 第1駆動部
710 第1シリンダ部材
800 第2ブレード
810 水平移動ガイドバー
811 第2シャフト結合孔
812 離隔ガイドボール
820 密閉板
821 水平移動案内溝
821a 水平拡張区間
821b 水平縮小区間
830 連結部材
831 移動制限部
900 第2シャフト
1000 第2駆動部
1010 第2シリンダ部材
Claims (3)
- 前面と後面がそれぞれ開口された第1、2移動通路(110、120)が形成される上部ハウジング(100)と、
前記上部ハウジング(100)内部に設置され、下部から上部へ移動し、前記第1移動通路(110)を開閉させる第1ブレード(200)と、
前記第1ブレード(200)下部に結合される第1シャフト(300)と、
前記上部ハウジング(100)の下部に形成され、両内側面には、第1ブレード(200)が閉鎖方向(C)へ向かう過程で、L−モーションブロック(500)の定位置回転をガイドする回転ガイド溝(410)がそれぞれ形成される下部ハウジング(400)と、
前記下部ハウジング(400)の内部に設置されて、前記第1シャフト(300)下部と結合され、両側上部に前記回転ガイド溝(410)にそれぞれ挿入される第1ローラー(510)と、下部にムービングユニット(600)と連結される結合部(520)が形成される前記L−モーションブロック(500)と、
中央に回転可能なリンク(610)が形成され、前記リンク(610)の一側は前記結合部(520)に連結されて、前記リンク(610)の他側は駆動部(700)と連結され、前記L−モーションブロック(500)を回転させる前記ムービングユニット(600)と、
前記リンク(610)に連結され、前記L−モーションブロック(500)を垂直移動させる第1駆動部(700)と、
前記上部ハウジング(100)内部に設置されて、上部から下部へ移動し、前記第1、2移動通路(110、120)を同時に開閉させ、前記第1、2移動通路(110、120)を閉鎖する過程で、その両側にそれぞれ形成された密閉板(820)が外側方向へ開かれ、前記第1、2移動通路(110、120)をそれぞれ密閉させる第2ブレード(800)と、
前記第2ブレード(800)上部に結合される第2シャフト(900)と、
前記上部ハウジング(100)上部に形成され、前記第2シャフト(900)と連結されて、前記第2ブレード(800)を垂直移動させる第2駆動部(1000)と、で構成され、
前記第2ブレード(800)は、
中央に前記第2シャフト(900)と結合される第2シャフト結合部(811)が形成され、前面、後面にそれぞれ回転可能に具備される離隔ガイドボール(812)が複数個形成される水平移動ガイドバー(810)を具備し、
前記水平移動ガイドバー(810)の両側にそれぞれ前記密閉板(820)を具備し、該密閉板(820)は、前記離隔ガイドボール(812)とそれぞれ接触し、前記水平移動ガイドバー(810)が上、下方向へ移動することにより、前記離隔ガイドボール(812)の移動を案内する水平移動案内溝(821)を内側に含み、
それぞれの前記密閉板(820)の両内側面の間には、前記密閉板(820)が互いに連結されるように連結部材(830)をそれぞれ具備し、
それぞれの前記連結部材(830)側面に、前記第2ブレード(800)の外側へ露出され、形成される移動制限部(831)をそれぞれ具備し、
前記上部ハウジング(100)の両内側面には、前記第2ブレード(800)が下降する過程で、前記第2ブレード(800)の移動制限部(831)を支持し、前記第2ブレード(800)の垂直移動を制限するする支持部(140)が形成され,
前記下部ハウジング(400)の両内側面には、垂直に形成された垂直移動溝(421)および前記垂直移動溝(421)の上部から閉鎖方向(C)へ向かって水平方向に延長形成される閉鎖溝(422)を含むL−モーションブロック移動溝(420)が形成され、
前記結合部(520)の両側に回転可能に具備され、前記垂直移動溝(421)にそれぞれ挿入される第2ローラー(531)を含み、前記L−モーションブロック(500)と前記ムービングユニット(600)の間隔を調節するガイドリンク(530)が形成され、
前記ガイドリンク(530)の下部には、前記ムービングユニット(600)の垂直移動を制限する係止突起が突出形成され、該係止突起は、前記L−モーションブロック(500)の垂直移動が完了する前は前記ムービングユニット(600)のさらなる垂直移動を制限する
ことを特徴とする両方向ゲートバルブ(1)。 - 前記水平移動案内溝(821)は、
所定の深さに陥没形成される水平拡張区間(821a)と、前記水平拡張区間(821a)から延長され、
陥没形成される前記水平拡張区間(821a)の陥没深さより、漸次的に深く陥没形成される水平縮小区間(821b)にそれぞれ形成され、
前記離隔ガイドボール(812)が水平拡張区間(821a)に位置された状態では、それぞれの密閉板(820)が外側方向へ押され、前記第1、2移動通路(110、120)をそれぞれ密閉し、
前記離隔ガイドボール(812)が、前記水平縮小区間(821b)に位置された状態では、それぞれの密閉板(820)が内側方向へ移動され、前記第1、2移動通路(110、120)をそれぞれ開放する
ことを特徴とする請求項1に記載の両方向ゲートバルブ(1)。 - 前記下部ハウジング(400)の両内側面には、前記ムービングユニット(600)の垂直移動をガイドするムービングユニット案内溝(430)が形成されて、
前記ムービングユニット(600)の両側には、前記ムービングユニット案内溝(430)にそれぞれ挿入され、前記ムービングユニット(600)の垂直移動をガイドする第3ローラー(620)が形成される
ことを特徴とする請求項1に記載の両方向ゲートバルブ(1)。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR10-2015-0136296 | 2015-09-25 | ||
KR1020150136296A KR101784839B1 (ko) | 2015-09-25 | 2015-09-25 | 양방향 게이트밸브 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2017062031A JP2017062031A (ja) | 2017-03-30 |
JP6326458B2 true JP6326458B2 (ja) | 2018-05-16 |
Family
ID=58408680
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2016155870A Active JP6326458B2 (ja) | 2015-09-25 | 2016-08-08 | 両方向ゲートバルブ |
Country Status (4)
Country | Link |
---|---|
US (1) | US9995402B2 (ja) |
JP (1) | JP6326458B2 (ja) |
KR (1) | KR101784839B1 (ja) |
SG (1) | SG10201606543QA (ja) |
Families Citing this family (6)
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---|---|---|---|---|
JP6388182B1 (ja) * | 2017-07-25 | 2018-09-12 | Smc株式会社 | ゲートバルブの取付構造 |
JP7385400B2 (ja) * | 2018-09-26 | 2023-11-22 | 株式会社キッツエスシーティー | 真空用ゲートバルブ |
DE102019001115A1 (de) * | 2019-02-15 | 2020-08-20 | Vat Holding Ag | Torventil mit Kulissenführung |
KR102203831B1 (ko) * | 2019-09-23 | 2021-01-15 | 주식회사 퓨젠 | 게이트 진공 밸브용 액츄에이터 구조 |
JP7089245B1 (ja) * | 2020-12-22 | 2022-06-22 | Smc株式会社 | デュアルゲートバルブ |
KR102595747B1 (ko) * | 2022-03-08 | 2023-10-31 | 에이아이메카닉스 주식회사 | 게이트 밸브 |
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2015
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US20170089472A1 (en) | 2017-03-30 |
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KR20170037128A (ko) | 2017-04-04 |
JP2017062031A (ja) | 2017-03-30 |
SG10201606543QA (en) | 2017-04-27 |
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