WO2016174814A1 - 吸着ポンプ - Google Patents
吸着ポンプ Download PDFInfo
- Publication number
- WO2016174814A1 WO2016174814A1 PCT/JP2016/001730 JP2016001730W WO2016174814A1 WO 2016174814 A1 WO2016174814 A1 WO 2016174814A1 JP 2016001730 W JP2016001730 W JP 2016001730W WO 2016174814 A1 WO2016174814 A1 WO 2016174814A1
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- WIPO (PCT)
- Prior art keywords
- adsorption
- housing
- unit
- pump
- chemical species
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N1/00—Sampling; Preparing specimens for investigation
- G01N1/02—Devices for withdrawing samples
- G01N1/22—Devices for withdrawing samples in the gaseous state
- G01N1/2202—Devices for withdrawing samples in the gaseous state involving separation of sample components during sampling
- G01N1/2214—Devices for withdrawing samples in the gaseous state involving separation of sample components during sampling by sorption
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N1/00—Sampling; Preparing specimens for investigation
- G01N1/28—Preparing specimens for investigation including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q
- G01N1/40—Concentrating samples
- G01N1/405—Concentrating samples by adsorption or absorption
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N30/00—Investigating or analysing materials by separation into components using adsorption, absorption or similar phenomena or using ion-exchange, e.g. chromatography or field flow fractionation
- G01N30/02—Column chromatography
- G01N30/04—Preparation or injection of sample to be analysed
- G01N30/06—Preparation
- G01N30/08—Preparation using an enricher
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N30/00—Investigating or analysing materials by separation into components using adsorption, absorption or similar phenomena or using ion-exchange, e.g. chromatography or field flow fractionation
- G01N30/02—Column chromatography
- G01N30/80—Fraction collectors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N1/00—Sampling; Preparing specimens for investigation
- G01N1/02—Devices for withdrawing samples
- G01N1/22—Devices for withdrawing samples in the gaseous state
- G01N1/2273—Atmospheric sampling
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N1/00—Sampling; Preparing specimens for investigation
- G01N1/02—Devices for withdrawing samples
- G01N1/22—Devices for withdrawing samples in the gaseous state
- G01N1/24—Suction devices
- G01N2001/245—Fans
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N30/00—Investigating or analysing materials by separation into components using adsorption, absorption or similar phenomena or using ion-exchange, e.g. chromatography or field flow fractionation
- G01N30/02—Column chromatography
- G01N30/84—Preparation of the fraction to be distributed
- G01N2030/8411—Intermediate storage of effluent, including condensation on surface
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N30/00—Investigating or analysing materials by separation into components using adsorption, absorption or similar phenomena or using ion-exchange, e.g. chromatography or field flow fractionation
- G01N30/02—Column chromatography
- G01N30/84—Preparation of the fraction to be distributed
- G01N2030/8411—Intermediate storage of effluent, including condensation on surface
- G01N2030/8417—Intermediate storage of effluent, including condensation on surface the store moving as a whole, e.g. moving wire
Definitions
- the present disclosure relates to an adsorption pump that can adsorb volatile organic compounds in a sample.
- Exhaust gas, air, exhaled air, etc. contain volatile organic compounds (VOC).
- VOC volatile organic compounds
- Patent Document 1 discloses an apparatus having an adsorption tower filled with an adsorbent that adsorbs VOC and a pump that supplies a sample to the adsorption tower.
- Patent Document 2 discloses an apparatus having an adsorption unit that adsorbs a gas and a pump that compresses the gas and sends it to the adsorption unit.
- This disclosure provides an adsorption pump that can achieve downsizing of the mounted device.
- the suction pump according to the present disclosure has a housing, a movable part, and a suction part.
- the casing is provided with a sample inlet and outlet. At least a part of the movable part is disposed inside the housing.
- the adsorption part is provided inside the housing.
- the adsorption pump according to the present disclosure can realize downsizing of the mounted device.
- Schematic perspective view of the adsorption pump in Embodiment 1 of the present disclosure 1 is an exploded schematic perspective view of the adsorption pump shown in FIG. Schematic sectional view of the adsorption pump shown in FIG. Schematic enlarged view of the adsorption part and the heating part of the adsorption pump shown in FIG. The model enlarged view which shows the other structure of the adsorption
- FIG. 1 is a schematic perspective view of a centrifugal-type adsorption pump 20 according to Embodiment 1 of the present disclosure.
- FIG. 2 is an exploded schematic perspective view of the adsorption pump 20.
- 3 is a schematic cross-sectional view of the adsorption pump 20 taken along line 3-3 shown in FIG.
- the adsorption pump 20 is a centrifugal pump and is called a turbo pump having a rear blade.
- the adsorption pump 20 can transport a sample containing a specific chemical species and adsorb the chemical species.
- the chemical species is, for example, a volatile organic compound (VOC).
- the suction pump 20 includes a housing 11, a main shaft 12, a bearing 13, an impeller 14, a suction unit 15, and a heating unit 16.
- the casing 11 is formed of an upper casing 11A and a lower casing 11B.
- a spiral scroll 17 is formed inside the housing 11.
- the scroll 17 is an inner scroll provided on the lower side of the impeller 14. With this configuration, the adsorption pump 20 can be reduced in size.
- the casing 11 has an inlet 18 for taking the sample into the casing 11 and an outlet 19 for discharging the sample to the outside of the casing 11.
- the center of the inflow port 18 is provided on the rotation axis of the impeller 14.
- the discharge port 19 communicates with the scroll 17.
- the scroll 17 is formed so that the cross-sectional area increases toward the discharge port 19.
- the impeller 14 is a rotating body having wings 141. As shown in FIG. 3, the impeller 14 has a blade surface 14A on which the blade 141 is provided, and a back surface 14B opposite to the blade surface 14A. The blade surface 14A faces the inflow port 18.
- the impeller 14 disposed inside the housing 11 is a movable part in the suction pump 20.
- a boss 21 is formed on the back surface 14B of the impeller 14 in order to keep the distance between the casing 11 and the back surface 14B of the impeller 14 constant.
- the housing 11 is provided with a recess in which the boss 21 is disposed.
- the main shaft 12 penetrates the housing 11 (lower housing 11B).
- the main shaft 12 is provided so as to be rotatable with respect to the housing 11.
- a first end of the main shaft 12 is fixed to the impeller 14 with a screw portion 22.
- a second end of the main shaft 12 is connected to a drive unit 23 provided outside the housing 11.
- the drive unit 23 is, for example, a motor. Note that when the impeller 14 and the main shaft 12 are integrally formed, the screw portion 22 is not necessary.
- the impeller 14 converts the rotational energy of the drive unit 23 into kinetic energy.
- the bearing 13 is provided in the housing 11 so as to support the main shaft 12.
- the bearing 13 is, for example, a ball bearing or a dynamic pressure air bearing.
- the dynamic pressure air bearing is used at low load and high speed rotation.
- a bearing 13 of an appropriate type is used.
- the adsorption unit 15 adsorbs chemical species contained in the sample. Chemical species selectively adsorb to various adsorbents.
- the suction unit 15 is provided inside the housing 11. With such a configuration, the adsorption pump 20 can realize, for example, downsizing of the chemical species detection device.
- the suction unit 15 is provided on a side surface of the scroll 17. A sample flowing out from the outlet of the impeller 14 hits the side surface of the scroll 17.
- a heating unit 16 for heating the adsorption unit 15 is provided around the adsorption unit 15. Thereby, the heating part 16 can heat the adsorption
- FIG. 4 is an enlarged view schematically showing an example of the adsorption unit 15 and the heating unit 16.
- the adsorption part 15 is formed of nanofibers 151.
- a heating unit 16 is disposed below the adsorption unit 15.
- the nanofiber 151 may be formed on the seed layer as described later.
- the seed layer is, for example, a material layer or a catalyst layer of the nanofiber 151.
- the nanofiber 151 is coated with an adsorbent that selectively adsorbs chemical species.
- an adsorbent that selectively adsorbs chemical species.
- nickel or silver can be used as the adsorbent.
- molybdenum can be used as an adsorbent.
- zeolite can be used as an adsorbent.
- palladium can be used as an adsorbent.
- polyaniline can be used as an adsorbent.
- the nanofiber 151 may be formed of an adsorbent that selectively adsorbs chemical species.
- the heating unit 16 includes a lower electrode 161, a nanofiber 162, and an upper electrode 163.
- the nanofiber 162 is provided between the lower electrode 161 and the upper electrode 163.
- the nanofiber 162 has conductivity.
- the nanofiber 162 is electrically connected to the lower electrode 161 and the upper electrode 163 that are the first and second electrodes.
- the lower electrode 161 and the upper electrode 163 are connected to a power source provided outside or inside.
- the nanofiber 162 When a current flows through the nanofiber 162, the nanofiber 162 generates heat due to the resistance of the nanofiber 162. Therefore, the nanofiber 162 can be used as the heating unit 16.
- the heating unit 16 becomes high temperature with less power. Therefore, the adsorption part 15 can be efficiently heated with low power. Moreover, the heat capacity of the nanofiber 162 is small. Therefore, the cooling speed of the heating unit 16 is fast. Therefore, the heating unit 16 using the nanofibers 162 can increase the heating / cooling rate of the adsorption unit 15.
- the nanofiber 151 and the nanofiber 162 may be formed of the same material. Further, the nanofiber 151 and the nanofiber 162 may be made of different materials.
- the heating unit 16 may be a metal wire or a wiring pattern of a resistance heating material as shown in FIG.
- the heating unit 16 may be a thin film made of NiCr processed into a meander shape.
- the nanofiber 151 is formed on the seed layer 152.
- the nanofiber 151 has a small heat capacity because of its structure. Therefore, the adsorption part 15 can be efficiently heated with low power. Further, the nanofiber 151 can increase the cooling rate of the adsorption unit 15.
- the heating unit 16 is connected to a power source provided outside or inside.
- an insulating layer 24 may be provided between the adsorption unit 15 and the heating unit 16. Thereby, the current flowing through the heating unit 16 does not flow into the adsorption unit 15. Therefore, the heating unit 16 can efficiently heat the adsorption unit 15.
- the impeller 14 rotates according to the rotation of the drive unit 23. Due to the rotation of the impeller 14, the portion near the rotation axis in the housing 11 becomes a low pressure. Further, a high pressure is applied between the blades 141 of the impeller 14. The sample is drawn into a portion near the rotation axis of the impeller 14. The drawn sample is given kinetic energy by the centrifugal action of the impeller 14. The sample is then transported to the outlet of the impeller 14. Thereafter, the sample is recovered from dynamic pressure to static pressure by the scroll 17 formed in the housing 11. The sample flowing out from the outlet of the impeller 14 is efficiently collected by the scroll 17 and then discharged from the discharge port 19.
- the sample comes into contact with the suction portion 15 provided on the side surface of the scroll 17. Therefore, the chemical species contained in the sample are efficiently adsorbed on the adsorption unit 15. Thereafter, the adsorption unit 15 is heated by the heating unit 16. The chemical species adsorbed by the adsorption unit 15 is desorbed from the adsorption unit 15 by being heated. Thereby, the adsorption pump 20 can discharge the chemical species concentrated in the adsorption unit 15 from the adsorption pump 20. Further, by desorbing the adsorbed chemical species, the adsorption function of the adsorption unit 15 can be recovered.
- the suction pump 20 may have a diffuser.
- the diffuser is formed on the bottom surface of the lower housing 11B, for example.
- the diffuser can efficiently recover the kinetic energy of gas molecules as pressure.
- the scroll 17 may use an external spiral scroll.
- the adsorption pump 20 may be a sirocco pump using a front blade or a radial pump using a radial blade.
- the discharge port 19 of the adsorption pump 20 may be branched into a plurality.
- a partition plate 27 and the like may be provided in the plurality of discharge ports 19. The position of the partition plate 27 is switched between when the adsorption unit 15 is heated and when it is not heated. Thereby, the sample from which many adsorbed chemical species are discharged and the sample from which almost no adsorbed chemical species are discharged can be guided to different flow paths.
- the drive unit 23 may be provided inside the housing 11.
- the rotor 28 is disposed on the back surface 14 ⁇ / b> B of the impeller 14, and the stator 29 is disposed on the inner wall of the housing 11 facing the rotor 28.
- the stator 29 is an air core coil or the like.
- the rotor 28 is a magnet or the like. A force is applied to the rotor 28 by causing a current to flow through the stator 29 to generate a magnetic force. Thereby, the impeller 14 rotates by the force applied to the rotor 28.
- suction part 15 is provided in the side surface of the scroll 17 in order to adsorb
- the suction unit 15 may be provided on the upper surface or the bottom surface of the scroll 17. Even in this configuration, the adsorption unit 15 can adsorb chemical species.
- suction part 15 can be formed using a bottom-up process or a top-down process. Thereby, the manufacturing process of the adsorption pump 20 can be simplified.
- FIG. 8 is a perspective view schematically showing the adsorption pump 30 in Modification 1 of the present embodiment.
- the suction pump 30 is different from the first embodiment in that the suction unit 15 and the heating unit 16 are provided on the blade surface 14A of the impeller 14. Other configurations and operations are the same as those in the first embodiment.
- description is abbreviate
- the suction part 15 is provided on the suction surface of the blade surface 14A of the impeller 14.
- the negative pressure surface is a surface between the blades 141 into which the flow velocity vector of the sample flows when the impeller 14 rotates. The sample flows into this suction surface. Therefore, the chemical species are efficiently adsorbed on the adsorption unit 15.
- the adsorbing portion 15 is preferably provided in a region facing the inflow port 18. Thereby, the adsorption
- a conductive boss 211 is formed on the back surface 14B of the impeller 14 in order to keep the distance between the casing 11 and the back surface of the impeller 14 constant.
- the boss 211 is electrically connected to the heating unit 16.
- the boss 211 is in contact with the conductive brush 25 in a recess provided in the housing 11.
- the conduction brush 25 is electrically connected to an external power source via a spring 26.
- the conduction brush 25 is in contact with the boss 211 with a constant force by the spring 26. Therefore, the rotation load of the impeller 14 can be within the range of the appropriate torque of the drive unit 23. Further, a current is supplied to the heating unit 16 via the conductive brush 25 and the spring 26.
- the heating unit 16 may be provided on the inner wall of the housing 11 that faces the suction unit 15. In this case, the adsorption unit 15 is heated by radiant heat from the heating unit 16. Also in this configuration, the chemical species can be desorbed from the adsorption unit 15. Further, by providing the heating unit 16 in the casing 11 that is a fixed unit, it is easy to arrange the wiring for supplying current to the heating unit 16.
- vibration may be used as a method for desorbing chemical species.
- a vibration generation source may be used instead of the heating unit 16 as a desorption mechanism.
- the vibration generating source is, for example, a piezoelectric element made of a piezoelectric material sandwiched between upper and lower electrodes.
- the desorption mechanism can use, for example, a light emission source provided in the housing 11 at a position facing the adsorption unit 15.
- a desorption mechanism such as the heating unit 16 may not necessarily be provided depending on the use application of the adsorption pump.
- the suction portion 15 is provided on the blade surface 14A of the impeller 14 which is a movable portion.
- the movable part also functions as a vibration part. Therefore, the chemical species adsorbed on the adsorption unit 15 can be efficiently desorbed by the rotating operation of the movable unit.
- FIG. 9 is a schematic cross-sectional view of the diaphragm type adsorption pump 40 according to the second embodiment of the present disclosure.
- the adsorption pump 40 can also transport the sample containing the chemical species and adsorb the chemical species.
- the chemical species is, for example, a volatile organic compound (VOC).
- the adsorption pump 40 includes a housing 41, a diaphragm 42 that changes the volume in the housing 41, an adsorption unit 15, and a heating unit 16.
- the housing 41 has an inlet 48 for taking the sample into the housing 41 and an outlet 49 for discharging the sample to the outside of the housing 41.
- the inflow port 48 is provided with a check valve 481 for preventing the back flow of the sample.
- the stopper 482 is provided in the housing 41 so as to face the check valve 481 and restricts the operation of the check valve 481.
- the discharge port 49 is provided with a check valve 491 for preventing the back flow of the sample.
- the stopper 492 is provided to face the check valve 491 and restricts the operation of the check valve 491.
- the diaphragm 42 has, for example, a bimorph structure in which a diaphragm 421, an upper electrode 422, a piezoelectric element 423, and a lower electrode 424 are stacked.
- the piezoelectric element 423 is formed of a material such as Pb (Zr, Ti) O 3 (hereinafter, PZT).
- PZT Pb (Zr, Ti) O 3
- the diaphragm 421, the upper electrode 422, the piezoelectric element 423, and the lower electrode 424 are laminated in this order from the inner side to the outer side of the housing 41.
- the diaphragm 42 is a movable part in the adsorption pump 40, and a part of the diaphragm 42 is disposed inside the housing 41.
- casing includes a part being arrange
- the adsorption pump 40 is driven by a piezoelectric method using a piezoelectric element 423 for the diaphragm 42.
- the piezoelectric method is advantageous in terms of miniaturization of the adsorption pump 40 and low power consumption.
- the driving method is not limited to the piezoelectric method.
- the driving method of the diaphragm 42 may be, for example, an electromagnetic field type using a magnet, a magnetostrictive material, and a coil.
- the driving method may be an electrostatic method using an electrostatic force.
- the diaphragm 42 may be driven using a DC motor.
- the adsorption unit 15 and the heating unit 16 are provided at positions facing the diaphragm 42 and the inner wall of the housing 41.
- the suction part 15 is provided inside the housing 11.
- the adsorption pump 40 can realize, for example, downsizing of the chemical species detection device.
- the heating unit 16 is provided around the adsorption unit 15. Thereby, the heating part 16 can heat the adsorption
- an adsorption unit 15 is provided at the upper part of the heating unit 16 provided in the diaphragm 42. In addition, an adsorption unit 15 is provided below the heating unit 16 provided on the inner wall of the housing 41.
- the adsorption unit 15 includes, for example, a nanofiber 151 and a seed layer 152 as shown in FIG.
- An insulating layer 24 is provided between the adsorption unit 15 and the heating unit 16.
- the adsorption part 15 does not need to be arranged on the upper part of the diaphragm 42.
- the suction part 15 may be provided in a part of the housing 41.
- the suction portion 15 may be provided in a region facing the inlet 48 on the inner wall surface of the housing 41. Thereby, the adsorption
- the operation of the adsorption pump 40 will be described.
- an AC voltage modulated so as to have the resonance frequency of the diaphragm 42 is applied to the piezoelectric element 423, the diaphragm 42 is deformed. Due to the deformation of the diaphragm 42, the volume of the housing 41 changes.
- the adsorption pump 40 sends the sample in one direction.
- the sample comes into contact with the adsorbing portion 15 provided inside the housing 41. Therefore, the chemical species contained in the sample are efficiently adsorbed on the adsorption unit 15. Thereafter, the adsorption unit 15 is heated by heat conduction or radiant heat from the heating unit 16. The chemical species adsorbed by the adsorption unit 15 is desorbed from the adsorption unit 15 by being heated. Thereby, the adsorption pump 40 can discharge the chemical species concentrated in the adsorption unit 15 from the adsorption pump 40. Further, by desorbing the adsorbed chemical species, the adsorption function of the adsorption unit 15 can be recovered.
- the discharge port 49 of the adsorption pump 40 may be branched into a plurality. Further, a partition plate or the like may be provided at the plurality of discharge ports.
- the suction portions 15 are provided in the casings 11 and 41, respectively. Therefore, it is possible to reduce the size of the chemical species detection device and the like.
- the temperature at which chemical species desorb depends on the type of chemical species. Therefore, by controlling the value and time of the current flowing through the heating unit 16, the adsorption pumps 20 and 30 can be desorbed separately for each type of chemical species adsorbed on the adsorption unit 15.
- a plurality of adsorption portions 15 formed of different adsorbents may be provided inside the casings 11 and 41.
- the plurality of suction portions 15 are arranged separately between the blades 141 of the impeller 14.
- different types of chemical species can be separated and adsorbed in the adsorption pumps 20 and 30.
- only the target chemical species can be desorbed by heating the adsorbing portion 15 on which the target chemical species are adsorbed.
- a plurality of adsorption portions 15 formed of different adsorbents are provided inside the adsorption pump 40.
- a plurality of heating units 16 are provided so as to correspond to each of the plurality of adsorption units 15.
- the plurality of heating units 16 can be heated independently.
- the suction pump 40 having such a configuration also has the same effect.
- the adsorbent constituting the adsorbing unit 15 is not limited to the nanofiber 151.
- the adsorbent constituting the adsorbing portion 15 may be, for example, a porous body.
- a vibration unit may be provided instead of the heating unit 16.
- the heating unit 16 and the vibration unit function as a desorption unit that desorbs the chemical species adsorbed on the adsorption unit 15 from the adsorption unit 15.
- the desorption portion is not necessarily provided depending on the use application of the adsorption pump.
- an electrode may be connected to the nanofiber 151 of the adsorption unit 15 to pass a current.
- suction part 15 itself functions as the heating part 16.
- the adsorption pump in the present disclosure is particularly useful in a device that transfers a sample containing a chemical species and adsorbs the chemical species.
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Abstract
Description
図1は、本開示の実施の形態1における遠心力型の吸着ポンプ20の模式斜視図である。図2は、吸着ポンプ20の分解模式斜視図である。図3は、吸着ポンプ20の図1に示す線3-3における模式断面図である。
以下、本実施の形態の変形例1について説明する。
図9は、本開示の実施の形態2におけるダイアフラム型の吸着ポンプ40の模式断面図である。吸着ポンプ40もまた、化学種が含まれる試料を輸送するとともに、この化学種を吸着することができる。化学種は、例えば、揮発性有機化合物(VOC)などである。
11A 上部筐体
11B 下部筐体
12 主軸
13 軸受け
14 インペラ
141 翼
14A 翼面
14B 裏面
15 吸着部
151 ナノファイバー
152 シード層
16 加熱部
161 下部電極
162 ナノファイバー
163 上部電極
17 スクロール
18,48 流入口
19,49 吐出口
20,30,40 吸着ポンプ
21,211 ボス
22 ねじ部
23 駆動部
24 絶縁層
25 導通ブラシ
26 バネ
27 仕切り板
28 回転子
29 固定子
42 ダイアフラム
421 振動板
422 上部電極
423 圧電素子
424 下部電極
481,491 逆止弁
482,492 ストッパー
Claims (9)
- 試料の流入口と排出口とが設けられた筐体と、
少なくとも一部が前記筐体の内部に配置された可動部と、
前記筐体の内部に設けられた吸着部と、を備えた、
吸着ポンプ。 - 前記吸着部は、ナノファイバーで構成されている、
請求項1に記載の吸着ポンプ。 - 前記吸着部は、前記可動部に設けられている、
請求項1または2に記載の吸着ポンプ。 - 前記吸着部は、前記流入口と対向する領域に設けられている、
請求項1に記載の吸着ポンプ。 - 前記吸着部に吸着した化学種を前記吸着部から脱離させる脱離部をさらに備えた、
請求項1に記載の吸着ポンプ。 - 前記脱離部は、前記吸着部を加熱する加熱部である、
請求項5に記載の吸着ポンプ。 - 前記加熱部は、第1電極と、第2電極と、前記第1電極と前記第2電極とに電気的に接続された導電性のナノファイバーと、を含む、
請求項6に記載の吸着ポンプ。 - 前記可動部は、翼を有するインペラである、
請求項1に記載の吸着ポンプ。 - 前記可動部は、ダイアフラムである、
請求項1に記載の吸着ポンプ。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP16786096.4A EP3290899B1 (en) | 2015-04-28 | 2016-03-25 | Adsorption pump |
CN201680016444.1A CN107430047B (zh) | 2015-04-28 | 2016-03-25 | 吸附泵 |
JP2017515368A JP6819577B2 (ja) | 2015-04-28 | 2016-03-25 | 吸着ポンプ |
US15/554,225 US10408715B2 (en) | 2015-04-28 | 2016-03-25 | Adsorption pump |
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Application Number | Priority Date | Filing Date | Title |
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JP2015091929 | 2015-04-28 | ||
JP2015-091929 | 2015-04-28 |
Publications (1)
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WO2016174814A1 true WO2016174814A1 (ja) | 2016-11-03 |
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PCT/JP2016/001730 WO2016174814A1 (ja) | 2015-04-28 | 2016-03-25 | 吸着ポンプ |
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US (1) | US10408715B2 (ja) |
EP (1) | EP3290899B1 (ja) |
JP (1) | JP6819577B2 (ja) |
CN (1) | CN107430047B (ja) |
WO (1) | WO2016174814A1 (ja) |
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JP7085001B2 (ja) * | 2018-08-08 | 2022-06-15 | パナソニックホールディングス株式会社 | 検出装置の検出方法、制御システム、検出システム、及びプログラム |
CN109406225B (zh) * | 2018-12-12 | 2024-04-26 | 青岛海颐天仪器有限公司 | 用于大气中烟气及颗粒物采集的真空采样泵 |
Citations (5)
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EP3290899A4 (en) | 2018-05-09 |
JPWO2016174814A1 (ja) | 2018-02-22 |
EP3290899A1 (en) | 2018-03-07 |
CN107430047B (zh) | 2020-02-28 |
US10408715B2 (en) | 2019-09-10 |
JP6819577B2 (ja) | 2021-01-27 |
EP3290899B1 (en) | 2021-02-17 |
US20180038776A1 (en) | 2018-02-08 |
CN107430047A (zh) | 2017-12-01 |
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