WO2016143052A1 - Microscope-sonde à balayage - Google Patents

Microscope-sonde à balayage Download PDF

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Publication number
WO2016143052A1
WO2016143052A1 PCT/JP2015/056918 JP2015056918W WO2016143052A1 WO 2016143052 A1 WO2016143052 A1 WO 2016143052A1 JP 2015056918 W JP2015056918 W JP 2015056918W WO 2016143052 A1 WO2016143052 A1 WO 2016143052A1
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WIPO (PCT)
Prior art keywords
sample
unit
data
scanning
probe
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PCT/JP2015/056918
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English (en)
Japanese (ja)
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浩 新井
大田　昌弘
政夫 松田
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株式会社島津製作所
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Priority to PCT/JP2015/056918 priority Critical patent/WO2016143052A1/fr
Publication of WO2016143052A1 publication Critical patent/WO2016143052A1/fr

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q30/00—Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices
    • G01Q30/04—Display or data processing devices
    • G01Q30/06—Display or data processing devices for error compensation

Definitions

  • the present invention relates to a scanning probe microscope (Scanning Probe Microscope: SPM) such as an atomic force microscope (AFM) or a scanning tunneling microscope (Scanning Tunnel Microscope: STM).
  • SPM scanning probe microscope
  • AFM atomic force microscope
  • STM scanning tunnel Microscope
  • SPM obtains an image of the fine structure of the sample surface based on the interaction between the probe and the sample while scanning the sample surface with the probe.
  • the interaction detected here is AFM using atomic force and STM using tunneling current.
  • AFM atomic force
  • a probe is generally provided near the tip of a cantilever (cantilever), and the surface of the sample is scanned with the probe while vibrating the cantilever up and down with a piezoelectric element, and the amplitude, phase and / or frequency of the vibration is scanned. Find the change in atomic force from the change. Thereby, a slight change in atomic force during scanning of the sample surface can be accurately measured.
  • Measured data such as atomic force and tunnel current is superimposed with noise due to various factors.
  • electrical noise is superimposed on a signal of measurement data from an electric circuit that supplies power used for scanning the surface of a sample with a probe or applying vibration to a cantilever in an AFM.
  • mechanical vibrations that the SPM device receives from the floor and surrounding noise also cause noise.
  • Patent Document 1 and Non-Patent Document 1 a power spectrum is created by performing a fast Fourier transform (FFT) on an electrical signal of measurement data obtained by SPM, and specified from the power spectrum. It is described that an image from which noise is removed is obtained by performing inverse FFT after cutting noise and background having a peak at a frequency of.
  • FFT fast Fourier transform
  • Patent Document 2 describes an SPM in which a sample stage is placed on a vibration isolation mechanism having a gantry and a surface plate that is levitated using an air spring and the sample stage is covered with a soundproof cover. .
  • this SPM mechanical vibration from the floor surface is suppressed by a vibration isolation mechanism, and mechanical vibration due to ambient noise is suppressed by a soundproof cover, thereby reducing the influence of noise on the image.
  • Patent Document 3 in the SPM, a sample table is provided on a sample table drive mechanism via a damping alloy spacer made of a damping alloy such as cast iron or lead, so that the sample can be removed from the floor surface. It is described that it is suppressed from receiving mechanical vibration.
  • the problem to be solved by the present invention is to provide an SPM capable of observing an image of a sample surface almost in real time and sufficiently reducing mechanical noise.
  • the first aspect of the scanning probe microscope according to the present invention which has been made to solve the above problems, comprises a probe, a sample holder for holding a sample, and the surface of the sample held by the sample holder.
  • a scanning unit that relatively moves the probe and the sample holder so as to scan with the probe; and a measurement unit that measures an interaction generated between the probe and the sample.
  • a scanning probe microscope that creates an image of the surface based on a measurement result of an interaction, a) a measurement data storage unit for storing measurement data obtained by the measurement unit; b) At a plurality of predetermined timings during scanning of the surface by the scanning unit, by performing noise removal processing on the measurement data in the measurement data storage unit obtained within a predetermined period before each timing A sample surface image creation data creation unit for creating sample surface image creation data; c) A sample surface image creation unit that creates the surface image based on the sample surface image creation data each time the sample surface image creation data is created.
  • sample surface image creation data that has been subjected to noise removal processing at each of a plurality of predetermined timings is created. Since the sample surface image creation unit sequentially creates an image of the sample surface every time, a sample surface image from which noise has been removed can be obtained almost in real time. Further, by performing such data processing on the measurement data, not only electrical noise but also noise due to mechanical vibration can be reduced.
  • the timing is not particularly limited. For example, when scanning is performed in one direction on the sample surface and is slightly shifted in a direction perpendicular to the direction, scanning in one direction is performed once (one way once). Or every two times (one round trip).
  • frequency spectrum data is created by performing Fourier transform on the measurement data, and the background and noise frequency bands are generated from the frequency spectrum data. It is possible to suitably use a process by Fourier transform in which data for sample surface image creation is created by performing inverse Fourier transform after removing the data.
  • the sample surface image creation data creation unit is b-1) Noise that creates frequency spectrum data before noise removal by Fourier transforming the measurement data in the measurement data storage unit obtained within a predetermined period before each timing at the plurality of predetermined timings A pre-removal frequency spectrum data creation unit; b-2) A frequency spectrum data creation unit after noise removal that creates frequency spectrum data after noise removal by removing one or both of the background and data of a predetermined frequency band from the frequency spectrum data before noise removal.
  • b-3 It is desirable to include a post-noise removal measurement data creation unit that creates sample surface image creation data by performing inverse Fourier transform on the frequency spectrum data after noise removal.
  • Moving average method The average value of a plurality of data including the data to be processed and the data obtained before and / or after that is used as the value after noise removal processing in the data to be processed.
  • the moving average value may be a simple moving average value obtained by taking the sum of n (natural number) data and dividing by n, or data obtained at a time close to the data to be processed You may use the weighted moving average value weighted by.
  • Local filter method The average value or median of the data obtained at the point where the data to be processed was obtained, and the multiple points arranged in a matrix around the point, and the data to be processed The value after noise removal processing at.
  • Noise line removal method For each line obtained each time scanning in one direction is performed, an index value such as an average value or median value of the data obtained in the processing target line, and a line before the processing target line. Alternatively, the index values obtained from the lines obtained later are compared, and if the difference between the index values is equal to or greater than a predetermined value, the processing target line is determined as a noise line. Then, the average value of the data at each point of the noise line and the data of the line obtained before and / or after corresponding to each data is taken, or before or / and after without using the data of the noise line. Interpolation processing using the obtained line data is performed to obtain a value after noise removal processing in the processing target data.
  • a second aspect of the scanning probe microscope includes a probe, a sample holder for holding a sample, and the probe so as to scan the surface of the sample held by the sample holder with the probe.
  • a scanning unit that relatively moves the needle and the sample holder; and a measuring unit that measures an interaction generated between the probe and the sample, and the sample based on a measurement result of the interaction by the measuring unit.
  • a scanning probe microscope that creates an image of the surface of a) a vibration measuring unit provided in the sample holder for measuring the vibration of the sample holder; b) Driving the noise removal vibration waveform to the scanning unit to cancel the vibration of the sample holder based on the vibration data of the sample holder measured by the vibration measuring unit during the scanning of the surface by the scanning unit.
  • a noise removing vibration applying unit that is superimposed on the signal;
  • a sample surface image creation unit that creates an image of the surface based on measurement data obtained by the measurement unit sequentially during scanning of the surface by the scanning unit.
  • the scanning probe microscope sufficiently removes noise due to mechanical vibration.
  • a noise-removing vibration waveform that cancels the external vibration is applied to the scanning unit based on the data of the external vibration measured by the vibration measuring unit, resulting in mechanical vibration applied to the sample from the outside.
  • Noise can be reliably removed. Since this operation is performed during scanning of the sample surface, a sample surface image from which noise has been removed can be obtained in almost real time.
  • the sample surface image can be compared with the case of passively suppressing noise by the vibration isolator. Noise can be reduced.
  • the vibration measuring unit and the noise removing vibration applying unit used in the scanning probe microscope of the second aspect may be further provided in the scanning probe microscope of the first aspect.
  • an image of the sample surface from which noise has been removed can be observed almost in real time, and only a mechanical vibration isolator is provided. Noise can be reduced more than when it is used.
  • An example of the scanning probe microscope of the first aspect according to the present invention will be described as a first example, and an example of a scanning probe microscope of the second aspect will be described as a second example.
  • FIG. 1 is a surface image of mica (mica) obtained by a general scanning probe microscope (atomic force microscope in the example of FIG. 1).
  • a general scanning probe microscope atomic force microscope in the example of FIG. 1
  • noise removal processing using Fourier transform is performed on the data of the surface image before noise removal processing (FIG. 1A).
  • FIG. 1B is obtained by performing the noise removal processing after acquiring all the data for one image.
  • the scanning probe microscope 10 of the first embodiment obtains a clear image by performing the noise removal process during data acquisition.
  • the configuration of the scanning probe microscope 10 of the first embodiment will be described.
  • the scanning probe microscope 10 is an atomic force microscope, and includes a measurement unit 11, a data processing unit 12, a control unit 13, and a display 14, as shown in FIG.
  • the measuring unit 11 includes a probe 111, a cantilever 112, a sample holder 113, a scanner (scanning unit) 114, and a measuring unit 115.
  • the probe 111 is attached in the vicinity of the tip of the cantilever 112 and is disposed so as to face the surface of the sample S attached to the sample holder 113.
  • a piezoelectric element is attached to the cantilever 112, but when the piezoelectric element is not operated and is in a fixed state (contact mode), an AC voltage of a predetermined frequency is applied to the piezoelectric element, so that the cantilever 112 is There is a case where it vibrates in the vertical direction (Z-axis direction) at the predetermined cycle.
  • the scanner 114 includes a piezoelectric element (not shown) (not shown) attached to the cantilever 112 and a scanner driving unit 1141, and the sample holder 113 (that is, a voltage applied to the piezoelectric element from the scanner driving unit 1141 (that is, the sample holder 113).
  • the sample S) attached to the sample holder 113 is scanned in the X and Y biaxial directions parallel to the sample surface and moved in the Z axis direction.
  • the measuring unit 115 is provided above the cantilever 112, and includes a laser light source 1151, a laser optical system 1152, and a photodetector 1153.
  • the laser optical system 1152 includes a lens, a beam splitter, a mirror, and the like so that the laser light emitted from the laser light source 1151 is irradiated near the tip of the cantilever 112 and the reflected light is introduced into the photodetector 1153.
  • the photodetector 1153 has a light receiving surface that is divided into a plurality of portions in the displacement direction of the cantilever 112, converts the intensity of light received on each light receiving surface into an electric signal, and transmits the electric signal to the control unit 13.
  • the data processing unit 12 includes a data storage unit 120, a measurement data creation unit 121, a frequency spectrum data creation unit 122 before noise removal, a frequency spectrum data creation unit 123 after noise removal, and a measurement data creation unit 124 after noise removal.
  • the sample surface image creation unit 125 is controlled by the control unit 13.
  • a combination of the frequency spectrum data creation unit 122 before noise removal, the frequency spectrum data creation unit 123 after noise removal, and the measurement data creation unit 124 after noise removal corresponds to the sample surface image creation data creation unit.
  • Both of the data processing unit 12 and the control unit 13 are realized by computer hardware and software.
  • the data storage unit 120 is a memory that stores the measurement data created by the measurement data creation unit 121 described below and the sample surface image creation data created by the measurement data creation unit 124 after noise removal described later. is there.
  • the measurement data creation unit 121 creates measurement data (raw data before performing noise removal processing) based on the electrical signal sent from the photodetector 1153 to the control unit 13.
  • the pre-noise removal frequency spectrum data creation unit 122 obtains measurement data from the data storage unit 120 and performs Fourier transform for each predetermined period during measurement (during scanning of the sample surface), thereby obtaining pre-noise removal frequency spectrum data. To create.
  • the post-noise removal frequency spectrum data creation unit 123 creates post-noise removal frequency spectrum data from which noise has been removed by performing an operation described later on the pre-noise removal frequency spectrum data.
  • the measurement data creation unit 124 after noise removal creates sample surface image creation data by performing inverse Fourier transform on the frequency spectrum data after noise removal.
  • the sample surface image creation unit 125 creates a sample surface image based on the data every time sample surface image creation data is created in the measurement data creation unit 124 after noise removal. The created sample surface image is displayed on the display 14.
  • the scanner 114 brings the probe 111 closer to the surface of the sample S by moving the sample holder 113 in the Z direction.
  • the position of the probe 111 with respect to the surface of the sample S (hereinafter, simply referred to as “the position of the probe 111”) is set in the positive X direction without vibrating the cantilever 112 or applying vibration in the Z direction.
  • the scanner 114 moves the sample holder 113 so that it moves at a constant speed.
  • the laser light source 1151 of the measuring unit 115 irradiates the laser light near the tip of the cantilever 112 via the laser optical system 1152 and introduces the reflected light to the photodetector 1153. . Then, the spot of the laser beam incident on the photodetector 1153 is detected.
  • the spot position of the laser beam also vibrates in response to the vibration of the cantilever 112, and the amplitude of the cantilever 112 is the atomic force between the atom at the tip of the probe 111 and the atom on the surface of the sample S, that is, the probe. The fact that it depends on the distance between the needle 111 and the surface of the sample S is utilized.
  • the measurement data creation unit 121 can obtain measurement data of the uneven shape on the surface of the sample S.
  • the obtained measurement data is sequentially stored in the data storage unit 120 together with the coordinates in the XY plane of the probe 111 with respect to the sample S.
  • the scanner 114 moves the position of the probe 111 slightly in the positive Y direction, and then in the negative X direction, which is the opposite of the previous one. The position of the probe 111 is moved.
  • the scanner 114 slightly moves the position of the probe 111 in the positive Y direction. Up to this point, the position of the probe 111 has reciprocated once in the X direction. Thereafter, by repeating the same operation, the surface of the sample S is scanned two-dimensionally with the probe 111.
  • the pre-noise removal frequency spectrum data creation unit 122 The obtained measurement data is acquired from the data storage unit 120 and subjected to Fourier transform. In the frequency spectrum data before noise removal obtained as a result, a peak having a specific frequency as a vertex is generated due to noise such as floor vibration.
  • the frequency spectrum data creation unit 123 after noise removal creates frequency spectrum data after noise removal by detecting the frequency range where this peak exists from the frequency spectrum data before noise removal and then deleting the data within the range. .
  • the measurement data creation unit 124 after noise removal performs inverse Fourier transform on the frequency spectrum data after noise removal. Thereby, sample surface image creation data from which the influence of noise is eliminated is created. Thereafter, based on the sample surface image creation data, the sample surface image creation unit 125 obtains the sample surface image after noise removal processing, which is obtained while the probe 111 is moved once in one direction in the X direction. It is created and displayed on the display 14. Then, by repeating the operation described in this paragraph, each time the probe 111 moves one way in the X direction, the sample surface image obtained during the movement is sequentially displayed on the display 14. A sample surface image on which noise removal processing has been performed can be obtained with a sense close to real time during measurement.
  • the timing for displaying the sample surface image by performing the noise removal processing is set to be one time each time the probe 111 moves one way in the X direction. It is good also as timings other than those.
  • the measurement data acquired by the pre-noise removal frequency spectrum data creation unit 122 from the data storage unit 120 is the amount obtained while the probe 111 moves one way in the X direction. All the measurement data stored in the unit 120 may be acquired. In this case, the Fourier transform performed by the pre-noise removal frequency spectrum data creation unit 122 is performed using all of the measurement data.
  • the measurement data after noise removal is stored in the data storage unit 120, and after the measurement is completed, the sample surface image creation unit 125 performs the data storage unit 120.
  • the sample surface image creation unit 125 By reading out the sample surface image creation data from the image and performing image display processing, the sample surface image from which noise has been removed can be displayed on the display 14 without performing noise removal processing again.
  • this is not essential in the present invention.
  • only the measurement data before the noise removal processing is stored in the data storage unit 120, and when the sample surface image is created after the measurement is completed, the data storage unit 120 is stored.
  • the sample surface image may be created after the measurement data is read out and noise removal processing is performed.
  • a sample surface image creation data creation unit that performs processing by Fourier transform (the frequency spectrum data creation unit 122 before noise removal, the frequency spectrum data creation unit 123 after noise removal, and the measurement data creation unit 124 after noise removal are combined)
  • a method that performs processing by a moving average method, a local filter method, or a noise line removal method may be used.
  • the sample surface image creation data creation unit obtains a plurality of measurement data necessary for calculation of average values, median values, etc. from the data storage unit 120 at a predetermined timing, and averages them.
  • Sample surface image creation data is created by calculating values, median values, and the like.
  • the configuration of the scanning probe microscope 20 of the second embodiment will be described with reference to FIG.
  • the scanning probe microscope 20 is an atomic force microscope, and includes a measurement unit 21, a data processing unit 22, a control unit 23, a noise removal vibration waveform generation unit 25, and a display 14.
  • the measuring unit 21 includes a probe 111, a cantilever 112, a sample holder 113, a scanner (scanning unit) 214, a measuring unit 115, and a sample holder vibration sensor 216. Since the configuration other than the scanner 214 and the sample holder vibration sensor 216 is the same as that of the scanning probe microscope 10 of the first embodiment, the description thereof is omitted.
  • the scanner 214 includes a piezoelectric element (not shown) and a scanner driving unit 2141.
  • the scanner driving unit 2141 scans the sample holder 113 in the two axes X and Y and moves the sample holder 113 to an AC voltage (driving signal to the scanning unit) having a predetermined frequency so as to move in the Z-axis direction.
  • the noise removal voltage (noise removal vibration waveform) generated by the noise removal vibration waveform generation unit 25 is superimposed and applied to the piezoelectric element so as to generate noise removal vibration. Therefore, the scanner 214 functions as the noise removal vibration applying unit together with the noise removal vibration waveform generation unit 25.
  • the sample holder vibration sensor 216 is a sensor for measuring mechanical vibration generated in the sample holder, and is configured by a piezoelectric element different from those provided in the cantilever 112 and the scanner 214.
  • the sample holder vibration sensor 216 converts the pressure change to the piezoelectric element caused by the mechanical vibration of the sample holder into an electric signal as a voltage change in each of the three directions of X, Y, and Z, and removes noise via the control unit 23. This is transmitted to the vibration waveform generator 25.
  • the noise removal vibration waveform generation unit 25 generates a noise removal voltage based on the electrical signal sent from the sample holder vibration sensor 216.
  • the data processing unit 22 includes a measurement data storage unit 220, a measurement data creation unit 221, and a sample surface image creation unit 225, all of which are controlled by the control unit 23.
  • the measurement data creation unit 221 is basically the same as the measurement data creation unit 121 in the first embodiment. However, this is different from the first embodiment in that the created measurement data is not only transmitted to the measurement data storage unit 220 but also transmitted to the sample surface image creation unit 225.
  • the measurement data storage unit 220 stores the data created by the measurement data creation unit 221. Unlike the data storage unit 120 of the first embodiment, the measurement data storage unit 220 does not store the measurement data after noise removal.
  • the sample surface image creation unit 225 creates a sample surface image based on the data. The created sample surface image is displayed on the display 14.
  • the scanning probe microscope 20 of the second embodiment With the sample S attached to the sample holder 113, measurement is started by a predetermined operation. Similarly to the first embodiment, the scanner 114 moves the sample holder 113 in the Z direction to bring the probe 111 close to the surface of the sample S and then applies vibration to the cantilever 112 in the Z direction or vibrates. Without moving, the sample holder 113 is moved so that the position of the probe 111 relative to the surface of the sample S is moved.
  • the measuring unit 115 detects the vibration of the cantilever 112 by the same method as in the first embodiment, and the scanner 214 has a constant amplitude of the vibration (that is, the atoms at the tip of the probe 111 and the surface of the sample S).
  • the position in the Z direction of the surface of the sample S is adjusted so that the atomic force of atoms is constant), and the measurement data creation unit 221 creates measurement data of the uneven shape on the surface of the sample S based on this position.
  • the sample holder vibration sensor 216 measures the mechanical vibration of the sample holder 113 in parallel with the scanning of the surface of the sample S and the creation of measurement data.
  • the measured mechanical vibration data of the sample holder is transmitted as an electrical signal from the sample holder vibration sensor 216 to the noise removal vibration waveform generation unit 25 via the control unit 23.
  • the noise removal vibration waveform generation unit 25 Based on this electrical signal, the noise removal vibration waveform generation unit 25 generates a noise removal voltage to be applied to the piezoelectric element so as to vibrate the piezoelectric element of the scanner 214 so as to cancel the measured mechanical vibration of the sample holder. .
  • a signal having a phase opposite to that of vibration is generated.
  • This noise removal voltage is superimposed on the voltage for scanning the surface of the sample S in the scanner driving unit 2141 and applied to the piezoelectric element of the scanner 214. Thereby, the mechanical vibration of the sample holder 113 is canceled.
  • an image of the surface of the sample S is created by the sample surface image creation unit 225 based on the measurement data created by the measurement data creation unit 221 and displayed on the display 14.
  • an image of the surface of the sample S can be obtained almost in real time without noise due to mechanical vibration of the sample holder 113.
  • a scanning unit that moves only the sample holder 113 is used, but any scanning unit that moves the probe 111 and the sample holder 113 relatively may be used. That is, a device that moves only the probe 111 or a device that moves both the probe 111 and the sample holder 113 can be used as the scanning unit.
  • the noise removal vibration waveform may be superimposed on the drive signal for these moving devices. .
  • the measurement data is stored in the measurement data storage unit 220, and after the measurement is completed, the sample surface image creation unit 225 receives the measurement data from the measurement data storage unit 220.
  • the sample surface image can be used as the display 14 again.
  • this is not an essential requirement in the present invention.

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  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)

Abstract

L'invention concerne un microscope-sonde à balayage 10 qui comprend une sonde 111, un porte-échantillon 113 pour porter un échantillon S, une unité de balayage (dispositif de balayage 114) pour amener la sonde 111 et le porte-échantillon 113 à se déplacer l'un par rapport à l'autre de manière à balayer la surface de l'échantillon S avec la sonde 111, et une unité de mesure 115 pour mesurer l'interaction entre la sonde 111 et l'échantillon S, et qui crée une image de la surface de l'échantillon sur la base des résultats de mesure de celui-ci, le microscope à sonde à balayage 10 étant pourvu : d'une unité de stockage de données de mesure (unité de stockage de données 120) qui stocke des données de mesure obtenues par l'unité de mesure 115 ; d'une unité de création de données spectrales de fréquence avant suppression du bruit 122 qui crée, à une pluralité prédéterminée d'instants pendant le balayage de la surface, des données spectrales de fréquence avant suppression du bruit par transformation de Fourier de données de mesure dans l'unité de stockage de données de mesure obtenues pendant une durée prédéterminée avant chaque instant ; d'une unité de création de données spectrales de fréquence après suppression du bruit 123 qui crée des données spectrales de fréquence après suppression du bruit en supprimant des données de traitement de suppression de bruit soit l'un, soit les deux de l'arrière-plan et des données d'une plage de fréquences prédéterminée ; d'une unité de création de données de mesure après suppression du bruit 124 qui crée des données de création d'image de surface d'échantillon par une transformation de Fourier inverse des données spectrales de fréquence après suppression du bruit ; d'une unité de création d'image de surface d'échantillon 125 qui crée une image de la surface sur la base des données de création d'image de surface d'échantillon à chaque fois que des données de création d'image de surface d'échantillon sont créées.
PCT/JP2015/056918 2015-03-10 2015-03-10 Microscope-sonde à balayage WO2016143052A1 (fr)

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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04181642A (ja) * 1990-11-14 1992-06-29 Olympus Optical Co Ltd 走査型プローブ顕微鏡画像処理装置
JPH0579811A (ja) * 1991-09-19 1993-03-30 Nikon Corp 走査型顕微鏡
JPH05340712A (ja) * 1992-06-11 1993-12-21 Olympus Optical Co Ltd 走査型プローブ顕微鏡リアルタイム表示装置
JPH10267945A (ja) * 1997-03-21 1998-10-09 Olympus Optical Co Ltd 走査型光顕微鏡
JPH11264834A (ja) * 1997-12-10 1999-09-28 Peter Heiland 走査過程に及ぼす機械振動の騒乱効果を補償するラスタモード走査装置

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04181642A (ja) * 1990-11-14 1992-06-29 Olympus Optical Co Ltd 走査型プローブ顕微鏡画像処理装置
JPH0579811A (ja) * 1991-09-19 1993-03-30 Nikon Corp 走査型顕微鏡
JPH05340712A (ja) * 1992-06-11 1993-12-21 Olympus Optical Co Ltd 走査型プローブ顕微鏡リアルタイム表示装置
JPH10267945A (ja) * 1997-03-21 1998-10-09 Olympus Optical Co Ltd 走査型光顕微鏡
JPH11264834A (ja) * 1997-12-10 1999-09-28 Peter Heiland 走査過程に及ぼす機械振動の騒乱効果を補償するラスタモード走査装置

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