WO2016118544A1 - Methods for bonding highly flexible substrate to a carrier and product formed thereby - Google Patents
Methods for bonding highly flexible substrate to a carrier and product formed thereby Download PDFInfo
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- WO2016118544A1 WO2016118544A1 PCT/US2016/013985 US2016013985W WO2016118544A1 WO 2016118544 A1 WO2016118544 A1 WO 2016118544A1 US 2016013985 W US2016013985 W US 2016013985W WO 2016118544 A1 WO2016118544 A1 WO 2016118544A1
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- axis
- carrier substrate
- flexible substrate
- substrate
- bond
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Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C27/00—Joining pieces of glass to pieces of other inorganic material; Joining glass to glass other than by fusing
- C03C27/06—Joining glass to glass by processes other than fusing
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B7/00—Layered products characterised by the relation between layers; Layered products characterised by the relative orientation of features between layers, or by the relative values of a measurable parameter between layers, i.e. products comprising layers having different physical, chemical or physicochemical properties; Layered products characterised by the interconnection of layers
- B32B7/04—Interconnection of layers
- B32B7/06—Interconnection of layers permitting easy separation
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B17/00—Layered products essentially comprising sheet glass, or glass, slag, or like fibres
- B32B17/06—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/063—Transporting devices for sheet glass
- B65G49/064—Transporting devices for sheet glass in a horizontal position
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B23/00—Re-forming shaped glass
- C03B23/02—Re-forming glass sheets
- C03B23/023—Re-forming glass sheets by bending
- C03B23/0235—Re-forming glass sheets by bending involving applying local or additional heating, cooling or insulating means
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
- B65G2201/02—Articles
- B65G2201/0214—Articles of special size, shape or weigh
- B65G2201/022—Flat
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P40/00—Technologies relating to the processing of minerals
- Y02P40/50—Glass production, e.g. reusing waste heat during processing or shaping
- Y02P40/57—Improving the yield, e-g- reduction of reject rates
Definitions
- the present disclosure relates to methods and apparatus for processing a flexible substrate, such as a highly flexible substrate, using so-called sheet manufacturing techniques, which are designed for thicker and stiff er substrates.
- Sheet manufacturing techniques are typically employed to process respective substrates (e.g., glass sheets) by conveying the respective sheets from a source, through any number of processing steps (heating, scoring, trimming, cutting, etc.), to a destination.
- the conveyance of the respective sheets may involve a number of elements that cooperate to move the respective substrates from station to station, preferably without degrading any desirable characteristics of the substrates.
- typical transport mechanisms may include any number of noncontact support members, contact support members, rollers, lateral guides, etc., to guide the substrates through the system from the source, through each process station, and finally to the destination.
- the non-contact support members may include air bearings, fluid bar(s), low friction surface(s), etc.
- Non-contact support elements may include a combination of positive and negative fluid pressure streams in order to "float" the substrates during conveyance.
- Contact support elements may include rollers to stabilize the substrates during transport through the system.
- the aforementioned transport mechanisms for sheet manufacturing systems are typically designed for relatively thick substrates, such as thicknesses that exhibit a sufficient stiffness to retain suitable mechanical dimensionality, material integrity, and/or other properties despite the forces that may be inflicted on the substrates during conveyance and processing through the manufacturing system.
- substrates such as thicknesses that exhibit a sufficient stiffness to retain suitable mechanical dimensionality, material integrity, and/or other properties despite the forces that may be inflicted on the substrates during conveyance and processing through the manufacturing system.
- typical sheet manufacturing techniques for cover glass used in liquid crystal displays typically require that the glass substrates exhibit a relatively high stiffness, such as may be the case when the substrates have thicknesses on the order of about 0.5 mm or greater.
- Corning® Willow® Glass is a glass material suitable for many purposes.
- the relatively thin material (about 0.1 mm thick, which is approximately the thickness of a sheet of paper), combined with the strength and flexibility of the glass material, support applications from the ordinary to the very highly sophisticated, such as wrapping a display element around a device or structure.
- Corning® Willow® Glass may be used for very thin backplanes, color filters, etc., for both organic light emitting diodes (OLED) and liquid crystal displays (LCD), such as may be used in high performance, portable devices (e.g., smart phones, tablets, and notebook computers).
- OLED organic light emitting diodes
- LCD liquid crystal displays
- Corning® Willow® Glass may also be used for producing electronic components, such as touch sensors, seals for OLED displays and other moisture and oxygen sensitive technologies.
- Corning® Willow® Glass may be on the order of about 100 ⁇ (micrometers or microns) to 200 ⁇ thick, and highly flexible, having glass characteristics including: a density of about 2.3 - 2.5 g/cc, Young's Modulus of about 70 - 80 GPa, Poisson Ratio of about 0.20 - 0.25, and minimum bend radius of about 185 - 370 mm.
- the disclosure herein addresses the problems of processing flexible substrates, such as thin and flexible glass substrates, in existing sheet manufacturing systems (which are designed for thicker, stiffer substrates).
- the methods and apparatus herein provide for temporarily bonding the flexible substrate to a thicker and/or stiffer carrier substrate, which presents the flexible substrate as having stiffer mechanical characteristics while being processed in the sheet processing system. After processing, the temporary bond is released and the flexible substrate is subject to further manufacturing, processing, or delivery to a customer.
- FIG. 1 is a perspective view, schematic illustration of a process in which a flexible substrate is bonded to a carrier substrate in preparation for processing the flexible substrate in a conventional sheet manufacturing system;
- FIG. 2 is a side view, schematic illustration of the flexible substrate bonded to the carrier substrate for processing the flexible substrate in the conventional sheet manufacturing system;
- FIG. 3 is a perspective view, schematic illustration of a first sequence in which the flexible substrate may be bonded to the carrier substrate, which results in a dome-shaped out-of-plane deformation of the bonded structure;
- FIG. 4 is a graphical illustration of a quantitative measure of the out-of-plane deformation of the bonded structure of FIG. 3;
- FIG. 5 is a perspective view, schematic illustration of a second sequence in which the flexible substrate may be bonded to the carrier substrate, which results in a cylindrically-shaped out-of-plane deformation of the bonded structure;
- FIG. 6 is a graphical illustration of a quantitative measure of the out-of-plane deformation of the bonded structure of FIG. 5;
- FIGS. 7 A, 7B, and 7C are schematic illustrations of tools that may be employed to initiate a start area and a bond front that characterizes the bonding process of FIG. 5;
- FIG. 8 is a forming machine that is configured to induce an out-of-plane curvature in the carrier substrate prior to bonding in order to counteract the propensity for the out-of-plane deformation that would otherwise occur in the bonded structure;
- FIG. 9 is a graphical illustration of a quantitative measure of the out-of-plane deformation of the bonded structure resulting from the induced out-of-plane curvature in the in the carrier substrate of FIG. 8;
- FIGS. 10A and 10B is a schematic illustration of a thermal process of bonding the flexible substrate to the carrier substrate in order to counteract the propensity for the out- of-plane deformation that would otherwise occur in the bonded structure.
- the embodiments discussed below refer to the processing of a flexible substrate formed from glass, which is a preferred material. It is noted, however, that the embodiments may employ different materials to implement the flexible substrate, such as crystalline substrates, single crystal substrates, glass ceramic substrates, polymer substrates, etc.
- FIG. 1 is a perspective view, schematic illustration of a process in which a flexible substrate 102 is temporarily bonded to a carrier substrate 104 in preparation for processing the flexible substrate 102 in a conventional sheet manufacturing system.
- the rationale for bonding the flexible substrate 102 to the thicker and/or suffer carrier substrate 104 is to present the flexible substrate 102 as if it had suffer mechanical characteristics while being processed in the sheet processing system that is designed for handling suffer substrates than the flexible substrate 102.
- the carrier substrate 104 may be formed from a sheet of material, such as a glass material, where the carrier substrate 104 has a length dimension in an X-axis, a width dimension in a Y-axis, and a thickness dimension in a Z-axis (within a Cartesian Coordinate System).
- the X-axis and Y-axis define an X-Y plane, which may be referred to herein as being in-plane and/or defining an in-plane reference.
- the flexible substrate 102 is formed from a sheet of material, which may also be a glass material, where the flexible substrate 102 has a length dimension in the X-axis, a width dimension in the Y- axis, and a thickness dimension in the Z-axis. As previously discussed, the flexible substrate 102 exhibits at least one of: (i) a flexibility that is substantially more flexible than a flexibility of the carrier substrate 104, and (ii) a thickness that is substantially less than a thickness of the carrier substrate 104.
- the flexible substrate 102 may be formed from glass and have a thickness of one of: (i) from about 50 um (microns or micrometers) to about 300 um, and (ii) from about 100 um to about 200 um.
- the flexible substrate 102 may have at least one of: a density of about 2.3 - 2.5 g/cc, a Young' s Modulus of about 70 - 80 GPa; a Poisson Ratio of about 0.20 - 0.25, and a minimum bend radius of about 185 - 370 mm.
- the carrier substrate 104 may be formed from glass; however, the carrier substrate 104 preferably has a thickness of one of at least from about 400 to about 1000 um, notably thicker than the flexible substrate 102.
- the bond is temporary, and employed primarily for the purpose of processing the flexible substrate 102 in a conventional sheet manufacturing system. After such processing, the temporary bond may be undone and the flexible substrate 102 may be separated from the carrier substrate 104 for further processing and/or application outside the conventional sheet manufacturing system.
- any number of mechanisms and/or processes for achieving the bond (temporary or otherwise) between the flexible substrate 102 and the carrier substrate 104 may be employed, so long as the bond parameters and characteristics discussed later herein are also considered and compensated for.
- one skilled in the art may employ and/or modify one or more of the bonding processes disclosed in the following patent applications in achieving the conditions disclosed herein: U. S. Provisional Patent Application No. 61/736,887, filed on December 13, 2012; U.S. Patent Application No. 14/047,506, filed on October 7, 2013; U.S. Provisional Patent Application No. 61/931924 filed on January 27, 2014; U.S. Provisional Patent Application No.
- FIG. 3 is a perspective, schematic illustration of an example of a sequence in which the flexible substrate 102 may be bonded to the carrier substrate 104, which results in a substantially dome-shaped, out-of-plane deformation of the bonded structure 100.
- FIG. 4 is a graphical illustration of a quantitative measure of the out-of-plane deformation of the bonded structure 100 of FIG. 3.
- the flexible substrate 102 and the carrier substrate 104 are characterized by respective length dimensions in the X-axis, respective width dimensions in the Y-axis, and respective thickness dimensions in the Z-axis.
- the X-axis and Y-axis thereby define an X-Y plane, which is an in-plane reference (against which a flatness of the bonded structure 100 is compared, for example in FIG. 4).
- the bonding process may include locating the flexible substrate 102 over the carrier substrate 104 and then inducing the bond.
- a start area may be established by a localized urging of the flexible substrate 102 and the carrier substrate 104 together, such as via a mechanical pressing force.
- a single point and/or generally circular area may be established as the start area 20 by way of a focused pressure of the flexible substrate 102 toward, and into contact with, the carrier substrate 104, which is illustrated by the arrow 22.
- the induced bond at the start area 20 will propagate in accordance with a bond front 24.
- the bond front 24 will include radially directed vectors extending away from the start area 20 in all directions in the X-Y plane. The bond front 24 will continue to expand radially outwardly in the X-Y plane until it reaches an edge of the substrates, at which time the flexible substrate 102 is bonded to the carrier substrate 104.
- the aforementioned (radially extending) bond front 24 will cause the bonded structure 100 to deform out-of-plane (i.e., out of a reference plane defined by the Y-Y plane).
- the radially extending bond front 24 results in a generally dome-shaped, out-of-plane curvature in the Z-axis, which is shown in the example as being in the downward direction along the Z-axis.
- the mere bonding of the flexible substrate 102 to the carrier substrate 104 will produce an undesirable out-of-plane curvature, which if left unmodified may produce further undesirable effects in the down-stream processes of the sheet manufacturing system.
- the conventional sheet manufacturing system works best when the incoming substrates to be processed (in this case the bonded structures 100) are relatively flat.
- the Z-axis of the graph in FIG. 4 is measured in um
- the X-axis and Y-axis are measured in mm.
- the out-of-plane, generally dome-shaped curvature is on the order of 225 - 300 um at a maximum. Such curvature may not be acceptable in conventional sheet manufacturing systems and/or may result in defective intermediate products, which are unsuitable for commercial applications. As will be discussed in more detail later herein, compensation of such undesirable bonding phenomena may be achieved in accordance with embodiments herein.
- FIG. 5 is a perspective, schematic illustration of an example of an alternative sequence in which the flexible substrate 102 may be bonded to the carrier substrate 104, which results in a substantially cylindrically-shaped, out-of-plane deformation of the bonded structure 100.
- FIG. 6 is a graphical illustration of a quantitative measure of the out-of-plane deformation of the bonded structure 100 of FIG. 5 obtained through experimentation.
- the bonding process may again include locating the flexible substrate 102 over the carrier substrate 104 and then inducing the bond.
- the start area is again established by a localized urging of the flexible substrate 102 and the carrier substrate 104 together, such as via a mechanical pressing force.
- a generally linearly extending start area 30 is established by way of a linearly extending focused pressure of the flexible substrate 102 toward, and into contact with, the carrier substrate 104.
- the bond front 34 will include linearly directed vectors extending transversely away from the elongate direction of the start area 30, in the X-Y plane.
- the start area 30 may extend substantially linearly along a line parallel to the Y-axis (such as along adjacent edges of the respective substrates 102, 104 shown at the right of FIG. 5).
- the bond front 34 has been found to include vectors that are spaced substantially linearly along a line parallel to the Y-axis (such as the line 30), and propagate away from the start area 30 in a direction transverse to the Y-axis (e.g., in a direction parallel to the X-axis, perpendicular to the Y-axis).
- the bond front 34 will continue to expand linearly away from the start area 30 in the X-Y plane until it reaches the end of the substrates, at which time the flexible substrate 102 is bonded to the carrier substrate 104.
- the bond front 34 will again include vectors that are spaced substantially linearly along a line parallel to the Y-axis (such as the line 30), and again will propagate away from the start area 30 in a direction transverse thereto.
- the bond front 34 would include two components, one component of vectors extending linearly (and transversely) away from the start area 30 in one direction (e.g., leftward in FIG.
- Both components of the bond front 34 will continue to expand linearly away from the start area 30 in the X-Y plane until they reach an edge of the substrates, at which time the flexible substrate 102 is bonded to the carrier substrate 104.
- the linearly extending bond front 34 will also cause the bonded structure 100 to deform out-of- plane (i.e., out of a reference plane defined by the X-Y plane).
- the linearly extending bond front 34 results in a generally cylindrical-shaped, out-of-plane curvature in the Z-axis, which is shown in the example as being in the downward direction along the Z- axis.
- the mere bonding of the flexible substrate 102 to the carrier substrate 104 will produce an undesirable out-of-plane curvature, which if left unmodified may produce further undesirable effects in the down-stream processes of the conventional sheet manufacturing system.
- the bonded structure 100 in FIG. 5 is not generally flat. Indeed, with reference to FIG. 6, laboratory experimentation reveals that the out-of-plane, generally cylindrical-shaped curvature is on the order of 200 - 250 um at a maximum.
- a leaf-spring arrangement 32-1 may be employed, which includes a relatively rigid frame member 40 and a relatively flexible spring element 42.
- the flexible spring element 42 is rotationally coupled to the frame member via respective hinged couplings 44-1, 44-2 to produce a leaf-spring deflection element.
- the frame member 40 and spring element 42 are oriented parallel to the desired linear start area 30, such as above the flexible substrate 102.
- a downwardly directed force is then applied to the frame member 40 such that the flexible spring element 42 urges the flexible substrate 102 against the carrier substrate 104 along a line, thereby producing the desired start area 30.
- a rocker-type arrangement 32-2 may be employed, which includes a relatively rigid structure 50 having a curved blade portion 52, which may be referred to as a rocker press.
- the structure 50 and the blade portion 52 are oriented parallel to the desired linear start area 30, such as above the flexible substrate 102.
- a downwardly directed and rocking force is then applied to the structure 50 such that the curved blade portion 52 urges the flexible substrate 102 against the carrier substrate 104 along a line, thereby producing the desired start area 30.
- a multi-point linear press arrangement 32-3 may be employed, which includes a relatively rigid frame member 60 and a plurality of pressing elements 62 resiliently engaged thereto.
- the pressing elements may themselves be resilient and/or may include some bias mechanism permitting individual ones, or groups of, the pressing elements 62 to give when pressed.
- the frame member 60 and the linear array of pressing elements 62 are oriented parallel to the desired linear start area 30, such as above the flexible substrate 102.
- a downwardly directed force is then applied to the frame member 60 such that the pressing elements 62 urge the flexible substrate 102 against the carrier substrate 104 along a line, thereby producing the desired start area 30.
- non-contact means may include one or more of: (i) one or more air jets; (ii) one or more air bearings; and (iii) one or more ultrasonic bearings.
- compensation of the dome-shaped and/or the cylindrical-shaped out-of-plane deformations due to undesirable bonding phenomena may be achieved in accordance with embodiments herein.
- such compensation may be achieved by manipulating the carrier substrate 104 prior to the bonding operation.
- the process may include at least one of stressing and straining the carrier substrate 104 to induce a curvature out of the X-Y plane in a direction along the Z-axis that counteracts the induced curvature out of the X-Y plane that would occur via the bond front propagation phenomena.
- the bond front propagation phenomena tends to induce curvature out of the X-Y plane in a direction characterized as shown in FIGS.
- the general compensation methodology involves at least one of stressing and straining the carrier substrate 104 to induce a curvature out of the X-Y plane in an opposite direction (e.g., upward or positive Z- axis direction).
- the bonding process may include locating the flexible substrate 102 over the carrier substrate 104, while maintaining the at least one of stressing and straining of the carrier substrate 104.
- the start area is established and the bond front propagation ensues until the flexible substrate 102 and the carrier substrate are bonded together.
- a degree of the induced curvature in the carrier substrate 104 prior to, and at least partially during, the bonding process is controlled such that the characteristics of the curvature out of the X-Y plane due to the bond front are substantially cancelled (or at least mitigated).
- FIG. 8 is a schematic illustration of a forming machine that is configured to counteract the propensity for the out-of-plane deformation that would otherwise occur in the bonded structure 100.
- the forming machine includes a base 70 and a biasing surface 72, spaced apart from the base 70.
- the biasing surface 72 may be curved with respect to the base 70 by way of one or more actuators.
- a first actuator 74 may be located generally in a central region (central along the X-axis) of the forming machine.
- the first actuator 74 may include a biasing member 76, such as a rod or the like, that extends generally parallel to the Y-axis and operates to urge the biasing surface 72 upwardly in the positive Z-axis direction.
- An adjustment mechanism 78 operates to provide control in an offset position of the biasing member 76 from the base 70, and control of an amount of biasing action by the biasing member 76 against the biasing surface 72.
- An optional second actuator 82 may operate to move a lateral edge of the biasing surface 72 parallel with the base 70 and closer to, or further from, the biasing member 76, thereby also providing some adjustable amount of biasing action by the biasing member 76 against the biasing surface 72.
- One or both of the actuators 74, 82 may be computer controlled. Such actuation results in an adjustable amount of cylindrical-shaped out-of-plane curvature of the biasing surface 72 in a direction opposite to the direction of the curvature shown in FIG. 5.
- the carrier substrate 104 may be placed on the biasing surface 72 forming machine such that manipulation of the carrier substrate 104 may be achieved prior to the bonding operation.
- the biasing surface 72 induces mechanical stress and/or strain in the carrier substrate 104 to induce a cylindrical-shaped out-of-plane curvature (out of the X-Y plane) in a direction along the Z-axis that counteracts the induced curvature out of the X-Y plane that would occur via the bond front propagation phenomena.
- the of stressing and/or straining via the biasing surface 72 may be characterized as mechanically bending the carrier substrate 104 about an axis that is spaced away from the X-Y plane in the Z-axis direction, and that is parallel to the Y-axis, to induce the curvature.
- such axis 90 is located below and parallel to the biasing member 76, thereby defining a radius of curvature 92 of the biasing surface 72 and the carrier substrate 104, such that the curvature out of the X-Y plane is a positive direction in the Z-axis (e.g. , an upward direction as illustrated).
- the bonding process may include locating the flexible substrate 102 over the carrier substrate 104, while maintaining the at least one of stressing and straining of the carrier substrate 104.
- the start area 30 is established using one of the aforementioned mechanisms or some alternative mechanism.
- the start area 30 may extend substantially linearly along a line parallel to the Y-axis such that the bond front 34 extends (i.e., vectors are spaced) substantially linearly along a line parallel to the Y-axis.
- the bond front 34 propagates away from the start area 30 and in a direction transverse to the Y-axis (e.g.
- FIG. 9 is a graphical illustration of a quantitative measure of the out-of-plane deformation of the bonded structure 100 resulting from use of the aforementioned compensation methodology and/or apparatus.
- the out-of-plane curvature of the compensated bonded structure 100 is less than at least one of: (i) about 200 um; (ii) about 100 um; (iii) about 75 um; and (iii) about 50 um.
- the out-of-plane curvature of the non-compensated bonded structure 100 graphically illustrated in FIG. 6 exhibited curvatures on the order of 200 - 250 um at a maximum, and some experimental results show that the out-of-plane curvature of the noncompensated bonded structure 100 may be on the order of 300 - 400 um.
- dome-shaped out-of-plane deformation case may be addressed by providing a mechanism (e.g., a mechanical mechanism) for at least one of stressing and straining the carrier substrate 104 into a dome shape that counteracts the dome-shaped, out-of-plane deformation that occurs due to the radially extending bond front 24 propagation of FIG. 3.
- a mechanical mechanism may be employed to urge the carrier substrate 104 into a dome-shaped curvature out of the X-Y plane in a Z-axis direction opposite to that shown in FIG. 3.
- the bond area 20 (single point or localized diameter) may be induced and the radially extending bond front 24 may propagate until the flexible substrate 102 is bonded to the carrier substrate 104. It is contemplated that the induced dome-shaped curvature in the carrier substrate 104 prior to, and at least partially during, the bonding process by the mechanical mechanism is controlled such that the characteristics of the curvature out of the X-Y plane due to the bond front 24 are mitigated.
- the at least one of stressing and straining the carrier substrate 104 into a dome-shape prior to bonding may be achieved thermally.
- FIGS. 10A and 10B are schematic illustrations of a thermal process of bonding the flexible substrate 102 to the carrier substrate 104 in order to counteract the propensity for the out-of-plane deformation that would otherwise occur in the bonded structure 100.
- the thermal process includes heating at least one of the flexible substrate 102 and the carrier substrate 104 to differing temperatures Tl, T2 prior to initiating the bond (FIG. 10A).
- Tl, T2 prior to initiating the bond
- the radially extending bond front 24 is induced in accordance with the aforementioned procedures.
- the differing temperatures Tl, T2 are substantially maintained at least partially during the inducement of the bond and propagation of the radially extending bond front 24.
- the flexible substrate 102 and the carrier substrate 104 are permitted to reach thermal equilibrium after the bond is achieved.
- the induced stress and/or strain in the carrier substrate due to the thermal process prior to, and at least partially during, the bonding process is controlled such that the characteristics of the curvature out of the X-Y plane due to the bond front 24 are mitigated.
- a carrier substrate formed from a sheet of material, the carrier substrate having a length dimension in an X-axis, a width dimension in a Y-axis, and a thickness dimension in a Z-axis, where the X-axis and Y-axis define an X-Y plane;
- a flexible substrate formed from a sheet of material, the flexible substrate having a length dimension in the X-axis, a width dimension in the Y-axis, and a thickness dimension in the Z-axis;
- the at least one of stressing and straining includes mechanically bending the carrier substrate about an axis that is spaced away from the X-Y plane in the Z-axis direction, and that is parallel to the Y-axis, to induce the curvature;
- the curvature is characterized by a curvature radius from the axis to the carrier substrate such that the curvature out of the X-Y plane is in the first direction along the Z-axis.
- the start area extends substantially linearly along a line parallel to the Y-axis
- the bond front extends substantially linearly along a line parallel to the Y-axis
- the bond front propagates away from the start area and in a direction transverse to the
- the linear extending zone is achieved by pressing against the flexible substrate via at least one of: (i) a leaf-spring deflection element; (ii) a rocker press; (iii) a multi-point linear press; (iv) one or more air jets; (v) one or more air bearings; and (vi) one or more ultrasonic bearings.
- the method of aspect 1, wherein the at least one of stressing and straining includes mechanically bending the carrier substrate into a dome shape.
- the at least one of stressing and straining includes heating at least one of the flexible substrate and the carrier substrate to differing temperatures prior to and during the inducement of the bond and propagation of the bond front; and permitting the flexible substrate and the carrier substrate to reach thermal equilibrium after the bond is achieved.
- the start area is substantially a circular area or central point
- the bond front extends substantially radially outwardly from the start area.
- the method any one of aspects 1 -12, wherein the flexible substrate has a thickness of one of: (i) from about 50 um to about 300 um, and (ii) from about 100 um to about 200 um.
- the flexible substrate has at least one of: a density of about 2.3 - 2.5 g/cc, a Young' s Modulus of about 70 - 80 GPa; a Poisson Ratio of about 0.20 - 0.25, and a minimum bend radius of about 185 - 370 mm.
- the method any one of aspects 1-14, wherein the carrier substrate is formed from glass.
- the method any one of aspects 1 -15, wherein the carrier substrate has a thickness of one of at least about 400 to about 1000 um.
- an amount of deformation out of the X-Y plane after bonding is less than at least one of: (i) about 200 um; (ii) about 100 um; (iii) about 75 um; and (iii) about 50 um.
- any one of aspects 1 -17 wherein at least one of: (i) a flexibility of the flexible substrate is substantially more flexible than a flexibility of the carrier substrate, and (ii) the thickness of the flexible substrate is substantially less than a thickness of the carrier substrate
- a flexible substrate bonded to a carrier substrate formed in accordance with a process comprising the steps of: providing the carrier substrate formed from a sheet of material, the carrier substrate having a length dimension in an X-axis, a width dimension in a Y-axis, and a thickness dimension in a Z-axis, where the X-axis and Y-axis define an X-Y plane;
- the flexible substrate formed from a sheet of material, the flexible substrate having a length dimension in the X-axis, a width dimension in the Y-axis, and a thickness dimension in the Z-axis, wherein at least one of: (i) a flexibility of the flexible substrate is substantially more flexible than a flexibility of the carrier substrate, and (ii) the thickness of the flexible substrate is substantially less than a thickness of the carrier substrate;
- an amount of deformation out of the X-Y plane after bonding is less than at least one of: (i) about 200 um; (ii) about 100 um; (iii) about 75 um; and (iii) about 50 um.
- an apparatus comprising: a carrier substrate formed from a sheet of material, the carrier substrate having a length dimension in an X-axis, a width dimension in a Y-axis, and a thickness dimension in a Z-axis, where the X-axis and Y-axis define an X-Y plane; and
- a flexible substrate formed from a sheet of material, which is bonded to the carrier substrate, the flexible substrate having a length dimension in the X-axis, a width dimension in the Y-axis, and a thickness dimension in the Z-axis, wherein at least one of: (i) a flexibility of the flexible substrate is substantially more flexible than a flexibility of the carrier substrate, and (ii) the thickness of the flexible substrate is substantially less than a thickness of the carrier substrate,
- an amount of deformation out of the X-Y plane after bonding is less than at least one of: (i) about 200 um; (ii) about 100 um; (iii) about 75 um; and (iii) about 50 um.
- the apparatus of aspect 20 wherein the flexible substrate has a thickness of one of: (i) from about 50 um to about 300 um, and (ii) from about 100 um to about 200 um.
- the apparatus of aspect 20 or aspect 21 wherein the flexible substrate has at least one of: a density of about 2.3 - 2.5 g/cc, a Young' s Modulus of about 70 - 80 GPa; a Poisson Ratio of about 0.20 - 0.25, and a minimum bend radius of about 185 - 370 mm.
- the apparatus of any one of aspects 20-22 wherein the carrier substrate is formed from glass.
- the apparatus of any one of aspects 20-23 wherein the carrier substrate has a thickness of one of at least about 400 to about 1000 um.
Abstract
Description
Claims
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020177022906A KR20170107007A (en) | 2015-01-22 | 2016-01-20 | Method for bonding a highly flexible substrate to a carrier and a product formed therefrom |
EP16714050.8A EP3247557A1 (en) | 2015-01-22 | 2016-01-20 | Methods for bonding highly flexible substrate to a carrier and product formed thereby |
SG11201705987SA SG11201705987SA (en) | 2015-01-22 | 2016-01-20 | Methods for bonding highly flexible substrate to a carrier and product formed thereby |
CN201680017296.5A CN107428120A (en) | 2015-01-22 | 2016-01-20 | For the product that highly flexible substrate is bonded to the method for carrier and is consequently formed |
JP2017538603A JP2018510075A (en) | 2015-01-22 | 2016-01-20 | Method for bonding highly flexible substrate to carrier and product formed by the method |
Applications Claiming Priority (2)
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US201562106417P | 2015-01-22 | 2015-01-22 | |
US62/106,417 | 2015-01-22 |
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WO2016118544A1 true WO2016118544A1 (en) | 2016-07-28 |
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PCT/US2016/013985 WO2016118544A1 (en) | 2015-01-22 | 2016-01-20 | Methods for bonding highly flexible substrate to a carrier and product formed thereby |
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EP (1) | EP3247557A1 (en) |
JP (1) | JP2018510075A (en) |
KR (1) | KR20170107007A (en) |
CN (1) | CN107428120A (en) |
SG (1) | SG11201705987SA (en) |
TW (1) | TW201639702A (en) |
WO (1) | WO2016118544A1 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2018231821A1 (en) * | 2017-06-12 | 2018-12-20 | Corning Incorporated | Method and apparatus for bonding flexible substrate to a carrier |
WO2018209080A3 (en) * | 2017-05-10 | 2018-12-20 | Corning Incorporated | Methods for processing a substrate |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20090262294A9 (en) * | 2005-11-22 | 2009-10-22 | Francois Templier | Process for fabricating a flexible electronic device of the screen type, including a plurality of thin-film components |
US20100122762A1 (en) * | 2008-11-16 | 2010-05-20 | Suss Microtec Inc | Method and apparatus for wafer bonding with enhanced wafer mating |
US20140063434A1 (en) * | 2012-05-11 | 2014-03-06 | Boe Technology Group Co., Ltd. | Bended liquid crystal display and its manufacturing method and apparatus |
US20140150244A1 (en) * | 2012-11-30 | 2014-06-05 | General Electric Company | Adhesive-free carrier assemblies for glass substrates |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002014359A (en) * | 2000-06-30 | 2002-01-18 | Minolta Co Ltd | Method and device for manufacturing liquid crystal display curved surface panel |
WO2009147769A1 (en) * | 2008-06-06 | 2009-12-10 | シャープ株式会社 | Method for manufacturing display device, and display device |
CN102947923B (en) * | 2010-06-02 | 2015-11-25 | 库卡系统有限责任公司 | Manufacturing installation and method |
TWI547369B (en) * | 2011-05-27 | 2016-09-01 | 康寧公司 | Glass-plastic laminate device, processing line and methods therefor |
JP6041137B2 (en) * | 2012-12-28 | 2016-12-07 | 日本電気硝子株式会社 | Manufacturing method of glass laminate |
WO2014133007A1 (en) * | 2013-02-26 | 2014-09-04 | 日本電気硝子株式会社 | Method for manufacturing electronic device |
-
2016
- 2016-01-20 KR KR1020177022906A patent/KR20170107007A/en unknown
- 2016-01-20 EP EP16714050.8A patent/EP3247557A1/en not_active Withdrawn
- 2016-01-20 SG SG11201705987SA patent/SG11201705987SA/en unknown
- 2016-01-20 WO PCT/US2016/013985 patent/WO2016118544A1/en active Application Filing
- 2016-01-20 CN CN201680017296.5A patent/CN107428120A/en active Pending
- 2016-01-20 JP JP2017538603A patent/JP2018510075A/en active Pending
- 2016-01-22 TW TW105102051A patent/TW201639702A/en unknown
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20090262294A9 (en) * | 2005-11-22 | 2009-10-22 | Francois Templier | Process for fabricating a flexible electronic device of the screen type, including a plurality of thin-film components |
US20100122762A1 (en) * | 2008-11-16 | 2010-05-20 | Suss Microtec Inc | Method and apparatus for wafer bonding with enhanced wafer mating |
US20140063434A1 (en) * | 2012-05-11 | 2014-03-06 | Boe Technology Group Co., Ltd. | Bended liquid crystal display and its manufacturing method and apparatus |
US20140150244A1 (en) * | 2012-11-30 | 2014-06-05 | General Electric Company | Adhesive-free carrier assemblies for glass substrates |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2018209080A3 (en) * | 2017-05-10 | 2018-12-20 | Corning Incorporated | Methods for processing a substrate |
WO2018231821A1 (en) * | 2017-06-12 | 2018-12-20 | Corning Incorporated | Method and apparatus for bonding flexible substrate to a carrier |
Also Published As
Publication number | Publication date |
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SG11201705987SA (en) | 2017-08-30 |
KR20170107007A (en) | 2017-09-22 |
EP3247557A1 (en) | 2017-11-29 |
CN107428120A (en) | 2017-12-01 |
JP2018510075A (en) | 2018-04-12 |
TW201639702A (en) | 2016-11-16 |
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