TW201544327A - Peeling device and peeling method of laminate body, and method of manufacturing electronic devices - Google Patents

Abstract

This invention relates to a peeling device of a laminate body, characterized in having: a making device of peeling start part that makes at least two peeling start parts by inserting a knife into interfaces between two adjacent substrates, with at least two interface specific amounts, from a terminal part of the laminate body which is laminated by at least three substrates that can be peeled apart; a peeler that bends and deforms at least one of the at least three substrates and peeling in sequence from the at least two peeling start parts of the interfaces; and a controller that controls the peeler to peel in sequence from the at least two peeling start parts of the interfaces after controlling the making device of peeling start part to insert the knife into the at least two interfaces to make the at least two peeling start parts.

Description

Stripping device and peeling method of laminated body, and manufacturing method of electronic device

The present invention relates to a peeling device and a peeling method for a laminate, and a method for manufacturing the electronic device.

As electronic devices such as display panels, solar cells, and thin film secondary batteries are thinner and lighter, substrates such as glass plates, resin plates, and metal plates used in such electronic devices are expected to be thinned.

However, if the thickness of the substrate is too thin, the handleability of the substrate is deteriorated, so that it is difficult to form a functional layer for a metal device (TFT: Thin Film Transistor, color filter) on the front surface of the substrate ( CF: Color Filter)).

Therefore, there has been proposed a method in which a reinforcing plate (substrate) is bonded to the back surface of a substrate to form a laminated body which is reinforced by a reinforcing plate, and a functional layer is formed on the front surface of the substrate in the state of the laminated body (see Patent Document 1). In this method, since the handleability of the substrate is improved, the functional layer can be favorably formed on the front surface of the substrate. Moreover, the reinforcing plate is peeled off from the substrate after the functional layer is formed.

As an example, the method of peeling the reinforcing plate is performed by moving one of the two corners on the diagonal line of the rectangular laminated body toward the other, so that the reinforcing plate or the substrate, or both thereof The person is flexed and deformed in a direction separating from each other. At this time, in order to smoothly perform the peeling, a peeling start portion was formed at one corner portion of the laminated body. In the peeling start portion, a knife (peeling blade) is inserted into the end surface of the substrate and the reinforcing plate by a specific amount from the end surface of the laminated body, and a peeling start portion is formed in a specific region of a corner portion.

Further, Patent Document 2 discloses a peeling device for a laminated body in which a peeling start portion is formed by inserting a blade (wedge) from an end surface of the laminated body into an interface between the substrate and the substrate.

Therefore, in the peeling apparatus of the patent document 1, the knife is inserted into the interface in a state in which the front and back surfaces of the laminated body are fixed by the suction pad or the like, that is, in the state in which the laminated body is sandwiched in the thickness direction, the knife is inserted into the interface. An unnecessary force is applied to the substrate, and there is a concern that the substrate is broken.

Further, in the peeling device of Patent Document 2, when the blade is inserted into the interface, the laminated body is sandwiched by the adsorption pad in the thickness direction, so that the portion into which the blade is inserted when the laminated body is held by the adsorption pad is subjected to the pressing force. There is a flaw in the substrate damage.

In this case, in recent years, the peeling start portion producing step by the knife and the peeling step by the peeling device are separately performed to prevent the problems of Patent Documents 1 and 2.

[Previous Technical Literature] [Patent Literature]

[Patent Document 1] International Publication No. 2011/024689

[Patent Document 2] Japanese Patent Laid-Open No. Hei 10-244545

When the interface to be peeled off is only one layer of the laminate, the laminate is produced from the peeling start portion preparation device after the peeling start portion is formed on the interface by the blade of the peeling starting portion forming device. The peeling device can be used to peel off the substrate by the peeling device, and the series of operations does not require labor.

However, in the case of a laminate including two or more substrates to be peeled off, it is necessary to transfer the laminate of the interface between the peeling start portion forming device and the peeling device. Therefore, there is a problem that the substrate cannot be peeled off efficiently. question.

The present invention has been made in view of such a problem, and an object of the present invention is to provide a laminate in which a laminate comprising three or more substrates having two or more interfaces to be peeled off can be highly efficiently peeled off from a substrate. A device and a peeling method, and a method of manufacturing the electronic device.

In order to achieve the above object, a peeling apparatus for a laminated body according to the present invention includes a peeling starting portion forming device for laminating a laminate of three or more substrates, from the end of the laminated body. Inserting a knife into two or more interface specific amounts of the interface between the adjacent substrate and the substrate to form two or more peeling start portions; and peeling the device to deflect at least one of the three or more substrates Deformation, sequentially peeling off from the peeling start portion of the two or more interfaces as a starting point; and a control device for sequentially inserting the cutters at the two or more interfaces by controlling the peeling start portion forming device After the two or more peeling start portions are produced, the peeling device is controlled to be peeled off in order from the peeling start portion of the two or more interfaces.

In order to achieve the above object, the method for peeling a laminated body according to the present invention includes a step of producing a peeling starting portion, which is a laminated body obtained by peelably bonding three or more substrates, from the laminated body The end portion is formed by inserting a knife into two or more interfaces at an interface between the adjacent substrate and the substrate to form two or more peeling start portions, and a peeling step of causing at least three of the three or more substrates One of the substrates is flexibly deformed, and the peeling starting portions at the two or more interfaces are sequentially peeled off as a starting point.

In order to achieve the above object, a method of manufacturing an electronic device according to the present invention includes a functional layer forming step of at least one of the substrates included in a laminate in which three or more substrates are peelably bonded together. a front surface of the substrate is formed with a functional layer; and a separating step of separating the substrate on which the functional layer is formed from another substrate; the method of manufacturing the electronic device is characterized in that the separating step includes a step of fabricating a peeling start portion, system Inserting a knife into the end portion of the laminate to insert two or more interface openings of the interface between the adjacent substrate and the substrate to form two or more peeling start portions; and a peeling step, At least one of the three or more substrates is flexibly deformed, and is sequentially peeled off from the peeling start portion of the two or more interfaces.

According to the invention, in the apparatus or step of fabricating the peeling starting portion, the peeling start portion is formed by using a knife at two or more interfaces, and the substrate is sequentially peeled off in the peeling step. In this way, since the laminated body can be transported once to the peeling device from the peeling starting portion forming device, even if it is a laminated body including two or more substrates to be peeled off, it is possible to have high efficiency. The substrate is peeled off.

In one aspect of the invention, it is preferable that the insertion position of the blade in the peeling start portion forming device or the step is set to a position at which the first corner portion of the laminated body overlaps in the thickness direction of the laminated body. And the insertion amount of the knives is set differently for each of the interfaces, and the deflection direction of the substrate due to the peeling device or the step is from the first corner portion toward the first corner portion Set to the corner of the opposite direction.

The deflection direction of the substrate mentioned in the present invention may be a linear direction connecting the first corner portion and a corner portion opposed to the first corner portion, or may be 45 degrees with respect to one side of the laminate. direction. In other words, the deflection direction of the substrate may be set from a corner portion facing the first corner portion toward a corner portion facing the first corner portion.

According to one aspect of the invention described above, when the substrate is deflected from the first corner portion toward the corner portion facing the first corner portion by the peeling device or the step, the insertion amount of the knife in the two or more interfaces is At the largest interface, the substrate is peeled off first. Then, when the substrate is deflected in this direction, the interface substrate having the second largest insertion amount of the blade is peeled off. According to one aspect of the present invention described above, the order of the interface to be peeled can be controlled by making the insertion amount of the knife different for each interface.

In another aspect of the present invention, preferably, the insertion position of the blade of the peeling start portion forming device or the step is set to at least a first corner portion of the laminated body and the first The other corner portion other than the corner portion, wherein the deflection direction of the substrate due to the peeling device or the step is set from a corner portion of the first corner portion facing the first corner portion, and is derived from the above The other corner portion is set toward a corner portion opposed to the other corner portion.

According to another aspect of the present invention, when the substrate is deflected from the first corner portion toward the corner portion facing the first corner portion by the peeling device or the step, the peeling start of the first corner portion is provided. The portion is the starting point and the substrate is peeled off. Further, when the substrate is deflected from the other corner portion toward the corner portion facing the other corner portion by the peeling means or the step, the substrate is peeled off from the peeling start portion provided in the other corner portion. According to another aspect of the invention described above, the order of the interface to be peeled can be controlled by deflecting the substrate.

In the above aspect of the invention, the laminated body is preferably a laminated body in which at least a first substrate, a second substrate, a third substrate, and a fourth substrate are sequentially peelably bonded, and the peeling start portion is formed as a device or a step. The insertion position of the knife is preferably set to an interface between the first substrate and the second substrate, and an interface between the third substrate and the fourth substrate.

In the present invention, for example, a laminate including the first to fourth substrates is targeted. In the apparatus or step of fabricating the peeling starting portion, a peeling start portion is formed at the interface between the first substrate and the second substrate and the interface between the third substrate and the fourth substrate. In the peeling device or the step, the substrate is sequentially peeled off at the two interfaces, and the product substrate to which the second substrate and the third substrate are bonded is taken out. In the case where the product substrate is an electronic device, in the functional layer forming step, a functional layer is formed on the opposing surface of each of the second substrate and the third substrate.

According to the peeling apparatus and the peeling method of the laminated body of the present invention, and the manufacturing method of the electronic device, the substrate can be efficiently peeled off in the laminate including three or more substrates at the interface to be peeled off.

1‧‧ ‧ laminated body

1A‧‧‧1st laminate

1B‧‧‧2nd layer body

2‧‧‧Substrate

2a‧‧‧front of the substrate

2b‧‧‧Back of the substrate

2A‧‧‧Substrate

2Aa‧‧‧front of the substrate

2B‧‧‧Substrate

2Ba‧‧‧front of the substrate

3‧‧‧ reinforcing plate

3a‧‧‧ Strengthening the front of the board

3A‧‧‧ reinforcing plate

3B‧‧‧ reinforcing plate

3Bb‧‧‧ Back of the reinforcing board

4‧‧‧ resin layer

4A‧‧‧ resin layer

4B‧‧‧ resin layer

6‧‧‧Layer

6A, 6B‧‧‧ corner

7‧‧‧ functional layer

10‧‧‧ peeling start making device

12‧‧‧Workbench

14‧‧‧Support

16‧‧‧ Height adjustment device

18‧‧‧Transportation device

20‧‧‧Liquid

22‧‧‧Liquid supply device

24‧‧‧ interface

26‧‧‧ peeling start

28‧‧‧ interface

30‧‧‧ peeling start

32, 34‧‧‧ peeling start

40‧‧‧ peeling device

42‧‧‧Flexible board

44‧‧‧ movable body

46‧‧‧ movable device

48‧‧‧ drive

50‧‧‧ Controller

52‧‧‧Adsorption tablets

54‧‧‧Elastic film

56‧‧‧ body board

58‧‧‧ slots

60‧‧‧through holes

62‧‧‧ pole

64‧‧‧Ball joints

66‧‧‧Frame

68‧‧‧ cushioning members

70‧‧‧ panel

72‧‧‧Adsorption pad

74‧‧‧Transporting device

76‧‧‧Control device

A~H‧‧‧ arrow

N‧‧‧ knife

Fig. 1 is an enlarged side elevational view showing an essential part of an example of a laminate for a manufacturing step of an electronic device.

FIG. 2 is an enlarged side elevational view of an essential part of an example of a laminate produced in the middle of a manufacturing process of an LCD (Liquid Crystal Display).

3(A) to 3(E) are explanatory views showing a method of producing the first peeling start portion by the peeling start portion producing apparatus.

Fig. 4 is a plan view showing a laminate in which a peeling start portion is produced by a first peeling starting portion producing method.

5(A) to 5(E) are explanatory views showing a method of producing a second peeling start portion by the peeling start portion producing apparatus.

Fig. 6 is a plan view showing a laminate in which a peeling start portion is produced by a second peeling starting portion producing method.

Fig. 7 is a longitudinal sectional view showing the configuration of a peeling device of the embodiment.

Fig. 8 is a plan view schematically showing a flexible plate with respect to an arrangement position of a plurality of movable bodies of a flexible plate.

9(a) and 9(b) are a plan view and a cross-sectional view showing a configuration of a flexible plate.

Fig. 10 is a vertical cross-sectional view showing a peeling device for peeling a substrate at the interface of a laminate.

(A) to (C) are explanatory diagrams showing, in a time-series manner, a peeling method of peeling a reinforcing plate in which a laminated body having a peeling start portion is produced by a first peeling starting portion producing method.

12(A) to 12(C) are explanatory diagrams showing, in a time series, a peeling method for peeling a reinforcing plate of a laminated body in a time series.

Fig. 13 is an explanatory view showing a peeling method of peeling a reinforcing plate in which a laminated body having a peeling starting portion is produced by a second peeling starting portion producing method.

Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings.

Hereinafter, a case where the peeling device and the peeling method of the laminated body of the present invention are used in the manufacturing steps of the electronic device will be described.

Electronic device refers to electronic zeros such as display panels, solar cells, and thin film secondary batteries. Pieces. As the display panel, a liquid crystal display (LCD) panel, a plasma display panel (PDP: Plasma Display Panel), and an organic EL display (OELD: Organic Electro Luminescence Display) panel can be exemplified.

[Manufacturing steps of electronic device]

The electronic device is manufactured by forming a functional layer for an electronic device (in the case of an LCD, a thin film transistor (TFT) or a color filter (CF)) on the front surface of a substrate made of glass, resin, or metal.

Before the formation of the functional layer, the substrate is bonded to the reinforcing plate (substrate) to form a laminate. Thereafter, a functional layer is formed on the front surface of the substrate in the state of the laminate. Next, after the functional layer is formed, the reinforcing plate is peeled off from the substrate.

That is, the manufacturing step of the electronic device includes a functional layer forming step of forming a functional layer on the front surface of the substrate in a state of the laminated body, and a separating step of separating the reinforcing plate from the substrate on which the functional layer is formed. A peeling device and a peeling method of the laminated body of the present invention are applied in the separating step.

[Layer 1]

Fig. 1 is an enlarged side elevational view showing an essential part of an example of the laminated body 1.

The laminated body 1 includes a substrate 2 on which a functional layer is to be formed, and a reinforcing plate 3 that reinforces the substrate 2. Further, the reinforcing plate 3 is provided with a resin layer 4 as an adsorption layer on the front surface 3a, and the back surface 2b of the substrate 2 is bonded to the resin layer 4. In other words, the substrate 2 is bonded to the reinforcing plate 3 via the resin layer 4 by the van der Waals force acting on the resin layer 4 or the adhesive force of the resin layer 4.

Further, the laminated body 1 of Fig. 1 is a laminated body in which two substrates (the substrate 2 and the reinforcing plate 3) are peelably bonded together. Therefore, the laminated body in which three or more substrates are peelably bonded together is not the object of the present invention, but the basic structure of the laminated body is shown as a reference drawing.

[Substrate 2]

The substrate 2 is formed on its front surface 2a to form a functional layer. The substrate 2 can be exemplified by a glass substrate, a ceramic substrate, a resin substrate, a metal substrate, and a semiconductor substrate. Among these substrates, the glass substrate is excellent in chemical resistance and moisture permeability resistance, and has a small coefficient of linear expansion. Therefore, it is preferably used as the substrate 2 for an electronic device. Further, as the coefficient of linear expansion decreases, the pattern of the functional layer formed at a high temperature is less likely to shift during cooling.

Examples of the glass of the glass substrate include alkali-free glass, borosilicate glass, soda lime glass, high cerium oxide glass, and oxide-based glass containing other cerium oxide as a main component. The oxide-based glass is preferably a glass having a content of cerium oxide of 40 to 90% by mass in terms of oxide.

The glass of the glass substrate is preferably selected and used as a glass suitable for the type of electronic device to be manufactured, and a glass suitable for the manufacturing steps thereof. For example, for the glass substrate for a liquid crystal panel, it is preferable to use a glass (alkali-free glass) which does not substantially contain an alkali metal component.

The thickness of the substrate 2 is set according to the type of the substrate 2. For example, when a glass substrate is used for the substrate 2, the thickness thereof is preferably set to 0.7 mm or less, more preferably 0.3 mm or less, and further preferably set to 0.1 mm or less in order to reduce the weight and thickness of the electronic device. . When the thickness is 0.3 mm or less, good flexibility can be imparted to the glass substrate. Further, when the thickness is 0.1 mm or less, the glass substrate can be wound into a roll shape. However, from the viewpoint of the production of the glass substrate and the operation of the glass substrate, the thickness thereof is preferably 0.03 mm or more.

Further, in FIG. 1, the substrate 2 is composed of one substrate, but the substrate 2 may be composed of a plurality of substrates. In other words, the substrate 2 may be formed of a laminate in which a plurality of substrates are laminated. In this case, the total thickness of all the substrates constituting the substrate 2 is the thickness of the substrate 2.

[Reinforcing board 3]

Examples of the reinforcing plate 3 include a glass substrate, a ceramic substrate, a resin substrate, a metal substrate, and a semiconductor substrate.

The type of the reinforcing plate 3 is based on the type of electronic device to be manufactured, and the electronic device The type of the substrate 2 to be used is selected. When the reinforcing plate 3 and the substrate 2 are made of the same material, warpage and peeling due to temperature change can be reduced.

The difference (absolute value) between the average linear expansion coefficients of the reinforcing plate 3 and the substrate 2 is appropriately set depending on the size and shape of the substrate 2, and is preferably 35 × 10 ^-7 / ° C or less. Here, the "average linear expansion coefficient" means an average linear expansion coefficient in a temperature range of 50 to 300 ° C (JIS R3102: 1995).

The thickness of the reinforcing plate 3 is set to 0.7 mm or less, and is appropriately set depending on the type of the reinforcing plate 3, the type and thickness of the substrate 2 to be reinforced, and the like. Further, the reinforcing plate 3 may have a thickness thicker than the substrate 2 or may be thinner than the substrate 2. However, in order to reinforce the substrate 2, it is preferably 0.4 mm or more.

Further, in the present embodiment, the reinforcing plate 3 is composed of one substrate, but the reinforcing plate 3 may be composed of a laminated body in which a plurality of substrates are laminated. In this case, the total thickness of all the substrates constituting the reinforcing plate 3 is the thickness of the reinforcing plate 3.

[Resin layer 4]

In order to prevent peeling between the resin layer 4 and the reinforcing plate 3, the bonding force between the resin layer 4 and the reinforcing plate 3 is set to be higher than the bonding force with the substrate 2. Thereby, in the peeling step, the substrate 2 is peeled off at the interface between the resin layer 4 and the substrate 2.

The resin constituting the resin layer 4 is not particularly limited, and examples thereof include an acrylic resin, a polyolefin resin, a polyurethane resin, a polyimide resin, a polyoxymethylene resin, and a polyimide resin. Several kinds of resins can also be used in combination. Among them, from the viewpoint of heat resistance or peelability, a polydecene oxide resin or a polyamidene polyimide resin is preferable. In the embodiment, a polyoxynitride resin layer is exemplified as the resin layer 4.

The thickness of the resin layer 4 is not particularly limited, but is preferably 1 to 50 μm, more preferably 4 to 20 μm. When the thickness of the resin layer 4 is 1 μm or more, when bubbles or foreign matter are mixed between the resin layer 4 and the substrate 2, the thickness of the bubble or the foreign matter can be absorbed by the deformation of the resin layer 4. On the other hand, by setting the thickness of the resin layer 4 to 50 μm or less, the tree can be shortened. The formation time of the lipid layer 4 does not require excessive use of the resin of the resin layer 4, so it is economically good.

Further, the outer shape of the resin layer 4 is preferably the same as or smaller than the outer shape of the reinforcing plate 3 so that the reinforcing plate 3 can support the entirety of the resin layer 4. Further, the outer shape of the resin layer 4 is preferably the same as or larger than the outer shape of the substrate 2 so that the resin layer 4 can adhere the entirety of the substrate 2.

Further, in FIG. 1, the resin layer 4 is composed of one layer, but the resin layer 4 may be composed of two or more layers. In this case, the total thickness of all the layers constituting the resin layer 4 is the thickness of the resin layer. Moreover, in this case, the kind of the resin which comprises each layer may differ.

Further, in the embodiment, the resin layer 4 as an organic film is used as the adsorption layer, but an inorganic layer may be used instead of the resin layer 4. The inorganic film constituting the inorganic layer contains, for example, at least one selected from the group consisting of metal halides, nitrides, carbides, and carbonitrides.

Further, the laminated body 1 of Fig. 1 includes the resin layer 4 as an adsorption layer. However, the resin layer 4 may be removed to include the substrate 2 and the reinforcing plate 3. In this case, the substrate 2 and the reinforcing plate 3 are detachably bonded by a van der Waals force or the like acting between the substrate 2 and the reinforcing plate 3. Moreover, in this case, it is preferable to form an inorganic thin film on the front surface 3a of the reinforcing plate 3 so that the board|substrate 2 which is a glass substrate, and the reinforcement board 3 which is a glass plate are not the high temperature.

[Laminate 6 in which an embodiment having a functional layer is formed]

The functional layer is formed on the front surface 2a of the substrate 2 of the laminated body 1 by the functional layer forming step. As a method of forming the functional layer, a vapor deposition method such as a CVD (Chemical Vapor Deposition) method or a PVD (Physical Vapor Deposition) method or a sputtering method is used. The functional layer is formed into a specific pattern by photolithography and etching.

2 is a view showing one of the rectangular laminated bodies 6 which are formed in the middle of the manufacturing process of the LCD. The main part of the example is an enlarged side view, and is an example of a laminated body to which the present invention is applied.

Laminate 6 reinforced plate (first substrate) 3A, resin layer 4A, substrate (second substrate) 2A, functional layer 7, substrate (third substrate) 2B, resin layer 4B, and reinforcing plate (fourth substrate) 3B It is composed of layers. In other words, the laminated body 6 of Fig. 2 corresponds to a laminated body in which the laminated body 1 shown in Fig. 1 is symmetrically arranged via the functional layer 7. Hereinafter, the laminated body including the substrate 2A, the resin layer 4A, and the reinforcing plate 3A is referred to as a first laminated body 1A, and the laminated body including the substrate 2B, the resin layer 4B, and the reinforcing plate 3B is referred to as a second laminated body 1B.

A thin film transistor (TFT) as the functional layer 7 is formed on the front surface 2Aa of the substrate 2A of the first laminated body 1A, and a color filter as the functional layer 7 is formed on the front surface 2Ba of the substrate 2B of the second laminated body 1B. CF).

The front faces 2Aa and 2Ba of the first laminated body 1A and the second laminated body 1B based substrates 2A and 2B are superposed on each other and integrated. Thereby, the laminated body 6 of the structure in which the 1st laminated body 1A and the 2nd laminated body 1B are arrange|positioned mutually by the functional layer 7 is manufactured.

In the layered body 6, after the peeling start portion is formed by a knife in the peeling start portion of the separating step, the reinforcing sheets 3A, 3B are sequentially peeled off in the peeling step of the separating step, and thereafter, the polarizing plate is attached, An LCD as a product is manufactured by a backlight or the like.

[Peeling start unit making device 10]

3(A) to 3(E) are explanatory views showing a method of producing a first peeling start portion by a peeling start portion forming device (peeling start portion forming device) 10, and Fig. 3(A) shows a laminated body 6 FIG. 3(B) is an explanatory view of the peeling start portion 26 formed by the knife N at the interface 24, and FIG. 3(C) shows that the peeling start portion 30 is to be formed at the interface 28. FIG. 3(D) is an explanatory view of the peeling start portion 30 formed by the knife N at the interface 28, and FIG. 3(E) is a laminated body 6 having the peeling start portions 26 and 30. Illustrating. 4 is a plan view of the laminated body 6 in which the peeling start portions 26 and 30 are formed.

When the peeling start portions 26 and 30 are produced, as shown in Fig. 3(A), the back surface 3Bb of the reinforcing plate 3B of the laminated body 6 is adsorbed and held on the table 12 to be horizontally supported (X-axis side in the figure) to).

The knife N is horizontally supported by the holder 14 such that the blade edge faces the end surface of the corner portion (first corner portion) 6A of the laminated body 6. Further, the knife N is adjusted in the height direction (the Z-axis direction in the drawing) by the height adjusting device 16. Further, the blade N and the laminated body 6 are relatively moved in the horizontal direction by the transport device 18 such as a ball screw device. The transport device 18 only needs to move at least one of the blade N and the table 12 in the horizontal direction. In the embodiment, the knife N is moved. Further, the liquid supply device 22 that supplies the liquid 20 to the upper surface of the blade N before or during the insertion is disposed above the blade N.

[Method for producing first peeling start portion]

In the method of producing the first peeling start portion by the peeling start portion forming apparatus 10, the insertion position of the knife N is set to the corner portion 6A of the laminated body 6 and overlapped in the thickness direction of the laminated body 6, and The insertion amount of the knife N is set differently for each of the interfaces 24 and 28.

The order in which they are made will be explained.

In the initial state, the blade edge of the blade N exists at a position shifted in the height direction (Z-axis direction) with respect to the interface 24 between the substrate 2B and the resin layer 4B as the first insertion position. Therefore, first, as shown in FIG. 3(A), the blade N is moved in the height direction, and the height of the blade edge of the blade N is set to the height of the interface 24.

Thereafter, as shown in FIG. 3(B), the blade N is horizontally moved toward the corner portion 6A of the laminated body 6, and the blade N is inserted into the interface 24 by a specific amount. At this time, since the laminated body 6 is not sandwiched in the thickness direction, there is no concern that the substrate 2B is damaged when the blade N is inserted. Further, the liquid 20 is supplied from the liquid supply device 22 to the upper surface of the blade N at the time of insertion of the blade N or before insertion. Thereby, the substrate 2B of the corner portion 6A is peeled off from the resin layer 4B. Therefore, the peeling start portion 26 having a triangular shape in plan view as shown in FIG. 4 is formed at the interface 24. Further, the supply of the liquid 20 is not essential. However, when the liquid 20 is used, the liquid 20 remains in the peeling start portion 26 after the blade N is pulled out, so that the peeling start portion 26 which can no longer adhere can be produced.

Then, the blade N is pulled out from the corner 6A in the horizontal direction, as shown in Fig. 3(C), The blade edge of N is set to the height of the interface 28 between the substrate 2A and the resin layer 4A as the second insertion position.

Thereafter, as shown in Fig. 3(D), the knife N is horizontally moved toward the laminated body 6, and the knife N is inserted into the interface 28 by a certain amount. Similarly, the liquid 20 is supplied from the liquid supply device 22 to the upper surface of the blade N. Thereby, as shown in FIG. 3(D), the peeling start portion 30 is formed at the interface 28. Here, the insertion amount of the knife N to the interface 28 is set to be smaller than the insertion amount of the knife N to the interface 24. The above is the method for producing the first peeling starting portion. Further, the insertion amount of the knife N to the interface 24 may be set to be smaller than the insertion amount of the knife N to the interface 28.

The layered body 6 on which the peeling start portions 26 and 30 are formed is taken out from the peeling start portion forming apparatus 10, and conveyed to a peeling device (peeling device) described below, and the reinforcing plate 3B is placed on the interfaces 24 and 28 by the peeling device. 3A was peeled off in sequence.

The details of the peeling method will be described later, and as shown by the arrow A in Fig. 4, the laminated body 6 is deflected from the corner portion 6A toward the corner portion 6B opposed to the corner portion 6A at the peeling start portion. The interface 24 having a large area of 26 has the peeling start portion 26 as a starting point and the reinforcing plate 3B is first peeled off. Thereby, the reinforcing plate 3B is peeled off. Thereafter, the laminated body 6 is deflected again from the corner portion 6A toward the corner portion 6B, and the reinforcing plate 3A is peeled off from the peeling start portion 30 as the starting point 28 at the interface 28 where the area of the peeling start portion 30 is small. Thereby, the reinforcing plate 3A is peeled off.

That is, the first peeling starting portion is formed in the peeling start portion forming step, and the peeling start portions 26, 30 are sequentially formed on the interfaces 24, 28 using the knife N, and thereafter, in the peeling step at the interfaces 24, 28 The reinforcing plates 3B and 3A are peeled off in order. With this configuration, the laminated body 6 can be transported once from the peeling start portion forming apparatus 10 to the peeling device. Therefore, even if the laminated body 6 having the two interfaces 24 and 28 to be peeled off is provided, the laminated body 6 can be efficiently peeled and reinforced. Plates 3A, 3B.

Further, the direction of the deflection of the laminated body 6 shown by the arrow A in FIG. 4 may be a linear direction connecting the corner portion 6A and the corner portion 6B, or may be a direction of 45 degrees with respect to one side of the laminated body 6. In other words, the deflection direction of the laminated body 6 may be set from the corner portion 6A toward the corner portion 6B.

[Second peeling initiation unit production method]

In the second peeling start portion manufacturing method using the peeling start portion forming apparatus 10, the insertion position of the knife N is set to the corner portion 6A of the laminated body 6 and the other corner portion other than the corner portion 6A (here The corner portion 6B, but may be other corner portions, the peeling start portion is formed at the interface 24 between the substrate 2B of the corner portion 6A and the resin layer 4B, and the peeling start portion is formed at the interface 28 between the substrate 2A of the corner portion 6B and the resin layer 4A. Starting point.

The order in which they are made will be explained.

First, as shown in FIG. 5(A), the height of the blade edge of the blade N is set to the height of the interface 24.

Thereafter, as shown in Fig. 5(B), the knife N is horizontally moved toward the corner portion 6A, the knife N is inserted into the interface 24 at the corner portion 6A by a certain amount, and supplied from the liquid supply device 22 to the upper surface of the knife N. Liquid 20. Thereby, the peeling start portion 32 is formed at the interface 24 of the corner portion 6A (see FIGS. 5(E) and 6).

Then, the blade N is pulled out from the corner portion 6A in the horizontal direction, and as shown in FIG. 5(C), the blade edge of the blade N faces the corner portion 6B of the laminated body 6, and is set to the height of the interface 28.

Thereafter, as shown in Fig. 5(D), the knife N is horizontally moved toward the corner portion 6B, the knife N is inserted into the interface 28 at the corner portion 6B by a specific amount, and supplied from the liquid supply device 22 to the upper surface of the knife N. Liquid 20. Thereby, as shown in FIG. 5(E), the peeling start portion 34 is formed at the interface 28 of the corner portion 6B. The above is the second peeling initiation unit production method. Furthermore, the insertion amount of the knife N to the interfaces 24, 28 may be the same or different.

The laminated body 6 on which the peeling start portions 32 and 34 are formed is taken out from the peeling starting portion forming apparatus 10, transported to the peeling device, and the reinforcing sheets 3B and 3A are sequentially peeled off at the interfaces 24 and 28 by the peeling device. The details of the peeling method will be described later. As shown by the arrow A in Fig. 6, the laminate body 6 is deflected from the corner portion 6A toward the corner portion 6B, and the peeling start portion 32 is used as the starting point at the interface 24. The reinforcing plate 3B is peeled off. Thereby, the reinforcing plate 3B is peeled off. Thereafter, as shown by an arrow B in Fig. 6, by bending the laminated body 6 from the corner portion 6B toward the corner portion 6A, the reinforcing plate 3A is peeled off from the peeling start portion 34 as the starting point at the interface 28. With this, Strip the reinforcing plate 3A. Further, the peeling of the reinforcing plate 3A may be performed first.

As described above, the second peeling starting portion is formed in the peeling start portion forming step, and the peeling start portions 32 and 34 are sequentially formed on the interfaces 24 and 28 using the knife N, and in the peeling step at the interface 24, The reinforcing plates 3B and 3A were peeled off in sequence. With this configuration, the laminated body 6 can be transported once from the peeling start portion forming apparatus 10 to the peeling device. Therefore, even if the laminated body 6 having the two interfaces 24 and 28 to be peeled off is provided, the laminated body 6 can be efficiently peeled and reinforced. Plates 3A, 3B.

Further, the insertion amount of the knife N is preferably set to 7 mm or more, and more preferably set to about 15 to 20 mm, depending on the size of the laminated body 6.

Further, the direction of the deflection of the laminated body 6 shown by the arrow B in Fig. 6 may be a linear direction connecting the corner portion 6B and the corner portion 6A, or may be a direction of 45 degrees with respect to one side of the laminated body 6. In other words, the deflection direction of the laminated body 6 may be set from the corner portion 6B toward the corner portion 6A.

[Peeling device 40]

7 is a longitudinal cross-sectional view showing the configuration of the peeling device 40 of the embodiment, and FIG. 8 is a plan view schematically showing the flexible plate 42 of the plurality of movable bodies 44 of the peeling device 40 with respect to the position of the flexible plate 42. Further, Fig. 7 corresponds to a cross-sectional view taken along line C-C of Fig. 8, and further, the laminated body 6 is indicated by a solid line in Fig. 8.

As shown in Fig. 7, the peeling device 40 is provided with a pair of movable devices 46 and 46 arranged one above the other with the laminated body 6 interposed therebetween. Since the movable devices 46 and 46 have the same configuration, the movable device 46 disposed on the lower side of FIG. 7 will be described here, and the same reference numerals will be given to the movable device 46 disposed on the upper side, and the description thereof will be omitted.

The movable device 46 is composed of a flexible plate 42 , a plurality of movable bodies 44 , a plurality of driving devices 48 that move the movable body 44 up and down for each movable body 44 , and a controller that controls the driving device 48 for each driving device 48 . 50 and so on.

Since the flexible plate 42 flexes and deforms the reinforcing plate 3B, the reinforcing plate 3B is vacuum-sucked and held. Furthermore, it may be electrostatic adsorption or magnetic adsorption instead of vacuum adsorption.

Figure 9 (a) is a plan view of the flexible plate 42, and Figure 9 (b) is flexible along the D-D line of Figure 9 (a) A longitudinal section view of the sex plate 42.

The flexible plate 42 is composed of a cloth-like adsorption sheet 52 that adsorbs and holds the reinforcing plate 3B of the laminated body 6, an elastic sheet 54 coated with the adsorption sheet 52, and a main body plate 56 that supports the elastic sheet 54. A groove 58 penetrating through the frame is provided on the front surface of the elastic piece 54, and the suction piece 52 is covered on the inner side of the groove 58. Further, a plurality of through holes 60 are formed in the main body plate 56. One end of the through holes 60 communicates with the groove 58 and the other end is connected to an air suction source (for example, a vacuum pump) via a suction pipe (not shown).

Therefore, when the suction source is driven, the air in the suction line, the through hole 60, and the groove 58 is sucked, whereby the reinforcing plate 3B of the laminated body 6 is vacuum-sucked and held by the adsorption sheet 52. In this case, the outer shape of the adsorption sheet 52 is set to be larger than the shape of the reinforcing plate 3B so that the adsorption sheet 52 can integrally support the reinforcing plate 3B. Further, the material of the elastic sheet 54 is not particularly limited, and rubber is preferable. As the rubber, a polyoxyethylene rubber is preferred.

The body plate 56 and the elastic piece 54 are the same size. Moreover, the body plate 56 has a higher bending rigidity than the elastic piece 54, and the bending rigidity of the body plate 56 governs the bending rigidity of the flexible plate 42. The bending rigidity per unit width (1 mm) of the flexible plate 42 is preferably 1000 to 40,000 N. Mm ² /mm. For example, in the portion of the flexible plate 42 having a width of 100 mm, the bending rigidity becomes 100,000 to 4,000,000 N. Mm ² . By setting the bending stiffness of the flexible plate 42 to 1000N. The mm ² /mm or more prevents the bending of the reinforcing plate 3B held by the flexible plate 42 from being adsorbed. Also, by setting the bending stiffness of the flexible plate 42 to 40000 N. Below mm ² /mm, the reinforcing plate 3B which is adsorbed and held by the flexible plate 42 can be appropriately flexed and deformed.

As the main body plate 56, for example, a metal plate is used in addition to a resin plate such as a polyvinyl chloride (PVC) resin, a polycarbonate resin, an acrylic resin, or a polyacetal (POM) resin.

A plurality of movable bodies 44 having a disk shape as shown in FIG. 7 are fixed to the lower surface of the main body plate 56 in a lattice shape as shown in FIG. The movable bodies 44 are fixed to the main body plate 56 by fastening members such as bolts, and may be fixed next to the bolts. The movable bodies 44 are independently moved up and down by the drive unit 48 that is controlled by the controller 50.

That is, the controller 50 controls the driving device 48, and the movable body 44 on the side of the corner portion 6A of the laminated body 6 in Fig. 8 is sequentially moved to the movable body 44 on the side of the corner portion 6B of the peeling progress direction indicated by the arrow A. Falling moves. By this operation, the laminated body 6 is peeled off from the peeling start portion 26 (see FIG. 4) of the interface 24 as shown in the longitudinal cross-sectional view of FIG. Further, the laminated body 6 shown in Figs. 7 and 10 is a laminated body 6 in which the peeling start portions 26 and 30 are produced by the first peeling starting portion forming method described with reference to Fig. 3 .

The drive unit 48 is constituted by, for example, a rotary servo motor, a ball screw mechanism, or the like. The rotary motion of the servo motor is converted into a linear motion in the ball screw mechanism and transmitted to the rod 62 of the ball screw mechanism. A movable body 44 is provided at a front end of the rod 62 via a ball joint 64. Thereby, as shown in FIG. 10, the movable body 44 can be tilted following the flexural deformation of the flexible plate 42. Therefore, the flexible plate 42 can be flexibly deformed from the corner portion 6A toward the corner portion 6B without applying excessive force to the flexible plate 42. Further, the drive device 48 is not limited to the rotary servo motor and the ball screw mechanism, and may be a linear servo motor or a fluid pressure cylinder (for example, an air pressure cylinder).

A plurality of drive units 48 are preferably mounted to the elevating frame 66 via a cushioning member 68. The cushioning member 68 is elastically deformed in such a manner as to follow the flexural deformation of the flexible plate 42. Thereby, the rod 62 is tilted relative to the frame 66.

When the reinforcing plate 3B after peeling is detached from the flexible plate 42, the frame 66 is moved downward by a driving unit (not shown).

The controller 50 is configured to include a computer such as a CPU (Central Processing Unit), a ROM (Read Only Memory), and a RAM (Random Access Memory). The controller 50 controls a plurality of driving devices 48 for each driving device 48 by causing the CPU to execute a program recorded on the recording medium, thereby controlling the lifting movement of the plurality of movable bodies 44.

[Separation method of reinforcing plates 3A, 3B by peeling device 40]

[Separation method based on the method for producing the first peeling initiation portion]

11(A) to (C) to (A) to (C), the peeling start portion 26 is formed in the corner portion 6A by the first peeling start portion manufacturing method described with reference to Fig. 3 . The peeling method of the laminated body 6 of 30. That is, in the figure, a peeling method in which the reinforcing sheets 3A and 3B of the laminated body 6 are peeled off is shown in time series. Moreover, the loading operation of the laminated body 6 of the peeling device 40 and the unloading operation of the reinforcing plates 3A and 3B and the panel 70 after peeling are performed by the conveying device 74 including the adsorption pad 72 shown in Fig. 11(A). . In addition, in FIGS. 11 and 12, in order to avoid the complication of the drawings, the illustration of the movable device 46 is omitted. Further, the panel 70 is a product panel in which the substrate 2A and the substrate 2B other than the reinforcing plates 3A and 3B are bonded together via the functional layer 7.

Fig. 11(A) is a side view of the peeling device 40 in which the laminated body 6 is placed on the lower flexible plate 42 in accordance with the operation indicated by the arrows E and F of the conveying device 74. In this case, the lower flexible plate 42 and the upper flexible plate 42 are moved in advance so that the transfer device 74 is inserted between the lower flexible plate 42 and the upper flexible plate 42. To a position that is relatively fully retracted. Next, when the laminated body 6 is placed on the lower flexible plate 42, the reinforcing plate 3B of the laminated body 6 is vacuum-sucked by the lower flexible plate 42.

11(B), the lower flexible plate 42 and the upper flexible plate 42 move in a relatively close direction, and the reinforcing plate 3A of the laminated body 6 is vacuum-adsorbed by the upper flexible plate 42. A side view of the stripping device 40 in a state of being held.

Fig. 11(C) shows that the lower flexible plate 42 is deflected downward from the corner portion 6A of the laminated body 6 toward the corner portion 6B, and the peeling start portion 26 is formed at the interface 24 of the laminated body 6 ( Referring to Fig. 4), a side view of a state in which the reinforcing plate 3B is peeled off as a starting point. In other words, in the plurality of movable bodies 44 of the flexible plate 42 on the lower side shown in Fig. 10, the movable body 44 on the side of the corner portion 6A of the laminated body 6 is moved to the movable body 44 on the side of the corner portion 6B. The movement is lowered, and the reinforcing plate 3B is peeled off at the interface 24.

Fig. 12(A) is a side view of the peeling device 40 in a state in which the interface plate 24 is completely peeled off from the reinforcing plate 3B. According to the figure, the reinforced plate 3B after peeling is vacuum-sucked and held by the flexible plate 42 on the lower side, and the laminated body 6 other than the reinforcing plate 3B (including the reinforcing plate 3A and the panel 70) The laminated body) is vacuum-adsorbed and held on the upper flexible plate 42.

Further, the lower flexible plate 42 and the upper flexible plate 42 are moved to relatively sufficiently evacuated so that the transfer device 74 shown in Fig. 11(A) is inserted between the upper and lower flexible plates 42. After the location.

Thereafter, first, vacuum suction of the lower flexible plate 42 is released. Then, the reinforcing plate 3B is suction-held by the adsorption pad 72 of the conveying device 74. Next, the reinforcing plate 3B is carried out from the peeling device 40 in accordance with the operation of the conveying device 74 indicated by arrows G and H in Fig. 12(A).

Fig. 12(B) is a side view in which the laminated body 6 other than the reinforcing plate 3B is vacuum-sucked and held by the lower flexible plate 42 and the upper flexible plate 42. That is, the lower flexible plate 42 and the upper flexible plate 42 move in the relatively close direction, and the substrate 2B is vacuum-sucked and held by the lower flexible plate 42.

12(C) shows that the upper flexible plate 42 is bent upward from the corner portion 6A of the laminated body 6 toward the corner portion 6B, and the peeling start portion 30 is formed at the interface 28 of the laminated body 6 (refer to Fig. 4) is a side view showing a state in which the reinforcing plate 3A is peeled off from the starting point. In other words, in the plurality of movable bodies 44 of the flexible plate 42 on the upper side shown in Fig. 7, the movable body 44 on the side of the corner portion 6A of the laminated body 6 is moved up to the movable body 44 on the side of the corner portion 6B. Moving, the reinforcing plate 3A is peeled off at the interface 28.

Thereafter, the reinforcing plate 3A completely peeled from the panel 70 is taken out from the upper flexible plate 42, and the panel 70 is taken out from the lower flexible plate 42. The above is a peeling method in which the laminated body 6 having the peeling start portions 26 and 30 is formed in the corner portion 6A.

Therefore, according to the peeling method of the above embodiment, the peeling start portion manufacturing device 10 is used to form the peeling start portions 26 and 30 at the interfaces 24 and 28, and the reinforcing plate 3B is sequentially peeled off at the interfaces 24 and 28 by the peeling device 40, 3A. With this configuration, the laminated body 6 can be transported once from the peeling start portion forming apparatus 10 to the peeling device 40. Therefore, even if the laminated body 6 having the two interfaces 24 and 28 to be peeled off is provided, the laminated body 6 can be efficiently peeled off. Reinforcing plates 3A, 3B.

[Separation method based on the second peeling initiation portion preparation method]

FIG. 13 shows the peeling method of the laminated body 6 in which the peeling start portions 32 and 34 (see FIG. 6) are formed in the corner portions 6A and 6B by the second peeling start portion manufacturing method described in FIG. unit.

This peeling method first peels the reinforcing plate 3B from the interface 24 with the peeling start portion 32 as a starting point, and this step is the same as the steps shown in Figs. 11(A) to (C) to Figs. 12(A) and (B). Therefore, the description is omitted.

The peeling method based on the second peeling starting portion manufacturing method is such that the upper flexible plate 42 is lifted upward from the corner portion 6B of the laminated body 6 toward the corner portion 6A as shown in Fig. 13 In the flexural deformation, the reinforcing plate 3A is peeled off from the interface 28 of the laminated body 6 with the peeling start portion 34 (see FIG. 6) as a starting point.

Thereafter, the reinforcing plate 3A completely peeled from the panel 70 is taken out from the upper flexible plate 42, and the panel 70 is taken out from the lower flexible plate 42. The above is a peeling method in which the peeling start portion 32 and the laminated body 6 having the peeling start portion 34 formed in the corner portion 6B are formed in the corner portion 6A.

Therefore, according to the peeling method of the above-described embodiment, the peeling start portion forming device 10 is used to form the peeling start portions 32 and 34 at the interfaces 24 and 28, and the reinforcing plate 3B is sequentially peeled off at the interfaces 24 and 28 by the peeling device 40, 3A. With this configuration, the laminated body 6 can be transported once from the peeling start portion forming apparatus 10 to the peeling device 40. Therefore, even if the laminated body 6 having the two interfaces 24 and 28 to be peeled off is provided, the laminated body 6 can be efficiently peeled off. Reinforcing plates 3A, 3B.

Further, it is preferable that the control device (control device) 76 of Fig. 7 which integrally controls the peeling start portion forming device 10 and the peeling device 40 controls the peeling start portion of the interfaces 24, 28 of the peeling start portion producing device 10 The peeling action of the interfaces 24 and 28 of the action and peeling device 40.

In addition, in the embodiment, the laminated body 6 having the two interfaces 24 and 28 is exemplified, but the laminated body to be used in the present invention is not limited to the laminated body 6, and may be peeled off from three or more substrates. It can be laminated together.

The present invention has been described in detail with reference to the specific embodiments thereof. It is understood that various changes and modifications may be added without departing from the spirit and scope of the invention.

The present application is based on Japanese Patent Application No. 2014-093440, filed on Apr. 30, 2014, the content of which is hereby incorporated by reference.

6‧‧‧Layer

6A‧‧‧ corner

6B‧‧‧ corner

26‧‧‧ peeling start

30‧‧‧ peeling start

A‧‧‧ arrow

Claims (12)

A peeling device for a laminated body, comprising: a peeling start portion forming device for inserting a knife from an end portion of the laminated body from an end portion of the laminated body Two or more peeling start portions are formed by a specific amount of two or more interfaces on the interface between the substrate and the substrate; and the peeling device is configured to bend and deform at least one of the three or more substrates, and the above two The peeling start portions of the plurality of interfaces are sequentially peeled off from the starting point; and the control device is configured to control the peeling start portion forming device to sequentially cut the cutters at the two or more interfaces to produce the two or more After peeling off the starting portion, the peeling device is controlled to be sequentially peeled off from the peeling start portion of the two or more interfaces. The peeling device of the laminated body according to claim 1, wherein the insertion position of the blade of the peeling starting portion forming device is set to a position at which the first corner portion of the laminated body overlaps in the thickness direction of the laminated body, and The insertion amount of the blade is set differently for each of the interfaces, and the deflection direction of the substrate due to the peeling device is from a corner of the first corner toward a corner opposite to the first corner. set up. The peeling device of the laminated body according to claim 1, wherein the insertion position of the blade of the peeling starting portion forming device is set at least at a first corner portion of the laminated body and another corner portion other than the first corner portion, and The deflection direction of the substrate due to the peeling device is set from a corner portion of the first corner portion facing the first corner portion, and is oriented from the other corner portion toward the other corner portion Set at the corner. The stripping device of the laminate according to claim 1, wherein the at least the first substrate, the second substrate, the third substrate, and the fourth substrate are bonded to each other in a stepwise manner, and The insertion position of the blade of the peeling start portion forming device is set to be an interface between the first substrate and the second substrate, and an interface between the third substrate and the fourth substrate. A method for peeling a laminated body, comprising: a step of forming a peeling start portion, wherein the laminated body is formed by peelingly bonding three or more substrates, and inserting a blade from an end portion of the laminated body Two or more peeling start portions are respectively formed in a specific amount of two or more interfaces between the adjacent substrate and the substrate; and a peeling step of bending and deforming at least one of the three or more substrates The peeling start portion of the two or more interfaces is sequentially peeled off as a starting point. The peeling method of the laminated body according to claim 5, wherein the insertion position of the blade in the peeling start portion forming step is set to a position at which the first corner portion of the laminated body overlaps in the thickness direction of the laminated body, and The insertion amount of the knife is set differently for each of the interfaces, and the deflection direction of the substrate due to the peeling step is from a corner of the first corner toward a corner opposite to the first corner And set. The method of peeling a laminated body according to claim 5, wherein the insertion position of the blade in the peeling start portion forming step is at least set to a first corner portion of the laminated body and another corner portion other than the first corner portion, and The deflection direction of the substrate due to the peeling step is set from a corner portion of the first corner portion facing the first corner portion, and the other corner portion faces the other corner portion Set at the corner. The method for peeling a laminated body according to claim 5, 6 or 7, wherein the laminated system is formed by laminating at least a first substrate, a second substrate, a third substrate, and a fourth substrate, and the peeling is performed The insertion position of the blade in the initial portion forming step is set as an interface between the first substrate and the second substrate, and an interface between the third substrate and the fourth substrate. A method for producing an electronic device, comprising: a functional layer forming step of forming a functional layer on a front surface of at least one of the substrates included in a laminate which is formed by laminating three or more substrates And a separating step of separating the substrate on which the functional layer is formed from another substrate; the method of manufacturing the electronic device characterized in that the separating step includes a step of fabricating a peeling starting portion from the laminated body The end portion is formed by inserting a knife into two or more interface specific amounts of the interface between the adjacent substrate and the substrate of the laminated body to form two or more peeling start portions, and a peeling step for making the three or more pieces At least one of the substrates is flexibly deformed, and is sequentially peeled off from the peeling start portion of the two or more interfaces. The method of manufacturing an electronic device according to claim 9, wherein the insertion position of the blade in the peeling start portion forming step is set to a position at which the first corner portion of the laminated body overlaps in a thickness direction of the laminated body, and The insertion amount of the knives is set differently for each of the interfaces, and the deflection direction of the substrate due to the peeling step is from the angle of the first corner toward the angle opposite to the first corner Set by the Ministry. The method of manufacturing an electronic device according to claim 9, wherein the insertion position of the knife in the peeling start portion forming step is at least set to a first corner portion and a division of the laminated body The other corner portion other than the first corner portion, wherein the deflection direction of the substrate due to the peeling step is set from a corner portion of the first corner portion facing the first corner portion, and is set from The other corner portion is set toward a corner opposite to the other corner portion. The method of manufacturing an electronic device according to claim 9, wherein the laminated system is formed by laminating at least a first substrate, a second substrate, a third substrate, and a fourth substrate. The functional layer is formed on a facing surface of each of the second substrate and the third substrate, and the insertion position of the blade in the peeling start portion forming step is set to be an interface between the first substrate and the second substrate. And an interface between the third substrate and the fourth substrate.