WO2016111037A1 - Oscillateur à cristal et dispositif d'oscillation à cristal - Google Patents

Oscillateur à cristal et dispositif d'oscillation à cristal Download PDF

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Publication number
WO2016111037A1
WO2016111037A1 PCT/JP2015/074161 JP2015074161W WO2016111037A1 WO 2016111037 A1 WO2016111037 A1 WO 2016111037A1 JP 2015074161 W JP2015074161 W JP 2015074161W WO 2016111037 A1 WO2016111037 A1 WO 2016111037A1
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Prior art keywords
crystal
excitation electrode
longitudinal direction
openings
substrate
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PCT/JP2015/074161
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English (en)
Japanese (ja)
Inventor
和幸 能登
蒲生　昌夫
開田　弘明
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株式会社村田製作所
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Priority to JP2016568269A priority Critical patent/JP6179838B2/ja
Publication of WO2016111037A1 publication Critical patent/WO2016111037A1/fr

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    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H03H9/19—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator consisting of quartz

Definitions

  • the present invention relates to a crystal resonator and a crystal vibration device.
  • a crystal resonator having a thickness shear vibration as a main vibration is widely used.
  • a quartz crystal resonator it is known that a plurality of grooves are formed between an excitation electrode and an end portion in the propagation direction where thickness shear vibration propagates in order to improve the confinement of vibration energy. (See Patent Document 1). According to this, it is possible to perform stable processing in that the processing accuracy is high and the yield is expected to be improved as compared with the case of chamfering the quartz crystal substrate by barrel polishing or the like.
  • the lead electrode connected to the excitation electrode of the crystal resonator must be formed so as to intersect with the plurality of grooves. There was a possibility of disconnection. Therefore, it may be difficult to maintain stable quality from the viewpoint of electrical connection reliability.
  • the present invention has been made in view of such circumstances, and an object thereof is to improve the confinement property of vibration energy while maintaining stable quality.
  • a crystal resonator according to one aspect of the present invention is a crystal resonator having a thickness-shear vibration as a main vibration, and has a longitudinal direction and a lateral direction, and is a first end that is one end in the longitudinal direction. And an AT-cut quartz crystal substrate, and an excitation electrode provided on a second surface opposite to the first surface of the AT-cut quartz crystal substrate.
  • a plurality of openings are formed in the longitudinal direction between at least one of the first end and the second end and the excitation electrode, and the opening area of the plurality of openings is: It increases from the excitation electrode toward the end in the longitudinal direction.
  • the thickness at the end in the longitudinal direction is larger than that at the center of the quartz substrate. The same effect as that of the small configuration can be obtained, and leakage of vibration energy in the thickness shear vibration mode can be reduced. Therefore, it is possible to improve the confinement property of vibration energy while maintaining stable quality.
  • the plurality of openings may be formed both between the first end and the excitation electrode and between the second end and the excitation electrode.
  • the crystal resonator further includes an extension electrode that is electrically connected to the excitation electrode and extends toward the second end portion in the longitudinal direction of the AT-cut crystal substrate, and the plurality of openings have a first end. It may be formed between the portion and the excitation electrode.
  • the numerical apertures of the plurality of openings may increase from the excitation electrode toward the end in the longitudinal direction.
  • the opening diameter of each of the plurality of openings may increase from the excitation electrode toward the end in the longitudinal direction.
  • the plurality of openings may be concave portions.
  • the plurality of recesses may be formed on the first surface and the second surface of the AT-cut crystal substrate.
  • any one of the recesses formed on the first surface of the AT-cut crystal substrate may overlap with each of the other plurality of recesses formed on the second surface of the AT-cut crystal substrate. It may be arranged so that there is no.
  • each of the plurality of openings may be a through hole that penetrates the first surface and the second surface of the AT-cut crystal substrate.
  • the opening can be formed more easily.
  • the plurality of openings may be formed by etching.
  • a quartz-crystal vibrating device includes a base member, a lid member connected to the base member so as to form a sealed internal space, and the above-described crystal resonator housed in the internal space.
  • the crystal resonator including the configuration of the crystal substrate is provided, it is possible to improve the confinement property of vibration energy while maintaining stable quality.
  • FIG. 1 is a plan view for explaining the crystal resonator according to this embodiment.
  • 2 is a cross-sectional view taken along line II-II in FIG.
  • FIG. 3 is a plan view for explaining a crystal resonator according to a first modification of the present embodiment.
  • FIG. 4 is a plan view for explaining a crystal resonator according to a second modification of the present embodiment.
  • FIG. 5 is a cross-sectional view for explaining a crystal resonator according to a third modification of the present embodiment.
  • FIG. 6 is a cross-sectional view for explaining a crystal resonator according to a fourth modification of the present embodiment.
  • FIG. 1 is a plan view of a crystal resonator according to this embodiment
  • FIG. 2 is a cross-sectional view taken along the line II-II in FIG.
  • the crystal resonator 1 includes a crystal substrate 10 and a pair of first and second excitation electrodes 20 and 30 formed on the crystal substrate 10.
  • the quartz substrate 10 is made of, for example, quartz formed by AT cut.
  • a quartz resonator using an AT-cut quartz substrate has extremely high frequency stability over a wide temperature range, is excellent in aging characteristics, and can be manufactured at low cost. Further, the AT-cut quartz resonator is often used as a main vibration in a thickness shear vibration mode (Thickness Shear Mode).
  • the quartz substrate 10 has a substantially rectangular outer shape having a longitudinal direction parallel to the X direction and a short direction parallel to the Y direction, and the Z plane is based on the XY plane. It has a shape that is substantially symmetrical in the direction.
  • the quartz substrate 10 has a first surface 12 and a second surface 14 opposite to the first surface 12.
  • the first excitation electrode 20 is formed on the first surface 12 of the quartz substrate 10, while the second excitation electrode 30 is formed on the second surface 14 of the quartz substrate 10.
  • the first and second excitation electrodes 20 and 30 are arranged as a pair of electrodes so as to substantially overlap each other in the XY plan view.
  • An extension electrode 22 electrically connected to the first excitation electrode 20 is formed on the first surface 12 of the quartz substrate 10.
  • the extension electrode 22 is a second end of the first end portion 16 (end portion on the X-axis positive direction side) and the second end portion 18 (end portion on the X-axis negative direction side) in the longitudinal direction of the quartz crystal substrate 10.
  • connection electrode 24 that is electrically connected to the second excitation electrode 30 is formed on the second surface 14 of the quartz substrate 10.
  • the extension electrode 32 extends toward the second end portion 18 in the longitudinal direction of the quartz crystal substrate 10 and is electrically connected to the connection electrode 34 formed on the second surface 14.
  • the connection electrodes 24 and 34 electrically connected to the first and second excitation electrodes 20 and 30 are on the second end 18 side in the longitudinal direction on the second surface 14 of the quartz substrate 10 (that is, the short side). It is arranged on the side.
  • positioning, such as these extended electrodes and a connection electrode, and a routing shape are not limited to the above, You can design freely freely.
  • Each of the electrodes including the first and second excitation electrodes 20 and 30 may be formed, for example, by forming a base with a chromium (Cr) layer and forming a gold (Au) layer on the surface of the chromium layer. It is not limited.
  • a plurality of recesses 40 are formed on the first surface 12 of the quartz substrate 10 as one mode of the opening.
  • the plurality of concave portions 40 are formed side by side in the longitudinal direction between the first end portion 16 in the longitudinal direction of the quartz substrate 10 and the first excitation electrode 20.
  • the plurality of recesses 40 may be arranged in a plurality of stages (three stages in FIG. 1) in the longitudinal direction, or may be randomly arranged in the longitudinal direction.
  • the opening area of the plurality of recesses 40 increases from the first excitation electrode 20 toward the first end portion 16.
  • the opening area of the plurality of recesses 40 is not limited to a configuration that is continuously increased along the longitudinal direction, and may be a configuration that increases as a whole in the longitudinal direction.
  • the space between the first end portion 16 and the first excitation electrode 20 is divided into a plurality of regions (for example, two regions) with the same area in the longitudinal direction, one region on the first end portion 16 side
  • the opening area that is, the density of the opening
  • the numerical apertures of the plurality of recesses 40 may increase from the first excitation electrode 20 toward the first end portion 16.
  • the opening diameters of the recesses 40 may be approximately the same size or different sizes.
  • planar shape (XY planar view shape) of the opening of the recess 40 may be circular as shown in FIG. 1, or may be rectangular (square or rectangular), elliptical, or the like.
  • sectional shape of the opening of the recess 40 (the shape in the XZ sectional view) may be formed with a tapered inclined surface (curved surface or flat surface) as shown in FIG.
  • the bottom of the recess 40 may be a portion where the inclined surfaces intersect.
  • Such a plurality of recesses 40 can be formed by lithography and etching, for example.
  • a resist layer is formed on a quartz substrate, a plurality of openings are formed in the resist layer by performing exposure and development, and a plurality of regions are etched by etching a plurality of regions of the quartz substrate exposed by the plurality of openings.
  • the recess 40 can be formed. Etching proceeds in the thickness direction (that is, the depth direction) of the quartz substrate so as to form an inclined surface inward from the outer periphery of the recess 40, and finally the position where the inclined surfaces from the outer periphery of the recess 40 intersect. Etching is finished. Therefore, the depth and the inclination angle of the recess 40 depend on the etching time, the opening diameter of the recess 40, and the like.
  • the shape and formation method of the recess 40 are not limited to the above.
  • the recess 40 may have a curved inner surface or a shape having a bottom surface and a side wall surface rising vertically from the bottom surface. Good. Or a cone shape may be sufficient and a truncated cone shape may be sufficient.
  • the method of forming the recess 40 is not limited to lithography and etching, and may be formed using other physical and chemical methods.
  • the extension electrode 22 and the connection electrode 24 that are electrically connected to the first excitation electrode 20 are arranged on the second end 18 side in the longitudinal direction of the quartz substrate 10, a plurality of extension electrodes 22 and connection electrodes 24 are provided.
  • the recess 40 is formed on the first end 16 side in the longitudinal direction of the quartz substrate 10. That is, the plurality of recesses 40 are formed avoiding the arrangement of the extension electrode 22 and the connection electrode 24. Therefore, it is possible to prevent the electrode from being disconnected due to the recess 40.
  • a plurality of recesses 42 as one aspect of the opening is also formed on the second surface 14 of the quartz substrate 10.
  • the plurality of recesses 42 are formed side by side in the longitudinal direction between the first end 16 in the longitudinal direction of the quartz substrate 10 and the second excitation electrode 30. That is, the range in which the plurality of recesses 42 are formed substantially overlaps the range in which the recesses 40 are formed.
  • the opening areas of the plurality of recesses 42 increase from the first excitation electrode 20 toward the first end portion 16.
  • the other configurations of the recess 42 are the same as those described for the recess 40 described above.
  • the plurality of recesses 40, 42 includes a plurality of recesses formed on the second surface 14 of the crystal substrate 10, any one of the recesses 40 formed on the first surface 12 of the crystal substrate 10.
  • Each of 42 is arranged so as not to overlap.
  • the center of any one of the recesses 40 is arranged so as not to overlap with the center of each of the plurality of recesses 42.
  • Any one of the recesses 40 may not overlap all of the plurality of recesses 42, or may be arranged so as to overlap only a part of any one of the recesses 42.
  • the recesses 40 and 42 are arranged so as to be offset from each other, and even if a plurality of recesses are formed from both sides of the quartz substrate 10, the mechanical strength of the quartz substrate 10 is prevented from being lowered. Can do.
  • the opening areas of the plurality of recesses 40 and 42 are directed from the first and second excitation electrodes 20 and 30 toward the end in the longitudinal direction (for example, the first end 16). It is possible to have the same effect as the structure in which the thickness of the end portion in the longitudinal direction is smaller than the central portion of the quartz substrate 10 which is larger than the center portion, and the leakage of vibration energy in the thickness shear vibration mode is reduced. be able to. Therefore, it is possible to improve the confinement property of vibration energy while maintaining stable quality.
  • FIG. 3 is a plan view showing a crystal resonator 2 according to a first modification of the present embodiment. As shown in this modification, a plurality of recesses may be formed on one end side in the longitudinal direction on the first surface, and may be formed on the other end side in the longitudinal direction on the second surface.
  • the crystal resonator 2 has a crystal substrate 11, and a plurality of recesses 40 are formed on the first surface 12 of the crystal substrate 11 between the first end portion 16 and the first excitation electrode 20.
  • a plurality of recesses 44 are formed between the second end 18 and the second excitation electrode 30.
  • the plurality of recesses 40 and 44 be formed avoiding the arrangement of the extension electrode and the connection electrode.
  • the content of the recessed part demonstrated about the said embodiment is applicable to the other structure of the recessed parts 40 and 44.
  • the plurality of concave portions 44 are formed on the second end 18 side, which is the connection electrode 24 side, on the second surface 14, but the present invention is not limited to this.
  • a plurality of recesses 44 may be formed on the first end 16 side in the surface 14 (in this case, a plurality of recesses 40 are formed on the second end 18 side in the first surface 12). Thereby, a plurality of recesses can be freely formed on the second surface 14 without being obstructed by the arrangement of the connection electrodes.
  • FIG. 4 is a plan view showing a crystal resonator 3 according to a second modification of the present embodiment. As shown in this modification, a plurality of recesses may be formed on both end portions of the quartz substrate.
  • the crystal resonator 3 has a crystal substrate 50, and the first surface 12 of the crystal substrate 50 is arranged in the longitudinal direction between the first end portion 16 and the first excitation electrode 20.
  • a plurality of recesses 52 are formed, and a plurality of recesses 54 are formed between the second end portion 18 and the first excitation electrode 20 in the longitudinal direction.
  • the opening area of the plurality of recesses 54 increases from the first excitation electrode 20 toward the second end 18, and more specifically, the numerical aperture (that is, the number of recesses) increases.
  • the plurality of recesses 54 are preferably formed in a region that avoids the extended electrode 22. Thereby, it is possible to prevent the electrode from being disconnected due to the recess 54.
  • the recesses 52 and 54 may also be formed on the second surface 14 of the quartz substrate 50.
  • the content of the recessed part demonstrated about the said embodiment is applicable to the other structure of the recessed parts 52 and 54.
  • FIG. According to this modification, since the plurality of recesses 52 and 54 are formed on both ends of the quartz substrate 50, it is possible to further improve the energy vibration confinement.
  • FIG. 5 is a plan view showing a crystal resonator 5 according to a third modification of the present embodiment. As shown in this modification, the plurality of recesses may have larger opening diameters on the end portion side in the longitudinal direction than on the excitation electrode side.
  • the crystal resonator 5 has a crystal substrate 60, and is arranged on the first surface 12 of the crystal substrate 60 in the longitudinal direction between the first end portion 16 and the first excitation electrode 20.
  • a plurality of recesses 62, 64, 66 are formed. Specifically, the concave portion 62, the concave portion 64, and the concave portion 66 are arranged in this order along the positive direction of the X axis.
  • the concave portion 64 has a larger opening diameter than the concave portion 62, and The opening diameter is larger.
  • the several recessed part from which these opening diameters differ may be formed in the 2nd end part 18 side similarly to the content already demonstrated, or may be formed also in the 2nd surface 14.
  • the opening area of the plurality of recesses may be increased in the longitudinal direction by combining the numerical aperture and the opening diameter.
  • FIG. 6 is a cross-sectional view showing a crystal resonator 7 according to a fourth modification of the present embodiment. As shown in this modification, the plurality of openings may be through holes.
  • the crystal resonator 7 has a crystal substrate 70, and a plurality of through holes 72 that penetrate the first surface 12 and the second surface 14 are formed in the crystal substrate 70.
  • the plurality of through holes 72 are formed side by side in the longitudinal direction between the first end portion 16 and the first excitation electrode 20 (and the second excitation electrode 30).
  • the plurality of through holes may be formed between the second end portion 16 and the first excitation electrode 20 (and the second excitation electrode 30).
  • the through hole 72 is preferably formed in a region that avoids the extended electrodes 22 and 32 and the connection electrodes 24 and 34.
  • the planar shape (XY planar view shape) of the opening of the through hole 72 may be a circular shape, a rectangular shape, an elliptical shape, or the like. Further, the cross-sectional shape of the through-hole 72 (XZ cross-sectional view shape) may be formed with a tapered inclined surface (curved surface or flat surface) as shown in FIG. For example, when the through hole 72 is formed by etching, the opening diameter may be gradually reduced from the first surface 12 or the second surface 14 toward the center of the crystal substrate 60.
  • FIG. 7 shows a plan view of the crystal resonator device according to the present embodiment
  • FIG. 8 is a cross-sectional view taken along line VIII-VIII in FIG. In FIG. 7, the lid member is omitted.
  • the crystal resonator device 100 includes the crystal resonator device 1 and a package member 110 in which the crystal resonator device 1 is accommodated.
  • the package member 110 includes a base member 120 and a lid member 130.
  • the crystal resonator 1 is accommodated in a sealed internal space (cavity) 112 formed by connecting a base member 120 and a lid member 130.
  • the crystal unit 1 is supported by the package member 110 (base member 120) so that one end where the connection electrodes 24 and 34 are disposed is a fixed end, and the other end of the crystal unit 1 is free. It is housed to be at the end.
  • the base member 120 may be formed of an insulating ceramic such as alumina, or may be formed of another insulating material such as a synthetic resin.
  • the lid member 130 may be formed of, for example, a metal, an insulating material such as insulating ceramics or synthetic resin, or a composite material thereof.
  • the base member 120 has a plurality of electrodes 122 and 124 formed on the upper surface on which the crystal unit 1 is mounted.
  • the plurality of electrodes 122 and 124 are electrically connected to the connection electrodes 24 and 34 of the crystal resonator 1 via the conductive adhesive 116, respectively.
  • the electrode 122 of the base member 120 is electrically connected to the external electrode 123 provided on the back surface of the corner portion of the base member 120 through the extension electrode 122a, while the electrode 124 of the base member 120 is the extension electrode. It is electrically connected to the external electrode 125 provided on the back surface of the other corner portion of the base member 120 via 124a.
  • the external electrodes 123 and 125 may be provided at positions facing each other in the XY plan view of the crystal unit 1 (for example, positions on a diagonal line of a substantially rectangular outer shape as shown in FIG. 6). Further, in the example shown in FIG. 6, the external electrodes 126 and 128 may be formed in corner portions other than the corner portion where the external electrodes 123 and 125 are provided. These external electrodes 126 and 128 may be grounded or may be dummy electrodes that are not electrically connected.
  • the lid member 130 has an opening for forming the internal space 112 as shown in FIG.
  • the lid member 130 is, for example, a cap, and the open end portion of the lid member 130 is bonded to the outer peripheral end portion of the base member 120 by the insulating adhesive 114, so that the sealed internal space 112 can be formed.
  • the connection aspect of the base member 120 and the lid member 130 is not restricted to the thing by resin materials, such as an adhesive agent, For example, you may apply welding sealing and glass sealing.
  • the lid member 130 has a shape having an opening for forming the internal space 112.
  • the base member 120 in which the external electrode is formed is replaced with the internal space 112. You may form in the shape which has the opening for forming.
  • the crystal resonator device 100 includes the above-described crystal resonator 1, it is possible to provide a crystal resonator device having high vibration energy confinement properties while maintaining stable quality.
  • the present invention is not limited to the above embodiment and can be applied in various modifications.
  • the contents described in each of the above embodiments (or modifications) can be applied in appropriate combination with the contents described in the other embodiments.
  • the present invention is not limited to this. It does not exclude the aspect of forming the opening of the present invention on the premise of a shape in which the thickness is gradually reduced from the central portion toward the end portion, such as a bell structure or a convex structure.
  • each embodiment described above is for facilitating understanding of the present invention, and is not intended to limit the present invention.
  • the present invention can be changed / improved without departing from the spirit thereof, and the present invention includes equivalents thereof.
  • those obtained by appropriately modifying the design of each embodiment by those skilled in the art are also included in the scope of the present invention as long as they include the features of the present invention.
  • each element included in each embodiment and its arrangement, material, condition, shape, size, and the like are not limited to those illustrated, and can be changed as appropriate.
  • each element included in each embodiment can be combined as much as technically possible, and combinations thereof are included in the scope of the present invention as long as they include the features of the present invention.
  • Crystal substrate 11 Crystal substrate 12 1st surface 14 2nd surface 16 1st edge part 18 2nd edge part 20 1st excitation electrode 22 Extension electrode 30 2nd excitation electrode 32 Extension electrode 40 Recessed part 42 Recessed part 44 recess 50 crystal substrate 52 recess 54 recess 60 crystal substrate 62 recess 70 crystal substrate 72 through hole 100 crystal oscillation device 112 internal space 120 base member 130 lid member

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  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)

Abstract

La présente invention améliore le confinement d'énergie d'oscillation tout en maintenant une qualité stable. L'invention concerne un oscillateur à cristal 1, dont la vibration principale est une vibration de cisaillement en épaisseur. L'oscillateur à cristal 1 présente une direction longue et une direction courte, comporte une première partie d'extrémité 16 qui est une partie d'extrémité dans la direction longue et une seconde partie d'extrémité 18 qui est l'autre partie d'extrémité dans la direction longue, et est pourvu d'un substrat en cristal à coupe AT 10 et d'électrodes d'excitation 20, 30 qui sont disposées sur une première surface 12 du substrat en cristal à coupe AT 10 et sur une seconde surface 14 qui est à l'opposé de la première surface 12. Une pluralité d'ouvertures 40, 42 sont formées dans le substrat en cristal à coupe AT 10 le long de la direction longue entre les électrodes d'excitation 20, 30 et la première partie d'extrémité 16 et/ou la seconde partie d'extrémité 18. L'aire d'ouverture de la pluralité d'ouvertures 40, 42 croît en allant des électrodes d'excitation 20, 30 vers la ou les parties d'extrémité 16, 18 dans la direction longue.
PCT/JP2015/074161 2015-01-09 2015-08-27 Oscillateur à cristal et dispositif d'oscillation à cristal WO2016111037A1 (fr)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20170111027A1 (en) * 2015-10-20 2017-04-20 Seiko Epson Corporation Piezoelectric vibrator, electronic apparatus, and vehicle
JPWO2021131121A1 (fr) * 2019-12-27 2021-07-01

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Publication number Priority date Publication date Assignee Title
JPH05136647A (ja) * 1991-11-11 1993-06-01 Matsushita Electric Ind Co Ltd 厚みすべり振動子
JPH06291590A (ja) * 1993-03-31 1994-10-18 Citizen Watch Co Ltd 圧電振動子とその製造方法
JPH0884044A (ja) * 1994-09-13 1996-03-26 Daishinku Co 高周波圧電振動デバイス
JP2003046366A (ja) * 2001-07-30 2003-02-14 Toyo Commun Equip Co Ltd 圧電振動子及びその製造方法

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Publication number Priority date Publication date Assignee Title
JP4771070B2 (ja) * 2006-01-12 2011-09-14 エプソントヨコム株式会社 圧電振動片及び圧電デバイス
JP2016072667A (ja) * 2014-09-26 2016-05-09 京セラクリスタルデバイス株式会社 圧電振動素子及び圧電デバイス

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05136647A (ja) * 1991-11-11 1993-06-01 Matsushita Electric Ind Co Ltd 厚みすべり振動子
JPH06291590A (ja) * 1993-03-31 1994-10-18 Citizen Watch Co Ltd 圧電振動子とその製造方法
JPH0884044A (ja) * 1994-09-13 1996-03-26 Daishinku Co 高周波圧電振動デバイス
JP2003046366A (ja) * 2001-07-30 2003-02-14 Toyo Commun Equip Co Ltd 圧電振動子及びその製造方法

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20170111027A1 (en) * 2015-10-20 2017-04-20 Seiko Epson Corporation Piezoelectric vibrator, electronic apparatus, and vehicle
US9960751B2 (en) * 2015-10-20 2018-05-01 Seiko Epson Corporation Piezoelectric vibrator, electronic apparatus, and vehicle
JPWO2021131121A1 (fr) * 2019-12-27 2021-07-01
WO2021131121A1 (fr) * 2019-12-27 2021-07-01 株式会社村田製作所 Élément de vibration piézoélectrique, vibrateur piézoélectrique et dispositif électronique
JP7465454B2 (ja) 2019-12-27 2024-04-11 株式会社村田製作所 圧電振動素子、圧電振動子及び電子装置

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