WO2016071986A1 - レーザ加工方法及び装置 - Google Patents
レーザ加工方法及び装置 Download PDFInfo
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- WO2016071986A1 WO2016071986A1 PCT/JP2014/079435 JP2014079435W WO2016071986A1 WO 2016071986 A1 WO2016071986 A1 WO 2016071986A1 JP 2014079435 W JP2014079435 W JP 2014079435W WO 2016071986 A1 WO2016071986 A1 WO 2016071986A1
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- Prior art keywords
- laser beam
- optical system
- laser
- workpiece
- incident optical
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- 238000000034 method Methods 0.000 title claims abstract description 23
- 238000003754 machining Methods 0.000 title abstract description 13
- 230000003287 optical effect Effects 0.000 claims abstract description 189
- 238000012546 transfer Methods 0.000 claims abstract description 75
- 238000012545 processing Methods 0.000 claims description 97
- 238000003672 processing method Methods 0.000 claims description 16
- 230000001678 irradiating effect Effects 0.000 claims description 5
- 238000010586 diagram Methods 0.000 description 13
- 230000000052 comparative effect Effects 0.000 description 11
- 230000005540 biological transmission Effects 0.000 description 9
- 238000005259 measurement Methods 0.000 description 6
- 230000007423 decrease Effects 0.000 description 5
- 230000002093 peripheral effect Effects 0.000 description 4
- 230000006866 deterioration Effects 0.000 description 3
- 238000004088 simulation Methods 0.000 description 3
- 230000032683 aging Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/04—Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light
- B23K26/046—Automatically focusing the laser beam
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/062—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/38—Removing material by boring or cutting
- B23K26/382—Removing material by boring or cutting by boring
Definitions
- the present invention relates to a laser processing method and apparatus for processing a workpiece by irradiating a laser beam.
- the output of the laser oscillator may decrease due to aging of the laser oscillator or individual differences.
- the output of the laser oscillator decreases, there is a possibility that the necessary processing cannot be performed on the workpiece. Specifically, there is a possibility that a hole having a desired diameter cannot be formed in the workpiece.
- Patent Document 1 As a related technique, in Patent Document 1 below, a movable lens is installed between an aperture and a laser oscillator, and the laser beam diameter on the aperture is changed by changing the position of the movable lens, and after passing through the aperture. A technique for improving the reproducibility of processing by adjusting the laser power is disclosed.
- Patent Document 2 discloses a technique for obtaining a desired processing width by moving a converging lens according to the height of a workpiece and focusing the laser beam on the workpiece surface.
- Patent Document 2 does not include an aperture, and does not disclose adjusting the energy of a laser beam with the aperture. That is, it is not considered that the energy of the laser beam emitted from the laser oscillator is lowered due to the deterioration of the laser oscillator with time or individual differences. Furthermore, the technique described in Patent Document 2 moves the converging lens in accordance with the height of the work to focus the laser beam on the work surface.
- the present invention has been made in view of the above, and an object of the present invention is to obtain a laser processing method and apparatus capable of performing desired laser processing on a workpiece even when the output of a laser oscillator is reduced. .
- the present invention provides an incident optical system for irradiating a mask with a laser beam emitted from a laser oscillator in a direction in which the laser beam travels or in a direction opposite to the laser beam travel direction.
- the first step of adjusting the energy of the laser beam after passing through the opening of the mask and the movement of the incident optical system on the workpiece, the laser beam after passing through the opening on the workpiece And a second step of adjusting the diameter of the workpiece on the workpiece surface by moving the transfer optical system to be irradiated in the laser beam traveling direction or in the direction opposite to the laser beam traveling direction. It is characterized by.
- the laser processing method and apparatus according to the present invention have an effect that desired laser processing can be performed on a workpiece even when the output of a laser oscillator is lowered.
- the figure which shows the profile of the laser beam after passing the opening part of Embodiment 1 The figure which shows the profile of the laser beam in the to-be-processed surface of the to-be-processed object of Embodiment 1
- the figure which shows the profile of the laser beam in the to-be-processed surface of the to-be-processed object of Embodiment 1 Flowchart showing the laser processing method of the first embodiment Graph showing the relationship between the position of the incident optical system, the position of the transfer optical system, and the processing hole diameter in the first embodiment
- the figure which shows the table memorize
- FIG. 1 The figure which shows the mode at the time of adjusting the energy of the laser beam of the laser processing apparatus of Embodiment 1.
- FIG. 3 The figure which shows the structure of the laser processing apparatus of Embodiment 3.
- the figure which shows the table memorize
- the figure which shows the structure of the laser processing apparatus of a comparative example The figure which shows the profile of the laser beam on the mask of a comparative example The figure which shows the profile of the laser beam after passing the opening part of a comparative example The figure which shows the profile of the laser beam on the mask of a comparative example The figure which shows the profile of the laser beam after passing the opening part of a comparative example
- FIG. 1 is a diagram illustrating the configuration of the laser processing apparatus according to the first embodiment.
- the laser processing apparatus 1 includes a laser oscillator 2 that emits a laser beam 15a, an incident optical system 3 on which the laser beam 15a is incident, and the incident optical system 3 in the traveling direction 16 of the laser beam 15a or A first drive unit 4 that moves the laser beam 15a in a direction 17 opposite to the traveling direction 16 of the laser beam 15a.
- the laser processing apparatus 1 includes a mask 5 having an aperture 5a that allows a part of the laser beam 15b that has passed through the incident optical system 3 to pass through, and a transmission optical that transmits the laser beam 15c that has passed through the aperture 5a.
- the system 6 and the transfer optical system 7 that receives the laser beam 15c transmitted by the transmission optical system 6 and transfers the image of the opening 5a onto the processing surface of the workpiece 14, and the transfer optical system 7 as a laser beam.
- a second drive unit 8 that moves in a direction 19 opposite to the traveling direction 18 of the laser beam 15c or the traveling direction 18 of the laser beam 15c.
- the laser processing apparatus 1 includes a table 9 on which the workpiece 14 is placed, a third drive unit 10 that moves the table 9 in a direction that intersects the traveling direction 18 of the laser beam 15c, and a table 9 A sensor 11 that measures the laser beam 15c, a storage unit 12 that stores the table 12a, and a control unit 13 that controls the laser oscillator 2, the first drive unit 4, the second drive unit 8, and the third drive unit 10. And comprising.
- the incident optical system 3 is a single lens, but it may be a plurality of lenses.
- the incident optical system 3 is movable in a traveling direction 16 of the laser beam 15a or a direction 17 opposite to the traveling direction 16 of the laser beam 15a.
- the controller 13 can adjust the beam diameter of the laser beam 15 b incident on the mask 5 by moving the incident optical system 3. Thereby, the control part 13 can change the ratio of the laser beam 15c with respect to the whole laser beam 15b, and can adjust the energy of the laser beam 15c.
- the incident optical system 3 is positioned at a position where the energy of the laser beam 15c becomes energy suitable for processing the workpiece 14 in the initial stage.
- the position of the incident optical system 3 at this time will be referred to as a reference position of the incident optical system 3.
- the transmission optical system 6 is composed of one or a plurality of mirrors.
- the transmission optical system 6 may include a scan mirror.
- the scan mirror is exemplified by a galvano mirror.
- the transfer optical system 7 may be an f ⁇ lens.
- the transfer optical system 7 is positioned at a position where an image of the opening 5a is formed on the processing surface of the workpiece 14 in the initial stage.
- the position of the transfer optical system 7 at this time will be referred to as a reference position of the transfer optical system 7.
- the laser beam 15 a emitted from the laser oscillator 2 first enters the incident optical system 3.
- a laser beam 15 b whose beam diameter has been changed by the incident optical system 3 enters the mask 5.
- the laser beam 15 b converges once at the convergence point 20 and then diverges and enters the mask 5.
- the laser beam 15 b may enter the mask 5 while being converged, or may be incident on the mask 5 after being collimated. May be incident.
- the control unit 13 controls the position of the incident optical system 3 so that the beam diameter of the laser beam 15b on the mask 5 is larger than the opening diameter of the opening 5a. Thereby, a part of the laser beam 15b passes through the opening 5a and becomes the laser beam 15c. At this time, the control unit 13 is configured so that the energy of the laser beam 15c after passing through the opening 5a is constant even if the energy of the laser beam 15a is reduced due to individual differences of the laser oscillator 2 or deterioration with time. Adjust the position of system 3.
- the control unit 13 moves the incident optical system 3 in the traveling direction 16 of the laser beam 15a and moves the laser beam 15b on the mask 5. Reduce the beam diameter at. Thereby, the control part 13 can raise the ratio of the laser beam 15c with respect to the whole laser beam 15b, and can maintain the energy of the laser beam 15c.
- the laser beam 15 c that has passed through the opening 5 a is incident on the transfer optical system 7 by the transmission optical system 6.
- the transfer optical system 7 transfers the image of the opening 5 a onto the processing surface of the workpiece 14. Thereby, a processed hole corresponding to the opening diameter of the opening 5a is formed in the workpiece 14.
- the processed hole may be a bottomed hole or a through hole.
- FIG. 14 is a diagram illustrating a configuration of a laser processing apparatus of a comparative example.
- the laser processing apparatus 81 includes a laser oscillator 82 that emits a laser beam 90a, an incident optical system 83 on which the laser beam 90a is incident, and the incident optical system 83 in the traveling direction 100 of the laser beam 90a or And a drive unit 84 that moves the laser beam 90a in a direction 101 opposite to the traveling direction 100 of the laser beam 90a.
- the laser processing apparatus 81 includes a mask 85 having an opening 85a that allows a part of the laser beam 90b that has passed through the incident optical system 83 to pass, and a transmission optical system 86 that transmits the laser beam 90c that has passed through the opening 85a.
- the laser beam 90c transmitted by the transmission optical system 86 is incident, and the transfer optical system 87 for transferring the image of the opening 85a onto the processing surface of the workpiece 89, the laser oscillator 82, and the driving unit 84 are controlled.
- a control unit 88 is controlled.
- the laser beam 90 a emitted from the laser oscillator 82 first enters the incident optical system 83.
- the laser beam 90 b whose beam diameter has been changed by the incident optical system 83 is incident on the mask 85.
- the laser beam 90 b converges once at the convergence point 91 and then diverges and enters the mask 85.
- the laser beam 90 c after passing through the opening 85 a is incident on the transfer optical system 87 by the transmission optical system 86.
- the transfer optical system 87 transfers the image of the opening 85 a onto the processing surface of the workpiece 89. Thereby, a processed hole corresponding to the opening diameter of the opening 85a is formed in the workpiece 89.
- FIG. 15 is a diagram showing a laser beam profile on the mask of the comparative example.
- FIG. 16 is a diagram illustrating a profile of the laser beam after passing through the opening of the comparative example. Note that the profile of the laser beam may be referred to as a beam shape or a mode shape.
- the profile 92 of the laser beam 90b on the mask 85 has a Gaussian shape.
- a part of the laser beam 90 b passes through an opening 85 a having a diameter 93.
- the profile 94 of the laser beam 90 c after passing through the opening 85 a has a diameter 93.
- the beam intensity of the entire laser beam 90c exceeds the machining threshold 99, and a machining hole having a desired diameter can be formed in the workpiece 89.
- the controller 88 moves the incident optical system 83 in the traveling direction 100 of the laser beam 90a to reduce the beam diameter of the laser beam 90b on the mask 85.
- the control part 88 can raise the ratio of the laser beam 90c with respect to the whole laser beam 90b, and can maintain the energy of the laser beam 90c.
- FIG. 17 is a diagram showing a laser beam profile on the mask of the comparative example.
- FIG. 18 is a diagram showing a profile of the laser beam after passing through the opening of the comparative example.
- the profile 95 of the laser beam 90b on the mask 85 is Gaussian. However, since the diameter of the laser beam 90b is smaller than the profile 92 before the output reduction of the laser oscillator 82 shown in FIG. 15, the profile 95 of the laser beam 90b on the mask 85 has a sharp shape. It has become. Then, the laser beam 90b passes through the opening 85a up to a portion where the beam intensity at the peripheral portion is low.
- the laser processing device 81 cannot form a processing hole having a desired diameter in the workpiece 89. Specifically, the laser processing apparatus 81 can form only a processed hole having a diameter smaller than a desired diameter in the workpiece 89.
- the optical system of the laser processing apparatus 1 shown in FIG. 1 is an optical system that transfers the image of the opening 5a onto the workpiece 14, the diameter of the processing hole is determined by the opening diameter of the opening 5a.
- the profile of the laser beam 15c after passing through the opening 5a is: It has a sharp shape.
- FIG. 2 is a diagram showing a profile of the laser beam after passing through the opening of the first embodiment.
- the profile 30 of the laser beam 15c after passing through the opening 5a shown in FIG. 2 includes a portion having a low beam intensity at the peripheral portion.
- FIG. 3 is a view showing a laser beam profile on the surface of the workpiece of the first embodiment.
- the beam intensity of the portion 32 including the optical axis of the laser beam 15 d on the surface of the workpiece 14 exceeds the machining threshold 37. ing.
- the beam intensities of the peripheral portions 33 and 34 of the laser beam 15d are below the processing threshold 37.
- the laser processing apparatus 1 cannot form a processing hole having a desired diameter in the workpiece 14.
- the laser processing apparatus 1 can form only a processed hole having a diameter smaller than a desired diameter in the workpiece 14.
- the control unit 13 moves the transfer optical system 7 in the traveling direction 18 of the laser beam 15d from the reference position at which the image of the opening 5a is formed on the workpiece 14. That is, the control unit 13 shifts the image of the opening 5a in the traveling direction 18 of the laser beam 15d from the processing surface of the workpiece 14. Thereby, the control part 13 blurs the image of the opening part 5a on the to-be-processed surface of the to-be-processed object 14.
- the blurring of the image of the opening 5a on the processing surface of the workpiece 14 means that the outline of the image of the opening 5a on the processing surface of the processing object 14 and the boundary between light and shade are conspicuous. Don't say that it's blurry.
- the control part 13 expands the beam diameter of the part exceeding the process threshold value of the laser beam 15d on the to-be-processed surface of the to-be-processed object 14.
- the laser processing apparatus 1 can increase the diameter of a processing hole to a desired processing hole diameter, and can form the processing hole of a desired diameter.
- FIG. 4 is a diagram showing a profile of a laser beam on the surface of the workpiece of the first embodiment.
- the control unit 13 shifts the transfer optical system 7 in the traveling direction 18 of the laser beam 15 d from the reference position where the image of the opening 5 a is formed on the workpiece 14. That is, the control unit 13 shifts the image of the opening 5a in the traveling direction 18 of the laser beam 15d from the processing surface of the workpiece 14. Thereby, the control part 13 blurs the image of the opening part 5a on the to-be-processed surface of the to-be-processed object 14. FIG. Thereby, the control part 13 expands the beam diameter of the part exceeding the process threshold value of the laser beam 15d on the to-be-processed surface of the to-be-processed object 14.
- the beam diameter of the portion exceeding the machining threshold of the laser beam 15d is enlarged. Can be formed.
- the wavy shape of the profile 35 is due to the influence of diffraction caused by shifting the transfer optical system 7 from the imaging position.
- FIG. 5 is a flowchart showing the laser processing method according to the first embodiment.
- the flowchart shown in FIG. 5 is a flowchart showing a method for obtaining the relationship between the position of the incident optical system 3, the position of the transfer optical system 7, and the processing hole diameter.
- the flowchart shown in FIG. 5 may be executed when the laser processing apparatus 1 is installed, or may be executed when the laser oscillator 2 is replaced. Further, the program for executing the flowchart shown in FIG. 5 may be stored in the storage unit 12.
- step S100 the controller 13 drives the laser oscillator 2 to process the device under test.
- step S102 the control unit 13 acquires the relationship between the position of the transfer optical system 7 and the processing hole diameter.
- step S104 the control unit 13 determines whether or not the transfer optical system 7 has reached the measurement end. If it is determined in step S104 that the transfer optical system 7 has not reached the measurement end (No), the control unit 13 moves the transfer optical system 7 by one reference amount in step S106, and advances the process to step S100.
- the one reference amount is exemplified on the order of micrometers.
- step S104 determines in step S104 whether the transfer optical system 7 has reached the measurement end. If it is determined in step S108 that the incident optical system 3 has not reached the measurement end (No), the control unit 13 moves the incident optical system 3 by one reference amount in step S110.
- the one reference amount is exemplified on the order of millimeters.
- step S112 the control unit 13 returns the transfer optical system 7 to the reference position, and proceeds to step S100.
- step S108 determines in step S108 that the incident optical system 3 has reached the measurement end (Yes)
- the process ends.
- the relationship between the position of the incident optical system 3, the position of the transfer optical system 7, and the diameter of the processed hole may be acquired by executing a simulation of the flowchart shown in FIG.
- FIG. 6 is a graph showing the relationship between the position of the incident optical system, the position of the transfer optical system, and the processing hole diameter in the first embodiment.
- the graph shown in FIG. 6 is obtained by executing a simulation of the flowchart shown in FIG.
- the horizontal axis represents the position of the transfer optical system 7, and the vertical axis represents the diameter of the portion of the workpiece 14 that exceeds the machining threshold of the laser beam 15d on the workpiece surface.
- ⁇ indicates that the transfer optical system 7 is moved to the traveling direction 18 side of the laser beam 15d
- + indicates that the transfer optical system 7 is moved to the direction 19 side opposite to the traveling direction 18 of the laser beam 15d.
- FIG. 6 when the position of the incident optical system 3 is the reference position, when the position of the incident optical system 3 is ⁇ 1 mm from the reference position, when the position of the incident optical system 3 is ⁇ 2 mm from the reference position, It shows the case where the position of the incident optical system 3 is -3 mm from the reference position and the position of the incident optical system 3 is -4 mm from the reference position.
- the case where the incident optical system 3 is moved toward the traveling direction 16 of the laser beam 15b is indicated by “ ⁇ ”.
- the line 40 is an approximate straight line of the sample point when the position of the incident optical system 3 is the reference position.
- a line 41 is an approximate straight line of a sample point when the position of the incident optical system 3 is ⁇ 1 mm from the reference position.
- a line 42 is an approximate straight line of a sample point when the position of the incident optical system 3 is ⁇ 2 mm from the reference position.
- a line 43 is an approximate straight line of a sample point when the position of the incident optical system 3 is ⁇ 3 mm from the reference position.
- a line 44 is an approximate straight line of a sample point when the position of the incident optical system 3 is ⁇ 4 mm from the reference position.
- the desired hole diameter is 50 ⁇ m.
- the intersection point 45, the intersection point of the line 40, the line 41, the line 42, the line 43, and the line 44 and the diameter of the portion exceeding the processing threshold value of the laser beam 15d on the processing surface of the workpiece 14 50 ⁇ m.
- 46, intersection 47, intersection 48 and intersection 49 are obtained.
- the positions of the horizontal axis of the intersection 45, the intersection 46, the intersection 47, the intersection 48, and the intersection 49 are such that the position of the incident optical system 3 is the reference position, the position of the incident optical system 3 is -1 mm from the reference position.
- the incident optical system 3 is at a position ⁇ 2 mm from the reference position, the incident optical system 3 is at a position ⁇ 3 mm from the reference position, and the incident optical system 3 is at a position ⁇ 4 mm from the reference position.
- the position is the position of the transfer optical system 7 to be arranged.
- the position of the transfer optical system 7 is ⁇ 140 ⁇ m from the reference position.
- the position of the transfer optical system 7 is ⁇ 120 ⁇ m from the reference position.
- the position of the transfer optical system 7 is ⁇ 95 ⁇ m from the reference position.
- the position of the transfer optical system 7 is ⁇ 70 ⁇ m from the reference position.
- the position of the transfer optical system 7 is ⁇ 25 ⁇ m from the reference position.
- FIG. 7 is a diagram showing a table stored in the storage unit of the first embodiment.
- the table 12a shown in FIG. 7 is based on the graph of FIG. 6, and the transfer optical system when the position of the incident optical system 3 and the diameter of the laser beam 15d on the workpiece surface of the workpiece 14 become a desired diameter. 7 describes the relationship between the position 7 and FIG.
- FIG. 8 is a flowchart showing the laser processing method of the first embodiment.
- the flowchart shown in FIG. 8 is a flowchart showing a method for adjusting the laser processing apparatus 1 during laser processing.
- the process of the flowchart shown in FIG. 8 may be executed every time laser processing is performed, may be executed before daily operation, or may be executed in anticipation of a decrease in the output of the laser oscillator 2.
- a program that executes the processing of the flowchart illustrated in FIG. 8 may be stored in the storage unit 12.
- step S120 the control unit 13 moves the incident optical system 3 in the traveling direction 16 of the laser beam 15a or the direction 17 opposite to the traveling direction 16 of the laser beam 15a, and then passes through the opening 5a. Adjust the energy.
- FIG. 9 is a diagram showing a state of adjusting the energy of the laser beam of the laser processing apparatus of the first embodiment.
- the control unit 13 drives the third driving unit 10 to move the table 9, and positions the sensor 11 on the optical axis of the laser beam 15d.
- the control unit 13 adjusts the energy of the laser beam 15d incident on the sensor 11 to a desired value by moving the incident optical system 3 while monitoring the energy of the laser beam 15d measured by the sensor 11. .
- step S122 the control unit 13 moves the transfer optical system 7 in the traveling direction 18 of the laser beam 15d or the direction 19 opposite to the traveling direction 18 of the laser beam 15d based on the movement of the incident optical system 3.
- the controller 13 can determine the position of the transfer optical system 7 according to the position of the incident optical system 3 by referring to the table 12a shown in FIG.
- the table 12a is stored in the storage unit 12 and the position of the transfer optical system 7 is determined in accordance with the position of the incident optical system 3.
- a mode in which the table 12a is not stored in the storage unit 12 is also possible. It is. Specifically, the operator operates the laser processing apparatus 1 to perform transfer so that the diameter of the portion of the workpiece 14 that exceeds the processing threshold of the laser beam 15d on the processing surface becomes a desired diameter. It is also possible to adjust the position of the optical system 7. Further, the operator can adjust the position of the transfer optical system 7 while operating the laser processing apparatus 1 so that the diameter of the hole actually formed in the workpiece 14 becomes a desired diameter. is there.
- the usable period of the laser oscillator 2 can be extended, and the replacement frequency of the laser oscillator 2 can be reduced. Therefore, according to Embodiment 1, the cost of laser processing can be reduced.
- FIG. FIG. 10 is a diagram illustrating a configuration of the laser processing apparatus according to the second embodiment.
- a laser processing apparatus 1A according to the second embodiment includes a laser oscillator 2A that can output a signal indicating a laser output, instead of the laser oscillator 2 of the laser processing apparatus 1 according to the first embodiment.
- the control unit 13 can acquire the output of the laser oscillator 2A from the signal indicating the laser output received from the laser oscillator 2A. If the laser output of the laser oscillator 2A can be acquired, the position of the incident optical system 3 when the energy of the laser beam 15c becomes a desired energy can be determined. Therefore, the relationship between the signal indicating the laser output and the position of the incident optical system 3 when the energy of the laser beam 15c becomes the desired energy is acquired in advance, and the signal indicating the laser output and the energy of the laser beam 15c are obtained.
- a table 12b describing the relationship between the position of the incident optical system 3 when the desired energy is obtained is stored in the storage unit 12.
- the control unit 13 refers to the table 12b based on the signal indicating the laser output received from the laser oscillator 2A, determines the position of the incident optical system 3, and moves the incident optical system 3. Furthermore, the control unit 13 refers to the table 12 a based on the movement of the incident optical system 3, determines the position of the transfer optical system 7, and moves the transfer optical system 7.
- the trouble of measuring the energy of the laser beam 15d by the sensor 11 can be saved. Therefore, according to the second embodiment, the efficiency of laser processing can be improved.
- the position of the transfer optical system 7 may be adjusted each time laser processing is performed. That is, as a setup process before laser processing, laser processing is performed by changing the position of the transfer optical system 7, and the position of the transfer optical system 7 having a desired processing hole diameter is determined.
- the relationship between the position of the incident optical system 3 and the beam diameter on the mask 5 also changes. That is, the relationship between the position of the incident optical system 3 and the profile of the laser beam 15c after passing through the opening 5a also changes.
- the relationship between the tables 12a and 12b stored in the storage unit 12 in advance in the first and second embodiments also changes, and there is a possibility that the processed hole diameter cannot be maintained at a desired diameter.
- the position of the transfer optical system 7 is adjusted each time laser processing is performed, the processing hole diameter can be maintained at a desired diameter even when the divergence angle or profile of the laser beam 15a varies.
- FIG. 11 is a diagram illustrating a configuration of the laser processing apparatus according to the third embodiment.
- the laser beam 15 b converges at the convergence point 20 and then diverges and enters the mask 5.
- the laser beam 15b is incident on the mask 5 before being converged.
- the laser beam 15 c after passing through the opening 5 a is converged at the convergence point 20.
- the control unit 13 moves the incident optical system 3 in the direction 17 opposite to the traveling direction 16 of the laser beam 15a, and the laser beam The beam diameter on the mask 5 of 15b is reduced.
- the control part 13 can raise the ratio of the laser beam 15c with respect to the whole laser beam 15b, and can maintain the energy of the laser beam 15c.
- FIG. 12 is a graph showing the relationship between the position of the incident optical system, the position of the transfer optical system, and the processing hole diameter in the third embodiment.
- the graph shown in FIG. 12 is obtained by executing a simulation of the flowchart shown in FIG.
- the horizontal axis represents the position of the transfer optical system 7, and the vertical axis represents the diameter of the portion of the workpiece 14 that exceeds the machining threshold of the laser beam 15d on the workpiece surface.
- ⁇ indicates that the transfer optical system 7 is moved to the traveling direction 18 side of the laser beam 15d
- + indicates that the transfer optical system 7 is moved to the direction 19 side opposite to the traveling direction 18 of the laser beam 15d.
- the line 60 is an approximate straight line of sample points when the position of the incident optical system 3 is the reference position.
- a line 61 is an approximate straight line of sample points when the position of the incident optical system 3 is +1 mm from the reference position.
- a line 62 is an approximate straight line of sample points when the position of the incident optical system 3 is +2 mm from the reference position.
- a line 63 is an approximate straight line of sample points when the position of the incident optical system 3 is +3 mm from the reference position.
- the desired hole diameter is 50 ⁇ m.
- the intersection point 64, the intersection point 65, and the intersection point of the line 60, the line 61, the line 62, and the line 63 and the diameter of the portion of the workpiece 14 that exceeds the machining threshold of the laser beam 15d on the workpiece surface 50 ⁇ m. 66 and intersection point 67 are obtained.
- the values of the horizontal axis of the intersection point 64, the intersection point 65, the intersection point 66, and the intersection point 67 indicate that when the position of the incident optical system 3 is the reference position and the position of the incident optical system 3 is +1 mm from the reference position, the incident optical This is the position of the transfer optical system 7 to be arranged when the position of the system 3 is +2 mm from the reference position and when the position of the incident optical system 3 is +3 mm from the reference position.
- the position of the transfer optical system 7 is +260 ⁇ m from the reference position.
- the position of the transfer optical system 7 is +200 ⁇ m from the reference position.
- the position of the transfer optical system 7 is +75 ⁇ m from the reference position.
- the position of the transfer optical system 7 is +10 ⁇ m from the reference position.
- FIG. 13 is a diagram illustrating a table stored in the storage unit of the third embodiment.
- the table 12c shown in FIG. 13 is based on the graph of FIG. 12, and the transfer optical system when the position of the incident optical system 3 and the diameter of the laser beam 15d on the workpiece surface of the workpiece 14 become a desired diameter. 7 positions are described.
- the control unit 13 moves the incident optical system 3 in the direction 17 opposite to the traveling direction 16 of the laser beam 15a to adjust the energy of the laser beam 15c after passing through the opening 5a.
- the control unit 13 moves the transfer optical system 7 in a direction 19 opposite to the traveling direction 18 of the laser beam 15d based on the movement of the incident optical system 3. That is, the control unit 13 shifts the image of the opening 5a from the processing surface of the workpiece 14 toward the direction 19 opposite to the traveling direction 18 of the laser beam 15d. Thereby, the control part 13 blurs the image of the opening part 5a on the to-be-processed surface of the to-be-processed object 14. FIG. Thereby, the control part 13 expands the beam diameter of the part exceeding the process threshold value of the laser beam 15d on the to-be-processed surface of the to-be-processed object 14. FIG. Thereby, the laser processing apparatus 1 can increase the diameter of a processing hole, and can form the processing hole of a desired diameter.
- a processed hole having a desired diameter can be formed in the workpiece 14 even if the output of the laser oscillator 2 decreases. Therefore, according to the third embodiment, the usable period of the laser oscillator 2 can be extended, and the replacement frequency of the laser oscillator 2 can be reduced. Therefore, according to the third embodiment, the cost of laser processing can be reduced.
- the configuration described in the above embodiment shows an example of the contents of the present invention, and can be combined with another known technique, and can be combined with other configurations without departing from the gist of the present invention. It is also possible to omit or change the part.
- 1, 1A, 1B laser processing device 2, 2A laser oscillator, 3 incident optical system, 4th drive unit, 5 mask, 6 transmission optical system, 7 transfer optical system, 8 second drive unit, 9 table, 10th 3 drive units, 11 sensors, 12 storage units, 13 control units.
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Abstract
Description
図1は、実施の形態1のレーザ加工装置の構成を示す図である。図1に示すように、レーザ加工装置1は、レーザビーム15aを出射するレーザ発振器2と、レーザビーム15aが入射される入射光学系3と、入射光学系3をレーザビーム15aの進行方向16又はレーザビーム15aの進行方向16の逆方向17に移動させる第1駆動部4と、を備える。
図10は、実施の形態2のレーザ加工装置の構成を示す図である。実施の形態2にかかるレーザ加工装置1Aは、実施の形態1にかかるレーザ加工装置1のレーザ発振器2に代えて、レーザ出力を示す信号を出力できるレーザ発振器2Aを備えている。
図11は、実施の形態3のレーザ加工装置の構成を示す図である。
Claims (10)
- レーザ発振器から出射されるレーザビームをマスクに照射する入射光学系をレーザビームの進行方向又はレーザビームの進行方向と逆方向に移動させて、前記マスクの開口部を通過後のレーザビームのエネルギーを調整する第1の工程と、
前記入射光学系の移動に基づいて、前記開口部を通過後のレーザビームを被加工物に照射する転写光学系をレーザビームの進行方向又はレーザビームの進行方向と逆方向に移動させて、レーザビームの被加工物の被加工表面での径を調整する第2の工程と、
を含むことを特徴とするレーザ加工方法。 - 前記第2の工程は、前記転写光学系により結像される前記開口部の像を、被加工物の被加工表面よりもレーザビームの進行方向又はレーザビームの進行方向と逆方向にずらすことを特徴とする、請求項1に記載のレーザ加工方法。
- 前記第2の工程は、被加工物の被加工表面上でのレーザビームの加工閾値を上回る部分のビーム径を、所望の加工穴径に増大させることを特徴とする、請求項1に記載のレーザ加工方法。
- 前記第2の工程は、前記入射光学系の位置と、レーザビームの被加工物の被加工表面での径が所望の径になるときの前記転写光学系の位置と、の関係を記述したテーブルを参照することで、前記転写光学系の位置を決定することを特徴とする、請求項1に記載のレーザ加工方法。
- 前記第1の工程は、前記レーザ発振器から受信するレーザ出力を示す信号と、前記開口部を通過後のレーザビームのエネルギーが所望のエネルギーとなるときの入射光学系の位置と、の関係を記述したテーブルを参照することで、前記入射光学系の位置を決定することを特徴とする、請求項1に記載のレーザ加工方法。
- レーザ発振器から出射されるレーザビームをマスクに照射する入射光学系と、
前記マスクの開口部を通過後のレーザビームを被加工物に照射する転写光学系と、
前記入射光学系をレーザビームの進行方向又はレーザビームの進行方向と逆方向に移動させて、前記開口部を通過後のレーザビームのエネルギーを調整し、前記入射光学系の移動に基づいて、前記転写光学系をレーザビームの進行方向又はレーザビームの進行方向と逆方向に移動させて、レーザビームの被加工物の被加工表面での径を調整する制御を行う制御部と、
を備えることを特徴とする、レーザ加工装置。 - 前記制御部は、前記転写光学系により結像される前記開口部の像を、被加工物の被加工表面よりもレーザビームの進行方向又はレーザビームの進行方向と逆方向にずらすことを特徴とする、請求項6に記載のレーザ加工装置。
- 前記制御部は、被加工物の被加工表面上でのレーザビームの加工閾値を上回る部分のビーム径を、所望の加工穴径に増大させることを特徴とする、請求項6に記載のレーザ加工装置。
- 前記入射光学系の位置と、レーザビームの被加工物の被加工表面での径が所望の径になるときの前記転写光学系の位置と、の関係を記述したテーブルを記憶する記憶部を更に備え、
前記制御部は、前記テーブルを参照することで、前記転写光学系の位置を決定することを特徴とする、請求項6に記載のレーザ加工装置。 - 前記レーザ発振器から受信するレーザ出力を示す信号と、前記開口部を通過後のレーザビームのエネルギーが所望のエネルギーとなるときの入射光学系の位置と、の関係を記述したテーブルを記憶する記憶部を更に備え、
前記制御部は、前記テーブルを参照することで、前記入射光学系の位置を決定することを特徴とする、請求項6に記載のレーザ加工装置。
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