WO2016056620A1 - 空洞管の研磨用ロータ - Google Patents
空洞管の研磨用ロータ Download PDFInfo
- Publication number
- WO2016056620A1 WO2016056620A1 PCT/JP2015/078581 JP2015078581W WO2016056620A1 WO 2016056620 A1 WO2016056620 A1 WO 2016056620A1 JP 2015078581 W JP2015078581 W JP 2015078581W WO 2016056620 A1 WO2016056620 A1 WO 2016056620A1
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- WO
- WIPO (PCT)
- Prior art keywords
- polishing
- rotor
- tube
- blade
- hollow tube
- Prior art date
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- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25F—PROCESSES FOR THE ELECTROLYTIC REMOVAL OF MATERIALS FROM OBJECTS; APPARATUS THEREFOR
- C25F3/00—Electrolytic etching or polishing
- C25F3/16—Polishing
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- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25F—PROCESSES FOR THE ELECTROLYTIC REMOVAL OF MATERIALS FROM OBJECTS; APPARATUS THEREFOR
- C25F3/00—Electrolytic etching or polishing
- C25F3/16—Polishing
- C25F3/22—Polishing of heavy metals
- C25F3/26—Polishing of heavy metals of refractory metals
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- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25F—PROCESSES FOR THE ELECTROLYTIC REMOVAL OF MATERIALS FROM OBJECTS; APPARATUS THEREFOR
- C25F7/00—Constructional parts, or assemblies thereof, of cells for electrolytic removal of material from objects; Servicing or operating
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- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25F—PROCESSES FOR THE ELECTROLYTIC REMOVAL OF MATERIALS FROM OBJECTS; APPARATUS THEREFOR
- C25F7/00—Constructional parts, or assemblies thereof, of cells for electrolytic removal of material from objects; Servicing or operating
- C25F7/02—Regeneration of process liquids
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H7/00—Details of devices of the types covered by groups H05H9/00, H05H11/00, H05H13/00
- H05H7/14—Vacuum chambers
- H05H7/18—Cavities; Resonators
- H05H7/20—Cavities; Resonators with superconductive walls
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- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D17/00—Constructional parts, or assemblies thereof, of cells for electrolytic coating
- C25D17/007—Current directing devices
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- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D7/00—Electroplating characterised by the article coated
- C25D7/04—Tubes; Rings; Hollow bodies
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H7/00—Details of devices of the types covered by groups H05H9/00, H05H11/00, H05H13/00
- H05H7/22—Details of linear accelerators, e.g. drift tubes
Definitions
- the present invention relates to a rotor for electrolytic polishing the inner surface of a hollow tube.
- a linear collider is being built as a device that collides positrons and electrons to form a big bang state (ILC project).
- the linear collider uses a niobium hollow tube 100 having flanges 101a and 101b at both ends and the diameter periodically changing in the axial direction.
- One factor for obtaining a predetermined effect in this experiment is whether or not the inner surface of the niobium hollow tube 100 is smooth.
- the hollow tube 100 is subjected to excessive pressure and heat during molding, the structure of the inner surface thereof is unevenly distorted. If this surface state is left as it is, the electrical and magnetic characteristics are also non-uniform, and as a result, a predetermined speed cannot be given to electrons and protons. Therefore, a method of polishing the inner surface of the hollow tube to a predetermined thickness has been developed.
- a chemical polishing method hereinafter referred to as “chemical polishing”
- electrochemical polishing an electrochemical polishing method
- mechanical polishing such as buff polishing
- This method inherently grinds the outer surface of the hollow tube that does not require polishing, which causes unnecessary dissolution loss of the hollow tube and unnecessarily consumes and contaminates the polishing liquid.
- the polishing liquid is fed from the blowout hole communicating with the liquid passage pipe, and continuous electrolysis is attempted in a partially immersed state. ing.
- the polishing time can be shortened, and at the same time, the niobium material does not dissolve unnecessarily, so that unnecessary contamination and consumption of the polishing liquid are suppressed.
- the invention disclosed in Japanese Patent Application Laid-Open No. 11-350200 is basically the same as the invention disclosed in the above Japanese Patent Application Laid-Open No. 61-23799, except that the outlet hole provided in the liquid flow pipe is opposite to the side to be polished. Opening the upper side of the polishing liquid, which is the side, prevents the polishing liquid from flowing directly into the stored polishing liquid so as to achieve uniform polishing.
- This electrode can be changed between a housed state and an operating state, and is configured to be easily attached to and detached from a hollow tube having a regular bulge.
- Japanese Patent Application Laid-Open No. 2000-71164 discloses a polishing method in which abrasive grains are put inside the hollow tube 100 to revolve while rotating the hollow tube.
- the liquid passing pipe serving as the cathode is linear, and the inner surface of the hollow tube, which is the object to be polished, has an inner diameter that changes into a wave shape as described above. . Therefore, the distance between each part of the inner surface of the hollow tube serving as the anode and the cathode is not uniform, and the current is concentrated in the short distance part. It will take a lot of time and the cost will increase.
- the electrolytic polishing methods described in Patent Documents 1 to 3 are configured to perform polishing by keeping the hollow tube horizontal and storing the polishing liquid on the lower side. At this time, a cavity is left on the upper side of the polishing liquid, and bubbles generated from the polishing liquid, such as hydrogen fluoride, are temporarily accumulated in this portion, and even if polishing progresses, The polished surface may be altered.
- PCT / JP2013 / 68593 has a single blade shaped along the inner surface shape of the hollow tube, so that uniformity of polishing can be ensured and is far superior to the above three configurations (methods). Polishing with high accuracy is possible. However, the polishing thickness tends to be slightly higher on the upper side than on the lower side of the bulge due to the influence of the generated bubbles.
- the technique disclosed in Japanese Patent Application Laid-Open No. 2000-71164 as mechanical polishing is a structure that uses both rotation and revolution, and when the tube diameter of the object to be polished changes in the axial direction, the finished state of polishing changes in diameter. The result is different depending on the part. In particular, in the hollow tube used in the linear collider, the polished state of the bulge portion having a large diameter is not sufficient.
- the applicant of the present application has proposed a method and jig for polishing a small diameter portion in Japanese Patent Application No. 2013-198073 before finishing as a hollow tube, but even if this technique is used, Work to polish the inner surface of the large diameter part (welded part) remains.
- An object of the present invention is to provide a mechanical polishing rotor capable of uniformly polishing the inner surface of a hollow tube.
- the present invention is a rotor for polishing the inner surface of a hollow tube and has the following configuration.
- the outer tube is slidably inserted into the inner tube.
- At least one window is provided on the peripheral wall of the outer tube, and the sub-axis of the inner tube at a position corresponding to the window is a direction in which the base end portion of the plate blade is perpendicular to the main shaft (common axis of the inner tube and the outer tube).
- the link bar is disposed in a main axis direction across the outer tube and the plate blade, and the inner tube is moved relative to the outer tube in the main axis direction to thereby move the plate. It is assumed that the transition is possible between a state where the blades are closed (accommodated state) and an opened state (operated state).
- the plate blade can be configured such that the angle can be adjusted on the inner surface of the hollow tube in addition to the horizontal.
- a buff can be attached to the tip of the plate blade, and the tip of the buff can abut against the inner surface of the large-diameter portion of the hollow tube in the operating state.
- the large diameter portion of the hollow tube can be polished, and oxidation due to welding of this portion and the welding flux can be removed. . Further, the entire inner surface of the cavity tube can be electropolished by adjusting the angle of the plate blade within the cavity tube.
- this part By attaching a buff to the tip of the plate blade and abutting the buff at the position of the top of the bulge of the hollow tube (welding position), this part can be buffed and, like the electrolytic polishing, Oxidation by welding of this part and welding flux can be removed.
- FIG. 1 is a side view showing a use state of the present invention.
- FIG. 2 is a side sectional view showing a configuration of a rotor for electropolishing.
- FIG. 3 is a plan sectional view showing a configuration of a rotor for electropolishing.
- FIG. 4 is a perspective view showing a configuration of an electropolishing rotor.
- FIG. 5 is a side view showing a state where the plate blade is opened approximately 180 degrees.
- FIG. 6 is a view showing a gas venting structure.
- FIG. 7 is a view showing a blade having a screw function.
- FIG. 8 is a side sectional view showing a configuration of a mechanical polishing rotor.
- FIG. 9 is a side view showing a use state of a mechanical polishing rotor.
- FIG. 10 is a side view showing a use state of another rotor for mechanical polishing.
- FIG. 11 is a side sectional view showing another configuration of a rotor for mechanical polishing.
- FIG. 12 is a diagram showing a process of forming a hollow tube.
- FIG. 13 is a side view of a hollow tube to which the present invention is applied.
- the object to be polished in this application is a hollow tube such as a tubular body, and in particular, a hollow tube whose diameter changes periodically in the axial direction shown in FIG. 13 (bulges are periodically arranged). Is intended. Polishing the large-diameter portion of the hollow tube (the deepest part of the bulge) is important, and the reason is related to the formation process of the hollow tube.
- the small diameter portions 110s of the cup-shaped member 120 are welded to each other to form the dumbbell-shaped body 110.
- the inner surface of the small diameter portion 110s is electrolytically polished (FIG. 12 (c)).
- FIGS. 12 (d) ⁇ (e) the large-diameter portion 110w of the dumbbell-shaped body 110 is welded together to finish the hollow tube 100. Therefore, the oxidized portion or the oxidized flux by welding remains on the inner surface near the top (large diameter portion) of the bulge, and therefore polishing of this portion becomes important.
- FIG. 1 is a view showing a state in which the inside of a hollow pipe is electrolytically polished using the rotor according to the present invention
- FIG. 2 is a side sectional view showing the rotor according to the present invention together with the hollow pipe to be polished.
- FIG. 3 is a plan sectional view.
- FIG. 4 is a perspective view showing the main part of the rotor according to the present invention.
- the rotor with the inner and outer tubes and plate blades as the main elements is constructed as follows.
- the outer tube 22 is slidably inserted in the main axis direction with respect to the inner tube 21.
- An axis common to the inner tube 21 and the outer tube 22 is hereinafter referred to as a main shaft.
- one or a plurality of windows 221 having a predetermined size corresponding to each bulge of the hollow tube 100 are opened at equal intervals in the circumferential direction. Accordingly, the surface of the inner tube 21 appears outside corresponding to the window 221, and the outer tube 22 continues up and down via the window frame 222 in the main axis direction between the adjacent windows 221. .
- one end of the plate blade 24 is rotatably attached to a sub shaft 211 provided in a direction perpendicular to the main axis of the inner tube 21 (circumferential tangential direction).
- the link bar 25 is pivotally supported on the auxiliary shafts 241 and 223 perpendicular to the main shaft from the vicinity of the center of the upper surface of the plate blade 24 to the upper portion of the window 221 of the outer tube 22. Further, the electrode 26 is fixed to the tip of the plate blade 24.
- the inner blade 21 and the outer tube 22 are relatively slid in the main axis direction, so that the plate blade 24 transitions between the initial state and the operating state described below.
- the outer tube 22 is pulled up with respect to the inner tube 21 and the initial state (solid line in FIG. 2) is when the plate blade 24 is in the most open state in the upward direction.
- the outer tube 22 is gradually pushed down with respect to the inner tube 21 so that the angle between the plate blades 24 and the main shaft gradually opens and is directed in a perpendicular direction (horizontal direction) (dashed line in FIG. 2, FIG. 3, FIG. 4) is formed.
- One or a plurality of plate blades 24 are arranged at equal intervals in the circumferential direction corresponding to each bulge of the hollow tube 100.
- FIG. 1 or FIG. 13 since the hollow tube 100 has a plurality of bulges regularly in the main axis direction, the configuration of the blade unit 20 needs to correspond to the number and position of the bulges. .
- FIG. 2 shows only the blade unit 20 corresponding to the uppermost bulge in FIG. 1 and the lower bulge. Further, the rotor 200 is configured with the number of blade units 20 corresponding to the number of bulges.
- the plate blades 24 constituting the blade unit 20 can be proposed depending on the application.
- the electrode 26 on the end face is made of metal, A flat metal or insulating plate is sufficient for the part.
- electrical conductivity with the outer tube 22 or the inner tube 21 is ensured so that necessary power is supplied to the electrode 26 on the end face.
- FIG. 1 is a side view showing an apparatus for polishing the inner surface of a hollow tube using the rotor 200 configured as described above.
- a base 11 is provided on the base 10, a liquid introduction chamber 14 is provided below the center of the base 11, and a polishing liquid from a polishing liquid tank 15 is supplied to the liquid introduction chamber 14 via a pump 16. Furthermore, the polishing liquid can be introduced into the hollow tube 100 placed on the gantry 11 via the liquid introduction chamber 14.
- the cavity pipe 100 which is an object to be polished, is fixed to the upper side of the gantry 11 using one flange 101a.
- the rotor 200 in the initial state is inserted from the upper end of the cavity tube 100.
- the inner tube 21 of the rotor 200 penetrates to the lower side of the liquid introduction chamber 14 in a liquid-tight and rotatable manner, and a connector 17 with a lead is attached to the lower end thereof. Since the hollow tube 100 is vertically long, the support frame 18 that fixes the hollow tube 100 is supported by a support (not shown) in order to ensure stability on the gantry 11.
- the liquid outlet chamber 19 is fixed on the other flange 101 b of the hollow tube 100.
- the inner tube 21 protrudes in a liquid-tight and rotatable manner on the upper end of the liquid outlet chamber 19, and the inner tube 21 can slide relative to the outer tube 22.
- the operation state can be changed from the initial state of the plate blade 24 by manual or mechanical operation.
- each plate blade 24 can rotate with respect to the cavity tube 100.
- the rotational force is applied from the driving means 130 so that the plate blade 24 can be rotated at a predetermined speed during the electrolytic treatment.
- the liquid feed pump 16 introduces the polishing liquid from the liquid introduction chamber 14 at a predetermined flow rate into the hollow pipe 100 and further returns the liquid from the liquid outlet chamber 19 to the polishing liquid tank 15. Further, the inner tube 21 is slid with respect to the outer tube 22 to bring the plate blade 24 into an operating state. In this state, when an electric field required for polishing is applied between the electrode 26 and the hollow tube 100 at the tip of the plate blade 24 and the inner tube 21 is rotated slowly (for example, 50 times / minute) with the outer tube 22, the hollow tube The inner surface of 100 will be polished.
- the electrode 26 is located at the apex portion of the bulge of the hollow tube, that is, the position closest to the welded portion, and this portion is subjected to welding oxidation or removing oxides of the flux used during welding. Can do.
- the polishing liquid is discharged (for example, from a drain (not shown) provided in the liquid introduction chamber 14), and cleaning water is sent from the liquid supply pump 16 to the cavity tube 100 for cleaning. . Thereafter, the rotor 200 is brought into an initial state, and the work is completed by extracting from the hollow tube 100.
- ⁇ Rotor structure 2 for electropolishing> The above shows only the case where the plate blade 24 is changed from the initial state to the horizontal state. However, as shown in FIG. 5, the plate blade 24 is further opened from the horizontal state to about 180 degrees with respect to the initial state. It can also be set as the structure to do.
- the angle of the plate blade 24 with respect to the main axis is changed from the most open state (the state ⁇ where the outer tube 22 is pushed down to the lowest position) to the initial state (the outer tube 22) through the horizontal state (state ⁇ ).
- state ⁇ To the state ⁇ ) in the most pulled up state, and it becomes possible to perform electropolishing over the entire inner surface of the hollow tube 100.
- the hollow tube 100 to be processed here is for welding oxidation at each bulging portion or removing the flux, so that the polishing is performed when the angle of the plate blade 24 becomes near horizontal. Control such as increasing the degree of is necessary.
- the inner surface of the hollow tube 100 needs to be structured so as not to be exposed to the generated bubbles as much as possible. Therefore, a gas venting structure described below is provided in the liquid outlet chamber 19.
- the polishing liquid circulates with the liquid supply tank 15, the liquid introduction chamber 14, the hollow pipe 100, the liquid discharge chamber 19, and the liquid supply tank 15, but the bubbles generated by the electrolytic treatment enter the liquid discharge chamber 19. Will accumulate. Therefore, as shown in FIG. 6, a bubble vent 192 is provided at a position above the liquid circulation port 191 (position above the draft 41) of the liquid outlet chamber 19, and air bubbles are forcibly discharged from the bubble vent 192. It is also possible to adopt a configuration in which the adverse effects due to bubbles are eliminated.
- the entire electropolishing rotor 200 is covered with an insulating cloth or net cover 40.
- the upper end of the cover 40 is opened to the liquid outlet chamber 19 (bubble passage port), and the generated bubbles are guided to the liquid outlet chamber 19.
- the polishing process can be performed without causing the generated bubbles to touch the inner surface of the hollow tube 100.
- the hollow tube 100 is not damaged.
- the blade 24 is in a closed state.
- the inner tube 21 corresponding to the window 221 is provided with a vent hole 28 for communicating the inside of the inner tube 21 and the hollow tube 100, and the inner tube 21 and the liquid outlet chamber 19 are vented (illustrated). No)), or this configuration can be used in combination with the configuration including the cover 40.
- the plate blade 24 rotates around the main axis inside the hollow tube 100 as described above, and performs electrolytic treatment. Therefore, it is also effective to make the plate blades 24 have a function of sending the electrolyte solution upward together with the bubbles by utilizing the rotation, regardless of whether the cover 40 is provided or not. .
- the downstream side of the rotation of the plate blade 24 be warped upward as shown in FIG. 7 to have a screw function.
- each blade unit 20 there are a plurality of blades 24 in each blade unit 20 has been described above, but at least one plate blade is sufficient for each blade unit 20.
- a polishing liquid similar to the conventional one for example, a polishing liquid made of hydrofluoric acid, sulfuric acid, and water
- the thickness polished here is 50 ⁇ m to 100 ⁇ m when the hollow tube is a high-speed accelerator.
- the voltage applied at the time of polishing is around 15 V, and the flowing current is about 20 A / dm 2 .
- the rotor 200 used in the present invention can be used not only for electrolytic polishing of niobium but also for electrolytic polishing of the inner surface of various metal tubes, and can also be used for electrolytic plating as well as electrolytic polishing.
- ⁇ Buffing rotor 1> The rotor having the above configuration can be used as it is for mechanical polishing such as buffing.
- a buff 27 is attached instead of the electrode 26 at the tip of the plate blade 24.
- the polishing apparatus does not use the electrolytic solution, so that a mechanism for circulating the electrolytic solution such as the liquid introducing chamber 14 and the liquid outlet chamber 19 is unnecessary, but the plate blade 24 is rotated.
- the driving means 130 is necessary.
- the polishing rotor 200 having this structure When the polishing rotor 200 having this structure is used for actual polishing, as shown in FIG. 10, it is inserted into the hollow tube 100 installed on the gantry 10 in the housed state, similarly to the procedure described in FIG. Next, the plate blade 24 is rotated so that the plate blade 24 is expanded and the buff 27 at the tip is in contact with the innermost portion (welded portion) of each bulge of the hollow tube 100 (operation state).
- the polishing rotor 200 is pulled out of the hollow tube 100 again in the housed state.
- the radius B in the direction perpendicular to the main axis of the bulge of the hollow tube 100 is less than or equal to half of the diameter A in the main axis direction
- the combined length of the plate blade 24 and the buff 27 is set as shown in FIG.
- the buff 27 at the tip of the plate blade 24 can be brought into contact with the deepest bulge of the hollow tube 100 in the operating state.
- the radius B in the direction perpendicular to the main axis is about the same as the diameter A in the main axis direction
- the length of the plate blade 24 and the buff 27 at the tip thereof is adjusted to the length B as shown in FIG. As described above, the buff 27 at the tip of the plate blade 24 protrudes from the bulging portion.
- the position of the rotor 200 as a whole is lowered until the auxiliary shaft 211 at the base end of the plate blade 24 comes to a position near the bottom of the bulge (black circle position), and then the auxiliary shaft 211 is expanded while expanding the blade blade 24.
- the buff 27 can be brought into contact with the innermost part of the bulge of the hollow tube 100.
- the inner surface of the hollow tube can be buffed by rotating the rotor 200 with the driving means 130 with the plate blades 24 opened horizontally.
- ⁇ Buffing rotor 2> the configuration of the plurality of blade units 20 is in a state corresponding to the number and position of the bulges, but only one blade unit 20 is sufficient as described below. That is, as shown in FIG. 11, a rotor 200 is formed in which one blade unit 20 is formed near the lower ends of the inner tube 21 and the outer tube 22. Of course, a buff 27 is attached to the tip of the plate blade 24 in this case. In addition, an endoscope 30 is attached to a position corresponding to the bulge of the inner tube 21 or the outer tube 22 so that the state of polishing can be observed from the endoscope 30 with an optical monitor 31 on an external monitor. deep.
- the buffing rotor As in FIG. 10, with the hollow tube 100 standing on the gantry 10, the buffing rotor having the above-described configuration is inserted in a stored state so that the blade unit 20 is in the uppermost bulge position. Next, the blade unit 20 is moved to the operating state, and the plate blade 24 is rotated so that the buff at the tip of the plate blade 24 is in contact with the deepest part (welding portion) of the bulge of the hollow tube. By this rotation, polishing of the welded portion proceeds, and the state can be confirmed with a camera.
- the operation state is set again, and the deepest part (welded part) of the bulge is polished similarly to the uppermost stage.
- the plate blade 24 is returned to the housed state and pulled out from the hollow tube 100, so that the entire polishing is completed.
- the present invention can open and close the plate blades to form the operating state and the storage state, so that by attaching an electrode to the tip of the plate blade, the innermost part of the bulge of the hollow tube ( The welded part) can be polished. Further, by adjusting the angle of the plate blade during the electrolytic treatment, the entire inner surface of the hollow tube can be electropolished. Further, by attaching a buff instead of an electrode to the tip of the blade, the innermost part of the bulge of the hollow tube can be buffed.
- the hollow tube in which the bulges are periodically arranged in the axial direction has been described as an example, but the present invention is not limited to this, and the inner surface of the simple tube body and the low can body Of course, it can be used for polishing the inner surface of any tubular body, such as the inner surface of the tube.
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Abstract
Description
本願で研磨の対象となるのは、管体等の空洞管であるが、特に、前記図13に示す軸方向に周期的に径が変化する(膨らみ部が周期的に配列された)空洞管を意図している。当該空洞管の大径部(膨らみの最奥部)の研磨が重要であるが、その理由は空洞管の形成過程との関連がある。
図1は本発明の係るロータを用いて、空洞管の内部を電解研磨している状態を示す図であり、図2は本発明に係るロータを、研磨対象となる空洞管とともに示す側断面図、図3は平断面図である。更に、図4は本発明に係るロータの主要部を示した斜視図である。
上記のように構成されたロータ200を、図1に示すように空洞管100に装着して、空洞管100の内面を電解研磨する手順を以下に説明する。
上記では板羽根24を初期状態から水平状態へ遷移する場合しか示していないが、図5に示すように水平状態より更に板羽根24を初期状態に対して、略180度まで開いた状態を形成する構成とすることもできる。
また、電解処理中は、水素等の気泡が多量に発生し、研磨の品質を低下せしめる原因となる。また、冒頭に述べたリニアコライダに使用する空洞管の材料であるニオブが水素を吸収すると加速器として特性を充分に発揮することができないことになる。
上記構成のロータは、バフ研磨等の機械研磨にもそのまま転用することができる。
上記は複数の前記羽根ユニット20の構成が、膨らみの数と位置に対応した状態としているが、以下に説明するように羽根ユニット20の数は1つでも足りる。すなわち、図11に示すように、前記羽根ユニット20を、内管21と外管22の下端付近に1つ形成したロータ200を構成しておく。もちろんこの場合の板羽根24の先端にはバフ27が取り付けられている。また、内管21あるいは外管22の前記膨らみに対応した位置に、内視鏡30を取り付け、当該内視鏡30から光ファイバ31で外部のモニターで研磨の状態を観察できるように構成しておく。
11 架台
14 液導入室
19 液導出室
21 内管
22 外管
24 板羽根
25 リンクバー
28 通気孔
30 内視鏡
100 空洞管
200 ロータ
Claims (10)
- 空洞管の内面を研磨するロータにおいて
内管と、
前記内管を摺動自在に嵌挿する外管と、
外管の周壁に少なくとも1つ設けられた窓と、
前記窓に対応する位置の内管に基端部が主軸方向に直角な副軸に回動自在に固定された、周方向に少なくとも1つの板羽根と、
リンクバーを主軸方向に前記外管と前記板羽根に渡って配設し、前記外管に対して内管を主軸方向に相対的に移動させることによって、前記板羽根を閉じた初期状態と、開いた稼動状態に遷移するリンク機構と
を備えたことを特徴とする空洞管の研磨用ロータ。 - 前記板羽根の先端に電極を固定して、電解研磨用のロータとする請求項1に記載の空洞管の研磨用ロータ。
- 前記板羽根を稼動状態が、主軸方向に直角な方向に開いた状態である請求項2に記載の空洞管の研磨用ロータ。
- 前記板羽根を稼動状態が、主軸方向に閉じた初期状態から、それとは180度反対方向に開いた状態までの間の角度での遷移状態をいう請求項2に記載の空洞管の研磨用ロータ。
- 前記空洞管が、軸方向に周期的な膨らみ部を複数備え、前記一つの膨らみ部に対応した少なくとも1つの板羽根よりなる羽根ユニットを、前記膨らみの数に対応して備えた請求項2に記載の空洞管の研磨用ロータ。
- 全体を覆う絶縁性の網または布のカバーを備え、研磨処理時に発生する気泡の抜け道を備えた請求項2に記載の空洞管の研磨用ロータ。
- 前記板羽根の先端にバフを固定して、バフ研磨用のロータとする請求項1に記載の空洞管の研磨用ロータ。
- 前記板羽根を稼動状態が、主軸方向に直角な方向に開いた状態である請求項7に記載の空洞管の研磨用電極。
- 前記空洞管が、軸方向に周期的な膨らみ部を複数備え、前記一つの膨らみ部に対応した複数の板羽根よりなる羽根ユニットを、前記膨らみの数に対応して備えた請求項7に記載の空洞管の研磨用ロータ。
- 前記空洞管が、軸方向に周期的な膨らみ部を複数備え、前記1の膨らみ部に対応した複数の板羽根よりなる羽根ユニットを、前記膨らみの数にかかわらず1つとした請求項7に記載の空洞管の研磨用ロータ。
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JP2016553151A JP6576939B2 (ja) | 2014-10-10 | 2015-10-08 | 空洞管の研磨用ロータ |
US15/513,824 US10246792B2 (en) | 2014-10-10 | 2015-10-08 | Rotor for polishing hollow tubes |
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Cited By (2)
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WO2019208664A1 (ja) * | 2018-04-26 | 2019-10-31 | 三菱重工機械システム株式会社 | 超伝導加速空洞の加工装置及び方法 |
TWI687557B (zh) * | 2017-09-28 | 2020-03-11 | 南韓商奧森里德股份有限公司 | 電解研磨用電極框架、電解研磨用可變型電極框架及包括其的電解研磨裝置 |
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EP3613877B1 (en) * | 2018-02-02 | 2021-03-03 | Marui Galvanizing Co., Ltd | Electrolytic polishing method and device |
US20210283701A1 (en) * | 2020-03-11 | 2021-09-16 | Honeywell International Inc. | Electropolishing system with probe for internal deburring of part and method of using the same |
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JP2947270B1 (ja) | 1998-06-09 | 1999-09-13 | 株式会社野村鍍金 | 金属製中空体の内面研磨方法及び研磨装置 |
JP4144078B2 (ja) | 1998-08-31 | 2008-09-03 | 株式会社野村鍍金 | 超伝導加速空洞の製造方法 |
JP6049601B2 (ja) * | 2013-12-05 | 2016-12-21 | 三菱重工メカトロシステムズ株式会社 | 超伝導加速空洞、および超伝導加速空洞の電解研磨方法 |
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- 2015-10-08 US US15/513,824 patent/US10246792B2/en not_active Expired - Fee Related
- 2015-10-08 WO PCT/JP2015/078581 patent/WO2016056620A1/ja active Application Filing
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JPS5171822U (ja) * | 1974-12-03 | 1976-06-07 | ||
JPH0398990U (ja) * | 1989-12-26 | 1991-10-15 | ||
JP2007276062A (ja) * | 2006-04-07 | 2007-10-25 | Denso Corp | 電解加工方法および電解加工装置 |
WO2014010540A1 (ja) * | 2012-07-11 | 2014-01-16 | マルイ鍍金工業株式会社 | 空洞管の研磨用電極とそれを用いた電解研磨方法 |
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TWI687557B (zh) * | 2017-09-28 | 2020-03-11 | 南韓商奧森里德股份有限公司 | 電解研磨用電極框架、電解研磨用可變型電極框架及包括其的電解研磨裝置 |
WO2019208664A1 (ja) * | 2018-04-26 | 2019-10-31 | 三菱重工機械システム株式会社 | 超伝導加速空洞の加工装置及び方法 |
JP2019192539A (ja) * | 2018-04-26 | 2019-10-31 | 三菱重工機械システム株式会社 | 超伝導加速空洞の加工装置及び方法 |
JP7071866B2 (ja) | 2018-04-26 | 2022-05-19 | 三菱重工機械システム株式会社 | 超伝導加速空洞の加工装置及び方法 |
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US20170292203A1 (en) | 2017-10-12 |
JPWO2016056620A1 (ja) | 2017-07-20 |
JP6576939B2 (ja) | 2019-09-18 |
US10246792B2 (en) | 2019-04-02 |
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