WO2016031574A1 - 組成物、硬化膜、パターン形成方法、カラーフィルタ、カラーフィルタの製造方法、固体撮像素子および画像表示装置 - Google Patents
組成物、硬化膜、パターン形成方法、カラーフィルタ、カラーフィルタの製造方法、固体撮像素子および画像表示装置 Download PDFInfo
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- 0 *C(C(C(c1c2c(N*)c(*)c(*=C)c1N(*)O*)=O)C#*)C2=O Chemical compound *C(C(C(c1c2c(N*)c(*)c(*=C)c1N(*)O*)=O)C#*)C2=O 0.000 description 1
- AFIJGMTVSJLSJJ-UHFFFAOYSA-N CCC12[O](CNCC=C)C1CC2C Chemical compound CCC12[O](CNCC=C)C1CC2C AFIJGMTVSJLSJJ-UHFFFAOYSA-N 0.000 description 1
Classifications
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/09—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers
- G03F7/105—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers having substances, e.g. indicators, for forming visible images
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F12/00—Homopolymers and copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by an aromatic carbocyclic ring
- C08F12/02—Monomers containing only one unsaturated aliphatic radical
- C08F12/04—Monomers containing only one unsaturated aliphatic radical containing one ring
- C08F12/14—Monomers containing only one unsaturated aliphatic radical containing one ring substituted by hetero atoms or groups containing heteroatoms
- C08F12/26—Nitrogen
- C08F12/28—Amines
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- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09B—ORGANIC DYES OR CLOSELY-RELATED COMPOUNDS FOR PRODUCING DYES, e.g. PIGMENTS; MORDANTS; LAKES
- C09B57/00—Other synthetic dyes of known constitution
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
- C09D201/00—Coating compositions based on unspecified macromolecular compounds
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- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
- C09D7/00—Features of coating compositions, not provided for in group C09D5/00; Processes for incorporating ingredients in coating compositions
- C09D7/40—Additives
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
- G02F1/133509—Filters, e.g. light shielding masks
- G02F1/133514—Colour filters
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/0005—Production of optical devices or components in so far as characterised by the lithographic processes or materials used therefor
- G03F7/0007—Filters, e.g. additive colour filters; Components for display devices
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
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- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09B—ORGANIC DYES OR CLOSELY-RELATED COMPOUNDS FOR PRODUCING DYES, e.g. PIGMENTS; MORDANTS; LAKES
- C09B11/00—Diaryl- or thriarylmethane dyes
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09B—ORGANIC DYES OR CLOSELY-RELATED COMPOUNDS FOR PRODUCING DYES, e.g. PIGMENTS; MORDANTS; LAKES
- C09B11/00—Diaryl- or thriarylmethane dyes
- C09B11/04—Diaryl- or thriarylmethane dyes derived from triarylmethanes, i.e. central C-atom is substituted by amino, cyano, alkyl
- C09B11/10—Amino derivatives of triarylmethanes
- C09B11/12—Amino derivatives of triarylmethanes without any OH group bound to an aryl nucleus
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09B—ORGANIC DYES OR CLOSELY-RELATED COMPOUNDS FOR PRODUCING DYES, e.g. PIGMENTS; MORDANTS; LAKES
- C09B23/00—Methine or polymethine dyes, e.g. cyanine dyes
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09B—ORGANIC DYES OR CLOSELY-RELATED COMPOUNDS FOR PRODUCING DYES, e.g. PIGMENTS; MORDANTS; LAKES
- C09B47/00—Porphines; Azaporphines
- C09B47/04—Phthalocyanines abbreviation: Pc
- C09B47/08—Preparation from other phthalocyanine compounds, e.g. cobaltphthalocyanineamine complex
- C09B47/18—Obtaining compounds having oxygen atoms directly bound to the phthalocyanine skeleton
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09B—ORGANIC DYES OR CLOSELY-RELATED COMPOUNDS FOR PRODUCING DYES, e.g. PIGMENTS; MORDANTS; LAKES
- C09B5/00—Dyes with an anthracene nucleus condensed with one or more heterocyclic rings with or without carbocyclic rings
- C09B5/24—Dyes with an anthracene nucleus condensed with one or more heterocyclic rings with or without carbocyclic rings the heterocyclic rings being only condensed with an anthraquinone nucleus in 1-2 or 2-3 position
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09B—ORGANIC DYES OR CLOSELY-RELATED COMPOUNDS FOR PRODUCING DYES, e.g. PIGMENTS; MORDANTS; LAKES
- C09B69/00—Dyes not provided for by a single group of this subclass
- C09B69/10—Polymeric dyes; Reaction products of dyes with monomers or with macromolecular compounds
Definitions
- the present invention relates to a composition and a cured film using them.
- the present invention also relates to a pattern forming method, a color filter, a method for manufacturing a color filter, a solid-state imaging device having a color filter, and an image display device.
- This pigment dispersion method is a method for producing a color filter by a photolithography method using a colored photosensitive composition in which a pigment is dispersed in various photosensitive compositions. That is, a curable composition is applied onto a substrate using a spin coater, a roll coater, or the like, dried to form a coating film, and the coating film is subjected to pattern exposure and development to obtain a colored pixel. By repeating this operation for a desired hue, a color filter is produced.
- the method described above is stable against light and heat because it uses a pigment, and the positional accuracy is sufficiently secured because patterning is performed by a photolithographic method, and it is suitable as a method for manufacturing a color filter for a color display. It has been widely used.
- color filters for solid-state imaging devices such as CCD (Charge Coupled Device) have recently been required to have higher image quality and higher sensitivity.
- Pigment Blue 15: 6 and Pigment Violet 23 are used for the blue pixels, but the combination of these pigments cannot achieve the high light transmission of 400 to 500 nm, which is required for recent image sensors. Application is being sought.
- Patent Document 1 contains a dye and a polymerizable compound, and is a photosensitive coloring composition, further comprising both a singlet oxygen quencher and an antioxidant. And the use of a triarylmethane dye as the dye is described.
- Patent Document 3 discloses (A) a compound that generates radicals by light or heat, (B) a polymer having a phenyl group substituted with a vinyl group in a side chain, and (C) a vinyl group substituted in the molecule.
- a photosensitive composition comprising a monomer having two or more phenyl groups, (D) an infrared absorber, and (E) a dye having an absorption maximum in the range of 500 nm to 700 nm. It is described that a triarylmethane dye is used as the dye.
- Triarylmethane compounds are known as useful colorants because of their high transmittance in the wavelength range of 400 to 500 nm and low transmittance of 550 to 650 nm.
- triarylmethane compounds usually do not absorb from around 650 nm to the long wave side.
- the compositions described in Patent Documents 1 to 3 cannot be used for applications having photosensitivity from the vicinity of 650 nm to the long wave side, for example, solid-state imaging devices.
- triarylmethane compounds often do not have practical light resistance, and may be difficult to use for applications having photosensitivity on the long wave side from around 650 nm, for example, solid-state imaging device applications.
- the present invention has been made in view of the above situation, and is a composition containing a triarylmethane compound, which can be used for applications having photosensitivity from around 650 nm to the long wave side, and has excellent developability. It is an object of the present invention to provide a composition. Another object of the present invention is to provide a cured film, a pattern forming method, a color filter, a color filter manufacturing method, a solid-state imaging device, and an image display device using the composition.
- a composition capable of forming a colored pattern (cured film) having a good hue by mixing a triarylmethane compound and a dye having a specific absorption at an appropriate ratio has been found to be able to be provided, and the present invention has been completed. Specifically, the above problem has been solved by the following means ⁇ 1>, preferably ⁇ 2> to ⁇ 21>.
- ⁇ 3> The composition according to ⁇ 1> or ⁇ 2>, wherein the difference between the maximum absorption wavelength of the triarylmethane compound and the dye having the maximum absorption wavelength in the range of 650 to 750 nm is 100 to 150 nm.
- ⁇ 4> The composition according to any one of ⁇ 1> to ⁇ 3>, wherein the triarylmethane compound has an ethylenically unsaturated bond group.
- ⁇ 5> The composition according to any one of ⁇ 1> to ⁇ 4>, wherein the triarylmethane compound is a multimer.
- the dye having a maximum absorption wavelength in the range of 650 to 750 nm is at least one selected from phthalocyanine compounds, cyanine compounds, squarylium compounds, naphthoquinone compounds, and azo compounds, any of ⁇ 1> to ⁇ 5> A composition according to claim 1.
- the composition according to any one of ⁇ 1> to ⁇ 6>, wherein the dye having a maximum absorption wavelength in the range of 650 to 750 nm includes a phthalocyanine compound or a squarylium compound.
- the dye having a maximum absorption wavelength in the range of 650 to 750 nm is a multimer.
- ⁇ 12> A cured film obtained by curing the composition according to any one of ⁇ 1> to ⁇ 11>.
- ⁇ 13> A step of applying the composition according to any one of ⁇ 1> to ⁇ 11> on a support to form a composition layer, a step of exposing the composition layer in a pattern, and a composition layer Forming a colored pattern by developing and removing the unexposed portion of the pattern.
- ⁇ 14> A method for producing a color filter, comprising the pattern forming method according to ⁇ 13>.
- ⁇ 15> a step of applying the composition according to any one of ⁇ 1> to ⁇ 11> on a support to form a composition layer, and curing to form a colored layer; Forming a photoresist layer on the colored layer;
- a method for producing a color filter comprising: a step of patterning a photoresist layer by exposing and developing the photoresist layer to obtain a resist pattern; and a step of dry etching a colored layer using the resist pattern as an etching mask.
- ⁇ 17> a triarylmethane compound and a dye having a maximum absorption wavelength in the range of 650 to 750 nm, the minimum transmittance in the thickness direction in the wavelength range of 450 to 500 nm being 80% or more, and the wavelength of 650 to 700 nm
- ⁇ 19> An image display device having the color filter according to ⁇ 16> or ⁇ 17>.
- ⁇ 21> The composition according to ⁇ 20>, wherein the polymerization initiator is an oxime compound.
- the mass ratio of the compound having a maximum absorption wavelength of 650 to 750 nm with respect to the triarylmethane compound is 0.3 to 1.4, ⁇ 1> to ⁇ 11>, ⁇ 20> and ⁇ 21> A composition according to any one of the above.
- the present invention it has become possible to provide a composition excellent in light resistance and heat resistance.
- a cured film it has become possible to provide a pattern forming method, a color filter, a color filter manufacturing method, a solid-state imaging device, and an image display device using the composition.
- the notation which does not describe substitution and non-substitution includes those having no substituent and those having a substituent.
- the “alkyl group” includes not only an alkyl group having no substituent (unsubstituted alkyl group) but also an alkyl group having a substituent (substituted alkyl group).
- active light or “radiation” means, for example, the emission line spectrum of a mercury lamp, far ultraviolet rays represented by excimer laser, extreme ultraviolet rays (EUV light), X-rays, electron beams, and the like.
- light means actinic rays or radiation.
- exposure in this specification is not only exposure with far-ultraviolet rays such as mercury lamps and excimer lasers, X-rays, EUV light, but also drawing with particle beams such as electron beams and ion beams. Are also included in the exposure.
- a numerical range expressed using “to” means a range including numerical values described before and after “to” as a lower limit value and an upper limit value.
- the total solid content refers to the total mass of the components excluding the solvent from the total composition of the composition.
- concentration in this invention says the density
- (meth) acrylate” represents both and / or acrylate and methacrylate
- (meth) acryl” represents both and / or acryl and “(meth) acryloyl” Represents both or one of acryloyl and methacryloyl.
- “monomer” and “monomer” are synonymous.
- the monomer in this specification is distinguished from an oligomer and a polymer, and refers to a compound having a weight average molecular weight of 2,000 or less.
- the polymerizable compound means a compound having a polymerizable functional group, and may be a monomer or a polymer.
- the polymerizable functional group refers to a group that participates in a polymerization reaction.
- Me in the chemical formula represents a methyl group
- Et represents an ethyl group
- Pr represents a propyl group
- Bu represents a butyl group
- Ph represents a phenyl group.
- a weight average molecular weight and a number average molecular weight are defined as a polystyrene conversion value by GPC measurement.
- the weight average molecular weight (Mw) and the number average molecular weight (Mn) are, for example, HLC-8220 (manufactured by Tosoh) and TSKgel Super AWM-H (manufactured by Tosoh, 6.0 mm ID ⁇ 15.0 cm) as a column. ) Can be determined by using a 10 mmol / L lithium bromide NMP (N-methylpyrrolidinone) solution as the eluent.
- composition of the present invention comprises a triarylmethane compound, a dye having a maximum absorption wavelength in the range of 650 to 750 nm, and a curable compound, and has a maximum absorption wavelength in the range of 650 to 750 nm with respect to the triarylmethane compound.
- the mass ratio of the pigment to be contained is 0.2 to 1.5.
- the excited triarylmethane compound can be rapidly Then, energy is supplied to the dye having the maximum absorption wavelength in the range of 650 to 750 nm, and the triarylmethane compound returns to the ground state. As a result, light resistance is improved. Furthermore, the composition of the present invention can maintain high heat resistance.
- triarylmethane compounds tend to agglomerate because they are ionic, and in the current situation where color filters for solid-state imaging devices with smaller pattern sizes are required, development defects May occur or pattern defects may easily occur.
- the pattern formability may not always be sufficient.
- the composition of the present invention can suppress development defects and pattern defects.
- a triarylmethane compound is a compound containing at least one triarylmethane structure in one molecule.
- the triarylmethane compound in the present invention may be a triarylmethane monomer containing one triarylmethane structure in one molecule, or a triaryl containing two or more triarylmethane structures in one molecule. It may be a methane multimer or a triarylmethane multimer containing three or more triarylmethane structures in one molecule.
- the triarylmethane compound is preferably a triarylmethane multimer.
- the triarylmethane compound preferably has a curable group.
- the curable group examples include an ethylenically unsaturated bond group and a cyclic ether group (such as an epoxy group and an oxetanyl group), and an ethylenically unsaturated bond group is preferable.
- the triarylmethane compound is preferably a multimer or a monomer having an ethylenically unsaturated bond group, more preferably a multimer, having an ethylenically unsaturated bond group. More preferably, it is a multimer. By setting it as such a structure, heat resistance can be improved more.
- the composition of the present invention may contain only one type of triarylmethane compound or two or more types. A triarylmethane monomer and a triarylmethane multimer may be used in combination.
- the triarylmethane compound in the present invention usually takes the form of a cation.
- the cation preferably has one or two monovalent and / or divalent cations, and more preferably one monovalent cation, per one triarylmethane structure.
- the triarylmethane compound is preferably a dye.
- the dye means a soluble pigment compound that is easily dissolved in a solvent.
- an arbitrary solvent is mentioned with a solvent,
- the solvent illustrated in the column of the solvent mentioned later is mentioned.
- a solvent in which the solubility of the triarylmethane compound in the solvent at 25 ° C. exceeds 0.001 g / 100 g Solvent is preferable.
- the maximum absorption wavelength of the triarylmethane compound is preferably in the range of 560 to 620 nm, and more preferably 575 to 610 nm. Furthermore, the maximum absorption wavelength is more preferably the maximum absorption wavelength in the visible region (for example, 380 to 750 nm) of triarylmethane. Further, the triarylmethane compound used in the present invention usually does not have a maximum absorption wavelength in the range of the wavelength of 450 nm to less than 550 nm and the wavelength of 650 nm to 700 nm.
- the difference between the maximum absorption wavelength of the triarylmethane compound and the dye having the maximum absorption wavelength described later in the range of 650 to 750 nm is preferably 40 to 150 nm, and more preferably 80 to 120 nm.
- the compounding amount of the triarylmethane compound is preferably 10 to 80% by mass, more preferably 20 to 75% by mass, and further preferably 35 to 60% by mass of the solid content of the composition.
- the total amount is preferably within the above range.
- Triarylmethane Monomer When the triarylmethane compound is a monomer, the triarylmethane compound contains one triarylmethane structure.
- the triarylmethane structure includes three aryl groups centered on methane. Each of the three aryl groups is preferably a phenyl group, a naphthyl group, or a ring in which an aryl group and a heterocyclic ring are condensed. Examples of the heterocycle in this case include a nitrogen-containing 5-membered ring or a 6-membered ring.
- the triarylmethane compound is preferably a cation represented by the general formula (TP1) and / or a cation represented by the general formula (TP2), and more preferably a cation represented by the general formula (TP1).
- Rtp 1 to Rtp 4 each independently represents a hydrogen atom, an alkyl group, or an aryl group.
- Rtp 5 , Rtp 6 , Rtp 8 , Rtp 9 and Rtp 11 each independently represent a substituent.
- Rtp 7 represents a hydrogen atom, an alkyl group, an aryl group, or NRtp 71 Rtp 72 .
- Rtp 71 and Rtp 72 each independently represent a hydrogen atom, an alkyl group or an aryl group.
- Rtp 10 represents a hydrogen atom, an alkyl group or an aryl group.
- a, b and c each independently represents an integer of 0 to 4; When a, b and c are 2 or more, two of Rtp 5 , Rtp 6 , Rtp 8 and Rtp 9 may be linked to each other to form a ring.
- At least one of Rtp 1 to Rtp 11 , Rtp 71 and Rtp 72 may contain an anion.
- Rtp 1 to Rtp 4 each independently represents a hydrogen atom, an alkyl group or an aryl group, and preferably a hydrogen atom or an alkyl group.
- the alkyl group preferably has 1 to 10 carbon atoms, more preferably 1 to 5 carbon atoms, and still more preferably 1 to 3 carbon atoms.
- the alkyl group may be linear, branched or cyclic, but is preferably linear or branched.
- the alkyl group is preferably unsubstituted. Substituents mentioned in the section of Substituent group A described later can be mentioned.
- the aryl group preferably has 6 to 18 carbon atoms, more preferably 6 to 12 carbon atoms, and still more preferably 6 carbon atoms.
- Examples of the substituent that the aryl group may have include the substituents mentioned in the section of the substituent group A described later.
- Rtp 7 represents a hydrogen atom, an alkyl group, an aryl group, or NRtp 71 Rtp 72 , preferably a hydrogen atom or NRtp 71 Rtp 72 , and more preferably NRtp 71 Rtp 72 .
- Rtp 7 represents an alkyl group
- the alkyl group preferably has 1 to 10 carbon atoms, more preferably 1 to 5 carbon atoms, and still more preferably 1 to 3 carbon atoms.
- the alkyl group may be linear, branched or cyclic, but is preferably linear. Examples of the substituent that the alkyl group may have include the substituents mentioned in the section of Substituent Group A described later.
- the aryl group preferably has 6 to 18 carbon atoms, more preferably 6 to 12 carbon atoms, and still more preferably 6 carbon atoms.
- Rtp 71 and Rtp 72 each independently represent a hydrogen atom, an alkyl group or an aryl group, preferably a hydrogen atom or an alkyl group.
- the alkyl group preferably has 1 to 10 carbon atoms, more preferably 1 to 8, more preferably 1 to 6, and particularly preferably 1 to 3.
- the alkyl group may be linear, branched or cyclic, but is preferably linear or branched.
- the alkyl group may be substituted but is preferably unsubstituted. Examples of the substituent that the alkyl group may have include the substituents mentioned in the section of Substituent Group A described later.
- the aryl group preferably has 6 to 18 carbon atoms, more preferably 6 to 12 carbon atoms, and still more preferably 6 carbon atoms.
- Examples of the substituent that the aryl group may have include the substituents mentioned in the section of the substituent group A described later.
- Rtp 5 , Rtp 6 and Rtp 8 each independently represent a substituent.
- substituents include the substituents mentioned in the section of the substituent group A described later.
- a linear or branched alkyl group having 1 to 5 carbon atoms, an alkenyl group having 1 to 5 carbon atoms, an aryl group having 6 to 15 carbon atoms, a carboxyl group, or a sulfo group is preferable, and a linear chain having 1 to 5 carbon atoms is preferable.
- a branched alkyl group, an alkenyl group having 1 to 5 carbon atoms, a phenyl group or a carboxyl group is more preferable.
- Rtp 5 and Rtp 6 are preferably each independently an alkyl group having 1 to 5 carbon atoms.
- Rtp 8 preferably has two alkenyl groups bonded to each other to form a ring.
- the ring is preferably a benzene ring.
- a, b and c each independently represent an integer of 0 to 4, and a and b preferably represent 0 or 1, more preferably 0.
- c preferably represents 0 to 2, more preferably 0 or 1.
- Rtp 1 to Rtp 4 each independently represent a hydrogen atom, an alkyl group or an aryl group, and are synonymous with Rtp 1 to Rtp 4 in general formula (TP1), and the preferred ranges are also the same. It is.
- Rtp 5 and Rtp 6 each independently represent a substituent, and are synonymous with Rtp 5 and Rtp 6 in general formula (TP1), and their preferred ranges are also the same.
- Rtp 9 and Rtp 11 each independently represent a substituent, and the substituents exemplified in the section of Substituent Group A described later can be used.
- Rtp 9 is preferably an aryl group, more preferably an aryl group having 6 to 12 carbon atoms, and more preferably a phenyl group.
- Rtp 11 is preferably an alkyl group, more preferably an alkyl group having 1 to 5 carbon atoms, and still more preferably an alkyl group having 1 to 3 carbon atoms.
- the alkyl group is preferably linear or branched, and more preferably linear.
- Rtp 10 represents a substituent, and the substituents exemplified in the section of Substituent Group A described later can be used.
- Rtp 10 is more preferably an aryl group having 6 to 12 carbon atoms, and more preferably a phenyl group.
- a, b and c each independently represent an integer of 0 to 4, and a and b preferably represent 0 or 1, more preferably 0. c preferably represents 0 to 2, more preferably 0.
- the dye cation is present in a delocalized manner as follows, and the following two types of structures are included in the triarylmethane compound.
- the cation moiety may be at any position in the molecule.
- the triarylmethane compound preferably contains an ethylenically unsaturated bond group.
- an ethylenically unsaturated bond group is polymerized by, for example, radical polymerization or irradiation with light or heat, or undergoes a crosslinking reaction with other groups. Therefore, when an ethylenically unsaturated bond group is included, the heat resistance tends to be further improved.
- the ethylenically unsaturated bond group may consist only of an ethylenically unsaturated bond, or may contain a linking group in addition to the ethylenically unsaturated bond.
- the ethylenically unsaturated bond group is preferably a group represented by -L 0 -P 0 .
- L 0 represents a single bond or a divalent linking group
- P 0 represents an ethylenically unsaturated bond.
- the divalent linking group includes an alkylene group, an arylene group, a heterocyclic linking group, —CH ⁇ CH—, —O—, —S—, —C ( ⁇ O) —, —CO—, —NR—, —CONR. —, —OC—, —SO—, —SO 2 — and a group obtained by combining two or more thereof are preferred.
- R represents a hydrogen atom, an alkyl group, an aryl group, or a heterocyclic group each independently.
- the divalent linking group is preferably an arylene group.
- the alkylene group may be linear, branched or cyclic.
- the alkylene group preferably has 1 to 30 carbon atoms, more preferably 1 to 20, more preferably 5 to 20, and particularly preferably 5 to 10.
- a methylene group, ethylene group, propylene group, butylene group, hexylene group, heptylene group, cyclopentenylene group, cyclohexylene group and the like are preferable.
- the number of carbon atoms of the arylene group is preferably 6 to 30, more preferably 6 to 18, and still more preferably 6 to 12.
- the arylene group is preferably a phenylene group or a naphthylene group, and more preferably a phenylene group.
- the ethylenically unsaturated bond group include a group containing a (meth) acryl group, a group containing a vinyl group, a group containing an allyl group, a group containing a methallyl group, and the like. At least one selected from a group containing a group, a group containing an allyl group, and a group containing a methallyl group is more preferable. Especially, at least 1 sort (s) selected from a (meth) acryl group, an allyl group, and a methallyl group is preferable.
- the triarylmethane compound preferably includes at least one of Rtp 1 to Rtp 11 , Rtp 71 and Rtp 72 containing an ethylenically unsaturated bond group, wherein Rtp 7 is More preferably, it contains an ethylenically unsaturated bond group, and Rtp 71 or Rtp 72 is more preferably an ethylenically unsaturated bond group.
- Substituents include halogen atoms, alkyl groups, cycloalkyl groups, alkenyl groups, cycloalkenyl groups, alkynyl groups, aryl groups, heterocyclic groups, cyano groups, hydroxyl groups, nitro groups, carboxyl groups, alkoxy groups, aryloxy groups Silyloxy group, heterocyclic oxy group, acyloxy group, carbamoyloxy group, amino group (including alkylamino group and anilino group), acylamino group, aminocarbonylamino group, alkoxycarbonylamino group, aryloxycarbonylamino group, sulfa Moylamino group, alkyl or arylsulfonylamino group, mercapto group, alkylthio group, arylthio group, heterocyclic thio group, sulfamoyl group, sulfo group, alkyl or arylsulfony
- a halogen atom for example, a fluorine atom, a chlorine atom, a bromine atom, an iodine atom
- a linear or branched alkyl group a linear or branched substituted or unsubstituted alkyl group, preferably an alkyl group having 1 to 30 carbon atoms
- a cycloalkyl group preferably substituted with 3 to 30 carbon atoms or Examples thereof include unsubstituted cycloalkyl groups such as cyclohexyl and cyclopentyl, and polycycloalkyl groups such as bicycloalkyl groups (preferably substituted or unsubstituted bicycloalkyl groups having 5 to 30 carbon atoms
- Linear or branched alkenyl group (straight or branched substituted or unsubstituted alkenyl group, preferably an alkenyl group having 2 to 30 carbon atoms, such as vinyl, allyl, prenyl, geranyl, oleyl), cycloalkenyl A group (preferably a substituted or unsubstituted cycloalkenyl group having 3 to 30 carbon atoms such as 2-cyclopenten-1-yl and 2-cyclohexen-1-yl, and a polycycloalkenyl group such as bicyclo An alkenyl group (preferably a substituted or unsubstituted bicycloalkenyl group having 5 to 30 carbon atoms such as bicyclo [2,2,1] hept-2-en-1-yl, bicyclo [2,2,2] Octo-2-en-4-yl) and tricycloalkenyl groups, with monocyclic cycloalkenyl groups being particularly preferred.
- Kiniru group preferably a substituted or unsubstituted alkynyl group having 2 to 30 carbon atoms, e.g., ethynyl, propargyl, trimethylsilylethynyl group
- An aryl group preferably a substituted or unsubstituted aryl group having 6 to 30 carbon atoms, such as phenyl, p-tolyl, naphthyl, m-chlorophenyl, o-hexadecanoylaminophenyl
- a heterocyclic group preferably 5 to 7-membered substituted or unsubstituted, saturated or unsaturated, aromatic or non-aromatic, monocyclic or condensed heterocyclic group, more preferably the ring-constituting atom is selected from carbon atom, nitrogen atom and sulfur atom
- a heterocyclic group having at least one hetero atom of any one of a nitrogen atom, an oxygen atom and a sulfur atom more preferably a 5- or 6-membered aromatic heterocyclic group having 3 to 30 carbon atoms
- alkoxy group preferably a substituted or unsubstituted alkoxy group having 1 to 30 carbon atoms such as methoxy, ethoxy, isopropoxy, tert-butoxy, n-octyloxy, 2-methoxyethoxy
- aryloxy group preferably Is a substituted or unsubstituted aryloxy group having 6 to 30 carbon atoms, such as phenoxy, 2-methylphenoxy, 2,4-di-tert-amylphenoxy, 4-tert-butylphenoxy, 3-nitrophenoxy, 2-tetradecanoylaminophenoxy
- silyloxy group preferably a silyloxy group having 3 to 20 carbon atoms, such as trimethylsilyloxy, tert-butyldimethylsilyloxy
- a heterocyclic oxy group preferably having a carbon number of 2 to 30 substituted or unsubstituted heterocyclic oxy groups , Heterocyclic portion is preferably described
- An acyloxy group (preferably a formyloxy group, a substituted or unsubstituted alkylcarbonyloxy group having 2 to 30 carbon atoms, a substituted or unsubstituted arylcarbonyloxy group having 6 to 30 carbon atoms, such as formyloxy, acetyloxy , Pivaloyloxy, stearoyloxy, benzoyloxy, p-methoxyphenylcarbonyloxy), a carbamoyloxy group (preferably a substituted or unsubstituted carbamoyloxy group having 1 to 30 carbon atoms such as N, N-dimethylcarbamoyloxy, N, N-diethylcarbamoyloxy, morpholinocarbonyloxy, N, N-di-n-octylaminocarbonyloxy, Nn-octylcarbamoyloxy), an alkoxycarbonyloxy group (preferably a substituent having 2
- amino group preferably an amino group, a substituted or unsubstituted alkylamino group having 1 to 30 carbon atoms, a substituted or unsubstituted arylamino group having 6 to 30 carbon atoms, or a heterocyclic amino group having 0 to 30 carbon atoms
- amino, methylamino, dimethylamino, anilino, N-methyl-anilino, diphenylamino, N-1,3,5-triazin-2-ylamino acylamino group (preferably formylamino group, carbon number A substituted or unsubstituted alkylcarbonylamino group having 1 to 30 carbon atoms, a substituted or unsubstituted arylcarbonylamino group having 6 to 30 carbon atoms, such as formylamino, acetylamino, pivaloylamino, lauroylamino, benzoylamino, 3, 4,5-tri-n-oc
- Aryloxycarbonylamino group (preferably a substituted or unsubstituted aryloxycarbonylamino group having 7 to 30 carbon atoms, such as phenoxycarbonylamino, p-chlorophenoxycarbonylamino, mn-octyloxyphenoxycarbonylamino)
- Sulfamoylamino group (preferably a substituted or unsubstituted sulfamoylamino group having 0 to 30 carbon atoms such as sulfamoylamino, N, N-dimethylaminosulfonylamino, Nn-octylamino Sulfonylamino), alkyl or arylsulfonylamino group (preferably substituted or unsubstituted alkylsulfonylamino group having 1 to 30 carbon atoms, substituted or unsubstituted arylsulfonylamino group having 6 to 30 carbon atom
- alkylthio group preferably a substituted or unsubstituted alkylthio group having 1 to 30 carbon atoms such as methylthio, ethylthio, n-hexadecylthio
- arylthio group preferably a substituted or unsubstituted arylthio group having 6 to 30 carbon atoms
- the heterocyclic portion described in the above is preferably, for example, 2-benzothiazolylthio, 1-phenyltetrazol-5-ylthio), a sulfamoyl group (preferably a substituted or unsubstituted sulfamoyl group having 0 to 30 carbon atoms, N-ethylsulfamoyl, N- (3-dodecyloxypropyl) sulfur Moil, N, N- dimethylsulfamoyl, N- acetyl sulfamoyl, N- benzoylsulfamoyl, N- (
- alkyl or arylsulfinyl group preferably a substituted or unsubstituted alkylsulfinyl group having 1 to 30 carbon atoms, a substituted or unsubstituted arylsulfinyl group having 6 to 30 carbon atoms, such as methylsulfinyl, ethylsulfinyl, phenyl Sulfinyl, p-methylphenylsulfinyl
- an alkyl or arylsulfonyl group preferably a substituted or unsubstituted alkylsulfonyl group having 1 to 30 carbon atoms, a substituted or unsubstituted arylsulfonyl group having 6 to 30 carbon atoms, for example, Methylsulfonyl, ethylsulfonyl, phenylsulfonyl, p-methylphenylsulfonyl
- alkoxycarbonyl group preferably a substituted or unsubstituted alkoxycarbonyl group having 2 to 30 carbon atoms such as methoxycarbonyl, ethoxycarbonyl, tert-butoxycarbonyl, n-octadecyloxycarbonyl
- a carbamoyl group preferably having a carbon number 1-30 substituted or unsubstituted carbamoyl such as carbamoyl, N-methylcarbamoyl, N, N-dimethylcarbamoyl, N, N-di-n-octylcarbamoyl, N- (methylsulfonyl) carbamoyl), aryl or hetero
- a ring azo group preferably a substituted or unsubstituted arylazo group having 6 to 30 carbon atoms, a substituted or unsubstituted heterocyclic azo group having 3 to 30 carbon atoms (the heterocycle portion is the heterocycle
- a phosphinyloxy group (preferably a substituted or unsubstituted phosphinyloxy group having 2 to 30 carbon atoms, such as diphenoxyphosphinyloxy, dioctyloxyphosphinyloxy), a phosphinylamino group ( Preferably, it is a substituted or unsubstituted phosphinylamino group having 2 to 30 carbon atoms, for example, dimethoxyphosphinylamino, dimethylaminophosphinylamino), a silyl group (preferably a substitution having 3 to 30 carbon atoms) Or, an unsubstituted silyl group, for example, trimethylsilyl, tert-butyldimethylsilyl, phenyldimethylsilyl).
- At least one of Rtp 1 to Rtp 11 , Rtp 71 and Rtp 72 may contain an anion.
- the anion is preferably —SO 3 ⁇ , —COO ⁇ , —PO 4 ⁇ , bis (sulfonyl) imide anion, tris (sulfonyl) methide anion and tetraarylborate anion, and bis (sulfonyl) ) Imide anion, tris (sulfonyl) methide anion and tetraarylborate anion are more preferred, and bis (sulfonyl) imide anion and tris (sulfonyl) methide anion are more preferred.
- L represents a single bond or a divalent linking group.
- the divalent linking group preferably represents —NR 10 —, —O—, —SO 2 —, an alkylene group containing a fluorine atom, an arylene group containing a fluorine atom, or a combination thereof.
- a group consisting of a combination of —NR 10 —, —SO 2 and an alkylene group containing a fluorine atom, and a group consisting of a combination of —O— and an arylene group containing a fluorine atom are preferred.
- R 10 represents a hydrogen atom or an alkyl group having 1 to 5 carbon atoms, preferably a hydrogen atom.
- the number of carbon atoms of the alkylene group containing a fluorine atom is preferably 1 to 10, more preferably 1 to 6, and still more preferably 1 to 3.
- These alkylene groups are more preferably perfluoroalkylene groups.
- Specific examples of the fluorine-substituted alkylene group include a difluoromethylene group, a tetrafluoroethylene group, and a hexafluoropropylene group.
- the number of carbon atoms of the arylene group containing a fluorine atom is preferably 6 to 20, more preferably 6 to 14, and still more preferably 6 to 10.
- Specific examples of the arylene group containing a fluorine atom include a tetrafluorophenylene group, a hexafluoro-1-naphthylene group, and a hexafluoro-2-naphthylene group.
- X 1 represents an anion, and is selected from —SO 3 ⁇ , —COO ⁇ , —PO 4 ⁇ , bis (sulfonyl) imide anion, tris (sulfonyl) methide anion and tetraarylborate anion. Species are preferred, one kind selected from bis (sulfonyl) imide anion, tris (sulfonyl) methide anion and tetraarylborate anion is more preferred, and bis (sulfonyl) imide anion or tris (sulfonyl) methide anion is still more preferred.
- L 1 represents a single bond or a divalent linking group, and is preferably a single bond.
- the divalent linking group represented by L 1 include an alkylene group having 1 to 6 carbon atoms, an arylene group having 6 to 12 carbon atoms, —O—, —S—, or a group composed of a combination thereof.
- L 2 represents —SO 2 — or —CO—.
- G represents a carbon atom or a nitrogen atom.
- n1 represents 2 when G is a carbon atom, and represents 1 when G is a nitrogen atom.
- R 6 represents an alkyl group containing a fluorine atom or an aryl group containing a fluorine atom. When n1 is 2, two R 6 may be the same or different.
- the number of carbon atoms of the alkyl group containing a fluorine atom represented by R 6 is preferably 1 to 10, more preferably 1 to 6, and still more preferably 1 to 3.
- the number of carbon atoms of the aryl group containing a fluorine atom represented by R 6 is preferably 6 to 20, more preferably 6 to 14, and still more preferably 6 to 10.
- the molecular weight of the triarylmethane compound is preferably 300 to 1,000, and more preferably 500 to 1,000.
- Triarylmethane Multimer When the triarylmethane compound is a multimer (also referred to as a triarylmethane multimer), it is a compound containing two or more triarylmethane structures, preferably three or more triarylmethane structures.
- the triarylmethane multimer includes at least one repeating unit represented by the following general formula (A) and general formula (C), or the counter anion includes a repeating unit having a counter anion. Or represented by the general formula (D) described later.
- the triarylmethane multimer preferably has a repeating unit represented by the following general formula (A).
- X 1 represents the main chain of the repeating unit.
- L 1 represents a single bond or a divalent linking group.
- Dye represents a triarylmethane structure.
- X 1 represents a main chain of repeating units. Two sites represented by * are repeating units. X 1 is preferably —CH 2 —CH 2 — or —CH 2 —C (CH 3 ) —.
- L 1 represents a divalent linking group
- an alkylene group having 1 to 30 carbon atoms methylene group, ethylene group, trimethylene group, propylene group, butylene group, etc.
- an arylene group having 6 to 30 carbon atoms phenylene group, Naphthalene group, etc.
- heterocyclic linking group —CH ⁇ CH—, —O—, —S—, —C ( ⁇ O) —, —CO—, —NR—, —CONR—, —OC—, —SO Examples include —, —SO 2 —, a linking group in which two or more thereof are combined, and a group represented by the following formula (L-1).
- R represents a hydrogen atom, an alkyl group, an aryl group, or a heterocyclic group each independently.
- R is linked to X 1 of formula (A) at the site indicated by * 1, and is linked to Dye of formula (A) at the site indicated by * 2.
- L 11 represents a single bond or a divalent linking group.
- the divalent linking group include an alkylene group having 1 to 6 carbon atoms, an arylene group having 6 to 18 carbon atoms, —O—, —CO—, —S—, —SO 2 —, —NR A R B —, or Examples include groups composed of these combinations.
- the alkylene group may be linear, branched or cyclic.
- the arylene group may be monocyclic or polycyclic.
- R A and R B each independently represent a hydrogen atom or an alkyl group having 1 to 6 carbon atoms, and R A and R B are bonded to each other to form a ring. Also good.
- L 12 represents —SO 2 — or —CO—.
- L 13 represents a divalent linking group. Examples of the divalent linking group include the groups described for L 11 , an arylene group having 6 to 18 carbon atoms (preferably a phenylene group), —O—, —CO—, —S—, —NR A R B -Or a group consisting of a combination thereof is preferred, and a group consisting of a combination of a phenylene group, -O- and -CO- is more preferred.
- G represents a carbon atom or a nitrogen atom.
- n2 represents 1 when G is a carbon atom, and represents 0 when G is a nitrogen atom.
- R 7A represents an alkylene group containing a fluorine atom or an arylene group containing a fluorine atom.
- the alkylene group preferably has 1 to 10 carbon atoms, more preferably 1 to 6 carbon atoms, and still more preferably 1 to 3 carbon atoms.
- the carbon number of the arylene group is preferably 6 to 20, more preferably 6 to 14, and further preferably 6 to 10.
- R 7B represents an alkyl group containing a fluorine atom or an aryl group containing a fluorine atom.
- the alkyl group preferably has 1 to 10 carbon atoms, more preferably 1 to 6 carbon atoms, and still more preferably 1 to 3 carbon atoms.
- the aryl group preferably has 6 to 20 carbon atoms, more preferably 6 to 14 carbon atoms, and still more preferably 6 to 10 carbon atoms.
- L 1 is a single bond or an alkylene group having 1 to 30 carbon atoms (preferably an alkylene group having 1 to 10 carbon atoms, more preferably an alkylene group having 5 to 20 carbon atoms, still more preferably, — (CH 2 ) n — (n is an integer of 1 to 10)), an arylene group having 6 to 12 carbon atoms (preferably a phenylene group or a naphthylene group), —NH—, —CO—, —O— and —SO A divalent linking group in which two or more of 2- are combined is preferable.
- the group represented by the above (L-1) is also preferable.
- L 1 is preferably — (CH 2 ) n — (n is an integer of 5 to 10) or an arylene group having 6 to 12 carbon atoms (preferably a phenylene group or a naphthylene group), and —COO— or a phenylene group is More preferably, it is a linking group.
- L 1 represents a single bond
- X 1 is preferably bonded to any one of Rtp 1 to Rtp 11 , Rtp 71 and Rtp 72 in general formulas (TP1) and (TP2), and Rtp 71 or Rtp 72 is more preferable.
- L 1 represents a divalent linking group
- L 1 is preferably bonded to any one of Rtp 1 to Rtp 11 , Rtp 71 and Rtp 72 in the general formulas (TP1) and (TP2), and Rtp More preferably, it is bound to 71 or Rtp 72 .
- (XX-1) to (XX-24) it represents that it is linked to the triarylmethane structure at the site indicated by *.
- Me represents a methyl group.
- R in (XX-18) and (XX-19) represents a hydrogen atom, an alkyl group having 1 to 5 carbon atoms, or a phenyl group.
- n represents an integer of 1 to 9. Moreover, it represents connecting with a triarylmethane structure at a site indicated by *.
- Dye represents a triarylmethane structure, a cation represented by the general formula (TP1) or a cation represented by the general formula (TP2) is preferable, and a cation represented by the general formula (TP1) is more preferable.
- Dye is preferably bonded to L 1 via at least one of Rtp 1 to Rtp 11 , Rtp 71 and Rtp 72 in the above general formula (TP1) or (TP2), and via Rtp 7 More preferably, it is bonded to L 1, and more preferably bonded to L 1 via Rtp 71 or Rtp 72 .
- repeating unit containing a triarylmethane structure examples include the following structures, but the present invention is not limited to these.
- the triarylmethane multimer may consist only of repeating units having triarylmethane, but may contain other repeating units. Specifically, other repeating units that the triarylmethane multimer may contain include repeating units containing an alkali-soluble group such as an acid group, repeating units containing a polymerizable group, and the like. The multimer preferably contains at least a repeating unit containing an alkali-soluble group such as an acid group. The triarylmethane multimer may contain only one type of these repeating units, or may contain two or more types. Hereinafter, these repeating units will be described in detail.
- Repeating unit containing a polymerizable group a known polymerizable group that can be crosslinked by a radical, an acid, or heat can be used.
- a group containing an ethylenically unsaturated bond, a cyclic ether group (Epoxy group, oxetane group), methylol group and the like are mentioned, particularly a group containing an ethylenically unsaturated bond is preferred, (meth) acryloyl group is more preferred, glycidyl (meth) acrylate and 3,4-epoxycyclohexyl.
- a (meth) acryloyl group derived from methyl (meth) acrylate is more preferred.
- Examples of the method for introducing a polymerizable group include (1) a method in which a repeating unit is modified and introduced with a polymerizable group-containing compound, and (2) a method in which a repeating unit and a polymerizable group-containing compound are copolymerized and introduced. is there. Details of these can be referred to the descriptions in paragraphs 0334 to 0342 of JP 2013-225112 A, the contents of which are incorporated herein.
- the amount of the polymerizable group is preferably 0.1 to 2.0 mmol with respect to 1 g of the dye structure, and 0.2 to 1.5 mmol. More preferably, it is particularly preferably 0.3 to 1.0 mmol.
- the amount thereof is preferably, for example, 5 to 40 mol%, more preferably 5 to 35 mol%, based on all repeating units.
- repeating unit containing the polymerizable group examples include the following. However, the present invention is not limited to these.
- Repeating unit containing acid group examples include a carboxylic acid group, a sulfonic acid group, and a phosphoric acid group.
- a carboxylic acid group and a sulfonic acid group are preferable, and a carboxylic acid group is more preferable.
- Only one type of acid group may be contained in the repeating unit containing an acid group, or two or more types may be used.
- the triarylmethane multimer contains a repeating unit containing an acid group, the ratio of the repeating unit containing a repeating unit having an acid group is preferably 1 to 80 mol% with respect to all the repeating units. % Mol is more preferred.
- repeating unit containing other alkali-soluble groups examples include a repeating unit containing a phenolic hydroxyl group.
- the triarylmethane multimer contains a repeating unit having a group consisting of repeating 2 to 20 unsubstituted alkyleneoxy chains in the side chain (hereinafter, also referred to as “(b) repeating unit”). Is also preferable.
- the number of repeating alkyleneoxy chains in the repeating unit is preferably 2 to 10, more preferably 2 to 15, and even more preferably 2 to 10.
- One alkyleneoxy chain is represented by — (CH 2 ) n O—, where n is an integer, n is preferably 1 to 10, more preferably 1 to 5, and even more preferably 2 or 3.
- the group consisting of repeating 2 to 20 unsubstituted alkyleneoxy chains may contain only one kind of alkyleneoxy chain or two or more kinds.
- the repeating unit is preferably represented by the following general formula.
- X 1 represents a linking group formed by polymerization
- L 1 represents a single bond or a divalent linking group
- P represents a group containing a group consisting of repeating alkyleneoxy chains.
- X 1 and L 1 in the general formula (P) have the same meanings as X 1 and L 1 in formula (A), and preferred ranges are also the same.
- P represents a group containing a group consisting of repeating alkyleneoxy chains, more preferably a group consisting of repeating alkyleneoxy chains-terminal atom or terminal group.
- the terminal atom or terminal group is preferably a hydrogen atom, an alkyl group, an aryl group or a hydroxyl group, more preferably a hydrogen atom, an alkyl group having 1 to 5 carbon atoms, a phenyl group or a hydroxyl group, a hydrogen atom, a methyl group, a phenyl group and A hydroxyl group is more preferred, and a hydrogen atom is particularly preferred.
- the description in paragraph 0351 of JP2013-225112A can be referred to, and the contents thereof are incorporated in the present specification.
- the triarylmethane multimer contains repeating units containing other alkali-soluble groups, for example, 1 to 80 mol% is preferable and 10 to 65 mol% is more preferable with respect to all repeating units.
- the ratio of the repeating units containing all alkali-soluble groups, including acid groups or other alkali-soluble groups is preferably 1 to 80 mol%, and more preferably 10 to 65 mol%, based on all repeating units.
- the amount of the alkali-soluble group that the dye has is preferably 0.3 mmol to 2.0 mmol, more preferably 0.4 mmol to 1.5 mmol, and more preferably 0.5 mmol to 1.0 mmol with respect to 1 g of the dye. Is particularly preferred.
- the triarylmethane multimer may have a repeating unit other than the repeating units described above.
- development accelerators such as lactones, acid anhydrides, amides, —COCH 2 CO—, cyano groups, long chain and cyclic alkyl groups, aralkyl groups, aryl groups, polyalkylene oxide groups, hydroxyl groups, maleimides
- Examples thereof include a repeating unit containing at least one selected from a hydrophilic group such as a group and an amino group. These may be included in only one type, or may be included in two or more types.
- Examples of the introduction method include a method in which the dye structure is introduced in advance and a method in which a monomer having the above group is copolymerized.
- the proportion is preferably 40 to 80 mol% of the entire repeating units.
- repeating unit containing an acid group or other repeating units are shown below, but the present invention is not limited thereto.
- the triarylmethane multimer also preferably contains a repeating unit represented by the following general formula (C).
- L 3 represents a single bond or a divalent linking group.
- DyeIII represents a triarylmethane structure.
- m represents 0 or 1;
- L 3 represents a single bond or a divalent linking group.
- the divalent linking group represented by L 3 include an alkylene group having 1 to 30 carbon atoms, an arylene group having 6 to 30 carbon atoms, a heterocyclic linking group, —CH ⁇ CH—, —O—, and —S—.
- R represents a hydrogen atom, an alkyl group, an aryl group, or a heterocyclic group each independently.
- m represents 0 or 1, but is preferably 1.
- the alkyl group and alkylene group preferably have 1 to 30 carbon atoms.
- the upper limit is more preferably 25 or less, and still more preferably 20 or less.
- the lower limit is more preferably 2 or more, and still more preferably 3 or more.
- the alkyl group and alkylene group may be linear, branched or cyclic.
- the number of carbon atoms in the aryl group and arylene group is preferably 6-20, and more preferably 6-12.
- the heterocyclic linking group and the heterocyclic group are preferably a 5-membered ring or a 6-membered ring.
- the hetero atom contained in the heterocyclic linking group and the heterocyclic group is preferably an oxygen atom, a nitrogen atom or a sulfur atom.
- the number of heteroatoms contained in the heterocyclic linking group and the heterocyclic group is preferably 1 to 3.
- the dye multimer having a repeating unit represented by the general formula (C) may contain other repeating units described above. Moreover, the repeating unit represented by general formula (A) mentioned above may further be included.
- the dye multimer having the repeating unit represented by the general formula (C) can be synthesized by sequential polymerization.
- Sequential polymerization means polyaddition (for example, reaction of diisocyanate compound and diol, reaction of diepoxy compound and dicarboxylic acid, reaction of tetracarboxylic dianhydride and diol, etc.) and polycondensation (for example, dicarboxylic acid).
- a diol, a reaction of a dicarboxylic acid and a diamine, and the like are particularly preferable because the reaction conditions can be moderated and the dye skeleton is not decomposed.
- Known reaction conditions can be applied to the sequential polymerization.
- the triarylmethane multimer is also preferably represented by the general formula (D).
- L 4 represents a (n + k) -valent linking group.
- n represents an integer of 2 to 20, and k represents an integer of 0 to 20.
- DyeIV represents a triarylmethane structure, and P represents a substituent. When n is 2 or more, the plurality of DyeIVs may be different from each other, and when k is 2 or more, the plurality of P may be different from each other.
- n + k represents an integer of 2 to 20.
- n is preferably 2 to 15, more preferably 2 to 14, still more preferably 2 to 8, particularly preferably 2 to 7, and still more preferably 2 to 6.
- the total of n and k is preferably 2 to 20, more preferably 2 to 15, more preferably 2 to 14, still more preferably 2 to 8, particularly preferably 2 to 7, and still more preferably 2 to 6.
- n and k in one multimer are integers, respectively, but in the present invention, a plurality of multimers having different n and k in the general formula (D) may be included. Therefore, the average value of n and k in the composition of the present invention may not be an integer.
- (N + k) -valent linking groups include 1 to 100 carbon atoms, 0 to 10 nitrogen atoms, 0 to 50 oxygen atoms, 1 to 200 hydrogen atoms, and Groups consisting of 0 to 20 sulfur atoms are included.
- Specific examples of the (n + k) -valent linking group include a group composed of a combination of two or more of the following structural units or the following structural units (which may form a ring structure). .
- (n + k) -valent linking groups are shown below. However, the present invention is not limited to these.
- a linking group described in paragraph Nos. 0071 to 0072 of JP-A-2008-222950 and a linking group described in paragraph No. 0176 of JP-A-2013-029760 are also included.
- P represents a substituent.
- the substituent include an acid group and a curable group.
- the curable group include a radical polymerizable group such as a group containing an ethylenically unsaturated bond, a cyclic ether group (epoxy group, oxetanyl group), an oxazoline group, and a methylol group.
- the group containing an ethylenically unsaturated bond include a vinyl group, a (meth) allyl group, and a (meth) acryloyl group.
- the acid group include a carboxyl group, a sulfonic acid group, and a phosphoric acid group.
- the substituent represented by P may be a monovalent polymer chain having a repeating unit.
- the monovalent polymer chain having a repeating unit is preferably a monovalent polymer chain having a repeating unit derived from a vinyl compound.
- the k Ps may be the same or different.
- P has 2 to 20 repeating units derived from a vinyl compound (preferably 2 to 15, more preferably 2 to 10).
- the average number of repeating units derived from k P vinyl compounds is 2 to 20 (preferably 2 to 15, more preferably 2 to 10).
- the number of repeating units of P when k is 1 and the average number of repeating units of P when k is 2 or more are expressed as It can be determined by resonance (NMR).
- examples of the repeating unit constituting P include the other repeating units described above. It is preferable that another repeating unit has 1 or more types chosen from the repeating unit which has the acid group mentioned above, and the repeating unit which has a sclerosing
- the repeating unit having an acid group is contained, the developability can be improved.
- a repeating unit having a curable group is included, color mixing with other colors and spectral fluctuation after development can be further suppressed.
- the proportion of the repeating unit containing an acid group is preferably 10 to 80 mol%, more preferably 10 to 65 mol%, based on all the repeating units of P.
- the ratio of the repeating unit having a curable group is preferably 10 to 80 mol%, more preferably 10 to 65 mol%, based on all the repeating units of P. .
- DyeIV represents a triarylmethane structure.
- the triarylmethane structure represented by DyeIV is a structure in which one or more arbitrary hydrogen atoms of the triarylmethane monomer are removed, and a part of the triarylmethane monomer is L 4 may be formed. Further, it may be a polymer chain containing a repeating unit having a triarylmethane structure in the main chain or side chain.
- the polymer chain is not particularly defined as long as it contains a triarylmethane structure, but is one kind selected from a (meth) acrylic resin, a styrene resin, and a (meth) acrylic / styrene resin.
- the repeating unit of the polymer chain is not particularly defined, and examples thereof include the repeating unit represented by the general formula (A) described above and the repeating unit represented by the general formula (C) described above.
- the total number of repeating units having a triarylmethane structure in all repeating units constituting the polymer chain is preferably 5 to 60 mol%, more preferably 10 to 50 mol%, and 20 to 40 mol%. Is more preferable.
- the polymer chain may contain other repeating units described above in addition to the repeating unit having a triarylmethane structure. As other repeating units, it is preferable to have one or more selected from repeating units having an acid group and repeating units having a curable group.
- the ratio of the repeating unit having a curable group is preferably, for example, 5 to 50 mol with respect to 100 mol of all repeating units of the polymer chain, and 10 to 40 mol. Is more preferable.
- the ratio of the repeating unit having an acid group is preferably, for example, 5 to 50 mol, more preferably 10 to 40 mol, relative to 100 mol of all repeating units of the polymer chain. preferable.
- the multimer represented by the general formula (D) can be synthesized by the following method.
- a compound in which a functional group selected from a carboxyl group, a hydroxyl group, an amino group, etc. is introduced at the end, an acid halide having a triarylmethane structure, an alkyl halide having a triarylmethane structure, or a triarylmethane structure A method of polymerizing the isocyanate and the like.
- (2) A method in which a compound in which a carbon-carbon double bond is introduced at a terminal and a thiol compound having a triarylmethane structure are subjected to a Michael addition reaction.
- the weight average molecular weight is preferably 1,000 to 100,000, and more preferably 5,000 to 50,000.
- a triarylmethane compound can be contained individually by 1 type or in combination of 2 or more types.
- Counter anion When the triarylmethane compound is in the form of a cation, it contains a counter anion.
- the counter anion is not particularly defined, and a known counter anion can be employed.
- the counter anion is determined according to the number of cations that the triarylmethane compound has.
- the counter anion may be in the same molecule as the triarylmethane compound or may be outside the same molecule.
- the counter anion is in the same molecule means a case where the cation and the counter anion are bonded via a covalent bond.
- the counter anion may consist of only the anion part paired with the cation part of the triarylmethane compound, or may have other sites in addition to the anion part.
- the counter anion may be a multimer (hereinafter also referred to as an anion multimer).
- the counteranion may also be contained in the triarylmethane compound multimer as a repeating unit having a counteranion.
- examples of the counter anion used in the present invention will be described.
- Examples of the case consisting only of a counter anion include fluorine anion, chlorine anion, bromine anion, iodine anion, cyanide ion, perchlorate anion, borate anion (BF 4 ⁇ etc.), PF 6 ⁇ and SbF 6 ⁇ and the like. .
- the borate anion is a group represented by B (R 10 ) 4 ⁇ , and R 10 is exemplified by a fluorine atom, a cyano group, a fluorinated alkyl group, an alkoxy group, an aryloxy group, and the like.
- the counter anion is also at least one selected from —SO 3 ⁇ , —COO ⁇ , —PO 4 ⁇ , a structure represented by the following general formula (A1), and a structure represented by the following general formula (A2). May be included.
- the general formula (A1) is more preferably represented by the following general formula (A1-1).
- Formula (A1-1) (In general formula (A1-1), R 1 and R 2 each independently represent —SO 2 — or —CO—, and X 1 and X 2 each independently represent an alkylene group or an arylene group. )
- R 1 and R 2 of the general formula (A1) in the same meaning as R 1 and R 2, and preferred ranges are also the same.
- X 1 represents an alkylene group
- the alkylene group preferably has 1 to 8 carbon atoms, and more preferably 1 to 6 carbon atoms.
- X 1 represents an arylene group
- the carbon number of the arylene group is preferably 6 to 18, more preferably 6 to 12, and still more preferably 6.
- X 1 has a substituent, it is preferably substituted with a fluorine atom.
- X 2 represents an alkylene group or an arylene group, and an alkylene group is preferable.
- the alkylene group preferably has 1 to 8 carbon atoms, more preferably 1 to 6, more preferably 1 to 3, and particularly preferably 1.
- X 2 has a substituent, it is preferably substituted with a fluorine atom.
- R 3 represents —SO 2 — or —CO—.
- R 4 and R 5 each independently represents —SO 2 —, —CO— or —CN).
- Preferably representing the at least two R 3 ⁇ R 5 is -SO 2 - - In formula (A2), at least one of R 3 ⁇ R 5 -SO 2 more preferably represents.
- the counter anion examples include R—SO 3 ⁇ , R—COO — or R—PO 4 — , wherein R is a halogen atom, an alkyl group which may be substituted with a halogen atom, or a halogen atom.
- R is a halogen atom, an alkyl group which may be substituted with a halogen atom, or a halogen atom.
- the aryl group that may be used are also exemplified.
- the general formula Specific examples of the counter anion include a group represented by (A1) is, R 1 is a halogen atom, an alkyl group which may be substituted by a halogen atom, an aryl group which may be substituted with a halogen atom The case where it couple
- bonds with is illustrated.
- R 4 and R 5 are each substituted with a halogen atom, an alkyl group which may be substituted with a halogen atom, or a halogen atom.
- a halogen atom an alkyl group which may be substituted with a halogen atom, or a halogen atom.
- R 4 and R 5 are each substituted with a halogen atom, an alkyl group which may be substituted with a halogen atom, or a halogen atom.
- R 4 and R 5 are each substituted with a halogen atom, an alkyl group which may be substituted with a halogen atom, or a halogen atom.
- aryl group that may be present is exemplified.
- other counter anions include the following, but the present invention is not limited thereto.
- the counter anion may contain a radical polymerizable group.
- the radical polymerizable group that the counter anion may contain include known polymerizable groups that can be crosslinked by radicals, acids, and heat. Specific examples include a (meth) acryl group, a styrene group, a vinyl group, a cyclic ether group, and a methylol group, and at least one selected from a (meth) acryl group, a styrene group, a vinyl group, and a cyclic ether group.
- one selected from a (meth) acryl group, a styrene group, and a vinyl group is more preferable, and a (meth) acryl group or a styrene group is more preferable.
- the number of radically polymerizable groups that the counter anion may contain is preferably 1 to 3, and more preferably 1.
- the structure represented by the general formula (A1) and the structure represented by the general formula (A2) may be directly bonded or may be bonded via a linking group, but are preferably bonded via a linking group.
- the counter anion containing a radical polymerizable group is preferably represented by the following general formula (b), for example.
- P represents a radical polymerizable group, and examples thereof include the radical polymerizable group described above.
- L represents a divalent linking group
- an alkylene group having 1 to 30 carbon atoms eg, methylene group, ethylene group, trimethylene group, propylene group, butylene group, etc.
- 6 to 30 arylene groups heterocyclic linking groups, —CH ⁇ CH—, —O—, —S—, —C ( ⁇ O) —, —CO—, —NR—, —CONR—, —OC—, —SO —, —SO 2 — and a linking group obtained by combining two or more thereof are preferred.
- R represents a hydrogen atom, an alkyl group, an aryl group, or a heterocyclic group each independently.
- the linking group includes an alkylene group having 1 to 10 carbon atoms (preferably — (CH 2 ) n — (n is an integer of 1 to 10)), an arylene group having 6 to 12 carbon atoms (preferably a phenylene group, A linking group in which two or more of (naphthylene group), —NH—, —CO—, —O— and —SO 2 — are combined is preferable.
- the molecular weight of the counter anion containing a radical polymerizable group is preferably 300 to 1,000, and more preferably 500 to 1,000.
- the counter anion when the counter anion is a multimer, the counter anion includes an oligomer, and is preferably a multimer including a repeating unit including an anion portion.
- the counter anion is a multimer
- the counter anion is a multimer including a repeating unit having a triarylmethane structure and a repeating unit having a counter anion and / or a triarylmethane compound
- the aspect which is a multimer containing the repeating unit which has an anion is mentioned.
- the triarylmethane compound in the case where the counter anion is a multimer corresponds to the triarylmethane multimer.
- the counter anion including a multimeric structure preferably has a structure represented by the following general formula (c) and / or the following general formula (d).
- X 1 represents a main chain of a repeating unit.
- L 1 represents a single bond or a divalent linking group.
- Anion represents —SO 3 ⁇ , —COO ⁇ , —PO 4 —.
- X 1 represents a main chain of repeating units, usually represents a linking group formed by polymerization reaction, for example, (meth) acrylic, styrene, vinyl and the like are preferable.
- Two sites represented by * are repeating units.
- L 1 represents a divalent linking group
- an alkylene group having 1 to 30 carbon atoms methylene group, ethylene group, trimethylene group, propylene group, butylene group, etc.
- an arylene group having 6 to 30 carbon atoms phenylene group, Naphthylene group, etc.
- heterocyclic linking group —CH ⁇ CH—, —O—, —S—, —C ( ⁇ O) —, —CO—, —NR—, —CONR—, —OC—, —SO —, —SO 2 — and a linking group obtained by combining two or more thereof are preferred.
- R represents a hydrogen atom, an alkyl group, an aryl group, or a heterocyclic group each independently.
- L 1 represents a single bond or an alkylene group having 1 to 10 carbon atoms (preferably — (CH 2 ) n — (n is an integer of 1 to 10)), an arylene group having 6 to 12 carbon atoms ( A divalent linking group in which two or more of phenylene group, naphthylene group), —NH—, —CO—, —O— and —SO 2 — are combined is preferable.
- X 1 and L 1 include (XX-1) to (XX-24) described above, but are not limited thereto.
- the anion multimer is linked to the above anion at the site indicated by * in (XX-1) to (XX-24).
- L 2 and L 3 each independently represent a single bond or a divalent linking group.
- Anion represents —SO 3 ⁇ , —COO ⁇ , —PO 4 ⁇ , (The structure represented by (A1) and the structure represented by the general formula (A2) are represented.)
- L 2 and L 3 represent a divalent linking group, an alkylene group having 1 to 30 carbon atoms, an arylene group having 6 to 30 carbon atoms, a heterocyclic linking group, —CH ⁇ CH— , —O—, —S—, —C ( ⁇ O) —, —CO—, —NR—, —CONR—, —O 2 C—, —SO—, —SO 2 — and combinations of two or more thereof
- R represents a hydrogen atom, an alkyl group, an aryl group, or a heterocyclic group each independently.
- L 2 is preferably an arylene group having 6 to 12 carbon atoms (particularly a phenylene group).
- the arylene group having 6 to 30 carbon atoms is preferably substituted with a fluorine atom.
- L 3 is preferably a group comprising a combination of an arylene group having 6 to 12 carbon atoms (particularly a phenylene group) and —O—, and at least one kind of arylene group having 6 to 12 carbon atoms is substituted with a fluorine atom. It is preferable.
- the molecular weight of the anionic multimer is preferably a weight average molecular weight of 3,000 to 30,000 and a molecular weight distribution of Mw / Mn of 0.8 to 3.0, more preferably a weight average molecular weight of 5,
- the molecular weight distribution is 1 to 2.5 in terms of Mw / Mn.
- a chain transfer agent When forming an anionic multimer, a chain transfer agent may be added.
- the chain transfer agent is preferably an alkyl mercaptan, more preferably an alkyl mercaptan having 10 or less carbon atoms or an alkyl mercaptan substituted with an ether group / ester group.
- an alkyl mercaptan having a log P value of 5 or less is more preferable.
- the amount of the anionic monomer compound having a radical polymerizable group that is a raw material of the anionic multimer contained in the anionic multimer is preferably 5% or less, more preferably 1% or less.
- the halogen ion content contained in the anionic multimer is preferably 10 to 3000 ppm, more preferably 10 to 2000 ppm, and even more preferably 10 to 1000 ppm. Specific examples of the anion multimer are shown below, but the present invention is not limited thereto.
- the counter anion when the counter anion is a multimer, it may contain other repeating units in addition to the repeating unit having a counter anion.
- the other repeating units include other repeating units that may be included in the case where the triarylmethane compound is a multimer, and the preferred range is also synonymous.
- a dye having a maximum absorption wavelength in the range of 650 to 750 nm (hereinafter also referred to as dye (B)) has a maximum absorption wavelength in the range of 650 to 750 nm.
- the dye (B) preferably does not have a maximum absorption wavelength in the wavelength range of 450 to 500 nm.
- the structure of the dye (B) can be any known one without particular limitation, but phthalocyanine compounds, cyanine compounds, squarylium compounds, naphthoquinone compounds and azo compounds are preferred, and phthalocyanine compounds, cyanine compounds, squarylium compounds and azo compounds are more preferred.
- phthalocyanine compounds More preferred are phthalocyanine compounds, cyanine compounds and squarylium compounds, particularly preferred are phthalocyanine compounds and squarylium compounds, and more preferred are phthalocyanine dyes.
- an ionic compound phthalocyanine compound or the like
- pattern defects due to poor development or poor curing can be further suppressed. The reason for this is presumed, but it is presumed that the interaction between the ionic triarylmethane compound and the ionic compound can further suppress aggregation in the same molecule and suppress pattern defects.
- the weight ratio of the dye (B) to the triarylmethane compound is 0.2 to 1.5. It is more preferably 3 to 1.4, further preferably 0.4 to 1.2, and particularly preferably 0.5 to 0.8.
- dye (B) When 2 or more types of pigment
- the difference in maximum absorption wavelength between the triarylmethane compound and the compound having a maximum absorption wavelength of 650 to 750 nm is preferably 50 to 200 nm, more preferably 70 to 180 nm, and even more preferably 100 to 150 nm.
- ⁇ phthalocyanine compound a compound represented by the following general formula (PC) is preferable.
- PC general formula (PC)
- M represents a metal.
- R 1 to R 16 represent a hydrogen atom, a halogen atom, an alkoxy group, an arylalkoxy group, a heterocyclic alkoxy group, an amino group, an alkylthio group, an arylthio group, and a heterocyclic thio group.
- at least one of R 1 to R 16 is an alkylalkoxy group, an arylalkoxy group, a heterocyclic alkoxy group, an amino group, an alkylthio group, an arylthio group, and a heterocyclic thio group.
- metals represented by M include Zn, Mg, Si, Sn, Rh, Pt, Pd, Mo, Mn, Pb, Cu, Ni, Co, and Fe metal atoms, AlCl, InCl, and FeCl. , TiCl 2 , SnCl 2 , SiCl 2 , GeCl 2 and other metal chlorides, TiO and VO and other metal oxides, and Si (OH) 2 and other metal hydroxides, particularly Cu, VO and Zn Is preferable, and Cu is more preferable.
- R 1 to R 16 represent a halogen atom
- the halogen atom is preferably a chlorine atom or a fluorine atom.
- R 1 to R 16 represent an alkoxy group
- the alkoxy group preferably has 1 to 18 carbon atoms, more preferably 1 to 15 carbon atoms, and still more preferably 1 to 12 carbon atoms.
- the alkyl chain portion of the alkoxy group is preferably a straight chain or branched chain.
- the alkoxy group may have a substituent, and the substituent is preferably an ethylenically unsaturated bond group, and more preferably a vinyl group.
- R 1 to R 16 represent an arylalkoxy group
- the arylalkoxy group preferably has 7 to 18 carbon atoms, and more preferably 7 to 12 carbon atoms.
- R 1 to R 16 represent a heterocyclic alkoxy group
- the heterocyclic ring may be monocyclic or polycyclic, and may be aromatic or non-aromatic.
- the number of heteroatoms constituting the heterocycle is preferably 1 to 3.
- the hetero atom is preferably a nitrogen atom.
- R 1 to R 16 represent an alkylthio group
- the alkylthio group preferably has 1 to 18 carbon atoms, more preferably 1 to 15 carbon atoms, and still more preferably 1 to 12 carbon atoms.
- R 1 to R 16 represent an arylthio group
- the arylthio group preferably has 6 to 18 carbon atoms, and more preferably 6 to 12 carbon atoms.
- R 1 to R 16 represent a heterocyclic thio group
- the heterocyclic ring has the same meaning as the heterocyclic ring described above for the heterocyclic alkoxy group.
- R 1 to R 16 are one or two of R 1 to R 4 , one or two of R 5 to R 8 , one or two of R 9 to R 12 , and one of R 13 to R 16 .
- One or two are each independently an alkoxy group, an arylalkoxy group, a heterocyclic alkoxy group, an amino group, an alkylthio group, an arylthio group and a heterocyclic thio group, and the rest are preferably a hydrogen atom or a halogen atom.
- R 4 , R 8 , R 12 and R 16 are an alkoxy group, an arylalkoxy group, a heterocyclic alkoxy group, an amino group, an alkylthio group, an arylthio group or a heterocyclic thio group, and the remainder is a hydrogen atom or a halogen atom Is preferred.
- R 4 , R 8 , R 12 and R 16 are alkoxy groups, and the rest are hydrogen atoms.
- R 3 , R 7 , R 11 and R 15 are an alkoxy group, an arylalkoxy group, a heterocyclic alkoxy group, an amino group, an alkylthio group, an arylthio group or a heterocyclic thio group, and the rest are hydrogen atoms or halogen atoms. It is also preferable that there is.
- R 1 , R 4 , R 5 , R 8 , R 9 , R 12 , R 13 and R 16 are an alkoxy group, an arylalkoxy group, a heterocyclic alkoxy group, an amino group, an alkylthio group, an arylthio group or a heterocyclic thio group.
- the group is a hydrogen atom or a halogen atom.
- R 1 , R 5 , R 9 , and R 13 are an alkoxy group, an arylalkoxy group, a heterocyclic alkoxy group, an amino group, an alkylthio group, an arylthio group, or a heterocyclic thio group, and the remainder is a hydrogen atom or a halogen atom It is also preferable.
- R 2 , R 6 , R 10 , and R 14 are an alkoxy group, an arylalkoxy group, a heterocyclic alkoxy group, an amino group, an alkylthio group, an arylthio group, or a heterocyclic thio group, and the remainder is a hydrogen atom or a halogen atom It is also preferable.
- ring Z1 and ring Z2 each independently represent a heterocyclic ring which may have a substituent.
- l represents an integer of 0 or more and 3 or less.
- X ⁇ represents a counter anion.
- Each of the ring Z1 and the ring Z2 is preferably a nitrogen-containing heterocyclic ring having a substituent, more preferably a nitrogen-containing condensed complex ring having a substituent, and more preferably an indole ring having a substituent.
- Examples of the ring Z1 and the ring Z2 include oxazole, benzoxazole, oxazoline, thiazole, thiazoline, benzothiazole, indolenine, benzoindolenine, 1,3-thiadiazine, and benzoindolenine is preferable.
- the substituents that the ring Z1 and the ring Z2 may have are the same as the substituents exemplified in the substituent group A, and are preferably an alkyl group having 1 to 6 carbon atoms or an alkenyl group having 2 to 6 carbon atoms. An alkyl group having 1 to 3 carbon atoms or an alkenyl group having 2 to 4 carbon atoms is more preferable. l represents an integer of 0 or more and 3 or less, preferably 1 or 2, and more preferably 1.
- X ⁇ is the counter anion mentioned in the above triarylmethane compound, and the preferred range is also the same. X ⁇ may be linked to the dye skeleton of the cyanine compound, or may be linked to a part of the dye multimer (polymer chain or the like).
- the general formula (PM) is preferably represented by the following general formula (PM-2).
- General formula (PM-2) is preferably represented by the following general formula (PM-2).
- each of the ring Z 5 and the ring Z 6 independently represents a benzene ring which may have a substituent or a naphthalene ring which may have a substituent, and an unsubstituted benzene ring is more preferable.
- Y ⁇ represents a counter anion. The counter anion is preferably selected from the anions described above.
- n represents an integer of 0 or more and 3 or less, and the preferred range is the same as l in the general formula (PM-1).
- a 1 and A 2 each independently represent an oxygen atom, a sulfur atom, a selenium atom, a carbon atom or a nitrogen atom.
- R 1 and R 2 each independently represents a monovalent aliphatic hydrocarbon group having 1 to 20 carbon atoms which may have a substituent, and an alkyl group having 1 to 6 carbon atoms or 2 to 2 carbon atoms An alkenyl group having 6 carbon atoms is preferable, and an alkyl group having 1 to 3 carbon atoms or an alkenyl group having 2 to 4 carbon atoms is more preferable.
- R 3 and R 4 each independently represent a monovalent aliphatic hydrocarbon group having 1 to 6 carbon atoms, or a divalent group formed by combining one R 3 and one R 4 together.
- the aliphatic hydrocarbon group having 1 to 6 carbon atoms is preferably an alkyl group having 1 to 6 carbon atoms, more preferably an alkyl group having 1 to 3 carbon atoms, and more preferably a methyl group or an ethyl group.
- a and b each independently represent an integer of 0 or more and 2 or less. 1 or 2 is preferable and 2 is more preferable.
- a and B each independently represent an aryl group or a heterocyclic group.
- the aryl group is preferably an aryl group having 6 to 48 carbon atoms, more preferably 6 to 24 carbon atoms, and examples thereof include phenyl and naphthyl.
- the heterocyclic group is preferably a 5-membered or 6-membered heterocyclic group, and examples thereof include pyroyl, imidazoyl, pyrazoyl, thienyl, pyridyl, pyrimidyl, pyridazyl, triazol-1-yl, thienyl, furyl, thiadiazoyl and the like. .
- a and B are preferably aryl groups having a substituent, and more preferably phenyl groups having a substituent.
- the substituent is preferably a hydroxyl group and —NR 1 R 2 .
- R 1 and R 2 in -NR 1 R 2 is preferably an aryl group having 6 to 12 carbon atoms, a phenyl group is more preferable.
- Ra to Rh are each independently a hydrogen atom, a halogen atom (fluorine atom, chlorine atom, bromine atom, iodine atom), alkyl group, alkenyl group, aryl group, heterocyclic group, acyl group, An alkoxy group, an alkylthio group, an arylthio group, an alkoxycarbonyl group, an aryloxycarbonyl group, a carbamoyl group, an alkylsulfonyl group, an arylsulfonyl group, and an amino group are represented.
- Ra and Rb, Re and Rf, Rd and Re, and Rf and Rg may be connected to each other to form a ring.
- Ra and Rb are particularly preferably a hydrogen atom, a halogen atom, an alkyl group, an alkenyl group, an aryl group and an alkoxy group, and more preferably a hydrogen atom, a halogen atom and an alkenyl group.
- Rf and Re are preferably a hydrogen atom, a halogen atom, an alkyl group, an alkenyl group, an aryl group, an alkoxy group, an arylthio group and a carbamoyl group, and more preferably a hydrogen atom, a halogen atom, an arylthio group and a carbamoyl group.
- Rc, Rd, Rg and Rh are preferably a hydrogen atom, an alkyl group and an aryl group
- Rc and Rh are a hydrogen atom
- Rd and Rg are preferably a hydrogen atom, an alkyl group and an aryl group.
- azo compound is not particularly defined, but examples thereof include compounds represented by the following general formula (Az).
- general formula (Az) is not particularly defined, but examples thereof include compounds represented by the following general formula (Az).
- R 1 to R 4 are each independently a hydrogen atom, a halogen atom, an alkyl group, an alkenyl group, an alkynyl group, an aryl group, a heterocyclic group, an acyl group, an alkoxycarbonyl group, an aryloxycarbonyl Represents a group, a carbamoyl group, an alkylsulfonyl group, or an arylsulfonyl group, and A represents an aryl group or a heterocyclic group, particularly an aryl group having an amino group, and a phenyl group and a naphthyl group having an amino group Is more preferable.
- the dye having a maximum absorption wavelength in the range of 650 to 750 nm preferably has an ethylenically unsaturated bond group.
- curability increases, and durability (light resistance, heat resistance, solvent resistance, developer resistance, etc.) can be further improved.
- an ethylenically unsaturated bond group it is synonymous with the ethylenically unsaturated bond group in the above-mentioned triarylmethane compound, and its preferable range is also the same.
- the dye (B) is also preferably a multimer.
- the weight average molecular weight is preferably 2,000 to 20,000, more preferably 6,000 to 15,000.
- the ratio [(Mw) / (Mn)] of the weight average molecular weight (Mw) and the number average molecular weight (Mn) of the dye (B) is preferably 1.0 to 3.0, and 1.6 Is more preferably from 2.5 to 2.5, particularly preferably from 1.6 to 2.0.
- the glass transition temperature (Tg) of the dye (B) is preferably 50 ° C. or higher, and more preferably 100 ° C. or higher. Further, the 5% weight loss temperature by thermogravimetric analysis (TGA measurement) is preferably 120 ° C. or higher, more preferably 150 ° C. or higher, and further preferably 200 ° C. or higher. By being in this region, when applying the composition of the present invention to the production of a color filter or the like, it becomes possible to reduce the concentration change caused by the heating process.
- the dye (B) is a multimer
- a general formula (D-) is exemplified, and the structure represented by the general formula (D-1) is more preferable.
- X 1 represents a group forming a main chain. That is, it refers to a portion that forms a repeating unit corresponding to the main chain formed by the polymerization reaction.
- X 1 is synonymous with X 1 in the general formula (A) of the triarylmethane compound described above, and is preferably a linking group represented by the above (XX-1) to (XX-24), (XX— 1) and a (meth) acrylic linking chain represented by (XX-2), a styrenic linking chain represented by (XX-10) to (XX-17), and (XX-24) More preferably selected from vinyl-based linking chains, (meth) acrylic linking chains represented by (XX-1) and (XX-2) and styrene-based linking chains represented by (XX-11) More preferred.
- L 1 represents a single bond or a divalent linking group.
- the divalent linking group includes a substituted or unsubstituted alkylene group having 1 to 30 carbon atoms (eg, methylene group, ethylene group, trimethylene group, propylene group, butylene).
- L 1 is more preferably a single bond or an alkylene group, and more preferably a single bond or — (CH 2 ) n — (n is an integer of 1 to 5).
- R represents a hydrogen atom, an alkyl group, an aryl group, or a heterocyclic group each independently.
- the divalent linking group represented by L 1 may be a group capable of ionic bonding or coordination bonding with DyeI.
- an anionic group or a cationic group may be used.
- the anionic group include —COO ⁇ , —PO 3 H ⁇ , —SO 3 ⁇ , —SO 3 NH ⁇ , —SO 3 N — CO—, and the like.
- —COO ⁇ , —PO 3 H ⁇ , — SO 3 - is preferred.
- Examples of the cationic group include substituted or unsubstituted onium cations (for example, ammonium, pyridinium, imidazolium, phosphonium and the like), and ammonium cations are particularly preferable.
- L 1 has a group capable of ionic bonding or coordination bonding with DyeI
- L 1 can be an anion moiety (—COO ⁇ , —SO 3 ⁇ , —O ⁇ , etc.) or a cation moiety (such as the above) that DyeI has An onium cation, a metal cation, etc.).
- DyeI represents the dye structure of the dye (B) described above.
- the dye multimer having the repeating unit represented by the general formula (A-1) is, for example, (1) a method of synthesizing a monomer having a dye structure by addition polymerization, (2) an isocyanate group, an acid anhydride group or an epoxy. Synthesized by a method in which a polymer having a highly reactive functional group such as a group is reacted with a dye having a functional group (hydroxyl group, primary or secondary amino group, carboxyl group, etc.) capable of reacting with the highly reactive functional group it can.
- Known addition polymerizations can be applied to the addition polymerization, but among these, synthesis by radical polymerization is particularly preferable because the reaction conditions can be moderated and the dye structure is not decomposed.
- Known reaction conditions can be applied to the radical polymerization.
- the dye multimer having the repeating unit represented by formula (A-1) is obtained by radical polymerization using a dye monomer having an ethylenically unsaturated bond group from the viewpoint of heat resistance.
- a radical polymer is preferred.
- L 3 represents a single bond or a divalent linking group.
- the divalent linking group represented by L 3 include a substituted or unsubstituted linear, branched or cyclic alkylene group having 1 to 30 carbon atoms (eg, methylene group, ethylene group, trimethylene group, propylene group, butylene group).
- a substituted or unsubstituted arylene group having 6 to 30 carbon atoms for example, a phenylene group, a naphthylene group, etc.
- a substituted or unsubstituted heterocyclic linking group —CH ⁇ CH—, —O—, —S—.
- —NR— (R each independently represents a hydrogen atom, an alkyl group, an aryl group, or a heterocyclic group), —C ( ⁇ O) —, —SO—, —SO 2 —, and these Preferable examples include a linking group formed by linking two or more.
- m represents 0 or 1, but is preferably 1.
- a dye multimer having a repeating unit represented by the general formula (C-1) is synthesized by sequential polymerization.
- Sequential polymerization means polyaddition (for example, reaction of diisocyanate compound and diol, reaction of diepoxy compound and dicarboxylic acid, reaction of tetracarboxylic dianhydride and diol, etc.) and polycondensation (for example, dicarboxylic acid).
- a diol, a reaction of a dicarboxylic acid and a diamine, and the like are particularly preferable because the reaction conditions can be moderated and the dye structure is not decomposed. Known reaction conditions can be applied to the sequential polymerization.
- the dye (B) is a multimer containing the general formula (A-1) or the general formula (C-1), it may further contain another repeating unit.
- the other repeating unit include a repeating unit containing an alkali-soluble group such as an acid group, a repeating unit containing a polymerizable group, and the like, and preferably includes at least a repeating unit containing an alkali-soluble group such as an acid group.
- Each of these repeating units may contain only one type or two or more types.
- the details of these repeating units are synonymous with those described in the above triarylmethane multimer, and the preferred ranges are also the same.
- the ratio of the repeating units containing all alkali-soluble groups, including acid groups or other alkali-soluble groups is preferably, for example, 1 to 80 mol%, preferably 10 to 65 mol%, based on all repeating units. Is more preferable.
- the amount of the alkali-soluble group containing an acid group contained in the dye (B) is preferably from 0.3 mmol to 2.0 mmol, more preferably from 0.4 mmol to 1.5 mmol, based on 1 g of the dye. Particularly preferred is 0.5 mmol to 1.0 mmol.
- the amount of the polymerizable group that the dye (B) has is preferably 0.1 to 2.0 mmol, more preferably 0.2 to 1.5 mmol, and more preferably 0.3 to Particularly preferred is 1.0 mmol.
- the ratio of the repeating unit containing the repeating unit having a polymerizable group in the dye (B) is, for example, preferably 5 to 50 mol, more preferably 10 to 20 mol with respect to 100 mol of all repeating units.
- Formula (D-1) (In General Formula (D-1), L 4 represents an (n + m) -valent linking group, n represents an integer of 2 to 20, m represents an integer of 0 to 20, and DyeIV represents a dye structure. W is an acid group or a group having an acid group.)
- n is preferably 2 to 15, more preferably 3 to 15, and particularly preferably 3 to 6.
- each DyeIV may be the same or different.
- W is an acid group or a group having an acid group.
- W may be one type or two or more types.
- the divalent linking group represented by L 4 is a substituted or unsubstituted alkylene group having 1 to 30 carbon atoms (eg, methylene group, ethylene group) , Trimethylene group, propylene group, butylene group, etc.), substituted or unsubstituted arylene groups having 6 to 30 carbon atoms (eg, phenylene group, naphthylene group, etc.), substituted or unsubstituted heterocyclic linking groups, —CH ⁇ CH —, —O—, —S—, —NR— (R each independently represents a hydrogen atom, an alkyl group, an aryl group, or a heterocyclic group), —C ( ⁇ O) —, —SO—. , —SO 2 —, and a linking group formed by linking two or more of these are preferable.
- the (n + m) -valent linking group in which (n + m) is 3 or more is a substituted or unsubstituted arylene group (1,3,5-phenylene group, 1,2,4-phenylene group, 1,4,5,8-
- a group consisting of a combination of an unsubstituted alkylene group having 1 to 6 carbon atoms, —O—, —C ( ⁇ O) —, and —S— is preferable.
- Specific examples of the (n + m) -valent linking group represented by L 4 are shown below, but are not limited thereto.
- a polymer compound represented by the general formula (1) described in claim 1 of JP-A-2007-277514, wherein A 1 is a dye having a maximum absorption wavelength in the range of 650 to 750 nm Can also be used preferably, the contents of which are incorporated herein. More specifically, the polymer compound represented by the general formula (1) according to claim 1 of JP 2007-277514 A, wherein A 1 is a phthalocyanine compound, a cyanine compound, a squarylium compound, and an azo compound It is preferably a group in which one hydrogen atom of a compound selected from is removed.
- the composition of the present invention contains a curable compound.
- the curable compound include a polymerizable compound, a thermosetting compound, and an alkali-soluble resin.
- the total amount of these curable compounds is preferably 1 to 80% by mass, more preferably 2 to 30% by mass, based on the solid content of the composition of the present invention.
- the composition of the present invention preferably contains a polymerizable compound.
- a polymerizable compound a known polymerizable compound that can be cross-linked by a radical, an acid, or heat can be used.
- the polymerizable compound is preferably selected from compounds having at least one terminal ethylenically unsaturated bond group, preferably two or more, from the viewpoint of sensitivity. Among them, a polyfunctional polymerizable compound having 4 or more functional groups is preferable, and a polyfunctional polymerizable compound having 5 or more functional groups is more preferable.
- the polymerizable compound is preferably a radical polymerizable compound.
- Such a group of compounds is widely known in this industrial field, and in the present invention, these can be used without any particular limitation. These may be in any chemical form such as, for example, monomers, prepolymers, ie dimers, trimers and oligomers or mixtures thereof and multimers thereof.
- the polymeric compound in this invention may be used individually by 1 type, and may use 2 or more types together.
- the polymerizable compound is preferably a monomer.
- the molecular weight of the polymerizable compound is preferably 100 to 3000, more preferably 200 to 2000.
- examples of monomers and prepolymers thereof include unsaturated carboxylic acids (for example, acrylic acid, methacrylic acid, itaconic acid, crotonic acid, isocrotonic acid, maleic acid, etc.), esters thereof, amides, And multimers thereof, preferably esters of unsaturated carboxylic acids and aliphatic polyhydric alcohol compounds, amides of unsaturated carboxylic acids and aliphatic polyhydric amine compounds, and multimers thereof. is there.
- unsaturated carboxylic acids for example, acrylic acid, methacrylic acid, itaconic acid, crotonic acid, isocrotonic acid, maleic acid, etc.
- esters thereof for example, acrylic acid, methacrylic acid, itaconic acid, crotonic acid, isocrotonic acid, maleic acid, etc.
- esters thereof for example, acrylic acid, methacrylic acid, itaconic acid, crotonic acid, isocrotonic acid, maleic acid, etc.
- a dehydration condensation reaction product with a functional carboxylic acid is also preferably used.
- an addition reaction product of an unsaturated carboxylic acid ester or amide having an electrophilic substituent such as an isocyanate group or an epoxy group with a monofunctional or polyfunctional alcohol, amine, or thiol, and a halogen group A substitution reaction product of an unsaturated carboxylic acid ester or amide having a detachable substituent such as a tosyloxy group and a monofunctional or polyfunctional alcohol, amine or thiol is also suitable.
- compounds described in paragraphs [0095] to [0108] of JP-A-2009-288705 can be preferably used in the present invention.
- a compound having an ethylenically unsaturated group having a boiling point of 100 ° C. or higher under normal pressure and having at least one addition-polymerizable ethylene group is also preferable.
- examples include monofunctional acrylates and methacrylates such as polyethylene glycol mono (meth) acrylate, polypropylene glycol mono (meth) acrylate, and phenoxyethyl (meth) acrylate; polyethylene glycol di (meth) acrylate, trimethylolethanetri ( (Meth) acrylate, neopentyl glycol di (meth) acrylate, pentaerythritol tri (meth) acrylate, pentaerythritol tetra (meth) acrylate, dipentaerythritol penta (meth) acrylate, dipentaerythritol hexa (meth) acrylate, hexanedio
- polyfunctional acrylates and methacrylates such as epoxy acrylates which are reaction products of epoxy resin and (meth) acrylic acid, and mixtures thereof.
- a polyfunctional (meth) acrylate obtained by reacting a polyfunctional carboxylic acid with a compound having a cyclic ether group such as glycidyl (meth) acrylate and an ethylenically unsaturated group can also be used.
- fluorene rings described in JP 2010-160418 A, JP 2010-129825 A, JP 4364216 A, etc., and ethylenically unsaturated groups. It is also possible to use a compound having two or more functions, a cardo resin.
- radically polymerizable monomers represented by the following general formulas (MO-1) to (MO-5) can also be suitably used.
- T is an oxyalkylene group
- the terminal on the carbon atom side is bonded to R.
- n is 0 to 14, and m is 1 to 8.
- a plurality of R and T present in one molecule may be the same or different.
- at least one of a plurality of R is —OC ( ⁇ O) CH ⁇ CH 2 or —OC A group represented by ( ⁇ O) C (CH 3 ) ⁇ CH 2 is represented.
- Specific examples of the polymerizable compounds represented by the above general formulas (MO-1) to (MO-5) include the compounds described in paragraph numbers 0248 to 0251 of JP-A-2007-2699779. It can be suitably used in the invention.
- dipentaerythritol triacrylate (as a commercially available product, KAYARAD D-330; manufactured by Nippon Kayaku), dipentaerythritol tetraacrylate (as a commercially available product, KAYARAD D-320; manufactured by Nippon Kayaku), Dipentaerythritol penta (meth) acrylate (as a commercial product, KAYARAD D-310; manufactured by Nippon Kayaku), dipentaerythritol hexa (meth) acrylate (as a commercially available product, KAYARAD DPHA; manufactured by Nippon Kayaku), ethyleneoxy modified di Pentaerythritol hexaacrylate (commercially available product is A-DPH-12E; manufactured by Shin-Nakamura Chemical Co., Ltd.) and a structure in which these (meth) acryloyl groups are via ethylene glycol and propylene
- the polymerizable compound is a polyfunctional monomer and may have an acid group such as a carboxyl group, a sulfonic acid group, or a phosphoric acid group. If the ethylenic compound has an unreacted carboxyl group as in the case of a mixture as described above, this can be used as it is. Non-aromatic carboxylic acid anhydrides may be reacted to introduce acid groups.
- non-aromatic carboxylic acid anhydride examples include tetrahydrophthalic anhydride, alkylated tetrahydrophthalic anhydride, hexahydrophthalic anhydride, alkylated hexahydrophthalic anhydride, succinic anhydride, anhydrous Maleic acid is mentioned.
- the monomer having an acid group is an ester of an aliphatic polyhydroxy compound and an unsaturated carboxylic acid, and a non-aromatic carboxylic acid anhydride is reacted with an unreacted hydroxyl group of the aliphatic polyhydroxy compound.
- a polyfunctional monomer having an acid group is preferable, and in this ester, the aliphatic polyhydroxy compound is pentaerythritol and / or dipentaerythritol.
- Examples of commercially available products include M-510 and M-520 as polybasic acid-modified acrylic oligomers manufactured by Toagosei.
- a preferable acid value of the polyfunctional monomer having an acid group is 0.1 mgKOH / g to 40 mgKOH / g, and particularly preferably 5 mgKOH / g to 30 mgKOH / g.
- the acid value of the polyfunctional monomer is too low, the developing dissolution properties will be lowered, and if it is too high, the production and handling will be difficult, the photopolymerization performance will be lowered, and the curability such as the surface smoothness of the pixels will be inferior. Therefore, when two or more polyfunctional monomers having different acid groups are used in combination, or when a polyfunctional monomer having no acid group is used in combination, the acid value of the entire polyfunctional monomer should be adjusted so that it falls within the above range. Is preferred.
- polyfunctional monomer which has a linear ester structure derived from caprolactone as a polymeric compound.
- the polyfunctional monomer having a linear ester structure derived from caprolactone is not particularly limited as long as it has a linear ester structure derived from caprolactone in its molecule.
- trimethylolethane Ditrimethylolethane, trimethylolpropane, ditrimethylolpropane, pentaerythritol, dipentaerythritol, tripentaerythritol, glycerin, diglycerol, trimethylolmelamine and other esters, (meth) acrylic acid and ⁇ -caprolactone
- ⁇ -caprolactone-modified polyfunctional (meth) acrylate obtained by converting to glycan can be mentioned.
- polyfunctional monomers having a linear ester structure derived from caprolactone represented by the following general formula (Z-1) are preferred.
- R 1 represents a hydrogen atom or a methyl group
- m represents a number of 1 or 2
- “*” represents a bond
- R 1 represents a hydrogen atom or a methyl group
- “*” represents a bond
- the polyfunctional monomer having a linear ester structure derived from caprolactone can be used alone or in admix
- the specific monomer in the present invention is preferably at least one selected from the group of compounds represented by the following general formula (Z-4) or (Z-5).
- each E is independently — ((CH 2 ) yCH 2 O) — or — ((CH 2 ) yCH (CH 3 ) O) —.
- Each represents independently an integer of 0 to 10
- each X independently represents an acryloyl group, a methacryloyl group, a hydrogen atom, or a carboxyl group.
- the total number of acryloyl groups and methacryloyl groups is 3 or 4
- each m independently represents an integer of 0 to 10
- the total of each m is an integer of 0 to 40. is there. However, when the total of each m is 0, any one of X is a carboxyl group.
- the total number of acryloyl groups and methacryloyl groups is 5 or 6, each n independently represents an integer of 0 to 10, and the total of each n is an integer of 0 to 60 is there. However, when the total of each n is 0, any one of X is a carboxyl group.
- m is preferably an integer of 0 to 6, and more preferably an integer of 0 to 4.
- the total of each m is preferably an integer of 2 to 40, more preferably an integer of 2 to 16, and particularly preferably an integer of 4 to 8.
- n is preferably an integer of 0 to 6, and more preferably an integer of 0 to 4.
- the total of each n is preferably an integer of 3 to 60, more preferably an integer of 3 to 24, and particularly preferably an integer of 6 to 12.
- — ((CH 2 ) yCH 2 O) — or — ((CH 2 ) yCH (CH 3 ) O) — represents an oxygen atom side.
- a form in which the terminal of X is bonded to X is preferred.
- the compounds represented by the general formula (Z-4) or the general formula (Z-5) may be used alone or in combination of two or more.
- a form in which all six Xs are acryloyl groups is preferable.
- the total content of the compound represented by the general formula (Z-4) or the general formula (Z-5) in the polymerizable compound is preferably 20% by mass or more, and more preferably 50% by mass or more.
- the compound represented by the general formula (Z-4) or the general formula (Z-5) is a conventionally known process, in which ethylene oxide or propylene oxide is ring-opened to pentaerythritol or dipentaerythritol. It can be synthesized from a step of bonding a ring-opening skeleton by an addition reaction and a step of introducing a (meth) acryloyl group by reacting, for example, (meth) acryloyl chloride with a terminal hydroxyl group of the ring-opening skeleton. Each step is a well-known step, and a person skilled in the art can easily synthesize a compound represented by the general formula (Z-4) or (Z-5).
- pentaerythritol derivatives and / or dipentaerythritol derivatives are more preferable.
- Specific examples include compounds represented by the following formulas (a) to (f) (hereinafter also referred to as “exemplary compounds (a) to (f)”).
- exemplary compounds (a), (f) b), (e) and (f) are preferred.
- Examples of commercially available polymerizable compounds represented by the general formula (Z-4) or (Z-5) include SR-494, a tetrafunctional acrylate having four ethyleneoxy chains manufactured by Sartomer, manufactured by Nippon Kayaku Co., Ltd. DPCA-60, which is a hexafunctional acrylate having six pentyleneoxy chains, and TPA-330, which is a trifunctional acrylate having three isobutyleneoxy chains.
- polymerizable compound examples include urethane acrylates as described in JP-B-48-41708, JP-A-51-37193, JP-B-2-32293, and JP-B-2-16765. Also suitable are urethane compounds having an ethylene oxide skeleton as described in JP-B-58-49860, JP-B-56-17654, JP-B-62-39417, and JP-B-62-39418. Furthermore, addition polymerizable compounds having an amino structure or a sulfide structure in the molecule described in JP-A-63-277653, JP-A-63-260909, and JP-A-1-105238 are described as polymerizable compounds.
- polymerizable compounds include urethane oligomers UAS-10, UAB-140 (manufactured by Sanyo Kokusaku Pulp), UA-7200 (manufactured by Shin-Nakamura Chemical), DPHA-40H (manufactured by Nippon Kayaku), UA-306H, UA -306T, UA-306I, AH-600, T-600, AI-600 (manufactured by Kyoei) and the like.
- cyclic ether examples include those having an epoxy group such as bisphenol A type epoxy resin, JER-827, JER-828, JER-834, JER-1001, JER-1002, JER-1003.
- JER-1055, JER-1007, JER-1009, JER-1010 (above, made by Japan Epoxy Resin), EPICLON860, EPICLON1050, EPICLON1051, EPICLON1055 (above, made by DIC), etc., and bisphenol F type epoxy resin as JER -806, JER-807, JER-4004, JER-4005, JER-4007, JER-4010 (above, made by Japan Epoxy Resin), EPICLON 830, EPICLON 35 (above, manufactured by DIC), LCE-21, RE-602S (above, manufactured by Nippon Kayaku Co., Ltd.), etc., and phenol novolac type epoxy resins such as JER-152, JER-154, JER-157S70, JER-157S65 ( These are Japan Epoxy Resin), EPICLON® N-740, EPICLON® N-770, EPICLON® N-775 (above, manufactured by DIC), and the like, and cresol
- the details of usage methods can be arbitrarily set according to the final performance design of a composition.
- a structure having a high unsaturated group content per molecule is preferable, and in many cases, a bifunctional or higher functionality is preferable.
- those having three or more functional groups are preferable, and further, different numbers of functional groups / different polymerizable groups (for example, acrylates, methacrylates, styrene compounds, vinyl ethers). It is also effective to adjust both sensitivity and strength by using a compound of the type).
- a trifunctional or higher functional polymerizable compound having a different ethylene oxide chain length in that the developability of the composition can be adjusted and an excellent pattern forming ability can be obtained.
- selection and use of polymerizable compounds are important for compatibility and dispersibility with other components (eg photopolymerization initiators, dispersions, alkali-soluble resins, etc.) contained in the composition.
- the compatibility may be improved by using a low-purity compound or using two or more kinds in combination.
- a specific structure may be selected from the viewpoint of improving adhesion to a hard surface such as a support.
- the content of the polymerizable compound in the composition of the present invention is preferably 0.1 to 70% by mass, more preferably 1 to 50% by mass, and more preferably 2 to 30% by mass with respect to the total solid content in the composition. Further preferred.
- the composition of the present invention may contain only one type of polymerizable compound or two or more types. When two or more types are included, the total amount is preferably within the above range.
- the photopolymerization initiator is not particularly limited as long as it has the ability to initiate polymerization of the polymerizable compound, and can be appropriately selected from known photopolymerization initiators. For example, those having photosensitivity to visible light from the ultraviolet region are preferable. Further, it may be an activator that generates some action with a photoexcited sensitizer and generates an active radical, or may be an initiator that initiates cationic polymerization according to the type of monomer.
- the photopolymerization initiator preferably contains at least one compound having a molecular extinction coefficient of at least about 50 within a range of about 300 nm to 800 nm (more preferably 330 nm to 500 nm).
- Examples of the photopolymerization initiator include halogenated hydrocarbon derivatives (for example, those having a triazine skeleton, those having an oxadiazole skeleton, etc.), acylphosphine compounds such as acylphosphine oxide, hexaarylbiimidazole, oxime.
- Examples include oxime compounds such as derivatives, organic peroxides, thio compounds, ketone compounds, aromatic onium salts, ketoxime ethers, aminoacetophenone compounds, hydroxyacetophenone, and the like, with oxime compounds being preferred.
- trihalomethyltriazine compounds trihalomethyltriazine compounds, benzyldimethylketal compounds, ⁇ -hydroxyketone compounds, ⁇ -aminoketone compounds, acylphosphine compounds, phosphine oxide compounds, metallocene compounds, oxime compounds, triallylimidazole dimers, oniums
- compounds selected from the group consisting of compounds, benzothiazole compounds, benzophenone compounds, acetophenone compounds and derivatives thereof, cyclopentadiene-benzene-iron complexes and salts thereof, halomethyloxadiazole compounds, and 3-aryl substituted coumarin compounds are preferred.
- trihalomethyltriazine compounds More preferred are trihalomethyltriazine compounds, ⁇ -aminoketone compounds, acylphosphine compounds, phosphine oxide compounds, oxime compounds, triallylimidazole dimers, triarylimidazole compounds, benzimidazole compounds, onium compounds, benzophenone compounds, and acetophenone compounds.
- At least one compound selected from the group consisting of a trihalomethyltriazine compound, an ⁇ -aminoketone compound, an oxime compound, a triallylimidazole compound, a benzophenone compound, a triarylimidazole compound, and a benzimidazole compound is particularly preferable.
- the triarylimidazole compound may be a mixture with benzimidazole.
- examples of the trihalomethyltriazine compound include the following compounds. Note that Ph is a phenyl group.
- Examples of the triarylimidazole compound and the benzimidazole compound include the following compounds.
- the trihalomethyltriazine compound a commercially available product can be used, for example, TAZ-107 (manufactured by Midori Chemical) can also be used.
- TAZ-107 manufactured by Midori Chemical
- stepper exposure is used for curing exposure, but this exposure machine may be damaged by halogen, and the amount of photopolymerization initiator added must be kept low. Therefore, in view of these points, it is particularly preferable to use an oxime compound as a photopolymerization initiator for forming a fine pattern such as a solid-state imaging device.
- halogenated hydrocarbon compound having a triazine skeleton examples include those described in Wakabayashi et al., Bull. Chem. Soc. Japan, 42, 2924 (1969), a compound described in British Patent No. 1388492, a compound described in JP-A-53-133428, a compound described in German Patent No. 3333724, F.I. C. J. Schaefer et al. Org. Chem. 29, 1527 (1964), compounds described in JP-A-62-258241, compounds described in JP-A-5-281728, compounds described in JP-A-5-34920, US Pat. No. 4,221,976 Examples thereof include the compounds described in the specification, particularly the compounds described in paragraph No. 0075 of JP2013-077009A.
- acridine derivatives are exemplified as photopolymerization initiators other than those described above.
- Specific examples include the compounds described in paragraph No. 0076 of JP2013-077009A, the contents of which are incorporated herein.
- ketone compound examples include compounds described in paragraph No. 0077 of JP2013-077009A, the contents of which are incorporated herein.
- hydroxyacetophenone compounds As the photopolymerization initiator, hydroxyacetophenone compounds, aminoacetophenone compounds, and acylphosphine compounds can also be suitably used. More specifically, for example, aminoacetophenone initiators described in JP-A-10-291969 and acylphosphine oxide initiators described in Japanese Patent No. 4225898 can also be used.
- the hydroxyacetophenone initiator include IRGACURE (registered trademark) -184, DAROCUR (registered trademark) -1173, IRGACURE (registered trademark) -500, IRGACURE (registered trademark) -2959, IRGACURE (registered trademark) -127 (trade name). : Any of BASF) can be used.
- aminoacetophenone-based initiator commercially available IRGACURE (registered trademark) -907, IRGACURE (registered trademark) -369, and IRGACURE (registered trademark) -379 (trade names: all manufactured by BASF) may be used. it can.
- aminoacetophenone-based initiator compounds described in JP-A-2009-191179 whose absorption wavelength is matched with a long wave light source of 365 nm or 405 nm can also be used.
- acylphosphine initiator commercially available products such as IRGACURE (registered trademark) -819 and DAROCUR (registered trademark) -TPO (trade names: both manufactured by BASF) can be used.
- More preferable examples of the photopolymerization initiator include oxime compounds.
- Specific examples of the oxime compound include compounds described in JP-A No. 2001-233842, compounds described in JP-A No. 2000-80068, and compounds described in JP-A No. 2006-342166.
- oxime compounds include J.M. C. S. Perkin II (1979) pp. 1653-1660, J.A. C. S. Perkin II (1979) pp. 156-162, Journal of Photopolymer Science and Technology (1995) pp. Examples thereof include compounds described in 202-232, JP-A No. 2000-66385, JP-A No. 2000-80068, JP-T 2004-534797, JP-A No. 2006-342166, and the like.
- IRGACURE registered trademark
- -OXE01 manufactured by BASF
- IRGACURE registered trademark
- -OXE02 manufactured by BASF
- TRONLY TR-PBG-304 As oxime compounds, TRONLY TR-PBG-304, TRONLY TR-PBG-309, TRONLY TR-PBG-305 (manufactured by CHANGZHOU TRONLY NEW ELECTRONIC MATERIALS CO., LTD), Commercial products such as NCI-831 and Adeka Arcles NCI-930 (manufactured by ADEKA) can also be used.
- oxime compounds other than those described above compounds described in JP-A-2009-519904 in which an oxime is linked to the carbazole N-position, compounds described in US Pat. No. 7,626,957 in which a hetero substituent is introduced into the benzophenone moiety, Compounds described in Japanese Patent Application Laid-Open No. 2010-15025 and US Patent Publication No. 2009-292039, in which a nitro group is introduced into the dye moiety, a ketoxime compound described in International Patent Publication No. 2009-131189, a triazine skeleton and an oxime skeleton in the same molecule
- a compound described in US Pat. No. 7,556,910 contained therein a compound described in JP-A-2009-221114 having an absorption maximum at 405 nm and good sensitivity to a g-line light source, and the like may be used.
- cyclic oxime compounds described in JP-A-2007-231000 and JP-A-2007-322744 can also be suitably used for the cyclic oxime compounds described in JP-A-2007-231000 and JP-A-2007-322744.
- cyclic oxime compounds in particular, cyclic oxime compounds fused to carbazole dyes described in JP2010-32985A and JP2010-185072A have high light absorptivity and high sensitivity. preferable.
- the compounds described in JP-A-2009-242469 having an unsaturated bond at a specific site of the oxime compound can be preferably used because high sensitivity can be achieved by regenerating the active radical from the polymerization inert radical. it can.
- oxime compounds having a specific substituent as disclosed in JP 2007-26997A and oxime compounds having a thioaryl group as disclosed in JP 2009-191061 A are particularly preferred.
- the oxime compound that is a photopolymerization initiator is preferably a compound represented by the following general formula (OX-1).
- the oxime N—O bond may be an (E) oxime compound, a (Z) oxime compound, or a mixture of (E) and (Z) isomers. .
- R and B each independently represent a monovalent substituent
- A represents a divalent organic group
- Ar represents an aryl group.
- the monovalent substituent represented by R is preferably a monovalent nonmetallic atomic group.
- the monovalent nonmetallic atomic group include an alkyl group, an aryl group, an acyl group, an alkoxycarbonyl group, an aryloxycarbonyl group, a heterocyclic group, an alkylthiocarbonyl group, and an arylthiocarbonyl group.
- these groups may have one or more substituents.
- the substituent mentioned above may be further substituted by another substituent.
- substituents examples include a halogen atom, an aryloxy group, an alkoxycarbonyl group or an aryloxycarbonyl group, an acyloxy group, an acyl group, an alkyl group, and an aryl group.
- the oxime compound has a maximum absorption wavelength in the wavelength region of 350 nm to 500 nm, preferably has a maximum absorption wavelength in the wavelength region of 360 nm to 480 nm, and particularly preferably has a high absorbance at 365 nm and 405 nm. .
- the molar extinction coefficient at 365 nm or 405 nm of the oxime compound is preferably 1,000 to 300,000, more preferably 2,000 to 300,000, more preferably 5,000 to 200, from the viewpoint of sensitivity. Is particularly preferred.
- a known method can be used for the molar extinction coefficient of the compound. Specifically, for example, 0.01 g of an ultraviolet-visible spectrophotometer (Vary Inc., Carry-5 spectrophotometer) is used with an ethyl acetate solvent. It is preferable to measure at a concentration of / L.
- an oxime compound having a fluorine atom can also be used as a photopolymerization initiator.
- Specific examples of the oxime compound having a fluorine atom include compounds described in JP 2010-262028 A, compounds 24 and 36 to 40 described in JP-A-2014-500852, and compounds described in JP-A 2013-164471 ( C-3). This content is incorporated herein.
- the oxime compound has a maximum absorption wavelength in the wavelength region of 350 nm to 500 nm, preferably has a maximum absorption wavelength in the wavelength region of 360 nm to 480 nm, and particularly preferably has a high absorbance at 365 nm and 405 nm. .
- the content of the photopolymerization initiator is preferably 0.1% by mass or more and 50% by mass or less, more preferably, based on the total solid content of the composition. Is 0.5 mass% or more and 30 mass% or less, More preferably, it is 1 mass% or more and 20 mass% or less. Within this range, better sensitivity and pattern formability can be obtained.
- the composition of the present invention may contain only one type of photopolymerization initiator, or may contain two or more types. When two or more types are included, the total amount is preferably within the above range.
- thermosetting compound for example, a compound having a thermosetting functional group can be used.
- the thermosetting compound refers to a compound that can be cured by heating, and generally refers to a compound that is cured by heating at 180 ° C. or higher.
- thermosetting functional group for example, those having at least one group selected from an epoxy group, a methylol group, an alkoxymethyl group, an acyloxymethyl group, an isocyanate group, a vinyl ether group, and a mercapto group are preferable.
- thermosetting compound those having two or more thermosetting functional groups in one molecule are more preferable, and compounds having two or more epoxy groups in one molecule are more preferable.
- Thermosetting compounds include epoxy compounds, melamine compounds (eg, alkoxymethylated, acyloxymethylated melamine compounds), urea compounds (eg, alkoxymethylated, acyloxymethylated urea compounds), phenolic compounds ( For example, preferred examples include hydroxymethylated or alkoxymethylated phenolic compounds or resins, and alkoxymethyletherified phenolic compounds). Epoxy compounds and melamine compounds are more preferred, and epoxy compounds are more preferred.
- the thermosetting compound may be a low molecular weight compound (for example, a molecular weight of less than 2000, or a molecular weight of less than 1000), or a high molecular compound (for example, a molecular weight of 1000 or more, and in the case of a polymer, the weight average molecular weight is 1000 or more). Either of these may be used. In the present invention, those having a molecular weight of 1000 or more are preferred, and those having a molecular weight of 2000 to 100,000 are more preferred. In the present invention, a compound having 2 or more epoxy groups in one molecule and a molecular weight of 1000 or more is particularly preferable.
- thermosetting compound among the said polymeric compounds is illustrated as a preferable example of the thermosetting compound of this invention.
- the composition of the present invention may contain a colorant other than the triarylmethane compound and the dye (B).
- a colorant other than the triarylmethane compound and the dye (B) As the other colorant, a dye having a maximum absorption wavelength in the range of 500 to 600 nm (hereinafter also referred to as dye (C)) is preferable.
- the transmittance from 490 to 510 nm can be adjusted, and the image quality is improved.
- the dye (C) include a xanthene dye, a dipyrromethene dye, and an anthraquinone dye, and a xanthene dye is preferable. These dyes may be monomeric or multimeric.
- the xanthene dye is preferably represented by a xanthene compound represented by the following formula (J).
- R 81 , R 82 , R 83 and R 84 each independently represent a monovalent substituent, R 85 each independently represents a monovalent substituent, and m represents 0 Represents an integer of ⁇ 5.
- X ⁇ represents a counter anion. When X ⁇ is not present, at least one of R 81 to R 85 contains an anion.
- R 81 to R 85 are each independently preferably a hydrogen atom, an alkyl group or an aryl group, more preferably a hydrogen atom or an alkyl group, and even more preferably an alkyl group. When X ⁇ is not present, at least one of R 81 to R 85 contains an anion.
- R 81 to R 85 contains an anion
- examples of the anion include the structures described in the above-described triarylmethane compounds, and the preferred ranges are also the same.
- the alkyl group preferably has 1 to 10 carbon atoms, more preferably 1 to 5 carbon atoms, and still more preferably 1 to 3 carbon atoms.
- the alkyl group may be linear, branched or cyclic, but is preferably linear or branched.
- the alkyl group is preferably unsubstituted.
- the aryl group preferably has 6 to 18 carbon atoms, more preferably 6 to 12 carbon atoms, and still more preferably 6 carbon atoms.
- m is preferably an integer of 1 to 3, and more preferably 1 or 2.
- X ⁇ represents a counter anion.
- the counter anion is synonymous with the counter anion described in the above-described triarylmethane compound, and the preferred range is also the same.
- xanthene compounds are shown below, but the present invention is not limited thereto.
- the dipyrromethene dye is preferably a dipyrromethene dye represented by the following general formula (I).
- R 1 , R 2 , R 3 , R 4 , R 5 , and R 6 each independently represent a hydrogen atom or a monovalent substituent
- R 7 represents a hydrogen atom, halogen, An atom, an alkyl group, an aryl group, or a heterocyclic group is represented.
- the description of these substituents can be referred to the description in paragraphs 0047 to 0056 of JP-A No. 2014-132348, the contents of which are incorporated herein.
- the dipyrromethene dye is a multimer, any one of R 1 to R 7 is preferably bonded to another part of the multimer, and more preferably, the other part of the multimer is bonded via R 3. Are connected.
- the metal or metal compound may be any metal atom or metal compound capable of forming a complex, and may be any divalent metal atom, divalent metal oxide, divalent metal hydroxide, or 2 Valent metal chlorides are included.
- metal chlorides such as GeCl 2
- metal oxides such as TiO and VO
- metal hydroxides such as Si (OH) 2 are also included.
- the dipyrromethene dye include the following compounds. Details of the dipyrromethene dye can be referred to the description in paragraphs 0045 to 0095 of JP-A No. 2014-132348, the contents of which are incorporated herein.
- the dye (C) preferably contains an ethylenically unsaturated group and / or is a multimer.
- the details thereof are described in the case where the triarylmethane monomer has an ethylenically unsaturated group, and the triarylmethane has a maximum absorption wavelength of 500 to 600 nm.
- a preferred example is a compound substituted with a dye structure in the above range.
- R 3 preferably contains an ethylenically unsaturated group.
- the dye (C) is a multimer, it is preferably a multimer containing a repeating unit containing a dye structure.
- Dye is more preferably a multimer having a dye structure having a maximum absorption wavelength in the range of 500 to 600 nm.
- DyeIV is also preferably a multimer having a dye structure having a maximum absorption wavelength in the range of 500 to 600 nm.
- the dye structure is preferably a dye structure derived from a xanthene compound or a dye structure derived from a dipyrromethene compound, more preferably a dye structure derived from a xanthene compound represented by the general formula (J), and R 85 in the general formula (J) or L 1 of the repeating unit represented by the general formula (A) described in the above-described triarylmethane multimer or the general formula described in the above-described triarylmethane multimer via R 3 in the general formula (I) It is preferably bonded to L 4 in (D).
- the dye (C) is a multimer, it may contain other repeating units in addition to the repeating unit containing the dye structure.
- a repeating unit containing an alkali-soluble group such as an acid group, a repeating unit containing a polymerizable group, and the like are exemplified, and preferably includes at least a repeating unit containing an alkali-soluble group such as an acid group.
- Each of these repeating units may contain only one type or two or more types.
- the details of these repeating units are synonymous with the description of the repeating unit containing an alkali-soluble group such as an acid group described in the above triarylmethane multimer, the repeating unit containing a polymerizable group, etc., and the preferred range is also synonymous. is there.
- dye (C) is a multimer
- Specific examples when the dye (C) is a multimer include the following.
- the content of the dye (C) in the composition of the present invention is preferably 5 to 100% by mass, more preferably 20 to 60% by mass with respect to the triarylmethane compound.
- the content of the dye (C) in the composition of the present invention is preferably 5 to 100% by mass, more preferably 10 to 80% by mass with respect to the dye (B).
- the composition of the present invention may contain only one type of dye (C), or may contain two or more types. When two or more types are included, the total amount is preferably within the above range.
- composition of the present invention contains other pigments and / or dyes as colorants other than the triarylmethane compound, the dye (B) and the dye (C) without departing from the spirit of the present invention. Also good. However, it is also possible to adopt a configuration that does not substantially contain a colorant other than the triarylmethane compound, the dye (B), and the dye (C). “Substantially free” means, for example, 1% by mass or less of the total colorant.
- the pigment various conventionally known inorganic pigments or organic pigments can be used, and organic pigments are preferably used.
- the pigment preferably has a high transmittance.
- inorganic pigments include black pigments such as carbon black and titanium black, metal compounds represented by metal oxides, metal complex salts, and the like. Specifically, iron, cobalt, aluminum, cadmium, lead, copper, Mention may be made of metal oxides such as titanium, magnesium, chromium, zinc and antimony, and composite oxides of the above metals.
- organic pigment for example, C. I. Pigment yellow 11,24,31,53,83,93,99,108,109,110,138,139,147,150,151,154,155,167,180,185,199; C. I. Pigment orange 36, 38, 43, 71; C. I. Pigment red 81,105,122,149,150,155,171,175,176,177,179,209,220,224,242,254,255,264,270; C. I. Pigment violet 19, 23, 32, 39; C. I. Pigment Blue 1, 2, 15, 15: 1, 15: 3, 15: 6, 16, 22, 60, 66; C. I. Pigment green 7, 36, 37, 58, 59; C. I. Pigment brown 25, 28; C. I. Pigment black 1; Etc.
- organic pigments can be used alone or in various combinations in order to adjust the spectrum and increase the color purity. Specific examples of the above combinations are shown below.
- a red pigment an anthraquinone pigment, a perylene pigment, a diketopyrrolopyrrole pigment alone or at least one of them, a disazo yellow pigment, an isoindoline yellow pigment, a quinophthalone yellow pigment or a perylene red pigment , Etc.
- an anthraquinone pigment C.I. I. Pigment red 177
- perylene pigments include C.I. I. Pigment red 155, C.I. I.
- Pigment Red 224, and diketopyrrolopyrrole pigments include C.I. I. Pigment Red 254, and C.I. I. Mixing with Pigment Yellow 139 is preferred.
- the mass ratio of the red pigment to the yellow pigment is preferably 100: 5 to 100: 50. When the ratio is 100: 4 or less, it is difficult to suppress the light transmittance from 400 nm to 500 nm. When the ratio is 100: 51 or more, the main wavelength tends to be closer to the short wavelength, and the color resolution may not be improved. In particular, the mass ratio is optimally in the range of 100: 10 to 100: 30. In the case of a combination of red pigments, it can be adjusted in accordance with the required spectrum.
- a halogenated phthalocyanine pigment can be used alone, or a mixture thereof with a disazo yellow pigment, a quinophthalone yellow pigment, an azomethine yellow pigment, or an isoindoline yellow pigment can be used.
- a disazo yellow pigment e.g., a quinophthalone yellow pigment, an azomethine yellow pigment, or an isoindoline yellow pigment
- C.I. I. Pigment Green 7, 36, 37 and C.I. I. Pigment yellow 83 e. I. Pigment yellow 138, C.I. I. Pigment yellow 139, C.I. I. Pigment yellow 150, C.I. I. Pigment yellow 180 or C.I. I. Mixing with Pigment Yellow 185 is preferred.
- the mass ratio of green pigment to yellow pigment is preferably 100: 5 to 100: 150.
- the mass ratio is particularly preferably in the range of 100: 30 to 100: 120.
- a phthalocyanine pigment can be used alone, or a mixture of this with a dioxazine purple pigment can be used.
- C.I. I. Pigment blue 15: 6 and C.I. I. Mixing with pigment violet 23 is preferred.
- the mass ratio of the blue pigment to the violet pigment is preferably 100: 0 to 100: 100, more preferably 100: 10 or less.
- the pigment for the black matrix carbon, titanium black, iron oxide, titanium oxide alone or a mixture thereof is used, and a combination of carbon and titanium black is preferable.
- the mass ratio of carbon to titanium black is preferably in the range of 100: 0 to 100: 60.
- the composition of the present invention preferably contains a colorant other than black, and more preferably contains a blue colorant.
- the colorant other than black is preferably a pigment, and more preferably a blue pigment.
- the primary particle size of the pigment is preferably 100 nm or less from the viewpoint of color unevenness and contrast, and is preferably 5 nm or more from the viewpoint of dispersion stability.
- the primary particle size of the pigment is more preferably 5 to 75 nm, further preferably 5 to 55 nm, and particularly preferably 5 to 35 nm.
- the primary particle size of the pigment can be measured by a known method such as an electron microscope.
- the pigment is preferably a pigment selected from anthraquinone pigments, diketopyrrolopyrrole pigments, phthalocyanine pigments, quinophthalone pigments, isoindoline pigments, azomethine pigments, and dioxazine pigments.
- C.I. I. Pigment red 177 anthraquinone pigment
- C.I. I. Pigment red 254 diketopyrrolopyrrole pigment
- C.I. I. Pigment green 7, 36, 58 C.I. I. Pigment Blue 15: 6 (phthalocyanine pigment), C.I. I. Pigment yellow 138 (quinophthalone pigment), C.I. I.
- Pigment yellow 139,185 isoindoline pigment
- C.I. I. Pigment yellow 150 azomethine pigment
- C.I. I. Pigment violet 23 a dioxazine pigment
- Other dyes include, for example, JP-A-64-90403, JP-A-64-91102, JP-A-1-94301, JP-A-6-11614, JP-T-2592207, US Pat. No. 4,808,501. Specification, US Pat. No. 5,667,920, US Pat. No. 505950, US Pat. No.
- the dyes disclosed in JP-A No. 6-194828 can be used.
- the chemical structure uses dyes such as pyrazole azo, anilino azo, triphenylmethane, anthraquinone, benzylidene, oxonol, pyrazolotriazole azo, pyridone azo, cyanine, phenothiazine, pyrrolopyrazole azomethine. it can.
- Other dyes may use pigment multimers. Examples of the dye multimer include compounds described in JP2011-213925A, JP2013-041097A, and the like.
- composition of the present invention contains other pigments and / or dyes, it is preferably 10% by mass to 70% by mass, more preferably 20% by mass, based on all components excluding the solvent contained in the composition. It is ⁇ 60% by mass, more preferably 25% by mass to 50% by mass.
- the composition of the present invention may contain only one type or two or more types of other pigments and / or dyes. When two or more types are included, the total amount is preferably within the above range.
- the composition of the present invention preferably further contains an alkali-soluble resin.
- the molecular weight of the alkali-soluble resin is not particularly defined, but it is preferable that Mw is 5000 to 100,000. Further, Mn is preferably 1000 to 20,000.
- the alkali-soluble resin is a linear organic polymer, and promotes at least one alkali-solubility in a molecule (preferably a molecule having an acrylic copolymer or a styrene copolymer as a main chain). It can be suitably selected from alkali-soluble resins having a group. From the viewpoint of heat resistance, polyhydroxystyrene resins, polysiloxane resins, acrylic resins, acrylamide resins, and acryl / acrylamide copolymer resins are preferable. From the viewpoint of development control, acrylic resins and acrylamide resins are preferable. Resins and acrylic / acrylamide copolymer resins are preferred.
- Examples of the group that promotes alkali solubility include a carboxyl group, a phosphoric acid group, a sulfonic acid group, and a phenolic hydroxyl group, but are soluble in a solvent and can be developed with a weak alkaline aqueous solution.
- (meth) acrylic acid is particularly preferred.
- These acid groups may be used alone or in combination of two or more.
- Examples of the monomer capable of imparting an acid group after the polymerization include, for example, a monomer having a hydroxyl group such as 2-hydroxyethyl (meth) acrylate, a monomer having an epoxy group such as glycidyl (meth) acrylate, and 2-isocyanatoethyl (methacrylate). ) Monomers having an isocyanate group such as acrylate. These monomers for introducing an acid group may be only one type or two or more types.
- a monomer having an acid group and / or a monomer capable of imparting an acid group after polymerization (hereinafter sometimes referred to as “monomer for introducing an acid group”) .) May be polymerized as a monomer component.
- a treatment for imparting an acid group as described later is required after the polymerization.
- a known radical polymerization method can be applied.
- Polymerization conditions such as temperature, pressure, type and amount of radical initiator, type of solvent, etc. when producing an alkali-soluble resin by radical polymerization can be easily set by those skilled in the art, and the conditions are determined experimentally. It can also be done.
- a polymer having a carboxylic acid in the side chain is preferable, such as a methacrylic acid copolymer, an acrylic acid copolymer, an itaconic acid copolymer, and a crotonic acid copolymer.
- a copolymer of (meth) acrylic acid and another monomer copolymerizable therewith is suitable as the alkali-soluble resin.
- examples of other monomers copolymerizable with (meth) acrylic acid include alkyl (meth) acrylates, aryl (meth) acrylates, and vinyl compounds.
- alkyl (meth) acrylate and aryl (meth) acrylate methyl (meth) acrylate, ethyl (meth) acrylate, propyl (meth) acrylate, butyl (meth) acrylate, isobutyl (meth) acrylate, pentyl (meth) acrylate,
- vinyl compounds such as hexyl (meth) acrylate, octyl (meth) acrylate, phenyl (meth) acrylate, benzyl (meth) acrylate, tolyl (meth) acrylate, naphthyl (meth) acrylate, cyclohexyl (meth) acrylate, styrene, ⁇ -methylstyrene, vinyltoluene, glycidyl methacrylate, acrylonitrile, vinyl acetate, N-vinylpyrrolidone, tetrahydrofurfury
- a compound represented by the following general formula (ED) and / or a compound represented by the following general formula (ED2) (hereinafter, these compounds may be referred to as “ether dimers”) are essential. It is also preferable to include a polymer (a) obtained by polymerizing the monomer component.
- R 1 and R 2 each independently represent a hydrogen atom or a hydrocarbon group having 1 to 25 carbon atoms which may have a substituent.
- General formula (ED2) In general formula (ED2), R represents a hydrogen atom or an organic group having 1 to 30 carbon atoms. As a specific example of the general formula (ED2), the description in JP 2010-168539 A can be referred to.
- the composition of this invention can form the cured coating film which was very excellent also in heat resistance and transparency.
- the hydrocarbon group having 1 to 25 carbon atoms which may have a substituent represented by R 1 and R 2 is not particularly limited.
- Linear or branched alkyl groups such as methyl, ethyl, n-propyl, isopropyl, n-butyl, isobutyl, tert-butyl, tert-amyl, stearyl, lauryl, 2-ethylhexyl; aryl groups such as phenyl; Alicyclic groups such as cyclohexyl, tert-butylcyclohexyl, dicyclopentadienyl, tricyclodecanyl, isobornyl, adamantyl, 2-methyl-2-adamantyl; substituted with alkoxy such as 1-methoxyethyl, 1-ethoxyethyl An alkyl group substituted with an aryl group such as benzyl; and the like.
- an acid such as methyl, ethyl, cyclohexyl, benzyl or the like, or a primary or secondary carbon substituent which is
- ether dimer examples include dimethyl-2,2 ′-[oxybis (methylene)] bis-2-propenoate, diethyl-2,2 ′-[oxybis (methylene)] bis-2-propenoate, (N-propyl) -2,2 ′-[oxybis (methylene)] bis-2-propenoate, di (isopropyl) -2,2 ′-[oxybis (methylene)] bis-2-propenoate, di (n-butyl) ) -2,2 ′-[oxybis (methylene)] bis-2-propenoate, di (isobutyl) -2,2 ′-[oxybis (methylene)] bis-2-propenoate, di (tert-butyl) -2, 2 ′-[oxybis (methylene)] bis-2-propenoate, di (tert-butyl) -2, 2 ′-[oxybis (methylene)] bis-2-propenoate, di (tert-butyl)
- dimethyl-2,2 ′-[oxybis (methylene)] bis-2-propenoate, diethyl-2,2 ′-[oxybis (methylene)] bis-2-propenoate, dicyclohexyl-2,2′- [Oxybis (methylene)] bis-2-propenoate and dibenzyl-2,2 ′-[oxybis (methylene)] bis-2-propenoate are preferred.
- These ether dimers may be only one kind or two or more kinds.
- the structure derived from the compound represented by the general formula (ED) may be copolymerized with other monomers.
- an alkali-soluble resin having a polymerizable group may be used. By having a polymerizable group, heat resistance and light resistance tend to be further improved.
- an alkali-soluble resin having a polymerizable group an alkali-soluble resin containing an allyl group, a (meth) acryl group, an allyloxyalkyl group or the like in the side chain is useful.
- Examples of the above-mentioned polymer containing a polymerizable group include: NR series (manufactured by Mitsubishi Rayon), Photomer 6173 (COOH-containing polyurethane acrylic oligomer.
- alkali-soluble resin may contain the structural unit derived from the ethylenically unsaturated monomer shown by following formula (X).
- Formula (X) (In Formula (X), R 1 represents a hydrogen atom or a methyl group, R 2 represents an alkylene group having 2 to 10 carbon atoms, and R 3 represents a hydrogen atom or a benzene ring which may contain a benzene ring. And represents an alkyl group of 20. n represents an integer of 1 to 15.)
- the alkylene group of R 2 preferably has 2 to 3 carbon atoms.
- the alkyl group of R 3 has 1 to 20 carbon atoms, more preferably 1 to 10, and the alkyl group of R 3 may contain a benzene ring.
- Examples of the alkyl group containing a benzene ring represented by R 3 include a benzyl group and a 2-phenyl (iso) propyl group.
- alkali-soluble resin in particular, a benzyl (meth) acrylate / (meth) acrylic acid copolymer or a multi-component copolymer composed of benzyl (meth) acrylate / (meth) acrylic acid / other monomers is suitable. .
- benzyl (meth) acrylate / (meth) acrylic acid / (meth) acrylic acid-2-hydroxyethyl copolymer copolymerized with 2-hydroxyethyl methacrylate 2 described in JP-A-7-140654 -Hydroxypropyl (meth) acrylate / polystyrene macromonomer / benzyl methacrylate / methacrylic acid copolymer, 2-hydroxy-3-phenoxypropyl acrylate / polymethyl methacrylate macromonomer / benzyl methacrylate / methacrylic acid copolymer, 2-hydroxyethyl Methacrylate / polystyrene macromonomer / methyl methacrylate / methacrylic acid copolymer, 2-hydroxyethyl methacrylate / polystyrene macromonomer / benzyl methacrylate / methacrylic acid copolymer, etc.
- the acid value of the alkali-soluble resin is preferably 30 mgKOH / g to 200 mgKOH / g, more preferably 50 mgKOH / g to 150 mgKOH / g, and particularly preferably 70 mgKOH / g to 120 mgKOH / g.
- the weight average molecular weight (Mw) of the alkali-soluble resin is preferably 2,000 to 50,000, more preferably 5,000 to 30,000, and particularly preferably 7,000 to 20,000.
- the content of the alkali-soluble resin is preferably 0.1% by mass to 15% by mass, more preferably 0.1% by mass with respect to the total solid content of the composition.
- the content is from 12% by mass to 12% by mass, and particularly preferably from 1% by mass to 10% by mass.
- the composition of the present invention may contain only one kind of alkali-soluble resin, or may contain two or more kinds. When two or more types are included, the total amount is preferably within the above range.
- the composition of the present invention may contain a solvent.
- the solvent is basically not particularly limited as long as it satisfies the solubility of each component and the applicability of the composition, but in particular the solubility, applicability, and safety of ultraviolet absorbers, alkali-soluble resins and dispersants, etc. It is preferable to select in consideration. Moreover, when preparing the composition in this invention, it is preferable that at least 2 type of solvent is included.
- esters such as ethyl acetate, n-butyl acetate, isobutyl acetate, amyl formate, isoamyl acetate, isobutyl acetate, butyl propionate, isopropyl butyrate, ethyl butyrate, butyl butyrate, methyl lactate, ethyl lactate, Alkyl oxyacetates (eg, methyl oxyacetate, ethyl oxyacetate, butyl oxyacetate (eg, methyl methoxyacetate, ethyl methoxyacetate, butyl methoxyacetate, methyl ethoxyacetate, ethyl ethoxyacetate)), 3-oxypropionic acid alkyl esters (Eg, methyl 3-oxypropionate, ethyl 3-oxypropionate, etc.
- esters such as ethyl acetate, n-butyl acetate, iso
- ethers For example, diethylene glycol dimethyl ether, tetrahydrofuran, ethylene glycol monomethyl ether, ethylene glycol monoethyl ether, methyl cellosolve acetate, ethyl cellosolve acetate, diethylene glycol monomethyl ether, diethylene glycol monoethyl ether, diethylene glycol monobutyl ether, propylene glycol monomethyl ether, propylene glycol monomethyl ether acetate, Propylene glycol monoethyl ether acetate, propylene glycol monopropyl ether acetate, etc., and ketones, for example, methyl ethyl ketone, cyclohexanone, cyclopentanone, 2-heptanone, 3-heptanone, etc., and aromatic hydrocarbons, For example, toluene, xylene and the like are preferable.
- solvents are preferably mixed in two or more types from the viewpoints of solubility of the ultraviolet absorber and the alkali-soluble resin, improvement of the coating surface condition, and the like.
- It is a mixed solution composed of two or more selected from carbitol acetate, butyl carbitol acetate, propylene glycol methyl ether, and propylene glycol methyl ether acetate.
- the content of the solvent in the composition is preferably such that the total solid concentration of the composition is 5% by mass to 80% by mass, more preferably 5% by mass to 60% by mass, from the viewpoint of applicability. An amount of 10% by mass to 60% by mass is more preferable.
- the composition of the present invention may contain only one type of solvent or two or more types of solvents. When two or more types are included, the total amount is preferably within the above range.
- the composition of the present invention may contain a polyfunctional thiol compound having two or more mercapto groups in the molecule for the purpose of promoting the reaction of the polymerizable compound.
- the polyfunctional thiol compound is preferably a secondary alkanethiol, and particularly preferably a compound having a structure represented by the following general formula (T1).
- T1 In the formula (T1), n represents an integer of 2 to 4, and L represents a divalent to tetravalent linking group.
- the linking group L is preferably an aliphatic group having 2 to 12 carbon atoms, particularly preferably n is 2 and L is an alkylene group having 2 to 12 carbon atoms.
- Specific examples of the polyfunctional thiol compound include compounds represented by the following structural formulas (T2) to (T4), and a compound represented by the formula (T2) is particularly preferable. These polyfunctional thiols can be used alone or in combination.
- composition of the present invention contains a polyfunctional thiol compound, it is preferably 0.3 to 8.9% by mass, more preferably 0.8 to 6.4% by mass, based on the total solid content excluding the solvent.
- Various surfactants may be added to the composition of the present invention from the viewpoint of further improving coatability.
- various surfactants such as a fluorine-based surfactant, a nonionic surfactant, a cationic surfactant, an anionic surfactant, and a silicone-based surfactant can be used.
- the composition of the present invention contains a fluorosurfactant
- the liquid properties (particularly fluidity) when prepared as a coating liquid are further improved. Sex can be improved more. That is, when a film is formed using a coating liquid to which a composition containing a fluorosurfactant is applied, the wettability to the coated surface is reduced by reducing the interfacial tension between the coated surface and the coating liquid. Is improved, and the coating property to the coated surface is improved. For this reason, even when a thin film of about several ⁇ m is formed with a small amount of liquid, it is effective in that it is possible to more suitably form a film having a uniform thickness with small thickness unevenness.
- the fluorine content in the fluorosurfactant is preferably 3% by mass to 40% by mass, more preferably 5% by mass to 30% by mass, and particularly preferably 7% by mass to 25% by mass.
- a fluorine-based surfactant having a fluorine content within this range is effective in terms of uniformity of coating film thickness and liquid-saving properties, and has good solubility in the composition.
- fluorosurfactant examples include Megafac F171, F172, F173, F176, F176, F177, F141, F142, F143, F144, R30, F437, F475, F479, F482, F554, F780 (from DIC), Florard FC430, FC431, FC171 (from Sumitomo 3M), Surflon S-382, SC-101, SC-103, SC-104 SC-105, SC1068, SC-381, SC-383, S393, S393, KH-40 (made by Asahi Glass), PF636, PF656, PF6320, PF6520, PF7002 (made by OMNOVA), etc. .
- a block polymer can also be used as the fluorosurfactant, and specific examples thereof include compounds described in JP-A-2011-89090.
- the fluorosurfactant has a repeating unit derived from a (meth) acrylate compound having a fluorine atom and 2 or more (preferably 5 or more) alkyleneoxy groups (preferably ethyleneoxy group or propyleneoxy group) (meth).
- a fluorine-containing polymer compound containing a repeating unit derived from an acrylate compound can also be preferably used, and the following compounds are also exemplified as the fluorine-based surfactant used in the present invention.
- the weight average molecular weight of the above compound is preferably 3,000 to 50,000, for example, 14,000.
- the fluoropolymer which has an ethylenically unsaturated group in a side chain can also be used as a fluorine-type surfactant.
- Specific examples thereof include compounds described in JP-A 2010-164965, paragraphs 0050 to 0090 and paragraphs 0289 to 0295, such as MegaFac RS-101, RS-102, and RS-718K manufactured by DIC.
- nonionic surfactant examples include glycerol, trimethylolpropane, trimethylolethane, and ethoxylates and propoxylates thereof (for example, glycerol propoxylate, glycerol ethoxylate, etc.), polyoxyethylene lauryl ether, polyoxyethylene Stearyl ether, polyoxyethylene oleyl ether, polyoxyethylene octylphenyl ether, polyoxyethylene nonylphenyl ether, polyethylene glycol dilaurate, polyethylene glycol distearate, sorbitan fatty acid ester (Pluronic L10, L31, L61, L62, 10R5 manufactured by BASF) 17R2, 25R2, Tetronic 304, 701, 704, 901, 904, 150R1), Rusupasu 20000 (Lubrizol), and the like. Also, NCW-101, NCW-1001, NCW-1002 manufactured by Wako Pure Chemical Industries, Ltd. can be used.
- cationic surfactant examples include phthalocyanine derivatives (trade name: EFKA-745, manufactured by Morishita Sangyo), organosiloxane polymer KP341 (manufactured by Shin-Etsu Chemical Co., Ltd.), (meth) acrylic acid (co) polymer polyflow No. . 75, no. 90, no. 95 (manufactured by Kyoeisha Chemical), W001 (manufactured by Yusho) and the like.
- phthalocyanine derivatives trade name: EFKA-745, manufactured by Morishita Sangyo
- organosiloxane polymer KP341 manufactured by Shin-Etsu Chemical Co., Ltd.
- acrylic acid co
- polymer polyflow No. . 75, no. 90, no. 95 manufactured by Kyoeisha Chemical
- W001 manufactured by Yusho
- anionic surfactants include W004, W005, W017 (manufactured by Yusho) and the like.
- silicone-based surfactant examples include “Toray Silicone DC3PA”, “Toray Silicone SH7PA”, “Toray Silicone DC11PA”, “Toray Silicone SH21PA”, “Toray Silicone SH28PA”, “Toray Silicone SH29PA” manufactured by Toray Dow Corning.
- Toray Silicone SH30PA “Tole Silicone SH8400”, “TSF-4440”, “TSF-4300”, “TSF-4445”, “TSF-4460”, “TSF-4442” manufactured by Momentive Performance Materials
- the addition amount of the surfactant is preferably 0.001% by mass to 2.0% by mass, more preferably 0.001% by mass relative to the total mass of the composition. 005 mass% to 1.0 mass%.
- the composition of the present invention may contain only one type of surfactant or two or more types of surfactant. When two or more types are included, the total amount is preferably within the above range.
- composition of the present invention is within a range that does not impair the effects of the present invention. May be included.
- pigment dispersant When the composition of the present invention has a pigment, a pigment dispersant can be used in combination as desired.
- pigment dispersants include polymer dispersants [for example, polyamidoamines and salts thereof, polycarboxylic acids and salts thereof, high molecular weight unsaturated acid esters, modified polyurethanes, modified polyesters, and modified poly (meth) acrylates. , (Meth) acrylic copolymers, naphthalenesulfonic acid formalin condensates], and surfactants such as polyoxyethylene alkyl phosphate esters, polyoxyethylene alkyl amines, alkanol amines, and pigment derivatives, etc. Can do.
- the polymer dispersant can be further classified into a linear polymer, a terminal-modified polymer, a graft polymer, and a block polymer according to the structure. Details of the dispersant can be referred to the description in paragraphs 0098 to 0102 of JP-A-2014-130344, and the contents thereof are incorporated in the present specification.
- pigment dispersants may be used alone or in combination of two or more. In the present invention, it is particularly preferable to use a combination of a pigment derivative and a polymer dispersant.
- the pigment dispersant may be used in combination with an alkali-soluble resin together with the terminal-modified polymer, graft polymer, or block polymer having an anchor site to the pigment surface.
- Alkali-soluble resins include (meth) acrylic acid copolymer, itaconic acid copolymer, crotonic acid copolymer, maleic acid copolymer, partially esterified maleic acid copolymer, etc., and carboxylic acid in the side chain. Examples thereof include acidic cellulose derivatives, and (meth) acrylic acid copolymers are particularly preferable.
- An alkali-soluble resin containing is also preferred. Specifically, an alkali-soluble resin: benzyl methacrylate / methacrylic acid / methacrylic acid-2-hydroxyethyl copolymer is exemplified.
- the total content of the pigment dispersant is preferably 1 part by weight to 80 parts by weight with respect to 100 parts by weight of the pigment, and 5 parts by weight to 70 parts by weight. Is more preferably 10 parts by mass to 60 parts by mass.
- the specific dispersion resin is preferably 50% by mass or more, more preferably 60% by mass or more, and further preferably 70% by mass or more, among the dispersant components contained in the composition.
- the composition of the present invention may contain only one type of pigment dispersant, or two or more types of pigment dispersants. When two or more types are included, the total amount is preferably within the above range.
- the amount used is preferably in the range of 5 to 100 parts by mass with respect to 100 parts by mass of the pigment, and 10 to 80 parts by mass. More preferably, it is in the range of parts by mass.
- the amount of the pigment derivative used is preferably in the range of 1 to 30 parts by mass in terms of mass with respect to 100 parts by mass of the pigment. The range is more preferable, and the range of 5 to 15 parts by mass is particularly preferable.
- the total content of the colorant and the dispersant component is preferably 50% by mass or more and 90% by mass or less with respect to the total solid content constituting the composition. 55 mass% or more and 85 mass% or less is more preferable, and 60 mass% or more and 80 mass% or less is further more preferable.
- Crosslinking agent is not particularly limited as long as the film can be cured by a crosslinking reaction.
- the crosslinking agent is not particularly limited as long as the film can be cured by a crosslinking reaction.
- the blending amount of the crosslinking agent is not particularly defined, but is preferably 2 to 30% by mass, more preferably 3 to 20% by mass, based on the total solid content of the composition. preferable.
- the composition of the present invention may contain only one type of cross-linking agent, or may contain two or more types. When two or more types are included, the total amount is preferably within the above range.
- ⁇ Polymerization inhibitor In the composition of the present invention, it is desirable to add a small amount of a polymerization inhibitor in order to prevent unnecessary thermal polymerization of the polymerizable compound during the production or storage of the composition.
- the polymerization inhibitor that can be used in the present invention include hydroquinone, p-methoxyphenol, di-tert-butyl-p-cresol, pyrogallol, tert-butylcatechol, benzoquinone, 4,4′-thiobis (3-methyl-6- tert-butylphenol), 2,2′-methylenebis (4-methyl-6-tert-butylphenol), N-nitrosophenylhydroxyamine primary cerium salt and the like.
- the addition amount of the polymerization inhibitor is preferably about 0.01% by mass to about 5% by mass with respect to the mass of the whole composition.
- the composition of the present invention may contain only one type of polymerization inhibitor, or may contain two or more types. When two or more types are included, the total amount is preferably within the above range.
- Organic carboxylic acid, organic carboxylic anhydride may contain an organic carboxylic acid having a molecular weight of 1000 or less and / or an organic carboxylic acid anhydride.
- organic carboxylic acid compound include aliphatic carboxylic acids and aromatic carboxylic acids.
- Examples of the aliphatic carboxylic acid include monocarboxylic acids such as formic acid, acetic acid, propionic acid, butyric acid, valeric acid, pivalic acid, caproic acid, glycolic acid, acrylic acid, methacrylic acid, oxalic acid, malonic acid, succinic acid, Examples thereof include dicarboxylic acids such as glutaric acid, adipic acid, pimelic acid, cyclohexanedicarboxylic acid, cyclohexenedicarboxylic acid, itaconic acid, citraconic acid, maleic acid and fumaric acid, and tricarboxylic acids such as tricarbaryl acid and aconitic acid.
- monocarboxylic acids such as formic acid, acetic acid, propionic acid, butyric acid, valeric acid, pivalic acid, caproic acid, glycolic acid, acrylic acid, methacrylic acid, oxalic acid, malonic acid, succinic acid
- aromatic carboxylic acid examples include carboxylic acids in which a carboxyl group is directly bonded to a phenyl group such as benzoic acid and phthalic acid, and carboxylic acids in which a carboxyl group is bonded to the phenyl group through a carbon bond.
- carboxylic acids in which a carboxyl group is directly bonded to a phenyl group such as benzoic acid and phthalic acid
- carboxylic acids in which a carboxyl group is bonded to the phenyl group through a carbon bond examples of the aromatic carboxylic acid.
- those having a molecular weight of 600 or less, particularly those having a molecular weight of 50 to 500 specifically maleic acid, malonic acid, succinic acid, and itaconic acid are preferred.
- organic carboxylic acid anhydrides include aliphatic carboxylic acid anhydrides and aromatic carboxylic acid anhydrides. Specific examples include acetic anhydride, trichloroacetic anhydride, trifluoroacetic anhydride, and tetrahydrophthalic anhydride. Succinic anhydride, maleic anhydride, citraconic anhydride, itaconic anhydride, glutaric anhydride, 1,2-cyclohexene dicarboxylic anhydride, n-octadecyl succinic anhydride, 5-norbornene-2,3-dicarboxylic anhydride, etc. An aliphatic carboxylic acid anhydride is mentioned.
- aromatic carboxylic acid anhydride examples include phthalic anhydride, trimellitic anhydride, pyromellitic anhydride, and naphthalic anhydride. Of these, those having a molecular weight of 600 or less, particularly those having a molecular weight of 50 to 500, specifically maleic anhydride, succinic anhydride, citraconic anhydride, and itaconic anhydride are preferred.
- the amount of the organic carboxylic acid and / or organic carboxylic acid anhydride is usually 0.01 to 10% by weight in the total solid content, The range is preferably 0.03 to 5% by weight, more preferably 0.05 to 3% by weight.
- the composition of the present invention may contain only one type of organic carboxylic acid and / or organic carboxylic acid anhydride, or may contain two or more types. When two or more types are included, the total amount is preferably within the above range.
- the composition may contain various additives such as fillers, adhesion promoters, antioxidants, ultraviolet absorbers, anti-aggregation agents, and the like, if necessary.
- additives include those described in JP-A No. 2004-295116, paragraphs 0155 to 0156, the contents of which are incorporated herein.
- the composition of the present invention may contain a sensitizer and a light stabilizer described in paragraph 0078 of JP-A No. 2004-295116, and a thermal polymerization inhibitor described in paragraph 0081 of the same publication.
- the composition of the present invention may contain only one type of the above components, or may contain two or more types. When two or more types are included, the total amount is preferably within the above range.
- the composition of the present invention is prepared by mixing the aforementioned components.
- the components constituting the composition may be combined at once, or may be sequentially combined after each component is dissolved and dispersed in a solvent.
- the composition may be prepared by dissolving and dispersing all components in a solvent at the same time. If necessary, each component may be suitably used as two or more solutions / dispersions at the time of use (at the time of application). ) May be mixed to prepare a composition.
- the composition prepared as described above can be used after being filtered off using a filter or the like.
- the composition of the present invention is preferably filtered with a filter for the purpose of removing foreign substances or reducing defects. If it is conventionally used for the filtration use etc., it can use without being specifically limited.
- fluororesins such as PTFE (polytetrafluoroethylene), polyamide resins such as nylon (eg nylon-6, nylon-6,6), polyolefin resins such as polyethylene and polypropylene (PP) (high density, ultra high molecular weight) For example).
- PTFE polytetrafluoroethylene
- nylon eg nylon-6, nylon-6,6)
- polyolefin resins such as polyethylene and polypropylene (PP) (high density, ultra high molecular weight)
- PP polypropylene
- the pore size of the filter is suitably about 0.01 to 7.0 ⁇ m, preferably about 0.01 to 2.5 ⁇ m, more preferably about 0.01 to 2.0 ⁇ m.
- a fiber-shaped filter medium examples include polypropylene fiber, nylon fiber, glass fiber, and the like. , TPR005, etc.) and SHPX type series (SHPX003 etc.) filter cartridges can be used.
- the filtering by the first filter may be performed only once or may be performed twice or more.
- the pore diameter here can refer to the nominal value of the filter manufacturer.
- the commercially available filter can be selected from various filters provided by, for example, Nippon Pole, Advantech Toyo, Japan Integris (formerly Japan Microlith) or Kitz Microfilter.
- the second filter a filter formed of the same material as the first filter described above can be used.
- the filtering by the first filter may be performed only with the dispersion, and the second filtering may be performed after mixing other components.
- the composition of the present invention is preferably used as a composition for a color filter. That is, it is preferably used for forming a colored layer of a color filter. More specifically, since the composition of the present invention can form a cured film having excellent heat resistance and color characteristics, it is suitably used for forming a color pattern (colored layer) of a color filter.
- the composition of the present invention can form a colored pattern such as a color filter used in a solid-state imaging device (for example, CCD, CMOS (ComplementarylementMetal-Oxide Semiconductor), etc.) and an image display device such as a liquid crystal display (LCD) It can be suitably used for use. Furthermore, it can be suitably used as a production application for printing ink, inkjet ink, paint, and the like. Especially, it can use suitably as a production use of the color filter for solid-state image sensors, such as CCD and CMOS.
- the cured film of the present invention is formed by curing the composition of the present invention. Such a cured film is preferably used for a color filter.
- the pattern forming method of the present invention comprises a step of applying the composition of the present invention on a support to form a composition layer, a step of exposing the composition layer in a pattern, and an unexposed portion of the composition layer. And a pattern forming method including a step of forming a colored pattern by development and removal.
- the pattern forming method of the present invention can be suitably applied to the formation of a colored pattern (pixel) included in a color filter.
- the method for producing a color filter of the present invention includes the pattern forming method of the present invention.
- the composition of the present invention may produce a color filter by pattern formation by a so-called photolithography method, or may form a pattern by dry etching.
- a step of applying a composition on a support to form a composition layer a step of exposing the composition layer in a pattern, and a composition layer
- a step of forming a colored pattern by developing and removing the unexposed portion of the film a step of applying a composition on a support to form a composition layer, a step of exposing the composition layer in a pattern, and a composition layer.
- a step of applying the composition of the present invention on a support to form a composition layer and curing to form a colored layer Illustrated is a method including a step of forming a resist layer, a step of patterning the photoresist layer by exposing and developing the photoresist layer to obtain a resist pattern, and a step of dry etching the colored layer using the resist pattern as an etching mask.
- Step of Forming Composition Layer In the step of forming the composition layer, the composition layer is formed on the support by applying the composition of the present invention.
- a solid-state imaging element substrate in which an imaging element (light receiving element) such as a CCD (Charge Coupled Device) or CMOS is provided on a substrate (for example, a silicon substrate) is used.
- an imaging element light receiving element
- CCD Charge Coupled Device
- CMOS Charge Coupled Device
- the colored pattern in the present invention may be formed on the imaging element forming surface side (front surface) of the solid-state imaging element substrate, or may be formed on the imaging element non-forming surface side (back surface).
- a light shielding film may be provided between the colored patterns in the solid-state image sensor or on the back surface of the substrate for the solid-state image sensor.
- an undercoat layer may be provided on the support for improving adhesion with the upper layer, preventing diffusion of substances, or flattening the substrate surface.
- a solvent, an alkali-soluble resin, a polymerizable compound, a polymerization inhibitor, a surfactant, a photopolymerization initiator, and the like can be blended, and each of these components is derived from the components blended in the above-described composition of the present invention. It is preferable to select appropriately.
- composition of the present invention As a method for applying the composition of the present invention on the support, various coating methods such as slit coating, ink jet method, spin coating, cast coating, roll coating, screen printing method and the like can be applied.
- Drying (pre-baking) of the composition layer coated on the support can be performed at a temperature of 50 ° C. to 140 ° C. for 10 seconds to 300 seconds using a hot plate, oven or the like.
- the composition layer formed in the composition layer formation step is exposed in a pattern.
- pattern exposure can be performed by exposing the composition layer formed on the support using a mask having a predetermined mask pattern using an exposure apparatus such as a stepper. Thereby, an exposed part can be hardened.
- radiation light
- ultraviolet rays such as g-line and i-line are preferable (particularly preferably i-line).
- Irradiation dose exposure dose, for example, preferably 0.03 ⁇ 2.5J / cm 2, more preferably 0.05 ⁇ 1.0J / cm 2, most preferably 0.08 ⁇ 0.5J / cm 2 .
- the oxygen concentration at the time of exposure can be appropriately selected.
- a low oxygen atmosphere having an oxygen concentration of 19% by volume or less (for example, 15% by volume, 5% by volume, substantially oxygen-free).
- a high oxygen atmosphere with an oxygen concentration exceeding 21% by volume for example, 22% by volume, 30% by volume, 50% by volume.
- the exposure illuminance can be set as appropriate, and can usually be selected from the range of 1000 W / m 2 to 100,000 W / m 2 (eg, 5000 W / m 2 , 15000 W / m 2 , 35000 W / m 2 ).
- Oxygen concentration and exposure illuminance may appropriately combined conditions, for example, illuminance 10000 W / m 2 at an oxygen concentration of 10 vol%, oxygen concentration of 35 vol% can be such illuminance 20000W / m 2.
- the thickness of the cured film (colored film) is preferably 1.0 ⁇ m or less, more preferably 0.1 ⁇ m to 0.9 ⁇ m, and further preferably 0.2 ⁇ m to 0.8 ⁇ m. It is preferable to set the film thickness to 1.0 ⁇ m or less because high resolution and high adhesion can be obtained.
- a cured film having a thin film thickness of 0.7 ⁇ m or less can also be suitably formed, and the obtained cured film is developed in a pattern forming process described later, thereby forming a thin film.
- the coloring pattern excellent in developability, surface roughness suppression, and pattern shape can be obtained.
- the developer is preferably an organic alkali developer that does not cause damage to the underlying image sensor or circuit.
- the development temperature is usually 20 ° C. to 30 ° C., and the development time is conventionally 20 seconds to 90 seconds. In order to remove the residue more, in recent years, it may be carried out for 120 to 180 seconds. Furthermore, in order to further improve residue removability, the process of shaking off the developer every 60 seconds and further supplying a new developer may be repeated several times.
- alkaline agent used in the developer examples include ammonia water, ethylamine, diethylamine, dimethylethanolamine, tetramethylammonium hydroxide, tetraethylammonium hydroxide, tetrapropylammonium hydroxide, tetrabutylammonium hydroxide, benzyltrimethylammonium hydroxide.
- Organic alkaline compounds such as choline, pyrrole, piperidine, 1,8-diazabicyclo- [5,4,0] -7-undecene, and the concentration of these alkaline agents is 0.001% by mass to 10% by mass
- An alkaline aqueous solution diluted with pure water so as to be preferably 0.01% by mass to 1% by mass is preferably used as the developer.
- an inorganic alkali may be used for the developer, and as the inorganic alkali, for example, sodium hydroxide, potassium hydroxide, sodium carbonate, sodium hydrogencarbonate, sodium oxalate, sodium metaoxalate and the like are preferable.
- a surfactant may be used for the developer.
- the surfactant examples include the surfactant described in the above-described composition, and a nonionic surfactant is preferable.
- the amount is preferably 0.001 to 2.0% by weight, more preferably 0.01 to 1.0% by weight, based on the total weight of the developer.
- the developing solution which consists of such alkaline aqueous solution, generally it is preferable to wash
- post-bake heat treatment after drying. If a multicolor coloring pattern is to be formed, a cured film can be produced by sequentially repeating the above steps for each color. Thereby, a color filter is obtained.
- the post-baking is a heat treatment after development for complete curing, and a heat curing treatment is usually performed at 100 ° C. to 240 ° C., preferably 200 ° C. to 240 ° C.
- This post-bake treatment is performed continuously or batchwise using a heating means such as a hot plate, a convection oven (hot air circulation dryer), a high-frequency heater, or the like so that the coating film after development is in the above-described condition. be able to.
- the dry etching can be performed using the etching gas with the colored layer as a mask using the patterned photoresist layer as a mask.
- a positive or negative radiation sensitive composition is applied onto the colored layer and dried to form a photoresist layer.
- a mode in which heat treatment after exposure (PEB) and heat treatment after development (post-bake treatment) are desirable.
- a positive type radiation sensitive composition As the photoresist, for example, a positive type radiation sensitive composition is used.
- This positive type radiation sensitive composition includes a positive type photosensitive material sensitive to radiation such as ultraviolet rays (g rays, h rays, i rays), deep ultraviolet rays including excimer lasers, electron beams, ion beams and X rays.
- a positive resist composition suitable for resist can be used.
- the radiation g-line, h-line and i-line are preferable, and i-line is particularly preferable.
- a composition containing a quinonediazide compound and an alkali-soluble resin is preferable.
- a positive radiation-sensitive composition containing a quinonediazide compound and an alkali-soluble resin indicates that a quinonediazide group is decomposed by irradiation with light having a wavelength of 500 nm or less to produce a carboxyl group, resulting in alkali-solubility from an alkali-insoluble state. It is what you use. Since this positive photoresist has remarkably excellent resolution, it is used for manufacturing integrated circuits such as IC (integrated circuit) and LSI (Large Scale Integration).
- Examples of the quinonediazide compound include a naphthoquinonediazide compound. Examples of commercially available products include “FHi622BC” (manufactured by FUJIFILM Electronics Materials).
- the thickness of the photoresist layer is preferably from 0.1 to 3 ⁇ m, preferably from 0.2 to 2.5 ⁇ m, and more preferably from 0.3 to 2 ⁇ m.
- the application of the photoresist layer can be suitably performed using the above-described application method in the colored layer.
- a resist pattern (patterned photoresist layer) provided with a group of resist through holes is formed.
- the formation of the resist pattern is not particularly limited, and can be performed by appropriately optimizing a conventionally known photolithography technique.
- a resist through hole group in the photoresist layer By providing a resist through hole group in the photoresist layer by exposure and development, a resist pattern as an etching mask used in the next etching is provided on the colored layer.
- the exposure of the photoresist layer is performed by exposing the positive-type or negative-type radiation-sensitive composition with g-line, h-line, i-line, etc., preferably i-line, through a predetermined mask pattern. Can do. After the exposure, the photoresist is removed in accordance with a region where a colored pattern is to be formed by developing with a developer.
- any developer can be used as long as it dissolves the exposed portion of the positive resist and the uncured portion of the negative resist without affecting the colored layer containing the colorant.
- an alkaline aqueous solution can be used.
- an alkaline aqueous solution prepared by dissolving an alkaline compound so as to have a concentration of 0.001 to 10% by mass, preferably 0.01 to 5% by mass is suitable.
- alkaline compound examples include sodium hydroxide, potassium hydroxide, sodium carbonate, sodium oxalate, sodium metasuccinate, aqueous ammonia, ethylamine, diethylamine, dimethylethanolamine, tetramethylammonium hydroxide, tetraethylammonium hydroxide, choline, Examples include pyrrole, piperidine, 1,8-diazabicyclo [5,4,0] -7-undecene.
- alkaline aqueous solution is used as a developing solution, generally a washing process is performed with water after development.
- the resist pattern as an etching mask, patterning is performed by dry etching so that a through hole group is formed in the colored layer. Thereby, a colored pattern is formed.
- the through hole group is provided in a checkered pattern in the colored layer. Therefore, the first colored pattern in which the through hole group is provided in the colored layer has a plurality of square-shaped first colored pixels in a checkered pattern.
- the colored layer is dry etched using the resist pattern as an etching mask.
- Representative examples of dry etching include JP-A-59-126506, JP-A-59-46628, JP-A-58-9108, JP-A-58-2809, JP-A-57-148706, JP-A-61-41102, and the like. There are methods described in the publications.
- the dry etching is preferably performed in the following manner from the viewpoint of forming the pattern cross section closer to a rectangle and reducing the damage to the support.
- a mixed gas of fluorine-based gas and oxygen gas (O 2 ) the first stage etching is performed up to a region (depth) where the support is not exposed, and after this first stage etching, nitrogen gas ( N 2 ) and oxygen gas (O 2 ), and a second stage etching is preferably performed to the vicinity of the region (depth) where the support is exposed, and over-etching is performed after the support is exposed.
- N 2 nitrogen gas
- O 2 oxygen gas
- a second stage etching is preferably performed to the vicinity of the region (depth) where the support is exposed, and over-etching is performed after the support is exposed.
- the form containing these is preferable.
- a specific method of dry etching and the first stage etching, second stage etching, and over-etching will be described.
- Dry etching is performed by obtaining etching conditions in advance by the following method.
- (1) The etching rate (nm / min) in the first stage etching and the etching rate (nm / min) in the second stage etching are calculated respectively.
- (2) The time for etching the desired thickness in the first stage etching and the time for etching the desired thickness in the second stage etching are respectively calculated.
- (3) The first stage etching is performed according to the etching time calculated in (2) above.
- the second stage etching is performed according to the etching time calculated in (2) above. Alternatively, the etching time may be determined by endpoint detection, and the second stage etching may be performed according to the determined etching time.
- Overetching time is calculated with respect to the total time of (3) and (4) above, and overetching is performed.
- the mixed gas used in the first stage etching step preferably contains a fluorine-based gas and an oxygen gas (O 2 ) from the viewpoint of processing the organic material that is the film to be etched into a rectangular shape.
- the first stage etching process can avoid damage to the support body by etching to a region where the support body is not exposed.
- the second etching step and the over-etching step are performed in the first etching step after etching to a region where the support is not exposed by the mixed gas of fluorine-based gas and oxygen gas. From the viewpoint of avoidance, it is preferable to perform the etching process using a mixed gas of nitrogen gas and oxygen gas.
- the ratio between the etching amount in the first stage etching process and the etching amount in the second stage etching process is preferably in the range of more than 0% and not more than 50%. 10 to 20% is more preferable.
- the etching amount is an amount calculated from the difference between the remaining film thickness to be etched and the film thickness before etching.
- the etching preferably includes an over-etching process.
- the overetching process is preferably performed by setting an overetching ratio. Moreover, it is preferable to calculate the overetching ratio from the etching process time to be performed first.
- the over-etching ratio can be arbitrarily set, but it is preferably 30% or less of the etching processing time in the etching process, and preferably 5 to 25% from the viewpoint of etching resistance of the photoresist and maintaining the rectangularity of the pattern to be etched. Is more preferable, and 10 to 15% is particularly preferable.
- the resist pattern that is, the etching mask
- the removal of the resist pattern preferably includes a step of applying a stripping solution or a solvent on the resist pattern so that the resist pattern can be removed, and a step of removing the resist pattern using cleaning water.
- Examples of the step of applying a stripping solution or solvent on the resist pattern so that the resist pattern can be removed include, for example, a step of applying a stripping solution or solvent on at least the resist pattern and stagnating for a predetermined time to perform paddle development Can be mentioned.
- time to make stripping solution or a solvent stagnant It is preferable that it is several dozen seconds to several minutes.
- examples of the step of removing the resist pattern using the cleaning water include a step of removing the resist pattern by spraying the cleaning water onto the resist pattern from a spray type or shower type spray nozzle.
- the washing water pure water can be preferably used.
- examples of the injection nozzle include an injection nozzle in which the entire support is included in the injection range, and an injection nozzle that is a movable injection nozzle and in which the movable range includes the entire support. When the spray nozzle is movable, the resist pattern is more effectively removed by moving the support pattern from the center of the support to the end of the support more than twice during the process of removing the resist pattern and spraying the cleaning water. be able to.
- the stripping solution generally contains a solvent, but may further contain an inorganic solvent.
- the solvent include 1) a hydrocarbon compound, 2) a halogenated hydrocarbon compound, 3) an alcohol compound, 4) an ether or acetal compound, 5) a ketone or aldehyde compound, 6) an ester compound, 7) Polyhydric alcohol compounds, 8) Carboxylic acid or acid anhydride compounds thereof, 9) Phenol compounds, 10) Nitrogen compounds, 11) Sulfur compounds, and 12) Fluorine compounds.
- the stripping solution preferably contains a nitrogen-containing compound, and more preferably contains an acyclic nitrogen-containing compound and a cyclic nitrogen-containing compound.
- the acyclic nitrogen-containing compound is preferably an acyclic nitrogen-containing compound having a hydroxyl group.
- Specific examples include monoisopropanolamine, diisopropanolamine, triisopropanolamine, N-ethylethanolamine, N, N-dibutylethanolamine, N-butylethanolamine, monoethanolamine, diethanolamine, and triethanolamine.
- Preferred are monoethanolamine, diethanolamine and triethanolamine, and more preferred is monoethanolamine (H 2 NCH 2 CH 2 OH).
- cyclic nitrogen-containing compounds include isoquinoline, imidazole, N-ethylmorpholine, ⁇ -caprolactam, quinoline, 1,3-dimethyl-2-imidazolidinone, ⁇ -picoline, ⁇ -picoline, ⁇ -picoline, 2- Preferred examples include pipecoline, 3-pipecoline, 4-pipecoline, piperazine, piperidine, pyrazine, pyridine, pyrrolidine, N-methyl-2-pyrrolidone, N-phenylmorpholine, 2,4-lutidine, and 2,6-lutidine.
- NMP N-methyl-2-pyrrolidone
- NMP N-methyl-2-pyrrolidone
- the stripping solution preferably contains an acyclic nitrogen-containing compound and a cyclic nitrogen-containing compound.
- acyclic nitrogen-containing compound at least one selected from monoethanolamine, diethanolamine, and triethanolamine, and cyclic
- the nitrogen-containing compound preferably includes at least one selected from N-methyl-2-pyrrolidone and N-ethylmorpholine, and more preferably includes monoethanolamine and N-methyl-2-pyrrolidone.
- a deposit means an etching product deposited and deposited on the side wall of a colored layer.
- the content of the non-cyclic nitrogen-containing compound is 9 parts by weight or more and 11 parts by weight or less with respect to 100 parts by weight of the stripping solution, and the content of the cyclic nitrogen-containing compound is 100 parts by weight of the stripping solution. On the other hand, what is 65 to 70 mass parts is desirable. Further, the stripping solution is preferably obtained by diluting a mixture of an acyclic nitrogen-containing compound and a cyclic nitrogen-containing compound with pure water.
- the manufacturing method of this invention may have a well-known process as a manufacturing method of the color filter for solid-state image sensors as a process other than the above as needed.
- a curing step of curing the formed colored pattern by heating and / or exposure may be included as necessary.
- the composition according to the present invention when used, for example, clogging of a nozzle or a pipe part of a coating apparatus discharge unit, contamination due to adhesion, sedimentation, or drying of the composition or pigment in the coating machine may occur. Therefore, in order to efficiently clean the contamination caused by the composition of the present invention, it is preferable to use the solvent related to the present composition as the cleaning liquid.
- the solvent related to the present composition as the cleaning liquid.
- JP-A-7-128867, JP-A-7-146562, JP-A-8-278737, JP-A-2000-273370, JP-A-2006-85140, JP-A-2006-291191 The cleaning liquids described in JP2007-2101A, JP2007-2102A, JP2007-281523A, etc.
- alkylene glycol monoalkyl ether carboxylates and alkylene glycol monoalkyl ethers are preferred.
- These solvents may be used alone or in combination of two or more. When mixing 2 or more types, it is preferable to mix the solvent which has a hydroxyl group, and the solvent which does not have a hydroxyl group.
- the mass ratio of the solvent having a hydroxyl group and the solvent having no hydroxyl group is from 1/99 to 99/1, preferably from 10/90 to 90/10, more preferably from 20/80 to 80/20.
- the ratio is particularly preferably 60/40.
- a surfactant related to the present composition described above may be added to the cleaning liquid.
- the color filter of the present invention uses the composition of the present invention, the exposure can be performed with excellent exposure margin, and the formed colored pattern (colored pixel) is excellent in pattern shape, and the pattern surface is rough and developed. Since the residue in the portion is suppressed, the color characteristics are excellent.
- the color filter of the present invention can be suitably used for a solid-state imaging device such as a CCD or CMOS, and is particularly suitable for a CCD or CMOS having a high resolution exceeding 1 million pixels.
- the color filter for a solid-state imaging device of the present invention can be used as a color filter disposed between, for example, a light receiving portion of each pixel constituting a CCD or CMOS and a microlens for condensing light.
- the coloring pattern (color pixel) in the color filter of this invention 2.0 micrometers or less are preferable, 1.0 micrometer or less is more preferable, and 0.7 micrometer or less is further more preferable.
- the size (pattern width) of the colored pattern (colored pixel) is preferably 2.5 ⁇ m or less, more preferably 2.0 ⁇ m or less, and particularly preferably 1.7 ⁇ m or less.
- the color filter of the present invention contains a triarylmethane compound, a dye having a maximum absorption wavelength in the range of 650 to 750 nm, and a curable compound, and has a minimum transmittance of 80% in the thickness direction in the wavelength range of 450 to 500 nm.
- the maximum value of the transmittance in the thickness direction in the wavelength range of 650 to 700 nm is preferably 25% or less.
- the minimum value of the transmittance in the thickness direction in the wavelength range of 450 to 500 nm is preferably 84% or more, and more preferably 90% or more.
- the maximum value of the transmittance in the thickness direction in the wavelength range of 650 to 700 nm is preferably 20% or less, and more preferably 15% or less.
- the mass ratio of the dye having the maximum absorption wavelength in the range of 650 to 750 nm with respect to the triarylmethane compound is preferably 0.2 to 1.5.
- the transmittance of the color filter refers to a glass substrate coated with the composition of the present invention so that the dry film thickness is 0.6 ⁇ m, an ultraviolet-visible near-infrared spectrophotometer (manufactured by Shimadzu Corporation, UV3600). ) Measured with a spectrophotometer (ref. Glass substrate).
- the solid-state imaging device of the present invention has the above-described color filter of the present invention.
- the configuration of the solid-state imaging device of the present invention is a configuration provided with the color filter in the present invention, and is not particularly limited as long as it is a configuration that functions as a solid-state imaging device. .
- a transfer electrode made of a plurality of photodiodes and polysilicon constituting a light receiving area of a solid-state imaging device (CCD image sensor, CMOS image sensor, etc.) is provided on a support, and the photodiode and the transfer electrode are provided on the support.
- a light condensing means for example, a microlens, etc., the same applies hereinafter
- the color filter of the present invention can be used not only for the solid-state imaging device but also for image display devices such as liquid crystal display devices and organic EL display devices, and is particularly suitable for use in liquid crystal display devices.
- the liquid crystal display device provided with the color filter of the present invention can display a high-quality image with a good display image color and excellent display characteristics.
- display devices For the definition of display devices and details of each display device, refer to, for example, “Electronic Display Device (Akio Sasaki, Kogyo Kenkyukai, 1990)”, “Display Device (Junsho Ibuki, Industrial Books Co., Ltd.) Issued in the first year).
- the liquid crystal display device is described, for example, in “Next-generation liquid crystal display technology (edited by Tatsuo Uchida, Industrial Research Co., Ltd., published in 1994)”.
- the liquid crystal display device to which the present invention can be applied is not particularly limited, and can be applied to, for example, various types of liquid crystal display devices described in the “next generation liquid crystal display technology”.
- the color filter of the present invention may be used in a color TFT (thin film transistor) type liquid crystal display device.
- the color TFT liquid crystal display device is described in, for example, “Color TFT liquid crystal display (issued in 1996 by Kyoritsu Publishing Co., Ltd.)”.
- the present invention relates to a liquid crystal display device with a wide viewing angle, such as a lateral electric field drive method such as IPS (In-Place-Switching), a pixel division method such as MVA, STN (Super-twisted nematic), TN (Twisted). Nematic), VA (Virtical Alignment), OCS (Optically Compensated.
- the color filter in the present invention can be used for a bright and high-definition COA (Color-filter On Array) system.
- COA Color-filter On Array
- the required characteristics for the color filter layer require the required characteristics for the interlayer insulating film, that is, the low dielectric constant and the resistance to the stripping solution, in addition to the normal required characteristics as described above.
- the color filter of the present invention since a dye multimer excellent in hue is used, the color purity, light transmittance, etc. are good and the color pattern (pixel) is excellent in color, so the resolution is high and the long-term durability is excellent.
- a COA type liquid crystal display device can be provided.
- a resin film may be provided on the color filter layer.
- image display methods are described, for example, on page 43 of "EL, PDP, LCD display-latest technology and market trends (issued in 2001 by Toray Research Center Research Division)".
- micro O red system micro OLED.
- image display methods are described, for example, on page 43 of "EL, PDP, LCD display-latest technology and market trends (issued in 2001 by Toray Research Center Research Division)”.
- the liquid crystal display device provided with the color filter of the present invention includes various members such as an electrode substrate, a polarizing film, a retardation film, a backlight, a spacer, and a viewing angle guarantee film.
- the color filter of the present invention can be applied to a liquid crystal display device composed of these known members.
- these components for example, “'94 Liquid Crystal Display Peripheral Materials / Chemicals Market (Kentaro Shima CMC 1994)”, “2003 Liquid Crystal Related Markets Current Status and Future Prospects (Volume 2)” Fuji Chimera Research Institute, Ltd., published in 2003) ”.
- backlighting SID meeting Digest 1380 (2005) (A. Konno et.al), Monthly Display December 2005, pages 18-24 (Yasuhiro Shima), pages 25-30 (Takaaki Yagi), etc. Are listed.
- T-2a was synthesized according to Synthesis Example 1 of JP-A No. 2000-162429. 6.0 g (10 mmol) of (T-2a) was added to a mixture of 50 mL of methylene chloride and 10 mL of water and stirred. Next, 3.19 g (10 mmol) of potassium bis (trifluoromethanesulfonyl) imide was added thereto and stirred for 2 hours. Thereafter, the aqueous layer was removed from this solution, and the methylene chloride layer was concentrated to obtain 8.2 g of (T-2).
- T-2 10.0 g, methacrylic acid 2.1 g, 2,2′-azobis (methyl isobutyrate) 0.5 g, and 1-dodecanethiol 0.8 g were dissolved in cyclohexanone 28.2 g. This solution was added dropwise to 10.0 g of cyclohexanone heated to 75 ° C. under a nitrogen stream over 2 hours, stirred for 2 hours, and then heated at 90 ° C. for 2 hours.
- T-2 8.47 g (10 mmol), dipentaerythritol hexakis (2-mercaptopropionate) (DPMP) 2.61 g (3.3 mmol) and 1-methoxy-2-propanol 22.1 g Under heating to 90 ° C.
- DPMP dipentaerythritol hexakis (2-mercaptopropionate)
- 1-methoxy-2-propanol 22.1 g Under heating to 90 ° C.
- 0.10 g of 2,2′-azobis (isobutyric acid) dimethyl was added three times every 2 hours and heated at 100 ° C. for 3 hours to contain 1-methoxy-2-containing (t-1).
- a propanol solution was obtained.
- 1.72 g (20 mmol) of methacrylic acid was added and heated to 80 ° C. under a nitrogen stream.
- the obtained filtrate was washed with 200 mL of a 50 mass% methanol aqueous solution and dried to obtain 6.33 g of (T-6).
- the obtained (T-6) had a weight average molecular weight of 9,600 and an acid value of 120 mgKOH / g.
- Monomer (X-1) 16.4 g, methacrylic acid 1.60 g, dodecyl mercaptan 0.51 g, propylene glycol 1-monomethyl ether 2-acetate (hereinafter also referred to as “PGMEA”) 46.6 g are mixed and this solution is mixed.
- PMEA propylene glycol 1-monomethyl ether 2-acetate
- compositions of Examples 1-33 and Comparative Examples 1-3 The following components were mixed, dispersed, dissolved, and filtered through a 0.45 ⁇ m nylon filter to obtain compositions of Examples 1 to 33 and Comparative Examples 1 to 3.
- Triarylmethane compound triarylmethane (A)) described in Table 4
- Dye (B) described in Table 4
- the total of the triarylmethane compound and the dye (B) is 60 parts.
- I-1) is IRGACURE (registered trademark) -OXE01
- I-2) is IRGACURE (registered trademark) -OXE02 (manufactured by BASF)
- I-3) is IRGACURE (registered trademark) -379
- I- 4) is DAROCUR (registered trademark) -TPO (all of which are manufactured by BASF).
- A represents the following structure (L4-11).
- * represents a linking site.
- Dye (A-2), Dye (A-3) In the above (A-2), the molar ratio of the repeating unit containing a dye structure, the repeating unit containing an acid group, and the repeating unit containing a polymerizable group is 51:19:30, and Mw is 8500.
- the silicon wafer on which the colored pattern is formed is fixed to the horizontal rotary table by a vacuum chuck method, and the silicon wafer substrate is rotated at a rotation speed of 50 r. p. m. While being rotated, pure water was supplied from the upper side of the rotation center in a shower form to perform a rinsing treatment, and then spray-dried. As described above, a monochromatic color filter having a colored pattern formed by the composition of the example or the comparative example was produced. Thereafter, the size of the colored pattern was measured using a length measuring SEM (scanning electron microscope) “S-9260A” (manufactured by Hitachi High-Technologies). The exposure amount at which the pattern size was 1.0 ⁇ m was determined as the optimum exposure amount.
- SEM scanning electron microscope
- Performance evaluation 5-1 Light Resistance As an index for evaluating light resistance (light fastness), a color difference ( ⁇ E * ab value) before and after light irradiation was measured. Specifically, the composition obtained above was applied onto a glass substrate so that the dry film thickness was 0.6 ⁇ m, thereby forming a coating film. This coating film was irradiated with a xenon lamp at 100,000 lux for 20 hours (equivalent to 2 million lux ⁇ h), and the color difference ( ⁇ E * ab value) before and after irradiation was measured. For the measurement of the color difference ( ⁇ E * ab value), a chromaticity meter MCPD-1000 (manufactured by Otsuka Electronics) was used.
- ⁇ E * ab ⁇ ( ⁇ L *) 2+ ( ⁇ a *) 2+ ( ⁇ b *) 2 ⁇ 1/2
- Heat resistance As an index for evaluating heat resistance (heat fastness), a color difference ( ⁇ E * ab value) before and after heating was measured. Specifically, the composition obtained above was applied onto a glass substrate so that the dry film thickness was 0.6 ⁇ m, thereby forming a coating film. This coating film was placed on a 200 ° C. hot plate so as to be in contact with the glass substrate surface, heated for 1 hour, and the color difference ( ⁇ E * ab value) before and after heating was measured. For the measurement of the color difference ( ⁇ E * ab value), a chromaticity meter MCPD-1000 (manufactured by Otsuka Electronics) was used. A smaller ⁇ E * ab value indicates better heat resistance.
- Performance Evaluation A colored pattern was formed as described below, and pattern defects were evaluated for this colored pattern.
- the said composition was apply
- a heat treatment post-bake was performed for 300 seconds using a 220 ° C. hot plate to prepare a colored film.
- a positive photoresist “FHi622BC” manufactured by FUJIFILM Electronics Materials
- the photoresist layer is subjected to pattern exposure using an i-line stepper (manufactured by Canon) at an exposure amount of 350 mJ / cm 2 , and heat treatment is performed at a temperature at which the temperature of the photoresist layer or the atmospheric temperature becomes 90 ° C. for 1 minute.
- i-line stepper manufactured by Canon
- heat treatment is performed at a temperature at which the temperature of the photoresist layer or the atmospheric temperature becomes 90 ° C. for 1 minute.
- development processing was performed with a developer “FHD-5” (manufactured by FUJIFILM Electronics Materials) for 1 minute, and further post-baking processing was performed at 110 ° C. for 1 minute to form a resist pattern.
- the resist pattern was formed with a side of 1.0 ⁇ m in consideration of etching conversion difference (pattern width reduction by etching).
- dry etching was performed according to the following procedure.
- RF power 800 W
- antenna bias 400 W
- wafer bias 200 W
- etching chamber internal pressure 4.0 Pa
- substrate temperature 50 ° C.
- mixed gas with dry etching equipment Hitachi High Technologies, U-621
- the gas type and flow rate were set to CF 4 : 80 mL / min.
- O 2 40 mL / min.
- Ar 800 mL / min.
- the first stage etching process of 80 seconds was performed.
- RF power 600 W
- antenna bias 100 W
- wafer bias 250 W
- chamber internal pressure 2.0 Pa
- substrate temperature 50 ° C.
- gas mixture type and flow rate of N 2 500 mL / min.
- O 2 50 mL / min.
- the second-stage etching process for 28 seconds was performed.
- the resist is removed by using a photoresist stripping solution “MS230C” (manufactured by FUJIFILM Electronics Materials) for 120 seconds to remove the resist, followed by washing with pure water, spin Drying was performed. Thereafter, a dehydration baking process was performed at 100 ° C. for 2 minutes. In this way, a colored pattern was formed on the glass substrate.
- MS230C photoresist stripping solution
- MS230C manufactured by FUJIFILM Electronics Materials
- the 200 colored patterns formed as described above were observed with an SEM to confirm the presence or absence of development defects. The more development defects, the worse the yield.
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Abstract
Description
上記の方法は、顔料を用いることから光や熱に対して安定であると共に、フォトリソ法によってパターニングを行うことから位置精度が充分に確保され、カラーディスプレー用カラーフィルタ等の製造に好適な方法として広く利用されてきた。
一方、特許文献2には、染料と重合性化合物とを含み、感光性を有する着色組成物において、さらに一重項酸素クエンチャーと酸化防止剤の双方を含むことを特徴とする感光性着色組成物について開示されており、上記染料として、トリアリールメタン系染料を用いることが記載されている。
また、特許文献3には、(A)光又は熱によりラジカルを発生する化合物、(B)ビニル基が置換したフェニル基を側鎖に有する重合体、(C)分子内にビニル基が置換したフェニル基を2個以上有するモノマー、(D)赤外線吸収剤、及び、(E)吸収極大を500nm~700nmの範囲に有する染料を含有することを特徴とする感光性組成物について開示されており、上記染料として、トリアリールメタン系染料を用いることが記載されている。
本発明は、上記の状況に鑑みてなされたものであり、トリアリールメタン化合物を含む組成物であって、650nm付近から長波側に感光性を有する用途にも利用可能であり、現像性に優れた組成物を提供することを目的とする。また、この組成物を用いた硬化膜、パターン形成方法、カラーフィルタ、カラーフィルタの製造方法、固体撮像素子および画像表示装置を提供することを目的とする。
具体的には、下記手段<1>により、好ましくは、<2>~<21>により、上記課題は解決された。
<1>トリアリールメタン化合物、極大吸収波長を650~750nmの範囲に有する色素、および硬化性化合物を含み、
トリアリールメタン化合物に対する、極大吸収波長を650~750nmの範囲に有する色素の質量比が0.2~1.5である組成物。
<2>トリアリールメタン化合物が、580~620nmの範囲に極大吸収波長を有する、<1>に記載の組成物。
<3>トリアリールメタン化合物と、極大吸収波長を650~750nmの範囲に有する色素の極大吸収波長の差が100~150nmである、<1>又は<2>に記載の組成物。
<4>トリアリールメタン化合物が、エチレン性不飽和結合性基を有する、<1>~<3>のいずれかに記載の組成物。
<5>トリアリールメタン化合物が多量体である、<1>~<4>のいずれかに組成物。
<6>極大吸収波長を650~750nmの範囲に有する色素が、フタロシアニン化合物、シアニン化合物、スクアリリウム化合物、ナフトキノン化合物及びアゾ化合物から選択される1種以上である、<1>~<5>のいずれかに記載の組成物。
<7>極大吸収波長を650~750nmの範囲に有する色素が、フタロシアニン化合物またはスクアリリウム化合物を含む、<1>~<6>のいずれかに記載の組成物。
<8>極大吸収波長を650~750nmの範囲に有する色素が、エチレン性不飽和結合性基を有する、<1>~<7>のいずれかに記載の組成物。
<9>極大吸収波長を650~750nmの範囲に有する色素が多量体である、<1>~<8>のいずれかに記載の組成物。
<10>極大吸収波長を500~600nmの範囲に有する色素をさらに含む、<1>~<9>のいずれかに記載の組成物。
<11>カラーフィルタ用である、<1>~<10>のいずれかに記載の組成物。
<12><1>~<11>のいずれかに記載の組成物を硬化してなる硬化膜。
<13><1>~<11>のいずれかに記載の組成物を支持体上に適用して組成物層を形成する工程と、組成物層をパターン状に露光する工程と、組成物層の未露光部を現像除去して着色パターンを形成する工程とを含むパターン形成方法。
<14><13>に記載のパターン形成方法を含む、カラーフィルタの製造方法。
<15><1>~<11>のいずれかに記載の組成物を支持体上に適用して組成物層を形成し、硬化して着色層を形成する工程、
着色層上にフォトレジスト層を形成する工程、
フォトレジスト層を露光および現像することによりフォトレジスト層をパターニングしてレジストパターンを得る工程、および
レジストパターンをエッチングマスクとして着色層をドライエッチングする工程を含む、カラーフィルタの製造方法。
<16><1>~<11>のいずれかに記載の組成物を用いて製造されたカラーフィルタまたは<14>または<15>に記載のカラーフィルタの製造方法により製造されたカラーフィルタ。
<17>トリアリールメタン化合物および極大吸収波長を650~750nmの範囲に有する色素を含み、波長450~500nmの範囲における厚み方向の透過率の最小値が80%以上で、かつ、波長650~700nmの範囲における厚み方向の透過率の最大値が25%以下である、カラーフィルタ。
<18><16>または<17>に記載のカラーフィルタを有する固体撮像素子。
<19><16>または<17>に記載のカラーフィルタを有する画像表示装置。
<21>上記重合開始剤がオキシム化合物である、<20>に記載の組成物。
<22>トリアリールメタン化合物に対する、極大吸収波長が650~750nmである化合物の質量比が、0.3~1.4である、<1>~<11>、<20>および<21>のいずれかに記載の組成物。
本明細書において、全固形分とは、組成物の全組成から溶剤を除いた成分の総質量をいう。本発明における濃度は、25℃における濃度をいう。
本明細書において「(メタ)アクリレート」はアクリレートおよびメタクリレートの双方、または、いずれかを表し、「(メタ)アクリル」はアクリルおよびメタクリルの双方、または、いずれかを表し、「(メタ)アクリロイル」はアクリロイルおよびメタクリロイルの双方、または、いずれかを表す。
本明細書において、「単量体」と「モノマー」とは同義である。本明細書における単量体は、オリゴマーおよびポリマーと区別され、重量平均分子量が2,000以下の化合物をいう。本明細書において、重合性化合物とは、重合性官能基を有する化合物のことをいい、単量体であっても、ポリマーであってもよい。重合性官能基とは、重合反応に関与する基を言う。
本明細書において、化学式中のMeはメチル基を、Etはエチル基を、Prはプロピル基を、Buはブチル基を、Phはフェニル基をそれぞれ示す。
本明細書において「工程」との語は、独立した工程だけではなく、他の工程と明確に区別できない場合であってもその工程の所期の作用が達成されれば、本用語に含まれる。
本明細書において、重量平均分子量および数平均分子量は、GPC測定によるポリスチレン換算値として定義される。本明細書において、重量平均分子量(Mw)及び数平均分子量(Mn)は、例えば、HLC-8220(東ソー製)を用い、カラムとしてTSKgel Super AWM―H(東ソー製、6.0mmID×15.0cm)を、溶離液として10mmol/L リチウムブロミドNMP(N-メチルピロリジノン)溶液を用いることによって求めることができる。
本発明の組成物は、トリアリールメタン化合物、極大吸収波長を650~750nmの範囲に有する色素、および硬化性化合物を含み、トリアリールメタン化合物に対する、極大吸収波長を650~750nmの範囲に有する色素の質量比が0.2~1.5である。
上記構成とすることにより、耐光性に優れた組成物の提供が可能になる。このような効果が得られる理由については、未だ明確ではないが、耐光性が向上する効果は以下のように推定される。トリアリールメタン化合物は、光により励起し、基底状態に戻る際に自己分解又は一重項酸素による分解が生じる。しかし、トリアリールメタン化合物より長波側に吸収を有する化合物、すなわち、極大吸収波長を650~750nmの範囲に有する色素をトリアリールメタン化合物と併用することにより、励起されたトリアリールメタン化合物が速やかに、極大吸収波長を650~750nmの範囲に有する色素にエネルギーを供給し、トリアリールメタン化合物が基底状態に戻る。その結果、耐光性が向上する。
さらに本発明の組成物は、高い耐熱性も維持できる。
また、一般的に、トリアリールメタン化合物はイオン性を有しているため凝集しやすい傾向にあり、パターンサイズがより微小な固体撮像素子用のカラーフィルタが求められる現状にあっては、現像欠陥が生じたり、パターン欠損が生じやすくなる場合がある。
パターン形成性(現像性)が必ずしも十分とは言えない場合もある。これに対して、本発明の組成物は、現像欠陥やパターン欠陥が生じることを抑制できる。
トリアリールメタン化合物は、トリアリールメタン構造を一分子中に、少なくとも1つ含む化合物である。本発明におけるトリアリールメタン化合物は、トリアリールメタン構造を一分子中に1つ含むトリアリールメタン単量体であってもよいし、一分子中に2つ以上のトリアリールメタン構造を含むトリアリールメタン多量体であってもよいし、一分子中に3つ以上のトリアリールメタン構造を含むトリアリールメタン多量体であってもよい。トリアリールメタン化合物は、トリアリールメタン多量体が好ましい。トリアリールメタン化合物は、硬化性基を有することが好ましい。硬化性基としては、エチレン性不飽和結合性基、環状エーテル基(エポキシ基、オキセタニル基など)が挙げられ、エチレン性不飽和結合性基が好ましい。
特に、トリアリールメタン化合物は、多量体であるか、エチレン性不飽和結合性基を有する単量体であることが好ましく、多量体であることがさらに好ましく、エチレン性不飽和結合性基を有する多量体であることがさらに好ましい。このような構成とすることにより、耐熱性をより向上させることができる。
本発明の組成物は、トリアリールメタン化合物を、1種のみ含んでいても良く、2種以上含んでいても良い。トリアリールメタン単量体とトリアリールメタン多量体を併用してもよい。
トリアリールメタン化合物は、染料であることが好ましい。顔料分散系では、顔料の粗大粒子による散乱の発生、分散安定性不良による粘度上昇等の問題が起きやすく、コントラスト、輝度をさらに向上させることが困難となる場合があるが、染料を用いるとこのような問題をより効果的に回避できる。
染料とは、溶剤に溶解しやすい可溶性の色素化合物を意味する。ここで、溶剤とは、任意の溶剤が挙げられ、例えば後述する溶剤の欄で例示する溶剤が挙げられる。本発明に用いられる溶剤は、例えば、25℃における溶剤へのトリアリールメタン化合物の溶解度が0.001g/100gSolventを超えるものが好ましい。
トリアリールメタン化合物と、後述する極大吸収波長を650~750nmの範囲に有する色素の極大吸収波長の差は、40~150nmであることが好ましく、80~120nmであることがより好ましい。
トリアリールメタン化合物が単量体である場合、トリアリールメタン化合物はトリアリールメタン構造を1つ含む。トリアリールメタン構造は、メタンを中心として3つのアリール基を含むものである。3つのアリール基は、それぞれ、フェニル基、ナフチル基、及び、アリール基と複素環とが縮合した環、のいずれかであることが好ましい。この場合の複素環としては、含窒素5員環または6員環が例示される。
トリアリールメタン化合物は、一般式(TP1)で表されるカチオンおよび/または一般式(TP2)で表されるカチオンであることが好ましく、一般式(TP1)で表されるカチオンがより好ましい。
一般式(TP1)および(TP2)中、Rtp1~Rtp4は、それぞれ独立して水素原子、アルキル基またはアリール基を表す。Rtp5、Rtp6、Rtp8、Rtp9およびRtp11は、それぞれ独立して置換基を表す。Rtp7は、水素原子、アルキル基、アリール基またはNRtp71Rtp72を表す。Rtp71及びRtp72は、それぞれ独立して水素原子、アルキル基又はアリール基を表す。Rtp10は、水素原子、アルキル基またはアリール基を表す。a、b及びcは、それぞれ独立して0~4の整数を表す。a、b及びcが2以上の場合、Rtp5、Rtp6、Rtp8およびRtp9のうち2つは、互いに、連結して環を形成してもよい。Rtp1~Rtp11、Rtp71及びRtp72の少なくとも1つは、アニオンを含んでいてもよい。
アルキル基の炭素数は、1~10が好ましく、1~5がより好ましく、1~3がさらに好ましい。アルキル基は、直鎖状、分岐状および環状のいずれであってもよいが、直鎖状または分岐状が好ましい。アルキル基は、無置換が好ましい。後述する置換基群Aの項で挙げる置換基が挙げられる。
アリール基の炭素数は、6~18が好ましく、6~12がより好ましく、6がさらに好ましい。アリール基が有していてもよい置換基としては、後述する置換基群Aの項で挙げた置換基が挙げられる。
Rtp7がアルキル基を表す場合、アルキル基の炭素数は、1~10が好ましく、1~5がより好ましく、1~3がさらに好ましい。アルキル基は、直鎖状、分岐状および環状のいずれであってもよいが、直鎖状が好ましい。アルキル基が有していてもよい置換基としては、後述する置換基群Aの項で挙げた置換基が挙げられる。アリール基の炭素数は、6~18が好ましく、6~12がより好ましく、6がさらに好ましい。
Rtp8は、2つのアルケニル基が互いに結合して、環を形成していることが好ましい。環は、ベンゼン環が好ましい。
一般式(TP2)中、Rtp5およびRtp6は、それぞれ独立して置換基を表し、一般式(TP1)中のRtp5およびRtp6と同義であり、好ましい範囲も同様である。
Rtp9は、アリール基が好ましく、炭素数6~12のアリール基がより好ましく、フェニル基がより好ましい。
Rtp11は、アルキル基が好ましく、炭素数1~5のアルキル基がより好ましく、炭素数1~3のアルキル基がさらに好ましい。アルキル基は、直鎖状または分岐状が好ましく、直鎖状がより好ましい。
エチレン性不飽和結合性基は、エチレン性不飽和結合のみからなってもよいし、エチレン性不飽和結合の他に連結基を含んでいてもよい。特に、エチレン性不飽和結合性基は、-L0-P0で表される基が好ましい。ここで、L0は、単結合または2価の連結基を表し、P0は、エチレン性不飽和結合を表す。
2価の連結基は、アルキレン基、アリーレン基、ヘテロ環連結基、-CH=CH-、-O-、-S-、-C(=O)-、-CO-、-NR-、-CONR-、-OC-、-SO-、-SO2-およびこれらを2以上組み合わせた基が好ましい。ここで、Rは、それぞれ独立に、水素原子、アルキル基、アリール基またはヘテロ環基を表す。
特に、2価の連結基は、アリーレン基が好ましい。
アルキレン基は、直鎖状、分岐状および環状のいずれであってもよい。アルキレン基の炭素数は、1~30が好ましく、1~20がより好ましく、5~20がさらに好ましく、5~10が特に好ましい。具体的には、メチレン基、エチレン基、プロピレン基、ブチレン基、ヘキシレン基、へプチレン基、シクロペンテニレン基、シクロへキシレン基等が好ましい。
アリーレン基の炭素数は、6~30が好ましく、6~18がより好ましく、6~12がさらに好ましい。具体的に、アリーレン基は、フェニレン基、ナフチレン基等が好ましく、フェニレン基がより好ましい。
トリアリールメタン化合物は、上述の一般式(TP1)または(TP2)において、Rtp1~Rtp11、Rtp71及びRtp72の少なくとも1つがエチレン性不飽和結合性基を含むことが好ましく、Rtp7が、エチレン性不飽和結合性基を含むことがより好ましく、Rtp71またはRtp72がエチレン性不飽和結合性基であることがさらに好ましい。
置換基としては、ハロゲン原子、アルキル基、シクロアルキル基、アルケニル基、シクロアルケニル基、アルキニル基、アリール基、ヘテロ環基、シアノ基、ヒドロキシル基、ニトロ基、カルボキシル基、アルコキシ基、アリールオキシ基、シリルオキシ基、ヘテロ環オキシ基、アシルオキシ基、カルバモイルオキシ基、アミノ基(アルキルアミノ基、アニリノ基を含む)、アシルアミノ基、アミノカルボニルアミノ基、アルコキシカルボニルアミノ基、アリールオキシカルボニルアミノ基、スルファモイルアミノ基、アルキルまたはアリールスルホニルアミノ基、メルカプト基、アルキルチオ基、アリールチオ基、ヘテロ環チオ基、スルファモイル基、スルホ基、アルキルまたはアリールスルフィニル基、アルキルまたはアリールスルホニル基、アシル基、アリールオキシカルボニル基、アルコキシカルボニル基、カルバモイル基、アリールまたはヘテロ環アゾ基、イミド基、ホスフィノ基、ホスフィニル基、ホスフィニルオキシ基、ホスフィニルアミノ基、シリル基などが挙げられる。以下詳細に記述する。
具体的には、Rtp1~Rtp11、Rtp71及びRtp72の少なくとも1つが、一般式(P)で置換された構造が挙げられる。
一般式(P)
一般式(P)中、Lは単結合または2価の連結基を表し、X1は、アニオンを表す。
-NR10-において、R10は、水素原子または炭素数1~5のアルキル基を表し、水素原子が好ましい。
フッ素原子を含むアルキレン基の炭素数は、1~10が好ましく、1~6がより好ましく、1~3がさらに好ましい。これらのアルキレン基は、パーフルオロアルキレン基がより好ましい。フッ素置換アルキレン基の具体例としては、ジフルオロメチレン基、テトラフルオロエチレン基、ヘキサフルオロプロピレン基などが挙げられる。
フッ素原子を含むアリーレン基の炭素数は、6~20が好ましく、6~14がより好ましく、6~10がさらに好ましい。フッ素原子を含むアリーレン基の具体例としては、テトラフルオロフェニレン基、ヘキサフルオロ-1-ナフチレン基、ヘキサフルオロ-2-ナフチレン基などが挙げられる。
一般式(P-1)
一般式(P-1)中、L1は、単結合または2価の連結基を表し、単結合であることが好ましい。L1が表す2価の連結基としては、炭素数1~6のアルキレン基、炭素数6~12のアリーレン基、-O-、-S-、またはこれらの組み合わせからなる基等が挙げられる。
L2は、-SO2-または-CO-を表す。
Gは、炭素原子または窒素原子を表す。
n1は、Gが炭素原子の場合2を表し、Gが窒素原子の場合1を表す。
R6は、フッ素原子を含むアルキル基またはフッ素原子を含むアリール基を表す。n1が2の場合、2つのR6はそれぞれ同一でも異なっていても良い。
R6が表すフッ素原子を含むアルキル基の炭素数は、1~10が好ましく、1~6がより好ましく、1~3がさらに好ましい。
R6が表すフッ素原子を含むアリール基の炭素数は、6~20が好ましく、6~14がより好ましく、6~10がさらに好ましい。
トリアリールメタン化合物が多量体(トリアリールメタン多量体ともいう)である場合、トリアリールメタン構造を2つ以上含み、好ましくはトリアリールメタン構造を3つ以上有する化合物である。トリアリールメタン多量体は、後述する一般式(A)及び一般式(C)で表される繰り返し単位の少なくとも一つを含んでなるか、対アニオンが、対アニオンを有する繰り返し単位を含んでなるか、又は後述する一般式(D)で表されることが好ましい。
(一般式(A)中、X1は、繰り返し単位の主鎖を表す。L1は単結合または2価の連結基を表す。Dyeは、トリアリールメタン構造を表す。)
一般式(A)中、X1は繰り返し単位の主鎖を表す。2つの*で表された部位が繰り返し単位となる。X1は、-CH2-CH2-または-CH2-C(CH3)-であることが好ましい。
式中、*1で示された部位で式(A)のX1と連結し、*2で示された部位で、式(A)のDyeと連結する。
L12は、-SO2-または-CO-を表す。
L13は、2価の連結基を表す。2価の連結基としては、L11で説明した基が挙げられ、炭素数6~18のアリーレン基(好ましくはフェニレン基)、-O-、-CO-、-S-、-NRARB-またはこれらの組み合わせからなる基が好ましく、フェニレン基と-O-と-CO-との組み合わせからなる基がより好ましい。
Gは、炭素原子または窒素原子を表す。
n2は、Gが炭素原子の場合1を表し、Gが窒素原子の場合0を表す。
R7Aは、フッ素原子を含むアルキレン基またはフッ素原子を含むアリーレン基を表す。アルキレン基の炭素数は、1~10が好ましく、1~6がより好ましく、1~3がさらに好ましい。アリーレン基の炭素数は、6~20が好ましく、6~14がより好ましく、6~10がさらに好ましい。
R7Bは、フッ素原子を含むアルキル基またはフッ素原子を含むアリール基を表す。アルキル基の炭素数は、1~10が好ましく、1~6がより好ましく、1~3がさらに好ましい。アリール基の炭素数は、6~20が好ましく、6~14がより好ましく、6~10がさらに好ましい。
L1が2価の連結基を表す場合、L1は、一般式(TP1)および(TP2)中のRtp1~Rtp11、Rtp71及びRtp72のいずれかと結合していることが好ましく、Rtp71またはRtp72と結合していることがより好ましい。
特に、(XX-1)、(XX-2)、(XX-25)および(XX-26)で表される(メタ)アクリル系連結鎖、(XX-10)~(XX-17)、(XX-27)および(XX-28)で表されるスチレン系連結鎖、および(XX-24)で表されるビニル系連結鎖から選択されることがより好ましく、スチレン系連結鎖がより好ましい。
(XX-1)~(XX-24)中、*で示された部位で上記トリアリールメタン構造と連結していることを表す。Meは、メチル基を表す。また、(XX-18)および(XX-19)中のRは、水素原子、炭素数1~5のアルキル基またはフェニル基を表す。
重合性基を含む繰り返し単位に含まれる重合性基としては、ラジカル、酸、熱により架橋可能な公知の重合性基を用いることができ、例えば、エチレン性不飽和結合を含む基、環状エーテル基(エポキシ基、オキセタン基)、メチロール基等が挙げられるが、特にエチレン性不飽和結合を含む基が好ましく、(メタ)アクリロイル基がさらに好ましく、(メタ)アクリル酸グリシジルおよび3,4-エポキシーシクロヘキシルメチル(メタ)アクリレート由来の(メタ)アクリロイル基がさらに好ましい。
また、トリアリールメタン多量体が重合性基を含む繰り返し単位を含む場合、その量は、全繰り返し単位に対し、例えば、5~40モル%が好ましく、5~35モル%がより好ましい。
酸基を含む繰り返し単位の酸基としては、カルボン酸基、スルホン酸基、リン酸基が例示され、カルボン酸基、スルホン酸基が好ましく、カルボン酸基がより好ましい。酸基を含む繰り返し単位に含まれる酸基は1種類のみであっても良いし、2種類以上であっても良い。
トリアリールメタン多量体が、酸基を含む繰り返し単位を含有する場合、酸基を有する繰り返し単位を含有する繰り返し単位の割合は、全繰り返し単位に対し、1~80モル%が好ましく、10~65%モルがより好ましい。
上記酸基以外のアルカリ可溶性基を含む繰り返し単位としては、フェノール性水酸基等を含む繰り返し単位が例示される。
トリアリールメタン多量体は、2~20個の無置換のアルキレンオキシ鎖の繰り返しからなる基を側鎖に有する繰り返し単位(以下、「(b)繰り返し単位」ということがある)を含んでいることも好ましい。
(b)繰り返し単位が有するアルキレンオキシ鎖の繰り返しの数は、2~10個が好ましく、2~15個がより好ましく、2~10個がさらに好ましい。
1つのアルキレンオキシ鎖は、-(CH2)nO-で表され、nは整数であるが、nは1~10が好ましく、1~5がより好ましく、2または3がさらに好ましい。
2~20個の無置換のアルキレンオキシ鎖の繰り返しからなる基は、アルキレンオキシ鎖が1種類のみが含まれていても良いし、2種類以上含まれていても良い。
(b)繰り返し単位は、下記一般式で表されることが好ましい。
(式中、X1は重合によって形成される連結基を表し、L1は単結合または2価の連結基を表す。Pはアルキレンオキシ鎖の繰り返しからなる基を含む基を表す。)
一般式(P)におけるX1およびL1はそれぞれ、一般式(A)におけるX1およびL1と同義であり、好ましい範囲も同様である。
Pは、アルキレンオキシ鎖の繰り返しからなる基を含む基を表し、-アルキレンオキシ鎖の繰り返しからなる基-末端原子または末端基からなることがより好ましい。
末端原子または末端基としては、水素原子、アルキル基、アリール基、水酸基が好ましく、水素原子、炭素数1~5のアルキル基、フェニル基、水酸基がより好ましく、水素原子、メチル基、フェニル基および水酸基がさらに好ましく、水素原子が特に好ましい。
トリアリールメタン多量体が他のアルカリ可溶性基を含む繰り返し単位を含む場合、全繰り返し単位に対し、例えば、1~80モル%が好ましく、10~65モル%がより好ましい。
また、酸基または他のアルカリ可溶性基を含む、全アルカリ可溶性基を含む繰り返し単位の割合は、全繰り返し単位に対し、例えば、1~80モル%が好ましく、10~65モル%がより好ましい。
トリアリールメタン多量体は、上述した繰り返し単位以外の繰り返し単位を有していても良い。具体的には、ラクトン、酸無水物、アミド、-COCH2CO-、シアノ基等の現像促進基、長鎖および環状のアルキル基、アラルキル基、アリール基、ポリアルキレンオキシド基、ヒドロキシル基、マレイミド基、アミノ基等の親疏水性調整基等から選択される少なくとも1種を含む繰り返し単位が例示される。
これらは、1種類のみ含まれていても良いし、2種類以上含まれていても良い。
導入方法として、色素構造にあらかじめ導入しておく方法、および上記の基を有するモノマーを共重合する方法が挙げられる。
トリアリールメタン多量体が、他の繰り返し単位を含む場合、その割合は、全繰り返し単位の40~80モル%が好ましい。
一般式(C)中、L3は単結合または2価の連結基を表す。DyeIIIは、トリアリールメタン構造を表す。mは0または1を表す。
mは0または1を表すが、1であることが好ましい。
アリール基およびアリーレン基の炭素数は、6~20が好ましく、6~12がより好ましい。
ヘテロ環連結基およびヘテロ環基は、5員環または6員環が好ましい。ヘテロ環連結基およびヘテロ環基が有するヘテロ原子は、酸素原子、窒素原子および硫黄原子が好ましい。ヘテロ環連結基およびヘテロ環基が有するヘテロ原子の数は、1~3個が好ましい。
一般式(D)中、L4は(n+k)価の連結基を表す。nは2~20の整数を表し、kは0~20の整数を表す。DyeIVは、トリアリールメタン構造を表し、Pは、置換基を表す。nが2以上の場合、複数のDyeIVは互いに異なっていても良く、kが2以上の場合、複数のPは互いに異なっていても良い。n+kは、2~20の整数を表す。
nとkとの合計は、2~20が好ましく、2~15がより好ましく、2~14が更に好ましく、2~8がさらにより好ましく、2~7が特に好ましく、2~6が一層好ましい。
なお、1つの多量体における、nおよびkは、それぞれ整数であるが、本発明においては、一般式(D)におけるn、kが異なる多量体を複数含んでいてもよい。従って、本発明の組成物中の、nおよびkの平均値は整数にならない場合がある。
(n+k)価の連結基は、具体的な例として、下記の構造単位または以下の構造単位が2以上組み合わさって構成される基(環構造を形成していてもよい)を挙げることができる。
また、Pが表す置換基は、繰り返し単位を有する1価のポリマー鎖であってもよい。繰り返し単位を有する1価のポリマー鎖は、ビニル化合物由来の繰り返し単位を有する1価のポリマー鎖が好ましい。kが2以上の場合、k個のPは、同一であっても、異なっていてもよい。
Pが繰り返し単位を有する1価のポリマー鎖であり、かつ、kが1の場合、Pはビニル化合物由来の繰り返し単位を2~20個(好ましくは、2~15個、更に好ましくは2~10個)有する1価のポリマー鎖が好ましい。また、Pが繰り返し単位を有する1価のポリマー鎖であり、かつ、kが2以上の場合、k個のPのビニル化合物由来の繰り返し単位の個数の平均値は、2~20個(好ましくは、2~15個、更に好ましくは2~10個)であることが好ましい。
Pが繰り返し単位を有する1価のポリマー鎖の場合、kが1の場合におけるPの繰り返し単位の数、kが2以上の場合におけるk個のPの繰り返し単位の個数の平均値は、核磁気共鳴(NMR)により求めることができる。
Pが、酸基を含む繰り返し単位を含む場合、酸基を含む繰り返し単位の割合は、Pの全繰り返し単位に対して、10~80モル%が好ましく、10~65モル%がより好ましい。
Pが、硬化性基を有する繰り返し単位を含む場合、硬化性基を有する繰り返し単位の割合は、Pの全繰り返し単位に対して、10~80モル%が好ましく、10~65モル%がより好ましい。
一般式(D)において、DyeIVが表すトリアリールメタン構造は、トリアリールメタン単量体が有する任意の水素原子を1個以上取り除いた構造であって、トリアリールメタン単量体の一部がL4に結合してなるものであってもよい。また、主鎖または側鎖にトリアリールメタン構造を有する繰り返し単位を含むポリマー鎖であってもよい。上記ポリマー鎖は、トリアリールメタン構造を含んでいれば特に定めるものではないが、(メタ)アクリル系樹脂、スチレン系樹脂、および、(メタ)アクリル/スチレン系樹脂から選ばれる1種であるであることが好ましい。ポリマー鎖の繰り返し単位としては、特に定めるものではないが、上述した一般式(A)で表される繰り返し単位、上述した一般式(C)で表される繰り返し単位などが挙げられる。また、ポリマー鎖を構成する全繰り返し単位中における、トリアリールメタン構造を有する繰り返し単位の合計は、5~60モル%であることが好ましく、10~50モル%がより好ましく、20~40モル%がさらに好ましい。
上記ポリマー鎖は、トリアリールメタン構造を有する繰り返し単位の他に、上述した他の繰り返し単位などを含んでいてもよい。他の繰り返し単位として、酸基を有する繰り返し単位および硬化性基を有する繰り返し単位から選ばれる1種以上を有することが好ましい。
上記ポリマー鎖が硬化性基を有する繰り返し単位を含む場合、硬化性基を有する繰り返し単位の割合は、ポリマー鎖の全繰り返し単位100モルに対し、例えば、5~50モルが好ましく、10~40モルがより好ましい。
上記ポリマー鎖が酸基を有する繰り返し単位を含む場合、酸基を有する繰り返し単位の割合は、ポリマー鎖の全繰り返し単位100モルに対し、例えば、5~50モルが好ましく、10~40モルがより好ましい。
(1)カルボキシル基、ヒドロキシル基、アミノ基等から選択される官能基を末端に導入した化合物と、トリアリールメタン構造を有する酸ハライド、トリアリールメタン構造を有するアルキルハライド、あるいはトリアリールメタン構造を有するイソシアネート等と、を高分子反応させる方法。
(2)末端に炭素-炭素二重結合を導入した化合物と、トリアリールメタン構造を有するチオール化合物と、をマイケル付加反応させる方法。
(3)末端に炭素-炭素二重結合を導入した化合物と、トリアリールメタン構造を有するチオール化合物と、をラジカル発生剤存在下で反応させる方法。
(4)末端に複数のチオール基を導入した多官能チオール化合物と、炭素-炭素二重結合およびトリアリールメタン構造とを有する化合物と、をラジカル発生剤存在下で反応させる方法。
(5)トリアリールメタン構造を有するチオール化合物の存在下で、ビニル化合物をラジカル重合する方法。
トリアリールメタン化合物は、1種単独でまたは2種以上を組み合わせて含有することができる。
トリアリールメタン化合物がカチオンの形態をとる場合、対アニオンを含む。対アニオンとしては、特に定めるものではなく、公知の対アニオンを採用できる。対アニオンは、トリアリールメタン化合物が有するカチオンの数に応じて定められる。
対アニオンは、トリアリールメタン化合物と同一分子内にあってもよいし、同一分子外にあってもよい。対アニオンが同一分子内にあるとは、カチオンと対アニオンが共有結合を介して結合している場合をいう。
対アニオンは、トリアリールメタン化合物のカチオン部と対となるアニオン部のみからなっていてもよいし、アニオン部に加え、他の部位を有していても良い。対アニオンは多量体(以下、アニオン多量体ともいう)であってもよい。トリアリールメタン化合物が多量体の場合、対アニオンも、対アニオンを有する繰り返し単位として、トリアリールメタン化合物多量体に含まれていてもよい。
以下、本発明で用いられる対アニオンの例について説明する。
(一般式(A1)中、R1およびR2はそれぞれ独立して-SO2-または-CO-を表す。)
一般式(A1)中、R1およびR2の少なくとも1つが-SO2-を表すことが好ましく、R1およびR2の両方が-SO2-を表すことがより好ましい。
一般式(A1-1)
(一般式(A1-1)中、R1およびR2はそれぞれ独立して-SO2-または-CO-を表す。X1およびX2は、それぞれ独立してアルキレン基またはアリーレン基を表す。)
一般式(A1-1)中、R1およびR2は、一般式(A1)中のR1およびR2と同義であり、好ましい範囲も同様である。
X1がアルキレン基を表す場合、アルキレン基の炭素数は、1~8が好ましく、1~6がより好ましい。X1がアリーレン基を表す場合、アリーレン基の炭素数は、6~18が好ましく、6~12がより好ましく、6がさらに好ましい。X1が置換基を有する場合、フッ素原子で置換されていることが好ましい。
X2は、アルキレン基またはアリーレン基を表し、アルキレン基が好ましい。アルキレン基の炭素数は、1~8が好ましく、1~6がより好ましく、1~3がさらに好ましく、1が特に好ましい。X2が置換基を有する場合、フッ素原子で置換されていることが好ましい。
(一般式(A2)中、R3は、-SO2-または-CO-を表す。R4およびR5はそれぞれ独立して-SO2-、-CO-または-CNを表す。)
一般式(A2)中、R3~R5の少なくとも1つが-SO2-を表すことが好ましく、R3~R5の少なくとも2つが-SO2-を表すことがより好ましい。
上記一般式(A1)で表される基を含む対アニオンの具体例としては、R1がハロゲン原子、ハロゲン原子で置換されていてもよいアルキル基、ハロゲン原子で置換されていてもよいアリール基と結合している場合が例示される。
上記一般式(A2)で表される基を含む対アニオンの具体例としては、R4およびR5が、それぞれ、ハロゲン原子、ハロゲン原子で置換されていてもよいアルキル基、ハロゲン原子で置換されていてもよいアリール基である場合が例示される。
その他の対アニオンの具体例としては、以下が挙げられるが、本発明はこれらに限定されるものではない。
対アニオンが含んでいてもよいラジカル重合性基としては、ラジカル、酸、熱により架橋可能な公知の重合性基が挙げられる。具体的には、(メタ)アクリル基、スチレン基、ビニル基、環状エーテル基およびメチロール基が挙げられ、(メタ)アクリル基、スチレン基、ビニル基および環状エーテル基から選択される少なくとも1種が好ましく、(メタ)アクリル基、スチレン基およびビニル基から選択される1種がより好ましく、(メタ)アクリル基またはスチレン基がさらに好ましい。
対アニオンが含んでいてもよいラジカル重合性基の数は、1~3が好ましく、1がより好ましい。
ラジカル重合性基を含む対アニオンは、例えば、下記一般式(b)で表されることが好ましい。
(一般式(B)中、Pはラジカル重合性基を表す。Lは単結合または2価の連結基を表す。anionは、-SO3 -、-COO-、-PO4 -、上記一般式(A1)で表される構造および上記一般式(A2)で表される構造を表す。)
一般式(b)中、Lが2価の連結基を表す場合、炭素数1~30のアルキレン基(例えば、メチレン基、エチレン基、トリメチレン基、プロピレン基、ブチレン基等)、炭素数6~30のアリーレン基、ヘテロ環連結基、-CH=CH-、-O-、-S-、-C(=O)-、-CO-、-NR-、-CONR-、-OC-、-SO-、-SO2-およびこれらを2以上組み合わせた連結基が好ましい。ここで、Rは、それぞれ独立に、水素原子、アルキル基、アリール基またはヘテロ環基を表す。
特に、連結基は、炭素数1~10のアルキレン基(好ましくは、-(CH2)n-(nは1~10の整数))、炭素数6~12のアリーレン基(好ましくはフェニレン基、ナフチレン基)、-NH-、-CO-、-O-および-SO2-を2以上組み合わせた連結基が好ましい。
多量体構造を含む対アニオンは、下記一般式(c)および/または下記一般式(d)で表される構造を有することが好ましい。
(一般式(c)中、X1は、繰り返し単位の主鎖を表す。L1は単結合または2価の連結基を表す。anionは、-SO3 -、-COO-、-PO4 -、上記一般式(A1)で表される構造および上記一般式(A2)で表される構造を表す。)
特に、L1は、単結合、または、炭素数1~10のアルキレン基(好ましくは、-(CH2)n-(nは1~10の整数))、炭素数6~12のアリーレン基(好ましくはフェニレン基、ナフチレン基)、-NH-、-CO-、-O-および-SO2-を2以上組み合わせた2価の連結基が好ましい。
(一般式(d)中、L2およびL3は、それぞれ独立して単結合または2価の連結基を表す。anionは、-SO3 -、-COO-、-PO4 -、上記一般式(A1)で表される構造および上記一般式(A2)で表される構造を表す。)
L2は、炭素数6~12のアリーレン基(特にフェニレン基)が好ましい。炭素数6~30のアリーレン基は、フッ素原子で置換されていることが好ましい。
L3は、炭素数6~12のアリーレン基(特にフェニレン基)と-O-との組み合わせからなる基が好ましく、少なくとも1種の炭素数6~12のアリーレン基がフッ素原子で置換されていることが好ましい。
アニオン多量体に含まれるアニオン多量体の原料であるラジカル重合性基を有するアニオンモノマー化合物の量は、5%以下が好ましく、より好ましくは、1%以下である。
アニオン多量体に含まれるハロゲンイオン含有量としては、10~3000ppm以下が好ましく、10~2000ppmがより好ましく、10~1000ppmがさらに好ましい。
アニオン多量体の具体例を以下に示すが、本発明はこれらに限定されるものではない。
極大吸収波長を650~750nmの範囲に有する色素(以下、色素(B)ともいう)は、最大吸収波長を650~750nmの範囲に有する。また、色素(B)は、波長450~500nmの範囲に極大吸収波長を有さないことが好ましい。
色素(B)の構造は、特に制限なく公知のものが使用できるが、フタロシアニン化合物、シアニン化合物、スクアリリウム化合物、ナフトキノン化合物及びアゾ化合物が好ましく、フタロシアニン化合物、シアニン化合物、スクアリリウム化合物及びアゾ化合物がより好ましく、フタロシアニン化合物、シアニン化合物及びスクアリリウム化合物がさらに好ましく、フタロシアニン化合物及びはスクアリリウム化合物が特に好ましく、フタロシアニン色素が一層好ましい。
特にイオン性を有する化合物(フタロシアニン化合物等)を添加した場合、現像不良や硬化不良によるパターン欠損をより抑制できる。この理由は推定であるが、イオン性を有するトリアリールメタン化合物と、イオン性を有する化合物が相互作用することにより、同一分子での凝集がより抑制でき、パターン欠損を抑制できると推定される。
また、トリアリールメタン化合物と極大吸収波長が650~750nmである化合物の極大吸収波長の差は、50~200nmが好ましく、70~180nmがより好ましく、100~150nmがさらに好ましい。
R1~R16がアルコキシ基を表す場合、アルコキシ基の炭素数は、1~18が好ましく、1~15がより好ましく、1~12がさらに好ましい。アルコキシ基のアルキル鎖の部分は、直鎖または分岐鎖が好ましい。アルコキシ基は置換基を有していても良く、置換基は、エチレン性不飽和結合性基が好ましく、ビニル基がより好ましい。
R1~R16がアリールアルコキシ基を表す場合、アリールアルコキシ基の炭素数は、7~18が好ましく、7~12がより好ましい。
R1~R16がヘテロ環アルコキシ基を表す場合、ヘテロ環は、単環であっても多環であってもよく、また、芳香族であっても非芳香族であってもよい。ヘテロ環を構成するヘテロ原子の数は1~3が好ましい。ヘテロ原子は窒素原子が好ましい。
R1~R16がアルキルチオ基を表す場合、アルキルチオ基の炭素数は、1~18が好ましく、1~15がより好ましく、1~12がさらに好ましい。
R1~R16がアリールチオ基を表す場合、アリールチオ基の炭素数は、6~18が好ましく、6~12がより好ましい。
R1~R16がヘテロ環チオ基を表す場合、ヘテロ環は上記ヘテロ環アルコキシ基で説明したヘテロ環と同義である。
また、R3、R7、R11及びR15がアルコキシ基、アリールアルコキシ基、ヘテロ環アルコキシ基、アミノ基、アルキルチオ基、アリールチオ基またはヘテロ環チオ基であり、残りが水素原子またはハロゲン原子であることも好ましい。
また、R1、R4、R5、R8、R9、R12、R13及びR16がアルコキシ基、アリールアルコキシ基、ヘテロ環アルコキシ基、アミノ基、アルキルチオ基、アリールチオ基またはヘテロ環チオ基であり、残りが水素原子またはハロゲン原子であることも好ましい。
また、R1、R5、R9、及びR13がアルコキシ基、アリールアルコキシ基、ヘテロ環アルコキシ基、アミノ基、アルキルチオ基、アリールチオ基またはヘテロ環チオ基であり、残りが水素原子またはハロゲン原子であることも好ましい。
また、R2、R6、R10、及びR14がアルコキシ基、アリールアルコキシ基、ヘテロ環アルコキシ基、アミノ基、アルキルチオ基、アリールチオ基またはヘテロ環チオ基であり、残りが水素原子またはハロゲン原子であることも好ましい。
環Z1及び環Z2は、オキサゾール、ベンゾオキサゾール、オキサゾリン、チアゾール、チアゾリン、ベンゾチアゾール、インドレニン、ベンゾインドレニン、1,3-チアジアジン等が挙げられ、ベンゾインドレニンが好ましい。環Z1及び環Z2が有していてもよい置換基は、上記置換基群Aで挙げた置換基と同様であり、炭素数1~6のアルキル基または炭素数2~6のアルケニル基が好ましく、炭素数1~3のアルキル基または炭素数2~4のアルケニル基がより好ましい。
lは0以上3以下の整数を表し、1または2が好ましく、1がより好ましい。
X-は上記トリアリールメタン化合物で挙げた対アニオンが挙げられ、好ましい範囲も同様である。X-は、シアニン化合物の色素骨格と連結していても良く、又は色素多量体の一部(高分子鎖等)と連結しても良い。
Y-は、対アニオンを表す。対アニオンは上述した、アニオンから好ましく選択される。
nは、0以上3以下の整数を表し、一般式(PM-1)中のlと好ましい範囲が同様である。
A1及びA2は、それぞれ独立に、酸素原子、硫黄原子、セレン原子、炭素原子又は窒素原子を表す。炭素原子、窒素原子または硫黄原子が好ましく、炭素原子がより好ましい。
R1及びR2は、それぞれ独立に、置換基を有していてもよい1価の炭素数1~20の脂肪族炭化水素基を表し、炭素数1~6のアルキル基または炭素数2~6のアルケニル基が好ましく、炭素数1~3のアルキル基または炭素数2~4のアルケニル基がより好ましい。
R3及びR4は、それぞれ独立に1価の炭素数1~6の脂肪族炭化水素基を表すか、1個のR3と1個のR4とが一緒になって形成された2価の炭素数2~6の脂肪族炭化水素基を表し、1価の炭素数1~6の脂肪族炭化水素基が好ましい。炭素数1~6の脂肪族炭化水素基は、炭素数1~6のアルキル基が好ましく、炭素数1~3のアルキル基がより好ましく、メチル基またはエチル基がより好ましい。
aおよびbは、それぞれ独立に、0以上2以下の整数を表し。1または2が好ましく、2がより好ましい。
特に、A及びBは、置換基を有するアリール基が好ましく、置換基を有するフェニル基がより好ましい。置換基は、水酸基および-NR1R2が好ましい。-NR1R2におけるR1およびR2は、炭素数6~12のアリール基が好ましく、フェニル基がより好ましい。
色素(B)は、多量体であることも好ましい。色素(B)が多量体である場合、重量平均分子量としては、2,000~20,000が好ましく、6,000~15,000がより好ましい。
また、色素(B)の重量平均分子量(Mw)と、数平均分子量(Mn)との比〔(Mw)/(Mn)〕は1.0~3.0であることが好ましく、1.6~2.5であることがさらに好ましく、1.6~2.0であることが特に好ましい。
色素(B)が多量体である場合、一般式(A-1)で表される繰り返し単位または一般式(C-1)で表される繰り返し単位を含む色素多量体や、一般式(D-1)で表わされる色素多量体が例示され、一般式(D-1)で表わされる構造がより好ましい。
一般式(A-1)
(一般式(A-1)中、X1は主鎖を形成する基を表し、L1は単結合または2価の連結基を表す。DyeIは色素(B)の色素構造を表す。)
以下、一般式(A-1)について詳細に説明する。
L1が表わす2価の連結基としては、DyeIとイオン結合または配位結合可能な基であってもよい。この場合、アニオン性基またはカチオン性基のどちらでもよい。
アニオン性基としては、-COO-、-PO3H-、-SO3 -、-SO3NH-、-SO3N-CO-等が挙げられ、-COO-、-PO3H-、-SO3 -が好ましい。
カチオン性基としては、置換または無置換のオニウムカチオン(例えば、アンモニウム、ピリジニウム、イミダゾリウムおよびホスホニウム等)が挙げられ、特にアンモニウムカチオンが好ましい。
L1がDyeIとイオン結合または配位結合可能な基を有する場合、L1は、DyeIが有しているアニオン部(-COO-、-SO3 -、-O-等)やカチオン部(上記オニウムカチオンや金属カチオン等)と結合することができる。
付加重合には公知の付加重合(ラジカル重合、アニオン重合、カチオン重合)が適用できるが、このうち、特にラジカル重合により合成することが反応条件を穏和化でき、色素構造を分解させないため好ましい。ラジカル重合には、公知の反応条件を適用することができる。
中でも、一般式(A-1)で表される繰り返し単位を有する色素多量体は、耐熱性の観点から、エチレン性不飽和結合性基を有する色素単量体を用いてラジカル重合して得られたラジカル重合体であることが好ましい。
次に、一般式(C-1)で表される色素多量体について詳細を説明する。
一般式(C-1)
(一般式(C-1)中、L3は単結合または2価の連結基を表す。DyeIIIは、色素(B)の色素構造を表す。mは0または1を表す。)
mは0または1を表すが、1であることが好ましい。
色素(B)は、上記一般式(A-1)または一般式(C-1)を含む多量体である場合、さらに、他の繰り返し単位を含んでいても良い。
他の繰り返し単位としては、酸基等のアルカリ可溶性基を含む繰り返し単位、重合性基を含む繰り返し単位等が例示され、酸基等のアルカリ可溶性基を含む繰り返し単位を少なくとも含むことが好ましい。これらの繰り返し単位は、それぞれ、1種類のみ含んでいても良いし、2種類以上含んでいても良い。以下、これらの繰り返し単位の詳細は、上述のトリアリールメタン多量体で述べたものと同義であり、好ましい範囲も同様である。
また、色素(B)が有する酸基を含むアルカリ可溶性基量は、色素1gに対し0.3mmol~2.0mmolであることが好ましく、0.4mmol~1.5mmolであることがさらに好ましく、0.5mmol~1.0mmolであることが特に好ましい。
色素(B)が有する重合性基量は、色素(B)1gに対し0.1~2.0mmolであることが好ましく、0.2~1.5mmolであることがさらに好ましく、0.3~1.0mmolであることが特に好ましい。
また、色素(B)が重合性基を有する繰り返し単位を含有する繰り返し単位の割合は、全繰り返し単位100モルに対し、例えば、5~50モルが好ましく、10~20モルがより好ましい。
次に、一般式(D-1)で表される色素多量体について詳細を説明する。
一般式(D-1)
(一般式(D-1)中、L4は(n+m)価の連結基を表す。nは2~20の整数を表す。mは0~20の整数を表す。DyeIVは、色素構造を表す。Wは酸基又は酸基を有する基である。)
nが2以上の場合、それぞれのDyeIVは、同一でも異なっていてもよい。
Wは酸基又は酸基を有する基であり、例えばカルボキシル基、スルホ基、ホスフォノ基、ホスフォノキシ基、カルボキシメチル基、1-カルボキシエチル基、2-カルボキシエチル基、1-カルボキシプロピル基、3-カルボキシプロピル基、4-カルボキシブチル基、5-カルボキシペンチル基、6-カルボキシヘキシル基、1,2-ジカルボキシエチル基、1,3-ジカルボキシプロピル基、2,3-ジカルボキシプロピル基、2-カルボキシフェニル基、3-カルボキシフェニル基、4-カルボキシフェニル基、2,4-ジカルボキシフェニル基、2,5-ジカルボキシフェニル基、2-カルボキシナフチル基、スルホメチル基、4-スルホブチル基、2-スルホフェニル基、3-スルホフェニル基、ホスフォノメチル基、ホスフォノキシメチル基、ポリメタクリル酸基、ポリ(メタクリル酸基・メタクリル酸メチル基)等が挙げられるが、特にカルボキシル基を有する基であることが好ましい。
mが2以上の場合、Wは1種であっても2種以上であっても良い。
一般式(D-1)において、nが2の場合、L4で表される2価の連結基としては、炭素数1~30の置換もしくは無置換のアルキレン基(例えば、メチレン基、エチレン基、トリメチレン基、プロピレン基、ブチレン基など)、炭素数6~30の置換もしくは無置換のアリーレン基(例えば、フェニレン基、ナフチレン基等)、置換もしくは無置換のヘテロ環連結基、-CH=CH-、-O-、-S-、-NR-(Rは、それぞれ独立に、水素原子、アルキル基、アリール基、またはヘテロ環基を表す。)、-C(=O)-、-SO-、-SO2-、およびこれらを2個以上連結して形成される連結基が好適に挙げられる。
特に、炭素数1~6の無置換のアルキレン基、-O-、-C(=O)-、-S-の組み合わせからなる基が好ましい。
以下、L4で表される(n+m)価の連結基の具体例を示すが、これらに限定されるものではない。
また、特開2007-277514号公報の請求項1に記載の一般式(1)で表される高分子化合物であって、A1が極大吸収波長を650~750nmの範囲に有する色素である化合物も好ましく用いることができ、これらの内容は本明細書に組み込まれる。より具体的には、特開2007-277514号公報の請求項1に記載の一般式(1)で表される高分子化合物であって、A1がフタロシアニン化合物、シアニン化合物、スクアリリウム化合物及びアゾ化合物から選択される化合物の水素原子を1つ抜いた基であることが好ましい。
本発明の組成物は硬化性化合物を含有する。硬化性化合物としては、重合性化合物、熱硬化性化合物、アルカリ可溶性樹脂等が例示される。これらの硬化性化合物の合計量は、本発明の組成物の固形分の1~80質量%が好ましく、2~30質量%がより好ましい。
本発明の組成物は、重合性化合物を含有することが好ましい。
重合性化合物としては、ラジカル、酸、熱により架橋可能な公知の重合性化合物を用いることができ、例えば、エチレン性不飽和結合性基、環状エーテル(エポキシ、オキセタン)、メチロール等を含む重合性化合物が挙げられる。重合性化合物は、感度の観点から、末端エチレン性不飽和結合性基を少なくとも1個、好ましくは2個以上有する化合物から好適に選ばれる。中でも、4官能以上の多官能重合性化合物が好ましく、5官能以上の多官能重合性化合物がさらに好ましい。重合性化合物はラジカル重合性化合物が好ましい。
これらの具体的な化合物としては、特開2009-288705号公報の段落番号〔0095〕~〔0108〕に記載されている化合物を本発明においても好適に用いることができる。
多官能カルボン酸にグリシジル(メタ)アクリレート等の環状エーテル基とエチレン性不飽和基を有する化合物を反応させ得られる多官能(メタ)アクリレートなども挙げることができる。
また、その他の好ましい重合性化合物として、特開2010-160418号公報、特開2010-129825号公報、特許第4364216号明細書等に記載される、フルオレン環を有し、エチレン性不飽和基を2官能以上有する化合物、カルド樹脂も使用することが可能である。
上記一般式(MO-1)~(MO-5)で表される重合性化合物の各々において、複数存在するRの少なくとも1つは、-OC(=O)CH=CH2、または、-OC(=O)C(CH3)=CH2で表される基を表す。
上記一般式(MO-1)~(MO-5)で表される重合性化合物の具体例としては、特開2007-269779号公報の段落番号0248~段落番号0251に記載されている化合物を本発明においても好適に用いることができる。
酸基を有する多官能モノマーの好ましい酸価としては、0.1mgKOH/g~40mgKOH/gであり、特に好ましくは5mgKOH/g~30mgKOH/gである。多官能モノマーの酸価が低すぎると現像溶解特性が落ち、高すぎると製造や取扱いが困難になり光重合性能が落ち、画素の表面平滑性等の硬化性が劣るものとなる。従って、異なる酸基の多官能モノマーを2種以上併用する場合、或いは酸基を有しない多官能モノマーを併用する場合、全体の多官能モノマーとしての酸価が上記範囲に入るように調整することが好ましい。
カプロラクトンを由来とする直鎖エステル構造を有する多官能性単量体としては、その分子内にカプロラクトンを由来とする直鎖エステル構造を有する限り特に限定されるものではないが、例えば、トリメチロールエタン、ジトリメチロールエタン、トリメチロールプロパン、ジトリメチロールプロパン、ペンタエリスリトール、ジペンタエリスリトール、トリペンタエリスリトール、グリセリン、ジグリセロール、トリメチロールメラミン等の多価アルコールと、(メタ)アクリル酸およびε-カプロラクトンをエステル化することにより得られる、ε-カプロラクトン変性多官能(メタ)アクリレートを挙げることができる。なかでも下記一般式(Z-1)で表されるカプロラクトンを由来とする直鎖エステル構造を有する多官能性単量体が好ましい。
本発明において、カプロラクトンを由来とする直鎖エステル構造を有する多官能性単量体は、単独でまたは2種以上を混合して使用することができる。
上記一般式(Z-4)中、アクリロイル基およびメタクリロイル基の合計は3個または4個であり、mは各々独立に0~10の整数を表し、各mの合計は0~40の整数である。但し、各mの合計が0の場合、Xのうちいずれか1つはカルボキシル基である。
上記一般式(Z-5)中、アクリロイル基およびメタクリロイル基の合計は5個または6個であり、nは各々独立に0~10の整数を表し、各nの合計は0~60の整数である。但し、各nの合計が0の場合、Xのうちいずれか1つはカルボキシル基である。
上記一般式(Z-5)中、nは、0~6の整数が好ましく、0~4の整数がより好ましい。
また、各nの合計は、3~60の整数が好ましく、3~24の整数がより好ましく、6~12の整数が特に好ましい。
また、一般式(Z-4)または一般式(Z-5)中の-((CH2)yCH2O)-または-((CH2)yCH(CH3)O)-は、酸素原子側の末端がXに結合する形態が好ましい。
具体的には、下記式(a)~(f)で表される化合物(以下、「例示化合物(a)~(f)」ともいう。)が挙げられ、中でも、例示化合物(a)、(b)、(e)、(f)が好ましい。
重合性化合物の市販品としては、ウレタンオリゴマーUAS-10、UAB-140(山陽国策パルプ製)、UA-7200(新中村化学製)、DPHA-40H(日本化薬製)、UA-306H、UA-306T、UA-306I、AH-600、T-600、AI-600(共栄製)などが挙げられる。
また、組成物に含有される他の成分(例えば、光重合開始剤、被分散体、アルカリ可溶性樹脂等)との相溶性、分散性に対しても、重合性化合物の選択・使用法は重要な要因であり、例えば、低純度化合物の使用や2種以上の併用により相溶性を向上させうることがある。また、支持体などの硬質表面との密着性を向上させる観点で特定の構造を選択することもあり得る。
本発明の組成物は、重合性化合物を、1種類のみを含んでいてもよいし、2種類以上含んでいてもよい。2種類以上含む場合は、その合計量が上記範囲となることが好ましい。
本発明の組成物は、重合性化合物を含有する場合、更に光重合開始剤を含有することが好ましい。
上記光重合開始剤としては、上記重合性化合物の重合を開始する能力を有する限り、特に制限はなく、公知の光重合開始剤の中から適宜選択することができる。例えば、紫外線領域から可視の光線に対して感光性を有するものが好ましい。また、光励起された増感剤と何らかの作用を生じ、活性ラジカルを生成する活性剤であってもよく、モノマーの種類に応じてカチオン重合を開始させるような開始剤であってもよい。
また、上記光重合開始剤は、約300nm~800nm(330nm~500nmがより好ましい。)の範囲内に少なくとも約50の分子吸光係数を有する化合物を、少なくとも1種含有していることが好ましい。
具体的には、トリハロメチルトリアジン化合物としては、以下の化合物が例示される。なお、Phはフェニル基である。
トリアリールイミダゾール化合物、ベンゾイミダゾール化合物としては、以下の化合物が例示される。
特に、本発明の組成物を固体撮像素子が備えるカラーフィルタの作製に使用する場合には、微細なパターンをシャープな形状で形成する必要があるために、硬化性とともに未露光部に残渣がなく現像されることが重要である。このような観点からは、光重合開始剤としてはオキシム化合物を使用することが特に好ましい。特に、固体撮像素子において微細なパターンを形成する場合、硬化用露光にステッパー露光を用いるが、この露光機はハロゲンにより損傷される場合があり、光重合開始剤の添加量も低く抑える必要があるため、これらの点を考慮すれば、固体撮像素子の如き微細パターンを形成するには光重合開始剤としては、オキシム化合物を用いるのが特に好ましい。
ヒドロキシアセトフェノン系開始剤としては、IRGACURE(登録商標)-184、DAROCUR(登録商標)-1173、IRGACURE(登録商標)-500、IRGACURE(登録商標)-2959、IRGACURE(登録商標)-127(商品名:いずれもBASF製)を用いることができる。アミノアセトフェノン系開始剤としては、市販品であるIRGACURE(登録商標)-907、IRGACURE(登録商標)-369、および、IRGACURE(登録商標)-379(商品名:いずれもBASF製)を用いることができる。アミノアセトフェノン系開始剤として、365nmまたは405nm等の長波光源に吸収波長がマッチングされた特開2009-191179号公報に記載の化合物も用いることができる。また、アシルホスフィン系開始剤としては市販品であるIRGACURE(登録商標)-819やDAROCUR(登録商標)-TPO(商品名:いずれもBASF製)を用いることができる。
市販品ではIRGACURE(登録商標)-OXE01(BASF製)、IRGACURE(登録商標)-OXE02(BASF製)も好適に用いられる。
オキシム化合物としては、TRONLY TR-PBG-304、TRONLY TR-PBG-309、TRONLY TR-PBG-305(常州強力電子新材料有限公司(CHANGZHOU TRONLY NEW ELECTRONIC MATERIALS CO.,LTD)製)、アデカアークルズNCI-831、アデカアークルズNCI-930(ADEKA製)などの市販品も使用できる。
また、オキシム化合物の特定部位に不飽和結合を有する特開2009-242469号公報に記載の化合物も、重合不活性ラジカルから活性ラジカルを再生することで高感度化を達成でき好適に使用することができる。
具体的には、光重合開始剤であるオキシム化合物としては、下記一般式(OX-1)で表される化合物が好ましい。なお、オキシムのN-O結合が(E)体のオキシム化合物であっても、(Z)体のオキシム化合物であっても、(E)体と(Z)体との混合物であってもよい。
一般式(OX-1)中、Rで表される一価の置換基としては、一価の非金属原子団であることが好ましい。
一価の非金属原子団としては、アルキル基、アリール基、アシル基、アルコキシカルボニル基、アリールオキシカルボニル基、複素環基、アルキルチオカルボニル基、アリールチオカルボニル基等が挙げられる。また、これらの基は、1以上の置換基を有していてもよい。また、前述した置換基は、さらに他の置換基で置換されていてもよい。
置換基としてはハロゲン原子、アリールオキシ基、アルコキシカルボニル基またはアリールオキシカルボニル基、アシルオキシ基、アシル基、アルキル基、アリール基等が挙げられる。
化合物のモル吸光係数は、公知の方法を用いることができるが、具体的には、例えば、紫外可視分光光度計(Varian社製Carry-5 spectrophotometer)にて、酢酸エチル溶媒を用い、0.01g/Lの濃度で測定することが好ましい。
本発明の組成物は、光重合開始剤を、1種類のみを含んでいてもよいし、2種類以上含んでいてもよい。2種類以上含む場合は、その合計量が上記範囲となることが好ましい。
熱硬化性化合物としては、例えば、熱硬化性官能基を有する化合物を用いることができる。熱硬化性化合物とは、加熱により膜硬化を行えるものをいい、通常、180℃以上の加熱で硬化する化合物をいう。
熱硬化性官能基としては、例えば、エポキシ基、メチロール基、アルコキシメチル基、アシルオキシメチル基、イソシアネート基、ビニルエーテル基、およびメルカプト基から選ばれる少なくとも1つの基を有するものが好ましい。熱硬化性化合物としては、一分子内に熱硬化性官能基を2つ以上で有するものがより好ましく、1分子内にエポキシ基を2つ以上有する化合物がさらに好ましい。
また、熱硬化性化合物は、エポキシ系化合物、メラミン系化合物(例えば、アルコキシメチル化、アシルオキシメチル化メラミン化合物)、ウレア系化合物(例えば、アルコキシメチル化、アシルオキシメチル化ウレア化合物)、フェノール系化合物(例えば、ヒドロキシメチル化またはアルコキシメチル化フェノール系化合物または樹脂、およびアルコキシメチルエーテル化フェノール化合物)等が好ましい例として挙げられ、エポキシ系化合物、メラミン系化合物がより好ましく、エポキシ系化合物がさらに好ましい。
これらの化合物の具体例としては、特開2014-089408号公報の段落0085~0125に記載の化合物が例示され、これらの内容は本明細書に組み込まれる。また、上記重合性化合物のうち、熱硬化性化合物に該当するものも、本発明の熱硬化性化合物の好ましい例として例示される。
本発明の組成物は、トリアリールメタン化合物および色素(B)以外の他の着色剤を含んでいてもよい。他の着色剤としては、極大吸収波長を500~600nmの範囲に有する色素(以下、色素(C)ともいう。)が好ましい。490~510nmの透過率を調整でき、画質が向上する。
色素(C)としては、キサンテン色素、ジピロメテン色素、アントラキノン色素、が例示され、キサンテン色素が好ましい。これらの色素は、単量体であってもよく、多量体であってもよい。
式(J)中、R81~R85は、それぞれ独立して水素原子、アルキル基またはアリール基が好ましく、水素原子またはアルキル基がより好ましく、アルキル基がさらに好ましい。X-が存在しない場合は、R81~R85の少なくとも1つがアニオンを含む。R81~R85の少なくとも1つがアニオンを含む場合、アニオンとしては、上述したトリアリールメタン化合物で説明した構造が挙げられ、好ましい範囲も同様である。
アルキル基の炭素数は、1~10が好ましく、1~5がより好ましく、1~3がさらに好ましい。アルキル基は、直鎖状、分岐状および環状のいずれであってもよいが、直鎖状または分岐状が好ましい。アルキル基は、無置換が好ましい。
アリール基の炭素数は、6~18が好ましく、6~12がより好ましく、6がさらに好ましい。
式(J)中、mは1~3の整数が好ましく、1または2がより好ましい。
式(J)中、X-は、対アニオンを表す。対アニオンは、上述したトリアリールメタン化合物で説明した対アニオンと同義であり、好ましい範囲も同様である。
キサンテン色素が多量体である場合、R81~R85のいずれかが、多量体の他の部位と結合していることが好ましく、より好ましくは、R85を介して多量体の他の部位と結合している。
一般式(I)中、R1、R2、R3、R4、R5、及びR6は、各々独立に、水素原子、又は1価の置換基を表し、R7は水素原子、ハロゲン原子、アルキル基、アリール基、又はヘテロ環基を表す。これらの置換基の説明は、特開2014-132348号公報の段落0047~0056の記載を参酌でき、これらの内容は本願明細書に組み込まれる。
ジピロメテン色素が多量体である場合、R1~R7のいずれかが、多量体の他の部位と結合していることが好ましく、より好ましくは、R3を介して多量体の他の部位と結合している。
金属又は金属化合物としては、錯体を形成可能な金属原子又は金属化合物であればいずれであってもよく、2価の金属原子、2価の金属酸化物、2価の金属水酸化物、又は2価の金属塩化物が含まれる。例えば、Zn、Mg、Si、Sn、Rh、Pt、Pd、Mo、Mn、Pb、Cu、Ni、Co、Fe、B等の他に、AlCl、InCl、FeCl、TiCl2、SnCl2、SiCl2、GeCl2などの金属塩化物、TiO、VO等の金属酸化物、Si(OH)2等の金属水酸化物も含まれる。
これらの中でも、錯体の安定性、分光特性、耐熱性、耐光性、及び製造適性等の観点から、Fe、Zn、Mg、Si、Pt、Pd、Mo、Mn、Cu、Ni、Co、TiO、B、又はVOが好ましく、Fe、Zn、Mg、Si、Pt、Pd、Cu、Ni、Co、B、又はVOが更に好ましく、Fe、Zn、Cu、Co、B、又はVO(V=O)が最も好ましい。これらの中でも、特にZnが好ましい。
ジピロメテン色素は、例えば下記化合物が挙げられる。ジピロメテン色素の詳細は、特開2014-132348号公報の段落0045~0095の記載を参酌でき、これらの内容は本願明細書に組み込まれる。
色素(C)がエチレン性不飽和基を含む場合、その詳細は、上述のトリアリールメタン単量体がエチレン性不飽和基を有する場合の記載において、トリアリールメタンを極大吸収波長を500~600nmの範囲に有する色素構造に置き換えた化合物が好ましい例として例示される。例えば、上記一般式(I)で表されるジピロメテン色素の場合、R3がエチレン性不飽和基を含むことが好ましい。
色素(C)が多量体である場合、色素構造を含む繰り返し単位を含む多量体であることが好ましく、上述したトリアリールメタン多量体で説明した一般式(A)で表される繰り返し単位において、Dyeとして、極大吸収波長を500~600nmの範囲に有する色素構造を有する多量体がより好ましい。
また、上述したトリアリールメタン多量体で説明した一般式(D)において、DyeIVとして、極大吸収波長を500~600nmの範囲に有する色素構造を有する多量体であることも好ましい。
上記色素構造としては、キサンテン化合物由来の色素構造またはジピロメテン化合物由来の色素構造が好ましく、一般式(J)で表されるキサンテン化合物由来の色素構造がより好ましく、一般式(J)におけるR85または一般式(I)におけるR3を介して、上述したトリアリールメタン多量体で説明した一般式(A)で表される繰り返し単位のL1または、上述したトリアリールメタン多量体で説明した一般式(D)のL4に結合していることが好ましい。
色素(C)が多量体である場合、色素構造を含む繰り返し単位に加え、他の繰り返し単位を含んでいても良い。具体的には、酸基等のアルカリ可溶性基を含む繰り返し単位、重合性基を含む繰り返し単位等が例示され、酸基等のアルカリ可溶性基を含む繰り返し単位を少なくとも含むことが好ましい。これらの繰り返し単位は、それぞれ、1種類のみ含んでいても良いし、2種類以上含んでいても良い。これらの繰り返し単位の詳細は、上述のトリアリールメタン多量体で述べた酸基等のアルカリ可溶性基を含む繰り返し単位、重合性基を含む繰り返し単位等の記載と同義であり、好ましい範囲も同義である。
本発明の組成物中における色素(C)の含有量は、色素(B)に対して5~100質量%が好ましく、10~80質量%がより好ましい。
本発明の組成物は、色素(C)を、1種類のみを含んでいてもよいし、2種類以上含んでいてもよい。2種類以上含む場合は、その合計量が上記範囲となることが好ましい。
本発明の組成物は、本発明の趣旨を逸脱しない範囲において、トリアリールメタン化合物、色素(B)および色素(C)以外の他の着色剤として、他の顔料および/または染料を含んでいてもよい。しかしながら、トリアリールメタン化合物、色素(B)および色素(C)以外の他の着色剤を実質的に含まない構成とすることもできる。実質的に含まないとは、例えば、全着色剤の1質量%以下であることをいう。
顔料としては、従来公知の種々の無機顔料または有機顔料を用いることができ、有機顔料を用いることが好ましい。上記顔料としては、高透過率であることが好ましい。
C.I.ピグメントイエロー11,24,31,53,83,93,99,108,109,110,138,139,147,150,151,154,155,167,180,185,199;
C.I.ピグメントオレンジ36,38,43,71;
C.I.ピグメントレッド81,105,122,149,150,155,171,175,176,177,179,209,220,224,242,254,255,264,270;
C.I.ピグメントバイオレット19,23,32,39;
C.I.ピグメントブルー1,2,15,15:1,15:3,15:6,16,22,60,66;
C.I.ピグメントグリーン7,36,37,58,59;
C.I.ピグメントブラウン25,28;
C.I.ピグメントブラック1;
等を挙げることができる。
C.I.ピグメントオレンジ36,71;
C.I.ピグメントレッド122,150,171,175,177,209,224,242,254,255,264;
C.I.ピグメントバイオレット19,23,32;
C.I.ピグメントブルー15:1,15:3,15:6,16,22,60,66;
C.I.ピグメントグリーン7,36,37,58,59;
C.I.ピグメントブラック1。
上記組合せの具体例を以下に示す。例えば、赤の顔料として、アントラキノン系顔料、ペリレン系顔料、ジケトピロロピロール系顔料単独またはそれらの少なくとも一種と、ジスアゾ系黄色顔料、イソインドリン系黄色顔料、キノフタロン系黄色顔料またはペリレン系赤色顔料と、の混合などを用いることができる。例えば、アントラキノン系顔料としては、C.I.ピグメントレッド177が挙げられ、ペリレン系顔料としては、C.I.ピグメントレッド155、C.I.ピグメントレッド224が挙げられ、ジケトピロロピロール系顔料としては、C.I.ピグメントレッド254が挙げられ、色分解性の点でC.I.ピグメントイエロー139との混合が好ましい。また、赤色顔料と黄色顔料との質量比は、100:5~100:50が好ましい。100:4以下では400nmから500nmの光透過率を抑えることが困難であり、また100:51以上では主波長が短波長寄りになり、色分解能を上げることができない場合がある。特に、上記質量比としては、100:10~100:30の範囲が最適である。尚、赤色顔料同士の組み合わせの場合は、求める分光に併せて調整することができる。
顔料の一次粒子サイズは、電子顕微鏡等の公知の方法で測定することができる。
他の染料としては、例えば特開昭64-90403号公報、特開昭64-91102号公報、特開平1-94301号公報、特開平6-11614号公報、特登2592207号、米国特許4808501号明細書、米国特許5667920号明細書、米国特許505950号明細書、米国特許5667920号明細書、特開平5-333207号公報、特開平6-35183号公報、特開平6-51115号公報、特開平6-194828号公報等に開示されている色素を使用できる。化学構造としては、ピラゾールアゾ系、アニリノアゾ系、トリフェニルメタン系、アントラキノン系、ベンジリデン系、オキソノール系、ピラゾロトリアゾールアゾ系、ピリドンアゾ系、シアニン系、フェノチアジン系、ピロロピラゾールアゾメチン系等の染料を使用できる。
他の染料は色素多量体を用いてもよい。色素多量体としては、特開2011-213925号公報、特開2013-041097号公報等に記載されている化合物が挙げられる。
本発明の組成物は、他の顔料および/または染料を、1種類のみを含んでいてもよいし、2種類以上含んでいてもよい。2種類以上含む場合は、その合計量が上記範囲となることが好ましい。
本発明の組成物は、さらに、アルカリ可溶性樹脂を含有することが好ましい。
アルカリ可溶性樹脂の分子量としては、特に定めるものではないが、Mwが5000~100,000であることが好ましい。また、Mnは1000~20,000であることが好ましい。
なお、重合後に酸基を付与しうるモノマーを単量体成分として酸基を導入する場合には、重合後に例えば後述するような酸基を付与するための処理が必要となる。
一般式(ED2)
一般式(ED2)中、Rは、水素原子または炭素数1~30の有機基を表す。一般式(ED2)の具体例としては、特開2010-168539号公報の記載を参酌できる。
一般式(X)
(式(X)において、R1は、水素原子またはメチル基を表し、R2は炭素数2~10のアルキレン基を表し、R3は、水素原子またはベンゼン環を含んでもよい炭素数1~20のアルキル基を表す。nは1~15の整数を表す。)
上記式(X)において、R2のアルキレン基の炭素数は、2~3であることが好ましい。また、R3のアルキル基の炭素数は1~20であるが、より好ましくは1~10であり、R3のアルキル基はベンゼン環を含んでもよい。R3で表されるベンゼン環を含むアルキル基としては、ベンジル基、2-フェニル(イソ)プロピル基等を挙げることができる。
さらに、特開2012-32767号公報に記載の段落番号0029~0063に記載の共重合体(B)および実施例で用いられているアルカリ可溶性樹脂、特開2012-208474号公報の段落番号0088~0098に記載のバインダー樹脂および実施例で用いられているバインダー樹脂、特開2012-137531号公報の段落番号0022~0032に記載のバインダー樹脂および実施例で用いられているバインダー樹脂、特開2013-024934号公報の段落番号0132~0143に記載のバインダー樹脂および実施例で用いられているバインダー樹脂、特開2011-242752号公報の段落番号0092~0098および実施例で用いられているバインダー樹脂、特開2012-032770号公報の段落番号0030~0072に記載のバインダー樹脂を用いること好ましい。これらの内容は本明細書に組み込まれる。より具体的には、下記の樹脂が好ましい。
また、アルカリ可溶性樹脂の重量平均分子量(Mw)としては、2,000~50,000が好ましく、5,000~30,000がさらに好ましく、7,000~20,000が特に好ましい。
本発明の組成物は、アルカリ可溶性樹脂を、1種類のみを含んでいてもよいし、2種類以上含んでいてもよい。2種類以上含む場合は、その合計量が上記範囲となることが好ましい。
本発明の組成物は、溶剤を含有してもよい。
溶剤は、各成分の溶解性や組成物の塗布性を満足すれば基本的には特に制限はないが、特に紫外線吸収剤、アルカリ可溶性樹脂や分散剤等の溶解性、塗布性、安全性を考慮して選ばれることが好ましい。また、本発明における組成物を調製する際には、少なくとも2種類の溶剤を含むことが好ましい。
本発明の組成物は、溶剤を、1種類のみを含んでいてもよいし、2種類以上含んでいてもよい。2種類以上含む場合は、その合計量が上記範囲となることが好ましい。
本発明の組成物は、重合性化合物の反応を促進させることなどを目的として、分子内に2個以上のメルカプト基を有する多官能チオール化合物を含んでいてもよい。多官能チオール化合物は、2級のアルカンチオール類であることが好ましく、特に下記一般式(T1)で表される構造を有する化合物であることが好ましい。
一般式(T1)
(式(T1)中、nは2~4の整数を表し、Lは2~4価の連結基を表す。)
本発明の組成物には、塗布性をより向上させる観点から、各種の界面活性剤を添加してもよい。界面活性剤としては、フッ素系界面活性剤、ノニオン系界面活性剤、カチオン系界面活性剤、アニオン系界面活性剤、シリコーン系界面活性剤などの各種界面活性剤を使用できる。
即ち、フッ素系界面活性剤を含有する組成物を適用した塗布液を用いて膜形成する場合においては、被塗布面と塗布液との界面張力を低下させることにより、被塗布面への濡れ性が改善され、被塗布面への塗布性が向上する。このため、少量の液量で数μm程度の薄膜を形成した場合であっても、厚みムラの小さい均一厚の膜形成をより好適に行える点で有効である。
フッ素系界面活性剤は、フッ素原子を有する(メタ)アクリレート化合物に由来する繰り返し単位と、アルキレンオキシ基(好ましくはエチレンオキシ基、プロピレンオキシ基)を2以上(好ましくは5以上)有する(メタ)アクリレート化合物に由来する繰り返し単位と、を含む含フッ素高分子化合物も好ましく用いることができ、下記化合物も本発明で用いられるフッ素系界面活性剤として例示される。
上記の化合物の重量平均分子量は、好ましくは3,000~50,000であり、例えば、14,000である。また、エチレン性不飽和基を側鎖に有する含フッ素重合体をフッ素系界面活性剤として用いることもできる。具体例としては、特開2010-164965号公報0050~0090段落および0289~0295段落に記載された化合物、例えばDIC社製のメガファックRS-101、RS-102、RS-718K等が挙げられる。
本発明の組成物に界面活性剤を含有する場合、界面活性剤の添加量は、組成物の全質量に対して、0.001質量%~2.0質量%が好ましく、より好ましくは0.005質量%~1.0質量%である。
本発明の組成物は、界面活性剤を、1種類のみを含んでいてもよいし、2種類以上含んでいてもよい。2種類以上含む場合は、その合計量が上記範囲となることが好ましい。
本発明の組成物は、上述の各成分に加えて、本発明の効果を損なわない範囲で、さらに、顔料分散剤、架橋剤、重合禁止剤、有機カルボン酸、有機カルボン酸無水物などの他の成分を含んでいてもよい。
本発明の組成物が顔料を有する場合は、顔料分散剤を、所望により併用することができる。
本発明に用いうる顔料分散剤としては、高分子分散剤〔例えば、ポリアミドアミンとその塩、ポリカルボン酸とその塩、高分子量不飽和酸エステル、変性ポリウレタン、変性ポリエステル、変性ポリ(メタ)アクリレート、(メタ)アクリル系共重合体、ナフタレンスルホン酸ホルマリン縮合物〕、および、ポリオキシエチレンアルキルリン酸エステル、ポリオキシエチレンアルキルアミン、アルカノールアミン等の界面活性剤、および、顔料誘導体等を挙げることができる。
高分子分散剤は、その構造からさらに直鎖状高分子、末端変性型高分子、グラフト型高分子、ブロック型高分子に分類することができる。
分散剤の詳細としては、特開2014-130344号公報の段落0098~0102の記載を参酌でき、これらの内容は本明細書に組み込まれる。
本発明の組成物は、顔料分散剤を、それぞれ、1種類のみを含んでいてもよいし、2種類以上含んでいてもよい。2種類以上含む場合は、その合計量が上記範囲となることが好ましい。
また、顔料誘導体を併用する場合、顔料誘導体の使用量としては、顔料100質量部に対し、質量換算で1質量部~30質量部の範囲にあることが好ましく、3質量部~20質量部の範囲にあることがより好ましく、5質量部~15質量部の範囲にあることが特に好ましい。
本発明の組成物に補足的に架橋剤を用い、組成物を硬化させてなる硬化膜の硬度をより高めることもできる。
架橋剤としては、架橋反応により膜硬化を行なえるものであれば、特に限定はなく、例えば、(a)エポキシ樹脂、(b)メチロール基、アルコキシメチル基、およびアシロキシメチル基から選ばれる少なくとも1つの置換基で置換された、メラミン化合物、グアナミン化合物、グリコールウリル化合物またはウレア化合物、(c)メチロール基、アルコキシメチル基、およびアシロキシメチル基から選ばれる少なくとも1つの置換基で置換された、フェノール化合物、ナフトール化合物またはヒドロキシアントラセン化合物、が挙げられる。中でも、多官能エポキシ樹脂が好ましい。
架橋剤の具体例などの詳細については、特開2004-295116号公報の段落0134~0147の記載を参照することができる。
本発明の組成物中に架橋剤を含有する場合、架橋剤の配合量は、特に定めるものではないが、組成物の全固形分の2~30質量%が好ましく、3~20質量%がより好ましい。
本発明の組成物は、架橋剤を、1種類のみを含んでいてもよいし、2種類以上含んでいてもよい。2種類以上含む場合は、その合計量が上記範囲となることが好ましい。
本発明の組成物においては、上記組成物の製造中または保存中において、重合性化合物の不要な熱重合を阻止するために、少量の重合禁止剤を添加することが望ましい。
本発明に用いうる重合禁止剤としては、ハイドロキノン、p-メトキシフェノール、ジ-tert-ブチル-p-クレゾール、ピロガロール、tert-ブチルカテコール、ベンゾキノン、4,4’-チオビス(3-メチル-6-tert-ブチルフェノール)、2,2’-メチレンビス(4-メチル-6-tert-ブチルフェノール)、N-ニトロソフェニルヒドロキシアミン第一セリウム塩等が挙げられる。
本発明の組成物中に重合禁止剤を含有する場合、重合禁止剤の添加量は、全組成物の質量に対して、約0.01質量%~約5質量%が好ましい。
本発明の組成物は、重合禁止剤を、1種類のみを含んでいてもよいし、2種類以上含んでいてもよい。2種類以上含む場合は、その合計量が上記範囲となることが好ましい。
本発明の組成物は、分子量1000以下の有機カルボン酸、および/または有機カルボン酸無水物を含有していてもよい。
有機カルボン酸化合物としては、具体的には、脂肪族カルボン酸または芳香族カルボン酸が挙げられる。脂肪族カルボン酸としては、例えば、ギ酸、酢酸、プロピオン酸、酪酸、吉草酸、ピバル酸、カプロン酸、グリコール酸、アクリル酸、メタクリル酸等のモノカルボン酸、シュウ酸、マロン酸、コハク酸、グルタル酸、アジピン酸、ピメリン酸、シクロヘキサンジカルボン酸、シクロヘキセンジカルボン酸、イタコン酸、シトラコン酸、マレイン酸、フマル酸等のジカルボン酸、トリカルバリル酸、アコニット酸等のトリカルボン酸等が挙げられる。また、芳香族カルボン酸としては、例えば、安息香酸、フタル酸等のフェニル基に直接カルボキシル基が結合したカルボン酸、およびフェニル基から炭素結合を介してカルボキシル基が結合したカルボン酸類が挙げられる。これらの中では、特に分子量600以下、とりわけ分子量50~500のもの、具体的には、例えば、マレイン酸、マロン酸、コハク酸、イタコン酸が好ましい。
本発明の組成物は、有機カルボン酸および/または有機カルボン酸無水物を、それぞれ、1種類のみを含んでいてもよいし、2種類以上含んでいてもよい。2種類以上含む場合は、その合計量が上記範囲となることが好ましい。
これら分子量1000以下の有機カルボン酸、および/または有機カルボン酸無水物を添加することによって、高いパターン密着性を保ちながら、組成物の未溶解物の残存をより一層低減することが可能である。
本発明の組成物においては、特開2004-295116号公報の段落0078に記載の増感剤や光安定剤、同公報の段落0081に記載の熱重合防止剤を含有することができる。
本発明の組成物は、上記成分を、それぞれ、1種類のみを含んでいてもよいし、2種類以上含んでいてもよい。2種類以上含む場合は、その合計量が上記範囲となることが好ましい。
本発明の組成物は、前述の成分を混合することで調製される。
なお、組成物の調製に際しては、組成物を構成する各成分を一括配合してもよいし、各成分を溶剤に溶解・分散した後に逐次配合してもよい。また、配合する際の投入順序や作業条件は特に制約を受けない。例えば、全成分を同時に溶剤に溶解・分散して組成物を調製してもよいし、必要に応じては、各成分を適宜2つ以上の溶液・分散液としておいて、使用時(塗布時)にこれらを混合して組成物として調製してもよい。
上記のようにして調製された組成物は、フィルタなどを用いて濾別した後、使用に供することができる。
本発明の組成物は、異物の除去や欠陥の低減などの目的で、フィルタで濾過することが好ましい。従来からろ過用途等に用いられているものであれば特に限定されることなく用いることができる。例えば、PTFE(ポリテトラフルオロエチレン)等のフッ素樹脂、ナイロン(例えばナイロン-6、ナイロン-6,6)等のポリアミド系樹脂、ポリエチレン、ポリプロピレン(PP)等のポリオレフィン樹脂(高密度、超高分子量を含む)等によるフィルタが挙げられる。これら素材の中でもポリプロピレン(高密度ポリプロピレンを含む)およびナイロンが好ましい。
フィルタの孔径は、0.01~7.0μm程度が適しており、好ましくは0.01~2.5μm程度、さらに好ましくは0.01~2.0μm程度である。この範囲とすることにより、後工程において均一及び平滑な組成物の調製を阻害する、微細な異物を確実に除去することが可能となる。また、ファイバ状のろ材を用いることも好ましく、ろ材としては例えばポリプロピレンファイバ、ナイロンファイバ、グラスファイバ等が挙げられ、具体的にはロキテクノ社製のSBPタイプシリーズ(SBP008など)、TPRタイプシリーズ(TPR002、TPR005など)、SHPXタイプシリーズ(SHPX003など)のフィルタカートリッジを用いることができる。
また、上述した範囲内で異なる孔径の第1のフィルタを組み合わせてもよい。ここでの孔径は、フィルタメーカーの公称値を参照することができる。市販のフィルタとしては、例えば、日本ポール、アドバンテック東洋、日本インテグリス(旧日本マイクロリス)又はキッツマイクロフィルタ等が提供する各種フィルタの中から選択することができる。
第2のフィルタは、上述した第1のフィルタと同様の材料等で形成されたものを使用することができる。
例えば、第1のフィルタでのフィルタリングは、分散液のみで行い、他の成分を混合した後で、第2のフィルタリングを行ってもよい。
次に、本発明における硬化膜、パターン形成方法およびカラーフィルタについて、その製造方法を通じて詳述する。
本発明の硬化膜は、本発明の組成物を硬化してなる。かかる硬化膜はカラーフィルタに好ましく用いられる。
本発明のカラーフィルタの製造方法は、本発明のパターン形成方法を含む。
本発明の組成物は、いわゆるフォトリソグラフィ法でパターン形成によって、カラーフィルタを製造してもよいし、ドライエッチング法によってパターンを形成してもよい。
すなわち、本発明のカラーフィルタの第一の製造方法として、組成物を支持体上に適用して組成物層を形成する工程と、上記組成物層をパターン状に露光する工程と、組成物層の未露光部を現像除去して着色パターンを形成する工程とを含むカラーフィルタの製造方法が例示される。
また、本発明のカラーフィルタの第二の製造方法として、本発明の組成物を支持体上に適用して組成物層を形成し、硬化して着色層を形成する工程、着色層上にフォトレジスト層を形成する工程、フォトレジスト層を露光および現像することによりフォトレジスト層をパターニングしてレジストパターンを得る工程、およびレジストパターンをエッチングマスクとして着色層をドライエッチングする工程を含む方法が例示される。
本発明では、フォトリソグラフィ法で製造することがより好ましい。
以下これらの詳細を述べる。
組成物層を形成する工程では、支持体上に、本発明の組成物を適用して組成物層を形成する。
本発明における着色パターンは、固体撮像素子用基板の撮像素子形成面側(おもて面)に形成されてもよいし、撮像素子非形成面側(裏面)に形成されてもよい。
固体撮像素子における着色パターンの間や、固体撮像素子用基板の裏面には、遮光膜が設けられていてもよい。
また、支持体上には、必要により、上部の層との密着改良、物質の拡散防止或いは基板表面の平坦化のために下塗り層を設けてもよい。下塗り層には、溶剤、アルカリ可溶性樹脂、重合性化合物、重合禁止剤、界面活性剤、光重合開始剤等を配合でき、これらの各成分は、上述の本発明の組成物に配合する成分から適宜選択されることが好ましい。
<<<露光する工程>>>
露光工程では、組成物層形成工程において形成された組成物層を、パターン状に露光する。例えば、支持体上に形成した組成物層に対し、ステッパー等の露光装置を用いて、所定のマスクパターンを有するマスクを介して露光することで、パターン露光することができる。これにより、露光部分を硬化することができる。
露光に際して用いることができる放射線(光)としては、g線、i線等の紫外線が好ましく(特に好ましくはi線)用いられる。照射量(露光量)は、例えば、0.03~2.5J/cm2が好ましく、0.05~1.0J/cm2がより好ましく、0.08~0.5J/cm2が最も好ましい。
露光時における酸素濃度については適宜選択することができ、大気下で行う他に、例えば酸素濃度が19体積%以下の低酸素雰囲気下(例えば、15体積%、5体積%、実質的に無酸素)で露光してもよく、酸素濃度が21体積%を超える高酸素雰囲気下(例えば、22体積%、30体積%、50体積%)で露光してもよい。また、露光照度は適宜設定することが可能であり、通常1000W/m2~100000W/m2(例えば、5000W/m2、15000W/m2、35000W/m2)の範囲から選択することができる。酸素濃度と露光照度は適宜条件を組み合わせてよく、例えば、酸素濃度10体積%で照度10000W/m2、酸素濃度35体積%で照度20000W/m2 などとすることができる。
膜厚を、1.0μm以下とすることにより、高解像性、高密着性を得られるため、好ましい。
また、本工程においては、0.7μm以下の薄い膜厚を有する硬化膜も好適に形成することができ、得られた硬化膜を、後述するパターン形成工程にて現像処理することで、薄膜でありながらも、現像性、表面荒れ抑制、およびパターン形状に優れた着色パターンを得ることができる。
次いでアルカリ現像処理を行うことにより、露光工程における光未照射部分の組成物層がアルカリ性水溶液に溶出し、光硬化した部分だけが残る。
現像液としては、下地の撮像素子や回路などにダメージを起さない、有機アルカリ現像液が望ましい。現像温度としては通常20℃~30℃であり、現像時間は、従来20秒~90秒であった。より残渣を除去するため、近年では120秒~180秒実施する場合もある。さらには、より残渣除去性を向上するため、現像液を60秒ごとに振り切り、さらに新たに現像液を供給する工程を数回繰り返す場合もある。
また、現像液には無機アルカリを用いてもよく、無機アルカリとしては、例えば、水酸化ナトリウム、水酸化カリウム、炭酸ナトリウム、炭酸水素ナトリウム、硅酸ナトリウム、メタ硅酸ナトリウムなどが好ましい。
また、現像液には、界面活性剤を用いてもよい。界面活性剤の例としては、前述した組成物で説明した界面活性剤が挙げられ、ノニオン系界面活性剤が好ましい。現像液が界面活性剤を含有する場合、現像液の全質量に対して、0.001~2.0質量%が好ましく、より好ましくは0.01~1.0質量%である。
なお、このようなアルカリ性水溶液からなる現像液を使用した場合には、一般に現像後純水で洗浄(リンス)することが好ましい。
ポストベークは、硬化を完全なものとするための現像後の加熱処理であり、通常100℃~240℃、好ましくは200℃~240℃の熱硬化処理を行う。
このポストベーク処理は、現像後の塗布膜を、上記条件になるようにホットプレートやコンベクションオーブン(熱風循環式乾燥機)、高周波加熱機等の加熱手段を用いて、連続式あるいはバッチ式で行うことができる。
ドライエッチングは、着色層を、パターニングされたフォトレジスト層をマスクとしてエッチングガスを用いて行うことができる。具体的には、着色層上にポジ型またはネガ型の感放射線性組成物を塗布し、これを乾燥させることによりフォトレジスト層を形成する。フォトレジスト層の形成においては、さらにプリベーク処理を施すことが好ましい。特に、フォトレジスト層の形成プロセスとしては、露光後の加熱処理(PEB)、現像後の加熱処理(ポストベーク処理)を実施する形態が望ましい。
具体的には、ポジ型の感放射線性組成物として、キノンジアジド化合物およびアルカリ可溶性樹脂を含有する組成物が好ましい。キノンジアジド化合物およびアルカリ可溶性樹脂を含有するポジ型の感放射線性組成物は、500nm以下の波長の光照射によりキノンジアジド基が分解してカルボキシル基を生じ、結果としてアルカリ不溶状態からアルカリ可溶性になることを利用するものである。このポジ型フォトレジストは解像力が著しく優れているので、IC(integrated circuit)やLSI(Large Scale Iintegration)等の集積回路の作製に用いられている。キノンジアジド化合物としては、ナフトキノンジアジド化合物が挙げられる。市販品としては例えば「FHi622BC」(富士フイルムエレクトロニクスマテリアルズ製)などが挙げられる。
フッ素系ガスと酸素ガス(O2)との混合ガスを用い、支持体が露出しない領域(深さ)までエッチングを行なう第1段階のエッチングと、この第1段階のエッチングの後に、窒素ガス(N2)と酸素ガス(O2)との混合ガスを用い、好ましくは支持体が露出する領域(深さ)付近までエッチングを行なう第2段階のエッチングと、支持体が露出した後に行なうオーバーエッチングとを含む形態が好ましい。以下、ドライエッチングの具体的手法、並びに第1段階のエッチング、第2段階のエッチング、およびオーバーエッチングについて説明する。
(1)第1段階のエッチングにおけるエッチングレート(nm/min)と、第2段階のエッチングにおけるエッチングレート(nm/min)とをそれぞれ算出する。(2)第1段階のエッチングで所望の厚さをエッチングする時間と、第2段階のエッチングで所望の厚さをエッチングする時間とをそれぞれ算出する。(3)上記(2)で算出したエッチング時間に従って第1段階のエッチングを実施する。(4)上記(2)で算出したエッチング時間に従って第2段階のエッチングを実施する。あるいはエンドポイント検出でエッチング時間を決定し、決定したエッチング時間に従って第2段階のエッチングを実施してもよい。(5)上記(3)、(4)の合計時間に対してオーバーエッチング時間を算出し、オーバーエッチングを実施する。
上記のうち、アルキレングリコールモノアルキルエーテルカルボキシレートおよびアルキレングリコールモノアルキルエーテルが好ましい。
これら溶剤は、単独で用いても2種以上を混合して用いてもよい。2種以上を混合する場合、水酸基を有する溶剤と水酸基を有しない溶剤とを混合することが好ましい。水酸基を有する溶剤と水酸基を有しない溶剤との質量比は、1/99~99/1、好ましくは10/90~90/10、さらに好ましくは20/80~80/20である。プロピレングリコールモノメチルエーテルアセテート(PGMEA)とプロピレングリコールモノメチルエーテル(PGME)の混合溶剤で、その比率が60/40であることが特に好ましい。なお、汚染物に対する洗浄液の浸透性を向上させるために、洗浄液には前掲の本組成物に関する界面活性剤を添加してもよい。
本発明のカラーフィルタは、本発明の組成物を用いているため、露光マージンに優れた露光ができる共に、形成された着色パターン(着色画素)は、パターン形状に優れ、パターン表面の荒れや現像部における残渣が抑制されていることから、色特性に優れたものとなる。
本発明のカラーフィルタは、CCD、CMOS等の固体撮像素子に好適に用いることができ、特に100万画素を超えるような高解像度のCCDやCMOS等に好適である。本発明の固体撮像素子用カラーフィルタは、例えば、CCDまたはCMOSを構成する各画素の受光部と、集光するためのマイクロレンズと、の間に配置されるカラーフィルタとして用いることができる。
また、着色パターン(着色画素)のサイズ(パターン幅)としては、2.5μm以下が好ましく、2.0μm以下がより好ましく、1.7μm以下が特に好ましい。
本発明のカラーフィルタは、トリアリールメタン化合物、極大吸収波長を650~750nmの範囲に有する色素、および硬化性化合物を含み、波長450~500nmの範囲における厚み方向の透過率の最小値が80%以上で、かつ、波長650~700nmの範囲における厚み方向の透過率の最大値が25%以下であることが好ましい。
本発明のカラーフィルタは、波長450~500nmの範囲における厚み方向の透過率の最小値が84%以上であることが好ましく、90%以上がより好ましい。
本発明のカラーフィルタは、波長650~700nmの範囲における厚み方向の透過率の最大値が20%以下であることが好ましく、15%以下がより好ましい。
本発明のカラーフィルタは、トリアリールメタン化合物に対する、極大吸収波長を650~750nmの範囲に有する色素の質量比が0.2~1.5であることが好ましい。
ここで、カラーフィルタの透過率とは、上記本発明の組成物を乾燥膜厚が0.6μmとなるように塗布されたガラス基板を、紫外可視近赤外分光光度計(島津製作所製、UV3600)の分光光度計(ref.ガラス基板)で測定した値をいう。
本発明の固体撮像素子は、既述の本発明のカラーフィルタを有する。本発明の固体撮像素子の構成としては、本発明におけるカラーフィルタが備えられた構成であり、固体撮像素子として機能する構成であれば特に限定はないが、例えば、以下のような構成が挙げられる。
さらに、上記デバイス保護膜上であってカラーフィルタの下(支持体に近い側)に集光手段(例えば、マイクロレンズ等。以下同じ)を有する構成や、カラーフィルタ上に集光手段を有する構成等であってもよい。
本発明のカラーフィルタは、上記固体撮像素子のみならず、液晶表示装置や有機EL表示装置などの、画像表示装置に用いることができ、特に液晶表示装置の用途に好適である。本発明のカラーフィルタを備えた液晶表示装置は、表示画像の色合いが良好で表示特性に優れた高画質画像を表示することができる。
また、本発明におけるカラーフィルタは、明るく高精細なCOA(Color-filter On Array)方式にも供することが可能である。COA方式の液晶表示装置にあっては、カラーフィルタ層に対する要求特性は、前述のような通常の要求特性に加えて、層間絶縁膜に対する要求特性、すなわち低誘電率および剥離液耐性が必要とされることがある。本発明のカラーフィルタにおいては、色相に優れた色素多量体を用いることから、色純度、光透過性などが良好で着色パターン(画素)の色合いに優れるので、解像度が高く長期耐久性に優れたCOA方式の液晶表示装置を提供することができる。なお、低誘電率の要求特性を満足するためには、カラーフィルタ層の上に樹脂被膜を設けてもよい。
これらの画像表示方式については、例えば、「EL、PDP、LCDディスプレイ-技術と市場の最新動向-(東レリサーチセンター調査研究部門 2001年発行)」の43ページなどに記載されている。
また、本発明では、マイクロオーレッド方式(マイクロOLED)のディスプレイにも好ましく用いることができる。これらの画像表示方式については、例えば、「EL、PDP、LCDディスプレイ-技術と市場の最新動向-(東レリサーチセンター調査研究部門 2001年発行)」の43ページなどに記載されている。
バックライトに関しては、SID meeting Digest 1380(2005)(A.Konno et.al)や、月刊ディスプレイ 2005年12月号の18~24ページ(島 康裕)、同25~30ページ(八木隆明)などに記載されている。
上記化合物(T-4)中、Aは下記構造(L4-11)を表す。下記構造中、*は連結部位を表す。
<<トリアリールメタン(T-6)の合成>>
上記化合物(D-5)中、Aは上記構造(L4-11)を表す。
色素100mgをテトラヒドロフラン200mLに溶解させ、この溶液2mLにテトラヒドロフランを加え、200mLにした。この溶液をCary5000 UV-Vis-NIR分光光度計(アジレント・テクノロジー製)で400~800nmまで測定し極大吸収波長を測定した。
下記組成の成分を混合して溶解し、下塗り層用レジスト液を調製した。
<下塗り層用レジスト液の組成>
・溶剤:プロピレングリコールモノメチルエーテルアセテート
(PGMEA) 19.20部
・溶剤:乳酸エチル 36.67部
・アルカリ可溶性樹脂:メタクリル酸ベンジル/メタクリル酸/メタクリル酸-2-ヒドロキシエチル共重合体(モル比=60/22/18、重量平均分子量15,000、数平均分子量9,000)の40%PGMEA溶液
30.51部
・ジペンタエリスリトールヘキサアクリレート
(KAYARAD DPHA(日本化薬製)) 12.20部
・重合禁止剤:p-メトキシフェノール 0.0061部
・フッ素系界面活性剤:F-475、DIC製 0.83部
・光重合開始剤:トリハロメチルトリアジン系の光重合開始剤
(TAZ-107、みどり化学製) 0.586部
6インチのシリコンウエハをオーブン中で200℃のもと30分加熱処理した。次いで、このシリコンウエハ上に、上記レジスト液を乾燥膜厚が1.5μmになるように塗布し、さらに220℃のオーブン中で1時間加熱乾燥させて下塗り層を形成し、下塗り層付シリコンウエハ基板を得た。
<実施例1~33、比較例1~3の組成物>
下記の各成分を混合して分散、溶解し、0.45μmナイロンフィルタでろ過することにより、実施例1~33、比較例1~3の各組成物を得た。
・トリアリールメタン化合物(トリアリールメタン(A)) 表4に記載
・色素(B) 表4に記載
トリアリールメタン化合物と色素(B)の合計は、60部である。
・色素(C) 配合する場合は、10部
・シクロヘキサノン 100部
・アルカリ可溶性樹脂(下記J1またはJ2:下記表に記載の化合物)5部
・ソルスパース20000
(1%シクロヘキサン溶液、日本ルーブリゾール製) 1部
・光重合開始剤(下記(I-1)~(I-8):下記に記載の化合物)1部
・ジペンタエリスリトールヘキサアクリレート
(KAYARAD DPHA(日本化薬製)) 10部
・グリセロールプロポキシレート(1%シクロヘキサン溶液) 0.1部
<パターン形成>
上記のように調製した実施例および比較例の組成物の各々を、上記「2.下塗り層付シリコンウエハ基板の作製」で得られた下塗り層付シリコンウエハ基板の下塗り層上に塗布し、組成物層(塗布膜)を形成した。そして、この塗布膜の乾燥膜厚が0.6μmになるように、100℃のホットプレートを用いて120秒間加熱処理(プリベーク)を行なった。
その後、照射された塗布膜が形成されているシリコンウエハ基板をスピン・シャワー現像機(DW-30型、ケミトロニクス製)の水平回転テーブル上に載置し、CD-2000(富士フイルムエレクトロニクスマテリアルズ製)を用いて23℃で60秒間パドル現像を行ない、シリコンウエハ基板に着色パターンを形成した。
以上のようにして、実施例または比較例の組成物により形成された着色パターンを有する単色のカラーフィルタを作製した。
その後、測長SEM(scanning electron microscope)「S-9260A」(日立ハイテクノロジーズ製)を用いて、着色パターンのサイズを測定した。パターンサイズが1.0μmとなる露光量を最適露光量とした。
5-1.耐光性
耐光性(光堅牢性)を評価する指標として、光照射前後における色差(ΔE*ab値)を測定した。具体的には、上記で得た組成物を、ガラス基板上に、乾燥膜厚が0.6μmとなるように塗布し、塗布膜を形成した。この塗布膜に、キセノンランプを10万luxで20時間照射(200万lux・h相当)し、照射前後についての色差(ΔE*ab値)を測定した。色差(ΔE*ab値)の測定には、色度計MCPD-1000(大塚電子製)を用いた。ΔE*ab値は、値の小さい方が、耐光性が良好なことを示す。なお、ΔE*ab値は、CIE1976(L*,a*,b*)空間表色系による以下の色差公式から求められる値である(日本色彩学会編 新編色彩科学ハンドブック(昭和60年)p.266)。
ΔE*ab={(ΔL*)2+(Δa*)2+(Δb*)2}1/2
耐熱性(熱堅牢性)を評価する指標として、加熱前後における色差(ΔE*ab値)を測定した。具体的には、上記で得た組成物を、ガラス基板上に、乾燥膜厚が0.6μmとなるように塗布し、塗布膜を形成した。この塗布膜を、ガラス基板面で接するように200℃のホットプレートに載置して1時間加熱し、加熱前後についての色差(ΔE*ab値)を測定した。色差(ΔE*ab値)の測定には、色度計MCPD-1000(大塚電子製)を用いた。ΔE*ab値は、値の小さい方が、耐熱性が良好なことを示す。
上記で得た組成物を、ガラス基板上に、乾燥膜厚が0.6μmとなるように塗布し、塗布膜を形成した。紫外可視近赤外分光光度計UV3600(島津製作所製)の分光光度計(ref.ガラス基板)を用いて、400nm~450nm、500nm、650nm~700nmの波長域で、この塗布膜の透過率を測定した。400nm~450nm及び650nm~700nmの波長域の透過率は、5nm毎の透過率の平均値を透過率とした。
上記パターン形成で得られた着色パターン200個をSEMにより観察し、現像欠陥の有無を確認した。現像欠陥が多いほど歩留まりに悪影響を及ぼす。
組成物の調製
下記成分を混合・溶解して、実施例34~60、比較例4~6の各組成物を得た。
・トリアリールメタン化合物 表5に記載
・色素(B) 表5に記載
トリアリールメタン化合物と色素(B)の合計は、60部である。
・色素(C) 配合する場合は10部
・シクロヘキサノン 100部
・ソルスパース20000
(1%シクロヘキサン溶液、日本ルーブリゾール製 1部
・熱硬化性化合物(EHPE-3150(ダイセル化学製、2,2-ビス(ヒドロキシメチル)-1-ブタノールの1,2-エポキシ-4-(2-オキシラニル)シクロヘキサン付加物)) 15部
・グリセロールプロポキシレート(1%シクロヘキサン溶液)0.048部
下記のように着色パターンを形成し、この着色パターンについてパターン欠損を評価した。ガラス基板上に、上記組成物を乾燥後の膜厚が0.6μmになるようにスピンコーターを用いて塗布し、100℃のホットプレートを用いて120秒間加熱処理(プリベーク)を行った。次いで、220℃のホットプレートを用いて300秒間加熱処理(ポストベーク)を行い、着色膜を作製した。
この着色膜上にポジ型フォトレジスト「FHi622BC」(富士フイルムエレクトロニクスマテリアルズ製)を塗布し、プリベークを実施し、膜厚0.8μmのフォトレジスト層を形成した。続いて、フォトレジスト層を、i線ステッパー(キャノン製)を用い、350mJ/cm2の露光量でパターン露光し、フォトレジスト層の温度または雰囲気温度が90℃となる温度で1分間、加熱処理を行なった。その後、現像液「FHD-5」(富士フイルムエレクトロニクスマテリアルズ社製)で1分間の現像処理を行ない、さらに110℃で1分間のポストベーク処理を実施して、レジストパターンを形成した。このレジストパターンのサイズは、エッチング変換差(エッチングによるパターン幅の縮小)を考慮して、一辺1.0μmで形成した。
次に、ドライエッチングを以下の手順で行った。
Claims (19)
- トリアリールメタン化合物、
極大吸収波長を650~750nmの範囲に有する色素、および
硬化性化合物、
を含み、
前記トリアリールメタン化合物に対する、前記極大吸収波長を650~750nmの範囲に有する色素の質量比が0.2~1.5である組成物。 - 前記トリアリールメタン化合物が、580~620nmの範囲に極大吸収波長を有する、請求項1に記載の組成物。
- 前記トリアリールメタン化合物と、前記極大吸収波長を650~750nmの範囲に有する色素の極大吸収波長の差が100~150nmである、請求項1又は2に記載の組成物。
- 前記トリアリールメタン化合物が、エチレン性不飽和結合性基を有する、請求項1~3のいずれか1項に記載の組成物。
- 前記トリアリールメタン化合物が多量体である、請求項1~4のいずれか1項に記載の組成物。
- 前記極大吸収波長を650~750nmの範囲に有する色素が、フタロシアニン化合物、シアニン化合物、スクアリリウム化合物、ナフトキノン化合物及びアゾ化合物から選択される1種以上である、請求項1~5のいずれか1項に記載の組成物。
- 前記極大吸収波長を650~750nmの範囲に有する色素が、フタロシアニン化合物またはスクアリリウム化合物を含む、請求項1~6のいずれか1項に記載の組成物。
- 前記極大吸収波長を650~750nmの範囲に有する色素が、エチレン性不飽和結合性基を有する、請求項1~7のいずれか1項に記載の組成物。
- 前記極大吸収波長を650~750nmの範囲に有する色素が多量体である、請求項1~8のいずれか1項に記載の組成物。
- 極大吸収波長を500~600nmの範囲に有する色素をさらに含む、請求項1~9のいずれか1項に記載の組成物。
- カラーフィルタ用である、請求項1~10のいずれか1項に記載の組成物。
- 請求項1~11のいずれか1項に記載の組成物を硬化してなる硬化膜。
- 請求項1~11のいずれか1項に記載の組成物を支持体上に適用して組成物層を形成する工程と、
前記組成物層をパターン状に露光する工程と、
露光された前記組成物層の未露光部を現像除去して着色パターンを形成する工程と、
を含むパターン形成方法。 - 請求項13に記載のパターン形成方法を含む、カラーフィルタの製造方法。
- 請求項1~11のいずれか1項に記載の組成物を支持体上に適用して組成物層を形成し、硬化して着色層を形成する工程と、
前記着色層上にフォトレジスト層を形成する工程と、
前記フォトレジスト層を露光および現像することにより前記フォトレジスト層をパターニングしてレジストパターンを得る工程と、
前記レジストパターンをエッチングマスクとして前記着色層をドライエッチングする工程と、
を含む、カラーフィルタの製造方法。 - 請求項1~11のいずれか1項に記載の組成物を用いて製造されたカラーフィルタ、または、請求項14または15に記載のカラーフィルタの製造方法により製造されたカラーフィルタ。
- トリアリールメタン化合物、および
極大吸収波長を650~750nmの範囲に有する色素、
を含み、
波長450~500nmの範囲における厚み方向の透過率の最小値が80%以上であり、かつ、波長650~700nmの範囲における厚み方向の透過率の最大値が25%以下である、カラーフィルタ。 - 請求項16または17に記載のカラーフィルタを有する固体撮像素子。
- 請求項16または17に記載のカラーフィルタを有する画像表示装置。
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TW201608338A (zh) | 2016-03-01 |
JP6336092B2 (ja) | 2018-06-06 |
KR20170023160A (ko) | 2017-03-02 |
KR101924825B1 (ko) | 2018-12-04 |
CN106661342A (zh) | 2017-05-10 |
JPWO2016031574A1 (ja) | 2017-07-27 |
CN106661342B (zh) | 2019-07-16 |
TWI663473B (zh) | 2019-06-21 |
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