WO2016021043A1 - Appareil de sérigraphie - Google Patents

Appareil de sérigraphie Download PDF

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Publication number
WO2016021043A1
WO2016021043A1 PCT/JP2014/071003 JP2014071003W WO2016021043A1 WO 2016021043 A1 WO2016021043 A1 WO 2016021043A1 JP 2014071003 W JP2014071003 W JP 2014071003W WO 2016021043 A1 WO2016021043 A1 WO 2016021043A1
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WO
WIPO (PCT)
Prior art keywords
screen
screen mask
mask
camera
screen printing
Prior art date
Application number
PCT/JP2014/071003
Other languages
English (en)
Japanese (ja)
Inventor
清水　浩二
Original Assignee
富士機械製造株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 富士機械製造株式会社 filed Critical 富士機械製造株式会社
Priority to JP2016539774A priority Critical patent/JP6387100B2/ja
Priority to PCT/JP2014/071003 priority patent/WO2016021043A1/fr
Priority to CN201480080903.3A priority patent/CN106573462B/zh
Publication of WO2016021043A1 publication Critical patent/WO2016021043A1/fr

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41F—PRINTING MACHINES OR PRESSES
    • B41F15/00—Screen printers
    • B41F15/08—Machines
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41F—PRINTING MACHINES OR PRESSES
    • B41F15/00—Screen printers
    • B41F15/14—Details
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41F—PRINTING MACHINES OR PRESSES
    • B41F35/00—Cleaning arrangements or devices
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
    • H05K3/12—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using thick film techniques, e.g. printing techniques to apply the conductive material or similar techniques for applying conductive paste or ink patterns

Definitions

  • the present invention relates to a screen printing apparatus having a function of inspecting a dirt state of a screen mask.
  • Patent Document 1 Japanese Patent Laid-Open No. 10-202827
  • the print pattern opening of the screen mask is imaged with a camera.
  • the screen mask is cleaned by selecting a cleaning method corresponding to the clogged state.
  • Patent Document 2 Japanese Patent Laid-Open No. 10-217427
  • the camera when imaging the inspection target part of the screen mask with the camera, after the screen printing, the camera is moved from the retracted position that does not interfere with the screen printing operation to the position for imaging the inspection target part of the screen mask, and then the original image is taken. It is necessary to perform an operation of returning to the retracted position, and it takes time to move the camera, and it takes time to inspect the screen mask, which reduces productivity.
  • the present invention is an invention aimed at solving at least one of the above-mentioned problems.
  • a first invention is a screen printing apparatus that carries a circuit board under a screen mask and superimposes both of them to screen-print a printed pattern on the circuit board, and a camera for imaging the inspection target portion of the screen mask from below. And a moving mechanism that moves the camera along the lower surface of the screen mask, and the camera moves by the moving mechanism during a period from when the circuit board is loaded under the screen mask to when a screen printing operation is started.
  • the clean mask is obtained by moving the camera below the screen mask and imaging the inspection target portion of the screen mask with the camera during the period from when the circuit board is carried under the screen mask to when the screen printing operation is started. Therefore, the screen mask can be inspected immediately before screen printing on the circuit board that has been loaded.
  • the camera that inspects the dirty state of the screen mask uses a mark imaging camera that images a mask mark indicating a reference position on the lower surface of the screen mask, and the inspection means uses the moving mechanism to move the camera to the camera.
  • the inspection target portion of the screen mask while moving the mask mark on the lower surface of the screen mask from the retracted position that does not interfere with the screen printing operation to the mark imaging position for imaging or returning from the mark imaging position to the retracted position It is good to image from below. In this way, it is possible to image the inspection target part of the screen mask during the movement of the camera during imaging of the mask mark on the lower surface of the screen mask, which is necessary for imaging the inspection target part of the screen mask.
  • the moving time of the camera can be shortened.
  • the inspection target portion of the screen mask is configured such that the moving distance of the camera that moves the camera between the retracted position, the mark imaging position, and the position where the inspection target portion is imaged is shortened by the moving mechanism. It is good to set to. In this way, it is possible to shorten the moving time of the camera by shortening the moving distance of the camera necessary for imaging the inspection target portion of the screen mask.
  • a screen printing apparatus for carrying out a screen printing of a printed pattern on the circuit board by carrying the circuit board under the screen mask and superimposing the circuit boards, and a cleaning unit for cleaning the screen mask from the lower surface side.
  • a camera that images the inspection target portion of the screen mask from below, a moving mechanism that moves the cleaning unit and the camera along the lower surface of the screen mask, and a screen printing operation of the cleaning unit by the moving mechanism.
  • the screen is moved by the camera while the cleaning unit is moved to the cleaning position for cleaning the screen mask from an unobstructed retract position, or during the cleaning operation or after the cleaning unit is returned to the retract position.
  • Image recognition by imaging the disk inspected portion from below, is obtained by a structure in which a test means for checking the contamination condition of the screen mask on the basis of the recognition result.
  • the inspection target portion of the screen mask can be imaged using the moving time of the cleaning unit for the cleaning operation, and the time required to image the inspection target portion of the screen mask can be shortened. it can.
  • the inspection target portion of the screen mask may be designated by a production program, or the printed state of the circuit board after screen printing is inspected. You may make it designate the site
  • the inspection target portion of the screen mask is a print pattern opening designated from among print pattern openings for screen printing a print pattern on the circuit board (hereinafter referred to as “print pattern opening to be inspected”).
  • the inspection unit stores, in the storage unit, an image of the print pattern opening to be inspected obtained by imaging the print pattern opening to be inspected with the camera, which is not contaminated in advance, as a reference image.
  • the image of the inspection target print pattern opening imaged by the camera at the time of inspection of the contamination state may be compared with the reference image to inspect the contamination state in the inspection target print pattern opening portion. . In this way, even when it is difficult to distinguish between a screen mask and dirt in normal image recognition, it is possible to accurately inspect the state of dirt attached to the print pattern opening of the screen mask.
  • a screen printing apparatus for bringing a circuit board under a screen mask and superimposing the circuit boards to screen-print a printed pattern on the circuit board, wherein the squeegee of the screen mask moves.
  • a printing test pattern opening for inspecting the dirt state of the screen mask is formed in the ging area, and the print test for the screen mask is performed. It is configured to include a camera that images the pattern opening, and an inspection unit that images the print test pattern opening by the camera, recognizes the image, and inspects the contamination state of the screen mask based on the recognition result. .
  • the present invention inspects the contamination state of the print test pattern opening formed on the screen mask to estimate the contamination state of the entire screen mask.
  • the screen printed on the circuit board is printed with a print pattern and a print test pattern by the print pattern opening and the print test pattern opening of the screen mask during screen printing.
  • the printed print test pattern may be imaged by the camera and image recognition may be performed, and the printed state of the circuit board may be inspected based on the recognition result.
  • the present invention inspects the print state of a print test pattern screen-printed on a circuit board and estimates the print state of the entire circuit board.
  • the printing test pattern opening of the screen mask is miniaturized to the same degree or less than the finest printing pattern opening of the printing pattern opening. In this way, the contamination state of the print test pattern opening where the print defect is likely to occur at the same level as or more than the fine print pattern opening where the print defect is most likely to occur among the print pattern openings of the screen mask.
  • the print state of the print test pattern screen-printed on the circuit board can be inspected to accurately estimate the dirt state (necessity of cleaning) of the entire screen mask and the print state of the print pattern of the entire circuit board.
  • a screen printing apparatus for carrying a screen pattern onto the circuit board by carrying the circuit board below the screen mask and superimposing the circuit boards on the circuit board, wherein the print pattern opening to be inspected by the screen mask is provided.
  • a camera that picks up the image from below, a moving mechanism that moves the camera along the lower surface of the screen mask, and the moving mechanism that moves the camera to a position where the print pattern opening to be inspected fits in the periphery of the field of view.
  • an inspection unit that captures an image of the print pattern opening to be inspected with the camera, recognizes the image, and inspects a dirt state of the print pattern opening to be inspected based on the recognition result. Is. In this configuration, the camera is moved to a position where the print pattern opening to be inspected is placed around the field of view, and the print pattern opening to be inspected is imaged by the camera. The attached dirt can be imaged and inspected from obliquely below.
  • a cleaning unit for cleaning the screen mask from the lower surface side is provided, and the screen mask is removed from the cleaning unit when dirt necessary for cleaning is detected based on an inspection result of the inspection means. You may make it clean by. In this way, the screen mask can be cleaned by the cleaning unit only when the dirt necessary for cleaning is detected from the inspection result of the inspection means, and the number of cleanings can be minimized.
  • the screen mask may be inspected for dirt, and when the dirt necessary for cleaning is detected, the screen mask cleaning may be executed again. In this way, when the cleaned screen mask has left uncleaned dirt to be cleaned, the screen mask can be cleaned again and the remaining dirt can be wiped off.
  • the inspection means inspects the contamination state of the screen mask after the cleaning of the screen mask is performed, stops the operation of the screen printing apparatus when the contamination necessary for cleaning is detected, and displays and / or sounds. May be notified to the operator. In short, if the screen mask has been cleaned but the stains have not been sufficiently wiped off, there may be some trouble with the cleaning operation. It encourages the person to check.
  • FIG. 1 is a diagram for explaining the configuration of a screen printing apparatus showing Embodiment 1 of the present invention.
  • 2A to 2C are diagrams for explaining the printing operation of the screen printing apparatus.
  • FIG. 3 is a diagram for explaining the operation of imaging the mask mark on the lower surface of the screen mask.
  • FIG. 4 is a diagram for explaining a screen mask cleaning operation.
  • FIG. 5 is a block diagram showing the configuration of the control system of the screen printing apparatus.
  • FIG. 6 is a bottom view of a screen mask used in Embodiment 4 of the present invention.
  • FIG. 7 is a view for explaining the position of the print pattern opening to be inspected in the camera field of view according to the fifth embodiment of the present invention.
  • FIGS. 1 A first embodiment of the present invention will be described with reference to FIGS. First, the configuration of the screen printing apparatus will be described with reference to FIG.
  • the elevator 11 serving as the base of the screen printing apparatus is configured to slide in the vertical direction (Z direction) along the elevator guide 14 by driving the Z1 axis feed screw mechanism 13 by the Z1 axis motor 12. ing.
  • a base portion 15 is provided on the elevator 11 so that the position of the base portion 15 can be adjusted in the X, Y and ⁇ directions, and a Z2-axis motor 16 and a Z3-axis motor 17 are fixed to the base portion 15.
  • the Z2-axis motor 16 drives the Z2-axis feed screw mechanism 18 to raise and lower the backup pin 20 for receiving and supporting the circuit board 19 from below.
  • the Z3-axis motor 17 drives the Z3-axis feed screw mechanism (not shown) to raise and lower the side clamper 21 that clamps the both side edges of the circuit board 19.
  • the distance between the side clampers 21 on both sides is adjusted by the feed screw mechanism 22 in accordance with the width of the circuit board 19 to be clamped.
  • a conveyor 23 for loading and unloading the circuit board 19 is provided, and both side edges of the circuit board 19 are clamped by the side clamper 21 on the conveyor 23.
  • the mask support plate 24 is fixed to the base portion 15 adjacent to each side clamper 21, and the distance between the mask support plates 24 on both sides is adjusted by the feed screw mechanism 25.
  • a screen mask 26 (metal mask) is horizontally disposed above the mask support plate 24 and the side clamper 21, and a squeegee 27 is disposed above the screen mask 26.
  • the squeegee 27 is moved along the upper surface of the screen mask 26 by a squeegee moving mechanism 30 (see FIG. 5).
  • the screen mask 26 is formed with a print pattern opening 31 for printing a print pattern such as a solder pattern on the circuit board 19, and a plurality of locations on the lower surface of the screen mask 26 (for example, two locations in the diagonal direction or four directions).
  • Mask marks 32 (see FIG. 3) for positioning reference positions in the X, Y, and ⁇ directions are formed at four locations.
  • lands or the like for printing a print pattern such as a solder pattern is formed on the upper surface of the circuit board 19, and a plurality of locations (for example, two locations in the diagonal direction or four locations in the four directions).
  • a substrate mark 33 (see FIG. 3) for positioning a reference position in the X, Y, and ⁇ directions is formed.
  • the screen printing apparatus is provided with a mark imaging camera 34 that images an imaging target region such as the board mark 33 of the circuit board 19 and the mask mark 32 of the screen mask 26. It has been.
  • the camera 34 is moved in the X and Y directions along the lower surface of the screen mask 26 by a moving mechanism 36 (see FIG. 5).
  • On the lens side of the camera 34 the circuit board 19 side and the screen mask 26 are provided.
  • a prism 35 is mounted for imaging both sides.
  • the camera 34 is moved between the circuit board 19 and the screen mask 26 with the space between the circuit board 19 and the screen mask 26 being spaced before the screen printing.
  • the camera 34 is retracted outside the circuit board 19 and screen printing is performed with the screen mask 26 superimposed on the circuit board 19. .
  • a cleaning unit 41 for wiping off dirt (residual residue of printing material) adhering to the screen mask 26 is moved in the Y direction (or X) along the lower surface of the screen mask 26 by the moving mechanism 36 (see FIG. 5).
  • the cleaning unit 41 is provided with a cleaning head 42 having a suction groove (not shown) that opens upward so as to move up and down, and the cleaning paper 43 can be replaced across the upper surface of the cleaning head 42. It is set.
  • the cleaning head 42 or the cleaning unit 41
  • the cleaning paper 43 is brought into contact with the lower surface of the screen mask 26, and air is supplied from the suction groove into the cleaning head 42.
  • the cleaning unit 41 is moved along the lower surface of the screen mask 26 while sucking dirt (residual residue of printing material) adhering in the printing pattern opening 31 of the screen mask 26 toward the cleaning paper 43 side.
  • the cleaning paper 43 wipes off the dirt adhering to the inside of the print pattern opening 31 of the screen mask 26 or its lower surface side by moving it in the direction (or the X direction) and the cleaning paper 43 on the cleaning head 42.
  • Used part (dirt wiping part) Wound into one roll 44a, which is from the other roll 44b to pull out the unused portion of Kuriningupepa 43 on the cleaning head 42.
  • the width dimension in the X direction of the cleaning head 42 and the cleaning paper 43 is set to be larger than the width dimension in the X direction of the screen mask 26, and the cleaning unit 41 is moved in the Y direction along the lower surface of the screen mask 26.
  • the entire lower surface of the screen mask 26 can be cleaned by performing the cleaning operation once.
  • the cleaning head 42 (or the cleaning unit 41) is lowered by the elevating mechanism 37 (see FIG. 5), and the cleaning paper 43 on the cleaning head 42 is separated from the lower surface of the screen mask 26.
  • the moving mechanism 36 moves the cleaning unit 41 to a retracted position that does not interfere with the screen printing operation.
  • the moving mechanism 36 that moves the cleaning unit 41 and the camera 34 integrally moves the cleaning unit 41 and the camera 34 in the X direction (or Y direction) and moves in the Y direction (or X direction). Is configured to move the cleaning unit 41 and the camera 34 separately.
  • a control device 51 (see FIG. 5) that controls the operation of the screen printing apparatus configured as described above is configured mainly with a microcomputer, and includes an input device 52 such as a keyboard, a mouse, and a touch panel, a hard disk, a RAM, and a ROM. Are connected to a storage device 53 (storage means) such as a liquid crystal display or a CRT.
  • the control device 51 of the screen printing apparatus controls the operation of screen printing a print pattern such as a solder pattern on the circuit board 19 carried under the screen mask 26 as follows.
  • the distance between the mask support plates 24 on both sides is narrowed in advance so that the tip of each mask support plate 24 protrudes inward from the side clamper 21.
  • the conveyor 23 is stopped and the circuit board 19 is stopped at a position directly above the backup pin 20.
  • the backup pin 20 is raised by the Z2-axis motor 16 so that the circuit board 19 is pushed up by the backup pin 20 from below, and both end portions of the circuit board 19 are brought into contact with the lower surface of each mask support plate 24.
  • both side edges of the circuit board 19 are clamped by narrowing the distance between the side clampers 21 on both sides.
  • the distance between the mask support plates 24 on both sides is widened and the side clampers 21 on both sides are slightly raised by the Z3-axis motor 17, so that the mask support plate 24, the side clamper 21 and the circuit are connected.
  • the heights of the upper surfaces of the substrates 19 are made uniform.
  • the camera 34 is moved to a mark imaging position between the circuit board 19 and the screen mask 26, and the camera mark 33 on the upper surface of the circuit board 19 and the mask mark 32 on the screen mask 26 are sequentially moved by the camera 34.
  • the position of the substrate mark 33 and the position of the mask mark 32 are recognized by image processing, and the positional deviation amounts in the X, Y, and ⁇ directions between the circuit board 19 and the screen mask 26 are calculated based on the recognition result.
  • a deviation correction value in the X, Y, and ⁇ directions is obtained, and the position of the base portion 15 (circuit board 19) is adjusted in the X, Y, and ⁇ directions by the deviation correction value to obtain the circuit board 19 and the screen mask 26.
  • the positional deviation (printing deviation) in the X, Y, and ⁇ directions is corrected.
  • the mask support plate 24, the side clamper 21, and the circuit board 19 are integrally raised, and these three components are shown in FIG. As shown in c), it is stopped at a position where it is lightly brought into contact with the lower surface of the screen mask 26.
  • the squeegee 27 is lowered in parallel with or before or after the substrate raising operation to bring the squeegee 27 into contact with the upper surface of the screen mask 26.
  • the squeegee 27 is moved along the upper surface of the screen mask 26 to screen-print the print pattern on the upper surface of the circuit board 19.
  • the mask support plate 24, the side clamper 21 and the circuit board 19 are integrally lowered to the original height position, the clamp by the side clamper 21 is released, and the screen printed circuit board 19 is removed. It is carried out of the screen printing device by the conveyor 23.
  • control device 51 of the screen printing apparatus also functions as an inspection means for inspecting the stain state of the screen mask 26 (attachment state of the remaining residue of the printing material), and the circuit board 19 is carried below the screen mask 26.
  • the moving mechanism 36 moves the camera 34 below the screen mask 26, and the camera 34 picks up the image of the inspection target portion of the screen mask 26 from below and recognizes the image.
  • the contamination state of the screen mask 26 is inspected. In this case, every time the circuit board 19 is carried under the screen mask 26, the contamination state of the screen mask 26 may be inspected each time, or each time the number of circuit boards 19 carried in reaches a predetermined number. In addition, the contamination state of the screen mask 26 may be inspected.
  • the portion to be inspected of the screen mask 26 is a fine print that is the same as or close to the finest print pattern opening 31 of the print pattern openings 31 for screen-printing the print pattern on the circuit board 19.
  • This is a pattern opening 31.
  • the print pattern opening 31 becomes finer, the print pattern opening 31 is more likely to be clogged with dirt (residue of the printing material), and therefore the fine print pattern which is a part of the screen mask 26 where dirt is likely to adhere.
  • the contamination state of the opening 31 is estimated.
  • the inspection target part (print pattern opening 31 to be inspected) of the screen mask 26 may be designated by a production program (production job), or the printed state of the circuit board 19 after screen printing is inspected.
  • a part having a high occurrence rate of printing defects obtained from an inspection result of a printing inspection apparatus (not shown) may be designated as an inspection target part.
  • a portion of the screen mask 26 where printing defects are likely to occur can be designated as the inspection target portion, and stains that cause printing failures can be detected at an early stage. be able to.
  • the moving mechanism 36 moves the camera 34 from the retract position that does not interfere with the screen printing operation to the mark image capturing position for capturing the mask mark 32 on the lower surface of the screen mask 26 or retracts from the mark image capturing position. In the middle of returning to the position, the print pattern opening 31 to be inspected of the screen mask 26 is imaged from below.
  • the inspection target print pattern opening 31 of the screen mask 26 is moved by the moving mechanism 36 between the retracted position, the mark imaging position, and the position where the inspection target print pattern opening 31 is imaged.
  • the moving distance of the camera 34 is set to be short.
  • control device 51 of the screen printing apparatus cleans the screen mask 26 by the cleaning unit 41 when it detects the dirt that needs to be cleaned from the inspection result of the dirt state of the screen mask 26.
  • the screen mask 26 can be cleaned by the cleaning unit 41 only when the dirt that needs to be cleaned is detected from the inspection result of the dirt state of the screen mask 26, and the number of cleanings can be minimized. Can be suppressed.
  • the camera 34 again captures an image of the print pattern opening 31 to be inspected from the lower side, reexamines the contamination state of the screen mask 26, and the contamination that needs to be cleaned.
  • the cleaning of the screen mask 26 may be executed again. In this way, when the cleaned screen mask 26 has left uncleaned dirt to be cleaned, the screen mask 26 can be cleaned again and the remaining dirt can be wiped off.
  • the screen mask 26 is rechecked for contamination, and when the contamination necessary for cleaning is detected, the operation of the screen printing apparatus is stopped and the display and / or display on the display device 54 is stopped.
  • the operator may be notified by voice. In short, even if the screen mask 26 is cleaned, if the dirt cannot be sufficiently wiped off, there is a possibility that some trouble has occurred in the cleaning operation, so the operation of the screen printing apparatus is stopped, It prompts the operator to check.
  • the camera 34 is moved below the screen mask 26 during the period from when the circuit board 19 is carried below the screen mask 26 to when the screen printing operation is started. Since the print pattern opening 31 to be inspected 26 is imaged to inspect the dirt state of the clean mask 26, the dirt state of the screen mask 26 is inspected immediately before the printed circuit board 19 is screen-printed. Can do.
  • the moving mechanism 36 moves the camera 34 from the retract position that does not interfere with the screen printing operation to the mark image capturing position for capturing the mask mark 32 on the lower surface of the screen mask 26 or retracts from the mark image capturing position. Since the print pattern opening 31 to be inspected of the screen mask 26 is imaged from below while returning to the position, the screen mask is moved during the movement of the camera 34 when imaging the mask mark 32 on the lower surface of the screen mask 26. 26, the print pattern opening 31 to be inspected can be imaged, and the movement time of the camera 34 required to image the print pattern opening 31 to be inspected of the screen mask 26 can be shortened. Time can be shortened.
  • Example 2 of the present invention will be described. However, description of the substantially same parts as those in the first embodiment will be omitted or simplified, and different parts will be mainly described.
  • the camera 34 picks up an image of the print pattern opening 31 to be inspected by the camera 34 during the period from when the circuit board 19 is carried under the screen mask 26 to when the screen printing operation is started.
  • the control device 51 of the screen printing apparatus removes the screen mask 26 from the retracted position where the moving unit 36 does not interfere with the screen printing operation.
  • the camera 34 uses the camera 34 to inspect the region to be inspected (the object to be inspected). Is the print pattern opening 31) downward? Image recognition by the image pickup, so that checking the contamination condition of the screen mask 26 on the basis of the recognition result.
  • the camera 34 is arranged on the cleaning position side with respect to the cleaning unit 41, and the inspection target portion of the screen mask 26 is image-recognized while moving the cleaning unit 41 from the retracted position to the cleaning position. If the contamination state is inspected, the contamination state of the screen mask 26 can be inspected immediately before the start of the cleaning operation, and based on the inspection result, it is determined that the contamination necessary for cleaning is not attached to the screen mask 26. In this case, the cleaning unit 41 may be returned to the retracted position without performing the cleaning operation.
  • the camera 34 is disposed on the opposite side of the cleaning position 41 with respect to the cleaning unit 41, and the inspection target portion of the screen mask 26 is image-recognized while returning the cleaning unit 41 to the retracted position after the cleaning operation. If the dirt state of the screen 26 is inspected, the dirt state of the screen mask 26 immediately after the cleaning operation can be inspected, and the screen mask 26 is left with a stain that needs to be cleaned based on the inspection result. If it is determined, the cleaning operation may be executed again to reexamine the contamination state of the screen mask 26 immediately after the cleaning operation.
  • the operation of the screen printing apparatus is stopped and the operator is notified by the display and / or voice of the display device 54. You may make it announce. In short, if the dirt cannot be wiped off sufficiently even after the cleaning operation is executed twice, the screen printing device may stop operating because some trouble may have occurred in the cleaning operation. Urge the operator to check.
  • the inspection target part of the screen mask 26 can be imaged using the moving time of the cleaning unit 41 for the cleaning operation, and the inspection target part of the screen mask 26 is imaged.
  • the time required for this can be shortened, and the cycle time can be shortened.
  • the third embodiment the method for recognizing the image of the dirty state of the screen mask 26 is changed, and the other items are substantially the same as those in the first or second embodiment.
  • the control device 51 of the screen printing apparatus captures an image of the print pattern opening 31 to be inspected, which is obtained by capturing an image of the print pattern opening 31 to be inspected with the camera 34, which is not contaminated in advance. Is stored in the storage device 53 as a reference image, and the image of the print pattern opening 31 to be inspected captured by the camera 34 when inspecting the dirt state of the screen mask 26 is compared with the reference image. The dirt state in the print pattern opening 31 is inspected.
  • Embodiment 4 of the present invention will be described with reference to FIG.
  • substantially the same parts as those in the first embodiment are denoted by the same reference numerals, description thereof is omitted or simplified, and different parts are mainly described.
  • the stain state of the screen mask 26 is displayed in the squeegee area 61 in which the squeegee 27 of the screen mask 26 moves.
  • a print test pattern opening 62 for inspection is formed.
  • the position where the print test pattern opening 62 is formed is set so that the moving distance of the camera 34 moved between the retracted position of the camera 34, the mark imaging position, and the position where the print test pattern opening 62 is imaged is shortened. Good.
  • the printing test pattern opening 62 is miniaturized to the same degree or less than the finest printing pattern opening 31 among the printing pattern openings 31.
  • the control device 51 of the screen printing apparatus sets the inspection target portion of the screen mask 26 as the print test pattern opening 62, and inspects the contamination state of the screen mask 26 at the same time as the first embodiment or the second embodiment.
  • the camera 34 captures an image of the print test pattern opening 31 and recognizes the image. Based on the recognition result, the dirt state of the screen mask 26 is inspected. In short, the contamination state of the printing test pattern opening 62 formed on the screen mask 26 is inspected to estimate the contamination state of the entire screen mask 26.
  • an image of the print test pattern opening 62 obtained by imaging the print test pattern opening 62 on which the dirt is not attached in advance with the camera 34 is stored in the storage device 53 as a reference image.
  • the image of the print test pattern opening 62 captured by the camera 34 is compared with the reference image to check the stain state in the print test pattern opening 62. You may make it do.
  • the printing pattern and the printing test pattern are screen-printed on the circuit board 19 by the printing pattern opening 31 and the printing test pattern opening 62 of the screen mask 26, and the control device 51 of the screen printing apparatus.
  • the print test pattern screen-printed on the circuit board 19 is imaged by the camera 34 and image recognition is performed, and the printed state of the circuit board 19 is inspected based on the recognition result. In short, the print state of the print test pattern screen-printed on the circuit board 19 is inspected, and the print state of the print pattern of the entire circuit board 19 is estimated.
  • the print test pattern opening 62 of the screen mask 26 is miniaturized to the same degree or less than the finest print pattern opening 31 of the print pattern openings 31.
  • the print test pattern opening 62 which has the same degree as the fine print pattern opening 31 where the print defect is most likely to occur among the print pattern openings 31 of the screen mask 26, or the print test pattern opening 62 where the print defect is more likely to occur,
  • the print state of the print test pattern screen-printed on the circuit board 19 can be inspected to accurately estimate the dirt state (necessity of cleaning) of the entire screen mask 26 and the print state of the print pattern of the entire circuit board 19. .
  • Example 5 of the present invention will be described with reference to FIG.
  • substantially the same parts as those in the first embodiment are denoted by the same reference numerals, description thereof is omitted or simplified, and different parts are mainly described.
  • the control device 51 of the screen printing apparatus checks the dirt state of the screen mask 26 by the operation of any of the first to third embodiments.
  • the print pattern opening 31 to be inspected is moved to a position around the periphery, the print pattern opening 31 to be inspected is imaged by the camera 34, the image is recognized, and the print pattern opening 31 to be inspected based on the recognition result. I am trying to inspect the dirt condition.
  • the camera 34 when the dirt state of the print test pattern opening 62 is inspected, the camera 34 is moved to a position where the print test pattern opening 62 is placed around the visual field, and the print test pattern is detected by the camera 34.
  • the opening 62 may be imaged and image recognition may be performed, and the dirt state of the print test pattern opening 62 may be inspected based on the recognition result.
  • the present invention is not limited to the screen printing apparatus having the configuration shown in FIGS. 1 and 2, and can be implemented with various modifications within the scope not departing from the gist, such as the configuration of the screen printing machine may be appropriately changed. Needless to say.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Inking, Control Or Cleaning Of Printing Machines (AREA)
  • Screen Printers (AREA)
  • Manufacturing Of Printed Wiring (AREA)
  • Electric Connection Of Electric Components To Printed Circuits (AREA)

Abstract

Selon l'invention, dans la période entre le moment où une carte de circuit (19) est placée en dessous d'un masque d'écran (26) d'un appareil de sérigraphie et le moment où l'opération de sérigraphie commence, l'état d'encrassement du masque d'écran (26) est inspecté sur la base de résultats de vérification obtenus en déplaçant une caméra (34) en dessous du masque d'écran (26) avec un mécanisme de déplacement (36), en photographiant une région du masque d'écran (26) à inspecter par en dessous avec la caméra (34) et en vérifiant l'image. Parmi les ouvertures de motif d'impression (31) à travers lesquelles un motif d'impression est sérigraphié sur la carte de circuit (19), la région du masque d'écran (26) qui doit être inspectée est une ouverture de motif d'impression fine (31) qui a la même taille que l'ouverture de motif d'impression la plus fine (31) ou une taille similaire à celle-ci. Ceci parce que plus les ouvertures de motif d'impression deviennent fines (31), plus les ouvertures de motif d'impression (31) sont obstruées facilement par des débris (résidus de matériaux d'impression).
PCT/JP2014/071003 2014-08-08 2014-08-08 Appareil de sérigraphie WO2016021043A1 (fr)

Priority Applications (3)

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JP2016539774A JP6387100B2 (ja) 2014-08-08 2014-08-08 スクリーン印刷装置
PCT/JP2014/071003 WO2016021043A1 (fr) 2014-08-08 2014-08-08 Appareil de sérigraphie
CN201480080903.3A CN106573462B (zh) 2014-08-08 2014-08-08 丝网印刷装置

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PCT/JP2014/071003 WO2016021043A1 (fr) 2014-08-08 2014-08-08 Appareil de sérigraphie

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WO2018089357A1 (fr) 2016-11-08 2018-05-17 Bristol-Myers Squibb Company DÉRIVÉS D'INDAZOLE EN TANT QU'ANTAGONISTES DE L'INTÉGRINE αV
WO2018219434A1 (fr) * 2017-05-30 2018-12-06 Applied Materials Italia S.R.L. Appareil, dispositif à écran, système et procédé de sérigraphie sur un substrat servant à la fabrication d'une photopile
JP2019519390A (ja) * 2016-06-17 2019-07-11 京東方科技集團股▲ふん▼有限公司Ｂｏｅ Ｔｅｃｈｎｏｌｏｇｙ Ｇｒｏｕｐ Ｃｏ．，Ｌｔｄ． 洗浄装置及び洗浄方法
WO2021250989A1 (fr) * 2020-06-12 2021-12-16 Ckd株式会社 Procédé de fabrication de substrat, procédé d'inspection de masque d'écran et dispositif d'inspection de masque d'écran

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CN107144905B (zh) * 2017-05-08 2020-05-15 湖北东田光电材料科技有限公司 带有吸光边框的滤光片及制备装置
EP3804991B1 (fr) * 2018-06-04 2022-09-14 Fuji Corporation Machine de sérigraphie
WO2020044388A1 (fr) * 2018-08-27 2020-03-05 株式会社Ｆｕｊｉ Machine d'impression de soudure
TWI737520B (zh) * 2020-08-14 2021-08-21 友達光電股份有限公司 顯示面板

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JP2019519390A (ja) * 2016-06-17 2019-07-11 京東方科技集團股▲ふん▼有限公司Ｂｏｅ Ｔｅｃｈｎｏｌｏｇｙ Ｇｒｏｕｐ Ｃｏ．，Ｌｔｄ． 洗浄装置及び洗浄方法
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WO2018219434A1 (fr) * 2017-05-30 2018-12-06 Applied Materials Italia S.R.L. Appareil, dispositif à écran, système et procédé de sérigraphie sur un substrat servant à la fabrication d'une photopile
WO2021250989A1 (fr) * 2020-06-12 2021-12-16 Ckd株式会社 Procédé de fabrication de substrat, procédé d'inspection de masque d'écran et dispositif d'inspection de masque d'écran
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