WO2015198694A1 - オゾン発生システムおよびその運転方法 - Google Patents
オゾン発生システムおよびその運転方法 Download PDFInfo
- Publication number
- WO2015198694A1 WO2015198694A1 PCT/JP2015/061533 JP2015061533W WO2015198694A1 WO 2015198694 A1 WO2015198694 A1 WO 2015198694A1 JP 2015061533 W JP2015061533 W JP 2015061533W WO 2015198694 A1 WO2015198694 A1 WO 2015198694A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- gas
- ozone
- ozone generator
- generator
- discharge
- Prior art date
Links
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B13/00—Oxygen; Ozone; Oxides or hydroxides in general
- C01B13/10—Preparation of ozone
- C01B13/11—Preparation of ozone by electric discharge
- C01B13/115—Preparation of ozone by electric discharge characterised by the electrical circuits producing the electrical discharge
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/34—Chemical or biological purification of waste gases
- B01D53/46—Removing components of defined structure
- B01D53/54—Nitrogen compounds
- B01D53/56—Nitrogen oxides
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B13/00—Oxygen; Ozone; Oxides or hydroxides in general
- C01B13/10—Preparation of ozone
- C01B13/11—Preparation of ozone by electric discharge
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B2201/00—Preparation of ozone by electrical discharge
- C01B2201/10—Dischargers used for production of ozone
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B2201/00—Preparation of ozone by electrical discharge
- C01B2201/10—Dischargers used for production of ozone
- C01B2201/12—Plate-type dischargers
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B2201/00—Preparation of ozone by electrical discharge
- C01B2201/20—Electrodes used for obtaining electrical discharge
- C01B2201/22—Constructional details of the electrodes
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B2201/00—Preparation of ozone by electrical discharge
- C01B2201/60—Feed streams for electrical dischargers
- C01B2201/64—Oxygen
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B2201/00—Preparation of ozone by electrical discharge
- C01B2201/70—Cooling of the discharger; Means for making cooling unnecessary
- C01B2201/74—Cooling of the discharger; Means for making cooling unnecessary by liquid
- C01B2201/76—Water
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B2201/00—Preparation of ozone by electrical discharge
- C01B2201/90—Control of the process
Definitions
- the present invention relates to an ozone generation system using an ozone generator that generates ozone using electric discharge and an operation method thereof.
- nitrogen oxide (NO x ) is generally produced as a by-product as ozone is generated.
- NO x nitrogen oxide
- N 2 O 5 is a sublimable substance that becomes a solid at a room temperature of 30 ° C. or lower, and easily changes between a solid and a gas depending on the temperature.
- N 2 O 5 is attached as a discharge product over almost the entire discharge space in the ozone generator.
- the periodic inspection once every 3 to 5 years is recommended by the manufacturer. At that time, the entire system is stopped, the ozone generator is opened to the atmosphere, and the electrodes are turned off. Maintenance work to remove and clean is performed. If the ozone generator is opened to the atmosphere with solid N 2 O 5 attached, there is a concern that N 2 O 5 reacts with moisture in the atmosphere to generate nitric acid (HNO 3 ) and corrodes the metal member. The In particular, when corrosion of the electrode portion occurs, there is a case where not only the ozone generation efficiency is lowered but also a short circuit between the electrodes is caused during re-operation. The gas dew point of the raw material gas is also an important management factor.
- Ozone is generated because moisture remaining in the ozone generator after release to the atmosphere and moisture accompanying the raw material gas react with N 2 O 5 generated in the ozone generator at the time of re-operation to produce HNO 3 secondary.
- the apparatus must have a sufficient gas purge (passage) and a low dew point of the source gas.
- a method of handling an ozone generator in which an ozone generator tank is heated and maintained using a hot water device, and N 2 O 5 adhering in the ozone generator is gasified and removed (for example, patents).
- Reference 1) it is proposed to remove N 2 O 5 , which is a factor that generates HNO 3 , from the ozone generator before the ozone generator is opened to the atmosphere.
- the gas is enclosed in an ozone generator tank, and in order to suppress the intrusion of moisture from the outside and prevent the generation of HNO 3 in the ozone generator, the operation is stopped.
- An ozone generator (see, for example, Patent Document 2) having a means for circulating gas has been proposed.
- the concern about corrosion of metal members caused by HNO 3 in the ozone generator is discussed on the premise that the ozone generator is opened to the atmosphere or in contact with moisture in the atmosphere, and measures are taken. I came.
- electrodes, N 2 O 5 and moisture which are HNO 3 generation factors, are generated inside the ozone generator, especially in the case of a cylindrical multi-tube ozone generator. It is important not to touch the inside.
- the gas used in the ozone generator should be low dew point to prevent the entrainment of moisture, and after the ozone is generated, before the atmosphere is released, the gas in the ozone generator must be sufficiently replaced. Thus, the remaining NO x is removed to prevent the electrode portion from coming into contact with HNO 3 .
- JP 2002-265204 A (paragraphs 0025 to 0035, FIGS. 1 to 3) JP-A-4-31302 (pages 5-6, FIG. 2) JP 2008-222495 A (paragraphs 0018 to 0024, FIGS. 2 to 4)
- the electrode tube shown here is a set of a metal ground electrode tube arranged concentrically and a high voltage electrode tube in which a conductive layer is provided on the inner surface of a dielectric tube made of glass or ceramics. .
- the diameter of one electrode tube to be applied tends to be reduced and reduced, and low-cost electrode tubes such as commercially available products can be used.
- the technology for forming the conductive layer is limited with respect to the high voltage electrode tube, and the formed conductive layer must be a thin film.
- the reduction in the thickness of the conductive layer has a great influence on the life of the apparatus because it has less resistance to corrosion and deterioration than a thick film. Therefore, in recent years, it has become necessary to further avoid contact between the conductive layer and HNO 3 .
- an efficient operation of an ozone generator has been carried out from the viewpoint of energy saving, and intermittent operation is increasing rather than continuous operation.
- intermittent operation a stop period of a predetermined period is provided after an operation period of a certain period, and during the stop period, an operation standby state in which the gas flow is stopped is entered.
- this outage period may range from several days to several weeks.
- the reaction in which HNO 3 is generated from N 2 O 5 and the reaction between HNO 3 and the metal are relatively fast reaction forms. Even in this short stop period, the above-described N 2 O 5 is reduced in the ozone generator.
- the included NO x and HNO 3 are desorbed and diffused, and the electrode portion is corroded and deteriorated.
- NO x and HNO 3 that are desorbed over time can be removed out of the ozone generator in real time if the raw material gas is always circulated through the ozone generator even during the shutdown period. For this reason, it is difficult for the user to accept the consumption of gas and the generation of costs in the ozone generator in the operation standby state in spite of providing the stop period.
- an ozone generation system using an ozone generator having an operation standby state in which gas is enclosed such as intermittent operation or temporary stop an The purpose is to suppress the corrosion of the electrode portion caused by HNO 3 (nitric acid) after reviewing the cause from the viewpoint of the operating situation.
- HNO 3 nitric acid
- the present invention relates to an ozone generator having discharge electrodes arranged opposite to each other to form a discharge space, a gas supply device for supplying a source gas containing oxygen to the ozone generator, and cooling water for cooling the discharge electrodes
- a cooling device a power supply device that supplies power for discharge to the discharge electrode
- a control unit that controls the gas supply device and the power supply device, the control unit from the gas supply device to the ozone generator
- An ozone generation operation period in which the ozone generator generates ozone by supplying raw material gas and supplying power from the power supply device to the discharge electrode, gas supply from the gas supply device to the ozone generator, and from the power supply device to the discharge electrode
- an ozone generation system that performs intermittent operation that alternately repeats an ozone generation operation standby period in which ozone is not generated and ozone is not generated, While circulating the gas in the gas generator, it is equipped with a gas circulation device that removes at least nitric acid in the gas to be circulated
- a gas discharge device that discharges the gas in the ozone generator into the atmosphere
- the control unit replaces the gas in the ozone generator with the raw material gas during the ozone generation operation standby period, Controls the gas in the ozone generator to leak into the atmosphere via the gas discharge device while maintaining the pressure in the ozone generator higher than the atmospheric pressure after the pressure is higher than the atmospheric pressure. is there.
- the gas enclosed in the ozone generator is circulated to the outside of the ozone generator, and at least HNO 3 is removed from the gas circulated to the outside. Therefore, it is possible to prevent diffusion of HNO 3 in the ozone generator during the ozone generation operation standby period.
- a gentle gas flow in one direction in the gas outlet side is formed in the ozone generator and NO diffuses in the ozone generator. x and HNO 3 are not present on the gas inlet side of the ozone generator. Therefore, corrosion caused by HNO 3 can be suppressed for the discharge electrode, and an ozone generation system with high reliability can be obtained.
- the ozone generator is sealed at a pressure higher than the atmospheric pressure to prevent moisture from entering from the outside. Conventionally, at this point, the water entrainment into the ozone generator is prevented, because the concentration of NO x in the device is also sufficiently small, generation of HNO 3 was thought to have been suppressed.
- HNO 3 produced based on the reaction with trace moisture contained in the low dew point gas, not in the atmosphere, has not been considered.
- the suitable stop process shown here shows making an ozone generator into a gas sealing state, after implementing sufficient gas purge after ozone generation
- the temperature of the ozone generator is increased before entering the gas-filled operation standby state to promote the gasification of N 2 O 5 remaining in the ozone generator, and N 2 at the time of gas replacement. It is an effective means to exhaust O 5 and HNO 3 by including them in a raw material gas or an external purge gas.
- O 5 and HNO 3 by including them in a raw material gas or an external purge gas.
- energy required for heating is required, and NO x and HNO 3 are converted into ozone generator. Therefore, it is necessary to refill the ozone generator whose pressure has decreased due to the exhaust gas, and it is inevitable that energy consumption and cost increase.
- N 2 O 5 by-produced in the ozone generator easily reacts with a trace amount of water entrained in the raw material gas to generate HNO 3 , so that not only when air is used as the raw material gas, but also PSA (Pressure Swing Adsorption, pressure swing adsorption) type oxygen generator, VPSA (Vaccum Pressure Swing Adsorption, oxygen pressure swing adsorption) type oxygen generator, and the like, which are relatively low in purity compared to liquid oxygen and oxygen cylinders ( The inventors have found that the same phenomenon as in the case of using air as the source gas occurs during the ozone generation standby period when oxygen is used as the source gas.
- liquid oxygen is used as a raw material gas, it is generally carried out with nitrogen of about 0.1 to 1% with respect to the liquid oxygen flow rate. In the operation standby period, the above-described problems are unlikely to occur.
- the present invention has been made mainly from the viewpoint of preventing diffusion.
- the present invention will be described with reference to embodiments.
- FIG. 1 to 3 are diagrams for explaining an ozone generation system and an operation method thereof according to Embodiment 1 of the present invention.
- FIG. 1 is a block diagram showing the equipment configuration and flow system of the ozone generation system.
- FIG. 2A is a cross-sectional view showing a configuration of a discharge electrode portion of the apparatus
- FIG. 2A is a cross-sectional view taken along a plane parallel to the gas flow direction of the discharge electrode portion
- FIG. 2B is a cross section perpendicular to the gas flow direction. It is sectional drawing in the -A line.
- FIG. 3 is a time chart for explaining the operation of the device when the ozone generator operates intermittently
- FIG. 4 is a flowchart showing the operation of the ozone generation system.
- the ozone generation system includes a gas supply device 1 for supplying a raw material gas, and an ozone generation device that generates ozone from the raw material gas supplied from the gas supply device 1 and outputs an ozonized gas.
- a power supply device 3 that applies an alternating high voltage to the ozone generator 2
- an ozone utilization facility 4 that performs ozone treatment using the output ozonized gas, and surplus ozonized gas discharged from the ozone utilization facility 4
- An exhaust ozone treatment unit 5 that removes ozone from the ozone generator, a cooling device 6 that circulates cooling water that cools the ozone generator 2, a gas circulation device 7 that circulates gas in the ozone generator 2, various valves, and all of these
- a control unit 8 for operating the ozone generation system.
- the broken line in a figure shows a typical control line.
- the gas supply device 1 indicates a compressor or blower when air is used as a raw material gas of the ozone generator 2, and a PSA or VPSA type oxygen generator when oxygen is used as a raw material gas. Moreover, when using a compressor or a blower, the water
- the source gas supplies the ozone generator 2 with pressurized air or oxygen gas generated by an oxygen generator as a gas containing oxygen.
- the ozone utilization facility 4 indicates a water treatment facility, a wastewater treatment facility, various oxidation treatment facilities, a semiconductor / liquid crystal production facility, and the like.
- the cooling device 6 includes a circulation pump that circulates cooling water for cooling the ozone generator 2, and a cooler that absorbs heat generated in the ozone generator 2 and cools the cooling water whose temperature has risen. ing.
- a circulation pump that circulates cooling water for cooling the ozone generator 2
- a cooler that absorbs heat generated in the ozone generator 2 and cools the cooling water whose temperature has risen.
- various heat-exchange type coolers of liquid-liquid type and liquid-gas type, or chillers of liquid-fluorocarbon refrigerant type can be used.
- As the cooling water general tap water is often used, but an antifreeze or a scale remover is mixed, or ion-exchanged water or pure water is sometimes used.
- the gas circulation device 7 includes a gas circulation unit 70 including a circulation fan or a circulation pump that is sealed from the outside air.
- the gas circulation device 7 sucks the gas in the ozone generator 2 from the gas outlet side port P2 of the ozone generator 2, and A closed system is constructed which is connected to the side port P ⁇ b> 1 so as to return the gas and is constituted by the ozone generator 2 and the gas circulation device 7.
- a gas purification unit 71 is provided on the suction side of the gas circulation unit 70.
- the gas purification unit 71 removes at least HNO 3 (nitric acid) from the gas in the ozone generator 2 sucked into the gas circulation unit 70.
- the operation of the ozone generator 2 is controlled through the control unit 8 based on a request command from the ozone utilization facility 4, and an intermittent operation is performed.
- the ozone generator 2 receives the operation command, the raw material gas is supplied from the gas supply device 1.
- the gas dew point in the ozone generator 2 becomes ⁇ 50 ° C. or lower, and when the ozone generator 2 is maintained at a predetermined operating pressure, cooling water is circulated from the cooling device 6 to the ozone generator 2.
- Ozone generation is started. While the generation of ozone continues, the gas circulation device 7 is stopped, and no gas is circulated through the gas circulation device 7.
- the ozone generation stops, and after the gas in the ozone generator 2 is sufficiently replaced with the raw material gas, the pressure in the ozone generator 2 exceeds the atmospheric pressure. It will be in the state sealed with gas so that it may become. Thereafter, the gas supply device 1 and the cooling device 6 are stopped. While the ozone generation is stopped and the ozone generator 2 is sealed with gas, the gas circulation device 7 is operated, and the gas sealed in the ozone generator 2 is replaced with the gas pressure in the ozone generator 2. Circulate to maintain atmospheric pressure or higher. As described above, the ozone generation and the operation and stop of the peripheral facilities are repeated based on the user's request, and the ozone generation system is efficiently operated.
- the ozone generator 2 is a silent discharge type ozone generator having discharge electrodes that are arranged to face each other and form a discharge space, and a dielectric is interposed between the discharge electrodes.
- various forms such as a parallel plate type or a cylindrical tube type can be applied to the electrode shape, here, as shown in FIG. 2, the discharge electrode portion 20 of the ozone generator 2 has a cylindrical tube type electrode shape.
- An ozone generator will be described as an example.
- the discharge electrode unit 20 is integrated with the high-voltage electrode 203 so as to cover the outer peripheral surface and one end side of the high-voltage electrode 203 and the cylindrical high-voltage electrode (conductive layer) 203 as the high-voltage side electrode.
- a high-voltage electrode tube 204 configured by a glass tube dielectric 202 is provided.
- the high voltage electrode tube 204 is sealed at one end so that the source gas flows only in the discharge space described later and does not pass through the high voltage electrode tube 204. Since O 3 and NO x generated by the discharge are much downstream in the gas flow direction, one end on the downstream side is sealed so that these O 3 and the like do not enter the inside of the high voltage electrode tube 204.
- the outer diameter of the high voltage electrode tube 204 is ⁇ 30 mm or less.
- the discharge space 205 is a gas flow path through which the source gas flows in the direction indicated by the arrow in the figure, and is also a space in which a discharge is generated by an alternating high voltage applied between the ground electrode tube 201 and the high voltage electrode tube 204. Further, inside the high voltage electrode tube 204, an end portion on one end side, which is inserted from the other end side where the power supply member 207 for applying a high voltage to the high voltage electrode 203 is opened and covered with the dielectric 202. Is provided with an electric field relaxation layer 208 for suppressing creeping discharge. The power supply member 207 is in contact with the high voltage electrode 203 outside the ground electrode tube 201 so that the arc when the short circuit between the electrodes occurs does not continue. Note that the power supply member 207 is not shown in the cross-sectional view of FIG. 2B.
- a large number of the discharge electrode portions 20 as described above are arranged in parallel according to the required ozone generation amount, and are stored in one tank.
- the power supply device 3 etc. which apply alternating current high voltage are provided, and the predetermined alternating voltage is applied to each discharge electrode part 20 by the power supply device 3 controlled by the control part 8.
- FIG. Source gas containing oxygen is supplied from the gas supply device 1 to the discharge space 205 of each discharge electrode unit 20, and an alternating high voltage is applied via the power supply member 207, and ozone is generated by discharging the source gas. Generated.
- the gap length d (hereinafter referred to as the gap length d) of the discharge space 205 is 0.1 mm or more and 0.6 mm or less, preferably 0.2 mm. It is set to 0.6 mm or less.
- the cooling efficiency of the discharge space 205 is improved and the ozone generation efficiency is improved as compared with an ozone generator in which the gap length exceeds 0.6 mm.
- the electric field strength of 205 is increased, NO x increases by-produced.
- feed gas is air
- setting the gap length d to less than 0.3 mm the discharge electric field strength in the space 205 becomes too large to increase remarkably the production of NO x, cause a decrease in ozone generation efficiency, preferably Absent.
- the source gas is rich in oxygen, the generation of NO x is reduced as compared with the case where generation of ozone at a higher concentration is required and the case where air is used as the source gas. d can be employed.
- 0.1 mm is close to the limit and is preferably 0.2 mm or more. Furthermore, when the gap length d is set to a value exceeding 0.6 mm, the temperature of the discharge space 205 is excessively increased, and the ozone generation efficiency is decreased.
- the ozone generation efficiency varies not only with the gap length d but also with the gas pressure P in the discharge space 205.
- the gas pressure P is 0.2 MPaG (G: gauge pressure) or less, preferably 0.05 MPaG or more and less than 0.2 MPaG, more preferably 0.1 MPaG or more and 0.2 MPaG. Is set to less than In particular, when the source gas is air, the increase in the gas pressure P suppresses the generation of NO x in the discharge space 205.
- the gas pressure P is a discharge pressure of the gas supply device 1, for example, a maximum discharge pressure of about 0.2 MPaG in the case of a blower, and an ozonized gas pressure necessary for the ozone utilization facility 4 (for example, at least 0.00 for a water treatment device).
- the upper and lower limits are also determined by 05 MPaG or more.
- the ozone generator 2 does not correspond to the second type pressure vessel regulations, the legal restrictions are reduced, and handling and the like are facilitated.
- the gap length d is 0.1 mm or more and 0.6 mm or less
- the source gas when the source gas is air, the source material is 0.3 mm or more and 0.6 mm or less, as in the case of using an oxygen generator.
- the gas is rich in oxygen and high-concentration ozone is required, it is set to 0.1 mm or more and 0.3 mm or less, and further, by adjusting the gas pressure P, the type of raw material gas and the required ozone Depending on the concentration, a configuration is selected such that the ozone generation efficiency is the highest and the amount of NO x produced is small.
- input power density to be introduced into the ozone generator 2 is 0.05 ⁇ 0.6 W / cm 2, when the raw material gas is air, 0.1 W / cm 2 or more 0.4W / cm 2 or less, when the raw material gas as in the case of using the oxygen generator is oxygen-rich is preferably set to 0.3 W / cm 2 or more 0.6 W / cm 2 or less.
- the input power density is also an index representing the size of the ozone generator 2, and the apparatus becomes smaller as the input power density is higher.
- an increase in input power density causes a temperature increase in the discharge space 205, and the ozone generation efficiency decreases.
- the temperature of the discharge space 205 is low, and therefore it is necessary that the input power density is not excessively increased.
- the input power density is less than 0.05 W / cm 2 , it is not preferable because variations occur in the discharge state and stable discharge cannot be maintained.
- the conventional ozone generation system refers to an ozone generation system having a configuration in which the gas circulation unit 70 is removed from the ozone generation system according to Embodiment 1 of the present invention shown in FIG.
- An operation (ozone generation) command is issued from the ozone utilization facility 4 to the ozone generator 2 together with the required ozone generation amount.
- the valve V1 When the ozone generator 2 receives the ozone generation command, the valve V1 is opened among the valves V1 and V2 in the closed state, and the raw material gas is introduced from the gas supply device 1 to the ozone generator 2.
- the valve V2 is opened when the pressure in the ozone generator 2 reaches a predetermined pressure equal to or higher than atmospheric pressure. Thereafter, if a predetermined amount of cooling water is introduced from the cooling device 6 and the gas dew point in the ozone generator 2 is ⁇ 50 ° C. or lower, ozone generation is performed for a predetermined time.
- the above state is referred to as an ozone generation operation period.
- the ozone generator 2 receives an operation standby (ozone generation stop) command from the ozone utilization facility 4 or a signal indicating that a predetermined operation time has been reached from the control unit 8, the ozone generation stops, Thereafter, the supply of cooling water is stopped.
- an operation standby (ozone generation stop) command from the ozone utilization facility 4 or a signal indicating that a predetermined operation time has been reached from the control unit 8
- the ozone generation stops Thereafter, the supply of cooling water is stopped.
- the generated gases O 3 , NO x and HNO 3 are exhausted from the ozone generator 2, so that the gas in the ozone generator 2 is kept for a predetermined time (the capacity of the ozone generator and the flow rate of the source gas). However, it is usually necessary for 30 minutes to 1 hour), or the raw material gas is replaced until the indicated value of the ozone concentration meter in the ozone generator 2 becomes zero.
- the valves V1 and V2 are closed so that the pressure in the ozone generator 2 is maintained at atmospheric pressure or higher, and the supply of the raw material gas is stopped.
- the gas supply device 1 and the cooling device 6 may simply stop the pump or the compressor, and the main power supply may remain on. .
- the above state is referred to as an ozone generation operation standby period.
- an elapse of a predetermined ozone generation operation standby period or an ozone generation instruction is received from the ozone utilization facility 4
- the supply of the raw material gas is started, the valves V1 and V2 are opened, and the ozone generation operation period is repeated again.
- the intermittent operation of the ozone generator is established by repeating the ozone generation operation period and the ozone generation operation standby period as described above.
- the ozone generation operation standby period Since the settings of the ozone generation operation period and the ozone generation operation standby period are set based on the user's request, there are system conditions in which the ozone generation operation standby period is short. There is a case where the valves V1 and V2 are in a closed state without sufficiently securing a time for exhausting the generated gas from the ozone generator 2. On the other hand, there is a case where the ozone generation operation standby period is extremely long over several weeks. In addition, in the present application, the ozone generation operation standby period also includes a case where the ozone generation apparatus stops due to a periodic inspection or the like other than the ozone generation apparatus main body.
- NO x and HNO 3 remain adsorbed and adhered to the inner surface of the ground electrode tube 201 of the ozone generator 2, the outer surface of the high voltage electrode 203 and the inner wall surface of the tank.
- oxides generated due to oxidation and sputtering of stainless steel, which is the material of the ground electrode are deposited on the inner surface of the ground electrode and the outer surface of the high voltage electrode. It was found that the adsorbed NO x and HNO 3 could not be easily exhausted out of the ozone generator 2 even after long-term gas replacement.
- the supply of the raw material gas is continued even during the ozone generation operation standby period, If the gas is in circulation, the desorbed NO x and HNO 3 are exhausted out of the ozone generator 2 each time.
- the ozone generation operation standby period is a state in which the gas is sealed, the inside of the ozone generator 2 is a uniform pressure space, and there is no gas circulation. Therefore, NO x and HNO 3 that are gradually desorbed are not exhausted out of the ozone generator 2 but diffused throughout the interior of the apparatus within the ozone generator 2 at a uniform pressure.
- the inventors discovered that the ozone generator 2 that was not considered to exist also exists on the raw material gas inlet side. For example, in the case of an ozone generator using air as a raw material gas, about several thousand ppm of NO x is produced together with O 3 , and most of it is exhausted out of the ozone generator 2 by gas replacement, but several hours to several days It was confirmed that about several hundred ppm of NO x diffused and remained throughout the ozone generator 2 by passing through the ozone generation operation standby period.
- this NO x also enters the inside of the high-voltage electrode tube 204 whose open end is on the source gas inlet side.
- HNO 3 produced by reaction with a trace amount of moisture is also present at the location where NO x exists.
- NO x and HNO 3 that have entered the high-voltage electrode tube 204 are trapped by the power supply member 207 installed inside the high-voltage electrode tube 204 and are concentrated on the surface of the power supply member 207.
- the concentrated NO x and HNO 3 move on the surface of the power supply member 207 and act on the high voltage electrode 203 with which the power supply member 207 contacts.
- the contact portion between the power supply member 207 and the high voltage electrode 203 is rapidly corroded and oxidized and deteriorated by NO x and HNO 3 . Since the electrical resistance value of the contact portion of the high-voltage electrode 203 that has deteriorated due to oxidation increases, it disappears due to Joule heat when the ozone generation operation period starts again, that is, at the moment when power is supplied. With the disappearance of the high voltage electrode 203, the power supply to the high voltage electrode tube 204 is stopped, so that the high voltage electrode tube 204 does not contribute to the generation of ozone.
- the ozone generation operation standby period ends.
- an electrode tube that does not contribute to ozone generation occurs and the ozone generation efficiency may decrease. Therefore, in the ozone generator according to the first embodiment, based on the following configuration and operation, diffusion of NO x and HNO 3 during the ozone generation operation standby period is suppressed, and the ozone generator is installed on the inner surface of the high voltage electrode tube 204. Corrosion caused by NO x and HNO 3 of the high voltage electrode 203 is prevented.
- an operation standby command (S3) is received when the operation is continued (S1 NO, S2) to shift to the ozone generation operation standby period (S1 YES),
- S3 ozone generation is stopped
- S5 cooling water is also stopped
- the valves V1 and V2 are closed (S6)
- the supply of the raw material gas is stopped (S7)
- the ozone generator 2 is sealed off.
- the valve V3 connected to the gas outlet side port P2 of the ozone generator 2 and the valve V4 connected to the gas inlet side port P1 are opened (S8).
- the gas circulation device 7 is connected to the ozone generator 2, and when the gas circulation device 7 operates (S9), a closed system closed loop is formed by the ozone generator 2 and the gas circulation device 7,
- the gas sealed in the ozone generator 2 is circulated from the gas outlet side port P2 toward the gas inlet side port P1.
- the gas circulation device 7 includes a gas circulation unit 70 and a gas purification unit 71.
- the gas purification unit 71 is installed on the upstream side of the gas circulation unit 70 and removes at least HNO 3 from the gas sealed in the ozone generator 2 sucked from the gas outlet side port P2 of the ozone generator 2. It is a removal part. Of course, NO x and moisture should be removed at the same time.
- the gas circulation unit 70 is a circulation fan or a circulation pump sealed with the outside air.
- the gas pressure is set in the ozone generator 2 without stagnation. It is only necessary to maintain the pressure above the atmospheric pressure and form a gas flow from the gas inlet side port P1 to the gas outlet side port P2. That is, it is only necessary to form a gas flow that generates a flow rate that is greater than the diffusion rate based on the concentration gradient from the gas outlet side to the gas inlet side of NO x and HNO 3 desorbed in the ozone generator 2.
- the gas flow in the ozone generator 2 may be slight, and a high performance, large capacity fan or pump is not required.
- the circulation portion does not need ozone resistance.
- a gas flow is generated in the ozone generator 2 to remove at least HNO 3 from the gas in the ozone generator 2. Since the gas in the ozone generator 2 is sucked from the gas outlet side port P2, and purified and circulated in the closed system closed loop, diffusion of HNO 3 into the ozone generator 2, especially the gas inlet side, can be suppressed, and the high voltage electrode Can prevent corrosion.
- the gas purification unit 71 is filled with a dry adsorbent material capable of adsorbing at least HNO 3 or a filter configured and molded by the dry adsorbent material.
- adsorbent material alkali agents such as zeolite, activated carbon, alumina, calcium hydroxide, and sodium hydroxide can be used.
- zeolite zeolite
- activated carbon alumina
- calcium hydroxide calcium hydroxide
- sodium hydroxide sodium hydroxide
- ozone is hardly accompanied by the gas purification unit 71, but when activated carbon is used in order to cope with the sudden mixing of ozone at the time of non-stationary state, the decomposition of ozone is performed. It is better to use special activated carbon treated with alumina or the like from the viewpoint of avoiding rapid temperature rise and explosion associated with.
- the intermittent operation of the ozone generator 2 is an efficient operation condition for the purpose of energy saving and low cost, and as described above, the ozone generator 2 is in an ozone generation operation standby period for suppressing energy consumption. Introducing energy and costs other than generation goes against the idea of adopting intermittent operation itself. In the first embodiment, only some energy and initial cost required for the gas circulation unit 70 and only initial cost such as adsorbent in the gas purification unit 71 are added, and energy saving due to intermittent operation is hindered. It doesn't matter.
- the gas circulation device 7 since desorption and diffusion of NO x and HNO 3 proceed at a moderate rate during the ozone generation operation standby period, the gas circulation device 7 does not need to be operated during the entire ozone generation operation standby period. For example, it may be operated only at a rate of several hours or once a day. In this case, the valves V3 and V4 that operate in conjunction with the transition to the ozone generation operation standby period may perform an opening / closing operation in conjunction with the operation of the gas circulation device 7.
- the diffusion of HNO 3 during the ozone generation operation standby period shown in the present embodiment occurs remarkably when the gap length is 0.6 mm or less.
- the electric field strength of the discharge space 205 is larger than that of an ozone generator having a gap length exceeding 0.6 mm, the amount of NO x generated itself increases. .
- NO x is also increased to accumulate on the electrode tube surface. That is, the removal of HNO 3 using the gas circulation device 7 is extremely effective in an ozone generator in which the gap length is set short as in the present embodiment.
- the reduction in the diameter of the electrode tube that realizes downsizing of the ozone generator 2 necessitates that the high voltage electrode 203 in the inside is a thin film, and thus the high voltage electrode 203 is easily affected by HNO 3.
- the high voltage electrode 203 has extremely high adhesion such as thermal spraying, and has a thickness of 100 ⁇ m or more.
- a construction method such as thermal spraying cannot be adopted.
- the gas circulation device 7 installed so as to form a closed loop with the ozone generation device 2
- diffusion of HNO 3 in the ozone generator 2 can be suppressed. Therefore, corrosion of the high voltage electrode 203 can be prevented without the HNO 3 entering the inside of the high voltage electrode tube 204 whose one end is an open end.
- FIG. 5 is a block diagram illustrating an ozone generation system according to Embodiment 2 of the present invention and a method for operating the ozone generation system, and a configuration of the ozone generation system and a gas flow system.
- a case where two ozone generators are used will be described as an example.
- ozone generation system There are various operation methods in an ozone generation system based on a plurality of ozone generators. For example, it is a case where one ozone generator 2A is normally operated continuously and the other ozone generator 2B is used for backup. When making up for the shortage of the capacity of one ozone generator 2A based on the ozone demand increase command from the ozone utilization facility 4, the other ozone generator 2B is operated simultaneously. In this case, the latter ozone generator is intermittently operated. In some cases, the two ozone generators 2A and 2B are alternately operated at predetermined time intervals to reduce the operation load per unit, extend the life of the apparatus, and reduce maintenance costs. In this case, both ozone generators are intermittently operated.
- a common gas circulation device 7 is provided for the ozone generators 2A and 2B, and the gas inlet ports P1A, P1B of the ozone generator, and The gas circulation device 7 is connected to the gas inlet ports P2A and P2B.
- an individual gas circulation device may be provided for each ozone generator, but it is preferable to use a common gas circulation device in view of cost and installation area.
- an operation state is shown when two ozone generators 2A and 2B are operated alternately.
- the other ozone generator 2B When one ozone generator 2A is in the ozone generation operation period, the other ozone generator 2B is in the ozone generation operation standby period. At the same time that the ozone generator 2A is in the ozone generation operation standby period, the ozone generator 2B is in the ozone generation operation period.
- the valves V1A and V2A When the ozone generator 2A is in the ozone generation operation period, the valves V1A and V2A are open, the valves V1B and V2B are closed, the valves V3A and V4A are closed, and V3B and V4B are open.
- the ozone generator 2B is in a state in which gas is sealed, and the gas circulation device 7 is also operating after ozone has already been generated.
- the valves V1A and V2A are closed, the valves V1B and V2B are open, the valves V3A and V4A are open, and the valve V3B And V4B are in the closed state.
- the ozone generator 2B moves to the ozone generation operation period, the ozone generator 2A is in a state in which gas is sealed, and the gas circulation device 7 is also operating.
- the gas circulation device 7 operates continuously.
- NO x and HNO 3 in the ozone generation operation standby period are shown. Since the desorption and diffusion of the gas proceeds gradually, the gas circulation device 7 is not necessarily required to operate continuously.
- the operation may be performed periodically, for example, once every several hours or several days. In this case, the operation of the gas circulation device 7 and the valves V3A, V4A, V3B, and V4B may be opened and closed in conjunction with each other.
- FIG. 6 is a cross-sectional view of the discharge electrode portion of the ozone generator 2 according to the third embodiment, showing a configuration of the discharge electrode portion taken along a plane parallel to the gas flow direction.
- members that are the same as or correspond to components of the ozone generation system according to Embodiments 1 and 2 are given the same reference numerals, and descriptions thereof are omitted unless particularly necessary.
- the ozone generator having the discharge electrode portion shown in FIG. 6 is an ozone generator called a tandem type.
- the basic structure is the same as that of the ozone generator shown in the first embodiment.
- the tandem type is a structure that is mainly applied to a large-capacity ozone generator, and has a unit per unit ozone generation amount as compared with a case where one high-voltage electrode tube is provided in one ground electrode tube 201.
- the production cost of the high-pressure tank and the ground electrode tube is reduced, and it is advantageous in that the ozone generator can be produced at a low cost.
- a high voltage electrode tube 204A on the gas inlet side and a high voltage electrode tube 204B on the gas outlet side are installed in one ground electrode tube 201, and the high voltage electrode tubes 204A and 204B are closed ends. Are arranged to face each other. Therefore, the alternating high voltage required for ozone generation is applied from the two power supply members 207A and 207B installed in each high voltage electrode tube.
- the high voltage electrode tube 204B has an open end on the output gas side generated by the ozone generator 2. Therefore, O 3 and NO x enter the high voltage electrode tube 204B.
- a gas sealing plug 209 that suppresses the intrusion of O 3 , NO x , and HNO 3 into the high voltage electrode tube 204B is installed at the open end of the high voltage electrode tube 204B.
- the high voltage electrode 203B in the high voltage electrode tube 204B may be formed of a metal having higher corrosion resistance than the high voltage electrode 203A or a metal that is easily passivated. In this case, O 3 or NO may be used depending on the resistance of the metal itself.
- the gas sealing plug 209 is not necessarily required.
- the high voltage electrode 203B may be coated with an inorganic insulating material such as glass or ceramic so as to cover the surface thereof to form a protective film. When the protective film is used, it has a function of suppressing creeping discharge at the end portion of the high voltage electrode 203B, so that the electric field relaxation layer 208B is unnecessary and effective.
- the gas circulation device 7 installed so as to form a closed loop with the tandem-type ozone generator 2 during the ozone generation operation standby period in the intermittent operation. Is used to remove at least HNO 3 from the gas in the ozone generator 2, so that diffusion of HNO 3 in the ozone generator 2 can be suppressed. Therefore, corrosion of the high voltage electrode 203 can be prevented without HNO 3 entering the high voltage electrode tube 204.
- FIG. 4 An ozone generation system according to Embodiment 4 of the present invention will be described.
- the ozone generation system according to the fourth embodiment has the same basic configuration and operation as those of the first to third embodiments.
- the structure of the ozone generator 2 is substantially the same as that of the third embodiment, but the gas inlet and the gas outlet in the ozone generator 2 are different.
- FIG. 7 is a cross-sectional view of the discharge electrode portion of the ozone generator of the ozone generation system according to the fourth embodiment, showing a configuration of the discharge electrode portion taken along a plane parallel to the gas flow direction.
- FIG. 8 is a block diagram for explaining an ozone generation system and an operation method thereof according to Embodiment 4 of the present invention, and shows a device configuration of the ozone generation system and a gas flow system.
- members that are the same as or correspond to components of the ozone generation system according to Embodiments 1 to 3 are given the same reference numerals, and descriptions thereof are omitted unless particularly necessary.
- the cooling device, the power supply device, the control unit, and the control line are omitted.
- raw material gas is supplied from both the left and right sides in the figure.
- a high-voltage electrode tube 204C composed of a dielectric 202C having a high-voltage electrode 203C formed on the inner surface on the left side and a high-voltage electrode composed of a dielectric 202D having a high-voltage electrode 203D formed on the inner surface on the right side
- the tube 204D is installed in one ground electrode tube 201, and the high voltage electrode tube is disposed so that the closed ends thereof face each other. Therefore, the alternating high voltage required for ozone generation is applied from the two power supply members 207C and 207D installed in each of the high voltage electrode tubes.
- the gas outlet 210 is installed in the central part of the ozone generator 2, that is, the place where the closed ends of the two high-voltage electrode tubes 204C and 204D face each other.
- the gas circulation device 7 is connected to the ozone generator 2 through the gas outlet port P2 of the ozone generator 2 and the two gas inlet ports P10 and P11 provided in the ozone generator 2. Is done.
- the gas outlet 210 in FIG. 7 is connected to the gas outlet side port P2 in FIG.
- valves V10 and V11 that open and close at the same time and a bypass valve VB that is installed in a pipe that bypasses the two gas inlet portions are installed.
- the valves V10, V11, and V2 are in an open state, and V3, V4, and VB are in a closed state.
- both V10 and V11 are closed, and V2 is also closed, the valves V3, V4 and VB are opened, and the gas circulation device 7 is operated.
- the gas circulation device 7 installed so as to form a closed loop with the ozone generator 2 having the tandem structure during the ozone generation operation standby period in the intermittent operation. Is used to remove at least HNO 3 from the gas in the ozone generator 2, so that diffusion of HNO 3 in the ozone generator 2 can be suppressed. Therefore, corrosion of the high voltage electrode 203 can be prevented without HNO 3 entering the high voltage electrode tube 204.
- FIG. 9 is a block diagram for illustrating an ozone generation system and a method for operating the ozone generation system according to Embodiment 5 of the present invention, showing the equipment configuration and gas flow system of the ozone generation system.
- members that are the same as or correspond to the components of the ozone generation system according to Embodiment 1 are given the same reference numerals, and descriptions thereof are omitted unless particularly necessary.
- the gas discharge device 77 includes a gas discharge unit 770 and a gas purification unit 771, and the gas discharge unit 770 includes a valve V ⁇ b> 5 that can control a minute gas flow rate and a valve V ⁇ b> 6 that opens to the atmosphere. It is configured.
- the valve V4 shown in FIG. 1 or the like is not necessary.
- the valves V1 and V2 are in an open state, and V3, V5, and V6 are in a closed state.
- the valves V1 and V2 are closed.
- the valve V3 connected to the gas outlet side port P2 of the ozone generator 2 is opened, The gas discharge device 77 operates.
- the valve V5 of the gas discharge unit 770 is in an open state controlled to an arbitrary opening, and the valve V6 is in an open state.
- the gas discharge device 77 is connected to the ozone generator 2, and the gas sealed in the ozone generator 2 flows from the gas outlet side port P2 toward the gas discharge device 77.
- the gas purification unit 771 is a dry removal unit that is installed on the upstream side of the gas discharge unit 770 and removes at least HNO 3 from the gas sealed in the ozone generator 2. Of course, NO x and moisture should be removed at the same time.
- the piping of the system including the gas discharge device 77 connected to the gas inlet side port P1 and the gas outlet side port P2 is used. It is preferable to use a pipe having a smaller diameter than the pipe connecting the ozone generator 2 to the gas supply device 1 or the ozone utilization facility 4.
- the valve V5 that constitutes the gas discharge unit 770 is a valve that leaks the gas sealed in the ozone generator 2 to the atmosphere by a very small flow rate through the gas outlet port P2 and the gas purification unit 771.
- the minute flow rate only needs to be larger than the diffusion flow rate of NO x and HNO 3 generated in the ozone generation operation standby period described in the first to fourth embodiments. Ozone generation is stopped, and a weak gas flow is formed in the direction from the gas inlet side port P1 to the gas outlet side port P2 in the ozone generator 2 in a state where the gas is sealed.
- a slow gas flow is formed in which the enclosed gas moves in one direction from the gas inlet side port P1 to the gas outlet side port P2.
- NO x and HNO 3 that diffuse in the ozone generator 2 during the period do not exist on the gas inlet side port P 1 side of the ozone generator 2.
- the valve V5 keeps the pressure in the ozone generator 2 at a pressure higher than atmospheric pressure, while allowing the gas enclosed in the ozone generator 2 to flow very gently via the gas discharge unit 770. It is for leaking to the atmosphere at a reasonable speed.
- the control flow rate in the valve V5 in consideration of the diffusion flow rate of NO x and HNO 3 and the length of the ozone generation operation standby period.
- the ozone generator 2 Care must be taken so that the pressure of the air does not drop to atmospheric pressure. That is, the control flow rate is larger than the diffusion flow rate of NO x and HNO 3 in the ozone generator 2, but it is preferable to set the flow rate as small as possible.
- the valve V5 may be any valve that can leak the gas sealed in the ozone generator 2 very gently, and is a commercially available slow leak valve, slow vent valve, pinch valve, relief valve, purge valve, and needle valve. Either of these may be used. Further, the gas purifying unit 771 is not always necessary if the environment can discharge HNO 3 into the atmosphere.
- the gas discharge device 77 is configured by only the valve V5, for example, as long as the gas discharge device 77 is configured to leak the gas in the ozone generation device into the atmosphere while maintaining the pressure of the gas in the ozone generation device at or above atmospheric pressure. It may be.
- FIG. 10 is a block diagram showing another configuration of the ozone generation system and the gas flow system according to Embodiment 5 of the present invention.
- the ozone generation system shown in FIG. 10 is an ozone generation system in which intermittent operation is performed by operation control of a plurality of ozone generators as in the second embodiment.
- members similar to or corresponding to those in FIGS. 5 and 9 are denoted by the same reference numerals, and description thereof is omitted unless particularly necessary.
- the gas discharge device 77 is configured by the gas discharge unit 770 and the gas purification unit 771, and the gas discharge unit 770 controls the minute gas flow rate to the valve V ⁇ b> 5 and the atmosphere.
- the gas discharge device 77 is controlled to be connected to the ozone generator that is in the ozone generation operation standby period, and enclosed in the ozone generator. The discharged gas is leaked into the atmosphere via the gas discharge device 77.
- the ozone generation system As described above, according to the ozone generation system according to the fifth embodiment, during the ozone generation operation standby period in the intermittent operation, using the gas discharge device installed so that the gas can be discharged from the ozone generation device to the atmosphere, By leaking the gas in the ozone generator, the enclosed gas moves in one direction from the gas inlet side to the gas outlet side, and a gentle gas flow is formed. never be nO x and HNO 3 diffuses the present in the gas inlet side of the ozone generator. For this reason, the diffusion of HNO 3 in the ozone generator can be suppressed. Therefore, corrosion of the high voltage electrode can be prevented without HNO 3 entering the inside of the high voltage electrode tube whose one end is an open end.
- the present invention is not limited to the configuration and operation of each embodiment described above, and the embodiments may be combined, or each embodiment may be appropriately modified or omitted within the scope of the present invention. Is possible.
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Health & Medical Sciences (AREA)
- Biomedical Technology (AREA)
- Environmental & Geological Engineering (AREA)
- Analytical Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Oxygen, Ozone, And Oxides In General (AREA)
Abstract
Description
図1~3は本発明の実施の形態1によるオゾン発生システムおよびその運転方法を説明するための図で、図1はオゾン発生システムの機器構成およびフロー系統を示すブロック図、図2はオゾン発生装置の放電電極部の構成を示す断面図で、図2Aは放電電極部のガス流れ方向に平行な切断面における断面図、図2Bはガス流れ方向に垂直な方向の断面で、図2AのA-A線における断面図である。図3はオゾン発生装置が間欠運転する際の機器の動作を説明するためのタイムチャート、図4はオゾン発生システムの動作を示すフローチャートである。
本発明の実施の形態2によるオゾン発生システムについて説明する。本実施の形態2によるオゾン発生システムは、基本的な構成および動作は実施の形態1と同様であるが、間欠運転が複数台のオゾン発生装置の動作制御により実施されている点が異なる。図5は本発明の実施の形態2によるオゾン発生システムおよびその運転方法を説明するためのもので、オゾン発生システムの機器構成およびガスフロー系統を示すブロック図である。ここでは、2台のオゾン発生装置を用いる場合を例として説明する。図中、実施の形態1によるオゾン発生システムの構成機器と同様あるいは対応する部材には、同じ符号を付し、特に必要のない限り説明を省略する。また、図中、冷却装置、電源装置、制御部、および制御線は省略している。
本発明の実施の形態3によるオゾン発生システムについて説明する。本実施の形態3によるオゾン発生システムは、基本的な構成および動作は実施の形態1または実施の形態2と同様であるが、実施の形態1や実施の形態2におけるオゾン発生装置2の高電圧電極管が接地電極管1本に対し、本実施の形態3では、高電圧電極管の閉口端が向かい合うように直列に2本設置されている点が異なる。図6は、本実施の形態3によるオゾン発生装置2の放電電極部の構成を示すためのもので、放電電極部のガス流れ方向に平行な切断面における断面図である。図中、実施の形態1~2によるオゾン発生システムの構成機器と同様あるいは対応する部材には、同じ符号を付し、特に必要のない限り説明を省略する。
本発明の実施の形態4によるオゾン発生システムについて説明する。本実施の形態4によるオゾン発生システムは、基本的な構成および動作は実施の形態1~3と同様である。オゾン発生装置2の構造は、実施の形態3とほぼ同様であるが、オゾン発生装置2におけるガス入口およびガス出口が異なる。図7は、本実施の形態4によるオゾン発生システムのオゾン発生装置の放電電極部の構成を示すためのもので、放電電極部のガス流れ方向に平行な切断面における断面図である。図8は、本発明の実施の形態4によるオゾン発生システムおよびその運転方法を説明するためのもので、オゾン発生システムの機器構成およびガスフロー系統を示すブロック図である。図中、実施の形態1~3によるオゾン発生システムの構成機器と同様あるいは対応する部材には、同じ符号を付し、特に必要のない限り説明を省略する。また、図中、冷却装置、電源装置、制御部、および制御線は省略している。
本発明の実施の形態5によるオゾン発生システムについて説明する。本実施の形態5によるオゾン発生システムは、実施の形態1~4とは、オゾン発生運転待機期間にガスを循環させず、精製したガスを大気へ排出する点で異なる。図9は本発明の実施の形態5によるオゾン発生システムおよびその運転方法を説明するためのもので、オゾン発生システムの機器構成およびガスフロー系統を示すブロック図である。図中、実施の形態1によるオゾン発生システムの構成機器と同様あるいは対応する部材には、同じ符号を付し、特に必要のない限り説明を省略する。
Claims (11)
- 対向配置されて放電空間を形成する放電電極を有するオゾン発生装置と、前記オゾン発生装置に酸素を含む原料ガスを供給するガス供給装置と、前記放電電極を冷却するための冷却水を供給する冷却装置と、前記放電電極に放電のための電力を供給する電源装置と、前記ガス供給装置と前記電源装置とを制御する制御部と、を備え、この制御部が、前記ガス供給装置から前記オゾン発生装置に原料ガスを供給するとともに前記電源装置から前記放電電極に電力を供給することにより前記オゾン発生装置がオゾンを発生するオゾン発生運転期間と、前記ガス供給装置から前記オゾン発生装置へのガス供給および前記電源装置から前記放電電極への電力供給を停止してオゾンを発生しないオゾン発生運転待機期間とを交互に繰り返す間欠運転となる制御を行うオゾン発生システムにおいて、
前記オゾン発生装置内のガスを循環させながら、この循環させるガス中の少なくとも硝酸を除去するガス循環装置を備え、
前記制御部は、前記オゾン発生運転待機期間に、前記オゾン発生装置内のガスを前記原料ガスにより置換させ、前記オゾン発生装置内を大気圧より高い圧力にした後、前記ガス循環装置が前記オゾン発生装置に接続されるように制御することを特徴とするオゾン発生システム。 - 前記オゾン発生装置を複数備え、前記制御部が、前記複数のオゾン発生装置のうち少なくとも一つの前記オゾン発生装置が前記間欠運転となるよう制御するとともに、この間欠運転となるよう制御されるオゾン発生装置に、前記オゾン発生運転待機期間において前記ガス循環装置が接続されることを特徴とする請求項1に記載のオゾン発生システム。
- 対向配置されて放電空間を形成する放電電極を有するオゾン発生装置と、前記オゾン発生装置に酸素を含む原料ガスを供給するガス供給装置と、前記放電電極を冷却するための冷却水を供給する冷却装置と、前記放電電極に放電のための電力を供給する電源装置と、前記ガス供給装置と前記電源装置とを制御する制御部と、を備え、この制御部が、前記ガス供給装置から前記オゾン発生装置に原料ガスを供給するとともに前記電源装置から前記放電電極に電力を供給することにより前記オゾン発生装置がオゾンを発生するオゾン発生運転期間と、前記ガス供給装置から前記オゾン発生装置へのガス供給および前記電源装置から前記放電電極への電力供給を停止してオゾンを発生しないオゾン発生運転待機期間とを交互に繰り返す間欠運転となる制御を行うオゾン発生システムにおいて、
前記オゾン発生装置内のガスを大気中に排出するガス排出装置を備え、
前記制御部は、前記オゾン発生運転待機期間に、前記オゾン発生装置内のガスを前記原料ガスにより置換させて、前記オゾン発生装置内を大気圧より高い圧力にした後、前記オゾン発生装置内の圧力を大気圧より高い圧力に維持しながら、前記オゾン発生装置中のガスを前記ガス排出装置を介して大気中にリークさせるように制御することを特徴とするオゾン発生システム。 - 前記オゾン発生装置を複数備え、前記制御部が、前記複数のオゾン発生装置のうち少なくとも一つの前記オゾン発生装置が前記間欠運転となるよう制御するとともに、この間欠運転となるよう制御されるオゾン発生装置に、前記オゾン発生運転待機期間において前記ガス排出装置を介して大気中にリークさせることを特徴とする請求項3に記載のオゾン発生システム。
- 前記原料ガスが乾燥空気であることを特徴とする請求項1から4のいずれか1項に記載のオゾン発生システム。
- 前記原料ガスが真空圧力スイング吸着式酸素発生装置または圧力スイング吸着式酸素発生装置により生成された酸素ガスであることを特徴とする請求項1から4いずれか1項に記載のオゾン発生システム。
- 前記対向配置された放電電極の間隔が、0.1mm以上かつ0.6mm以下であることを特徴とする請求項1から6のいずれか1項に記載のオゾン発生システム。
- 前記放電電極の一方が、誘電体管の内面に導電膜を形成して構成されており、前記誘電体管の直径が30mm以下であることを特徴とする請求項1から7のいずれか1項に記載のオゾン発生システム。
- 対向配置されて放電空間を形成する放電電極を有するオゾン発生装置と、前記オゾン発生装置に酸素を含む原料ガスを供給するガス供給装置と、前記放電電極を冷却するための冷却水を供給する冷却装置と、前記放電電極に放電のための電力を供給する電源装置と、前記オゾン発生装置に接続され、前記オゾン発生装置内のガスを循環させながら、この循環させるガス中の少なくとも硝酸を除去するガス循環装置と
を備えたオゾン発生システムの運転方法であって、
前記ガス供給装置から前記オゾン発生装置に原料ガスを供給するとともに前記電源装置から前記放電電極に電力を供給することにより前記オゾン発生装置がオゾンを発生し、前記ガス循環装置は運転を停止するオゾン発生運転期間の工程と、
前記ガス供給装置から前記オゾン発生装置へのガス供給および前記電源装置から前記放電電極への電力供給を停止し、前記オゾン発生装置内のガスを前記原料ガスにより置換させて、前記オゾン発生装置内を大気圧より高い圧力とした後、前記ガス循環装置が運転を行うオゾン発生運転待機期間の工程と、を有することを特徴とするオゾン発生システムの運転方法。 - 対向配置されて放電空間を形成する放電電極を有するオゾン発生装置と、前記オゾン発生装置に酸素を含む原料ガスを供給するガス供給装置と、前記放電電極を冷却するための冷却水を供給する冷却装置と、前記放電電極に放電のための電力を供給する電源装置と、前記オゾン発生装置内のガスを大気中に排出するガス排出装置とを備えたオゾン発生システムの運転方法であって、
前記ガス供給装置から前記オゾン発生装置に原料ガスを供給するとともに前記電源装置から前記放電電極に電力を供給することにより前記オゾン発生装置がオゾンを発生し、前記ガス排出装置からガスを大気中に排出しないオゾン発生運転期間の工程と、
前記ガス供給装置から前記オゾン発生装置へのガス供給および前記電源装置から前記放電電極への電力供給を停止し、前記オゾン発生装置内のガスを前記原料ガスにより置換させて、前記オゾン発生装置内を大気圧より高い圧力にした後、前記オゾン発生装置内の圧力を大気圧より高い圧力に維持しながら、前記オゾン発生装置中のガスを前記ガス排出装置を介して大気中にリークさせるオゾン発生運転待機期間の工程と、
を有することを特徴とするオゾン発生システムの運転方法。 - 前記オゾン発生装置を複数備え、少なくとも一つの前記オゾン発生装置が前記オゾン発生運転待機期間の工程を有することを特徴とする請求項9または10に記載のオゾン発生システムの運転方法。
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CA2953302A CA2953302C (en) | 2014-06-27 | 2015-04-15 | Ozone generating system and operation method thereof |
EP15812317.4A EP3162760B1 (en) | 2014-06-27 | 2015-04-15 | Ozone generating system and operation method thereof |
JP2016529129A JP6067190B2 (ja) | 2014-06-27 | 2015-04-15 | オゾン発生システムおよびその運転方法 |
SG11201610646RA SG11201610646RA (en) | 2014-06-27 | 2015-04-15 | Ozone generating system and operation method thereof |
US15/308,641 US10221068B2 (en) | 2014-06-27 | 2015-04-15 | Ozone generating system and operation method thereof |
CN201580028021.7A CN106414317B (zh) | 2014-06-27 | 2015-04-15 | 臭氧发生系统及其运转方法 |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2014132347 | 2014-06-27 | ||
JP2014-132347 | 2014-06-27 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2015198694A1 true WO2015198694A1 (ja) | 2015-12-30 |
Family
ID=54937793
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2015/061533 WO2015198694A1 (ja) | 2014-06-27 | 2015-04-15 | オゾン発生システムおよびその運転方法 |
Country Status (7)
Country | Link |
---|---|
US (1) | US10221068B2 (ja) |
EP (1) | EP3162760B1 (ja) |
JP (1) | JP6067190B2 (ja) |
CN (1) | CN106414317B (ja) |
CA (1) | CA2953302C (ja) |
SG (1) | SG11201610646RA (ja) |
WO (1) | WO2015198694A1 (ja) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6072999B2 (ja) * | 2014-09-22 | 2017-02-01 | 三菱電機株式会社 | オゾン発生システムおよびその運転方法 |
JP6545589B2 (ja) * | 2015-09-18 | 2019-07-17 | 岩谷産業株式会社 | オゾンガスの供給方法、およびオゾンガスの供給システム |
CN114492779A (zh) * | 2022-02-16 | 2022-05-13 | 安谋科技(中国)有限公司 | 神经网络模型的运行方法、可读介质和电子设备 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0431302A (ja) * | 1990-05-25 | 1992-02-03 | Toshiba Corp | オゾン発生装置 |
JP2009096692A (ja) * | 2007-10-18 | 2009-05-07 | Kansai Electric Power Co Inc:The | 間欠式不活性ガス注入によるオゾン発生方法および装置 |
JP2014065620A (ja) * | 2012-09-25 | 2014-04-17 | Mitsubishi Electric Corp | オゾン供給システムおよび排水処理システム |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS557522A (en) | 1978-06-29 | 1980-01-19 | Toshiba Corp | Ozonizer |
JP2002265204A (ja) | 2001-03-07 | 2002-09-18 | Toshiba Corp | オゾン発生装置およびその取扱い方法 |
CA2343670C (en) * | 2001-04-11 | 2008-11-25 | Air Liquide Canada Inc. | Method of cleaning an ozone generator |
WO2002083552A1 (en) | 2001-04-11 | 2002-10-24 | L'air Liquide - Societe Anonyme A Directoire Et Conseil De Surveillance Pour L'etude Et L'exploitation Des Procedes Georges Claude | Method of cleaning an ozone generator |
JP4999503B2 (ja) | 2007-03-13 | 2012-08-15 | 三菱電機株式会社 | オゾン発生装置 |
WO2011065088A1 (ja) | 2009-11-26 | 2011-06-03 | 東芝三菱電機産業システム株式会社 | オゾンガス供給システム |
CA2764215C (en) * | 2010-12-21 | 2014-03-18 | Kabushiki Kaisha Toshiba | Ozone generating apparatus |
US9371229B2 (en) | 2012-04-05 | 2016-06-21 | Mitsubishi Electric Corporation | Ozone-generating system and ozone generation method |
-
2015
- 2015-04-15 EP EP15812317.4A patent/EP3162760B1/en active Active
- 2015-04-15 CA CA2953302A patent/CA2953302C/en active Active
- 2015-04-15 WO PCT/JP2015/061533 patent/WO2015198694A1/ja active Application Filing
- 2015-04-15 JP JP2016529129A patent/JP6067190B2/ja active Active
- 2015-04-15 SG SG11201610646RA patent/SG11201610646RA/en unknown
- 2015-04-15 CN CN201580028021.7A patent/CN106414317B/zh active Active
- 2015-04-15 US US15/308,641 patent/US10221068B2/en active Active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0431302A (ja) * | 1990-05-25 | 1992-02-03 | Toshiba Corp | オゾン発生装置 |
JP2009096692A (ja) * | 2007-10-18 | 2009-05-07 | Kansai Electric Power Co Inc:The | 間欠式不活性ガス注入によるオゾン発生方法および装置 |
JP2014065620A (ja) * | 2012-09-25 | 2014-04-17 | Mitsubishi Electric Corp | オゾン供給システムおよび排水処理システム |
Non-Patent Citations (1)
Title |
---|
See also references of EP3162760A4 * |
Also Published As
Publication number | Publication date |
---|---|
CN106414317A (zh) | 2017-02-15 |
CN106414317B (zh) | 2019-11-05 |
CA2953302C (en) | 2018-09-04 |
CA2953302A1 (en) | 2015-12-30 |
SG11201610646RA (en) | 2017-01-27 |
EP3162760B1 (en) | 2022-08-03 |
EP3162760A1 (en) | 2017-05-03 |
EP3162760A4 (en) | 2017-11-08 |
US20170183229A1 (en) | 2017-06-29 |
US10221068B2 (en) | 2019-03-05 |
JP6067190B2 (ja) | 2017-01-25 |
JPWO2015198694A1 (ja) | 2017-04-20 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US10693155B2 (en) | Coolant purification | |
US9371229B2 (en) | Ozone-generating system and ozone generation method | |
JP5892904B2 (ja) | オゾン供給システムおよび排水処理システム | |
JP6067190B2 (ja) | オゾン発生システムおよびその運転方法 | |
WO2008062534A1 (fr) | Procédé de concentration d'ozone gazeux et appareil pour la mise en œuvre de ce procédé | |
JP6072999B2 (ja) | オゾン発生システムおよびその運転方法 | |
JP5183099B2 (ja) | オゾンガス濃縮方法 | |
JP3432136B2 (ja) | オゾン、水素発生方法及び発生装置 | |
JP5912878B2 (ja) | 水素酸素発生装置及び水素酸素発生装置の操作方法 | |
JP2015017007A (ja) | 酸素濃縮装置及びオゾン発生システム | |
JP2010083728A (ja) | 空気によるオゾン脱着方法およびオゾン貯蔵脱着装置 | |
JP5614727B2 (ja) | ガス分解装置およびガス分解システム | |
JP2009143807A (ja) | オゾンを製造する方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
121 | Ep: the epo has been informed by wipo that ep was designated in this application |
Ref document number: 15812317 Country of ref document: EP Kind code of ref document: A1 |
|
ENP | Entry into the national phase |
Ref document number: 2016529129 Country of ref document: JP Kind code of ref document: A |
|
WWE | Wipo information: entry into national phase |
Ref document number: 15308641 Country of ref document: US |
|
REEP | Request for entry into the european phase |
Ref document number: 2015812317 Country of ref document: EP |
|
WWE | Wipo information: entry into national phase |
Ref document number: 2015812317 Country of ref document: EP |
|
ENP | Entry into the national phase |
Ref document number: 2953302 Country of ref document: CA |
|
NENP | Non-entry into the national phase |
Ref country code: DE |