Classifications

• • C—CHEMISTRY; METALLURGY
  • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
  • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
  • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
  • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
  • C23C14/14—Metallic material, boron or silicon
• • C—CHEMISTRY; METALLURGY
  • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
  • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
  • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
  • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
  • C23C14/24—Vacuum evaporation
  • C23C14/243—Crucibles for source material

Definitions

• the present invention relates to a carrier arrangement for an evaporator source for the surface treatment of at least one substrate.
• the evaporator source is designed in particular for evaporating metals, such as copper, for example, and is designed for a surface coating process of one or more substrates.
• the invention relates to an evaporator assembly having a carrier assembly and an evaporator source disposed therein. background
• Thermal vaporization sources for providing vaporous matter are known in the art in a variety of configurations.
• US 2010/0285218 A1 shows an evaporator with a housing receiving a plurality of crucible, which is in flow connection with a steam distributor having a plurality of outflow nozzles.
• a housing unit receiving the crucible must be connected to, for example, an elongated steam distributor.
• a discharge line extending from the crucible to the individual discharge nozzles is sufficiently heated so that the steam emerging from the crucibles does not condense on the inner wall of the crucible housing or of the steam distributor housing, whereby the outflow behavior could be impaired.
• certain metals such as copper
• the material for the evaporator source must be high temperature resistant and have a suitable thermal conductivity.
• the evaporator source possibly also a coupled with their fluidic steam distributor steam with the least possible expenditure on equipment in the process chamber can be arranged and protected against mechanical stresses, in particular against shocks, vibrations or vibrations.
• a self-supporting carrier arrangement or support structure for an evaporator source which evaporator source is formed in particular for the surface treatment of at least one substrate.
• the carrier assembly has a bottom and a sidewall structure connected to the bottom.
• the bottom and the side wall structure form a receptacle into which the evaporator source can be inserted or in which the evaporator source can be received.
• the bottom and the sidewall structure are further formed of a graphite fiber material.
• the carrier arrangement or the support structure for the evaporator source allows the evaporator source to be set up on the floor of the carrier arrangement.
• the soil provides so far a footprint for the evaporator source ready.
• the weight of the evaporator source can thus be completely absorbed by the ground and transferred to the sidewall structure connected thereto. This makes it possible to provide a hanging arrangement for the evaporator source without having to attach any fastening means for a hanging arrangement to the evaporator source.
• a hanging receptacle for the evaporator source can be realized, wherein any fastening means are not arranged on the evaporator source itself, but on the carrier assembly, in particular on an upper, the bottom facing away from the bottom portion of the sidewall structure or appropriate.
• the carrier arrangement can provide a mechanical protection function for the evaporator source.
• the evaporator source has, for example, a monolithic graphite housing, the evaporator source can be comparatively shock-sensitive. By inserting the entire evaporator source in the recording formed by the bottom and side wall structure, the evaporator source can be widely protected against external influences, in particular against mechanical stresses such as shocks and vibrations.
• the design of the bottom and side wall structure of a graphite fiber material is in terms of thermal stability of the support assembly, but also for reasons of weight and stability advantageous.
• the base of the carrier arrangement has a through opening, through which a fluidic connection between the evaporator source arranged in the receptacle of the carrier arrangement and a steam distributor to be provided outside the carrier arrangement can be passed.
• the passage opening is in particular formed centrally or in a central or central region of the floor.
• the passage opening provided in the base of the carrier arrangement permits both a fluidic and a mechanical, load-transmitting coupling between the evaporator source and the steam distributor.
• the passage opening is not adjacent to the side wall structure, but is located completely in the bottom of the carrier arrangement. Since both the evaporator source and the steam distributor have a geometric extension which is greater than the passage opening of the bottom, it is advantageous in terms of assembly technology if a mechanical and fluidic connection between the evaporator source and the steam distributor is not formed until at least the Evaporator source is already in the recording of the carrier assembly.
• At least one of the bottom and side wall structure of the self-supporting support arrangement is made of a carbon fiber reinforced composite material.
• Such composite materials comprise individual carbon or graphite fibers which are typically formed into a matrix of nem further material, such as a temperature-resistant material or material mixture are embedded.
• At least one of the bottom and side wall structure of a CFC composite material namely a carbon fiber reinforced carbon is made.
• the bottom and / or at least a portion of the sidewall structure may be made of a CFC composite material.
• CFC composites or CFC materials are made of carbon or graphite fibers embedded in a matrix of pure carbon.
• the fibers give the composite a high mechanical stability, while the matrix of carbon from outside acting forces can absorb and distribute in the structure.
• CFC composites are extremely temperature-resistant as well as temperature-shock resistant. Furthermore, such composite materials can absorb mechanical stresses, so that the evaporator source arranged in the carrier arrangement can be effectively protected against externally acting mechanical influences, for example against shocks and vibrations.
• the CFC composite material to be provided for the self-supporting carrier arrangement as well as an evaporator source typically made of graphite are resistant to high temperatures, so that with such an evaporator source or a corresponding evaporator arrangement metal vapors, such as copper vapors, can be produced for a surface treatment process of substrates ,
• the material should also have a suitable for the particular application and use thermal conductivity.
• the bottom has the shape of a flat rectangular bottom plate.
• the side wall structure is connected to the side edges of the soil. Typically, the sidewall structure the geometry of the bottom plate corresponding side wall panels.
• bottom plate in particular four side wall plates are provided, which in pairs, in particular in the assembly position opposite, can have approximately similar or even identical geometries.
• the side wall panels may also have a substantially rectangular geometry.
• the side wall panels are not only connected to each other with the bottom plate, but also with each other. This relates in particular to the side wall panels adjoining one another in the circumferential direction of the side wall structure.
• the bottom plate and all sidewall plates are made of one and the same material, in particular a CFC composite material.
• projections and passages which correspond to one another and can be brought into engagement with one another and are spaced apart from one another are formed on the bottom and on the side wall structure.
• the floor can be connected to the side wall structure via a plug connection.
• individual and adjoining side wall panels of the side wall structure can also be connected to one another via a corresponding plug connection.
• the bottom plate along at least one side edge to the outside, approximately perpendicular to the ridge extension projecting, but lying in continuation of the ground plane extensions on.
• the connectable to that side edge side wall plate of the side wall structure has according to the position and The geometry of the extensions each individual passages, in which the extensions are inserted.
• those extensions can completely pass through the passages of the sidewall structure so that they protrude on the outside of the sidewall structure or the respective sidewall plate.
• Full penetration of the passageways with extensions also makes it possible to provide one or more securing means. For example, if the extensions have an eyelet or through-hole that comes to rest on the outside of the sidewall structure in the final assembly position, then individual mounting bolts, typically of a high temperature resistant material such as graphite or CFC composite material, may be inserted into those through holes Eyelets are used. Retraction of the projections through the passages can thereby be prevented and an automatic release of the bottom of the side wall structure can be effectively prevented in this way.
• mutually corresponding extensions and passages may be provided or formed as desired on adjoining side edges of the bottom and side wall panels of the side wall structure. It is particularly conceivable that, for example, in a rectangular configuration of the bottom plate, only two side wall plates extending along the longitudinal sides of the bottom plate are respectively connected to the bottom plate, while end wall side wall plates extending along the short side edges of the bottom plate are only connected to the longer side wall panels. This may prove to be advantageous from a montagetechnical point of view.
• the side wall structure forming an end wall of the side wall structure may have outwardly projecting extensions which can be inserted into corresponding passages of the longer side wall plates which can be connected to the bottom plate.
• the side wall structure has at least two holding sections projecting outwardly and / or upwardly from the side wall structure for a suspended arrangement of the carrier arrangement.
• the retention portions may typically extend in the plane of one or more sidewall panels.
• the holding portions may be provided with through holes, which may act as a kind of fastening loop.
• through-openings for example, separate holders can be attached, which can be arranged, for example, pivotally on the holding portions.
• suitable loops on the holding sections would be conceivable.
• the holding sections can be arranged, in particular, on an upper side of the side wall structure facing away from the bottom plate, so that a suspended arrangement of the entire self-supporting carrier arrangement together with the evaporator source located therein in a process space, for example a coating device, is possible without difficulty.
• the side wall structure has at least one passage opening for passing a closure cover which can be removed from the evaporator source.
• the closure lid of the evaporator source typically closes a supply opening of the evaporator source, via which at least one Evampfungsgut meanser can be removed from a vapor space of the evaporator source and reintroduced after filling.
• the closure lid located, for example, in an end face of the evaporator source housing, which directly faces the side wall structure when the evaporator source is in the receptacle, can also be removed without removing the entire evaporator source Recording the carrier assembly are made accessible.
• a plurality of side wall panels of the side wall structure to have a passage opening for the passage of a respective closure cover of the evaporator source.
• the evaporator source is of cylindrical design, so that it largely rests with its cylinder jacket surface on the bottom of the carrier arrangement, feed openings can be provided approximately at opposite end faces of the evaporator source. Since the support structure with its bottom and its sidewall structure is typically adapted to the external geometry of the evaporator source, by providing a passage opening in a sidewall plate of the support assembly facing the end wall of the evaporator source, an immediate access to the removable closure lid of the evaporator source can be provided.
• an evaporator arrangement with a previously described carrier arrangement and with a steam distributor and an evaporator source is provided.
• the evaporator source is in this case arranged in the receptacle of the carrier arrangement and is also in fluid communication with the steam distributor via the passage opening formed in the bottom of the carrier arrangement.
• the steam distributor is not only fluidically, but also mechanically connected to the evaporator source.
• the vapor distributor outside and below the bottom of the carrier arrangement, wherein the vapor distributor is mechanically connected exclusively through the passage opening of the bottom to the evaporator source.
• the weight of the steam distributor can in this respect be completely transferred to the evaporator source and the evaporator source can transmit by their positioning on the bottom of the Trä- geranowskiowski the common weight of the evaporator source and steam distributor to the carrier assembly.
• the vapor distributor may be attached to the carrier assembly solely by its coupling to the vaporiser source and by the inclusion of the vaporiser source in the carrier assembly.
• the area below the steam distributor can be designed completely shading free, so that comparatively large-surface substrates in the required quality with the emerging from the steam distributor steam can be acted upon or treated.
• the steam distributor is in flow connection via a connection piece of the evaporator source.
• the fluidic connection between the evaporator source and the steam distributor formed by the connecting piece extends through the passage opening of the base. It is conceivable here that only one of the two connecting pieces of steam distributor and evaporator source protrudes through the passage opening of the bottom. It is also conceivable that only the steam distributor or the evaporator source has a connecting sleeve. points, which comes in a hereby corresponding recording of the other component to lie.
• the steam distributor can have a receptacle corresponding thereto.
• the steam distributor has an upwardly projecting through the through-opening connecting piece, which is insertable in a hereby corresponding recording of the evaporator source and hereby flow technology as well as mechanically connectable.
• the spaces between the carrier assembly and the evaporator source are at least partially filled with a thermal insulation.
• a thermal insulation typically, all gaps between the carrier assembly and the evaporator source are filled with thermal insulation.
• Corresponding thermal insulating materials can in this case be adapted to the outer geometry of the evaporator source as well as to the internal geometry of the receptacle of the carrier arrangement, or cut accordingly.
• the provision of thermal isolation reduces the thermal radiation from the evaporator source in the process space, which could otherwise interfere with the surface treatment process for the substrate or for multiple substrates.
• the thermal insulation is typically made inherently rigid or inherently stable.
• the outside of the carrier assembly may be at least partially disguised with a thermal insulation. The thermal insulation of the entire evaporator arrangement can thereby be further improved.
• the heat emission of the entire evaporator arrangement within the process space can thereby be further reduced.
• At least one outer side of the steam distributor is at least partially lined with a thermal insulation. It may even be provided to provide the entire steam distributor completely with a thermal insulation, thus to embed the steam distributor largely completely in such thermal insulation. In this way, the thermal emission of the steam distributor can be reduced.
• the thermal insulation has a graphite felt, a graphite foam, a quartz felt, one or more radiation sheets or combinations formed therefrom.
• Graphite felts in particular graphite hard felts or graphite soft felts, can be used, for example, for lining or filling gaps between the evaporator source and the support arrangement. Even with a direct contact of the evaporator source with the insulation is still given when using graphite felts, especially graphite hard felts, a good thermal insulation.
• due to their inherent rigidity or intrinsic stability such graphite felts are not necessarily to be fastened to the carrier arrangement or to the evaporator source.
• high-temperature-resistant sheets such as sheets of molybdenum, tantalum or tungsten, are suitable as radiation sheets.
• radiation sheets it is typical to use radiant-plate Arrangements provided in sandwich construction. In this case, a plurality of arranged in a predetermined distance and mutually parallel radiant panels are provided, on which in each case further insulating materials, such as graphite felt, graphite foam or quartz felt are arranged.
• Radiant sheets of suitable materials or alloys may reflect the thermal radiation emitted by the evaporator source and / or by the steam manifold.
• the heat radiation transmitted by a first radiation plate can then be reflected by a second radiation plate of the radiation plate arrangement, etc.
• a plurality of spaced-apart layers of radiation plates are provided whose interspaces are free of filling materials.
• the sheet metal layers are selectively or interconnected by means of linear spacers. The connection of the sheet metal layers is advantageous in such a way that the individual sheet metal layers move differently in the respective plane of the radiation sheet, or can expand thermally. Any spacers then provide only for a fixation in a direction perpendicular to the sheet plane.
• the steam distributor is at least partially at least partially enclosed by an enclosure with a floor, a ceiling and side walls.
• the enclosure similar to the support structure, may comprise individual panels, such as a floor panel, sidewall panels, and a ceiling panel, each of which may be made of a carbon fiber reinforced composite material, particularly CFC composite material.
• the enclosure can in particular be sized so large that thermal insulation can be arranged between the housing and an outside of the steam distributor.
• the thermal insulation can be made sufficiently pressure-stable, so that the housing can be held on the steam distributor by almost complete lining of the intermediate spaces between the housing and the steam distributor, without the need for any additional or separate connecting or fastening means would.
• the enclosure may be carried by the steam manifold via the thermal insulation disposed between the enclosure and the steam manifold housing.
• the housing also extends at least partially over the underside of the vapor distributor facing away from the carrier arrangement, the thermal insulation arranged, for example, laterally of a downwardly projecting outlet section of the vapor distributor can also be securely fixed and held on the vapor distributor.
• the outlet section of the steam distributor in which the outlet channels of the steam distributor opening into discharge nozzles, is typically shielded by a radiation plate arrangement.
• the radiation plate arrangement that is to say the plurality of radiation plates stacked in sandwiched fashion, has passage openings which are arranged in alignment with one another, but also with the discharge nozzle formed on the vapor distributor. The steam outlet from the discharge nozzles is thus not hindered by the radiation plate arrangement.
• At least the evaporator source or the steam distributor to a monolithic housing made of graphite.
• both the evaporator source and the steam distributor each have a monolithic housing made of graphite.
• the evaporator arrangement formed by the evaporator source and steam distributor has sufficient thermal stability for evaporation of copper and thermal conductivity required for heating an outflow section.
• the housing is resistant to high temperatures and can also have a high thermal shock resistance.
• the graphite housing of the evaporator source can be milled from a graphite block. All cavities and / or interiors of the housing can be formed by Matenalaus fundamentalisme so far so that only wall structures of the housing remain and are accordingly milled from a monolithic graphite block.
• the monolithic housing is typically made of graphite or graphitized carbon.
• the monolithic graphite housing typically has a crystalline graphitic structure in which the carbon atoms are approximately sp 2 -hybridized.
• FIG. 1 shows an exploded view of the evaporator source which can be arranged in a carrier arrangement in a perspective view
• FIG. 2 shows a perspective, partially sectioned isolated representation of the evaporator source, an external view of the evaporator source arranged in the carrier arrangement with the closure lid removed, a further exploded view of the evaporator source and carrier arrangement, the view according to FIG. 4 viewed from another perspective
• FIG. 7 is a perspective view of a screw connection of the evaporator source and the steam distributor
• FIG. 7 is a perspective view of the steam distributor viewed obliquely from below.
• Fig. 1 1 is an enlarged perspective view of the underside of
• Fig. 12 is an enlarged cross-section through a screw between see evaporator source and steam distributor and
• Fig. 13 is provided with a corresponding sealing surfaces of compound
• FIG. 14 shows an enlarged cross section through a further embodiment of a screw connection between the evaporator source and the steam distributor.
• FIGS. 1, 4 and 5 show an evaporator arrangement with an evaporator source 10.
• the evaporator source 10 shown in isolation in FIG. 2 has a monolithic housing 12 made of graphite.
• the vapor space 14 shown in FIG. 2 serves to accommodate one, for example 1, 3, 4 and 5 shown Verdampfungsgut matterers 16, which is typically designed as an evaporator crucible.
• the Verdampfungsgut matterer 1 6 can be monolithic made of graphite.
• the evaporator source 10 and its monolithic graphite housing 12 has, in addition to the two steam chambers 14, 1 14 a roughly centrally between the steam spaces 14, 1 14 arranged vapor-conducting channel 20.
• the roughly cylindrical channel 20 defining an axial direction extends approximately perpendicularly to an imaginary connecting line between the vapor spaces 14, 14 arranged on either side of the channel 20.
• the housing 12 of the evaporator source 10 has a continuous gap between the vapor spaces 14, 14 extending outer wall 13, which merges seamlessly into an axially inwardly directed inner wall 15.
• the inner wall 15 simultaneously forms a duct wall section 21, which limits the steam-conducting duct 20 in the circumferential direction.
• the vapor space 14 is separated from the channel 20 in the radial direction by the inner wall 15. Only in an upstream upper, on the upper side of the housing 12 protruding region of the vapor space 14 passes into an outlet 18.
• the first vapor space 14 via the outlet 18 with the channel 20 in flow communication, while symmetrically thereto, the second vapor space 1 14 opens through a corresponding outlet 1 18 at the upper end of the channel 20 in the channel 20.
• the steam chambers 14, 1 14 are radially outwardly, that is limited in the present case in the longitudinal direction of the housing 12 by a removable closure lid 26, 126.
• the housing 12 at opposite End sides 22 each have a closable by means of the closure cover 26 feed opening 24.
• the closure cover 26 By removing the closure cap 26 from the opening edge 29 of the housing 12, the vapor space 14 is accessible directly from outside.
• the evaporation material container 1 6, 1 1 6 located in the vapor space can be removed from the vapor space 14, 1 14 with the closure lid 26, 126 open and removed and filled again with vaporization material.
• the orientation of the evaporator source 10 shown in FIG. 2 corresponds approximately to its orientation in the position of use.
• the two steam chambers 14, 14 are spaced approximately horizontally with each other while the channel 20 extends downwardly.
• the passage 20 merges into a connection port 32 which extends axially from the outer wall 13 of the housing 12 of the vaporizer source 10, i. protrudes in the channel longitudinal direction.
• the connecting piece 32 projects radially outwards from the cylinder jacket surface.
• connection piece 32 is used to connect the evaporator source 10 with the longitudinally extending steam distributor 50 shown in FIGS. 6 to 8 in different views and sections.
• the channel wall section 21 of the evaporator source 10, which merges integrally into the connection piece 32, is further provided with at least one bore 38 which passes through at least one outer side of the housing 12.
• At least one heating element 40 as shown for example in FIGS. 10 and 11 on the steam distributor 50, can be introduced into each bore 38.
• the heating elements 40 which are not shown separately in FIG. 2 and which typically comprise graphite or consist of graphite and can be acted upon by electrical current in order to generate electrical heat loss, can heat the duct wall section 21 of the housing 12 separately.
• the closure lid 26 is typically screwed to the ⁇ réellesbundung 29 of the feed opening 24.
• a thread 28 is formed on the inside of the opening boundary, in particular cut, which is screwed with a corresponding thereto thread 30 on the outside of the closure cap 26.
• the entire closure cap 26 is sealingly and removably attached to the feed opening 24 via the threaded engagement of the threads 28, 30.
• an improved sealing effect of the threaded engagement can be realized.
• the closure lid 26 may have a hole or handle pattern 27 approximately centrally on its outer side. By inserting a suitable tool in that hole or handle pattern 27 of the otherwise flush with the outer wall 13 of the housing 12 final closure cover 26 can be rotated relative to the housing 12 and screwed to the housing 12.
• an axial sealing surface 30, which can be brought into abutment axially with a corresponding sealing surface 56 of a connection piece 52 of a housing 60 of a steam distributor 50, can be configured on the connection piece 32.
• the largely full-surface, or butt abuttable to each other sealing surfaces 36, 56 of the two connecting pieces 32, 52 can be held axially to each other by means of the indicated in Fig. 13 screws 44 and axially sealingly pressed against each other.
• a seal 42 typically in the form of a flexible graphite foil, is disposed between the adjoining sealing surfaces 36, 56.
• the screwing of the axial sealing surfaces 36, 56 can be realized by means of graphite screws 44, wherein in the sealing surface 56 threaded holes 46 are provided and corresponding thereto in the Sealing surface 36 of the connecting piece 32 screw holes 45 for passing graphite screws 44 may be formed.
• connection between the steam distributor 50 and the evaporator source 10 can be realized by directly screwing the steam distributor 50 to the evaporator source 10.
• the upwardly projecting connection piece 52 of the steam distributor 50 has an external thread 54, which can be screwed into an internal thread 34 formed on the connection piece 32 of the evaporation source 10.
• the two threads 34, 54 may be configured in particular as a so-called fine thread, so that even with the preparation of the screw connection of the steam distributor 50 and evaporator source 10, a largely vapor-tight or gas-tight and vapor-conducting connection can be provided.
• sealing surfaces 36, 56 corresponding to each other also come into contact with one another axially, as shown in FIG. 13, even when the connection of steam distributor 50 and evaporation source 10 is screwed.
• the steam distributor 50 has a monolithic elongate distributor housing 60 made of graphite. Similar to the evaporator source 10 and the steam distributor is milled out of a graphite block. He is designed so far seamless and joint-free.
• the steam distributor 50 has adjacent to its connection piece 52 a longitudinally extending distributor channel 58, via which the steam supplied via the connection piece 52 or via the channel 20 is distributed in the channel longitudinal direction.
• the steam distributor 50 has a plurality of holes 64 along a channel wall portion 59 delimiting the distribution channel 58, which extend parallel to the distribution channel 58 and typically pass through the entire steam distributor 50.
• Holes 64 are insertable into those bores 64, also referred to as deep bores, to maintain the duct wall portion 59 and the manifold 58 formed therefrom or adjacent thereto at a required temperature.
• the steam distributor 50 has an outlet section 65 delimiting the outlet channels 62. Also in the outlet section 65 a plurality of bores 64 are provided on both sides of the outlet channels 62 in order to keep the outlet channels 62 at a required temperature.
• the spacing of the bores 64 arranged in the outlet section 65 is smaller than in the overlying channel wall section 59.
• the discharge nozzles 63 and the outlet channels 62 can be separately heated and heated, once condensed matter in an outlet 62 should or in a discharge nozzle 63.
• a laterally and externally accessible slot 1 66 is further shown on the distributor housing 60.
• That slot 166 passes through the hole 64 provided for receiving a heating element 40, so that an in Fig. 10 shown schematically holder 1 60 in the slot 1 66 from the outside is inserted.
• the designed in the manner of a square or rectangular leaflet holder 1 60 has a through hole 1 64, which comes to lie in reaching approximately a in Fig. 9 schematically outlined insertion position in approximately centrally within the bore 64.
• the passage opening 164 of the holder 1 60 has a smaller inner diameter than the bore 64.
• the inner diameter of the passage opening 1 64 is adapted to fit the geometry of the respective heating element 40.
• the approximately rectangular or with square cross-section designed heating element 40, for example, in a circular configured passage opening 1 64 can be inserted.
• the width of the slot 1 66 is dimensioned such that the holder 1 60 accurately and axially as possible without play in the slot 1 66 is inserted from the outside.
• a plurality of slots 1 66 spaced apart from one another in the longitudinal direction of the bore 64 are provided on the distributor housing 60.
• the heating element 40 can be inserted in the longitudinal direction in the bore 64 and thereby pass through the aligned openings to each other coming through holes 1 64 a plurality of successive brackets 1 60.
• the holders designed in the manner of a leaflet 162 which is approximately one or a few millimeters thick are typically made of an electrically insulating ceramic material, so that the heating elements 40, typically made of graphite and forming heating rods, are electrically insulated from the distributor housing 60 in the corresponding bores 64. are bar.
• the brackets 1 60 are made of pyrolytic boron nitride.
• the slot 166 and the associated holder 1 60 are dimensioned such that a fully inserted into the slot 1 66 holder 1 60 protrudes with an outer side 165 at least slightly from the outside of the distributor housing 60. This makes it possible, if necessary, not only a comparatively simple gripping and pulling out of the respective holder 1 60 from the slot 1 66.
• the distributor housing 60 at least partially enclosing or enclosing radiant panels 124 at a predetermined distance can be held to the outside of the distributor housing 60.
• Such protrusion of the outer side 1 65 of the holder 1 60 is insofar provided in particular for such holders, the insertion slots are covered or shielded in a final assembly configuration of radiation plates 124.
• those with their outside 165 of the distributor housing 60 protruding brackets 1 60 are provided in particular in the region or adjacent to the downwardly projecting outlet channels 62 of the steam distributor 50.
• a self-supporting support arrangement 80 for the evaporator source 10 shown in an exploded view in FIG. 4 is furthermore provided.
• the carrier assembly 80 has a bottom 82 and a side wall structure 84 connected to the bottom 82. Sidewall structure 84 and bottom 82 form a receptacle 85 accessible from above, into which the evaporator source 10 can be inserted from above.
• the bottom 82 and sidewall structure 84 are formed of a graphite fiber material.
• Floor 82 and sidewall structure 84 may be fabricated in particular from carbon fiber reinforced composite material.
• the bottom 82 and the sidewall structure 84 may be made of a CFC composite, that is, a carbon fiber reinforced carbon.
• Carbon or graphite fibers are embedded in a matrix of pure carbon.
• CFC composites have an extremely high temperature resistance and are extremely temperature shock resistant. While the evaporator source made of graphite which can be used in the carrier arrangement 80 is comparatively shock-sensitive, the composite material of the carrier arrangement 80 can attenuate any mechanical stresses acting on the carrier arrangement 80 and thus provide mechanical protection and collision protection for the evaporator source 10.
• the carrier assembly 80 which is designed to support the weight of the evaporator source 10 as well as the vapor distributor 50 connectable therewith, has, as shown in FIG. 4, a substantially planar rectangular bottom plate with side edges 82a, 82b, 82c, 82d. Adjacent to the side edges of the bottom plate 82 are side wall plates 84a, 84b, 84c, 84d.
• the side wall panels 84a, 84b, 84c, 84d also have a substantially planar and rectangular basic geometry.
• the sidewall structure 84 is formed by the four sidewall plates 84a, 84b, 84c, 84d.
• the side wall structure 84 and the bottom 82 so far form a substantially cubic and rectangular box in which the evaporator source 10 is positionable.
• the bottom 82 of the carrier arrangement 80 has a passage opening 86, through which a fluidic connection 68 can be guided between the evaporator source 10 and a steam distributor.
• the fluidic connection 68 is shown for example in FIGS. 12 and 13. It also follows from the cross-sectional view of FIG. 8.
• the connection piece 52 of the steam distributor 50 projects from below through the bottom-side through-opening 86, while the downwardly extending from the housing 12 of the evaporator source 10 connecting piece 32 passes through the through hole 86 from above.
• the steam distributor 50 Since the evaporator source 10 and the steam distributor 50 are connected to one another mechanically and vapor-conductingly via the two mutually engaging connection stubs 32, 52, by attaching the steam distributor 50 to the evaporator source 10 already located in the carrier arrangement 80, the steam distributor can also be connected 50 over his weight the evaporator source 10 transferred to the bottom 82 of the self-supporting support assembly 80.
• the interconnection and assembly of the sidewall structure 84 with the bottom 82 of the carrier assembly 80 can be accomplished in a variety of ways.
• projections 83 extending from the side edges 82a and 82c protrude outwards in the ground plane in each case.
• Those extensions 83 are passable through corresponding passages 87 of adjacent side wall plates 84a, 84c.
• the mutually corresponding projections 83 and passages 87 allow a plug connection of the bottom 82 with the side wall structure 84.
• the front side provided side wall panels 84b, 84d connected to the elongated side wall panels 84a, 84c are thus plugged together.
• the mated connection of floor 82 or bottom plate and side wall panels 84a, 84c is advantageous in that it can be done without the aid of connection tools or separate connection means.
• a purely plugged graphite-based connection can be realized in this respect, which proves to be advantageous in terms of the thermal load capacity of the self-supporting support arrangement 80.
• the two longitudinally extending side wall plates 84a, 84c of the side wall structure 84 each have outwardly and upwardly projecting holding sections 88 each having a through opening 89.
• the eyelet-shaped passage opening 89 allows a suspended and thus largely thermally decoupled arrangement of the entire evaporator arrangement in the process space, for example in the process space of a coating installation.
• hinged supports 94 may be disposed on those through-holes 89, by means of which the support assembly 80 together with the evaporator source 10 received therein and the vapor distributor 50 connected thereto can be arranged freely suspended in the process space.
• the end-side side wall panels 84b, 84d of the side wall structure 84 each have a passage opening 90 which is adapted in each case to the size of the closure lid 26, 126 of the evaporator source 10.
• the passage openings 90 in the side wall structure 84 allow the opening of the supply port 24 of the evaporator source 10 without having to remove or lift the entire evaporator source 10 from the receptacle 85 of the support assembly 80.
• the intermediate spaces between the carrier arrangement 80 and the evaporator source 10 accommodated therein are provided in particular with a thermal insulation 100.
• a thermal insulating material in particular mats are based on graphite, such as a graphite felt 102 in question.
• Corresponding graphite felt mats 102 have recesses 86, 90 corresponding recesses.
• a plurality of radiation plates 124 may also be arranged between the carrier arrangement 80 and the evaporator source 10.
• a continuous heater 48 extends above the entire evaporator source 10, which typically has a plurality of graphite-based heating elements.
• FIG. 8 also shows the current bolts 49 provided with current for the heating 48.
• the entire carrier assembly 80 may also be provided with an external thermal insulation 130.
• insulating mats made of graphite felt 132 are provided in particular. These can typically be almost the same entire outer side 92 of at least the side wall structure 84 dress and only approximately in the region of the end-side side wall panels 84b, 84d one of the through hole 90 of the side wall structure 80 corresponding recess or a corresponding cutout 134 have. In operation, such cutouts 134 of the outer thermal insulation 130 may for example be tightly closed with removable insulating pieces 136 shown in FIGS. 3 and 4.
• the thermal insulation 100 may further comprise a frame-like cut-out graphite felt 102 which can be placed on the upper side or on the upper edge of the side wall structure 84.
• the cutout 104 of the frame-like graphite felt 102 allows good accessibility to the heater 48.
• the cutout 104 can be closed with an exact fit during operation of the evaporator source 10 with a lid blank 106 shown in FIG. 4.
• graphite felts such as, for example, graphite soft felt and graphite hard felt
• quartz felts or the like thermal insulating materials instead of or in addition to graphite felts.
• thermal insulation is also a foamed graphite, or a graphite foam in question.
• Molybdenum, tantalum or tungsten sheets are in particular provided for the radiation sheets.
• the enclosure 140 for the steam distributor 50 shown in cross-section in FIG. 9 has a slotted bottom 142 and side walls 144 connected thereto.
• the bottom 142 facing away from the upper ends of the side walls 144 are also at least partially connected to a ceiling 146 with each other.
• the bottom 142, sidewalls 144 and top 146 are also made of carbon fiber reinforced composite material, particularly CFC composite material.
• the intermediate space between the housing 50 enclosing the steam distributor 50 at least in regions and the steam distributor 50 is provided with a thermal insulation 150, in particular with a thermal insulation 1 20 filled far.
• the floor 142 of the housing 140 has a central slot 143 extending in the longitudinal direction of the floor 142. In that slot is a downwardly projecting outlet portion 65 of the steam distributor 50 to lie.
• the area of the outlet section 65 which is particularly hot in operation, is furthermore provided with radiant sheets 124 which are bent approximately in an U-shape around the outlet section 65, typically in a sandwich structure with thermal insulation material therebetween, either separately at the adjoining thermal insulation 1 20 or else can be attached directly to the distributor housing 60, for example by means of clamps or screws.
• the radiation plates 1 24 in the region of the discharge nozzles 63 have downwardly extending passage openings 38, which can influence the steam discharge behavior from the steam distributor 50.
• the distributor housing 60 is almost completely surrounded by a thermal insulation 1 20 and is arranged together with the thermal insulation 20 within the housing 140, a separate mounting and mounting of the housing 140 on the steam manifold 50 is unnecessary. Since the steam manifold 50 with its connection piece 52 directly is attached to the evaporator source 1 0, the weight of the housing 140 and located between the housing 140 and steam manifold 50 thermal insulation 1 20 over the bottom 142, the side walls 144 and ultimately the ceiling 146 of the housing 140 worn and so far on the the evaporator 1 0 facing upper side of the steam distributor 50 are supported. Finally, it should be noted that the arrangement of thermal insulation 130, 100, 120 in combination with radiation plates 124 can be configured in a variety of ways.
• FIG. 14 shows an alternative connection between the housing 12 of the evaporator source 10 and the steam distributor housing 60.
• the downwardly projecting connection support 32 of the housing 12 of the steam distributor 50 has an inwardly projecting attachment portion 33 with two axially opposite sealing surfaces 33a, 33b.
• the fastening section 33 can be configured as a flange or ring-like projection projecting radially inwards into the channel 20, which has an upper sealing surface 33a and, opposite the steam distributor 50, a lower sealing surface 33b.
• the upwardly projecting connection piece 52 of the steam distributor 50 or the distributor housing 60 has a sealing surface 56 by means of which the connection piece 52 can be sealingly brought into abutment against the fastening section 33.
• the connecting piece 52 of the distributor housing 60 is in this case in the connecting piece 32 of the housing 12 of the evaporator source 10 axially inserted upwards.
• a thread 53 is further formed, which is engageable with a connecting screw 150 in engagement.
• the connecting screw can be inserted from above into the channel 20, such as through an inspection opening, not explicitly shown here, of the housing 12 of the evaporator source 10.
• the connecting screw 150 has a radial Widened head 152, on the underside of a sealing surface 153 is formed, which comes to rest in the mounting position shown in Fig. 14 axially sealingly against the upper sealing surface 33 a of the mounting portion 33.
• An axially adjacent to the head 152 and projecting downwardly shank 154 of the connecting screw 150 is provided with an external thread 156 which is engageable with the internal thread 53 of the connecting piece 52 in engagement.
• the radially inwardly protruding mounting portion 33 can be clamped axially between the front side sealing surface 56 of the connecting piece 52 and the sealing surface 153 of the head 152 of the screw 150.
• separate sealing elements for example in the form of a graphite foil, can be arranged between the abutting sealing surfaces 153, 33a, 33b, 56.
• the connecting bolt 150 also has an axially extending through hole 158.
• the connecting screw 150 is thus permeable in the axial direction of steam. In this respect, it can provide a vapor-conducting structure and a flow connection between the connection pieces 32, 52 of the evaporator source 10 and the steam distributor 50.
• the head 152 may have either a radially outer key surface 151 or else in the region of an upper end face other key or screw surfaces, such as a hexagon socket or an inner torx for receiving a screwing LIST OF REFERENCE NUMBERS

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• 2014
  • 2014-05-23 DE DE102014007522.2A patent/DE102014007522A1/de not_active Withdrawn
• 2015
  • 2015-05-20 CN CN201811574378.7A patent/CN109609904A/zh active Pending
  • 2015-05-20 WO PCT/EP2015/061130 patent/WO2015177219A1/de active Application Filing
  • 2015-05-20 CN CN201580026919.0A patent/CN106414790B/zh active Active

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