WO2015162145A1 - Method for the preparation of functionalized cyclosiloxanes - Google Patents
Method for the preparation of functionalized cyclosiloxanes Download PDFInfo
- Publication number
- WO2015162145A1 WO2015162145A1 PCT/EP2015/058638 EP2015058638W WO2015162145A1 WO 2015162145 A1 WO2015162145 A1 WO 2015162145A1 EP 2015058638 W EP2015058638 W EP 2015058638W WO 2015162145 A1 WO2015162145 A1 WO 2015162145A1
- Authority
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- WIPO (PCT)
- Prior art keywords
- formula
- heptamethyl
- cyclotetrasiloxane
- heteroatoms selected
- group
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- ABUVAISWRGGFLF-UHFFFAOYSA-N CCO[N](C)(CCN(ONC)ONC)O[N](C)(C)ON(C)C Chemical compound CCO[N](C)(CCN(ONC)ONC)O[N](C)(C)ON(C)C ABUVAISWRGGFLF-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07F—ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
- C07F7/00—Compounds containing elements of Groups 4 or 14 of the Periodic Table
- C07F7/02—Silicon compounds
- C07F7/21—Cyclic compounds having at least one ring containing silicon, but no carbon in the ring
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J23/00—Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00
- B01J23/38—Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00 of noble metals
- B01J23/40—Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00 of noble metals of the platinum group metals
- B01J23/42—Platinum
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J31/00—Catalysts comprising hydrides, coordination complexes or organic compounds
- B01J31/16—Catalysts comprising hydrides, coordination complexes or organic compounds containing coordination complexes
- B01J31/1616—Coordination complexes, e.g. organometallic complexes, immobilised on an inorganic support, e.g. ship-in-a-bottle type catalysts
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2231/00—Catalytic reactions performed with catalysts classified in B01J31/00
- B01J2231/30—Addition reactions at carbon centres, i.e. to either C-C or C-X multiple bonds
- B01J2231/32—Addition reactions to C=C or C-C triple bonds
- B01J2231/323—Hydrometalation, e.g. bor-, alumin-, silyl-, zirconation or analoguous reactions like carbometalation, hydrocarbation
Definitions
- the present invention relates to a method for preparing functionalized cyclosiloxanes and the thus prepared cyclosiloxanes.
- Cyclosiloxanes are widely used as starting materials for the synthesis of poly(organo)siloxanes, which are, for example, used in cosmetics, detergents, sealants and the like, and owe their characteristic properties to the very flexible Si-0 bonds, the partially ionic backbone, its water repellence and low surface tension.
- the invention meets this need by providing a process for the synthesis of functionalized vinyl cyclosiloxane derivatives by hydrosilylation of acetylene derivatives with cyclic siloxanes that addresses the inclusion of functional groups in such cyclic monomers and the introduction of carbon-carbon bridges between cyclosiloxane monomers.
- Such bridged or functionalized cyclosiloxanes can be used to introduce carbon-carbon bridges or functional groups into polysiloxanes via ring opening polymerization either neat or with other cyclosiloxanes with the general formula D n D H m (where n and m are integer numbers, in a way that 2 ⁇ n+m ⁇ 11).
- the functional groups, selectively introduced by this methodology can be exploited as cross-linking moieties, as anchoring points for further polymer chains (leading to grafted copolymers), or simply to modify the chemical, physical or rheological properties of the materials, for example viscosity, flexibility, permeability and/or thermal stability.
- the present invention therefore relates to a method of preparing a cyclosiloxane of
- each R is independently selected from the group consisting of hydrogen and an organic functionality, preferably selected from the group consisting of substituted or unsubstituted C1-28 alkyl, C2-28 alkenyl, C2-22 alkinyl, C3-12 cycloalkyl, C3-12 cycloalkenyl, C6-20 aryl, C3-20 heteroaryl, preferably with 1 to 5 ring heteroatoms selected from N, O and S, C7-9 aralkyl or alkylaryl, C1-20 heteroalkyl, preferably with 1 to 5 heteroatoms selected from N, O, halogen and S, C1-20 heterocyclyl with 1 to 5 ring heteroatoms selected from N, O and S, halogen, cyano, nitro, -OR 1 , -C(0)R 1 , -C(0)OR 1 , -OC(0)R 1 , -NR 1 R 2 , -C(0)NR 1 R 2 , -NR 2 C(0)R 1 , and -Si(
- 0 is O, 1 , 2, or 3;
- the invention relates to a method of preparing a biscyclosiloxane of Formula IV
- each R is independently selected from the group consisting of hydrogen and an organic functionality, preferably selected from the group consisting of substituted or unsubstituted C1-28 alkyl, C2-28 alkenyl, C2-22 alkinyl, C3-12 cycloalkyl, C3-12 cycloalkenyl, C6-20 aryl, C3-20 heteroaryl, preferably with 1 to 5 ring heteroatoms selected from N, O and S, C7-9 aralkyl or alkylaryl, C1-20 heteroalkyl, preferably with 1 to 5 heteroatoms selected from N, O, halogen and S, C1-20 heterocyclyl with 1 to 5 ring heteroatoms selected from N, O and S, halogen, cyano, nitro, -OR 1 , -C(0)R 1 , -C(0)OR 1 , -OC(0)R 1 , -NR 1 R 2 , -C(0)NR 1 R 2 , -NR 2 C(0)R 1 , and -Si(R
- R 1 and R 2 are independently selected from the group consisting of hydrogen and d-28 alkyl, C2-28 alkenyl, C2-22 alkinyl, C3-12 cycloalkyl, C3-12 cycloalkenyl, C6-20 aryl, C3-20 heteroaryl, preferably with 1 to 5 ring heteroatoms selected from N, O and S, C7-9 aralkyl or alkylaryl, C1-20 heteroalkyl, preferably with 1 to 5 heteroatoms selected from N, O, halogen and S, C1-20 heterocyclyl with 1 to 5 ring heteroatoms selected from N, O and S;
- n is an integer from 2 to 9, preferably 3;
- R is as defined above;
- the invention also encompasses the cyclosiloxanes obtainable according to the methods described herein.
- each R is independently selected from the group consisting of hydrogen and an organic functionality.
- the organic functionality can comprise any functional group or hydrocarbon moiety, the latter preferably with 1 to 30 carbon atoms.
- the organic functionality may be selected from the group consisting of substituted or unsubstituted C-i-28 alkyl, C2-28 alkenyl, C2-22 alkinyl, C3-12 cycloalkyl, C3-12 cycloalkenyl, C6-20 aryl, C3-20 heteroaryl, preferably with 1 to 5 ring heteroatoms selected from N, O and S, C7-9 aralkyl or alkylaryl, C1-20 heteroalkyl, preferably with 1 to 5 heteroatoms selected from N, O, halogen and S, C1-20 heterocyclyl with 1 to 5 ring heteroatoms selected from N, O and S, halogen, cyano, nitro, -OR 1 , -C(0)R 1 ,
- R 1 and R 2 are independently selected from the group consisting of hydrogen and C1-28 alkyl, C2-28 alkenyl, C2-22 alkinyl, C3-12 cycloalkyl, C3-12 cycloalkenyl, C6-20 aryl, C3-20 heteroaryl, preferably with 1 to 5 ring heteroatoms selected from N, O and S, C7-9 aralkyl or alkylaryl, C1-20 heteroalkyl, preferably with 1 to 5 heteroatoms selected from N, O, halogen and S, C1-20 heterocyclyl with 1 to 5 ring heteroatoms selected from N, O and S, and 0 is 0, 1 , 2, or 3.
- the substituent may be one or more groups independently selected from the group consisting of C1-4 alkyl, C1-4 haloalkyl, C1-4 alkoxy, -OR 1 , -C(0)R 1 , -C(0)OR 1 , -OC(0)R 1 , -NR 1 R 2 , -C(0)NR 1 R 2 , -NR 2 C(0)R 1 , -Si(R 1 ) 0 (OR 2 ) 3 -o, - SR 1 , -SO2R 1 , halogen, cyano, and nitro.
- the alkyl radicals are, for example, straight-chain or branched alkyl radicals, such as methyl, ethyl, n-propyl, isopropyl, n- butyl, sec-butyl, isobutyl, tert-butyl or straight-chain or branched pentyl, hexyl, heptyl or octyl.
- the mentioned alkyl radicals may be unsubstituted or substituted, e.g. by hydroxy, carboxy, C1-4 alkoxy, especially by hydroxy.
- Aryl is preferably substituted or unsubstituted C6-14 aryl, more preferably phenyl or naphthyl, with the potential substituents being those defined above.
- C3-20 heteroaryl relates to aromatic ring systems with 3 to 20 carbon atoms and one or more hetero ring atoms, preferably 1 to 5 hetero ring atoms selected from N, O and S.
- Exemplary heteroaryls are, without limitation, pyridine or pyrimidine.
- Halogen is preferably chlorine, bromine or fluorine, with special preference being given to fluorine.
- C3-12 cycloalkyl refers to saturated cyclic hydrocarbons.
- C3-12 cycloalkyl is for example cyclopropyl, cyclobutyl, cyclopentyl, cyclohexyl, trimethylcyclohexyl, menthyl, thujyl, bornyl, 1-adamantyl oder 2- adamantyl.
- C2-28 alkenyl is for example vinyl, allyl, 2-propen-2-yl, 2-buten-1-yl, 3-buten-1-yl, 1 ,3- butadien-2-yl, 2-penten-1-yl, 3-penten-2-yl, 2-methyl-1-buten-3-yl, 2-methyl-3-buten-2-yl, 3-methyl-2-buten-1-yl, 1 ,4-pentadien-3-yl, or signifies different isomers of hexenyl, octenyl, nonenyl, decenyl or dodecenyl.
- C3-12 cycloalkenyl refers to unsaturated cyclic hydrocarbon residues containing one or multiple double bonds such as 2-cyclobuten-1-yl, 2-cyclopenten-1-yl, 2-cyclohexen-1-yl, 3-cyclohexen-1-yl , 2,4-cyclohexadien-1-yl , 1-p-menthen-8-yl, 4(10)-thujen-10-yl, 2-norbornen-1-yl, 2,5-norbornadien- 1-yl or 7,7-dimethyl-2,4-norcaradien-3-yl.
- C7-9 aralkyl is for example benzyl, 2-phenyl-ethyl, 1 ,1-dimethylbenzyl.
- C1-20 heterocyclyl relates to a saturated or unsaturated cyclic hydrocarbon residue containing one or more hetero ring atoms, preferably 1 to 5 hetero ring atoms selected from N, O and S.
- -OR 1 can preferably be hydroxy or -O-alkyl, with alkyl being as defined above.
- -C(0)R 1 can preferably be an aldehyde group or a keto group of the formula -C(0)-alkyl, with alkyl being as defined above.
- -C(0)OR 1 can preferably be carboxyl -COOH or carboxylic acid ester of the formula -C(0)0-alkyl, with alkyl being as defined above.
- -OC(0)R 1 can preferably be -OC(0)-alkyl, with alkyl being as defined above.
- -Si(R 1 ) 0 (OR 2 )3-o can preferably be trialkoxysilyl, alkyldialkoxysilyl or dialkylalkoxysilyl, for example trimethoxysilyl, methyldimethoxysilyl or dimethylmethoxysilyl.
- n+n is 3, 4, 5 or 6, preferably 4.
- the cyclosiloxanes are thus preferably cyclotrisiloxanes, cyclotetrasiloxanes, cyclopentasiloxanes and cyclohexasiloxanes.
- n is 1 and m is 2, 3, 4 or 5, preferably 3.
- the cyclosiloxanes are thus pentamethylcyclotrisiloxane (D2D H ), heptamethylcyclotetrasiloxane (D3D H ), nonamethylcyclopentasiloxane (D D H ) or undecamethylcyclohexasiloxane (DsD H ), preferably heptamethylcyclotetrasiloxane (D3D H ).
- R is selected from the group consisting of H, unsubstituted or substituted phenyl, hydroxyalkyl, preferably -(CH 2 ) -OH or -(CROH)-CH 3 , -(CH 2 ) P -COOH, and -COO(CH 2 )pCH 3 , with p being 0 or an integer from 1 to 10, preferably 2 or 3, and R' being unsubstituted C1-4 alkyl.
- the acetylene of formula III is selected from the compounds 2a-2f:
- the hydrosilylation catalyst may be selected from the group consisting of platinum (Pt)-, rhodium (Rh)- or iridium (Ir)-containing catalysts.
- the catalyst is a Pt-containing catalysts, optionally of the formula PtL q , wherein q is an integer from 1 to 6 and L is a neutral organic ligand, preferably a phosphine, such as triphenylphosphine, or an olefin, such as 1 ,1 ,3,3- tetramethyl-1 ,3-divinyldisiloxane or 2,4,6,8-tetramethyldisiloxane-2,4,6,8-tetravinyltetrasiloxane, or an inorganic support, preferably charcoal, silica or alumina.
- catalysts for the method of preparing a cyclosiloxane of formula I are platinum(0)-1 ,3-divinyl-1 , 1 ,3,3- tetramethyldisiloxane (Karstedt catalyst), tetrakistriphenylphosphine platinum(O), platinum on activated charcoal and platinum on alumina.
- an optionally functionalized vinyl cyclosiloxane of formula I preferably the Markovnikov isomer, such as that of formula 3-8A where R is preferably hydrogen
- a cyclosiloxane of formula II preferably D3D H
- the anti-Markovnikov isomer such as that of formula 3-8B where R is preferably hydrogen
- the reaction schemes for this reaction are schematically shown in Figure 5A-C.
- the acetylene is not functionalized, i.e. R is hydrogen, and the starting cyclosiloxane D3D H , so that the thus produced biscyclosiloxane is a biscyclosiloxane of formula VI
- This biscyclosiloxane is also herein referred to as bis(heptamethylcyclotetrasiloxanyl)-ethane (bis- D ) and is a preferred embodiment of the described method.
- heptamethylcyclotetrasiloxane is reacted with acetylene in the presence of a hydrosilylation catalyst, as defined above.
- the resulting vinyl-functionalized cyclosiloxane is then reacted with freshly added heptamethylcyclotetrasiloxane to yield the above biscyclosiloxane of formula VI.
- the employed catalyst is selected from the group consisting of platinum(0)-1 ,3-divinyl-1 ,1 ,3,3-tetramethyldisiloxane (Karstedt catalyst), tetrakistriphenylphosphine platinum(O), and platinum on activated charcoal.
- reaction conditions are not particularly limited and reaction temperatures and times can be determined by those skilled in the art by routine experimentation. However, in preferred embodiments, the reaction is carried out at a temperature in the range of from about 30 to about 150°C, preferably 40 to 60°C.
- the reaction time may range from about 1 to about 48 hours, but is preferably 18 to 32 hours.
- “About”, as used herein, relates to ⁇ 20 %, preferably ⁇ 10 % of the numerical value to which it refers.
- “About 30” thus relates to 30 ⁇ 6, preferably 30 ⁇ 3.
- the catalysts described herein can be used in concentrations of between about 0.0001 and about 1 mol-% based on the total amount of the cyclosiloxane educt(s).
- a preferred concentration range is from about 0.001 to about 0.1 mol-%, more preferably about 0.01 mol-%.
- the reaction may be carried out in any suitable organic solvent.
- a suitable solvent is, without limitation, toluene.
- the reaction is typically carried out under inert atmosphere, preferably argon atmosphere.
- the described methods can further comprises the step of removing the catalyst after the reaction is completed, preferably by filtration optionally over silica.
- the filtrate may subsequently be washed once or multiple times with an organic solvent, including but not limited to toluene and ethanol.
- the solvent may later be removed, for example by rotary evaporation.
- the thus obtained residue may additionally be dried under vacuum, for example by use of a vacuum pump.
- the present invention also encompasses the cyclosiloxanes obtainable by the described processes.
- the functionalized cyclosiloxanes may be used as silane coupling agents and can be used in ring opening polymerization to obtain functionalized polydimethylsiloxane polymers.
- the functional groups can be used as anchoring points for the grafting of other polymer chains, thus yielding grafted copolymers, or to modify chemical, physical or Theological properties of the polymers.
- Example 1 Synthesis of 2,2,4,4,6,6, 8-heptamethyl-8-(1-phenylvinyl)-cyclotetrasiloxane (3B) and 2, 2, 4, 4, 6, 6, 8-heptamethyl-8-(2-phenylvinyl)-cyclotetrasiloxane (3 A)
- Example 2 Synthesis of ethyl 2-(2,4,4,6,6, 8, 8-heptamethyl-cyclotetrasiloxan-2-yl)acrylate (4B) and ethyl 3-(2, 4, 4, 6, 6, 8, 8-heptamethyl-cyclotetrasiloxan-2-yl)prop-2-enoate (4 A)
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- Materials Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Inorganic Chemistry (AREA)
- Low-Molecular Organic Synthesis Reactions Using Catalysts (AREA)
- Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
- Silicon Polymers (AREA)
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020167032298A KR20160148605A (ko) | 2014-04-23 | 2015-04-22 | 관능화된 시클로실록산의 제조 방법 |
| JP2016563986A JP6608844B2 (ja) | 2014-04-23 | 2015-04-22 | 官能化シクロシロキサンの調製のための方法 |
| CN201580020913.2A CN106414464A (zh) | 2014-04-23 | 2015-04-22 | 制备官能化的环硅氧烷的方法 |
| US15/294,920 US10059728B2 (en) | 2014-04-23 | 2016-10-17 | Method for the preparation of functionalized cyclosiloxanes |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP14165544.9A EP2937353A1 (en) | 2014-04-23 | 2014-04-23 | Method for the preparation of functionalized cyclosiloxanes |
| EP14165544.9 | 2014-04-23 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| US15/294,920 Continuation US10059728B2 (en) | 2014-04-23 | 2016-10-17 | Method for the preparation of functionalized cyclosiloxanes |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| WO2015162145A1 true WO2015162145A1 (en) | 2015-10-29 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
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| PCT/EP2015/058638 Ceased WO2015162145A1 (en) | 2014-04-23 | 2015-04-22 | Method for the preparation of functionalized cyclosiloxanes |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US10059728B2 (cg-RX-API-DMAC7.html) |
| EP (1) | EP2937353A1 (cg-RX-API-DMAC7.html) |
| JP (1) | JP6608844B2 (cg-RX-API-DMAC7.html) |
| KR (1) | KR20160148605A (cg-RX-API-DMAC7.html) |
| CN (1) | CN106414464A (cg-RX-API-DMAC7.html) |
| TW (1) | TWI672312B (cg-RX-API-DMAC7.html) |
| WO (1) | WO2015162145A1 (cg-RX-API-DMAC7.html) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112225852B (zh) * | 2020-09-28 | 2021-10-08 | 浙江大学 | 一种聚硅氧烷功能化乙烯-降冰片烯共聚物及其制备方法 |
| CN116789967A (zh) * | 2023-06-29 | 2023-09-22 | 中国科学院化学研究所 | 一种分子量可控的乙基硅氧烷聚合物的制备方法及其应用 |
| CN117003789A (zh) * | 2023-07-03 | 2023-11-07 | 衢州科峰新材料有限公司 | 一种甲基乙基环硅氧烷的制备方法 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20040037791A1 (en) * | 2002-06-13 | 2004-02-26 | Societe L'oreal S.A. | Photoprotective UV-screening compositions comprising (phenylsulfonyl) acrylonitrile-substituted silanes/siloxanes |
| US20050267253A1 (en) * | 2002-07-15 | 2005-12-01 | Yoshihiro Hayashi | Organic siloxane copolymer film, method and deposition apparatus for producing same, and semiconductor device using such copolymer film |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2762829A (en) | 1952-01-02 | 1956-09-11 | Stanolind Oil & Gas Co | Process for converting olefins to oxygenated organic compounds |
| US2793222A (en) | 1954-05-11 | 1957-05-21 | Gen Electric | 1, 2-bis-heptamethylcyclotetrasiloxanylethane and polymeric derivatives thereof |
| US2785147A (en) | 1954-05-11 | 1957-03-12 | Gen Electric | Process for making octamethylcyclotetrasiloxane gels |
| US5352753A (en) * | 1991-04-25 | 1994-10-04 | Allergan, Inc. | Ultraviolet light absorbing compounds, silicone compositions and methods for making same |
| JPH0517486A (ja) * | 1991-07-04 | 1993-01-26 | Shin Etsu Chem Co Ltd | 有機ケイ素化合物及びその製造方法 |
| JP4296006B2 (ja) | 2003-02-27 | 2009-07-15 | 独立行政法人科学技術振興機構 | ビニルシランの製造方法 |
| US8501893B2 (en) | 2008-01-25 | 2013-08-06 | National Science And Technology Development Agency | Synthetic method for preparing dual curable silicone compositions |
| JP2011144272A (ja) * | 2010-01-15 | 2011-07-28 | Nippon Shokubai Co Ltd | ジルコニアナノ粒子を含むシリコーン樹脂組成物 |
-
2014
- 2014-04-23 EP EP14165544.9A patent/EP2937353A1/en not_active Withdrawn
-
2015
- 2015-04-10 TW TW104111543A patent/TWI672312B/zh not_active IP Right Cessation
- 2015-04-22 KR KR1020167032298A patent/KR20160148605A/ko not_active Withdrawn
- 2015-04-22 JP JP2016563986A patent/JP6608844B2/ja not_active Expired - Fee Related
- 2015-04-22 CN CN201580020913.2A patent/CN106414464A/zh active Pending
- 2015-04-22 WO PCT/EP2015/058638 patent/WO2015162145A1/en not_active Ceased
-
2016
- 2016-10-17 US US15/294,920 patent/US10059728B2/en not_active Expired - Fee Related
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20040037791A1 (en) * | 2002-06-13 | 2004-02-26 | Societe L'oreal S.A. | Photoprotective UV-screening compositions comprising (phenylsulfonyl) acrylonitrile-substituted silanes/siloxanes |
| US20050267253A1 (en) * | 2002-07-15 | 2005-12-01 | Yoshihiro Hayashi | Organic siloxane copolymer film, method and deposition apparatus for producing same, and semiconductor device using such copolymer film |
Non-Patent Citations (3)
| Title |
|---|
| ANDERSON ROY ET AL: "Silicon Compounds", SILICON COMPOUNDS : SILANES AND SILICONES, GELEST INC., MORRISVILLE, PA, US, 2004, pages 215 - 386, XP002533455 * |
| ANDRIANOV K A ET AL: "Synthesis of bicyclic organosilicon compounds with an ethylene bridge between the rings", BULLETIN OF THE ACADEMY OF SCIENCES OF THE USSR; DIVISION OF CHEMICAL SCIENCES, vol. 16, no. 6, June 1967 (1967-06-01), pages 1223 - 1226, XP055131555, ISSN: 0568-5230, DOI: 10.1007/BF00908277 * |
| BERTHON-GELLOZ G ET AL: "Highly beta-(E)-Selective Hydrosilylation of Terminal and Internal Alkynes Catalyzed by a (IPr)Pt(diene) Complex", THE JOURNAL OF ORGANIC CHEMISTRY, vol. 73, no. 11, 6 June 2008 (2008-06-06), pages 4190 - 4197, XP055131455, ISSN: 0022-3263, DOI: 10.1021/jo800411e * |
Also Published As
| Publication number | Publication date |
|---|---|
| JP6608844B2 (ja) | 2019-11-20 |
| KR20160148605A (ko) | 2016-12-26 |
| EP2937353A1 (en) | 2015-10-28 |
| US20170096438A1 (en) | 2017-04-06 |
| US10059728B2 (en) | 2018-08-28 |
| TW201546084A (zh) | 2015-12-16 |
| TWI672312B (zh) | 2019-09-21 |
| JP2017517497A (ja) | 2017-06-29 |
| CN106414464A (zh) | 2017-02-15 |
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