WO2015125850A1 - 光学素子の製造方法及び光学素子 - Google Patents
光学素子の製造方法及び光学素子 Download PDFInfo
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- WO2015125850A1 WO2015125850A1 PCT/JP2015/054554 JP2015054554W WO2015125850A1 WO 2015125850 A1 WO2015125850 A1 WO 2015125850A1 JP 2015054554 W JP2015054554 W JP 2015054554W WO 2015125850 A1 WO2015125850 A1 WO 2015125850A1
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- chalcogenide glass
- optical element
- temperature
- mold
- glass
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 51
- 230000003287 optical effect Effects 0.000 title claims abstract description 50
- 239000005387 chalcogenide glass Substances 0.000 claims abstract description 88
- 238000010438 heat treatment Methods 0.000 claims abstract description 63
- 238000000465 moulding Methods 0.000 claims abstract description 52
- 239000000463 material Substances 0.000 claims description 21
- 239000012298 atmosphere Substances 0.000 claims description 15
- 230000009477 glass transition Effects 0.000 claims description 8
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- 239000011261 inert gas Substances 0.000 claims description 5
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- 238000009826 distribution Methods 0.000 claims description 2
- 239000011521 glass Substances 0.000 abstract description 43
- 238000002425 crystallisation Methods 0.000 abstract description 13
- 230000008025 crystallization Effects 0.000 abstract description 13
- 238000002834 transmittance Methods 0.000 abstract description 12
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- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
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Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B11/00—Pressing molten glass or performed glass reheated to equivalent low viscosity without blowing
- C03B11/12—Cooling, heating, or insulating the plunger, the mould, or the glass-pressing machine; cooling or heating of the glass in the mould
- C03B11/122—Heating
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B11/00—Pressing molten glass or performed glass reheated to equivalent low viscosity without blowing
- C03B11/06—Construction of plunger or mould
- C03B11/08—Construction of plunger or mould for making solid articles, e.g. lenses
- C03B11/084—Construction of plunger or mould for making solid articles, e.g. lenses material composition or material properties of press dies therefor
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C3/00—Glass compositions
- C03C3/32—Non-oxide glass compositions, e.g. binary or ternary halides, sulfides or nitrides of germanium, selenium or tellurium
- C03C3/321—Chalcogenide glasses, e.g. containing S, Se, Te
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C4/00—Compositions for glass with special properties
- C03C4/10—Compositions for glass with special properties for infrared transmitting glass
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2201/00—Type of glass produced
- C03B2201/80—Non-oxide glasses or glass-type compositions
- C03B2201/86—Chalcogenide glasses, i.e. S, Se or Te glasses
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2215/00—Press-moulding glass
- C03B2215/40—Product characteristics
- C03B2215/46—Lenses, e.g. bi-convex
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2215/00—Press-moulding glass
- C03B2215/66—Means for providing special atmospheres, e.g. reduced pressure, inert gas, reducing gas, clean room
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2215/00—Press-moulding glass
- C03B2215/76—Pressing whereby some glass overflows unrestrained beyond the press mould in a direction perpendicular to the press axis
Definitions
- the present invention relates to a method for producing an optical element made of chalcogenide glass such as a chalcogenide glass lens, and an optical element obtained thereby.
- Lenses made of chalcogenide glass are known as lenses for night vision cameras and far-infrared cameras used as thermography.
- the composition of the chalcogenide glass is, for example, Ge—Se—Sb, As—Se or the like.
- Such a chalcogenide glass lens is required to have a high transmittance because it is not easy to increase the sensitivity of the infrared sensor.
- the chalcogenide glass for an infrared optical system is greatly different from a normal glass material, and there are the following problems in producing a chalcogenide glass lens.
- the chalcogenide glass when the chalcogenide glass is heated to a high temperature, components such as Se volatilize and the composition changes, so that there is a problem that the transmittance tends to decrease. Therefore, it is not desirable to keep the state heated to the melting temperature for a long time when the chalcogenide glass is formed.
- the chalcogenide glass has a problem that it is oxidized and reduced in transmittance when heated in the atmosphere. For this reason, it is not desirable to heat the chalcogenide glass in the air, and it is desirable to heat and form the chalcogenide glass in an inert gas (for example, nitrogen) atmosphere.
- an inert gas for example, nitrogen
- chalcogenide glass has a problem that the crystallization temperature is low and it is easy to crystallize in a press environment, and the speed of crystallization is high. That is, chalcogenide glass has a narrow temperature range that can be molded. In addition, chalcogenide glass has a problem that it has a low thermal conductivity and a large thermal expansion coefficient, and thus is vulnerable to thermal shock and easily breaks. For this reason, when using a reheat molding in which a preform of chalcogenide glass is prepared in advance and the preform is reheated and molded, it is necessary to slow the temperature increase rate or the temperature decrease rate.
- chalcogenide glass is prone to sink marks during molding, and the range of heating temperatures that can provide surface accuracy is narrow.
- the manufacturing process becomes special. Therefore, a simpler manufacturing method is required.
- the raw materials for constituting the chalcogenide glass are expensive, and there is a demand for reducing materials that are discarded in the manufacturing process.
- Patent Document 1 proposes a method of manufacturing a lens by reheating molding of chalcogenide glass. Specifically, hot press molding is performed while maintaining the temperature of the mold at a temperature above the yield point of the chalcogenide glass and below the softening point.
- the glass material is heated to the molding temperature mainly by heat conduction from the mold, but chalcogenide glass has low thermal conductivity and a large thermal expansion coefficient, so it is subject to thermal shock. It is weak and causes cracking when heated rapidly. Therefore, there are problems that it takes time to raise and lower the temperature, and the molding cycle time is long and the cost is high.
- Patent Document 2 it is proposed to irradiate infrared rays to heat the mold.
- the mold is heated by infrared rays transmitted through the glass. There is a tendency to cause a problem of fusion and a decrease in transmittance between the mold and the mold.
- the present invention has been made in view of the above-described problems, and an object of the present invention is to provide a method of manufacturing an optical element that can efficiently manufacture a chalcogenide optical element having high performance at low cost.
- Another object of the present invention is to provide an optical element manufactured using the above-described manufacturing method.
- the method of manufacturing an optical element according to the present invention softens a chalcogenide glass by irradiating the chalcogenide glass with light containing infrared rays, and softens the chalcogenide glass more than the chalcogenide glass. Press molding with a low-temperature mold.
- the inside of the chalcogenide glass can be heated uniformly by heating the chalcogenide glass with infrared rays, so that problems such as cracking are not likely to occur in the optical element after molding, and the chalcogenide glass block is shortened. It can be softened with time, and the time required for molding can be shortened. In addition, since heating and cooling can be performed in a short time by heating directly with infrared rays, the effects of volatilization, oxidation, crystallization, and the like can be reduced, and an optical element with high transmittance can be molded.
- optical element according to the present invention is manufactured by the above-described optical element manufacturing method.
- FIG. 2A to 2C are diagrams for explaining a method of manufacturing an optical element. It is a figure explaining the temperature change of the glass at the time of shaping
- 4A to 4C are diagrams for explaining a method of manufacturing an optical element.
- 5A to 5C are views for explaining a method of manufacturing an optical element according to the second embodiment.
- 6A and 6B are views for explaining a method of manufacturing an optical element according to the second embodiment.
- a manufacturing apparatus 100 for carrying out the manufacturing method of the first embodiment includes a pair of upper and lower molds 11 and 12, a mold drive unit 21 for the upper mold 11, and a lower side.
- the upper first mold 11 has a transfer member 15 provided with a transfer surface 15a.
- the workpiece WP becomes a softened glass body SG heated as described later, and the transfer member 15 transfers the first optical surface to the upper side of the softened glass body SG by the transfer surface 15a.
- the illustrated transfer surface 15a is a concave mirror surface, the transfer surface 15a is not limited to a concave surface and may be a convex surface or a flat surface.
- the transfer surface 15a is not limited to a spherical surface, an aspherical surface, and a free-form surface, and can be a non-smooth surface such as a rough surface or a stepped surface.
- the transfer member 15 is made of metal, ceramics, a composite member, or the like, and specifically, is made of a material having a low thermal conductivity such as metal zirconia or glassy carbon.
- the lower second mold 12 has a transfer member 16 provided with a transfer surface 16a.
- the transfer member 16 transfers the second optical surface to the lower side of the softened glass body SG by the transfer surface 16a.
- the illustrated transfer surface 16a is a concave mirror surface
- the transfer surface 16a is not limited to a concave surface and may be a convex surface or a flat surface.
- the transfer surface 16a is not limited to a spherical surface, an aspheric surface, and a free-form surface, and can be a non-smooth surface such as a rough surface or a step surface.
- the transfer member 16 is formed of metal, ceramics, a composite member, or the like.
- the transfer member 16 is a material having a low thermal conductivity, preferably a material having a thermal conductivity of 20 W / mK or less, more preferably 10 W / mK or less. It is preferable to form with a material having a low thermal conductivity such as metal zirconia or glassy carbon.
- a chalcogenide glass is irradiated with light on a member or a layered body made of a material having a low thermal conductivity and heated, the chalcogenide glass being heated is prevented from taking heat away and can be heated uniformly in a short time.
- a main body 16c of the transfer member 16 is covered with a surface layer 16d, and a transfer surface 16a is formed by the surface layer 16d.
- the surface layer 16d is formed of a material having an emissivity lower than that of the main body 16c (for example, a material having an emissivity of 0.3 or less), specifically, a material having a metallic luster. Thereby, it is possible to prevent the second mold 12 from being heated by infrared rays from the first heating device 31, and to easily control the temperature of the second mold 12.
- a film for preventing fusion such as a tire mon-like carbon film, may be provided on a layer having a low emissivity. Since diamond-like carbon substantially transmits infrared rays, it is not heated by irradiation with infrared rays.
- the mold drive unit 21 can raise and lower the first mold 11 in the upper and lower AB directions (vertical direction) at a desired timing, and lower the first mold 11 with respect to the second mold 12. Clamping with a desired pressure can be performed.
- molding die drive part 21 can adjust the position of the 1st shaping
- the first heating device 31 includes an infrared irradiation unit 32 and a heating drive unit 33.
- the infrared irradiation unit 32 includes an infrared lamp 32a and a mirror 32b.
- the infrared lamp 32a softens the preheated workpiece WP by heating it with heat rays.
- the heating light LI radiated from the infrared lamp 32a (hereinafter sometimes referred to as infrared rays) is an infrared ray that is moderately absorbed by the chalcogenide glass, and more preferably has an energy distribution at a wavelength of 0.5 to 2 ⁇ m. It is desirable to include the light it has.
- the infrared lamp 32a a lamp having energy in a wavelength range of light absorption edge ⁇ 0.5 ⁇ m of chalcogenide glass to be heated and formed is used. Since the wavelength of the light absorption edge varies depending on the composition of the chalcogenide glass, it is preferable to select a lamp according to the composition. Thus, the object can be uniformly heated by using infrared rays having a wavelength that is appropriately absorbed by the chalcogenide glass.
- the infrared lamp 32a is made of a halogen lamp, for example.
- the mirror 32b reflects the heating light LI including infrared rays emitted from the infrared lamp 32a toward the workpiece WP.
- the number of the infrared irradiation units 32 is not limited to one, and a plurality of infrared irradiation units 32 can be arranged around the upper side of the lower second mold 12. Since it is desirable to arrange the infrared irradiation unit 32 so that the heating light LI including infrared rays is not strongly incident on the second molding die 12 and the like outside the workpiece WP, in this embodiment, the side of the workpiece WP The infrared irradiation unit 32 is arranged so that the light is irradiated from there.
- the heating drive unit 33 may cause the infrared irradiation unit 32 to operate at a desired timing so that infrared rays having a desired intensity are incident on the inside of the workpiece WP disposed on the second mold 12 continuously or periodically. it can.
- the second heating device 41 includes a heater 42 embedded in the first and second molds 11 and 12 and a drive circuit (not shown).
- the heater 42 heats both the molds 11 and 12 to gradually cool the softened glass body SG sandwiched between the transfer surfaces 15a and 16a during press molding.
- the temperature monitoring device 51 includes a first sensor 52 that directly detects the temperature of the workpiece WP on the second mold 12, a second sensor 53 that detects the temperatures of the first and second molds 11 and 12, And a temperature monitoring drive unit 54 for operating the sensors 52 and 53.
- the first sensor 52 is constituted by a radiation thermometer, for example, and measures the temperature of the workpiece WP in a non-contact manner.
- the second sensor 53 is composed of, for example, a thermocouple, and measures the internal temperatures of the first and second molds 11 and 12.
- the chalcogenide glass workpiece WP on the second mold 12 is accurately heated to a temperature equal to or higher than the softening point of the chalcogenide glass and, for example, about the crystallization temperature or lower. be able to.
- the temperature of the transfer surfaces 15 a and 16 a of the molds 11 and 12 is 10 ° C. or lower than the temperature of the chalcogenide glass on the second mold 12, and the chalcogenide glass Heating can be accurately performed in a range of 50 ° C. or lower than the glass transition temperature Tg.
- the chamber 61 accommodates the first and second molding dies 11 and 12 to enable atmosphere management during heating and press molding.
- the atmosphere adjusting device 71 can depressurize the inside of the chamber 61 and supply a desired inert gas, and can adjust the atmosphere around the workpiece WP on the second mold 12. Thereby, the atmosphere at the time of heating and press molding of the workpiece WP can be set to, for example, nitrogen gas, and a pressurized state higher than the atmospheric pressure can be obtained. By controlling the atmosphere of the molds 11 and 12, component volatilization from the workpiece WP or the softened glass body SG can be suppressed.
- the main controller 101 sets the operating state of the manufacturing apparatus 100 appropriately.
- the main control device 101 operates the mold driving unit 21 to allow the first and second molds 11 and 12 to be opened and closed, and lowers the first mold 11 to soften the work on the second mold 12.
- the piece WP (that is, the softened glass body SG) can be clamped by being sandwiched between the first and second molding dies 11 and 12, and the upper and lower transfer surfaces 15a and 16a are inverted to the workpiece WP or the softened glass body SG.
- a shape can be formed.
- the main controller 101 uses the temperature monitoring device 51 to measure or monitor the temperature of the workpiece WP on the second mold 12 and the temperatures of the first and second molds 11 and 12, while the second heating device The operation of the drive circuit 41 and the heating drive unit 33 of the first heating device 31 are controlled.
- the main controller 101 controls the atmosphere in the chamber 61 to an inert and pressurized state by the atmosphere adjusting device 71.
- the workpiece WP is placed on the second mold 12 heated to a temperature equal to or lower than the softening point in advance.
- the workpiece WP is made of a glass material such as Ge—Se—Sb or As—Se, and is a small block cut out by a necessary amount from a large glass block (ingot) formed in advance. That is, the work piece WP is prepared in advance by subdividing only the necessary weight that substantially corresponds to the weight of the lens that is the optical element to be manufactured. A necessary amount of glass block fragments or small pieces may be collected and used as the workpiece WP.
- the workpiece WP can be preheated outside the chamber 61 before being placed on the second mold 12, for example.
- the preheating temperature of the workpiece WP is less than the glass transition temperature of the chalcogenide glass.
- the workpiece WP can be softened in a short time in the main heating. Moreover, it can prevent that the transmittance
- the inside of the chamber 61 is an inert gas atmosphere such as N 2 in advance and is set to have an internal pressure equal to or higher than atmospheric pressure.
- the heating of the chalcogenide glass by irradiation with light LI containing at least infrared rays as will be described later, and press molding can suppress the oxidation of the chalcogenide glass as the molding object, and the transmittance Decline can be prevented. Moreover, the influence of volatilization can be further reduced by setting the atmospheric pressure higher than the atmospheric pressure.
- the first heating device 31 is operated to irradiate the workpiece WP on the second mold 12 with the light LI having a predetermined intensity including infrared rays for a predetermined time, and the workpiece WP.
- the main heating is performed at a temperature equal to or higher than the temperature of the softening point of the chalcogenide glass.
- the solid workpiece WP is softened to become a softened glass body SG.
- the temperature of the main heating of the workpiece WP is not particularly limited as long as it is equal to or higher than the softening point Ts of the chalcogenide glass.
- FIG. 3 schematically shows a change in temperature from completion of preheating to main molding through molding. As shown in the figure, heating is performed in a short time by light irradiation from the preheated state (see symbol A in FIG. 3) (see symbols B1 to B3 in FIG. 3). At this time, although the glass can be mirror-finished in a shorter time as the temperature is higher, the components are more likely to volatilize, so that the temperature can be quickly lowered and the crystallization temperature region (T1 to T2) can be passed quickly. (See symbol C in FIG.
- the temperature of the main heating (see symbol B1 in FIG. 3). ) Up to the upper limit temperature T2 + 50 ° C. of the crystallization temperature region.
- the temperature of the main heating may be a temperature within the crystallization temperature region T1 to T2 (see the broken line and symbol B2 in FIG. 3). In this case, the time until the workpiece WP becomes a mirror surface is slightly longer, but it is easy to prevent the problem of component volatilization.
- the temperature of the main heating may be a temperature that is equal to or higher than the softening point Ts of the chalcogenide glass and lower than the lower limit temperature T1 of the crystallization temperature region (see the alternate long and short dash line and symbol B3 in FIG. 3). In this case, the time for mirroring becomes longer, but volatilization and crystallization can be reliably prevented.
- the first heating device 31 including the infrared lamp 32a is heated by irradiating the light LI containing infrared rays for a predetermined time, so that the temperature is raised and lowered in a short time. be able to. Therefore, problems caused by heating such as volatilization, crystallization, and oxidation can be suppressed.
- the temperature of the transfer member 16 of the second mold 12 is set lower than the temperature at which the workpiece WP is softened, and the softened glass body SG of chalcogenide glass is melted on the transfer surface 16a. You can prevent wearing.
- the temperature of the second mold 12 is set to a temperature Ta-10 ° C. or less (preferably a temperature Ta-30 ° C. or less) of the softened glass body SG on the second mold 12, and the chalcogenide constituting the softened glass body SG
- the glass transition temperature Tg of the glass is set to be 50 ° C. or higher.
- the solid glass workpiece WP is heated to a temperature equal to or higher than the softening point Ts in a short time and softened.
- the heating is completed, and the press by the first mold 11 is performed. Transition to molding.
- the heating operation by the first heating device 31 is stopped, or the setting is switched to a setting for gradually lowering the mold temperature, and the first mold 11 is lowered to start the mold closing.
- the mold 11 by lowering the first mold 11, at least part of the light irradiated to the softened glass body SG is shielded by the accompanying shield, or the mold temperature is gradually lowered, The glass temperature may be lowered while the heating operation by the first heating device 31 is continued.
- molding die 11 and 12 at the time of starting press molding of the softening glass body SG is a temperature range which is hard to fuse
- the temperature of SG is Ta-10 ° C. or lower (preferably the temperature Ta-30 ° C. or lower), and the glass transition temperature Tg of the softened glass body SG is 50 ° C. or higher.
- the press is completed when the softened glass body SG is cooled and solidified while being press-molded (see symbol E in FIG. 3).
- the temperature of the first and second molds 11 and 12 can be maintained until the press molding of the softened glass body SG is finished, but the temperature can also be gradually lowered.
- the lens LE which is an optical element made of solidified chalcogenide glass, is released and taken out to the outside.
- the lens LE has optical surfaces La and Lb to which the transfer surfaces 15a and 16a of both molds 11 and 12 are transferred.
- the chalcogenide glass is heated with infrared rays (light LI), so that the inside of the chalcogenide glass can be heated uniformly.
- the workpiece WP which is a block, can be softened in a short time, and the time required for molding can be shortened.
- heating and cooling can be performed in a short time by directly heating with infrared rays (light LI), the effects of volatilization, oxidation, crystallization, etc. can be reduced, and the lens LE with high transmittance can be obtained.
- the second molding die 12 can be press-molded at a temperature lower than the glass temperature, it is possible to form a lens LE that is less likely to be fused and has a good appearance with a low maintenance frequency. Since the glass temperature can be controlled separately from the temperature of the second mold 12, a lens LE with higher surface accuracy or shape accuracy can be produced.
- the manufacturing method of the second embodiment is a partial modification of the manufacturing method of the first embodiment, and matters that are not particularly described are the same as those of the manufacturing method of the first embodiment.
- the manufacturing apparatus 100 shown in FIG. 5A includes a stage 81 that supports the workpiece WP, and a driving device 82 that moves the stage 81.
- the drive device 82 can arrange the stage 81 at the delivery position of the workpiece WP, the heating / softening position directly below the infrared irradiation unit 32, and the transfer position where the stage 81 is transferred to the second mold 12.
- a plurality of stages 81 can be provided in one manufacturing apparatus 100, and a plurality of delivery positions, heating / softening positions, and the like can be provided.
- the stage 81 has a flat plate-like support plate 81a and can be appropriately tilted by the movable portion 81c.
- the support plate 81a is made of a material having a low thermal conductivity, preferably a material having a thermal conductivity of 20 W / mK, more preferably lower than 10 W / mK (for example, zirconia, glassy carbon, etc.). Thereby, it is possible to prevent heat from being taken away from the workpiece WP being heated, which will be described later, and to heat the workpiece uniformly in a shorter time.
- molding die can be expanded by isolate
- the molding tact can be shortened and the number of moldings and molding dies can be reduced.
- heating of the support plate 81a can be suppressed by coating the surface of the support plate 81a with a material having a low emissivity.
- the stage 81 is moved to the delivery position close to the carry-in port of the chamber 61, and the workpiece WP is received on the support plate 81a (see FIG. 5A).
- the stage 81 is moved to a heating / softening position outside the mold, and the workpiece WP on the support plate 81a is subjected to main heating using direct irradiation of infrared rays (light LI) from the infrared irradiation unit 32. Softened to obtain a softened glass body SG (see FIG. 5B).
- the stage 81 is moved to the transfer position and tilted (see FIG. 5C) to supply the softened glass body SG on the support plate 81a to the mold on the second mold 12 (see FIG. 5C). (See FIG. 6A).
- the first mold 11 is lowered and pressed against the second mold 12, and the softened glass body SG is press-molded so as to be sandwiched between the transfer members 15 and 16 of both molds 11 and 12 ( (See FIG. 6B).
- the process waits until the softened glass body SG between the first and second molds 11 and 12 is solidified, and the first mold 11 is separated from the second mold 12 to solidify and
- the lens LE made of cured chalcogenide glass can be taken out of the mold.
- the lens LE is conveyed to the outside from the carry-out port of the chamber 61.
- the temperature at the time of softening of the workpiece WP or press molding is the same as in the case of the first embodiment.
- the chalcogenide glass a glass having a composition of Ge 15 to 20 Sb 15 to 20 Se 60 to 70 , a glass transition temperature of 320 ° C., and a softening point of 360 ° C. was used.
- the workpiece was placed on a glassy carbon plate and preheated to 300 ° C., and then the chalcogenide glass as the workpiece was heated to a predetermined temperature in the range of 360 to 500 ° C.
- a biconvex aspheric lens having an effective optical surface diameter of 17.9 mm, a sag amount of the first surface of 0.535 mm, and a sag amount of the second surface of 0.842 mm was molded.
- Preheating heating with light including infrared rays, and molding were performed in an N 2 atmosphere of 1 or 2 atm. After pressing, the load was released, the molded product was released, transferred to a 300 ° C. slow cooling table, and cooled to room temperature over about 10 minutes.
- the surface accuracy, surface roughness, and transmittance of the molded product obtained by release were measured. Surface accuracy is measured with a three-dimensional measuring machine, surface roughness is measured using a white interferometer, and transmittance is measured when white light is transmitted through the lens using FT-IR and when the lens is not transmitted. The light intensity in the range of ⁇ 14 ⁇ m was measured and calculated as the ratio of the former to the latter.
- the surface accuracy was set to symbol “ ⁇ ” when the deviation from the design value was 0.2 ⁇ m or less, and “ ⁇ ” when exceeding the 0.2 ⁇ m.
- the surface roughness was indicated by symbol “ ⁇ ” when there was no fusion and Ra was 15 nm or less, and symbol “x” when fusion occurred or when Ra exceeded 15 nm. Table 1 shows the molding results under each condition.
- the present invention has been described according to the embodiment.
- the present invention is not limited to the above embodiment, and various modifications are possible.
- the composition of the chalcogenide glass is not limited to that exemplified above, and the same manufacturing method as described above can be applied to chalcogenide glasses having various compositions.
- an optical element other than the lens LE can be obtained by adapting the shapes of the transfer surfaces 15a and 16a to the purpose.
- the infrared irradiation part 32 utilizes not only what combines the infrared lamp 32a and the mirror 32b but various light sources which can irradiate the heating light, such as infrared rays locally. Can do.
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Abstract
Description
また、カルコゲナイドガラスは、大気中で加熱されると酸化して透過率が下がるという問題がある。このため、大気中でカルコゲナイドガラスを加熱することは望ましくなく、不活性ガス(例えば窒素)雰囲気下でカルコゲナイドガラスを加熱し成形することが望ましい。
また、カルコゲナイドガラスは、結晶化温度が低くプレス環境下で結晶化しやすく、結晶化の進行速度も速いという問題がある。つまり、カルコゲナイドガラスは、成形できる温度範囲が狭いものとなっている。
また、カルコゲナイドガラスは、熱伝導率が低く熱膨張係数が大きいため、熱衝撃に弱く割れやすいという問題がある。このため、予めカルコゲナイドガラスのプリフォームを準備しておき、このプリフォームを再加熱して成形を行う再加熱成形を利用する場合、昇温速度や降温速度を遅くする必要がある。また、熱膨張係数が大きいことに起因して、カルコゲナイドガラスは、成形に際してヒケが生じやすく、面精度を出せる加熱温度の範囲が狭い。
このように、カルコゲナイドガラス製の光学素子を作製するためには、様々な条件を満たす必要があり、製造工程が特殊なものとなってしまうため、より簡素な製造方法が求められている。また、カルコゲナイドガラスを構成するための原材料は高価であり、製造工程で廃棄されてしまう材料を減らすことも求められている。
図1に示すように、第1実施形態の製造方法を実施するための製造装置100は、上下一対の成形型11,12と、上側の成形型11用の成形型駆動部21と、下側の成形型12上に載置されるカルコゲナイドガラスのワークピースWPを加熱するための第1加熱装置31と、成形型11,12を加熱するための第2加熱装置41と、成形型12上のワークピースWP等の温度を監視するための温度監視装置51と、成形型11,12等を収納するチャンバー61と、チャンバー61内の雰囲気を調整する雰囲気調整装置71と、装置各部を制御する主制御装置101とを備える。
以下、第2実施形態の製造方法について説明する。第2実施形態の製造方法は、第1実施形態の製造方法を一部変更したものであり、特に説明しない事項は、第1実施形態の製造方法と同様である。
まず、ステージ81をチャンバー61の搬入口に近い受渡し位置に移動させて、支持板81a上にワークピースWPを受け取る(図5A参照)。次に、ステージ81を成形型外の加熱・軟化位置に移動させて、支持板81a上のワークピースWPを赤外線照射部32からの赤外線(光LI)の直接的な照射を利用した本加熱により軟化させて軟化ガラス体SGとする(図5B参照)。次に、ステージ81を移載位置に移動させて傾斜させることにより(図5C参照)、支持板81a上の軟化ガラス体SGを第2成形型12上に載置する型への供給を行う(図6A参照)。次に、第1成形型11を降下させて第2成形型12に押圧する型締めを行い、両成形型11,12の転写部材15,16間に挟むようにして軟化ガラス体SGをプレス成形する(図6B参照)。その後は、図示を省略するが、第1及び第2成形型11,12間の軟化ガラス体SGが固化するまで待ち、第1成形型11を第2成形型12から離間させることにより、固化及び硬化したカルコゲナイドガラスからなるレンズLEを型外に取り出すことができる。このレンズLEは、チャンバー61の搬出口から外部に搬送される。なお、ワークピースWPの軟化やプレス成形に際しての温度は、第1実施形態の場合と同様である。
Claims (13)
- カルコゲナイドガラスに赤外線を含む光を照射して加熱することにより、カルコゲナイドガラスを軟化させ、
軟化したカルコゲナイドガラスを当該カルコゲナイドガラスよりも低温の成形型でプレス成形する光学素子の製造方法。 - 前記赤外線を含む光を照射してカルコゲナイドガラスの軟化点以上の温度まで加熱することにより、カルコゲナイドガラスを軟化させる、請求項1に記載の光学素子の製造方法。
- 熱伝導率が20W/mK以下の材料で形成された部材の上に載置したカルコゲナイドガラスに、前記赤外線を含む光を照射して加熱する、請求項1及び2のいずれか一項に記載の光学素子の製造方法。
- 波長0.5μm~2μmにエネルギーの分布を持つ赤外線ランプを使用して、前記赤外線を含む光をカルコゲナイドガラスに照射する、請求項1~3のいずれか一項に記載の光学素子の製造方法。
- カルコゲナイドガラスをガラス転移温度未満の温度まで予熱した後、カルコゲナイドガラスに前記赤外線を含む光を照射して加熱する、請求項1~4のいずれか一項に記載の光学素子の製造方法。
- 不活性ガス雰囲気下で、少なくとも前記赤外線を含む光の照射によるカルコゲナイドガラスの加熱及びプレス成形を行う、請求項1~5のいずれか一項に記載の光学素子の製造方法。
- 製造される光学素子の重量に略対応する必要重量だけのカルコゲナイドガラスを軟化させる、請求項1~6のいずれか一項に記載の光学素子の製造方法。
- カルコゲナイドガラスのプレス成形を開始する際の前記成形型の温度は、当該成形型上のカルコゲナイドガラスの温度よりも10℃低い温度以下であり、当該カルコゲナイドガラスのガラス転移温度よりも50℃低い温度以上である、請求項1~7のいずれか一項に記載の光学素子の製造方法。
- 前記成形型上に載置したカルコゲナイドガラスに、前記赤外線を含む光を照射して加熱する、請求項1~8のいずれか一項に記載の光学素子の製造方法。
- 前記成形型の表面は、放射率が0.3以下の材料で形成されている、請求項1~9のいずれか一項に記載の光学素子の製造方法。
- 前記成形型外でカルコゲナイドガラスに前記赤外線を含む光を照射して加熱することにより、カルコゲナイドガラスを軟化させた後、前記成形型に軟化したカルコゲナイドガラスを供給する、請求項1~8のいずれか一項に記載の光学素子の製造方法。
- 大気圧より大きい加圧雰囲気下で、前記赤外線を含む光を照射して加熱することにより、カルコゲナイドガラスを軟化させる、請求項1~11のいずれか一項に記載の光学素子の製造方法。
- 請求項1~12のいずれか一項に記載の光学素子の製造方法で製造された光学素子。
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WO2018017406A1 (en) * | 2016-07-18 | 2018-01-25 | Corning Incorporated | The use of arsenic-free chalcogenide glasses for hot-melt processing |
WO2020071071A1 (ja) * | 2018-10-02 | 2020-04-09 | パナソニック株式会社 | 光学素子およびその製造方法 |
WO2023119767A1 (ja) * | 2021-12-23 | 2023-06-29 | パナソニックIpマネジメント株式会社 | 光学素子の製造方法および光学素子 |
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JP6938864B2 (ja) * | 2016-07-20 | 2021-09-22 | 日本電気硝子株式会社 | 赤外線透過性レンズの製造方法 |
JP6964050B2 (ja) * | 2018-07-20 | 2021-11-10 | オリンパス株式会社 | 光学素子の製造方法 |
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JPH05178625A (ja) * | 1991-12-27 | 1993-07-20 | Olympus Optical Co Ltd | ガラスレンズの成形方法 |
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JP2803046B2 (ja) * | 1990-12-21 | 1998-09-24 | キヤノン株式会社 | 光学素子の成形方法 |
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JPH05178625A (ja) * | 1991-12-27 | 1993-07-20 | Olympus Optical Co Ltd | ガラスレンズの成形方法 |
JPH05330832A (ja) * | 1992-03-31 | 1993-12-14 | Matsushita Electric Ind Co Ltd | カルコゲナイドガラスレンズの成形方法 |
JP2010285308A (ja) * | 2009-06-10 | 2010-12-24 | Hitachi Maxell Ltd | 光学素子製造装置及び方法 |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
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WO2018017406A1 (en) * | 2016-07-18 | 2018-01-25 | Corning Incorporated | The use of arsenic-free chalcogenide glasses for hot-melt processing |
WO2020071071A1 (ja) * | 2018-10-02 | 2020-04-09 | パナソニック株式会社 | 光学素子およびその製造方法 |
JPWO2020071071A1 (ja) * | 2018-10-02 | 2021-11-18 | パナソニック株式会社 | 光学素子およびその製造方法 |
JP7299910B2 (ja) | 2018-10-02 | 2023-06-28 | パナソニックホールディングス株式会社 | 光学素子およびその製造方法 |
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