WO2015114981A1 - パージ装置及びパージガスを含む気体を拡散させる方法 - Google Patents
パージ装置及びパージガスを含む気体を拡散させる方法 Download PDFInfo
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- WO2015114981A1 WO2015114981A1 PCT/JP2014/083439 JP2014083439W WO2015114981A1 WO 2015114981 A1 WO2015114981 A1 WO 2015114981A1 JP 2014083439 W JP2014083439 W JP 2014083439W WO 2015114981 A1 WO2015114981 A1 WO 2015114981A1
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- purge
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- opening
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B9/00—Cleaning hollow articles by methods or apparatus specially adapted thereto
- B08B9/08—Cleaning containers, e.g. tanks
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B5/00—Cleaning by methods involving the use of air flow or gas flow
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67389—Closed carriers characterised by atmosphere control
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67769—Storage means
Definitions
- the present invention has an internal space defined by a casing, and a purge device for purging the inside of a storage container disposed in the internal space with a purge gas such as an inert gas or clean dry air, and the purge
- a purge gas such as an inert gas or clean dry air
- Patent Document 1 Japanese Patent Laid-Open No. 2001-326162 discloses a technique for ensuring an oxygen concentration in at least a partial region of the internal space by blowing dry air.
- an object of the present invention is to provide a purge device and a method for diffusing a gas containing a purge gas, which can ensure the safety of an operator with a simple configuration.
- a purge device is a purge device that has an internal space defined by a casing and purges the inside of a storage container in which an object to be stored disposed in the internal space is stored with a purge gas.
- the gas containing the purge gas leaking from the opening is diffused by blowing air to the region where the gas containing the purge gas in the internal space leaks from the opening of the housing while being arranged outside the housing.
- a blower is provided.
- air sent by the sending unit refers to a gas having an oxygen (O 2 ) concentration that does not cause the worker to be in an oxygen deficient state.
- a purging device air is blown to the gas containing the purge gas leaking from the opening of the housing, so that the gas containing the purge gas is diffused by the blown air.
- concentration of purge gas falls and it can prevent that an operator becomes an oxygen deficient state.
- the configuration is simpler than the facility for setting the entire interior of the housing to a specified oxygen concentration. . As a result, worker safety can be ensured with a simple configuration.
- the air blowing unit may blow air along the surface of the housing in which the opening is provided.
- the air blowing section is provided so as to surround the peripheral edge of the opening, and air may be blown in a direction substantially orthogonal to the opening surface in the opening.
- the gas containing the purge gas can be diffused from a position closer to the opening, so that the purge gas can be diffused more reliably.
- a method of diffusing a gas containing a purge gas has an internal space defined by a housing, and the inside of a storage container in which an object to be stored disposed in the internal space is stored is purge gas.
- a method of diffusing a gas containing a purge gas leaking from the purge apparatus wherein air is blown from the outside of the housing to an area where the gas containing the purge gas in the internal space leaks from the opening of the housing.
- the air is blown to the gas containing the purge gas leaking from the opening of the housing, so that the gas containing the purge gas is diffused by the blown air.
- concentration of purge gas falls and it can prevent that an operator becomes an oxygen deficient state.
- air is blown to the gas containing the purge gas, it is only necessary to install equipment that can blow air to the gas containing the purge gas blown out from the opening of the housing. It can be set as a simple structure compared with the installation for setting it as oxygen concentration. As a result, worker safety can be ensured with a simple configuration.
- FIG. 1 is a front view showing a purge stocker according to an embodiment.
- 2 is a cross-sectional view of the purge stocker of FIG. 1 as viewed from the line II-II.
- 3 is an enlarged front view and an enlarged sectional view showing the vicinity of the manual port of FIG.
- FIG. 4 is a cross-sectional view illustrating a schematic configuration of the air blowing unit according to the modified example and the further modified example.
- FIG. 5 is a front view and a cross-sectional view illustrating a schematic configuration of a sending unit according to a modification.
- FIG. 6 is a cross-sectional view illustrating a schematic configuration of a blower unit according to a modification.
- a purge stocker (purge device) 1 according to an embodiment will be described.
- the purge stocker 1 purges the inside of a storage container F such as a FOUP (Front Opening Unified Unified Pod) in which a storage object such as a semiconductor wafer or a glass substrate is stored with a purge gas.
- a purge unit 7B and a storage area 1A as an internal space for storing a plurality of storage containers F are provided.
- the purge stocker 1 is provided, for example, in a clean room 100.
- the purge stocker 1 provided in such a clean room 100 includes a partition (housing) 3, a rack 7 and a crane 9. Further, the purge stocker 1 includes an exhaust fan 15 as necessary.
- the partition 3 is a portion that partitions (defines) an area above the floor surface 100A, and a storage area (internal space) 1A is formed inside thereof.
- the rack 7 is a part for storing the storage container F, and a plurality of rows (here, two rows) are provided in the storage area 1A. Each rack 7 extends in a predetermined direction X, and the two rows of racks 7 and 7 are arranged to face each other in the depth direction Y.
- Each rack 7 is formed with a plurality of storage shelves 7A for storing the storage containers F along a predetermined direction X and a vertical direction (vertical and horizontal) Z.
- the storage shelf 7A of the rack 7 is provided with a purge unit 7B for purging the inside of the storage container F to be placed with a purge gas (for example, nitrogen gas).
- the purge unit 7B is a device for supplying and discharging purge gas into the storage container F placed on the storage shelf 7A.
- the purge unit 7B has a gas supply tank (not shown), a plurality of gas supply pipes (not shown), and a plurality of gas discharge pipes (not shown).
- the gas supply tank has, for example, nitrogen (N 2 ) gas inside.
- the plurality of gas supply pipes extend from the gas supply tank to the placement portion of each storage shelf 7A.
- the plurality of gas discharge pipes extend from the placement portion of each storage shelf 7A.
- a flow rate regulator Mass Flow Controller or valve or the like
- an open / close valve not shown
- the crane 9 is a part for putting the storage container F into and out of the storage shelf 7A, and is arranged in a region sandwiched between the opposing racks 7 and 7.
- the crane 9 can move along the extending direction X of the rack 7 by traveling on a traveling rail (not shown) arranged on the floor along the extending direction X of the rack 7.
- the loading platform 9A of the crane 9 is provided so as to be movable up and down along the guide rail 9B, and the storage container F can be taken in and out of the plurality of storage shelves 7A provided in the vertical direction Z.
- the exhaust fan 15 is provided at the bottom of the storage area 1A, and discharges a gas containing a purge gas from the storage area 1A to the outside of the storage area 1A through a discharge port (opening) 15A.
- the storage container F is put into and out of the purge stocker 1 through an OHT (Overhead Hoist Transfer) port (opening) 30 and a manual port (opening) 50.
- the OHT port 30 takes in and out the storage container F delivered from the overhead traveling vehicle 33 traveling on the traveling rail 31 laid on the ceiling 100B on one side surface (front side shown in FIG. 1) of the purge stocker 1.
- the OHT port 30 includes a conveyor 35 that conveys the storage container F between the inside of the purge stocker 1 (storage area 1A) and the outside, an openable shutter 37 that shuts off the inside and outside of the purge stocker 1, Is provided.
- the shutter 37 of the purge stocker 1 When the storage container F is placed on the conveyor 35 by the overhead traveling vehicle 33, the shutter 37 of the purge stocker 1 is opened, and when the storage container F is stored in the purge stocker 1, the shutter 37 is closed. Further, in the storage area 1A of the purge stocker 1, when the storage container F is placed on the conveyor 35 by the crane 9, the shutter 37 is opened, and when the storage container F is discharged to the outside of the purge stocker 1, the shutter 37 is closed. It is done.
- the manual port 50 is a part where the storage container F is delivered between the operator and the purge stocker 1.
- the manual port 50 is provided at a position accessible to the operator on one side surface (front side shown in FIG. 1) of the purge stocker 1.
- the manual port 50 includes a conveyor 55 that conveys the storage container F between the inside of the purge stocker 1 (storage area 1A) and the outside, an openable shutter 57 that shuts off the inside and outside of the purge stocker 1, Is provided.
- the shutter 57 When the storage container F is placed on the conveyor 55 by the operator, the shutter 57 is opened, and when the storage container F is stored in the purge stocker 1, the shutter 57 is closed. Further, inside the purge stocker 1, when the storage container F is placed on the conveyor 55 by the crane 9, the shutter 57 is opened, and when the storage container F is discharged outside the purge stocker 1, the shutter 57 is closed.
- the air is blown to the area where the gas containing the purge gas leaks from the opening of the partition 3 while being arranged outside the space (storage area 1A) partitioned by the partition 3.
- a fan (air blowing part) 59 for diffusing a gas containing purge gas leaking from the opening is provided.
- the fan 59 that diffuses the gas including the purge gas that leaks from the manual port 50 that is one of the openings will be described in detail.
- the fan 59 is disposed outside the space partitioned by the partition 3 and is provided near and above the manual port 50.
- the fan 59 blows air along the surface of the partition 3 in which the manual port 50 is provided, specifically, downward as shown in FIGS. 3 (A) and 3 (B). Since the fan 59 blows air (white arrow) to the gas containing the purge gas leaking from the manual port 50 (solid arrow shown in FIGS. 3A and 3B), the gas containing the purge gas is blown. Diffused by air.
- the structure of the fan as the air blowing section in the purge stocker 1 is not only the structure arranged near and above the manual port 50 described above, but also the fan 59A and the rectifying plate 61 as shown in FIG.
- the structure by a combination may be sufficient.
- the direction of the air blown from the fan 59A can be adjusted by the rectifying plate 61, for example, as shown in FIG. can do.
- Such an arrangement of the fan 59A is effective when there is a restriction in the direction of jumping out from the partition 3.
- the configuration of the fan as the blower in the purge stocker 1 is outside the storage area 1A (that is, outside the shutter 57) and inside the manual port 50. 59B may be arranged. Such an arrangement of the fans 59B is also effective when there is a restriction in the direction of jumping out from the partition 3.
- a fan (blower part) 41 and a fan (blower part) 19 are also provided in the vicinity of the OHT port 30 and the outlet 15 ⁇ / b> A which are openings other than the manual port 50. Is provided.
- the fan 41 is provided on at least one side side of the OHT port 30 (side in the X-axis direction shown in FIG. 1).
- the fan 19 is provided near and above the discharge port 15A. Since the fans 41 and 19 arranged in this way blow air to the gas containing the purge gas leaking from the OHT port 30 and the exhaust port 15A, the gas containing the purge gas is diffused by the blown air.
- the air is blown to the gas containing the purge gas leaked from the manual port 50 by the fan 59, so that the gas containing the purge gas is diffused by the blown air.
- the concentration of the purge gas is lowered, and it is possible to prevent the worker who accesses the manual port 50 from being in an oxygen deficient state.
- the same operation and effect can be obtained by providing the fan 41 and the fan 19, respectively.
- the storage area 1 ⁇ / b> A is configured such that a downflow from an FFU (Fan Filter Unit) disposed on the ceiling 100 ⁇ / b> B of the clean room 100 is effectively captured, or a dedicated FFU for the purge stocker is attached.
- the whole was always ventilated to meet the prescribed oxygen concentration.
- recent purge apparatuses in which the purge gas has a large flow rate are used.
- the apparatus for obtaining the oxygen concentration of the specified value is increased in size and the configuration thereof is complicated.
- the purge stocker 1 of the above embodiment if the operation is such that the inside of the purge stocker 1 does not enter except under a predetermined condition, the gas containing the purge gas blown out from the manual port 50 (OHT port 30 and outlet 15A).
- the configuration is simpler than a facility for setting the entire interior of the partition 3 to a prescribed oxygen concentration. As a result, worker safety can be ensured with a simple configuration.
- the fan 59 blows air along the surface of the partition 3 where the manual port 50 is provided, a gas including a purge gas flows in a direction orthogonal to the surface of the partition 3 where it is assumed that an operator is present. Can be suppressed. Thereby, a worker's safety can be ensured more reliably. Since the fan 41 and the fan 19 also blow air along the surface of the partition 3 in which the manual port 50 is provided, the same effect can be obtained.
- fans 41, 59 (59A, 59B), 19 are provided in the vicinity of the OHT port 30, the manual port 50, and the discharge port 15A serving as openings
- the present invention is not limited to this.
- the fan (air blowing unit) 159 has a peripheral portion 30A of the OHT port 30 (the manual port 50 and the discharge port 15A are also possible) serving as an opening.
- the gas containing the purge gas can be diffused from a position closer to the OHT port (opening) 30, so that the purge gas can be diffused more reliably.
- the purge gas leaking from each of the OHT port 30, the manual port 50, and the discharge port 15A can be obtained by arranging a plurality of nozzles 259 that blow out clean air (for example, air having a predetermined oxygen concentration) as a blower.
- the gas to be contained may be diffused.
- a clean air source 262 storing clean air may be provided, and the clean air may be blown through the duct 260.
- an MFC (Mass Flow Controller) 261 may be provided so that the flow rate of clean air blown from the nozzle 259 can be controlled. Moreover, you may arrange
- the purge stocker 1 may have both an opening provided with a fan as a blower and an opening provided with a nozzle as a blower.
- the manual port 50 may be a purge stocker 1 provided with a nozzle as a blower, and the OHT port 30 and the discharge port 15A with a fan as a blower.
- the purge stocker 1 has been described as an example of the purge device, but the present invention is not limited to this.
- the present invention can be applied to an apparatus (such as a load port having a purge function) having an opening through which a gas containing a purge gas leaks from a space defined by a partition or the like.
- the example of using the purge stocker (purge device) 1 of the above embodiment has been described as a method for diffusing the gas containing the purge gas leaking from the purge device, but the present invention is not limited to this.
- an air blowing unit different from the purge stocker 1 may be arranged for the purge stocker 1 having an opening through which the gas containing the purge gas leaks, and the gas containing the purge gas leaking from the opening may be diffused.
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Abstract
Description
上記実施形態のパージストッカ1では、OHTポート30,マニュアルポート50及び排出口15Aのそれぞれに、ファン41,59,19がそれぞれ設けられている例を挙げて説明したが、本発明はこれに限定されない。少なくとも作業者のアクセスの可能性のあるOHTポート30,マニュアルポート50及び排出口15Aに対してファン(送風部)が設けられる構成であればよい。
また、上記実施形態及び上記変形例のパージストッカ1では、開口部となるOHTポート30,マニュアルポート50及び排出口15Aのそれぞれの近傍にファン41,59(59A,59B),19が設けられ、パーティション3の面方向に空気が送風される例を挙げて説明したが、本発明はこれに限定されない。例えば、図5(A)及び図5(B)に示されるように、ファン(送風部)159は、開口部となるOHTポート30(マニュアルポート50及び排出口15Aも可能)の周縁部30Aを囲むように設けられ、少なくともOHTポート30(マニュアルポート50及び排出口15A)における開口面と略直交する方向に空気を送風(図5(B)における白抜矢印)する構成としてもよい。また、開口面と略直交する方向に空気を送風するだけでなく、開口面に沿う方向に空気を送風する(図5(B)における点線白抜矢印)構成としてもよい。このような構成のパージストッカ1では、よりOHTポート(開口部)30に近い位置からパージガスを含む気体を拡散させることができるので、より確実にパージガスを拡散させることができる。
また、上記実施形態及び上記変形例のパージストッカ1では、送風部としてファン41,59(59A,59B),19を設ける例を挙げて説明したが、本発明はこれに限定されない。例えば、清浄空気(例えば、所定の酸素濃度を有する空気)を噴出する、複数のノズル259を送風部として配置することにより、OHTポート30,マニュアルポート50及び排出口15Aのそれぞれから漏れ出すパージガスを含む気体を拡散させてもよい。この場合には、例えば、図6に示すように、清浄空気が格納された清浄空気源262を備え、ダクト260を介して清浄空気を送風するようにしてもよい。また、MFC(Mass Flow Controller)261を設け、ノズル259から送風する清浄空気の流量を制御可能な構成としてもよい。また、複数のノズルの代わりに複数のスリット又は孔部からなる噴出口を送付部として配置してもよい。
パージストッカ1は、送風部としてのファンが設けられる開口部と、送風部としてのノズルが設けられる開口部との両方が配置されてもよい。例えば、マニュアルポート50には送風部としてのノズルが設けられ、OHTポート30及び排出口15Aには送風部としてのファンが設けられたパージストッカ1であってもよい。
Claims (4)
- 筐体により画成された内部空間を有し、前記内部空間に配置された被格納物が格納された格納容器の内部をパージガスでパージ処理するパージ装置であって、
前記筐体の外部に配置されると共に、前記筐体の開口部から前記内部空間の前記パージガスを含む気体が漏れ出す領域に空気を送風することにより、前記開口部から漏れ出す前記パージガスを含む気体を拡散させる送風部を備えている、パージ装置。 - 前記送風部は、前記開口部が設けられる前記筐体の面に沿って空気を送風する、請求項1に記載のパージ装置。
- 前記送風部は、前記開口部の周縁部を囲むように設けられており、少なくとも前記開口部における開口面と略直交する方向に前記空気を送風する、請求項1又は2に記載のパージ装置。
- 筐体により画成された内部空間を有し、前記内部空間に配置された被格納物が格納された格納容器の内部をパージガスでパージ処理するパージ装置において、前記パージ装置から漏れ出す前記パージガスを含む気体を拡散させる方法であって、
前記筐体の開口部から前記内部空間の前記パージガスを含む気体が漏れ出す領域に前記筐体の外部から空気を送風することにより、前記開口部から漏れ出す前記パージガスを含む気体を拡散させる方法。
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JP2015559778A JP6168165B2 (ja) | 2014-01-29 | 2014-12-17 | パージ装置及びパージガスを含む気体を拡散させる方法 |
US15/100,758 US10239101B2 (en) | 2014-01-29 | 2014-12-17 | Purge device and method of diffusing gas including purge gas |
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JP2014014614 | 2014-01-29 | ||
JP2014-014614 | 2014-01-29 |
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WO2019093244A1 (ja) * | 2017-11-07 | 2019-05-16 | 東京エレクトロン株式会社 | 基板処理装置 |
WO2023228660A1 (ja) * | 2022-05-23 | 2023-11-30 | 村田機械株式会社 | 容器保管装置 |
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JP6623988B2 (ja) * | 2016-09-09 | 2019-12-25 | 株式会社ダイフク | 容器収納設備 |
TWI706525B (zh) * | 2019-08-22 | 2020-10-01 | 南韓商責市特馬股份有限公司 | 裝載埠模組的前開式晶圓傳送盒的降低濕度裝置及具備其的半導體製程裝置 |
CN113731953A (zh) * | 2021-09-15 | 2021-12-03 | 安徽信息工程学院 | 一种具有除尘功能的电气柜 |
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JP2006013210A (ja) * | 2004-06-28 | 2006-01-12 | Canon Inc | 露光装置 |
JP2013140893A (ja) * | 2012-01-05 | 2013-07-18 | Daifuku Co Ltd | 保管棚用の不活性ガス注入装置 |
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WO2019093244A1 (ja) * | 2017-11-07 | 2019-05-16 | 東京エレクトロン株式会社 | 基板処理装置 |
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US20160296984A1 (en) | 2016-10-13 |
TWI627692B (zh) | 2018-06-21 |
JP6168165B2 (ja) | 2017-07-26 |
US10239101B2 (en) | 2019-03-26 |
TW201537658A (zh) | 2015-10-01 |
JPWO2015114981A1 (ja) | 2017-03-23 |
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