WO2015107655A1 - 光学測定装置 - Google Patents

光学測定装置 Download PDF

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Publication number
WO2015107655A1
WO2015107655A1 PCT/JP2014/050692 JP2014050692W WO2015107655A1 WO 2015107655 A1 WO2015107655 A1 WO 2015107655A1 JP 2014050692 W JP2014050692 W JP 2014050692W WO 2015107655 A1 WO2015107655 A1 WO 2015107655A1
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WO
WIPO (PCT)
Prior art keywords
light
light emitting
emitting element
optical
measurement
Prior art date
Application number
PCT/JP2014/050692
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English (en)
French (fr)
Japanese (ja)
Inventor
望月　学
昭一 藤森
Original Assignee
パイオニア株式会社
株式会社パイオニアＦａ
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Application filed by パイオニア株式会社, 株式会社パイオニアＦａ filed Critical パイオニア株式会社
Priority to JP2015557637A priority Critical patent/JP6277206B2/ja
Priority to PCT/JP2014/050692 priority patent/WO2015107655A1/ja
Priority to TW104101581A priority patent/TWI608222B/zh
Publication of WO2015107655A1 publication Critical patent/WO2015107655A1/ja

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/02—Details
    • G01J1/0242—Control or determination of height or angle information of sensors or receivers; Goniophotometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0254—Spectrometers, other than colorimeters, making use of an integrating sphere
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0289—Field-of-view determination; Aiming or pointing of a spectrometer; Adjusting alignment; Encoding angular position; Size of measurement area; Position tracking
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/46—Measurement of colour; Colour measuring devices, e.g. colorimeters
    • G01J3/50—Measurement of colour; Colour measuring devices, e.g. colorimeters using electric radiation detectors
    • G01J3/505—Measurement of colour; Colour measuring devices, e.g. colorimeters using electric radiation detectors measuring the colour produced by lighting fixtures other than screens, monitors, displays or CRTs
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/42—Photometry, e.g. photographic exposure meter using electric radiation detectors
    • G01J2001/4247—Photometry, e.g. photographic exposure meter using electric radiation detectors for testing lamps or other light sources
    • G01J2001/4252—Photometry, e.g. photographic exposure meter using electric radiation detectors for testing lamps or other light sources for testing LED's

Definitions

  • the present invention relates to an optical measuring device.
  • Patent Document 1 discloses an inspection apparatus that performs an optical inspection of a plurality of LEDs (Light Emitting Diodes).
  • an object of the present invention is to solve the above-described problems. That is, an example of the subject of the present invention is to provide an optical measuring device capable of measuring the optical characteristics of a light emitting element with a simple configuration with high accuracy.
  • An optical measurement apparatus includes a light receiving element that detects light emitted from one light emitting element arranged adjacent to another light emitting element, and the light receiving element includes the one light emitting element.
  • the light emitted from the one light emitting element is detected by supplying power to the light, the light emitted from the other light emitting element is emitted by the light emitted from the one light emitting element, and the one light emitting element emits light.
  • the light reflected by the other light emitting element is not detected.
  • FIG. 1 shows a light emission state of a light emitting element measured by an optical measuring device.
  • FIG. 2 schematically shows the configuration of the optical measurement apparatus.
  • FIG. 3A shows an enlarged view of an optical fiber and a light emitting element included in the optical measuring device.
  • FIG. 3B shows a view of the light emitting device shown in FIG. 3A viewed from the direction of the light emission central axis.
  • FIG. 4 is a diagram for explaining Example 1 of the adjusting unit of the optical measuring device.
  • FIG. 5 is a diagram for explaining another example 2 of the adjusting unit of the optical measuring device.
  • FIG. 6 is a diagram for explaining measurement conditions when measuring the optical characteristics of the light-emitting element with an optical measurement device.
  • FIG. 7A is a measurement result relating to the chromaticity of the light emitting element shown in FIG. 6, and shows chromaticity coordinates x in the CIE-XYZ color system.
  • FIG. 7B is a measurement result regarding the chromaticity of the light emitting element shown in FIG. 6, and shows chromaticity coordinates y in the CIE-XYZ color system.
  • FIG. 8 shows a measurement result regarding the amount of light of the light emitting element shown in FIG.
  • FIG. 9A is a diagram for explaining an optical measurement apparatus that simultaneously measures the optical characteristics of a plurality of light emitting elements arranged with a plurality of light emitting elements.
  • FIG. 9B shows a view of the light emitting element shown in FIG. 9A viewed from the direction of the light emission central axis.
  • FIG. 10A is a diagram for explaining a first modification of the optical measuring device.
  • FIG. 10B shows a view of the light emitting element and the bundle fiber shown in FIG. 10A viewed from the direction of the light emission central axis.
  • FIG. 10C shows a view for explaining another cross-sectional shape of the bundle fiber shown in FIGS. 10A and 10B.
  • FIG. 11 is a diagram for explaining a second modification of the optical measuring device.
  • FIG. 12A is a diagram for explaining a third modification of the optical measuring device.
  • FIG. 12B is a view for explaining light refraction in the lens shown in FIG. 12A.
  • FIG. 13A is a diagram for explaining a fourth modification of the optical measuring device.
  • FIG. 13B shows a view of the light emitting element and the bundle fiber shown in FIG. 13A viewed from the direction of the light emission central axis.
  • FIG. 14A is a diagram for explaining a fifth modification of the optical measuring device.
  • FIG. 14B is a diagram for explaining another example 1 in the fifth modification of the optical measuring device.
  • FIG. 14C shows a diagram for explaining another example 2 of the modification 5 of the optical measuring device.
  • FIG. 15A is a diagram for explaining a sixth modification of the optical measuring device.
  • FIG. 15B shows a view of the light receiving element of the photodetector shown in FIG. 15A viewed from the direction of the light emission central axis.
  • FIG. 15B shows a view of the light receiving element of the photodetector shown in FIG. 15A viewed from the direction of the light emission central axis.
  • FIG. 16 is a diagram for explaining a modified example 7 of the optical measuring device.
  • FIG. 17 is a diagram for explaining a modification 8 of the optical measuring device.
  • FIG. 18 is a diagram for explaining a modification 9 of the optical measuring device.
  • FIG. 19A is a diagram for explaining a modified example 10 of the optical measuring device.
  • FIG. 19B shows the shielding plate and the light emitting element shown in FIG. 19A viewed from the direction of the light emission central axis.
  • FIG. 20 is a diagram for explaining another example of the modification 10 of the optical measuring device.
  • FIG. 21 is a diagram for explaining a modification 11 of the optical measuring device 3.
  • FIG. 22 is a flowchart for explaining processing performed by the control unit 151 shown in FIG. 21 when measuring optical characteristics.
  • FIG. 23 is a diagram for explaining another example of the modification 11 of the optical measuring device 3.
  • FIG. 1 shows a light emission state of the light emitting element 101 measured by the optical measuring device 3.
  • the light-emitting element 101 includes at least an electrode and a light-emitting portion, and emits light in a specific wavelength region when power is supplied.
  • the light emitting element 101 is, for example, a light emitting diode. As shown in FIG. 1A, the light emitting element 101 emits light radially from the light emitting surface 101a.
  • the light emitting surface 101 a is located on the surface of the light emitting element 101.
  • the normal line of the light emitting surface 101a of the light emitting element 101 is referred to as a light emission central axis LCA.
  • the light emitting surface 101a is the surface of the light emitting element 101 on the positive direction side of the light emission central axis LCA in FIG.
  • a counterclockwise angle from the x axis on the plane is defined as ⁇ .
  • ⁇ an angle formed with the light emission center axis LCA when ⁇ is fixed.
  • the intensity of light emitted from the light emitting element 101 and emitted from the light emitting surface 101a varies depending on the angle ⁇ from the light emission center axis LCA and the like.
  • the amount of light is calculated for the back side of the light emitting element 101 by integrating all the intensities of light within the range of ⁇ values of 0 ° to 90 ° for ⁇ values of 0 ° to 360 °. It is the added value. Knowing this amount of light makes it possible to inspect whether or not the light emitting element 101 is suitable for various uses.
  • the intensity of light emitted from the light emitting element 101 has different values for each of ⁇ and ⁇ .
  • a diagram as shown in FIG. 1B is used.
  • FIG. 1C is a cross-sectional view at a position where the value of ⁇ is constant.
  • the light intensity at the same distance from the light emitting element 101 and at the position of the angle ⁇ from the light emission central axis LCA is defined as the light distribution intensity E ( ⁇ ).
  • This light distribution intensity E ( ⁇ ) corresponding to each ⁇ is illustrated as a light distribution intensity distribution.
  • the amount of light on the back side of the light emitting element 101 can be obtained by multiplying K ( ⁇ ) by a constant coefficient ⁇ . Then, the light amount of the light emitting element 101 can be obtained by adding the light amount K ( ⁇ ) on the front surface side and the light amount K ( ⁇ ) ⁇ ⁇ on the back surface side. Note that it is known that the difference between the light amount on the front surface side and the light amount on the back surface side of the light emitting element 101 is substantially constant in the light emitting element 101 manufactured in the same process. For this reason, if the coefficient ⁇ is obtained by actually measuring the light amount of one light emitting element 101, the same value can be applied to the other light emitting elements 101.
  • the light emitting element 101 can be considered as a point by measuring at a position sufficiently far from the light emitting element 101. Since the light emitting element 101 is extremely small as compared with the normal photodetector 105 or the like (see FIG. 2), it can be assumed in this way. The same applies to the description after FIG. 2 unless otherwise specified.
  • FIG. 2 schematically shows the configuration of the optical measuring device 3.
  • the optical measuring device 3 is a device that measures the optical characteristics of the light emitted from the light emitting element 101.
  • the optical characteristics measured by the optical measuring device 3 include at least the light amount, wavelength, and chromaticity of the light emitted from the light emitting element 101.
  • the optical measuring device 3 can be applied to an inspection device used in an inspection process included in the manufacturing process of the light emitting element 101.
  • the optical measuring device 3 can measure electrical characteristics in addition to the optical characteristics of the light emitting element 101.
  • the optical measurement device 3 includes a table 103, a probe needle 109, an optical fiber 117, a signal line 111, a photodetector 105, an amplifier 113, a spectroscope 121, an electrical characteristic measurement unit 125, a control unit 151, And at least an output unit 163.
  • the table 103 is a measurement sample stage on which the light emitting element 101 to be measured is placed.
  • the table 103 has a substantially uniform flat plate shape and is installed substantially horizontally.
  • the table 103 and the light emitting element 101 mounted thereon are substantially parallel to each other.
  • the table 103 includes at least a glass table 103a and a dicing sheet 103b.
  • the glass table 103a is formed in a substantially uniform flat plate shape using a light transmitting material such as sapphire or glass.
  • the dicing sheet 103b has adhesiveness on the surface and is laminated on the glass table 103a.
  • the light emitting element 101 is placed on the dicing sheet 103b.
  • the table 103 having the dicing sheet 103b can easily transfer the light emitting element 101 to the table 103 at the time of measurement, and can suppress displacement.
  • the light emitting element 101 when a plurality of the light emitting elements 101 are arranged in advance on the dicing sheet 103b, the light emitting element 101 and the dicing sheet 103b may be collectively placed on the glass table 103a. Good.
  • the probe needle 109 supplies power to the light emitting element 101 to cause the light emitting element 101 to emit light.
  • the probe needles 109 extend radially in a direction perpendicular to the normal line of the light emitting element 101 substantially parallel to the light emitting surface 101 a of the light emitting element 101.
  • the probe needle 109 in FIG. 2 applies a voltage in contact with the electrode of the light emitting element 101 when measuring the optical characteristics of the light emitting element 101.
  • the probe needle 109 is connected to the electrical characteristic measuring unit 125, and the electrical characteristics of the light emitting element 101 can be measured simultaneously.
  • the probe needle 109 is disposed on the upper surface, the lower surface, or both surfaces of the light emitting element 101 according to the position of the electrode of the light emitting element 101.
  • the probe needle 109 When the probe needle 109 is brought into contact with the light emitting element 101, the probe needle 109 may be moved while the table 103 and the light emitting element 101 are fixed. Conversely, the table 103 and the light emitting element 101 may be moved while the probe needle 109 is fixed.
  • the optical fiber 117 takes in the light emitted from the light emitting element 101 and guides it to the photodetector 105 and the spectroscope 121.
  • the optical fiber 117 takes in light with a predetermined numerical aperture.
  • the optical fiber 117 includes a head 117a, an optical transmission path 117b, and an incident port 117c.
  • the head 117a is a part that captures light.
  • the head 117a is formed in a cylindrical shape.
  • An incident port 117c which is an opening for allowing light to enter, is provided at the tip of the head 117a.
  • the head 117 a is disposed so that the incident port 117 c faces the light emitting surface 101 a of the light emitting element 101.
  • the central axis of the incident port 117c substantially coincides with the light emission central axis LCA of the light emitting element 101 to be measured.
  • the central axis of the head 117a substantially coincides with the central axis of the incident port 117c.
  • the incident port 117c allows light in a range corresponding to a predetermined numerical aperture of the optical fiber 117 to enter.
  • the optical transmission path 117b optically connects the end of the head 117a provided with the incident port 117c on the side opposite to the tip, and the photodetector 105 and the spectroscope 121.
  • the optical transmission path 117 b guides the light incident from the incident port 117 c to the photodetector 105 and the spectroscope 121.
  • the light transmission path 117b totally reflects the light incident from the incident port 117c and guides the light to the photodetector 105 and the spectroscope 121 while suppressing transmission loss as much as possible.
  • the photodetector 105 detects the light emitted from the light emitting element 101 by the light receiving element 105a via the optical fiber 117, and measures the optical characteristics thereof.
  • the optical characteristics measured by the photodetector 105 include at least the amount of light emitted from the light emitting element 101.
  • the light receiving element 105a When light is incident, the light receiving element 105a generates a charge corresponding to the incident light by photoelectric conversion.
  • the light receiving element 105a may be, for example, a photodiode.
  • the photodetector 105 integrates all the light intensities of the incident light incident on the light receiving element 105a to obtain the amount of incident light.
  • the photodetector 105 generates an electrical signal according to the obtained light amount.
  • the photodetector 105 outputs the generated electric signal to the amplifier 113 via the signal line 111. This electric signal corresponds to the light amount information measured by the photodetector 105.
  • the amplifier 113 amplifies the electrical signal output from the photodetector 105 and outputs the amplified signal to the control unit 151.
  • the spectroscope 121 detects the light emitted from the light emitting element 101 by the light receiving element 121a via the optical fiber 117, and measures the optical characteristics thereof.
  • the optical characteristics measured by the spectroscope 121 include at least the light amount, wavelength, and chromaticity of the light emitted from the light emitting element 101.
  • the light receiving element 121a When light is incident, the light receiving element 121a generates a charge corresponding to the incident light by photoelectric conversion.
  • the light receiving element 121a may be, for example, a CCD (Charge Coupled Device), a photodiode array, or the like.
  • the spectroscope 121 wavelength-disperses incident light incident on the light receiving element 121a, and obtains the light intensity for each dispersed wavelength.
  • the light intensity for each wavelength corresponds to the wavelength spectrum information of the incident light.
  • the spectroscope 121 calculates component ratios of tristimulus values of red (R), green (G), and blue (B) from the wavelength spectrum information, and obtains the chromaticity of incident light.
  • the spectroscope 121 integrates the light intensity for each dispersed wavelength to obtain the amount of incident light.
  • the spectroscope 121 can obtain other optical characteristics as necessary.
  • the spectroscope 121 generates an electrical signal corresponding to the obtained various optical characteristics.
  • the spectroscope 121 outputs the generated electrical signal to the control unit 151 via the signal line 111. This electrical signal corresponds to wavelength spectrum information, chromaticity information, light amount information, and the like measured by the spectroscope 121.
  • the electrical property measurement unit 125 includes at least a positioning unit 159, an HV unit 153, an ESD unit 155, and a switching unit 157.
  • the positioning unit 159 positions and fixes the probe needle 109. Specifically, the positioning unit 159 has a function of holding the tip position of the probe needle 109 at a fixed position as long as the table 103 moves. Conversely, if the positioning unit 159 is of a type in which the probe needle 109 moves, the position of the tip of the probe needle 109 is moved to a predetermined position on the table 103 on which the light emitting element 101 is placed, and then the position It has the function to hold.
  • the HV unit 153 applies a rated voltage and detects various electrical characteristics of the light emitting element 101 with respect to the rated voltage.
  • the photodetector 105 and the spectroscope 121 measure the light emitted from the light emitting element 101 in a state where the voltage from the HV unit 153 is applied.
  • Various characteristic information detected by the HV unit 153 is output to the control unit 151.
  • the ESD unit 155 is a unit for inspecting whether or not electrostatic discharge is caused by applying a large voltage to the light emitting element 101 for an instant to cause electrostatic discharge.
  • the electrostatic breakdown information detected by the ESD unit 155 is output to the control unit 151.
  • the switching unit 157 switches between the HV unit 153 and the ESD unit 155.
  • the voltage applied to the light emitting element 101 via the probe needle 109 is changed by the switching unit 157. And by this change, the inspection item of the light emitting element 101 is changed to detect various characteristics at the rated voltage or to detect the presence or absence of electrostatic breakdown.
  • the control unit 151 comprehensively controls the operation of the optical measurement device 3.
  • the control unit 151 receives light amount information measured by the photodetector 105.
  • the control unit 151 receives wavelength spectrum information, chromaticity information, and light amount information measured by the spectroscope 121.
  • the control unit 151 receives various electrical characteristic information output by the HV unit 153.
  • the control unit 151 receives the electrostatic breakdown information detected by the ESD unit 155.
  • the control unit 151 separates and analyzes various characteristics of the light emitting element 101 from these inputs. After analyzing the various characteristics, the control unit 151 outputs the analysis result from the output unit 163 such as image output. Furthermore, the control part 151 controls each component of the optical measuring device 3 as needed based on the analysis result.
  • FIG. 3A shows an enlarged view of the optical fiber 117 and the light emitting element 101 included in the optical measuring device 3.
  • FIG. 3B shows a view of the light emitting element 101 shown in FIG. 3A viewed from the direction of the light emission central axis LCA.
  • the light emitting element 101 is an element that emits light in a specific wavelength region when power is supplied. Light in a specific wavelength region exhibits a specific color.
  • the light emitting element 101 of the present embodiment generates light exhibiting a specific color, converts the wavelength of the generated light into light exhibiting another color, and then emits the light to the outside. That is, the light emitting element 101 of the present embodiment emits light having a color different from the color of the generated light.
  • the light emitting element 101 may be, for example, a pseudo white light emitting diode in which a blue light emitting diode is covered with a yellow phosphor.
  • the light emitting element 101 of the present embodiment includes at least a generation unit 101b and a wavelength conversion unit 101c.
  • the generator 101b generates light in a specific wavelength region when power is supplied.
  • the generation unit 101b emits the generated light.
  • the generation unit 101b may be a member using an electroluminescence phenomenon.
  • the generation unit 101b may be a light emitting diode, for example.
  • the generation unit 101b may be a blue light emitting diode, for example.
  • the wavelength converter 101c converts the wavelength of the incident light.
  • the wavelength conversion unit 101c emits the wavelength-converted light to the outside.
  • the wavelength conversion unit 101c may be a member using a photoluminescence phenomenon.
  • the wavelength conversion unit 101c may be a phosphor, for example.
  • the wavelength conversion unit 101c may be a yellow phosphor, for example.
  • the wavelength conversion unit 101c is provided so as to cover the surface of the generation unit 101b. At this time, the light emitted from the generation unit 101b is incident on the wavelength conversion unit 101c.
  • the wavelength converter 101c converts the wavelength of the incident light and emits it to the outside.
  • the color of the light emitted from the wavelength conversion unit 101c to the outside is different from the color of the light emitted from the generation unit 101b.
  • the blue light emitted from the generation unit 101b is incident on the wavelength conversion unit 101c.
  • the wavelength converting unit 101c absorbs a part of the incident blue light and enters an excited state to emit yellow light when transitioning to the ground state. Then, the wavelength conversion unit 101c emits white light, which is a mixture of the yellow light and the blue light that has not been absorbed, to the outside. That is, the light emitted from the light emitting element 101 is white light emitted from the wavelength conversion unit 101c.
  • a plurality of light emitting elements 101 are arranged in a grid pattern.
  • the light emitting element 101 is manufactured by dicing the semiconductor wear stuck on the dicing sheet and dividing it into a plurality of chips.
  • a plurality of light emitting elements 101 after dicing are arranged in a grid pattern on a dicing sheet.
  • the optical measuring device 3 measures the optical characteristics and the electrical characteristics of the light emitting elements 101 in a plurality of arrayed states, and inspects whether or not they have a desired performance. At the time of inspection, the light emitting elements 101 are transferred in a state where a plurality of light emitting elements 101 are arranged on the table 103 of the optical measuring device 3.
  • the optical measuring device 3 sequentially supplies power to each of the light emitting elements 101 in a plurality of arrayed states, and measures optical characteristics and electrical characteristics.
  • power is supplied to the light emitting element 101 to be measured, most of the light emitted from the light emitting element 101 can enter the optical fiber 117.
  • part of the light emitted from the light emitting element 101 to be measured can be incident on the light emitting element 101 other than the measurement target.
  • part of the light incident on the light emitting element 101 other than the measurement target is absorbed by the wavelength conversion unit 101c of the light emitting element 101 other than the measurement target, and causes the light emitting element 101 other than the measurement target to emit light. Further, part of the light incident on the light emitting element 101 other than the measurement target is reflected by the light emitting element 101 other than the measurement target and is emitted from the light emitting element 101 other than the measurement target.
  • the light emitted from the light emitting element 101 other than the measurement target and the light reflected by the light emitting element 101 other than the measurement target are “light emitting elements 101 other than the measurement target due to light emission of the light emitting element 101 as the measurement target”. "Emitted light”.
  • Light emitted from the light emitting elements 101 other than the measurement target due to light emission of the light emitting elements 101 to be measured is light that is not intended by the measurer.
  • “light emitted from the light emitting element 101 other than the measurement target due to light emission of the light emitting element 101 as the measurement target” is also referred to as “unintended light emitted from the light emitting element 101 other than the measurement target”.
  • the light emitted from the light emitting elements 101 other than the measurement target due to the incidence of the light emitted from the light emitting element 101 to be measured, and the light emitted from the light emitting element 101 as the measurement target are measured.
  • the light reflected by the other light emitting elements 101 is also referred to as “unintended light emitted by the light emitting elements 101 other than the measurement target”.
  • “Unintentional light emitted from the light emitting element 101 other than the measurement target” may be incident on the optical fiber 117 disposed to face the light emitting element 101 as the measurement target.
  • “unintended light emitted from the light emitting element 101 other than the measurement target” enters the optical fiber 117, it is difficult to measure the optical characteristics of the light emitting element 101 as the measurement target with high accuracy.
  • the light emitting element 101 is a pseudo white light emitting diode
  • it is difficult to accurately measure the chromaticity which is a problem. That is, the white light emitted from the light emitting element 101 to be measured is incident on the wavelength conversion unit 101c that is a yellow phosphor of the light emitting element 101 other than the measurement target. Then, the light emitting elements 101 other than the measurement target emit yellow light. This yellow light enters the optical fiber 117 arranged for measuring the chromaticity of the light emitting element 101 to be measured.
  • the yellow light When yellow light emitted from the light emitting element 101 other than the measurement target enters the optical fiber 117, the yellow light is guided to the photodetector 105 and the spectroscope 121, and is detected by the light receiving element 105a and the light receiving element 121a.
  • the yellow component ratio is increased.
  • An increase in the yellow component ratio means that the chromaticity of the light emitting element 101 to be measured cannot be measured with high accuracy. Therefore, there is a demand for a technique capable of measuring the optical characteristics of the light-emitting element 101 to be measured with high accuracy in the plurality of light-emitting elements 101 arranged.
  • the optical measurement device 3 detects light emitted from the light emitting element 101 to be measured among a plurality of light emitting elements 101 and does not detect unintended light emitted from the light emitting elements 101 other than the measurement target. It has a configuration. 3A and 3B, the light emitting element 101 arranged at the center is set as a measurement target. The light emitting elements 101 arranged around the 101 are light emitting elements 101 other than the measurement target.
  • the optical measuring device 3 makes the incident port 117c of the optical fiber 117 and the light emitting element 101 to be measured face each other.
  • the optical measuring device 3 makes the light emission center axis LCA of the light emitting element 101 to be measured substantially coincide with the center axis of the incident port 117c, and opposes both.
  • the distance between the light emitting element 101 to be measured and the optical fiber 117 is L.
  • A be the distance from the center of the light emitting element 101 to be measured to the outer edge.
  • B be the interval between adjacent light emitting elements 101.
  • X be the distance from the center of the light emitting element 101 to be measured to the outer edge of the light emitting element 101 adjacent to the light emitting element 101 to be measured.
  • the numerical aperture of the optical fiber 117 and NA the range indicated by the numerical aperture NA and S 0.
  • D the distance from the center of the light emitting element 101 to the outer edge of the range S 0 when the range S 0 is projected onto the light emitting element 101.
  • NA sin ⁇
  • D Ltan ⁇ .
  • the light emitting element 101 When the light emitting element 101 is in the range S 0 indicated by the numerical aperture NA, the light emitted from the light emitting element 101 can be totally reflected in the optical fiber 117 and guided to the photodetector 105 and the spectroscope 121. If there is no light emitting element 101 in the range S 0 , the light emitting element 101 emits light, and the light is not guided to the photodetector 105 and the spectroscope 121. Therefore, the range S 0 indicated by the numerical aperture NA corresponds to the range of light that can be detected by the light receiving element 105 a included in the photodetector 105 and the light receiving element 121 a included in the spectroscope 121.
  • the range of light detected by the light receiving element 105a and the light receiving element 121a is also referred to as a “detection range”.
  • the detection range of the light receiving element 105a and the light receiving element 121a corresponds to a range of light in which the optical measuring device 3 can measure the optical characteristics.
  • the optical measuring device 3 detects the light emitted from the light emitting element 101 to be measured and does not detect unintentional light emitted from the light emitting elements 101 other than the measurement target, so that the detection range of the light receiving element 105a and the light receiving element 121a is set. Adjust.
  • the detection ranges of the light receiving element 105a and the light receiving element 121a are adjusted by adjusting the distance L between the light emitting element 101 to be measured and the optical fiber 117, for example.
  • the optical measuring device 3 adjusts the distance L as follows in order to detect light emitted from the light emitting element 101 to be measured and not to detect unintended light emitted from the light emitting elements 101 other than the measurement target. That is, the optical measuring apparatus 3 adjusts the distance L so that the light emitting element 101 to be measured is located in the range S 0 and the light emitting elements 101 other than the measurement object are not located in the range S 0 .
  • the distance D may be any distance A above.
  • the distance L when the distance D ⁇ the distance A is L ⁇ A / tan ⁇ .
  • the optical measuring device 3 may adjust the distance L so as to satisfy the relationship L ⁇ A / tan ⁇ , since the light emitting element 101 to be measured is located in the range S 0 . If this relationship is satisfied, the light emitted from the light emitting element 101 to be measured is guided to and detected by the light receiving element 105a and the light receiving element 121a.
  • the distance D may be equal to or less than the distance X.
  • the distance L when the distance D ⁇ the distance X is L ⁇ X / tan ⁇ .
  • the optical measuring device 3 may adjust the distance L so as to satisfy the relationship L ⁇ X / tan ⁇ , since the light emitting elements 101 other than the measurement target are not located within the range S 0 . If this relationship is satisfied, unintended light emitted from the light emitting elements 101 other than the measurement target is not guided to the light receiving elements 105a and 121a and is not detected.
  • the optical measuring apparatus 3 uses the relationship of the following equation for the distance L because the light emitting element 101 to be measured is located in the range S 0 and the light emitting elements 101 other than the measurement object are not located in the range S 0 . Adjust to meet. A / tan ⁇ ⁇ L ⁇ X / tan ⁇ As a result, the optical measurement device 3 does not detect unintended light emitted from the light emitting elements 101 other than the measurement target in a state where the plurality of light emitting elements 101 are arranged, and the light emitted from the measurement light emitting element 101 emits light. Can be detected.
  • the optical measurement device 3 adjusts the distance L so as to satisfy the relationship of the following equation. a / tan ⁇ ⁇ L ⁇ X / tan ⁇ In any case, the optical measurement device 3 may adjust the distance L so as to satisfy at least the relationship of L ⁇ X / tan ⁇ .
  • FIG. 4 is a diagram for explaining an example 1 of the adjusting unit of the optical measuring device 3.
  • FIG. 5 is a diagram for explaining another example 2 of the adjusting unit of the optical measuring device 3.
  • the adjustment unit is means for adjusting a detection range that is a range of light detected by the light receiving element 105a and the light receiving element 121a.
  • the optical measuring device 3 includes, for example, an adjustment mechanism for the distance L as an adjustment unit for adjusting the detection ranges of the light receiving element 105a and the light receiving element 121a.
  • the adjustment mechanism of the distance L can be configured by an actuator (not shown) attached to the optical fiber 117, for example.
  • the adjustment mechanism for the distance L moves the optical fiber 117 along the emission center axis LCA, as shown in FIG.
  • the adjustment mechanism for the distance L may move the table 103 on which the light emitting element 101 is placed instead of moving the optical fiber 117, or move both the table 103 and the optical fiber 117. Also good.
  • the detection ranges of the light receiving element 105a and the light receiving element 121a can be adjusted by a method other than adjusting the distance L between the light emitting element 101 to be measured and the optical fiber 117.
  • the optical measuring device 3 can adjust the detection ranges of the light receiving element 105a and the light receiving element 121a by blocking part of the light emitted from the light emitting element 101 to be measured and limiting the light incident on the optical fiber 117. it can.
  • the optical measurement device 3 may include, for example, a diaphragm 201 as an adjustment unit for adjusting the detection ranges of the light receiving element 105a and the light receiving element 121a.
  • the diaphragm 201 is disposed between the light emitting element 101 to be measured and the optical fiber 117.
  • the diaphragm 201 is formed in a substantially disc shape with the light emission central axis LCA as the central axis.
  • the diaphragm 201 has an opening 201a at the center, and is formed so that the size of the opening 201a can be changed.
  • the diaphragm 201 is designed so that the range S 0 of the optical fiber 117 fixed at the position is within the opening 201a.
  • the range in which the light emitted from the light emitting element 101 to be measured is blocked is changed. Thereby, the light incident on the optical fiber 117 is limited, and the detection ranges of the light receiving element 105a and the light receiving element 121a are adjusted.
  • FIG. 6 is a diagram for explaining measurement conditions when the optical characteristic of the light emitting element 101 is measured by the optical measurement device 3.
  • the light-emitting element 101 to be measured is shown in black, and the light-emitting elements 101 other than the measurement object are shown in white.
  • the measurement conditions for measuring the optical characteristics of the light emitting element 101 with the optical measurement device 3 are measurement conditions 1 to 4. Measurement conditions 1 to 4 differ in the arrangement of the light emitting elements 101.
  • the conditions common to the measurement conditions 1 to 4 are as follows.
  • the light emitting element 101 to be measured and the light emitting elements 101 other than the measurement target are the same light emitting element 101 including the generation unit 101b and the wavelength conversion unit 101c.
  • the light emitting element 101 is a pseudo white light emitting diode in which the generation unit 101b is a blue light emitting diode and the wavelength conversion unit 101c is a yellow phosphor.
  • the light emitting element 101 is formed in a square shape with one side of 1 mm. In both measurement conditions 1 to 4, the interval between adjacent light emitting elements 101 is 0.3 mm.
  • each of the measurement conditions 1 to 4 power is supplied from one light-emitting element 101 as a measurement target to emit light, and the chromaticity and light amount are measured. Both the measurement conditions 1 to 4 are measured using the optical measurement device 3 of the present embodiment and a conventional measurement device.
  • the adjustment unit of the optical measurement apparatus 3 of the present embodiment uses the adjustment unit of Example 2 shown in FIG.
  • the measurement conditions 1 to 4 are common to other conditions.
  • Measurement condition 1 uses one light-emitting element 101.
  • the arrangement mode of the measurement condition 1 is an individual state in which only one light emitting element 101 to be measured is arranged.
  • the total length of the light emitting element 101 is 1 mm.
  • Measurement condition 2 uses five light emitting elements 101.
  • the arrangement mode of the measurement condition 2 is a mode in which the light emitting element 101 to be measured is arranged at the center, and four light emitting elements 101 other than the measurement object are arranged adjacent to the circumference.
  • the total length of the array of the light emitting elements 101 is 3.6 mm.
  • As the measurement condition 3 nine light emitting elements 101 are used.
  • the arrangement mode of the measurement condition 3 is a mode in which the measurement target 101 is arranged at the center, and eight light emitting elements 101 other than the measurement target are arranged adjacent to the measurement target 101.
  • the total length of the array of the light emitting elements 101 is 3.6 mm.
  • Measurement condition 4 uses 25 light emitting elements 101.
  • the arrangement mode of the measurement condition 4 is a mode in which the light emitting element 101 to be measured is arranged in the center, and 24 light emitting elements 101 other than the measurement object are arranged adjacent to the circumference.
  • the entire length of the array of the light emitting elements 101 is 6.2 mm.
  • FIG. 7A is a measurement result regarding the chromaticity of the light-emitting element 101 shown in FIG. 6, and shows chromaticity coordinates x in the CIE-XYZ color system.
  • FIG. 7B is a measurement result regarding the chromaticity of the light-emitting element 101 shown in FIG. 6 and shows chromaticity coordinates y in the CIE-XYZ color system.
  • the wavelength conversion unit 101c of the light emitting element 101 other than the measurement target is yellow.
  • the measurement result of measurement condition 1 is different from the measurement results of measurement conditions 2 to 4.
  • the arrangement of the light emitting elements 101 is in a single piece state.
  • the measurement result of the measurement condition 1 is an ideal result that is not affected by unintended light emitted from the light emitting elements 101 other than the measurement target.
  • Measurement conditions 2 to 4 are an arrangement in which a plurality of light emitting elements 101 other than the measurement target are arranged adjacent to the light emitting element 101 to be measured.
  • the reason why the measurement results of measurement conditions 2 to 4 are different from the measurement result of measurement condition 1 is that the measurement results are affected by unintended light emitted from light emitting elements 101 other than the measurement target. For example, this is because yellow light emitted from the wavelength conversion unit 101 c of the light emitting element 101 other than the measurement target is incident on the optical fiber 117, detected by the light receiving element 121 a, and chromaticity is measured by the spectroscope 121.
  • the measurement result of the conventional measuring apparatus is affected by unintended light emitted from the light emitting elements 101 other than the measurement target, and the measurement accuracy is lowered.
  • the chromaticity coordinate value increases in the order of measurement condition 1, measurement condition 2, measurement condition 3, and measurement condition 4, and yellow chromaticity coordinates (x ⁇ 0.4, y ⁇ 0.5) This is because the more light emitting elements 101 other than the measurement target are arranged, the more yellow light emitted from the light emitting elements 101 other than the measurement target increases, and the component ratio of the yellow light detected by the light receiving element 121a increases. Because it does. That is, in the chromaticity measurement of the light emitting elements 101 arranged in a plurality, the measurement result of the conventional measuring apparatus is not intended that the light emitting elements 101 other than the measurement target emit as the light emitting elements 101 other than the measurement target are arranged. It becomes susceptible to light. As a result, the measurement result of the conventional measurement apparatus is likely to be degraded in measurement accuracy as more light emitting elements 101 other than the measurement target are arranged.
  • the measurement results under the measurement conditions 1 to 4 are substantially constant.
  • the optical measuring device 3 of the present embodiment includes the adjusting unit described above, so that unintended light emitted from the light emitting element 101 other than the measurement target does not enter the optical fiber 117 and is received by the light receiving element 121a. It is because it is not detected. That is, in the chromaticity measurement of the light emitting elements 101 arranged in a plurality, the measurement result of the optical measurement device 3 of the present embodiment is not affected by unintended light emitted from the light emitting elements 101 other than the measurement target. High measurement accuracy equivalent to the measurement result in the state is obtained.
  • FIG. 8 shows a measurement result regarding the light quantity of the light emitting element 101 shown in FIG.
  • the measurement result under measurement condition 1 is different from the measurement results under measurement conditions 2 to 4.
  • the light quantity increases in the order of measurement condition 1, measurement condition 2, measurement condition 3, and measurement condition 4.
  • the reason for this is that the more light emitting elements 101 other than the measurement target are arranged, the more yellow light emitted from the light emitting elements 101 other than the measurement target increases, which is easily detected by the light receiving element 105a and measured by the photodetector 105. This is because the amount of light increases.
  • the measurement result of the conventional measuring apparatus is not intended that the light emitting elements 101 other than the measurement target emit as the light emitting elements 101 other than the measurement target are arranged. It becomes susceptible to light. As a result, the measurement result of the conventional measurement apparatus is likely to be degraded in measurement accuracy as more light emitting elements 101 other than the measurement target are arranged.
  • each measurement result under the measurement conditions 1 to 4 is substantially constant.
  • the optical measuring device 3 of the present embodiment includes the adjusting unit described above, so that unintended light emitted from the light emitting element 101 other than the measurement target does not enter the optical fiber 117, and the light receiving element 105a. It is because it is not detected by. That is, also in the light quantity measurement of the light emitting elements 101 arranged in a plurality, the measurement result of the optical measuring device 3 of the present embodiment is not affected by unintended light emitted from the light emitting elements 101 other than the measurement target, High measurement accuracy equivalent to the measurement result in the state can be obtained.
  • the optical measurement device 3 can measure the optical characteristics of the light emitting element 101 with high measurement accuracy equivalent to the measurement in the individual state regardless of the arrangement mode of the light emitting elements 101. .
  • the light emitting element 101 to be measured is one light emitting element 101 in a state where the plurality of light emitting elements 101 are arranged. That is, the optical measuring device 3 supplies light with one light emitting element 101 as a measurement target to emit light, and measures its optical characteristics. However, the optical measuring device 3 may simultaneously measure a plurality of light emitting elements 101 in a state where the plurality of light emitting elements 101 are arranged. In other words, the optical measuring device 3 may simultaneously measure the optical characteristics of the plurality of light emitting elements 101 by simultaneously supplying power and emitting light.
  • FIG. 9A is a diagram for explaining an optical measurement apparatus 3 that simultaneously measures the optical characteristics of a plurality of light emitting elements 101 with a plurality of light emitting elements 101.
  • FIG. 9B shows a view of the light emitting element 101 shown in FIG. 9A viewed from the direction of the light emission central axis LCA.
  • a plurality of probe needles 109 and a plurality of optical fibers 117 are provided in advance in the optical measurement apparatus 3 that simultaneously measures a plurality of light emitting elements 101 as a measurement target.
  • the photodetector 105, the amplifier 113, the spectroscope 121, the electrical characteristic measurement unit 125, and the control unit 151 are designed in advance so that a plurality of light emitting elements 101 can be measured simultaneously.
  • a plurality of optical fibers 117 are arranged to face each of the plurality of light emitting elements 101 to be measured.
  • a plurality of probe needles 109 are in contact with the respective electrodes of the plurality of light emitting elements 101 to be measured.
  • the optical measuring device 3 supplies power to a plurality of light emitting elements 101 to be measured simultaneously to emit light, and measures their optical characteristics simultaneously.
  • the light of the measurement object is not incident on the optical fiber 117 disposed opposite to the light emission element 101 of one measurement object so that the light emitted from the light emission element 101 of the other measurement object does not enter.
  • An interval between the light emitting elements 101 is determined. For example, as shown in FIGS. 9A and 9B, when each light emitting element 101 is formed in a 1 mm square shape and the interval between adjacent light emitting elements 101 is 0.3 mm, the light emitting element to be measured The interval between 101 is set to 6.2 mm. An interval of 6.2 mm corresponds to an interval of four light emitting elements 101 to be measured.
  • the size of the interval is such that unintended light emitted from the light emitting elements 101 other than the measurement target does not enter the optical fiber 117.
  • the distance is such that light emitted from one light-emitting element 101 to be measured does not enter another light-emitting element 101 to be measured.
  • the optical measuring device 3 can obtain the same measurement accuracy as the case where the plurality of light emitting elements 101 are sequentially measured one by one by measuring the plurality of light emitting elements 101 at the same time with the interval therebetween.
  • FIG. 10A is a diagram for explaining a first modification of the optical measuring device 3.
  • FIG. 10B shows a view of the light emitting element 101 and the bundle fiber 118 shown in FIG. 10A viewed from the direction of the light emission central axis LCA.
  • FIG. 10C shows a view for explaining another cross-sectional shape of the bundle fiber 118 shown in FIGS. 10A and 10B.
  • the optical measurement device 3 according to the first modification includes a bundle fiber 118.
  • the bundle fiber 118 is configured by a bundle of a plurality of optical fibers 117.
  • the bundle fiber 118 is arranged so that the entrance 118 c faces the light emitting surface 101 a of the light emitting element 101 to be measured.
  • the optical fiber 117 on the central axis of the bundle fiber 118 has its central axis substantially coincident with the light emission central axis LCA of the light emitting element 101 to be measured.
  • the plurality of optical fibers 117 constituting the bundle fiber 118 are connected to the photodetector 105 and the spectroscope 121, respectively.
  • the size of the cross section perpendicular to the light emission center axis LCA of the bundle fiber 118 may be larger than the light emitting surface 101a of the light emitting element 101 to be measured, as shown in FIGS. 10A and 10B.
  • the size of the cross section is a size that does not cover the light emitting element 101 adjacent to the light emitting element 101 to be measured, as shown in FIGS. 10A and 10B.
  • the shape of the cross section perpendicular to the light emission central axis LCA of the bundle fiber 118 may be a rectangular shape as shown in FIG. 10B or a circular shape as shown in FIG. 10C.
  • the bundle fiber 118 is fixed in a position that does not include the light emitting device 101 other than the measurement target range S 1 indicated by the numerical aperture of the bundle fiber 118.
  • the range S 1 indicated by the numerical aperture of the bundle fiber 118 is larger than the range S 0 indicated by the numerical aperture NA of one optical fiber 117 included in the bundle fiber 118.
  • the position of the bundle fiber 118 may be a position sufficiently closer to the light emitting element 101 to be measured than the position of the optical fiber 117 in the case of using one optical fiber 117. Therefore, unintended light emitted from the light emitting elements 101 other than the measurement target may be difficult to enter the bundle fiber 118.
  • the optical measuring device 3 of the first modification unintentional light emitted from the light emitting elements 101 other than the measurement target is not detected, and the light emitted from the light emitting elements 101 as the measurement targets is received by the light receiving elements 105a and 121a. Can be detected.
  • the range S 1 is larger than the range S 0, and thus the light emitted from the light emitting element 101 to be measured uses one optical fiber 117 for the bundle fiber 118. More incidents can be made. Therefore, the optical measuring device 3 of the first modification can detect a large amount of light with the light receiving element 105a and the light receiving element 121a, and can measure the light quantity with higher accuracy. The alignment operation of the bundle fiber 118 and the like can be easily performed.
  • the photodetector 105 and the spectroscope 121 are connected to the plurality of optical fibers 117 constituting the bundle fiber 118, respectively, so that the light on the light emitting surface 101a of the light emitting element 101 to be measured is measured. Intensity distribution, chromaticity distribution, and the like can be measured.
  • the optical measuring device 3 of the modification 1 can change the number of the some optical fibers 117 which comprise the bundle fiber 118.
  • FIG. When the number of the plurality of optical fibers 117 constituting the bundle fiber 118 is changed, the range S 1 indicated by the numerical aperture of the bundle fiber 118 is changed.
  • the optical measurement device 3 of the first modification can limit the light incident on the bundle fiber 118 and can adjust the detection ranges of the light receiving element 105a and the light receiving element 121a.
  • the means for changing the number of the plurality of optical fibers 117 constituting the bundle fiber 118 constitutes an adjustment unit provided in the optical measurement device 3 of the first modification.
  • the optical measurement device 3 according to the first modification may include a switch that switches the connection between the plurality of optical fibers 117 constituting the bundle fiber 118 and the light receiving elements 105a and 121a to be valid or invalid.
  • the optical measuring device 3 of the modification 1 may change range S1 which the numerical aperture of the bundle fiber 118 shows by controlling the said switch. Thereby, the optical measuring device 3 of the modification 1 can adjust the detection ranges of the light receiving element 105a and the light receiving element 121a.
  • the means for switching each connection between the plurality of optical fibers 117 constituting the bundle fiber 118 and the light receiving element 105a and the light receiving element 121a also constitutes an adjustment unit provided in the optical measurement device 3 of the first modification.
  • the optical measuring device 3 of Modification 1 may include the adjusting mechanism described with reference to FIG. 4 and the diaphragm 201 described with reference to FIG. And these adjustment mechanisms and diaphragm 201 may constitute the adjustment part with which optical measurement device 3 of modification 1 is provided.
  • Other configurations of the optical measurement device 3 of Modification 1 are the same as the configurations of the optical measurement device 3 shown in FIGS. 2 to 9B.
  • FIG. 11 is a diagram for explaining a second modification of the optical measuring device 3.
  • the optical measurement device 3 according to the second modification has a configuration in which an integrating sphere 108 is added to the optical measurement device 3 according to the first modification.
  • the integrating sphere 108 is formed in a hollow, substantially spherical shape.
  • the integrating sphere 108 includes an inner wall 108a, an inlet 108b, and an outlet 108c.
  • the inner wall 108a forms an internal space of the integrating sphere 108.
  • the inner wall 108a is formed of a material having high reflectivity and excellent diffusibility.
  • the inner wall 108a is provided with an inlet 108b and an outlet 108c.
  • the intake port 108b is an opening for capturing light emitted from the light emitting element 101 to be measured.
  • the opening center axis of the inlet 108b in FIG. 11 substantially coincides with the light emission center axis LCA of the light emitting element 101 to be measured.
  • the opening center axis of the intake port 108b does not have to coincide with the emission center axis LCA of the light emitting element 101 to be measured.
  • 11 is formed in an opening shape similar to the outer peripheral shape of the bundle fiber 118.
  • a bundle fiber 118 is attached to the intake port 108b.
  • the outer peripheral shape of the bundle fiber 118 may be different between the outer peripheral shape in the vicinity of the incident port 118c and the outer peripheral shape in the vicinity of the intake port 108b.
  • the outer peripheral shape of the bundle fiber 118 may be a rectangular shape near the entrance port 118c, and the outer peripheral shape near the intake port 108b may be a circular shape.
  • the inlet 108b in FIG. 11 guides the light guided by the bundle fiber 118 into the integrating sphere 108.
  • the light guided into the integrating sphere 108 from the inlet 108b is repeatedly reflected by the inner wall 108a and reaches the outlet 108c.
  • the outlet 108 c is an opening for taking out the light reflected by the inner wall 108 a to the outside of the integrating sphere 108.
  • the outlet 108c is provided at a position different from the inlet 108b of the inner wall 108a.
  • An optical fiber 117 is provided at the outlet 108c in FIG.
  • the extraction port 108c in FIG. 11 guides the light reflected by the inner wall 108a to the optical fiber 117.
  • the light guided to the optical fiber 117 enters the optical fiber 117, is detected by the light receiving element 105a and the light receiving element 121a, and the optical characteristics are measured by the photodetector 105 and the spectroscope 121.
  • Other configurations of the optical measurement device 3 of Modification 2 are the same as those of the optical measurement device 3 of Modification 1 shown in FIGS. 10A to 10C.
  • FIG. 12A is a diagram for explaining a third modification of the optical measuring device 3.
  • FIG. 12B is a diagram for explaining light refraction in the lens 202 shown in FIG. 12A.
  • the optical measurement device 3 of Modification 3 has a configuration in which a lens 202 is added to the optical measurement device 3 of Modification 1.
  • the lens 202 is a lens for condensing the light emitted from the light emitting element 101 to be measured on the bundle fiber 118.
  • the lens 202 is configured using, for example, a plano-convex lens.
  • the lens 202 is disposed between the bundle fiber 118 and the light emitting element 101 to be measured so as to oppose both.
  • the lens 202 is arranged substantially in parallel with the incident port 118c of the bundle fiber 118 and the light emitting surface 101a of the light emitting element 101 to be measured.
  • the central axis of the lens 202 substantially coincides with the light emission central axis LCA of the light emitting element 101 to be measured.
  • the size of the cross section perpendicular to the light emission central axis LCA of the lens 202 is the same as or larger than the size of the cross section perpendicular to the light emission central axis LCA of the bundle fiber 118, as shown in FIG. 12A.
  • the size of the cross section of the lens 202 is a size that does not cover the light emitting element 101 adjacent to the light emitting element 101 to be measured, as shown in FIG. 12A.
  • the light emitted from the light emitting element 101 to be measured is refracted toward the entrance 118 c of the bundle fiber 118 when entering the lens 202.
  • unintended light emitted from the light emitting element 101 other than the measurement target is not refracted toward the incident port 118c even if it enters the lens 202. Therefore, unintended light emitted from the light emitting elements 101 other than the measurement target may be difficult to enter the bundle fiber 118.
  • the optical measuring device 3 of the third modification condenses the light emitted from the light emitting element 101 to be measured on the bundle fiber 118 by the lens 202. For this reason, the optical measuring device 3 of the modified example 3 can suppress a decrease in measurement accuracy even when the positional deviation of the bundle fiber 118 or the like occurs compared to the case where the lens 202 is not used. The alignment operation of the bundle fiber 118 and the like can be performed more easily.
  • the optical measurement device 3 according to the third modification can limit the light incident on the bundle fiber 118 using the lens 202 and adjust the detection ranges of the light receiving element 105a and the light receiving element 121a.
  • the lens 202 constitutes an adjustment unit provided in the optical measurement device 3 according to the third modification.
  • the optical measurement apparatus 3 of Modification 3 may include a moving unit that moves the lens 202 in the vertical direction along the light emission central axis LCA of the light emitting element 101 to be measured.
  • the optical measuring device 3 of the modification 3 can adjust the detection ranges of the light receiving element 105a and the light receiving element 121a.
  • the moving means for moving the lens 202 along the light emission center axis LCA also constitutes an adjustment unit provided in the optical measurement device 3 of the third modification.
  • Other configurations of the optical measurement device 3 of Modification 3 are the same as those of the optical measurement device 3 of Modification 1 shown in FIGS. 10A to 10C.
  • FIG. 13A shows a diagram for explaining a fourth modification of the optical measuring device 3.
  • FIG. 13B shows a view of the light emitting element 101 and the bundle fiber 119 shown in FIG. 13A viewed from the direction of the light emission central axis LCA.
  • the optical measurement device 3 of the modification 4 includes a bundle fiber 119 having a configuration different from that of the bundle fiber 118 included in the optical measurement device 3 of the modification 1.
  • the bundle fiber 119 is configured by a plurality of optical fibers 117 being bundled.
  • the bundle fiber 119 is arranged so that the entrance 119c faces the light emitting surface 101a of the light emitting element 101 to be measured.
  • the optical fiber 117 on the central axis of the bundle fiber 119 has its central axis substantially coincident with the light emission central axis LCA of the light emitting element 101 to be measured.
  • One or more optical fibers 117 near the central axis of the bundle fiber 119 are connected to the spectrometer 121.
  • a plurality of optical fibers 117 other than the vicinity of the central axis of the bundle fiber 119 are connected to the photodetector 105.
  • FIGS. 14A to 14C one or more optical fibers 117 in the vicinity of the central axis of the bundle fiber 119 are shown in black.
  • a plurality of optical fibers 117 other than the vicinity of the central axis of the bundle fiber 119 are shown in white. The same applies to FIGS. 14A to 14C.
  • the size of the cross section perpendicular to the light emission central axis LCA of the bundle fiber 119 is larger than the light emitting surface 101a of the measurement target 101 and covers a plurality of light emitting elements 101 other than the measurement target.
  • the size of Range S 2 indicated the numerical aperture of the fiber bundle 119 is enlarged than the range S 1 indicated the numerical aperture of the bundle fiber 118.
  • the light emitting element 101 other than the measurement object in addition to the light emitting element 101 to be measured also included.
  • the optical measuring device 3 of the fourth modification since the range S 2 is enlarged than the range S 1, the bundle fiber 119, the light emitting element 101 emits light to be measured, as compared with the case of using the bundle fiber 118 Many incidents are possible. Therefore, the optical measuring device 3 of the modification 4 can detect more light by the light receiving element 105a and the light receiving element 121a, and can measure the light quantity with higher accuracy. The alignment work of the bundle fiber 119 and the like can be performed more easily.
  • the central axis of the bundle fiber 119 and the light emission center axis LCA of the light emitting element 101 to be measured substantially coincide with each other, and only the optical fiber 117 near the center axis of the bundle fiber 119 is a spectrometer 121 is connected. Therefore, the light receiving element 121a of the spectroscope 121 that measures chromaticity or the like detects light emitted from the light emitting element 101 to be measured without detecting unintended light emitted from the light emitting elements 101 other than the measurement target. obtain. Therefore, the optical measurement device 3 of the modification 4 can measure chromaticity and the like with high accuracy.
  • the optical measuring device 3 of Modification 4 since the plurality of optical fibers 117 other than the vicinity of the central axis of the bundle fiber 119 are connected to the photodetector 105, the light intensity of the light emitting surface 101a of the light emitting element 101 other than the measurement target is measured. Distribution can be measured. Furthermore, the optical measuring device 3 variant 4, the range S 2 of the bundle fiber 119, also located the light emitting element 101 other than the measurement object. For this reason, in the optical measuring device 3 of Modification 4, the light emitting element 101 facing the optical fiber 117 connected to the spectroscope 121 is a measurement target for measuring chromaticity or the like, and the other light emitting elements 101 are light quantities. It can be a measurement object.
  • the optical measuring device 3 of the modification 4 can simultaneously measure the chromaticity and the light amount, although the light emitting element 101 to be measured is different.
  • Other configurations of the optical measurement device 3 of Modification 4 are the same as those of the optical measurement device 3 of Modification 1 shown in FIGS. 10A to 10C.
  • FIG. 14A is a diagram for explaining a fifth modification of the optical measuring device 3.
  • FIG. 14B is a diagram for explaining another example 1 in the modified example 5 of the optical measuring device 3.
  • FIG. 14C is a diagram for explaining another example 2 in the modified example 5 of the optical measuring device 3.
  • the optical measurement device 3 of Modification 5 has a configuration in which a rod lens array 203 or a microlens array 204 is added to the optical measurement device 3 of Modification 4.
  • the rod lens array 203 a plurality of rod lenses 203a are arranged substantially parallel to each other.
  • the rod lens 203a is a lens for internally reflecting the light emitted from the light emitting element 101 and guiding it to the bundle fiber 119.
  • the rod lens 203a is configured using, for example, a lens having birefringence.
  • the rod lens 203a has a refractive index near the central axis that is larger than the refractive index near the outer periphery.
  • the rod lens 203 a is disposed between the bundle fiber 119 and the light emitting element 101.
  • the end surface of the rod lens 203 a faces the incident port 119 c of the bundle fiber 119 and the light emitting surface 101 a of the light emitting element 101.
  • the central axis of the rod lens 203 a is substantially parallel to the light emission central axis LCA of the light emitting element 101.
  • the central axis of the rod lens 203a disposed at the center of the rod lens array 203 substantially coincides with the light emission central axis LCA of the light emitting element 101 to be measured.
  • the size of the cross section perpendicular to the light emission central axis LCA of the rod lens 203 a is smaller than the size of the light emitting surface 101 a of the light emitting element 101.
  • the size of the cross section perpendicular to the light emission central axis LCA of the rod lens array 203 is the same as or slightly larger than the size of the cross section perpendicular to the light emission central axis LCA of the bundle fiber 119.
  • the light emitted from the light emitting element 101 to be measured is incident on the rod lens 203 a disposed at the center of the rod lens array 203.
  • the light incident on the rod lens 203a arranged at the center repeats reflection inside the rod lens 203a arranged at the center.
  • the light incident on the rod lens 203 a disposed at the center is guided toward the incident port 117 c of the optical fiber 117 near the central axis of the bundle fiber 119.
  • unintended light emitted from the light emitting element 101 other than the measurement target may be difficult to enter the rod lens 203a disposed in the center.
  • the optical measuring device 3 of the modified example 5 can measure chromaticity and the like with high accuracy.
  • the optical fiber 117 near the center axis of the bundle fiber 119 is connected to the spectroscope 121 including the light receiving element 121a.
  • the optical measurement device 3 of Modification 5 may use a microlens array 204 instead of the rod lens array 203 as shown in FIG. 14B.
  • the optical measurement device 3 of Modification 5 may be provided with a through hole 204 a in the center of the microlens array 204.
  • An optical fiber 117 in the vicinity of the central axis of the bundle fiber 119 may be inserted into the through hole 204a. Then, only the optical fiber 117 near the center axis of the bundle fiber 119 may be connected to the spectroscope 121 including the light receiving element 121a.
  • the light emitted from the light emitting element 101 to be measured passes through the optical fiber 117 in the vicinity of the center axis of the bundle fiber 119 without passing through the microlens array 204. Directly incident.
  • the optical measurement device 3 of the modification 5 shown in FIG. 14C can measure chromaticity and the like with higher accuracy. Furthermore, the reproducibility of measurement of the chromaticity and the like can be improved.
  • the optical measurement device 3 of Modification 5 uses the rod lens array 203 or the micro lens array 204 to limit the light incident on the bundle fiber 119 and adjust the detection ranges of the light receiving element 105a and the light receiving element 121a. Can do.
  • the rod lens array 203 or the microlens array 204 constitutes an adjustment unit provided in the optical measurement device 3 of Modification 5.
  • the optical measurement device 3 of Modification 5 may include a moving unit that moves the rod lens array 203 or the microlens array 204 in the vertical direction along the light emission central axis LCA of the light emitting element 101 to be measured. .
  • the optical measuring device 3 of the modification 5 can adjust the detection ranges of the light receiving element 105a and the light receiving element 121a.
  • the moving means for moving the rod lens array 203 or the microlens array 204 along the light emission center axis LCA also constitutes an adjustment unit provided in the optical measurement device 3 of the fifth modification.
  • Other configurations of the optical measurement device 3 of Modification 5 are the same as those of the optical measurement device 3 of Modification 4 shown in FIGS. 13A and 13B.
  • FIG. 15A is a diagram for explaining a sixth modification of the optical measuring device 3.
  • FIG. 15B shows a view of the light receiving element 105a of the photodetector 105 shown in FIG. 15A viewed from the direction of the light emission central axis LCA.
  • the optical measurement device 3 of Modification 6 has a configuration in which the light receiving element 105a of the photodetector 105 is provided around the tip of the head 117a of the optical fiber 117 included in the optical measurement device 3 shown in FIG.
  • the optical measurement device 3 of Modification 6 is provided with a plurality of light receiving elements 105a so that a gap 105b is formed at the center of the plurality of light receiving elements 105a.
  • the head 117a of the optical fiber 117 is inserted and fixed in the gap 105b.
  • the light receiving surfaces of the four light receiving elements 105 a and the optical fiber 117 are arranged to face the light emitting surface 101 a of the light emitting element 101.
  • the size of the light receiving surfaces of the four light receiving elements 105a may be larger than the light emitting surface 101a of the light emitting element 101 to be measured.
  • the size of the light receiving surfaces of the four light receiving elements 105a is sufficiently larger than the incident port 117c of the optical fiber 117.
  • the optical fiber 117 included in the optical measurement device 3 of Modification 6 is connected only to the spectroscope 121.
  • the optical measurement device 3 of Modification 6 directly detects the light emitted from the light-emitting element 101 to be measured on the light-receiving surfaces of the four light-receiving elements 105a that are sufficiently larger than the incident port 117c of the optical fiber 117. For this reason, the optical measuring device 3 of the modified example 6 can detect more light by the light receiving element 105a and measures the amount of light with higher accuracy than the optical measuring device 3 shown in FIG. be able to.
  • Other configurations of the optical measurement device 3 of Modification 6 are the same as those of the optical measurement device 3 shown in FIG.
  • FIG. 16 is a diagram for explaining a modified example 7 of the optical measuring device 3.
  • the optical measurement device 3 of Modification 7 has a configuration in which an integrating sphere 108 is added to the optical measurement device 3 of Modification 6. Further, the optical measurement device 3 of Modification 7 has a configuration in which the light receiving elements 105a of the optical measurement device of Modification 6 are arranged at different positions.
  • the integrating sphere 108 of the optical measuring device 3 of the modified example 7 has the same configuration as the integrating sphere 108 included in the optical measuring device 3 of the modified example 2 shown in FIG.
  • the entrance port 117c of the optical fiber 117 is disposed at the intake port 108b of the integrating sphere 108.
  • the inlet 108b of the integrating sphere 108 and the incident port 117c of the optical fiber 117 are disposed to face the light emitting surface 101a of the light emitting element 101 to be measured.
  • the size of the inlet 108 b of the integrating sphere 108 is sufficiently larger than the incident port 117 c of the optical fiber 117.
  • the optical fiber 117 included in the optical measurement device 3 of Modification 7 is connected only to the spectroscope 121.
  • the light receiving element 105a is disposed at the outlet 108c of the integrating sphere 108.
  • the optical measurement device 3 of Modification 7 captures the light emitted from the light emitting element 101 to be measured through the intake 108b of the integrating sphere 108 that is sufficiently larger than the incident port 117c of the optical fiber 117. Then, the optical measuring device 3 of the modified example 7 directly detects the light taken in by the integrating sphere 108 by the light receiving element 105a provided at the outlet 108c. For this reason, similarly to the optical measurement device 3 of the modification example 6, the optical measurement device 3 of the modification example 7 can detect more light by the light receiving element 105a and can measure the light amount with higher accuracy. it can.
  • Other configurations of the optical measurement device 3 of Modification 7 are the same as those of the optical measurement device 3 of Modification 6 shown in FIGS. 15A and 15B.
  • FIG. 17 is a diagram for explaining a modified example 8 of the optical measuring device 3.
  • the optical measurement device 3 of Modification 8 has a configuration in which a cylinder 205 is added instead of the diaphragm 201 included in the optical measurement device 3 shown in FIG.
  • the tube 205 blocks a part of the light emitted from the light emitting element 101 to be measured and restricts the light incident on the optical fiber 117.
  • the cylinder 205 is formed of an absorbing member that absorbs light.
  • the tube 205 has the head 117a of the optical fiber 117 as a base end, and the tip extends toward the light emitting element 101 to be measured.
  • An opening 205 a at the tip of the tube 205 faces the light emitting surface 101 a of the light emitting element 101 and the incident port 117 c of the optical fiber 117.
  • the central axes of the cylinder 205 and the opening 205a substantially coincide with the light emission central axis LCA of the light emitting element 101 to be measured.
  • the size of the opening 205 a is the same as or slightly larger than the size of the light emitting surface 101 a of the light emitting element 101. However, the size of the opening 205a is such that it does not cover the light emitting element 101 adjacent to the light emitting element 101 to be measured, as shown in FIG.
  • the cylinder 205 Since the cylinder 205 is formed of an absorbing member, the light incident on the inner peripheral surface of the cylinder 205 is absorbed as it is without being reflected.
  • the light incident on the optical fiber 117 is light that does not enter the inner peripheral surface of the cylinder 205 and goes directly from the opening 205a of the cylinder 205 to the incident port 117c.
  • the range of the light is defined by the size of the angle ⁇ formed by the straight line connecting the periphery of the opening 205a and the incident port 117c and the light emission center axis LCA. That is, the range of light incident on the optical fiber 117 is defined by the angle ⁇ .
  • FIG. 17 shows an example in which the angle ⁇ is smaller than the angle ⁇ that defines the numerical aperture NA of the optical fiber 117.
  • the length of the cylinder 205 defines the vertical position of the opening 205a. For this reason, the length of the cylinder 205 defines the magnitude of the angle ⁇ . Therefore, the length of the tube 205 defines the range of light incident on the optical fiber 117.
  • the cylinder 205 included in the optical measuring device 3 of Modification 8 is formed to have a length of an angle ⁇ such that the light emitting element 101 other than the measurement target is not included in the range of light incident on the inside of the cylinder 205. Yes. For this reason, unintended light emitted from the light-emitting elements 101 other than the measurement target is not incident on the optical fiber 117 of the optical measurement device 3 of Modification 8. Thereby, in the optical measurement device 3 of the modification 8, unintended light emitted from the light emitting elements 101 other than the measurement target is not detected, and the light emitted from the light emitting elements 101 as the measurement targets is received by the light receiving elements 105a and 121a. Can be detected.
  • the optical measurement device 3 according to the modified example 8 can limit the light incident on the optical fiber 117 using the cylinder 205 and adjust the detection ranges of the light receiving element 105a and the light receiving element 121a.
  • the cylinder 205 constitutes an adjustment unit provided in the optical measurement device 3 of Modification 8.
  • the optical measurement device 3 of Modification 8 may include a means for changing the length of the cylinder 205.
  • the angle ⁇ is changed, and the range of light that can enter the optical fiber 117 is changed.
  • the optical measuring device 3 of the modification 8 can adjust the detection ranges of the light receiving element 105a and the light receiving element 121a.
  • the means for changing the length of the cylinder 205 also constitutes an adjustment unit provided in the optical measurement device 3 of the modification 8.
  • Other configurations of the optical measurement device 3 of Modification 8 are the same as those of the optical measurement device 3 shown in FIG.
  • FIG. 18 is a diagram for explaining a modification 9 of the optical measuring device 3.
  • the optical measurement device 3 of Modification 9 has a configuration in which an integrating sphere 108 is added to the optical measurement device 3 of Modification 8.
  • the cylinder 205 included in the optical measurement device 3 of Modification 9 has a leading end that extends toward the light-emitting element 101 to be measured with the intake port 108b of the integrating sphere 108 as a base end.
  • the optical fiber 117 included in the optical measurement device 3 of Modification 9 is provided at the outlet 108 c of the integrating sphere 108.
  • the light incident on the optical fiber 117 is light that is taken into the integrating sphere 108 from the inlet 108b.
  • the light taken into the integrating sphere 108 from the taking-in port 108b is the light which goes directly from the opening 205a to the taking-in port 108b like the optical measuring device 3 of the modification 8. That is, the light incident on the optical fiber 117 is light that goes directly from the opening 205a to the intake port 108b.
  • the range of the light is defined by the magnitude of the angle ⁇ formed by the straight line connecting the periphery of the intake port 108b and the periphery of the opening 205a and the light emission center axis LCA.
  • FIG. 18 shows an example in which the angle ⁇ is larger than the angle ⁇ that defines the numerical aperture NA of the optical fiber 117.
  • the cylinder 205 included in the optical measuring device 3 of Modification 9 has an angle ⁇ such that unintended light emitted from the light emitting element 101 other than the measurement target is not included in the range of light incident on the inside of the cylinder 205.
  • the length is formed. This is because the length of the tube 205 defines the angle ⁇ and the range of light incident on the optical fiber 117, as in the optical measurement device 3 of the modification 8. Therefore, unintended light emitted from the light emitting element 101 other than the measurement target is not incident on the optical fiber 117 of the optical measurement device 3 of Modification Example 9, and light emitted from the light emitting element 101 as the measurement target is incident.
  • the optical measuring device 3 of the modification 9 unintended light emitted from the light emitting element 101 other than the measurement target is not detected, and the light emitted from the light emitting element 101 as the measurement target is the light receiving element 105a and the light receiving element 121a. Can be detected.
  • the optical measurement device 3 according to the modification 9 can limit the light incident on the optical fiber 117 using the tube 205 and adjust the detection ranges of the light receiving element 105a and the light receiving element 121a.
  • the cylinder 205 constitutes an adjustment unit provided in the optical measurement device 3 of the modification 9.
  • the optical measurement device 3 of the modification 9 may also include means for changing the length of the cylinder 205, similarly to the optical measurement device 3 of the modification 8.
  • the means for changing the length of the cylinder 205 also constitutes an adjustment unit provided in the optical measurement device 3 of the modification 9.
  • Other configurations of the optical measurement device 3 of Modification 9 are the same as those of the optical measurement device 3 of Modification 8 shown in FIG.
  • FIG. 19A is a diagram for explaining a modified example 10 of the optical measuring device 3.
  • FIG. 19B shows the shielding plate 206 and the light emitting element 101 shown in FIG. 19A viewed from the direction of the light emission central axis LCA.
  • FIG. 20 is a diagram for explaining another example in the modified example 10 of the optical measuring device 3.
  • the optical measurement device 3 of Modification 10 includes a configuration in which a shielding plate 206 is added instead of the cylinder 205 included in the optical measurement device 3 of Modification 9.
  • the shielding plate 206 is a shielding member that blocks light emitted from the light emitting element 101 to be measured from entering the light emitting elements 101 other than the measurement target.
  • a shielding plate 206 shown in FIG. 19 is a plate that spatially partitions between adjacent light emitting elements 101.
  • the shielding plate 206 is disposed between the intake port 108 b of the integrating sphere 108 and the light emitting element 101.
  • the opening 206a of the shielding plate 206 is in contact with the inlet 108b of the integrating sphere 108 and the table 103 on which the light emitting element 101 is placed.
  • the light emitting element 101 to be measured can be positioned inside a closed space formed by the integrating sphere 108 and the shielding plate 206.
  • the shielding plate 206 blocks light emitted from the light emitting element 101 to be measured from entering the light emitting elements 101 other than the measurement target. Therefore, unintended light emitted from the light emitting elements 101 other than the measurement target cannot be generated. For this reason, the light incident on the optical fiber 117 is limited only to the light emitted from the light emitting element 101 to be measured. As a result, in the optical measurement device 3 of the modification 10, unintentional light emitted from the light emitting element 101 other than the measurement target is not detected, and the light emitted from the light emitting element 101 as the measurement target is received by the light receiving element 105a and the light receiving element 121a. Can be detected.
  • the optical measurement device 3 of Modification 10 may use a reflector 207 instead of the shielding plate 206 as shown in FIG.
  • the reflector 207 is a cylinder that spatially partitions the light emitting element 101 to be measured and the other light emitting elements 101.
  • the reflector 207 is disposed between the inlet 108b of the integrating sphere 108 and the light emitting element 101 to be measured.
  • the reflector 207 is fixed to the inlet 108 b of the integrating sphere 108.
  • the tip of the reflector 207 is in contact with the table 103 on which the light emitting element 101 to be measured is placed.
  • the light emitting element 101 to be measured can be positioned inside the closed space formed by the integrating sphere 108 and the reflector 207. Therefore, also in the optical measurement apparatus 3 of Modification 10 shown in FIG. 20, the light incident on the optical fiber 117 is limited to only the light emitted from the light emitting element 101 to be measured.
  • the reflector 207 is formed in a cylindrical shape whose inner diameter is increased toward the integrating sphere 108.
  • the inner peripheral surface of the reflector 207 is coated with a highly reflective material. For this reason, the light emitted from the light emitting element 101 to be measured can be reflected on the inner peripheral surface of the reflector 207 toward the inlet 108 b of the integrating sphere 108.
  • the optical measurement apparatus 3 according to the modified example 10 using the reflector 207 measures the amount of light with higher accuracy because more light is incident on the optical fiber 117 than when the shielding plate 206 is used. be able to.
  • the optical measurement device 3 according to the modified example 10 can limit the light incident on the optical fiber 117 using the shielding plate 206 or the reflector 207, and can adjust the detection ranges of the light receiving element 105a and the light receiving element 121a.
  • the shielding plate 206 and the reflector 207 constitute an adjustment unit provided in the optical measurement device 3 of the modification 10.
  • Other configurations of the optical measurement device 3 of Modification 10 are the same as those of the optical measurement device 3 of Modification 9 shown in FIG.
  • FIG. 21 is a diagram for explaining a modification 11 of the optical measuring device 3.
  • FIG. 22 is a flowchart for explaining processing performed by the control unit 151 shown in FIG. 21 when measuring optical characteristics.
  • FIG. 23 is a diagram for explaining another example of the modification 11 of the optical measuring device 3.
  • the optical measurement device 3 of Modification 11 has a configuration in which an optical waveguide 120 and a light amount adjuster 122 are added to the optical measurement device 3 shown in FIGS. 2 to 9B.
  • the optical transmission line 117 b of the optical fiber 117 may be branched using the optical waveguide 120.
  • the optical waveguide 120 branches the optical transmission path 117 b into a first path 117 d toward the spectroscope 121 and a second path 117 e toward the photodetector 105.
  • the first path 117d is an optical transmission path 117b that connects the optical waveguide 120 and the spectroscope 121.
  • the second path 117 e is an optical transmission path 117 b that connects between the optical waveguide 120 and the photodetector 105.
  • the optical waveguide 120 totally guides incident light inside to suppress transmission loss as much as possible, and guides it to the first path 117d and the second path 117e.
  • the light amount adjuster 122 adjusts the amount of light detected by the light receiving element 121 a of the spectroscope 121.
  • the light amount adjuster 122 is disposed on the first path 117 d of the optical transmission path 117 b that connects the optical waveguide 120 and the spectroscope 121.
  • the light quantity adjuster 122 is configured using an optical filter that attenuates the light quantity, such as an ND filter (Neutral Density Filter).
  • the light amount adjuster 122 may be configured using an electro-optic element, a magneto-optic element, an acousto-optic element, a liquid crystal optical element, or the like.
  • the light amount adjuster 122 is connected to the control unit 151.
  • the light amount adjuster 122 is configured to be able to adjust the amount of attenuation of light passing therethrough.
  • the amount of attenuation adjusted by the light amount adjuster 122 is set by the control unit 151.
  • the attenuation amount adjusted by the light amount adjuster 122 can be appropriately set so that the incident light amount to the spectroscope 121 falls within the dynamic range in the photoelectric conversion characteristics of the spectroscope 121.
  • the attenuation may be set differently mainly depending on the type of the light emitting element 101.
  • the light amount adjuster 122 also has a configuration that can reduce the attenuation amount to zero.
  • the “photoelectric conversion characteristic” of the spectroscope 121 is the relationship between the amount of incident light and the output current in the spectroscope 121.
  • the fact that the input and output are in a proportional relationship is called “linearity”.
  • a range in which a proportional relationship between input and output is established is called “dynamic range”.
  • the dynamic range is a range where linearity is established.
  • the dynamic range in the photoelectric conversion characteristics of the spectroscope 121 is a range in which a proportional relationship between the incident light amount and the output current is established, and is a range in which linearity in the photoelectric conversion characteristics is established.
  • the dynamic range of the photoelectric conversion characteristics of the spectroscope 121 is narrower than that of the photodetector 105. For this reason, when various optical characteristics of the light emitting element 101 are measured by the spectroscope 121, the measurement result of the spectroscope 121 may be inaccurate depending on the amount of light incident on the spectroscope 121. Therefore, a technique capable of measuring the optical characteristics of the light emitting element 101 with high reliability is desired. In addition, the light emitting elements 101 of different types often have different light emission characteristics depending on the type. Therefore, when measuring the optical characteristics of light emitting elements 101 of different varieties, the amount of light incident on the spectroscope 121 is often different.
  • the optical measurement device 3 of the modification 11 includes a light amount adjuster 122.
  • step S ⁇ b> 10 the control unit 151 determines whether the light amount measurement result of the photodetector 105 and the measurement result of the spectroscope 121 are input.
  • the control unit 151 waits until the light amount measurement result of the photodetector 105 and the measurement result of the spectroscope 121 are input.
  • the control unit 151 associates each result and stores them in a predetermined storage area. And the control part 151 transfers to step S20.
  • step S ⁇ b> 20 the control unit 151 verifies the validity of the measurement result of the spectroscope 121 based on the light amount measurement result of the photodetector 105.
  • the control unit 151 can verify the validity of the measurement result of the spectroscope 121 by, for example, the following method.
  • control unit 151 confirms the light quantity measurement result included in the measurement result of the spectroscope 121 input in step S10. And the control part 151 calculates
  • control unit 151 stores in advance a range of the light quantity measurement result of the spectroscope 121 that can be acquired within the dynamic range in the photoelectric conversion characteristics of the spectroscope 121. Then, the control unit 151 determines whether or not the light quantity measurement result of the photodetector 105 input in step S10 is within the range of the light quantity measurement result of the spectroscope 121 stored in advance. Then, if the light amount measurement result of the photodetector 105 input in step S10 is within the range of the light amount measurement result of the spectroscope 121 stored in advance, the control unit 151 of the spectroscope 121 input in step S10. The measurement result is judged to be appropriate.
  • step S10 determines whether the light quantity measurement result of the photodetector 105 input in step S10 is within the range of the light quantity measurement result of the spectroscope 121 stored in advance. If the light quantity measurement result of the photodetector 105 input in step S10 is not within the range of the light quantity measurement result of the spectroscope 121 stored in advance, the control unit 151 of the spectroscope 121 input in step S10. Judge that the measurement results are not valid.
  • step S30 the control unit 151 determines whether or not the measurement result of the spectroscope 121 is valid. If it is determined by the verification in step S20 that the measurement result of the spectroscope 121 is valid, the control unit 151 proceeds to step S40. On the other hand, if it is determined by the verification in step S20 that the measurement result of the spectroscope 121 is not valid, the control unit 151 proceeds to step S60.
  • step S40 the control unit 151 validates the measurement result of the spectroscope 121.
  • step S ⁇ b> 50 the control unit 151 outputs the measurement result of the spectroscope 121 to the output unit 163. And the control part 151 complete
  • step S60 the control unit 151 invalidates the measurement result of the spectroscope 121.
  • step S ⁇ b> 70 the control unit 151 controls the light amount adjuster 122.
  • the control unit 151 confirms the measurement result of the spectroscope 121 invalidated in step S60 and the light amount measurement result of the photodetector 105 associated with the result.
  • the control part 151 calculates
  • the control unit 151 outputs a control signal including the obtained attenuation amount to the light amount adjuster 122 and sets the attenuation amount in the light amount adjuster 122.
  • the control unit 151 can obtain the attenuation amount adjusted by the light amount adjuster 122 by, for example, the following method.
  • control unit 151 obtains and verifies the difference between the light amount measurement result of the spectroscope 121 and the light amount measurement result of the photodetector 105 in the verification in step S20, the difference is within the allowable range of the difference. Find the amount of attenuation that will fit.
  • step S20 when the verification is performed using the range of the light quantity measurement result of the spectroscope 121 that can be acquired within the dynamic range in the photoelectric conversion characteristics of the spectroscope 121, the following is performed. Asking. That is, the control unit 151 obtains the attenuation amount adjusted by the light amount adjuster 122 according to the difference between the threshold value in the range and the light amount measurement result of the photodetector 105.
  • step S80 the control unit 151 instructs the photodetector 105 and the spectroscope 121 to perform measurement again.
  • the control unit 151 outputs a control signal to the photo detector 105 and the spectroscope 121 and instructs the photo detector 105 and the spectroscope 121 to perform measurement again.
  • the spectroscope 121 can detect the light attenuated by the attenuation set in step S70 and measure the optical characteristics. Then, the measurement result of the spectroscope 121 that has been measured again is input to the control unit 151 again and verified in step S20. Thereby, the measurement result of the spectroscope 121 output in step S50 is only the measurement with high reliability.
  • the optical measurement device 3 of the modification 11 selectively validates the measurement result of the spectroscope 121 based on the light amount measurement result measured by the photodetector 105 having a wider dynamic range than the spectroscope 121. For this reason, the optical measuring device 3 of the modified example 11 can output only a reliable measurement result as valid when measuring the optical characteristics of the light emitting element 101. Therefore, the measurement result of the optical characteristics of the optical measurement device 3 of the modification 11 can obtain high reliability.
  • the optical measurement device 3 of the modification 11 can automatically adjust the incident light to the spectroscope 121 to an appropriate light amount. And the optical measurement apparatus 3 of the modification 11 can measure the optical characteristic again by the spectroscope 121 using the incident light adjusted to an appropriate light quantity. For this reason, the optical measurement device 3 of the modification 11 automatically changes the amount of light incident on the spectroscope 121 without changing the measurement environment even when measuring the optical characteristics of the light emitting elements 101 having different emission characteristics. It can be kept appropriate. Therefore, the optical measurement device 3 of Modification 11 can measure the optical characteristics of the light emitting elements 101 of different varieties with high accuracy under the same measurement environment.
  • the optical measurement device 3 of Modification 11 uses the light amount measurement result obtained by measuring the attenuation amount adjusted by the light amount adjuster 122 with the photodetector 105 as in the optical measurement device 3 shown in FIGS. It is not necessary to set based on.
  • the optical measurement device 3 of the modification 11 may set the attenuation amount adjusted by the light amount adjuster 122 based on the light amount measurement result included in the measurement result measured by the spectroscope 121.
  • the optical measurement device 3 of Modification 11 may have a configuration in which the optical waveguide 120, the photodetector 105, and the amplifier 113 are omitted.
  • control unit 151 shown in FIG. 23 may verify the validity of the measurement result measured by the spectroscope 121 by the following method. The verification corresponds to a part of the processing in step S20 in FIG.
  • the control unit 151 determines whether or not the light quantity measurement result measured by the spectroscope 121 is within the range of the light quantity measurement result stored in advance. Then, the control unit 151 determines that the measurement result measured by the spectroscope 121 is appropriate if the light quantity measurement result measured by the spectroscope 121 is within the range of the light quantity measurement result stored in advance. On the other hand, if the light amount measurement result measured by the spectroscope 121 is not within the range of the light amount measurement result stored in advance, the control unit 151 determines that the measurement result measured by the spectroscope 121 is not valid.
  • control unit 151 shown in FIG. 23 may obtain the attenuation adjusted by the light amount adjuster 122 by the following method.
  • the calculation of the attenuation amount corresponds to a part of the process of step S70 in FIG.
  • the control unit 151 illustrated in FIG. 23 includes a threshold of the range of the light quantity measurement result of the spectroscope 121 that can be acquired within the dynamic range in the photoelectric conversion characteristics of the spectroscope 121, and the light quantity measurement result measured by the spectroscope 121.
  • the amount of attenuation is obtained according to the difference between the two.
  • the optical measurement apparatus 3 according to the eleventh modification shown in FIG. 23 does not include the photodetector 105, but the incident light to the spectroscope 121 based on the light quantity measurement result measured by the spectroscope 121. Can be automatically adjusted to an appropriate amount of light.
  • the optical measurement device 3 of the modification 11 shown in FIG. 23 has a simpler configuration and a more reliable measurement result than the optical measurement device 3 of 11 shown in FIGS. Obtainable.
  • Other configurations of the optical measurement device 3 of Modification 11 are the same as the configurations of the optical measurement device 3 shown in FIGS. 2 to 9B.
  • the optical measuring device 3 of this embodiment includes a light receiving element 105a and a light receiving element 121a that detect light emitted from one light emitting element 101 arranged adjacent to another light emitting element 101, and the light receiving element 105a and the light receiving element.
  • 121a detects light emitted from one light emitting element 101 by supplying power to one light emitting element 101, light emitted from another light emitting element 101 by light emitted from one light emitting element 101, and Of the light emitted from one light emitting element 101, the light reflected by the other light emitting element 101 is not detected.
  • the optical measuring device 3 can measure the optical characteristics of the light emitting elements 101 with high accuracy with a simple configuration regardless of the arrangement of the light emitting elements 101.
  • the optical measurement device 3 of the present embodiment may supply power only to one light emitting element 101. With such a configuration, the optical measuring device 3 can measure the optical characteristics of the light emitting element 101 with higher accuracy.
  • the light emitted from one light emitting element 101 is detected by the light receiving element 105a and the light receiving element 121a by supplying power to the one light emitting element 101, and the one light emitting element 101 is detected.
  • the light emitted from the other light emitting element 101 by the light emitted by the light emitting element and the light reflected by the other light emitting element 101 out of the light emitted from the one light emitting element 101 are not detected by the light receiving element 105a and the light receiving element 121a.
  • an adjustment unit that adjusts a detection range that is a range of light detected by the light receiving element 105a and the light receiving element 121a may be provided. With such a configuration, the optical measuring device 3 can measure the optical characteristics of the light emitting elements 101 with high accuracy with a simple configuration regardless of the arrangement of the light emitting elements 101.
  • the optical measurement device 3 of the present embodiment includes an optical fiber 117 that receives light emitted from one light emitting element 101 and guides the incident light to the light receiving element 105a and the light receiving element 121a.
  • the detection range may be adjusted by limiting the light incident on the optical fiber 117. With such a configuration, the optical measuring device 3 can measure the optical measurement of the light emitting element 101 with a simpler configuration.
  • one light emitting element 101 and another light emitting element 101 are configured to generate a light having a specific wavelength region when power is supplied, and a wavelength of incident light.
  • a wavelength conversion unit 101c that converts the wavelength of each of the light-emitting elements, and the adjustment unit emits light emitted from one light-emitting element 101 when the light-emitting element 101 enters the wavelength conversion unit 101c of the other light-emitting element 101.
  • the light and the light reflected by the other light emitting element 101 out of the light emitted from one light emitting element 101 may be restricted from entering the optical fiber 117.
  • the optical measurement apparatus 3 can measure the optical characteristics of the light emitting element 101 including the generation unit 101b and the wavelength conversion unit 101c with high accuracy with a simple configuration regardless of the arrangement mode of the light emitting elements 101. Can do.
  • the incident port 117c of the optical fiber 117 into which the light emitted from the one light emitting element 101 enters is disposed to face the one light emitting element 101, and the adjusting unit is The light incident on the optical fiber 117 may be limited by changing the distance L between the mouth 117 c and the one light emitting element 101 based on the numerical aperture NA of the optical fiber 117.
  • the optical measurement device 3 can measure the optical characteristics of the light emitting element 101 including the generation unit 101b and the wavelength conversion unit 101c with a simpler configuration.
  • the maximum value of the incident angle of light that can be totally reflected within the optical fiber 117 is ⁇ , and the light emitting element 101 is adjacent to the other light emitting element 101 from the center. If the distance to the outer edge of the light emitting element 101 is X, the adjusting unit may change the distance L so that the distance L between the entrance and the one light emitting element 101 satisfies the relationship L ⁇ X / tan ⁇ . Good. With such a configuration, the optical measurement device 3 can measure the optical characteristics of the light emitting element 101 including the generation unit 101b and the wavelength conversion unit 101c with a simpler configuration.
  • the incident port 117c of the optical fiber 117 into which the light emitted from one light emitting element 101 enters is disposed to face the one light emitting element 101, and the adjusting unit is disposed between the incident port 117c and the one light emitting element 101.
  • the light may be disposed and configured by a shielding member that blocks light emitted from one light emitting element 101 from entering another light emitting element 101, and the light incident on the optical fiber 117 may be limited by the shielding member.
  • the optical measurement device 3 can measure the optical characteristics of the light emitting element 101 including the generation unit 101b and the wavelength conversion unit 101c with a simpler configuration.
  • An example of “one light emitting element” of the present invention is a light emitting element 101 to be measured among a plurality of light emitting elements 101 arranged.
  • An example of “another light emitting element” of the present invention is a light emitting element 101 other than a measurement target among a plurality of light emitting elements 101 arranged.
  • the light emitting element 101 to be measured is different for each measurement. That is, the “one light-emitting element” and the “other light-emitting element” of the present invention differ only in whether or not they are objects of measurement, and their configurations can be substantially the same.
  • An example of the “light receiving element” in the present invention is the light receiving element 105a and the light receiving element 121a.
  • An example of the “adjustment unit” of the present invention is a distance L adjustment mechanism and an aperture 201. Others are also described appropriately in the specification.
  • An example of the “light guide tube” of the present invention is an optical fiber 117, a bundle fiber 118, and a bundle fiber 119.
  • An example of the “generation unit” of the present invention is the generation unit 101b.
  • An example of the “wavelength converter” in the present invention is the wavelength converter 101c.
  • An example of the “incident port” of the present invention is the incident port 117c.
  • An example of the “shielding member” of the present invention is the shielding plate 206 and the reflector 207.

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  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
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PCT/JP2014/050692 2014-01-16 2014-01-16 光学測定装置 WO2015107655A1 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2015557637A JP6277206B2 (ja) 2014-01-16 2014-01-16 光学測定装置
PCT/JP2014/050692 WO2015107655A1 (ja) 2014-01-16 2014-01-16 光学測定装置
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