WO2015043025A1 - Glass processing platform and method for processing glass - Google Patents

Glass processing platform and method for processing glass Download PDF

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Publication number
WO2015043025A1
WO2015043025A1 PCT/CN2013/085623 CN2013085623W WO2015043025A1 WO 2015043025 A1 WO2015043025 A1 WO 2015043025A1 CN 2013085623 W CN2013085623 W CN 2013085623W WO 2015043025 A1 WO2015043025 A1 WO 2015043025A1
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Prior art keywords
glass
vacuum
stage
processing platform
height difference
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PCT/CN2013/085623
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French (fr)
Chinese (zh)
Inventor
赵国栋
宋涛
刘明
马涛
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深圳市华星光电技术有限公司
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Publication of WO2015043025A1 publication Critical patent/WO2015043025A1/en

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25B—TOOLS OR BENCH DEVICES NOT OTHERWISE PROVIDED FOR, FOR FASTENING, CONNECTING, DISENGAGING OR HOLDING
    • B25B11/00—Work holders not covered by any preceding group in the subclass, e.g. magnetic work holders, vacuum work holders
    • B25B11/005—Vacuum work holders

Definitions

  • the present invention relates to the field of display device manufacturing, and more particularly to a glass processing platform and a method of processing glass.
  • the adsorbable stage In the field of liquid crystal panel manufacturing, the adsorbable stage is widely used for the bearing and fixing of glass for the purpose of high-precision and stable fixing of the glass.
  • a concave suction cup or suction hole is usually provided on the surface of the rigid and flat stage, and is connected with the vacuum line inside the stage, when the glass substrate is placed on the stage.
  • the purpose of fixing the glass substrate is achieved by forming a vacuum between the glass substrate and the stage.
  • the schematic diagram of the adsorption glass of the stage is shown in Fig. 1 and Fig. 2.
  • the surface of the stage 200 is provided with a suction hole 201, and the suction hole 201 is connected to the vacuum line 202, and the glass 700 is adsorbed and fixed by the suction hole 201.
  • the liquid crystal panel glass 700 Due to the complexity of the manufacturing process of the liquid crystal panel, the liquid crystal panel glass 700 inevitably has irregular warping (as shown in FIG. 2). As the size of the glass 700 increases, the amplitude of the warpage increases. The vacuum of the stage region corresponding to the position where the glass is lifted is extremely unlikely to be established, which may cause the stage 200 to fail to adsorb the fixing glass 700.
  • the technical problem to be solved by the present invention is to provide a glass processing platform with high success rate and good reliability for adsorbing glass and a method for processing glass.
  • a glass processing platform comprising: a stage for directly loading the glass, and a plurality of first through holes are disposed thereon; a first vacuum adsorption device comprising a base, a plurality of support rods fixed at one end to the base, a vacuum suction cup disposed at the other end of the support rod, and a first vacuum line connected to the vacuum suction cup; Forming a height difference between the adsorption surface of the vacuum chuck and the carrier carrying surface, and eliminating the height difference after the vacuum chuck adsorbs the glass, so that the adsorbed surface of the glass and the loading of the stage The faces are at the same level;
  • the support rod is disposed in the first through hole and penetrates the loading platform
  • the vacuum chuck can be moved downward or elastically deformed downward when subjected to pressure by the glass.
  • the formation and elimination of the height difference is achieved by lifting and lowering the first vacuum suction device by the lifting device.
  • the formation and elimination of the height difference is achieved by lowering and lifting the stage by the lifting device.
  • the stage is provided with a slot corresponding to the shape of the vacuum chuck, and when the vacuum chuck is lowered to the carrier receiving surface, the vacuum chuck is immersed in the slot.
  • the groove can improve the sealing performance between the suction cup and the stage.
  • the first vacuum line is disposed inside the support rod.
  • This structure is even more simple.
  • a second vacuum line is disposed in the base to communicate with the first vacuum line, and the plurality of first vacuum lines are respectively connected to one of the second vacuum lines in a side by side manner.
  • This type of construction is relatively simple and avoids complicated piping settings.
  • the method further includes a second vacuum adsorption device including a plurality of second through holes disposed on the stage and a third vacuum line, the second through holes being in communication with the third vacuum line.
  • a second vacuum adsorption device including a plurality of second through holes disposed on the stage and a third vacuum line, the second through holes being in communication with the third vacuum line.
  • one of the vacuum chucks 115 is disposed between every two adjacent second through holes. This arrangement improves the adsorption uniformity and thus the adsorption success rate.
  • the second through hole and the vacuum chuck are arranged in a matrix arrangement on the stage On. This improves the adsorption uniformity and thus the adsorption success rate.
  • a method of processing glass comprising the step S of adsorbing glass on a processing platform, the step S comprising the following steps:
  • Figure 1 is a schematic view of a carrier glass of a conventional stage
  • FIG. 2 is a schematic view showing the principle and internal structure of a conventional stage adsorption glass
  • FIG. 3 is a schematic view showing the structure of a stage according to an embodiment of the present invention and a schematic view of the first vacuum adsorption device adsorbing glass;
  • FIG. 4 is a schematic view of a stage in which the adsorption glass is completed in the embodiment of the present invention.
  • FIG. 5 is a schematic view showing the structure of the stage of the second embodiment of the present invention and a schematic diagram of the method for adsorbing glass when the stage is completed
  • FIG. 6 is a flow chart of the method for adsorbing glass by the processing platform according to the first embodiment and the second embodiment of the present invention.
  • a glass processing platform provided in the present embodiment includes: a stage 200, a first vacuum adsorption device 110, and a lifting device 117; the stage 200 is configured to directly carry the glass 700, a plurality of first through holes 201 are provided; the first vacuum adsorption device 110 includes a base 111, a plurality of support rods 113 fixed at one end to the base 111, a vacuum suction cup 115 disposed at the other end of the support rod, and a first vacuum line 114 connected to the vacuum chuck 115; the lifting device 117 is configured to form a height difference between the adsorption surface of the vacuum chuck 115 and the bearing surface of the stage 200, and adsorb the glass in the vacuum chuck 115.
  • the height difference is eliminated after 700, so that the adsorbed surface of the glass and the bearing surface of the stage 200 are at the same horizontal plane; the support rod 113 is disposed in the first through hole 201, and penetrates the stage 200; The vacuum chuck 115 may move downward or elastically deform downward when subjected to pressure by the glass 700.
  • the vacuum chuck 115 can be moved downward or elastically deformed so that each vacuum chuck 115 absorbs the glass 700 as much as possible; as shown in FIG.
  • the lifting device 117 eliminates the height difference, so that the adsorbed surface of the glass 700 and the bearing surface are at the same horizontal plane. Under the suction tension of the vacuum chuck 115, the warped glass 700 is flattened and attached. The 7-plane of the stage 200 completes vacuum adsorption of the glass 700, thereby improving the adsorption success rate of the stage 200 to the glass 700, thereby improving production efficiency.
  • the lifting device 117 is disposed on the base 111 of the first vacuum adsorption device 110, and the height difference is formed and eliminated by the lifting device 117 to the first vacuum adsorption device. 110 is promoted and lowered to achieve.
  • the stage 200 is provided with a recess 205 corresponding to the shape of the vacuum chuck 115, and the vacuum chuck 115 is immersed in the recess 205 when the vacuum chuck 115 is lowered to the loading surface of the stage 200 7 .
  • the shape of the groove 205 does not necessarily have to match the shape of the vacuum chuck 115, but the corresponding groove 205 of the shape can improve the sealing performance and enhance the adsorption effect.
  • the first vacuum line 114 is disposed inside the support rod 113, thereby avoiding complicated piping design.
  • a second vacuum line 112 is disposed in the base 111 to communicate with the first vacuum line 114.
  • the plurality of first vacuum lines 114 are respectively in parallel with one of the second vacuum lines 112.
  • a second vacuum adsorption device 120 is further disposed on the stage 200, and includes a plurality of second through holes 122 disposed on the stage 200.
  • the second through hole 122 is in communication with the third vacuum line 121.
  • one vacuum chuck 115 is disposed between every two adjacent second through holes 122.
  • the second through hole 122 and the vacuum chuck 115 are disposed on the stage 200 in a matrix arrangement. This improves the adsorption uniformity and thus the adsorption success rate.
  • the lifting device 117 of the present embodiment is disposed on the stage 200, and the height difference is formed and eliminated by the lifting device 117 to the stage 200. Lower and upgrade to achieve.
  • the present invention can simultaneously provide a method for processing glass, which is different from the existing glass processing method in that: step S of adsorbing glass on the processing platform is performed.
  • the improvement includes the following steps:
  • the height difference can be formed by lifting the first vacuum adsorption device 110, according to the implementation.
  • the stage 200 can also be formed to descend.
  • the height difference is eliminated, so that the adsorbed surface of the glass 700 is at the same level as the bearing surface; likewise, the height difference can be eliminated, and the first vacuum adsorption device 110 or the stage can be respectively lowered or lifted.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

Provided are a glass processing platform and a method for processing glass. The platform comprises: a bearing platform for directly bearing glass and provided with a plurality of first through holes; a first vacuum suctioning device which comprises a base, a plurality of supporting rods with one end fixed on the base, a vacuum sucker arranged on each of the other ends of the supporting rods, and first vacuum lines connected to each vacuum sucker; a lifting device for forming a height difference between a suctioning face of the vacuum sucker and a bearing face of the bearing platform, and for removing the height difference after the vacuum sucker suctions the glass so that the suctioned face of the glass is in the same horizontal plane as the bearing face of the bearing platform. The supporting rods are arranged in the first through holes and pass through the bearing platform; and the vacuum sucker can move downward or be elastically deformed downward when subjected to a downward pressure from the glass.

Description

一种玻璃加工平台及加工玻璃的方法  Glass processing platform and method for processing glass
【技术领域】 [Technical Field]
本发明涉及显示装置制造领域， 更具体的说， 涉及一种玻璃加工平台及加 工玻璃的方法。  The present invention relates to the field of display device manufacturing, and more particularly to a glass processing platform and a method of processing glass.
【背景技术】 【Background technique】
在目前液晶面板制造领域， 出于高精度稳定固定玻璃的需要， 可吸附式载 台被广泛应用于玻璃的承载及固定。  In the field of liquid crystal panel manufacturing, the adsorbable stage is widely used for the bearing and fixing of glass for the purpose of high-precision and stable fixing of the glass.
为了保证载台的平整性和固定玻璃的稳定性， 通常在刚性、 平整的载台表 面设置内凹式吸盘或者吸孔， 并与载台内部真空管路连接， 当玻璃基板放置于 载台上时， 借由在玻璃基板与载台之间形成真空， 来达成固定玻璃基板的目的。 载台吸附玻璃原理示意图如图 1及图 2所示， 载台 200表面设置有吸孔 201 , 吸 孔 201连接真空管路 202, 通过吸孔 201对玻璃 700进行吸附固定。  In order to ensure the flatness of the stage and the stability of the fixed glass, a concave suction cup or suction hole is usually provided on the surface of the rigid and flat stage, and is connected with the vacuum line inside the stage, when the glass substrate is placed on the stage. The purpose of fixing the glass substrate is achieved by forming a vacuum between the glass substrate and the stage. The schematic diagram of the adsorption glass of the stage is shown in Fig. 1 and Fig. 2. The surface of the stage 200 is provided with a suction hole 201, and the suction hole 201 is connected to the vacuum line 202, and the glass 700 is adsorbed and fixed by the suction hole 201.
由于液晶面板制造工艺流程的复杂性， 液晶面板玻璃 700 不可避免的会出 现不规则翘曲 （如图 2所示）， 随着玻璃 700尺寸的增大， 此种翘曲的幅度亦不 断加大， 极易导致对应玻璃翘起位置的载台区域的真空无法建立， 因而会导致 载台 200吸附固定玻璃 700失败。  Due to the complexity of the manufacturing process of the liquid crystal panel, the liquid crystal panel glass 700 inevitably has irregular warping (as shown in FIG. 2). As the size of the glass 700 increases, the amplitude of the warpage increases. The vacuum of the stage region corresponding to the position where the glass is lifted is extremely unlikely to be established, which may cause the stage 200 to fail to adsorb the fixing glass 700.
在目前的载台吸附固定玻璃的过程中， 频繁发生因玻璃翘曲导致的载台真 空建立失败， 此时往往需要人员以手动按压玻璃翘曲处来重新建立载台真空， 从而严重影响设备生产效率和产品品质的稳定性。  In the process of adsorbing fixed glass on the current stage, the vacuum establishment failure of the stage caused by glass warpage frequently occurs. At this time, personnel are required to manually press the glass warpage to re-establish the vacuum of the stage, thereby seriously affecting the equipment production. Stability and stability of product quality.
【发明内容】 [Summary of the Invention]
本发明所要解决的技术问题是提供一种吸附玻璃成功率高、 可靠性好的玻 璃加工平台及加工玻璃的方法。  The technical problem to be solved by the present invention is to provide a glass processing platform with high success rate and good reliability for adsorbing glass and a method for processing glass.
本发明的目的是通过以下技术方案来实现的： 一种玻璃加工平台， 包括： 载台， 用于直接^载所述玻璃， 其上设置有多个第一通孔； 第一真空吸附装置， 其包括底座、 多个一端固定在所述底座上的支撑杆、 设置在支撑杆另一端的真空吸盘以及与所述真空吸盘连接的第一真空管路； 升降装置， 其用于使所述真空吸盘的吸附面与所述载台承载面之间形成高 度差， 并在真空吸盘吸附了玻璃之后消除所述的高度差使所述玻璃的被吸附面 与所述载台的 载面处于相同的水平面； The object of the present invention is achieved by the following technical solutions: A glass processing platform, comprising: a stage for directly loading the glass, and a plurality of first through holes are disposed thereon; a first vacuum adsorption device comprising a base, a plurality of support rods fixed at one end to the base, a vacuum suction cup disposed at the other end of the support rod, and a first vacuum line connected to the vacuum suction cup; Forming a height difference between the adsorption surface of the vacuum chuck and the carrier carrying surface, and eliminating the height difference after the vacuum chuck adsorbs the glass, so that the adsorbed surface of the glass and the loading of the stage The faces are at the same level;
所述支撑杆设置在所述第一通孔中， 贯穿所述载台；  The support rod is disposed in the first through hole and penetrates the loading platform;
所述真空吸盘在受到所述玻璃下压压力时可向下移动或发生向下弹性变 形。  The vacuum chuck can be moved downward or elastically deformed downward when subjected to pressure by the glass.
优选的， 所述高度差的形成和消除是通过所述升降装置对所述第一真空吸 附装置进行提升和降下来实现。  Preferably, the formation and elimination of the height difference is achieved by lifting and lowering the first vacuum suction device by the lifting device.
优选的， 所述高度差的形成和消除是通过所述升降装置对所述载台进行降 下和提升来实现。  Preferably, the formation and elimination of the height difference is achieved by lowering and lifting the stage by the lifting device.
优选的， 所述载台上设置有与所述真空吸盘形状相应的 槽， 当所述真空 吸盘下降到载台承载面时， 所述真空吸盘没入所述 槽中。 通过 槽可提高吸 盘与载台之间的密封性能。  Preferably, the stage is provided with a slot corresponding to the shape of the vacuum chuck, and when the vacuum chuck is lowered to the carrier receiving surface, the vacuum chuck is immersed in the slot. The groove can improve the sealing performance between the suction cup and the stage.
优选的， 所述第一真空管路设置在所述支撑杆内部。 这样的结构更加筒单。 优选的， 所述底座内设置有第二真空管路与所述第一真空管路连通， 多个 所述第一真空管路以并列方式分别与一个所述第二真空管路连通。 此种结构设 置比较筒单， 避免了复杂的管路设置。  Preferably, the first vacuum line is disposed inside the support rod. This structure is even more simple. Preferably, a second vacuum line is disposed in the base to communicate with the first vacuum line, and the plurality of first vacuum lines are respectively connected to one of the second vacuum lines in a side by side manner. This type of construction is relatively simple and avoids complicated piping settings.
优选的， 还包括第二真空吸附装置， 其包括设置在所述载台上的多个第二 通孔以及第三真空管路， 所述第二通孔与所述第三真空管路连通。 通过在载台 上设置第二通孔并与第三真空管路连通， 在玻璃被拉下后， 对玻璃进行吸附， 提高吸附效果。  Preferably, the method further includes a second vacuum adsorption device including a plurality of second through holes disposed on the stage and a third vacuum line, the second through holes being in communication with the third vacuum line. By providing a second through hole in the stage and communicating with the third vacuum line, after the glass is pulled down, the glass is adsorbed to enhance the adsorption effect.
优选的， 每两个相邻的所述第二通孔之间设置一个所述真空吸盘 115。 这样 设置可提高吸附均匀性， 进而提高吸附成功率。  Preferably, one of the vacuum chucks 115 is disposed between every two adjacent second through holes. This arrangement improves the adsorption uniformity and thus the adsorption success rate.
优选的， 所述第二通孔以及所述真空吸盘按矩阵排列方式设置在所述载台 上。 这样可提高吸附均匀性， 进而提高吸附成功率。 Preferably, the second through hole and the vacuum chuck are arranged in a matrix arrangement on the stage On. This improves the adsorption uniformity and thus the adsorption success rate.
一种加工玻璃的方法， 包括将玻璃吸附在加工平台上的步骤 S , 该步骤 S 分别包括以下步骤：  A method of processing glass, comprising the step S of adsorbing glass on a processing platform, the step S comprising the following steps:
51、 在载台承载面与第一真空吸附装置的吸附面之间形成高度差并吸附玻 璃；  51. forming a height difference between the loading surface of the stage and the adsorption surface of the first vacuum adsorption device and adsorbing the glass;
52、 消除所述高度差， 使玻璃的被吸附面与所述承载面处于相同的水平面。 本发明由于在载台上设置第一真空吸附装置， 通过升降装置在真空吸盘的 吸附面与所述载台的承载面之间形成高度差， 使真空吸盘直接承载所述玻璃， 在玻璃的压力下真空吸盘可向下移动或发生弹性变形进而使得每个真空吸盘都 尽可能的吸附住玻璃； 之后再通过所述升降装置消除所述的高度差， 使玻璃的 被吸附面与所述承载面处于相同的水平面， 在真空吸盘的吸附拉力下， 翘曲的 玻璃就会被拉平贴附在所述载台的承载面上， 完成对玻璃的真空吸附， 提高了 载台对玻璃的吸附成功率， 从而提高了生产效率及产品品质的稳定性。  52. Eliminating the height difference, so that the adsorbed surface of the glass and the bearing surface are at the same horizontal plane. In the present invention, since the first vacuum adsorption device is disposed on the stage, a height difference is formed between the adsorption surface of the vacuum suction cup and the bearing surface of the stage by the lifting device, so that the vacuum suction cup directly carries the glass, and the pressure in the glass The lower vacuum chuck can be moved downward or elastically deformed so that each vacuum chuck absorbs the glass as much as possible; then the height difference is eliminated by the lifting device to make the adsorbed surface of the glass and the bearing surface At the same level, under the suction tension of the vacuum chuck, the warped glass will be flattened and attached to the bearing surface of the stage to complete the vacuum adsorption of the glass and improve the adsorption success rate of the glass to the glass. , thereby improving production efficiency and product quality stability.
【附图说明】 [Description of the Drawings]
图 1是现有载台承载玻璃的示意图；  Figure 1 is a schematic view of a carrier glass of a conventional stage;
图 2是现有载台吸附玻璃的原理及内部结构示意图；  2 is a schematic view showing the principle and internal structure of a conventional stage adsorption glass;
图 3是本发明实施例一载台结构示意图及第一真空吸附装置吸附玻璃时的 示意图；  3 is a schematic view showing the structure of a stage according to an embodiment of the present invention and a schematic view of the first vacuum adsorption device adsorbing glass;
图 4是本发明实施例一载台完成吸附玻璃时的示意图；  4 is a schematic view of a stage in which the adsorption glass is completed in the embodiment of the present invention;
图 5是本发明实施例二载台结构示意图及载台完成吸附玻璃时的示意图， 图 6是本发明实施例一及实施例二加工平台吸附玻璃的方法流程图。  FIG. 5 is a schematic view showing the structure of the stage of the second embodiment of the present invention and a schematic diagram of the method for adsorbing glass when the stage is completed, and FIG. 6 is a flow chart of the method for adsorbing glass by the processing platform according to the first embodiment and the second embodiment of the present invention.
【具体实施方式】 【detailed description】
下面结合附图和较佳的实施例对本发明作进一步说明。  The invention will now be further described with reference to the drawings and preferred embodiments.
实施例一 如图 3所示为本实施提供的一个玻璃加工平台， 其包括： 载台 200、 第一真 空吸附装置 110、 以及升降装置 117; 所述载台 200用于直接承载所述玻璃 700, 其上设置有多个第一通孔 201; 所述第一真空吸附装置 110包括底座 111、 多个 一端固定在所述底座 111上的支撑杆 113、 设置在支撑杆另一端的真空吸盘 115 以及与所述真空吸盘 115连接的第一真空管路 114; 所述升降装置 117用于使所 述真空吸盘 115的吸附面与所述载台 200承载面之间形成高度差， 并在真空吸 盘 115吸附了玻璃 700之后消除所述的高度差使所述玻璃的被吸附面与所述载 台 200的承载面处于相同的水平面； 所述支撑杆 113设置在所述第一通孔 201 中， 贯穿所述载台 200; 所述真空吸盘 115在受到所述玻璃 700下压压力时可向 下移动或发生向下弹性变形。 Embodiment 1 As shown in FIG. 3, a glass processing platform provided in the present embodiment includes: a stage 200, a first vacuum adsorption device 110, and a lifting device 117; the stage 200 is configured to directly carry the glass 700, a plurality of first through holes 201 are provided; the first vacuum adsorption device 110 includes a base 111, a plurality of support rods 113 fixed at one end to the base 111, a vacuum suction cup 115 disposed at the other end of the support rod, and a first vacuum line 114 connected to the vacuum chuck 115; the lifting device 117 is configured to form a height difference between the adsorption surface of the vacuum chuck 115 and the bearing surface of the stage 200, and adsorb the glass in the vacuum chuck 115. The height difference is eliminated after 700, so that the adsorbed surface of the glass and the bearing surface of the stage 200 are at the same horizontal plane; the support rod 113 is disposed in the first through hole 201, and penetrates the stage 200; The vacuum chuck 115 may move downward or elastically deform downward when subjected to pressure by the glass 700.
如图 3所示， 由于在载台 200上设置第一真空吸附装置 110, 通过升降装置 117在真空吸盘 115的吸附面与所述载台 200的承载面之间形成高度差，使真空 吸盘 115直接^载所述玻璃 700,在玻璃 700的压力下真空吸盘 115可向下移动 或发生弹性变形进而使得每个真空吸盘 115都尽可能的吸附住玻璃 700; 如图 4 所示， 之后再通过所述升降装置 117消除所述的高度差， 使玻璃 700的被吸附 面与所述承载面处于相同的水平面， 在真空吸盘 115 的吸附拉力下， 翘曲的玻 璃 700就会被拉平贴附在所述载台 200的 7 载面上， 完成对玻璃 700的真空吸 附， 提高了载台 200对玻璃 700的吸附成功率， 从而提高了生产效率。  As shown in FIG. 3, since the first vacuum suction device 110 is disposed on the stage 200, a height difference is formed between the suction surface of the vacuum chuck 115 and the bearing surface of the stage 200 by the lifting device 117, so that the vacuum chuck 115 is provided. Directly carrying the glass 700, under the pressure of the glass 700, the vacuum chuck 115 can be moved downward or elastically deformed so that each vacuum chuck 115 absorbs the glass 700 as much as possible; as shown in FIG. The lifting device 117 eliminates the height difference, so that the adsorbed surface of the glass 700 and the bearing surface are at the same horizontal plane. Under the suction tension of the vacuum chuck 115, the warped glass 700 is flattened and attached. The 7-plane of the stage 200 completes vacuum adsorption of the glass 700, thereby improving the adsorption success rate of the stage 200 to the glass 700, thereby improving production efficiency.
在本实施例中， 所述的升降装置 117设置在所述第一真空吸附装置 110的底 座 111上，所述高度差的形成和消除是通过所述升降装置 117对所述第一真空吸 附装置 110进行提升和降下来实现的。  In the embodiment, the lifting device 117 is disposed on the base 111 of the first vacuum adsorption device 110, and the height difference is formed and eliminated by the lifting device 117 to the first vacuum adsorption device. 110 is promoted and lowered to achieve.
载台 200上设置有与所述真空吸盘 115形状相应的凹槽 205, 当所述真空吸 盘 115下降到载台 200 7 载面时， 所述真空吸盘 115没入所述凹槽 205中。 当 然， 凹槽 205的形状也并非一定要与所述真空吸盘 115的形状相适应， 但这种 形状相应的 槽 205, 可提高密封性能， 提高吸附效果。  The stage 200 is provided with a recess 205 corresponding to the shape of the vacuum chuck 115, and the vacuum chuck 115 is immersed in the recess 205 when the vacuum chuck 115 is lowered to the loading surface of the stage 200 7 . Of course, the shape of the groove 205 does not necessarily have to match the shape of the vacuum chuck 115, but the corresponding groove 205 of the shape can improve the sealing performance and enhance the adsorption effect.
第一真空管路 114设置在所述支撑杆 113内部，从而避免了复杂的管路设计， 底座 111内设置有第二真空管路 112与所述第一真空管路 114连通，多个所述第 一真空管路 114以并列方式分别与一个所述第二真空管路 112连通。 The first vacuum line 114 is disposed inside the support rod 113, thereby avoiding complicated piping design. A second vacuum line 112 is disposed in the base 111 to communicate with the first vacuum line 114. The plurality of first vacuum lines 114 are respectively in parallel with one of the second vacuum lines 112.
在本实施例中， 如图 3及图 4所示， 在载台 200上还设置有第二真空吸附装 置 120, 其包括设置在所述载台 200上的多个第二通孔 122, 所述第二通孔 122 与所述第三真空管路 121连通。 这样， 当玻璃 700被第一真空吸附装置 110拉 下后， 第二真空吸附装置 120也对玻璃 700进行吸附， 进而提高对玻璃 700的 吸附效果， 使得玻璃 700在载台 200上更为平整。  In this embodiment, as shown in FIG. 3 and FIG. 4, a second vacuum adsorption device 120 is further disposed on the stage 200, and includes a plurality of second through holes 122 disposed on the stage 200. The second through hole 122 is in communication with the third vacuum line 121. Thus, when the glass 700 is pulled down by the first vacuum adsorption unit 110, the second vacuum adsorption unit 120 also adsorbs the glass 700, thereby increasing the adsorption effect on the glass 700, so that the glass 700 is more flat on the stage 200.
在本实施例中， 每两个相邻的所述第二通孔 122之间设置一个所述真空吸盘 115。 所述第二通孔 122以及所述真空吸盘 115按矩阵排列方式设置在所述载台 200上。 这样可提高吸附均匀性， 进而提高吸附成功率。  In the present embodiment, one vacuum chuck 115 is disposed between every two adjacent second through holes 122. The second through hole 122 and the vacuum chuck 115 are disposed on the stage 200 in a matrix arrangement. This improves the adsorption uniformity and thus the adsorption success rate.
实施例二  Embodiment 2
如图 5所示，与实施例一不同的是，本实施例的升降装置 117设置在载台 200 上， 所述高度差的形成和消除是通过所述升降装置 117对所述载台 200进行降 下和提升来实现。  As shown in FIG. 5, unlike the first embodiment, the lifting device 117 of the present embodiment is disposed on the stage 200, and the height difference is formed and eliminated by the lifting device 117 to the stage 200. Lower and upgrade to achieve.
如图 6所示， 根据实施例一及实施例二， 本发明同时可提供一种玻璃的加工 方法， 与现有玻璃加工方法相比其不同在于： 对玻璃吸附在加工平台上的步骤 S 进行了改进， 具体包括以下步骤：  As shown in FIG. 6, according to the first embodiment and the second embodiment, the present invention can simultaneously provide a method for processing glass, which is different from the existing glass processing method in that: step S of adsorbing glass on the processing platform is performed. The improvement includes the following steps:
51、 在载台 200承载面与第一真空吸附装置 110的吸附面之间形成高度差并 吸附玻璃 700; 根据实施例一， 该高度差可以对第一真空吸附装置 110进行提升 形成， 根据实施例二可知， 也可以对载台 200进行下降形成。  51. Forming a height difference between the bearing surface of the stage 200 and the adsorption surface of the first vacuum adsorption device 110 and adsorbing the glass 700. According to the first embodiment, the height difference can be formed by lifting the first vacuum adsorption device 110, according to the implementation. As can be seen from the second example, the stage 200 can also be formed to descend.
52、 消除所述高度差， 使玻璃 700的被吸附面与所述承载面处于相同的水平 面； 同样的， 消除高度差也可以分别对第一真空吸附装置 110或载台进行下降 或提升完成。  52. The height difference is eliminated, so that the adsorbed surface of the glass 700 is at the same level as the bearing surface; likewise, the height difference can be eliminated, and the first vacuum adsorption device 110 or the stage can be respectively lowered or lifted.
以上内容是结合具体的优选实施方式对本发明所作的进一步详细说明， 不能 认定本发明的具体实施只局限于这些说明。 对于本发明所属技术领域的普通技 术人员来说， 在不脱离本发明构思的前提下， 还可以做出若干筒单推演或替换， 都应当视为属于本发明的保护范围。 The above is a further detailed description of the present invention in connection with the specific preferred embodiments, and the specific embodiments of the present invention are not limited to the description. For those skilled in the art to which the present invention pertains, it is also possible to make a few deductions or replacements without departing from the inventive concept. All should be considered as belonging to the scope of protection of the present invention.

Claims

权利要求 Rights request
1、 一种玻璃加工平台， 包括： 1. A glass processing platform, comprising:
载台， 用于直接^载所述玻璃， 其上设置有多个第一通孔；  a loading platform for directly loading the glass, wherein a plurality of first through holes are disposed thereon;
第一真空吸附装置， 其包括底座、 多个一端固定在所述底座上的支撑杆、 设置在支撑杆另一端的真空吸盘以及与所述真空吸盘连接的第一真空管路； 升降装置， 其用于使所述真空吸盘的吸附面与所述载台承载面之间形成高 度差， 并在真空吸盘吸附了玻璃之后消除所述的高度差使所述玻璃的被吸附面 与所述载台的 载面处于相同的水平面；  a first vacuum adsorption device comprising a base, a plurality of support rods fixed at one end to the base, a vacuum suction cup disposed at the other end of the support rod, and a first vacuum line connected to the vacuum suction cup; Forming a height difference between the adsorption surface of the vacuum chuck and the carrier carrying surface, and eliminating the height difference after the vacuum chuck adsorbs the glass, so that the adsorbed surface of the glass and the loading of the stage The faces are at the same level;
所述支撑杆设置在所述第一通孔中， 贯穿所述载台；  The support rod is disposed in the first through hole and penetrates the loading platform;
所述真空吸盘在受到所述玻璃下压压力时可向下移动或发生向下的弹性变 形。  The vacuum chuck can move downward or undergo a downward elastic deformation when subjected to pressure by the glass.
2、 如权利要求 1所述的玻璃加工平台， 其中， 所述高度差的形成和消除是 通过所述升降装置对所述第一真空吸附装置进行提升和降下来实现。  2. The glass processing platform according to claim 1, wherein the forming and eliminating of the height difference is achieved by lifting and lowering the first vacuum adsorption device by the lifting device.
3、 如权利要求 1所述的玻璃加工平台， 其中， 所述高度差的形成和消除是 通过所述升降装置对所述载台进行降下和提升来实现。  3. The glass processing platform according to claim 1, wherein the forming and eliminating of the height difference is achieved by lowering and lifting the stage by the lifting device.
4、 如权利要求 1所述的玻璃加工平台， 其中， 所述载台上设置有与所述真 空吸盘形状相应的 槽， 当所述真空吸盘下降到载台承载面时， 所述真空吸盘 没入所述凹槽中。  4. The glass processing platform according to claim 1, wherein the stage is provided with a groove corresponding to the shape of the vacuum chuck, and when the vacuum chuck is lowered to the carrier receiving surface, the vacuum chuck is immersed In the groove.
5、 如权利要求 1所述的玻璃加工平台， 其中， 所述第一真空管路设置在所 述支撑杆内部。  The glass processing platform according to claim 1, wherein the first vacuum line is disposed inside the support rod.
6、 如权利要求 5所述的玻璃加工平台， 其中， 所述底座内设置有第二真空 管路与所述第一真空管路连通， 多个所述第一真空管路以并列方式分别与一个 所述第二真空管路连通。  The glass processing platform according to claim 5, wherein a second vacuum line is disposed in the base to communicate with the first vacuum line, and the plurality of first vacuum lines are respectively arranged in a side by side with one The second vacuum line is in communication.
7、 如权利要求 1所述的玻璃加工平台， 其中， 还包括第二真空吸附装置， 其包括设置在所述载台上的多个第二通孔以及第三真空管路， 所述第二通孔与 所述第三真空管路连通。 7. The glass processing platform according to claim 1, further comprising a second vacuum adsorption device comprising a plurality of second through holes and a third vacuum line disposed on the stage, the second pass Hole and The third vacuum line is in communication.
8、 如权利要求 7所述的玻璃加工平台， 其中， 每两个相邻的所述第二通孔 之间设置一个所述真空吸盘。  8. The glass processing platform according to claim 7, wherein one of the vacuum chucks is disposed between every two adjacent second through holes.
9、 如权利要求 7所述的玻璃加工平台， 其中， 所述第二通孔以及所述真空 吸盘按矩阵排列方式设置在所述载台上。  9. The glass processing platform according to claim 7, wherein the second through hole and the vacuum chuck are arranged on the stage in a matrix arrangement.
10、一种加工玻璃的方法， 包括将所述玻璃吸附在加工平台上的步骤 S , 该 步骤 S分别包括以下步骤：  10. A method of processing glass comprising the step S of adsorbing said glass on a processing platform, said step S comprising the steps of:
51、 在载台承载面与第一真空吸附装置的吸附面之间形成高度差并吸附玻 璃；  51. forming a height difference between the loading surface of the stage and the adsorption surface of the first vacuum adsorption device and adsorbing the glass;
52、 消除所述高度差， 使玻璃的被吸附面与所述承载面处于相同的水平面。  52. Eliminating the height difference, so that the adsorbed surface of the glass and the bearing surface are at the same horizontal plane.
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