JP2012131622A - Plate material suction device and plate material suction method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a plate suction device which reliably sucks and separates one plate from vertically piled flexible plates by a simple structure and a simple method, and a plate suction method.SOLUTION: The plate suction device sucks the top surface of a plate positioned on the highest stage among vertically piled flexible plates through a suction structure, and then, raises it above the vertically piled plates. The suction structure has a first suction portion which sucks the center of the top surface of the plate using its tip, and a plurality of second suction portions which suck a plurality of other portions of the top surface of the plate using their tips. The tip of the second suction portion is arranged at a position higher than that of the first suction portion within a range of deflection from the suction position of the first suction portion to the suction position of the second suction portion on the plate.

Description

  The present invention adsorbs and separates the uppermost plate-like body from an integrated body in which a plurality of flexible plate-like bodies such as a semiconductor wafer, a solar cell element or a liquid crystal glass substrate are stacked. The present invention relates to a plate-like body adsorption device and a plate-like body adsorption method.

  For example, a solar cell element which is a plate-like body is supplied to a device in the next process in a state of an integrated body in which a plurality of sheets are stacked. At this time, the uppermost solar cell element in the integrated body is taken out one by one by the adsorption separation device provided in the apparatus of the next process.

  In general, the surface of a plate-like body is processed with high smoothness. For this reason, in the state where the plurality of plate-like bodies are stacked, in the plate-like bodies positioned above and below, the surfaces facing each other are in close contact with each other. In other words, the minute concavities and convexities existing on each surface are fitted or in contact with each other, and a state (hereinafter referred to as a minute cell) having a minute sealed space between the surfaces is almost the entire surface. Formed over.

  In such a state, the uppermost plate-like body (hereinafter referred to as the upper plate-like body) among the stacked body in which a plurality of plate-like bodies are stacked is the lower plate-like body. When separating and adsorbing sequentially from the body (hereinafter referred to as the lower plate-like body), the above-mentioned microcells are gradually released to the atmosphere from the peripheral part to the center part of the plate-like bodies that overlap vertically. If they are not separated as described above, a large adsorption force is generated between the upper plate-like body and the lower plate-like body.

  In order to smoothly adsorb the upper plate-like body from the lower plate-like body without generating a large suction force, the upper plate-like body is raised while the upper plate-like body is curved with respect to the lower plate-like body. By doing so, the adsorption area between the upper plate and the lower plate that are adsorbed to each other decreases from the peripheral part toward the center, and the upper plate can be easily separated from the lower plate. can do.

JP 2002-321841 A

  However, the method of bending the plate-like body and separating it from the stacked body can reliably perform the separation work of the plate-like body by increasing the amount of bending when the plate-like body is taken out, but the plate due to an increase in deformation stress. The breakage of the shape is likely to occur. On the other hand, if the amount of bending is small, the plate-like body is less likely to be damaged, but peeling (separation) from the contact state between the plate-like bodies is not sufficient, and the plate-like body is taken out with several sheets overlapping. May end up.

  Therefore, in order to take out the plate-like body one by one without damaging the plate-like body, it is essential to adjust the bending amount of the plate-like body, but this adjustment has been complicated in the conventional methods and apparatuses.

  SUMMARY OF THE INVENTION An object of the present invention is to solve the above-described problems, and a single plate-like body can be reliably obtained from an accumulation body in which a plurality of flexible plate-like bodies are stacked by a simple configuration and method. It is an object of the present invention to provide a plate-like body adsorption device and a plate-like body adsorption method which can be adsorbed and separated.

  The plate-like body adsorbing device according to one aspect of the present invention is configured to adsorb the upper surface of the plate-like body located on the uppermost side of the stacked body in which a plurality of flexible plate-like bodies are stacked, by an adsorption structure, A plate-like body adsorbing device for pulling up the plate-like body from the integrated body, wherein the adsorbing structure includes a first adsorbing portion that adsorbs a central portion of the upper surface of the plate-like body at a tip, and a plate-like body. A plurality of second adsorbing portions for adsorbing the other plural portions of the upper surface at the tip, and the tip of the second adsorbing portion is located on the plate-like body from the adsorption portion of the first adsorbing portion. It is characterized by being arranged at a position higher than the tip of the first suction part within the range of the amount of deflection to the suction part of the two suction parts.

  Further, in the plate-like body adsorption method according to one aspect of the present invention, the upper surface of the plate-like body located on the uppermost side of the stacked body obtained by stacking a plurality of flexible plate-like bodies is the plate-like body. A plate-like body adsorption method for adsorbing by the adsorption structure of the adsorption device and pulling up the plate-like body from the integrated body, wherein the plate-like body is moved by a tip of the first adsorption portion of the plate-like body adsorption device. A first suction step for sucking the central portion of the upper surface, and the second suction portion of the plate-like body suction device to suck the plate up to a position higher than the suction site in the first suction step of the plate-like body. And a second adsorption step of adsorbing the other part of the upper surface of the plate-like body at the tip of the second adsorption part.

  According to the plate-shaped body adsorption device and the plate-shaped body adsorption method having the above-described configuration, a part of the plate-shaped body located at the top of the stack is curved by a very simple configuration and method, and the plate-shaped body is obtained. Can be efficiently separated from the assembly without causing damage.

It is a perspective view explaining typically one embodiment of some plate-like object adsorption devices concerning one form of the present invention. It is the perspective view seen from the downward direction of the raising / lowering board which comprises the plate-shaped object adsorption | suction apparatus shown in FIG. It is sectional drawing which illustrates typically a part of adsorption structure which comprises the plate-shaped object adsorption | suction apparatus which concerns on one form of this invention. It is sectional drawing which illustrates typically a part of adsorption structure which comprises the plate-shaped object adsorption | suction apparatus which concerns on one form of this invention. (A) And (b) is a fragmentary sectional view which illustrates typically the adsorption | suction means which comprises the plate-shaped object adsorption | suction apparatus which concerns on one form of this invention, respectively. (A) And (b) is a fragmentary sectional view which illustrates typically the adsorption | suction means which comprises the plate-shaped object adsorption | suction apparatus which concerns on one form of this invention, respectively. It is a side view which illustrates typically a part of plate-shaped object adsorption | suction apparatus which concerns on one form of this invention. (A)-(d) is a side view which illustrates typically the process of the plate-shaped object adsorption | suction method which concerns on one form of this invention, respectively.

  Hereinafter, an embodiment of a plate-like body adsorbing device and a plate-like body adsorbing method according to the present invention will be described in detail with reference to the drawings schematically shown.

<Plate-like body adsorption device>
The plate-like body adsorbing device according to the present embodiment is a plate-like material that is located on the top of an integrated body in which a plurality of flexible plate-like bodies such as a semiconductor wafer, a solar cell element, or a liquid crystal glass substrate are stacked. In this device, the upper surface of the body is adsorbed by the first adsorbing portion and the second adsorbing portion, and the plate-like body is separated from the integrated body. In this embodiment, a solar cell element will be described as an example of a plate-like body.

  First, it demonstrates using FIGS. 1-4. In FIG. 1, 7 a indicates the upper surface of the lifting plate 7, and 7 b in FIG. 2 indicates the lower surface of the lifting plate 7. 3 and 4 are enlarged sectional views showing a part of the adsorption structure including the first adsorption part and the second adsorption part, respectively.

  The plate-like body separating device S includes a first suction cylinder 3 having a first suction pad 1 as a first suction portion for sucking the central portion of the upper surface of the solar cell element 20 that is a plate-like body, The second suction cylinder 4 provided with a second suction pad 2 that is arranged around the first suction cylinder 3 and is a plurality of second suction parts that can suck other parts of the upper surface of the solar cell element 20. have.

  Here, the first adsorption cylinder 3 and the second adsorption cylinder 4 are, for example, cylindrical shapes made of aluminum or an alloy thereof. The outer diameter of the cylinder is about 8 mm, the inner diameter is about 6 mm, and the length is about 60 mm. Each of these is held by a lifting plate 7 made of, for example, aluminum or an alloy thereof, for example, a square plate having a thickness of about 2 to 3 mm and a size of about 160 mm × 160 mm or a rectangular plate having a size of about 60 mm × 160 mm. ing.

  The first adsorption cylinder 3 and the second adsorption cylinder 4 are respectively inserted into through holes 7c provided in the elevating plate 7, and each of the first adsorption cylinder 3 and the second adsorption cylinder 4 slides in the through hole 7c. It is possible to move.

  As shown in FIGS. 3 and 4, the first suction pad 1 and the second suction pad 2 are attached to the outer peripheral portions of the lower ends of the first suction cylinder 3 and the second suction cylinder 4. At the upper part of each of the first suction pad 1 and the second suction pad 2, there are a mounting portion 1a and a mounting portion 2a having a width (for example, a cylindrical shape having an outer diameter of about 10 mm) wider than the inner diameter of the through hole 7c. Below that is a frustoconical divergent section. The end spread portion is made of an elastic material having excellent wear resistance, such as a bellows-like nitrile rubber.

  Further, ring-shaped first stopper 5 and second stopper 6 made of aluminum or an alloy thereof and having an outer diameter of about 25 mm are attached to the upper ends of the first suction cylinder 3 and the second suction cylinder 4, respectively. .

  With this configuration, the first suction cylinder 3 and the second suction cylinder 4 are prohibited from excessive downward movement by the first stopper 5 and the second stopper 6. On the other hand, each of the first suction cylinder 3 and the second suction cylinder 4 is prohibited by the first suction pad 1 and the second suction pad 2 from being excessively moved upward.

  In the present embodiment, one first suction pad 1 is provided in the central portion of the lifting plate 7 in a plan view, four second suction pads 2 are provided around the first suction pad 1, and the solar cell element 20. It arrange | positions at equal intervals mutually along the peripheral part. And in the raising / lowering plate 7 provided with the five through-holes 7c which penetrate both both main surfaces, each of the 1st intake cylinder 3 and the four 2nd intake cylinders 4 can move up and down to each of the through-holes 7c. Held in a state. It should be noted that the number of through holes 7c penetrating both main surfaces of the elevating plate 7 may be three or more, and the first intake cylinder 3 and the plurality of second intake cylinders 4 are vertically arranged in each of these through holes 7c. It may be held in a movable state.

  The first adsorption cylinder 3 has an urging means for urging the first intake cylinder 3 toward the lower side of the lifting plate 7. In this embodiment, a compression spring 8 interposed between the lower surface of the elevating plate 7 and the attachment portion 1a to the tip of the first suction cylinder 3 in the first suction pad 1 is used as this biasing means. The pressing force of the compression spring 8 is selected so as to be less than the limit load of the breaking strength of the solar cell element 20.

  The urging means is not limited to the compression spring 8, and any means may be used as long as it urges the first intake cylinder 3 toward the lower side of the elevating plate 7. For example, a known hydraulic mechanism is appropriately used. You may have done.

  Moreover, the 1st suction pad 1 and the 2nd suction pad 2 should just be a thing which can adsorb | suck a plate-shaped object, are not limited to said shape, material, size, etc., It can change suitably. Moreover, the 1st adsorption | suction cylinder 3 and the 2nd adsorption | suction cylinder 4 should just be cylindrical, and are not limited to a cylindrical shape, The size, material, etc. are not limited to the above, It can change suitably.

  Further, the first suction pad 1 desirably sucks the central portion of the solar cell element 20 in order to realize stable suction. Further, the number of the second suction pads 2 may be plural, but the tips of the plurality of second suction pads 2 may be arranged at equal intervals along the peripheral edge of the solar cell element 20. . Or the front-end | tip of several 2nd suction pad 2 is good to be arrange | positioned on the periphery at the time of centering on the front-end | tip part of the 1st suction pad 1. FIG. By these aspects, since the solar cell element 20 can be adsorbed with a good balance, the solar cell element 20 can be adsorbed more stably.

  Next, modified examples of the first suction cylinder 3 and the second suction cylinder 4 and the first stopper 5 and the second stopper 6 will be described. As shown in FIGS. 5A and 5B, the first male screw 9 and the second male screw 10 are provided on the upper side of the first adsorption cylinder 3 and the second adsorption cylinder 4. With respect to the first male screw 9 and the second male screw 10, the inner surfaces of the first stopper 5 and the second stopper 6 are a first female screw and a second female screw (not shown). By the coupling, the first adsorption cylinder 3 and the second adsorption cylinder 4 can be fixed at an arbitrary vertical position with respect to the lifting plate 7. With this configuration, the difference in the vertical position of the first suction cylinder 3 and the second suction cylinder 4 (first suction pad 1 and first suction pad 1 in FIG. 2 The height difference h) between the vertical positions of the tips of the suction pads 2 can be adjusted.

  Further, as shown in FIGS. 6A and 6B, the first screw hole 5 a and the second screw hole penetrating inside the stoppers are respectively formed on the outer peripheral portions of the first stopper 5 and the second stopper 6. 6a is provided. Then, the first set screw 11 and the second set screw 12 for fixing reach the outer peripheral surfaces of the first adsorption cylinder 3 and the second adsorption cylinder 4 in the first screw hole 5a and the second screw hole 6a, respectively. It is screwed to do. Also with this configuration, the difference in the vertical position of the first suction cylinder 3 and the second suction cylinder 4 with respect to the lifting plate 7 (the height of the vertical positions of the tips of the first suction pad 1 and the second suction pad 2 in FIG. The difference h) can be adjusted. The first set screw 11 and the second set screw 12 are made of the same material as the first stopper 5 and the second stopper 6.

  Since the first suction pad 1 and the second suction pad 2 are portions in contact with the upper surface of the solar cell element 20, in order to reduce the impact when contacting the upper surface of the solar cell element 20, the nitrile rubber described above is used. In addition, for example, silicon rubber or fluororubber which is an elastic body and excellent in wear resistance is preferably used. The shape of the first suction pad 1 and the second suction pad 2 is such that the contact surface with the upper surface of the solar cell element 20 is larger than the cross sectional areas of the first suction cylinder 3 and the second suction cylinder 4. The cross-sectional area is preferably gradually increased from the connection surface between the first suction cylinder 3 and the second suction cylinder 4 toward the contact surface with the plate-like body. It is good to be done. For this reason, for example, a truncated cone shape or a truncated pyramid shape is formed. For example, as shown in FIGS. 3 and 4, the cross-sectional area is constant from the connection surface of the first suction cylinder 3 and the second suction cylinder 4 to a predetermined cross-sectional position (attachment portion 1 a and attachment portion 2 a), The cross-sectional area increases from the cross-sectional position toward the contact surface of the plate-like body.

  Since each of the first adsorption cylinder 3 and the second adsorption cylinder 4 sucks air with a vacuum pump (not shown), the solar cell element 20 is adsorbed by the first adsorption pad 1 and the second adsorption pad 2. can do.

  The lifting plate 7 is moved in the XY direction by a moving mechanism (XY robot) (not shown), and is moved in the vertical direction (Z direction) by a lifting mechanism (not shown). This elevating mechanism is provided with, for example, an air cylinder or the like, and is fixed to a piston of the air cylinder with a metal fitting or the like so as to have a stroke of about 30 mm in the height direction. The air cylinder and the lifting plate 7 constitute one unit and constitute an arm of an XY robot. The movement of the elevating plate 7 is realized by computer control of the movement of the air cylinder in the vertical (Z) direction and the movement in the XY direction by the XY robot.

  As described above, the adsorption structure that adsorbs the solar cell element of the present embodiment has the first adsorption pad 1 that is the first adsorption part that adsorbs the central portion of the upper surface of the solar cell element 20 that is a plate-like body at the tip, and the sun. A plurality of second suction pads 2 for adsorbing the other plurality of portions on the upper surface of the battery element at the tip, the tip of the second suction pad 2 from the suction portion of the first suction pad 1 in the solar cell element Since the second suction pad 2 is disposed at a position higher than the tip of the first suction pad 1 within the range of the amount of deflection to the suction site, a plurality of flexible solar cell elements 20 are provided with a simple configuration. One solar cell element 20 can be reliably adsorbed and separated from the stacked body without damage.

<Plate-like body adsorption method>
Next, the plate-like body adsorption method of this embodiment will be described.

  Below, the upper surface of the solar cell element 20 located on the uppermost side of the stacked body in which a plurality of solar cell elements 20 are stacked is adsorbed by the adsorption structure of the plate-like adsorbing device S, and the solar cell element 20 is A plate-like body adsorption method for pulling up from the accumulation body will be described with reference to FIG.

  As shown in FIG. 8A, the lifting plate 7 that has been stopped at a predetermined position by a moving mechanism (not shown) is located above the stack 30 in which a plurality of solar cell elements 20 placed on the stand 40 are stacked. Moved to position. At this time, the 1st suction pad 1 and the 2nd suction pad 2, and the 1st suction cylinder 3 and the 2nd suction cylinder 4 are in the state where it hung under the raising / lowering board 7 with these dead weights.

  Next, the elevating plate 7 is lowered by an elevating mechanism (not shown) that moves the elevating plate 7 up and down. The first suction pad 1 and the second suction pad 2 are lowered together with the lifting plate 7, and first the first suction pad 1 comes into contact with the upper surface of the solar cell element 20 located on the uppermost side of the integrated body 30. Thereafter, as shown in FIG. 8B, the elevating plate 7 is further lowered, and the elevating plate 7 is stopped. The stop timing is determined by a computer that controls the entire apparatus.

  When the lowering of the elevating plate 7 stops, the air inside the first suction pad 1 and the second suction pad is sucked, and one of the solar cell elements 20 located on the top of the integrated body 30 is vacuum-sucked. (First adsorption step). At this time, the adsorption of the solar cell element 20 by the air suction may be the adsorption of only the first suction pad 1 or the solar cell element 20 is simultaneously sucked and sucked by the first suction pad 1 and the second suction pad 2. You may make it do.

Thereafter, when the elevating plate 7 is lifted while being vacuum-sucked, as shown in FIG. 8C, first, the tip of the second suction pad 2 that has sucked the peripheral edge of the solar cell element 20 moves the peripheral edge of the solar cell element 20. lift. At this time, a part of the solar cell element 20 is turned up from the solar cell element positioned second in the integrated body 30. That is, the peripheral portion on the upper surface of the solar cell element 20 is the second
It continues to be sucked by the suction pad 2, and the solar cell element 20 is bent to a position higher than the suction site in the first suction step of the absorbed solar cell element 20, and the first suction pad 1 at the tip of the second suction pad 2 By adsorbing other parts other than the central portion of the upper surface of the solar cell element 20 adsorbed in the above, the peripheral portion of the solar cell element 20 is from the solar cell element located on the second surface from the top of the integrated body 30. Turn up (second adsorption process).

  Here, the central portion on the upper surface of the solar cell element 20 does not rise until the lifting plate 7 comes into contact with the first stopper 5 due to the urging pressure of the compression spring 8 below the lifting plate 7. Thereby, the solar cell element 20 located on the top of the integrated body is curved in a concave shape, and is separated from the solar cell element located below the peripheral portion of the solar cell element 20.

  Thereafter, as shown in FIG. 8 (d), the elevating plate 7 is further raised, so that the solar cell element 20 is separated from the solar cell element located below the central portion of the solar cell element 20, and is separated from the integrated body 30. The solar cell element 20 is completely separated.

  In this way, it is possible to suppress the occurrence of a mistake in taking two solar electronic elements without causing a negative pressure between the solar battery element 20 and the solar battery element located therebelow.

  As described above, the plate-like body adsorption method of the present embodiment includes the first adsorption step of adsorbing the central portion of the upper surface of the solar cell element 20 with the tip of the first adsorption pad 1 of the plate-like object adsorption device S, and the plate-like object adsorption. The solar cell element 20 is sucked by the second suction pad 2 of the device S, bent to a position higher than the suction site of the solar cell element 20 in the first suction step, and the solar cell element is formed at the tip of the second suction pad 2. Including a second adsorption step for adsorbing other parts of the upper surface of the 20, by a simple method, one solar cell element 20 can be reliably obtained from an integrated body in which a plurality of flexible solar cell elements 20 are stacked. It can be separated without being damaged by adsorption.

1: First suction pad (first suction part)
2: Second suction pad (second suction part)
3: 1st adsorption cylinder 4: 2nd adsorption cylinder 5: 1st stopper 6: 2nd stopper 7: Elevating plate 8: Compression spring (biasing means)
9: First male screw 10: Second male screw 11: First set screw 12: Second set screw 20: Solar cell element (plate-like body)
30: Stacked body 40: Standby stand S: Plate-shaped body adsorption device

Claims (6)

Adsorbing the upper surface of the plate-like body located on the top of the stack of stacked flexible plate-like bodies by an adsorption structure, and pulling the plate-like body up from the stack A device,
The adsorbing structure includes a first adsorbing portion that adsorbs a central portion of the upper surface of the plate-like body at a tip, and a plurality of second adsorbing portions that adsorb other portions of the upper surface of the plate-like body at a tip. And the tip of the second suction part is within the range of the amount of deflection from the suction part of the first suction part to the suction part of the second suction part in the plate-like body. A plate-like body adsorbing device, wherein the plate-like body adsorbing device is arranged at a position higher than the tip of the portion.   The plate-like body adsorbing device according to claim 1, wherein tips of the plurality of second suction portions are arranged at equal intervals along a peripheral edge of the plate-like body.   The adsorption structure includes a first intake cylinder having the first adsorption part at a lower end, a plurality of second intake cylinders having the second adsorption part at a lower end, and three or more penetrations penetrating both main surfaces. And a lifting plate having a hole, wherein each of the first intake cylinder and the plurality of second intake cylinders is held in a state in which the first intake cylinder and the plurality of second intake cylinders are movable up and down. The plate-like body adsorption device according to claim 1 or 2.   The plate-like body adsorbing device according to claim 3, wherein the adsorbing structure further includes urging means that urges the first intake cylinder toward the lower side of the elevating plate.   Each of the said 1st adsorption | suction part and the said 2nd adsorption | suction part has a site | part wider than the diameter of the said through-hole, The plate-shaped object adsorption | suction apparatus of Claim 3 or 4 characterized by the above-mentioned. The upper surface of the plate-like body located on the uppermost side of the stacked body in which a plurality of flexible plate-like bodies are stacked is adsorbed by the adsorption structure of the plate-like object adsorption device according to claim 1, A plate-like body adsorption method for pulling up a plate-like body from the integrated body,
A first adsorption step of adsorbing a central portion of the upper surface of the plate-like body by a tip of the first adsorption portion of the plate-like object adsorption device;
The tip of the second adsorbing portion is sucked by the second adsorbing portion of the plate adsorbing device, bent to a position higher than the adsorption portion of the plate-like adsorbing portion in the first adsorption step, And a second adsorption step of adsorbing the other portion of the upper surface of the plate-like body.

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