CN105093588B - A kind of supporting pin and absorption board - Google Patents
A kind of supporting pin and absorption board Download PDFInfo
- Publication number
- CN105093588B CN105093588B CN201510524479.3A CN201510524479A CN105093588B CN 105093588 B CN105093588 B CN 105093588B CN 201510524479 A CN201510524479 A CN 201510524479A CN 105093588 B CN105093588 B CN 105093588B
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- CN
- China
- Prior art keywords
- supporting pin
- substrate
- main body
- hollow
- support column
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1306—Details
- G02F1/1309—Repairing; Testing
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/133302—Rigid substrates, e.g. inorganic substrates
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- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Conveying And Assembling Of Building Elements In Situ (AREA)
Abstract
The present invention discloses a kind of supporting pin and absorption board, is related to display fabrication techniques field, to solve the problems, such as that absorption of the supporting pin to substrate is abnormal caused by the adsorption orifice abrasion of supporting pin.The supporting pin includes：Supporting pin main body with hollow-core construction；Substrate and supporting pin body contact and separated support column can be made by being equipped with hollow-core construction.The absorption board includes the supporting pin that elevator, link and some above-mentioned technical proposals are put forward；Wherein, link includes the lifter plate being connected with elevator, and the guide plate above lifter plate, and the support column of supporting pin is installed on lifter plate, the supporting pin main body of supporting pin is installed on guide plate, and guide plate is equipped with and the one-to-one pilot hole of each support column.Supporting pin provided by the invention is used in the detection device of substrate.
Description
Technical field
The present invention relates to display fabrication techniques field, more particularly to a kind of supporting pin and absorption board.
Background technology
With the continuous development of Display Technique, requirement of the people to the display effect of display is also higher and higher, and shows
The display effect of device is determined by substrate, therefore, by substrate mounting into before display, it is necessary to substrate
Every test such as fragment detection and printing opacity detection is carried out, to filter out satisfactory substrate, for assembled display.And in base
, it is necessary to place a substrate in the supporting pin of detection device, so that substrate is contacted with the adsorption orifice in supporting pin before plate detection；So
Afterwards by the position of mechanical alignment operation calibration substrate, substrate is set to be placed in the test position of detection device；Next, utilize
The adsorption orifice sorbing substrate of supporting pin, to facilitate the quality to substrate to be detected and prevent substrate from dropping.
But during above-mentioned mechanical alignment operation, since the position of substrate needs constantly adjustment, make substrate and
Phase mutual friction is produced between adsorption orifice in supporting pin, causes the adsorption orifice of supporting pin easy to wear, so as to cause supporting pin pair
The absorption of substrate is abnormal, and detected substrate easily slides from supporting pin, damaged substrate.
The content of the invention
It is an object of the invention to provide a kind of supporting pin and absorption board, the adsorption orifice for solving because of supporting pin is worn
Caused by absorption of the supporting pin to substrate it is abnormal the problem of.
To achieve these goals, the present invention provides following technical solution：
A kind of supporting pin, including the supporting pin main body with hollow-core construction；Substrate can be made by being equipped with the hollow-core construction
With the supporting pin body contact and separated support column.
Present invention also offers one kind to adsorb board, including described in elevator, link and some above-mentioned technical proposals
Supporting pin；Wherein, the link includes the lifter plate being connected with the elevator, and leading above the lifter plate
To plate, the support column of the supporting pin is installed on the lifter plate, and the supporting pin main body of the supporting pin is installed on described lead
To on plate, and the guide plate is equipped with and each one-to-one pilot hole of support column.
Compared with prior art, the beneficial effects of the present invention are：
In supporting pin provided by the invention, support column can in the hollow-core construction that supporting pin main body is carried on move down
It is dynamic, substrate is in contact and is separated with the adsorption orifice of supporting pin main body；When needing to carry out machinery contraposition to substrate, support column
Top can stretch out supporting pin main body, the top of support column is in contact with substrate, and further make substrate and supporting pin main body
Adsorption orifice disengage, so when carrying out mechanical alignment operation to substrate, just can effectively avoid substrate and supporting pin master
The friction of the adsorption orifice of body, prevents that substrate wears the adsorption orifice of supporting pin main body during machinery aligns, and makes supporting pin master
The adsorption function of body is normal, ensure that during detection, and substrate can closely be adsorbed the absorption in supporting pin main body
On mouth, avoid when substrate is needed and tilted according to detection, substrate slides from the adsorption orifice of supporting pin main body and damages base
Plate.
Brief description of the drawings
Attached drawing described herein is used for providing a further understanding of the present invention, forms the part of the present invention, this hair
Bright schematic description and description is used to explain the present invention, does not form inappropriate limitation of the present invention.In the accompanying drawings：
Fig. 1 is the structure chart of supporting pin provided in an embodiment of the present invention；
Fig. 2 is side view of the absorption board provided in an embodiment of the present invention when carrying out machinery contraposition to substrate；
Fig. 3 is side view of the absorption board provided in an embodiment of the present invention when being detected to substrate；
Fig. 4 is the top view of absorption board provided in an embodiment of the present invention.
Reference numeral：
1- supporting pin main bodys, 2- support columns,
The adsorption orifice of 3- supporting pin main bodys, 4- balls,
The hollow-core construction of 5- barrels, 6- substrates,
7- elevators, 8- vacuum suction pipelines,
9- lifter plates, 10- guide plates,
20- pilot holes.
Embodiment
In the description of the present invention, it is to be understood that term " " center ", " on ", " under ", "front", "rear", " left side ",
The orientation or position relationship of the instruction such as " right side ", " vertical ", " level ", " top ", " bottom ", " interior ", " outer " are based on shown in the drawings
Orientation or position relationship, are for only for ease of the description present invention and simplify description, rather than instruction or imply signified device or
Element must have specific orientation, with specific azimuth configuration and operation, therefore be not considered as limiting the invention.
In order to further illustrate supporting pin provided in an embodiment of the present invention and absorption board, with reference to Figure of description into
Row is described in detail.
Please refer to Fig.1 and Fig. 2, supporting pin provided in an embodiment of the present invention include：Supporting pin main body with hollow-core construction
1；The support column 2 that substrate 6 can be made to be contacting and separating with supporting pin main body 1 is equipped with hollow-core construction.
During work, first substrate 6 is placed in supporting pin main body 1, mechanical contraposition then is carried out to substrate 6；Aligned in machinery
During, supporting pin main body 1 is stretched out on the top of support column 2, the top of support column 2 is in contact with substrate 6, and further make
Substrate 6 and the adsorption orifice 3 of supporting pin main body disengage, and then carry out mechanical contraposition to substrate 6；, will after the completion of machinery contraposition
The top of support column 2 falls below the height of supporting pin main body 1, substrate 6 is fallen on the adsorption orifice 3 of supporting pin main body.
When being detected to substrate 6, using 3 sorbing substrate 6 of adsorption orifice of supporting pin main body 1, the quality of substrate 6 is examined with facilitating
Survey and prevent substrate 6 from dropping.
The course of work of the supporting pin provided by above-described embodiment, support column 2 can be in 1 band of supporting pin main body
Moved up and down in some hollow-core constructions, substrate 6 is in contact and is separated with the adsorption orifice 3 of supporting pin main body；When needing to substrate 6
When carrying out machinery contraposition, the top of support column 2 can stretch out supporting pin main body 1, the top of support column 2 is in contact with substrate 6,
And further disengage substrate 6 and the adsorption orifice 3 of supporting pin main body, so when carrying out mechanical alignment operation to substrate 6,
The friction of substrate 6 and the adsorption orifice 3 of supporting pin main body just can be effectively avoided, prevents that substrate 6 is to branch during machinery aligns
The abrasion of the adsorption orifice 3 of support pin main body, makes the adsorption function of supporting pin main body 1 normal, ensure that during detection, substrate
6 can closely be adsorbed on the adsorption orifice 3 of supporting pin main body, be avoided when substrate 6 is needed and tilted according to detection, base
Plate 6 slides and damaged substrate 6 from the adsorption orifice 3 of supporting pin main body.
In the above-described embodiments, during mechanical contraposition is carried out, the top of support column 2 is contacted with substrate 6.In order to anti-
Only substrate 6 is supported the top scuffing of column 2, and the top of support column 2 is flat surface, such as plane or sphere.Referring to Fig. 1,
In a kind of preferred embodiment, the top of support column 2 is equipped with ball 4；During mechanical contraposition is carried out, when support column 2
When supporting pin main body 1 is stretched out on top, the ball 4 on 2 top of support column can just be in contact with substrate 6, and realize ball 4 to substrate 6
Support.And when machinery aligns, since ball 4 is in contact on the top of support column 2 with substrate 6, and ball 4 can be arbitrarily square
To rotation, therefore, when adjusting the position of substrate 6, ball 4 can be rotated according to the adjusting direction to substrate 6, reduce machinery
Friction of the support column 2 to substrate 6 during contraposition, support column 2 scratches substrate 6 during being aligned so as to avoid machinery.
The hollow-core construction of above-mentioned supporting pin main body 1 can be circumferentially spliced by multiple platy structures, it is of course also possible to adopt
In other ways, for example, please continue to refer to Fig. 1, the structure of the supporting pin main body 1 in above-described embodiment is tubular structure, tubular
The hollow cavity of structure is the hollow-core construction of supporting pin main body 1.Illustrate the worked of supporting pin by taking tubular structure as an example below
Journey.
When supporting pin main body 1 is tubular structure, support column 2 is located in the hollow cavity of tubular structure, and support column 2 can
Moved up and down in the hollow cavity of tubular structure；In addition, the barrel of tubular structure can be solid construction or hollow-core construction.
When the barrel of tubular structure is solid construction, positioned at tubular structure upper end adsorption orifice by hollow cavity inner surface
Surround, i.e., adsorption orifice is located at the center of tubular structure；Using the barrel of this solid construction, vacuum extractor and tubular structure
Hollow cavity connection, and the hollow cavity of tubular structure is vacuumized, realizes and adsorb substrate 6 at the center of tubular structure；When
When the barrel of tubular structure is hollow-core construction, the adsorption orifice positioned at tubular structure upper end is surrounded by the inner wall of barrel with outer wall, i.e.,
Adsorption orifice is located at the periphery of tubular structure；Using the barrel of this hollow-core construction, the hollow-core construction 5 of vacuum extractor and barrel connects
It is logical, and the hollow-core construction 5 of barrel is vacuumized, realize and adsorb substrate 6 on the periphery of tubular structure.
Compared to the supporting pin using solid construction barrel, using the supporting pin of hollow-core construction barrel, by supporting pin main body
Adsorption orifice 3 be located at the periphery of supporting pin main body 1, make the supporting pin main body 1 of supporting pin to the adsorption range bigger of substrate 6, it is right
The adsorption capacity that substrate 6 applies is more uniform, is conducive to stronger sorbing substrate 6.
It should be noted that when the direction of arrow in Fig. 1 vacuumizes the hollow-core construction 5 of barrel for vacuum extractor, cylinder
The flow direction of gas in the hollow-core construction 5 of wall.
When supporting pin main body 1 in above-described embodiment is arranged to tubular structure, barrel preferably includes flare and cylinder
Portion, and the portlet of flare is connected with one end of cylindrical portion, and the large port of the flare of barrel is connected with substrate 6 upward
Touch, and the large port of flare can realize the absorption to substrate 6；Compared to the supporting pin main body that supporting pin uses straight tube structure
1, during the supporting pin main body 1 that supporting pin is made of flare and cylindrical portion using this, the adsorption orifice 3 of supporting pin main body is to substrate
6 adsorption area bigger, the adsorption orifice 3 of supporting pin main body is stronger to the adsorption capacity of substrate 6, can be stronger by substrate 6
Absorption is on the adsorption orifice 3 of supporting pin main body.
Refer to Fig. 2 and Fig. 3, the embodiment of the present invention additionally provides a kind of absorption board, including elevator 7, link and
The supporting pin that some above-mentioned technical proposals are carried；Wherein, link includes the lifter plate 9 being connected with elevator 7, and positioned at liter
The guide plate 10 of the top of plate 9 drops, and the support column 2 of supporting pin is installed on lifter plate 9, and the supporting pin main body 1 of supporting pin is installed on
On guide plate 10, and guide plate 10 is equipped with and the one-to-one pilot hole 20 of each support column 2.
Referring to Fig. 2, when carrying out machinery contraposition to substrate 6, elevator 7 drives lifter plate 9 to move up, and then drives
Some support columns 2 on lifter plate 9 move up, and the top of some support columns 2 is passed through corresponding some pilot holes
20, some supporting pin main bodys 1 being installed on guide plate 10 are stretched out, the top of some support columns 2 is in contact with substrate 6, and
Further disengage substrate 6 and the adsorption orifice 3 of some supporting pin main bodys, mechanical contraposition then is carried out to substrate 6；Refer to
Fig. 3, after the completion of machinery contraposition, elevator 7 drives lifter plate 9 to move down, and then drives several on lifter plate 9
Dagger 2 moves down, and the top of some support columns 2 is fallen below the height of corresponding some supporting pin main bodys 1, makes substrate
6 fall in some supporting pin main bodys 1.During detection, the adsorption orifice 3 while sorbing substrate 6 of some supporting pin main bodys are follow-up to facilitate
Every detection is carried out to substrate 6.
Absorption board provided in an embodiment of the present invention, employs the supporting pin that above-mentioned technical proposal is put forward, to substrate 6 into
During row machinery contraposition, the friction between substrate 6 and the adsorption orifice of supporting pin main body 3 can be avoided, so as to effectively prevent substrate 6
Abrasion to the adsorption orifice 3 of supporting pin main body, and scuffing of the adsorption orifice 3 to substrate 6 of supporting pin main body, both ensure that supporting pin
The adsorption function of main body 1, and the quality of substrate 6 to be detected will not be caused to damage.In addition, elevator 7 connects with lifter plate 9
Connect, and then control some support columns 2 being installed on lifter plate 9 to move, facilitate and correspondence is stretched out on the top of some support columns 2
Some supporting pin main bodys 1 operation；In addition, the height that elevator 7 can also adjust some support columns 2 according to being actually needed,
And the translational speed of some support columns 2 is controlled, preferably to realize the mechanical alignment operation to substrate 6, and every detection behaviour
Make；Moreover, absorption board provided in an embodiment of the present invention includes some supporting pins, if can be placed on large-sized substrate 6
In dry supporting pin, to realize mechanical alignment operation of the absorption board to large-size substrate 6.
Absorption board provided in an embodiment of the present invention, it is preferred that the supporting pin main body 1 of some supporting pins is uniformly installed on and leads
To on plate 10.Since some supporting pin main bodys 1 are uniformly to be installed on guide plate 10；Therefore, when the large-sized substrate 6 of progress
Detection when, these supporting pin main bodys 1 can uniformly adsorb large-sized substrate 6, avoid when large-sized 6 basis of substrate
When detection is needed and tilted, large-sized substrate 6 slides and damages from the adsorption orifice 3 of supporting pin main body.
Referring to Fig. 4, the supporting pin main body 1 that above-described embodiment provides is set to tubular structure, and the barrel of tubular structure is
Hollow-core construction, is connected by vacuum suction pipeline 8 between the hollow-core construction 5 of two neighboring barrel, and vacuum suction pipeline 8 is true with taking out
Empty device connection.Due to being connected between the hollow-core construction 5 of two neighboring barrel by vacuum suction pipeline 8, so some tubulars
The supporting pin main body 1 of structure forms whole connected system, and the whole connected system formed passes through vacuum suction pipeline 8 and pumping
Vacuum plant connects, the adsorption function so as to fulfill whole connected system to substrate 6；And then avoid the sky of each barrel
Core structure 5 is connected by vacuum suction pipeline 8 with vacuum extractor, caused to use a large amount of vacuum suction pipelines 8, increase production
The problem of cost, but also the space shared by vacuum suction pipeline 8 can be saved.
It should be noted that when the barrel of tubular structure is solid construction, the hollow cavity of two neighboring tubular structure it
Between, it can also be connected by vacuum suction pipeline 8, caused beneficial effect is identical when with barrel being hollow-core construction, herein not
Repeat.
The above description is merely a specific embodiment, but protection scope of the present invention is not limited thereto, any
Those familiar with the art the invention discloses technical scope in, change or replacement can be readily occurred in, should all be contained
Cover within protection scope of the present invention.Therefore, protection scope of the present invention should be based on the protection scope of the described claims.
Claims (6)
1. a kind of supporting pin, it is characterised in that including the supporting pin main body with hollow-core construction；Energy is equipped with the hollow-core construction
Enough make substrate and the supporting pin body contact and separated support column；The supporting pin main body is tubular structure, the tubular
The barrel of structure is hollow-core construction, and the hollow-core construction of the barrel is connected with vacuum extractor.
2. supporting pin according to claim 1, it is characterised in that the top of the support column is equipped with ball.
3. supporting pin according to claim 1, it is characterised in that the barrel includes flare and cylindrical portion, and described
The portlet of flare is connected with one end of the cylindrical portion.
4. one kind absorption board, it is characterised in that including elevator, link and some supports as claimed in claim 1 or 2
Pin；Wherein,
The link includes the lifter plate being connected with the elevator, and the guide plate above the lifter plate, institute
The support column for stating supporting pin is installed on the lifter plate, and the supporting pin main body of the supporting pin is installed on the guide plate,
And the guide plate is equipped with and each one-to-one pilot hole of support column.
5. absorption board according to claim 4, it is characterised in that the supporting pin main body is tubular structure, the cylinder
The barrel of shape structure is hollow-core construction, by vacuum suction pipeline connection between the hollow-core construction of the two neighboring barrel, and
The vacuum suction pipeline is connected with vacuum extractor.
6. absorption board according to claim 4, it is characterised in that the supporting pin main body of some supporting pins is uniformly pacified
On the guide plate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510524479.3A CN105093588B (en) | 2015-08-24 | 2015-08-24 | A kind of supporting pin and absorption board |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510524479.3A CN105093588B (en) | 2015-08-24 | 2015-08-24 | A kind of supporting pin and absorption board |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105093588A CN105093588A (en) | 2015-11-25 |
| CN105093588B true CN105093588B (en) | 2018-05-08 |
Family
ID=54574371
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510524479.3A Expired - Fee Related CN105093588B (en) | 2015-08-24 | 2015-08-24 | A kind of supporting pin and absorption board |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN105093588B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106873203A (en) * | 2017-04-21 | 2017-06-20 | 武汉华星光电技术有限公司 | Glass substrate thimble and Minton dryer |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1499299A (en) * | 2002-10-25 | 2004-05-26 | 东京毅力科创株式会社 | Substrate calibrating appts, its processing device and delivery appts. |
| KR20060078906A (en) * | 2004-12-30 | 2006-07-05 | 동부일렉트로닉스 주식회사 | Wafer supporting apparatus having vacuum type lift pin |
| CN1941318A (en) * | 2005-09-30 | 2007-04-04 | 东京毅力科创株式会社 | Substrate placing mechanism and substrate processing device |
| CN1965389A (en) * | 2004-06-09 | 2007-05-16 | 尼康股份有限公司 | Substrate holding device, exposure device having the same, exposure method, method for producing device, and liquid repellent plate |
| CN103465198A (en) * | 2013-09-25 | 2013-12-25 | 深圳市华星光电技术有限公司 | Glass processing platform and method for processing glass |
| KR20140073687A (en) * | 2012-12-06 | 2014-06-17 | 세메스 주식회사 | Substrate supporting unit and substrate treating apparatus including the unit |
-
2015
- 2015-08-24 CN CN201510524479.3A patent/CN105093588B/en not_active Expired - Fee Related
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1499299A (en) * | 2002-10-25 | 2004-05-26 | 东京毅力科创株式会社 | Substrate calibrating appts, its processing device and delivery appts. |
| CN1965389A (en) * | 2004-06-09 | 2007-05-16 | 尼康股份有限公司 | Substrate holding device, exposure device having the same, exposure method, method for producing device, and liquid repellent plate |
| KR20060078906A (en) * | 2004-12-30 | 2006-07-05 | 동부일렉트로닉스 주식회사 | Wafer supporting apparatus having vacuum type lift pin |
| CN1941318A (en) * | 2005-09-30 | 2007-04-04 | 东京毅力科创株式会社 | Substrate placing mechanism and substrate processing device |
| KR20140073687A (en) * | 2012-12-06 | 2014-06-17 | 세메스 주식회사 | Substrate supporting unit and substrate treating apparatus including the unit |
| CN103465198A (en) * | 2013-09-25 | 2013-12-25 | 深圳市华星光电技术有限公司 | Glass processing platform and method for processing glass |
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| Publication number | Publication date |
|---|---|
| CN105093588A (en) | 2015-11-25 |
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