WO2015032174A1 - 基板存放架 - Google Patents

基板存放架 Download PDF

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Publication number
WO2015032174A1
WO2015032174A1 PCT/CN2014/070753 CN2014070753W WO2015032174A1 WO 2015032174 A1 WO2015032174 A1 WO 2015032174A1 CN 2014070753 W CN2014070753 W CN 2014070753W WO 2015032174 A1 WO2015032174 A1 WO 2015032174A1
Authority
WO
WIPO (PCT)
Prior art keywords
substrate
support rod
limiting
storage rack
support
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/CN2014/070753
Other languages
English (en)
French (fr)
Inventor
姚江波
李春良
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TCL China Star Optoelectronics Technology Co Ltd
Original Assignee
Shenzhen China Star Optoelectronics Technology Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shenzhen China Star Optoelectronics Technology Co Ltd filed Critical Shenzhen China Star Optoelectronics Technology Co Ltd
Priority to US14/240,332 priority Critical patent/US9324596B2/en
Publication of WO2015032174A1 publication Critical patent/WO2015032174A1/zh
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/10Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP]
    • H10P72/15Horizontal carrier comprising wall type elements whereby the substrates are vertically supported, e.g. comprising sidewalls
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B25HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25HWORKSHOP EQUIPMENT, e.g. FOR MARKING-OUT WORK; STORAGE MEANS FOR WORKSHOPS
    • B25H3/00Storage means or arrangements for workshops facilitating access to, or handling of, work tools or instruments
    • B25H3/04Racks

Definitions

  • the invention relates to a plate storage rack, in particular to a substrate storage rack. Background technique
  • TFT-LCD Thin Film Transistor-Liquid Crystal Display
  • the main substrate is a substrate.
  • the substrate is often placed in the substrate storage rack, and the substrate storage rack is pre-placed to the take-out position during use, and then the automatic mechanical arm substrate storage rack is pre-placed. The substrate is removed and transferred to the production line.
  • the substrate storage rack Due to the conventional substrate storage rack, there is usually only one substrate take-up port. Therefore, when the substrate storage rack is placed in place, the substrate can only be taken out and transferred to the production line by the robot arm A take-up port. However, when the substrate storage rack is to be manually switched out or the substrate is reloaded into the substrate storage rack, since the substrate receiving port is used, the substrate storage rack can only be used from the take-up position by the manual guiding vehicle. After moving, manually remove the substrate manually or refill the substrate storage rack, which greatly affects production efficiency. Summary of the invention
  • a substrate storage rack provided by the present invention includes a hollow frame body, and the frame body forms a first side and a third side opposite to each other and a second side and a fourth side opposite to each other.
  • the substrate placement layer comprises: a first bracket connected to the frame body and disposed at the second side surface;
  • first support rod disposed on the first bracket and extending toward the inside of the frame; a second bracket connected to the frame and disposed at the fourth side; a second support rod disposed on the second bracket and extending inside the frame body.
  • the substrate placement layer is plural, and a plurality of the substrate placement layers are disposed in the vertical direction at intervals inside the frame body.
  • the first support bar is provided with a first limit card seat that is movable in a lateral direction, the first limit The card holder includes a first limiting portion for engaging the substrate;
  • a second limiting card seat that is movable in a lateral direction is disposed on the second supporting rod, and the second limiting card holder includes a second limiting portion that is engaged with the substrate.
  • a plurality of sets of first positioning holes are disposed on the first support frame at a lateral interval, and the first limit card holder is selectively coupled to one of the first support holes
  • the first positioning holes of the group are matched and connected;
  • a plurality of sets of second positioning holes are disposed on the second supporting frame at a lateral interval, and the second limiting card holder is selectively coupled to one of the second positioning holes.
  • the first support bracket is disposed with a first sliding slot in a horizontal direction, and the first limiting bracket passes the first sliding slot and the The first support rod is coupled with the connection;
  • a second sliding slot is disposed on the second support in a lateral direction, and the second limiting card seat is coupled to the second supporting rod through the second sliding slot.
  • the first limit card holder is provided with a first roller, and the axis of the first roller is longitudinal Extending, and the outer peripheral surface of the first roller is tangent to the first limiting portion - the second limiting card seat is provided with a second roller, the axis of the second roller extends in the longitudinal direction, and The outer peripheral surface of the second roller is tangent to the second limiting portion.
  • the substrate placement layer further comprises at least a third aspect disposed on the third side by a second support a first support rod, and the third support rod is disposed laterally between the first support rod and the second support rod.
  • the third support bar is provided with a third limit card seat that is movable in the longitudinal direction, and the third limit card seat includes a limit portion that is bonded to the substrate.
  • the third support bar is provided with a plurality of sets of second positioning holes along the longitudinal direction, and the third limiting card holder selectively A set of said: three positioning holes are mated.
  • the third support bar is disposed with a third sliding slot in the longitudinal direction, and the third limiting slot passes through the third sliding slot and the The third support rod is coupled.
  • the third limit card holder is provided with a third roller, and the axis of the third roller is transverse Extending, and an outer circumferential surface of the third roller is tangent to the third limiting portion.
  • the frame body is provided with at least one first support frame in a vertical direction at the second side surface,
  • the first support frame is fixedly connected to the first bracket;
  • the frame body is provided at the fourth side with at least one second support frame in a vertical direction, and the second support frame is fixedly connected to the second bracket.
  • the substrate storage rack provided by the present invention provides a substrate placement layer by forming a first support rod and a second support rod on the second side surface and the fourth surface of the frame body respectively, thereby ensuring the substrate.
  • the storage in the rack body then utilizes the first side as the take-up port of the robot arm and the fourth side as the manual take-up port, thereby realizing the bidirectional take-up of the substrate in the substrate storage rack, thereby effectively improving the production efficiency.
  • the number of substrate placement rack storage substrates can be increased, the supply amount of the substrates can be increased, and the use of the production lines can be facilitated.
  • the first support bar is provided with a first limit card seat that can be moved
  • the second support bar is provided with a second limit card seat that can be moved, and the first limit card seat is adjusted.
  • the distance between the second limit card holder and the second limit card holder can better match the substrates of different sizes, thereby improving the use range of the substrate storage rack.
  • the first positioning hole at different positions realizes the movement of the first limiting card seat on the first support.
  • the second positioning hole at different positions is used to realize the second limit.
  • the movement of the card holder on the second support rod is simple in structure and easy to implement.
  • the first sliding slot realizes the movement of the first limiting card seat on the first supporting rod.
  • the second limiting slot is used to implement the second limiting position on the second supporting rod. Movement, so that the first limit card holder and the second limit card holder can be placed at any position as needed, so as to better fit Different sizes of substrates further increase the range of use of the substrate storage rack.
  • the first roller disposed on the first limit card holder and the second roller disposed on the second limit card holder are used to place the substrate in the lateral direction in the lateral direction, and the weight of the substrate is used from the first A roller or a second roller slides down onto the first support bar and the second support bar, thereby ensuring the placement of the substrate in place, thereby improving the placement accuracy of the substrate, and providing good conditions for subsequent production.
  • the third support bar is disposed on the third side of the frame body to cooperate with the first support bar and the second support bar to better support the substrate, thereby further ensuring the substrate is in the frame.
  • the smoothness of storage in the body is disposed on the third side of the frame body to cooperate with the first support bar and the second support bar to better support the substrate, thereby further ensuring the substrate is in the frame.
  • the third support bar is provided with a movable limit seat, and the position of the third limit card seat is adjusted, and the first limit card seat and the second limit card are matched.
  • the seat can better fit the substrates of different sizes, thereby further increasing the range of use of the substrate storage rack.
  • the 3 ⁇ 4 third chute realizes the movement of the third limit support on the third support rod, so that the third limit holder can stay at any position as needed, thereby It can better match the substrates of different sizes and further improve the use range of the substrate storage rack.
  • the substrate that is not placed in the longitudinal direction is used to slide the substrate that is not placed in the longitudinal direction from the third roller to the third support bar and the first support by using the third roller disposed on the third limit card holder.
  • the crucible and the second support rod ensure the placement of the substrate in place, thereby improving the placement accuracy of the substrate and providing good conditions for subsequent production.
  • the frame body is provided with a first support frame at the second side, and a second support frame is disposed at the fourth side, and the first support frame and the second support frame are used to support the frame body. Fraud, which increases the overall structural strength of the substrate placement rack.
  • FIG. 1 is a schematic structural diagram of a substrate storage rack according to an embodiment of the present invention
  • 2 is a schematic structural view of a substrate placement layer in a substrate storage rack according to an embodiment of the present invention
  • FIG. 3 is a schematic view showing a mounting structure of a first limit card holder and a first support rod according to an embodiment of the present invention
  • Figure 4 is a plan view showing the mounting structure of the first limit card holder and the first support rod in Figure 3;
  • FIG. 5 is a top view of another mounting structure of the first limiting card holder and the first supporting rod provided by the embodiment of the present invention
  • FIG. 6 is a second limiting card holder and a second supporting rod provided by the embodiment of the present invention Schematic diagram of the installation structure
  • Figure 7 is a top view of the mounting structure of the second limit card holder and the second support rod in Figure 6:
  • FIG. 8 is a top view of another mounting structure of a second limit card holder and a second support rod according to an embodiment of the present invention.
  • FIG. 9 is a schematic view showing a mounting structure of a first limit card holder and a first support rod according to an embodiment of the present invention.
  • Figure 10 is a plan view showing the mounting structure of the third limit card holder and the third support rod in Figure 9;
  • FIG. 1 is a top view of another mounting structure of a third limit card holder and a third support rod according to an embodiment of the present invention.
  • the directional nouns appearing in the present invention are first defined as follows - in the frame body, the perpendicular direction between the first side face 11 and the second side face 13 is set to the longitudinal direction L, and the second side face 12
  • the direction perpendicular to the fourth side i4 is set to the lateral direction T, and the vertical direction of the bottom and top of the frame body is set to the vertical direction V (as shown in FIG. 1).
  • the substrate storage rack provided in the present embodiment includes a hollow frame body 1 , and the frame body i forms a first side surface 11 and a third side surface 13 opposite to each other and a second side surface 12 opposite to each other. And the fourth side 14 , the inside of the frame 1 is provided with at least one substrate placement layer 2,
  • the substrate placement layer 2 includes:
  • first bracket 21 connected to the frame body 1 and disposed at the second side 12;
  • a first support rod 22 disposed on the first bracket 21 in a lateral direction and extending toward the inside of the frame body 1;
  • a second bracket 23 connected to the frame body 1 and disposed at the fourth side 14;
  • a second support rod 24 is disposed on the second bracket 23 in the lateral direction and extends toward the inside of the frame 1.
  • the substrate can be placed on the substrate placement layer 2, specifically, the first support rod 22 and the second support rod 24 are used to support the substrate.
  • the robot arm can take out the substrate in the substrate storage rack through the first side 11 formed by the frame body 1 and transfer it to the production line.
  • the substrate storage rack does not need to be taken out, and the worker can manually take out the substrate directly through the third side 13 formed by the frame body 1.
  • the robot can be used to store the substrate in the substrate storage rack through the first side 1 formed by the frame body 1 , and the manual body can also be manually used to pass through the frame 1 :
  • the substrate is stored in the substrate storage rack at the side 3".
  • A recognizes that the substrate storage rack doubles and feeds the substrate, thereby effectively improving production efficiency.
  • the number of the substrate placement layers 2 can be set to be plural, and the plurality of substrate placement layers 2 are sequentially disposed in the vertical direction at the inside of the frame body 1, so that the plurality of substrate placement layers 2 can be effectively used.
  • the substrate storage capacity of the substrate placement rack is increased, which makes it easier to use on the production line.
  • the first support rod 22 can be provided with a first limit card capable of moving in the lateral direction.
  • the first limiting seat 3 includes a first limiting portion 31 for engaging with the substrate;
  • the second supporting frame 24 is provided with a second limiting card holder 4 capable of moving in the lateral direction, and the second limiting card
  • the seat 4 includes a second stop portion 41 for engaging the substrate, as shown in FIG.
  • the lateral position of the first limiting card holder 3 on the first support bar 22 and the lateral position of the second limiting card holder 4 on the second support bar 24 can be adjusted. Therefore, the distance between the first limit card holder 3 and the second limit card holder 4 is reduced or enlarged to meet the storage of different size substrates, and the first limit card holder 3 and the second limit are adjusted.
  • the two sections of the substrate in the lateral direction are just engaged by the first limiting portion 31 and the second limiting portion 41. The plexus further ensures the stability of the substrate placed in the substrate placement layer 2.
  • the lateral movement between the first support rod 22 and the first limit holder 3 means that the first limit holder 3 can change its position in the lateral direction on the first support rod 22, but is not limited to the first There must be a sliding fit between a limit card holder 3 and the second support frame 22; the second support bar 24 and the second limit card holder 4 are also the same, and will not be described again.
  • a plurality of sets of first positioning holes 221 are disposed on the first support bar 22 at a lateral interval, and the first limit card holder 3 selectively cooperates with one of the first positioning holes 221 .
  • the second support 24 is provided with a plurality of sets of second positioning holes 24i, and the second limit card holders 4 are selectively coupled to one of the second positioning holes 24.
  • the first limiting card holder 3 is first removed from the first support bar 22, and then the first limiting card holder 3 is mounted on the first support through the corresponding first positioning hole 221 according to the specific size of the substrate. On the rod 22, the movement of the first limit card holder 3 on the first support rod 22 is achieved.
  • the second limit card holder 4 can also be moved on the second support frame 24, and details are not described herein. Further, the distance between the first limit card holder 3 and the second limit card holder 4 is adjustable to meet the requirements of different size substrate placement.
  • the first limiting card holder 3 is coupled to the first positioning hole 2 through the first connecting mechanism 31 1
  • the second limiting card holder 4 is coupled to the second positioning hole 241 through the second connecting mechanism 411 .
  • the first connecting mechanism 31 1 may be a protrusion disposed at the bottom of the first limiting card holder 3 , or may be any one or a combination of screws, bolts or pins, so the first connecting mechanism
  • the specific choice of 3 il is not unique, but should fall within the scope of protection of the present invention.
  • the second connecting mechanism 4i l is the same as or similar to the first connecting mechanism 31 1 and will not be described herein.
  • the adjustable range of the first limit card holder 3 is relatively fixed, and the corresponding installation position can only be changed according to the setting of the first positioning hole 221, which still has certain limitations, and the second limit Card holder The same is true of 4.
  • the first support bar 22 is disposed with a first sliding slot 222 in the lateral direction, and the first limiting slot 3 passes through the first sliding slot 222 and the first supporting rod.
  • a second sliding slot 242 is disposed on the second supporting rod 24 , and the second limiting bracket 4 is coupled to the second supporting rod 24 via the second sliding slot 242 .
  • the first limiting card holder 3 can slide in the first sliding slot 222 to adjust the lateral position of the first limiting card holder 3, and when moving to a position where the substrate is placed, the corresponding fixing mechanism A limit card holder 3 is fixed to the first support rod 22, that is, it can be.
  • the second limit card holder 4 can also be moved on the second support rod 24, and details are not described herein. Therefore, the distance between the first limit card holder 3 and the second limit card holder 4 can be adjusted to meet the requirements of different size substrate placement.
  • the first limit card holder 3 and the first support rod 22 can be arbitrarily adjusted in the lateral direction, and the first limit card holder 3 is fixed at any suitable position; the second limit card holder 4 can also be like this.
  • the substrates of different sizes can be better matched, and the use range of the substrate storage rack can be further improved.
  • the substrate since the substrate is fed into the substrate storage rack manually by the third side, there may be a deviation of the placement, such that the substrate is not completely placed on the first support rod 22 and the second support rod.
  • one end of the substrate may be placed on the first limit card holder 3 or the second limit card holder 4, thereby seriously affecting the placement accuracy of the substrate, and may also have a certain impact on subsequent production.
  • the first limiting bracket 3 is provided with a first roller 32.
  • the axis of the first roller 32 extends in the longitudinal direction, and the outer circumferential surface of the first roller 32 is tangent to the first limiting portion 31;
  • the card holder 4 is provided with a second roller 42.
  • the axis of the second roller 42 extends in the longitudinal direction, and the outer circumferential surface of the second roller 42 is tangent to the second limiting portion 4].
  • the substrate In use, when the substrate is manually placed on the substrate placement layer 2, if one end of the substrate is placed on the first limiting card holder 3, the bottom of the substrate will abut against the outer peripheral surface of the first roller 32, at this time, the substrate Under the action of its own gravity, it will slide down along the outer peripheral surface of the first roller 32 and fall onto the first support 22, and through the first limiting portion 3 tangential to the outer peripheral surface of the first roller 32, the substrate is realized.
  • the second roller 42 on the second limit card holder 4 and details are not described herein.
  • the substrate not placed in the lateral direction is used, and the weight of the substrate itself is used from the first roller 32.
  • the second roller 42 slides down to the first support seed 22 and the second support rod 24": thereby ensuring the placement of the substrate in place, thereby improving the placement accuracy of the substrate, and providing good conditions for subsequent production.
  • the substrate placement frame can store substrates of different sizes, sometimes when the substrate size is In the hour, the substrate has a smaller contact surface with the first support bar 22 and the second support bar 24 along the lateral ends, but the substrate itself has a certain weight, and the lateral ends thereof and the first support bar 22 and the second support bar 24 After the abutment, the middle part will have a certain deformation; or after the size of the substrate is further reduced, the two ends cannot simultaneously abut the first support rod 22 and the second support rod 24, thereby limiting the scope of the substrate storage rack.
  • the substrate placement layer 2 further includes at least one third support rod 26 disposed on the third dome surface 13 in the longitudinal direction through the third bracket 25, and the third support rod 26 is disposed in the lateral direction.
  • a support rod 22 is interposed between the second support rod 24.
  • the third support rod 26 can cooperate with the first support rod 22 and the second support rod 24 to better support different sizes of substrates, while passing through the first support rod 22 and the second support
  • the rod 24 and the third support rod 26 simultaneously support the substrate, and the storage stability of the substrate in the frame 1 can be further ensured.
  • the third support rod 26 can be provided with a third limit card holder that can move in the longitudinal direction. 5.
  • the third limit card holder 5 includes a third limiting portion 5 i for engaging with the substrate.
  • a plurality of sets of third positioning holes 261 are disposed on the third support rod 26 in the longitudinal direction, and the first limit card holders 5 are selectively coupled to one of the first sets: the positioning holes 261.
  • the specific use and advantageous effects are the same as or similar to the first limiting slot 3 and the first positioning hole 221, and therefore will not be described again.
  • the first limiting card holder 5 is coupled to the first positioning hole 261 through the first connecting mechanism 51 1 , wherein the second connecting mechanism 51 is the same as or similar to the first connecting mechanism 31 1 , and details are not described herein again.
  • the adjustable range of the third limit card holder 5 is relatively fixed, and the corresponding installation position can only be changed according to the setting of the third: positioning hole 261, which still has certain limitations.
  • the third support rod 26 is disposed with a third sliding slot 262 in the longitudinal direction, and the third limiting bracket 5 is coupled to the third supporting rod 26 via the third sliding slot 262 .
  • the ffl mode and the beneficial effect are the same as or similar to the first limiting slot 3 and the first sliding slot 222, and therefore are not described again.
  • the third limit card holder 5 is provided with a second roller 52.
  • the axis of the third roller 52 extends in the lateral direction, and the peripheral surface of the third roller 52 is tangent to the third limiting portion 51.
  • At least one first support frame 6 may be disposed vertically on the second side 12 of the frame body i.
  • the first support frame 6 is fixedly connected to the first bracket 21; the frame body 1 is on the fourth side.
  • At least one second support frame 7 is disposed at 14 places in the vertical direction, and the second support frame 7 is fixedly connected to the second support frame 23.
  • the first support frame 6 is disposed at the second side surface 12 through the frame body 1, and the second support frame 7 is disposed at the fourth side surface 14 so that the frame body 1 is played by the first support frame 6 and the second support frame 7 Supporting, and improving the overall structural strength of the substrate placement frame.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Warehouses Or Storage Devices (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Packaging Frangible Articles (AREA)

Abstract

一种基板存放架,包括一中空的架体(1),架体(1)形成有第一侧面(11)、第二侧面(12)、第三侧面(13)和第四侧面(14);架体的内部沿垂向依次间隔设置有多个基板放置层(2);基板放置层(2)包括:与架体(1)连接并设置在第二侧面(12)处的第一支架(21),沿横向设置在第一支架(21)上并向架体(1)的内部延伸的第一支撑杆(22);以及与架体(1)连接并设置在第四侧面(14)处的第二支架(23),沿横向设置在第二支架(23)上并向架体(1)的内部延伸的第二支撑杆(24)。其通过在架体(1)的第二侧面(12)和第四侧面(14)上分别设置第一支撑杆(22)和第二支撑杆(24),保证了基板在架体内的存放;利用第一侧面(11)作为自动机械臂的取送口,利用第四侧面(14)作为手动的取送口,实现了基板存放架双向取送基板。

Description

基板存放架 技术领域
本发明涉及一种板材存放架, 尤其涉及一种基板存放架。 背景技术
随着薄膜晶体管液晶显示器 ( Thin Film Transistor-Liquid Crystal Display, 简 称 TFT-LCD)技术的不断的发展和完善,其越来越多地被应用于人们的生活当中。
在 TFT-LCD的生产过程中, 其主要的基材为基板。 为了便于基板在生产线 中的输送和加工, 目前常把基板放置在基板存放架内, 使用时将基板存放架預先 放置到取料位置, 然后利用自动化的机械手臂 基板存放架内将预先放置好的基 板取出并移送到生产线上。
由于目前常见的基板存放架, 其通常只有一个基板取送口, 因此当基板存放 架放置到位后, 只能利用自动机械臂 A取送口将基板取出并移送至生产线上。 但 当基板存放架要转换为人工手动取出基板或是向基板存放架内重新装填基板时, 由于采用一个基板取送口的设 因此只能利用人力导向车将基板存放架整体从 取料位置上移幵, 然后再通过人工手动取出基板或是重新对基板存放架进行装 填, 从而大大影响生产效率。 发明内容
针对上述现有技术中的不足, 本发明的目的在于提供一种基板存放架, 其实 现了双向取送基板, 从而可有效地提高生产效率。
1 ) 本发明提供的一种基板存放架, 包括一中空的架体, 所述架体形成彼此 相对的第一侧面和第:三侧面以及彼此相对的第二侧面和第四侧面,
在所述架体的内部设置有至少一个基板放置层,
其中, 所述基板放置层包括- 与所述架体连接并设置在所述第二侧面处的第一支架;
沿横向设置在所述第一支架上并向所述架体的内部延伸的第一支撑杆; 与所述架体连接并设置在所述第四侧面处的第二支架; 沿横 ^设置在所述第二支架上并 ^所述架体的内部延伸的第二支撑杆。
2)在本发明的第 1 )项的 ·个优选实施方式中, 所述基板放置层为多个, 并 且多个所述基板放置层沿垂向依次间隔设置在所述架体的内部。
3 ) 在本发明的第 1 ) 项或第 2) 项中的一个优选实施方式中, 在所述第一支 撑杆上设置有能够沿横向移动的第一限位卡座, 所述第一限位卡座包括用于与基 板接合的第一限位部;
在所述第二支撑杆上设置有能够沿横向移动的第二限位卡座, 所述第二限位 卡座包括 ^于与基板接合的第二限位部。
4 )在本发明的第 3 )项的一个优选实施方式中, 所述第一支撑杼上沿横向间 隔设置有多组第一定位孔, 所述第一限位卡座选择性地与其中一组所述第一定位 孔配合连接;
所述第二支撑杼上沿横向间隔设置有多组第二定位孔, 所述第二限位卡座选 择性地与其中一组所述第二定位孔配合连接。
5 )在本发明的第 3 )项的一个优选实施方式中, 所述第一支撑杼上沿横向设 置有第一滑槽, 所述第一限位卡座通过所述第一滑槽与所述第一支撑杆配合连 接;
所述第二支撑 上沿横向设置有第二滑槽, 所述第二限位卡座通过所述第二 滑槽与所述第二支撑杆配合连接。
6) 在本发明的第 3 ) 项到第 5 ) 项中任一项的一个优选实施方式中, 所述第 一限位卡座上设置有第一滚轮, 所述第一滚轮的轴线沿纵向延伸, 并且所述第一 滚轮的外周面与所述第一限位部相切- 所述第二限位卡座上设置有第二滚轮, 所述第二滚轮的轴线沿纵向延伸, 并 且所述第二滚轮的外周面与所述第二限位部相切。
7) 在本发明的第 1 ) 项到第 6) 项中任一项的一个优选实施方式中, 所述基 板放置层还包括通过第≡支架沿纵向设置在所述第:三侧面上的至少一个第 支 撑杆, 并 ϋ所述第三支撑杆沿横向设置在所述第一支撑杆与所述第二支撑杆之 间。
8)在本发明的第 7)项的一个优选实施方式中, 在所述第三支撑杆上设置有 能够沿纵向移动的第三限位卡座, 所述第三限位卡座包括用于与基板接合的第 限位部。 9)在本发明的第 8)项的一个优选实施方式中, 所述第:三支撑杆上沿纵向间 隔设置有多组第≡定位孔, 所述第三限位卡座选择性地与其中一组所述第:三定位 孔配合连接。
10) 在本发明的第 8) 项的一个优选实施方式中, 所述第三支撑杆上沿纵向 设置有第三滑槽, 所述第三限位卡座通过所述第三滑槽与所述第三支撑杆配合连 接。
11 ) 在本发明的第 8) 项到第 10) 项中任一项的一个优选实施方式中, 所述 第三限位卡座上设置有第三滚轮, 所述第三滚轮的轴线沿横向延伸, 并且所述第 三滚轮的外周面与所述第三限位部相切。
12) 在本发明的第 1 ) 项到第】1 ) 项中任一项的一个优选实施方式中, 所述 架体在所述第二侧面处沿垂向设置有至少一个第一支撑架, 所述第一支撑架与所 述第一支架连接固定;
所述架体在所述第四侧面处沿垂向设置有至少一个第二支撑架, 所述第二支 撑架与所述第二支架连接固定。
与现有技术相比, 本发明提供的基板存放架, 其通过在架体的第二侧面和第 四惻面上分别设置第一支撑杆和第二支撑杆并形成基板放置层, 保证了基板在架 体内的存放, 然后利用第一侧面作为自动机械臂的取送口, 利用第四侧面作为手 动的取送口,从而实现了基板存放架双向取送基板,进而可有效地提高生产效率。
在进一步的技术方案中, 通过设置多个基板放置层, 从而可增加基板放置架 存放基板的数量, 增大基板的供给量, 便于生产线的使用。
在进一步的技术方案中, 其在第一支撑杆上设置能够移动的第一限位卡座, 在第二支撑杆上设置能够移动的第二限位卡座, 通过调整第一限位卡座和第二限 位卡座之间的距离, 可更好地配合放置不同尺寸的基板, 从而提高基板存放架的 使用范围。
在进 ·歩的技术方案中, 其利] ¾不同位置的第一定位孔实现第一限位卡座在 第一支撑 上的移动, 同理, 利用不同位置的第二定位孔实现第二限位卡座在第 二支撑杆上的移动, 其结构简单, 便于实现。
在进一步的技术方案中, 其利 第一滑槽实现第一限位卡座在第一支撑杆上 的移动, 同理, 利用第二滑槽实现第二限位卡座在第二支撑杆上的移动, 使得第 一限位卡座和第二限位卡座可根据需要停留在任意位置, 从而可更好地配合放置 不同尺寸的基板, 进一步提高基板存放架的使用范围。
在进一步的技术方案中, 利用第一限位卡座上设置的第一滚轮和第二限位卡 座上设置的第二滚轮, 在横向上将末放置到位的基板, 利用基板自身重力从第一 滚轮或第二滚轮上滑落至第一支撑杆和第二支撑杆上, 从而保证了基板的放置到 位, 进而提高了基板的放置精度, 为后续的生产提供良好的条件。
在进一步的技术方案中, 其通过在架体的第三侧面设置第三支撑杆与第一支 撑杆和第二支撑杆相互配合, 对基板起到更好地支撑效果, 进一步保证了基板在 架体内的存放的平稳度。
在进一步的技术方案中, 其在第三支撑杆上设置能够移动的第 限位卡座, 通过调整第:三限位卡座的位置, 并配合第一限位卡座和第二限位卡座, 可更好地 配合放置不同尺寸的基板, 从而进一步提高基板存放架的使用范围。
在进 ·歩的技术方案中, 其利] ¾不同位置的第≡定位孔实现第三限位卡座在 第 Ξ:支撑軒上的移动, 其结构简单, 便于实现。
在进 ·歩的技术方案中, 其利] ¾第≡滑槽实现第≡限位卡座在第:三支撑杆上 的移动, 使得第三限位卡座可根据需要停留在任意位置, 从而可更好地配合放置 不同尺寸的基板, 进一歩提高基板存放架的使用范围。
在进一步的技术方案中, 利用第≡限位卡座上设置的第三滚轮, 在纵向上将 未放置到位的基板, 利用基板自身重力从第三滚轮上滑落至第三支撑杆以及第一 支撑杼和第二支撑杆上, 从而保证了基板的放置到位, 进而提高了基板的放置精 度, 为后续的生产提供良好的条件。
在进一步的技术方案中, 架体在第二侧面处设置第一支撑架, 在第四侧面处 设置第二支撑架, Α认而利用第一支撑架和第二支撑架对架体起到支撑诈用, 认而 提高基板放置架的整体结构强度。
上述技术特征可以各种适合的方式组合或由等效的技术特征来替代, 只要能 够达到本发明的目的。 附图说明
在下文中将基于仅为非限定性的实施例并参考附图来对本发明迸行更详细 的描述。 其中:
图 1为本发明实施例提供的基板存放架的结构示意图; 图 2为本发明实施例提供的基板存放架中基板放置层的结构示意图; 图 3为本发明实施倒提供的第一限位卡座与第一支撑杆的一种安装结构示意 图;
图 4为图 3中第一限位卡座与第一支撑杆的安装结构俯视图;
图 5为本发明实施倒提供的第一限位卡座与第一支撑杆的另一种安装结构俯 视图- 图 6为本发明实施倒提供的第二限位卡座与第二支撑杆的一种安装结构示意 图;
图 7为图 6中第二限位卡座与第二支撑杆的安装结构俯视图:
图 8为本发明实施例提供的第二限位卡座与第二支撑杆的另一种安装结构俯 视图;
图 9为本发明实施例提供的第 限位卡座与第 支撑杆的一种安装结构示意 图;
图 10为图 9中第三限位卡座与第三支撑杆的安装结构俯视图;
图 i i 为本发明实施例提供的第三限位卡座与第三支撑杆的另一种安装结构 俯视图。
附图说明:
1-架体; 11—第一侧面, 12-第二侧面, 13-第三侧面。 14第四侧面;
2基板放置层;
2】-第一支架, 22-第一支撑杆, 221-第一定位孔, 222-第一滑槽;
23-第二支架, 24-第二支撑杆, 24】-第二定位孔, 242-第二滑槽;
25-第三支架, 26-第:三支撑杆, 261-第:三定位孔, 262-第:三滑槽;
3 -第一限位卡座; 31-第一限位部, 311-第一连接机构, 32-第一滚轮;
4-第二限位卡座; 4】-第二限位部, 411-第二连接机构, 42-第二滚轮; 5-第≡限位卡座; 51-第≡限位部, 511-第≡连接机构, 52-第≡滚轮;
6第一支撑架; 7-第二支撑架。 具体实施方式
为使本发明的目的、 技术方案和优点更加清楚, 下面将对本发明的技术方案 迸行清楚、 完整的描述, 基于本发明中的具体实施方式, 本领域普通技术人员在 没有做出创造性劳动的前提下所得到的所有其它实施方式, 都属于本发明所保护 的范围。
在描述具体实施方式前, 先对本发明中出现的方向性名词做如下限定- 在架体中, 第一侧面 11与第≡侧面 13之间的垂线方向设定为纵向 L, 第二 侧面 12与第四侧面 i4之间的垂线方向设定为横向 T, 架体 : 的底部与顶部的垂 线方向设定为垂向 V (如图 i中所示) 。
如图 i至 11所示, 本实施倒中提供的基板存放架, 包括一中空的架体 1 , 架 体 i形成彼此相对的第一侧面 11和第三侧面 13以及彼此相对的第二侧面 12和 第四侧面 14, 架体 1的内部设置有至少一个基板放置层 2,
其中, 基板放置层 2包括:
与架体 1连接并设置在第二侧面 12处的第一支架 21 ;
沿横向设置在第一支架 21上并向架体 1的内部延伸的第一支撑杆 22;
与架体 1连接并设置在第四侧面 14处的第二支架 23;
沿横向设置在第二支架 23上并向架体 1的内部延伸的第二支撑杆 24。
使用 , 可先将基板放置到基板放置层 2 上, 具体的是利用第一支撑杆 22 和第二支撑杆 24对基板起到支撑停放作用。 当开始生产时, 将基板存放架放置 到取料位置时, 自动机械臂可通过架体 1形成的第一侧面 11 处对基板存放架内 的基板取出并移送至生产线上。 当采用手动生产时, 无须将基板存放架取出, 工 人可通过架体 1形成的第三侧面 13直接手动取出基板。 当需要向基板存放架内 存放基板时, 可利用自动机械臂通过架体 1 形成的第一侧面 1处向基板存放架 内存放基板, 同时亦可利用人工手动通过架体 1 形成的第:三侧面 3处向基板存 放架内存放基板》 A认而实现了基板存放架双 ^取送基板, 进而可有效地提高生产 效率。
本实施例中, 可将基板放置层 2的数量设定为多个, 并且将多个基板放置层 2沿垂向依次间隔设置在架体 1的内部, 从而利用多个基板放置层 2可有效地提 高基板放置架的基板存放量, 进而更加便于在生产线上进行使用。
本实施例中, 基板放置在基板放置层 2 上时, 实际是放置在第一支撑杆 22 和第二支撑杆 24上。 但随着 TFT-LCD的使用范围越来越广, 基板的尺寸也在不 断变化中。 为了使得基板存放架可适应不同尺寸的基板的存放, 从而提高基板存 放架的使 ^范围; —可使得第一支撑杆 22 上设置有能够沿横向移动的第一限位卡 座 3 , 第一限位卡座 3包括用于与基板接合的第一限位部 31 ; 第二支撑衧 24上 设置有能够沿横向移动的第二限位卡座 4, 第二限位卡座 4包括用于与基板接合 的第二限位部 41, 如图 3所示。
使用 , 根据需要存放的基板的具体尺寸, 可通过调节第一支撑杆 22 上的 第一限位卡座 3的横向位置以及第二支撑杆 24上的第二限位卡座 4的横向位置, 从而 来缩小或扩大第一限位卡座 3和第二限位卡座 4之间的距离, 用以满足不 同尺寸的基板的存放,当调整好第一限位卡座 3和第二限位卡座 4的横向位置后, 将基板放入基板放置层 2后, 基板沿横向的两段刚好通过第一限位部 31和第二 限位部 41卡接。 丛而迸一步保证基板在基板放置层 2内放置的稳定性。
需说明的是, 第一支撑杆 22与第一限位卡座 3之间的横向移动是指第一限 位卡座 3可在第一支撑杆 22上沿横向改变其位置, 但不限于第一限位卡座 3与 第 ·支撑杼 22之间必须为滑动配合;第二支撑杆 24与第二限位卡座 4亦是如此, 不再赘述。
具体的, 图 4和图 7所示, 第一支撑杆 22上沿横向间隔设置有多组第一定 位孔 221 , 第一限位卡座 3选择性地与其中一组第一定位孔 221配合连接; 第二 支撑 24上沿橫向间隔设置有多组第二定位孔 24i,第二限位卡座 4选择性地与 其中一组第二定位孔 24 配合连接。
使用时, 先将第一限位卡座 3从第一支撑杆 22上取下, 然后根据基板的具 体尺寸, 将第一限位卡座 3通过相应的第一定位孔 221安装在第一支撑杆 22上, 从而实现第一限位卡座 3在第一支撑杆 22上的移动。 同理, 第二限位卡座 4也 可在第二支撑衧 24上移动, 在此不再赘述。 进而使得第一限位卡座 3和第二限 位卡座 4之间的距离可调, 满足不同尺寸基板放置的要求。
具体的,第一限位卡座 3通过第一连接机构 31 1与第一定位孔 2】〗配合连接, 第二限位卡座 4通过第二连接机构 411与第二定位孔 241配合连接。
其中, 第一连接机构 31 1可为设置在第一限位卡座 3的底部的凸起, 也可为 螺钉、 螺栓或销轴中的任一种或是多种组合, 因此第一连接机构 3 i l具体选择不 唯一, 但都应落入本发明的保护范围。 同理, 第二连接机构 4i l与第一连接机构 31 1相同或类似, 在此不再赘述。
但采 ]¾上述连接方式, 第一限位卡座 3的可调范围较为固定, 只能根据第一 定位孔 221的设置而改变相应的安装位置, 其仍有一定的局限性, 第二限位卡座 4亦是如此。
因此, 进一歩优选的, 如图 5和图 8所示, 第一支撑杆 22上沿横向设置有 第 ·滑槽 222, 第一限位卡座 3通过第一滑槽 222与第一支撑杆 22配合连接; 第 二支撑杆 24上沿横向设置有第二滑槽 242,第二限位卡座 4通过第二滑槽 242与 第二支撑杆 24配合连接。
使用 , 第一限位卡座 3可在第一滑槽 222内进行滑动, 从而调整第一限位 卡座 3的横向位置, 当移动至满足基板放置的位置时, 通过相应的固定机构将第 一限位卡座 3与第一支撑杆 22固定即—可。 同理, 第二限位卡座 4也可在第二支 撑杆 24上移动, 在此不再赘述。 迸而使得第一限位卡座 3和第二限位卡座 4之 间的距离可调, 满足不同尺寸基板放置的要求。 采用此种连接方式, 第一限位卡 座 3与第一支撑杆 22在横向上可任意调整位置, 并将第一限位卡座 3固定在任 意适合的位置上; 第二限位卡座 4亦可如此。 进而可更好地配合放置不同尺寸的 基板, 进一步提高基板存放架的使用范围。
本实施倒中, 由于在人工手动通过第≡侧面】 3向基板存放架内送入基板时, 会存在放置的偏差, 倒如使得基板并没有完全放置在第一支撑杆 22和第二支撑 杆 24上, 基板的一端有可能放置在第一限位卡座 3或第二限位卡座 4上, 从而 严重影响到基板的放置精度, 对后续的生产亦会造成一定的影响。 为此, 第一限 位卡座 3上设置有第一滚轮 32, 第一滚轮 32的轴线沿纵向延伸, 并且第一滚轮 32的外周面与第一限位部 31相切; 第二限位卡座 4上设置有第二滚轮 42, 第二 滚轮 42的轴线沿纵向延伸, 并且第二滚轮 42的外周面与第二限位部 4】相切。
使用时, 当人工将基板放置到基板放置层 2上时, 假使基板的一端放置在第 一限位卡座 3上时, 基板的底部会与第一滚轮 32的外周面相抵靠, 此时基板会 在自身重力的作用下沿第一滚轮 32的外周面开始滑落并落入第一支撑軒 22上, 并旦通过与第一滚轮 32外周面相切的第一限位部 3】实现对基板的卡接; 第二限 位卡座 4上的第二滚轮 42亦是如此, 不再赘述。
利用第一限位卡座 3上设置的第一滚轮 32和第二限位卡座 4上设置的第二 滚轮 42, 在横向上将未放置到位的基板, 利用基板自身重力从第一滚轮 32或第 二滚轮 42上滑落至第一支撑籽 22和第二支撑杆 24」:, 从而保证了基板的放置 到位, 进而提高了基板的放置精度, 为后续的生产提供良好的条件。
本实施倒中, 由于基板放置架 ή可存放不同尺寸的基板, 有时当基板尺寸过 小时, 基板沿横向两端分别与第一支撑杆 22和第二支撑杆 24的接触面较小, 但 基板自身具有一定的重量,其横向两端与第 ·支撑杆 22和第二支撑軒 24靠接后, 其中部会产生一定的形变; 或是基板的尺寸进一步缩小后, 其两端不能同时与第 一支撑杆 22和第二支撑杆 24相靠接,从而限制了基板存放架的使 范围。为此, 如图 2所示, 基板放置层 2还包括通过第三支架 25沿纵向设置在第三惻面 13上 的至少一个第三支撑杆 26,并且第三支撑杆 26沿橫向设置在第一支撑杆 22与第 二支撑杆 24之间。
使用^, 可通过第三支撑杆 26与第一支撑杆 22和第二支撑杆 24相互配合, 对不同尺寸的基板起到更好的支撑效果, 同时当通过第一支撑杆 22、第二支撑杆 24和第:三支撑杆 26同时对基板进行支撑, 还可进一步保证基板在架体 1内的存 放的平稳度。
本实施倒中, 基板放置在基板放置层 2上时, 实际是放置在第一支撑杆 22、 第二支撑軒 24和第≡支撑杼 26上。 但随着 TFT- LCD的使用范圈越来越广, 基 板的尺寸也在不断变化中。 为了使得基板存放架可适应不同尺寸的基板的存放, 从而提高基板存放架的使用范围; 如图 9所示, 可使得第三支撑杆 26上设置有 能够沿纵向移动的第三限位卡座 5, 第三限位卡座 5包括用于与基板接合的第三 限位部 5 i。 其具体使用方式和有益效果与第一限位卡座 3、 第二限位卡座 4相同 或类似, 因此不再赘述。
进一步的, 图 10所示, 第三支撑杆 26上沿纵向间隔设置有多组第三定位孔 261 , 第 限位卡座 5选择性地与其中一组第 Ξ:定位孔 261配合连接。 其具体使 用方式和有益效果与第一限位卡座 3与第一定位孔 221相同或类似, 因此不再赘 述。
具体的,第 限位卡座 5通过第 连接机构 51 1与第 定位孔 261配合连接, 其中, 第≡连接机构 51】与第一连接机构 31 1相同或类似, 在此不再赘述。
但采用上述连接方式, 第:三限位卡座 5的可调范围较为固定, 只能根据第:三 定位孔 261的设置而改变相应的安装位置, 其仍有一定的局限性。
因此, 进一步优选的, 如图 i l所示, 第三支撑杆 26上沿纵向设置有第三滑 槽 262, 第三限位卡座 5通过第三滑槽 262与第三支撑杆 26配合连接。其具体使 ffl方式和有益效果与第一限位卡座 3与第一滑槽 222相同或类似,因此不再赘述。
本实施倒中, 由于在人工手动通过第三侧面 13向基板存放架内送入基板^, 会存在放置的偏差, 倒如使得基板并没有完全放置在第 Ξ:支撑杆 26 上, 基板的 一端有可能放置在第―三限位卡座 5上, 从而严重影响到基板的放置精度, 对后续 的生产亦会造成一定的影响。 为此, 第三限位卡座 5上设置有第 滚轮 52, 第:三 滚轮 52的轴线沿横向延伸, 并 ϋ第三滚轮 52的夕卜周面与第三限位部 51相切。 其具体使 方式和有益效果与第一限位卡座 3与第一滑轮相同或类似, 因此不再 赘述。
本实施例中, 还可在架体 i在第二侧面 12处沿垂向设置有至少一个第一支 撑架 6, 第一支撑架 6与第一支架 21连接固定; 架体 1在第四侧面 14处沿垂向 设置有至少一个第二支撑架 7, 第二支撑架 7与第二支架 23连接固定。其通过架 体 1在第二侧面 12处设置第一支撑架 6, 在第四侧面 14处设置第二支撑架 7, 从而利用第一支撑架 6和第二支撑架 7对架体 1起到支撑作用, 而提高基板放 置架的整体结构强度。
最后应说明的是: 以上实施方式及实施例仅 ]¾以说明本发明的技术方案, 而 非对其限制; 尽管参照前述实施方式及实施例对本发明进行了详细的说明, 本领 域的普通技术人员应当理解: 其依然可以对前述实施方式或实施例所记载的技术 方案进行修改, 或者对其中部分技术特征进行等同替换; 而这些修改或者替换, 并不使相应技术方案的本质脱离本发明实施方式或实施倒技术方案的精神和范 围。

Claims

权利要求书
1 . 一种基板存放架, 包括一中空的架体, 所述架体形成彼此相对的第一侧面 和第三惻面以及彼此相对的第二侧面和第四侧面, 其中,
在所述架体的内部设置有至少一个基板放置层,
其中, 所述基板放置层包括:
与所述架体连接并设置在所述第二侧面处的第一支架;
沿横向设置在所述第一支架上并向所述架体的内部延伸的第一支撑杆; 与所述架体连接并设置在所述第四侧面处的第二支架;
沿横 ^设置在所述第二支架上并 ^所述架体的内部延伸的第二支撑杆。
2. 根据权利要求 1所述的基板存放架, 其中, 所述基板放置层为多个, 并且 多个所述基板放置层沿垂向依次间隔设置在所述架体的内部。
3. 根据权利要求 1所述的基板存放架, 其中, 在所述第一支撑杆上设置有能 够沿横向移动的第一限位卡座, 所述第一限位卡座包括用于与基板接合的第一限 位部;
在所述第二支撑杆上设置有能够沿横向移动的第二限位卡座, 所述第二限位 卡座包括 ¾于与基板接合的第二限位部。
4. 根据权利要求 3所述的基板存放架, 其中, 所述第一支撑杆上沿横向间隔 设置有多组第一定位孔, 所述第一限位卡座选择性地与其中一组所述第一定位孔 配合连接;
所述第二支撑杆上沿横 ^间隔设置有多组第二定位孔, 所述第二限位卡座选 择性地与其中一组所述第二定位孔配合连接。
5. 根据权利要求 3所述的基板存放架, 其中, 所述第一支撑杆上沿横向设置 有第一滑槽, 所述第一限位卡座通过所述第一滑槽与所述第一支撑杆配合连接; 所述第二支撑杼上沿横向设置有第二滑槽, 所述第二限位卡座通过所述第二 滑槽与所述第二支撑杆配合连接。
6. 根据权利要求 3所述的基板存放架, 其中, 所述第一限位卡座上设置有第 一滚轮, 所述第一滚轮的轴线沿纵向延伸, 并且所述第一滚轮的外周面与所述第 一限位部相切- 所述第二限位卡座上设置有第二滚轮, 所述第二滚轮的轴线沿纵向延伸, 并 且所述第二滚轮的外周面与所述第二限位部相切。
7. 根据权利要求 1所述的基板存放架, 其中, 所述基板放置层还包括通过第 支架沿纵向设置在所述第三侧面上的至少一个第:三支撑杆, 并且所述第—三支撑 沿横向设置在所述第一支撑杆与所述第二支撑杆之间。
8. 根据权利要求 7所述的基板存放架, 其中, 在所述第三支撑杆上设置有能 够沿纵向移动的第三限位卡座, 所述第三限位卡座包括用于与基板接合的第≡限 位部。
9. 根据权利要求 8所述的基板存放架, 其中, 所述第三支撑杆上沿纵向间隔 设置有多组第三定位孔, 所述第三限位卡座选择性地与其中一组所述第三定位孔 配合连接。
10. 根据权利要求 8所述的基板存放架, 其中, 所述第:三支撑杆上沿纵向设 置有第≡滑槽, 所述第≡限位卡座通过所述第≡滑槽与所述第≡支撑杆配合连 接。
】1 . 根据权利要求 8所述的基板存放架, 其中, 所述第≡限位卡座上设置有 第三滚轮, 所述第≡滚轮的轴线沿横向延伸, 并且所述第≡滚轮的外周面与所述 第三限位部相切。
12. 根据权利要求 : 所述的基板存放架, 其中, 所述架体在所述第二侧面处 沿垂向设置有至少一个第一支撑架, 所述第一支撑架与所述第一支架连接固定; 所述架体在所述第四侧面处沿垂向设置有至少一个第二支撑架, 所述第二支 撑架与所述第二支架连接固定。
PCT/CN2014/070753 2013-09-09 2014-01-17 基板存放架 Ceased WO2015032174A1 (zh)

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