WO2015027996A1 - Procédé de production de sous-modules solaires par réalisation de tranchées d'isolation électriquement isolantes dans un module solaire en couches minces et procédé de production d'un module solaire en couches minces doté de telles tranchées d'isolation - Google Patents

Procédé de production de sous-modules solaires par réalisation de tranchées d'isolation électriquement isolantes dans un module solaire en couches minces et procédé de production d'un module solaire en couches minces doté de telles tranchées d'isolation Download PDF

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Publication number
WO2015027996A1
WO2015027996A1 PCT/DE2014/100308 DE2014100308W WO2015027996A1 WO 2015027996 A1 WO2015027996 A1 WO 2015027996A1 DE 2014100308 W DE2014100308 W DE 2014100308W WO 2015027996 A1 WO2015027996 A1 WO 2015027996A1
Authority
WO
WIPO (PCT)
Prior art keywords
substrate
thin
thin film
laser
laser beam
Prior art date
Application number
PCT/DE2014/100308
Other languages
German (de)
English (en)
Inventor
Ralf HUNGER
Stephan MARSCHALL
Patrick Mende
Andreas KAHN
Original Assignee
Solibro Hi-Tech Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Solibro Hi-Tech Gmbh filed Critical Solibro Hi-Tech Gmbh
Priority to CN201480048042.0A priority Critical patent/CN105917473B/zh
Priority to EP14789777.1A priority patent/EP3039725A1/fr
Publication of WO2015027996A1 publication Critical patent/WO2015027996A1/fr

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
    • H01L31/042—PV modules or arrays of single PV cells
    • H01L31/0445—PV modules or arrays of single PV cells including thin film solar cells, e.g. single thin film a-Si, CIS or CdTe solar cells
    • H01L31/046—PV modules composed of a plurality of thin film solar cells deposited on the same substrate
    • H01L31/0463—PV modules composed of a plurality of thin film solar cells deposited on the same substrate characterised by special patterning methods to connect the PV cells in a module, e.g. laser cutting of the conductive or active layers
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy
    • Y02E10/541—CuInSe2 material PV cells
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50—Manufacturing or production processes characterised by the final manufactured product

Definitions

  • Front electrode structure is formed as a combination of a transparent thin film of a conductive oxide and a mesh-like, thicker layer in the form of an electrode collection structure.
  • the shock wave generated in the region of the laser pulse leads to an explosive detachment of the complete thin-film package, which is located along the direction of movement of the laser-induced shockwave. Because this shockwave starting from the interface
  • the substrate is rectangular with a first edge length and a second edge length, a top edge and a bottom edge, spaced by an amount of 10% to 15% of the first or the second edge length parallel to
  • Thin-film solar cells with a front encapsulation element Thin-film solar cells with a front encapsulation element
  • Embodiment of a thin-film solar module with three horizontal isolation trenches Embodiment of a thin-film solar module with three horizontal isolation trenches
  • Embodiment of a thin-film solar module with four horizontal isolation trenches Embodiment of a thin-film solar module with four horizontal isolation trenches
  • FIG. 1 shows a purely schematic representation of a first embodiment of a thin-film solar module with three horizontal insulating trenches 11, 12, 13. The monolithically interconnected
  • a third isolation trench 13 extends parallel to the two remaining isolation trenches 11, 12 in the middle between these two.
  • Each of the three insulating trenches 11, 12, 13 cuts through all the thin-film solar cells except for the outermost two, which are each arranged adjacent to the two long longitudinal edges of the substrate 1. These two outermost thin-film solar cells serve as so-called contact cells, the parallel shading by the
  • Isolation trenches formed sub-solar modules. Between the outer edges of the substrate 1 and the adjacent insulating trenches 11, 12 and between the
  • Figure 2 shows a purely schematic representation of a second embodiment of a thin-film solar module with four horizontal isolation trenches 11, 12, 13,14. Otherwise, the Kantanmene the substrate 1 with those of Figure 1 match. All other explanations regarding FIG. 1 also apply accordingly.
  • In contrast to the first embodiment are two more Insulating trenches 13, 14 equidistant to each other and to the outside arranged first two isolation trenches 11 and 12 are arranged.
  • Silicon oxynitride is formed.
  • the barrier thin film 1a is followed by the metallic back electrode thin film 2, followed by the absorbent thin film 3 and the front electrode pattern 4.
  • This front electrode pattern 4 is composed of a front electrode thin film 40 of transparent electrically conductive oxide and an electrode collector structure 41.
  • the electrode collector structure may have a thickness other than the listed thin films be made in the range of many microns.
  • FIG. 5 shows, in a schematic, not to scale, sectional representation, as in further production steps, the structure of sub-modules shown in FIG. 4 by means of an applied layer

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Sustainable Development (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Power Engineering (AREA)
  • Sustainable Energy (AREA)
  • Manufacturing & Machinery (AREA)
  • Photovoltaic Devices (AREA)

Abstract

La présente invention concerne un procédé pour produire des sous-modules solaires par réalisation de tranchées d'isolation dans un module solaire en couches minces, composé de cellules solaires en couches minces interconnectées de manière monolithique, ledit procédé comprenant les étapes suivantes : disposer d'un laser présentant une longueur d'onde laser, disposer d'un substrat (1) transparent à ladite longueur d'onde laser, la première face du substrat (1) présentant une pluralité de cellules solaires en couches minces connectées de manière monolithique, qui se composent d'une couche mince d'électrode de retour (2) métallique, d'une couche mince absorbante (3) disposée sur la couche mince d'électrode de retour (2) métallique et d'une structure d'électrode avant (4) disposée dessus, projeter un faisceau laser (L) sur le substrat, déplacer le faisceau laser (L) pour produire au moins une tranchée d'isolation (11, 12, 13, 14). Selon l'invention, il est prévu de projeter le faisceau laser (L) sur la seconde face du substrat (1), de le faire arriver sur la couche mince d'électrode de retour (2) métallique, à travers le substrat (1), et de l'ajuster avec des impulsions laser situées dans la plage des picosecondes ou dans celle des femtosecondes, de manière à détacher du substrat (1), le long de la ligne de coupe (S), la couche mince absorbante (3) disposée sur la couche mince d'électrode de retour métallique et la structure d'électrode avant (4) disposée sur la couche mince absorbante, conjointement avec la couche mince d'électrode de retour (2) métallique.
PCT/DE2014/100308 2013-08-30 2014-08-28 Procédé de production de sous-modules solaires par réalisation de tranchées d'isolation électriquement isolantes dans un module solaire en couches minces et procédé de production d'un module solaire en couches minces doté de telles tranchées d'isolation WO2015027996A1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
CN201480048042.0A CN105917473B (zh) 2013-08-30 2014-08-28 用于通过电绝缘的绝缘沟槽在薄层太阳能模块中制造子太阳能模块的方法以及用于制造具有这种类型的绝缘沟槽的薄层太阳能模块的方法
EP14789777.1A EP3039725A1 (fr) 2013-08-30 2014-08-28 Procédé de production de sous-modules solaires par réalisation de tranchées d'isolation électriquement isolantes dans un module solaire en couches minces et procédé de production d'un module solaire en couches minces doté de telles tranchées d'isolation

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102013109478.3A DE102013109478A1 (de) 2013-08-30 2013-08-30 Verfahren zur Herstellung von Sub-Solarmodulen durch elektrisch isolierende Isoliergräben in einem Dünnschichtsolarmodul und Verfahren zur Herstellung eines Dünnschichtsolarmoduls mit derartigen Isoliergräben
DE102013109478.3 2013-08-30

Publications (1)

Publication Number Publication Date
WO2015027996A1 true WO2015027996A1 (fr) 2015-03-05

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/DE2014/100308 WO2015027996A1 (fr) 2013-08-30 2014-08-28 Procédé de production de sous-modules solaires par réalisation de tranchées d'isolation électriquement isolantes dans un module solaire en couches minces et procédé de production d'un module solaire en couches minces doté de telles tranchées d'isolation

Country Status (4)

Country Link
EP (1) EP3039725A1 (fr)
CN (1) CN105917473B (fr)
DE (1) DE102013109478A1 (fr)
WO (1) WO2015027996A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2017121382A1 (fr) * 2016-01-13 2017-07-20 北京铂阳顶荣光伏科技有限公司 Chargeur solaire

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102015115030A1 (de) * 2015-09-08 2017-03-09 Von Ardenne Gmbh Verfahren zum Entfernen einer Schicht von einem Substrat und dessen Verwendung
DE102019006095A1 (de) * 2019-08-29 2021-03-04 Azur Space Solar Power Gmbh Vereinzelungsverfahren zur Vereinzelung einer mehrere Solarzellenstapel umfasssenden Halbleiterscheibe

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3129344A1 (de) 1980-07-25 1982-09-16 Eastman Kodak Co., 14650 Rochester, N.Y. Anordnung von photozellen sowie verfahren zur herstellung derselben
US4667058A (en) 1985-07-01 1987-05-19 Solarex Corporation Method of fabricating electrically isolated photovoltaic modules arrayed on a substrate and product obtained thereby
US20100062560A1 (en) * 2008-09-10 2010-03-11 Stion Corporation Application specific solar cell and method for manufacture using thin film photovoltaic materials

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DE102009056572B4 (de) * 2009-12-01 2014-10-23 Manz Automation Ag Verfahren zum zumindest bereichsweisen Entfernen einer Schicht eines Schichtenstapels
JP2011129631A (ja) * 2009-12-16 2011-06-30 Showa Shell Sekiyu Kk Ｃｉｓ系薄膜太陽電池の製造方法
JP2012114398A (ja) * 2010-11-05 2012-06-14 Kataoka Seisakusho:Kk 薄膜太陽電池の製造方法、レーザ加工機、薄膜太陽電池製造装置
DE102011017807A1 (de) * 2011-04-29 2012-10-31 Trumpf Laser- Und Systemtechnik Gmbh Verfahren zum laserinduzierten Entfernen von Bereichen von Schichten eines Schichtenstapels

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Publication number Priority date Publication date Assignee Title
DE3129344A1 (de) 1980-07-25 1982-09-16 Eastman Kodak Co., 14650 Rochester, N.Y. Anordnung von photozellen sowie verfahren zur herstellung derselben
US4667058A (en) 1985-07-01 1987-05-19 Solarex Corporation Method of fabricating electrically isolated photovoltaic modules arrayed on a substrate and product obtained thereby
US20100062560A1 (en) * 2008-09-10 2010-03-11 Stion Corporation Application specific solar cell and method for manufacture using thin film photovoltaic materials

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
G. HEISE ET AL: "Monolithic interconnection of CIGSSe solar cells by picosecond laser structuring", PROC. SPIE 7585, LASER-BASED MICRO- AND NANOPACKAGING AND ASSEMBLY IV, 23 February 2010 (2010-02-23), pages 1 - 12, XP040549756, DOI: 10.1117/12.851907 *
GERHARD HEISE ET AL: "Optimization of picosecond laser structuring for the monolithic serial interconnection of CIS solar cells", PROGRESS IN PHOTOVOLTAICS: RESEARCH AND APPLICATIONS, 23 January 2012 (2012-01-23), pages n/a - n/a, XP055109264, ISSN: 1062-7995, DOI: 10.1002/pip.1261 *

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2017121382A1 (fr) * 2016-01-13 2017-07-20 北京铂阳顶荣光伏科技有限公司 Chargeur solaire

Also Published As

Publication number Publication date
CN105917473A (zh) 2016-08-31
EP3039725A1 (fr) 2016-07-06
CN105917473B (zh) 2018-03-02
DE102013109478A1 (de) 2015-03-05

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