WO2015002149A1 - Équipement de traitement de gaz d'échappement - Google Patents

Équipement de traitement de gaz d'échappement Download PDF

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Publication number
WO2015002149A1
WO2015002149A1 PCT/JP2014/067437 JP2014067437W WO2015002149A1 WO 2015002149 A1 WO2015002149 A1 WO 2015002149A1 JP 2014067437 W JP2014067437 W JP 2014067437W WO 2015002149 A1 WO2015002149 A1 WO 2015002149A1
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WO
WIPO (PCT)
Prior art keywords
combustion chamber
exhaust gas
combustion
gas
exhaust
Prior art date
Application number
PCT/JP2014/067437
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English (en)
Japanese (ja)
Inventor
丙哲 金
一彰 藤森
優 森山
鉄郎 星野
亮 藤木
育新 馬
小池　哲夫
Original Assignee
小池酸素工業株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by 小池酸素工業株式会社 filed Critical 小池酸素工業株式会社
Priority to CN201480037729.4A priority Critical patent/CN105358911B/zh
Priority to KR1020167002513A priority patent/KR20160028459A/ko
Publication of WO2015002149A1 publication Critical patent/WO2015002149A1/fr

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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23J—REMOVAL OR TREATMENT OF COMBUSTION PRODUCTS OR COMBUSTION RESIDUES; FLUES 
    • F23J1/00—Removing ash, clinker, or slag from combustion chambers
    • F23J1/06—Mechanically-operated devices, e.g. clinker pushers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G5/00—Incineration of waste; Incinerator constructions; Details, accessories or control therefor
    • F23G5/32—Incineration of waste; Incinerator constructions; Details, accessories or control therefor the waste being subjected to a whirling movement, e.g. cyclonic incinerators
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G7/00—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals
    • F23G7/06—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
    • F23G7/061—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating
    • F23G7/065—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating using gaseous or liquid fuel

Definitions

  • the present invention relates to an exhaust gas treatment device for removing and exhausting, for example, exhaust gas discharged from a semiconductor manufacturing process by combustion or thermal decomposition.
  • the exhaust gas processing apparatus described in Patent Document 1 is connected to a cylindrical combustion chamber into which an exhaust gas to be detoxified and a reaction promoting gas are introduced at one end and orthogonal to the other end of the combustion chamber. And an exhaust pipe through which auxiliary combustion gas flows in and combustion exhaust gas is exhausted from the other end.
  • a gas selected from hydrogen, methane, ethane, propane, butane, etc. is introduced as an exhaust gas and a reaction promoting gas from one end side of the combustion chamber, and a mixed gas composed of the reaction promoting gas and the exhaust gas is in a laminar flow state on the exhaust tube side Flowing into.
  • this mixed gas has flammability, it does not contain oxygen having combustion support.
  • the air used as the auxiliary combustion gas is not only expected to promote the mixed gas of the exhaust gas and the reaction promoting gas, but to cool the combustion exhaust gas. It is also expected to act as a cooling gas. For this reason, a large amount of air is required.
  • the exhaust gas treatment apparatus described in Patent Document 2 is configured by providing an exhaust gas supply path to be detoxified on one end side of a combustion chamber whose one end is closed and a burner on the other end side from the supply path. ing. Fuel gas such as hydrogen gas, LNG, LPG, city gas and air are supplied to the burner, and by burning these mixed gases, the exhaust gas can be burned or decomposed in a high temperature range to be detoxified. . Further, in the combustion gas transport passage connected to the other end side of the combustion chamber, air is sucked from the upstream side, and combustion gas in which exhaust gas is burned from the combustion chamber is sucked by the scrubber connected to the downstream side.
  • Fuel gas such as hydrogen gas, LNG, LPG, city gas and air are supplied to the burner, and by burning these mixed gases, the exhaust gas can be burned or decomposed in a high temperature range to be detoxified.
  • the combustion gas transport passage connected to the other end side of the combustion chamber air is sucked from the upstream side, and combustion gas in which exhaust gas is burned from
  • the spark gas is mixed with the mixed gas of the exhaust gas to be detoxified and the reaction promoting gas generated in the combustion chamber at high speed through the exhaust cylinder and colliding with the baffle. It is burned by being ignited by a plug. That is, although the mixed gas generated in the combustion chamber is a combustible gas, air as an auxiliary combustion gas is required to burn the mixed gas. However, depending on the amount of air flowing from the exhaust pipe into the combustion chamber, it may be difficult to completely burn the mixed gas existing in the combustion chamber.
  • the temperature in the combustion chamber can be increased by using a burner.
  • the combustion chamber is in an oxygen-deficient state, and air as an auxiliary combustion gas is required to burn the exhaust gas, making it difficult to completely burn the exhaust gas. There is a risk of becoming.
  • the air flowing through the exhaust pipe and the combustion gas transport passage described in Patent Documents 1 and 2 sucks the function as an auxiliary combustion gas for the combustible gas including the exhaust gas in the combustion chamber and the combustion gas generated from the combustion chamber. It also has a cooling function for the function and the processing equipment. In particular, in order to exert a sufficient cooling effect, it is necessary to flow a large amount of air through the exhaust pipe and the combustion gas transport passage at a high speed. As a result, the temperature in the combustion chamber is limited, and when exhaust gas contains components having a high combustion temperature or components having a high decomposition temperature, it becomes difficult to remove these components. There is a fear.
  • the amount of air flowing into the combustion chamber from the exhaust tube or the combustion gas transport passage may be sufficient to completely burn the exhaust gas.
  • unburned exhaust gas or unreacted exhaust gas may be generated in spite of combustion in the combustion chamber.
  • Such unburned exhaust gas and unreacted exhaust gas may be diluted by a large amount of air flowing through the exhaust pipe or the combustion gas transport passage, and may be lowered to a combustible range concentration or less. In this case, there is a possibility that it is difficult to sufficiently remove the harmful substances.
  • An object of the present invention is to provide an exhaust gas treatment apparatus for removing exhaust gas by rational combustion or thermal decomposition.
  • an exhaust gas treatment apparatus includes a combustion chamber that closes one end and burns or decomposes the supplied exhaust gas to remove it, and the other end of the combustion chamber.
  • An exhaust pipe that exhausts exhaust gas that is connected and detoxified in the combustion chamber; and a housing that houses the combustion chamber and the exhaust pipe, and the combustion chamber is detoxified on one closed end side
  • An exhaust gas supply port for supplying exhaust gas to be supplied is provided, and a burner is provided on the exhaust tube side of the exhaust gas supply port, and further, combustion is supported between the burner and the exhaust gas supply port or on the exhaust tube side of the burner.
  • a combustion-supporting gas supply nozzle for supplying a property gas is provided.
  • a plurality of burners and a plurality of combustion-supporting gas supply nozzles are disposed around the combustion chamber.
  • the plurality of burners arranged around the combustion chamber are arranged to be inclined with respect to the central axis of the combustion chamber, and a plurality of combustion-supporting gas supplies It is preferable that the nozzle is also inclined with respect to the central axis of the combustion chamber.
  • the combustion chamber includes a shaft that is rotatably disposed through one end of the combustion chamber, and a shaft attached to the shaft. It is preferable that a scraper having a scraping member that scrapes off deposits adhered to the inner surface is disposed.
  • an exhaust gas supply port for supplying exhaust gas to be removed and an exhaust gas supply port are provided in the combustion chamber closed at one end.
  • a burner is provided on the exhaust tube side, and a combustion-supporting gas supply nozzle is provided between the burner and the exhaust gas supply port or on the exhaust tube side of the burner. For this reason, when there is an unburned exhaust gas in the combustion chamber, a mixed gas of the exhaust gas and the combustion-supporting gas supplied from the combustion-supporting gas supply nozzle can be generated. Can be burned.
  • the oxygen concentration in the combustion chamber can be independently adjusted by supplying the combustion-supporting gas independently by the combustion-supporting gas supply nozzle provided in the combustion chamber. For this reason, even when the exhaust gas is a combustible gas and the atmosphere in the combustion chamber becomes deficient in oxygen, it is possible to eliminate deficient oxygen and promote reliable combustion.
  • the combustion temperature contained in the exhaust gas to be detoxified It is possible to surely burn a component having a high temperature, or to reliably decompose and remove a component having a high decomposition temperature.
  • the internal temperature of the combustion chamber can be increased in a substantially uniform state.
  • a plurality of burners arranged around the combustion chamber are arranged to be inclined in a plane orthogonal to the center axis of the combustion chamber, and a plurality of combustion-supporting gas supply nozzles are also orthogonal to the center axis of the combustion chamber. Inclined in the plane. For this reason, the flame formed by the burner and the combustion-supporting gas injected from the combustion-supporting gas supply nozzle form a spiral flow around the central axis, and exhaust gas is entrained in this spiral flow. Can realize efficient combustion.
  • a shaft disposed rotatably in the combustion chamber through one end of the combustion chamber; and a scraping member attached to the shaft to scrape off deposits attached to the inner surface of the combustion chamber;
  • FIG. 1 It is a schematic diagram explaining the whole structure of a processing apparatus. It is a figure explaining the relationship between the burner arrange
  • the processing apparatus according to the present invention is a toxic special material such as silane, disilane, diborane, phosphine, arsine, nitrogen trifluoride, silicon fluoride, silicon chloride, etc. produced from the manufacturing process of semiconductors, liquid crystal panels or solar cells.
  • Exhaust gas such as gas or chlorofluorocarbon gas, carbon tetrafluoride, sulfur hexafluoride, etc., which adversely affects the global environment, explosive hydrogen gas, etc. is burned or decomposed and removed for discharge.
  • the treatment apparatus supplies exhaust gas to be detoxified into the combustion chamber, supplies combustion-supporting gas, maintains the combustion chamber at a high temperature by igniting a burner, and burns the supplied exhaust gas. It is configured so that it can be removed or decomposed at a high temperature.
  • the exhaust gas that has been removed (hereinafter referred to as “detoxification gas”) can be exhausted from an exhaust pipe connected to the combustion chamber.
  • the exhaust gas to be supplied to the combustion chamber to be detoxified is not limited to whether it is a flammable gas or a non-flammable gas.
  • the exhaust gas generated from the process is targeted.
  • Such exhaust gases include flammable gases that can be detoxified by combustion, nonflammable gases that can be decomposed and detoxified in a high temperature range, and the like. For this reason, it is possible to maintain the combustion chamber at a combustible concentration by supplying a combustion-supporting gas to the combustion chamber, and it is possible to maintain a high temperature region by igniting the burner.
  • the configuration of the burner is not particularly limited, and a burner that can burn a mixed gas obtained by mixing a fuel gas such as natural gas or liquefied petroleum gas and a combustion-supporting gas such as air or oxygen gas is used. Is possible. Further, the number of burners provided in the combustion chamber is not limited, and any number may be used as long as the exhaust gas supplied to the combustion chamber can be held at a sufficiently high temperature to burn or decompose. For this reason, it is preferable to set suitably according to conditions, such as a component and flow volume of the exhaust gas supplied to a combustion chamber, and the thickness of a combustion chamber.
  • the burner is preferably arranged so that the flame can be swirled around the center of the combustion chamber without directing the direction of the flame so that the temperature in the combustion chamber can be made uniform.
  • air or oxygen gas as the combustion-supporting gas supplied to the combustion chamber.
  • air is preferable in consideration of conditions such as price and availability.
  • a blower or a fan is provided inside the housing, and the blower or fan can be driven to supply air as a combustion-supporting gas directly to the combustion chamber.
  • the burner and the combustion-supporting gas supply nozzle provided in the combustion chamber do not necessarily have to be directly attached to the combustion chamber, and the burner and the combustion-supporting gas supply nozzle can be attached. What is necessary is just to be comprised. That is, the burner and the combustion-supporting gas supply nozzle do not need to be fixed at a predetermined position in the combustion chamber, and a mounting portion for the burner and the combustion-supporting gas supply nozzle is provided at the predetermined position, It may be configured to be detachable.
  • the processing apparatus A includes a combustion chamber 1 in which one end (the left end in FIG. 1 in this embodiment) 1a is closed, and the other end 1b of the combustion chamber 1 orthogonal to the combustion chamber 1.
  • the exhaust gas supply port 3 formed on the end 1a side of the combustion chamber 1, the burner 4 provided closer to the exhaust cylinder 2 than the exhaust gas supply port 3, and the exhaust gas more than the burner 4.
  • a combustion-supporting gas supply nozzle 5 provided on the cylinder 2 side, and a housing 10 in which the combustion chamber 1 and the exhaust cylinder 2 are housed are configured.
  • the combustion chamber 1 is disposed in the longitudinal direction in the lateral direction, and is disposed in the longitudinal direction with respect to the combustion chamber 1.
  • An exhaust pipe 2 is connected. Since a connection between the combustion chamber 1 and the exhaust pipe 2 is required to be airtight, both are connected by welding.
  • the combustion chamber 1 is formed in a cylindrical shape, and the optimum dimension is set according to the processing conditions including the amount of exhaust gas to be detoxified.
  • the combustion chamber 1 is welded to the exhaust pipe 2 on the end 1b side, the cylinder 1c on the end 1a side and the end 1b side are advantageous for maintenance and inspection of the inside of the combustion chamber 1.
  • these cylinders 1c and 1d are bolt-joined via the flange 1e, and the combustion chamber 1 is comprised.
  • the exhaust gas supply port 3 is provided in the cylinder 1c on the closed end 1a side of the combustion chamber 1.
  • a nipple 3a having a flange 3b is formed on a side surface of the cylindrical body 1c, and an exhaust gas introduction pipe 11 is connected to the flange 3b.
  • An end portion 11a of the exhaust gas introduction pipe 11 is provided so as to penetrate the housing 10, and is connected to an exhaust gas generation source (not shown).
  • the burner 4 is provided closer to the exhaust tube 2 than the exhaust gas supply port 3.
  • a plurality of nipple-like attachment members 4a are provided, and the burner 4 is detachably attached to each attachment member 4a.
  • the attachment members 4 a are provided at three equal angles on the outer peripheral surface of the combustion chamber 1, and each attachment member 4 a is slightly inclined without being directed to the center of the combustion chamber 1. It is formed in the state. For this reason, the flame formed by the burner 4 swirls counterclockwise as shown in FIG. 2B, and the exhaust gas supplied to the end 1a side of the combustion chamber 1 is entrained in this swirl flow. It is possible to obtain a simple mixed state.
  • a mixed gas pipe 12 is connected to each burner 4 attached to an attachment member 4 a provided in the combustion chamber 1.
  • the mixed gas pipe 12 is connected to a mixer 13 provided inside the housing 10, and is configured so that the mixed gas formed by the mixer 13 can be supplied to the burner 4.
  • the mixer 13 is connected to a fuel gas supply source (not shown) and the flow rate is monitored by a flow meter 14a, and the flow rate is monitored by a flow meter 16a connected to a blower 15 provided inside the housing 10.
  • the air pipe 16 is connected. Then, by operating the mixer 13 while monitoring the flow meters 14a and 16a, a mixed gas having a mixing ratio with air sufficient to completely burn the supplied fuel gas is formed and supplied to the burner 4. Configured to get.
  • the means for igniting the mixed gas injected from the burner 4 after supplying the mixed gas to the burner 4 is not particularly limited, and it is possible to ignite by arranging a spark plug (not shown) in the vicinity of the mounting member 4a. is there.
  • the combustion-supporting gas supply nozzle 5 is provided between the exhaust gas supply port 3 disposed in the combustion chamber 1 and the burner 4 or closer to the exhaust tube 2 than the burner 4, and is in an unburned state existing inside the combustion chamber 1.
  • the combustion-supporting gas necessary for recombusting the exhaust gas is supplied.
  • the number of the combustion-supporting gas supply nozzles 5 provided in the combustion chamber 1 is not limited, and an optimal number is set according to conditions such as a component and a flow rate of the supplied exhaust gas.
  • the combustion-supporting gas supply nozzles 5 are provided at two locations on the exhaust tube 2 side with respect to the burner 4 provided in the combustion chamber 1.
  • the configuration of the combustion-supporting gas supply nozzle 5 is not particularly limited as long as the combustion-supporting gas such as air or oxygen can be injected independently.
  • air is used as the combustion-supporting gas, and the combustion-supporting gas supply nozzle 5 injects a sufficient amount of air for complete combustion of the exhaust gas supplied to the combustion chamber 1. It only has to be obtained.
  • a nipple-like attachment member 5a is provided in order to attach the combustion-supporting gas supply nozzle 5 to a position facing the cylindrical body 1d constituting the combustion chamber 1.
  • Each attachment member 5a is formed in an inclined state with respect to the center of the combustion chamber 1, and a combustion-supporting gas supply nozzle 5 is detachably attached to these attachment members 5a.
  • the combustion-supporting gas is injected from the combustion-supporting gas supply nozzle 5 into the combustion chamber 1, the injected combustion-supporting gas turns counterclockwise as shown in FIG. It is possible to obtain a swirling flow composed of exhaust gas supplied to the end 1a side of the combustion chamber 1, a flame swirling counterclockwise, and a combustion-supporting gas.
  • Each combustion-supporting gas supply nozzle 5 is connected to an air pipe 17, and the air pipe 17 is connected to a blower 15 via a flow meter 17a. For this reason, it is possible to set the amount of air from the combustion-supporting gas supply nozzle 5 to the combustion chamber 1 by monitoring the flow meter 17a and adjusting the flow rate of air.
  • An exhaust pipe 2 is connected to the end 1 b of the combustion chamber 1.
  • the exhaust tube 2 has a lower end 2a opened inside the housing 10, and the upper end 2b is disposed through the upper surface of the housing 10 and connected to a water scrubber (not shown). Yes.
  • the suction force by the suction pump provided in the water scrubber is acting on the exhaust pipe 2.
  • the magnitude of this suction force is not limited. In this embodiment, a suction force of about 1 kilopascal (KPa) acts on the end 2b of the exhaust pipe 2.
  • the housing 10 is configured so as to exhibit high airtightness, and an opening 10a is formed on the upper surface, so that air can be introduced through the opening 10a. Therefore, when a suction force acts on the exhaust cylinder 2, an air flow from below to above is formed in the exhaust cylinder 2, and accordingly, the inside of the combustion chamber 1 also becomes negative pressure, and the interior of the casing 10 An air flow from the opening 10a to the exhaust pipe 2 is formed. Further, when the blower 15 is operated and the air in the housing 10 is supplied to the air pipes 16 and 17, the air flows from the opening 10 a of the housing 10 to the blower 15 as the air is supplied. It is formed.
  • the combustion chamber 1 is provided with a scraper 20 for scraping off adhering dust.
  • the scraper 20 may have any structure that can move along the inner surface of the combustion chamber 1 by manual operation or automatic operation and scrape off dust adhering to the inner surface.
  • the scraper 20 includes a scraping member 20a having a length substantially equal to the length of the combustion chamber 1, a support member 20b connected to one end of the scraping member 20a, and a support.
  • the shaft 20c is connected to a predetermined position of the member 20b and serves as the rotation center of the scraper 20, and a reinforcing member 20d attached along the support member 20b.
  • the scraper 20 has a scraping member 20 a disposed inside the combustion chamber 1, a shaft 20 c penetrating the closed end 1 a of the combustion chamber 1, and rotatably supported by the bearing member 21. Yes.
  • a sprocket wheel 22c constituting the driving device 22 is attached to an end portion of the shaft 20c protruding from the bearing member 21.
  • the scraping member 20a can be rotated along the inner surface of the combustion chamber 1 by transmitting the rotation of the motor 22a to the shaft 20c via the sprocket wheel 22c and the chain 22b.
  • scraper 20 is always driven or intermittently driven by the driving device 22 is not limited, and is preferably set appropriately in accordance with conditions such as the amount of dust adhering to the combustion chamber 1.
  • the scraping member 20a constituting the scraper 20 is disposed in the combustion chamber 1 over the entire length, there is a possibility that the temperature becomes high during operation and the life is shortened. Therefore, in this embodiment, the scraping member 20a is formed with a cooling medium passage 23 over the entire length in the longitudinal direction, and the cooling medium passage 23 is supplied with pressurized air as a cooling medium so as to be forcibly cooled. Has been.
  • an opening 23a is formed at the free end of the scraping member 20a (the end opposite to the support member 20b). Further, when the scraper 20 is installed in the combustion chamber 1, a plurality of injection ports 23b communicating with the cooling medium passage 23 are formed at positions facing the burner 4 in the scraping member 20a.
  • the cooling medium supplied to the cooling medium passage 23 cools the scraping member 20a in the course of flowing through the cooling medium passage 23, and is discharged from the opening 23a to the exhaust pipe 2, and at the same time from the injection port 23b to the combustion chamber 1 Is released inside.
  • the cooling medium flows through the cooling medium passage 23 formed in the scraping member 20 a constituting the scraper 20, so that the scraper 20 can be cooled to reduce the influence of heat.
  • the scraping member 20 a has a function of scraping off dust adhering to the inner surface of the combustion chamber 1.
  • the scraping member 20a operates in a state where it is exposed to a high temperature and scrapes off dust adhering to the inner surface of the combustion chamber 1 in a state of being firmly solidified, so that it needs to have a high bending strength.
  • the scraping member 20a is formed in a quadrangular section, and the cooling medium passage 23 is formed in a flat quadrangular shape.
  • the scraping member 20a is configured by welding two types of bar members 20a1 and 20a2 having different thicknesses in the longitudinal direction. That is, a longitudinal groove is formed on one surface of the thin bar member 20a1, and a plurality of injection ports 23b communicating with the groove from the other surface are formed.
  • the bar member 20a1 is formed on the center side of the combustion chamber 1.
  • the scraping member 20a is configured by arranging the thick bar material 20a2 on the inner surface side of the combustion chamber 1 and welding them together. And the cooling-medium channel
  • path 23 is formed of the groove
  • the scraping member 20a rotates in a state where it is disposed in the combustion chamber 1 that is at a high temperature, the free end side that is not reinforced by the reinforcing member 20d may be deformed to the inner surface side of the combustion chamber 1. .
  • a slope 20e is formed from the free end to the reinforcing member 20d.
  • the inclination angle of the inclined surface 20e is preferably set as appropriate in accordance with conditions such as the material constituting the scraping member 20a and the temperature assumed for the combustion chamber 1.
  • the shaft 20c constituting the scraper 20 is formed with a cooling medium supply passage (not shown) that communicates with the cooling medium passage 23 formed in the scraping member 20a and the support member 20b, and penetrates in a thickness direction at a predetermined position.
  • a cooling medium supply port is formed. Therefore, the cooling medium supplied through the cooling medium supply port can be discharged from the opening 23a and the ejection port 23b through the shaft 20c, the support member 20b, and the scraping member 20a.
  • the bearing member 21 has a function of rotatably supporting the shaft 20c constituting the scraper 20 and supplying a cooling medium through the shaft 20c. For this reason, the bearing member 21 is disposed in a housing 25 that is attached to a bracket 24 provided in the combustion chamber 1 and in which a hole (not shown) for loosely fitting the shaft 20 c is formed, and in portions corresponding to both ends of the housing 25. And a bearing 21a that fits the shaft 20c and rotatably supports the shaft 20c.
  • the bearing member 21 configured as described above, when the shaft 20c of the scraper 20 is fitted to the bearing 21a and the housing 25 and the cooling medium is supplied to the housing 25 in this state, the supplied cooling medium is the shaft 20c of the scraper 20.
  • the coolant is supplied to the coolant passage 23 through the coolant supply port formed in the above.
  • fuel gas is supplied from a fuel gas supply source (not shown) and the blower 15 is driven to supply air to the mixer 13, and at the same time, air is supplied to the combustion-supporting gas supply nozzle 5. At this time, air is sucked from the opening 10a of the housing 10 to form an air flow in the direction of arrow a.
  • the flow rate of the fuel gas in the fuel gas pipe 14 is monitored by the flow meter 14a, and the flow rate of the air supplied to the mixer 13 is monitored by the flow meter 16a. Then, the mixer 13 is operated while monitoring the flow meters 14 a and 16 a, thereby adjusting the mixing ratio of the fuel gas and air and supplying the mixture to the burner 4. Further, a predetermined amount of air is supplied to the combustion-supporting gas supply nozzle 5 while monitoring the flow meter 17a.
  • a mixed gas of fuel gas and air is supplied from the burner 4 to the combustion chamber 1 and air is supplied from the combustion-supporting gas supply nozzle 5. Then, a flame is formed in the combustion chamber 1 by igniting the burner 4. As shown in FIG. 2, this flame swirls counterclockwise and burns.
  • the water scrubber connected to the exhaust pipe 2 is operated and the suction force of the water scrubber is applied.
  • negative pressure acts on the exhaust cylinder 2, the combustion chamber 1 and the housing 10, and as shown in FIG. 1, a large amount of air is sucked from the opening 10a of the housing 10 and flows in the direction of arrow a. It flows in the direction of arrow b from the lower end 2a of the exhaust tube 2.
  • Equipment including the combustion chamber 1, the exhaust pipe 2, and the blower 15 disposed inside the housing 10 is cooled by a large amount of air flow generated inside the housing 10.
  • a negative pressure acting on the exhaust cylinder 2 causes a flow in the direction of the arrow c in the combustion chamber 1, and a suction force accompanying this flow acts on an exhaust gas generation source (not shown) via the exhaust gas introduction pipe 11, and the exhaust gas becomes exhaust gas. It is supplied from the supply port 3 to the combustion chamber 1.
  • the exhaust gas supplied to the combustion chamber 1 is heated to a high temperature by the flame ignited by the burner 4, and combustible components are combusted, and decomposition components at high temperatures are decomposed.
  • the exhaust gas supplied to the combustion chamber 1 includes a combustion component
  • oxygen necessary for combustion is supplied by the air supplied from the combustion-supporting gas supply nozzle 5, and combustion of the exhaust gas is promoted.
  • the combustion component contained in the exhaust gas can be mixed with the air supplied from the combustion-supporting gas supply nozzle 5 and can be burned substantially completely, so that the removal by combustion can be realized. .
  • the internal temperature of the combustion chamber 1 can be maintained in a sufficiently high temperature range, and the exhaust gas It is possible to reliably decompose the decomposition components in the high temperature range contained in.
  • the detoxification gas burned in the combustion chamber 1 as described above or decomposed and detoxified at a high temperature is sucked by the suction force acting on the exhaust cylinder 2 and flows in the direction of the arrow d to form water (not shown). It is discharged to the scrubber.
  • the exhaust gas treatment apparatus according to the present invention is advantageous when used to detoxify exhaust gas discharged from a semiconductor manufacturing process or exhaust gas discharged from a liquid crystal panel manufacturing process.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Incineration Of Waste (AREA)
  • Gasification And Melting Of Waste (AREA)

Abstract

L'invention concerne un équipement de traitement de gaz d'échappement permettant de retirer un gaz d'échappement par combustion ou par pyrolyse de celui-ci de manière rationnelle. L'équipement de traitement (A) selon l'invention comprend : une chambre de combustion (1) permettant de retirer un gaz d'échappement fourni par combustion ou par décomposition de celui-ci, une partie d'extrémité (1a) de la chambre de combustion (1) étant fermée ; un tuyau d'échappement (2) permettant d'évacuer le gaz d'échappement retiré raccordé à une autre partie d'extrémité (1b) de la chambre de combustion (1) ; et un logement (10) permettant d'accueillir la chambre de combustion (1) et le tuyau d'échappement (2). La chambre de combustion comprend un orifice de fourniture de gaz d'échappement (3) permettant de fournir le gaz d'échappement devant être retiré au côté de la partie d'extrémité fermée (a), un brûleur (4) disposé plus près du côté du tuyau d'échappement (2) que l'orifice de fourniture de gaz d'échappement (3) et une buse de fourniture de gaz maintenant la combustion (5) permettant de fournir un gaz maintenant la combustion disposée entre le brûleur (4) et l'orifice de fourniture de gaz d'échappement (3) ou disposée plus près du côté du tuyau d'échappement (2) que le brûleur (4).
PCT/JP2014/067437 2013-07-01 2014-06-30 Équipement de traitement de gaz d'échappement WO2015002149A1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
CN201480037729.4A CN105358911B (zh) 2013-07-01 2014-06-30 废气的处理装置
KR1020167002513A KR20160028459A (ko) 2013-07-01 2014-06-30 배출 가스의 처리 장치

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2013137931A JP2015010800A (ja) 2013-07-01 2013-07-01 排ガスの処理装置
JP2013-137931 2013-07-01

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WO2015002149A1 true WO2015002149A1 (fr) 2015-01-08

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CN110465156B (zh) 2018-05-09 2023-02-21 伊利诺斯工具制品有限公司 用于回流焊炉的废气过滤装置
WO2021101444A2 (fr) 2019-11-21 2021-05-27 益科斯有限公司 Dispositif de traitement de polluants gazeux
CN113091074B (zh) * 2021-04-01 2023-07-11 北京北方华创微电子装备有限公司 可燃气体处理装置

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