WO2002016830A1 - Procede et dispositif de traitement par combustion des gaz d'echappement - Google Patents

Procede et dispositif de traitement par combustion des gaz d'echappement Download PDF

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Publication number
WO2002016830A1
WO2002016830A1 PCT/JP2001/007136 JP0107136W WO0216830A1 WO 2002016830 A1 WO2002016830 A1 WO 2002016830A1 JP 0107136 W JP0107136 W JP 0107136W WO 0216830 A1 WO0216830 A1 WO 0216830A1
Authority
WO
WIPO (PCT)
Prior art keywords
combustion
gas
exhaust gas
flame
type exhaust
Prior art date
Application number
PCT/JP2001/007136
Other languages
English (en)
Japanese (ja)
Inventor
Takeshi Tsuji
Kohtaro Kawamura
Masaru Nakaniwa
Kazutaka Okuda
Keiichi Ishikawa
Kazutomo Miyazaki
Rikiya Nakamura
Tetsuo Komai
Tomonori Ohashi
Yoshiro Takemura
Original Assignee
Ebara Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2000250940A external-priority patent/JP2002061821A/ja
Priority claimed from JP2000294632A external-priority patent/JP2002106826A/ja
Application filed by Ebara Corporation filed Critical Ebara Corporation
Priority to KR10-2003-7002463A priority Critical patent/KR20030024892A/ko
Priority to US10/362,172 priority patent/US20040028590A1/en
Priority to EP01956985A priority patent/EP1312860A4/fr
Publication of WO2002016830A1 publication Critical patent/WO2002016830A1/fr

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23J—REMOVAL OR TREATMENT OF COMBUSTION PRODUCTS OR COMBUSTION RESIDUES; FLUES 
    • F23J15/00—Arrangements of devices for treating smoke or fumes
    • F23J15/02—Arrangements of devices for treating smoke or fumes of purifiers, e.g. for removing noxious material
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G7/00—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals
    • F23G7/06—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
    • F23G7/061—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating
    • F23G7/065—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating using gaseous or liquid fuel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23D—BURNERS
    • F23D14/00—Burners for combustion of a gas, e.g. of a gas stored under pressure as a liquid
    • F23D14/46—Details, e.g. noise reduction means
    • F23D14/72—Safety devices, e.g. operative in case of failure of gas supply
    • F23D14/74—Preventing flame lift-off
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23D—BURNERS
    • F23D14/00—Burners for combustion of a gas, e.g. of a gas stored under pressure as a liquid
    • F23D14/46—Details, e.g. noise reduction means
    • F23D14/72—Safety devices, e.g. operative in case of failure of gas supply
    • F23D14/82—Preventing flashback or blowback
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23M—CASINGS, LININGS, WALLS OR DOORS SPECIALLY ADAPTED FOR COMBUSTION CHAMBERS, e.g. FIREBRIDGES; DEVICES FOR DEFLECTING AIR, FLAMES OR COMBUSTION PRODUCTS IN COMBUSTION CHAMBERS; SAFETY ARRANGEMENTS SPECIALLY ADAPTED FOR COMBUSTION APPARATUS; DETAILS OF COMBUSTION CHAMBERS, NOT OTHERWISE PROVIDED FOR
    • F23M11/00—Safety arrangements
    • F23M11/04—Means for supervising combustion, e.g. windows
    • F23M11/042—Viewing ports of windows
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23N—REGULATING OR CONTROLLING COMBUSTION
    • F23N5/00—Systems for controlling combustion
    • F23N5/02—Systems for controlling combustion using devices responsive to thermal changes or to thermal expansion of a medium
    • F23N5/08—Systems for controlling combustion using devices responsive to thermal changes or to thermal expansion of a medium using light-sensitive elements
    • F23N5/082—Systems for controlling combustion using devices responsive to thermal changes or to thermal expansion of a medium using light-sensitive elements using electronic means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23C—METHODS OR APPARATUS FOR COMBUSTION USING FLUID FUEL OR SOLID FUEL SUSPENDED IN  A CARRIER GAS OR AIR 
    • F23C2900/00—Special features of, or arrangements for combustion apparatus using fluid fuels or solid fuels suspended in air; Combustion processes therefor
    • F23C2900/9901—Combustion process using hydrogen, hydrogen peroxide water or brown gas as fuel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23N—REGULATING OR CONTROLLING COMBUSTION
    • F23N2229/00—Flame sensors

Definitions

  • the present invention is an exhaust gas generated by a semiconductor or a liquid crystal or the like industrial products processing process, For example silane gas (S i H 4) or halogen gas (NF 3, C 1 F 3 , SF 6, CHF 3, C 2 F 6, about the combustion exhaust gas treatment method and apparatus for processing by combustion or thermal decomposition and / or oxidative degradation hazardous flammable or hardly decomposable waste gas, a containing CF 4, etc.).
  • silane gas Si H 4
  • halogen gas NF 3, C 1 F 3 , SF 6, CHF 3, C 2 F 6, about the combustion exhaust gas treatment method and apparatus for processing by combustion or thermal decomposition and / or oxidative degradation hazardous flammable or hardly decomposable waste gas, a containing CF 4, etc.
  • Conventional combustion-type exhaust gas treatment equipment has a burner section and a combustion chamber on the downstream side of the parner section, supplies combustible gas (combustion gas) to the parner section, and burns the combustible gas to form a flame.
  • the flame is configured to burn the exhaust gas.
  • a combustible gas such as hydrogen gas, city gas, propane gas or the like is used as a fuel gas, and as an oxidant, oxygen or air is usually used.
  • Hydrogen gas is ignitable and explosive, but once it starts burning, the flame rarely blows out and extremely stable combustion is obtained, so it is suitable as a fuel gas for combustion in combustion type exhaust gas treatment equipment. And running costs are high. Hydrogen gas may leak at the piping joints as the piping length from the storage container to the exhaust gas treatment device increases.
  • the method of detecting a combustion flame using this UV sensor has a problem that by-products such as dust during exhaust gas treatment block the lighting opening.
  • the method of detecting the combustion flame with the UV sensor is as follows when detecting the reflected light of the flame from the inner wall of the combustion part. If by-products having UV absorption properties adhere to the inner wall of the reaction section, there is also a problem that the flame cannot be detected because the UV light is absorbed.
  • the lighting port became high temperature due to the high temperature of the reaction part, and it was melted and corroded and closed.
  • the auxiliary combustion gas is supplied to the parner through a nozzle port opened on the inner wall surface of the parner, and the flame is formed by combustion of the auxiliary gas injected from the nozzle port.
  • the flame would blow out due to fluctuations in the amount of exhaust gas introduced into the department.
  • flashback occurred in fuel pipes and the like that supply auxiliary combustion gas.
  • the present invention has been made in view of the above points, and an object of the present invention is to provide an exhaust gas abatement apparatus that does not require storing a combustible substance, does not require a complicated piping configuration, and is unlikely to cause a gas leakage accident. That is, a mixed gas of hydrogen gas and oxygen gas is used as a fuel gas for combustion.
  • a combustion-type exhaust gas treatment method and apparatus that can reduce the equipment cost and running cost and almost eliminate the leakage of hydrogen gas and oxygen gas are provided. It is intended to provide.
  • An object of the present invention is to eliminate the above-mentioned problems and to provide a combustion type exhaust gas treatment apparatus that can always accurately detect the presence or absence of a combustion flame with a UV sensor.
  • the present invention provides a combustion type exhaust gas treatment device that can form a stable combustion flame without blowing out the flame due to fluctuations in the amount of exhaust gas introduced into the wrench, and that does not cause a risk of flashback to the auxiliary combustion gas supply pipe. The purpose is to:
  • a first invention is directed to a combustion type exhaust gas treatment method in which exhaust gas is introduced into a combustion flame and a flammable component in the exhaust gas is thermally decomposed or oxidatively decomposed. Is generated, and the hydrogen gas and the oxygen gas are used as combustion gases for forming a combustion flame.
  • the hydrogen gas and the oxygen gas are subjected to combustion flame formation as a mixed gas without changing the generated gas ratio.
  • fuel It has a burner flame forming part and a water electrolyzer for producing hydrogen gas and oxygen gas.
  • a combustion chamber for introducing the target exhaust gas into the combustion flame and performing thermal oxidation decomposition of the exhaust gas is provided downstream of the corner.
  • a combustion exhaust gas treatment apparatus including a parner, and a combustion chamber downstream of the parner.
  • An auxiliary combustion gas is supplied to the corner, and a combustion flame is formed from the corner toward the combustion chamber.
  • Exhaust gas is introduced into this combustion flame to oxidize and decompose the exhaust gas.
  • a tube or hole that allows direct observation of the combustion flame is provided on the side of the wall of the parner upstream of the combustion flame, and a UV sensor that detects the combustion flame through the tube or hole is provided.
  • a UV translucent member is disposed at a connecting portion between the tube or the hole and the UV sensor, which allows the combustion flame to be directly viewed, and the UV sensor is shielded from the atmosphere in the panner portion. Purge gas flows from the light transmitting member to the side of the parner.
  • the end of the tube or the hole on the side opposite to the corner of the tube through which the combustion flame can be directly seen is closed, and light from the combustion flame in the tube or the hole is transmitted to the UV sensor via an optical fiber.
  • the light from the combustion flame in the tube or hole is transmitted to the UV sensor via the optical fiber, so the space between the tube and the hole on the side opposite the burner due to heat resistance issues, etc.
  • the UV sensor can be installed in a place where there is no problem with space and heat resistance.
  • a combustion chamber is provided downstream of the parner section and the parner section, a combustion gas is supplied to the parner section, a combustion flame is formed from the parner section toward the combustion chamber, and the combustion flame emits exhaust gas.
  • the combustion-supplying gas is supplied to the burner through nozzle openings that open on the inner wall of the burner. Form a group. As described above, since the nozzle port is constituted by three or more opening groups, it is possible to prevent a combustion flame from blowing out even if the amount of exhaust gas introduced into the wrench varies.
  • the nozzle nozzle When using carbon-based fuel gas, which has a slow flame propagation speed, as the auxiliary gas, the nozzle nozzle is composed of six or more openings, so that even if the exhaust gas inflow rate fluctuates, the combustion flame blows out, etc. Can be prevented.
  • the injection speed of the auxiliary combustion gas injected from the group of nozzle ports is made faster than the propagation speed of the flame.
  • the propagation speed of the flame is determined by the type of fuel gas of the auxiliary gas, the mixing ratio of air or oxygen to be premixed, the shape and arrangement of the nozzle ports, etc. Considering these factors, the total opening cross-sectional area of the nozzle port group is set so that the injection speed of the auxiliary combustion gas is faster than the flame propagation speed.
  • the present invention provides a so-called ⁇ 2 ⁇ 2 generator having a water electrolysis device, generates hydrogen gas and oxygen gas by water electrolysis in a H 2 / O 2 gas generator, and generates hydrogen gas and oxygen gas. Since the mixed gas is supplied to the corner, it is not necessary to supply oxidizing gas from outside. 11 2/0 2 Jienere evening disposed as close as possible PANA unit, together with the pipe when supplying a mixed gas with generation ratio of hydrogen to oxygen in the PANA part requires only a rather short, hydrogen gas and oxygen gas Since it is not necessary to supply the water in separate lines, the piping configuration is simple and the installation cost is low.
  • FIG. 1 is a diagram showing a system configuration example of a combustion type exhaust gas treatment apparatus of the present invention.
  • FIG. 2 is a diagram illustrating a configuration example of a unit facility including the combustion type exhaust gas treatment apparatus of the present invention.
  • FIG. 3 is a longitudinal sectional view showing a specific configuration example of the combustion type exhaust gas treatment apparatus of the present invention.
  • FIG. 4 is a sectional view taken along line AA of FIG.
  • FIG. 5 is a diagram showing a configuration example of a burner part of the combustion type exhaust gas treatment apparatus according to the present invention.
  • FIG. 6 is a diagram showing an example of a mounting configuration of a flame direct viewing tube of the combustion type exhaust gas treatment apparatus according to the present invention.
  • FIG. 7 is a diagram showing an example of an attachment configuration of a flame direct-view tube of the combustion-type exhaust gas treatment apparatus according to the present invention.
  • FIG. 8 is a diagram showing a configuration example of a parner part of the combustion type exhaust gas treatment apparatus according to the present invention.
  • FIG. 9 is a diagram showing a configuration example of a group of auxiliary combustion gas nozzle openings of the combustion type exhaust gas treatment apparatus according to the present invention.
  • FIG. 10 is a diagram showing an example of the overall configuration of a combustion-type exhaust gas treatment apparatus according to the present invention. (Explanation of code)
  • FIG. 1 is a diagram showing a system configuration of a combustion type exhaust gas treatment apparatus according to the present invention.
  • 1 is a H 2 Z0 2 generator to generate hydrogen gas and oxygen gas by electrolysis of water
  • 2 is the exhaust gas treatment apparatus for heating-oxidative decomposition of exhaust gas G 1 harmful and flammable semiconductor manufacturing device .
  • H 2/0 2 hydrogen from the generator 1 and the oxygen mixed gas (H 2 + (1/2) 0 2) is fed subjected to PANA portion of the exhaust gas processing device 2 through the pipe 3 (described in detail later) You.
  • the mixed gas of hydrogen and oxygen burns and forms a flame toward the combustion chamber.
  • the flue gas G1 from the flue gas inflow pipe 4 is led into the flame, and the flue gas that has been heated and oxidatively decomposed to remove the harm is discharged from the exhaust pipe 5.
  • ⁇ 2 ⁇ 2 generator 1 can be used as the existing, by place the H 2/0 2 generator 1 in the vicinity of the PANA part, be short length of pipe 3.
  • a mixed gas of hydrogen and oxygen it is not necessary to supply hydrogen gas and oxygen gas on separate lines. Accidents can be eliminated and safety is improved.
  • This combustion exhaust gas treatment apparatus as shown in FIG. 2, because provided in proximity of H 2 Z_ ⁇ 2 generator 1 and the combustion chamber 20 with a bar burner unit 10, package them into a single housing 10 0 It can also be converted. At this time, it is desirable that the housing 100 be provided with an exhaust duct 101, so that if a leak occurs in the piping, it becomes more safe. Also, installation inside the factory is easier than when hydrogen gas and oxygen gas are separated. Exhaust gas passing through the exhaust duct 101 passes through a factory water scrubber to the atmosphere. Release.
  • FIG. 3 and 4 are views showing a specific configuration example of the exhaust gas treatment device 2 according to the first and second inventions.
  • FIG. 3 is a longitudinal sectional view
  • FIG. 4 is a sectional view taken along line AA of FIG.
  • the exhaust gas treatment device is configured as a cylindrical hermetic container, and is equipped with an upper parner section 10, a middle combustion chamber (combustion reaction section) 20, and a lower section with a cooling section 31 and a discharge section 32.
  • a cooling medium of the cooling unit 31 for example, a liquid such as water or a gas such as air is used.
  • the burner section 10 has a cylindrical body 12 forming a flame holding section 11 opening toward the combustion chamber, and an outer cylinder 13 surrounding the cylindrical body 12 at a predetermined interval.
  • An air chamber 14 for holding combustion air and a combustion gas chamber 15 are formed between the cylindrical body 12 and the outer cylinder 13.
  • the air chamber 14 is connected to an air source (not shown), and the combustion gas chamber 15 is connected to the HsZOs generator 1 via a pipe 3.
  • an exhaust gas inflow pipe 16 (see FIG. 1) for introducing harmful exhaust gas G 1 discharged from semiconductor manufacturing equipment and liquid crystal panel manufacturing equipment, etc. (Corresponding to the exhaust gas inflow pipe 4).
  • Exhaust gas G1 does not necessarily need to be a flammable gas, and whatever it is, the combustion flame may be adjusted and thermally decomposed in the flame holding section 11. Further, the cylinder 12 has an air nozzle 17 communicating the air chamber 14 and the flame holding section 11 and a plurality of combustion gas nozzles 18 communicating the combustion gas chamber 15 and the flame holding section 11. Is provided.
  • the air nozzle 17 extends at a predetermined angle with respect to the tangential direction of the cylindrical body 12 and blows out to form a swirling flow in the flame holding section 11 It has become.
  • the combustion gas nozzle 18 extends at a predetermined angle with respect to the tangential direction of the cylindrical body 12 and blows out the combustion gas so as to form a swirling flow in the flame holding section 11. It has become.
  • the air nozzle 17 and the combustion gas nozzle 18 are evenly arranged in the circumferential direction of the cylindrical body 12.
  • the combustion chamber 20 is a space for oxidizing and decomposing exhaust gas by supplying secondary air at a stage subsequent to the parner section 10.
  • the flame is held inside an airtight cylindrical outer container 24 made of metal or the like. It is defined by a cylindrical inner wall 25 arranged so as to be continuous with the part 11.
  • the inner wall 25 is formed of, for example, a fiber reinforced ceramic.
  • a porous ceramic insulating material 27 is inserted into a space 26 between the inner wall 25 and the outer container 24. ing.
  • the outer container 24 is connected to a purge air introduction pipe 28 for introducing air for purging into the space 26.
  • the combustion chamber 20 is provided with a UV sensor 29 for detecting a flame and a pilot parner 30 for igniting the burner section 10.
  • a plurality of nozzles 33 are provided at equal intervals in the circumferential direction at the lower edge of the cooling unit 31. Water is injected from the nozzles 33 toward the center. This forms a scrubber device that forms a hydraulic power to cool the exhaust gas and capture the particles in the exhaust gas.
  • An exhaust pipe 34 for discharging the treated exhaust gas is provided on the side wall of the discharge section 32, and a drain port 35 for discharging the water injected from the nozzle 33 is provided at the bottom.
  • the combustion gas in the combustion gas chamber 15 is swirled toward the flame holding unit 11 through the combustion gas nozzle 18. Then, when ignited by the pie bit burner 30, a swirling combustion flame is formed in the cylindrical body (cylinder) 12.
  • the exhaust gas G 1 to be treated is ejected from the exhaust gas inflow pipe 16 opened on the top inner wall surface of the cylindrical body 12 toward the flame holding section 11.
  • the ejected exhaust gas G1 is mixed with the swirling flow of the combustion gas (including air), burns, and is heated and oxidatively decomposed through the combustion chamber 20 to remove the gas. Cooled by the water curtain and discharged from the exhaust pipe 34.
  • the gas treatment device of the combustion type exhaust gas treatment device according to the present invention is not limited to the configuration shown in FIGS. 2 and 3, and it is essential that the gas treatment device is provided with a parner section and a combustion chamber downstream of the parner section. Any configuration may be used as long as it is configured to supply a combustion gas to the one part, burn the combustion gas to form a flame, and burn the exhaust gas by the flame. That is, the present invention as the combustion gas supplied to an Na section bar, in a mixed gas of hydrogen and oxygen from commercial H 2 Z_ ⁇ 2 generator to generate hydrogen gas and oxygen gas by electrolysis of water This is a point and does not particularly limit the configuration of the gas treatment unit. Of course, there is no limitation on the number of nozzles for the burner, air supply, etc., and the presence or absence of the combustion chamber 20 or less is optional.
  • FIG. 5 is a diagram showing a configuration of a parner portion of the combustion type exhaust gas treatment apparatus according to the third and fourth inventions.
  • the burner section 10 surrounds the cylindrical body 12 forming the flame holding section 11 opening toward the combustion chamber 20 located below and the circumference of the cylindrical body 12 at a predetermined interval. It has an outer cylinder 13, and an air chamber 14 for holding combustion air and an auxiliary gas chamber 1 15 are formed between the cylindrical body 12 and the outer cylinder 13. .
  • the air chamber 14 is connected to an air source (not shown), and the combustion gas chamber 115 is connected to a combustion gas supply source through a combustion gas supply pipe (not shown).
  • the cylinder 12 has an air nozzle 17 communicating the air chamber 14 with the flame holding section 11 and a plurality of combustion gas nozzles 1 18 communicating the combustion gas chamber 1 15 with the flame holding section 11. Is provided.
  • the air nozzle 17 blows out so as to form a swirling flow in the flame holding section 11 as described later in detail.
  • the combustion assisting gas nozzles 118 blow out the combustion assisting gas so as to form a swirling flow in the flame holding section 11.
  • the air nozzle 17 and the combustion gas nozzle 118 are arranged evenly in the circumferential direction of the cylindrical body 12.
  • a secondary air chamber 21 is formed around the boundary between the flame holding section 11 and the combustion chamber 20 so as to surround the opening of the flame holding section 11. Connect to air source (not shown) to supply secondary air.
  • a partition plate 22 that partitions between the secondary air chamber 21 and the combustion chamber 20 has a secondary air nozzle 2 3 that blows out secondary air for oxidizing exhaust gas inside the combustion chamber 20.
  • a cooling medium is caused to flow through the space 21 to form a cooling structure. Water or the like is used as a cooling medium. Thereby, the cylindrical body 12 heated by the flame formed at the opening of the cylindrical body 12 is cooled.
  • a flame direct viewing tube 1 25 is provided.
  • the flame direct viewing tube 125 is provided upstream of the combustion flame 124, and a UV sensor 1 for detecting the combustion flame 124 at the end of the flame direct viewing tube 125 opposite to the side of the corner. 26 is provided.
  • FIG. 6 is a diagram showing another example of the mounting configuration of the flame direct-view tube of the combustion type exhaust gas treatment apparatus according to the present invention.
  • the parts denoted by the same reference numerals as those in FIG. 5 indicate the same or corresponding parts.
  • a quartz glass plate 1 28 that transmits UV is placed at the connection 1 27 between the flame direct-view tube 1 25 and the UV sensor 1 26, and the quartz glass plate 1 2 8 and the connection 1 2
  • the UV sensor 126 is shut off from the internal atmosphere of the burner section 10 by interposing a seal member 129 between the UV sensor 126 and the seal member 129.
  • a purge gas introduction pipe 130 is connected to the flame direct viewing tube 125 so that a purge gas P G (for example, air) flows through the flame direct viewing tube 125.
  • P G for example, air
  • a quartz glass plate 1 28 is placed at the connection 1 2 7 between the flame direct viewing tube 1 2 5 and the UV sensor 1 2 6, and the UV sensor 1 2 6 is moved from the internal atmosphere of the burner 10. By shutting off and supplying the purge gas PG to the flame direct viewing tube 125, the light opening of the flame direct viewing tube 125 is not blocked by by-products.
  • the quartz glass plate 128 has a thickness enough to withstand the internal pressure of the burner portion 10. Further, heat-resistant packing is used for the sealing member 129.
  • FIG. 7 is a diagram showing another example of the mounting configuration of the flame direct-view tube of the combustion-type exhaust gas treatment apparatus according to the present invention.
  • close the end of the flame direct viewing tube 1 25 opposite to the panner section connect the purge gas introduction tube 1 30 to the flame direct viewing tube 125, and allow the purge gas (PG) to flow.
  • the light from the burning flame 124 in the flame direct viewing tube 125 is transmitted to the UV sensor 126 via the optical fiber 131.
  • the light from the combustion flame 1 2 4 in the flame 1 2 5 is transmitted to the UV sensor 1 2 6 via the optical fiber 1 3 1.
  • FIG. 8 is a diagram showing an example of a configuration of a parner section of the combustion type exhaust gas treatment apparatus according to the present invention.
  • a plurality of air nozzles 17 (air injection ports) 17a are arranged in series in the vertical direction.
  • the air nozzle opening groups 133 formed at regular intervals in the circumferential direction.
  • the opening groups 1 3 4 are arranged at equal intervals in the circumferential direction.
  • the number of openings 1 18a of the auxiliary gas nozzles 1 18 constituting the auxiliary gas nozzle opening group 1 34 is not limited to three, but may be three or more.
  • Combustion gas is burned by being injected from the openings 1 18a of the individual combustion gas nozzles 1 18 constituting the combustion gas nozzle opening group 1 3 4 to form a combustion flame 24 (see FIG. 1). That is, each opening 1 18a becomes a flame forming port. If the openings 1 18a are arranged discretely, the combustion flame 1 24 may be blown out due to fluctuations in the amount of exhaust gas G1 introduced into the burner section 10.
  • the auxiliary gas nozzle opening group 34 constitutes the auxiliary gas nozzle opening 18.
  • the auxiliary combustion gas is injected from each other's opening 18a and the thermal power is increased, so that even if the inflow of exhaust gas fluctuates, the combustion flame Blowout and the like can be prevented.
  • the combustion gas injected from the combustion gas nozzle opening group 134 is prevented. Make the injection speed faster than the flame propagation speed.
  • the propagation speed of this flame depends on the type of fuel gas in the auxiliary gas, the mixing ratio of air or oxygen to be premixed, and the auxiliary gas nozzle opening group. It is determined by the shape and arrangement of 134.
  • the auxiliary gas injection speed is determined by the supply pressure of the auxiliary gas (here, the internal pressure of the auxiliary gas chamber 115) and the total cross-sectional area of the auxiliary gas nozzle opening group 134.
  • FIG. 10 is a longitudinal sectional view showing an example of the configuration of the exhaust gas treatment apparatus.
  • a sectional view taken along line AA of FIG. 10 is equal to FIG.
  • the exhaust gas treatment device is configured as a cylindrical hermetic container as a whole, with the upper part of the panner part 10, the middle part of the combustion chamber (combustion reaction part) 20, the lower part of the cooling part 40, and the discharge part 41.
  • a cooling medium of the cooling unit 40 for example, a liquid such as water or a gas such as air is used.
  • the air nozzle 17 extends at a predetermined angle with respect to the tangential direction of the cylindrical body 12 and blows out so as to form a swirling flow in the flame holding portion 11.
  • the combustion assisting gas nozzle 118 extends at a predetermined angle with respect to the tangential direction of the cylindrical body 122, and blows out the combustion assisting gas so as to form a swirling flow in the flame holding part 111. ing.
  • the air nozzle 17 and the combustion assisting gas nozzle 118 are arranged evenly in the circumferential direction of the cylindrical body 12.
  • the combustion chamber 20 is a space where the exhaust gas is oxidized and decomposed at the subsequent stage of the burner section 10 and is connected to the flame holding section 11 inside an airtight tubular outer vessel 135 formed of metal or the like.
  • a cylindrical inner wall 36 arranged as follows.
  • the inner wall 36 is made of, for example, fiber reinforced ceramic.
  • a heat insulating material 37 made of porous ceramic is inserted into a space 37 ′ between the inner wall 36 and the outer container 135.
  • a purge air introduction pipe 38 for introducing air for purging into the space 37 ' is connected to the outer container 135.
  • a plurality of nozzles 42 are provided at the lower edge of the cooling section 40 at the lower part of the combustion chamber 20 at equal intervals in the circumferential direction, and water is injected from the nozzles 42 toward the center. Therefore, a water curtain is formed to cool the exhaust gas and capture the particles in the exhaust gas.
  • An exhaust pipe 43 for discharging the treated exhaust gas is provided on the side wall of the discharge section 41, and a drain port 44 for discharging the water injected from the nozzle 42 is provided at the bottom.
  • the combustion gas in the combustion gas chamber 15 is A swirling flow is generated through the chisel 18 toward the flame holding part 11. When ignited by the pilot burner 39, a swirling combustion flame is formed in the cylinder 12.
  • the exhaust gas G 1 to be treated is ejected from the exhaust gas inflow pipe 16 opening to the inner wall surface at the top of the cylindrical body 12 toward the flame holding section 11.
  • the ejected exhaust gas G1 is mixed with the swirling flow of the auxiliary gas, burns, passes through the combustion chamber 20, is decomposed by heating and decomposed, is cooled by the water curtain from the nozzle 42, It is exhausted from the exhaust pipe 43.
  • a so-called H 2 / O 2 generator having an electrolyzer is provided in place of the fuel gas tank, and hydrogen gas and oxygen gas are generated by electrolysis of water with the H 2 Z 0 2 generator, Since the generated hydrogen gas and oxygen gas are supplied to the corner, safe operation can be performed with a simple piping configuration. Further, if the ⁇ 2 ⁇ 2 generator is arranged near the burner, the piping for supplying the mixed gas of hydrogen gas and oxygen gas to the burner can be shortened. In particular, if supplied as a mixed gas, there is no need to supply hydrogen gas and oxygen gas on separate lines.
  • the present invention by providing a tube or a hole that allows the combustion flame to be directly viewed upstream of the combustion flame, by-products such as dust during exhaust gas treatment block the lighting opening or have a by-product having UV absorption characteristics.
  • the UV sensor can correctly detect the presence or absence of combustion flame even if it adheres to the reaction area without interfering with lighting.
  • the lighting flame can be melted or corroded due to high temperature and blocked. Absent.
  • a UV translucent member is arranged at the pipe or hole and the connection part to block the UV sensor from the atmosphere in the corner, and the purge gas flows from the UV translucent member in the tube or hole to the burner side.
  • the lighting port is not blocked by by-products or the like.
  • light from the combustion flame in the tube or hole is transmitted to the UV sensor via an optical fiber.
  • the present invention since three or more nozzle port groups are formed close to each other, it is possible to prevent the combustion flame from blowing out even if the amount of inflow of exhaust gas introduced into the corner varies. Further, by setting the injection speed of the auxiliary combustion gas injected from the nozzle port to be faster than the propagation speed of the flame, it is possible to prevent a flashback to the auxiliary combustion gas supply pipe.

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  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Environmental & Geological Engineering (AREA)
  • Incineration Of Waste (AREA)

Abstract

L'invention concerne un procédé de traitement par combustion des gaz d'échappement, permettant de décomposer par la chaleur ou par oxydation les composants inflammables présents dans ces gaz d'échappement. Ce procédé consiste à introduire les gaz d'échappement produits lors d'un processus de production industriel dans une flamme de combustion, et comprend les étapes suivantes : on produit de l'hydrogène et de l'oxyde gazeux par électrolyse d'eau, on produit une flamme de combustion alimentée par cet hydrogène et cet oxyde gazeux, et on détecte la flamme de combustion au moyen d'un capteur à UV, à travers un tube ou une ouverture formés dans la paroi du brûleur en amont de la flamme de combustion, de sorte que la flamme peut être observée en direct.
PCT/JP2001/007136 2000-08-22 2001-08-21 Procede et dispositif de traitement par combustion des gaz d'echappement WO2002016830A1 (fr)

Priority Applications (3)

Application Number Priority Date Filing Date Title
KR10-2003-7002463A KR20030024892A (ko) 2000-08-22 2001-08-21 연소식 배기가스처리방법 및 장치
US10/362,172 US20040028590A1 (en) 2000-08-22 2001-08-21 Method and device for combustion type exhaust gas treatment
EP01956985A EP1312860A4 (fr) 2000-08-22 2001-08-21 Procede et dispositif de traitement par combustion des gaz d'echappement

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2000250940A JP2002061821A (ja) 2000-08-22 2000-08-22 燃焼式排ガス処理方法及び装置
JP2000-250940 2000-08-22
JP2000294632A JP2002106826A (ja) 2000-09-27 2000-09-27 燃焼式排ガス処理装置
JP2000-294632 2000-09-27

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WO2002016830A1 true WO2002016830A1 (fr) 2002-02-28

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US (1) US20040028590A1 (fr)
EP (1) EP1312860A4 (fr)
KR (1) KR20030024892A (fr)
TW (1) TW542886B (fr)
WO (1) WO2002016830A1 (fr)

Families Citing this family (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9187347B2 (en) * 2002-11-19 2015-11-17 Xogen Technologies Inc. Treatment of a waste stream through production and utilization of oxyhydrogen gas
US9296629B2 (en) 2002-11-19 2016-03-29 Xogen Technologies Inc. Treatment of a waste stream through production and utilization of oxyhydrogen gas
KR101162406B1 (ko) * 2002-11-19 2012-07-04 엑소젠 테크놀로지 인코포레이티드 산수소기체의 제조 및 이용을 통한 폐기물 흐름의 처리
US7569193B2 (en) * 2003-12-19 2009-08-04 Applied Materials, Inc. Apparatus and method for controlled combustion of gaseous pollutants
US7736599B2 (en) * 2004-11-12 2010-06-15 Applied Materials, Inc. Reactor design to reduce particle deposition during process abatement
KR101036734B1 (ko) * 2005-10-31 2011-05-24 어플라이드 머티어리얼스, 인코포레이티드 공정 저감 반응로
WO2009025568A1 (fr) * 2007-07-31 2009-02-26 Shapovalov Viacheslav Dmitriev Dispositif et procédé pour brûler une biomasse à haute teneur en cendres, toxique
ITRE20080123A1 (it) * 2008-12-31 2010-07-01 Orles Ferretti Gestione di un sistema di alimentazione di un forno industriale
GB0902221D0 (en) * 2009-02-11 2009-03-25 Edwards Ltd Pilot
JP5437734B2 (ja) * 2009-08-07 2014-03-12 株式会社荏原製作所 燃焼式排ガス処理装置
CN101975394A (zh) * 2010-11-10 2011-02-16 郑州锅炉股份有限公司 机炉一体列管式燃烧机及其三废余热回收装置
US9267428B2 (en) 2012-02-27 2016-02-23 Deec, Inc. Oxygen-rich plasma generators for boosting internal combustion engines
KR101435371B1 (ko) 2012-10-16 2014-08-29 주식회사 글로벌스탠다드테크놀로지 CO, NOx 개별 제어 방식을 이용한 저공해 연소방법
JP6151945B2 (ja) * 2013-03-28 2017-06-21 株式会社荏原製作所 除害機能付真空ポンプ
GB2514341B (en) * 2013-05-20 2016-08-24 Edwards Ltd Radiant burner combustion monitoring
JP6166102B2 (ja) 2013-05-30 2017-07-19 株式会社荏原製作所 除害機能付真空ポンプ
GB2516267B (en) * 2013-07-17 2016-08-17 Edwards Ltd Head assembly
KR101532670B1 (ko) * 2013-11-08 2015-06-30 주식회사 포스코 불꽃검출기 및 이를 구비하는 버너장치
CN105090999B (zh) * 2014-05-12 2018-11-20 日本派欧尼株式会社 废气的燃烧式净化装置
KR20170094439A (ko) * 2014-12-16 2017-08-17 어플라이드 머티어리얼스, 인코포레이티드 수소 또는 수소 함유 가스들과 함께 수증기를 사용하는 플라즈마 저감
CN104896487B (zh) * 2015-06-04 2017-02-01 山东晋煤明水化工集团有限公司 吡啶生产过程中废水、废气、废渣的处理方法
NL2015095B1 (nl) * 2015-07-06 2017-01-31 Johannus Theodorus Maria Taris Hermanus Inrichting en werkwijze voor het reinigen van een gas.
AU2017229114B2 (en) 2016-03-07 2023-01-12 HyTech Power, Inc. A method of generating and distributing a second fuel for an internal combustion engine
CN105674338A (zh) * 2016-03-11 2016-06-15 王本富 一种具有氢氧助燃装置的采暖炉
US20190234348A1 (en) * 2018-01-29 2019-08-01 Hytech Power, Llc Ultra Low HHO Injection
WO2019148241A1 (fr) * 2018-02-01 2019-08-08 Hydroflex Technologies Pty Ltd Système et procédé de post-traitement des gaz d'échappement
DE102019117331B4 (de) * 2019-06-27 2024-07-04 Das Environmental Expert Gmbh Brenner zur Erzeugung einer Flamme für die Verbrennung von Prozessgas und Abgasbehandlungsvorrichtung mit einem Brenner

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH066944U (ja) * 1992-06-25 1994-01-28 株式会社神戸製鋼所 燃焼失火検知装置
JPH07103443A (ja) * 1993-09-30 1995-04-18 Maeda Corp ごみ焼却装置
JPH08145341A (ja) * 1994-11-18 1996-06-07 Tokyo Gas Co Ltd 燃焼制御装置
JPH09119627A (ja) * 1995-10-27 1997-05-06 Mitsubishi Heavy Ind Ltd 炉内監視装置の清掃装置
JP3039292U (ja) * 1996-10-24 1997-07-15 中銀観光株式会社 水素・酸素混合ガスに炭化水素系添加物を使用した焼却・溶融炉
JPH11147027A (ja) * 1997-11-18 1999-06-02 Suga Test Instr Co Ltd 排煙処理方法及びその装置
JPH11218317A (ja) * 1997-11-21 1999-08-10 Ebara Corp 排ガス処理用燃焼器

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3586446A (en) * 1967-09-14 1971-06-22 Xerox Corp Flame photometer
US3825913A (en) * 1972-03-31 1974-07-23 Electronics Corp America Fuel burner supervisory system
US4014777A (en) * 1973-07-20 1977-03-29 Yull Brown Welding
US3985494A (en) * 1975-06-26 1976-10-12 Howe-Baker Engineers, Inc. Waste gas burner assembly
DE2745488C2 (de) * 1977-10-10 1986-04-30 Bayer Ag, 5090 Leverkusen Verfahren und Vorrichtung zur Verbrennung explosibler Gase
JPS5759124A (en) * 1980-09-29 1982-04-09 Ngk Insulators Ltd Flame detector
DE3141277A1 (de) * 1980-12-05 1982-06-16 Cerberus AG, 8708 Männedorf, Zürich Flammendetektor
FR2615596A1 (fr) * 1987-05-18 1988-11-25 Alsace Gaz Ind Sa Dispositif de controle d'une flamme localisee dans une enceinte
WO1989012774A1 (fr) * 1988-06-23 1989-12-28 Allied-Signal Inc. Detecteur de flammes optique a semi-conducteur
GB2238059A (en) * 1989-11-17 1991-05-22 Command International Inc Electrolytic gas generating apparatus for producing a combustible mixture of hydrogen and oxygen by electrolysis of water for particular use in gas welding
JP2735723B2 (ja) * 1992-01-08 1998-04-02 神鋼パンテツク株式会社 高純度酸素及び水素の製造方法
US5527984A (en) * 1993-04-29 1996-06-18 The Dow Chemical Company Waste gas incineration
BR9407412A (pt) * 1993-09-06 1996-11-12 Hydrogen Tech Ltd Aperfeiçoamentos em sistemas de eletrólise
DE19501914C1 (de) * 1995-01-23 1996-04-04 Centrotherm Elektrische Anlage Vorrichtung zur Reinigung von Abgasen
DE19509704A1 (de) * 1995-03-09 1996-09-12 Just Hans Juergen Dr Verfahren und Anordnung zur Überwachung und Regelung von Verbrennungsprozessen
FR2735213B1 (fr) * 1995-06-12 1997-07-11 Kodak Pathe Procede et dispositif de destruction par incineration de gaz de reaction
US5705140A (en) * 1995-07-18 1998-01-06 Transformation Technologies, Ltd. Process for the transformation of halogenated refrigerant gases
JP3490843B2 (ja) * 1996-06-19 2004-01-26 日本エドワーズ株式会社 排ガス燃焼方法及びその装置
US5828797A (en) * 1996-06-19 1998-10-27 Meggitt Avionics, Inc. Fiber optic linked flame sensor
JP4497726B2 (ja) * 1998-12-01 2010-07-07 株式会社荏原製作所 排ガス処理装置

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH066944U (ja) * 1992-06-25 1994-01-28 株式会社神戸製鋼所 燃焼失火検知装置
JPH07103443A (ja) * 1993-09-30 1995-04-18 Maeda Corp ごみ焼却装置
JPH08145341A (ja) * 1994-11-18 1996-06-07 Tokyo Gas Co Ltd 燃焼制御装置
JPH09119627A (ja) * 1995-10-27 1997-05-06 Mitsubishi Heavy Ind Ltd 炉内監視装置の清掃装置
JP3039292U (ja) * 1996-10-24 1997-07-15 中銀観光株式会社 水素・酸素混合ガスに炭化水素系添加物を使用した焼却・溶融炉
JPH11147027A (ja) * 1997-11-18 1999-06-02 Suga Test Instr Co Ltd 排煙処理方法及びその装置
JPH11218317A (ja) * 1997-11-21 1999-08-10 Ebara Corp 排ガス処理用燃焼器

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of EP1312860A4 *

Also Published As

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KR20030024892A (ko) 2003-03-26
TW542886B (en) 2003-07-21
EP1312860A1 (fr) 2003-05-21
EP1312860A4 (fr) 2007-02-28
US20040028590A1 (en) 2004-02-12

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