WO2014147180A1 - Appareil et procédé pour dépôt électrolytique de couches métalliques sur des pièces - Google Patents
Appareil et procédé pour dépôt électrolytique de couches métalliques sur des pièces Download PDFInfo
- Publication number
- WO2014147180A1 WO2014147180A1 PCT/EP2014/055612 EP2014055612W WO2014147180A1 WO 2014147180 A1 WO2014147180 A1 WO 2014147180A1 EP 2014055612 W EP2014055612 W EP 2014055612W WO 2014147180 A1 WO2014147180 A1 WO 2014147180A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- zinc
- anode
- soluble
- plating bath
- foregoing
- Prior art date
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- 229910052751 metal Inorganic materials 0.000 title claims abstract description 35
- 239000002184 metal Substances 0.000 title claims abstract description 35
- 238000000034 method Methods 0.000 title claims abstract description 26
- 230000008021 deposition Effects 0.000 title claims abstract description 19
- 238000007747 plating Methods 0.000 claims abstract description 71
- 239000011701 zinc Substances 0.000 claims abstract description 42
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 claims abstract description 40
- 229910052725 zinc Inorganic materials 0.000 claims abstract description 40
- 229910001297 Zn alloy Inorganic materials 0.000 claims abstract description 20
- 239000003014 ion exchange membrane Substances 0.000 claims abstract description 17
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 50
- 229910052759 nickel Inorganic materials 0.000 claims description 24
- 125000002091 cationic group Chemical group 0.000 claims description 21
- 238000000151 deposition Methods 0.000 claims description 18
- PTFCDOFLOPIGGS-UHFFFAOYSA-N Zinc dication Chemical compound [Zn+2] PTFCDOFLOPIGGS-UHFFFAOYSA-N 0.000 claims description 15
- 239000002253 acid Substances 0.000 claims description 12
- QELJHCBNGDEXLD-UHFFFAOYSA-N nickel zinc Chemical compound [Ni].[Zn] QELJHCBNGDEXLD-UHFFFAOYSA-N 0.000 claims description 12
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 claims description 11
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 claims description 10
- 238000006243 chemical reaction Methods 0.000 claims description 10
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 9
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 9
- 229910052799 carbon Inorganic materials 0.000 claims description 9
- 239000010936 titanium Substances 0.000 claims description 9
- 229910052719 titanium Inorganic materials 0.000 claims description 9
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 7
- 239000008139 complexing agent Substances 0.000 claims description 7
- 229910000990 Ni alloy Inorganic materials 0.000 claims description 6
- 238000009826 distribution Methods 0.000 claims description 6
- 239000000463 material Substances 0.000 claims description 6
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims description 6
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 claims description 4
- 238000004090 dissolution Methods 0.000 claims description 4
- 229910052742 iron Inorganic materials 0.000 claims description 4
- 229910052793 cadmium Inorganic materials 0.000 claims description 3
- 239000000919 ceramic Substances 0.000 claims description 3
- 229910052804 chromium Inorganic materials 0.000 claims description 3
- 239000011651 chromium Substances 0.000 claims description 3
- 229910002804 graphite Inorganic materials 0.000 claims description 3
- 239000010439 graphite Substances 0.000 claims description 3
- 229910052738 indium Inorganic materials 0.000 claims description 3
- 229910052697 platinum Inorganic materials 0.000 claims description 3
- 229910052709 silver Inorganic materials 0.000 claims description 3
- 229910052718 tin Inorganic materials 0.000 claims description 3
- 239000011135 tin Substances 0.000 claims description 3
- 229910052721 tungsten Inorganic materials 0.000 claims description 3
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims description 2
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 claims description 2
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims description 2
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 claims description 2
- BUGBHKTXTAQXES-UHFFFAOYSA-N Selenium Chemical compound [Se] BUGBHKTXTAQXES-UHFFFAOYSA-N 0.000 claims description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 2
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims description 2
- 229910052787 antimony Inorganic materials 0.000 claims description 2
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 claims description 2
- 229910052797 bismuth Inorganic materials 0.000 claims description 2
- JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth atom Chemical compound [Bi] JCXGWMGPZLAOME-UHFFFAOYSA-N 0.000 claims description 2
- BDOSMKKIYDKNTQ-UHFFFAOYSA-N cadmium atom Chemical compound [Cd] BDOSMKKIYDKNTQ-UHFFFAOYSA-N 0.000 claims description 2
- 229910017052 cobalt Inorganic materials 0.000 claims description 2
- 239000010941 cobalt Substances 0.000 claims description 2
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 claims description 2
- 229910052802 copper Inorganic materials 0.000 claims description 2
- 239000010949 copper Substances 0.000 claims description 2
- 229910052733 gallium Inorganic materials 0.000 claims description 2
- 229910052732 germanium Inorganic materials 0.000 claims description 2
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 claims description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 2
- 229910052737 gold Inorganic materials 0.000 claims description 2
- 239000010931 gold Substances 0.000 claims description 2
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 claims description 2
- 229910052741 iridium Inorganic materials 0.000 claims description 2
- GKOZUEZYRPOHIO-UHFFFAOYSA-N iridium atom Chemical compound [Ir] GKOZUEZYRPOHIO-UHFFFAOYSA-N 0.000 claims description 2
- WPBNNNQJVZRUHP-UHFFFAOYSA-L manganese(2+);methyl n-[[2-(methoxycarbonylcarbamothioylamino)phenyl]carbamothioyl]carbamate;n-[2-(sulfidocarbothioylamino)ethyl]carbamodithioate Chemical compound [Mn+2].[S-]C(=S)NCCNC([S-])=S.COC(=O)NC(=S)NC1=CC=CC=C1NC(=S)NC(=O)OC WPBNNNQJVZRUHP-UHFFFAOYSA-L 0.000 claims description 2
- 229910052750 molybdenum Inorganic materials 0.000 claims description 2
- 239000011733 molybdenum Substances 0.000 claims description 2
- 150000002815 nickel Chemical class 0.000 claims description 2
- 229910052758 niobium Inorganic materials 0.000 claims description 2
- 239000010955 niobium Substances 0.000 claims description 2
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 claims description 2
- 239000006259 organic additive Substances 0.000 claims description 2
- 229910052762 osmium Inorganic materials 0.000 claims description 2
- SYQBFIAQOQZEGI-UHFFFAOYSA-N osmium atom Chemical compound [Os] SYQBFIAQOQZEGI-UHFFFAOYSA-N 0.000 claims description 2
- 229910052763 palladium Inorganic materials 0.000 claims description 2
- 229910052702 rhenium Inorganic materials 0.000 claims description 2
- WUAPFZMCVAUBPE-UHFFFAOYSA-N rhenium atom Chemical compound [Re] WUAPFZMCVAUBPE-UHFFFAOYSA-N 0.000 claims description 2
- 229910052703 rhodium Inorganic materials 0.000 claims description 2
- 239000010948 rhodium Substances 0.000 claims description 2
- MHOVAHRLVXNVSD-UHFFFAOYSA-N rhodium atom Chemical compound [Rh] MHOVAHRLVXNVSD-UHFFFAOYSA-N 0.000 claims description 2
- 229910052707 ruthenium Inorganic materials 0.000 claims description 2
- 229910052711 selenium Inorganic materials 0.000 claims description 2
- 239000011669 selenium Substances 0.000 claims description 2
- 239000004332 silver Substances 0.000 claims description 2
- 239000004094 surface-active agent Substances 0.000 claims description 2
- 229910052715 tantalum Inorganic materials 0.000 claims description 2
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 2
- 239000010937 tungsten Substances 0.000 claims description 2
- 229910052720 vanadium Inorganic materials 0.000 claims description 2
- LEONUFNNVUYDNQ-UHFFFAOYSA-N vanadium atom Chemical compound [V] LEONUFNNVUYDNQ-UHFFFAOYSA-N 0.000 claims description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims 1
- 229910000831 Steel Inorganic materials 0.000 claims 1
- 239000000654 additive Substances 0.000 claims 1
- 239000010959 steel Substances 0.000 claims 1
- 150000002500 ions Chemical class 0.000 abstract description 13
- 239000012528 membrane Substances 0.000 description 33
- 230000002378 acidificating effect Effects 0.000 description 23
- 229910021645 metal ion Inorganic materials 0.000 description 16
- 238000009713 electroplating Methods 0.000 description 15
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 12
- 239000000243 solution Substances 0.000 description 12
- VEQPNABPJHWNSG-UHFFFAOYSA-N Nickel(2+) Chemical compound [Ni+2] VEQPNABPJHWNSG-UHFFFAOYSA-N 0.000 description 10
- 125000000129 anionic group Chemical group 0.000 description 10
- 239000010405 anode material Substances 0.000 description 10
- 229910001453 nickel ion Inorganic materials 0.000 description 10
- 230000008569 process Effects 0.000 description 10
- -1 titanium ions Chemical class 0.000 description 10
- 150000003839 salts Chemical class 0.000 description 9
- 229910045601 alloy Inorganic materials 0.000 description 8
- 239000000956 alloy Substances 0.000 description 8
- 239000000203 mixture Substances 0.000 description 8
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 8
- 230000008901 benefit Effects 0.000 description 6
- 238000009825 accumulation Methods 0.000 description 5
- 238000000354 decomposition reaction Methods 0.000 description 5
- 239000003792 electrolyte Substances 0.000 description 5
- 238000007254 oxidation reaction Methods 0.000 description 5
- VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 description 4
- WCUXLLCKKVVCTQ-UHFFFAOYSA-M Potassium chloride Chemical compound [Cl-].[K+] WCUXLLCKKVVCTQ-UHFFFAOYSA-M 0.000 description 4
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 4
- 238000001465 metallisation Methods 0.000 description 4
- 150000002739 metals Chemical class 0.000 description 4
- 230000003647 oxidation Effects 0.000 description 4
- 229910052760 oxygen Inorganic materials 0.000 description 4
- 239000001301 oxygen Substances 0.000 description 4
- 235000011118 potassium hydroxide Nutrition 0.000 description 4
- 229910001414 potassium ion Inorganic materials 0.000 description 4
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 3
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 3
- 229910021586 Nickel(II) chloride Inorganic materials 0.000 description 3
- KRKNYBCHXYNGOX-UHFFFAOYSA-N citric acid Chemical compound OC(=O)CC(O)(C(O)=O)CC(O)=O KRKNYBCHXYNGOX-UHFFFAOYSA-N 0.000 description 3
- 238000000576 coating method Methods 0.000 description 3
- 230000005012 migration Effects 0.000 description 3
- 238000013508 migration Methods 0.000 description 3
- QMMRZOWCJAIUJA-UHFFFAOYSA-L nickel dichloride Chemical compound Cl[Ni]Cl QMMRZOWCJAIUJA-UHFFFAOYSA-L 0.000 description 3
- 238000000926 separation method Methods 0.000 description 3
- LSNNMFCWUKXFEE-UHFFFAOYSA-M Bisulfite Chemical compound OS([O-])=O LSNNMFCWUKXFEE-UHFFFAOYSA-M 0.000 description 2
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 2
- 239000004693 Polybenzimidazole Substances 0.000 description 2
- 230000032683 aging Effects 0.000 description 2
- 239000007864 aqueous solution Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 230000015556 catabolic process Effects 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- LGQLOGILCSXPEA-UHFFFAOYSA-L nickel sulfate Chemical compound [Ni+2].[O-]S([O-])(=O)=O LGQLOGILCSXPEA-UHFFFAOYSA-L 0.000 description 2
- 229920002480 polybenzimidazole Polymers 0.000 description 2
- BWHMMNNQKKPAPP-UHFFFAOYSA-L potassium carbonate Chemical compound [K+].[K+].[O-]C([O-])=O BWHMMNNQKKPAPP-UHFFFAOYSA-L 0.000 description 2
- 239000001103 potassium chloride Substances 0.000 description 2
- 235000011164 potassium chloride Nutrition 0.000 description 2
- 230000002035 prolonged effect Effects 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 238000007086 side reaction Methods 0.000 description 2
- 235000015424 sodium Nutrition 0.000 description 2
- HEMHJVSKTPXQMS-UHFFFAOYSA-M sodium hydroxide Inorganic materials [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 2
- 239000002904 solvent Substances 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 239000001211 (E)-4-phenylbut-3-en-2-one Substances 0.000 description 1
- LBLYYCQCTBFVLH-UHFFFAOYSA-N 2-Methylbenzenesulfonic acid Chemical compound CC1=CC=CC=C1S(O)(=O)=O LBLYYCQCTBFVLH-UHFFFAOYSA-N 0.000 description 1
- RILZRCJGXSFXNE-UHFFFAOYSA-N 2-[4-(trifluoromethoxy)phenyl]ethanol Chemical compound OCCC1=CC=C(OC(F)(F)F)C=C1 RILZRCJGXSFXNE-UHFFFAOYSA-N 0.000 description 1
- QTBSBXVTEAMEQO-UHFFFAOYSA-M Acetate Chemical compound CC([O-])=O QTBSBXVTEAMEQO-UHFFFAOYSA-M 0.000 description 1
- QGZKDVFQNNGYKY-UHFFFAOYSA-O Ammonium Chemical compound [NH4+] QGZKDVFQNNGYKY-UHFFFAOYSA-O 0.000 description 1
- 229920013683 Celanese Polymers 0.000 description 1
- KZBUYRJDOAKODT-UHFFFAOYSA-N Chlorine Chemical compound ClCl KZBUYRJDOAKODT-UHFFFAOYSA-N 0.000 description 1
- BDAGIHXWWSANSR-UHFFFAOYSA-M Formate Chemical compound [O-]C=O BDAGIHXWWSANSR-UHFFFAOYSA-M 0.000 description 1
- 229910001209 Low-carbon steel Inorganic materials 0.000 description 1
- AFVFQIVMOAPDHO-UHFFFAOYSA-N Methanesulfonic acid Chemical class CS(O)(=O)=O AFVFQIVMOAPDHO-UHFFFAOYSA-N 0.000 description 1
- 229920000557 Nafion® Polymers 0.000 description 1
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 1
- 239000004696 Poly ether ether ketone Substances 0.000 description 1
- 239000004743 Polypropylene Substances 0.000 description 1
- 229920004695 VICTREX™ PEEK Polymers 0.000 description 1
- MQRWBMAEBQOWAF-UHFFFAOYSA-N acetic acid;nickel Chemical compound [Ni].CC(O)=O.CC(O)=O MQRWBMAEBQOWAF-UHFFFAOYSA-N 0.000 description 1
- 239000003929 acidic solution Substances 0.000 description 1
- 150000007513 acids Chemical class 0.000 description 1
- 238000013019 agitation Methods 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- 229910052783 alkali metal Inorganic materials 0.000 description 1
- 150000001340 alkali metals Chemical class 0.000 description 1
- 238000005275 alloying Methods 0.000 description 1
- 229910000147 aluminium phosphate Inorganic materials 0.000 description 1
- DAPUDVOJPZKTSI-UHFFFAOYSA-L ammonium nickel sulfate Chemical compound [NH4+].[NH4+].[Ni+2].[O-]S([O-])(=O)=O.[O-]S([O-])(=O)=O DAPUDVOJPZKTSI-UHFFFAOYSA-L 0.000 description 1
- 238000005349 anion exchange Methods 0.000 description 1
- 239000003011 anion exchange membrane Substances 0.000 description 1
- 239000011260 aqueous acid Substances 0.000 description 1
- 125000003118 aryl group Chemical group 0.000 description 1
- 239000002585 base Substances 0.000 description 1
- JUPQTSLXMOCDHR-UHFFFAOYSA-N benzene-1,4-diol;bis(4-fluorophenyl)methanone Chemical compound OC1=CC=C(O)C=C1.C1=CC(F)=CC=C1C(=O)C1=CC=C(F)C=C1 JUPQTSLXMOCDHR-UHFFFAOYSA-N 0.000 description 1
- 150000008107 benzenesulfonic acids Chemical class 0.000 description 1
- WPYMKLBDIGXBTP-UHFFFAOYSA-N benzoic acid Chemical compound OC(=O)C1=CC=CC=C1 WPYMKLBDIGXBTP-UHFFFAOYSA-N 0.000 description 1
- 229930008407 benzylideneacetone Natural products 0.000 description 1
- 229910002056 binary alloy Inorganic materials 0.000 description 1
- KGBXLFKZBHKPEV-UHFFFAOYSA-N boric acid Chemical compound OB(O)O KGBXLFKZBHKPEV-UHFFFAOYSA-N 0.000 description 1
- 239000004327 boric acid Substances 0.000 description 1
- 238000005282 brightening Methods 0.000 description 1
- 239000000872 buffer Substances 0.000 description 1
- 150000001732 carboxylic acid derivatives Chemical class 0.000 description 1
- 238000005341 cation exchange Methods 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 150000003841 chloride salts Chemical class 0.000 description 1
- QUQFTIVBFKLPCL-UHFFFAOYSA-L copper;2-amino-3-[(2-amino-2-carboxylatoethyl)disulfanyl]propanoate Chemical compound [Cu+2].[O-]C(=O)C(N)CSSCC(N)C([O-])=O QUQFTIVBFKLPCL-UHFFFAOYSA-L 0.000 description 1
- 238000003487 electrochemical reaction Methods 0.000 description 1
- 238000004070 electrodeposition Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- BXOUVIIITJXIKB-UHFFFAOYSA-N ethene;styrene Chemical compound C=C.C=CC1=CC=CC=C1 BXOUVIIITJXIKB-UHFFFAOYSA-N 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- 229920002313 fluoropolymer Polymers 0.000 description 1
- UQSQSQZYBQSBJZ-UHFFFAOYSA-N fluorosulfonic acid Chemical compound OS(F)(=O)=O UQSQSQZYBQSBJZ-UHFFFAOYSA-N 0.000 description 1
- 150000004820 halides Chemical class 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-M hydroxide Chemical compound [OH-] XLYOFNOQVPJJNP-UHFFFAOYSA-M 0.000 description 1
- 238000010348 incorporation Methods 0.000 description 1
- 230000001939 inductive effect Effects 0.000 description 1
- 238000005342 ion exchange Methods 0.000 description 1
- 229920000554 ionomer Polymers 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 150000002576 ketones Chemical class 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 229910052748 manganese Inorganic materials 0.000 description 1
- 239000011572 manganese Substances 0.000 description 1
- LNOPIUAQISRISI-UHFFFAOYSA-N n'-hydroxy-2-propan-2-ylsulfonylethanimidamide Chemical compound CC(C)S(=O)(=O)CC(N)=NO LNOPIUAQISRISI-UHFFFAOYSA-N 0.000 description 1
- 238000006386 neutralization reaction Methods 0.000 description 1
- 229940078494 nickel acetate Drugs 0.000 description 1
- UQPSGBZICXWIAG-UHFFFAOYSA-L nickel(2+);dibromide;trihydrate Chemical compound O.O.O.Br[Ni]Br UQPSGBZICXWIAG-UHFFFAOYSA-L 0.000 description 1
- KERTUBUCQCSNJU-UHFFFAOYSA-L nickel(2+);disulfamate Chemical compound [Ni+2].NS([O-])(=O)=O.NS([O-])(=O)=O KERTUBUCQCSNJU-UHFFFAOYSA-L 0.000 description 1
- 229910000008 nickel(II) carbonate Inorganic materials 0.000 description 1
- 229910000363 nickel(II) sulfate Inorganic materials 0.000 description 1
- ZULUUIKRFGGGTL-UHFFFAOYSA-L nickel(ii) carbonate Chemical compound [Ni+2].[O-]C([O-])=O ZULUUIKRFGGGTL-UHFFFAOYSA-L 0.000 description 1
- BFDHFSHZJLFAMC-UHFFFAOYSA-L nickel(ii) hydroxide Chemical compound [OH-].[OH-].[Ni+2] BFDHFSHZJLFAMC-UHFFFAOYSA-L 0.000 description 1
- 229910017604 nitric acid Inorganic materials 0.000 description 1
- 239000002736 nonionic surfactant Substances 0.000 description 1
- 239000005416 organic matter Substances 0.000 description 1
- ACVYVLVWPXVTIT-UHFFFAOYSA-N phosphinic acid Chemical compound O[PH2]=O ACVYVLVWPXVTIT-UHFFFAOYSA-N 0.000 description 1
- 229920002530 polyetherether ketone Polymers 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 229920001155 polypropylene Polymers 0.000 description 1
- 239000011736 potassium bicarbonate Substances 0.000 description 1
- 235000015497 potassium bicarbonate Nutrition 0.000 description 1
- 229910000028 potassium bicarbonate Inorganic materials 0.000 description 1
- 229910000027 potassium carbonate Inorganic materials 0.000 description 1
- 235000011181 potassium carbonates Nutrition 0.000 description 1
- TYJJADVDDVDEDZ-UHFFFAOYSA-M potassium hydrogencarbonate Chemical compound [K+].OC([O-])=O TYJJADVDDVDEDZ-UHFFFAOYSA-M 0.000 description 1
- 238000001556 precipitation Methods 0.000 description 1
- 235000002020 sage Nutrition 0.000 description 1
- 229910000030 sodium bicarbonate Inorganic materials 0.000 description 1
- 235000017557 sodium bicarbonate Nutrition 0.000 description 1
- UIIMBOGNXHQVGW-UHFFFAOYSA-M sodium bicarbonate Substances [Na+].OC([O-])=O UIIMBOGNXHQVGW-UHFFFAOYSA-M 0.000 description 1
- CDBYLPFSWZWCQE-UHFFFAOYSA-L sodium carbonate Substances [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 1
- 229910000029 sodium carbonate Inorganic materials 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- BDHFUVZGWQCTTF-UHFFFAOYSA-M sulfonate Chemical compound [O-]S(=O)=O BDHFUVZGWQCTTF-UHFFFAOYSA-M 0.000 description 1
- 239000001117 sulphuric acid Substances 0.000 description 1
- 235000011149 sulphuric acid Nutrition 0.000 description 1
- 229910002058 ternary alloy Inorganic materials 0.000 description 1
- ISIJQEHRDSCQIU-UHFFFAOYSA-N tert-butyl 2,7-diazaspiro[4.5]decane-7-carboxylate Chemical compound C1N(C(=O)OC(C)(C)C)CCCC11CNCC1 ISIJQEHRDSCQIU-UHFFFAOYSA-N 0.000 description 1
- 231100000331 toxic Toxicity 0.000 description 1
- 230000002588 toxic effect Effects 0.000 description 1
- BWHOZHOGCMHOBV-BQYQJAHWSA-N trans-benzylideneacetone Chemical compound CC(=O)\C=C\C1=CC=CC=C1 BWHOZHOGCMHOBV-BQYQJAHWSA-N 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
- 239000002351 wastewater Substances 0.000 description 1
- 239000000080 wetting agent Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D17/00—Constructional parts, or assemblies thereof, of cells for electrolytic coating
- C25D17/10—Electrodes, e.g. composition, counter electrode
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D17/00—Constructional parts, or assemblies thereof, of cells for electrolytic coating
- C25D17/002—Cell separation, e.g. membranes, diaphragms
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D21/00—Processes for servicing or operating cells for electrolytic coating
- C25D21/12—Process control or regulation
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D3/00—Electroplating: Baths therefor
- C25D3/02—Electroplating: Baths therefor from solutions
- C25D3/22—Electroplating: Baths therefor from solutions of zinc
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D3/00—Electroplating: Baths therefor
- C25D3/02—Electroplating: Baths therefor from solutions
- C25D3/56—Electroplating: Baths therefor from solutions of alloys
- C25D3/565—Electroplating: Baths therefor from solutions of alloys containing more than 50% by weight of zinc
Definitions
- the present invention relates to an apparatus for the electrolytic deposition of a zinc or zinc alloy layer on a workpiece utilising a special anode assembly comprising a soluble and an insoluble anode.
- the invention also relates to a process for zinc or zinc alloy layer deposition from an electrolytic plating bath using such apparatus.
- Electrolytic metal deposition requires the use of at least one electrode which is cathodically (the cathode) polarized to another electrode, which is anodically polarized (the anode).
- such anode could either be a soluble anode, which upon anodic oxidation releases ions of the metal it is made from into the bath solution or it could be designed as an insoluble anode, sometimes referred to as inert anode.
- an insoluble anode needs to utilize another anodic reaction than the metal's dissolution in order to allow for a current flow.
- anodic reaction is the solvent's decomposition.
- the most applied solvent is water. Therefore, the most common anodic reaction in galvanic deposition with insoluble anodes is oxygen evolution due to oxidation of the oxygen in the water molecule, which can be represented by the following formula:
- insoluble anode is commonly used not to express that absolutely no material of the anode is anodically oxidized and thus dissolved, but the majority of the current is utilized to generate oxygen.
- insoluble anodes made from e.g. titanium or platinised titanium are virtually not oxidised and do not release platinum or titanium ions into the bath solution, thus remain stable.
- Soluble anodes in contrast utilize the majority of the applied current to oxidize the anode material forming the ions of the anode material, e.g. Zn 2+ ions from soluble zinc anodes.
- zinc ions are formed by the anodic oxidation reaction, which can be represented by the following formula: Zn Zn 2+ + 2e "
- insoluble anodes are more common in alkaline electrolyte compositions whereas soluble anodes are mostly employed in acidic bath compositions.
- insoluble anodes are dimensionally stable and do not require anode material replenishment.
- the metal being deposited at the cathode needs to be replenished frequently into the bath by means of the corresponding metal ion source, most often a metal ion salt of the metal to be deposited at the cathode.
- the advantage of soluble anodes is that the metal being deposited on the cathode can be replenished into the bath from the anode material. This working mode requires new anode material to replenish the dissolved metal.
- the anodic current efficiency of the metal dissolution reaction is usually almost 100%, e.g. acidic zinc electrolytes when applying common anodic current densities and normal working conditions.
- the cathodic current efficiency is usually well below 100% due to additional processes like reduction of certain organic bath components and water decomposition, particularly at high current densities.
- the higher current efficiency at the anode compared to the cathode results in an increase of the metal ions dissolved from the soluble anode material because less metal ions are reduced at the cathode than dissolved from the anode.
- the anode and cathode current efficiency are the same because under these conditions all metal ions dissolved from the anode are reduced at the cathode and the ion concentration in the plating bath remains constant.
- a common solution to reduce the increasing metal ion concentration in plating operations is to frequently dilute the bath and thus control the metal content.
- the apparatus according to the present invention is characterised in that it contains two types of anodes, soluble and insoluble anodes which allow adjustment of the current efficiency at the soluble anodes to correspond to the cathode efficiency at the cathode, i.e. the workpiece.
- concentration of metal ions dissolved from the soluble anodes corresponds to the amount of ions deposited on the cathode by an electrochemical reaction and the amount of metal ions in the plating bath solution remains constant.
- the apparatus is used for electrochemical deposition of zinc and zinc alloys from metal plating baths and results in deposits of high uniformity.
- the apparatus is particularly suited for deposition of zinc alloys exhibiting a homogeneous deposit having a constant ratio of metals in the alloy.
- Document WO 01 /96631 A1 relates to a plating process utilising a cationic ion exchange membrane and an insoluble anode to prevent formation of anodic breakdown products in the bath.
- the present invention in contrast is not directed to a method to prevent the formation of breakdown products or the cementation of nobler metals, but to control the metal ion concentrations by a special electrode assembly enabling metal deposition with constant deposition results and homogeneous deposits.
- Document DE 42 29 917 C1 relates to operation of an electrolytic bath for metal coating a substrate which uses a secondary anode cell containing alkaline or ammonium solutions and is sealed with a membrane to allow the pas- sage of alkali or ammonium ions into the plating solution. Acid needs to be added to the bath to compensate for the pH rise which occurs as hydrogen is evolved at the cathode. This method is disadvantageous because it requires pH control.
- JP S56 1 12500 A describes a method for the metal plating with the aim to stabilize the composition of a plating bath and thus enable operation for a long period by providing an insoluble auxiliary anode, in addition to a soluble anode, in an aqueous acid solution via a cationic ion exchange membrane in a plating tank, and flowing a part of current thereto for plating.
- This document fails to teach the specific advantages of the setup according to the present invention for zinc and zinc alloy plating methods.
- JP 2006 322069 A relates to an electrogalvanizing method which is performed in a plating bath provided with an insoluble anode isolated by a cationic ion exchange membrane and a soluble anode.
- the substrate to be plated is successively washed by water in washing tanks, and the plating liquid from the plating bath is recovered. Due to the isolation of the insoluble anode, the decomposition of salt and organic matter on the insoluble anode is prevented.
- the problem to be solved is to avoid decomposition by oxidation at the anode and thus differs from the object of the present invention. This becomes apparent by the substantially different setup of the electrode assembly.
- Fig. 1 shows an embodiment of an apparatus according to the present invention comprising in a first compartment a soluble anode, the workpiece as a cathode and in a second compartment an insoluble anode.
- the first and the second compartment are divided by an ion exchange, e.g. cationic exchange membrane.
- Fig. 2 shows an embodiment of an apparatus according to the present invention, wherein two power supplies (6a) and (6b) are used in order to distribute the current soluble zinc anode (2) and insoluble anode (5).
- Fig. 3 shows an embodiment of an apparatus according to the present invention which additionally contains a second soluble anode (2') to provide metal ions for alloy deposition.
- an apparatus comprising in a metal plating bath for zinc and zinc alloy plating at least one soluble zinc anode to provide a source zinc ions to be deposited and the cathode and in an anolyte compartment an insoluble anode, wherein the plating bath and the anolyte are separated from each other by an enclosure bearing on at least a portion of the enclosure an ion exchange membrane, which preferably is a cationic exchange membrane (also denoted cationic membrane).
- the insoluble anode can be selected from the group consisting of titanium anodes, platinized titanium anodes, ceramic coated anodes and carbon based anodes like graphite anodes.
- the plating bath contains the at least one soluble zinc anode and the cathode, which corresponds to the workpiece to be metal plated.
- the first compartment can contain two or more soluble anodes made from to the metals to be plated.
- the first compartment can contain a first soluble anode made of zinc and the second soluble anode made of nickel.
- the second soluble anode in addition to the soluble zinc anode can alternatively be selected from at least one of the group consisting of nickel, cobalt, iron, chromium, cadmium, tin, copper , silver, gold, platinum, palladium, manganese, ruthenium, or rhodium, iridium, osmium, rhenium, tungsten, molybdenum, vanadium, indium, bismuth, antimony, selenium, germanium, gallium and tantalum, niobium.
- Nickel and iron are preferred as the second soluble anode material, nickel being particularly preferred.
- the second metal can be provided via its salt.
- a typical setup would be an apparatus comprising in the plating bath a soluble zinc anode, nickel sulphate as the nickel source, and complexing agents, and in the anolyte an acid, preferably sulphuric acid in an aqueous solution.
- the apparatus according to the present invention can preferably be applied for the deposition of zinc nickel binary or ternary alloys.
- the deposition of binary zinc nickel alloys is particularly preferred.
- a typical setup for the deposition of a zinc nickel deposit is shown in Fig.1 .
- the container (1 ) comprises in the plating bath (1 a) the soluble anode (2) made from zinc which generates zinc ions when electric current is provided by the adjustable power supply (6).
- the plating bath (1 a) further contains hydrochloric acid or sulfuric acid, nickel chloride as nickel ion source, typically potassium chloride to increase the conductivity and auxiliary components like wetting agents, buffers and brightening agents.
- the plating bath (1 a) also contains the cathode (3) which is the workpiece to be metal plated.
- the anolyte compartment is divided from the first compartment by suitable separation means.
- the means bears on at least a portion thereofan ion exchange membrane (4a).
- the membrane (4a) preferably is a cationic ion exchange membrane in case the plating bath is acidic in pH.
- the separation by suitable means can for example be an enclosure made of polymers chemically resistant to the plating bath, e.g. made from polypropylene.
- the anolyte also holds the insoluble anode (5).
- the current flow is adjusted by the adjustable power supply (6) in such a way that essentially all zinc ions dissolved from the soluble anode (2) are deposited onto the cathode (3) as zinc nickel alloy deposit.
- the nickel ions (3) deposited at the cathode as nickel metal are replenished by adding the corresponding nickel salt, i.e. nickel chloride.
- a typical zinc nickel electroplating bath suitable for use in the apparatus according to the present invention contains zinc ion concentrations ranging from 0.1 to 100 g/l, preferably from 5 to 60 g/l and even more preferred from 20 to 35 g/l.
- the electroplating bath of the present invention further comprises nickel ions with concentrations ranging from 0.1 to 60 g/l, preferably from 10 or 50 g/l and even more preferred from 25 to 35 g/l.
- Sources of nickel ions which can be used comprise inorganic salts of nickel and organic salts of nickel.
- the nickel source includes one or more of nickel hydroxide, nickel sulfate, nickel carbonate, ammonium nickel sulfate, nickel sulfamate, nickel acetate, nickel formiate, nickel bromide, nickel chloride.
- the zinc ions and the nickel ions are present at concentrations sufficient to deposit a zinc-nickel alloy comprising a nickel content from 3 wt.% to 25 wt.% of the alloy. In another embodiment, the zinc ions and the nickel ions are present at concentrations sufficient to deposit a zinc-nickel ternary or higher alloy comprising a nickel content from 8 wt.% to 22 wt.% of the alloy.
- the electroplating bath in accordance with the present invention can further include one or more of Te-, Bi- and Sb-ions, and in some embodiments may also include one or more additional ionic species selected from ions of Ag, Cd, Co, Cr, Cu, Fe, In, Mn, Mo, P, Sn and W.
- the alloying elements are contained in the deposited zinc nickel alloy in smaller weight percentages only and are preferably provided in the plating bath via its salts. Generally, all water soluble salts are suitable.
- the electroplating baths of the invention contain an acidic component in sufficient quantity to provide the bath with an acidic pH.
- the acidic electroplating bath has a pH in the range from 0 to 6.5.
- the acidic electroplating bath has a pH in the range from 0.5 to 6, and in another from 1 to 5, and in yet another, from 1 to 3.
- the pH of the acidic bath is in the range from 3.5 to 6.
- the acidic pH includes any pH up to, but less than 7. A pH range of 0.5 to 6 is preferred.
- the acidic electroplating bath may include any appropriate acid, organic or inorganic or appropriate salt thereof.
- the acidic electroplating bath comprises one or more of hydrochloric acid, sulfuric acid, sulfu- rous acid, nitric acid, phosphoric acid, phosphorous acid, hypophosphorous acid, an aromatic sulfonic acid such as substituted or unsubstituted benzene sulfonic acids, toluene sulfonic acid, and similar and related aromatic sulfonic acids, methane sulfonic acids and similar alkyl sulfonic acids, a poly carboxylic acid such as citric acid, sulfamic acid, fluoroboric acid or any other acid capable of providing a suitable acidic pH.
- the acid itself or an appropriate salt thereof may be used, as needed, e.g., to obtain the desired pH.
- acidic zinc and zinc alloy plating bath compositions for a method and in an apparatus according to the present invention is preferred over alkaline plating bath compositions.
- the first advantage is the safety of an apparatus, wherein both compartments are acidic in pH. In case of leakages no strongly exothermic reaction occurs when the solutions of the plating bath as well as the anolyte are within the same pH range, which would happen if the plating bath would be alkaline and the anolyte would be acidic in pH (neutralisation reaction).
- H 3 0 + ions are the species migrating from the anolyte compartment through the cationic ion exchange membrane into the plating bath during the metal deposition process. This migration also helps to keep the pH value of the plating bath constant.
- a cathod- ic side reaction during metal plating particularly when working at a higher current densities, is the evolution of hydrogen gas from acidic solutions.
- H 3 0 + ions are reduced to hydrogen and the pH of the plating bath would increase.
- Migrating H 3 0 + ions from the anolyte into the plating bath help to maintain the pH, which is beneficial.
- the electroplating baths of the invention contain an inorganic alkaline component in sufficient quantity to provide the bath with an alkaline pH.
- the amount of the alkaline component contained in the electroplating bath is an amount sufficient to provide a pH of at least 10, and in one embodiment, an amount sufficient to provide a pH of at least 1 1 or, in one embodiment, a pH of 14.
- the alkaline pH is in the range from a pH of 7.5 to a pH of 14.
- the alkaline electroplating bath may contain any appropriate base.
- the alkaline component is an alkali metal derivative such as sodium or potassium hydroxide, sodium or potassium carbonate, and sodium or potassium bicarbonate, etc., and mixtures thereof.
- the electroplating bath of the invention further comprises one or more complexing agents.
- the electroplating bath has an alkaline pH. In this case it is required to include a complexing agent to help dissolve and maintain the nickel ions in solution and prevent their precipitation. In an acidic electroplating bath, nickel does not need a complexing agent to remain in solution. It is noted that some of the complexing agents are also listed above as acids useable in the acidic baths.
- the deposition of the coatings is carried out at a current density in the range from about 0.01 to about 150 A/dm 2 , in one embodiment, from about 0.5 to about 25 A/dm 2 and in one embodiment, from about 1 to about 10 A/dm 2 .
- the process conveniently may be carried out at room temperature.
- the process may be carried out at a temperature in the range from 10°C to 90° C, and in one embodiment, from 15°C to 45 °C, and in one embodiment, 25°C to 40°C.
- the disclosed higher temperatures may be useful, e.g. for inducing evaporation of water from the electrolyte or to provide beneficial deposition conditions.
- the apparatus according to the present invention enables the operator to change the dissolution rate of the metal from the at least one soluble anode material to adjust it according to the deposition rate at the cathode and thereby maintain a constant metal ion concentration in the plating bath.
- the electrode assembly comprises the at least one soluble zinc anode (2), the cathode (workpiece) (3) and the at least one insoluble anode (5).
- the soluble anode (2) and the insoluble anode (5) are both connected to the cathode (3) by an adjustable power supply (6).
- the current at the soluble anode (2) can be adjusted by an adjustable resistor element 7a and/or the current at the insoluble anode (5) can be adjusted by an adjustable resistor element 7b.
- the current distribution between soluble anode (2) and insoluble anode (5) can be adjusted by varying the distance between soluble anode (2) and the cathode (3) and/or the distance between insoluble anode (5) and the cathode (3). In such a case no resistor element is required.
- the current distribution between soluble anode (2) and insoluble anode (5) can be adjusted by varying the active surface area of the soluble anode (2) and/or the active surface area of the insoluble anode (5). In such a case no resistor element is required.
- the soluble anode (2) and the cathode (3) are connected by a first adjustable power supply (6a) and the insoluble anode (5) and the cathode (3) are connected by a second adjustable power supply (6b).
- first adjustable power supply (6a) the insoluble anode (5) and the cathode (3) are connected by a second adjustable power supply (6b).
- second adjustable power supply (6b) the current between soluble anode (2) and cathode (3) and between insoluble anode (5) and cathode (3) can be adjusted independently.
- a second soluble anode (2') is provided which is the metal ion source of the second metal to be plated.
- This setup is particularly useful for alloy deposition on the cathode (3).
- the first soluble anode (2) and the second soluble anode (2') are both connected to the cathode (3) by a first (6a) and a second (6c) adjustable power supply.
- the current between the soluble anodes (2) and (2'), respectively and cathode (3) and between insoluble anode (5) and cathode (3) can be adjusted independently.
- a constant current from one rectifier could be applied to all three anodes via a switching apparatus distributing the current to the different anodes alternating-
- the current distribution between the at least one soluble anode (2) and the insoluble anode (5) is adjusted in a way that the resulting current effi- ciency at the at least one soluble anode (2) corresponds to the cathode efficiency of the cathode (3).
- the remainder of the anodic current is directed to the insoluble anode (5) and consumed in a secondary anode reaction.
- the current of the soluble anode (2) is adjusted by the first adjustable power supply (6a) to dissolve the amount of ions necessary for the plating of the cathode (3).
- the additional current of the insoluble anode (5) is adjusted by the second adjustable power supply (6b) to compensate the lower efficiency, in comparison to the efficiency of the soluble anode, of the cathode (3) to achieve the desired plating quantity at the cathode.
- ion exchange membrane materials are suitable for the necessary separation of the plating bath and the anolyte.
- Such membrane materials are commercially available and are selected by the expert skilled in the art depending on the plating bath composition, e.g. its pH, the metals ions to be deposited, the temperature etc.
- cationic ion exchange membranes if the plating bath pH is acidic, e.g. made from fluorinated polymers like National.
- the ion-selective membrane may not only be anionic or cationic, but can also be of bipolar or charge-mosaic type.
- the anionic membrane may also be referred to as an anion-exchange membrane, and the cationic membrane may also be referred to as a cationic-exchange membrane.
- a bipolar membrane is an ion-exchange membrane having a structure in which a cationic membrane and an anionic membrane are attached together.
- a charge-mosaic membrane is composed of a two-dimensional or three-dimensional alternating cation- and anion-exchange channels throughout the membrane.
- a combination of an anionic and a cationic membrane is used, with the anionic- selective membrane on the anode side and the cationic-selective membrane on the cathode side.
- a combination of an anionic and a cationic membrane is used, with the cationic-selective membrane on the anode side and the anionic-selective membrane on the cathode side.
- the membranes are separated at least slightly during use, in distinction to a bipolar membrane, in which the two membranes are attached together.
- the bipolar ion- selective membrane is disposed with its cationic side towards the cathode and its anionic side towards the anode, and in another embodiment, in the opposite configuration.
- Any known anionic, cationic, bipolar or charge-mosaic membrane may be used, and appropriate membranes may be selected from those known in the art.
- Cationic ion selective membranes are particularly preferred.
- Exemplary cationic ion selective membranes can be made from materials such as NAFION, perfluorosulfonate ionomers and polyperfluorosulfonic acid; eth- ylene-styrene interpolymer (ESI) available from Dow Chemical; sulfonate dpolyarylether ketones, such as VICTREX, PEEK, polybenzimidazole, available as PBI from Celanese GmbH.
- materials such as NAFION, perfluorosulfonate ionomers and polyperfluorosulfonic acid
- ESI eth- ylene-styrene interpolymer
- sulfonate dpolyarylether ketones such as VICTREX, PEEK, polybenzimidazole, available as PBI from Celanese GmbH.
- the solution in the second compartment can correspond to the plating bath of the first compartment.
- it is for example an acid like diluted (e.g. 5 wt.%) sulfuric acid or hydrochloric acid.
- the insoluble (also denoted inert) anode material inside the second compartment is for example a titanium anode, a platinised titanium anode or a ceramic coated anode or a graphite or any other carbon electrode. Particularly preferred is a platinised titanium mesh metal anode.
- a zinc nickel plating bath is provided containing 20 g/l of zinc ions, 30 g/l of nickel ions (both added as their chloride salts) and potassium chloride to establish a total chloride ion concentration of 160 g/l chloride as well as 20 g/l boric acid, 2 g/l polyalkyleneimine, 2 g/l of an aromatic carboxylic acid, 0,4 mol/l acetate, 20 mg/l benzylidene acetone, 8 g/l of an anionic polyoxyalkylat- ed surfactant and 1 g/l of a polyoxyalkylated nonionic surfactant.
- the process is run using a soluble zinc anode and a soluble nickel anode, but no ion exchange membrane.
- the anodic current is being distributed between both anodes in an 5:1 (Zn:Ni) ratio at an anodic current density of 2 A/dm 2 and a ca- thodic current density of 2 A/dm 2 with mild steel workpieces on a cathode rack.
- the process is run at 35 °C and at pH of 5.3 with mechanical cathode agitation for 30 min.
- the metal at the cathode is deposited showing a smooth, glossy coating of an average thickness of 13.8 ⁇ having 14 wt.% of nickel homogenously distributed within the deposit.
- the plating thickness corresponds to a cathodic current efficiency of 90%.
- the thickness of the deposit on a rectangular shaped workpiece taken from the center of the rack is 20 ⁇ on the corners, 7 ⁇ in the center and 10 ⁇ in between center and corner. The results correspond to a plating bath without ageing.
- Example 2 The same plating procedure as described in Example 1 using the same bath is conducted several times in the same bath with a drag-out of 150 ml/m 2 bath and a drag-in of 150 ml/m 2 of water achieving an overall throughput of 2.500 kAh. Replenishment is performed to compensate for drag-out losses.
- the zinc and nickel concentrations are monitored and an increase of both metals can be detected, reaching 28 g/l Zn-ions and 35 g/l Ni-ions after 2500 kAh.
- the pH is adjusted by addition of hydrochloric acid or potassium hydroxide in order to keep the nickel concentration in the alloy constant.
- the thickness of the deposited zinc-nickel layer on a rectangular shaped workpiece taken from the center of the rack is 25 ⁇ on the corners, 5 ⁇ in the center and 7 ⁇ in between corner and center.
- a plating bath without ion exchange membrane system does not provide a homogeneous thickness distribution after prolonged plating (ageing).
- the same plating procedure as described in Example 2 using the same bath make-up and replenishment is conducted up to 2500 kAh.
- the plating bath contains an cationic exchange membrane with a National membrane to separate the anolyte from the plating bath (catholyte).
- the corresponding setup is shown in Figure 3.
- a carbon anode is used, the anolyte is a 5 wt.% aqueous sulfuric acid solution.
- a separate rectifier is used for the anolyte.
- the rectifiers used on the zinc and nickel anode remain in place with their cathodes connected together with the cathode from the now added third rectifier to the workpieces.
- the anode of the third rectifier is connected to the carbon anode in the membrane compartment.
- the current is adjusted so that 5 % of the current is run through the new carbon anode in the membrane anode compartment, 79 % on the zinc anode and the remaining 16 % on the nickel anode.
- the process still yields a smooth and glossy deposit of 13.8 ⁇ average thickness and 14 wt.% Ni content in the deposit.
- the zinc and nickel ion concentrations in the bath remained constant at 20 g/l zinc ions and 30 g/l of nickel ions.
- the thickness on a rectangular shaped work- piece taken from the center of the rack is 20 ⁇ on the corners, 7 ⁇ in the center and 10 ⁇ in between corner and centers, thus indicating maintained thickness distribution and deposit quality even after prolonged plating.
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Abstract
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KR1020157030282A KR20150132574A (ko) | 2013-03-21 | 2014-03-20 | 가공물에 금속층을 전해 전착하기 위한 장치와 방법 |
EP14714193.1A EP2976447A1 (fr) | 2013-03-21 | 2014-03-20 | Appareil et procédé pour dépôt électrolytique de couches métalliques sur des pièces |
CN201480017083.3A CN105189831A (zh) | 2013-03-21 | 2014-03-20 | 用于在工件上电解沉积金属层的装置和方法 |
US14/774,716 US20160024683A1 (en) | 2013-03-21 | 2014-03-20 | Apparatus and method for electrolytic deposition of metal layers on workpieces |
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US (1) | US20160024683A1 (fr) |
EP (1) | EP2976447A1 (fr) |
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EP3461933A1 (fr) * | 2017-09-28 | 2019-04-03 | ATOTECH Deutschland GmbH | Procédé de dépôt électrolytique d'une couche d'alliage zinc-nickel sur au moins un substrat devant être traité |
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US11339492B2 (en) | 2017-02-07 | 2022-05-24 | Dr.-Ing. Max Schlötter Gmbh & Co. Kg | Method for electrodepositing zinc and zinc alloy coatings from an alkaline coating bath with reduced depletion of organic bath additives |
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US9689084B2 (en) * | 2014-05-22 | 2017-06-27 | Globalfounries Inc. | Electrodeposition systems and methods that minimize anode and/or plating solution degradation |
CN106119938A (zh) * | 2016-08-31 | 2016-11-16 | 厦门同恒金属有限公司 | 一种滚镀槽锡锌合金电镀装置及工艺 |
CN107119289A (zh) * | 2017-05-08 | 2017-09-01 | 安徽长青电子机械(集团)有限公司 | 一种提高均镀性的电镀方法 |
KR101998605B1 (ko) * | 2017-11-27 | 2019-07-10 | 주식회사 지에스켐텍 | 아연니켈합금 전기도금액 및 이를 이용한 전기도금법 |
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EP3914757B1 (fr) * | 2019-01-24 | 2023-04-05 | Atotech Deutschland GmbH & Co. KG | Procede de dépôt électrolytique d'un alliage zinc-nickel utilsant un système d'anode à membrane |
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US11661666B2 (en) * | 2019-10-10 | 2023-05-30 | The Boeing Company | Electrodeposited zinc and iron coatings for corrosion resistance |
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KR20200047459A (ko) | 2020-03-31 | 2020-05-07 | (주)애니캐스팅 | 전해생성물 제거가 가능한 전해가공장치 |
CN114059143A (zh) * | 2020-07-31 | 2022-02-18 | 苏州市汉宜化学有限公司 | 一种碱性电沉积锌及锌合金专用的阳极及其制备方法 |
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- 2014-03-20 CN CN201480017083.3A patent/CN105189831A/zh active Pending
- 2014-03-20 WO PCT/EP2014/055612 patent/WO2014147180A1/fr active Application Filing
- 2014-03-20 EP EP14714193.1A patent/EP2976447A1/fr not_active Withdrawn
- 2014-03-20 KR KR1020157030282A patent/KR20150132574A/ko not_active Application Discontinuation
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DE4229917C1 (en) * | 1992-09-08 | 1993-07-15 | Lpw-Anlagen Gmbh, 4040 Neuss, De | Electrolytic bath for meter coating - has sec. anode contg. alkaline or ammonium soln. with acid added to electrolyte to compensate for pH rise |
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Cited By (10)
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CN104313657A (zh) * | 2014-11-10 | 2015-01-28 | 临安振有电子有限公司 | Hdi印制线路板通孔的电沉积装置 |
CN104975332A (zh) * | 2015-07-30 | 2015-10-14 | 江苏金曼科技有限责任公司 | 一种调整镀液中离子浓度的方法 |
US11339492B2 (en) | 2017-02-07 | 2022-05-24 | Dr.-Ing. Max Schlötter Gmbh & Co. Kg | Method for electrodepositing zinc and zinc alloy coatings from an alkaline coating bath with reduced depletion of organic bath additives |
EP3461933A1 (fr) * | 2017-09-28 | 2019-04-03 | ATOTECH Deutschland GmbH | Procédé de dépôt électrolytique d'une couche d'alliage zinc-nickel sur au moins un substrat devant être traité |
WO2019063197A1 (fr) * | 2017-09-28 | 2019-04-04 | Atotech Deutschland Gmbh | Procédé de dépôt électrolytique d'une couche d'alliage zinc-nickel sur au moins un substrat à traiter |
US10961637B2 (en) | 2017-09-28 | 2021-03-30 | Atotech Deutschland Gmbh | Method for electrolytically depositing a zinc nickel alloy layer on at least a substrate to be treated |
CN109023496A (zh) * | 2018-06-26 | 2018-12-18 | 南通汇丰电子科技有限公司 | 一种用于控制电镀锡铋合金的方法及系统 |
JP2021085068A (ja) * | 2019-11-28 | 2021-06-03 | ユケン工業株式会社 | めっき液の亜鉛濃度の上昇を抑制する方法および亜鉛系めっき部材の製造方法 |
WO2021106291A1 (fr) * | 2019-11-28 | 2021-06-03 | ユケン工業株式会社 | Procédé de suppression d'augmentation de la concentration en zinc dans une solution de placage, et procédé de production d'élément de placage à base de zinc |
CN113195798A (zh) * | 2019-11-28 | 2021-07-30 | 油研工业股份有限公司 | 抑制镀覆液的锌浓度上升的方法以及锌系镀覆构件的制造方法 |
Also Published As
Publication number | Publication date |
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KR20150132574A (ko) | 2015-11-25 |
CN105189831A (zh) | 2015-12-23 |
US20160024683A1 (en) | 2016-01-28 |
EP2976447A1 (fr) | 2016-01-27 |
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