WO2014098118A1 - Suspended metal mask for printing and manufacturing method therefor - Google Patents

Suspended metal mask for printing and manufacturing method therefor Download PDF

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Publication number
WO2014098118A1
WO2014098118A1 PCT/JP2013/083863 JP2013083863W WO2014098118A1 WO 2014098118 A1 WO2014098118 A1 WO 2014098118A1 JP 2013083863 W JP2013083863 W JP 2013083863W WO 2014098118 A1 WO2014098118 A1 WO 2014098118A1
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Prior art keywords
printing
resist
metal
opening pattern
forming
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PCT/JP2013/083863
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French (fr)
Japanese (ja)
Inventor
秀樹 仁科
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株式会社ボンマーク
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Publication date
Application filed by 株式会社ボンマーク filed Critical 株式会社ボンマーク
Priority to CN201380064893.XA priority Critical patent/CN104884264B/en
Priority to JP2014553175A priority patent/JP5970561B2/en
Priority to KR1020157018884A priority patent/KR101723321B1/en
Priority to TW102147126A priority patent/TWI564162B/en
Publication of WO2014098118A1 publication Critical patent/WO2014098118A1/en

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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41CPROCESSES FOR THE MANUFACTURE OR REPRODUCTION OF PRINTING SURFACES
    • B41C1/00Forme preparation
    • B41C1/14Forme preparation for stencil-printing or silk-screen printing
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41FPRINTING MACHINES OR PRESSES
    • B41F15/00Screen printers
    • B41F15/14Details
    • B41F15/34Screens, Frames; Holders therefor
    • B41F15/36Screens, Frames; Holders therefor flat
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41NPRINTING PLATES OR FOILS; MATERIALS FOR SURFACES USED IN PRINTING MACHINES FOR PRINTING, INKING, DAMPING, OR THE LIKE; PREPARING SUCH SURFACES FOR USE AND CONSERVING THEM
    • B41N1/00Printing plates or foils; Materials therefor
    • B41N1/24Stencils; Stencil materials; Carriers therefor
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41CPROCESSES FOR THE MANUFACTURE OR REPRODUCTION OF PRINTING SURFACES
    • B41C1/00Forme preparation
    • B41C1/14Forme preparation for stencil-printing or silk-screen printing
    • B41C1/142Forme preparation for stencil-printing or silk-screen printing using a galvanic or electroless metal deposition processing step

Definitions

  • the present invention relates to a suspend metal mask for printing and a method for manufacturing the same.
  • the present invention has been made in order to solve the above-described problems, and is a print suspend in which bleeding does not occur even in a thin line portion, and it does not take time to remove a resist for forming a print opening pattern.
  • a metal mask and a manufacturing method thereof are provided.
  • a plate frame In the suspending metal mask for printing according to the present invention, a plate frame, a mesh that is stretched by bonding and fixing the outer periphery to the inside of the plate frame, and has a conductive metal mesh at least in the center, and a metal mesh
  • a base metal provided with an opening pattern for printing, which is integrally bonded to each other by bonding, and formed with an overhang at the upper end of the opening pattern for printing formed on the base metal.
  • a mesh having a plate frame and a metallic mesh that is stretched by bonding and fixing the outer periphery to the inside of the plate frame, at least in the center.
  • a suspending metal mask for screen printing having a base metal provided with an opening pattern for printing that is integrally bonded to a metal mesh and bonded integrally by bonding plating.
  • the second plating is performed from the top of the first plating and the top of the resist for forming the printing opening pattern, which is the same height as the first plating. And it forms a base metal having a overhanging portion overhanging the upper end portion of the over emissions forming resist.
  • the resist for forming the printing opening pattern when the resist for forming the printing opening pattern is peeled off, the resist is easily peeled off and does not remain in the opening pattern for printing of the base metal.
  • the problem that bleeding is likely to occur particularly in the thin line portion can be solved.
  • the working time for removing the resist for forming the printing opening pattern can be greatly shortened.
  • FIG. 5 is a cross-sectional view showing a state in which the first plating is performed so as to be thinner than the thickness of the resist after applying the resist for forming the printing opening pattern of the base metal of the suspending metal mask for printing in the second embodiment of the present invention. is there.
  • FIG. 7 is a cross-sectional view showing a state in which the first plating is performed so as to be thinner than the resist thickness after applying the resist for forming the printing opening pattern of the base metal of the suspending metal mask for printing in Embodiment 3 of the present invention. is there. It is sectional drawing which shows the state which removed the upper end part of the resist for forming a printing opening pattern which protrudes upwards rather than 1st time plating by the grinding
  • the constituent elements necessary for the method for producing a suspending metal mask for printing according to the present invention include a metal mesh 1 made of stainless steel or nickel mesh having conductivity and provided at the center, and this metal A square metal plate frame 3 in which a combination mesh composed of a tetron mesh 2 provided outside is electrically connected to the mesh 1 by a conductive tape or the like, and an SUS base material for base metal A base metal 5 provided on 4 and having a printing opening pattern forming resist 5a at a central portion where a printing opening pattern is formed, and a quadrilateral joining auxiliary metal plate in which a tetron mesh 6 is stretched.
  • the mesh stretched on the rectangular metal plate frame 3 is preferably a combination mesh composed of a metal mesh 1 at the center and an outer tetron mesh 2 but is not a combination mesh and has electrical conductivity. A single piece of metal mesh 1 may be used.
  • the base metal 5 has a printing opening pattern 5b formed at the center.
  • a rectangular metal plate frame 3 is arranged on the right side, and a rectangular bonding auxiliary metal plate frame 7 is arranged on the left side. .
  • the base metal 5 is disposed so as to be overlapped with the metal mesh 1 of the metal plate frame 3, the metal plate frame 3 and the joining auxiliary metal plate frame 7 are overlapped with each other, and fastened and fixed with an adhesive tape 9 or the like,
  • the base metal 5 and the metal mesh 1 are set so as to be in close contact with each other via the base metal SUS base material 4 and the sponge 8.
  • the set in the close contact state is connected to the cathode 10 and electrically connected, and is accommodated in a plating tank 11 built in a nickel plating solution such as a nickel sulfamate bath or a watt bath, and accommodated in an anode back.
  • a nickel plating solution such as a nickel sulfamate bath or a watt bath
  • an anode back By connecting the nickel 12 to the anode 13, bonding plating is performed between the base metal 5 and the metal mesh 1, and both are integrally bonded.
  • This bonding plating amount is usually 2 ⁇ m on one side, and the same plating method as electroforming plating is used.
  • the bonding plating step is completed, the one set in the above-mentioned close contact state is taken out from the plating tank 11 (see FIG. 3), and the adhesive tape 9 is removed and the one set in the close contact state is released (see FIG. 4).
  • the base metal SUS base material 4 is peeled from the base metal 5 (see FIGS. 5 and 6).
  • the printing opening pattern forming resist 5a is peeled off from the base metal 5 of the metal plate frame 3 in which the joining portions of the base metal 5 and the metal mesh 1 are integrally joined by plating, whereby the printing opening pattern 5b. Is formed (see FIG. 7).
  • the printing opening pattern forming resist 5a and the printing opening pattern 5b of the base metal 5 are simplified and show only images, and are different from actual ones.
  • the general structure of the base metal of the conventional suspend metal mask for printing will be described with reference to FIGS.
  • a base metal of a conventional suspend metal mask for printing first, a resist 25a for forming a printing opening pattern is applied on a SUS base material 24 for base metal, and then nickel plating is performed on the resist to form a base metal 25.
  • the upper surface of 25 is usually leveled by belt polishing or the like. Bonding plating is performed between the base metal 25 and the metal mesh 21, and the base metal 25 and the metal mesh 21 are integrally coupled (see FIGS. 8 and 9).
  • a printing opening pattern 25b is formed at the center (see FIG. 10). As shown in FIGS.
  • the base metal 25 of the conventional suspend metal mask for printing configured as described above is configured so that the upper end portion of the printing opening pattern forming resist 25 a and the metal mesh 21 are in contact with each other. Therefore, when the weave of the metal mesh 21 is not flat, the protrusion of the metal mesh 21 hits the resist 25a at the time of joining, or when the resist 25a is not polished to the flat portion, the resist 25a There was a problem that it was difficult to join. Further, when the metal is peeled off from the printing opening pattern forming resist 25a, a part of the resist 25a may remain in the printing opening pattern 25b of the base metal 25 without being peeled off. There was a problem that bleeding was likely to occur. Further, when the resist for forming the print opening pattern 25a is peeled off, it takes 2 to 3 hours for the peeling work, and there is a problem that it takes too much work time.
  • a procedure for producing a base metal of a suspending metal mask for printing according to the present invention that has solved the conventional problems and a configuration of the main part of the base metal will be described with reference to FIGS.
  • a printing opening pattern forming resist 5a is applied on the base metal SUS base material 4, and nickel plating is performed thereon, and the upper end portion of the printing opening pattern forming resist 5a due to the side spread phenomenon of plating.
  • a base metal 5 having a flange 5c overhanged by overelectroforming is prepared.
  • the relationship between the length and thickness of the flange 5c is approximately 1: 1. That is, the length of the flange portion 5c is equal to the plate thickness protruding from the upper part of the resist.
  • the upper surface of the base metal 5 is leveled by buffing with a non-woven fabric and a ceramic system, so that damage to the base metal 5 is reduced.
  • the base metal 5 having the flange 5c and the metal mesh 1 are bonded and integrally bonded. It can be seen that the flange 5c increases the bonding area between the base metal 5 and the metal mesh 1 (see FIGS. 11 to 13). At this time, a gap 5d is formed between the metal mesh 1 and the upper end of the printing opening pattern forming resist 5a as shown in FIGS. 11 and 12, due to the presence of the flange 5c. It will be.
  • the resist used in this embodiment is usually a dry film type. However, when there is no dry film having a target thickness, the resist may be formed to a target resist thickness using a liquid resist, an electrodeposition resist, or the like.
  • the length and thickness of the flange 5c are 1 to 5 ⁇ m, preferably 2 to 3 ⁇ m.
  • the upper end of the printing opening pattern forming resist 5a applied on the base metal SUS base material 4 is made larger than the lower end, and the opening shape of the base metal printing opening pattern is changed to the upper end ( The opening size on the printing medium side) is larger than the opening size on the lower end (printing side).
  • FIG. 14 shows a state in which the first plating is performed so as to be thinner than the thickness of the resist after applying the resist for forming the printing opening pattern of the base metal of the suspending metal mask for printing in the second embodiment of the present invention.
  • FIG. 15 is a cross-sectional view showing a state in which the upper end portion of the resist for forming a printing opening pattern protruding upward from the first plating is removed by polishing or the like so as to have the same height as the upper surface of the first plating.
  • the upper end portion of the resist for forming the printing opening pattern is removed by polishing or the like to make it the same height as the upper surface of the first plating, and then the second plating is performed on the upper surface of the first plating.
  • It is sectional drawing which shows the state which has the collar part overhanged by the side spread phenomenon.
  • a base metal 5 having a flange portion 5c overhanged by overelectroforming at the upper end portion is manufactured (see FIG. 16). And the point where the relationship between the length and thickness of the flange portion 5c is approximately 1: 1, the point that the base metal 5 having the flange portion 5c and the metal mesh 1 are joined and integrally bonded, The flange 5c increases the bonding area between the base metal 5 and the metal mesh 1, and between the metal mesh 1 and the upper end of the printing opening pattern forming resist 5a-1 is the flange 5c.
  • the gap 5d that separates the two due to the presence of is formed in the same manner as in the first embodiment.
  • the thickness of the plating can be adjusted without being caught by the thickness of the resist 5a for forming the printing opening pattern.
  • polishing the upper end of the resist 5a for forming the printing opening pattern it can be made the same height as the upper surface of the first plating, so that the in-plane variation during the second plating can be suppressed.
  • the upper end portion of the printing opening pattern forming resist 5a protruding above the first nickel plating 5-1 is polished and removed, and the printing opening having the same height as the upper surface of the first plating 5-1 is removed.
  • the surface of the first nickel plating 5-1 may be activated with an acid or the like so as to improve the adhesion with the second plating.
  • the flange 5c overhanging the opening is formed on the first resist in order to set the length of the flange 5 to the desired length after the first nickel plating 5-1. It can be manufactured by forming a resist for adjusting the thickness separately and then performing the second plating.
  • FIG. 17 shows a state in which the first plating is performed so as to be thinner than the thickness of the resist after applying the resist for forming the printing opening pattern of the base metal of the suspending metal mask for printing in the third embodiment of the present invention.
  • 18 is a cross-sectional view showing a state in which the upper end portion of the resist for forming a printing opening pattern protruding upward from the first plating is removed by polishing or the like so as to have the same height as the upper surface of the first plating. It is.
  • the upper end portion of the printing opening pattern forming resist 5a applied on the base metal SUS base material 4 is made larger than the lower end portion, and the opening shape of the base metal printing opening pattern is set.
  • the opening size of the upper end (printed material side) is larger than the opening size of the lower end (printing side).
  • printing performed on the base metal SUS base material 4 is performed.
  • the lower end portion of the opening pattern forming resist 5a is made larger than the upper end portion, and the opening shape of the base metal printing opening pattern is set so that the opening size of the upper end portion (printed material side) is larger than the opening size of the lower end portion (printing side). Is also small.
  • the lower end portion of the printing opening pattern forming resist 5a is made larger than the upper end portion, the resist can be easily peeled off and the omission property during printing is improved. be able to.

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Mechanical Engineering (AREA)
  • Printing Plates And Materials Therefor (AREA)
  • Manufacture Or Reproduction Of Printing Formes (AREA)
  • Screen Printers (AREA)
  • Manufacturing Of Printed Wiring (AREA)

Abstract

In the present invention, obtained is a suspended metal mask for printing with which bleeding does not occur even in thin line portions and for which it does not take time to detach a resist for forming a printing opening pattern. The suspended metal mask for printing is provided with a plate frame (3), a mesh having a metal mesh (1) at least the middle portion of which is electrically conductive and the outer periphery of which is attached and fixed to the inner side of the plate frame so as to be in a stretched state, and a base metal (5) that is tightly adhered and polymerized with the metal mesh and integrally bonded therewith by bond plating and that is provided with a printing opening pattern (5b), wherein overhanging brim parts (5c) are formed at an upper end of the printing opening pattern formed on the base metal, and when the base metal and the metal mesh are integrally bonded by bond plating, a gap (5d) is formed due to the existence of the brim parts between the metal mesh and the upper end of the resist for forming the printing opening pattern.

Description

印刷用サスペンドメタルマスク及びその製造方法Suspended metal mask for printing and manufacturing method thereof
 この発明は、印刷用サスペンドメタルマスク及びその製造方法に関するものである。 The present invention relates to a suspend metal mask for printing and a method for manufacturing the same.
 従来、電鋳により所望の印刷パターンにパターンニングされた多数の開口部を有するマスク基板の片面側に、囲い枠に対して緊張状態で張設した導電性を有するステンレスメッシュを重合密着させてめっきにより一体接合させてなるメッシュ一体型メタルマスクが知られている(例えば、特許文献1参照)。 Conventionally, a conductive stainless steel mesh stretched in a tensioned state with respect to an enclosure frame is superposed and adhered to one side of a mask substrate having a large number of openings patterned in a desired printing pattern by electroforming. There is known a mesh-integrated metal mask that is integrally bonded to each other (see, for example, Patent Document 1).
 また、他の従来技術として、金属枠にテトロンメッシュとステンレスメッシュとが張られ、ステンレスメッシュ上にメタルマスクが形成されたサスペンドメタルマスクが知られている(例えば、特許文献2参照)。 As another conventional technique, a suspend metal mask in which a metal frame is stretched with a Tetron mesh and a stainless mesh and a metal mask is formed on the stainless mesh is known (see, for example, Patent Document 2).
日本特開平8-183151号公報Japanese Unexamined Patent Publication No. 8-183151 日本特開2007-245560号公報Japanese Unexamined Patent Publication No. 2007-245560
 従来のメッシュ一体型メタルマスク又はサスペンドメタルマスクにおいては、メタルマスクとステンレスメッシュを重合密着させてめっきにより一体接合させた場合、印刷開口パターン形成用レジストが接合部付近まで存在しているので、接合の邪魔となって接合がしにくいという問題があった。また印刷開口パターン形成用レジストを剥離する際に、レジストが剥離されずに残ることがあるので、特に細線部において滲みが発生し易かった。更に、印刷開口パターン形成用レジストを剥離するのに作業時間が掛かり過ぎるという問題があった。 In conventional mesh-integrated metal masks or suspend metal masks, when the metal mask and stainless steel mesh are superposed and bonded together by plating, the resist for forming the printing opening pattern exists up to the vicinity of the joint. There was a problem that it was difficult to join. Further, when the resist for forming the printing opening pattern is peeled off, the resist may remain without being peeled off, so that bleeding is likely to occur particularly in the thin line portion. Furthermore, there is a problem that it takes too much work time to remove the resist for forming the printing opening pattern.
 この発明は、上述のような課題を解決するためになされたもので、細線部においても滲みが発生せず、しかも印刷開口パターン形成用レジストの剥離にも時間が掛からないようにした印刷用サスペンドメタルマスク及びその製造方法を提供するものである。 The present invention has been made in order to solve the above-described problems, and is a print suspend in which bleeding does not occur even in a thin line portion, and it does not take time to remove a resist for forming a print opening pattern. A metal mask and a manufacturing method thereof are provided.
 この発明に係る印刷用サスペンドメタルマスクにおいては、版枠と、版枠の内側に外周を接着固定して張設され、少なくとも中央部に通電性のある金属製メッシュを有するメッシュと、金属製メッシュに密着重合させて接合めっきにより一体接合され、印刷用開口パターンが設けられたベースメタルとを備えたものにおいて、ベースメタルに形成される印刷用開口パターンの上端部にオーバーハングした庇部を形成し、ベースメタルと金属製メッシュとを接合めっきにより一体接合する際、印刷開口パターン形成用レジストの上端部と金属製メッシュとの間に庇部の存在により隙間を形成したものである。 In the suspending metal mask for printing according to the present invention, a plate frame, a mesh that is stretched by bonding and fixing the outer periphery to the inside of the plate frame, and has a conductive metal mesh at least in the center, and a metal mesh A base metal provided with an opening pattern for printing, which is integrally bonded to each other by bonding, and formed with an overhang at the upper end of the opening pattern for printing formed on the base metal. When the base metal and the metal mesh are integrally joined by joint plating, a gap is formed between the upper end of the printing opening pattern forming resist and the metal mesh due to the presence of the flange.
 また、この発明に係る印刷用サスペンドメタルマスクの製造方法においては、版枠と、版枠の内側に外周を接着固定して張設され、少なくとも中央部に通電性のある金属製メッシュを有するメッシュと、金属製メッシュに密着重合させて接合めっきにより一体接合され、印刷用開口パターンが設けられたベースメタルとを備えたスクリーン印刷用サスペンドメタルマスクの製造方法であって、母材上に印刷開口パターン形成用レジストを施し、その上からめっきを行い、印刷開口パターン形成用レジストの上端部にオーバーハングした庇部を有するベースメタルを形成する工程と、庇部を有するベースメタルと金属製メッシュとを接合めっきにより一体接合する際、印刷開口パターン形成用レジストの上端部と金属製メッシュとの間に庇部の存在により隙間を形成しておく工程とを備えたものである。 Further, in the method for producing a suspending metal mask for printing according to the present invention, a mesh having a plate frame and a metallic mesh that is stretched by bonding and fixing the outer periphery to the inside of the plate frame, at least in the center. And a suspending metal mask for screen printing having a base metal provided with an opening pattern for printing that is integrally bonded to a metal mesh and bonded integrally by bonding plating. Applying a resist for pattern formation, plating from above, and forming a base metal having an overhanging collar on the upper end of the resist for forming a print opening pattern; a base metal having a collar and a metal mesh; Between the upper end of the resist for forming the printing opening pattern and the metal mesh It is obtained and a step to be formed a gap by the presence.
 また、この発明に係る印刷用サスペンドメタルマスクの製造方法においては、母材上に印刷開口パターン形成用レジストを施し、その上からめっきを行い、印刷開口パターン形成用レジストの上端部にオーバーハングした庇部を有するベースメタルを形成する工程は、母材上に印刷開口パターン形成用レジストを厚く施し、その上から印刷開口パターン形成用レジストの厚みよりも薄くなるように1回目のめっきを行い、次に1回目のめっきよりも上方に突出している印刷開口パターン形成用レジストの上端部を研磨して削除し、1回目のめっきの上面と同じ高さの印刷開口パターン形成用レジストとし、更に1回目のめっきの上と1回目のめっきと同じ高さの印刷開口パターン形成用レジストの上から2回目のめっきを行い、印刷開口パターン形成用レジストの上端部にオーバーハングした庇部を有するベースメタルを形成するものである。 In the method for manufacturing a suspending metal mask for printing according to the present invention, a resist for forming a printing opening pattern is applied on a base material, plating is performed thereon, and the upper end of the resist for forming a printing opening pattern is overhanged. In the step of forming the base metal having the flange, the resist for forming the printing opening pattern is thickly applied on the base material, and the first plating is performed so as to be thinner than the resist for forming the printing opening pattern from above, Next, the upper end portion of the resist for forming a printing opening pattern protruding upward from the first plating is polished and removed, and a resist for forming a printing opening pattern having the same height as the upper surface of the first plating is obtained. The second plating is performed from the top of the first plating and the top of the resist for forming the printing opening pattern, which is the same height as the first plating. And it forms a base metal having a overhanging portion overhanging the upper end portion of the over emissions forming resist.
 この発明によれば、印刷開口パターン形成用レジストを剥離する際に、レジストが剥離され易くベースメタルの印刷用開口パターンに残ることが無い。また、特に細線部において滲みが発生し易いという問題を解決できる効果がある。また、印刷開口パターン形成用レジストを剥離するための作業時間を大幅に短縮することができる。 According to the present invention, when the resist for forming the printing opening pattern is peeled off, the resist is easily peeled off and does not remain in the opening pattern for printing of the base metal. In addition, there is an effect that the problem that bleeding is likely to occur particularly in the thin line portion can be solved. Moreover, the working time for removing the resist for forming the printing opening pattern can be greatly shortened.
この発明の実施の形態1における印刷用サスペンドメタルマスクの製造方法に必要な各構成要素を分離して示す斜視図である。It is a perspective view which isolate | separates and shows each component required for the manufacturing method of the suspend metal mask for printing in Embodiment 1 of this invention. この発明の実施の形態1における印刷用サスペンドメタルマスクの製造方法の接合めっき工程を示す断面図である。It is sectional drawing which shows the joining plating process of the manufacturing method of the suspend metal mask for printing in Embodiment 1 of this invention. この発明の実施の形態1における印刷用サスペンドメタルマスクの製造方法の接合めっきが終了した状態を示す断面図である。It is sectional drawing which shows the state which the junction plating of the manufacturing method of the suspend metal mask for printing in Embodiment 1 of this invention was complete | finished. この発明の実施の形態1における印刷用サスペンドメタルマスクの製造方法の接合状態からセットを解除した状態を示す断面図である。It is sectional drawing which shows the state which canceled the set from the joining state of the manufacturing method of the suspend metal mask for printing in Embodiment 1 of this invention. この発明の実施の形態1における印刷用サスペンドメタルマスクの製造方法のベースメタルからSUS母材を剥離している状態を示す断面図である。It is sectional drawing which shows the state which has peeled the SUS base material from the base metal of the manufacturing method of the suspend metal mask for printing in Embodiment 1 of this invention. この発明の実施の形態1における印刷用サスペンドメタルマスクの製造方法のベースメタルの開口レジストを剥離する前の状態を示す断面図である。It is sectional drawing which shows the state before peeling the opening resist of the base metal of the manufacturing method of the suspend metal mask for printing in Embodiment 1 of this invention. この発明の実施の形態1における印刷用サスペンドメタルマスクの製造方法のベースメタルの開口レジストを剥離した状態を示す断面図である。It is sectional drawing which shows the state which peeled the opening resist of the base metal of the manufacturing method of the suspend metal mask for printing in Embodiment 1 of this invention. 従来の印刷用サスペンドメタルマスクのベースメタルの印刷開口パターン形成用レジストを剥離する前の状態を示す断面図である。It is sectional drawing which shows the state before peeling the resist for printing hole pattern formation of the base metal of the conventional suspend metal mask for printing. 図8の要部を拡大して示す要部拡大断面図である。It is a principal part expanded sectional view which expands and shows the principal part of FIG. 従来の印刷用サスペンドメタルマスクのベースメタルの印刷開口パターン形成用レジストを剥離した後の状態を示す断面図である。It is sectional drawing which shows the state after peeling the resist for printing hole pattern formation of the base metal of the conventional suspend metal mask for printing. この発明の実施の形態1における印刷用サスペンドメタルマスクのベースメタルの印刷開口パターン形成用レジストを剥離する前の状態を示す断面図である。It is sectional drawing which shows the state before peeling the resist for forming the printing opening pattern of the base metal of the suspending metal mask for printing in Embodiment 1 of this invention. 図11の要部を拡大して示す要部拡大断面図である。It is a principal part expanded sectional view which expands and shows the principal part of FIG. この発明の実施の形態1における印刷用サスペンドメタルマスクのベースメタルの印刷開口パターン形成用レジストを剥離した後の状態を示す要部断面図である。It is principal part sectional drawing which shows the state after peeling the resist for printing hole pattern formation of the base metal of the suspend metal mask for printing in Embodiment 1 of this invention. この発明の実施の形態2における印刷用サスペンドメタルマスクのベースメタルの印刷開口パターン形成用レジストを施した後、レジストの厚みよりも薄くなるように1回目のめっきを行った状態を示す断面図である。FIG. 5 is a cross-sectional view showing a state in which the first plating is performed so as to be thinner than the thickness of the resist after applying the resist for forming the printing opening pattern of the base metal of the suspending metal mask for printing in the second embodiment of the present invention. is there. 1回目のめっきよりも上方に突出している印刷開口パターン形成用レジストの上端部を研磨等で除去して1回目のめっきの上面と同じ高さにした状態を示す断面図である。It is sectional drawing which shows the state which removed the upper end part of the resist for forming a printing opening pattern which protrudes upwards rather than 1st time plating by the grinding | polishing etc., and made it the same height as the upper surface of 1st time plating. 印刷開口パターン形成用レジストの上端部を研磨等で除去して1回目のめっきの上面と同じ高さにした後、1回目のめっきの上面と印刷開口パターン形成用レジストの上に2回目のめっきを形成した状態を示す断面図である。After removing the upper end of the resist for forming the printing aperture pattern by polishing or the like to make it the same height as the upper surface of the first plating, the second plating is performed on the upper surface of the first plating and the resist for forming the printing aperture pattern. It is sectional drawing which shows the state which formed. この発明の実施の形態3における印刷用サスペンドメタルマスクのベースメタルの印刷開口パターン形成用レジストを施した後、レジストの厚みよりも薄くなるように1回目のめっきを行った状態を示す断面図である。FIG. 7 is a cross-sectional view showing a state in which the first plating is performed so as to be thinner than the resist thickness after applying the resist for forming the printing opening pattern of the base metal of the suspending metal mask for printing in Embodiment 3 of the present invention. is there. 1回目のめっきよりも上方に突出している印刷開口パターン形成用レジストの上端部を研磨等で除去して1回目のめっきの上面と同じ高さにした状態を示す断面図である。It is sectional drawing which shows the state which removed the upper end part of the resist for forming a printing opening pattern which protrudes upwards rather than 1st time plating by the grinding | polishing etc., and made it the same height as the upper surface of 1st time plating.
 この発明をより詳細に説明するため、添付の図面に従ってこれを説明する。なお、各図中、同一又は相当する部分には同一の符号を付しており、その重複説明は適宜に簡略化ないし省略する。 In order to explain the present invention in more detail, this will be described with reference to the attached drawings. In addition, in each figure, the same code | symbol is attached | subjected to the part which is the same or it corresponds, The duplication description is simplified or abbreviate | omitted suitably.
実施の形態1.
 図1はこの発明の印刷用サスペンドメタルマスクの製造方法に必要な各構成要素を分離して示す斜視図、図2~図7はこの発明の印刷用サスペンドメタルマスクの製造方法の製造工程を示す断面図、図8~図10は従来の印刷用サスペンドメタルマスクのベースメタルの印刷開口パターン形成用レジストを剥離する前後の状態をそれぞれ示す断面図、図11~図13はこの発明の印刷用サスペンドメタルマスクのベースメタルの印刷開口パターン形成用レジストを剥離する前後の状態をそれぞれ示す断面図である。
Embodiment 1.
FIG. 1 is a perspective view showing components necessary for a method for manufacturing a suspending metal mask for printing according to the present invention, and FIGS. 2 to 7 show manufacturing steps of the method for manufacturing a suspending metal mask for printing according to the present invention. 8 to 10 are sectional views showing states before and after removing the resist for forming the printing opening pattern of the base metal of the conventional suspending metal mask for printing, and FIGS. 11 to 13 are suspending for printing according to the present invention. It is sectional drawing which shows the state before and behind peeling the resist for printing opening pattern formation of the base metal of a metal mask, respectively.
 この発明の印刷用サスペンドメタルマスクの製造方法に必要な構成要素は、図1に示すように、中央部に設けられた通電性を有するステンレスメッシュ又はニッケルメッシュからなる金属製メッシュ1及びこの金属製メッシュ1に導電性テープ等により電気的に導通され、その外側に設けられたテトロンメッシュ2とからなるコンビネーションメッシュが内側に張設された四角形状の金属製版枠3と、ベースメタル用SUS母材4上に設けられ、印刷用開口パターンが形成される中央部分に印刷開口パターン形成用レジスト5aが施されているベースメタル5と、テトロンメッシュ6が張設された四角形状の接合補助用金属製版枠7と、この接合補助用金属製版枠7のテトロンメッシュ6とベースメタル用SUS母材4との間に介装されるスポンジ8とから構成される。なお、四角形状の金属製版枠3に張設されるメッシュは、中央部の金属製メッシュ1と外側のテトロンメッシュ2とからなるコンビネーションメッシュが好適であるが、コンビネーションメッシュでなく、通電性を有する金属製メッシュ1の単体からなる一枚物であっても良い。上記ベースメタル5は、中央部に印刷用開口パターン5bが形成されている。 As shown in FIG. 1, the constituent elements necessary for the method for producing a suspending metal mask for printing according to the present invention include a metal mesh 1 made of stainless steel or nickel mesh having conductivity and provided at the center, and this metal A square metal plate frame 3 in which a combination mesh composed of a tetron mesh 2 provided outside is electrically connected to the mesh 1 by a conductive tape or the like, and an SUS base material for base metal A base metal 5 provided on 4 and having a printing opening pattern forming resist 5a at a central portion where a printing opening pattern is formed, and a quadrilateral joining auxiliary metal plate in which a tetron mesh 6 is stretched. It is interposed between the frame 7 and the tetron mesh 6 of the metal plate frame 7 for joining assistance and the SUS base material 4 for base metal. It consists of sponge 8. The mesh stretched on the rectangular metal plate frame 3 is preferably a combination mesh composed of a metal mesh 1 at the center and an outer tetron mesh 2 but is not a combination mesh and has electrical conductivity. A single piece of metal mesh 1 may be used. The base metal 5 has a printing opening pattern 5b formed at the center.
 印刷用サスペンドメタルマスクの製造方法の接合めっき工程に当たっては、図2に示すように、右側に四角形状の金属製版枠3を配置し、左側に四角形状の接合補助用金属製版枠7を配置する。そして、金属製版枠3の金属製メッシュ1と重合位置するようにベースメタル5を配置し、金属製版枠3と接合補助用金属製版枠7を互いに重合させて粘着テープ9等で締結固定し、ベースメタル用SUS母材4及びスポンジ8を介してベースメタル5と金属製メッシュ1が互いに密着状態となるようにセットする。この密着状態にセットしたものを陰極10に接続するとともに電気的に導通させて、スルファミン酸ニッケル浴またはワット浴等のニッケルメッキ液に建浴されためっき槽11内に収容し、アノードバックに収容されたニッケル12を陽極13に接続することにより、ベースメタル5と金属製メッシュ1の間で接合めっきを行い、両者を一体的に接合する。この接合めっき量は、通常片側2μmとし、電鋳めっきと同じめっき法を用いる。また、陽・陰極電流密度は約0.1~2.0A/dm、好ましくは0.25~1.0A/dmの低電流を用いることにより、接合めっき量の均一性向上と金属製メッシュ1の断線を防止することができる。 In the bonding plating step of the method for producing a suspending metal mask for printing, as shown in FIG. 2, a rectangular metal plate frame 3 is arranged on the right side, and a rectangular bonding auxiliary metal plate frame 7 is arranged on the left side. . Then, the base metal 5 is disposed so as to be overlapped with the metal mesh 1 of the metal plate frame 3, the metal plate frame 3 and the joining auxiliary metal plate frame 7 are overlapped with each other, and fastened and fixed with an adhesive tape 9 or the like, The base metal 5 and the metal mesh 1 are set so as to be in close contact with each other via the base metal SUS base material 4 and the sponge 8. The set in the close contact state is connected to the cathode 10 and electrically connected, and is accommodated in a plating tank 11 built in a nickel plating solution such as a nickel sulfamate bath or a watt bath, and accommodated in an anode back. By connecting the nickel 12 to the anode 13, bonding plating is performed between the base metal 5 and the metal mesh 1, and both are integrally bonded. This bonding plating amount is usually 2 μm on one side, and the same plating method as electroforming plating is used. Further, by using a low current of positive / cathode current density of about 0.1 to 2.0 A / dm 2 , preferably 0.25 to 1.0 A / dm 2 , it is possible to improve the uniformity of the bonding plating amount and to make the metal Disconnection of the mesh 1 can be prevented.
 次に、接合めっき工程が終了したら、上記密着状態にセットしたものをめっき槽11から取り出し(図3参照)、粘着テープ9を取り外して密着状態にセットしたものを解除する(図4参照)。次に、ベースメタル5からベースメタル用SUS母材4を剥離する(図5及び図6参照)。その後、ベースメタル5と金属製メッシュ1の接合部がめっきにより一体的に接合されている金属製版枠3のベースメタル5から印刷開口パターン形成用レジスト5aを剥離することにより、印刷用開口パターン5bが形成される(図7参照)。なお、ベースメタル5の印刷開口パターン形成用レジスト5a及び印刷用開口パターン5bは、簡略化してイメージのみを示したものであり、実際のものとは相違する。 Next, when the bonding plating step is completed, the one set in the above-mentioned close contact state is taken out from the plating tank 11 (see FIG. 3), and the adhesive tape 9 is removed and the one set in the close contact state is released (see FIG. 4). Next, the base metal SUS base material 4 is peeled from the base metal 5 (see FIGS. 5 and 6). Thereafter, the printing opening pattern forming resist 5a is peeled off from the base metal 5 of the metal plate frame 3 in which the joining portions of the base metal 5 and the metal mesh 1 are integrally joined by plating, whereby the printing opening pattern 5b. Is formed (see FIG. 7). The printing opening pattern forming resist 5a and the printing opening pattern 5b of the base metal 5 are simplified and show only images, and are different from actual ones.
 従来の印刷用サスペンドメタルマスクのベースメタルの一般的な構成を図8~図10により説明する。従来の印刷用サスペンドメタルマスクのベースメタルは、先ず、ベースメタル用SUS母材24上に印刷開口パターン形成用レジスト25aを施し、その上からニッケルめっきを行ってベースメタル25を作製し、ベースメタル25の上面は通常はベルト研磨等によりレベリングを行っている。このベースメタル25と金属製メッシュ21の間で接合めっきを行い、ベースメタル25と金属製メッシュ21を一体的に結合している(図8、図9参照)。そして、ベースメタル25から印刷開口パターン形成用レジスト25aを剥離することにより、中央部に印刷用開口パターン25bを形成している(図10参照)。このように構成された従来の印刷用サスペンドメタルマスクのベースメタル25は、図8、図9に示すように、印刷開口パターン形成用レジスト25aの上端部と金属製メッシュ21とが接触するように存在しているので、金属製メッシュ21の織が平坦でない場合は接合の際にレジスト25aに金属製メッシュ21の突出部が当ったり、レジスト25aが平坦部に研磨されていない場合はレジスト25aが邪魔となり接合がしにくいという問題があった。また印刷開口パターン形成用レジスト25aに金属製を剥離する際に、このレジスト25aの一部が剥離されずにベースメタル25の印刷用開口パターン25bに残ってしまうことがあるので、特に細線部において滲みが発生し易いという問題があった。更に、印刷開口パターン形成用レジスト25aを剥離する際、剥離作業に2~3時間も掛かっており、作業時間が掛かり過ぎるという問題があった。 The general structure of the base metal of the conventional suspend metal mask for printing will be described with reference to FIGS. As a base metal of a conventional suspend metal mask for printing, first, a resist 25a for forming a printing opening pattern is applied on a SUS base material 24 for base metal, and then nickel plating is performed on the resist to form a base metal 25. The upper surface of 25 is usually leveled by belt polishing or the like. Bonding plating is performed between the base metal 25 and the metal mesh 21, and the base metal 25 and the metal mesh 21 are integrally coupled (see FIGS. 8 and 9). Then, by removing the printing opening pattern forming resist 25a from the base metal 25, a printing opening pattern 25b is formed at the center (see FIG. 10). As shown in FIGS. 8 and 9, the base metal 25 of the conventional suspend metal mask for printing configured as described above is configured so that the upper end portion of the printing opening pattern forming resist 25 a and the metal mesh 21 are in contact with each other. Therefore, when the weave of the metal mesh 21 is not flat, the protrusion of the metal mesh 21 hits the resist 25a at the time of joining, or when the resist 25a is not polished to the flat portion, the resist 25a There was a problem that it was difficult to join. Further, when the metal is peeled off from the printing opening pattern forming resist 25a, a part of the resist 25a may remain in the printing opening pattern 25b of the base metal 25 without being peeled off. There was a problem that bleeding was likely to occur. Further, when the resist for forming the print opening pattern 25a is peeled off, it takes 2 to 3 hours for the peeling work, and there is a problem that it takes too much work time.
 次に、従来の問題点を解決したこの発明の印刷用サスペンドメタルマスクのベースメタルの作成手順及びベースメタルの要部構成を図11~図13により説明する。この発明においては、先ず、ベースメタル用SUS母材4上に印刷開口パターン形成用レジスト5aを施し、その上からニッケルめっきを行い、めっきのサイドスプレッド現象により印刷開口パターン形成用レジスト5aの上端部にオーバーエレクトロフォーミングによりオーバーハングした庇部5cを有するベースメタル5を作製する。この庇部5cの長さと厚みの関係は、略1:1となる。すなわち、庇部5cの長さがレジスト上部より突出した板厚と同等である。ベースメタル5の上面は通常と異なり、不織布及びセラミック系によるバフ研磨でレベリングを行うことにしているので、ベースメタル5へのダメージが減少する。この庇部5cを有するベースメタル5と金属製メッシュ1の間で接合めっきを行って一体的に結合している。この庇部5cはベースメタル5と金属製メッシュ1との接合面積を増大させていることが判る(図11~図13参照)。このとき、金属製メッシュ1と印刷開口パターン形成用レジスト5aの上端部との間には、図11、図12に示すように、庇部5cの存在により両者を離間させる隙間5dが形成されることになる。この隙間5dにより、印刷開口パターン形成用レジスト5aの上端部が金属製メッシュ1との接合部付近に存在しないので、接合の際に邪魔になるという不都合を解消することができ、接合がし易くなる。そして、ベースメタル5から印刷開口パターン形成用レジスト5aを剥離することにより、中央部に印刷用開口パターン5bを形成している(図13参照)。このように構成されたこの発明の印刷用サスペンドメタルマスクのベースメタル5は、印刷開口パターン形成用レジスト5aを剥離する際に、金属製メッシュ21とレジスト25aの間に空間ができることで剥離液が入り易くなりレジストが剥離され易くベースメタル5の印刷用開口パターン5bに残ることが無いので、特に細線部において印刷時のパターン欠け、滲みが発生し易いという問題を解決することができる。更に、印刷開口パターン形成用レジスト5aを剥離するための作業時間が30分以内となり、時間を大幅に短縮することができる。
 本実施例で使用されるレジストは通常ドライフィルムタイプであるが、目的の厚さのドライフィルムが無い場合は、液レジスト、電着レジスト等を用いて目的のレジスト厚に形成しても良い。また、庇部5cの長さと厚みは1~5μm、好ましくは2~3μmが良い。
 本実施例では、ベースメタル用SUS母材4上に施される印刷開口パターン形成用レジスト5aの上端部を下端部よりも大きくし、ベースメタルの印刷用開口パターンの開口形状を、上端部(被印刷体側)の開口寸法を下端部(印刷側)の開口寸法よりも大きくしている。
Next, a procedure for producing a base metal of a suspending metal mask for printing according to the present invention that has solved the conventional problems and a configuration of the main part of the base metal will be described with reference to FIGS. In the present invention, first, a printing opening pattern forming resist 5a is applied on the base metal SUS base material 4, and nickel plating is performed thereon, and the upper end portion of the printing opening pattern forming resist 5a due to the side spread phenomenon of plating. A base metal 5 having a flange 5c overhanged by overelectroforming is prepared. The relationship between the length and thickness of the flange 5c is approximately 1: 1. That is, the length of the flange portion 5c is equal to the plate thickness protruding from the upper part of the resist. Unlike the normal case, the upper surface of the base metal 5 is leveled by buffing with a non-woven fabric and a ceramic system, so that damage to the base metal 5 is reduced. The base metal 5 having the flange 5c and the metal mesh 1 are bonded and integrally bonded. It can be seen that the flange 5c increases the bonding area between the base metal 5 and the metal mesh 1 (see FIGS. 11 to 13). At this time, a gap 5d is formed between the metal mesh 1 and the upper end of the printing opening pattern forming resist 5a as shown in FIGS. 11 and 12, due to the presence of the flange 5c. It will be. Because of the gap 5d, the upper end portion of the printing opening pattern forming resist 5a does not exist in the vicinity of the joint portion with the metal mesh 1, so that it is possible to eliminate the inconvenience that it becomes an obstacle during joining, and joining is easy. Become. Then, the printing opening pattern 5b is formed at the center by peeling the printing opening pattern forming resist 5a from the base metal 5 (see FIG. 13). The base metal 5 of the suspending metal mask for printing according to the present invention thus configured has a space between the metal mesh 21 and the resist 25a when the printing opening pattern forming resist 5a is peeled off. Since it is easy to enter and the resist is easily peeled off and does not remain in the printing opening pattern 5 b of the base metal 5, it is possible to solve the problem that pattern chipping and bleeding are likely to occur particularly in the thin line portion. Furthermore, the work time for removing the resist 5a for forming the printing opening pattern is within 30 minutes, and the time can be greatly shortened.
The resist used in this embodiment is usually a dry film type. However, when there is no dry film having a target thickness, the resist may be formed to a target resist thickness using a liquid resist, an electrodeposition resist, or the like. The length and thickness of the flange 5c are 1 to 5 μm, preferably 2 to 3 μm.
In this embodiment, the upper end of the printing opening pattern forming resist 5a applied on the base metal SUS base material 4 is made larger than the lower end, and the opening shape of the base metal printing opening pattern is changed to the upper end ( The opening size on the printing medium side) is larger than the opening size on the lower end (printing side).
実施の形態2.
 図14はこの発明の実施の形態2における印刷用サスペンドメタルマスクのベースメタルの印刷開口パターン形成用レジストを施した後、レジストの厚みよりも薄くなるように1回目のめっきを行った状態を示す断面図、図15は1回目のめっきよりも上方に突出している印刷開口パターン形成用レジストの上端部を研磨等で除去して1回目のめっきの上面と同じ高さにした状態を示す断面図、図16は印刷開口パターン形成用レジストの上端部を研磨等で除去して1回目のめっきの上面と同じ高さにした後、1回目のめっきの上面に2回目のめっきを行い、めっきのサイドスプレット現象でオーバーハングした庇部を有る状態を示す断面図である。
Embodiment 2.
FIG. 14 shows a state in which the first plating is performed so as to be thinner than the thickness of the resist after applying the resist for forming the printing opening pattern of the base metal of the suspending metal mask for printing in the second embodiment of the present invention. FIG. 15 is a cross-sectional view showing a state in which the upper end portion of the resist for forming a printing opening pattern protruding upward from the first plating is removed by polishing or the like so as to have the same height as the upper surface of the first plating. In FIG. 16, the upper end portion of the resist for forming the printing opening pattern is removed by polishing or the like to make it the same height as the upper surface of the first plating, and then the second plating is performed on the upper surface of the first plating. It is sectional drawing which shows the state which has the collar part overhanged by the side spread phenomenon.
 この実施の形態2においては、先ず、ベースメタル用SUS母材4上に若干厚くなるように印刷開口パターン形成用レジスト5aを施した後、印刷開口パターン形成用レジスト5aの厚みよりも薄くなるように1回目のニッケルめっき5-1を行う(図14参照)。そして、1回目のニッケルめっき5-1よりも上方に突出している印刷開口パターン形成用レジスト5aの上端部を研磨して削除し、1回目のめっき5-1の上面と同じ高さの印刷開口パターン形成用レジスト5a-1とする(図15参照)。次に、1回目のニッケルめっき5-1の上と印刷開口パターン形成用レジスト5a-1の上から2回目のニッケルめっきを行い、めっきのサイドスプレッド現象により印刷開口パターン形成用レジスト5a-1の上端部にオーバーエレクトロフォーミングによりオーバーハングした庇部5cを有するベースメタル5を作製する(図16参照)。そして、庇部5cの長さと厚みの関係が略1:1となる点、庇部5cを有するベースメタル5と金属製メッシュ1の間で接合めっきを行って一体的に結合している点、この庇部5cはベースメタル5と金属製メッシュ1との接合面積を増大させている点、金属製メッシュ1と印刷開口パターン形成用レジスト5a-1の上端部との間には、庇部5cの存在により両者を離間させる隙間5dが形成される点は、実施の形態1と同様である。
 この実施の形態2によれば、手間は増えるが、印刷開口パターン形成用レジスト5aの厚みに捕われずにめっきの厚みを調節できるという利点がある。また、印刷開口パターン形成用レジスト5aの上端部を研磨することで、1回目のめっきの上面と同じ高さにできるので、2回目のめっきを行う際の面内のバラツキを抑えることができるという利点がある。
 また、1回目のニッケルめっき5-1よりも上方に突出している印刷開口パターン形成用レジスト5aの上端部を研磨して削除し、1回目のめっき5-1の上面と同じ高さの印刷開口パターン形成用レジスト5a-1にした後、1回目のニッケルめっき5-1の表面を酸等で活性化することで、2回目のめっきとの密着性を向上させる処理を施しても良い。
 また、開口部にオーバーハングする庇部5cの形成は、1回目のニッケルめっき5-1の終了後に庇部の長さを目的の長さにするために、1回目のレジスト上に庇長さを調整するためのレジストを別に形成してから、2回目のめっきを施すことにより製造することができる。
In the second embodiment, first, the printing opening pattern forming resist 5a is applied to the base metal SUS base material 4 so as to be slightly thick, and then the thickness is made thinner than the printing opening pattern forming resist 5a. First nickel plating 5-1 is performed (see FIG. 14). Then, the upper end portion of the printing opening pattern forming resist 5a protruding upward from the first nickel plating 5-1 is polished and removed, and the printing opening having the same height as the upper surface of the first plating 5-1 is removed. The pattern forming resist 5a-1 is used (see FIG. 15). Next, the second nickel plating is performed on the first nickel plating 5-1 and the printing opening pattern forming resist 5a-1, and the printing opening pattern forming resist 5a-1 is formed by the side spread phenomenon of plating. A base metal 5 having a flange portion 5c overhanged by overelectroforming at the upper end portion is manufactured (see FIG. 16). And the point where the relationship between the length and thickness of the flange portion 5c is approximately 1: 1, the point that the base metal 5 having the flange portion 5c and the metal mesh 1 are joined and integrally bonded, The flange 5c increases the bonding area between the base metal 5 and the metal mesh 1, and between the metal mesh 1 and the upper end of the printing opening pattern forming resist 5a-1 is the flange 5c. The gap 5d that separates the two due to the presence of is formed in the same manner as in the first embodiment.
According to the second embodiment, although labor is increased, there is an advantage that the thickness of the plating can be adjusted without being caught by the thickness of the resist 5a for forming the printing opening pattern. In addition, by polishing the upper end of the resist 5a for forming the printing opening pattern, it can be made the same height as the upper surface of the first plating, so that the in-plane variation during the second plating can be suppressed. There are advantages.
Also, the upper end portion of the printing opening pattern forming resist 5a protruding above the first nickel plating 5-1 is polished and removed, and the printing opening having the same height as the upper surface of the first plating 5-1 is removed. After forming the resist 5a-1 for pattern formation, the surface of the first nickel plating 5-1 may be activated with an acid or the like so as to improve the adhesion with the second plating.
In addition, the flange 5c overhanging the opening is formed on the first resist in order to set the length of the flange 5 to the desired length after the first nickel plating 5-1. It can be manufactured by forming a resist for adjusting the thickness separately and then performing the second plating.
実施の形態3.
 図17はこの発明の実施の形態3における印刷用サスペンドメタルマスクのベースメタルの印刷開口パターン形成用レジストを施した後、レジストの厚みよりも薄くなるように1回目のめっきを行った状態を示す断面図、図18は1回目のめっきよりも上方に突出している印刷開口パターン形成用レジストの上端部を研磨等で除去して1回目のめっきの上面と同じ高さにした状態を示す断面図である。
Embodiment 3.
FIG. 17 shows a state in which the first plating is performed so as to be thinner than the thickness of the resist after applying the resist for forming the printing opening pattern of the base metal of the suspending metal mask for printing in the third embodiment of the present invention. 18 is a cross-sectional view showing a state in which the upper end portion of the resist for forming a printing opening pattern protruding upward from the first plating is removed by polishing or the like so as to have the same height as the upper surface of the first plating. It is.
 上記実施の形態1及び2では、ベースメタル用SUS母材4上に施される印刷開口パターン形成用レジスト5aの上端部を下端部よりも大きくし、ベースメタルの印刷用開口パターンの開口形状を、上端部(被印刷体側)の開口寸法を下端部(印刷側)の開口寸法よりも大きくしているが、この実施の形態3においては、ベースメタル用SUS母材4上に施される印刷開口パターン形成用レジスト5aの下端部を上端部よりも大きくし、ベースメタルの印刷用開口パターンの開口形状を、上端部(被印刷体側)の開口寸法を下端部(印刷側)の開口寸法よりも小さくしている。
 この実施の形態3によれば、印刷開口パターン形成用レジスト5aの下端部を上端部よりも大きくしているので、レジストの剥離を容易にすることができ、印刷時の抜け性の向上を図ることができる。
In the first and second embodiments, the upper end portion of the printing opening pattern forming resist 5a applied on the base metal SUS base material 4 is made larger than the lower end portion, and the opening shape of the base metal printing opening pattern is set. The opening size of the upper end (printed material side) is larger than the opening size of the lower end (printing side). In the third embodiment, printing performed on the base metal SUS base material 4 is performed. The lower end portion of the opening pattern forming resist 5a is made larger than the upper end portion, and the opening shape of the base metal printing opening pattern is set so that the opening size of the upper end portion (printed material side) is larger than the opening size of the lower end portion (printing side). Is also small.
According to the third embodiment, since the lower end portion of the printing opening pattern forming resist 5a is made larger than the upper end portion, the resist can be easily peeled off and the omission property during printing is improved. be able to.
 1 金属製メッシュ
 2 テトロンメッシュ
 3 金属製版枠
 4 ベースメタル用SUS母材
 5 ベースメタル
 5-1 1回目のめっき
 5-2 2回目のめっき
 5a 印刷開口パターン形成用レジスト
 5a-1 研磨後の印刷開口パターン形成用レジスト
 5b 印刷用開口パターン
 5c 庇部
 5d 隙間
 6 テトロンメッシュ
 7 接合補助用金属製版枠
 8 スポンジ
 9 粘着テープ
 10 陰極
 11 めっき槽
 12 ニッケル
 13 陽極
DESCRIPTION OF SYMBOLS 1 Metal mesh 2 Tetron mesh 3 Metal plate frame 4 SUS base material for base metal 5 Base metal 5-1 First plating 5-2 Second plating 5a Printing opening pattern formation resist 5a-1 Printing opening after polishing Pattern formation resist 5b Printing opening pattern 5c Gutter 5d Gap 6 Tetron mesh 7 Metal plate frame for joining assistance 8 Sponge 9 Adhesive tape 10 Cathode 11 Plating tank 12 Nickel 13 Anode

Claims (6)

  1.  版枠と、
     前記版枠の内側に外周を接着固定して張設され、少なくとも中央部に通電性のある金属製メッシュを有するメッシュと、
     前記金属製メッシュに密着重合させて接合めっきにより一体接合され、印刷用開口パターンが設けられたベースメタルとを備えたスクリーン印刷用サスペンドメタルマスクにおいて、
     前記ベースメタルに形成される前記印刷用開口パターンの上端部にオーバーハングした庇部を形成し、前記ベースメタルと前記金属製メッシュとを接合めっきにより一体接合する際、前記印刷開口パターン形成用レジストの上端部と前記金属製メッシュとの間に前記庇部の存在により隙間を形成したことを特徴とするスクリーン印刷用サスペンドメタルマスク。
    Plate frame,
    A mesh having a metal mesh that is electrically conductive at least in the center, and is stretched by bonding and fixing the outer periphery to the inside of the plate frame;
    In a suspend metal mask for screen printing comprising a base metal provided with an opening pattern for printing, which is integrally bonded to the metal mesh and integrally bonded by bonding plating,
    A resist for forming a printing opening pattern is formed when an overhanging ridge is formed on an upper end portion of the printing opening pattern formed on the base metal and the base metal and the metal mesh are integrally bonded by bonding plating. A suspended metal mask for screen printing, characterized in that a gap is formed between the upper end of the metal mesh and the metal mesh due to the presence of the flange.
  2.  ベースメタルに形成される印刷用開口パターンの開口形状は、上端部側の開口寸法を下端部側の開口寸法よりも大きくしたことを特徴とする請求項1記載のスクリーン印刷用サスペンドメタルマスク。 2. The suspending metal mask for screen printing according to claim 1, wherein the opening shape of the opening pattern for printing formed on the base metal is such that the opening size on the upper end side is larger than the opening size on the lower end side.
  3.  ベースメタルに形成される印刷用開口パターンの開口形状は、上端部側の開口寸法を下端部側の開口寸法よりも小さくしたことを特徴とする請求項1記載のスクリーン印刷用サスペンドメタルマスク。 The suspending metal mask for screen printing according to claim 1, wherein the opening shape of the opening pattern for printing formed on the base metal is such that the opening size on the upper end side is smaller than the opening size on the lower end side.
  4.  ベースメタルの庇部の長さがレジスト上部より突出した板厚と同等であることを特徴とする請求項1~請求項3のいずれかに記載のスクリーン印刷用サスペンドメタルマスク。 The suspending metal mask for screen printing according to any one of claims 1 to 3, wherein the length of the ridge portion of the base metal is equal to the plate thickness protruding from the upper part of the resist.
  5.  版枠と、前記版枠の内側に外周を接着固定して張設され、少なくとも中央部に通電性のある金属製メッシュを有するメッシュと、前記金属製メッシュに密着重合させて接合めっきにより一体接合され、印刷用開口パターンが設けられたベースメタルとを備えたスクリーン印刷用サスペンドメタルマスクの製造方法であって、
     母材上に印刷開口パターン形成用レジストを施し、その上からめっきを行い、印刷開口パターン形成用レジストの上端部にオーバーハングした庇部を有するベースメタルを形成する工程と、
     前記庇部を有するベースメタルと前記金属製メッシュとを接合めっきにより一体接合する際、前記印刷開口パターン形成用レジストの上端部と前記金属製メッシュとの間に前記庇部の存在により隙間を形成しておく工程と
     を備えたことを特徴とするスクリーン印刷用サスペンドメタルマスクの製造方法。
    A plate frame, a mesh having an outer periphery bonded and fixed to the inside of the plate frame, and a mesh having an electrically conductive metal mesh at least in the center, and an adhesive polymerized to the metal mesh and integrally bonded by bonding plating A suspending metal mask for screen printing comprising a base metal provided with an opening pattern for printing,
    Applying a resist for forming a printing opening pattern on a base material, plating from above, and forming a base metal having an overhanging collar on the upper end of the resist for forming a printing opening pattern;
    When the base metal having the flange and the metal mesh are integrally bonded by bonding plating, a gap is formed between the upper end of the resist for forming the printing opening pattern and the metal mesh due to the presence of the flange. And a process for producing a suspending metal mask for screen printing, characterized by comprising the steps of:
  6.  母材上に印刷開口パターン形成用レジストを施し、その上からめっきを行い、印刷開口パターン形成用レジストの上端部にオーバーハングした庇部を有するベースメタルを形成する工程は、母材上に印刷開口パターン形成用レジストを厚く施し、その上から前記印刷開口パターン形成用レジストの厚みよりも薄くなるように1回目のめっきを行い、次に前記1回目のめっきよりも上方に突出している前記印刷開口パターン形成用レジストの上端部を研磨して削除し、1回目のめっきの上面と同じ高さの印刷開口パターン形成用レジストとし、更に前記1回目のめっきの上と1回目のめっきと同じ高さの印刷開口パターン形成用レジストの上から2回目のめっきを行い、印刷開口パターン形成用レジストの上端部にオーバーハングした庇部を有するベースメタルを形成することを特徴とする請求項5記載のスクリーン印刷用サスペンドメタルマスクの製造方法。 The process of applying a resist for forming a printing opening pattern on a base material, plating from above, and forming a base metal having an overhanging collar on the upper end of the resist for forming a printing opening pattern is printed on the base material. Applying the resist for forming the opening pattern thickly, performing the first plating so as to be thinner than the thickness of the resist for forming the opening pattern for printing, and then the printing protruding above the first plating. The upper end portion of the opening pattern forming resist is polished and removed to form a printing opening pattern forming resist having the same height as the upper surface of the first plating, and the same height as the first plating and the first plating. The second plating from the top of the resist for forming the print opening pattern is performed, and the overhanging collar is formed on the upper end of the resist for forming the print opening pattern. Method for producing a screen printing suspended metal mask according to claim 5, wherein the forming a base metal to be.
PCT/JP2013/083863 2012-12-20 2013-12-18 Suspended metal mask for printing and manufacturing method therefor WO2014098118A1 (en)

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US10933679B2 (en) 2017-03-27 2021-03-02 Taiyo Yuden Co., Ltd. Screen printing plate and manufacturing method of electronic component
KR102365454B1 (en) 2017-03-27 2022-02-21 다이요 유덴 가부시키가이샤 Screen printing plate, and method of manufacturing electronic component
JP7075217B2 (en) 2017-03-27 2022-05-25 太陽誘電株式会社 Screen printing plate and manufacturing method of electronic parts

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KR20150095867A (en) 2015-08-21
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CN104884264B (en) 2017-06-09
TWI564162B (en) 2017-01-01

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