JP2017100417A

JP2017100417A - Suspend metal mask for printing and manufacturing method thereof

Info

Publication number: JP2017100417A
Application number: JP2015237401A
Authority: JP
Inventors: 秀樹仁科; Hideki Nishina
Original assignee: Bon Mark Co Ltd
Current assignee: Bon Mark Co Ltd
Priority date: 2015-12-04
Filing date: 2015-12-04
Publication date: 2017-06-08

Abstract

PROBLEM TO BE SOLVED: To provide a suspend metal mask for printing, which neither generates a blur in an extra fine line part of a printing pattern during printing nor damages a printed surface.SOLUTION: A part of a part that relates to a print in which an opening pattern for printing is formed contains a part where a plurality of ultra fine lines are arranged in parallel equally spaced, on a first blast processed surface on which many ultra minute convex parts having a convex surface are formed, a part of many ultra minute convex parts having a convex surface shows a trapezoidal dome shape trimmed to an average height with a head part truncated horizontally, a remaining part of a part that relates to print other than a first blast processed surface and a part that does not relate with print is a second blast processed surface on which many ultra fine convex parts having a convex surface larger than ultra fine convex parts are formed, and a part of many ultra fine convex parts having a convex surface shows a trapezoidal dome shape trimmed to an average height with a head part truncated horizontally.SELECTED DRAWING: Figure 18

Description

この発明は、印刷用サスペンドメタルマスク及びその製造方法に関するものである。 The present invention relates to a suspend metal mask for printing and a method for manufacturing the same.

従来、電鋳により所望の印刷パターンにパターンニングされた多数の開口部を有するマスク基板の片面側に、囲い枠に対して緊張状態で張設した導電性を有するステンレスメッシュを重合密着させてめっきにより一体接合させてなるメッシュ一体型メタルマスクが知られている（例えば、特許文献１参照）。このメッシュ一体型メタルマスクでは、ステンレス製の電鋳母型の表面をそのまま使用しているので、電鋳母型の表面に形成される電着層（マスク基板）は荒らし加工の無い鏡面に近い状態となるため、マスク基板が印刷面に密着し版離れが悪くなる。 Conventionally, a conductive stainless steel mesh stretched in a tensioned state with respect to an enclosure frame is superposed and adhered to one side of a mask substrate having a large number of openings patterned in a desired printing pattern by electroforming. There is known a mesh-integrated metal mask that is integrally bonded to each other (see, for example, Patent Document 1). In this mesh-integrated metal mask, since the surface of the stainless steel electroforming mother mold is used as it is, the electrodeposition layer (mask substrate) formed on the surface of the electroforming mother mold is close to a mirror surface without roughening. As a result, the mask substrate comes into close contact with the printing surface and the separation of the plate becomes worse.

また、他の従来技術として、版枠と、版枠の内側に外周を接着固定して張設され、少なくとも中央部に通電性のある金属製メッシュを有するメッシュと、金属製メッシュに密着重合させて接合めっきにより一体接合され、印刷用開口パターンが設けられたベースメタル（電着層）とを備えたものにおいて、ベースメタルは、中央部に印刷用開口パターンを形成するとともに、印刷面（基板面側）に印刷時にエアーを逃がすためのエアー抜き用凸部を多数形成したサスペンドメタルマスクが知られている（例えば、特許文献２参照）。 As another prior art, a plate frame, a mesh having an outer periphery bonded and fixed to the inside of the plate frame, and having a conductive metal mesh at least in the center, and a metal mesh are closely polymerized. The base metal is integrally bonded by bonding plating and provided with a base metal (electrodeposition layer) provided with a printing opening pattern. The base metal forms a printing opening pattern in the central portion and also has a printed surface (substrate). A suspend metal mask is known in which a large number of air venting convex portions for releasing air during printing are formed on the surface side (see, for example, Patent Document 2).

特開平８−１８３１５１号公報JP-A-8-183151 特開２０１４−１３８９８１号公報JP 2014-133891 A

上記他の従来技術のサスペンドメタルマスクにおいては、ベースメタル用ＳＵＳ母材の表面全体に、電解研磨、化学研磨、ブラスト等で荒らし加工を施すことによりＳＵＳ母材表面に微小な凹形状を形成することで、ＳＵＳ母材の表面に形成されるベースメタルの母材側を印刷体に接する側に使用することで、印刷体に接触する側の全面に微小な凸部が多数形成されているため、印刷時にエアー抜きをすることでカスレを防止することができる。しかし、例えば、タッチパネル用配線パターンに使用されるベースメタルの場合、所望の印刷パターン形状が例えば、幅約５０μｍ以下の複数本の極細細線であり、極細細線相互間の間隔が約５０μｍ以下となるように平行に並べられており、極細細線の先端部は端子用の太線に接続されているので、極細細線と端子用の太線が混在した状態となる。このような場合、ベースメタルの印刷パターン全体に荒らし加工による微小な凸部が多数形成されているため、印刷時に印刷パターンの極細細線部分に滲みが発生し易くなるという問題が発生する。滲みが発生する原因を調査した結果、微小な凸部の中には平均的な高さよりも規格外に大きく突出したドーム型の凸部が複数個所で形成されていることが判った。この平均的な高さよりも規格外に大きく突出したドーム型の凸部は、印刷面を傷付ける可能性があり、滲み発生の原因にもなっていた。 In the other conventional suspend metal masks, the entire surface of the SUS base material for base metal is roughened by electrolytic polishing, chemical polishing, blasting, or the like to form a minute concave shape on the surface of the SUS base material. By using the base metal side of the base metal formed on the surface of the SUS base as the side in contact with the printed body, a large number of minute protrusions are formed on the entire surface in contact with the printed body. Scratching can be prevented by bleeding air during printing. However, for example, in the case of a base metal used for a wiring pattern for a touch panel, the desired printed pattern shape is, for example, a plurality of ultrafine wires having a width of about 50 μm or less, and the interval between the ultrafine wires is about 50 μm or less. Since the end portions of the fine wires are connected to the terminal thick wires, the fine wires and the terminal thick wires are mixed. In such a case, since a large number of minute convex portions by roughening are formed on the entire base metal print pattern, there arises a problem that bleeding is likely to occur in the fine line portion of the print pattern during printing. As a result of investigating the cause of bleeding, it was found that a plurality of dome-shaped protrusions that protrude beyond the standard height are formed at a plurality of locations in the minute protrusions. The dome-shaped convex part that protrudes beyond the average height greatly outside the standard may damage the printing surface and cause bleeding.

この発明は、上述のような課題を解決するためになされたもので、印刷時に印刷パターンの極細細線部分に滲みが発生することがなく、印刷面を傷付けることのない印刷用サスペンドメタルマスク及びその製造方法を提供するものである。 The present invention has been made in order to solve the above-described problems, and a suspend metal mask for printing that does not cause bleeding in the fine line portion of the print pattern at the time of printing and does not damage the print surface, and its A manufacturing method is provided.

この発明に係る印刷用サスペンドメタルマスクにおいては、版枠と、版枠の内側に外周が張設されている少なくとも中央部に通電性のある金属製メッシュを有するメッシュと、
金属製メッシュに密着した状態で接合され、印刷用開口パターンが設けられたベースメタルと、を備えたものであって、ベースメタルは、印刷用開口パターンが形成される印刷に関係がある部分と、印刷用開口パターンが形成されない印刷に関係がない部分とを備え、
印刷用開口パターンが形成される印刷に関係がある部分のうちの一部は、複数本の極細細線が等間隔で平行に並べられた部分を含み、凸曲面状の極微小の凸部が多数形成された第１のブラスト加工表面であり、第１のブラスト加工表面は、平均的な高さを有する凸曲面状の極微小の凸部が多数形成されており、多数の凸曲面状の極微小の凸部の中の一部は、頭部が水平に削り取られた状態で平均的な高さに揃えられた台形のドーム型を呈しており、第１のブラスト加工表面以外の印刷用開口パターンが形成される印刷に関係がある部分のうちの残部及び印刷に関係がない部分は、極微小の凸部よりも大きい凸曲面状の微小凸部が多数形成された第２のブラスト加工表面であり、第２のブラスト加工表面は、全体に前記極微小の凸部よりも大きい平均的な高さを有する凸曲面状の微小凸部が多数形成されており、多数の凸曲面状の微小凸部の中の一部は、頭部が水平に削り取られた状態で平均的な高さに揃えられた台形のドーム型を呈しているものである。 In the suspending metal mask for printing according to the present invention, a plate frame, and a mesh having a conductive metal mesh at least in the central portion where the outer periphery is stretched inside the plate frame,
A base metal that is bonded in close contact with a metal mesh and provided with a printing opening pattern, and the base metal is a portion related to printing in which the printing opening pattern is formed; A portion not related to printing in which the opening pattern for printing is not formed, and
Some of the portions related to printing on which the opening pattern for printing is formed include a portion in which a plurality of ultrafine wires are arranged in parallel at equal intervals, and there are a large number of extremely small convex portions with convex curved surfaces. The first blasting surface is formed, and the first blasting surface is formed with a large number of convex curved ultrafine projections having an average height, and a large number of convex curved micros A part of the small convex part has a trapezoidal dome shape with the average height with the head cut off horizontally, and a printing opening other than the first blasted surface. Of the portion related to printing on which the pattern is formed and the portion not related to printing, the second blasted surface on which a large number of convex convex portions larger than the extremely small convex portions are formed. And the second blasted surface is larger than the extremely small convex portion as a whole. A large number of convex curved convex portions having an average height are formed, and some of the convex convex micro convex portions are averaged with the head being scraped horizontally. It has a trapezoidal dome shape with a uniform height.

また、幅１５〜２００μｍ以下の複数本の極細細線を、極細細線相互間の間隔が幅１５〜２００μｍ以下となるように平行に並べたものである。 In addition, a plurality of ultrafine wires having a width of 15 to 200 μm or less are arranged in parallel so that an interval between the ultrafine wires is 15 to 200 μm or less.

また、複数本の極細細線のうち、大きな開口の近くに配置される１本の極細細線の幅を、他の極細細線の幅の２倍以上に設定したものである。 In addition, the width of one ultrafine wire arranged near a large opening among the plurality of ultrafine wires is set to be twice or more the width of the other ultrafine wires.

また、複数本の極細細線のうち、大きな開口の近くに配置される１本の極細細線の幅を、他の極細細線の幅の２倍以上に設定し、大きな開口の近くに配置される１本の極細細線のスキージ進行方向の入口側の１／２の部分を第１のブラスト加工表面とし、スキージ進行方向の出口側の１／２の部分を第２のブラスト加工表面としたものである。 In addition, among the plurality of ultrafine wires, the width of one ultrafine wire disposed near the large opening is set to be twice or more the width of the other ultrafine wires, and 1 disposed near the large opening. The ½ portion on the entrance side in the squeegee advance direction of the fine wire is the first blasted surface, and the ½ portion on the exit side in the squeegee advance direction is the second blasted surface. .

また、ベースメタルは、凸曲面状の微小の凸部が多数形成されたブラスト加工表面であり、ブラスト加工表面は、平均的な高さを有する凸曲面状の微小の凸部が多数形成されており、多数の凸曲面状の微小の凸部の中の一部は、頭部が水平に削り取られた状態で平均的な高さに揃えられた台形のドーム型を呈しているものである。 The base metal is a blasted surface on which a large number of minute convex portions having a convex curved surface are formed, and the blasted surface is formed with a large number of minute convex portions having a convex curved surface having an average height. In addition, a part of the small convex portions having a large number of convex curved surfaces has a trapezoidal dome shape in which the heads are horizontally cut and are aligned at an average height.

また、この発明に係る印刷用サスペンドメタルマスクの製造方法においては、ＳＵＳ材の表面全体に第１のブラスト加工を施すことにより、凹曲面状の極微小の凹部が多数形成された第１のブラスト加工表面を形成し、ＳＵＳ材の表面に目隠しのパターンレジスト膜を形成し、目隠しのパターンレジスト膜が形成されたＳＵＳ材の上面から第２のブラスト加工を施すことにより、目隠しのパターンレジスト膜で保護されていないＳＵＳ材の表面に前記極微小の凹部よりも大きい微小凹部が多数形成された第２のブラスト加工表面を形成して、２種類のブラスト加工が施されたＳＵＳ母材を作製する工程と、２種類のブラスト加工が施されたＳＵＳ母材を用い、凹曲面状の極微小の凹部が多数形成された第１のブラスト加工表面に、複数本の極細細線が等間隔で平行に並べられた部分を含む印刷用開口パターンを形成するためのパターンレジスト膜を形成し、２種類のブラスト加工が施されたＳＵＳ母材の上面からめっき加工を施すことにより、ベースメタルの接合めっき面と反対側の被印刷面は、大きい微小凹部に対応する大きい微小凸部が多数形成された第２のブラスト加工表面とし、少なくとも印刷用開口パターンの形成領域である複数本の極細細線が等間隔で平行に並べられた部分は、極微小の凹部に対応する微小凸部よりも小さい凸曲面状の極微小の凸部が多数形成された第１のブラスト加工表面としたベースメタルを作製する工程と、ベースメタルを第１のブラスト加工表面及び第２のブラスト加工表面を上にした状態で、円環状の水平刃部を有するカッターを用意し、カッターの円環状の水平刃部の中央開口部内に多数の凸曲面状の極微小の凸部又は多数の凸曲面状の微小凸部のうち、平均的な高さよりも大きく突出した極微小の凸部又は微小凸部を入れた状態で、カッターを水平移動させることにより、平均的な高さよりも大きく突出した極微小の凸部又は微小凸部の頭部をカッターの円環状の水平刃部により水平に削り取って平均的な高さに揃える工程と、を含むものである。 In the method for manufacturing a suspending metal mask for printing according to the present invention, the first blast in which a number of very small concave portions having a concave curved surface are formed by subjecting the entire surface of the SUS material to a first blasting process. By forming a processed surface, forming a blind pattern resist film on the surface of the SUS material, and performing a second blasting process from the upper surface of the SUS material on which the blind pattern resist film is formed, A second blasting surface is formed on the surface of the unprotected SUS material, in which a number of micro-recesses larger than the micro-recesses are formed, and a SUS base material subjected to two types of blasting is produced. A plurality of poles are formed on the first blasting surface on which a plurality of minute concave portions having a concave curved surface are formed by using a SUS base material subjected to a process and two types of blasting. By forming a pattern resist film for forming an opening pattern for printing including a portion in which fine lines are arranged in parallel at equal intervals, and performing plating from the upper surface of the SUS base material subjected to two types of blasting The surface to be printed opposite to the base metal bonding plating surface is a second blasted surface on which a large number of large convex portions corresponding to the large minute concave portions are formed, and at least a plurality of printing opening pattern forming regions. The portion where the ultrafine wires of the book are arranged in parallel at equal intervals is a first blasted surface on which a large number of extremely minute convex portions having a convex curved surface smaller than the minute convex portions corresponding to the extremely minute concave portions are formed. Preparing a base metal and a cutter having an annular horizontal blade in a state where the base metal has the first blasting surface and the second blasting surface facing up, Among the many convex curved ultrafine projections or many convex curved microprojections in the central opening of the circular horizontal blade of the ter, the microprojections projecting larger than the average height By moving the cutter horizontally with the part or minute convex part put in, the head of the extremely minute convex part or minute convex part that protrudes larger than the average height by the annular horizontal blade part of the cutter And horizontally scraping and aligning to an average height.

また、ベースメタルは、凸曲面状の微小の凸部が多数形成されたブラスト加工表面であり、ブラスト加工表面は、平均的な高さを有する凸曲面状の微小の凸部が多数形成されており、多数の凸曲面状の微小の凸部の中の一部は、頭部が水平に削り取られた状態で平均的な高さに揃えられた台形のドーム型を呈しているスクリーン印刷用サスペンドメタルマスクの製造方法であって、ＳＵＳ材の表面全体にブラスト加工を施すことにより、凹曲面状の微小の凹部が多数形成されたブラスト加工表面を形成し、ブラスト加工が施されたＳＵＳ母材を作製する工程と、ブラスト加工が施されたＳＵＳ母材を用い、凹曲面状の微小の凹部が多数形成されたブラスト加工表面に、印刷用開口パターンを形成するためのパターンレジスト膜を形成し、ブラスト加工が施されたＳＵＳ母材の上面からめっき加工を施すことにより、ベースメタルの前記接合めっき面と反対側の被印刷面は、微小の凹部に対応する微小の凸部が多数形成されたブラスト加工表面としたベースメタルを作製する工程と、ベースメタルをブラスト加工表面を上にした状態で、水平刃部を有するカッターを用意し、カッターの水平刃部を水平移動させることにより、平均的な高さよりも大きく突出した微小の凸部の頭部をカッターの水平刃部により水平に削り取って平均的な高さに揃える工程と、を含むものである。 The base metal is a blasted surface on which a large number of minute convex portions having a convex curved surface are formed, and the blasted surface is formed with a large number of minute convex portions having a convex curved surface having an average height. Suspend for screen printing, which has a trapezoidal dome shape with the average height aligned with the head being scraped off horizontally A method for manufacturing a metal mask, wherein a blasting process is performed by blasting the entire surface of a SUS material to form a blasting surface in which a large number of concave concave surfaces are formed, and the SUS base material subjected to blasting And forming a pattern resist film for forming an opening pattern for printing on a blasted surface on which a large number of concave concave surfaces are formed, using a SUS base material subjected to blasting. ,bra By applying plating from the upper surface of the SUS base material that has been processed, a large number of minute projections corresponding to minute depressions are formed on the printed surface of the base metal opposite to the bonding plating surface. By preparing a base metal with a blasted surface, and preparing a cutter with a horizontal blade with the base metal facing the blasted surface, moving the horizontal blade of the cutter horizontally And a step of horizontally scraping the head of a minute convex portion protruding larger than a certain height with a horizontal blade portion of the cutter so as to have an average height.

また、この発明に係る印刷用メタルマスクにおいては、印刷用開口パターンが設けられたスクリーン印刷用メタルマスクにおいて、メタルマスクは、凸曲面状の微小の凸部が多数形成されたブラスト加工表面を含んでおり、ブラスト加工表面は、平均的な高さを有する凸曲面状の微小の凸部が多数形成されており、多数の凸曲面状の微小の凸部の中の一部は、頭部が水平に削り取られた状態で平均的な高さに揃えられた台形のドーム型を呈しているものである。 Further, in the printing metal mask according to the present invention, in the metal mask for screen printing provided with the printing opening pattern, the metal mask includes a blasted surface on which a large number of minute convex portions having a convex curved surface are formed. The blasted surface has a large number of convex curved convex portions having an average height, and some of the convex convex convex portions have a head portion. It has a trapezoidal dome shape that is leveled to the average height in a state of being scraped horizontally.

この発明によれば、平均的な高さよりも大きく突出した凸部は、その頭部を水平に削り取られて平均的な高さを持つ多数の凸部とほぼ同じ高さとなるので、印刷対象物を傷付ける可能性が低くなり、滲みの発生を抑制するという効果がある。 According to the present invention, the convex portion that protrudes larger than the average height has the same height as a large number of convex portions that have the average height when the head is scraped horizontally. There is an effect of suppressing the occurrence of bleeding.

この発明の基本となる印刷用サスペンドメタルマスクの製造方法に必要な各構成要素を分離して示す斜視図である。FIG. 2 is a perspective view showing each component necessary for a method for manufacturing a suspending metal mask for printing that is a basis of the present invention. この発明の基本となる印刷用サスペンドメタルマスクの製造方法の接合めっき工程を示す断面図である。It is sectional drawing which shows the joining plating process of the manufacturing method of the suspending metal mask for printing used as the foundation of this invention. この発明の基本となる印刷用サスペンドメタルマスクの製造方法の接合めっきが終了した状態を示す断面図である。It is sectional drawing which shows the state which the junction plating of the manufacturing method of the suspending metal mask for printing used as the basis of this invention was complete | finished. この発明の基本となる印刷用サスペンドメタルマスクの製造方法の接合状態からセットを解除した状態を示す断面図である。It is sectional drawing which shows the state which canceled the set from the joining state of the manufacturing method of the suspending metal mask for printing used as the basis of this invention. この発明の基本となる印刷用サスペンドメタルマスクの製造方法のベースメタルからＳＵＳ母材を剥離している状態を示す断面図である。It is sectional drawing which shows the state which has peeled the SUS base material from the base metal of the manufacturing method of the suspend metal mask for printing used as the basis of this invention. この発明の基本となる印刷用サスペンドメタルマスクの製造方法のベースメタルの開口レジストを剥離する前の状態を示す断面図である。It is sectional drawing which shows the state before peeling the opening resist of the base metal of the manufacturing method of the suspend metal mask for printing used as the basis of this invention. この発明の基本となる印刷用サスペンドメタルマスクの製造方法のベースメタルの開口レジストを剥離した状態を示す断面図である。It is sectional drawing which shows the state which peeled the opening resist of the base metal of the manufacturing method of the suspend metal mask for printing used as the basis of this invention. この発明の基本となる印刷用サスペンドメタルマスクの製造方法に使用するＳＵＳ母材の作製工程を示す断面図である。It is sectional drawing which shows the preparation process of the SUS base material used for the manufacturing method of the suspend metal mask for printing used as the basis of this invention. 第１のブラスト加工が施されたＳＵＳ母材の一部を拡大して示す断面図である。It is sectional drawing which expands and shows a part of SUS base material in which the 1st blast process was given. 第２のブラスト加工が施されたＳＵＳ母材の一部を拡大して示す断面図である。It is sectional drawing which expands and shows a part of SUS base material to which the 2nd blast process was given. この発明の基本となる印刷用サスペンドメタルマスクの製造方法に使用するＳＵＳ母材の表面状態を示す要部平面図である。It is a principal part top view which shows the surface state of the SUS base material used for the manufacturing method of the suspend metal mask for printing used as the basis of this invention. この発明の基本となる印刷用サスペンドメタルマスクの製造方法に使用するベースメタルの作製工程を示す断面図である。It is sectional drawing which shows the preparation process of the base metal used for the manufacturing method of the suspend metal mask for printing used as the foundation of this invention. この発明の基本となる印刷用サスペンドメタルマスクを示す要部平面図である。It is a principal part top view which shows the suspend metal mask for printing used as the basis of this invention. 図１３の一部を拡大して示す平面図である。It is a top view which expands and shows a part of FIG. 図１３のベースメタルの第１のブラスト加工表面部分を拡大して示す断面図である。It is sectional drawing which expands and shows the 1st blasting surface part of the base metal of FIG. 図１３のベースメタルの第２のブラスト加工表面部分を拡大して示す断面図である。It is sectional drawing which expands and shows the 2nd blasting surface part of the base metal of FIG. この発明の実施の形態１における印刷用サスペンドメタルマスクの最終仕上げ工程前の状態を拡大して示す要部断面図である。It is principal part sectional drawing which expands and shows the state before the final finishing process of the suspending metal mask for printing in Embodiment 1 of this invention. この発明の実施の形態１における印刷用サスペンドメタルマスクの最終仕上げ工程後の状態を拡大して示す要部断面図である。It is principal part sectional drawing which expands and shows the state after the final finishing process of the suspending metal mask for printing in Embodiment 1 of this invention. この発明の実施の形態１における印刷用サスペンドメタルマスクの要部を拡大して示す斜視図である。It is a perspective view which expands and shows the principal part of the suspend metal mask for printing in Embodiment 1 of this invention.

この発明をより詳細に説明するため、添付の図面に従ってこれを説明する。なお、各図
中、同一又は相当する部分には同一の符号を付しており、その重複説明は適宜に簡略化な
いし省略する。 In order to explain the present invention in more detail, it will be described with reference to the accompanying drawings. In addition, in each figure, the same code | symbol is attached | subjected to the part which is the same or it corresponds, The duplication description is simplified or abbreviate | omitted suitably.

実施の形態１.
図１はこの発明の基本となる印刷用サスペンドメタルマスクの製造方法に必要な各構成要素を分離して示す斜視図、図２〜図７はこの発明の基本となる印刷用サスペンドメタルマスクの製造方法の製造工程を示す断面図、図８はこの発明の基本となる印刷用サスペンドメタルマスクの製造方法に使用するＳＵＳ母材の作製工程を示す断面図、図９は第１のブラスト加工が施されたＳＵＳ母材の一部を拡大して示す断面図、図１０は第２のブラスト加工が施されたＳＵＳ母材の一部を拡大して示す断面図、図１１はこの発明の基本となる印刷用サスペンドメタルマスクの製造方法に使用するＳＵＳ母材の表面状態を示す要部平面図、図１２はこの発明の基本となる印刷用サスペンドメタルマスクの製造方法に使用するベースメタルの作製工程を示す断面図、図１３はこの発明の基本となる印刷用サスペンドメタルマスクを示す要部平面図、図１４は図１３の一部を拡大して示す平面図、図１５は図１３のベースメタルの第１のブラスト加工表面部分を拡大して示す断面図、図１６は図１３のベースメタルの第２のブラスト加工表面部分を拡大して示す断面図、図１７はこの発明の実施の形態１における印刷用サスペンドメタルマスクの最終仕上げ工程前の状態を拡大して示す要部断面図、図１８はこの発明の実施の形態１における印刷用サスペンドメタルマスクの最終仕上げ工程後の状態を拡大して示す要部断面図、図１９はこの発明の実施の形態１における印刷用サスペンドメタルマスクの要部を拡大して示す斜視図である。 Embodiment 1.
FIG. 1 is a perspective view showing the components necessary for the method of manufacturing a suspending metal mask for printing as a basis of the present invention, and FIGS. 2 to 7 show the manufacturing of a suspending metal mask for printing as a basis of the present invention. FIG. 8 is a cross-sectional view showing the manufacturing process of the SUS base material used in the manufacturing method of the suspending metal mask for printing, which is the basis of the present invention, and FIG. 9 is the first blasting process. FIG. 10 is an enlarged cross-sectional view showing a part of the SUS base material subjected to the second blasting, and FIG. 11 is a basic view of the present invention. FIG. 12 is a plan view of a main part showing the surface state of a SUS base material used in the manufacturing method of a suspending metal mask for printing, and FIG. 12 is a manufacturing process of a base metal used in the manufacturing method of a suspending metal mask for printing. The FIG. 13 is a plan view of an essential part showing a suspending metal mask for printing which is the basis of the present invention, FIG. 14 is a plan view showing a part of FIG. 13 in an enlarged manner, and FIG. 15 is a plan view of the base metal of FIG. FIG. 16 is an enlarged sectional view showing the first blasting surface portion, FIG. 16 is an enlarged sectional view showing the second blasting surface portion of the base metal in FIG. 13, and FIG. 17 is the first embodiment of the present invention. FIG. 18 is an enlarged cross-sectional view of a main part showing a state before the final finishing process of the suspending metal mask for printing, and FIG. 18 shows an enlarged state after the final finishing process of the suspending metal mask for printing according to Embodiment 1 of the present invention. FIG. 19 is an enlarged perspective view showing a main part of the suspend metal mask for printing according to the first embodiment of the present invention.

この発明の基本となる印刷用サスペンドメタルマスクの製造方法に必要な構成要素は、図１に示すように、中央部に設けられた通電性を有するステンレスメッシュ又はニッケルメッシュからなる金属製メッシュ１及びこの金属製メッシュ１の外側に設けられたテトロンメッシュ２とからなるコンビネーションメッシュが内側に張設された四角形状の金属製版枠３と、ベースメタル用ＳＵＳ母材４上に設けられ、印刷用開口パターンが形成される中央部分に印刷用開口パターン形成用レジスト５ａが施されているＮｉ製のベースメタル５と、テトロンメッシュ６が張設された四角形状の接合補助用金属製版枠７と、この接合補助用金属製版枠７のテトロンメッシュ６とベースメタル用ＳＵＳ母材４との間に介装されるスポンジ８とから構成される。なお、四角形状の金属製版枠３に張設されるメッシュは、中央部の金属製メッシュ１と外側のテトロンメッシュ２とからなるコンビネーションメッシュが好適であるが、コンビネーションメッシュでなく、通電性を有する金属製メッシュ１の単体からなる一枚物であっても良い。上記ベースメタル５は、所望の箇所に印刷用開口パターン５ｂが形成されている。 As shown in FIG. 1, the constituent elements necessary for the method of manufacturing a suspending metal mask for printing, which is the basis of the present invention, are a metal mesh 1 made of a stainless mesh or nickel mesh having electrical conductivity provided in the center portion, and This is provided on a rectangular metal plate frame 3 in which a combination mesh composed of a Tetron mesh 2 provided on the outside of the metal mesh 1 is stretched on the inside, and a SUS base material 4 for base metal, and has a printing opening. A base metal 5 made of Ni having a resist 5a for forming an opening pattern for printing at a central portion where a pattern is formed, a quadrilateral joining auxiliary metal plate frame 7 in which a tetron mesh 6 is stretched, and this It consists of a sponge 8 interposed between a tetron mesh 6 of a metal plate frame 7 for joining assistance and a SUS base material 4 for base metal. . The mesh stretched on the rectangular metal plate frame 3 is preferably a combination mesh composed of a metal mesh 1 at the center and an outer tetron mesh 2 but is not a combination mesh and has electrical conductivity. A single piece of metal mesh 1 may be used. The base metal 5 has a printing opening pattern 5b formed at a desired location.

この発明の基本となる印刷用サスペンドメタルマスクの製造方法の接合めっき工程に当たっては、図２に示すように、右側に四角形状の金属製版枠３を配置し、左側に四角形状の接合補助用金属製版枠７を配置する。そして、金属製版枠３の金属製メッシュ１と重合して位置するようにベースメタル５を配置し、金属製版枠３と接合補助用金属製版枠７を互いに重合させて粘着テープ９等で締結固定し、ベースメタル用ＳＵＳ母材４及びスポンジ８を介してベースメタル５と金属製メッシュ１が互いに密着状態となるようにセットする。この密着状態にセットしたものを陰極１０に接続するとともに電気的に導通させて、スルファミン酸ニッケル浴が入っためっき槽１１内に収容し、ニッケル１２を陽極１３に接続することにより、ベースメタル５と金属製メッシュ１の間で接合めっきを行い、両者を一体的に接合する。この接合めっき量は、通常片側２μｍとし、電鋳めっきと同じめっき法を用いる。また、陽・陰極電流密度は約０．１〜２．０Ａ／ｄｍ^２、好ましくは０．５〜１．０Ａ／ｄｍ^２の低電流を用いることにより、接合めっき量の均一性向上と金属製メッシュ１の断線を防止することができる。 In the bonding plating step of the printing suspend metal mask manufacturing method which is the basis of the present invention, as shown in FIG. 2, a rectangular metal plate frame 3 is arranged on the right side, and a rectangular bonding auxiliary metal on the left side. A plate making frame 7 is arranged. Then, the base metal 5 is arranged so as to be superposed with the metal mesh 1 of the metal plate frame 3, and the metal plate frame 3 and the joining auxiliary metal plate frame 7 are superposed with each other and fastened with an adhesive tape 9 or the like. Then, the base metal 5 and the metal mesh 1 are set in close contact with each other through the base metal SUS base material 4 and the sponge 8. The base metal 5 is connected to the cathode 10 while being electrically connected and accommodated in a plating tank 11 containing a nickel sulfamate bath, and nickel 12 is connected to the anode 13. And metal mesh 1 are bonded and bonded together. This bonding plating amount is usually 2 μm on one side, and the same plating method as electroforming plating is used. The positive / cathode current density is about 0.1 to 2.0 A / dm ² , preferably 0.5 to 1.0 A / dm ² . Disconnection of the mesh 1 can be prevented.

次に、接合めっき工程が終了したら、上記密着状態にセットしたものをめっき槽１１から取り出し（図３参照）、粘着テープ９を取り外して密着状態にセットしたものを解除する（図４参照）。次に、ベースメタル５からベースメタル用ＳＵＳ母材４を剥離する（図５及び図６参照）。その後、ベースメタル５と金属製メッシュ１の接合部がめっきにより一体的に接合されている金属製版枠３のベースメタル５から印刷用開口パターン形成用レジスト５ａを剥離することにより、印刷用開口パターン５ｂが形成される（図７参照）。なお、ベースメタル５の印刷用開口パターン形成用レジスト５ａ及び印刷用開口パターン５ｂは、簡略化してイメージのみを示したものであり、実際のものとは相違する。 Next, when the bonding plating step is completed, the one set in the above-mentioned close contact state is taken out from the plating tank 11 (see FIG. 3), and the adhesive tape 9 is removed and the one set in the close contact state is released (see FIG. 4). Next, the base metal SUS base material 4 is peeled from the base metal 5 (see FIGS. 5 and 6). Thereafter, the opening pattern for printing is removed by peeling the resist 5a for forming the opening pattern for printing from the base metal 5 of the metal plate frame 3 in which the joint between the base metal 5 and the metal mesh 1 is integrally joined by plating. 5b is formed (see FIG. 7). Note that the printing opening pattern forming resist 5a and the printing opening pattern 5b of the base metal 5 are simplified and show only images, and are different from actual ones.

この基本となる印刷用サスペンドメタルマスクでは、ベースメタル用ＳＵＳ母材４の表面全体に、電解研磨、化学研磨でなく、例えばビーズブラスト等で荒らし加工を施すことにより、ＳＵＳ母材の表面に形成される電着層（ベースメタル）の印刷体に接触する側の全面に微小な凸部が多数形成されているため、印刷時にエアー抜きをすることでカスレを防止することができるが、例えば、タッチパネル用配線パターンに使用されるメタルマスクの場合、所望の印刷パターン形状が例えば、幅約５０μｍ以下の複数本の極細細線であり、極細細線相互間の間隔が約５０μｍ以下となるように平行に並べられており、極細細線の先端部が端子用の太線に接続されており、極細細線と端子用の太線が混在することになる。このような場合、メタルマスクの印刷パターン部分の周辺にも荒らし加工による微小な凸部が多数形成されているため、印刷時に印刷パターンの極細細線部分に滲みが発生し易くなるという問題が発生する。また、印刷用開口パターンの形成領域である複数本の極細細線が等間隔で平行に並べられた部分を、荒らし加工がされていない鏡面に近い表面としたものであっても、印刷用開口パターンの形成領域における極細細線の形成状況の如何によっては、カスレの発生を防止することができないことがある。 In this basic suspend metal mask for printing, the entire surface of the SUS base material 4 for the base metal is formed on the surface of the SUS base material by subjecting it to a roughing process by, for example, bead blasting instead of electrolytic polishing and chemical polishing. Since a large number of minute protrusions are formed on the entire surface of the electrodeposited layer (base metal) in contact with the printed body, bleed can be prevented by bleeding air during printing. In the case of a metal mask used for a wiring pattern for a touch panel, the desired printed pattern shape is, for example, a plurality of ultrafine wires having a width of about 50 μm or less, and the interval between the ultrafine wires is about 50 μm or less in parallel. The tips of the fine wires are connected to the terminal thick wires, and the fine wires and the terminal thick wires are mixed. In such a case, since a large number of minute convex portions are formed around the printed pattern portion of the metal mask by roughening, there is a problem that bleeding is likely to occur in the fine line portion of the printed pattern during printing. . In addition, even if a portion in which a plurality of fine fine lines, which are the formation region of the printing opening pattern, are arranged in parallel at equal intervals is a surface close to a mirror surface that is not roughened, the printing opening pattern Depending on the state of formation of the ultrafine wires in the formation region, the occurrence of blurring may not be prevented.

次に、これらの問題を解決した基本となる印刷用サスペンドメタルマスクの製造方法に使用する２種類のブラスト加工が施されたＳＵＳ母材の作製工程及びＳＵＳ母材の表面の状態を図８〜図１１により説明する。
位置決め用認識マーク（図示せず）を付したＳＵＳ材４１を用意し（図８（ａ））、先ずＳＵＳ材４１の表面全体に上面から比較的小粒（約２０〜８０μｍ）の球状のガラスビーズによる第１のブラスト加工が施される（図８（ｂ））。これにより、比較的小粒の球状のガラスビーズによりＳＵＳ材４１の表面全体には、図９に示すように、球状の一部からなる凹曲面状の極微小の凹部が多数形成された第１のブラスト加工表面４ａとなる。この極微小の凹部のサイズは、深さがＲＡ２５μｍ以下、直径が５〜８０μｍであるが、微極小の凹部の中には平均的な深さよりも大きく凹んだ凹部４ａ−１や、平均的な深さよりも小さく凹んだ凹部４ａ−２が形成される。次にＳＵＳ材４１の表面全体にドライフィルム４２を塗布する（図８（ｃ））。そして、ドライフィルム４２の上に印刷パターンフィルム４３を密着させて露光、現像等を行い（図８（ｄ））、ＳＵＳ材４１の表面の、例えば幅約１０００μｍ（１ｍｍ）のみにパターンレジスト膜４２ａを形成し、目隠しとする（図８（ｅ））。なお、この幅約１０００μｍ（１ｍｍ）のパターンレジスト膜４２ａが形成される形成領域は、位置決め用認識マークで位置合わせすることにより正確に設定することができ、タッチパネル用配線パターンに使用されるメタルマスクの場合、所望の印刷パターン形状が、例えば幅約５０μｍ以下の複数本（例えば１０本）の極細細線であり、極細細線相互間の間隔が約５０μｍ以下となるように平行に並べられており、極細細線の先端部が端子用の太線に接続されているものが相当し、それに例えば＋１００μｍ程度の補正をかけたものとなる。そして、幅約１０００μｍ（１ｍｍ）の目隠しのパターンレジスト膜４２ａが形成されたＳＵＳ材４１の上面から比較的大粒（１００〜１０００μｍ）の球状のガラスビーズによる第２のブラスト加工が施される（図８（ｆ））。これにより、比較的大粒の球状のガラスビーズによりＳＵＳ材４１の表面全体のうち、パターンレジスト膜４２ａの目隠しがされていない部分には、図１０に示すように、球状の一部からなる凹曲面状の極微小の凹部よりも大きい微小凹部が多数形成された第２のブラスト加工表面４ｂとなる。この大きい微小凹部のサイズは、深さがＲＡ５０μｍ以下、直径が８５〜２５０μｍであるが、極微小の凹部よりも大きい極小の凹部の中には平均的な深さよりも大きく凹んだ凹部４ｂ−１や、平均的な深さよりも小さく凹んだ凹部４ｂ−２が形成される。この２種類の球状のガラスビーズによる第１のブラスト加工及び第２のブラスト加工終了後に得られるこの発明の基本となるＳＵＳ母材４の表面の状態は、図１１に示すように、幅約１０００μｍ（１ｍｍ）の目隠しのパターンレジスト膜４２ａで保護されていない箇所の表面は、比較的大粒の球状のガラスビーズによる凹曲面状の大きい微小凹部が多数形成された第２のブラスト加工表面４ｂとなり、この第２のブラスト加工表面４ｂの中には平均的な深さよりも大きく凹んだ凹部４ｂ−１や、平均的な深さよりも小さく凹んだ凹部４ｂ−２が含まれている。幅約１０００μｍ（１ｍｍ）の目隠しのパターンレジスト膜４２ａで保護されている形成領域の表面は、比較的小粒の球状のガラスビーズによる凹曲面状の極微小の凹部が多数形成された第１のブラスト加工表面４ａとなり、この第１のブラスト加工表面４ａの中には平均的な深さよりも大きく凹んだ凹部４ａ−１や、平均的な深さよりも小さく凹んだ凹部４ａ−２が含まれている。すなわち、２種類のブラスト加工が施されたＳＵＳ母材４が作製されることになる。なお、比較的小粒の球状のガラスビーズが施された第１のブラスト加工表面４ａには、図９に示すように、球状の一部からなる凹曲面状の極微小の凹部が多数形成されることになる。また、比較的大粒の球状のガラスビーズが施された第２のブラスト加工表面４ｂには、図１０に示すように、球状の一部からなる凹曲面状の大きい微小の凹部が多数形成されることになる。このように球状の一部からなる凹曲面状の極微小の凹部や微小の凹部であることから、後の作製工程で作製されるベースメタル５をＳＵＳ母材４から容易に剥がすことができる。第１及び第２のブラスト加工表面４ａ、４ｂが凹曲面状の極微小凹部又は微小凹部ではなく、垂直な壁面を持つもの、或いは上部が狭くなっているものであると、ベースメタル５が剥がれにくくなってしまうのである。なお、２種類のブラスト加工として、球状のガラスビーズを用いた例を説明したが、ガラスビーズの場合は衝撃により砕けてしまうため、再利用することができない。再利用を可能にするために、例えば金属球を使用することもできる。 Next, the manufacturing process of the SUS base material subjected to two types of blasting and the state of the surface of the SUS base material used in the manufacturing method of the suspending metal mask for printing that solves these problems are shown in FIG. This will be described with reference to FIG.
A SUS material 41 with a positioning recognition mark (not shown) is prepared (FIG. 8A). First, relatively small particles (about 20 to 80 μm) of spherical glass beads are formed on the entire surface of the SUS material 41 from the upper surface. A first blasting process is performed (FIG. 8B). As a result, the entire surface of the SUS material 41 is formed by a relatively small spherical glass bead, as shown in FIG. It becomes the blast processing surface 4a. As for the size of this very minute recess, the depth is RA 25 μm or less and the diameter is 5 to 80 μm. Among the very small recesses, the recess 4a-1 which is recessed larger than the average depth or the average A recess 4a-2 that is recessed smaller than the depth is formed. Next, the dry film 42 is apply | coated to the whole surface of the SUS material 41 (FIG.8 (c)). Then, the printed pattern film 43 is brought into close contact with the dry film 42 to perform exposure, development, and the like (FIG. 8D), and the pattern resist film 42a is formed only on the surface of the SUS material 41, for example, about 1000 μm (1 mm) wide. Is formed as a blindfold (FIG. 8E). The formation region where the pattern resist film 42a having a width of about 1000 μm (1 mm) is formed can be accurately set by aligning with a positioning recognition mark, and a metal mask used for a wiring pattern for a touch panel. In this case, the desired printed pattern shape is, for example, a plurality of (for example, 10) ultrafine wires having a width of about 50 μm or less, and arranged in parallel so that the interval between the ultrafine wires is about 50 μm or less, The tip of the extra fine wire corresponds to the one connected to the thick terminal wire, which is, for example, corrected by about +100 μm. Then, a second blasting process is performed with relatively large (100 to 1000 μm) spherical glass beads from the upper surface of the SUS material 41 on which the blind pattern resist film 42a having a width of about 1000 μm (1 mm) is formed (FIG. 8 (f)). As a result, as shown in FIG. 10, a concave curved surface consisting of a part of a sphere is formed on a portion of the entire surface of the SUS material 41 that is not covered with a relatively large spherical glass bead, as shown in FIG. The second blasted surface 4b is formed with a large number of minute recesses larger than the extremely minute recesses. The size of the large minute recess is such that the depth is RA 50 μm or less and the diameter is 85 to 250 μm, but in a very small recess larger than the extremely small recess, the recess 4b-1 that is recessed larger than the average depth. Or the recessed part 4b-2 indented smaller than average depth is formed. As shown in FIG. 11, the surface state of the SUS base material 4 as the basis of the present invention obtained after completion of the first blasting process and the second blasting process using the two types of spherical glass beads is about 1000 μm in width. The surface of the portion that is not protected by the (1 mm) blind pattern resist film 42a becomes the second blasted surface 4b in which a large number of large concave portions having a concave curved surface formed by relatively large spherical glass beads are formed, The second blasting surface 4b includes a recess 4b-1 that is recessed larger than the average depth and a recess 4b-2 that is recessed smaller than the average depth. The surface of the formation region protected by the blind pattern resist film 42a having a width of about 1000 μm (1 mm) is a first blast in which a large number of concave concave-shaped concave portions are formed by relatively small spherical glass beads. The first blasting surface 4a includes a recessed portion 4a-1 that is recessed larger than the average depth, and a recessed portion 4a-2 that is recessed smaller than the average depth. . That is, the SUS base material 4 subjected to two types of blasting is produced. In addition, on the first blasting surface 4a to which relatively small spherical glass beads are applied, as shown in FIG. 9, a large number of concave concave curved ultrafine concave portions are formed. It will be. In addition, as shown in FIG. 10, a large number of small concave portions having a concave curved surface formed of a part of a spherical shape are formed on the second blasting surface 4b to which relatively large spherical glass beads are applied. It will be. In this way, since the concave curved surface is a very small concave portion or a small concave portion formed of a spherical part, the base metal 5 manufactured in a subsequent manufacturing process can be easily peeled off from the SUS base material 4. If the first and second blasted surfaces 4a, 4b are not concave concave micro-recesses or micro-recesses but have a vertical wall surface or a narrow upper part, the base metal 5 is peeled off. It becomes difficult. In addition, although the example using the spherical glass bead was demonstrated as two types of blasting, in the case of a glass bead, since it will be crushed by an impact, it cannot be reused. In order to enable reuse, for example, metal spheres can be used.

次に、問題を解決した基本となる印刷用サスペンドメタルマスクの製造方法に使用するベースメタルの作製工程を図１２により説明する。
まず上記ＳＵＳ母材の作製工程で得られた２種類のブラスト加工が施されたＳＵＳ母材４を第１のブラスト加工表面４ａ及び第２のブラスト加工表面４ｂが上となるように用意し（図１２（ａ））、２種類のブラスト加工が施された荒らしＳＵＳ母材４の上面にドライフィルム５２を塗布する（図１２（ｂ））。次にドライフィルム５２の上に印刷パターンフィルム５３を密着させて露光、現像等を行い（図１２（ｃ））、２種類のブラスト加工が施されたＳＵＳ母材４の上面中央の幅約１０００μｍ（１ｍｍ）の範囲である第１のブラスト加工表面４ａに、例えば幅約５０μｍ以下の複数本（例えば１０本）の極細細線であり、極細細線相互間の間隔が約５０μｍ以下となるように平行に並べたパターンレジスト膜５２ａを形成する（図１２（ｄ））。なお、幅約１０００μｍ（１ｍｍ）の範囲にパターンレジスト膜５２ａを正確に形成するために位置決め用認識マークが利用される。そして、パターンレジスト膜５２ａが形成された２種類のブラスト加工が施されたＳＵＳ母材４の上面からめっき加工を施すことにより、ベースメタル５を作製する（図１２（ｅ））。このめっき加工終了後に得られるこの発明の基本となるベースメタル５の表面の状態は、２種類のブラスト加工が施されたＳＵＳ母材４の比較的大粒の球状のガラスビーズが施された第２のブラスト加工表面４ｂと対応する面が、対称となる逆の関係となりベースメタル５の第２のブラスト加工表面５ｄとなる。一方、２種類のブラスト加工が施されたＳＵＳ母材４の上面中央の幅約１０００μｍ（１ｍｍ）の範囲である比較的小粒の球状のガラスビーズが施された第１のブラスト加工表面４ａに対応する面が、対称となる逆の関係となりベースメタル５の第１のブラスト加工表面５ｃとなる。なお、ベースメタル５の第１のブラスト加工表面５ｃには、図１５に示すように、球状の一部からなる凸曲面状（ドーム型、半球形）の極微小の凸部が多数形成されることになり、微極小の凸部の中には平均的な高さよりも大きく突出した凸部５ｃ−１や、平均的な高さよりも小さく突出した凸部５ｃ−２が含まれる。そして、この平均的な高さよりも大きく突出した凸部５ｃ−１が問題となり、その形状は、例えばドーム型、半球形等である。また、ベースメタル５の第２のブラスト加工表面５ｄには、図１６に示すように、球状の一部からなる凸曲面状（ドーム型、半球形）の大きい微小凸部が多数形成されることになり、極微小の凸部よりも大きい極小の凸部の中には平均的な高さよりも大きく突出した凸部５ｄ−１や、平均的な高さよりも小さく突出した凸部５ｄ−２が含まれる。そして、この平均的な高さよりも大きく突出した凸部５ｄ−１が問題となり、その形状は、例えばドーム型、半球形等である。このように球状の一部からなる凸曲面状の極微小の凸部や微小凸部であることから、印刷対象物（印刷体）に対し滑らかに接触することになるが、その中に平均的な高さよりも大きく突出した凸部５ｃ−１、５ｄ−１が存在すると、印刷対象物を傷付けたり、滲みが発生する原因になるという問題がある。 Next, a process for producing a base metal used in a method for producing a suspending metal mask for printing that solves the problem will be described with reference to FIG.
First, the SUS base material 4 subjected to the two types of blast processing obtained in the SUS base material manufacturing step is prepared so that the first blast processing surface 4a and the second blast processing surface 4b are on top ( 12A), a dry film 52 is applied to the upper surface of the roughened SUS base material 4 that has been subjected to two types of blasting (FIG. 12B). Next, the printed pattern film 53 is brought into intimate contact with the dry film 52 to perform exposure, development, and the like (FIG. 12C). The width of the center of the upper surface of the SUS base material 4 subjected to two types of blasting is about 1000 μm. The first blasting surface 4a in the range of (1 mm) is a plurality of (for example, 10) ultrafine wires having a width of about 50 μm or less, for example, and is parallel so that the interval between the ultrafine wires is about 50 μm or less. A pattern resist film 52a arranged in a row is formed (FIG. 12D). A positioning recognition mark is used to accurately form the pattern resist film 52a in a range of about 1000 μm (1 mm) in width. Then, the base metal 5 is manufactured by performing plating from the upper surface of the SUS base material 4 on which the two types of blast processing on which the pattern resist film 52a is formed (FIG. 12E). The surface state of the base metal 5 which is the basis of the present invention obtained after completion of the plating process is the second state in which relatively large spherical glass beads of the SUS base material 4 subjected to two types of blasting are applied. The surface corresponding to the blasted surface 4b of the second metal is a symmetric reverse relationship and becomes the second blasted surface 5d of the base metal 5. On the other hand, it corresponds to the first blasting surface 4a provided with relatively small spherical glass beads having a width of about 1000 μm (1 mm) in the center of the upper surface of the SUS base material 4 subjected to two types of blasting. The surface to be turned becomes a symmetrical reverse relationship and becomes the first blasted surface 5 c of the base metal 5. In addition, as shown in FIG. 15, a lot of very minute convex portions having a convex curved surface shape (dome shape, hemispherical shape) formed of a spherical portion are formed on the first blasted surface 5c of the base metal 5. In other words, the very small convex portion includes the convex portion 5c-1 projecting larger than the average height and the convex portion 5c-2 projecting smaller than the average height. And the convex part 5c-1 protruded larger than this average height becomes a problem, The shape is a dome shape, a hemispherical shape, etc., for example. In addition, as shown in FIG. 16, a large number of small convex portions having a convex curved surface shape (dome shape, hemispherical shape) formed of a part of a sphere are formed on the second blasted surface 5 d of the base metal 5. In the extremely small protrusions larger than the extremely small protrusions, the protrusions 5d-1 protruding larger than the average height and the protrusions 5d-2 protruding smaller than the average height are provided. included. And the convex part 5d-1 protruded larger than this average height becomes a problem, The shape is a dome shape, a hemispherical shape, etc., for example. In this way, since it is a very small convex part or a micro convex part of a convex curved surface consisting of a part of a sphere, it will be in smooth contact with the printing object (printed body). When the convex portions 5c-1 and 5d-1 projecting larger than the height are present, there is a problem in that the print target is damaged or bleeding occurs.

次に、この発明の基本となる印刷用サスペンドメタルマスクの要部構成を図１３〜図１６により説明する。２種類の球状のガラスビーズによるブラスト加工終了後に得られる２種類のブラスト加工が施されたＳＵＳ母材４を使用して、印刷用サスペンドメタルマスクを作製する場合を考える。例えば、タッチパネル用配線パターンに使用されるサスペンドメタルマスクのベースメタル５の場合、所望の印刷パターン形状の一部が、例えば幅約５０μｍ以下の複数本（例えば１０本）の極細細線であり、極細細線相互間の間隔が約５０μｍ以下となるように平行に並べたもので、極細細線の先端部は端子用の太線に接続されているので、極細細線と端子用の太線が混在した状態となる。幅約５０μｍ以下の複数本（１０本）の極細細線と対応する形成領域のベースメタル５の表面は、比較的小粒の球状のガラスビーズが施された第１のブラスト加工表面４ａに対応し、対称となる逆の関係となり球状の一部からなる凸曲面状（ドーム型、半球形）の極微小の凸部が多数形成された第１のブラスト加工表面５ｃとなる。微極小の凸部の中には平均的な高さよりも大きく突出した凸部５ｃ−１や、平均的な高さよりも小さく突出した凸部５ｃ−２が含まれる。この平均的な高さよりも大きく突出した凸部５ｃ−１の形状は、例えばドーム型、半球形等である。一方、極細細線と対応する形成領域以外、すなわち第１のブラスト加工表面５ｃ以外の箇所（端子用の太線を含む）のベースメタル５の表面は、比較的大粒の球状のガラスビーズが施された第２のブラスト加工表面４ｂと対応し、対称となる逆の関係となり球状の一部からなる凸曲面状（ドーム型、半球形）の大きい微小凸部が多数形成された第２のブラスト加工表面５ｄとなる。極微小の凸部よりも大きい極小の凸部の中には平均的な高さよりも大きく突出した凸部５ｄ−１や、平均的な高さよりも小さく突出した凸部５ｄ−２が含まれる。この平均的な高さよりも大きく突出した凸部５ｄ−１の形状は、例えばドーム型、半球形等である。なお、図１３〜図１４において、ベースメタル５の裏側には金属製メッシュ１がめっきにより接合されているので、ベースメタル５の印刷パターン形状を通して裏側の金属製メッシュ１の一部が見える。 Next, the structure of the principal part of the suspending metal mask for printing, which is the basis of the present invention, will be described with reference to FIGS. Consider a case where a suspend metal mask for printing is produced using a SUS base material 4 that has been subjected to two types of blasting and obtained after completion of blasting with two types of spherical glass beads. For example, in the case of the base metal 5 of the suspend metal mask used for the wiring pattern for the touch panel, a part of the desired print pattern shape is, for example, a plurality of (for example, 10) ultrafine wires having a width of about 50 μm or less. They are arranged in parallel so that the distance between the thin wires is about 50 μm or less, and the tip of the ultra fine wire is connected to the thick wire for the terminal, so that the ultra fine wire and the thick wire for the terminal are mixed. . The surface of the base metal 5 in the formation region corresponding to a plurality of (10) ultrafine wires having a width of about 50 μm or less corresponds to the first blasted surface 4a provided with relatively small spherical glass beads, The first blasting surface 5c is formed with a large number of extremely small convex portions having a convex curved surface shape (dome shape, hemispherical shape) having a spherical shape and a reverse relationship that is symmetric. The minute minimum convex portion includes a convex portion 5c-1 projecting larger than the average height and a convex portion 5c-2 projecting smaller than the average height. The shape of the convex portion 5c-1 protruding larger than the average height is, for example, a dome shape or a hemispherical shape. On the other hand, the surface of the base metal 5 other than the formation region corresponding to the ultrafine wire, that is, the portion other than the first blasting surface 5c (including the terminal thick line) is provided with relatively large spherical glass beads. A second blasting surface corresponding to the second blasting surface 4b, having a symmetrical and reverse relationship, and having a large number of small convex portions (dome-shaped, hemispherical) having a convex curved surface formed of a part of a sphere. 5d. The extremely small protrusions that are larger than the extremely small protrusions include a protrusion 5d-1 that protrudes larger than the average height and a protrusion 5d-2 that protrudes smaller than the average height. The shape of the convex portion 5d-1 protruding larger than the average height is, for example, a dome shape or a hemispherical shape. 13 to 14, since the metal mesh 1 is joined to the back side of the base metal 5 by plating, a part of the metal mesh 1 on the back side can be seen through the printed pattern shape of the base metal 5.

次に、この発明の実施の形態１における印刷用サスペンドメタルマスクの最終仕上げ工程について、図１７〜図１９により説明する。
ベースメタル５の第１のブラスト加工表面５ｃには、図１５に示すように、球状の一部からなる凸曲面状（ドーム型、半球形）の極微小の凸部が多数形成されることになり、微極小の凸部の中には平均的な高さよりも大きく突出した凸部５ｃ−１や、平均的な高さよりも小さく突出した凸部５ｃ−２が含まれており、この平均的な高さよりも大きく突出した凸部５ｃ−１の形状は、例えばドーム型、半球形等である。また、ベースメタル５の第２のブラスト加工表面５ｄには、図１６に示すように、球状の一部からなる凸曲面状（ドーム型、半球形）の大きい微小凸部が多数形成されることになり、極微小の凸部よりも大きい極小の凸部の中には平均的な高さよりも大きく突出した凸部５ｄ−１や、平均的な高さよりも小さく突出した凸部５ｄ−２が含まれており、この平均的な高さよりも大きく突出した凸部５ｄ−１の形状は、例えばドーム型、半球形等である。
そこで、最終仕上げ工程では、印刷用サスペンドメタルマスクのベースメタル５の第１のブラスト加工表面５ｃ及び第２のブラスト加工表面５ｄを上にした状態で、基台２１の下端部に中央が開放された円環状の水平刃部２２を備えたカッター２０を用意し、カッター２０の中央開口部内に平均的な高さよりも大きく突出したドーム型、半球形の凸部５ｃ−１又は５ｄ−１が入るように、カッター２０をセットする（図１７）。この時、円環状の水平刃部２２の下面が、平均的な高さを持つ多数の凸部５ｃ又は５ｄの頂部に当接することでほぼ水平に位置決めされる。次に、図１７の状態から、カッター２０を矢印方向に水平移動させると、平均的な高さよりも大きく突出したドーム型、半球形の凸部５ｃ−１又は５ｄ−１は、その頭部を円環状の水平刃部２２により水平に削り取られる（図１８）。この削り取り作業を数回繰り返すことにより、平均的な高さよりも大きく突出したドーム型、半球形の凸部５ｃ−１又は５ｄ−１は、カッター２０の円環状の水平刃部２２により、頭部を水平にカットされた状態、すなわち、例えば台形のドーム型５ｅとなり、余分な高さ分がカッター２０で削り取られて平均的な高さを持つ多数の凸部５ｃ又は５ｄとほぼ同じ高さとなる（図１８、図１９）。これにより、平均的な高さよりも大きく突出した部分が無くなるので、印刷対象物を傷付ける可能性が低くなり、滲みの発生を抑制することができる。なお、台形のドーム型５ｅ以外に、頭部を水平にカットされた台形の半球形、円錐台等が考えられる。また、平均的な高さよりも小さく突出した凸部５ｃ−２又は５ｄ−２は、平均的な高さより低いので、カッター２０の水平刃部２２により削り取られることはない。
タッチパネル用配線パターンに使用されるサスペンドメタルマスクのベースメタル５の場合で、所望の印刷パターン形状の一部が、例えば幅約５０μｍ以下の複数本（例えば１０本）の極細細線であり、極細細線相互間の間隔が約５０μｍ以下となるように平行に並んだものが要求された場合であっても、幅約５０μｍ以下の複数本の極細細線と対応する形成領域のベースメタル５の表面は、比較的小粒の球状のガラスビーズ加工が施された面と対応する対称となる逆の関係となり、球状の一部からなる凸曲面状の極微小の凸部が多数形成された第１のブラスト加工表面５ｃとなるので、印刷時に印刷パターンの極細細線部分に滲みが発生することがない。
なお、所望の印刷パターン形状を、例えば幅約５０μｍ以下の複数本の極細細線であり、極細細線相互間の間隔が約５０μｍ以下となるように平行に並べたものとしたが、複数本の極細細線の本数と幅と間隔は、設計値であるので任意に変更することができる。例えば、本数は２０〜３０本、幅と間隔は、約１５μｍ〜２００μｍまで可能である。
また、２種類のブラスト加工が施されたＳＵＳ母材４及びベースメタル５について説明したが、１種類のブラスト加工が施されたものであっても良い。また、大きさの異なる３種類、４種類のブラスト加工が施されたものであっても良い。 Next, the final finishing process of the suspending metal mask for printing in the first embodiment of the present invention will be described with reference to FIGS.
On the first blasted surface 5c of the base metal 5, as shown in FIG. 15, a large number of extremely minute convex portions having a convex curved surface shape (dome shape, hemispherical shape) formed of a spherical part are formed. Thus, the microminiature convex portion includes a convex portion 5c-1 projecting larger than the average height and a convex portion 5c-2 projecting smaller than the average height. The shape of the convex portion 5c-1 protruding larger than the height is, for example, a dome shape or a hemispherical shape. In addition, as shown in FIG. 16, a large number of small convex portions having a convex curved surface shape (dome shape, hemispherical shape) formed of a part of a sphere are formed on the second blasted surface 5 d of the base metal 5. In the extremely small protrusions larger than the extremely small protrusions, the protrusions 5d-1 protruding larger than the average height and the protrusions 5d-2 protruding smaller than the average height are provided. The shape of the convex portion 5d-1 that is included and protrudes larger than the average height is, for example, a dome shape or a hemispherical shape.
Therefore, in the final finishing step, the center is opened at the lower end of the base 21 with the first blasting surface 5c and the second blasting surface 5d of the base metal 5 of the suspending metal mask for printing facing upward. A cutter 20 having an annular horizontal blade portion 22 is prepared, and a dome-shaped or hemispherical convex portion 5c-1 or 5d-1 protruding larger than the average height is inserted into the central opening of the cutter 20. Thus, the cutter 20 is set (FIG. 17). At this time, the lower surface of the annular horizontal blade portion 22 is positioned substantially horizontally by coming into contact with the tops of a large number of convex portions 5c or 5d having an average height. Next, when the cutter 20 is moved horizontally in the direction of the arrow from the state of FIG. 17, the dome-shaped or hemispherical convex portion 5 c-1 or 5 d-1 that protrudes larger than the average height is It is scraped off horizontally by the annular horizontal blade portion 22 (FIG. 18). By repeating this scraping operation several times, the dome-shaped or hemispherical convex portion 5c-1 or 5d-1 projecting larger than the average height is caused by the annular horizontal blade portion 22 of the cutter 20 to the head. Is cut horizontally, that is, for example, becomes a trapezoidal dome shape 5e, and the excess height is scraped off by the cutter 20 so as to be almost the same height as a large number of convex portions 5c or 5d having an average height. (FIGS. 18 and 19). Thereby, since the part which protruded larger than average height is lose | eliminated, possibility that a printing target will be damaged will become low, and generation | occurrence | production of bleeding can be suppressed. In addition to the trapezoidal dome shape 5e, a trapezoidal hemisphere with a horizontally cut head, a truncated cone, and the like are conceivable. Moreover, since the convex part 5c-2 or 5d-2 which protruded smaller than average height is lower than average height, it is not scraped off by the horizontal blade part 22 of the cutter 20. FIG.
In the case of the base metal 5 of the suspend metal mask used for the wiring pattern for the touch panel, a part of the desired printed pattern shape is a plurality of fine wires (for example, 10 wires) having a width of about 50 μm or less, for example. Even when a parallel arrangement is required so that the distance between them is about 50 μm or less, the surface of the base metal 5 in the formation region corresponding to a plurality of ultrafine wires with a width of about 50 μm or less is A first blasting process in which a large number of extremely small convex portions having a convex curved surface formed of a part of a spherical shape are formed in an inverse relationship corresponding to a symmetry corresponding to a surface subjected to processing of relatively small spherical glass beads. Since it becomes the surface 5c, bleeding does not occur in the fine line portion of the printed pattern during printing.
The desired printed pattern shape is, for example, a plurality of ultrafine wires having a width of about 50 μm or less and arranged in parallel so that the interval between the ultrafine wires is about 50 μm or less. Since the number, width, and interval of the thin lines are design values, they can be arbitrarily changed. For example, the number can be 20 to 30 and the width and interval can be about 15 μm to 200 μm.
Moreover, although the SUS base material 4 and the base metal 5 which were subjected to two types of blasting have been described, one type of blasting may be performed. Further, three types and four types of blasting processes having different sizes may be performed.

実施の形態２.
上記実施の形態１では、所望の印刷パターン形状の一部が、例えば幅約５０μｍ以下の複数本（例えば１０本）の極細細線であり、極細細線相互間の間隔が約５０μｍ以下となるように平行に並べたものであり、各極細細線を全て同一幅であるとしたが、この実施の形態２においては、複数本の極細細線のうち、大きな開口の近くに配置される１本の極細細線（図１３の最上端に配置される極細細線）の幅を、最上端の下方に配置される他の極細細線の幅の２倍以上に設定したものである。この場合、スキージの進行方向は下方から上方に向かって移動するものとする。大きな開口の近くに配置される１本の極細細線（図１３の最上端に配置される極細細線）の下方寄り（スキージ進行方向の入口側）の１／２の部分は、滲みの問題があるため、球状の一部からなる凸曲面状の極微小の凸部が多数形成された第１のブラスト加工表面５ｃとするが、大きな開口の近くに配置される１本の極細細線（図１３の最上端に配置される極細細線）の上方寄り（スキージ進行方向の出口側）の１／２の部分は、滲みの問題が発生することが少ないので、球状の一部からなる凸曲面状の大きい微小凸部が多数形成された第１のブラスト加工表面５ｄとしたものである。
この実施の形態２においても、実施の形態１と同様、印刷時に印刷パターンの極細細線部分に滲みが発生することがないという効果を得ることができる。 Embodiment 2.
In the first embodiment, a part of the desired print pattern shape is, for example, a plurality of (for example, 10) ultrafine wires having a width of about 50 μm or less, and the interval between the ultrafine wires is about 50 μm or less. Although arranged in parallel and all the fine wires have the same width, in Embodiment 2, one of the fine wires arranged near a large opening is arranged. The width of (the fine line arranged at the uppermost end in FIG. 13) is set to be twice or more the width of the other fine line arranged below the uppermost end. In this case, the traveling direction of the squeegee moves from the bottom to the top. There is a problem of bleeding in the half of the one fine wire arranged near the large opening (the ultra fine wire arranged at the uppermost end of FIG. 13) near the lower side (the entrance side in the squeegee traveling direction). For this reason, the first blasting surface 5c is formed with a large number of extremely small convex portions having a convex curved surface formed of a part of a spherical shape, but one ultrafine wire (in FIG. 13) arranged near a large opening. The ½ part of the upper fine line (extra fine line arranged at the uppermost end) (exit side in the squeegee traveling direction) is less likely to cause bleeding, so the convex curved surface formed of a part of a spherical shape is large. The first blasted surface 5d is formed with a large number of minute convex portions.
Also in the second embodiment, as in the first embodiment, it is possible to obtain an effect that bleeding does not occur in the ultrathin line portion of the print pattern during printing.

実施の形態３.
上記実施の形態１、２では、印刷用サスペンドメタルマスクの製造方法に使用する２種類のブラスト加工が施されたＳＵＳ母材の作製工程、同じく印刷用サスペンドメタルマスクの製造方法に使用するベースメタルの作製工程、及び印刷用サスペンドメタルマスクの要部構成について説明したが、この発明は印刷用サスペンドメタルマスクに限らず、印刷用開口パターンが形成される印刷に関係がある部分と、印刷用開口パターンが形成されない印刷に関係がない部分とを備えたメタルマスクにおいて、印刷用開口パターンが形成される印刷に関係がある部分のうちの一部は、複数本の極細細線が等間隔で平行に並べられた部分を含み、凸曲面状の極微小の凸部が多数形成された第１のブラスト加工表面とし、第１のブラスト加工表面以外の印刷用開口パターンが形成される印刷に関係がある部分のうちの残部及び印刷に関係がない部分は、極微小の凸部よりも大きい凸曲面状の微小凸部が多数形成された第２のブラスト加工表面としたスクリーン印刷用メタルマスクの場合にも、適用することが可能である。 Embodiment 3.
In the first and second embodiments, the manufacturing process of the SUS base material subjected to two types of blasting used in the manufacturing method of the suspending metal mask for printing, and the base metal used in the manufacturing method of the suspending metal mask for printing are also used. However, the present invention is not limited to the suspending metal mask for printing, the portion related to printing on which the opening pattern for printing is formed, and the opening for printing. In a metal mask provided with a portion not related to printing in which a pattern is not formed, some of the portions related to printing in which a printing opening pattern is formed are parallel to each other with a plurality of ultrafine wires arranged at equal intervals. A first blasting surface including a plurality of very small convex portions having a convex curved surface shape including arranged portions, and other than the first blasting surface Among the portions related to printing on which the opening pattern for printing is formed and the portions not related to printing, the second portion in which a large number of convex convex portions larger than the extremely small convex portions are formed. The present invention can also be applied to a screen printing metal mask having a blasted surface.

実施の形態４.
また、通常のスクリーン印刷用メタルマスクにおいて、めっき製造の過程で印刷面側に平均的な高さよりも少し突出した微小の凸部が発生する場合がある。また、電解研磨加工、化学研磨加工、ベルト研磨加工等を施した場合であっても、印刷面側に平均的な高さよりも少し突出した微小の凸部が僅かであるが発生することがある。このような場合、例え僅かであっても、微小の凸部が滲みの問題を発生させることがある。そのような場合でも、先端下部に水平刃部２２を備えたカッター２０を用意し、平均的な高さよりも少し突出した微小の凸部が形成されている印刷面側にカッター２０をセットする。この時、カッター２０の下面が平均的な高さを持つ多数の凸部の頂部に当接することでほぼ水平に位置決めされる。次に、カッター２０を水平方向に移動させると、平均的な高さよりも少し突出した微小の凸部は、その頭部をカッター２０の水平刃部２２により水平に削り取られる。これにより、印刷対象物を傷付ける可能性が低くなり、滲みの発生を抑制することができる。 Embodiment 4.
In addition, in a normal screen printing metal mask, there may be a case where a minute convex portion slightly protruding from the average height is generated on the printed surface side in the process of plating production. In addition, even when electrolytic polishing, chemical polishing, belt polishing, or the like is applied, there may be a slight protrusion on the printing surface side slightly protruding from the average height. . In such a case, even if it is a small amount, a minute convex portion may cause a problem of bleeding. Even in such a case, the cutter 20 provided with the horizontal blade portion 22 at the lower end of the tip is prepared, and the cutter 20 is set on the printing surface side where a minute convex portion protruding slightly from the average height is formed. At this time, the lower surface of the cutter 20 is positioned substantially horizontally by coming into contact with the tops of many convex portions having an average height. Next, when the cutter 20 is moved in the horizontal direction, the minute convex portion protruding slightly from the average height is scraped horizontally by the horizontal blade portion 22 of the cutter 20. Thereby, possibility that a printing target will be damaged will become low, and generation | occurrence | production of bleeding can be suppressed.

１金属製メッシュ
２テトロンメッシュ
３金属製版枠
４部分荒らしＳＵＳ母材（ベースメタル用ＳＵＳ母材）
４ａブラスト加工表面
４ｂ鏡面に近い表面（ブラスト加工なし）
５ベースメタル
５ａ印刷用開口パターン形成用レジスト
５ｂ印刷用開口パターン
５ｃ鏡面に近い表面
５ｄブラスト加工表面
６テトロンメッシュ
７接合補助用金属製版枠
８スポンジ
９粘着テープ
１０陰極
１１めっき槽
１２ニッケル
１３陽極
４１ＳＵＳ材
４２、５２ドライフィルム
４２ａ目隠しのパターンレジスト膜
５２ａパターンレジスト膜
４３、５３印刷パターンフィルム
２０カッター
２１基台
２２水平刃部 1 Metal mesh 2 Tetron mesh 3 Metal plate frame 4 Partially roughened SUS base material (SUS base material for base metal)
4a Blasting surface 4b Surface close to mirror surface (no blasting)
5 Base metal 5a Resist for forming an opening pattern for printing 5b Opening pattern for printing 5c Surface close to mirror surface 5d Blasting surface 6 Tetron mesh 7 Metal plate frame for joining assistance 8 Sponge 9 Adhesive tape 10 Cathode 11 Plating tank 12 Nickel 13 Anode 41 SUS material 42, 52 Dry film 42a Blind pattern resist film 52a Pattern resist film 43, 53 Print pattern film 20 Cutter 21 Base 22 Horizontal blade

Claims

Plate frame,
A mesh having an electrically conductive metal mesh in at least the central part of which the outer periphery is stretched inside the plate frame; and
A suspending metal mask for screen printing comprising: a base metal bonded in close contact with the metal mesh and provided with a printing opening pattern;
The base metal includes a portion related to printing in which the opening pattern for printing is formed and a portion not related to printing in which the opening pattern for printing is not formed,
A part of the part related to printing on which the printing opening pattern is formed includes a part in which a plurality of fine fine lines are arranged in parallel at equal intervals, and a very small convex part having a convex curved surface is formed. A plurality of first blasted surfaces, wherein the first blasted surface is formed with a large number of convex microscopic convex portions having an average height, and a plurality of convex curved surfaces A part of the ultra-small convex part of, has a trapezoidal dome shape that is aligned to an average height with the head cut off horizontally,
The remaining part of the part related to printing on which the printing opening pattern other than the first blasted surface is formed and the part not related to printing are convex curved surfaces larger than the extremely minute convex part. The second blasted surface is formed with a plurality of minute convex portions, and the second blasted surface is a convex curved surface-like microscopic surface having an average height larger than that of the extremely small convex portion as a whole. A large number of convex parts are formed, and some of the small convex parts of the convex curved surface have a trapezoidal dome shape with the average height aligned with the head cut off horizontally. Suspended metal mask for screen printing.

2. The suspending metal mask for screen printing according to claim 1, wherein a plurality of ultrafine wires having a width of 15 to 200 [mu] m or less are arranged in parallel so that a distance between the ultrafine wires is 15 to 200 [mu] m or less.

3. The width of one ultrafine wire arranged near a large opening among a plurality of ultrafine wires is set to be twice or more the width of other ultrafine wires. Suspended metal mask for screen printing as described.

Of the multiple fine wires, the width of one fine wire arranged near the large opening is set to be twice or more the width of the other fine wires, and one single fine wire arranged near the large opening A ½ part on the entrance side in the direction of squeegee advancement of the fine wire is used as the first blasting surface, and a ½ part on the exit side in the direction of squeegee advancement is used as the second blasting surface. The suspended metal mask for screen printing according to claim 1 or 2.

Of the first blasted surface and the second blasted surface, the average is obtained in a state in which a part of the head of the convex curved surface formed on one of the blasted surfaces is horizontally cut off. The suspending metal mask for screen printing according to claim 1, wherein the suspending metal mask has a trapezoidal dome shape with a uniform height.

Plate frame,
A mesh having an electrically conductive metal mesh in at least the central part of which the outer periphery is stretched inside the plate frame; and
A suspending metal mask for screen printing comprising: a base metal bonded in close contact with the metal mesh and provided with a printing opening pattern;
The base metal is a blasted surface on which a large number of minute convex portions having a convex curved surface are formed, and the blasted surface is formed with a large number of minute convex portions having a convex curved surface having an average height. In addition, some of the small convex parts on the convex curved surface have a trapezoidal dome shape with an average height aligned with the head cut off horizontally. Suspended metal mask for screen printing.

Plate frame,
A mesh having an electrically conductive metal mesh in at least the central part of which the outer periphery is stretched inside the plate frame; and
A suspending metal mask for screen printing comprising: a base metal bonded in close contact with the metal mesh and provided with a printing opening pattern;
The base metal includes a portion related to printing in which the opening pattern for printing is formed and a portion not related to printing in which the opening pattern for printing is not formed,
A part of the part related to printing on which the printing opening pattern is formed includes a part in which a plurality of fine fine lines are arranged in parallel at equal intervals, and a very small convex part having a convex curved surface is formed. A plurality of first blasted surfaces, wherein the first blasted surface is formed with a large number of convex microscopic convex portions having an average height, and a plurality of convex curved surfaces A part of the ultra-small convex part of, has a trapezoidal dome shape that is aligned to an average height with the head cut off horizontally,
The remaining part of the part related to printing on which the printing opening pattern other than the first blasted surface is formed and the part not related to printing are convex curved surfaces larger than the extremely minute convex part. The second blasted surface is formed with a plurality of minute convex portions, and the second blasted surface is a convex curved surface-like microscopic surface having an average height larger than that of the extremely small convex portion as a whole. A large number of convex parts are formed, and some of the small convex parts of the convex curved surface have a trapezoidal dome shape with the average height aligned with the head cut off horizontally. A method for manufacturing a suspending metal mask for screen printing,
A first blasting process is performed on the entire surface of the SUS material to form a first blasting surface on which a large number of concave concave curved ultrafine recesses are formed, and a pattern resist film that is blindfolded on the surface of the SUS material And performing a second blasting process from the upper surface of the SUS material on which the blind pattern resist film is formed, so that the surface of the SUS material not protected by the blind pattern resist film is formed from Forming a second blasted surface on which a large number of micro-recesses are formed to produce a SUS base material subjected to two types of blasting;
Using the SUS base material that has been subjected to the two types of blasting, a plurality of ultrafine wires are arranged in parallel at equal intervals on the first blasting surface on which a large number of concave concave curved surfaces are formed. Forming a pattern resist film for forming a printing opening pattern including a portion, and performing plating from the upper surface of the SUS base material subjected to two types of blasting, thereby the joint plating surface of the base metal The surface to be printed opposite is a second blasted surface on which a large number of large micro-projections corresponding to the large micro-recesses are formed, and at least a plurality of ultrafine wires that are regions for forming the printing opening pattern are formed. The portions arranged in parallel at equal intervals are the first blasted surface on which a large number of extremely small convex portions having convex curved surfaces smaller than the small convex portions corresponding to the extremely small concave portions are formed. And a step of preparing a Sumetaru,
By preparing a cutter having a horizontal blade with the first metal blasted surface and the second blasted surface facing up, and moving the horizontal blade of the cutter horizontally, an average is obtained. A step of scraping the head of the micro-projection or the micro-projection protruding beyond the height horizontally with the horizontal blade portion of the cutter to obtain an average height; and
A method for producing a suspending metal mask for screen printing, comprising:

The first blasting surface of the SUS base material that has been subjected to two types of blasting is formed with a large number of concave concave-shaped concave portions made of small and spherical glass beads, and the second blasting of the SUS base material. The processed surface is formed with a large number of concave concave surfaces that are larger than the above-mentioned extremely small concave portions made of large and spherical glass beads,
The first blasted surface of the base metal has a large number of very small convex portions with convex curved surfaces formed by small and spherical glass beads, and the second blasted surface of the base metal is formed by large and spherical glass beads. 8. The method for manufacturing a suspending metal mask for screen printing according to claim 7, wherein a large number of extremely small convex portions having a convex curved surface larger than the extremely small convex portions are formed.

9. The screen printing according to claim 7, wherein a plurality of ultrafine wires having a width of 15 to 200 [mu] m or less are arranged in parallel so that an interval between the ultrafine wires is 15 to 200 [mu] m or less. Suspended metal mask manufacturing method.

The width of one ultrafine wire arranged near a large opening among the plurality of ultrafine wires is set to be twice or more the width of the other ultrafine wires. The manufacturing method of the suspending metal mask for screen printing of any one of these.

Plate frame,
A mesh having an electrically conductive metal mesh in at least the central part of which the outer periphery is stretched inside the plate frame; and
A suspending metal mask for screen printing comprising: a base metal bonded in close contact with the metal mesh and provided with a printing opening pattern;
The base metal is a blasted surface on which a large number of minute convex portions having a convex curved surface are formed, and the blasted surface is formed with a large number of minute convex portions having a convex curved surface having an average height. Suspend for screen printing, which has a trapezoidal dome shape with the average height aligned with the head being scraped off horizontally A method of manufacturing a metal mask,
Blasting the entire surface of the SUS material to form a blasted surface in which a large number of concave concave surface-shaped concave portions are formed, and producing a blasted SUS base material;
Using the SUS base material that has been subjected to the blasting process, a pattern resist film for forming a printing opening pattern is formed on the blasting surface on which a large number of concave concave surface-shaped recesses are formed, and the blasting process is performed. By performing plating from the upper surface of the formed SUS base material, the surface to be printed opposite to the joint plating surface of the base metal has a blasted surface on which a large number of minute protrusions corresponding to the minute recesses are formed. A step of manufacturing the base metal,
With the base metal blasted surface up, prepare a cutter with a horizontal blade part, and move the horizontal blade part of the cutter horizontally to make a minute protrusion that protrudes larger than the average height Cutting the head of the blade horizontally with the horizontal blade portion of the cutter and aligning it to an average height; and
A method for producing a suspending metal mask for screen printing, comprising:

In the screen printing metal mask provided with the opening pattern for printing,
The metal mask includes a blasted surface on which a large number of minute convex portions having a convex curved surface are formed, and the blasted surface is formed with a large number of minute convex portions having a convex curved surface having an average height. It is confirmed that some of the small convex parts on the convex curved surface have a trapezoidal dome shape with the average height aligned with the head cut off horizontally. Features a metal mask for screen printing.