WO2014083946A1 - 電磁回転装置及び該電磁回転装置を備えた真空ポンプ - Google Patents
電磁回転装置及び該電磁回転装置を備えた真空ポンプ Download PDFInfo
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- WO2014083946A1 WO2014083946A1 PCT/JP2013/077510 JP2013077510W WO2014083946A1 WO 2014083946 A1 WO2014083946 A1 WO 2014083946A1 JP 2013077510 W JP2013077510 W JP 2013077510W WO 2014083946 A1 WO2014083946 A1 WO 2014083946A1
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/048—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps comprising magnetic bearings
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D25/00—Pumping installations or systems
- F04D25/02—Units comprising pumps and their driving means
- F04D25/06—Units comprising pumps and their driving means the pump being electrically driven
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D25/00—Pumping installations or systems
- F04D25/02—Units comprising pumps and their driving means
- F04D25/06—Units comprising pumps and their driving means the pump being electrically driven
- F04D25/0606—Units comprising pumps and their driving means the pump being electrically driven the electric motor being specially adapted for integration in the pump
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
- F04D27/02—Surge control
- F04D27/0261—Surge control by varying driving speed
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
- F04D29/053—Shafts
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
- F04D29/056—Bearings
- F04D29/058—Bearings magnetic; electromagnetic
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
- F16C32/0406—Magnetic bearings
- F16C32/044—Active magnetic bearings
- F16C32/0444—Details of devices to control the actuation of the electromagnets
- F16C32/0457—Details of the power supply to the electromagnets
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02P—CONTROL OR REGULATION OF ELECTRIC MOTORS, ELECTRIC GENERATORS OR DYNAMO-ELECTRIC CONVERTERS; CONTROLLING TRANSFORMERS, REACTORS OR CHOKE COILS
- H02P3/00—Arrangements for stopping or slowing electric motors, generators, or dynamo-electric converters
- H02P3/06—Arrangements for stopping or slowing electric motors, generators, or dynamo-electric converters for stopping or slowing an individual dynamo-electric motor or dynamo-electric converter
- H02P3/08—Arrangements for stopping or slowing electric motors, generators, or dynamo-electric converters for stopping or slowing an individual dynamo-electric motor or dynamo-electric converter for stopping or slowing a dc motor
- H02P3/14—Arrangements for stopping or slowing electric motors, generators, or dynamo-electric converters for stopping or slowing an individual dynamo-electric motor or dynamo-electric converter for stopping or slowing a dc motor by regenerative braking
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02P—CONTROL OR REGULATION OF ELECTRIC MOTORS, ELECTRIC GENERATORS OR DYNAMO-ELECTRIC CONVERTERS; CONTROLLING TRANSFORMERS, REACTORS OR CHOKE COILS
- H02P3/00—Arrangements for stopping or slowing electric motors, generators, or dynamo-electric converters
- H02P3/06—Arrangements for stopping or slowing electric motors, generators, or dynamo-electric converters for stopping or slowing an individual dynamo-electric motor or dynamo-electric converter
- H02P3/18—Arrangements for stopping or slowing electric motors, generators, or dynamo-electric converters for stopping or slowing an individual dynamo-electric motor or dynamo-electric converter for stopping or slowing an ac motor
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02P—CONTROL OR REGULATION OF ELECTRIC MOTORS, ELECTRIC GENERATORS OR DYNAMO-ELECTRIC CONVERTERS; CONTROLLING TRANSFORMERS, REACTORS OR CHOKE COILS
- H02P6/00—Arrangements for controlling synchronous motors or other dynamo-electric motors using electronic commutation dependent on the rotor position; Electronic commutators therefor
- H02P6/08—Arrangements for controlling the speed or torque of a single motor
- H02P6/085—Arrangements for controlling the speed or torque of a single motor in a bridge configuration
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02P—CONTROL OR REGULATION OF ELECTRIC MOTORS, ELECTRIC GENERATORS OR DYNAMO-ELECTRIC CONVERTERS; CONTROLLING TRANSFORMERS, REACTORS OR CHOKE COILS
- H02P6/00—Arrangements for controlling synchronous motors or other dynamo-electric motors using electronic commutation dependent on the rotor position; Electronic commutators therefor
- H02P6/24—Arrangements for stopping
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C2360/00—Engines or pumps
- F16C2360/44—Centrifugal pumps
- F16C2360/45—Turbo-molecular pumps
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02B—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO BUILDINGS, e.g. HOUSING, HOUSE APPLIANCES OR RELATED END-USER APPLICATIONS
- Y02B30/00—Energy efficient heating, ventilation or air conditioning [HVAC]
- Y02B30/70—Efficient control or regulation technologies, e.g. for control of refrigerant flow, motor or heating
Definitions
- the present invention relates to an electromagnetic rotating device and a vacuum pump equipped with the electromagnetic rotating device, and in particular, an electromagnetic rotating device capable of reducing the size and cost by consuming electric power during regeneration with an electromagnetic winding of a magnetic bearing device, and the electromagnetic
- the present invention relates to a vacuum pump provided with a rotating device.
- turbo molecular pump not only evacuates the chamber, but also exhausts these process gases from the chamber. Also used. Furthermore, turbo molecular pumps are also used in equipment such as electron microscopes to prevent the refraction of the electron beam due to the presence of dust, etc., so that the environment in the chamber of the electron microscope or the like is in a highly vacuum state. Yes. *
- Such a turbo molecular pump is composed of a turbo molecular pump main body for sucking and exhausting gas from a chamber of a semiconductor manufacturing apparatus or an electron microscope, and a control device for controlling the turbo molecular pump main body.
- a longitudinal sectional view of the turbo molecular pump main body is shown in FIG. *
- the turbo molecular pump main body 100 has an air inlet 101 formed at the upper end of a cylindrical outer cylinder 127.
- a rotating body 103 having a plurality of rotating blades 102a, 102b, 102c,... Formed by turbine blades for sucking and exhausting gas is formed radially and in multiple stages on the inner side of the outer cylinder 127.
- a rotor shaft 113 is attached to the center of the rotating body 103. The rotor shaft 113 is levitated and supported in the air and controlled in position by, for example, a 5-axis control magnetic bearing. *
- the upper radial electromagnet 104 In the upper radial electromagnet 104, four electromagnets are arranged in pairs in the X and Y axes and in the + and ⁇ directions (not shown, but if necessary, electromagnets 104X + and 104X ⁇ are arranged). , 104Y +, 104Y-).
- An upper radial sensor 107 composed of four electromagnets is provided adjacent to and corresponding to the upper radial electromagnet 104. The upper radial sensor 107 is configured to detect a radial displacement of the rotating body 103 and send it to the control device. *
- the upper radial electromagnet 104 is excited and controlled by a magnetic bearing control circuit via a compensation circuit having a PID adjustment function. Adjust the radial position.
- the rotor shaft 113 is formed of a high permeability material (such as iron) and is attracted by the magnetic force of the upper radial electromagnet 104. Such adjustment is performed independently in the X-axis direction and the Y-axis direction.
- the lower radial electromagnet 105 and the lower radial sensor 108 are arranged in the same manner as the upper radial electromagnet 104 and the upper radial sensor 107, and the lower radial position of the rotor shaft 113 is set to the upper radial position.
- the lower radial electromagnet 105 is also referred to as electromagnets 105X +, 105X ⁇ , 105Y +, 105 ⁇ as necessary).
- axial electromagnets 106A and 106B are arranged with a disk-shaped metal disk 111 provided at the lower part of the rotor shaft 113 sandwiched vertically.
- the metal disk 111 is made of a high permeability material such as iron.
- An axial sensor 109 is provided to detect the axial displacement of the rotor shaft 113, and the axial displacement signal is sent to the control device.
- the axial electromagnets 106A and 106B are controlled to be excited by a magnetic bearing control circuit via a compensation circuit having a PID adjustment function of the control device based on the axial displacement signal.
- the axial electromagnet 106A attracts the metal disk 111 upward by magnetic force, and the axial electromagnet 106B attracts the metal disk 111 downward.
- the control device appropriately adjusts the magnetic force exerted on the metal disk 111 by the axial electromagnets 106A and 106B, causes the rotor shaft 113 to magnetically float in the axial direction, and holds the space in a non-contact manner.
- a magnetic bearing control circuit for exciting and driving the upper radial electromagnet 104, the lower radial electromagnet 105, and the axial electromagnets 106A and 106B will be described later.
- the motor 121 includes a plurality of magnetic poles arranged circumferentially so as to surround the rotor shaft 113.
- Each magnetic pole is controlled by a control device so as to rotationally drive the rotor shaft 113 via an electromagnetic force acting between the rotor shaft 113 and the magnetic pole.
- a rotation speed sensor (not shown) is incorporated in the motor 121, and the rotation speed of the rotor shaft 113 is detected by a detection signal of the rotation speed sensor.
- a phase sensor (not shown) is attached in the vicinity of the lower radial direction sensor 108 so as to detect the rotation phase of the rotor shaft 113.
- the position of the magnetic pole is detected by using the detection signals of both the phase sensor and the rotational speed sensor.
- a plurality of fixed blades 123a, 123b, 123c,... are arranged with a small gap from the rotor blades 102a, 102b, 102c,.
- the rotor blades 102a, 102b, 102c,... are each inclined at a predetermined angle from a plane perpendicular to the axis of the rotor shaft 113 in order to transfer exhaust gas molecules downward by collision.
- the fixed blades 123 are also formed to be inclined at a predetermined angle from a plane perpendicular to the axis of the rotor shaft 113, and are arranged alternately with the stages of the rotary blades 102 toward the inside of the outer cylinder 127. ing. *
- the fixed blade spacer 125 is a ring-shaped member and is made of a metal such as a metal such as aluminum, iron, stainless steel, or copper, or an alloy containing these metals as components.
- An outer cylinder 127 is fixed to the outer periphery of the fixed blade spacer 125 with a slight gap.
- a base portion 129 is disposed at the bottom of the outer cylinder 127, and a threaded spacer 131 is disposed between the lower portion of the fixed blade spacer 125 and the base portion 129.
- An exhaust port 133 is formed below the threaded spacer 131 in the base portion 129 and communicates with the outside.
- the turbo molecular pump requires control based on individual parameters (for example, specification of a model, various characteristics corresponding to the model) individually adjusted.
- the turbo molecular pump main body 100 includes an electronic circuit unit 141 in the main body.
- the electronic circuit portion 141 is accommodated in a lower portion of a rotation speed sensor (not shown) near the center of the base portion 129 constituting the lower portion of the turbo molecular pump main body 100 and is closed by an airtight bottom lid 145.
- the rectifier circuit 10 converts alternating current into direct current.
- This direct current is three-phase converted by the motor drive main circuit 30 based on the pulse signal adjusted by the motor drive control circuit 20 to drive the motor 121.
- the output of the rectifier circuit 10 is supplied with voltage to the motor drive control circuit 20 and also to the magnetic bearing control circuit 50 after the voltage is dropped by the DC stabilized power circuit 40. . From the magnetic bearing control circuit 50, an exciting current is supplied to the upper radial electromagnet 104, the lower radial electromagnet 105, and the axial electromagnets 106A and 106B. *
- This exciting current is composed of a constant steady current (bias current) and a displacement current corresponding to the position deviation signal, and constitutes the upper radial electromagnet 104, the lower radial electromagnet 105, and the axial electromagnets 106A and 106B. It is passed through a pair of electromagnets.
- FIG. 11 a resistor 3 and a transistor 5 are connected to a power supply circuit between two power supply lines 1a and 1b. *
- transistors 7, 9, 11, 13, 15, and 17 are connected in a three-phase bridge, and power is supplied to the motor 121.
- regenerative current path diodes 19a to 19g are connected.
- the currents flowing through the transistors 9, 13, and 17 are detected by a current detector (not shown), and a deviation is taken from the motor current command value.
- a PWM control signal adjusted based on this deviation is input to the gates of the transistors 7, 9, 11, 13, 15, and 17. *
- the resistor 3 functions as a regenerative resistor, and regenerative power generated from the motor 121 when the rotating body 103 is decelerated is converted into heat and consumed.
- Patent Documents 1 to 3 are known as conventional examples in which a regenerative resistor is used in a vacuum pump as described above.
- the present invention has been made in view of such a conventional problem, and an electromagnetic rotating device and an electromagnetic rotating device that can be reduced in size and cost by consuming electric power during regeneration by an electromagnet winding of a magnetic bearing device.
- An object is to provide a vacuum pump provided.
- the present invention provides a motor, a rotor shaft rotated by the motor, and a displacement current generated in accordance with a position deviation of the rotor shaft superimposed on a bias current.
- a power supply for supplying a direct current
- a motor driving main circuit for supplying the direct current supplied from the power supply to the motor
- a motor voltage monitoring circuit for monitoring the voltage of the direct current
- the motor voltage monitoring A detection signal output means for outputting a detection signal when the voltage monitored by the circuit exceeds a predetermined value; and the bias current for exciting the electromagnet based on the detection signal output by the detection signal output means.
- an increased magnetic bearing control circuit is an increased magnetic bearing control circuit.
- the present invention provides a motor drive control circuit that controls a motor current flowing through the motor according to a command value, and the command value of the motor current based on the detection signal output by the detection signal output means. And a braking current adjusting circuit for reducing the noise.
- the motor current is adjusted so that the voltage during regeneration is not increased. That is, when the voltage to the motor drive main circuit increases, the command value of the motor current is reduced. If the current flowing through the motor decreases, the voltage during regeneration will also decrease.
- the present invention (Claim 3) is characterized in that a direct current having the same voltage as the voltage supplied to the motor drive main circuit is supplied from the power source to the magnetic bearing control circuit.
- the DC stabilized power supply circuit that supplies the direct current to the motor drive control circuit and the magnetic bearing control circuit can be reduced.
- the present invention is a vacuum pump comprising the electromagnetic rotating device according to any one of Claims 1 to 3, wherein a rotor blade is attached to the rotor shaft.
- a bias is provided for outputting a detection signal when the voltage monitored by the motor voltage monitoring circuit exceeds a predetermined value and exciting the electromagnet based on the detection signal. Since the current is increased, the regenerative power can be consumed by the electromagnet winding of the magnetic bearing device when the voltage applied to the motor drive main circuit increases during regeneration or acceleration. This makes it possible to delete the regenerative resistance.
- the regenerative resistor installation space becomes unnecessary, which leads to a reduction in the size of the control device. Further, since a switching element for turning on / off the regenerative resistor can be eliminated, the cost can be reduced.
- Control block diagram for motor braking current Configuration diagram of magnetic bearing control circuit Control block diagram related to current flowing in electromagnet winding Radial position control system diagram Time chart Meaning that regenerative power is generated during acceleration
- Control block diagram of 2nd Embodiment of this invention Longitudinal section of turbo molecular pump body Conventional block diagram Configuration diagram of motor drive main circuit
- FIG. An overall block diagram of the first embodiment of the present invention is shown in FIG. Note that the same elements as those in FIG. *
- an AC power supply is connected to the rectifier circuit 10 of the control device 400.
- the rectifier circuit 10 the alternating current is rectified and converted into a direct current of 100 to 150 volts. This direct current flows between the power supply lines 1a and 1b and is input to the motor drive main circuit 30.
- a motor voltage monitoring circuit 60 is disposed between the power supply lines 1a and 1b so that the voltage of the motor driving main circuit 30 is monitored.
- the motor voltage monitoring circuit 60 detects that the voltage between the power supply lines 1a and 1b is higher than a predetermined voltage when the motor 121 is decelerated or accelerated.
- a high voltage detection signal is output from the motor voltage monitoring circuit 60.
- the voltage high detection signal is input to the braking current adjustment circuit 70 and the magnetic bearing control circuit 50.
- the braking current command value calculation unit 71 shown in FIG. 2 calculates the braking current command value of the motor 121. *
- the braking current command value calculated by the braking current command value calculation unit 71 is deviated from the current value detected by the current detection unit 73 arranged in series with respect to the transistors 9, 13, and 17 in the deviation unit 75. A deviation is taken, and a PWM control signal subjected to pulse width modulation by the PWM control unit 77 is generated based on this deviation.
- the braking current is adjusted by inputting the PWM control signal to the gates of the transistors 7, 9, 11, 13, 15, and 17 of the motor drive main circuit 30.
- the direct current output from the rectifier circuit 10 is dropped to a direct current of about several volts by the direct current stabilizing power supply circuit 40 and then input to the motor drive control circuit 20 and the magnetic bearing control circuit 50 as a control voltage. It has become so.
- the voltage between the power supply lines 1a and 1b is supplied to the magnetic bearing control circuit 50.
- FIG. 3 shows a configuration diagram of the magnetic bearing control circuit 50.
- the magnetic bearing control circuit 50 includes an amplifier circuit 250 and an amplifier control circuit 271. A control voltage is input to the amplifier control circuit 271 from the DC stabilized power supply circuit 40. *
- the turbo molecular pump main body 100 is provided with a common node (this node is referred to as a common node C) for the electromagnet windings 151, 151,... Constituting the electromagnets 104, 105, 106A, 106B. ing.
- One end 151a of each electromagnet winding 151 is connected to the common node C.
- the other end 151b of the electromagnet winding 151 is connected to the transistor 261 and the diode 265 of the amplifier circuit 250 (the node of the other end 151b is referred to as a node E).
- the transistor 261 is a power MOSFET
- the drain terminal 261 a is connected to the other end 151 b of the electromagnet winding 151
- the source terminal 261 b is connected to the negative electrode 1 b of the rectifier circuit 10 via the current detection circuit 255.
- the diode 265 is a current regeneration or flywheel diode.
- the cathode terminal 265a is connected to the positive electrode 1a of the rectifier circuit 10, and the anode terminal 265b is connected to the other end 151b of the electromagnet winding 151. *
- the current detection circuit 255 connected to the source terminal 261b of the transistor 261 includes a detection resistor 256 having one end connected to the negative electrode 1b and the other end connected to the source terminal 261b of the transistor 261, and the other end of the detection resistor 256. And a detection unit 257 that detects the electromagnet current iL from the voltage. The detection unit 257 detects an electromagnet current iL flowing through the electromagnet winding 151 and outputs a current detection signal 273 as a detection result to the amplifier control circuit 271. *
- the amplifier circuit 250 configured as described above is provided for each of the electromagnet windings 151, 151,... Constituting the electromagnets 104, 105, 106A, 106B. *
- the amplifier control circuit 271 is a circuit in a DSP unit (not shown).
- the amplifier control circuit 271 receives a voltage high detection signal detected by the motor voltage monitoring circuit 60 as shown in FIG. Then, when this voltage high detection signal is input, the command value of the bias current that flows through the electromagnet winding 151 is calculated by the current command value calculation unit 371. *
- the bias current command value 373 calculated by the current command value calculation unit 371 is, for example, for driving the electromagnet 105X + constituting the lower radial electromagnet 105 as shown in the radial position control system diagrams of FIGS.
- One signal output from the compensation circuit 379 and the addition unit 387 are added to the deviation unit 375. *
- the other signal output from the compensation circuit 379 is inverted by the inverting circuit 381, and input to the deviation unit 375 in the form of being added by the bias current command value 373 and the adding unit 389. It is like that. *
- the reason why the bias current command value is added is to allow the radial position control of the rotating body 103 to be linearly performed. That is, the electromagnet 105X + and the electromagnet 105X ⁇ are supplied with a constant DC bias current and a control current for holding the rotating body 103 at a constant position.
- a deviation calculated by the deviation unit 341 between the radial position of the rotating body 103 detected by the position detection circuit 383 of the lower radial sensor 108 and the position command value 385 is input to the compensation circuit 379. It has become.
- the value of the electromagnet current iL detected by the current detection circuit 255 and the current command value are compared by the deviation unit 375, and the PWM control unit 377 increases the time for increasing the electromagnet current iL (the above-described increase time Tp1) and the electromagnet.
- a time for reducing the current iL (the above-described reduction time Tp2) is determined, and based on this, the pulse width time of the gate drive signal 274 output to the gate terminal of the transistor 261 is determined within one control cycle Ts by PWM control. It is like that. *
- a switching circuit 280 is connected to the common node C of the amplifier circuit 250.
- a transistor 281 and a diode 285 are connected to the common node C.
- the diode 285 is a diode for current regeneration or flywheel, and has a cathode terminal 285 a connected to the common node C and an anode terminal 285 b connected to the same negative electrode 1 b as that of the amplifier circuit 250.
- the transistor 281 is a power MOSFET, the drain terminal 281a is connected to the positive electrode 1a of the rectifier circuit 10, and the source terminal 281b is connected to the common node C. *
- a switching signal 276 is output from the amplifier control circuit 271 to the gate terminal of the transistor 281, and the amplifier control circuit 271 outputs the transistor 281 within the same control cycle Ts as the control for the amplifier circuit 250.
- the pulse width time of the switching signal 276 output to the gate terminal is determined.
- the back electromotive force generated in the electromagnetic winding 151 causes the diode 285, the common node C, the electromagnetic winding 151, and the transistor from the negative electrode 1b.
- a flywheel current flows to the negative electrode 1b via 261 (and the current detection circuit 255).
- the electromagnet current iL is kept substantially constant (this state is referred to as a constant mode A3).
- FIG. 6 shows a time chart showing adjustment of the control phase of the amplifier circuit 250 to the transistor 261 and the like and the switching phase of the switching circuit 280 to the transistor 281 and the like.
- the switching circuit 280 is controlled so that the time during which the transistor 281 is turned on and the time during which the transistor 281 is turned off are the same during the control cycle Ts. At this time, the transistor 281 is turned off from the beginning time (time 0) of the control cycle Ts to half the time (time 0.5Ts) of the control cycle Ts.
- the voltage of the common node C becomes substantially the same voltage as the negative electrode 1b (hereinafter referred to as voltage VL) due to the counter electromotive force generated in the electromagnet winding 151 or the like.
- the transistor 281 is turned on from the half time of the control cycle Ts (time 0.5 Ts) to the end of the control cycle Ts (time Ts). Therefore, the voltage of the common node C is substantially the same voltage as the positive electrode 1a (hereinafter referred to as voltage VH).
- the amplifier control circuit 271 When the value of the electromagnet current iL detected by the current detection circuit 255 is smaller than the current command value, the amplifier control circuit 271 performs control so as to increase the electromagnet current iL. In this case, control is performed so as to be in the increase mode A1 for the increase time Tp1 described above in one control cycle Ts, and control is performed so as to be in the constant mode A3 or A4 at other times. Done. *
- the transistor 261 is turned on by the time Tp1 from the time 0.5Ts to increase by the increase time Tp1.
- the state is mode A1.
- the transistor 261 is turned off to set the constant mode A4.
- the state of the constant mode A3 is set by turning on the transistor 261. And As a result, the electromagnet current iL is increased by the increase time Tp1 during one control cycle Ts.
- the amplifier control circuit 271 performs control so as to decrease the electromagnet current iL.
- control is performed so as to be in the state of the decrease mode A2 for the decrease time Tp2 described above in one control cycle Ts, and control is performed so as to be in the state of either the constant mode A3 or A4 at other times.
- the transistor 261 is turned off by the time Tp2 with the time 0.5Ts as the end point, and the time is reduced by the decrease time Tp2.
- the state is set to mode A2.
- the time until the transistor 261 is turned off is set to the constant mode A3 by turning the transistor 261 on.
- the state of the constant mode A4 is set by turning off the transistor 261.
- the electromagnet current iL is decreased by the decrease time Tp2 during one control cycle Ts.
- the amplifier control circuit 271 performs control so as to keep the electromagnet current iL constant. In this case, control is performed so as to always be in one of the constant modes A3 and A4 in one control cycle Ts.
- the transistor 281 of the switching circuit 280 is turned off from time 0 to time 0.5Ts, the transistor 261 is turned on to set the constant mode A3.
- the constant mode A4 is set by turning off the transistor 261. Thereby, the electromagnet current iL is kept constant.
- the electromagnet current iL can be increased, decreased, and kept constant, and the value of the electromagnet current iL matches the current command value. Can do. *
- FIG. 1 differs from FIG. 10 in that the regenerative resistor 3 and the transistor 5 are removed from the motor drive main circuit 30. And the regenerative electric power conventionally consumed by the regenerative resistor 3 is consumed by the electromagnet winding 151. *
- the motor 121 is decelerated or the acceleration is set as shown in FIG.
- the voltage of the motor drive main circuit 30 increases. If the voltage increases in this way, the electronic element may be broken. Therefore, it is necessary to adjust the braking current so that the voltage during regeneration does not increase.
- the motor voltage monitoring circuit 60 detects this state and detects the motor voltage monitoring circuit. 60, a voltage high detection signal is sent to the braking current adjusting circuit 70 and the magnetic bearing control circuit 50.
- the braking current adjustment circuit 70 reduces the braking current command value of the motor 121 so that the induced voltage of the motor 121 is constant or decreases.
- the current flowing through the transistors 9, 13, and 17 is deviated from this braking current command value.
- the gates of the transistors 7, 9, 11, 13, 15, and 17 are adjusted based on this deviation.
- PWM control signal is input.
- the braking current flowing through the motor 121 decreases, and when the braking current decreases, the regenerative voltage generated between the power supply lines 1a and 1b also decreases. *
- the amplifier control circuit 271 of the magnetic bearing control circuit 50 receives the voltage high detection signal so that the current flowing through the electromagnet winding 151 increases to about 1.2 to 3 times the bias current during normal operation.
- a current command value including a bias current is calculated. That is, when the voltage of the motor drive main circuit 30 increases, the current including the bias current flowing through the electromagnet winding 151 is increased to increase the power consumption.
- the regenerative resistor 3 As described above, even when the regenerative resistor 3 is deleted, the regenerative power is consumed and the pump can be stably stopped. If the regenerative resistor 3 is deleted, the regenerative resistor installation space becomes unnecessary, which leads to downsizing of the control device. Further, since a switching element for turning ON / OFF the regenerative resistor 3 can be eliminated, the cost can be reduced. *
- this regenerative resistance 3 can also be left. In this case, since most of the regenerative energy is consumed on the electromagnet winding 151 side, the capacity of the regenerative resistor 3 and the switching element that turns this regenerative resistor 3 ON / OFF can be reduced. In addition, the pump can be stopped quickly.
- the voltage high detection signal is a sign, it may be a continuous voltage value.
- the code may be generated stepwise according to the level of the voltage value. If the voltage value is continuous, the braking current and the bias current can be adjusted continuously. If stepwise, the adjustment of the braking current and the adjustment of the bias current can be changed stepwise.
- FIG. 8 shows an overall block diagram of the second embodiment of the present invention. The same elements as those in FIG. *
- the DC voltage between the power supply lines 1a and 1b is supplied to the magnetic bearing control circuit 50, whereas in the control device 500 of FIG. The difference is that the DC voltage thus supplied is supplied to the magnetic bearing control circuit 50.
- One DC stabilized power circuit 40 can be branched and used for control and magnetic bearings, but in the case of the second embodiment, the capacity of the DC stabilized power circuit 40 is larger than that of the first embodiment. .
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- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Magnetic Bearings And Hydrostatic Bearings (AREA)
- Non-Positive Displacement Air Blowers (AREA)
- Control Of Electric Motors In General (AREA)
Abstract
Description
タ駆動制御回路と、前記検出信号出力手段で出力された前記検出信号に基づき前記モータ電流の前記指令値を減らす制動電流調整回路とを備えて構成した。
、制御サイクルTsの始めの時間(時間0)から制御サイクルTsの半分の時間(時間0.5Ts)まではトランジスタ281がoffにされる。
Claims (4)
- モータと、該モータにより回転駆動されるロータ軸と、該ロータ軸の位置偏差に応じて生成される変位電流がバイアス電流に重畳された形で励磁電流として流される電磁石と、直流を供給する電源と、該電源から供給された前記直流を前記モータに供給するモータ駆動主回路と、前記直流の電圧を監視するモータ電圧監視回路と、該モータ電圧監視回路で監視された前記電圧が所定値以上になったときに検出信号を出力する検出信号出力手段と、該検出信号出力手段で出力された前記検出信号に基づき前記電磁石を励磁する前記バイアス電流を増加させる磁気軸受制御回路とを備えたことを特徴とする電磁回転装置。
- 前記モータに流すモータ電流を指令値に従い制御するモータ駆動制御回路と、前記検出信号出力手段で出力された前記検出信号に基づき前記モータ電流の前記指令値を減らす制動電流調整回路とを備えたことを特徴とする請求項1記載の電磁回転装置。
- 前記電源より前記磁気軸受制御回路に対し、前記モータ駆動主回路に供給された電圧と同じ電圧の直流が供給されることを特徴とする請求項1又は請求項2記載の電磁回転装置。
- 請求項1~3のいずれか1項に記載の電磁回転装置を備えた真空ポンプであって、前記ロータ軸には回転翼が取り付けられたことを特徴とする真空ポンプ。
Priority Applications (4)
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US14/443,102 US10876540B2 (en) | 2012-11-30 | 2013-10-09 | Electromagnetic rotating device and vacuum pump equipped with electromagnetic rotating device |
CN201380061136.7A CN104782045B (zh) | 2012-11-30 | 2013-10-09 | 电磁旋转装置和具备该电磁旋转装置的真空泵 |
EP13857910.7A EP2928073B1 (en) | 2012-11-30 | 2013-10-09 | Electromagnetic rotating device and vacuum pump equipped with electromagnetic rotating device |
KR1020157006203A KR102106659B1 (ko) | 2012-11-30 | 2013-10-09 | 전자 회전 장치 및 그 전자 회전 장치를 구비한 진공 펌프 |
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JP2012262591A JP6077286B2 (ja) | 2012-11-30 | 2012-11-30 | 電磁回転装置及び該電磁回転装置を備えた真空ポンプ |
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JP6144527B2 (ja) * | 2013-04-16 | 2017-06-07 | エドワーズ株式会社 | 磁気軸受装置、及び該磁気軸受装置を備えた真空ポンプ |
CN105071735B (zh) * | 2015-07-31 | 2017-08-22 | 西安理工大学 | 基于t‑1简化模型的异步电机节能控制方法 |
CN105446231A (zh) * | 2015-12-29 | 2016-03-30 | 安徽海兴泰瑞智能科技有限公司 | 一种泵站能耗分析监控系统 |
CN106549362A (zh) * | 2016-10-31 | 2017-03-29 | 青岛海尔科技有限公司 | 一种电机及电机保护方法 |
JP7148230B2 (ja) | 2017-08-31 | 2022-10-05 | エドワーズ株式会社 | 真空ポンプ及び制御装置 |
JP6967954B2 (ja) * | 2017-12-05 | 2021-11-17 | 東京エレクトロン株式会社 | 排気装置、処理装置及び排気方法 |
TWI654376B (zh) | 2018-04-17 | 2019-03-21 | 太琦科技股份有限公司 | 幫浦控制系統及其操作方法 |
CN110107593B (zh) * | 2019-04-19 | 2020-06-02 | 微控物理储能研究开发(深圳)有限公司 | 无偏置磁轴承线圈控制电路及控制方法 |
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- 2013-10-09 CN CN201380061136.7A patent/CN104782045B/zh active Active
- 2013-10-09 WO PCT/JP2013/077510 patent/WO2014083946A1/ja active Application Filing
- 2013-10-09 US US14/443,102 patent/US10876540B2/en active Active
- 2013-10-09 KR KR1020157006203A patent/KR102106659B1/ko active IP Right Grant
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CN104782045B (zh) | 2017-10-10 |
JP6077286B2 (ja) | 2017-02-08 |
JP2014110653A (ja) | 2014-06-12 |
EP2928073B1 (en) | 2017-06-21 |
KR102106659B1 (ko) | 2020-05-04 |
EP2928073A4 (en) | 2016-07-06 |
US10876540B2 (en) | 2020-12-29 |
CN104782045A (zh) | 2015-07-15 |
EP2928073A1 (en) | 2015-10-07 |
US20150303836A1 (en) | 2015-10-22 |
KR20150088992A (ko) | 2015-08-04 |
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