WO2014077261A1 - インクジェットヘッドの製造方法、及び、インクジェットヘッド - Google Patents
インクジェットヘッドの製造方法、及び、インクジェットヘッド Download PDFInfo
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- WO2014077261A1 WO2014077261A1 PCT/JP2013/080618 JP2013080618W WO2014077261A1 WO 2014077261 A1 WO2014077261 A1 WO 2014077261A1 JP 2013080618 W JP2013080618 W JP 2013080618W WO 2014077261 A1 WO2014077261 A1 WO 2014077261A1
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- Prior art keywords
- channel
- ink
- linear expansion
- expansion coefficient
- thermal deformation
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 65
- 239000012790 adhesive layer Substances 0.000 claims abstract description 36
- 238000000034 method Methods 0.000 claims abstract description 25
- 230000008569 process Effects 0.000 claims abstract description 7
- 239000000853 adhesive Substances 0.000 claims description 58
- 230000001070 adhesive effect Effects 0.000 claims description 55
- 238000005304 joining Methods 0.000 claims description 22
- 229920001187 thermosetting polymer Polymers 0.000 claims description 11
- 238000010030 laminating Methods 0.000 claims description 8
- 238000010438 heat treatment Methods 0.000 claims description 7
- 230000001629 suppression Effects 0.000 claims description 5
- 238000003475 lamination Methods 0.000 claims description 4
- 239000010410 layer Substances 0.000 abstract description 4
- 230000004048 modification Effects 0.000 description 38
- 238000012986 modification Methods 0.000 description 38
- 239000000463 material Substances 0.000 description 18
- 230000000052 comparative effect Effects 0.000 description 15
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 10
- 238000011156 evaluation Methods 0.000 description 6
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 6
- 239000000758 substrate Substances 0.000 description 5
- 229910052581 Si3N4 Inorganic materials 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 4
- 150000001875 compounds Chemical class 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 239000003822 epoxy resin Substances 0.000 description 3
- 238000013007 heat curing Methods 0.000 description 3
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 3
- 229920000647 polyepoxide Polymers 0.000 description 3
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 2
- 239000004838 Heat curing adhesive Substances 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 238000007599 discharging Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 239000000377 silicon dioxide Substances 0.000 description 2
- 229910052582 BN Inorganic materials 0.000 description 1
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 description 1
- 238000003848 UV Light-Curing Methods 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 1
- 238000001723 curing Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000020169 heat generation Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1607—Production of print heads with piezoelectric elements
- B41J2/1609—Production of print heads with piezoelectric elements of finger type, chamber walls consisting integrally of piezoelectric material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14201—Structure of print heads with piezoelectric elements
- B41J2/14209—Structure of print heads with piezoelectric elements of finger type, chamber walls consisting integrally of piezoelectric material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1623—Manufacturing processes bonding and adhesion
Definitions
- the present invention relates to an inkjet head manufacturing method and an inkjet head.
- an ink jet printer has an ink jet head in which a plurality of nozzles are arranged, and forms an image by controlling the timing at which ink is ejected in parallel from these nozzles.
- the ink jet head is provided with an ink flow path (channel) corresponding to each nozzle, and pressure is applied to the ink in the pressure chamber by a predetermined driving operation such as deforming at least a part of the ink flow path, and the ink is discharged from the nozzle. .
- a piezoelectric member such as lead zirconate titanate (PZT) is used to provide a plurality of grooves on a substrate (channel substrate) that can be deformed by applying a voltage.
- PZT lead zirconate titanate
- a cover member (lid member) and a base member (bottom member) of a non-piezoelectric member are laminated and bonded to the upper surface and the lower surface of the substrate, respectively, and a groove is covered to form an ink flow path.
- a thermosetting adhesive is often used for joining the cover member and the base member.
- the cost can be reduced by using a non-piezoelectric member for the cover member and the base member.
- Patent Document 1 a cover member provided with a rib is used, and a part of the rib is cut away to adjust a difference in temperature characteristics among the cover member, the channel member, and the base member, and warp. Techniques for suppression are disclosed.
- Patent Document 2 discloses a nozzle unit in which a plurality of nozzles bonded to one surface of a flow path member (channel substrate) of an inkjet head are arranged, and the other. A technique is described in which the actuator unit that is bonded to the surface and applies pressure to the ink in each flow path of the flow path member is bonded together at the same time, thereby securely bonding.
- an ink jet head in which a groove serving as an ink flow path is provided on one side and a cover member made of a different material is bonded only to the surface provided with the groove to a channel member not provided with a groove on the opposite side.
- a cover member made of a different material is bonded only to the surface provided with the groove to a channel member not provided with a groove on the opposite side.
- An object of the present invention is to provide an ink jet head manufacturing method and an ink jet head that can easily maintain high positional accuracy of the nozzle arrangement while suppressing an increase in cost.
- a method of manufacturing an inkjet head that ejects ink in an ink channel from a nozzle A channel that is formed of a single member and has a groove that forms an ink channel on one surface and the groove that is not formed on the opposite surface is provided on the one surface of the channel member via a first adhesive layer.
- a cover member composed of a single member having a linear expansion coefficient different from that of the member is laminated, and a single adhesive having a different linear expansion coefficient from that of the channel member is interposed on the opposite surface via a second adhesive layer.
- the invention according to claim 2 is the method of manufacturing an ink jet head according to claim 1, Both of the linear expansion coefficient of the cover member and the linear expansion coefficient of the first thermal deformation suppressing member are larger than the linear expansion coefficient of the channel member.
- the linear expansion coefficient of the cover member and the linear expansion coefficient of the first thermal deformation suppressing member are both smaller than the linear expansion coefficient of the channel member.
- the linear expansion coefficient of the first thermal deformation suppressing member is the same as the linear expansion coefficient of the cover member.
- the invention according to claim 5 is the method of manufacturing an ink-jet head according to any one of claims 1 to 4,
- the first thermal deformation suppressing member has the same shape as the cover member.
- the invention described in claim 6 is the method of manufacturing an ink-jet head according to any one of claims 1 to 5,
- the cover member is provided with a through hole that communicates with the ink channel and supplies ink to the ink channel.
- the first thermal deformation suppressing member is provided with a dummy through hole that does not communicate with the ink channel.
- the invention described in claim 7 is the method of manufacturing an ink jet head according to any one of claims 1 to 6, After the first laminating step, a nozzle forming member provided with the nozzle on one end surface where the ink channel is opened in the laminated body of the cover member, the channel member, and the first thermal deformation suppressing member is joined. It includes a nozzle joining step.
- the invention according to claim 8 is the method of manufacturing an ink jet head according to claim 7,
- the nozzle joining step includes a step of adhering the nozzle forming member to the laminate using an adhesive containing a thermosetting adhesive.
- the invention according to claim 9 is the method of manufacturing an ink jet head according to any one of claims 1 to 6,
- the nozzle is provided in the cover member.
- the invention according to claim 10 is the method for manufacturing an ink-jet head according to any one of claims 6 to 8, After the first joining step, The surface of the cover member opposite to the surface to be joined with the channel member is configured by a single member via a third adhesive layer, and the ink supplied from the outside is passed through the through hole. In addition to laminating an ink supply member in which a recess serving as an ink supply path to be supplied to the ink channel is formed, a fourth surface of the first thermal deformation suppressing member is opposite to the surface joined to the channel member.
- a second thermal deformation suppressing member that is formed of a single member having a linear expansion coefficient equal to that of the ink supply member and has a dummy concave portion that does not contribute to ink supply to the ink channel is laminated via an adhesive layer. Lamination process; The third adhesive layer and the fourth adhesive layer are simultaneously heated to be cured, and the cover member, the ink supply member, the first thermal deformation suppression member, and the second thermal deformation suppression member. And a second joining step for joining the two.
- An ink jet head that ejects ink in an ink channel from a nozzle, A channel member formed of a single member, in which a groove serving as an ink channel is formed on one surface and the groove is not formed on the opposite surface;
- the channel member is constituted by a single member having a different linear expansion coefficient, and is joined to the one surface of the channel member;
- the channel member is composed of a single member having a different linear expansion coefficient, and is joined to the opposite surface of the channel member to cause thermal deformation caused by a difference in linear expansion coefficient between the channel member and the cover member.
- a first thermal deformation suppressing member for suppressing, An inkjet head comprising:
- the invention according to claim 12 is the inkjet head according to claim 11, Both of the linear expansion coefficient of the cover member and the linear expansion coefficient of the first thermal deformation suppressing member are larger than the linear expansion coefficient of the channel member.
- the invention according to claim 13 is the ink jet head according to claim 11,
- the linear expansion coefficient of the cover member and the linear expansion coefficient of the first thermal deformation suppressing member are both smaller than the linear expansion coefficient of the channel member.
- the invention according to claim 14 is the ink jet head according to claim 12 or 13
- the linear expansion coefficient of the first thermal deformation suppressing member is the same as the linear expansion coefficient of the cover member.
- the invention according to claim 15 is the ink jet head according to any one of claims 11 to 14,
- the first thermal deformation suppressing member has the same shape as the cover member.
- the invention according to claim 16 is the ink jet head according to any one of claims 11 to 15,
- the cover member is provided with a through hole that communicates with the ink channel and supplies ink to the ink channel.
- the first thermal deformation suppressing member is provided with a dummy through hole that does not communicate with the ink channel.
- the invention according to claim 17 is the inkjet head according to any one of claims 11 to 16, A nozzle forming member provided with the nozzles is joined to one end face of the laminated body in which the channel member, the cover member, and the first thermal deformation suppressing member are joined. It is characterized by that.
- the invention according to claim 18 is the inkjet head according to claim 17,
- the nozzle forming member is characterized in that it is adhered to the laminate using an adhesive containing a thermosetting adhesive.
- the invention according to claim 19 is the ink jet head according to any one of claims 11 to 16,
- the nozzle is provided in the cover member.
- the invention according to claim 20 is the ink jet head according to any one of claims 16 to 18, wherein A surface formed of a single member and formed with a recess serving as an ink supply path for supplying ink supplied from the outside to the ink channel through the through hole, and a surface joined to the channel member of the cover member; Is an ink supply member joined to the opposite surface; A surface formed of a single member having a linear expansion coefficient equal to that of the ink supply member, formed with a dummy recess that does not contribute to ink supply to the ink channel, and is joined to the channel member of the first thermal deformation suppressing member A second thermal deformation suppressing member joined to the opposite surface, and It is characterized by having.
- FIG. 6 is a perspective view illustrating a structure of an inkjet head according to a first modification.
- FIG. 6 is a cross-sectional view illustrating a structure of an inkjet head according to Modification 1.
- FIG. It is a figure explaining the manufacturing method of the inkjet head of the modification 1.
- FIG. It is a figure explaining the manufacturing method of the inkjet head of the modification 1.
- FIG. It is a figure explaining the manufacturing method of the inkjet head of the modification 1.
- FIG. It is a figure explaining the manufacturing method of the inkjet head of the modification 1.
- FIG. It is a figure explaining the structure and manufacturing method of the inkjet head of the modification 2.
- First Embodiment 1A and 1B are diagrams illustrating the configuration of the inkjet head 100 according to the first embodiment.
- FIG. 1A is an exploded view showing the configuration of the inkjet head 100.
- FIG. 1B is a diagram illustrating a state where the above-described configuration of the inkjet head 100 is joined.
- the inkjet head 100 includes a plate-like channel member 10, a cover member 20, an auxiliary member 30 (first thermal deformation suppressing member), a nozzle plate 60 (nozzle forming member), and the like.
- the channel member 10 is a plate-like member having a length and a width that are larger than the thickness, and one surface of the channel member 10, that is, one side of the front and back of the plate surface. Are provided with a plurality of grooves 11 serving as ink channels in parallel.
- the channel member 10 provided with six grooves is shown as an example, but the channel member 10 has the necessary number of grooves (for example, 256), the ink discharge amount, and the discharge. According to speed, resolution, etc., the length (the short side direction of the plate surface) and the width (the long side direction of the plate surface), the depth (thickness direction) and width of each groove 11, the interval between adjacent grooves, etc.
- each groove 11 becomes a hole-shaped ink flow path 11a (pressure chamber).
- the channel member 10 is formed of a piezoelectric member (for example, lead zirconate titanate).
- electrodes are formed along both side walls of the ink flow path 11a, and the adjacent ink flow is formed.
- the shape of each ink flow path 11a can be deformed by applying a voltage between electrodes sandwiching the wall surface between the paths 11a.
- the auxiliary member 30 is joined to the surface of the channel member 10 opposite to the surface to which the cover member 20 is joined.
- the nozzle plate 60 is joined to one side surface of the laminate in which the cover member 20, the channel member 10, and the auxiliary member 30 are laminated.
- the cover member 20 is a ceramic substrate in the present embodiment, and is not particularly limited.
- the cover member 20 is, for example, zirconia (ZrO 2 ), silica / alumina compound (SiO 2 / Al 2 O 3 ), silicon nitride (Si 3 N 4 ).
- ZrO 2 zirconia
- SiO 2 / Al 2 O 3 silica / alumina compound
- Si 3 N 4 silicon nitride
- the nozzle plate 60 is made of, for example, silicon, and is bonded to one of the side surfaces of the laminated body provided with the open end of the ink flow path 11a.
- the nozzle plate 60 is provided with nozzle openings 61 corresponding to the opening positions of the plurality of ink flow paths 11a arranged in the width direction. That is, the plurality of nozzle openings 61 are arranged in the width direction (longitudinal direction) of the inkjet head 100.
- ink is supplied to each ink flow path 11a from the other open end to which the nozzle plate 60 is not joined, and is compressed and pressurized as the ink flow path 11a (pressure chamber) is deformed. Then, it is discharged from the nozzle opening 61 to the outside.
- auxiliary member 30 in the inkjet head 100 of this embodiment, one material is selected and used according to the following criteria. That is, when the linear expansion coefficient of the cover member 20 is larger than the linear expansion coefficient of the channel member 10, a material having a larger linear expansion coefficient than the channel member 10 is selected for the auxiliary member 30. When the expansion coefficient is smaller than the linear expansion coefficient of the channel member 10, a material having a smaller linear expansion coefficient than the channel member 10 is selected for the auxiliary member 30.
- the material can be further selected so that the linear expansion coefficient of the auxiliary member 30 is substantially the same as the linear expansion coefficient of the cover member 20. Furthermore, the material of the auxiliary member 30 can be the same as the material of the cover member 20.
- the auxiliary member 30 has the same shape as the cover member 20.
- the auxiliary member 30 does not contribute to wiring for voltage supply or the like, deformation of the pressure chamber, or formation of an ink flow path or supply of ink in the inkjet head 100, but linear expansion of the channel member 10 and the cover member 20. It functions as a thermal deformation suppressing member that suppresses warpage caused by a difference in rate.
- 2A to 2D are views for explaining a method of manufacturing the inkjet head 100 according to the first embodiment.
- the channel member 10, the cover member 20, and the auxiliary member 30 in which the grooves 11 are formed are prepared, and the joint surface between the cover member 20 and the channel member 10 at room temperature.
- the adhesive 15 (first adhesive layer) is applied to the adhesive member, and the adhesive 25 (second adhesive layer) is applied to the joint surface between the channel member 10 and the auxiliary member 30 (Step 1, FIG. 2A).
- the adhesives 15 and 25 used in the manufacture of the inkjet head 100 of the present embodiment are both heat curable adhesives.
- stacked these in order of the auxiliary member 30, the channel member 10, and the cover member 20 is formed (process 2, FIG. 2B).
- the laminate is integrally heated to simultaneously cure the adhesives 15 and 25, and the auxiliary member 30 and the cover member 20 are bonded to the channel member 10 by the adhesive layers 15a and 25a (step 3, FIG. 2C). ).
- the adhesive 35 is applied at normal temperature to the side surface of the laminate to which each member is bonded and the bonding surface of the nozzle plate 60, contact is made while aligning the opening of the ink flow path 11a and the nozzle opening 61.
- the adhesive 35 used in the manufacture of the ink jet head 100 of the present embodiment is also a heat curable adhesive.
- the laminate and the nozzle plate 60 are heated to cure the adhesive 35, whereby the nozzle plate 60 is joined to the laminate via the adhesive layer 35a (step 4, FIG.
- the inkjet head 100 is formed.
- the first lamination step is constituted by (Step 1) and (Step 2)
- the first joining step is constituted by (Step 3).
- the nozzle joining step is configured by (Step 4).
- the groove 11 is provided on one surface, and the groove 11 is not provided on the surface opposite to this surface.
- On the surface opposite to the surface to which the cover member 20 that forms the ink flow path 11a (pressure chamber) is bonded is formed, auxiliary that does not contribute to the deformation of the wiring, the pressure chamber, the formation of the ink flow path, and the supply of ink.
- the member 30 is joined and functions as a thermal deformation suppressing member. That is, since the large warp generated by joining only the cover member 20 and the channel member 10 is suppressed by the auxiliary member 30 provided on the opposite side, the ink jet head 100 can be used even when there is a temperature change when the ink jet head 100 is used. As a whole, it is possible to obtain a nozzle array with low warpage and high accuracy.
- the nozzle plate 60 is heated and bonded to the side surface of the laminated body using a thermosetting adhesive, the warpage of the entire laminated body is suppressed, and in the finally manufactured inkjet head 100, it is possible to prevent the nozzle plate 60 from being distorted and the accuracy of the nozzle arrangement from being lowered.
- the cover member 20, the channel member 10, and the auxiliary member 30 are laminated at room temperature with the adhesives 15 and 25 sandwiched therebetween and then heated and bonded at the same time, a large warp is not generated even when the laminate is joined.
- the auxiliary member 30 is selected so that the magnitude relationship between the linear expansion coefficients of the cover member 20 and the channel member 10 and the magnitude relation between the linear expansion coefficients of the auxiliary member 30 and the channel member 10 are the same. Since one member is used, when the thermosetting adhesive is heat-cured, the direction of warpage caused by the magnitude relationship of the linear expansion coefficient with the channel member 10 is symmetric with respect to the channel member 10, and the warp as a whole. Can be offset.
- an inexpensive member can be appropriately selected and used for each of the cover member 20 and the auxiliary member 30.
- the linear expansion coefficient of the channel member 10 may be larger or smaller than the linear expansion coefficients of the cover member 20 and the auxiliary member 30, but the strength of the adhesive, the size of the cover member 20 and the auxiliary member 30, the Young By determining that durability can be expected to be high based on the rate or the like, it is possible to cope with high-precision use over a long period of time.
- the warpage characteristics can be made substantially the same, so that the warpage of the joined laminated body as a whole can be further reduced.
- [Modification 1] 3A and 3B show the structure of the inkjet head 100a of the first modification.
- the inkjet head 100a of the first modification is the same as the inkjet head 100 of the first embodiment except for the shape of the cover member 20a and the presence or absence of the ink supply port 21a, and detailed description of the same parts is omitted.
- FIG. 3A shows a diagram in which the components of the inkjet head 100a are joined.
- the cover member 20a constituting the inkjet head 100a has a shape that is different in length (length in the ink flow path direction in the channel member 10) from the auxiliary member 30 and the channel member 10.
- the cover member 20a is provided with an ink supply port 21a (through hole).
- FIG. 3B shows a cross-sectional view taken along a cross-section AA including one ink flow path 11a in FIG. 3A.
- the ink supply member 40 (manifold) is also displayed so that the ink flow can be easily understood.
- the ink supply member 40 is composed of, for example, a single member such as resin, and is bonded to a surface of the cover member 20a opposite to the surface bonded to the channel member 10.
- ink is supplied from the ink chamber recess 41 provided in the ink supply member 40 and serving as an ink supply path to each ink flow path 11 a via the ink supply port 21 a and from the nozzle opening 61. It is discharged outside.
- FIG. 4A to 4D show a method for manufacturing the inkjet head 100a of the first modification.
- uncured adhesives 15 and 25 are applied to the joint surfaces of the cover member 20a, the channel member 10 and the auxiliary member 30, respectively (FIG. 4A), and are laminated in order to form a laminate.
- FIG. 4B the whole is heated together, and the cover member 20a and the auxiliary member 30 are simultaneously bonded to the channel member 10 through the adhesive layers 15a and 25a in which the adhesives 15 and 25 are cured.
- the cover member 20a and the auxiliary member 30 having different sizes are used.
- the ink jet head there may be a case where it is not always possible to make a symmetrical shape from the aspect of size, function, or design, such as a problem in arrangement of the ink supply member 40.
- warpage as a whole can be reduced.
- the overall warpage can be suppressed more efficiently, and an ink jet head having a highly accurate nozzle arrangement can be obtained. I can do it.
- [Modification 2] 5A to 5D show a configuration and a manufacturing method of the inkjet head 100b according to the second modification.
- the cover member 20b and the auxiliary member 30b are different in size from the channel member 10, and each has a plurality of through holes (through holes). Except for this, it is the same as the inkjet head 100a of the first modification.
- symbol is attached
- the cover member 20b is provided with ink supply ports 21b for individually supplying ink corresponding to the grooves 11 of the channel member 10, respectively.
- the auxiliary member 30b is also provided with a through hole 31b.
- the number, arrangement, and shape of the through holes 31b are not particularly limited, but the ink supply port provided in the cover member 20b when the temperature of the ink jet head 100b changes in a form that is provided symmetrically with respect to the channel member 10. It is more desirable to be able to effectively cancel the influence of warpage due to 21b.
- the through holes 31b are respectively provided at the same positions as the positions of the ink supply ports 21b in the cover member 20b in the auxiliary member 30b having the same shape as the cover member 20b.
- the adhesives 15 and 25 are applied to the joining surfaces of the cover member 20b and the auxiliary member 30b and the channel member 10 at room temperature (FIG. 5A). Subsequently, the laminated body which laminated
- the inkjet head 100b is formed by the above procedure.
- ink is supplied from the ink supply member 40 (not shown) provided outside the cover member 20b to each ink flow path 11a only through the ink supply port 21b. Supplied and discharged from the nozzle plate 60.
- the through-hole 31b provided in the auxiliary member 30b is a dummy through-hole that is sealed by the bottom surface of the channel member 10 so as not to communicate with the ink flow path 11a and does not contribute to ink supply.
- the dummy through hole 31b that does not contribute to the ink supply is formed in the auxiliary member 30b, and the expansion and contraction characteristics when heated in the cover member 20b and the auxiliary member 30b are substantially the same. Therefore, it is possible to further suppress warping of the laminate when the inkjet head 100b is heated. Accordingly, it is possible to arrange the nozzle rows with high accuracy when the nozzle plate 60 is bonded or when the inkjet head 100b is operated.
- [Modification 3] 6A to 6D show a configuration and a manufacturing method of the inkjet head 100c according to the third modification.
- the shape of the groove 11 provided in the channel member 10 of the inkjet head 100a according to the first modification is changed, and the size of the auxiliary member 30 is matched with the cover member 20a.
- a dummy member 50 (second thermal deformation suppressing member) is provided.
- the inkjet head 100a of the modification 1 and the inkjet head 100c of the modification 3 are the same, attach
- the groove 11c is opened only on one side surface of the plate-like channel member 10c, and the ink path 11d formed by the upper surface of the groove 11c being blocked by the cover member 20a. (See the cross-sectional view of FIG. 6B) and the ink supply port 21a communicate with each other.
- a dummy member 50 is further joined to the surface of the auxiliary member 30c opposite to the joint surface with the channel member 10c.
- the dummy member 50 is provided with a recess 51 (dummy recess), and the recess 51 is disposed facing the channel member 10c.
- the dummy member 50 is for canceling the deformation characteristics associated with the temperature change of the ink supply member 40, and the recess 51 does not contribute to the supply of ink to each part.
- the dummy member 50 is not particularly limited, in the third modification, the ink supply member 40 has the same size and material and is symmetrical with respect to the channel member 10c. That is, the shape of the recess 51 is not particularly limited. In the third modification, the recess 51 is formed in the same shape and size as the ink chamber recess 41.
- the ink jet head 100c of the third modification is manufactured as follows. That is, as shown in FIG. 6C, the cover member 20a, the channel member 10c, the auxiliary member 30c, and the nozzle plate 60 that have been joined in the same procedure as in Modification 1 are bonded to the joint surface with the ink supply member 40.
- the agent 45 third adhesive layer
- the adhesive 55 fourth adhesive layer
- the adhesives 45 and 55 as the adhesives 45 and 55, a thermosetting adhesive is used. Then, these members are laminated so that the ink chamber recess 41 and the recess 51 face the bonding surface.
- step 6 the ink supply member 40 and the dummy member 50 are joined through the adhesive layers 45a and 55a in which the whole is integrally heated and the adhesives 45 and 55 are simultaneously heat-cured, whereby the ink jet head shown in FIG. 6D. 100c is formed (step 6).
- Step 5 described above constitutes the second lamination step, and step 6 constitutes the second joining step.
- the inkjet head 100c according to the modified example 3 includes the dummy member 50 that cancels the warp of the ink supply member 40 together with the auxiliary member 30c that cancels the warp of the cover member 20a.
- the position of the nozzle array can be maintained with high accuracy, and warpage occurring during use of the inkjet head 100c can be suppressed to a low level.
- FIG. 7A and 7B are views for explaining the configuration and the manufacturing method of the inkjet head 100d of the second embodiment.
- the inkjet head 100d of the second embodiment is provided with a nozzle opening 21d (nozzle) for discharging ink in the cover member 20d corresponding to the position of the groove 11 of the channel member 10.
- nozzle nozzle
- the inkjet head 100d ink is ejected in a direction perpendicular to the direction in which the ink flow paths 11a extend, and the nozzle plate 60 is not provided on the side surface of the stacked body.
- Other configurations are the same as those of the inkjet head 100 of the first embodiment, and the same reference numerals are given and detailed description thereof is omitted.
- the cover member 20d, the channel member 10, and the auxiliary member 30 are laminated with the adhesives 15 and 25 sandwiched at room temperature to form a laminate. To do. Then, the cover member 20d and the auxiliary member 30 are joined to the channel member 10 through the adhesive layers 15a and 25a in which the adhesives 15 and 25 are simultaneously cured by heating, as shown in FIG. 7C. Note that one end of the ink flow path 11a opened on the side surface of the formed and joined laminate is joined to an ink supply member (not shown) to serve as an ink supply port, and the other is sealed.
- the nozzle opening 21d is provided in the cover member 20d, and the channel member 10 to which the cover member 20d is joined is provided on the surface opposite to the joining surface.
- the auxiliary member 30 is joined, and the cover member 20d is within a range in which the linear expansion coefficient magnitude relationship is determined so that the direction of warpage of the cover member 20d and the direction of warpage of the auxiliary member 30 are symmetrical with respect to the channel member 10. Since the material of the auxiliary member 30 is selected, even if the temperature rises during the operation of the inkjet head 100d, it is possible to prevent the cover member 20d from being greatly warped, and to maintain a highly accurate nozzle arrangement. I can do it.
- the cover member 20d and the auxiliary member 30 are simultaneously bonded to the channel member 10 by the thermosetting adhesives 15 and 25, the overall accuracy of the ink jet head 100d is small and less warped. A nozzle array can be obtained.
- the present invention is not limited to the above-described embodiment, and various modifications can be made.
- the shape and material of the cover member 20 and the auxiliary member 30 are made equal to suppress warpage due to symmetry, but the channel member 10 itself is on one surface of the plate surface.
- the shapes and materials of the cover member 20 and the auxiliary member 30 may be finely adjusted so as to complement this influence.
- the magnitude relationship between the linear expansion coefficient of the cover member 20 and the linear expansion coefficient of the channel member 10 is equal to the magnitude relation between the linear expansion coefficient of the auxiliary member 30 and the linear expansion coefficient of the channel member 10.
- the selection of the member that can function as the auxiliary member 30 is not limited to this criterion. For example, by using a member that has a small difference from the linear expansion coefficient of the channel member 10 as the auxiliary member 30 and that has a large Young's modulus and is difficult to bend, the warpage caused by the difference in the linear expansion coefficient between the member and the channel member 10 is achieved. To a parameter other than the linear expansion coefficient such that the warpage is not increased as a whole by increasing the force against the warping force caused by the difference in linear expansion coefficient between the cover member 20 and the channel member 10. Selection of the material based on is possible.
- the adhesives 15 and 25 have been described on the premise that they are cured at the same temperature when they are cured by heating.
- the heating temperature of each adhesive may be different.
- the adhesives 15 and 25 are heated and cured.
- the temperature of the channel member 10 may be controlled to be lower than the temperature of the auxiliary member 30 and the temperature of the cover member 20 may be lower than the temperature of the channel member 10 so as not to cause a large warp.
- the adhesive 15 when heat-curing 25, the temperature of the channel member 10 is controlled to be lower than the temperature of the cover member 20, and the temperature of the auxiliary member 30 is controlled to be lower than the temperature of the channel member 10. You can prevent it from getting.
- production of the curvature at the time of manufacture of the inkjet head 100 can be suppressed as a whole, and the breadth of the material selection of the cover member 20 and the auxiliary member 30 can further be expanded.
- Different adhesives 15 and 25 may be selected in accordance with such different thermosetting temperatures. Similarly, for the adhesives 35 and 45, the heating temperature may be varied or a different adhesive may be selected.
- each member is joined using a thermosetting adhesive, but other adhesives may be used. Even when an adhesive that can be bonded at room temperature is used, it is possible to suppress warping according to heat generation (temperature rise) during use of the inkjet head 100 and to maintain a highly accurate arrangement of nozzle rows. Even in the case of bonding by heat curing, the adhesive is not limited to heat curing adhesives, but may be mixed with other types of adhesives, for example, UV curing adhesives. good.
- the grooves 11 and the nozzle openings 61 are provided so that the nozzle rows are arranged in the longitudinal direction of the channel member 10 that is a plate-like member.
- the arrangement is not limited thereto.
- the arrangement of these components can be set as appropriate as long as a configuration that contributes to ink supply such as a groove or a hole is not provided on the surface opposite to the surface on which the groove 11 is provided.
- a plurality of nozzles are arranged in one nozzle plate 60.
- the accuracy of the nozzle arrangement position can be maintained and improved.
- the electrode was arrange
- positioning of an electrode is not restricted to this.
- the shape provided between the side wall between the pressure chambers and the cover member may be used.
- details such as the specific configuration, shape, arrangement, numerical value, and material shown in the above embodiment can be changed as appropriate without departing from the spirit of the present invention.
- Example 1 As the channel member of the inkjet head, plate-like lead zirconate titanate (PZT) having a thickness of 0.9 mm, a width of 42 mm, and a length of 17 mm was used. In the channel member, 256 grooves having a depth of 310 ⁇ m and a width of 80 ⁇ m are formed in parallel with an interval (pitch) between the center lines of the grooves being 141 ⁇ m.
- the linear expansion coefficient of PZT [ ⁇ m ⁇ m ⁇ 1 ⁇ K ⁇ 1 ], hereinafter referred to as [ppmK ⁇ 1 ]) is 6.7 [ppmK ⁇ 1 ] based on 20 ° C.
- silicon nitride having a thickness of 0.8 mm, a width of 42 mm, and a length of 12 mm (linear expansion coefficient is 2.6 [ppmK ⁇ 1 ] based on 20 ° C.)
- auxiliary member thermal deformation suppressing member
- AlN / BN whose linear expansion coefficient is 4.4 [ppmK ⁇ 1 ] based on 20 ° C.
- the auxiliary member, the channel member, and the cover member were laminated in the order of normal temperature (20 ° C.) with the epoxy resin layers sandwiched therebetween, and then integrally heated to cure and bond both epoxy resin layers at the same temperature. Then, a silicon nozzle plate having a thickness of 0.2 mm, a width of 42 mm, and a length of 2.5 mm is brought into contact with the side surface of the laminate, and the epoxy resin is cured by heating again to be bonded. Thus, the ink jet head of Example 1 was produced.
- Example 2 In the production of the inkjet head of Example 1, zirconia (linear expansion coefficient is 10.5 [ppm K ⁇ 1 ]) is used as the cover member, and silica / alumina compound (SiO 2 / Al 2 O 3 , linear expansion coefficient is used as the auxiliary member.
- silica / alumina compound SiO 2 / Al 2 O 3 , linear expansion coefficient is used as the auxiliary member.
- 8.5 [ppmK ⁇ 1 ] was used.
- Example 3 In the production of the ink jet head of Example 1, the same ink jet head of Example 3 was produced except that AlN / BN was used as both the cover member and the auxiliary member.
- Comparative Example 1 In the production of the inkjet head of Example 1, silicon nitride was used for the cover member, and the inkjet head of Comparative Example 1 was produced without providing an auxiliary member used as a thermal deformation suppressing member.
- Comparative Example 2 In the production of the inkjet head of Comparative Example 1, the inkjet head of Comparative Example 2 was produced in the same manner except that zirconia was used for the cover member.
- Comparative Example 4 In the production of the inkjet head of Comparative Example 3, the same inkjet head of Comparative Example 4 was produced except that silicon nitride was used as the cover member and zirconia was used as the auxiliary member.
- the evaluation values of the straightness of the nozzle row are 16 ⁇ m and 20 ⁇ m, respectively, and the linear expansion of the channel member and the cover member. It shows the value regardless of the magnitude relationship of the rate.
- the auxiliary member thermal deformation suppressing member
- the linear expansion coefficients of the cover member and the auxiliary member are both larger or smaller than the linear expansion coefficient of the channel member.
- the present invention can be used for an ink jet head manufacturing method for discharging ink and an ink jet head.
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Abstract
Description
インクチャンネル内のインクをノズルから吐出するインクジェットヘッドの製造方法であって、
単一部材により構成され、一面にインクチャンネルとなる溝が形成されその反対側の面に前記溝が形成されていない形状のチャンネル部材の前記一面に、第一の接着剤層を介し、当該チャンネル部材とは線膨張率の異なる単一部材により構成されるカバー部材を積層すると共に、前記反対側の面に、第二の接着剤層を介し、前記チャンネル部材とは線膨張率の異なる単一部材により構成され、前記チャンネル部材と前記カバー部材との線膨張率の違いにより発生する熱変形を抑制する第一熱変形抑制部材を積層する第一積層工程と、
前記第一の接着剤層と前記第二の接着剤層とを同時に加熱して硬化させ、前記カバー部材、前記チャンネル部材、及び、前記第一熱変形抑制部材を接合する第一接合工程と
を含むことを特徴とするインクジェットヘッドの製造方法である。
前記カバー部材の線膨張率及び前記第一熱変形抑制部材の線膨張率は、何れも前記チャンネル部材の線膨張率よりも大きいことを特徴としている。
前記カバー部材の線膨張率及び前記第一熱変形抑制部材の線膨張率は、何れも前記チャンネル部材の線膨張率よりも小さいことを特徴としている。
前記第一熱変形抑制部材の線膨張率は、前記カバー部材の線膨張率と同一であることを特徴としている。
前記第一熱変形抑制部材は、前記カバー部材と同一形状であることを特徴としている。
前記カバー部材には、前記インクチャンネルに連通し、前記インクチャンネルにインクを供給する貫通孔が設けられ、
前記第一熱変形抑制部材には、前記インクチャンネルに連通しないダミーの貫通孔が設けられている
ことを特徴としている。
前記第一積層工程の後に、前記カバー部材と前記チャンネル部材と前記第一熱変形抑制部材との積層体において前記インクチャンネルが開放されている一端面に前記ノズルが設けられたノズル形成部材を接合するノズル接合工程を含むことを特徴としている。
前記ノズル接合工程は、加熱硬化型接着剤を含む接着剤を用いて前記ノズル形成部材を前記積層体に接着する工程を含むことを特徴としている。
前記ノズルは、前記カバー部材に設けられていることを特徴としている。
前記第一接合工程の後に、
前記カバー部材の前記チャンネル部材と接合される面とは反対側の面に、第三の接着剤層を介し、単一部材により構成され、外部から供給されたインクを前記貫通孔を介して前記インクチャンネルに供給するインク供給路となる凹部が形成されたインク供給部材を積層すると共に、前記第一熱変形抑制部材の前記チャンネル部材と接合される面とは反対側の面に、第四の接着剤層を介し、前記インク供給部材と線膨張率の等しい単一部材により構成され、前記インクチャンネルへのインク供給に寄与しないダミー凹部が形成された第二熱変形抑制部材を積層する第二積層工程と、
前記第三の接着剤層と前記第四の接着剤層とを同時に加熱して硬化させ、前記カバー部材と前記インク供給部材、及び、前記第一熱変形抑制部材と前記第二熱変形抑制部材をそれぞれ接合する第二接合工程と
を含むことを特徴としている。
インクチャンネル内のインクをノズルから吐出するインクジェットヘッドであって、
単一部材により構成され、一面にインクチャンネルとなる溝が形成されその反対側の面に前記溝が形成されていない形状のチャンネル部材と、
当該チャンネル部材とは線膨張率の異なる単一部材により構成され、前記チャンネル部材の前記一面に接合されたカバー部材と、
前記チャンネル部材とは線膨張率の異なる単一部材により構成され、前記チャンネル部材の前記反対側の面に接合されて前記チャンネル部材と前記カバー部材との線膨張率の違いにより発生する熱変形を抑制する第一熱変形抑制部材と、
を備えることを特徴とするインクジェットヘッドである。
前記カバー部材の線膨張率及び前記第一熱変形抑制部材の線膨張率は、何れも前記チャンネル部材の線膨張率よりも大きいことを特徴としている。
前記カバー部材の線膨張率及び前記第一熱変形抑制部材の線膨張率は、何れも前記チャンネル部材の線膨張率よりも小さいことを特徴としている。
前記第一熱変形抑制部材の線膨張率は、前記カバー部材の線膨張率と同一であることを特徴としている。
前記第一熱変形抑制部材は、前記カバー部材と同一形状であることを特徴としている。
前記カバー部材には、前記インクチャンネルに連通し、前記インクチャンネルにインクを供給する貫通孔が設けられ、
前記第一熱変形抑制部材には、前記インクチャンネルに連通しないダミーの貫通孔が設けられている
ことを特徴としている。
前記チャンネル部材、前記カバー部材、及び、前記第一熱変形抑制部材が接合された積層体において前記インクチャンネルが開放されている一端面に、前記ノズルが設けられたノズル形成部材が接合されていることを特徴としている。
前記ノズル形成部材は、加熱硬化型接着剤を含む接着剤を用いて前記積層体に接着されていることを特徴としている。
前記ノズルは、前記カバー部材に設けられていることを特徴としている。
単一部材により構成され、外部から供給されたインクを前記貫通孔を介して前記インクチャンネルに供給するインク供給路となる凹部が形成されて、前記カバー部材の前記チャンネル部材と接合される面とは反対側の面に接合されたインク供給部材と、
当該インク供給部材と線膨張率の等しい単一部材により構成され、前記インクチャンネルへのインク供給に寄与しないダミー凹部が形成されて、前記第一熱変形抑制部材の前記チャンネル部材と接合される面とは反対側の面に接合された第二熱変形抑制部材と、
を備えることを特徴としている。
[第1実施形態]
図1A、図1Bは、第1実施形態のインクジェットヘッド100の構成を示す図である。
図2A~図2Dは第1実施形態のインクジェットヘッド100の製造方法について説明する図である。
以上の各製造工程のうち、(工程1)、(工程2)により第一積層工程が構成され、(工程3)により第一接合工程が構成される。また、(工程4)によりノズル接合工程が構成される。
[変形例1]
図3A、図3Bには、変形例1のインクジェットヘッド100aの構造を示す。
先ず、常温で、これらのカバー部材20a、チャンネル部材10、及び、補助部材30の接合面にそれぞれ未硬化の接着剤15、25を塗布し(図4A)、順番に積層して積層体を形成する(図4B)。次いで、全体をまとめて加熱して、接着剤15、25を硬化させた接着層15a、25aを介してチャンネル部材10にカバー部材20a及び補助部材30を同時に接着する。そして、この積層体の側面のうち、インク流路11aが開放されている一端面に接着剤35を塗布した後(図4C)、インク流路11aの位置とノズル開口部61の位置とを合わせながらノズルプレート60を貼り合わせ、接着剤35を加熱硬化させることで、接着層35aを介して積層体とノズルプレート60とを接合する(図4D)。
図5A~図5Dには、変形例2のインクジェットヘッド100bの構成と製造方法を示す。
図6A~図6Dには、変形例3のインクジェットヘッド100cの構成及び製造方法を示す。
即ち、図6Cに示すように、変形例1と同様の手順で接合済みのカバー部材20a、チャンネル部材10c、補助部材30c、及び、ノズルプレート60に対し、インク供給部材40との接合面に接着剤45(第三の接着剤層)を塗布し、また、ダミー部材50との接合面に接着剤55(第四の接着剤層)を塗布する(工程5)。ここで、本変形例3のインクジェットヘッド100cにおいて、接着剤45、55には、加熱硬化型接着剤が用いられる。それから、インク室用凹部41及び凹部51が接合面側に向くようにこれらの各部材を積層する。その後、全体を一体的に加熱し、接着剤45、55を同時に加熱硬化させた接着層45a、55aを介してインク供給部材40及びダミー部材50が接合されることで、図6Dに示すインクジェットヘッド100cが形成される(工程6)。
上述の工程5が第二積層工程を構成し、工程6が第二接合工程を構成する。
次に、第2実施形態のインクジェットヘッド100dについて説明する。
第2実施形態のインクジェットヘッド100dは、図7Aの分解図に示すように、チャンネル部材10の溝11の位置に対応してカバー部材20dにインク吐出用のノズル開口部21d(ノズル)が設けられており、ノズルプレートとして機能する。即ち、このインクジェットヘッド100dでは、インクは、インク流路11aがそれぞれ延びている方向に対して垂直方向に吐出され、積層体の側面部にノズルプレート60が設けられない。その他の構成は、第1実施形態のインクジェットヘッド100と同一であり、同一の符号を付して詳しい説明を省略する。
インクジェットヘッド100dの製造においては、図7Bに示すように、先ず、カバー部材20d、チャンネル部材10、及び、補助部材30を、常温でそれぞれ接着剤15、25を挟んで積層し、積層体を形成する。そして、加熱により接着剤15、25を同時に硬化させた接着層15a、25aを介し、図7Cに示すように、カバー部材20d及び補助部材30をチャンネル部材10に接合させる。なお、形成、接合された積層体の側面で開放されているインク流路11aの一端は、図示略のインク供給部材に接合されてインクの供給口となり、他方は封鎖される。
例えば、上記実施の形態では、カバー部材20と補助部材30の形状や材質を等しくして対称性により反りを抑える例を挙げたが、更に、チャンネル部材10自体がその板面の片方の面にのみ溝11が設けられた非対称な形状となっている点を考慮して、この影響を補完するようにカバー部材20と補助部材30の形状や材質を微調整しても良い。
その他、上記実施の形態で示した具体的な構成、形状、配置、数値、材質などの細部は、本発明の趣旨を逸脱しない範囲において、適宜変更可能である。
(実施例1)
インクジェットヘッドのチャンネル部材としては、厚さ0.9mm、幅42mm、長さ17mmの板状のチタン酸ジルコン酸鉛(PZT)を用いた。チャンネル部材には、深さ310μm、幅80μmの溝が、溝の中心線同士の間隔(ピッチ)を141μmとして平行に256本形成されている。PZTの線膨張率([μm・m-1・K-1]、以下、[ppmK-1]と記す)は、20℃を基準として6.7[ppmK-1]である。
実施例1のインクジェットヘッドの作製において、カバー部材としてジルコニア(線膨張率は10.5[ppmK-1])を用い、補助部材としてシリカ/アルミナ化合物(SiO2/Al2O3、線膨張率は8.5[ppmK-1])を用いた他は同様の実施例2のインクジェットヘッドを作製した。
実施例1のインクジェットヘッドの作製において、カバー部材及び補助部材として、何れもAlN/BNを用いた他は同様の実施例3のインクジェットヘッドを作製した。
実施例1のインクジェットヘッドの作製において、カバー部材に窒化ケイ素を用いると共に、熱変形抑制部材として用いる補助部材を設けずに比較例1のインクジェットヘッドを作製した。
比較例1のインクジェットヘッドの作製において、カバー部材にジルコニアを用いた他は同様である比較例2のインクジェットヘッドを作製した。
実施例1のインクジェットヘッドの作製において、カバー部材にジルコニアを用い、補助部材(材質はAlN/BN)を同位置に接着させて比較例3のインクジェットヘッドを作製した。
比較例3のインクジェットヘッドの作製において、カバー部材に窒化ケイ素を用い、補助部材としてジルコニアを用いた他は同様の比較例4のインクジェットヘッドを作製した。
上記のように作製した実施例1~3、比較例1~4のインクジェットヘッドについて、下記の方法に従って評価した。
ノズルプレートに設けられた256個のノズル開口部に係るノズル列の厚さ方向の位置の最大ずれ幅Δh(図8)を計測した。評価結果を図9に示す。
従って、チャンネル部材の一の面にしか溝が設けられておらず、片面にしかカバー部材が必要ではない場合でも、チャンネル部材の線膨張率との大小関係がカバー部材のものと同一の熱変形抑制部材を選択し、この熱変形抑制部材をカバー部材と反対側の面に、カバー部材と同時に接着することで、ノズル列直進性が改善されるといえる。
10c チャンネル部材
11 溝
11a インク流路(圧力室)
11c 溝
11d インク経路
15 接着剤
15a 接着層
20 カバー部材
20a カバー部材
20b カバー部材
20d カバー部材
21a インク供給口
21b インク供給口
21d ノズル開口部
25 接着剤
25a 接着層
30 補助部材
30b 補助部材
30c 補助部材
31b 貫通穴
35 接着剤
35a 接着層
40 インク供給部材
41 インク室用凹部
45 接着剤
45a 接着層
50 ダミー部材
51 凹部
55 接着剤
55a 接着層
60 ノズルプレート
61 ノズル開口部
100 インクジェットヘッド
100a インクジェットヘッド
100b インクジェットヘッド
100c インクジェットヘッド
100d インクジェットヘッド
Claims (20)
- インクチャンネル内のインクをノズルから吐出するインクジェットヘッドの製造方法であって、
単一部材により構成され、一面にインクチャンネルとなる溝が形成されその反対側の面に前記溝が形成されていない形状のチャンネル部材の前記一面に、第一の接着剤層を介し、当該チャンネル部材とは線膨張率の異なる単一部材により構成されるカバー部材を積層すると共に、前記反対側の面に、第二の接着剤層を介し、前記チャンネル部材とは線膨張率の異なる単一部材により構成され、前記チャンネル部材と前記カバー部材との線膨張率の違いにより発生する熱変形を抑制する第一熱変形抑制部材を積層する第一積層工程と、
前記第一の接着剤層と前記第二の接着剤層とを同時に加熱して硬化させ、前記カバー部材、前記チャンネル部材、及び、前記第一熱変形抑制部材を接合する第一接合工程と
を含むことを特徴とするインクジェットヘッドの製造方法。 - 前記カバー部材の線膨張率及び前記第一熱変形抑制部材の線膨張率は、何れも前記チャンネル部材の線膨張率よりも大きいことを特徴とする請求項1記載のインクジェットヘッドの製造方法。
- 前記カバー部材の線膨張率及び前記第一熱変形抑制部材の線膨張率は、何れも前記チャンネル部材の線膨張率よりも小さいことを特徴とする請求項1記載のインクジェットヘッドの製造方法。
- 前記第一熱変形抑制部材の線膨張率は、前記カバー部材の線膨張率と同一であることを特徴とする請求項2又は3記載のインクジェットヘッドの製造方法。
- 前記第一熱変形抑制部材は、前記カバー部材と同一形状であることを特徴とする請求項1~4の何れか一項に記載のインクジェットヘッドの製造方法。
- 前記カバー部材には、前記インクチャンネルに連通し、前記インクチャンネルにインクを供給する貫通孔が設けられ、
前記第一熱変形抑制部材には、前記インクチャンネルに連通しないダミーの貫通孔が設けられている
ことを特徴とする請求項1~5の何れか一項に記載のインクジェットヘッドの製造方法。 - 前記第一積層工程の後に、前記カバー部材と前記チャンネル部材と前記第一熱変形抑制部材との積層体において前記インクチャンネルが開放されている一端面に前記ノズルが設けられたノズル形成部材を接合するノズル接合工程を含むことを特徴とする請求項1~6の何れか一項に記載のインクジェットヘッドの製造方法。
- 前記ノズル接合工程は、加熱硬化型接着剤を含む接着剤を用いて前記ノズル形成部材を前記積層体に接着する工程を含むことを特徴とする請求項7記載のインクジェットヘッドの製造方法。
- 前記ノズルは、前記カバー部材に設けられていることを特徴とする請求項1~6の何れか一項に記載のインクジェットヘッドの製造方法。
- 前記第一接合工程の後に、
前記カバー部材の前記チャンネル部材と接合される面とは反対側の面に、第三の接着剤層を介し、単一部材により構成され、外部から供給されたインクを前記貫通孔を介して前記インクチャンネルに供給するインク供給路となる凹部が形成されたインク供給部材を積層すると共に、前記第一熱変形抑制部材の前記チャンネル部材と接合される面とは反対側の面に、第四の接着剤層を介し、前記インク供給部材と線膨張率の等しい単一部材により構成され、前記インクチャンネルへのインク供給に寄与しないダミー凹部が形成された第二熱変形抑制部材を積層する第二積層工程と、
前記第三の接着剤層と前記第四の接着剤層とを同時に加熱して硬化させ、前記カバー部材と前記インク供給部材、及び、前記第一熱変形抑制部材と前記第二熱変形抑制部材をそれぞれ接合する第二接合工程と
を含むことを特徴とする請求項6~8の何れか一項に記載のインクジェットヘッドの製造方法。 - インクチャンネル内のインクをノズルから吐出するインクジェットヘッドであって、
単一部材により構成され、一面にインクチャンネルとなる溝が形成されその反対側の面に前記溝が形成されていない形状のチャンネル部材と、
当該チャンネル部材とは線膨張率の異なる単一部材により構成され、前記チャンネル部材の前記一面に接合されたカバー部材と、
前記チャンネル部材とは線膨張率の異なる単一部材により構成され、前記チャンネル部材の前記反対側の面に接合されて前記チャンネル部材と前記カバー部材との線膨張率の違いにより発生する熱変形を抑制する第一熱変形抑制部材と、
を備えることを特徴とするインクジェットヘッド。 - 前記カバー部材の線膨張率及び前記第一熱変形抑制部材の線膨張率は、何れも前記チャンネル部材の線膨張率よりも大きいことを特徴とする請求項11記載のインクジェットヘッド。
- 前記カバー部材の線膨張率及び前記第一熱変形抑制部材の線膨張率は、何れも前記チャンネル部材の線膨張率よりも小さいことを特徴とする請求項11記載のインクジェットヘッド。
- 前記第一熱変形抑制部材の線膨張率は、前記カバー部材の線膨張率と同一であることを特徴とする請求項12又は13記載のインクジェットヘッド。
- 前記第一熱変形抑制部材は、前記カバー部材と同一形状であることを特徴とする請求項11~14の何れか一項に記載のインクジェットヘッド。
- 前記カバー部材には、前記インクチャンネルに連通し、前記インクチャンネルにインクを供給する貫通孔が設けられ、
前記第一熱変形抑制部材には、前記インクチャンネルに連通しないダミーの貫通孔が設けられている
ことを特徴とする請求項11~15の何れか一項に記載のインクジェットヘッド。 - 前記チャンネル部材、前記カバー部材、及び、前記第一熱変形抑制部材が接合された積層体において前記インクチャンネルが開放されている一端面に、前記ノズルが設けられたノズル形成部材が接合されていることを特徴とする請求項11~16の何れか一項に記載のインクジェットヘッド。
- 前記ノズル形成部材は、加熱硬化型接着剤を含む接着剤を用いて前記積層体に接着されていることを特徴とする請求項17記載のインクジェットヘッド。
- 前記ノズルは、前記カバー部材に設けられていることを特徴とする請求項11~16の何れか一項に記載のインクジェットヘッド。
- 単一部材により構成され、外部から供給されたインクを前記貫通孔を介して前記インクチャンネルに供給するインク供給路となる凹部が形成されて、前記カバー部材の前記チャンネル部材と接合される面とは反対側の面に接合されたインク供給部材と、
当該インク供給部材と線膨張率の等しい単一部材により構成され、前記インクチャンネルへのインク供給に寄与しないダミー凹部が形成されて、前記第一熱変形抑制部材の前記チャンネル部材と接合される面とは反対側の面に接合された第二熱変形抑制部材と、
を備えることを特徴とする請求項16~18の何れか一項に記載のインクジェットヘッド。
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JPH10128984A (ja) * | 1996-10-29 | 1998-05-19 | Nec Corp | インクジェット式プリンタヘッドの製造方法 |
JPH10157108A (ja) * | 1996-11-28 | 1998-06-16 | Tec Corp | インクジェットプリンタヘッド |
JPH10157105A (ja) * | 1996-11-28 | 1998-06-16 | Tec Corp | インクジェットプリンタヘッド |
JP2005297310A (ja) * | 2004-04-09 | 2005-10-27 | Konica Minolta Holdings Inc | インクジェットヘッド及びその製造方法 |
JP2007069475A (ja) | 2005-09-07 | 2007-03-22 | Toshiba Tec Corp | インクジェットヘッド及びその製造方法 |
JP2007245394A (ja) | 2006-03-14 | 2007-09-27 | Brother Ind Ltd | インクジェットプリンタヘッドとその製造方法 |
JP2007320187A (ja) * | 2006-06-01 | 2007-12-13 | Toshiba Tec Corp | インクジェットヘッドの製造方法およびインクジェットヘッド |
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JP2004025584A (ja) * | 2002-06-25 | 2004-01-29 | Toshiba Tec Corp | インクジェットヘッド及びその製造方法 |
JP4666011B2 (ja) * | 2008-06-19 | 2011-04-06 | セイコーエプソン株式会社 | 接合膜付き基材、接合方法および接合体 |
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JPH10128984A (ja) * | 1996-10-29 | 1998-05-19 | Nec Corp | インクジェット式プリンタヘッドの製造方法 |
JPH10157108A (ja) * | 1996-11-28 | 1998-06-16 | Tec Corp | インクジェットプリンタヘッド |
JPH10157105A (ja) * | 1996-11-28 | 1998-06-16 | Tec Corp | インクジェットプリンタヘッド |
JP2005297310A (ja) * | 2004-04-09 | 2005-10-27 | Konica Minolta Holdings Inc | インクジェットヘッド及びその製造方法 |
JP2007069475A (ja) | 2005-09-07 | 2007-03-22 | Toshiba Tec Corp | インクジェットヘッド及びその製造方法 |
JP2007245394A (ja) | 2006-03-14 | 2007-09-27 | Brother Ind Ltd | インクジェットプリンタヘッドとその製造方法 |
JP2007320187A (ja) * | 2006-06-01 | 2007-12-13 | Toshiba Tec Corp | インクジェットヘッドの製造方法およびインクジェットヘッド |
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