WO2014063383A1 - 一种基板及其切裂方法 - Google Patents

一种基板及其切裂方法 Download PDF

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Publication number
WO2014063383A1
WO2014063383A1 PCT/CN2012/083921 CN2012083921W WO2014063383A1 WO 2014063383 A1 WO2014063383 A1 WO 2014063383A1 CN 2012083921 W CN2012083921 W CN 2012083921W WO 2014063383 A1 WO2014063383 A1 WO 2014063383A1
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Prior art keywords
substrate
cutting
etching groove
etching
groove
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PCT/CN2012/083921
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English (en)
French (fr)
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陈信华
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深圳市华星光电技术有限公司
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Priority to US13/700,670 priority Critical patent/US20140110867A1/en
Publication of WO2014063383A1 publication Critical patent/WO2014063383A1/zh

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    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B33/00Severing cooled glass
    • C03B33/02Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
    • C03B33/023Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor the sheet or ribbon being in a horizontal position
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B28WORKING CEMENT, CLAY, OR STONE
    • B28DWORKING STONE OR STONE-LIKE MATERIALS
    • B28D1/00Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor
    • B28D1/22Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor by cutting, e.g. incising
    • B28D1/225Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor by cutting, e.g. incising for scoring or breaking, e.g. tiles
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B33/00Severing cooled glass
    • C03B33/02Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
    • C03B33/023Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor the sheet or ribbon being in a horizontal position
    • C03B33/033Apparatus for opening score lines in glass sheets
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/133351Manufacturing of individual cells out of a plurality of cells, e.g. by dicing

Definitions

  • the present invention relates to the field of liquid crystal panel manufacturing technology, and in particular to a substrate and a method for cutting the same.
  • FIG. 1 is a schematic diagram of a prior art method for cutting a substrate
  • FIG. 2 is a prior art. Schematic diagram of the cross-sectional structure after the substrate is chopped.
  • the cutting manner is: pressing one surface of the substrate 200 by the cutter wheel 100 to cause surface damage to form a rib-like crack 300, and the rib-shaped crack 300 is divided into a horizontal crack 301 and a vertical crack 302, and then the substrate 200 is The other side surface is pressed to extend the vertical crack 302 (the dotted line portion in Fig. 1) to break the substrate 200.
  • the substrate 200 is composed of a thin film transistor array substrate and a color filter substrate. When the slopes generated by the thin film transistor array substrate and the color filter substrate are inconsistent, a gap is formed.
  • the slope and the gap formed may be within the precision tolerance, but in the actual process, it may cause misjudgment of the inspection machine and increase the burden on the staff.
  • the technical problem to be solved by the present invention is to provide a method for cutting a substrate, which can speed up the cutting of the substrate, reduce the inclination and the gap after the cutting, thereby reducing the misjudgment of the inspection machine and reducing the burden on the staff.
  • a technical solution adopted by the present invention is to provide a method for cutting a substrate, the substrate comprising a first substrate and a second substrate, the first substrate comprising a first surface and opposite to the first surface a second surface, the second substrate includes a first surface and a second surface opposite to the first surface, the cutting method comprising: forming a triangular etching groove on the first surface of the first substrate and the first surface of the second substrate, respectively The first surface of the first substrate and the first surface of the second substrate are aligned and aligned along the triangular etching groove; the second surface of the first substrate and the second surface of the second substrate are respectively cut along the cutting line by the high-permeability cutter wheel The first substrate and the second substrate are cut such that the vertical crack formed by the cutting extends to the etching groove, thereby breaking the first substrate and the second substrate; wherein the triangular etching groove is formed by laser etching.
  • the cutting line is located within the width of the triangular etching groove.
  • the cutting line of the second surface of the first substrate and the cutting line of the second surface of the second substrate are located in the same vertical plane.
  • the first substrate is a thin film transistor array substrate.
  • the second substrate is a color filter substrate.
  • another technical solution adopted by the present invention is to provide a method for cutting a substrate, the substrate including a first substrate and a second substrate, the first substrate including a first surface and opposite to the first surface a second surface, the second substrate includes a first surface and a second surface opposite to the first surface, the cutting method comprising: forming an etching groove on the first surface of the first substrate and the first surface of the second substrate, respectively The first surface of the first substrate and the first surface of the second substrate are aligned and aligned along the etching groove; and the first surface of the first substrate and the second surface of the second substrate are respectively cut along the cutting line by the cutter wheel The substrate and the second substrate are such that the vertical crack formed by the cutting extends to the etching groove, thereby breaking the first substrate and the second substrate.
  • the etching groove is a triangular groove.
  • the etching groove is formed by laser etching.
  • the cutting line is located within the width of the etching bath.
  • the cutting line of the second surface of the first substrate and the cutting line of the second surface of the second substrate are located in the same vertical plane.
  • the cutter wheel is a high-permeability cutter wheel.
  • the first substrate is a thin film transistor array substrate.
  • the second substrate is a color filter substrate.
  • a substrate including a first substrate and a second substrate, the first substrate first surface and the second surface opposite to the first surface
  • the second substrate includes a first surface and a second surface opposite the first surface; wherein the first surface of the first substrate and the first surface of the second substrate have etched grooves.
  • the first substrate is a thin film transistor array substrate
  • the second substrate is a color filter substrate.
  • the etching groove is formed on the first surface of the first substrate and the first surface of the second substrate, so that the distance of the vertical crack extension is shortened when the substrate is cut, thereby speeding up the cracking of the substrate and reducing the cracking. After the slope and the difference, the false positives of the inspection machine are reduced, and the burden on the staff is reduced.
  • FIG. 1 is a schematic view showing the principle of a method for cutting a substrate in the prior art
  • FIG. 2 is a schematic cross-sectional structural view of a prior art substrate after splitting
  • FIG. 3 is a schematic flow chart of an embodiment of a method for cutting a substrate of the present invention.
  • FIG. 4 is a schematic structural view of an embodiment of a substrate of the present invention.
  • FIG. 3 is a schematic flow chart of an embodiment of a method for cutting a substrate of the present invention.
  • the substrate includes a first substrate including a first surface and a second surface opposite the first surface, the second substrate including a first surface and a second surface opposite the first surface.
  • the first substrate is a thin film transistor array substrate, and the second substrate is a color filter substrate.
  • the first substrate is a color filter substrate, and the second substrate is a thin film transistor array substrate, which is not limited in the present invention.
  • the method includes:
  • S101 forming an etching groove on the first surface of the first substrate and the first surface of the second substrate, respectively.
  • the etching groove is preferably a triangular groove.
  • the cutting surface needs to be edged.
  • the etching groove is a triangular groove, the cutting surface forms a chamfer. Reduce the work of edging.
  • it can also be an etching groove of other shapes, which is not limited by the present invention.
  • the etching groove is preferably formed by laser etching, but the invention is not limited thereto.
  • the first surface of the first substrate and the first surface of the second substrate are aligned and aligned along the etching groove, so that when the substrate is subsequently cut, the cut surfaces of the first substrate and the second substrate are formed to be uniform.
  • the cutter wheel of the embodiment adopts a high-permeability cutter wheel, and forms a certain angle and a gear on the periphery of the cutter wheel to increase the cutting effect.
  • the position of the cutting line needs to correspond to the etching groove, that is, the cutting line is located on the second surface of the first substrate and the second surface of the second substrate corresponding to the width of the etching groove, and The cutting line of the second surface of the first substrate is in the same vertical plane as the cutting line of the second surface of the second substrate.
  • the vertical crack formed by the cutting extends to the tip end position of the triangular groove. At this time, the vertical crack extends the shortest distance, and the substrate can be cut at the fastest speed, and the substrate slope and the gap after the cutting are performed. Smaller.
  • the embodiment forms an etching groove on the first surface of the first substrate and the first surface of the second substrate, so that the distance of the vertical crack extension is shortened when the substrate is cut, so that the speed of the substrate cracking can be accelerated. Reduce the slope and the difference after the cutting, reduce the misjudgment of the inspection machine, and reduce the burden on the staff.
  • FIG. 4 is a schematic structural view of an embodiment of a substrate of the present invention.
  • the substrate includes a first substrate 10 and a second substrate 20.
  • the first substrate 10 includes a first surface 101 and a second surface 102 opposite the first surface 101
  • the second substrate 20 includes a first surface 201 and a second surface 202 opposite the first surface 201.
  • the first substrate 10 is a thin film transistor array substrate
  • the second substrate 20 is a color filter substrate. It should be noted that, when the substrate is split, the first surface 101 of the first substrate 10 and the first surface 201 of the second substrate 20 are attached to each other. In the drawing of the embodiment, the first substrate 10 is clearly expressed. It is displayed separately from the second substrate 20.
  • the etching process 30 is formed on the first surface 101 of the first substrate 10 and the first surface 201 of the second substrate 20, and the etching grooves 30 are plural and spaced apart.
  • the etching groove 30 is a triangular groove.
  • the etching groove 30 is preferably formed by laser etching, but the invention is not limited thereto.
  • the first surface of the first substrate and the first surface of the second substrate of the embodiment have etching grooves, which can shorten the distance of the vertical crack extension during the cutting, thereby speeding up the cutting speed of the substrate and reducing the cutting.
  • the slope and the difference after the cracking reduce the misjudgment of the inspection machine and reduce the burden on the staff.

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Mining & Mineral Resources (AREA)
  • Mechanical Engineering (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Processing Of Stones Or Stones Resemblance Materials (AREA)

Abstract

一种基板及其切裂方法,能够加快基板切裂的速度,降低切裂后的斜度和断差,从而降低检查机的误判,减轻工作人员负担。该切裂方法包括:分别在第一基板(10)的第一表面(101)和第二基板(20)的第一表面(201)形成蚀刻槽;将第一基板(10)的第一表面(101)和第二基板(20)的第一表面(201)沿蚀刻槽对齐贴合;在第一基板(10)的第二表面(102)和第二基板(20)的第二表面(202)分别用刀轮沿切割线切割第一基板(10)和第二基板(20),使得切割形成的垂直裂纹延伸至蚀刻槽(30),进而断开第一基板(10)和第二基板(20)。

Description

一种基板及其切裂方法
【技术领域】
本发明涉及液晶面板制造技术领域,特别是涉及一种基板及其切裂方法。
【背景技术】
现有技术中,液晶基板的切裂多采用刀轮切裂的方式,请参阅图1和图2,图1是现有技术中基板的切裂方法的原理示意图,图2是现有技术中基板切裂后的剖面结构示意图。其切裂方式具体为:利用刀轮100对基板200的一侧表面进行施压,使其表面破坏形成肋条状裂纹300,肋条状裂纹300分为水平裂纹301和垂直裂纹302,然后对基板200的另一侧表面进行施压,使垂直裂纹302延伸(图1中虚线部分)以断开基板200。
然而,这种切裂方式会出现以下问题:
1.在对基板200的另一侧表面施压时,垂直裂纹302延伸长度较大时会有斜度产生。
2.基板200由薄膜晶体管阵列基板和彩色滤光片基板组成,当薄膜晶体管阵列基板和彩色滤光片基板产生的斜度不一致时,会形成断差。
3.所形成的斜度和断差可能在精度允许以内,但实际制程中,可能会造成检查机的误判,增加工作人员的负担。
【发明内容】
本发明主要解决的技术问题是提供一种基板的切裂方法,能够加快基板切裂的速度,降低切裂后的斜度和断差,从而降低检查机的误判,减轻工作人员负担。
为解决上述技术问题,本发明采用的一个技术方案是:提供一种基板的切裂方法,该基板包括第一基板和第二基板,第一基板包括第一表面和与该第一表面相对的第二表面,第二基板包括第一表面和与该第一表面相对的第二表面,该切裂方法包括:分别在第一基板的第一表面和第二基板的第一表面形成三角形蚀刻槽;将第一基板的第一表面和第二基板的第一表面沿三角形蚀刻槽对齐贴合;在第一基板的第二表面和第二基板的第二表面分别用高渗透刀轮沿切割线切割第一基板和第二基板,使得切割形成的垂直裂纹延伸至蚀刻槽,进而断开第一基板和第二基板;其中,三角形蚀刻槽由激光蚀刻形成。
其中,切割线位于三角形蚀刻槽的宽度内。
其中,第一基板的第二表面的切割线和第二基板的第二表面的切割线位于同一垂直平面。
其中,第一基板为薄膜晶体管阵列基板。
其中,第二基板为彩色滤光片基板。
为解决上述技术问题,本发明采用的另一个技术方案是:提供一种基板的切裂方法,该基板包括第一基板和第二基板,第一基板包括第一表面和与该第一表面相对的第二表面,第二基板包括第一表面和与该第一表面相对的第二表面,该切裂方法包括:分别在第一基板的第一表面和第二基板的第一表面形成蚀刻槽;将第一基板的第一表面和第二基板的第一表面沿蚀刻槽对齐贴合;在第一基板的第二表面和第二基板的第二表面分别用刀轮沿切割线切割第一基板和第二基板,使得切割形成的垂直裂纹延伸至蚀刻槽,进而断开第一基板和第二基板。
其中,蚀刻槽为三角形槽。
其中,蚀刻槽由激光蚀刻形成。
其中,切割线位于蚀刻槽的宽度内。
其中,第一基板的第二表面的切割线和第二基板的第二表面的切割线位于同一垂直平面。
其中,刀轮为高渗透刀轮。
其中,第一基板为薄膜晶体管阵列基板。
其中,第二基板为彩色滤光片基板。
为解决上述技术问题,本发明采用的又一个技术方案是:提供一种基板,该基板包括第一基板和第二基板,该第一基板第一表面和与该第一表面相对的第二表面,第二基板包括第一表面和与该第一表面相对的第二表面;其中,第一基板的第一表面和第二基板的第一表面具有蚀刻槽。
其中,第一基板为薄膜晶体管阵列基板,第二基板为彩色滤光片基板。
本发明实施例通过在第一基板的第一表面和第二基板的第一表面形成蚀刻槽,使得在切割基板时缩短了垂直裂纹延伸的距离,从而能够加快基板切裂的速度,降低切裂后的斜度和断差,降低检查机的误判,减轻工作人员负担。
【附图说明】
图1是现有技术中基板的切裂方法的原理示意图;
图2是现有技术中基板切裂后的剖面结构示意图;
图3是本发明基板的切裂方法实施例的流程示意图;
图4是本发明基板实施例的结构示意图。
【具体实施方式】
下面结合附图和实施例对本发明进行详细描述。
请参阅图3,图3是本发明基板的切裂方法实施例的流程示意图。该基板包括第一基板和第二基板,第一基板包括第一表面和与该第一表面相对的第二表面,第二基板包括第一表面和与该第一表面相对的第二表面。其中,第一基板为薄膜晶体管阵列基板,第二基板为彩色滤光片基板。当然,也可第一基板为彩色滤光片基板,第二基板为薄膜晶体管阵列基板,本发明对此不作限定。该方法包括:
S101:分别在第一基板的第一表面和第二基板的第一表面形成蚀刻槽。
其中,在本实施例中,蚀刻槽优选为三角形槽,通常在基板切裂之后,还需要对切裂面进行磨边处理,当蚀刻槽为三角形槽时,切裂面正好形成一个倒角,减轻了磨边处理的工作。当然,只要能达到加快切裂速度,降低切裂的斜度和断差的效果,也可以是其他形状的蚀刻槽,本发明对此不作限定。
进一步,在本实施例中,蚀刻槽优选地由激光蚀刻形成,但本发明对此不作限定。
S102:将第一基板的第一表面和第二基板的第一表面沿蚀刻槽对齐贴合。
其中,将第一基板的第一表面和第二基板的第一表面沿蚀刻槽对齐贴合,以使得后续切裂基板时,第一基板和第二基板的切裂面形成一致。
S103:在第一基板的第二表面和第二基板的第二表面分别用刀轮沿切割线切割第一基板和第二基板,使得切割形成的垂直裂纹延伸至蚀刻槽,进而断开第一基板和第二基板。
本实施例的刀轮采用高渗透刀轮,在刀轮外围形成一定的角度和齿轮,以增加切裂效果。此外,为了降低斜度和断差的出现,切割线的位置需与蚀刻槽对应,即切割线位于蚀刻槽宽度所对应的第一基板的第二表面和第二基板的第二表面上,且第一基板的第二表面的切割线与第二基板的第二表面的切割线位于同一垂直平面。
其中,以三角形槽为例,切割形成的垂直裂纹延伸至三角形槽的尖端位置,此时垂直裂纹延伸的距离最短,可最快速度地切裂基板,且切裂后的基板斜度和断差较小。
通过上述方式,本实施例通过在第一基板的第一表面和第二基板的第一表面形成蚀刻槽,使得在切割基板时缩短了垂直裂纹延伸的距离,从而能够加快基板切裂的速度,降低切裂后的斜度和断差,降低检查机的误判,减轻工作人员负担。
请参阅图4,图4是本发明基板实施例的结构示意图。该基板包括第一基板10和第二基板20。
第一基板10包括第一表面101和与第一表面101相对的第二表面102,第二基板20包括第一表面201和与第一表面201相对的第二表面202。在本实施例中,第一基板10为薄膜晶体管阵列基板,第二基板20为彩色滤光片基板。值得注意的是,在基板切裂时,第一基板10的第一表面101和第二基板20的第一表面201相互贴合,在本实施例附图中,为了清楚表达,第一基板10和第二基板20分开显示。
其中,在第一基板10的第一表面101和第二基板20的第一表面201上形成有蚀刻槽30,蚀刻槽30为多个,且间隔设置。在本实施例中,蚀刻槽30为三角形槽,当然,只要能达到加快切裂速度,降低切裂的斜度和断差的效果,也可以是其他形状的蚀刻槽,本发明对此不作限定。进一步,在本实施例中,蚀刻槽30优选为由激光蚀刻形成,但本发明对此不作限定。
通过上述方式,本实施例的第一基板的第一表面和第二基板的第一表面具有蚀刻槽,在切裂时可缩短垂直裂纹延伸的距离,从而能够加快基板切裂的速度,降低切裂后的斜度和断差,降低检查机的误判,减轻工作人员负担。
以上所述仅为本发明的实施方式,并非因此限制本发明的专利范围,凡是利用本发明说明书及附图内容所作的等效结构或等效流程变换,或直接或间接运用在其他相关的技术领域,均同理包括在本发明的专利保护范围内。

Claims (15)

  1. 一种基板的切裂方法,所述基板包括第一基板和第二基板,所述第一基板包括第一表面和与所述第一表面相对的第二表面,第二基板包括第一表面和与所述第一表面相对的第二表面,其特征在于,所述切裂方法包括:
    分别在所述第一基板的第一表面和所述第二基板的第一表面形成三角形蚀刻槽;
    将所述第一基板的第一表面和所述第二基板的第一表面沿所述三角形蚀刻槽对齐贴合;
    在所述第一基板的第二表面和所述第二基板的第二表面分别用高渗透刀轮沿切割线切割所述第一基板和所述第二基板,使得所述切割形成的垂直裂纹延伸至所述蚀刻槽,进而断开所述第一基板和所述第二基板;
    其中,所述三角形蚀刻槽由激光蚀刻形成。
  2. 根据权利要求1所述的切裂方法,其特征在于,所述切割线位于所述三角形蚀刻槽的宽度内。
  3. 根据权利要求2所述的切裂方法,其特征在于,所述第一基板的第二表面的切割线和所述第二基板的第二表面的切割线位于同一垂直平面。
  4. 根据权利要求1所述的切裂方法,其特征在于,所述第一基板为薄膜晶体管阵列基板。
  5. 根据权利要求4所述的切裂方法,其特征在于,所述第二基板为彩色滤光片基板。
  6. 一种基板的切裂方法,所述基板包括第一基板和第二基板,所述第一基板包括第一表面和与所述第一表面相对的第二表面,第二基板包括第一表面和与所述第一表面相对的第二表面,其特征在于,所述切裂方法包括:
    分别在所述第一基板的第一表面和所述第二基板的第一表面形成蚀刻槽;
    将所述第一基板的第一表面和所述第二基板的第一表面沿所述蚀刻槽对齐贴合;
    在所述第一基板的第二表面和所述第二基板的第二表面分别用刀轮沿切割线切割所述第一基板和所述第二基板,使得所述切割形成的垂直裂纹延伸至所述蚀刻槽,进而断开所述第一基板和所述第二基板。
  7. 根据权利要求6所述的切裂方法,其特征在于,所述蚀刻槽为三角形槽。
  8. 根据权利要求7所述的切裂方法,其特征在于,所述蚀刻槽由激光蚀刻形成。
  9. 根据权利要求6所述的切裂方法,其特征在于,所述切割线位于所述蚀刻槽的宽度内。
  10. 根据权利要求9所述的切裂方法,其特征在于,所述第一基板的第二表面的切割线和所述第二基板的第二表面的切割线位于同一垂直平面。
  11. 根据权利要求6所述的切裂方法,其特征在于,所述刀轮为高渗透刀轮。
  12. 根据权利要求6所述的切裂方法,其特征在于,所述第一基板为薄膜晶体管阵列基板。
  13. 根据权利要求12所述的切裂方法,其特征在于,所述第二基板为彩色滤光片基板。
  14. 一种基板,其特征在于,所述基板包括第一基板和第二基板,所述第一基板包括第一表面和与所述第一表面相对的第二表面,所述第二基板包括第一表面和与所述第一表面相对的第二表面;
    其中,在所述第一基板的第一表面和所述第二基板的第一表面形成蚀刻槽。
  15. 根据权利要求14所述的基板,其特征在于,所述第一基板为薄膜晶体管阵列基板,所述第二基板为彩色滤光片基板。
PCT/CN2012/083921 2012-10-24 2012-11-01 一种基板及其切裂方法 WO2014063383A1 (zh)

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