WO2014061584A1 - 電気音響変換器、その製造方法、及びその電気音響変換器を用いた電子機器 - Google Patents
電気音響変換器、その製造方法、及びその電気音響変換器を用いた電子機器 Download PDFInfo
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- WO2014061584A1 WO2014061584A1 PCT/JP2013/077753 JP2013077753W WO2014061584A1 WO 2014061584 A1 WO2014061584 A1 WO 2014061584A1 JP 2013077753 W JP2013077753 W JP 2013077753W WO 2014061584 A1 WO2014061584 A1 WO 2014061584A1
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- 230000010355 oscillation Effects 0.000 claims abstract description 18
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- 229910001369 Brass Inorganic materials 0.000 description 1
- 229910000906 Bronze Inorganic materials 0.000 description 1
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- 230000002238 attenuated effect Effects 0.000 description 1
- 229910002113 barium titanate Inorganic materials 0.000 description 1
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- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R17/00—Piezoelectric transducers; Electrostrictive transducers
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R1/00—Details of transducers, loudspeakers or microphones
- H04R1/20—Arrangements for obtaining desired frequency or directional characteristics
- H04R1/32—Arrangements for obtaining desired frequency or directional characteristics for obtaining desired directional characteristic only
- H04R1/40—Arrangements for obtaining desired frequency or directional characteristics for obtaining desired directional characteristic only by combining a number of identical transducers
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R31/00—Apparatus or processes specially adapted for the manufacture of transducers or diaphragms therefor
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R1/00—Details of transducers, loudspeakers or microphones
- H04R1/20—Arrangements for obtaining desired frequency or directional characteristics
- H04R1/32—Arrangements for obtaining desired frequency or directional characteristics for obtaining desired directional characteristic only
- H04R1/40—Arrangements for obtaining desired frequency or directional characteristics for obtaining desired directional characteristic only by combining a number of identical transducers
- H04R1/403—Arrangements for obtaining desired frequency or directional characteristics for obtaining desired directional characteristic only by combining a number of identical transducers loud-speakers
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R2217/00—Details of magnetostrictive, piezoelectric, or electrostrictive transducers covered by H04R15/00 or H04R17/00 but not provided for in any of their subgroups
- H04R2217/03—Parametric transducers where sound is generated or captured by the acoustic demodulation of amplitude modulated ultrasonic waves
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/42—Piezoelectric device making
Definitions
- the present invention is based on a Japanese patent application: Japanese Patent Application No. 2012-227920 (filed on October 15, 2012), and the entire description of the application is incorporated herein by reference.
- the present invention relates to an electroacoustic transducer, a manufacturing method thereof, and an electronic apparatus using the electroacoustic transducer.
- a parametric speaker is mounted on an electronic device such as a mobile phone and an audio signal is propagated in the vicinity of the user.
- the parametric speaker when a parametric speaker is mounted on an electronic device such as a mobile phone, the parametric speaker is required to be downsized.
- Patent Document 1 discloses an electroacoustic transducer that includes a piezoelectric vibrator and can be used in a wide band including a low frequency band.
- a highly directional parametric speaker it is preferable to propagate an audio signal using ultrasonic waves.
- ultrasonic waves In order to oscillate ultrasonic waves with strong directivity using the piezoelectric vibrator, it is preferable to oscillate ultrasonic waves with a high sound pressure level.
- it is necessary to apply a high voltage to the piezoelectric vibrator In order to oscillate an ultrasonic wave having a high sound pressure level, it is necessary to apply a high voltage to the piezoelectric vibrator. That is, the voltage applied to the piezoelectric vibrator and the directivity of the oscillated ultrasonic wave have a trade-off relationship.
- Patent Document 1 does not disclose a technique for oscillating ultrasonic waves with high efficiency using a piezoelectric vibrator.
- an electroacoustic transducer that contributes to oscillating highly directional sound waves with high efficiency, a manufacturing method thereof, and an electronic device using the electroacoustic transducer are desired.
- a piezoelectric vibrator a housing that is spaced apart from the piezoelectric vibrator by a predetermined space, and that has a frustum-shaped cut on the inner wall, and is fitted into the cut.
- a sound hole portion is formed in front of the piezoelectric vibrator in the oscillation direction, and the notch has a sound path hole diameter toward the front in the oscillation direction of the piezoelectric vibrator.
- An electroacoustic transducer formed in the housing is provided for reduction.
- a piezoelectric vibrator and a predetermined space from the piezoelectric vibrator are arranged, a sound hole portion is formed in front of the oscillation direction of the piezoelectric vibrator, and a cone is formed on the inner wall.
- an electronic apparatus that includes the electroacoustic transducer formed in the housing and oscillates the piezoelectric vibrator so as to emit ultrasonic waves having a frequency of 20 kHz or more.
- a method for manufacturing an electroacoustic transducer comprising a piezoelectric vibrator and a housing, wherein the housing is disposed at a predetermined space away from the piezoelectric vibrator.
- a sound hole portion forming step formed in the housing, and in the notch forming step the housing has the sound path hole diameter reduced toward the front in the oscillation direction of the piezoelectric vibrator.
- an electroacoustic transducer that contributes to high-efficiency oscillating highly directional sound waves, a manufacturing method thereof, and an electronic apparatus using the electroacoustic transducer.
- FIG. 1 is a cross-sectional side view illustrating an example of a piezoelectric vibrator 10 according to a first embodiment. It is a cross-sectional side view which shows an example of the electroacoustic transducer 1a which concerns on 2nd Embodiment. It is a figure which shows an example of the structure which concerns on 2nd Embodiment, and the structure which concerns on a comparison form. It is a figure which shows an example of the measurement result of a frequency and a sound pressure level.
- the voltage applied to the piezoelectric vibrator and the directivity of the oscillated ultrasonic wave have a trade-off relationship. Therefore, an electroacoustic transducer that contributes to oscillating highly directional sound waves with high efficiency is desired.
- an electroacoustic transducer 100 shown in FIG. 1 is provided as an example.
- the electroacoustic transducer 100 includes a piezoelectric vibrator 101 and a housing 102 that is disposed apart from the piezoelectric vibrator 101 by a predetermined space.
- the piezoelectric vibrator 101 oscillates by application of an electric field to oscillate sound waves.
- a sound hole 103 is formed in the housing 102 in front of the oscillation direction of the piezoelectric vibrator 101.
- the sound wave transmitted from the piezoelectric vibrator is radiated into the atmosphere from the sound hole portion 103.
- a tubular path through which a sound wave transmitted from the piezoelectric vibrator passes before reaching the sound hole 103 is referred to as a sound path.
- the housing 102 has a frustum-shaped cut on the inner wall. This cut is formed in the housing 102 so as to reduce the hole diameter of the sound path toward the front in the oscillation direction of the piezoelectric vibrator 101. Therefore, the sound wave transmitted from the piezoelectric vibrator is controlled by the frustum shape so as to pass through the sound path and travel toward the sound hole portion 13. Specifically, when the inner wall of the housing 102 has a frustum shape, divergence of sound waves oscillated from the piezoelectric vibrator is suppressed. As a result, this notch collects sound waves transmitted from the piezoelectric vibrator and contributes to strengthening directivity.
- the sound absorbing material 104 is fitted into the cut formed in the housing 102 and arranged.
- the sound absorbing material 104 contributes to preventing interference between sound waves collected at the cut portion.
- the sound absorbing material 104 contributes to mute sound waves having a frequency other than the ultrasonic wave to be reproduced. Therefore, the electroacoustic transducer 100 contributes to transmitting highly directional sound waves with high efficiency.
- the casing has the notch including a polygonal frustum shape or a truncated cone shape.
- the sound absorbing material preferably includes a porous material.
- the sound hole is formed at a distance of 1 ⁇ 4 to 1 ⁇ 2 of the wavelength of the oscillation wave from the vibration surface of the piezoelectric vibrator.
- the piezoelectric vibrator oscillates an ultrasonic wave having a frequency of 20 kHz or more.
- Embodiment 6 It is preferable that the electroacoustic transducers of Embodiments 1 to 5 are arranged and arranged on a plane.
- the incision forming step it is preferable to form the incision including a polygonal frustum shape or a truncated cone shape.
- the sound hole portion forming step it is preferable that the sound hole portion is formed at a distance of 1 ⁇ 4 to 1 ⁇ 2 of the wavelength of the oscillation wave from the vibration surface of the piezoelectric vibrator.
- FIG. 2 is a cross-sectional side view showing an example of the electroacoustic transducer 1 according to the present embodiment.
- FIG. 2 mainly describes members related to the electroacoustic transducer according to the present embodiment.
- the electroacoustic transducer 1 is housed inside the housing 11.
- the electroacoustic transducer 1 is used as a speaker device, for example.
- the speaker device may be a parametric speaker.
- the piezoelectric vibrator 10 preferably oscillates ultrasonic waves of 20 kHz or higher.
- the parametric speaker demodulates the audible sound using the ultrasonic wave as a carrier wave. Specifically, the parametric speaker first radiates modulated ultrasonic waves into the air. The parametric speaker then demodulates the modulated wave by inducing a collision wave due to a nonlinear phenomenon of air.
- the piezoelectric vibrator 10 oscillates ultrasonic waves with high straightness, so that a sound field with high directivity can be formed.
- the electroacoustic transducer 1 according to the present embodiment can radiate sound waves around the vicinity of the user.
- the electroacoustic transducer 1 is preferably a sound source such as a smartphone, a mobile phone, a game machine, a tablet PC (Personal Computer), a notebook PC, or a PDA (Personal Data Assistant).
- a sound source such as a smartphone, a mobile phone, a game machine, a tablet PC (Personal Computer), a notebook PC, or a PDA (Personal Data Assistant).
- the piezoelectric vibrator 10 is joined to the housing via a joining member. Further, in the piezoelectric vibrator 10, the substrate 15 is disposed with a predetermined space away from the surface facing the housing. The piezoelectric vibrator 10 is bonded to the substrate 15 through the holding member 16.
- the piezoelectric vibrator 10 is configured by constraining a piezoelectric body 21 and a vibrating member 20 polarized in the thickness direction.
- the piezoelectric vibrator 10 oscillates and oscillates by application of an electric field. Therefore, it is preferable that the electronic apparatus including the electroacoustic transducer 1 includes an oscillation circuit (not shown) that generates an electric signal to be applied to the piezoelectric body 21.
- the housing 11 is arranged away from the piezoelectric vibrator 10 by a predetermined space.
- the housing 11 has a sound hole portion 13 formed in front of the oscillation direction of the piezoelectric vibrator 10.
- the sound wave generated by the piezoelectric vibrator 10 passes through the sound hole portion 13 and is radiated to the outside of the electroacoustic transducer 1.
- the housing 11 has a frustum-shaped cut on the inner wall.
- This notch includes a polygonal frustum shape or a truncated cone shape. Then, this cut is formed in the housing 11 so as to reduce the hole diameter of the sound path toward the front in the transmission direction of the piezoelectric vibrator. By forming this cut, a sound wave can be collected at the cut portion. As a result, the electroacoustic transducer 1 can radiate sound waves from the sound hole portion 13 efficiently.
- the sound absorbing material 14 is fitted into a cut formed in the housing 11 and arranged.
- the sound absorbing material 14 is preferably a porous material such as polyurethane.
- the frequency to be silenced can be adjusted. Specifically, when sound waves are incident on the pores of the porous material, they are irregularly reflected inside the pores. Therefore, the sound wave having a predetermined frequency is irregularly reflected and attenuated according to the shape of the hole.
- the sound hole portion 13 is preferably formed at a distance of 1 ⁇ 4 to 1 ⁇ 2 of the wavelength of the oscillation wave from the vibration surface of the piezoelectric vibrator 10.
- FIG. 3 is a cross-sectional side view showing an example of the piezoelectric vibrator 10.
- FIG. 3 mainly describes members related to the electroacoustic transducer 1 according to the present embodiment.
- the vibrating member 20 has a function of propagating vibration generated in the piezoelectric vibrator 10 to the entire electroacoustic transducer 1.
- the piezoelectric vibrator 10 preferably has a structure (bimorph structure) in which the piezoelectric bodies 21 are constrained on both main surfaces of the vibration member 20.
- the amplitude amount of the piezoelectric vibrator 10 is increased as compared with a unimorph structure.
- the unimorph structure is a structure in which the piezoelectric body 21 is constrained on one main surface of the vibration member 20.
- Each electrode 21 has electrodes 22 constrained on both main surfaces. Therefore, the piezoelectric body 21 is polarized in the thickness direction.
- the material constituting the piezoelectric body 21 is a material having a piezoelectric effect, and may be either an inorganic material or an organic material.
- piezoelectric ceramics such as lead zirconate titanate and barium titanate may be used.
- the material constituting the electrode 22 is not limited, but may be, for example, silver or silver / palladium.
- Silver has a low electrical resistivity and is used as a general-purpose electrode material.
- Silver / palladium has a low electrical resistivity and is excellent in oxidation resistance.
- the piezoelectric body 21 is preferably a piezoelectric ceramic, but the piezoelectric ceramic is brittle. Therefore, when the piezoelectric body 21 is made of piezoelectric ceramic, it is difficult to change the shape of the piezoelectric body 21. Therefore, it is preferable to change the resonance frequency by changing the thickness, material, and the like of the vibration member 20 that restrains the piezoelectric body 21.
- the vibration member 20 is preferably made of a material having high rigidity with respect to the piezoelectric body 21.
- the vibration member 20 may be a metal material such as phosphor bronze or stainless steel.
- the vibration member 20 may be a composite material of a metal material and a resin. By making the vibration member 20 a composite material of a metal material and a resin, it is possible to contribute to adjusting the rigidity of the vibration member 20.
- the vibration member 20 there are various preferable materials for the vibration member 20, and details thereof are not limited.
- the vibration member 20 may be joined to the frame 23 via the support member 24.
- the material constituting the frame 23 is not limited as long as it is a highly rigid material.
- the material constituting the frame 23 may be a metal material, an organic material, or the like.
- the material constituting the frame 23 may be stainless steel, brass, or the like.
- the material constituting the support member 24 is not limited as long as it is a material that absorbs vibration.
- the material constituting the support member 24 may be a resin material.
- the support member 24 contributes to reducing the rigidity of the end portion where stress concentrates when the piezoelectric vibrator 10 vibrates.
- the support member 24 contributes to increasing the amplitude amount of the piezoelectric vibrator 10.
- the piezoelectric vibrator 10 vibrates, stress concentrates on the grounding region of the vibration member 20 and the piezoelectric body. Therefore, it is preferable to dispose the elastic member 25 in the stress concentration portion of the vibration member 20.
- the material which comprises the elastic member 25 will not be limited if it is a highly flexible material.
- a coating film may be formed on the vibration member 20 to adjust the elasticity of the vibration member.
- the electroacoustic transducer 1 according to this embodiment can mute sound waves having unnecessary frequencies. Therefore, the electroacoustic transducer 1 according to the present embodiment can radiate ultrasonic waves having a predetermined frequency with high efficiency.
- the electroacoustic transducers 1 according to the first embodiment are arranged in parallel on a plane.
- the description of the same parts as those in the first embodiment is omitted.
- the same components as those in the first embodiment are denoted by the same reference numerals, and the description thereof is omitted.
- FIG. 4 is a side view showing an example of the structure of the electroacoustic transducer 1a according to the present embodiment.
- Each piezoelectric vibrator 10 is joined to the housing 11 via a joining member 12.
- Each piezoelectric vibrator 10 is bonded to the substrate 15 via the holding member 16.
- the casing 11 has a frustum-shaped cut in the sound path through which the sound wave of each piezoelectric vibrator 10 propagates.
- the directivity of the electroacoustic transducer 1a can be strengthened by selectively driving one or more of the piezoelectric transducers 10 constituting the electroacoustic transducer 1a according to the present embodiment. . That is, a sound field can be formed in a specific direction by selectively driving the piezoelectric vibrator 10.
- FIG. 5 is a diagram illustrating an example in which the structures of the piezoelectric vibrator 10 and the housing 11 are compared.
- Fig.5 (a) is a figure which shows an example of the structure of the electroacoustic transducer 1a which concerns on this embodiment.
- FIG. 5B is a diagram illustrating an example of the structure of the electroacoustic transducer 3 in which the frustum-shaped notch is not formed in the housing 111 and the sound absorbing material 14 is not provided.
- the electroacoustic transducers including the piezoelectric vibrators 10 are arranged in an array.
- the structure of the electroacoustic transducer 1a illustrated in FIG. 5A is referred to as “structure according to the present embodiment”.
- FIG. 6 is a diagram illustrating an example of measurement results of frequency and sound pressure level for the structure according to the present embodiment and the structure according to the comparative embodiment.
- the physical property values of the common members are the same in the structure according to the present embodiment and the structure according to the comparative embodiment.
- the measurement conditions including the temperature and the like are the same in the structure according to the present embodiment and the structure according to the comparative embodiment.
- the sound pressure level has a peak value at about 60 kHz.
- the peak value of the sound pressure level is higher than that in the structure according to the comparative form. Therefore, it can be seen that the sound pressure level of the structure according to the present embodiment is improved as compared with the structure according to the comparative form.
- the change in sound pressure is unimodal.
- the change in the sound pressure level is multimodal.
- the sound pressure level is increased at about 40 kHz, about 60 kHz, and about 95 kHz. Therefore, as shown in FIG. 6, it can be seen that the structure according to the present embodiment can mute the ultrasonic waves having unnecessary frequencies.
- FIG. 6 is a diagram illustrating an example of a comparison between the structure according to the present embodiment and the structure according to the comparative embodiment. Therefore, it goes without saying that the frequency at which the sound pressure level reaches a peak value, the sound pressure level, and the like vary depending on the shape, physical properties, and measurement conditions of each member.
- the bimorph structure in which the piezoelectric body 21 is constrained on both main surfaces of the vibration member 20 has been described.
- a structure (unimorph structure) in which the piezoelectric body 21 is constrained on any one surface of the vibration member 20 may be used.
- Electroacoustic transducers 10 101 Piezoelectric vibrators 11, 102, 111 Housing 12 Bonding members 13, 103 Sound hole portions 14, 104 Sound absorbing material 15 Substrate 16 Holding member 20 Vibration member 21 Piezoelectric body 22 Electrode 23 Frame 24 Support member 25 Elastic member
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Abstract
Description
本発明は、日本国特許出願:特願2012-227920号(2012年10月15日出願)に基づくものであり、同出願の全記載内容は引用をもって本書に組み込み記載されているものとする。
本発明は、電気音響変換器、その製造方法、及びその電気音響変換器を用いた電子機器に関する。
第1の実施形態について、図面を用いてより詳細に説明する。
続いて、第2の実施形態について図面を用いて詳細に説明する。
10、101 圧電振動子
11、102、111 筐体
12 接合部材
13、103 音孔部
14、104 吸音材
15 基板
16 保持部材
20 振動部材
21 圧電体
22 電極
23 フレーム
24 支持部材
25 弾性部材
Claims (10)
- 圧電振動子と、
前記圧電振動子から所定の空間を離して配置され、内壁に、錐台形状の切り込みを有する筐体と、
前記切り込みに嵌め込み配置される吸音材と、を備え、
前記筐体は、前記圧電振動子の発振方向前方に音孔部が形成され、
前記切り込みは、前記圧電振動子の発振方向前方に向かって、音道の孔径を縮小するように、前記筐体に形成される、
電気音響変換器。 - 前記筐体は、多角錐台形、又は円錐台形を含む前記切り込みを有する請求項1に記載の電気音響変換器。
- 前記吸音材は、多孔質材料を含む請求項1又は2に記載の電気音響変換器。
- 前記音孔部は、前記圧電振動子の振動面から、発振波の波長の1/4~1/2の距離に形成される請求項1乃至3のいずれか一に記載の電気音響変換器。
- 前記圧電振動子は、20kHz以上の周波数の超音波を発振する請求項1乃至4のいずれか一に記載の電気音響変換器。
- 請求項1乃至5のいずれか一に記載の電気音響変換器を、平面上に並列に配置し、構成される電気音響変換器。
- 請求項1乃至6のいずれか一に記載の電気音響変換器を搭載し、前記圧電振動子を20kHz以上の周波数の超音波を放射するよう発振させる電子機器。
- 圧電振動子と、筐体と、を備える電気音響変換器の製造方法であって、
前記筐体を圧電振動子から所定の空間を離して配置する工程と、
前記筐体の内壁に、錐台形状の切り込みを形成する、切り込み形成工程と、
前記切り込みに、吸音材を嵌め込み配置する工程と、
前記圧電振動子の発信方向前方に音孔部を、前記筐体に形成する音孔部形成工程と、を含み、
前記切り込み形成工程において、記圧電振動子の発振方向前方に向かって、音道の孔径を縮小するように、前記筐体に、前記切り込みを形成する、
電気音響変換器の製造方法。 - 前記切り込み形成工程において、多角錐台形、又は円錐台形を含む前記切り込みを形成する請求項8に記載の電気音響変換器の製造方法。
- 前記音孔部形成工程において、前記圧電振動子の振動面から、発振波の波長の1/4~1/2の距離に、前記音孔部を形成する請求項8又は9に記載の電気音響変換器の製造方法。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US14/434,174 US9338556B2 (en) | 2012-10-15 | 2013-10-11 | Electroacoustic transducer, manufacturing method thereof, and electronic device utilizing same |
CN201380053835.7A CN104718768B (zh) | 2012-10-15 | 2013-10-11 | 电声换能器及其制造方法和使用电声换能器的电子设备 |
JP2014542109A JP6156387B2 (ja) | 2012-10-15 | 2013-10-11 | 電気音響変換器、その製造方法、及びその電気音響変換器を用いた電子機器 |
EP13847236.0A EP2908552A4 (en) | 2012-10-15 | 2013-10-11 | ELECTRIC ACOUSTIC CONVERTER, MANUFACTURING METHOD AND ELECTRONIC DEVICE THEREFOR |
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US (1) | US9338556B2 (ja) |
EP (1) | EP2908552A4 (ja) |
JP (1) | JP6156387B2 (ja) |
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WO2020230358A1 (ja) * | 2019-05-16 | 2020-11-19 | 株式会社村田製作所 | 圧電デバイスおよび音響トランスデューサ |
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CN111495722B (zh) * | 2019-01-30 | 2021-05-07 | 成都科汇模具有限公司 | 一种医用超声刀换能器 |
CN110337056B (zh) * | 2019-08-06 | 2021-01-26 | 常州元晶电子科技有限公司 | 一种高密度指向性压电电声换能器阵列的制作方法 |
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- 2013-10-11 JP JP2014542109A patent/JP6156387B2/ja not_active Expired - Fee Related
- 2013-10-11 EP EP13847236.0A patent/EP2908552A4/en not_active Withdrawn
- 2013-10-11 WO PCT/JP2013/077753 patent/WO2014061584A1/ja active Application Filing
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JP6156387B2 (ja) | 2017-07-05 |
JPWO2014061584A1 (ja) | 2016-09-05 |
EP2908552A1 (en) | 2015-08-19 |
US20150264488A1 (en) | 2015-09-17 |
US9338556B2 (en) | 2016-05-10 |
CN104718768B (zh) | 2017-08-25 |
EP2908552A4 (en) | 2016-06-08 |
CN104718768A (zh) | 2015-06-17 |
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