WO2014008701A1 - 断线修补机 - Google Patents

断线修补机 Download PDF

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Publication number
WO2014008701A1
WO2014008701A1 PCT/CN2012/079925 CN2012079925W WO2014008701A1 WO 2014008701 A1 WO2014008701 A1 WO 2014008701A1 CN 2012079925 W CN2012079925 W CN 2012079925W WO 2014008701 A1 WO2014008701 A1 WO 2014008701A1
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WO
WIPO (PCT)
Prior art keywords
pipe
air
air blowing
vapor deposition
repairing machine
Prior art date
Application number
PCT/CN2012/079925
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English (en)
French (fr)
Inventor
郑文达
Original Assignee
深圳市华星光电技术有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 深圳市华星光电技术有限公司 filed Critical 深圳市华星光电技术有限公司
Priority to US13/702,585 priority Critical patent/US20140007811A1/en
Publication of WO2014008701A1 publication Critical patent/WO2014008701A1/zh

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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
    • C23C16/45563—Gas nozzles
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/04—Coating on selected surface areas, e.g. using masks
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/4412—Details relating to the exhausts, e.g. pumps, filters, scrubbers, particle traps
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1306—Details
    • G02F1/1309—Repairing; Testing
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F2201/00—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00
    • G02F2201/50—Protective arrangements
    • G02F2201/506—Repairing, e.g. with redundant arrangement against defective part

Definitions

  • the present invention relates to the field of liquid crystal panel technologies, and in particular, to a wire break repairing machine for repairing disconnection of an array substrate.
  • Liquid crystal display (Liquid Crystal Display, LCD) is a flat panel display device that uses the characteristics of liquid crystal materials to display images (Flat Panel) Display, FPD), which has the advantages of light weight, low driving voltage and low power consumption compared to other display devices, has become the mainstream product in the entire consumer market.
  • LCD Liquid Crystal Display
  • FPD Full Panel Display
  • the liquid crystal panel is the most important component of the liquid crystal display.
  • the manufacturing process of the liquid crystal panel is mainly divided into a front-end array process, a middle-stage process, and a rear-end module assembly.
  • the front-end array process comprises: firstly forming a film on the substrate by depositing a thin film layer; then coating the film layer with a photoresist, and forming a scan line by exposing, developing, etching, removing photoresist, etc. a semiconductor layer, a data line, a protective layer, a transparent conductive layer, and the like.
  • the repair machine first uses a laser to remove the cover at the ends of the open circuit, such as a semiconductor layer, and then coats between the ends of the open circuit to form a via.
  • FIG. 1 is a schematic structural view of a conventional interrupted wire repairing machine for coating a circuit at a break.
  • an air-blowing port 101 of an inert gas is disposed, and a vapor-depositing port 102 is provided around the gas-jet opening 101 of the inert gas, and a coating material molecule sprayed therefrom is coated on the broken portion of the substrate.
  • An air inlet 103 is also provided at the periphery of the vapor deposition port 102 for sucking in the inert gas of the stable coating.
  • FIG. 2 is a schematic view showing a short circuit caused by a large coating area of the wire repairing machine shown in FIG.
  • a primary object of the present invention is to provide a wire break repairer designed to increase the success rate of a coating.
  • the invention provides a wire break repairing machine, comprising: an air suction pipe, a blowing pipe and a vapor deposition pipe; the air blowing pipe is disposed around the air suction pipe, the air blowing pipe has a blowing port, and the air blowing port sucks The air tube is inclined, and the air blowing tube is disposed opposite to the air suction tube; the vapor deposition tube is located between the air suction tube and the air blowing tube, and is disposed in parallel with the air suction tube.
  • the wire break repairing machine further comprises a casing, wherein the air suction pipe, the air blowing pipe and the vapor deposition pipe are disposed on a lower surface of the casing; the suction pipe is vertically disposed; The angle between the blowing pipe and the lower surface of the casing is 30 to 60°.
  • the vapor deposition tube comprises an evaporation port
  • the suction pipe comprises an air inlet
  • the vertical distance of the vapor deposition port of the vapor deposition tube from the housing is greater than the suction port and the shell of the suction pipe
  • the vertical distance of the body is less than the vertical distance of the air blowing port of the air blowing pipe from the casing.
  • the air suction pipe comprises an air inlet, and an air blow port of the air blowing pipe is enclosed to form an area smaller than or equal to an area of the air inlet of the air suction pipe.
  • the wire break repairing machine further includes a controller connected to the air blowing pipe, and the controller is configured to control the air blowing port of the air blowing pipe to move to the air suction pipe.
  • the angle between the blow pipe and the lower surface of the housing is 45°.
  • the wire break repairing machine further includes a casing having a lower surface, the suction pipe is disposed at a middle portion of the casing and penetrates the lower surface; and the vapor deposition pipe and the air blowing pipe are both disposed In the casing and penetrating through a lower surface of the casing; an angle between the blow pipe and a lower surface of the casing is 30 to 60°.
  • the edge of the air blowing port has a first guiding ring; the vapor deposition tube has an evaporation port, and the edge of the evaporation port has a second guiding ring.
  • the angle between the blow pipe and the lower surface of the housing is 45°.
  • the present invention also provides a wire break repairing machine, comprising: an air suction pipe, a blowing pipe and a vapor deposition pipe; the air blowing pipe is disposed around the air suction pipe, and the air blowing pipe is inclined with respect to the air suction pipe The opposite side is disposed; the vapor deposition tube is located between the suction pipe and the air blowing pipe.
  • the wire break repairing machine further comprises a casing, wherein the air suction pipe, the air blowing pipe and the vapor deposition pipe are disposed on a lower surface of the casing; the suction pipe is vertically disposed;
  • the blowing pipe has a blowing port which is inclined to the suction pipe; the angle between the blowing pipe and the lower surface of the casing is 30 to 60°.
  • the vapor deposition tube comprises an evaporation port
  • the suction pipe comprises an air inlet
  • the vertical distance of the vapor deposition port of the vapor deposition tube from the housing is greater than the suction port and the shell of the suction pipe
  • the vertical distance of the body is less than the vertical distance of the air blowing port of the air blowing pipe from the casing.
  • the air suction pipe comprises an air inlet, and an air blow port of the air blowing pipe is enclosed to form an area smaller than or equal to an area of the air inlet of the air suction pipe.
  • the wire break repairing machine further includes a controller connected to the air blowing pipe, and the controller is configured to control the air blowing port of the air blowing pipe to move to the air suction pipe.
  • the angle between the blow pipe and the lower surface of the housing is 45°.
  • the wire break repairing machine further includes a casing having a lower surface, the suction pipe is disposed at a middle portion of the casing and penetrates the lower surface; and the vapor deposition pipe and the air blowing pipe are both disposed In the casing and penetrating through a lower surface of the casing; an angle between the blow pipe and a lower surface of the casing is 30 to 60°.
  • the blowing pipe has a blowing port, the edge of the blowing port has a first guiding ring; the vapor deposition tube has an evaporation port, and the edge of the evaporation port has a second guiding ring.
  • the wire break repairing machine further includes a vapor deposition device that communicates with the vapor deposition tube, an air blowing device that communicates with the air blowing pipe, a suction device that communicates with the air suction pipe, and controls the steaming A controller for operating the plating device, the air blowing device, and the air suction device, wherein the controller is connected to the vapor deposition device, the air blowing device, and the air suction device, respectively.
  • the angle between the blow pipe and the lower surface of the housing is 45°.
  • the direction of the inert gas blown by the air blowing pipe is from the outside to the inside, so that the coating molecules sprayed in the vapor deposition pipe are close to the broken line, thereby avoiding The short circuit caused by the diffused coating molecules in the prior art further improves the success rate of the coating.
  • FIG. 1 is a schematic view showing the structure of a laser repairing machine for coating a broken portion in the prior art
  • FIG. 2 is a schematic view showing the coating area of the wire break repairing machine shown in FIG. 1 being too large to cause a short circuit;
  • FIG. 3 is a schematic structural view of a first embodiment of the wire break repairing machine of the present invention.
  • Figure 4 is a schematic view of the broken line after the wire break repairing machine shown in Figure 3 is applied to the wire breakage;
  • Figure 5 is a front elevational view showing the broken line repairing machine shown in Figure 3;
  • Figure 6 is a bottom plan view of the wire break repairing machine shown in Figure 3;
  • Figure 7 is a schematic structural view of a second embodiment of the wire break repairing machine of the present invention.
  • Figure 8 is a schematic structural view of a third embodiment of the wire break repairing machine of the present invention.
  • Figure 9 is a bottom plan view of the wire break repairing machine of Figure 8.
  • Figure 10 is a cross-sectional view of the interrupt line repair machine of Figure 9 taken along line A-A.
  • FIG. 3 is a schematic view showing the structure of the first embodiment of the wire break repairing machine of the present invention.
  • the wire break repairing machine is placed above the substrate, and is mainly used for plating connection of the broken wires on the array substrate. It comprises a housing 10 having a lower surface 14 and a lower surface 14 of the housing 10 with an air suction tube 11 and an air blowing tube 21.
  • the air blowing pipe 21 is disposed around the air suction pipe 11, and the air blowing pipe 21 is disposed obliquely with respect to the air suction pipe 11, and the air blowing pipe 21 and the air suction pipe 11 are disposed on different sides.
  • a vapor deposition tube 31 is further disposed on the casing 10, and the vapor deposition tube 31 is located between the suction pipe 11 and the air blowing pipe 21.
  • FIG. 4 is a schematic view of the disconnection line after the wire break repairing machine shown in FIG. 3 is applied to the wire breakage.
  • the coating is precisely controlled so that it does not spread to the adjacent components and causes a short circuit, which increases the success rate of the coating.
  • the structure of the air blowing pipe 21, the air suction pipe 11, and the vapor deposition pipe 31 is such that the direction of the inert gas blown by the air blowing pipe 21 is from the outside to the inside, so that the coating molecules ejected from the vapor deposition pipe 31 are broken.
  • the line is close to avoid the short circuit caused by the diffusion of the coating molecules in the prior art, further improving the success rate of the coating.
  • the suction pipe 11 is disposed perpendicular to the casing 10 and has an intake port 111.
  • the blow pipe 21 has a blow port 211, and the blow port 211 of the blow pipe 21 is inclined toward the intake pipe 11.
  • the angle between the blowing pipe 21 and the plane of the casing 10 is 30° to 60°.
  • the angle between the blowing pipe 21 and the plane of the casing 10 is 45°.
  • FIG. 5 is a schematic front view of the interrupt line repairing machine of FIG.
  • the airflow direction of the air blowing pipe 21a is P1
  • the airflow direction of the air suction pipe 11 is P2
  • the two airflow directions P1, P2 are neither intersect nor parallel, that is, not in the same plane. on.
  • the air blowing port 211a of the air blowing pipe 21a is inclined to the air suction pipe 11.
  • Other blowpipes 21 can also be referred to as described above, and will not be described herein.
  • the direction of the coating molecules blown out by the vapor deposition tube 31 is P3, which is parallel to the gas flow direction P2 taken in by the suction pipe 11, and is opposite in direction.
  • FIG. 6 is a bottom view of the interrupt line repairing machine of FIG.
  • the above arrangement of all the blowing pipes 21 causes the airflow blown from the blowing port 211 of the blowing pipe 21 to rotate counterclockwise, and the swirling airflow continuously rises and is sucked from the intake port 111 of the intake pipe 11.
  • FIG. 7 is a schematic structural view of a second embodiment of the wire break repairing machine of the present invention. If the inclination direction of all the blowing pipes 21 with respect to the casing 10 is symmetrical with the radial direction of the casing 10 in the inclined direction of the blowing pipe 21 with respect to the casing 10 in the above embodiment, the airflow blown in the blowing pipe 21 is made Clockwise rounded shape.
  • the wire break repairing machine further includes a vapor deposition device, an air blowing device, and a getter device (not shown), the vapor deposition device is in communication with the vapor deposition tube 31, and the getter device and the suction device The air tube 11 is in communication, and the air blowing device is in communication with the air blowing tube 21.
  • the air suction device and the air blowing device may be disposed inside the casing 10 or outside the casing 10, and the air suction device and the air blowing device may be separately provided.
  • the air blowing device mainly includes an air blowing fan that rotates at a high speed to blow the inert gas in the air blowing device from the air blowing pipe 21.
  • the air suction device mainly comprises an air suction fan which rotates at a high speed and makes the air pressure in the air suction pipe 11 smaller than the air pressure outside the air suction pipe 11, so that the external air flow can be continuously from the air suction pipe 11 Inhalation into the suction device.
  • the air suction device communicates with the air passage of the air blowing device, that is, the inert gas sucked from the air suction pipe 11 by the air suction device can be blown out from the air blowing pipe 21 through the air blowing fan of the air blowing device.
  • the wire break repairing machine further includes a controller (not shown) that controls the operation of the vapor deposition device, the air blowing device, and the air suction device, and the controller and the vapor deposition device respectively blow air The device is connected to the suction device.
  • the controller may control the vapor deposition device and the air blowing device to work at the same time, and control the operation of the air suction device after a preset time. In this way, after the inert gas blown out by the blowing pipe 21 is swirled upward, the suction device can quickly suck the suction port 111 of the sub-suction pipe 11 therein, thereby improving work efficiency.
  • the controller may be connected to the air blowing pipe 21 for controlling the air blowing port 211 of the air blowing pipe 21 to move toward the air suction pipe 11. Specifically, while controlling the blowing means to blow air from the blowing pipe 21, the blowing port 211 of the blowing pipe 21 is controlled to move to the suction pipe 11, and the inert gas blown by the blowing pipe 21 is collected toward the suction pipe 11 and swirled. It rises so that the suction pipe 11 can absorb the inert gas more efficiently. Moreover, the controller can also control the operation of the air blowing device first, then control the operation of the vapor deposition device, and finally control the operation of the air suction device. Through the controller, not only can the coating success rate be improved, but also energy consumption can be saved.
  • the vapor deposition tube 31 has a vapor deposition port 311, and a vertical distance between the vapor deposition port 311 and the casing 10 is smaller than a vertical distance between the air blowing port 211 of the air blowing pipe 21 and the casing 10, and is larger than suction.
  • the area formed by the air blowing port 211 of the air blowing pipe 21 is smaller than or equal to the area of the air inlet 111 of the air suction pipe 11.
  • the above-described arrangement of the air blowing pipe 21 and the air suction pipe 11 allows the inert gas blown by the air blowing pipe 21 to be sucked by the air suction pipe 11, thereby further improving the coating. effectiveness.
  • the air blowing tubes are an even number, and the air blowing tubes 21 are symmetrically disposed with respect to the air suction tubes 11.
  • the vapor deposition tubes 31 may be an even number, and the vapor deposition tubes 31 are symmetrically disposed with respect to the suction tubes 11.
  • FIG. 8 is a schematic structural view of a third embodiment of the wire break repairing machine of the present invention
  • FIG. 9 is a bottom view of the wire break repairing machine of FIG. 8
  • the wire break repairing machine has a housing 100 having a cylindrical shape with an upper surface 101 and a lower surface 102.
  • the middle portion of the casing 100 is provided with an air suction pipe 200 extending through the lower surface 102.
  • the casing 100 is further formed with a plurality of vapor deposition pipes parallel to the air suction pipe 200 and penetrating the lower surface 102 around the air suction pipe 200.
  • 300 The outer portion of the vapor deposition tube 300 is further provided with a plurality of air blowing tubes 400 penetrating the lower surface 102.
  • the suction duct 200 is perpendicular to the lower surface 102 of the housing 100 and has an intake port 201.
  • the blow pipe 400 has a blow port 401, and the blow port 401 of the blow pipe 400 is inclined toward the intake pipe 200.
  • the angle between the blowing pipe 400 and the lower surface 102 of the casing 100 is 30° to 60°.
  • the angle between the blowing pipe 400 and the lower surface 102 of the casing 100 is 45. °.
  • the airflow direction of the air blowing pipe 400a is Q1
  • the airflow direction of the air suction pipe 200 is Q2
  • the two airflow directions Q1, Q2 are neither intersect nor parallel, that is, not in the same plane. on.
  • the air blowing port 401a of the air blowing pipe 400a is inclined to the air suction pipe 200.
  • Other blowpipes 400 can also be referred to the foregoing, and will not be described herein.
  • the direction of the coating molecules blown out by the vapor deposition tube 300 is Q3, which is parallel to the direction of the gas flow Q2 taken in by the suction pipe 200, and is opposite in direction.
  • the above arrangement of all the blow pipes 400 causes the airflow blown from the blow port 401 of the blow pipe 400 to be counterclockwise, and the swirling airflow is continuously raised, and is sucked from the intake port 201 of the intake pipe 200. It can be understood that if the inclination direction of all the air blowing pipes 400 with respect to the casing 100 is symmetrical with the radial direction of the casing 100 with respect to the inclination direction of the air blowing pipe 400 in the above embodiment with respect to the casing 100, the air blowing pipe 400 is caused. The airflow blown inside is clockwise.
  • the wire break repairing machine further includes a vapor deposition device, an air blowing device, and a getter device (not shown), and the vapor deposition device is in communication with the vapor deposition tube 300, the getter device and the suction device
  • the air tube 200 is in communication
  • the air blowing device is in communication with the air blowing tube 400.
  • the air suction device and the air blowing device may be disposed in the housing 100 or outside the housing 100, and the air suction device and the air blowing device may be separately provided.
  • the air blowing device mainly includes an air blowing fan that rotates at a high speed to blow the inert gas in the air blowing device from the air blowing pipe 400.
  • the air suction device mainly comprises an air suction fan which rotates at a high speed and makes the air pressure in the air suction pipe 200 smaller than the air pressure outside the air suction pipe 200, so that the external air flow can be continuously from the air suction pipe. 200 into the suction device.
  • the air suction device communicates with the air passage of the air blowing device, that is, the inert gas sucked from the air suction pipe 200 by the air suction device can be blown out from the air blowing pipe 400 through the air blowing fan of the air blowing device.
  • the wire break repairing machine further includes a controller (not shown) that controls the operation of the vapor deposition device, the air blowing device, and the air suction device, and the controller and the vapor deposition device respectively blow air The device is connected to the suction device.
  • the controller may control the vapor deposition device and the air blowing device to work at the same time, and control the operation of the air suction device after a preset time. In this way, after the inert gas blown by the air blowing pipe 400 is swirled up, the air suction device can quickly suck the suction port 201 of the sub air intake pipe 200 therein, thereby improving work efficiency.
  • the edge of the air blowing port 401 of the air blowing pipe 400 has a first guiding ring 402; the edge of the vapor deposition port 301 of the vapor deposition tube 300 has a second guiding ring 302.
  • the coating material sprayed from the vapor deposition port 301 and the air flow blown by the air blowing pipe 400 are respectively guided through the second guide ring 302 and the first guide ring 402, and the coating material is blown out along with the blow pipe 400.
  • the airflow gathers from the outside to the inside and closes to the broken line to form a coating.
  • the air blowing tubes 400 are an even number, and the air blowing tubes 400 are symmetrically disposed with respect to the air suction tubes 200.
  • the vapor deposition tube 300 may be an even number, and the vapor deposition tube 300 is symmetrically disposed with respect to the suction tube 200.

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  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Manufacturing Of Printed Wiring (AREA)

Abstract

本发明公开一种断线修补机，其包括吸气管、吹气管、蒸镀管；所述吹气管设置在所述吸气管的四周，所述吹气管具有吹气口，该吹气口向吸气管倾斜，且吹气管相对于吸气管呈异面设置；所述蒸镀管位于所述吸气管与吹气管之间，且与所述吸气管平行设置。本发明通过上述吹气管、吸气管及蒸镀管的结构设计，使得吹气管吹出的惰性气体的方向是由外向内，所以蒸镀管中喷出的镀膜分子向断线处靠拢，避免了现有技术中扩散的镀膜分子造成的短路，进一步提高了镀膜的成功率。

Description

断线修补机
技术领域
本发明涉及液晶面板技术领域，尤其涉及一种用于修补阵列基板断线的断线修补机。
背景技术
液晶显示器（Liquid Crystal Display，LCD）是利用液晶材料的特性来显示图像的一种平板显示装置（Flat Panel Display，FPD），其相较于其他显示装置而言具轻薄、低驱动电压及低功耗等优点，已经成为整个消费市场上的主流产品。
液晶面板是液晶显示器最主要的组成元件，液晶面板的制作工艺主要分为前段阵列制程、中段成盒制程及后段模组组装。其中，前段阵列制程包括：首先在基板上通过沉积薄膜层进行成膜；然后在薄膜层上涂光刻胶，并通过对其曝光、显影、蚀刻、去光刻胶等制程以形成扫描线、半导体层、数据线、保护层及透明导电层等等。而且前段阵列制程结束后，还需要对阵列基板行相应的检测，以检测阵列基板的扫描线或数据线中是否存在短路或断路，若存在短路或断路，则需要通过修补机对其进行处理。当发现断路时，修补机先使用激光除去断路的两端点上的覆盖物，如半导体层等，然后在断路的两端点间进行镀膜，从而形成通路。
现有的断线修补机在对断线处进行镀膜时，需要喷不会在高温条件下与镀膜材料发生化学反应的气体，如惰性气体等，让镀膜稳定。如图1所示，图1是现有技术中断线修补机对断路处进行镀膜的结构示意图。该断线修补机的中部设置惰性气体的喷气口101，该惰性气体的喷气口101四周设置蒸镀口102，通过其喷出的镀膜材料分子对基板的断线处进行镀膜。该蒸镀口102的外围还设置吸气口103，用于吸入稳定镀膜的惰性气体。
上述断线修补机中，由于喷气口101与吸气口103之间形成一气流道，使得该惰性气体向外扩散，从而带动镀膜材料分子也向外扩散，因此将造成镀膜面积增大，而造成镀膜的周围与基板的其他线路连接，而出现短路现象，如图2所示，图2是图1所示的断线修补机的镀膜面积过大而造成短路的示意图。
故，如何避免在断线修补的过程中镀膜面积过大而造成短路成为业内亟待解决的问题。
发明内容
本发明的主要目的是提供一种断线修补机，旨在提高镀膜的成功率。
本发明提供了一种断线修补机，包括吸气管、吹气管及蒸镀管；所述吹气管设置在所述吸气管的四周，所述吹气管具有吹气口，该吹气口向吸气管倾斜，且吹气管相对于吸气管呈异面设置；所述蒸镀管位于所述吸气管与吹气管之间，且与所述吸气管平行设置。
优选地，所述断线修补机还包括一壳体，所述吸气管、吹气管及蒸镀管均设置在所述壳体的下表面上；所述吸气管垂直壳体设置；所述吹气管与所述壳体的下表面之间的夹角为30~60°。
优选地，所述蒸镀管包括蒸镀口，所述吸气管包括吸气口；所述蒸镀管的蒸镀口与壳体的垂直距离大于所述吸气管的吸气口与壳体的垂直距离，且小于所述吹气管的吹气口与所述壳体的垂直距离。
优选地，所述吸气管包括吸气口，所述吹气管的吹气口围合形成的面积小于或等于所述吸气管的吸气口的面积。
优选地，所述断线修补机还包括与所述吹气管连接的控制器，该控制器用于控制所述吹气管的吹气口向所述吸气管运动。
优选地，所述吹气管与所述壳体的下表面之间的夹角为45°。
优选地，所述断线修补机还包括一壳体，该壳体具有下表面，所述吸气管设置在所述壳体的中部且贯穿下表面；所述蒸镀管及吹气管均设置在所述壳体内且贯穿壳体的下表面；所述吹气管与所述壳体的下表面之间的夹角为30~60°。
优选地，所述吹气口的边缘具有第一导向环；所述蒸镀管具有蒸镀口，该蒸镀口的边缘具有第二导向环。
优选地，所述吹气管与所述壳体的下表面之间的夹角为45°。
本发明还提供了一种断线修补机，包括吸气管、吹气管及蒸镀管；所述吹气管设置在所述吸气管的四周，所述吹气管相对于吸气管倾斜且呈异面设置；所述蒸镀管位于所述吸气管与吹气管之间。
优选地，所述断线修补机还包括一壳体，所述吸气管、吹气管及蒸镀管均设置在所述壳体的下表面上；所述吸气管垂直壳体设置；所述吹气管具有吹气口，该吹气口向吸气管倾斜设置；所述吹气管与所述壳体的下表面之间的夹角为30~60°。
优选地，所述蒸镀管包括蒸镀口，所述吸气管包括吸气口；所述蒸镀管的蒸镀口与壳体的垂直距离大于所述吸气管的吸气口与壳体的垂直距离，且小于所述吹气管的吹气口与所述壳体的垂直距离。
优选地，所述吸气管包括吸气口，所述吹气管的吹气口围合形成的面积小于或等于所述吸气管的吸气口的面积。
优选地，所述断线修补机还包括与所述吹气管连接的控制器，该控制器用于控制所述吹气管的吹气口向所述吸气管运动。
优选地，所述吹气管与所述壳体的下表面之间的夹角为45°。
优选地，所述断线修补机还包括一壳体，该壳体具有下表面，所述吸气管设置在所述壳体的中部且贯穿下表面；所述蒸镀管及吹气管均设置在所述壳体内且贯穿壳体的下表面；所述吹气管与所述壳体的下表面之间的夹角为30~60°。
优选地，所述吹气管具有吹气口，该吹气口的边缘具有第一导向环；所述蒸镀管具有蒸镀口，该蒸镀口的边缘具有第二导向环。
优选地，所述断线修补机还包括与所述蒸镀管连通的蒸镀装置、与所述吹气管连通的吹气装置、与所述吸气管连通的吸气装置及控制所述蒸镀装置、吹气装置及吸气装置工作的控制器，所述控制器分别与所述蒸镀装置、吹气装置及吸气装置连接。
优选地，所述吹气管与所述壳体的下表面之间的夹角为45°。
本发明通过上述吹气管、吸气管及蒸镀管的结构设计，使得吹气管吹出的惰性气体的方向是由外向内，所以蒸镀管中喷出的镀膜分子向断线处靠拢，避免了现有技术中扩散的镀膜分子造成的短路，进一步提高了镀膜的成功率。
附图说明
图1是现有技术中激光修补机对断处进行镀膜的结构示意图；
图2是图1所示的断线修补机的镀膜面积过大而造成短路的示意图；
图3是本发明断线修补机第一实施例的结构示意图；
图4是图3所示的断线修补机对断线处镀膜后的断线处的示意图；
图5是图3所示的断线修补机的正视结构示意图；
图6是图3所示的断线修补机的仰视结构示意图；
图7是本发明断线修补机第二实施例的结构示意图；
图8是本发明断线修补机第三实施例的结构示意图；
图9是图8所示断线修补机的仰视结构示意图；
图10是图9中断线修补机沿A-A线的剖面示意图。
本发明目的的实现、功能特点及优点将结合实施例，参照附图做进一步说明。
具体实施方式
以下将结合附图及实施例，对实现发明目的的技术方案作详细说明。应当理解，此处所描述的具体实施例仅仅用以解释本发明，并不用于限定本发明。
图3是本发明断线修补机第一实施例的结构示意图。参照图3，该断线修补机放置在基板的上方，主要用于对阵列基板上的断线进行镀膜连接。其包括一壳体10，该壳体具有一下表面14，且该壳体10的下表面14上设置吸气管11及吹气管21。所述吹气管21设置在所述吸气管11的四周，且所述吹气管21相对于吸气管11倾斜设置，所述吹气管21与吸气管11呈异面设置。该壳体10上还设置蒸镀管31，该蒸镀管31位于所述吸气管11与吹气管21之间。
由于吹气管21设置在所述吸气管11的四周，且吹气管21相对于吸气管10倾斜并呈异面设置，同时所述蒸镀管31位于吹气管21与吸气管11之间，所以在蒸镀管31喷出镀膜分子的同时，吹气管21也将惰性气体靠近吸气管11喷出，使得镀膜分子向断线处靠拢，从而镀膜稳定。然后，处于中间的惰性气体将从吸气管11进入吸气装置。如图4所示，图4是图3所示的断线修补机对断线处镀膜后的断线处的示意图。该镀膜处得到了精准的控制，其不会扩散至旁边的元件而造成短路，从而提高了镀膜成功率。
本发明通过上述吹气管21、吸气管11及蒸镀管31的结构设计，从而使得吹气管21吹出的惰性气体的方向是由外向内，所以蒸镀管31中喷出的镀膜分子向断线处靠拢，避免了现有技术中扩散的镀膜分子造成的短路，进一步提高了镀膜的成功率。
进一步的，所述吸气管11垂直壳体10设置，其具有吸气口111。所述吹气管21具有吹气口211，且吹气管21的吹气口211向吸气管11倾斜。所述吹气管21与所述壳体10平面之间的夹角为30°～60°，优选的，吹气管21与壳体10平面之间的夹角为45°。
具体地，结合参照图5，图5是图3中断线修补机的正视结构示意图。以其中一个吹气管21a为例，其吹气管21a吹出的气流方向为P1，吸气管11吸入的气流方向为P2，且两气流方向P1、P2既不相交，也不平行，即不在同一平面上。同时，吹气管21a的吹气口211a向吸气管11倾斜设置。其他的吹气管21也可以参照前面所述，在此就不再赘述。蒸镀管31吹出的镀膜分子的方向为P3，其与吸气管11吸入的气流方向P2相互平行、且方向相反。
结合图6所示，图6是图3中断线修补机的仰视结构示意图。所有吹气管21的上述设置，使得从吹气管21吹气口211吹出的气流呈逆时针的回旋状，该回旋状的气流不断上升，进而从吸气管11的吸气口111吸入。
可以理解的是，参照图7，图7是本发明断线修补机第二实施例的结构示意图。若所有吹气管21相对于壳体10的倾斜方向与上述实施例中的吹气管21相对于壳体10的倾斜方向以壳体10的径向方向对称，则使得吹气管21内吹出的气流呈顺时针的回旋状。
进一步的，上述断线修补机还包括蒸镀装置、吹气装置及吸气装置（图中未示出），该蒸镀装置与所述蒸镀管31连通，该吸气装置与所述吸气管11连通，所述吹气装置与所述吹气管21连通。
具体地，上述吸气装置及吹气装置可以设置在壳体10内或壳体10外，且吸气装置及吹气装置可以独立分开设置。例如，吹气装置主要包括一吹气风机，该吹气风机将高速旋转，从而将吹气装置内的惰性气体从吹气管21吹出。吸气装置主要包括一吸气风机，该吸气风机将高速旋转，并且使得吸气管11内的气压比吸气管11外的气压小，从而使得可以将外界的气流不断的从吸气管11吸入吸气装置内。
可以理解的是，上述吸气装置与吹气装置也可以组合为同一装置。例如，吸气装置与吹气装置的风道相连通，即吸气装置自吸气管11吸入的惰性气体，可以再经过吹气装置的吹气风机从吹气管21吹出。
进一步的，上述断线修补机还包括控制所述蒸镀装置、吹气装置及吸气装置工作的控制器（图中未示出），所述控制器分别与所述蒸镀装置、吹气装置及吸气装置连接。
具体地，上述控制器可以控制蒸镀装置及吹气装置同时工作，待一预置时间后，控制吸气装置工作。如此可以使得被吹气管21吹出的惰性气体回旋上升后，吸气装置可以快速地将其子吸气管11的吸气口111吸入其内，从而提高了工作效率。
进一步的，该控制器还可以与吹气管21连接，用于控制吹气管21的吹气口211向吸气管11运动。具体地，在控制吹气装置从吹气管21吹气的同时，控制吹气管21的吹气口211向吸气管11移动，使经吹气管21吹出的惰性气体向吸气管11聚集，并回旋上升，从而使得吸气管11能更有效地吸收惰性气体。而且，该控制器也可以先控制吹气装置工作，而后控制蒸镀装置工作，最后再控制吸气装置工作。通过控制器，不但可以提高镀膜的成功率，而且还节约了能耗。
进一步的，上述蒸镀管31具有蒸镀口311，且该蒸镀口311与壳体10之间的垂直距离小于吹气管21的吹气口211与壳体10之间的垂直距离，且大于吸气管11的吸气口111与壳体10之间的垂直距离。进一步的，所述吹气管21的吹气口211围合形成的面积小于或等于所述吸气管11的吸气口111的面积。当将该断线修补机设置在阵列基板上方时，通过吹气管21与吸气管11的上述设置，可以使得吹气管21吹出的惰性气体都被吸气管11吸入，从而进一步提高了镀膜的效率。
进一步的，上述吹气管为偶数个，并且该吹气管21相对于所述吸气管11呈对称设置。同时，上述蒸镀管31也可以为偶数个，并且该蒸镀管31相对于所述吸气管11呈对称设置。
请参阅图8至图10，图8是本实施新型断线修补机的第三实施例的结构示意图；图9是图8所示断线修补机的仰视结构示意图；图10是图9中断线修补机沿A-A线的剖面示意图。该断线修补机具有壳体100，该壳体100呈圆柱状，其具有上表面101及下表面102。该壳体100的中部开设有贯穿下表面102的吸气管200，该壳体100在吸气管200的四周还形成有若干个与该吸气管200平行且贯穿下表面102的蒸镀管300，该蒸镀管300的外围还设置有若干个贯穿下表面102的吹气管400。
所述吸气管200与壳体100的下表面102垂直，其具有吸气口201。所述吹气管400具有吹气口401，且吹气管400的吹气口401向吸气管200倾斜。所述吹气管400与所述壳体100的下表面102之间的夹角为30°～60°，优选的，吹气管400与所述壳体100的下表面102之间的夹角为45°。
以其中一个吹气管400a为例，其吹气管400a吹出的气流方向为Q1，吸气管200吸入的气流方向为Q2，且两气流方向Q1、Q2既不相交，也不平行，即不在同一平面上。同时，吹气管400a的吹气口401a向吸气管200倾斜设置。其他的吹气管400也可以参照前面所述，在此就不再赘述。蒸镀管300吹出的镀膜分子的方向为Q3，其与吸气管200吸入的气流方向Q2相互平行、且方向相反。
所有吹气管400的上述设置，使得从吹气管400吹气口401吹出的气流呈逆时针的回旋状，该回旋状的气流不断上升，进而从吸气管200的吸气口201吸入。可以理解的是，若所有吹气管400相对于壳体100的倾斜方向与上述实施例中的吹气管400相对于壳体100的倾斜方向以壳体100的径向方向对称，则使得吹气管400内吹出的气流呈顺时针的回旋状。
进一步的，上述断线修补机还包括蒸镀装置、吹气装置及吸气装置（图中未示出），该蒸镀装置与所述蒸镀管300连通，该吸气装置与所述吸气管200连通，所述吹气装置与所述吹气管400连通。
具体地，上述吸气装置及吹气装置可以设置在壳体100内或壳体100外，且吸气装置及吹气装置可以独立分开设置。例如，吹气装置主要包括一吹气风机，该吹气风机将高速旋转，从而将吹气装置内的惰性气体从吹气管400吹出。吸气装置主要包括一吸气风机，该吸气风机将高速旋转，并且使得吸气管200内的气压比吸气管200外的气压小，从而使得可以将外界的气流不断的从吸气管200吸入吸气装置内。
可以理解的是，上述吸气装置与吹气装置也可以组合为同一装置。例如，吸气装置与吹气装置的风道相连通，即吸气装置自吸气管200吸入的惰性气体，可以再经过吹气装置的吹气风机从吹气管400吹出。
进一步的，上述断线修补机还包括控制所述蒸镀装置、吹气装置及吸气装置工作的控制器（图中未示出），所述控制器分别与所述蒸镀装置、吹气装置及吸气装置连接。
具体地，上述控制器可以控制蒸镀装置及吹气装置同时工作，待一预置时间后，控制吸气装置工作。如此可以使得被吹气管400吹出的惰性气体回旋上升后，吸气装置可以快速地将其子吸气管200的吸气口201吸入其内，从而提高了工作效率。
所述吹气管400的吹气口401的边缘具有第一导向环402；所述蒸镀管300的蒸镀口301的边缘具有第二导向环302。在该断线修补机工作时，蒸镀口301喷出的镀膜材料和吹气管400吹出的气流分别经过第二导向环302和第一导向环402导向后，镀膜材料随着吹气管400吹出的气流，由外向内聚集，并向断线处靠拢，形成镀膜处。
进一步的，上述吹气管400为偶数个，并且该吹气管400相对于所述吸气管200呈对称设置。同时，上述蒸镀管300也可以为偶数个，并且该蒸镀管300相对于所述吸气管200呈对称设置。
以上所述仅为本发明的优选实施例，并非因此限制本发明的专利范围，凡是利用本发明说明书及附图内容所作的等效结构或流程变换，或直接或间接运用在其他相关的技术领域，均同理包括在本发明的专利保护范围内。

Claims (19)

  1. 一种断线修补机，其特征在于，包括吸气管、吹气管及蒸镀管；所述吹气管设置在所述吸气管的四周，所述吹气管具有吹气口，该吹气口向吸气管倾斜，且吹气管相对于吸气管呈异面设置；所述蒸镀管位于所述吸气管与吹气管之间，且与所述吸气管平行设置。
  2. 根据权利要求1所述的断线修补机，其特征在于，所述断线修补机还包括一壳体，所述吸气管、吹气管及蒸镀管均设置在所述壳体的下表面上；所述吸气管垂直壳体设置；所述吹气管与所述壳体的下表面之间的夹角为30~60°。
  3. 根据权利要求2所述的断线修补机，其特征在于，所述蒸镀管包括蒸镀口，所述吸气管包括吸气口；所述蒸镀管的蒸镀口与壳体的垂直距离大于所述吸气管的吸气口与壳体的垂直距离，且小于所述吹气管的吹气口与所述壳体的垂直距离。
  4. 根据权利要求2所述的断线修补机，其特征在于，所述吸气管包括吸气口，所述吹气管的吹气口围合形成的面积小于或等于所述吸气管的吸气口的面积。
  5. 根据权利要求2所述的断线修补机，其特征在于，所述断线修补机还包括与所述吹气管连接的控制器，该控制器用于控制所述吹气管的吹气口向所述吸气管运动。
  6. 根据权利要求2所述的断线修补机，其特征在于，所述吹气管与所述壳体的下表面之间的夹角为45°。
  7. 根据权利要求1所述的断线修补机，其特征在于，所述断线修补机还包括一壳体，该壳体具有下表面，所述吸气管设置在所述壳体的中部且贯穿下表面；所述蒸镀管及吹气管均设置在所述壳体内且贯穿壳体的下表面；所述吹气管与所述壳体的下表面之间的夹角为30~60°。
  8. 根据权利要求7所述的断线修补机，其特征在于，所述吹气口的边缘具有第一导向环；所述蒸镀管具有蒸镀口，该蒸镀口的边缘具有第二导向环。
  9. 根据权利要求7所述的断线修补机，其特征在于，所述吹气管与所述壳体的下表面之间的夹角为45°。
  10. 一种断线修补机，其特征在于，包括吸气管、吹气管及蒸镀管；所述吹气管设置在所述吸气管的四周，所述吹气管相对于吸气管倾斜且呈异面设置；所述蒸镀管位于所述吸气管与吹气管之间。
  11. 根据权利要求10所述的断线修补机，其特征在于，所述断线修补机还包括一壳体，所述吸气管、吹气管及蒸镀管均设置在所述壳体的下表面上；所述吸气管垂直壳体设置；所述吹气管具有吹气口，该吹气口向吸气管倾斜设置；所述吹气管与所述壳体的下表面之间的夹角为30~60°。
  12. 根据权利要求11所述的断线修补机，其特征在于，所述蒸镀管包括蒸镀口，所述吸气管包括吸气口；所述蒸镀管的蒸镀口与壳体的垂直距离大于所述吸气管的吸气口与壳体的垂直距离，且小于所述吹气管的吹气口与所述壳体的垂直距离。
  13. 根据权利要求11所述的断线修补机，其特征在于，所述吸气管包括吸气口，所述吹气管的吹气口围合形成的面积小于或等于所述吸气管的吸气口的面积。
  14. 根据权利要求11所述的断线修补机，其特征在于，所述断线修补机还包括与所述吹气管连接的控制器，该控制器用于控制所述吹气管的吹气口向所述吸气管运动。
  15. 根据权利要求11所述的断线修补机，其特征在于，所述吹气管与所述壳体的下表面之间的夹角为45°。
  16. 根据权利要求10所述的断线修补机，其特征在于，所述断线修补机还包括一壳体，该壳体具有下表面，所述吸气管设置在所述壳体的中部且贯穿下表面；所述蒸镀管及吹气管均设置在所述壳体内且贯穿壳体的下表面；所述吹气管与所述壳体的下表面之间的夹角为30~60°。
  17. 根据权利要求16所述的断线修补机，其特征在于，所述吹气管具有吹气口，该吹气口的边缘具有第一导向环；所述蒸镀管具有蒸镀口，该蒸镀口的边缘具有第二导向环。
  18. 根据权利要求16所述的断线修补机，其特征在于，所述断线修补机还包括与所述蒸镀管连通的蒸镀装置、与所述吹气管连通的吹气装置、与所述吸气管连通的吸气装置及控制所述蒸镀装置、吹气装置及吸气装置工作的控制器，所述控制器分别与所述蒸镀装置、吹气装置及吸气装置连接。
  19. 根据权利要求16所述的断线修补机，其特征在于，所述吹气管与所述壳体的下表面之间的夹角为45°。
PCT/CN2012/079925 2012-07-09 2012-08-10 断线修补机 WO2014008701A1 (zh)

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