WO2013172394A1 - 半導体装置 - Google Patents
半導体装置 Download PDFInfo
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- WO2013172394A1 WO2013172394A1 PCT/JP2013/063610 JP2013063610W WO2013172394A1 WO 2013172394 A1 WO2013172394 A1 WO 2013172394A1 JP 2013063610 W JP2013063610 W JP 2013063610W WO 2013172394 A1 WO2013172394 A1 WO 2013172394A1
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- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/70—Bipolar devices
- H01L29/72—Transistor-type devices, i.e. able to continuously respond to applied control signals
- H01L29/739—Transistor-type devices, i.e. able to continuously respond to applied control signals controlled by field-effect, e.g. bipolar static induction transistors [BSIT]
- H01L29/7393—Insulated gate bipolar mode transistors, i.e. IGBT; IGT; COMFET
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- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/70—Bipolar devices
- H01L29/72—Transistor-type devices, i.e. able to continuously respond to applied control signals
- H01L29/739—Transistor-type devices, i.e. able to continuously respond to applied control signals controlled by field-effect, e.g. bipolar static induction transistors [BSIT]
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- H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
- H01L23/498—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
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- H01L29/0619—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse biased devices by the doping profile or the shape or the arrangement of the PN junction, or with supplementary regions, e.g. junction termination extension [JTE] with a supplementary region doped oppositely to or in rectifying contact with the semiconductor containing or contacting region, e.g. guard rings with PN or Schottky junction
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- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
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Definitions
- the present invention relates to a semiconductor device.
- this power conversion device includes a BJT (Bipolar Junction Transistor), an IGBT (Insulated Gate Bipolar Transistor), a MOS-FET (Metal Oxide Semiconductor Field Transistor effect transistor). Many power semiconductor devices such as FWD (Free Wheeling Diode) are mounted.
- BJT Bipolar Junction Transistor
- IGBT Insulated Gate Bipolar Transistor
- MOS-FET Metal Oxide Semiconductor Field Transistor effect transistor
- the power semiconductor device mounted on the power conversion device has historically been replaced by a current-driven BJT with a high loss to a voltage-driven IGBT or MOSFET with a low loss.
- IGBTs are particularly attracting attention because they are devices that have both high-speed switching characteristics and voltage drive characteristics of MOSFETs and low on-voltage characteristics of bipolar transistors. .
- a direct current smoothing circuit composed of an electrolytic capacitor, a direct current reactor and the like is not required.
- Matrix converters have attracted attention as direct conversion circuits that can be used. Since this matrix converter is used under AC voltage, the switching devices used as its components require bidirectional switching devices that have bidirectional electrical characteristics that can control current in the forward and reverse directions. And As such a bidirectional switching device, an IGBT having a breakdown voltage characteristic in both the forward direction and the reverse direction (hereinafter referred to as a reverse blocking IGBT) is known.
- the reverse blocking IGBT is an IGBT having a high reliability characteristic in the reverse breakdown voltage (reverse breakdown voltage) in addition to the normal forward breakdown voltage (forward breakdown voltage), and the low cost of the reverse blocking IGBT having such characteristics. Offering in is required.
- FIG. 5 is a cross-sectional view showing a structure of a main part of a conventional reverse blocking IGBT.
- the reverse blocking IGBT prior to the reverse blocking IGBT 100 required a deep diffusion layer (p-type separation layer) reaching the back surface from the front surface of the semiconductor substrate. .
- this deep diffusion layer involves many undesired problems (characteristic defects and high cost) with respect to device characteristics and manufacturing equipment. are known.
- a shallower p + -type isolation layer 4 from the front surface of the substrate to a predetermined depth is formed instead of the conventional p-type isolation layer formed of a deep diffusion layer.
- the above-mentioned problems that occurred in the reverse blocking IGBT having the p-type isolation layer made of the conventional deep diffusion layer were reduced and the practicality was increased.
- the V-shaped groove 8 is formed at a depth that contacts the bottom of the p + -type isolation layer 4 from the back side of the substrate facing the p-type isolation layer 4. .
- a p-type collector layer 9 is formed on the back flat portion surrounded by the V-shaped groove 8.
- a p-type thin layer 11 is formed along the inner surface (side wall portion 10) of the V-shaped groove 8. The p-type thin layer 11 is in contact with the p + -type isolation layer 4 and the p-type collector layer 9.
- the p-type separation layer 4 Since the p-type thin layer 11 connects the p-type separation layer 4 and the p-type collector layer 9 with the same conductivity type, the p-type separation layer 4 has the same function as the p-type separation layer formed of the deep diffusion layer. .
- a conventional p-type isolation layer consisting of a diffusion layer having a depth that requires long-time diffusion at a high temperature is simply not formed.
- Reference numeral 5 denotes a guard ring
- reference numeral 6 denotes a field insulating film
- reference numeral 7 denotes a field plate
- reference numeral 12 denotes a collector electrode.
- the reverse breakdown voltage failure caused by the Al (aluminum) spike phenomenon can be reduced.
- a collector electrode having a Si (aluminum silicon) film as a first layer is provided (see, for example, Patent Document 2 below).
- the Al spike phenomenon is a phenomenon in which the collector electrode and the member to be joined are mounted at the time of soldering to mount the chip, and the metal film on the back surface of the chip constituting the collector electrode is directly applied to the Si substrate.
- This is a phenomenon in which Al atoms in the Al—Si film that comes into contact with Si atoms in the Si substrate are interdiffused, and Al atoms called “Al spikes” are deposited in minute dents from which Si atoms have escaped from the Si substrate.
- Al spike phenomenon is likely to occur when the Si concentration in the Al-Si film is low or absent.
- JP 2011-181770 A (FIGS. 1 to 3) JP 2007-36211 (Abstract, paragraph 0016) JP 2006-59929 A (paragraphs 0018 to 0019)
- the conventional reverse blocking IGBT 100 having the structure shown in FIG. 5 suggested from the description in Patent Document 1 or the description in Patent Document 1 is disclosed in Patent Document 2. Even if the collector electrode 12 mainly composed of a metal laminated film such as Al—Si / Ti (titanium) / Ni / Au (gold) that meets the conditions described in FIG. It turns out that it still does not disappear.
- a metal laminated film such as Al—Si / Ti (titanium) / Ni / Au (gold) that meets the conditions described in FIG. It turns out that it still does not disappear.
- the Al spike has a problem that the Al—Si film in contact with the surface of the p-type collector layer 9 is thin among the metal laminated films constituting the collector electrode 12, and the p-type collector layer This is likely to occur when the thickness 9 is thin and the pn junction between the n ⁇ drift layer 1 and the p-type collector layer 9 is very close to the back surface of the substrate.
- the Al spike generated on the back surface of the substrate reaches the pn junction between the n ⁇ drift layer 1 and the p-type collector layer 9, there is a high possibility that leakage current increases and breakdown voltage deteriorates.
- the present invention eliminates the problems caused by the prior art described above, and does not cause an increase in leakage current due to Al spikes even after the soldering processing temperature is applied, and can perform soldering appropriately and easily.
- An object of the present invention is to provide a semiconductor device capable of performing
- a semiconductor device has the following characteristics.
- a p-type isolation layer is provided at a predetermined depth from one main surface of the n-type semiconductor substrate.
- the p-type isolation layer surrounds the semiconductor functional region.
- a V-shaped groove reaching the bottom of the p-type isolation layer from the other main surface of the n-type semiconductor substrate is provided.
- a p-type semiconductor layer is provided in a portion surrounded by the V-shaped groove on the other main surface of the n-type semiconductor substrate.
- a p-type semiconductor thin layer is provided along the side wall of the V-shaped groove. The p-type semiconductor thin layer connects the p-type isolation layer and the p-type semiconductor layer.
- a metal electrode that contacts the surface of the p-type semiconductor layer and the surface of the p-type semiconductor thin layer is provided.
- the metal electrode includes, in order from at least the n-type semiconductor substrate side, a first metal film that is an Al—Si film, a second metal film mainly composed of a metal having solder wettability, and an oxidation of the second metal film. It is a laminated film in which a third metal film to be prevented is laminated.
- the thickness of the Al—Si film in the portion in contact with the surface of the p-type semiconductor layer is in the range of 1.1 ⁇ m to 3.0 ⁇ m.
- the thickness of the Al—Si film in the portion in contact with the surface of the p-type semiconductor thin layer is in the range of 0.55 ⁇ m to 1.5 ⁇ m.
- the metal electrode is mainly composed of a metal having a melting point higher than that of the Al—Si film and the second metal film between the Al—Si film and the second metal film.
- a barrier layer as a component can also be provided.
- the barrier layer is a metal film mainly containing any one of titanium, tungsten, and platinum.
- the thickness of the barrier layer in the portion laminated on the surface of the p-type semiconductor layer is in the range of 0.08 ⁇ m to 0.2 ⁇ m,
- the thickness of the barrier layer in the portion laminated on the surface of the p-type semiconductor thin layer is more preferably in the range of 0.03 ⁇ m to 0.1 ⁇ m.
- the second metal film is a nickel film
- the thickness of the second metal film in the portion laminated on the surface of the p-type semiconductor layer is 0.2 ⁇ m to
- the thickness of the second metal film in the portion laminated on the surface of the p-type semiconductor thin layer may be any thickness of 0.1 ⁇ m to 0.6 ⁇ m. .
- the third metal film is a gold film
- the thickness of the third metal film in the portion laminated on the surface of the p-type semiconductor layer is 0.1 ⁇ m to The thickness is within a range of 0.4 ⁇ m
- the thickness of the third metal film in the portion laminated on the surface of the p-type semiconductor thin layer is any one of 0.05 ⁇ m to 0.2 ⁇ m. Is desirable.
- the third metal film is a silver film in the above-described invention, and the thickness of the third metal film in the portion laminated on the surface of the p-type semiconductor layer is 0.4 ⁇ m to
- the thickness of the third metal film in the portion laminated on the surface of the p-type semiconductor thin layer may be any thickness of 0.2 ⁇ m to 1.0 ⁇ m. .
- the semiconductor device comprises the metal-oxide film-semiconductor provided in the semiconductor functional region, which is the active region through which the main current flows, on one main surface side of the n-type semiconductor substrate in the above-described invention.
- the n-type semiconductor substrate may contain any material of silicon, silicon carbide and gallium nitride as a main component.
- Al spikes can be suppressed even after the soldering processing temperature is applied, so there is no increase in leakage current due to Al spikes, and solder bonding is properly performed. There is an effect that it is possible to provide a reverse blocking semiconductor device that can be easily performed.
- FIG. 1 is a cross-sectional view showing a structure in the vicinity of a V-shaped groove of a reverse blocking IGBT according to an embodiment of the present invention.
- FIG. 2 is a characteristic diagram showing the relationship between the holding time at the soldering processing temperature and the amount of reverse leakage current change when the reverse blocking IGBT is mounted.
- FIG. 3 is a characteristic diagram showing the relationship between the holding time at the soldering processing temperature and the reverse withstand voltage change amount when the reverse blocking IGBT is mounted.
- FIG. 4 is a characteristic diagram showing the thermal equilibrium state of Al—Si.
- FIG. 5 is a cross-sectional view showing a structure of a main part of a conventional reverse blocking IGBT.
- FIG. 6 is a flowchart showing an outline of a manufacturing method of the reverse blocking IGBT according to the embodiment of the present invention.
- FIG. 1 is a cross-sectional view showing a structure in the vicinity of a V-shaped groove of a reverse blocking IGBT according to an embodiment of the present invention.
- the reverse blocking IGBT 200 shown in FIG. 1 has a structure that does not require a conventional deep diffusion layer extending from the front surface to the back surface of an n ⁇ semiconductor substrate 37 made of, for example, Si (silicon) as a semiconductor material.
- the p-type isolation layer 33 of the reverse blocking IGBT 200 is a shallow p-type impurity diffusion layer extending from the front surface of the n ⁇ semiconductor substrate 37 to a predetermined depth.
- a V-shaped groove 31 reaching the bottom of the p-type isolation layer 33 from the back surface of the n ⁇ semiconductor substrate 37 is provided.
- Side wall portion 32 of V-shaped groove 31 has a tapered shape having a predetermined inclination with respect to the back surface of n ⁇ semiconductor substrate 37.
- the predetermined depth of the p-type isolation layer 33 is that the bottom of the V-shaped groove 31 formed from the back surface side of the n ⁇ semiconductor substrate 37 facing the p-type isolation layer 33 contacts the bottom of the p-type isolation layer 33. Depth that has a relationship. When the p-type isolation layer 33 is shallow, the V-shaped groove 31 must be formed deeply. On the other hand, if the p-type isolation layer 33 is made too shallow, it becomes difficult to handle the wafer so as not to break after the V-shaped groove 31 is formed. For this reason, the depth of the p-type isolation layer 33 is preferably about 50 ⁇ m or more from the front surface of the n ⁇ semiconductor substrate 37. In FIG.
- an alternate long and short dash line 20 shown at the center of the p-type separation layer 33 is a cutting line for dividing the wafer into chips.
- a p-type collector layer (second conductivity type semiconductor layer) 35 is formed on the back flat portion surrounded by the V-shaped groove 31.
- a p-type thin layer (second conductive semiconductor thin layer) 34 having a thickness smaller than that of the p-type collector layer 35 is formed along the inner wall (side wall portion 32 and bottom portion) of the V-shaped groove 31.
- the p-type thin layer 34 is in contact with the p-type isolation layer 33 and the p-type collector layer 35. Since the p-type thin layer 34 connects the p-type isolation layer 33 and the p-type collector layer 35 with the same conductivity type, the p-type isolation layer 33 is reversely blocked similarly to the conventional p-type isolation layer formed of a deep diffusion layer. Has a pressure resistance function.
- a conventional p-type isolation layer including a diffusion layer having a depth penetrating the n ⁇ semiconductor substrate 37 by long-time diffusion at a high temperature is simply used. Not only is it not formed, but also disadvantages such as a decrease in breakdown voltage due to donor formation of the n ⁇ semiconductor substrate 37 accompanying diffusion at a high temperature for a long time, an increase in leakage current due to generation of crystal defects, and a deterioration in equipment throughput can be avoided. Details of the configuration of the reverse blocking IGBT 200 will be described later.
- FIG. 6 is a flowchart showing an outline of a manufacturing method of the reverse blocking IGBT according to the embodiment of the present invention.
- a p-type separation layer (separation diffusion layer) 33 is selectively formed on the front surface layer of the n ⁇ semiconductor substrate 37 by, for example, ion implantation and thermal diffusion (FIG. 6A).
- a MOS gate such as a source region or a gate electrode is formed in an active region (semiconductor functional region) through which a main current flows, surrounded by the p-type isolation layer 33 on the front surface side of the n ⁇ semiconductor substrate 37.
- Steps of forming a device structure having a front-side semiconductor function such as an emitter electrode, etc., and an insulating gate) structure made of metal-oxide film-semiconductor are sequentially performed (FIG. 6B).
- n - after sticking a supporting substrate such as quartz glass on the front surface side of the - (drift layer n), n - semiconductor substrate 37 by grinding the back surface of the semiconductor substrate 37, n - semiconductor substrate 37 a predetermined (Fig. 6 (c)).
- the back surface (ground surface) after grinding of the n ⁇ semiconductor substrate 37 is cleaned.
- the V-shaped groove 31 is selectively formed from the back surface side of the n ⁇ semiconductor substrate 37 facing the p-type isolation layer 33 by, for example, alkali etching (FIG. 6D).
- the V-shaped groove 31 has a depth that reaches the bottom of the p-type isolation layer 33.
- a p-type impurity such as boron (B) is ion-implanted into the back surface of the n ⁇ semiconductor substrate 37 (including the inner wall of the V-shaped groove 31) to form the p-type collector layer 35 in the flat back surface and the V-shaped groove.
- a p-type thin layer 34 is simultaneously formed along the side wall 32 of 31 (FIG. 6E).
- collector electrodes 36a and 36b that are in ohmic contact with the surfaces of the p-type collector layer 35 and the p-type thin layer 34, respectively, are simultaneously formed by, for example, sputter deposition (FIG. 6G), so that the reverse shown in FIG.
- the blocking IGBT 200 is completed.
- FIG. 6G sputter deposition
- reference numeral 38 denotes a guard ring made of a p region provided in a breakdown voltage structure region surrounding the active region
- reference numeral 39 denotes a field insulating film
- reference numeral 40 denotes a field plate.
- the manufacturing process other than the conditions for forming the collector electrodes 36a and 36b may be the same as the manufacturing process of the conventional reverse blocking IGBT shown in FIG.
- the collector electrodes 36a and 36b on the back surface side of the substrate have an Al—Si (aluminum silicon) film (first metal film) 42 and solder wettability in order from the back surface of the n ⁇ semiconductor substrate 37.
- a metal film containing Ni (nickel) as a main component hereinafter referred to as Ni-based metal film 44: second metal film
- Ni-based metal film 44 second metal film
- a laminated film including at least a metal film containing Au (gold) as a main component (hereinafter referred to as an Au-based metal film 45: a third metal film) as an outermost metal film containing a metal having a high function to prevent as a main component Prepare.
- a metal film mainly composed of a refractory metal such as Ti (titanium) as the barrier layer 43 it is preferable to provide a metal film mainly composed of a refractory metal such as Ti (titanium) as the barrier layer 43.
- the barrier layer 43 includes silicon (Si) atoms in the n ⁇ semiconductor substrate 37 and a solder bonding layer that is a bonding layer between the collector electrodes 36 a and 36 b and a member to be bonded (for example, a Cu (copper) plate of an insulating substrate). It has a function of preventing the diffusion of Sn (tin) atoms.
- the tapered side wall portion 32 of the V-shaped groove 31 (the angle with respect to the substrate main surface is, for example, about 53.7 degrees) is formed.
- the thickness of the collector electrode 36b on the side wall portion 32 of the V-shaped groove 31 is about half of the thickness of the collector electrode 36a formed on the back flat portion simultaneously with the collector electrode 36b. The reason is that in the sputtering for forming the collector electrodes 36a and 36b, the traveling direction of the sputtered particles is perpendicular to the surface of the p-type collector layer 35 in the back flat portion.
- the thickness of the p-type thin layer 34 on the side wall portion 32 of the V-shaped groove 31 is about half of the thickness of the p-type collector layer 35 in the back flat portion formed on the back flat portion simultaneously with the p-type thin layer 34. become. This is because the ion implantation for forming the p-type thin layer 34 is not perpendicular to the side wall 32 of the V-shaped groove 31.
- the side wall portion 32 of the V-shaped groove 31 is used.
- the thicknesses of the p-type thin layer 34 and the Al—Si film 42 formed along the upper and lower sides are thinner than those of the p-type collector layer 35 and the Al—Si film 42 in the back flat portion, respectively. That is, the p-type thin layer 34 and the Al—Si film 42 formed along the side wall portion 32 of the V-shaped groove 31 are not necessarily thick enough to prevent reverse breakdown. It turned out that I could not say.
- the thickness of the Al—Si film 42 is set to 0.3 ⁇ m to 1 described in the above-mentioned Patent Document 2. A thickness in the range of 0.0 ⁇ m is not sufficient.
- the thickness of the Al—Si film 42 of the collector electrode 36a (target thickness of the flat portion on the back surface) is set to a thickness in the range of 1.1 ⁇ m to 3.0 ⁇ m, for example, and the p-type thin layer If the thickness of the Al-Si film 42 of the collector electrode 36b in contact with the surface 34 (the side wall 32 of the V-shaped groove 31) is set within a range of, for example, 0.55 ⁇ m to 1.5 ⁇ m, the reverse breakdown voltage is eliminated. Therefore, it was found that the thickness of the Al—Si film 42 is optimum. The reason will be described later.
- the thickness of the Al—Si film 42 of the collector electrode 36a is most preferably about 2 ⁇ m.
- the thickness of the Al—Si film 42 of the collector electrode 36 a is changed to the inclined portion (V-shaped). This is because the side wall portion 32) of the groove 31 can be at least about 1 ⁇ m even if the thickness is reduced.
- collector electrodes 36a and 36b unlike the conventional reverse blocking IGBT 100, they are generated on the respective surfaces of the p-type collector layer 35 and the p-type thin layer 34 on the back surface of the substrate (including the inner wall of the V-shaped groove 31). Both of the Al spikes that are easily generated can be suppressed, and an increase in leakage current can be suppressed. It is also preferable to add Ti to the Al—Si film 42 because it has an effect of suppressing the diffusion of Si atoms from the n ⁇ semiconductor substrate 37 using Si as a semiconductor material.
- a barrier layer 43 mainly composed of a refractory metal is provided between the Al—Si film 42 and a metal having a good solder wettability, for example, a metal film mainly composed of Ni (Ni-based metal film 44). It has been found that the collector electrodes 36a and 36b are more preferable.
- the barrier layer 43 is preferably a metal film mainly composed of any one of Ti, W (tungsten), and Pt (platinum). This is because, as described above, the barrier layer 43 has an effect of preventing diffusion of Si atoms and Sn atoms.
- the thickness of the barrier layer 43 of the collector electrode 36a (target thickness of the flat portion on the back surface) is set to a thickness in the range of 0.08 ⁇ m to 0.2 ⁇ m, for example, preferably 0.15 ⁇ m.
- the thickness of the barrier layer 43 (target thickness of the side wall portion of the V-shaped groove) is preferably in the range of 0.03 ⁇ m to 0.1 ⁇ m, for example.
- barrier layer 43 in addition to a metal film mainly containing Ti, for example, a metal film mainly containing either W or Pt is also preferable. Furthermore, it is preferable to use a TiN (titanium nitride) film as the barrier layer 43 because it has an effect of further improving the barrier property.
- the thickness of the Ni-based metal film 44 is set to a thickness in the range of 0.2 ⁇ m to 1.2 ⁇ m, for example, at the back flat portion (that is, the collector electrode 36a portion), and the side wall portion 32 (that is, the V-shaped groove 31).
- the thickness of the collector electrode 36b) is preferably in the range of 0.1 ⁇ m to 0.6 ⁇ m, particularly about 0.35 ⁇ m.
- the Au-based metal film 45 has a thickness in the range of, for example, 0.1 ⁇ m to 0.4 ⁇ m at the back flat portion, and a thickness in the range of, for example, 0.05 ⁇ m to 0.2 ⁇ m at the side wall portion 32 of the V-shaped groove 31. In particular, the thickness is preferably about 0.1 ⁇ m.
- V (vanadium) may be added to the Ni-based metal film 44. Addition of V (vanadium) to the Ni-based metal film 44 to form a non-magnetic material can increase erosion during sputtering film formation and extend the target life, which is advantageous in terms of cost and is preferable.
- the Au-based metal film 45 it is also preferable to add Sn or Ge (germanium) to the Au-based metal film 45 for the purpose of improving solder wettability.
- a metal film mainly composed of Ag (silver) hereinafter referred to as an Ag-based metal film: a third metal film
- the thickness of the Ag-based metal film is set to a thickness within the range of 0.4 ⁇ m to 2.0 ⁇ m at the back flat portion, and within the range of 0.2 ⁇ m to 1.0 ⁇ m at the side wall portion 32 of the V-shaped groove 31. It is necessary to make the thickness about twice as large as the thickness of the Au-based metal film 45, for example. It is also preferable to add Pd (palladium) to the Au-based metal film 45 for the purpose of improving wettability.
- FIGS. 2 is a characteristic diagram showing the relationship between the holding time at the soldering processing temperature and the amount of reverse leakage current change when the reverse blocking IGBT is mounted.
- FIG. 3 is a characteristic diagram showing the relationship between the holding time at the soldering processing temperature and the reverse withstand voltage change amount when the reverse blocking IGBT is mounted.
- the lower limit of the thickness of the Al—Si film 42 that is, the lower limit of the thickness of the Al—Si film 42 of the collector electrode 36 b in the side wall portion 32 of the V-shaped groove 31 is set to 0.55 ⁇ m.
- the thickness of the film was 0.55 ⁇ m or more.
- the reason why the upper limit of the thickness of the Al—Si film 42 of the collector electrode 36a is set to 3 ⁇ m as described above is not the improvement of the reverse breakdown voltage, but the Si concentration in the Al—Si film 42 increases excessively. This is because the on-voltage increases, and is determined in consideration of this point.
- the upper limit of the thickness of the Al—Si film 42 of the collector electrode 36a is 3 ⁇ m
- the upper limit of the thickness of the Al—Si film 42 of the collector electrode 36b of the side wall 32 of the V-shaped groove 31 is 1.5 ⁇ m.
- the thickness of the Al—Si film 42 of about 1 ⁇ m, which is the most preferable thickness, can be surely ensured.
- the thickness of the Al—Si film 42 of the collector electrode 36a (target thickness of the back flat portion) is set to a thickness within the range of 1.1 ⁇ m to 3.0 ⁇ m, and the p-type thin layer is formed. It was derived that the thickness of the Al—Si film 42 of the collector electrode 36b in contact with the surface 34 is set to a thickness within the range of 0.55 ⁇ m to 1.5 ⁇ m.
- FIG. 4 is a characteristic diagram showing a thermal equilibrium state of Al—Si (hereinafter referred to as an Al—Si equilibrium state diagram).
- Al—Si equilibrium state diagram As shown in the Al—Si equilibrium diagram of FIG. 4, when the Si concentration in the Al—Si film at the interface between the back surface of the semiconductor substrate and the surface of the p-type collector layer is as low as about 0.2 wt%, the soldering temperature It can be seen that the interdiffusion starts when the processing temperature during mounting assembly is 340 ° C.
- the thickness of the Al—Si film is sufficiently thick, the Si concentration in the Al—Si film is sufficiently satisfied during the growth process of the Al—Si film, and the thickness of the Al—Si film is large.
- the volume of Si in the Al—Si film increases. For this reason, since a sufficient Si concentration in the Al—Si film can be secured even at a soldering temperature of 340 ° C., no problem occurs.
- the thickness of the Al—Si film is increased even if a phenomenon occurs in which Si atoms in the Al—Si film are diffused into a barrier metal layer such as a Ti-based metal film. It is presumed that this is because Al spikes are difficult to enter from the volume of Si and the diffusion length of Si atoms.
- the soldering temperature can be lowered in order to suppress increase in leakage current and prevent reverse breakdown voltage degradation. It is also apparent from the Al—Si equilibrium diagram of FIG.
- the oxide film formed on the surface of the Cu plate of solder or DCB Direct Copper Bonding: Insulated substrate to which a metal plate such as Cu plate is bonded
- DCB Direct Copper Bonding: Insulated substrate to which a metal plate such as Cu plate is bonded
- the thickness of the Al—Si film 42 is sufficiently increased to a thickness within the range of 1.1 ⁇ m to 3.0 ⁇ m at the back flat portion, so that the soldering processing temperature is set to the solder interface temperature. It is possible to raise the temperature to such a level that no voids are generated, and to suppress an increase in leakage current and a decrease in reverse breakdown voltage.
- the thickness of the barrier layer 43 such as a Ti-based metal film
- the Sn atoms that are the components of the solder and the Al atoms in the Al—Si film 42 do not form an alloy layer. For this reason, if Sn atoms in the solder joint layer diffuse into the Al—Si film 42 in the assembly process including soldering, the solder joint is not appropriate and the solder joint layer may be peeled off.
- the barrier layer 43 prevents the Sn atoms therein from diffusing into the Al—Si film 42.
- the thickness of the barrier layer 43 necessary for preventing the diffusion of Sn atoms in the solder bonding layer into the Al—Si film 42 is 0.03 ⁇ m or more at the side wall portion 32 of the V-shaped groove 31. The reason is as follows.
- the thickness of the Ti-based metal film on the side wall portion 32 of the V-shaped groove 31 (that is, the barrier layer 43 of the collector electrode 36b) is less than 0.03 ⁇ m, Sn atoms in the solder pass through the Ti-based metal film. As a result, the Al—Si film 42 is reached. This is because the Sn atoms that reach the Al—Si film 42 do not form an alloy layer with the Al atoms in the Al—Si film 42, which causes a problem that peeling easily occurs at the interface with the Al—Si film 42.
- the thickness of the collector electrode 36a in the flat portion on the back surface of the n ⁇ semiconductor substrate 37 is increased.
- a V-shape is formed on the back surface side of the n ⁇ semiconductor substrate 37. Since the grooves 31 are provided, the collector electrodes 36 a and 36 b act so that the direction in which the contracting stress is applied changes in the V-shaped grooves 31.
- the warpage of the wafer having the V-shaped groove 31 on the back surface of the n ⁇ semiconductor substrate 37 can be suppressed to be smaller than the warpage of the wafer having the collector electrode formed only on the back surface flat portion without the V-shaped groove 31. It is a merit.
- a collector electrode in which at least a portion in contact with the semiconductor substrate is an Al—Si film is provided, and the thickness of the Al—Si film is 1.1 ⁇ m to 3 ⁇ m at the back flat portion.
- the collector electrode formed by laminating the Al—Si film and the Ni-based metal film is provided at least from the semiconductor substrate side, and the barrier layer is provided between the Al—Si film and the Ni-based metal film. Accordingly, even when a solder containing Sn is used, the diffusion of Sn atoms in the solder can be stopped by the barrier layer. For this reason, peeling of the solder joint layer can be avoided.
- the present invention is not limited to the above-described embodiment, and various modifications can be made without departing from the spirit of the present invention.
- SiC silicon carbide
- GaN gallium nitride
- a semiconductor substrate may be used.
- the first conductivity type is n-type and the second conductivity type is p-type.
- the present invention is similarly established when the first conductivity type is p-type and the second conductivity type is n-type. .
- the semiconductor device according to the present invention is useful for a power semiconductor device used for a power conversion device and the like, particularly for a reverse blocking IGBT having a high withstand voltage characteristic in both forward and reverse directions. is there.
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Abstract
Description
実施の形態にかかる半導体装置の構造について、逆阻止IGBTを例に説明する。図1は、本発明の実施の形態にかかる逆阻止IGBTのV字溝近傍の構造を示す断面図である。図1に示す逆阻止IGBT200は、例えばSi(シリコン)を半導体材料とするn-半導体基板37のおもて面から裏面に達する従来の深い拡散層を必要としない構造である。この逆阻止IGBT200のp型分離層33は、n-半導体基板37のおもて面から所定の深さまでの浅いp型の不純物拡散層である。n-半導体基板37の裏面からp型分離層33の底部に達するV字溝31が設けられている。V字溝31の側壁部32は、n-半導体基板37の裏面に対して所定の傾斜を有するテーパ状となっている。
32 V字溝の側壁部
33 p型分離層
34 p型薄層
35 p型コレクタ層
36 コレクタ電極
36a 裏面平坦部のコレクタ電極
36b V字溝の側壁部のコレクタ電極
37 n-半導体基板
38 ガードリング
39 フィールド絶縁膜
40 フィールドプレート
42 Al-Si膜
43 バリア層
44 Ni系金属膜
45 Au系金属膜
Claims (9)
- 第1導電型の半導体基板の一方の主面から所定の深さで設けられ、半導体機能領域を取り囲む第2導電型の分離層と、
前記半導体基板の他方の主面から前記分離層の底部に達するV字溝と、
前記半導体基板の他方の主面の前記V字溝に囲まれた部分に設けられた第2導電型半導体層と、
前記V字溝の側壁に沿って設けられ、前記分離層と前記第2導電型半導体層とを連結する第2導電型半導体薄層と、
前記第2導電型半導体層の表面および前記第2導電型半導体薄層の表面に接触する金属電極と、
を備え、
前記金属電極は、少なくとも、前記半導体基板側から順に、アルミニウムおよびシリコンを含む第1金属膜と、はんだ濡れ性を有する金属を主成分とする第2金属膜と、当該第2金属膜の酸化を防止する第3金属膜と、が積層されてなる積層膜であり、
前記第2導電型半導体層の表面に接する部分における前記第1金属膜の厚さは、1.1μm~3.0μmの範囲内の厚さであり、
前記第2導電型半導体薄層の表面に接する部分における前記第1金属膜の厚さは、0.55μm~1.5μmの範囲内の厚さであることを特徴とする半導体装置。 - 前記金属電極は、前記第1金属膜と前記第2金属膜との間に、前記第1金属膜および前記第2金属膜よりも高融点の金属を主成分とするバリア層をさらに備えることを特徴とする請求項1に記載の半導体装置。
- 前記バリア層は、チタン、タングステンおよびプラチナのいずれかの金属を主成分とする金属膜であることを特徴とする請求項2に記載の半導体装置。
- 前記第2導電型半導体層の表面に積層される部分における前記バリア層の厚さは、0.08μm~0.2μmの範囲内の厚さであり、
前記第2導電型半導体薄層の表面に積層される部分における前記バリア層の厚さは、0.03μm~0.1μmの範囲内の厚さであることを特徴とする請求項2に記載の半導体装置。 - 前記第2金属膜はニッケル膜であり、
前記第2導電型半導体層の表面に積層される部分における前記第2金属膜の厚さは、0.2μm~1.2μmの範囲内の厚さであり、
前記第2導電型半導体薄層の表面に積層される部分における前記第2金属膜の厚さは、0.1μm~0.6μmの範囲内の厚さであることを特徴とする請求項1に記載の半導体装置。 - 前記第3金属膜は金膜であり、
前記第2導電型半導体層の表面に積層される部分における前記第3金属膜の厚さは、0.1μm~0.4μmの範囲内の厚さであり、
前記第2導電型半導体薄層の表面に積層される部分における前記第3金属膜の厚さは、0.05μm~0.2μmの範囲内の厚さであることを特徴とする請求項1に記載の半導体装置。 - 前記第3金属膜は銀膜であり、
前記第2導電型半導体層の表面に積層される部分における前記第3金属膜の厚さは、0.4μm~2.0μmの範囲内の厚さであり、
前記第2導電型半導体薄層の表面に積層される部分における前記第3金属膜の厚さは、0.2μm~1.0μmの範囲内の厚さであることを特徴とする請求項1に記載の半導体装置。 - 前記半導体基板の一方の主面側の、主電流の流れる活性領域である前記半導体機能領域に設けられた金属-酸化膜-半導体からなる絶縁ゲート構造と、
前記半導体基板の一方の主面側に設けられ、層間絶縁膜によって前記絶縁ゲート構造と絶縁されたエミッタ電極と、
前記第2導電型半導体層にオーミック接触するコレクタ電極である前記金属電極と、を備えた絶縁ゲート型バイポーラトランジスタであることを特徴とする請求項1に記載の半導体装置。 - 前記半導体基板は、シリコン、炭化珪素および窒化ガリウムのいずれかの材料を主成分とすることを特徴とする請求項1~8のいずれか一つに記載の半導体装置。
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DE201311002516 DE112013002516T5 (de) | 2012-05-15 | 2013-05-15 | Halbleitervorrichtung |
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PCT/JP2013/063610 WO2013172394A1 (ja) | 2012-05-15 | 2013-05-15 | 半導体装置 |
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US (1) | US9070736B2 (ja) |
JP (1) | JPWO2013172394A1 (ja) |
CN (1) | CN104170092B (ja) |
DE (1) | DE112013002516T5 (ja) |
WO (1) | WO2013172394A1 (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103617954A (zh) * | 2013-11-27 | 2014-03-05 | 上海联星电子有限公司 | 一种Trench-RB-IGBT的制备方法 |
JP2021108394A (ja) * | 2017-05-15 | 2021-07-29 | クリー インコーポレイテッドCree Inc. | 炭化ケイ素パワーモジュール |
JP2021150304A (ja) * | 2020-03-16 | 2021-09-27 | 株式会社東芝 | 半導体装置 |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6504313B2 (ja) * | 2016-03-14 | 2019-04-24 | 富士電機株式会社 | 半導体装置および製造方法 |
CN106252401A (zh) * | 2016-09-28 | 2016-12-21 | 中国科学院微电子研究所 | 一种逆阻型绝缘栅双极晶体管终端结构 |
DE112019000184T5 (de) * | 2018-06-18 | 2020-09-03 | Fuji Electric Co., Ltd. | Halbleitervorrichtung |
DE102019105761A1 (de) * | 2019-03-07 | 2020-09-10 | Avl Software And Functions Gmbh | Fahrzeug mit einem Inverter und Verfahren zur Erhöhung der Lebensdauer eines Inverters |
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JP2006059929A (ja) | 2004-08-18 | 2006-03-02 | Fuji Electric Device Technology Co Ltd | 半導体装置の製造方法 |
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JP2007036211A (ja) * | 2005-06-20 | 2007-02-08 | Fuji Electric Device Technology Co Ltd | 半導体素子の製造方法 |
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WO2010109572A1 (ja) * | 2009-03-23 | 2010-09-30 | トヨタ自動車株式会社 | 半導体装置 |
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2013
- 2013-05-15 DE DE201311002516 patent/DE112013002516T5/de not_active Withdrawn
- 2013-05-15 WO PCT/JP2013/063610 patent/WO2013172394A1/ja active Application Filing
- 2013-05-15 JP JP2014515660A patent/JPWO2013172394A1/ja active Pending
- 2013-05-15 CN CN201380012494.9A patent/CN104170092B/zh not_active Expired - Fee Related
-
2014
- 2014-09-03 US US14/476,192 patent/US9070736B2/en not_active Expired - Fee Related
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JPH0821675B2 (ja) * | 1987-11-13 | 1996-03-04 | 日産自動車株式会社 | 半導体装置 |
JP2011181770A (ja) * | 2010-03-02 | 2011-09-15 | Fuji Electric Co Ltd | 半導体装置および半導体装置の製造方法 |
JP2011258833A (ja) * | 2010-06-10 | 2011-12-22 | Fuji Electric Co Ltd | 半導体装置および半導体装置の製造方法 |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
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CN103617954A (zh) * | 2013-11-27 | 2014-03-05 | 上海联星电子有限公司 | 一种Trench-RB-IGBT的制备方法 |
JP2021108394A (ja) * | 2017-05-15 | 2021-07-29 | クリー インコーポレイテッドCree Inc. | 炭化ケイ素パワーモジュール |
JP7181962B2 (ja) | 2017-05-15 | 2022-12-01 | ウルフスピード インコーポレイテッド | 炭化ケイ素パワーモジュール |
JP2021150304A (ja) * | 2020-03-16 | 2021-09-27 | 株式会社東芝 | 半導体装置 |
Also Published As
Publication number | Publication date |
---|---|
CN104170092B (zh) | 2017-03-08 |
US9070736B2 (en) | 2015-06-30 |
DE112013002516T5 (de) | 2015-02-19 |
CN104170092A (zh) | 2014-11-26 |
JPWO2013172394A1 (ja) | 2016-01-12 |
US20140367738A1 (en) | 2014-12-18 |
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