WO2013166375A4 - Outil destiné à être utilisé avec un conditionneur de tampon de planarisation mécanico-chimique double face - Google Patents

Outil destiné à être utilisé avec un conditionneur de tampon de planarisation mécanico-chimique double face Download PDF

Info

Publication number
WO2013166375A4
WO2013166375A4 PCT/US2013/039447 US2013039447W WO2013166375A4 WO 2013166375 A4 WO2013166375 A4 WO 2013166375A4 US 2013039447 W US2013039447 W US 2013039447W WO 2013166375 A4 WO2013166375 A4 WO 2013166375A4
Authority
WO
WIPO (PCT)
Prior art keywords
holder
tool
face
dual
field strength
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/US2013/039447
Other languages
English (en)
Other versions
WO2013166375A1 (fr
Inventor
Michael Rothenberg
Taewook Hwang
Paul Cyr
Rachel Z. Pytel
Ramanujam Vedantham
Srinivasan Ramanath
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Saint Gobain Abrasifs SA
Saint Gobain Abrasives Inc
Original Assignee
Saint Gobain Abrasifs SA
Saint Gobain Abrasives Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Saint Gobain Abrasifs SA, Saint Gobain Abrasives Inc filed Critical Saint Gobain Abrasifs SA
Priority to KR1020147033029A priority Critical patent/KR20150005661A/ko
Priority to JP2015510476A priority patent/JP2015520680A/ja
Priority to CN201380030940.9A priority patent/CN104471683A/zh
Publication of WO2013166375A1 publication Critical patent/WO2013166375A1/fr
Publication of WO2013166375A4 publication Critical patent/WO2013166375A4/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/27—Work carriers
    • B24B37/28—Work carriers for double side lapping of plane surfaces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B53/00—Devices or means for dressing or conditioning abrasive surfaces
    • B24B53/12—Dressing tools; Holders therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B53/00—Devices or means for dressing or conditioning abrasive surfaces
    • B24B53/017—Devices or means for dressing, cleaning or otherwise conditioning lapping tools
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P52/00—Grinding, lapping or polishing of wafers, substrates or parts of devices

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Grinding-Machine Dressing And Accessory Apparatuses (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Polishing Bodies And Polishing Tools (AREA)
  • Magnetic Heads (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)

Abstract

L'invention concerne un outil qui comprend un support configuré pour se coupler à un conditionneur de tampon de planarisation mécanico-chimique (CMP) double face. Le support a une matière magnétique, une première intensité de champ magnétique (H1) à une première face, et une seconde intensité de champ magnétique (H2) à une seconde face, opposée à la première face. La première intensité de champ magnétique (H1) est différente de la seconde intensité de champ magnétique (H2).
PCT/US2013/039447 2012-05-04 2013-05-03 Outil destiné à être utilisé avec un conditionneur de tampon de planarisation mécanico-chimique double face Ceased WO2013166375A1 (fr)

Priority Applications (3)

Application Number Priority Date Filing Date Title
KR1020147033029A KR20150005661A (ko) 2012-05-04 2013-05-03 양면 화학적 기계적 평탄화 패드 컨디셔너와 함께 사용되는 공구
JP2015510476A JP2015520680A (ja) 2012-05-04 2013-05-03 両面化学機械平坦化パッドコンディショナと共に使用されるツール
CN201380030940.9A CN104471683A (zh) 2012-05-04 2013-05-03 用于双侧化学机械平面化垫调节器的工具

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US201261643053P 2012-05-04 2012-05-04
US61/643,053 2012-05-04

Publications (2)

Publication Number Publication Date
WO2013166375A1 WO2013166375A1 (fr) 2013-11-07
WO2013166375A4 true WO2013166375A4 (fr) 2014-01-09

Family

ID=49514906

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2013/039447 Ceased WO2013166375A1 (fr) 2012-05-04 2013-05-03 Outil destiné à être utilisé avec un conditionneur de tampon de planarisation mécanico-chimique double face

Country Status (6)

Country Link
US (1) US20130316630A1 (fr)
JP (1) JP2015520680A (fr)
KR (1) KR20150005661A (fr)
CN (1) CN104471683A (fr)
TW (1) TW201350267A (fr)
WO (1) WO2013166375A1 (fr)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SG174351A1 (en) 2009-03-24 2011-10-28 Saint Gobain Abrasives Inc Abrasive tool for use as a chemical mechanical planarization pad conditioner
EP2438609A4 (fr) 2009-06-02 2016-03-09 Saint Gobain Abrasives Inc Outils de conditionnement cmp résistants à la corrosion et leurs procédés de fabrication et d'utilisation
EP2474025A2 (fr) 2009-09-01 2012-07-11 Saint-Gobain Abrasives, Inc. Conditionneur de polissage chimico-mécanique
US10710211B2 (en) * 2012-08-02 2020-07-14 3M Innovative Properties Company Abrasive articles with precisely shaped features and method of making thereof
JP6254383B2 (ja) * 2013-08-29 2017-12-27 株式会社荏原製作所 ドレッシング装置及びそれを備えた化学的機械的研磨装置、それに用いるドレッサーディスク
US20150158143A1 (en) * 2013-12-10 2015-06-11 Taiwan Semiconductor Manufacturing Company Ltd. Apparatus and method for chemically mechanically polishing
KR101571953B1 (ko) * 2014-01-02 2015-11-25 주식회사 엘지실트론 웨이퍼 랩핑 장치
TWI551400B (zh) 2014-10-23 2016-10-01 中國砂輪企業股份有限公司 研磨工具及其製造方法
WO2016106020A1 (fr) * 2014-12-22 2016-06-30 3M Innovative Properties Company Articles abrasifs à élément abrasif amovible et leurs procédés de séparation et de remplacement
WO2018169536A1 (fr) * 2017-03-16 2018-09-20 Intel Corporation Disques de conditionnement pour polissage mécanochimique
US12020946B2 (en) * 2018-07-31 2024-06-25 Taiwan Semiconductor Manufacturing Co., Ld. Chemical mechanical polishing apparatus
KR102718281B1 (ko) * 2018-11-19 2024-10-15 삼성전자주식회사 연마 슬러리 및 반도체 소자의 제조 방법
CN110052962A (zh) * 2019-04-25 2019-07-26 西安奕斯伟硅片技术有限公司 一种抛光垫修整器、加工装置及方法
TWI706831B (zh) * 2020-02-10 2020-10-11 富仕多科技有限公司 用於研磨墊修整裝置之基座
CN113524058B (zh) * 2021-07-12 2022-05-03 华侨大学 一种无模板随炉钎焊的单层金刚石磨粒有序排布钎焊方法

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4222204A (en) * 1979-06-18 1980-09-16 Benner Robert L Holder for an abrasive plate
US5456627A (en) * 1993-12-20 1995-10-10 Westech Systems, Inc. Conditioner for a polishing pad and method therefor
US5667433A (en) * 1995-06-07 1997-09-16 Lsi Logic Corporation Keyed end effector for CMP pad conditioner
GB9700527D0 (en) * 1997-01-11 1997-02-26 Ecc Int Ltd Processing of ceramic materials
US6033293A (en) * 1997-10-08 2000-03-07 Lucent Technologies Inc. Apparatus for performing chemical-mechanical polishing
US6402603B1 (en) * 1998-12-15 2002-06-11 Diamond Machining Technology, Inc. Two-sided abrasive tool
US6059638A (en) * 1999-01-25 2000-05-09 Lucent Technologies Inc. Magnetic force carrier and ring for a polishing apparatus
JP3772946B2 (ja) * 1999-03-11 2006-05-10 株式会社荏原製作所 ドレッシング装置及び該ドレッシング装置を備えたポリッシング装置
US6244941B1 (en) * 1999-03-30 2001-06-12 Speedfam - Ipec Corporation Method and apparatus for pad removal and replacement
JP4163359B2 (ja) * 2000-01-24 2008-10-08 不二越機械工業株式会社 研磨用定盤
US7678245B2 (en) * 2000-02-17 2010-03-16 Applied Materials, Inc. Method and apparatus for electrochemical mechanical processing
JP2002200553A (ja) * 2000-11-06 2002-07-16 Nikon Engineering Co Ltd 研磨装置
US6835118B2 (en) * 2001-12-14 2004-12-28 Oriol, Inc. Rigid plate assembly with polishing pad and method of using
US7004817B2 (en) * 2002-08-23 2006-02-28 Micron Technology, Inc. Carrier assemblies, planarizing apparatuses including carrier assemblies, and methods for planarizing micro-device workpieces
KR200298920Y1 (ko) * 2002-09-17 2003-01-03 아남반도체 주식회사 Ｃｍｐ 장치의 컨디셔너 엔드이펙터
KR100506934B1 (ko) * 2003-01-10 2005-08-05 삼성전자주식회사 연마장치 및 이를 사용하는 연마방법
CN101218067B (zh) * 2005-07-09 2011-05-18 Tbw工业有限公司 用于控制研磨修整盘对抛光垫表面的作用的末端执行臂
SG174351A1 (en) * 2009-03-24 2011-10-28 Saint Gobain Abrasives Inc Abrasive tool for use as a chemical mechanical planarization pad conditioner
JP2011011303A (ja) * 2009-07-03 2011-01-20 Mitsubishi Materials Corp Ｃｍｐパッドコンディショナ
EP2438609A4 (fr) * 2009-06-02 2016-03-09 Saint Gobain Abrasives Inc Outils de conditionnement cmp résistants à la corrosion et leurs procédés de fabrication et d'utilisation

Also Published As

Publication number Publication date
WO2013166375A1 (fr) 2013-11-07
KR20150005661A (ko) 2015-01-14
JP2015520680A (ja) 2015-07-23
CN104471683A (zh) 2015-03-25
TW201350267A (zh) 2013-12-16
US20130316630A1 (en) 2013-11-28

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