WO2013157113A1 - 光配向照射装置 - Google Patents

光配向照射装置 Download PDF

Info

Publication number
WO2013157113A1
WO2013157113A1 PCT/JP2012/060567 JP2012060567W WO2013157113A1 WO 2013157113 A1 WO2013157113 A1 WO 2013157113A1 JP 2012060567 W JP2012060567 W JP 2012060567W WO 2013157113 A1 WO2013157113 A1 WO 2013157113A1
Authority
WO
WIPO (PCT)
Prior art keywords
unit
polarization
polarization direction
photo
stage
Prior art date
Application number
PCT/JP2012/060567
Other languages
English (en)
French (fr)
Japanese (ja)
Inventor
義和 大谷
一栄 内山
潔 立川
潤二 遠藤
川越　康弘
ヒョン・リョル ユン
橋詰　幸司
Original Assignee
信越エンジニアリング株式会社
株式会社エフケー光学研究所
ウィア・コーポレーション
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 信越エンジニアリング株式会社, 株式会社エフケー光学研究所, ウィア・コーポレーション filed Critical 信越エンジニアリング株式会社
Priority to PCT/JP2012/060567 priority Critical patent/WO2013157113A1/ja
Priority to CN201280029104.4A priority patent/CN103765303B/zh
Priority to JP2012535495A priority patent/JP5105567B1/ja
Priority to KR1020137018193A priority patent/KR101462273B1/ko
Priority to TW102113935A priority patent/TW201350972A/zh
Publication of WO2013157113A1 publication Critical patent/WO2013157113A1/ja

Links

Images

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/30—Polarising elements
    • G02B5/3025—Polarisers, i.e. arrangements capable of producing a definite output polarisation state from an unpolarised input state
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1337—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1337—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers
    • G02F1/13378—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers by treatment of the surface, e.g. embossing, rubbing or light irradiation
    • G02F1/133788—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers by treatment of the surface, e.g. embossing, rubbing or light irradiation by light irradiation, e.g. linearly polarised light photo-polymerisation
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1337—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers
    • G02F1/133753—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers with different alignment orientations or pretilt angles on a same surface, e.g. for grey scale or improved viewing angle
    • G02F1/133757—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers with different alignment orientations or pretilt angles on a same surface, e.g. for grey scale or improved viewing angle with different alignment orientations

Definitions

  • the present invention is used in the field of manufacturing a liquid crystal display panel.
  • an alignment film is imparted with orientation so that liquid crystal molecules are aligned in a desired angle and direction on a substrate used in a liquid crystal display device. It is related with the photo-alignment irradiation apparatus for this.
  • Patent Document 1 discloses a method for manufacturing a liquid crystal display substrate in which a plurality of alignment regions having different alignment directions are dividedly formed using an exposure mask for a method using such an optical rubbing method.
  • Patent Document 2 has a large-area polarizing plate composed of a plurality of quartz substrate portions and a polarizer holder that holds the quartz substrate portions, and moves the polarizer holder to the lower side of the large-area polarizing plate.
  • a polarizing device capable of uniformly irradiating light is disclosed.
  • JP 2007-219191 A Japanese Patent No. 4046427
  • the photo-alignment irradiation apparatus is A polarized light irradiation means, a stage, a scanning means, and a polarization direction detection means;
  • the polarized light irradiation means comprises an ultraviolet irradiation means and a polarization means,
  • the polarizing means includes a plurality of unit polarizers arranged adjacent to each other in an adjacent direction, The unit polarizer polarizes ultraviolet rays emitted from the ultraviolet irradiation means,
  • the stage is capable of placing a substrate on which an alignment film is formed,
  • the scanning unit moves at least one of the stage and the polarized light irradiation unit to scan the substrate placed on the stage with ultraviolet rays from the polarized light irradiation unit in a predetermined scanning direction.
  • the polarization direction detection unit is capable of detecting the polarization direction of ultraviolet light emitted from the unit polarizer for each unit polarizer.
  • the polarization direction detecting means is located in an area where the substrate of the stage is placed.
  • the polarization direction detecting means is located outside the stage.
  • the polarization direction detecting means is a plurality of polarization sensors provided at positions corresponding to the unit polarizers.
  • the polarization direction detecting means is a polarization sensor that can move to a position corresponding to the unit polarizer.
  • the polarization direction detecting means can detect an extinction ratio of ultraviolet rays emitted from the deflected light irradiating means.
  • the polarization direction detection means is capable of detecting the intensity of ultraviolet light emitted from the deflected light irradiation means.
  • the scanning unit moves the stage using a linear motor.
  • the photo-alignment irradiation apparatus is It is characterized by comprising notification means for making a notification based on the polarization direction of the ultraviolet light detected by the polarization direction detection means.
  • the photo-alignment irradiation apparatus is A rotation unit for rotating the stage or the deflected light irradiation means; Control means for rotating the rotating unit based on the polarization direction of each unit polarizer detected by the polarization direction detecting means is provided.
  • the photo-alignment irradiation apparatus is A polarizer rotating unit for rotating the unit polarizer; Control means for rotating the polarizer rotating unit based on the polarization direction of each unit polarizer detected by the polarization direction detecting means is provided.
  • the polarization direction detection means can detect the polarization direction of ultraviolet light emitted from the polarization means at a plurality of scanning positions in the scanning means.
  • the photo-alignment irradiation apparatus is A rotation unit for rotating the stage or the deflected light irradiation means;
  • the substrate comprises control means for rotating the rotating unit based on the polarization directions of ultraviolet rays at a plurality of scanning positions detected by the polarization direction detection means.
  • the polarized light irradiation means comprises an ultraviolet irradiation means and a polarization means,
  • the polarizing means polarizes ultraviolet rays emitted from the ultraviolet irradiation means,
  • the stage is capable of placing a substrate on which an alignment film is formed,
  • the scanning unit moves at least one of the stage and the polarized light irradiation unit to scan the substrate placed on the stage with ultraviolet rays from the polarized light irradiation unit in a predetermined scanning direction.
  • the light orientation irradiation apparatus, wherein the polarization direction detection unit is capable of detecting the polarization direction of ultraviolet light emitted from the polarization unit at a plurality of scanning positions in the scanning unit.
  • the polarizing means includes a plurality of unit polarizers arranged adjacent to each other in an adjacent direction,
  • the polarization direction detection unit can detect the polarization direction of ultraviolet rays emitted from the predetermined unit polarizer at a plurality of scanning positions in the scanning unit.
  • any of the second photo-alignment irradiation devices It is characterized by comprising notification means for making a notification based on the polarization directions of ultraviolet rays at a plurality of scanning positions detected by the polarization direction detection means.
  • any of the second photo-alignment irradiation devices A rotating unit for rotating the stage or the polarized light irradiation means;
  • the substrate comprises control means for rotating the rotating unit based on the polarization directions of ultraviolet rays at a plurality of scanning positions detected by the polarization direction detection means. .
  • the photo-alignment irradiation apparatus of the present invention when using a polarization unit configured to include a plurality of unit polarizers, the polarization that can detect the polarization direction of ultraviolet light emitted from the unit polarizer for each unit polarizer.
  • the direction detection means it is possible to confirm in advance the polarization direction of the ultraviolet rays to be scanned with respect to the substrate.
  • the polarization direction detection unit that can detect the polarization direction of the ultraviolet light emitted from the polarization unit is provided at a plurality of scanning positions in the scanning unit.
  • a rotational deviation a phenomenon called axial running
  • the fixation of the scanning means manually or automatically based on the detected polarization direction, it is possible to suppress rotational deviation and to impart good alignment characteristics to the substrate.
  • the perspective view of the photo-alignment irradiation apparatus which concerns on embodiment of this invention Side sectional view of a photo-alignment irradiation apparatus according to an embodiment of the present invention
  • the top view of the photo-alignment irradiation apparatus concerning the embodiment of the present invention The schematic diagram which shows the mode of the ultraviolet irradiation in the photo-alignment apparatus which concerns on embodiment of this invention
  • the figure which shows the structure of the polarizing means which concerns on embodiment of this invention.
  • the figure which shows the structure of the polarization means which concerns on other embodiment of this invention.
  • the figure which shows the structure of the polarization means which concerns on other embodiment of this invention.
  • the block diagram which shows the control structure of the photo-alignment irradiation apparatus which concerns on embodiment of this invention.
  • the flowchart which shows the polarization direction confirmation process which concerns on embodiment of this invention.
  • the figure explaining control of the rotation part in the polarization direction confirmation process which concerns on embodiment of this invention.
  • the figure explaining control of the rotation part in the polarization direction confirmation process which concerns on embodiment of this invention
  • the figure explaining the calculation method of the representative angle used for control of the rotation part which concerns on embodiment of this invention.
  • the top view of the photo-alignment irradiation apparatus which concerns on other embodiment of this invention.
  • the schematic diagram for demonstrating the photo-alignment process which concerns on other embodiment of this invention The block diagram which shows the control structure of the photo-alignment irradiation apparatus which concerns on other embodiment of this invention.
  • the flowchart which shows the axial running confirmation process which concerns on embodiment of this invention
  • the flowchart which shows the photo-alignment process which concerns on embodiment of this invention
  • the top view of the photo-alignment irradiation apparatus which concerns on other embodiment of this invention.
  • the top view of the photo-alignment irradiation apparatus which concerns on other embodiment of this invention.
  • FIG. 1 is a diagram showing a configuration of a photo-alignment irradiation apparatus according to an embodiment of the present invention.
  • the photo-alignment irradiation apparatus 1 includes a polarized light irradiation unit 2 and a scanning unit as main components.
  • the polarized light irradiation means 2 is a means for imparting alignment characteristics to the alignment film by irradiating the alignment film formed on the surface of the substrate 9 with an ultraviolet beam, and in the present embodiment, the reflecting mirror 21a.
  • the ultraviolet irradiation means 21 having the ultraviolet irradiation light source 21b and the polarization means 3 are provided.
  • ultraviolet rays are used as the irradiation light, but irradiation light in other wavelength bands may be used. In that case, the irradiation light source according to the wavelength band to be used is used.
  • FIG. 2 shows a side sectional view of the photo-alignment irradiation apparatus according to the embodiment of the present invention
  • FIG. 3 shows a top view of the photo-alignment irradiation apparatus according to the embodiment of the present invention.
  • the scanning unit is a unit that scans the beam irradiated from the polarized light irradiation unit 2 onto the substrate 9 by moving the stage 4 in a predetermined movement direction (Y-axis direction in the drawing).
  • the scanning unit according to the present embodiment includes the stage 4, the movable base 55, the ball screw 52, the LM guide 51, and the rotating unit 54.
  • the movable table 55 is mechanically coupled to the stage 4 via the rotating unit 54.
  • the movable table 55 can be moved in the scanning direction by the LM guide 51.
  • the LM guide 51 is configured such that the LM blocks 51c and 51d can slide on the LM rails 51a and 51b.
  • a movable base 55 is fixed to the LM blocks 51c and 51d. In this embodiment, as shown in FIG. 3, the movable base 55 can be moved by two LM guides 51a and 51b.
  • a screw hole corresponding to the ball screw 52 is cut in the movable base 55.
  • the movable table 55 is provided with a rotating portion 54 on the upper surface.
  • the rotation unit 54 can execute rotation in the XY plane shown in the figure, adjusts the polarization direction of the polarized light irradiated by the polarized light irradiation unit 2, and rotates at each scanning position by the scanning unit. It is used to correct misalignment (a phenomenon called “axial running”).
  • the stage 4 may be moved using a linear motor. By using a linear motor, the stage can be moved quickly and with mechanical vibrations suppressed.
  • the polarized light irradiation unit 2 is moved, or both the stage 4 and the polarized light irradiation unit 2 are moved, so that the polarized ultraviolet light B irradiated from the polarized light irradiation unit 2 is changed.
  • the substrate 9 may be scanned.
  • the polarized ultraviolet light B from the polarizing means 3 is directly irradiated onto the substrate 9.
  • a shielding mask that restricts the irradiation area to a slit shape may be provided between the polarizing means 3 and the substrate 9. By providing the shielding mask, it is possible to limit the irradiation region and expose only the effective irradiation light to the substrate 9 and improve the alignment performance.
  • a substrate 9 to be exposed is installed on the stage 4, a substrate 9 to be exposed is installed.
  • the substrate 9 is installed such that the scanning direction is the vertical direction or the horizontal direction when used as a liquid crystal display device.
  • a polymer made of a photoreactive polymer such as polyimide is formed in a film shape.
  • this alignment film is irradiated with polarized ultraviolet rays to modify the polymer film, and liquid crystal molecules are applied onto the polymer film in the subsequent steps (not shown), the liquid crystal molecules are affected by the polymer film in a specific direction. Align (orient).
  • a polymer film having this alignment characteristic is referred to as an alignment film.
  • a polymer film before imparting alignment characteristics is also referred to as an alignment film.
  • the molecular film is also referred to as an alignment film.
  • the polarized light irradiation means 2 includes an ultraviolet irradiation light source 21 including an ultraviolet irradiation light source 21b, a reflecting mirror 21a, and a polarizing means 3.
  • the ultraviolet irradiation light source 21 uses a linear light source having a long axis in the X-axis direction in FIGS.
  • As the ultraviolet irradiation light source 21 various light sources such as a point light source as well as such a linear light source can be used.
  • the ultraviolet rays irradiated from the ultraviolet irradiation light source 21b such as an ultraviolet lamp are adjusted to become parallel light or partial parallel light by a reflecting mirror 21a such as a parabolic mirror, and the polarization means 3 side as non-polarized ultraviolet A Irradiate.
  • the polarizing means 3 is means for taking out a linearly polarized light component in a predetermined direction from the non-polarized ultraviolet ray A.
  • the polarized ultraviolet light B polarized in a predetermined direction is extracted from the non-polarized ultraviolet light A by the polarizing means 3 and becomes incident light on the substrate 9.
  • FIG. 5 shows the configuration of the polarization means according to the embodiment of the present invention.
  • FIG. 5 shows the polarization means 3 as viewed from below, that is, from the positive direction of the Z-axis shown in FIGS.
  • the polarization means 3 of the present embodiment is configured to have a plurality of unit polarizers 31a to 31f arranged adjacent to each other in the adjacent direction 33.
  • the unit polarizers 31a to 31f are composed of a Brewster polarizer or a wire grid polarizer using a dielectric multilayer film.
  • Such unit polarizers 31a to 31f are optical elements (polarizers) composed of quartz or the like as a component, and in the present embodiment, rectangular ones are used. As shown in FIG.
  • the polarizing means 3 having a length extending from one side of the substrate 9 to the other side facing the substrate 9 is required.
  • the At present, the polarizing means 3 having a sufficient length is required for the substrate 9 used in a large liquid crystal display device of 50 inches or more. The production of large polarizers is difficult and the price is currently high.
  • the cost of the photo-alignment irradiation apparatus can be reduced.
  • the unit polarizers 31a to 31f are fixed by the fixing unit 32 in a direction in which a predetermined polarization component is emitted.
  • the polarization means 3 in which the plurality of unit polarizers 31a to 31f are adjacent to each other as described above, the polarization means 3 having a sufficient length can be realized even when a large substrate 9 of 50 inches or more is used. Is possible.
  • each of the unit polarizers 31a to 31f has a parallelogram shape having sides inclined with respect to the scanning direction.
  • the adjacent surface 34 between the adjacent unit polarizers 31a to 31f is inclined with respect to the scanning direction, and the polarized ultraviolet rays irradiated from the adjacent surface 34 are overlapped, thereby affecting the joint. Is suppressed.
  • FIG. 7 as in FIG. 6, the adjacent surface 34 is inclined with respect to the scanning direction.
  • rectangular unit polarizers 31a to 31f are used as in FIG. However, they are different in the fixing direction with respect to the fixing portion 32. That is, by fixing the rectangular unit polarizers 31a to 31f to the fixing portion 32 so as to be inclined with respect to the scanning direction, the adjacent surface 34 inclined with respect to the scanning direction is formed as in FIG. Yes.
  • a shielding mask that shields unnecessary areas, such as providing a rectangular slit in the fixing portion 32 as shown in the drawing so that the emission area of polarized ultraviolet rays does not become unbalanced.
  • a shielding mask that shields unnecessary areas, such as providing a rectangular slit in the fixing portion 32 as shown in the drawing so that the emission area of polarized ultraviolet rays does not become unbalanced.
  • FIG. 4 schematically shows the state of ultraviolet irradiation by the polarizing means 3.
  • Parallel or partially parallel non-polarized ultraviolet rays A emitted from the ultraviolet irradiation light source 21 are transmitted through the unit polarizers 31a to 31f, and are set for the unit polarizers 31a to 31f.
  • Each of the polarized ultraviolet rays Ba to Bf is incident on the substrate 9 to align the alignment film.
  • the polarization directions of the polarized ultraviolet rays Ba to Bf are schematically shown by arrows.
  • the polarization directions of the polarized ultraviolet rays to be irradiated are all the same in the irradiation region.
  • the polarization direction of each of the unit polarizers 31a to 31f must be matched so that when the substrate 9 is used as a liquid crystal display device, Observed as image unevenness.
  • the polarization direction of each of the unit polarizers 31a to 31f is directed to a predetermined direction, and there is an error in the polarization direction between the unit polarizers 31a to 31f. It is necessary to check whether it is within a predetermined angle. For this reason, in the photo-alignment irradiation apparatus of the present embodiment, a polarization direction detection unit that detects the polarization direction of the polarized ultraviolet light emitted from each of the unit polarizers 31a to 31f is provided.
  • This polarization direction detection means can be configured using one or a plurality of polarization sensors 6.
  • a plurality of polarization sensors 6a to 6f corresponding to the unit polarizers 31a to 31f are used on the stage 4.
  • the side sectional view of the photo-alignment irradiation apparatus 1 shown in FIG. 2 and the top view shown in FIG. 3 show the arrangement of the plurality of polarization sensors 6a to 6f.
  • the polarization sensor 6 is embedded in the stage 4 so that the detection surface faces upward and does not protrude from the surface of the stage 4. This is to prevent placement obstruction due to the polarization sensor 6 protruding when the substrate 9 is placed on the stage 4.
  • the detection surface of the polarization sensor 6 is preferably positioned in the vicinity of the alignment film of the substrate 9 so that the polarization direction when the substrate 9 is irradiated can be detected.
  • the polarization sensor 6 protrudes from the surface of the stage 4. Will be allowed to.
  • the polarization sensor 6 may be attached only when the polarization direction is detected, or the polarization sensor 6 may be protruded from the stage using a drive mechanism.
  • each of the polarization sensors 6a to 6f and each of the unit polarizers 31a to 31f can be seen.
  • the polarization sensors 6a to 6f and the unit polarizers 31a to 31f are shown at positions shifted so that the positional relationship can be easily confirmed.
  • the unit polarizer 31a is scanned by the scanning unit.
  • the polarized ultraviolet rays B from .about.31f are moved to the positions where they are incident on the corresponding polarization sensors 6a to 6f.
  • the polarized ultraviolet rays Ba to Bf emitted from the unit polarizers 31a to 31f are incident on the polarization sensors 6a to 6f, and the polarization directions thereof are confirmed.
  • FIG. 8 shows the configuration of the polarization sensor 6.
  • the polarization sensor 6 used in the present embodiment can detect not only the polarization direction of incident light, but also the extinction ratio (also referred to as polarization ratio), which is the ratio of p-waves to s-waves, and the intensity of incident light. It is said.
  • the polarization sensor 6 includes a prism 61, a light amount sensor 62, a driving unit 63, a driving force transmission unit 64, and a sensor control unit 65.
  • the prism 61 an optical element that transmits a polarized light component in a predetermined direction, such as a Grantera prism or a Glan-Thompson prism, is used.
  • the light amount sensor 62 outputs the amount of light transmitted through the prism 61 as a light amount signal.
  • the driving unit 63 can use a stepping motor or the like, and rotates the prism 61 via the driving force transmission unit 64.
  • the sensor control unit 65 controls the rotation of the prism 61 by the driving unit 63 and receives the light amount signal output from the light amount sensor 62.
  • the sensor control unit 65 rotates the prism 61 by driving the drive unit 63 with a drive signal.
  • the direction of the prism 61 that outputs the maximum light amount signal when the prism 61 is rotated once (can be half-turned) is detected as the polarization direction of the incident light.
  • the extinction ratio is obtained by the ratio (Imax / Imin) of the maximum light amount signal Imax to the minimum light amount signal Imin.
  • the intensity of the incident light can be calculated from the integrated value of the light amount signal when the prism 61 is rotated once (or half-round).
  • the polarization sensor 6 of this embodiment can output not only the polarization direction of incident light but also the extinction ratio (polarization ratio) and intensity. If there are variations in the extinction ratio and the intensity at each position of the polarized ultraviolet light irradiated on the substrate 9, the alignment regulation force when the alignment film is irradiated is affected, and the characteristics of the alignment film become non-uniform. There is a case.
  • the extinction ratio polarization ratio
  • intensity there is a case.
  • the unit polarizers 31a to 31f are fixed by the fixing unit 32 so that the predetermined position and the polarization direction are in the predetermined direction.
  • a metal frame or the like is used for the fixing portion 32, and fixing is performed by sandwiching both ends of the unit polarizers 31a to 31f.
  • the photo-alignment irradiation apparatus 1 since it is necessary to irradiate the ultraviolet light with the intensity from the ultraviolet irradiation light source 21, the amount of heat generated thereby increases. Accordingly, the temperature of the polarizing means 3 that receives the amount of generated heat rises, and the metal fixing portion 32 undergoes thermal expansion.
  • the unit polarizers 31a to 31f are relatively fragile optical elements made of quartz or the like, and therefore may be broken due to thermal expansion when firmly fixed by the fixing portion 32. Under such conditions, the unit polarizers 31a to 31f cannot be fixed with an excessive force, and their positional deviation occurs due to thermal expansion or the like.
  • the positional deviation is parallel or perpendicular to the scanning direction, but the positional deviation that rotates the unit polarizers 31a to 31f is not preferable because it causes a deviation in the polarization direction.
  • the polarization direction deviation between the plurality of unit polarizers 31a to 31f as in the present embodiment is related to the image quality when used as a liquid crystal display device. Therefore, in the photo-alignment irradiation apparatus of the present embodiment, the polarization direction of each unit polarizer 31a to 31f is confirmed by executing the polarization direction confirmation process. Moreover, in the polarization direction confirmation process of this embodiment, based on the confirmed polarization direction, the rotation part 54 is rotated and the correction process by which a polarization direction becomes appropriate is also performed.
  • FIG. 9 is a block diagram showing a control configuration of the photo-alignment irradiation apparatus according to the embodiment of the present invention
  • FIG. 10 is a flowchart showing a polarization direction confirmation process according to the embodiment of the present invention.
  • the photo-alignment irradiation apparatus according to the present embodiment includes a control unit 81 and a ball screw driving unit 82 as control means as shown in FIG.
  • the control unit 81 is connected to a display unit 83 and an input unit 84 for exchanging various types of information to the user.
  • the control unit 81 is connected to the rotating unit 54, the ultraviolet irradiation light source 21b, and the sensor control unit 65, and can control these various configurations.
  • the polarization direction confirmation process is a process for confirming the polarization direction light of the polarized ultraviolet rays Ba to Bf emitted from the unit polarizers 31a to 31f.
  • This polarization direction confirmation processing is executed in a state before the substrate 9 is placed on the stage 4.
  • polarized ultraviolet rays emitted from the unit polarizers 31a to 31f are placed at positions where the corresponding polarization sensors 6a to 6f can be irradiated.
  • the stage 4 is moved (S101).
  • the stage 81 is moved by the control unit 81 rotating the ball screw 52 by the ball screw driving unit 82.
  • the control unit 81 turns on the ultraviolet irradiation light source 21b and causes polarized ultraviolet rays to enter each of the polarization sensors 6a to 6f (S102).
  • the polarization directions of the unit polarizers 31a to 31f are simultaneously acquired (S103).
  • the obtained polarization directions of the polarization sensors 6a to 6f are stored in the storage means in the control unit 81 (S105).
  • a notification (result display) process (S106) is executed based on each polarization direction stored in this way. In a simple notification process, each polarization direction can be displayed on the display unit 83.
  • an abnormality in each polarization direction may be detected, and various types of information regarding the polarization sensors 6a to 6f that have detected the abnormality or the unit polarizers 31a to 31f corresponding thereto may be displayed on the display unit 83.
  • the following cases can be considered as abnormal polarization directions. (1) deviation of polarization direction with respect to a predetermined direction, (2) difference between maximum angle and minimum angle of polarization direction, and (3) deviation of polarization direction between adjacent unit polarizers 31a to 31f.
  • Polarization direction deviation with respect to a predetermined direction This is a form in which an abnormality is determined based on a deviation from the polarization direction preset with respect to the substrate 9 at the design stage.
  • the polarization direction detected by each of the polarization sensors 6a to 6f deviates from the set polarization direction by a threshold value or more, the polarization sensors 6a to 6f having the deviation are notified.
  • Polarization direction deviation between adjacent unit polarizers 31a to 31f This is a form in which it is determined as abnormal if the deviation in polarization direction between adjacent unit polarizers 31a to 31f is equal to or greater than a threshold value. is there. If a deviation occurs in the polarization direction between the adjacent unit polarizers 31a to 31f, the image unevenness is easily noticeable. Therefore, in this embodiment, a threshold value is provided in the polarization direction between the adjacent unit polarizers 31a to 31f, and when the threshold value is exceeded, it is determined as abnormal. Therefore, in this embodiment, a deviation in the polarization direction that gradually changes between the unit polarizers 31a to 31f is allowed. In the notification process, it is conceivable to notify the polarization sensors 6a to 6f exceeding the threshold value and the difference therebetween.
  • a plurality of the above (1) to (3) may be used. Further, as long as it is performed based on the polarization direction of each of the unit polarizers 31a to 31f detected by each of the polarization sensors 6a to 6f, various forms can be adopted without being limited to the form described above.
  • the user who maintains the optical alignment irradiation apparatus can adjust the polarization direction of the unit polarizers 31a to 31f in which the abnormality has occurred.
  • the polarization direction is optimized by adjusting the attachment of the unit polarizers 31a to 31f and executing the polarization direction confirmation process again.
  • control unit 81 can optimize the polarization direction by controlling the rotating unit 54 that rotates the stage 4.
  • S107 it is determined whether or not the deviation notified in S106 needs to be corrected. In any case where correction is necessary, that is, when the polarization direction is within the allowable range (S107: No), the polarization direction confirmation processing is terminated.
  • S107: Yes it is determined whether or not the deviation can be corrected by the rotation of the rotating unit 54. If the deviation cannot be corrected (S108: No), the fact that the deviation cannot be corrected is notified (S111), and the polarization direction confirmation processing is terminated.
  • S108: Yes a representative angle for eliminating the deviation is calculated (S109), and the rotating unit 54 is rotated to the calculated representative angle.
  • FIG. 11 and 12 are diagrams for explaining the control of the rotating unit 54 in the polarization direction confirmation processing according to the embodiment of the present invention.
  • FIG. 11 shows a state when the polarization directions of the unit polarizers 31a to 31f are detected by the polarization sensors 6a to 6f. Although the respective polarization directions A to F are shown in the figure, the polarization directions are exaggerated for easy understanding. In the figure, the polarization direction A and the polarization direction F have the largest angle difference between the polarization directions.
  • the stage 4 is in an initial state, that is, a state in which the long side is directed substantially in parallel with the scanning direction.
  • the representative angle that is, the rotation angle of the stage 4 by the rotation unit 54 is calculated using the polarization direction A and the polarization direction F having the largest angle difference.
  • FIG. 12 shows a state when the stage 4 is rotated. The figure shows a state in which the stage 4 is rotated by an angle ⁇ with respect to the movable table 55 shown in FIG. In the stage 4 rotated according to the representative angle, the polarization directions of all the unit polarizers 31a to 31f are within the allowable range of deviation.
  • FIG. 13 shows an example of a method for calculating the representative angle.
  • the angular difference between the polarization direction A of the polarization sensor 6a and the polarization direction F of the polarization sensor 6f is the largest among the polarization sensors 6a to 6f.
  • the polarization direction A of the polarization sensor 6a is named the maximum angle
  • the polarization direction f of the polarization sensor 6f is named the minimum angle
  • the representative angle is calculated so as to be between the maximum angle and the minimum angle.
  • the movable table 55 is rotated by an angle ⁇ according to the calculated representative angle. By rotating the rotation unit 54 with such a representative angle, it is possible to suppress variation in each polarization direction within a predetermined range.
  • the rotating unit 54 of the present embodiment is configured to rotate the stage 4, but the polarization direction is optimized by using a rotating unit that rotates the polarized light irradiation means 2 shown in FIG. 2 in the XY plane. It is also possible. Furthermore, the optimization of the polarization direction can also be performed by cooperating two rotating units that rotate the stage 54 and the polarized light irradiation means 2.
  • the polarization direction is optimized by using the rotation of the rotating unit 54. However, all the optimization is performed manually, that is, by manually adjusting the position of the unit polarizers 31a to 31f. It is good as well.
  • the substrate 9 is aligned in a good exposure state, and the image quality when used as a liquid crystal display device is improved. It becomes possible.
  • FIG. 14 shows a top view of a photo-alignment irradiation apparatus according to another embodiment of the present invention.
  • polarization sensors 6a to 6f are arranged outside the stage 4.
  • the polarization sensors 6a to 6f are installed on the sensor mounting table 66.
  • the sensor mounting table 66 is disposed at a position that does not hinder the movement of the stage 4 by the scanning means.
  • there is a moving unit that moves the polarized light irradiation means 2 including the polarization means 3 and the ultraviolet irradiation light source 21 onto the sensor mounting table 66.
  • the polarization direction confirmation process as shown in FIG.
  • the moving unit moves the polarized light irradiation means 2 onto the sensor mounting table 66, so that the polarized ultraviolet rays B emitted from the unit polarizers 31a to 31f are emitted.
  • the light is received by the polarization sensors 6a to 6f.
  • the polarization sensors 6a to 6f are installed outside the stage 4 in this way, it is not necessary to arrange the polarization sensors 6a to 6f in the stage 4. Wiring for transmitting and receiving signals is required for the polarization sensors 6a to 6f, but when the polarization sensors 6a to 6f are installed in the stage 4 as in the above-described embodiment, wiring is performed by moving the stage 4. May wear out and cause disconnection.
  • the polarization sensors 6a to 6f outside the stage 4 having no movable part, it is possible to suppress the occurrence of failures such as disconnection and to easily perform the installation. Further, even when the substrate 9 is placed on the stage 4, the polarization direction confirmation process can be executed.
  • the scanning unit moves the polarized light irradiation unit 2 to scan the polarized ultraviolet light
  • the scanning unit moves the polarized light irradiation unit 2 onto the sensor mounting table 66 (also serves as a combination). It becomes possible.
  • the plurality of polarization sensors 6a to 6f corresponding to the unit polarizers 31a to 31f are used.
  • the polarization directions of the unit polarizers 31a to 31f are changed.
  • 16 to 18 show an embodiment in which the polarization sensor 6 is moved.
  • FIG. 16 is a top view of the photo-alignment irradiation apparatus of this embodiment, and FIG. 17 shows this embodiment.
  • FIG. 18 is a block diagram showing a control configuration of the photo-alignment irradiation apparatus, and FIG.
  • this embodiment is configured to have one polarization sensor 6.
  • the polarization sensor 6 is movable within a movable range provided in a slit shape on the stage 4. As shown in the control configuration of FIG. 17, the polarization sensor 6 can be freely moved within the slit-like movable range by the sensor control unit 65.
  • the polarization directions of the unit polarizers 31a to 31f are detected by moving from the position a to the position f.
  • the stage 4 is moved by the scanning unit so that the unit polarizer 31a is positioned above the polarization sensor 6 (S201).
  • the controller 81 turns on the ultraviolet light source 21b so that polarized ultraviolet light is incident on the polarization sensor 6 (S202).
  • the controller 81 sets the variable n to 1 that is an initial value (S203), and then moves the polarization sensor 6 to a position a that is a detection position of the first unit polarizer 31a (S204).
  • the control unit 81 stores the polarization direction in association with the acquisition position a or the unit polarizer 31a (S206).
  • FIG. 19 is a top view of a photo-alignment irradiation apparatus for explaining the operation in the polarization direction confirmation process according to another embodiment.
  • a polarizer rotating unit (not shown) that rotates the unit polarizers 31a to 31f with respect to the fixed unit 32 is provided for each of the unit polarizers 31a to 31f.
  • the polarizer rotating unit can individually adjust the polarization directions of the unit polarizers 31a to 31f by rotating the unit polarizers 31a to 31f individually. Based on the polarization direction of each of the unit polarizers 31a to 31f detected in the polarization direction confirmation process, the polarization rotating unit is rotated to adjust the polarization direction of each of the unit polarizers 31a to 31f, thereby It becomes possible to achieve optimization.
  • the polarization direction detecting means capable of detecting the polarization direction B of the polarized ultraviolet light emitted from the unit polarizer for each of the unit polarizers 31a to 31f, a plurality of unit polarizers 31a to 31a are provided. Even in the case of using the polarization means 3 constituted by 31f, the polarization direction can be appropriately adjusted.
  • Such a polarization sensor 6 is used not only to detect the polarization direction of each of the unit polarizers 31a to 31f, but also to detect rotational deviation (a phenomenon called “axial running”) at each scanning position in the scanning means.
  • rotational deviation a phenomenon called “axial running”
  • the scanning means of the present embodiment uses an LM guide with excellent linear accuracy, there is almost no rotational deviation that occurs in the LM guide itself.
  • the LM rails 51a and 51b are fixed to the installation position of the light alignment irradiation device, and the LM blocks 51c and 51d are fixed to the movable base 55 and used.
  • the rotational deviation at each scanning position occurs when such scanning means is fixed.
  • Such a rotational deviation is expected to change depending on various ambient environments such as heat generated by the ultraviolet light source 21b and ambient temperature changes.
  • FIG. 20 shows a side sectional view of a photo-alignment irradiation apparatus for detecting the axial running of the scanning means.
  • FIG. 21 shows a top view of the photo-alignment irradiation apparatus.
  • a plurality of polarization sensors 6s to 6x are arranged on the stage 4 along the moving direction of the stage 4 by the scanning means.
  • each polarization sensor 6s to 6x is arranged at a position for receiving the polarized ultraviolet light B from one unit polarizer 31f. It is necessary to do. This is because there is a possibility that a deviation occurs in the polarization direction between the unit polarizers 31a to 31f.
  • the polarization direction is detected at an appropriate plurality of scanning positions on the stage 4 where the polarized ultraviolet rays B can be received. It is possible to detect rotational deviation.
  • the polarization sensors 6s to 6x are embedded and installed in the substrate installation area 9a of the stage 4. As in the above-described embodiment, each polarization direction is preferably detected at the position of the light receiving surface when the substrate 9 is installed. Therefore, when confirming the axial running of the scanning means, the polarization sensors 6s to 6x may be installed, or a mechanism for projecting the light receiving surfaces of the polarization sensors 6s to 6x may be provided.
  • FIG. 21 In this embodiment, as shown in FIG. 21, six polarization sensors 6s to 6x are installed at equal intervals along the moving direction of the stage 4 by the scanning means.
  • the polarization directions S to X detected by the respective polarization sensors 6s to 6x are indicated by arrows. Also in this case, for easy understanding, the polarization directions S to X are exaggerated. Actually, the angular angle of the rotational deviation is a very small angle that is difficult to be visually recognized of 0.1 ° or less.
  • FIG. 22 shows a control configuration of the photo-alignment irradiation apparatus for executing the axial running confirmation process.
  • This control configuration is different from the control configuration described in FIG. 9 in the arrangement of the polarization sensors 6s to 6x.
  • the photo-alignment irradiation apparatus has a control unit 81 and a ball screw drive unit 82 as shown in FIG.
  • the control unit 81 is connected to a display unit 83 and an input unit 84 for exchanging various types of information to the user.
  • the control unit 81 is connected to the rotating unit 54, the ultraviolet irradiation light source 21b, and the sensor control unit 65, and can control these various configurations.
  • FIG. 23 shows a flowchart of the axial running confirmation process in the configuration of the photo-alignment irradiation apparatus of FIGS.
  • This axial running confirmation process is a process for detecting the rotational deviation of the stage 4 at each scanning position by detecting the polarization direction at each moving position of the stage 4 when the stage 4 is moved by the scanning means. .
  • the axial running confirmation process of the present embodiment is executed in a state before placing the substrate 9 on the stage 4.
  • the ultraviolet irradiation light source 21b is first turned on (S301).
  • the control unit 81 sets the variable m to an initial value of 1 (S302), and then drives the scanning unit (in this case, drives the ball screw driving unit 82) to emit polarized ultraviolet light B emitted from the unit polarizer 31f.
  • FIG. 21 shows the polarization directions S to X detected by the polarization sensors 6s to 6x.
  • notification (result display) processing is executed based on the polarization direction detected by each of the polarization sensors 6s to 6x.
  • the polarization direction of each of the polarization sensors 6s to 6x is displayed numerically or graphically on the display unit 83.
  • a warning may be displayed on the display unit 83. The user who has confirmed the warning can adjust the attachment of the LM guide and the like to keep the rotational deviation of the stage 4 at each scanning position within a predetermined range.
  • the obtained polarization direction at each scanning position can be used in a photo-alignment process in which the substrate 9 is actually placed on the stage 4 and the alignment film on the substrate 9 is aligned.
  • FIG. 24 shows a flow chart of the photo-alignment process using the acquired polarization direction.
  • the rotation unit 54 is rotated based on the acquired polarization direction at each scanning position, and the polarization direction at each scanning position is optimized.
  • the optical alignment process is started, the scanning position and the polarization direction stored in the axial running confirmation process are read (S401). Based on the read polarization direction at each scanning position, the rotation angle of the rotation unit 54 at each scanning position is calculated (S402).
  • FIG. 21 is a graph showing the polarization directions detected by the polarization sensors 6s to 6x.
  • Each of the polarization directions S to X is in a state in which a rotational deviation occurs with respect to an appropriate polarization direction (position 0).
  • position 0 an appropriate polarization direction
  • the solid line in the graph indicates the polarization direction estimated based on the actually measured polarization direction.
  • the rotation angle of the rotation unit 54 is calculated based on the polarization direction at each scanning position indicated by the solid line (S402).
  • the control unit 81 calculates the rotation angle of the rotation unit 54 so as to cancel the rotation deviation generated at each scanning position.
  • the rotation angle of the rotation unit 54 is calculated after complementing the polarization direction.
  • the rotation angle is complemented after calculating the angle of the rotation unit 54 based on the actually measured polarization direction. It is good as well.
  • FIG. 21 shows the rotation state of the stage 4 at the scanning position where the polarization sensors 6s to 6x are installed. At the scanning position where the polarization sensors 6s to 6x are installed, the stage 4 is rotated by the rotating unit 54 so that the polarization direction detected by the polarization sensors 6s to 6x is an appropriate direction.
  • the stage 4 is rotated based on the rotation angle obtained by the complement, and the polarization direction is set to an appropriate direction at each scanning position.
  • the photo-alignment process is executed until the scanning is completed (S406: Yes).
  • the rotation direction is rotated based on the polarization direction at each scanning position detected by the polarization sensors 6s to 6x, so that the polarization direction can be optimized.
  • the polarization direction can be optimized by using a rotating unit that rotates the polarized light irradiation means 2 shown in FIG. 2 in the XY plane.
  • the optimization of the polarization direction can also be performed by cooperating two rotating units that rotate the stage 4 and the polarized light irradiation means 2.
  • FIG. 25 shows a top view of the photo-alignment irradiation apparatus 1 having the movable polarization sensor 6.
  • the polarized ultraviolet ray B emitted from the unit polarizer 31f is detected as in the embodiment of FIG.
  • the polarization sensor 6 can freely move within a slit-like movable range provided in the stage 4.
  • the polarization direction at each scanning position of the unit polarizer 31f is detected by moving from position s to position x. In the embodiment in which the polarization sensor 6 is moved in this manner, it is possible to acquire the rotational deviation in detail by setting the movement interval of the polarization sensor 6 finely.
  • the determination of the deviation of the polarization direction of each of the unit polarizers 31a to 31f and the rotational deviation of the stage 4 at each scanning position has the same configuration in that the polarization sensor 6 detects the polarization direction. Therefore, it is possible to share the polarization sensor 6 used in the polarization direction confirmation process and the polarization sensor 6 used in the axial running confirmation process.
  • FIGS. 26 to 28 show top views of the photo-alignment irradiation apparatus for various embodiments sharing the polarization sensor 6.
  • the embodiment of FIG. 26 is a form in which the arrangement of the polarization sensors 6a to 6f in the polarization direction confirmation process just described with reference to FIG. 3 and the arrangement of the polarization sensors 6s to 6x in the axial running confirmation process described with reference to FIG. ing.
  • the polarization sensors 6a to 6f shown in FIG. 26 are used for polarization direction confirmation processing for confirming the polarization directions of the unit polarizers 31a to 31f.
  • the polarization sensors 6f and 6t to 6x are used in the axial running confirmation process for confirming the rotational deviation of the stage 4 at each scanning position.
  • the number of polarization sensors 6 to be used can be reduced by sharing the polarization sensor 6f in both the polarization direction confirmation process and the axial running confirmation process.
  • the polarization direction confirmation process and the axial running confirmation process are executed using the polarization sensors 6a to 6f. That is, when executing the polarization direction confirmation process, the polarization sensor 6f is located at a position s aligned with the other polarization sensors 6a to 6e in the vertical direction in the drawing. Therefore, in the polarization direction confirmation processing, the polarized ultraviolet rays emitted from the unit polarizers 31a to 31f are incident on the corresponding polarization sensors 6a to 6f. On the other hand, when executing the axial running confirmation process, the polarization sensor 6f moves to each scanning position s to x and detects the polarization direction at each scanning position.
  • the number of polarization sensors 6 can be reduced by moving the polarization sensor 6f used for the polarization direction confirmation process in the axial running confirmation process.
  • a plurality of polarization sensors 6 may be provided in the axial running confirmation process, and any of the polarization sensors 6 may be moved in the polarization direction confirmation process.
  • the polarization direction confirmation process and the axial running confirmation process by moving one polarization sensor 6.
  • the polarization sensor 6 has an L-shaped movable range, and moves to a position a to a position f in the polarization direction confirmation process to detect the polarization direction.
  • the axial running confirmation process the polarization direction is detected by moving from position s to position x.
  • the position f and the position s are the same position.
  • both the polarization direction confirmation process and the axial running confirmation process can be realized.
  • the details of the polarization direction confirmation process and the axial running confirmation process executed in FIGS. 26 to 28 can be applied to the above-described embodiment, and detailed description thereof is omitted here.

Landscapes

  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Mathematical Physics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Liquid Crystal (AREA)
  • Polarising Elements (AREA)
PCT/JP2012/060567 2012-04-19 2012-04-19 光配向照射装置 WO2013157113A1 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
PCT/JP2012/060567 WO2013157113A1 (ja) 2012-04-19 2012-04-19 光配向照射装置
CN201280029104.4A CN103765303B (zh) 2012-04-19 2012-04-19 光定向照射装置
JP2012535495A JP5105567B1 (ja) 2012-04-19 2012-04-19 光配向照射装置
KR1020137018193A KR101462273B1 (ko) 2012-04-19 2012-04-19 광 배향 조사 장치
TW102113935A TW201350972A (zh) 2012-04-19 2013-04-19 光配向照射裝置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2012/060567 WO2013157113A1 (ja) 2012-04-19 2012-04-19 光配向照射装置

Publications (1)

Publication Number Publication Date
WO2013157113A1 true WO2013157113A1 (ja) 2013-10-24

Family

ID=47528536

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2012/060567 WO2013157113A1 (ja) 2012-04-19 2012-04-19 光配向照射装置

Country Status (5)

Country Link
JP (1) JP5105567B1 (ko)
KR (1) KR101462273B1 (ko)
CN (1) CN103765303B (ko)
TW (1) TW201350972A (ko)
WO (1) WO2013157113A1 (ko)

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104849965A (zh) * 2014-02-13 2015-08-19 三星显示有限公司 曝光装置和使用该曝光装置的曝光方法
CN105068322A (zh) * 2014-12-06 2015-11-18 优志旺电机株式会社 光取向装置以及光取向方法
JP2016180627A (ja) * 2015-03-23 2016-10-13 東芝ライテック株式会社 偏光光測定装置、および偏光光照射装置
JP2016212376A (ja) * 2015-05-06 2016-12-15 ウィア・コーポレーション 光配向装置
JP2017015887A (ja) * 2015-06-30 2017-01-19 アイグラフィックス株式会社 光配向照射装置
JP2017072769A (ja) * 2015-10-08 2017-04-13 ウシオ電機株式会社 光照射装置
WO2017068960A1 (ja) * 2015-10-23 2017-04-27 株式会社ブイ・テクノロジー 偏光光照射装置及び偏光光照射方法
WO2018105478A1 (ja) * 2016-12-08 2018-06-14 株式会社ブイ・テクノロジー 液晶光配向用フォトマスク、光配向装置、光配向方法
US10788716B2 (en) 2016-06-30 2020-09-29 Shanghai Micro Electronics Equipment (Group) Co., Ltd. Light alignment control method and light alignment device
WO2020197660A1 (en) * 2019-03-28 2020-10-01 Facebook Technologies, Llc Aligning a polarization device using a spatially variant polarization element

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5516802B1 (ja) * 2013-07-01 2014-06-11 岩崎電気株式会社 光配向照射装置
JP5344105B1 (ja) * 2013-03-08 2013-11-20 ウシオ電機株式会社 光配向用偏光光照射装置及び光配向用偏光光照射方法
JP5862616B2 (ja) * 2013-07-17 2016-02-16 ウシオ電機株式会社 光配向用偏光光照射装置及び光配向用偏光光照射方法
WO2015040664A1 (ja) * 2013-09-17 2015-03-26 信越エンジニアリング株式会社 光配向照射装置及び光配向照射装置の開口量調整方法
US20160231176A1 (en) * 2015-02-05 2016-08-11 Polarization Solutions, Llc Light irradiation device having polarization measuring mechanism
CN105093700B (zh) * 2015-09-17 2019-01-22 京东方科技集团股份有限公司 一种取向装置、显示面板和显示装置
US10747062B2 (en) * 2015-10-02 2020-08-18 Sharp Kabushiki Kaisha Liquid crystal display panel, liquid crystal display panel manufacturing method, and liquid crystal display panel manufacturing device
CN107219687B (zh) 2017-07-28 2020-08-25 京东方科技集团股份有限公司 一种光配向基台、光配向设备及其控制方法
CN108051955B (zh) * 2018-01-03 2021-02-02 京东方科技集团股份有限公司 一种取向设备及取向参数的校验方法
CN108761927B (zh) * 2018-05-24 2021-07-13 昆山龙腾光电股份有限公司 光配向系统及光配向方法
CN110504389B (zh) * 2019-08-14 2022-07-05 昆山国显光电有限公司 一种发光器件的制备方法、发光器件以及显示面板

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6440927A (en) * 1987-08-07 1989-02-13 Nec Corp Polarization controller
JP4046427B2 (ja) * 1998-11-30 2008-02-13 エルジー フィリップス エルシーディー カンパニー リミテッド 大面積偏光板を採り入れた偏光装置
WO2012042577A1 (ja) * 2010-10-01 2012-04-05 株式会社エフケー光学研究所 光配向露光装置及び光配向露光方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60260973A (ja) * 1984-06-07 1985-12-24 Fuji Xerox Co Ltd 複写領域指定装置
JPH11142850A (ja) 1997-11-05 1999-05-28 Hitachi Ltd 偏光照射方法とその装置
JP4506412B2 (ja) * 2004-10-28 2010-07-21 ウシオ電機株式会社 偏光素子ユニット及び偏光光照射装置
JP4604661B2 (ja) * 2004-11-05 2011-01-05 ウシオ電機株式会社 光配向用偏光光照射装置
JP2010091906A (ja) * 2008-10-10 2010-04-22 Seiko Epson Corp 電気光学装置の製造方法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6440927A (en) * 1987-08-07 1989-02-13 Nec Corp Polarization controller
JP4046427B2 (ja) * 1998-11-30 2008-02-13 エルジー フィリップス エルシーディー カンパニー リミテッド 大面積偏光板を採り入れた偏光装置
WO2012042577A1 (ja) * 2010-10-01 2012-04-05 株式会社エフケー光学研究所 光配向露光装置及び光配向露光方法

Cited By (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104849965A (zh) * 2014-02-13 2015-08-19 三星显示有限公司 曝光装置和使用该曝光装置的曝光方法
CN105068322A (zh) * 2014-12-06 2015-11-18 优志旺电机株式会社 光取向装置以及光取向方法
CN105676538A (zh) * 2014-12-06 2016-06-15 优志旺电机株式会社 光取向装置以及光取向方法
CN105676538B (zh) * 2014-12-06 2019-03-01 优志旺电机株式会社 光取向装置以及光取向方法
JP2016180627A (ja) * 2015-03-23 2016-10-13 東芝ライテック株式会社 偏光光測定装置、および偏光光照射装置
JP2016212376A (ja) * 2015-05-06 2016-12-15 ウィア・コーポレーション 光配向装置
JP2017015887A (ja) * 2015-06-30 2017-01-19 アイグラフィックス株式会社 光配向照射装置
JP2017072769A (ja) * 2015-10-08 2017-04-13 ウシオ電機株式会社 光照射装置
JP2017083545A (ja) * 2015-10-23 2017-05-18 株式会社ブイ・テクノロジー 偏光光照射装置及び偏光光照射方法
CN108139630A (zh) * 2015-10-23 2018-06-08 株式会社 V 技术 偏振光照射装置以及偏振光照射方法
WO2017068960A1 (ja) * 2015-10-23 2017-04-27 株式会社ブイ・テクノロジー 偏光光照射装置及び偏光光照射方法
US10788716B2 (en) 2016-06-30 2020-09-29 Shanghai Micro Electronics Equipment (Group) Co., Ltd. Light alignment control method and light alignment device
WO2018105478A1 (ja) * 2016-12-08 2018-06-14 株式会社ブイ・テクノロジー 液晶光配向用フォトマスク、光配向装置、光配向方法
WO2020197660A1 (en) * 2019-03-28 2020-10-01 Facebook Technologies, Llc Aligning a polarization device using a spatially variant polarization element
US11156755B2 (en) 2019-03-28 2021-10-26 Facebook Technologies, Llc Aligning a polarization device using a spatially variant polarization element
CN113574433A (zh) * 2019-03-28 2021-10-29 脸谱科技有限责任公司 使用空间变化偏振元件使偏振设备调准

Also Published As

Publication number Publication date
KR101462273B1 (ko) 2014-11-17
KR20140001240A (ko) 2014-01-06
TW201350972A (zh) 2013-12-16
JP5105567B1 (ja) 2012-12-26
CN103765303B (zh) 2016-06-29
JPWO2013157113A1 (ja) 2015-12-21
CN103765303A (zh) 2014-04-30

Similar Documents

Publication Publication Date Title
JP5105567B1 (ja) 光配向照射装置
US7463418B2 (en) Polarization element unit and polarization light emitting apparatus
KR20140094354A (ko) 레이저 어닐링 장치
US10788716B2 (en) Light alignment control method and light alignment device
KR20140099404A (ko) 레이저 리페어장치 및 레이저를 이용하여 기판 상의 배선결함을 리페어하는 방법
JP2012173693A (ja) 露光装置及び露光方法
JP5131886B1 (ja) 光配向照射装置
KR101928610B1 (ko) 편광 측정 장치, 편광 측정 방법 및 편광광 조사 장치
WO2013039100A1 (ja) フィルム露光装置
JP2012123207A (ja) 露光装置及び露光方法
JP2008098325A (ja) 露光装置及び露光方法
KR20160146502A (ko) 광 배향용 편광광 조사장치
WO2012093534A1 (ja) 露光装置及び露光方法
JP2017146428A (ja) 偏光素子ユニットおよび偏光光照射装置
JP6197896B2 (ja) 偏光光照射装置
TWI666428B (zh) 偏光光測定裝置、及偏光光照射裝置
JP7193196B2 (ja) 配向膜露光装置用の測定機構、および配向膜露光装置の調整方法
TWI694243B (zh) 一種線柵拼接標定裝置與方法
JP2012145786A (ja) 露光装置及び露光方法
JP2017146427A (ja) 偏光素子ユニットおよび偏光光照射装置
JP2023104836A (ja) ワイヤーグリッド偏光子、これを備える偏光光照射装置、露光装置、ワイヤーグリッド偏光子の角度調整方法、検光子、検光子の角度調整方法
KR20080062900A (ko) 노광시스템 및 노광방법
WO2012096069A1 (ja) 露光装置及び露光方法
JP2017058622A (ja) 偏光光照射装置
JP2012208180A (ja) コントラスト検査方法およびコントラスト検査装置

Legal Events

Date Code Title Description
ENP Entry into the national phase

Ref document number: 2012535495

Country of ref document: JP

Kind code of ref document: A

ENP Entry into the national phase

Ref document number: 20137018193

Country of ref document: KR

Kind code of ref document: A

121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 12874498

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 12874498

Country of ref document: EP

Kind code of ref document: A1