WO2013150788A1 - 移動体装置、露光装置、フラットパネルディスプレイの製造方法、及びデバイス製造方法 - Google Patents

移動体装置、露光装置、フラットパネルディスプレイの製造方法、及びデバイス製造方法 Download PDF

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Publication number
WO2013150788A1
WO2013150788A1 PCT/JP2013/002306 JP2013002306W WO2013150788A1 WO 2013150788 A1 WO2013150788 A1 WO 2013150788A1 JP 2013002306 W JP2013002306 W JP 2013002306W WO 2013150788 A1 WO2013150788 A1 WO 2013150788A1
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WIPO (PCT)
Prior art keywords
moving
moving body
movable
guide member
guide
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PCT/JP2013/002306
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English (en)
French (fr)
Japanese (ja)
Inventor
青木　保夫
Original Assignee
株式会社ニコン
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Application filed by 株式会社ニコン filed Critical 株式会社ニコン
Priority to KR1020207027970A priority Critical patent/KR102228708B1/ko
Priority to KR1020147030730A priority patent/KR102163139B1/ko
Priority to CN201380018913.XA priority patent/CN104221128B/zh
Publication of WO2013150788A1 publication Critical patent/WO2013150788A1/ja

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    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70716—Stages
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment

Definitions

  • the present invention relates to a moving body apparatus, an exposure apparatus, a flat panel display manufacturing method, and a device manufacturing method, and more specifically, a moving body apparatus that moves a moving body along a predetermined two-dimensional plane, and the moving body apparatus.
  • the present invention relates to an exposure apparatus, a flat panel display manufacturing method using the exposure apparatus, and a device manufacturing method using the exposure apparatus.
  • a lithography process for manufacturing an electronic device such as a liquid crystal display element, a semiconductor element (such as an integrated circuit), a mask or reticle (hereinafter collectively referred to as “mask”), a glass plate or a wafer (hereinafter referred to as “mask”).
  • a step-and-scan type exposure apparatus that transfers a pattern formed on a mask onto a substrate using an energy beam while moving the substrate in a synchronized manner in the scanning direction (scanning direction). It is used.
  • a fine movement stage that holds a substrate is supported from below by a weight cancellation apparatus, and a guide member that guides the movement of the weight cancellation apparatus in the cross-scan direction is, together with the weight cancellation apparatus, a scanning direction.
  • a movable substrate stage device for example, see Patent Document 1.
  • the substrate stage apparatus tends to increase in size and weight.
  • the present invention has been made under the circumstances described above. From a first viewpoint, the present invention extends in a first direction within a predetermined two-dimensional plane and is perpendicular to the first direction within the two-dimensional plane.
  • a guide member capable of moving a position along a direction; and a guide member supported from below by the guide member and movable along the first surface defined by the guide member; and the guide A movable body capable of moving along the second direction together with the member, and a position related to a direction intersecting the two-dimensional plane of the movable body with a second surface defined by a member different from the guide member as a reference plane
  • a position measurement system for obtaining information.
  • the second surface is the reference surface
  • accuracy is not required for the first surface of the guide member. Therefore, the structure of the guide member can be simplified, and the mobile device can be reduced in size and weight.
  • the present invention is a guide member that extends in a first direction in a predetermined two-dimensional plane and is movable in a second direction perpendicular to the first direction in the two-dimensional plane. And can be moved along the first direction along the guide surface defined by the guide member, and can move along the second direction together with the guide member.
  • a movable body device comprising: a movable body capable of being driven; and a driving device that is provided on the guide member and drives the movable body in a direction intersecting the two-dimensional plane.
  • the guide member drives the moving body in the direction intersecting the two-dimensional plane
  • the configuration can be simplified and moved compared to the case where the moving body is driven in the direction intersecting the two-dimensional plane by a separate driving device.
  • the body device can be reduced in size and weight.
  • the present invention is a first device that extends in a first direction in a predetermined two-dimensional plane and is movable in a second direction perpendicular to the first direction in the two-dimensional plane.
  • a moving member and a second member provided on the first moving member, movable in the first direction along the first moving member, and movable in the second direction together with the first moving member.
  • a moving body device comprising: a moving member; and a moving body supported by the first moving member from below and guided by the second moving member to move along the two-dimensional plane.
  • the second moving member that guides the moving body along the two-dimensional plane can move in the first direction along the first moving member that supports the moving body from below, and the second moving member can be moved together with the first moving member. Since it can move along two directions, the device configuration is simple.
  • a moving body device according to any one of the first to third aspects of the present invention in which a predetermined object is held by the moving body, and the moving body held by the moving body.
  • An exposure apparatus comprising: a pattern forming apparatus that forms a predetermined pattern using an energy beam on an object.
  • a flat panel display comprising: exposing the object using the exposure apparatus according to the fourth aspect of the present invention; and developing the exposed object. It is a manufacturing method.
  • a device manufacturing method including: exposing the object using the exposure apparatus according to the fourth aspect of the present invention; and developing the exposed object. is there.
  • FIG. 4A is a cross-sectional view taken along the line BB of the substrate stage apparatus of FIG. 3, and FIG. 4B is a view in which some elements are removed from the substrate stage apparatus of FIG. 4A.
  • FIG. 4A is a cross-sectional view taken along the line CC of FIG. 5, and FIG.
  • FIG. 6B is a diagram in which some elements are removed from the substrate stage apparatus of FIG. 6A. It is a figure which shows the substrate stage apparatus which concerns on the modification (the 2) of 1st Embodiment.
  • FIG. 8 is a sectional view taken along line DD of the substrate stage apparatus of FIG. 7. It is a figure which shows the substrate stage apparatus which concerns on the modification (the 3) of 1st Embodiment. It is a figure for demonstrating operation
  • FIG. 14 is a cross-sectional view of the substrate stage apparatus of FIG. 13 taken along the line EE. It is a top view of the substrate stage apparatus of FIG.
  • FIG. 16 is a cross-sectional view of the substrate stage apparatus of FIG. 15 taken along the line FF. It is a figure which shows arrangement
  • FIG. 19 is a sectional view taken along line GG in FIG. It is a figure which shows the substrate stage apparatus which concerns on the modification (the 2) of 2nd Embodiment.
  • FIG. 22 is a sectional view taken along line HH in FIG. 21. It is a figure which shows the substrate stage apparatus which concerns on the modification (the 4) of 2nd Embodiment. It is the II sectional view taken on the line of FIG.
  • FIG. 1 schematically shows a configuration of a liquid crystal exposure apparatus 10 according to the first embodiment.
  • the liquid crystal exposure apparatus 10 employs a step-and-scan method in which a rectangular (square) glass substrate P (hereinafter simply referred to as a substrate P) used in, for example, a liquid crystal display device (flat panel display) is an exposure object.
  • a projection exposure apparatus a so-called scanner.
  • the liquid crystal exposure apparatus 10 has an illumination system 12, a mask stage apparatus 14 that holds a mask M on which a circuit pattern and the like are formed, a projection optical system 16, an apparatus body 18, and a resist (surface facing the + Z side in FIG. 1) on the surface. It has a substrate stage apparatus 20A that holds the substrate P coated with (sensitive agent), and a control system thereof.
  • the direction in which the mask M and the substrate P are relatively scanned with respect to the projection optical system 16 at the time of exposure is defined as the X-axis direction
  • the direction orthogonal to the X-axis in the horizontal plane is defined as the Y-axis direction, the X-axis, and the Y-axis.
  • the orthogonal direction is the Z-axis direction
  • the rotation directions around the X-axis, Y-axis, and Z-axis are the ⁇ x, ⁇ y, and ⁇ z directions, respectively.
  • the illumination system 12 is configured similarly to the illumination system disclosed in, for example, US Pat. No. 5,729,331.
  • the illumination system 12 irradiates the mask M with illumination light IL for exposure.
  • illumination light IL for example, light such as i-line (wavelength 365 nm), g-line (wavelength 436 nm), h-line (wavelength 405 nm), or the combined light of the i-line, g-line, and h-line is used.
  • the mask stage device 14 has a mask stage 14a made of a plate-like member having an opening formed at the center.
  • the mask stage 14a sucks and holds the outer peripheral edge of the mask M inserted into the opening by the support hand 14b.
  • the mask stage 14a is mounted on a pair of stage guides 14c fixed to a lens barrel surface plate 18a which is a part of the apparatus main body 18, and is scanned in a scanning direction (X) by a mask stage drive system (not shown) including a linear motor, for example. It is driven with a predetermined long stroke in the axial direction) and is slightly driven as appropriate in the Y-axis direction and the ⁇ z direction.
  • Position information of the mask stage 14a in the XY plane is obtained by a mask interferometer 14d fixed to the lens barrel surface plate 18a using a bar mirror 14e fixed to the mask stage 14a. It is done.
  • the mask interferometer 14d includes a plurality of X mask interferometers and a plurality of Y mask interferometers.
  • the bar mirror 14e includes an X bar mirror corresponding to the X mask interferometer and a Y bar mirror corresponding to the Y mask interferometer. Although only included, FIG. 1 typically shows only the Y mask interferometer and the Y bar mirror.
  • the projection optical system 16 is disposed below the mask stage 14a and supported by the lens barrel surface plate 18a.
  • the projection optical system 16 is configured similarly to the projection optical system disclosed in, for example, US Pat. No. 6,552,775.
  • the projection optical system 16 includes a plurality of projection optical systems (multi-lens projection optical systems) in which the projection areas of the pattern image of the mask M are arranged in a staggered manner, and is a single rectangular shape whose longitudinal direction is the Y-axis direction. Functions in the same way as a projection optical system having one image field.
  • a bilateral telecentric equal magnification system that forms an erect image is used.
  • the illumination light that has passed through the mask M causes the circuit pattern of the mask M in the illumination area via the projection optical system 16. Is formed in the irradiation region (exposure region) of the illumination light IL conjugate to the illumination region on the substrate P. Then, by synchronous driving of the mask stage device 14 and the substrate stage device 20A, the mask M is relatively moved in the scanning direction with respect to the illumination region (illumination light IL), and the substrate P with respect to the exposure region (illumination light IL). Is relatively moved in the scanning direction, scanning exposure of one shot area on the substrate P is performed, and the pattern formed on the mask M is transferred to the shot area.
  • the pattern of the mask M is generated on the substrate P by the illumination system 12 and the projection optical system 16, and the sensitive layer (resist layer) on the substrate P is exposed on the substrate P by the illumination light IL. That pattern is formed.
  • the apparatus main body 18 includes a lens barrel surface plate 18a, a pair of side columns 18b, and a substrate stage mount 18c.
  • the lens barrel surface plate 18a is composed of a plate-like member parallel to the XY plane, and supports the mask stage device 14 and the projection optical system 16.
  • One of the pair of side columns 18b supports the vicinity of the + Y side end of the lens barrel base plate 18a from below, and the other supports the vicinity of the ⁇ Y side end of the lens barrel base plate 18a from below.
  • the side column 18b is made of a plate-like member parallel to the XZ plane, and is installed on the floor 11 of the clean room via a vibration isolator 18d. Thereby, the apparatus main body 18 (and the mask stage apparatus 14 and the projection optical system 16) is vibrationally separated from the floor 11.
  • the substrate stage mount 18c is made of a plate-like member parallel to the XY plane, and is installed between the vicinity of the lower ends of the pair of side columns 18b. As shown in FIG. 2, a plurality (for example, two in the first embodiment) of substrate stage mounts 18c are provided at predetermined intervals in the Y-axis direction. As shown in FIG. 3, a plurality of (for example, two) Y linear guides 19a extending in the Y-axis direction are fixed on the upper surface of the substrate stage base 18c at predetermined intervals in the X-axis direction.
  • the substrate stage apparatus 20A includes a plurality of (for example, three) base frames 22, a pair of X beams 24, a coarse movement stage 28, a fine movement stage 30 (not shown in FIG. 3, refer to FIG. 1), a weight cancellation apparatus 40, a first It has a step guide 50, a pair of second step guides 54, and a target stage 60.
  • the three base frames 22 are each composed of a plate-like member parallel to the YZ plane extending in the Y-axis direction, and are arranged in parallel to each other at a predetermined interval in the X-axis direction. 1 corresponds to a cross-sectional view taken along the line AA in FIG. 2, but the base frame 22 is not shown from the viewpoint of avoiding the complication of the drawing.
  • the first base frame 22 is on the + X side of the + X side substrate stage mount 18c
  • the second base frame 22 is on the ⁇ X side of the ⁇ X side substrate stage mount 18c.
  • the third base frame 22 is installed on the floor 11 (see FIG.
  • a Y linear guide 23a extending in the Y-axis direction is fixed to the upper end surface (the + Z side end) of each of the plurality of base frames 22.
  • the pair of X beams 24 are each composed of a member having a rectangular YZ section extending in the X-axis direction, and are arranged in parallel to each other at a predetermined interval in the Y-axis direction.
  • the pair of X beams 24 are supported by the base frame 22 from below in the vicinity of both ends in the longitudinal direction and in the center.
  • the pair of X beams 24 are connected to each other by connecting members 24a made of plate-like members extending in the Y-axis direction in the vicinity of both ends in the longitudinal direction on the lower surface thereof.
  • a spacer 24 b is attached to the central portion in the longitudinal direction on the lower surface of the X beam 24.
  • a Y slide member 23b that is slidably engaged with the Y linear guide 23a is fixed to the lower surfaces of the connection member 24a and the spacer 24b.
  • the pair of X beams 24 are guided straightly in the Y-axis direction on the plurality of base frames 22.
  • the pair of X beams 24 are driven in the Y-axis direction with a predetermined stroke on the plurality of base frames 22 by a Y actuator (not shown) (for example, a linear motor, a feed screw device or the like).
  • a Y actuator for example, a linear motor, a feed screw device or the like.
  • the Z position of the lower surface of the pair of X beams 24 is located on the + Z side with respect to the Z position of the upper end portion of the Y linear guide 19a fixed to the upper surface of the substrate stage mount 18c. 24 is vibrationally separated from the substrate stage base 18c (that is, the apparatus main body 18).
  • an X linear guide 25a extending in the X-axis direction is fixed to the upper surface of each of the pair of X beams 24.
  • X stators 26a including a plurality of permanent magnets arranged at predetermined intervals in the X-axis direction are fixed to both side surfaces of the pair of X beams 24.
  • the coarse movement stage 28 is formed of a rectangular plate-like member in plan view (viewed from the + Z direction), and is mounted on the pair of X beams 24.
  • An opening 28 a is formed at the center of the coarse movement stage 28.
  • an X slide member that slidably engages with the X linear guide 25a and constitutes the X linear guide device 25 together with the X linear guide 25a, as shown in FIG.
  • a plurality of 25b (for example, four per one X linear guide 25a) are fixed.
  • the coarse movement stage 28 is guided in a straight line on the pair of X beams 24 in the X-axis direction.
  • a pair of X movers 26b face the X stator 26a via a fixed plate 27 on the lower surface of the coarse movement stage 28 on the opening 28a + Y side region and the ⁇ Y side region. Attached.
  • the X mover 26b includes a coil unit and constitutes an X linear motor 26 for driving the coarse movement stage 28 on the pair of X beams 24 in the X-axis direction together with the corresponding X stator 26a.
  • the relative movement of the coarse movement stage 28 in the Y-axis direction with respect to the pair of X beams 24 is restricted by the action of the X linear guide device 25, and the coarse movement stage 28 is integrated with the pair of X beams 24 in the Y-axis direction.
  • the pair of X beams 24 and the coarse movement stage 28 constitute a so-called gantry type biaxial stage device.
  • the fine movement stage 30 is formed of a rectangular parallelepiped member having a low height and is disposed above the coarse movement stage 28.
  • a substrate holder 32 is fixed to the upper surface of fine movement stage 30.
  • the substrate holder 32 sucks and holds the substrate P placed on the upper surface thereof, for example, by vacuum suction.
  • the fine movement stage 30 and the substrate holder 32 are not shown from the viewpoint of avoiding complications in the drawing.
  • a Y bar mirror 34 y having a reflecting surface orthogonal to the Y axis is fixed to the side surface on the ⁇ Y side of fine movement stage 30 via mirror base 33.
  • an X bar mirror 34 x having a reflecting surface orthogonal to the X axis is fixed to the side surface on the ⁇ X side of fine movement stage 30 as shown in FIG.
  • the fine movement stage 30 has three freedoms on the coarse movement stage 28 by a fine movement stage drive system including a plurality of voice coil motors including a stator fixed to the coarse movement stage 28 and a mover fixed to the fine movement stage 30. It is slightly driven in the degree direction (X axis, Y axis, ⁇ z direction).
  • the plurality of voice coil motors include, for example, two X voice coil motors 36x (not shown in FIG. 1) and, for example, two Y voice coil motors 36y (not shown in FIG. 2, see FIG. 1).
  • two X voice coil motors 36x overlap in the depth direction of the drawing.
  • two Y voice coil motors 36y overlap in the depth direction of the drawing.
  • the fine movement stage 30 is guided in a non-contact manner to the coarse movement stage 28 by the thrust (electromagnetic force) generated by the plurality of voice coil motors, so that the coarse movement stage 28 and the coarse movement stage 28 are X-axis direction and / or Y-axis. Move with a certain stroke in the direction.
  • the fine movement stage 30 is appropriately finely driven in the direction of the three degrees of freedom with respect to the coarse movement stage 28 by a plurality of voice coil motors.
  • the fine movement stage drive system has a plurality of Z voice coil motors 36z for finely driving the fine movement stage 30 in the three degrees of freedom in the ⁇ x, ⁇ y, and Z-axis directions. Yes.
  • the plurality of Z voice coil motors 36z are arranged, for example, at locations corresponding to the four corners of fine movement stage 30 (in FIG. 1, only two of the four Z voice coil motors 36z are shown, and the other two Is hidden behind the paper.)
  • the configuration of the fine movement stage drive system including a plurality of voice coil motors is disclosed in, for example, US Patent Application Publication No. 2010/0018950.
  • the X position information of the fine movement stage 30 is obtained by using an X bar mirror 34x by an X laser interferometer 38x fixed to the apparatus main body 18 via a member called an interferometer column 18e. It is done. Further, the Y position information of the fine movement stage 30 is obtained by using a Y bar mirror 34y by a Y laser interferometer 38y fixed to the apparatus main body 18, as shown in FIG. A plurality of X laser interferometers 38x and Y laser interferometers 38y are provided (in FIG. 1 and FIG. 2, respectively overlap in the depth direction of the paper surface) so that the ⁇ z position information of fine movement stage 30 can be obtained. It has become.
  • the information on the position of the fine movement stage 30 in the Z-axis, ⁇ x, and ⁇ y directions is a plurality of (for example, And four) Z sensors 38z, which are obtained using a target stage 60 described later.
  • the four Z sensors 38z are arranged at predetermined intervals around the Z axis.
  • the Z position information of the fine movement stage 30 is based on the average value of the outputs of the plurality of Z sensors 38z, and the ⁇ x and ⁇ y directions of the fine movement stage 30 are based on the output difference of the plurality of Z sensors 38z.
  • Rotation amount information is obtained.
  • the type of the Z sensor 38z is not particularly limited. For example, a laser displacement meter, a laser interferometer, or the like can be used.
  • the weight canceling device 40 supports the fine movement stage 30 from below via a leveling device 46 described later.
  • the weight cancellation device 40 is inserted into the opening 28a of the coarse movement stage 28, and is supported from below by a first step guide 50 to be described later.
  • the weight canceling device 40 has an air bearing 42 at its lower end, and the first portion of the weight canceling device 40 is pressurized by a static pressure of a pressurized gas (for example, air) ejected from the air bearing 42 toward the upper surface of the first step guide 50. It floats on the one-step guide 50 via a predetermined clearance.
  • 4A corresponds to a cross-sectional view taken along the line BB of FIG. 3, but the base frame 22 is not shown from the viewpoint of avoiding the complexity of the drawing.
  • the weight cancellation apparatus 40 of this embodiment has the same configuration and function as the weight cancellation apparatus disclosed in, for example, US Patent Application Publication No. 2010/0018950. That is, the weight canceling device 40 includes, for example, an air spring (not shown), and the weight of the system including the fine movement stage 30, the substrate holder 32, and the like by the upward force in the gravity direction (+ Z direction) generated by the air spring. By canceling (downward ( ⁇ Z direction) force due to weight acceleration), the load on the plurality of Z voice coil motors 36z is reduced when the Z / tilt position control of the fine movement stage is performed.
  • the weight cancellation device 40 is mechanically connected to the coarse movement stage 28 via a plurality of, for example, four flexure devices 44 at a Z position (center of gravity height) that is substantially the same as the Z position of the center of gravity.
  • the flexure device 44 of this embodiment has the same configuration and function as the flexure device disclosed in, for example, US Patent Application Publication No. 2010/0018950. That is, the flexure device 44 includes, for example, a thin strip-shaped steel plate arranged in parallel to the XY plane, and a sliding device (for example, a ball joint) provided at both ends of the steel plate, and the steel plate is slipped. It is installed between the weight canceling device 40 and the coarse movement stage 28 via a joint device.
  • the flexure device 44 connects the weight cancellation device 40 and the coarse movement stage 28 on the + X side, the ⁇ X side, the + Y side, and the ⁇ Y side of the weight cancellation device 40.
  • the weight cancellation device 40 is pulled by the coarse movement stage 28 via at least one of the plurality of flexure devices 44. It moves integrally with the coarse movement stage 28 in the X-axis direction and / or the Y-axis direction.
  • the leveling device 46 is a spherical bearing device including a base 46a and a ball 46b, and supports the fine movement stage 30 from below so as to freely swing (tilt operation) in the ⁇ x and ⁇ y directions. Then, it moves along the XY plane integrally with the fine movement stage 30.
  • the leveling device 46 is non-contact supported by the weight canceling device 40 from below via an air bearing (not shown) attached to the weight canceling device 40, and relative movement in the direction along the horizontal plane with respect to the weight canceling device 40 is allowed. Has been. If the fine movement stage 30 can be supported from below so as to be tiltable freely, a pseudo-spherical bearing device as disclosed in, for example, US Patent Application Publication No. 2010/0018950 is used as a leveling device. Also good.
  • the first step guide 50 is composed of a plate-like member parallel to the XY plane extending in the X-axis direction, and is disposed on, for example, two substrate stage stands 18c.
  • the dimension in the longitudinal direction of the first step guide 50 is set slightly longer than the movement stroke of the fine movement stage 30 in the X-axis direction.
  • the width direction (Y-axis direction) dimension of the first step guide 50 is set to be somewhat wider than the footprint of the weight cancellation device 40.
  • the upper surface of the first step guide 50 is finished so as to be very flat so as to be parallel to the XY plane (horizontal plane), and the weight canceling device 40 (and the fine movement stage 30) moves in the X-axis direction. It functions as a guide surface.
  • the material of the first step guide 50 is not particularly limited, but is preferably formed using, for example, a stone material (for example, a dense stone material such as porphyry rock), ceramics, cast iron, or the like.
  • the first step guide 50 On the lower surface of the first step guide 50, as shown in FIG. 4B, there are a plurality of Y slide members 19b slidably engaged with the Y linear guide 19a (for example, 2 for each Y linear guide 19a). One) It is fixed. Thus, the first step guide 50 is guided straight in the Y-axis direction along the plurality of Y linear guides 19a.
  • a pair of connecting members 50a are fixed at a predetermined interval in the Y-axis direction.
  • the + Y side connection member 50a is connected to the + Y side X beam 24 via the flexure device 52
  • the ⁇ Y side connection member 50a is connected to the ⁇ Y side X beam via the flexure device 52. 24.
  • a pair of connection members 52 a is fixed to the ⁇ X side end of the first step guide 50
  • the first step guide 50 is connected to the pair of X beams 24 by the flexure device 52 via the pair of connection members 52 a.
  • the flexure device 52 connects the first step guide 50 and the X beam 24 at the same Z position (center of gravity height) as the Z position of the center of gravity of the first step guide 50. is doing.
  • the configuration of the flexure device 52 is substantially the same as that of the flexure device 44 that connects the weight cancellation device 40 and the coarse movement stage 28. That is, the flexure device 52 includes a thin steel plate having a thickness parallel to the XY plane extending in the Y-axis direction, and a slide device (for example, a ball joint) provided at both ends of the steel plate. It is installed between the first step guide 50 and the X beam 24 via the apparatus. Accordingly, the first step guide 50 and the X beam 24 are connected integrally (high rigidity) in the Y-axis direction, whereas the other five-degree-of-freedom directions (X, Z, ⁇ x, ⁇ y, ⁇ z). In terms of vibration.
  • the weight cancellation device 40 is pulled by the coarse motion stage 28 and the first stage is moved. Move on the 1-step guide 50 in the X-axis direction. Further, when the pair of X beams 24 are driven in the Y-axis direction in order to drive the substrate P with a predetermined stroke in the Y-axis direction, the weight cancellation device 40 is pulled by the coarse movement stage 28 and moved in the Y-axis direction. Moving.
  • the pair of X beams 24 and the first step guide 50 integrally move in the Y-axis direction (the weight cancellation device 40 and the first step guide 50 do not move relative to each other in the Y-axis direction). 40 does not fall off from the first step guide 50. Therefore, the width direction (Y-axis direction) dimension of the first step guide 50 may be a minimum dimension that can guide the movement of the weight canceling device 40 in the X-axis direction, and can be formed lightweight.
  • the pair of second step guides 54 are each made of a plate member having a rectangular YZ section extending in the X-axis direction, and are disposed on, for example, two substrate stage mounts 18c.
  • One pair of the second step guides 54 is on the + Y side of the first step guide 50 and the other is on the ⁇ Y side of the first step guide 50, respectively, with a predetermined clearance from the first step guide 50. They are arranged in parallel.
  • the longitudinal dimension of the second step guide 54 is set to be substantially the same as that of the first step guide 50, but the width direction (Y-axis direction) dimension is larger than that of the first step guide 50. Is set too narrow.
  • the thickness direction dimension of the second step guide 54 is set to be substantially the same as that of the first step guide 50.
  • a Y slide member 19c that is slidably engaged with the Y linear guide 19a is fixed to the lower surface of the second step guide 54. As a result, the second step guide 54 is guided linearly in the Y-axis direction along the plurality of Y linear guides 19a.
  • the upper surface of the second step guide 54 is finished with a very high degree of flatness so as to be parallel to the XY plane (horizontal plane), and functions as a guide surface when the target stage 60 described later moves in the X-axis direction. To do.
  • the material of the 2nd step guide 54 is not specifically limited, For example, it is preferable to form using stone materials (for example, dense stone materials, such as porphyry rock), ceramics, cast iron, an aluminum alloy, etc.
  • the pair of second step guides 54 are integrally connected by a connecting member 56 made of a member having a U-shaped YZ cross section.
  • the first step guide 50 is inserted between the pair of facing surfaces of the connecting member 56 via a predetermined clearance.
  • a plurality of connection members 56 (for example, four in the first embodiment) are provided at predetermined intervals in the X-axis direction.
  • connecting members 54a are fixed to both ends of the second step guide 54 in the longitudinal direction (+ X side and ⁇ X side).
  • the connection member 54a In the second step guide 54 on the + Y side, the connection member 54a is connected to the X beam 24 on the + Y side via the flexure device 58, and in the second step guide 54 on the ⁇ Y side, the connection member 54a is connected to the flexure device 58.
  • the configuration of the flexure device 58 is substantially the same as that of the flexure device 52 that connects the first step guide 50 and the X beam 24.
  • the target stage 60 is disposed between the pair of X beams 24 and is mounted on the pair of second step guides 54. As shown in FIG. 4B, the target stage 60 includes an upper ring 61, a lower ring 62, a connection member 63, a plurality of targets 64, and a plurality of air bearings 65.
  • the upper ring 61 is made of a disk-shaped member having an opening at the center.
  • the lower ring 62 is formed of a disk-like member having substantially the same outer diameter and inner diameter as the upper ring 61 (however, the thickness is thinner than that of the upper ring 61), as shown in FIG. 4B. Further, it is arranged below the upper ring 61 (in FIG. 3, it is hidden behind the upper ring 61 in the drawing).
  • the weight canceling device 40 is inserted into the opening of each of the upper ring 61 and the lower ring 62.
  • connection member 63 is inserted between the lower surface of the upper ring 61 and the upper surface of the lower ring 62 and integrally connects the upper ring 61 and the lower ring 62.
  • the lower ring 62 may be smaller in diameter than the upper ring 61, and the upper ring 61 is on the + Z side with respect to the coarse movement stage 28 and has a larger diameter than the opening of the coarse movement stage 28. Also good.
  • targets 64 correspond to the Z sensors at predetermined intervals in the ⁇ z direction (around the Z axis) as shown in FIG. It is fixed to the upper surface of the upper ring 61 so as to be located immediately below 38z. It is desirable to select the type of the target 64 according to the type of the Z sensor 38z. For example, when a triangulation type reflection laser displacement sensor is used as the Z sensor 38z, it is desirable to use white ceramics for the target 64, and for example, a vertical reflection type reflection laser displacement sensor is used as the Z sensor 38z.
  • the target 64 it is desirable to use a mirror for the target 64 (the upper surface of the upper ring 61 may be mirror-finished and the target 64 may be omitted).
  • the area of the target 64 is set in consideration of the amount of movement when the fine movement stage 30 is slightly driven relative to the coarse movement stage 28 (so that the measurement beam does not deviate from the target).
  • a plurality (for example, four in the first embodiment) of air bearings 65 are fixed to the lower surface of the lower ring 62 at a predetermined interval in the ⁇ z direction (around the Z axis).
  • the gas ejection surfaces (bearing surfaces) of the two air bearings 65 face the upper surface of one (+ Y side) second step guide 54, and the gas of the other two air bearings 65.
  • the ejection surface faces the upper surface of the other ( ⁇ Y side) second step guide 54.
  • the target stage 60 is paired by a static pressure of pressurized gas (for example, air) ejected from the plurality of air bearings 65 to the corresponding second step guide 54.
  • the second step guide 54 floats over a predetermined clearance.
  • the target stage 60 is connected to the coarse movement stage 28 by a plurality of flexure devices 66 as shown in FIG.
  • the configuration of the flexure device 66 is substantially the same as that of the flexure device 44 that connects the weight canceling device 40 and the coarse movement stage 28 (however, the plurality of flexure devices 44 are parallel to the X axis or the Y axis (in plan view).
  • the plurality of flexure devices 66 extend in a direction that forms an angle of, for example, 45 ° with respect to the X-axis or the Y-axis).
  • the target stage 60 is pulled by the coarse movement stage 28 and a pair of The second step guide 54 is moved in the X-axis direction. Further, when the pair of X beams 24 are driven in the Y-axis direction to drive the substrate P with a predetermined stroke in the Y-axis direction, the target stage 60 is pulled by the coarse movement stage 28 and moved in the Y-axis direction. Moving.
  • the pair of X beams 24 and the pair of second step guides 54 integrally move in the Y-axis direction (the target stage 60 and the pair of second step guides 54 do not move relative to each other in the Y-axis direction).
  • the target stage 60 does not fall off from the pair of second step guides 54.
  • the Z sensor 38z can obtain the Z position information of the fine movement stage 30 using the corresponding target 64 regardless of the position of the fine movement stage 30 in the XY plane.
  • the mask M is loaded onto the mask stage apparatus 14 by a mask loader (not shown) under the control of a main controller (not shown).
  • the substrate P is loaded onto the substrate holder 32 by a substrate loader (not shown).
  • alignment measurement is performed by the main controller using an alignment detection system (not shown), and after completion of the alignment measurement, a plurality of shot areas set on the substrate P are sequentially exposed in a step-and-scan manner. Operation is performed. Since this exposure operation is the same as the conventional step-and-scan exposure operation, detailed description thereof is omitted here.
  • a plurality of sensors 15 fixed to the lower surface of the lens barrel surface plate 18a and in the vicinity of the projection optical system 16 are used.
  • Z position information of the surface of the fine movement stage 30 is obtained so that the Z position of the exposure region on the substrate P is located within the focal depth of the projection optical system 16 based on the outputs of the plurality of sensors 15.
  • Tilt position control is performed using a plurality of Z voice coil motors 36z.
  • the target 64 used when obtaining the Z position information of the fine movement stage 30 is attached to the target stage 60 which is a separate member from the weight cancellation apparatus 40. Therefore, the weight canceling device 40 can be made smaller and lighter than when the target 64 is temporarily attached to the weight canceling device 40. Further, if the target 64 is attached to the weight canceling device 40, and the flatness of the upper surface of the first step guide 50 is low, the measurement accuracy of the Z / tilt position information of the fine movement stage 30 may be lowered.
  • the target stage 60 mounted on the pair of second step guides 54 is used when obtaining the Z / tilt position information of the fine movement stage 30. Even if the flatness of the upper surface of 50 is low, the upper surface of the second step guide 54 functions as a measurement reference surface, so there is no problem in the measurement accuracy of the Z / tilt position information of the fine movement stage 30.
  • the Z / tilt position of the fine movement stage 30 can be controlled with high accuracy by the plurality of Z voice coil motors 36z, even if the flatness of the upper surface of the first step guide 50 is lowered, If the measurement accuracy of the Z / tilt position information can be ensured, the Z / tilt position control of the fine movement stage 30 can be performed with high accuracy. Therefore, it is not necessary to take measures such as increasing the rigidity of the first step guide 50 in order to ensure the flatness of the upper surface of the first step guide 50. Therefore, the first step guide 50 can be reduced in size (thinned) and reduced in weight.
  • FIGS. 5 to 6B show a substrate stage apparatus 20B according to a modification (No. 1) of the first embodiment (in FIG. 5, the fine movement stage 30 (FIG. 6A) is shown. (Reference) is not shown).
  • the Z / tilt position information of the fine movement stage 30 is obtained from the target 64 attached to the target stage 60 by a plurality of Z sensors 38z.
  • the substrate stage apparatus 20B shown in FIG. 6B is different in that it is obtained using the upper surfaces of the pair of second step guides 54 by a plurality of Z sensors 38z.
  • the driving method of the pair of second step guides 54 is included, and other elements are the same as those in the first embodiment as shown in FIGS. 5 and 6A.
  • a band-shaped member formed of white ceramics is used as a target (reference plane for measuring Z / tilt position information) of the second step guide 54. It is preferable to attach it to the upper surface (in order to make the second step guide 54 itself function as a target, the second step guide 54 itself may be formed of ceramics, or ceramics may be formed on the metal surface by thermal spraying). .
  • a vertical laser reflection type laser displacement sensor is used as the Z sensor 38z, for example, a belt-like mirror that covers almost the entire upper surface of the second step guide 54 may be attached to the second step guide 54 ( Alternatively, almost the entire upper surface of the second step guide 54 may be mirror-finished).
  • the substrate stage apparatus 20B compared with the substrate stage apparatus 20A of the first embodiment, since the target stage 60 (see FIG. 3) is not provided, the configuration is simple. Further, since the inertial mass is reduced, the position controllability of the coarse movement stage 28 (that is, the substrate P) is improved. In addition, the linear motor for driving the coarse movement stage 28 can be reduced in size. Further, since the target stage 60 is not mounted on the second step guide 54, it is not necessary to take measures such as increasing the rigidity of the second step guide 54. Therefore, the second step guide 54 can be reduced in size (thinned) and reduced in weight.
  • ⁇ Modification of First Embodiment (No. 2) 7 and 8 show a substrate stage apparatus 20C according to a modification (No. 2) of the first embodiment.
  • the weight cancellation apparatus 40 supports the fine movement stage 30 from below on the first step guide 50 via the leveling apparatus 46.
  • the substrate stage apparatus 20C is different in that a leveling apparatus 78 is directly mounted on the first step guide 70A.
  • the first step guide 70A is mechanically applied to a pair of X beams 24 (not shown in FIGS. 7 and 8; see FIG. 1 and the like) as in the first embodiment.
  • the coarse movement stage 28 is mounted on the pair of X beams 24, is driven in the X axis direction on the pair of X beams 24, and moves with the pair of X beams 24 in the Y axis direction.
  • the first step guide 70A has a guide body 71, an air spring 72, and a pair of Z voice coil motors 73, and also functions as a weight cancellation device and a Z actuator.
  • the guide main body 71 has a lower plate portion 71a, an upper plate portion 71b, and a pair of guide plates 71c.
  • the lower plate portion 71a and the upper plate portion 71b are each formed of a rectangular plate-like member parallel to the XY plane extending in the X-axis direction, and are arranged in parallel with each other at a predetermined interval in the Z-axis direction.
  • the upper plate portion 71b is guided by a pair of guide plates 71c (or a linear guide device not shown) fixed to the lower plate portion 71a and can move in the Z-axis direction with respect to the lower plate portion 71a.
  • the air spring 72 is inserted between the lower plate portion 71a and the upper plate portion 71b, and supports the central portion of the upper plate portion 71b from below. Pressurized gas is supplied to the air spring 72 from the outside, and an upward force in the direction of gravity that balances the weight of the system including the fine movement stage 30 (including the leveling device 78) is applied to the upper plate portion 71b.
  • a plurality of air springs 72 may be arranged at a predetermined interval in the X-axis direction.
  • the voice coil motor 73 includes a stator 73a fixed to the lower plate portion 71a and a mover 73b fixed to the upper plate portion 71b, and when the Z position control of the fine movement stage 30 is performed, the upper plate portion 71b.
  • the voice coil motor 73 is driven in the Z-axis direction (position control of the fine movement stage 30 in the ⁇ x and ⁇ y directions is performed via the fine movement stage drive system as in the above embodiment).
  • the leveling device 78 is a spherical bearing device including a base 78a and a ball 78b.
  • the leveling device 78 supports the fine movement stage 30 from below so as to freely swing (tilt) in the ⁇ x and ⁇ y directions, and is integrated with the fine movement stage 30. Move along the XY plane.
  • the base 78a is inserted into the opening 28a of the coarse movement stage 28, and has an air bearing (not shown) in which the gas ejection surface (bearing surface) faces -Z side (downward).
  • the leveling device 78 floats on the first step guide 70A via a predetermined clearance due to the static pressure of pressurized gas (for example, air) ejected from the base 78a to the upper surface of the upper plate portion 71b. .
  • the Z / tilt position information of the fine movement stage 30 is obtained by the second step guide 54 using a plurality of Z sensors 38z as in the case of the substrate stage device 20B (FIGS. 5 to 6B).
  • the target stage 60 (see FIG. 3) may be used as in the first embodiment).
  • the substrate stage apparatus 20C since the distance between the upper surface of the coarse movement stage 28 and the lower surface of the fine movement stage 30 can be shortened, the overall height direction dimension of the substrate stage apparatus 20C is reduced. Further, since the inertial mass is reduced, the position controllability of the coarse movement stage 28 (that is, the substrate P) is improved. In addition, the linear motor for driving the coarse movement stage 28 can be reduced in size.
  • FIG. 9 shows a substrate stage apparatus 20D according to a modification (part 3) of the first embodiment.
  • the substrate stage apparatus 20D is different from the substrate stage apparatus 20C (see FIGS. 7 and 8) in the configuration of the first step guide 70B. Only the differences will be described below.
  • the first step guide 70B includes a guide main body 74 made of a hollow rectangular parallelepiped (box) member extending in the X-axis direction, and a plurality of Z actuators 75 accommodated in the guide main body 74.
  • the guide main body 74 is set to have lower rigidity than that of the lower surface by reducing the thickness of the guide main body 74, for example.
  • the plurality of Z actuators 75 are arranged at predetermined intervals in the X-axis direction, and press the upper surface portion of the guide main body 74 to the + Z side.
  • the type of the Z actuator 75 is not particularly limited, but an air cylinder, a piezo element, or the like can be used because the driving amount of the upper surface portion is very small.
  • the fine movement stage 30 is driven in the Z-axis direction by a plurality of Z actuators 75 (not shown in FIG. 10, see FIG. 9).
  • the upper surface portion of the guide body 74 is deformed by being pressed by the plurality of Z actuators 75 and is inclined with respect to the horizontal plane.
  • the fine movement stage 30 is supported via the leveling device 78, the fine movement is performed. There is no problem in the Z / tilt control of the stage 30.
  • the deformation (bending) of the upper surface portion of the guide main body 74 is shown exaggerated more than the actual one for easy understanding.
  • the substrate stage apparatus 20D can also obtain the same effects as the substrate stage apparatus 20C.
  • FIG. 11 shows a substrate stage apparatus 20E according to a modification (No. 4) of the first embodiment.
  • the substrate stage apparatus 20E differs from the substrate stage apparatus 20D (see FIG. 9) in the configuration of the first step guide 70C. Only the differences will be described below.
  • the first step guide 70B (see FIG. 9) of the substrate stage apparatus 20D drives the fine movement stage 30 in the Z-axis direction using a plurality of Z actuators 75 arranged in the X-axis direction, whereas FIG. As shown, the first step guide 70C is different in that the pair of cam devices 76 drives the fine movement stage 30 in the Z-axis direction.
  • the pair of cam devices 76 has a lower plate portion 71a and an upper plate portion 71b, one near the + X side end of the first step guide 70C and the other near the ⁇ X side end of the first step guide 70C, respectively. Is inserted between.
  • the cam device 76 is fixed to the upper plate portion 71b and a lower wedge 76c mounted on the base plate 76a fixed to the lower plate portion 71a via an X linear guide device 76b so as to be movable in the X-axis direction. It includes an upper wedge 76d disposed to face the wedge 76c, and an actuator 76e that drives the lower wedge 76c in the X-axis direction.
  • the substrate stage apparatus 20E can also obtain the same effects as the substrate stage apparatus 20D.
  • FIG. 12 shows a substrate stage apparatus 20F according to a modification (No. 5) of the first embodiment.
  • the substrate stage device 20F has a leveling device 78 (see FIGS. 7 and 8) and a plurality of Z voice coil motors 36z (see FIG. 7) compared to the substrate stage device 20C (see FIGS. 7 and 8). This is different from the above and the configuration of the first step guide 70D. Only the differences will be described below.
  • the first step guide 70D has an air spring 72 inserted between the lower plate portion 71a and the upper plate portion 71b, and a plurality of Z voice coil motors. 73 drives the upper plate portion 71b.
  • the first step guide 70D does not have the guide plate 71c (see FIG. 8) like the first step guide 70A.
  • two Z voice coil motors 73 are arranged at predetermined intervals in the Y-axis direction, for example, in the vicinity of the + X side (or ⁇ X side) end portion of the first step guide 70D (in FIG. 12, for example). (Overlapping in the depth direction of the page). That is, the plurality of Z voice coil motors 73 are arranged at three places that are not on the same straight line.
  • an air bearing 79 having a bearing surface facing the -Z side is attached.
  • the fine movement stage 30 is placed on the first step guide 70D via a predetermined clearance (non-contact) by a static pressure of pressurized gas (for example, air) ejected from the air bearing 79 to the upper surface of the first step guide 70D. Surfaced).
  • pressurized gas for example, air
  • the plurality of Z voice coil motors 73 appropriately drive the upper plate portion 71b in the Z-axis direction and / or the direction ( ⁇ x and ⁇ y directions) tilting with respect to the horizontal plane, thereby allowing the fine movement stage 30 to move. Z / tilt control is performed.
  • the substrate stage apparatus 20F has a simpler configuration than the substrate stage apparatus 20C (see FIGS. 7 and 8).
  • the upper plate portion 71b may be tilted using a plurality of Z actuators 75 (provided that a plurality of Z actuators 75 are arranged at predetermined intervals in the Y-axis direction). Similar to the substrate stage apparatus 20E (see FIG. 11).
  • the upper plate portion 71b may be tilted by using a plurality of cam devices 76 (arranged at three places not on the same straight line).
  • the first step guide 50 is a mechanical linear guide apparatus (Y linear guide 19a, Y slide) on the substrate stage mount 18c.
  • the substrate stage apparatus 20G according to the second embodiment has the first step guide 55 mounted on the pair of base frames 80 as opposed to being mounted via the member 19b). Is different.
  • the substrate stage mount 18f of the second embodiment is shown in FIG. As shown, it consists of one plate-like member. Therefore, the substrate stage apparatus 20G does not have the base frame 22 (see FIG. 2) that supports the central portion in the longitudinal direction of the X beam 24.
  • One of the pair of base frames 80 is on the + X side of the substrate stage base 18f and between the substrate stage base 18f and the base frame 22, and the other is on the ⁇ X side of the substrate stage base 18f and on the substrate stage base 18f. Between the base frame 22 and the substrate stage base 18f, the base frame 22 is disposed with a predetermined clearance. In FIGS. 14 and 16, the base frame 22 is not shown (the X beam 24 is also shown in FIG. 16) from the viewpoint of avoiding the complexity of the drawings.
  • the base frame 80 is made of a plate-like member parallel to the XZ plane extending in the Y-axis direction (see FIG. 15), and is installed on the floor 11 via the support plate 81 and the vibration isolator 82.
  • the first step guide 55 includes a pair of base frames 80 via a Y linear guide device including a Y linear guide 84 fixed to the base frame 80 and a Y slide member 19b fixed to the lower surface of the first step guide 55. It is mounted on the top and can move with a predetermined stroke in the Y-axis direction. Therefore, the first step guide 55 is vibrationally separated from the apparatus main body 18 and the pair of base frames 22. As shown in FIG.
  • the first step guide 55 is mechanically connected to the pair of X beams 24 via a plurality of flexure devices 52, as in the first embodiment. Move in the Y-axis direction integrally with the X beam 24.
  • the first step guide 55 is set to have a somewhat larger dimension in the thickness direction than the first embodiment in order to suppress bending due to its own weight.
  • the second step guide 54 includes a Y linear guide 19a fixed to the substrate stage frame 18f and a Y fixed to the lower surface of the second step guide 54, as in the first embodiment. It is mounted on the substrate stage mount 18f via a Y linear guide device composed of a slide member 19c, and is movable with a predetermined stroke in the Y-axis direction. Further, as shown in FIG. 15, the pair of second step guides 54 are integrally connected at both ends in the longitudinal direction by connecting members 54b. The pair of second step guides 54 are mechanically connected to the pair of X beams 24 via a plurality of flexure devices 58 (not shown in FIGS. 13 and 14), as in the first embodiment. And move together with the pair of X beams 24 in the Y-axis direction.
  • the second embodiment also uses the second step guide 54 by a plurality of Z sensors 38z attached to the fine movement stage 30, as shown in FIGS. Z / tilt position information of fine movement stage 30 is obtained.
  • the substrate stage frame 18f is compared with the first embodiment.
  • the rigidity in the gravity direction is not required. Therefore, the substrate stage mount 18f can be reduced in thickness and weight.
  • an offset load is applied to the substrate stage base 18f according to the position of the fine movement stage 30 (and the weight canceling device 40).
  • the member mounted on the substrate stage base 18f Since only the pair of second step guides 54, the influence of the unbalanced load is less than that of the first embodiment.
  • the Z / tilt position information of the fine movement stage 30 may be obtained using the target stage 60 (see FIG. 4A) as in the first embodiment, without using the second step guide 54. .
  • the configuration of the substrate stage apparatus 20G according to the second embodiment can be modified as appropriate.
  • modified examples of the substrate stage apparatus 20G according to the second embodiment will be described.
  • elements having the same configurations and functions as those of the second embodiment are denoted by the same reference numerals, and detailed description thereof is omitted as appropriate.
  • a triangulation type reflection laser displacement sensor is used as the Z sensor 38z, and the upper surface of the substrate stage gantry 18g can cover the movement region in the XY plane of the fine movement stage 30.
  • a target 69 made of, for example, a plate-like member made of white ceramics is attached.
  • the upper surface of the substrate stage gantry 18g is preferably mirror-finished (or a mirror is attached to the upper surface of the substrate stage gantry 18g).
  • the substrate stage apparatus 20H since the Y linear guide for guiding the first step guide 55 in the Y-axis direction is not provided on the substrate stage mount 18g, the upper surface of the substrate stage mount 18g is directly used as a target. Can be used. As described above, the substrate stage apparatus 20H is not provided with the second step guide 54 as compared with the substrate stage apparatus 20G of the second embodiment shown in FIG. 13 and the like, and therefore the substrate stage apparatus 20G. Compared to the above, the substrate stage mount 18g can be made thinner and lighter. Further, since the second step guide 54 is not provided, an uneven load does not act on the substrate stage mount 18g.
  • FIG. 20 shows a substrate stage apparatus 20I according to a modification (Part 2) of the second embodiment.
  • the substrate stage device 20I includes a substrate stage device 20G according to the second embodiment (see FIGS. 13 to 17) and a substrate stage device 20C according to a modification (No. 2) of the first embodiment (FIG. 7). And FIG. 8).
  • the first step guide 70A has a function as a Z actuator and a weight cancellation apparatus, similarly to the substrate stage apparatus 20C. Similarly to the substrate stage apparatus 20G, the first step guide 70A is mounted on the pair of base frames 80, and is vibrationally separated from the substrate stage mount 18f and the X beam 24. According to the substrate stage apparatus 20I, the effect of the modified example (No. 2) of the first embodiment can be obtained together with the effect of the second embodiment. That is, in the substrate stage apparatus 20I, the substrate stage mount 18f can be reduced in weight, and the position controllability of the coarse movement stage 28 (that is, the substrate P) is improved.
  • 21 and 22 show a substrate stage apparatus 20J according to a modification (part 3) of the second embodiment.
  • a pair of X beam 24 and coarse movement stage 28 are used in the substrate stage apparatus 20A according to the first embodiment (see FIG. 1 and the like) and the substrate stage apparatus 20G according to the second embodiment (see FIG. 13 and the like).
  • a so-called gantry-type two-axis stage device is configured, whereas the substrate stage device 20J has a so-called gantry-type two-axis device by the first step guide 57 and the coarse movement stage 28 that support the weight canceling device 40.
  • the difference is that the axis stage device is constructed.
  • the first step guide 57 is composed of a plate-like member having a rectangular YZ section extending in the X-axis direction, and both end portions in the longitudinal direction are respectively similar to the substrate stage apparatus 20G (see FIG. 13 and the like) according to the second embodiment. Is supported from below by a base frame 80 installed on the floor 11 and is vibrationally separated from the apparatus main body 18. Although not shown in FIGS. 21 and 22, the first step guide 57 is driven with a predetermined stroke in the Y-axis direction by an actuator such as a linear motor (or a feed screw device), for example.
  • the first step guide 57 is wider than the first step guide 50 included in the substrate stage apparatus 20G (see FIG. 14) of the second embodiment so that the coarse movement stage 28 can be stably supported. Formation (dimension in the Y-axis direction is set large).
  • a plurality of (for example, four) air bearings 53 having bearing surfaces disposed on the upper surface of the first step guide 57 are attached to the lower surface of the coarse movement stage 28. Further, as shown in FIG. 22, a pair of attachment plates 29 are attached to the lower surface of the coarse movement stage 28, and the first step guide 57 is inserted between the pair of attachment plates 29. A plurality of (for example, two) air bearings 53 are attached to the respective surfaces of the pair of attachment plates 29 facing the side surfaces of the first step guide 57.
  • the coarse movement stage 28 can move along the first step guide 57 with a predetermined stroke in the X-axis direction with low friction, and the relative movement in the Y-axis direction with respect to the first step guide 57 is limited.
  • the coarse movement stage 28 is a first step by an X linear motor comprising an X stator (not shown) fixed to the first step guide 57 and an X mover (not shown) fixed to the coarse movement stage 28. It is driven on the guide 57 with a predetermined stroke in the X-axis direction.
  • the Z / tilt position information of the fine movement stage 30 is obtained by using the upper surfaces of the pair of second step guides 54 by a plurality of Z sensors 38z, similarly to the substrate stage apparatus 20B (see FIGS. 5 to 6B). It is done.
  • the pair of second step guides 54 is connected to the first step guide 57 via a flexure device (not shown), and is pulled by the first step guide 57 to thereby be connected to the first step guide 57 in the Y-axis direction. Move together. Since the first step guide 57 is wider than the first step guide 50 of the substrate stage apparatus 20G (see FIG. 14) of the second embodiment, the distance between the pair of second step guides 54 is also the substrate. It is wider than the stage device 20G.
  • the configuration is such that the pair of X beams 24 (see FIGS. 13 to 17) is not provided. Simple. Further, since the first step guide 57 is vibrationally separated from the apparatus main body 18, the reaction force when driving the coarse movement stage 28 does not act on the apparatus main body 18.
  • the target used when obtaining the Z / tilt position information of fine movement stage 30 may be attached to weight cancellation device 40.
  • ⁇ Modification of Second Embodiment (Part 4) 23 and 24 show a substrate stage apparatus 20K according to a modification (part 4) of the second embodiment.
  • the substrate stage apparatus 20K includes a substrate stage apparatus 20J (see FIGS. 21 and 22) according to a modification (part 3) of the second embodiment and a modification (part 2) of the first embodiment.
  • the substrate stage apparatus 20C (see FIGS. 7 and 8) is combined.
  • the first step guide 70E of the substrate stage apparatus 20K has, for example, two Z voice coil motors 73 between the lower plate portion 77a and the upper plate portion 77b constituting the main body portion 77. And the air spring 72 are inserted, and also function as a Z actuator and a weight canceling device in the same manner as the first step guide 70A (see FIG. 7) of the substrate stage device 20C. As shown in FIG. 24, the lower plate portion 77a and the upper plate portion 77b of the first step guide 70E are somewhat wider than the first step guide 70A (see FIG. 8) of the substrate stage apparatus 20C, respectively. Is formed.
  • a plurality of (for example, four) air bearings 53 having a bearing surface opposed to the upper surface of the upper plate portion 77b are attached to the lower surface of the coarse movement stage 28.
  • a pair of attachment plates 29 are attached to the lower surface of the coarse movement stage 28, and the first step guide 70 ⁇ / b> E is inserted between the pair of attachment plates 29.
  • a plurality of (for example, two) air bearings 53 are attached to each of the surfaces facing the side surfaces of the upper plate portion 77b of the pair of attachment plates 29.
  • the coarse movement stage 28 can move with a predetermined stroke in the X-axis direction with low friction along the first step guide 70E, and the relative movement in the Y-axis direction with respect to the first step guide 70E is limited.
  • the coarse movement stage 28 is moved to the first step guide 70E by an X linear motor including an X stator 88a fixed to the upper surface of the upper plate portion 77b and an X movable element 88b fixed to the lower surface of the coarse movement stage 28.
  • the upper plate portion 77b is restricted from moving in the X-axis direction and the Y-axis direction with respect to the lower plate portion 77a.
  • the air bearing 53 attached to the pair of attachment plates 29 may be configured to face the side surface of the lower plate portion 77a.
  • an air bearing 48 having a bearing surface facing the + Z side is attached to the center of the upper surface of the coarse movement stage 28, and the leveling device 46 is supported in a non-contact manner from below.
  • the Z / tilt position information of the fine movement stage 30 is obtained by using the upper surface of the second step guide 54 by a plurality of Z sensors 38z as in the case of the substrate stage apparatus 20B (FIGS. 5 to 6B).
  • the weight of the system including the coarse motion stage 28 and the fine motion stage 30 is canceled by the air spring 72, so that the coarse motion stage 28 and the fine motion stage 30 are driven in the Z-axis direction.
  • the load on the Z voice coil motor 73 is reduced.
  • the first step guide 70E drives the coarse movement stage 28 and the fine movement stage 30 in the Z-axis direction by the Z voice coil motor 73.
  • the first step guide 70E is like the first step guide 70B shown in FIG.
  • a plurality of Z actuators 75 may be used, or a pair of cam devices 76 may be used as in the first step guide 70C shown in FIG.
  • first and second embodiments can be changed as appropriate.
  • the first step guide 50 and the pair of second step guides 54 are configured to move in the Y-axis direction by being pulled by the pair of X beams 24.
  • the X position may be controlled independently of the pair of X beams 24 by an actuator such as a linear motor.
  • the illumination light may be ultraviolet light such as ArF excimer laser light (wavelength 193 nm), KrF excimer laser light (wavelength 248 nm), or vacuum ultraviolet light such as F2 laser light (wavelength 157 nm).
  • illumination light for example, a single wavelength laser beam oscillated from a DFB semiconductor laser or fiber laser is amplified by a fiber amplifier doped with, for example, erbium (or both erbium and ytterbium).
  • harmonics converted into ultraviolet light using a nonlinear optical crystal may be used.
  • a solid laser (wavelength: 355 nm, 266 nm) or the like may be used.
  • the projection optical system 16 is a multi-lens type projection optical system including a plurality of projection optical units.
  • the number of the projection optical units is not limited to this, and may be one or more.
  • the projection optical system is not limited to a multi-lens type projection optical system, and may be a projection optical system using an Offner type large mirror, for example.
  • the projection optical system PL has an equal magnification is described.
  • the present invention is not limited to this, and the projection optical system may be either a reduction system or an enlargement system.
  • a light-transmitting mask in which a predetermined light-shielding pattern (or phase pattern / dimming pattern) is formed on a light-transmitting mask substrate is used.
  • a predetermined light-shielding pattern or phase pattern / dimming pattern
  • a light-transmitting mask substrate is used.
  • an electronic mask variable shaping mask
  • a transmission pattern, a reflection pattern, or a light emission pattern for example, a non-light emitting image display element (spatial light modulator
  • DMD Digital Micro-mirror Device
  • the moving body device that moves the object along a predetermined two-dimensional plane is not limited to the exposure device, and an object that performs predetermined processing on the object, such as an object inspection device used for inspection of the object, for example. You may use for a treatment apparatus.
  • the exposure apparatus can also be applied to a step-and-repeat type exposure apparatus and a step-and-stitch type exposure apparatus.
  • an exposure apparatus that exposes a substrate having a size (including at least one of an outer diameter, a diagonal length, and one side) of 500 mm or more, for example, a large substrate for a flat panel display such as a liquid crystal display element. It is particularly effective to apply to this.
  • the use of the exposure apparatus is not limited to a liquid crystal exposure apparatus that transfers a liquid crystal display element pattern onto a square glass plate.
  • an exposure apparatus for semiconductor manufacturing, a thin film magnetic head, a micromachine, and a DNA chip The present invention can also be widely applied to an exposure apparatus for manufacturing the above.
  • an exposure apparatus for manufacturing in order to manufacture not only microdevices such as semiconductor elements but also masks or reticles used in light exposure apparatuses, EUV exposure apparatuses, X-ray exposure apparatuses, electron beam exposure apparatuses, etc., glass substrates, silicon wafers, etc.
  • the present invention can also be applied to an exposure apparatus that transfers a circuit pattern.
  • the object to be exposed is not limited to the glass plate, and may be another object such as a wafer, a ceramic substrate, a film member, or mask blanks.
  • the thickness of the substrate is not particularly limited, and includes, for example, a film-like (flexible sheet-like member).
  • the step of designing the function and performance of the device the step of producing a mask (or reticle) based on this design step, and the step of producing a glass substrate (or wafer)
  • the above-described exposure method is executed using the exposure apparatus of the above embodiment, and a device pattern is formed on the glass substrate. Therefore, a highly integrated device can be manufactured with high productivity. .
  • the mobile device of the present invention is suitable for moving a mobile body along a predetermined two-dimensional plane.
  • the exposure apparatus of the present invention is suitable for forming a predetermined pattern on an object held by a moving body.
  • the manufacturing method of the flat panel display of this invention is suitable for manufacture of a flat panel display.
  • the device manufacturing method of the present invention is suitable for the production of micro devices.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Power Engineering (AREA)
  • Nonlinear Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
PCT/JP2013/002306 2012-04-04 2013-04-03 移動体装置、露光装置、フラットパネルディスプレイの製造方法、及びデバイス製造方法 WO2013150788A1 (ja)

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KR1020207027970A KR102228708B1 (ko) 2012-04-04 2013-04-03 이동체 장치, 노광 장치, 플랫 패널 디스플레이의 제조 방법, 및 디바이스 제조 방법
KR1020147030730A KR102163139B1 (ko) 2012-04-04 2013-04-03 이동체 장치, 노광 장치, 플랫 패널 디스플레이의 제조 방법, 및 디바이스 제조 방법
CN201380018913.XA CN104221128B (zh) 2012-04-04 2013-04-03 移动体装置、曝光装置、平面显示器的制造方法、及元件制造方法

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KR20180029145A (ko) 2016-09-09 2018-03-20 삼성전자주식회사 기판 처리 장치
JP6508268B2 (ja) * 2017-08-24 2019-05-08 株式会社ニコン 移動体装置、露光装置、フラットパネルディスプレイの製造方法、及びデバイス製造方法
KR20190052533A (ko) 2017-11-08 2019-05-16 삼성전자주식회사 기판 지지 및 이송 장치, 기판 지지 및 이송 방법 및 이를 이용한 표시 장치의 제조 방법
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TWI731628B (zh) 2021-06-21
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CN107577116B (zh) 2021-04-09
JP5910992B2 (ja) 2016-04-27
HK1249777A1 (zh) 2018-11-09
CN104221128A (zh) 2014-12-17
CN107577116A (zh) 2018-01-12
KR20150003250A (ko) 2015-01-08
CN104221128B (zh) 2017-10-10
TW201400991A (zh) 2014-01-01
KR20200118217A (ko) 2020-10-14
KR102228708B1 (ko) 2021-03-16
JP2013214691A (ja) 2013-10-17
KR102163139B1 (ko) 2020-10-12

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