WO2013150702A1 - Système de gestion de production - Google Patents

Système de gestion de production Download PDF

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Publication number
WO2013150702A1
WO2013150702A1 PCT/JP2013/000920 JP2013000920W WO2013150702A1 WO 2013150702 A1 WO2013150702 A1 WO 2013150702A1 JP 2013000920 W JP2013000920 W JP 2013000920W WO 2013150702 A1 WO2013150702 A1 WO 2013150702A1
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WO
WIPO (PCT)
Prior art keywords
sample
information
shelf
work
worker
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PCT/JP2013/000920
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English (en)
Japanese (ja)
Inventor
昌彦 南出
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シャープ株式会社
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Publication of WO2013150702A1 publication Critical patent/WO2013150702A1/fr

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    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06Q—INFORMATION AND COMMUNICATION TECHNOLOGY [ICT] SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES; SYSTEMS OR METHODS SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES, NOT OTHERWISE PROVIDED FOR
    • G06Q10/00—Administration; Management
    • G06Q10/06—Resources, workflows, human or project management; Enterprise or organisation planning; Enterprise or organisation modelling
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
    • G05B19/41865—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM] characterised by job scheduling, process planning, material flow
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06Q—INFORMATION AND COMMUNICATION TECHNOLOGY [ICT] SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES; SYSTEMS OR METHODS SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES, NOT OTHERWISE PROVIDED FOR
    • G06Q50/00—Information and communication technology [ICT] specially adapted for implementation of business processes of specific business sectors, e.g. utilities or tourism
    • G06Q50/04—Manufacturing
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
    • Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
    • Y02P90/30—Computing systems specially adapted for manufacturing

Definitions

  • the present invention relates to a semiconductor such as a light emitting diode (LED) or a semiconductor laser element using one or a plurality of processing apparatuses including at least an off-line apparatus in a redevelopment to a compound semiconductor factory of an LSI manufacturing factory or a manual factory
  • the present invention relates to a production management system that manages production when manufacturing semiconductor elements such as light emitting elements.
  • Patent Document 2 in the case of lot transfer in a semiconductor manufacturing process, on the premise of a system that automatically controls and manages automatic transfer / equipment and transfer equipment, collection of equipment operation status, calculation of an equipment processing plan, and the required number of transfer carts Based on the calculation result, a control system for instructing conveyance so as to minimize the waiting time has been proposed.
  • This control system is a system programming technology for semiconductor manufacturing factories that enables the realization of human and time losses in the semiconductor manufacturing process.
  • a method has been reported in which event information (not SECS) is received, the lot information of the event is processed by which device / port, and the information is stored in a database.
  • Patent Document 3 in the case of lot transfer in a semiconductor manufacturing process, on the premise of a system that automatically controls and manages automatic transfer / equipment and transfer equipment, collection of equipment operation status, calculation of an equipment processing plan, and the number of required transfer carts Based on the calculation result, a control system for instructing conveyance so as to minimize the waiting time has been proposed.
  • Patent Document 1 the above-described conventional technique disclosed in Patent Document 1 is a system on the premise that the equipment and the transport system are on-line / CIM, and of course, the initial capital investment is enormous. Also, in the above prior arts disclosed in Patent Documents 2 and 3, as in the case of Patent Document 1, it is a system premised on the on-line / CIM installation of equipment and a transport system. Is also enormous.
  • An object of the present invention is to solve the above-mentioned conventional problems, and to provide a production management system capable of performing offline manual processing according to online management with low investment and preventing work loss and work mistake.
  • sample location information detected by a sample shelf for storing a sample to be processed by the processing device and worker information in the processing device are managed on-line.
  • navigation for work management is performed for the worker, and the above-described purpose is achieved.
  • a unique ID is assigned to each of the plurality of sample shelves for detecting the presence or absence of a unique ID of the sample container placed in the production management system of the present invention, and the presence or absence of the unique ID of the sample container for each sample shelf.
  • Each shelf management personal computer for managing the sample container, and a host device for managing the location information of the sample container via each shelf management personal computer.
  • the sample shelf in the production management system of the present invention comprises ID reader means for reading the unique ID of the sample container, and an operator places the sample container on the sample shelf and works from the sample shelf.
  • the location information of the sample container is uploaded from the shelf management personal computer to the host device in real time based on the sample container ID information read by the ID reader means when the person takes out the sample container.
  • the shelf management personal computer in the production management system of the present invention holds the manufacturing flow and processing device information, and the progress information of the flowing production sample. From the detected unique ID of the sample container, The processing apparatus in which the sample in the sample container is to be processed is determined, and the transport destination of the sample container is displayed on the display screen to instruct the operator.
  • the sample container in the production management system of the present invention is a case including a sample box and / or a tray that accommodates or carries a production sample that is an object to be processed.
  • the shelf management personal computer in the production management system of the present invention counts up and displays on the display screen the elapsed time from when the transfer destination is displayed on the display screen until the work is performed, Control is performed so that an alarm is displayed as the elapsed time is exceeded.
  • each device management personal computer in which a unique ID is assigned to each of the one or more processing devices arranged in each section, and each device management personal computer, respectively A card reader that is wirelessly or wiredly connected, and that can read the contents of the worker card to which a plurality of workers are assigned the worker information including unique worker IDs, and exchanges information with each device management personal computer And a host device for managing the process.
  • the host device in the production management system of the present invention collects work history information from the sample shelf management personal computer and the device management personal computer installed at a predetermined location in the process, Work history information acquisition means for acquiring sample location history information is provided.
  • the navigation display has a work instruction means for displaying a destination for each worker.
  • the host device in the production management system of the present invention is configured to evaluate work based on increase / decrease of work section, change of work type, improvement of work skill, increase / decrease of work amount, pass / fail of verification result, and magnitude of delay time.
  • Work evaluation value update means for collecting and sequentially updating the values is provided.
  • the device management personal computer in the production management system of the present invention reads the signal tower signal informing the operation status of the device attached to the offline device by lighting / non-lighting, and obtains the device status information of the offline device.
  • the host device outputs the work instruction information of the processing device including the offline device via the device management personal computer of the corresponding processing device based on the device status information of the offline device.
  • the sample location information by the sample shelf for storing the sample to be processed by the processing device and the worker information in the processing device are managed on-line for the purpose of work management. Navigation is done to workers.
  • the presence or absence of the sample is managed on-line by the sample shelf in each section, and the operator information is managed on-line in each processing device, so it is possible to manage off-line manual processing according to online with low investment.
  • the presence / absence of the sample is managed on-line by the sample shelf for each section, and the operator information is managed on-line in each processing apparatus. Work loss and work mistakes can be prevented by navigation for work management.
  • FIG. 1A is a perspective view showing a state of a tray on which lot wafers are loaded and a plurality of stacked wafers in the production management system according to the first embodiment of the present invention.
  • FIG. 1B is a perspective view of FIG. It is a perspective view for demonstrating the rule of the wafer location management on a tray.
  • It is a perspective view of the sample shelf used for the sample management shelf system in the production management system of this Embodiment 1, Comprising: (a) is a perspective view of the sample shelf for demonstrating tray ID reader means, (b) is a sample shelf. It is a perspective view of a sample shelf showing a state where a plurality of trays on which wafers are placed are stacked.
  • FIG. 4 is a block diagram illustrating a software configuration example of a management personal computer and a host device 17 in the production management system of FIG. 3. It is a schematic diagram which shows a lot storage box and the tray which mounted the wafer mentioned above. It is a perspective view which shows typically the stand-by sample shelf used for the sample management shelf system by the lot storage box as a sample box. It is a schematic diagram which shows the operation
  • FIG. 6 is a layout diagram illustrating a state in which workers and lots flow through each processing step in worker instruction management of the production management system according to the first embodiment. It is a figure explaining the count-up function as a means to avoid the work loss in a process.
  • A is a diagram in which the navigation screen of FIGS. 3 and 7 is a work error prevention screen in addition to the work instruction screen and the delay screen,
  • (b) and (c) are average work time comparison diagrams, and
  • (d) is a group. It is another processing performance ranking diagram.
  • FIG. 13 is a layout diagram of a plurality of processing devices including offline devices, their management personal computers, and host devices in the production management system of FIG. 12.
  • FIG. 1A is a perspective view showing a state of a tray on which lot wafers are placed and a plurality of stacked wafers in the production management system according to the first embodiment of the present invention
  • FIG. FIG. 6 is a perspective view for explaining a rule for managing the wafer location on the tray of FIG.
  • FIG. 1A when the wafer size is reduced to several inches, it is often transported and stored in units of one or a plurality of trays 81.
  • a plurality of (here, nine sheets) wafers 82 as samples (lots) are mounted and used.
  • nine recesses slightly larger than the diameter of the wafers 82 are formed in a matrix in the vertical direction and the horizontal direction, and the wafers 82 are respectively accommodated in the recesses.
  • An RFID chip 83 RFID tag
  • information such as an ID number is registered for each tray 81.
  • a plurality of trays 81 on which wafers 82 are placed are transported as a group of trays 81A, stacked in the vertical direction and stored in the sample shelf.
  • the flow unit or the transport means may be operated by the tray 81 instead of the cassette.
  • the tray 81 since the efficiency of the conveyance by the individual trays 81 is low, a plurality of trays 81 may be stacked in advance and conveyed as a tray group 81A.
  • the location management rule for a plurality of wafers 82 on the tray 81 will be described.
  • the position of the wafer 82 on the tray 81 is set to No. 1 to 3 and No. 2 in the second line. 4-6, No. 3 in the third line.
  • the positions of all nine wafers 82 are determined as 7-9.
  • the positions of the plurality of wafers 82 may be determined not in the horizontal row direction but in the vertical column direction.
  • FIG. 2 is a perspective view of a sample shelf used in the sample management shelf system in the production management system of Embodiment 1, and FIG. 2 (a) is a perspective view of the sample shelf for explaining the tray ID reader means.
  • FIG. 2B is a perspective view of the sample shelf showing a state in which a plurality of trays on which wafers are placed are stacked on the sample shelf.
  • one tray 81 carrying a plurality of wafers 82 is taken as one lot, and a plurality of trays are stacked to form a tray group 81A of a plurality of lots as a single tray unit for transporting a sample. It is stored and managed on the shelf 10.
  • the sample shelf 10 has a gate type RFID reader 10a as a tray ID reader means.
  • Two sensor main pillars of the gate type RFID reader 10a are erected on both sides of the front surface of the sample shelf 10 to cover the sensing of the tray group 81A, which is a plurality of trays 81 passing through the front surface of the sample shelf 10. Yes.
  • the gate type RFID reader 10a detects the new appearance on the shelf and the disappearance from the shelf by the passage of the tray group 81A, and detects the number of the trays 81 in the entire shelf.
  • the gate type RFID reader 10a can collectively detect the data (tray number) in the RFID chip 83 and the total quantity of each tray 81.
  • the fluid wafer size is reduced to a few inches, the number of fluid wafers will increase accordingly, and the inventory quantity will also increase in units of trays.
  • a gate type RFID reader 10a rather than laying an RFID reader for each cassette (lot), which will be described later, it is possible to manage the location of trays for loading and unloading with a lump stacked on a plurality of trays 81, and inventory in real time. It is possible to perform tray location management as to which sample shelf 10 has the tray group 81A.
  • conveyance by the tray 81 is generally performed, and stacking is realized by realizing ID location management of the tray 81 by the RFID chip 83 for each tray 81 using the gate type RFID reader 10a.
  • the location management of the tray 81 or the tray group 81A can be automatically realized in real time by passing the entry / exit event of the tray group 81A, which is a plurality of trays 81, through the gate-type RIFD reader 10a. Further, as a production management system, by tracing the position of the wafer 82 on the tray 81 as well, individual piece tracing of the wafer 82 can be realized.
  • FIG. 3 is a schematic diagram showing an outline of work in the manual conveyance process using the tray 81 in the first embodiment of the sample management shelf system in the production management system of the present invention.
  • one or a plurality of trays 81 (lots) processed by each processing apparatus have passed through the gate type RFID reader 12a as a tray ID reader means. Whether or not one or a plurality of trays 81 is detected and stored, and a navigation screen 13a for the one or a plurality of trays 81 detected by the gate type RFID reader 12a of the sample shelf 12 before processing.
  • the pre-processing sample shelf management personal computer 13 for performing the next processing instruction and one or a plurality of trays 81 taken out from the pre-processing sample shelf 12 and transported to the processing apparatus, and the wafer 82 on the tray 81 is set in the processing apparatus.
  • An apparatus management personal computer 14 that gives instructions to the operator on the navigation screen 14a, and a wafer 82 that has been processed by the processing apparatus is taken out from the processing apparatus onto the tray 81 and conveyed to one or more trays 81 (
  • a processed sample shelf 15 that detects the presence or absence of one or a plurality of trays 81 depending on whether or not a lot has passed through the gate-type RFID reader 15 a and one detected by the gate-type RFID reader 15 a of the processed sample shelf 15.
  • the processed sample shelf management personal computer 16 that instructs the plurality of trays 81 to carry the next process on the navigation screen 16a, the pre-process sample shelf management personal computer 13, the device management personal computer 14, and the processed sample.
  • the shelf management personal computer 16 is connected wirelessly or by wire.
  • a host computer 17 as a host apparatus which performs all location management and processing progress state management of each tray 81 in one or more trays 81 are.
  • the sample management shelf system 11 includes a plurality of sample shelves for detecting the unique IDs of one or a plurality of placed trays 81 (a plurality of wafers 82 are mounted as production samples) by the gate type RFID readers 12a and 15a.
  • a post-process sample shelf management personal computer 16 and a host computer 17 as a host device for managing the location information of one or a plurality of trays 81 via each shelf management personal computer are provided.
  • This sample management shelf system 11 is used in a manual conveyance process without an automated conveyance system.
  • An RFID chip 83 is assigned to each tray 81, a unique ID is assigned to each tray 81, and the RFID chip 83 is stored and processed.
  • Gate-type RFID readers 12a and 15a as tray ID reader means are installed at both ends of each shelf in the front sample shelf 12 and the processed sample shelf 15 so that an operator can perform one or a plurality of trays 81 in the process. By simply performing an operation of placing a shelf on a shelf or taking one or a plurality of trays 81 from the shelf, the inventory status of all lots (real-time location management) for each shelf in the process can be obtained. , 15a to detect and grasp.
  • the gate type RFID readers 12a and 15a for each shelf are used for the RFID chip 83 of the one or more trays 81.
  • the pre-processing sample shelf management personal computer 13 and the post-processing sample shelf management personal computer 16 recognize and recognize what kind of sample (wafer 82) is placed on the standby sample shelf by detecting the unique ID.
  • the data is transmitted to the host computer 17, and the sample management information of the host computer 17 is updated.
  • all the production samples (wafers 82) are managed in real time by the sample management shelf system 11 in real time.
  • the sample to be produced (wafer 82) is mounted on the tray 81, and is transported and stored.
  • the inventory of the wafers 82 other than the tray 81 is out of control.
  • the host computer 17 updates the locations of all samples (all trays 81) in the process.
  • the host computer 17 is not a large-scale CIM system, but a gate type RFID for placing one or a plurality of trays 81 on which a sample to be produced (wafer 82) is mounted on the pre-processing sample shelf 12 and the post-processing sample shelf 15.
  • the worker's work is started with the point of time passing through the readers 12a and 15a as a trigger.
  • one or a plurality of trays 81 on which the production sample (wafer 82) is mounted are placed on the pre-processing sample shelf 12, and processing by the processing apparatus becomes possible, and processing is started sequentially by FIFO.
  • an instruction to carry to the next section is issued.
  • the trigger is due to an event placed on the shelf.
  • the pre-processing sample shelf 12 and the post-processing sample shelf 15 as sample shelves are gate-type RFID readers as tray reader means for reading the unique IDs of one or a plurality of trays 81 on which the production sample (wafer 82) is mounted. 12a and 15a, and the unique ID of one or a plurality of trays 81 read by the gate type RFID readers 12a and 15a is the pre-processing sample shelf management personal computer 13 and the post-processing sample shelf management personal as the shelf management personal computer.
  • Information is provided to the host computer 17 as a host device via the computer 16 so that the location information of one or more trays 81 is updated.
  • the location information of one or more trays 81 is uploaded from the shelf management personal computers 13 and 16 to the host device in real time based on the ID information of the trays 81.
  • FIG. 4 is a block diagram showing a software configuration example of the management personal computers 13 and 16 and the host device in the production management system 11 of FIG.
  • the shelf management personal computer 13 in the production management system 11 of the first embodiment is a CPU (Central Processing Unit) 131 as a control unit that performs overall control, and an input command to the CPU 131.
  • a display unit 133 for displaying a screen and the like, a ROM 134 as a computer-readable readable recording medium storing a control program and its data, and the control program and its data at the time of startup are read out for each control by the CPU 131.
  • Data to And a RAM135 as a storage unit that serves as a work memory to look out and stored.
  • the configuration of the shelf management personal computer 16 is the same as the configuration of the shelf management personal computer 13.
  • the host computer 17 in the production management system 11 includes a CPU (Central Processing Unit) 171 as a control unit that performs overall control, and a computer-readable readable record in which a control program and its data are stored.
  • a ROM as a medium, a control program and its data at the time of start-up are read out, and a RAM as a storage unit that reads and stores data for each control by the CPU 171 as well as a large amount of worker information and location
  • a database 172 for storing position history information (tray update information) and the like.
  • the ROM as a readable recording medium may be composed of a portable optical disk, a magneto-optical disk, a magnetic disk, an IC memory, etc. in addition to a hard disk.
  • This control program and its data are stored in the ROM, but this control program and its data may be downloaded to the ROM from another readable recording medium or via wireless, wired or the Internet.
  • the host computer 17 as a host device uses the ID information of one or a plurality of trays 81 read by the gate type RFID readers 12a and 15a as tray ID reader means to manage the sample shelf before processing as a shelf management personal computer.
  • 12a and 15a detect the unique IDs of one or more trays 81
  • the current location information of one or more trays 81 is determined based on the previous location information of one or more trays 81.
  • Tray location determination unit 174 and tray location determination A tray location position history storage unit 175 that updates the current location information of one or more trays 81 determined by the unit 174 as location location history information (tray update information) and stores it in the database 172 (work history information acquisition means) And have.
  • the standby sample shelf has one on which the production sample (wafer 82) is mounted.
  • the plurality of trays 81 are placed on the standby sample shelf (pre-processing sample shelf 12) is determined by the gate type RFID reader 12a installed on the standby sample shelf (pre-processing sample shelf 12).
  • the host computer 17 recognizes the sample shelf management personal computer 13 before processing.
  • a stand-by sample in which one or a plurality of trays 81 loaded with a production sample (wafer 82) that has been processed by a predetermined processing apparatus is taken from the stand-by sample shelf (processed sample shelf 15) and the next process is performed. Transport to the shelf. That the one or more trays 81 on which processed samples (wafers 82) that have been processed have been removed from the standby sample shelf (processed sample shelf 15) is a gate type RFID reader 15a or the like. Information is transmitted to the host computer 17 via the sample shelf management personal computer 16 after detection by the tray ID reader means.
  • a gate-type RFID reader of the standby sample shelf Is the pre-processing sample shelf management by detecting which standby sample shelf (pre-processing sample shelf 12) the one or more trays 81 loaded with the production sample (wafer 82) to be subjected to the next processing are placed. Information is transmitted to the host computer 17 via the personal computer 13.
  • the lamp of the standby sample shelf on which one or a plurality of trays 81 are placed is turned on.
  • the operator only has to take in one or more trays 81 of the standby sample shelf at the position where the lamp is lit.
  • one or more trays 81 on which the production sample (wafer 82) is mounted are placed on the standby sample shelf, and one or more trays 81 on which the production sample (wafer 82) is mounted are placed on the standby sample shelf.
  • the detection of the gate type RFID reader is used as an event trigger to update the lot location information of one or a plurality of trays 81 on which the production sample (wafer 82) is placed by communication with the host computer 17.
  • FIG. 5 is a schematic diagram showing the lot storage box 19 and the tray 81 on which the wafers 82 are placed.
  • the shelf management system can be expanded assuming that the wafers 82 are processed in the transport unit and form such as the tray 81.
  • a shelf management system can be constructed with a view to transporting the tray 81 or transporting a plurality of trays 81 as a lump of a plurality of tray groups 81A.
  • FIG. 6 is a perspective view schematically showing a standby sample shelf used in a sample management shelf system with a lot storage box 19 as a sample box.
  • a standby sample shelf 10A using a lot storage box 19 as a sample box is assigned to each lot storage box 19 and assigned with a unique ID. Is read by the RF-ID reader 20 arranged for each predetermined area (shelf section) of the shelf, so that the lot storage box 19 is in which shelf of the standby sample shelf and in which partition position It is configured to detect whether it has been placed.
  • the RF-ID reader 20 is arranged in a sample box (cassette) for each cassette.
  • the cassette lot storage box 19 (RF-ID tag 18) and the RF-ID reader 20 for each section of the shelf have a one-to-one relationship, but the tray 81 (RFID chip 83) and the gate-type RFID described above.
  • the reader 10a is different from the case described above in that it is one-to-many (including one-to-one).
  • FIG. 7 is a schematic diagram showing an outline of work in a manual conveyance process using a sample box (cassette) in the first embodiment of the sample management shelf system in the production management system of the present invention.
  • the sample management shelf system 11A using a sample box (cassette) detects the presence or absence of a sample (lot) to be processed by each processing apparatus and stores it.
  • the navigation screen 14a is used to instruct the operator on various information such as the set contents when the lot is taken out, transported to the processing apparatus and set in the processing apparatus, and the transport time when the processing is completed and the sample (lot) is taken out.
  • Device management personal computer 14 to be performed and a sample (lot) processed by the processing device is transported from the processing device and placed A processed sample shelf 15A for detecting and storing a lot), and a processed sample shelf management personal computer 16A for instructing the sample (lot) detected on the processed sample shelf 15A to be transferred to the next process on the navigation screen 16a.
  • These pre-processing sample shelf management personal computer 13A, apparatus management personal computer 14 and post-processing sample shelf management personal computer 16A are communicated wirelessly or by wire to manage all locations of samples (lots) and for each sample (lot).
  • a host computer 17 as a host device for managing processing progress.
  • the sample management shelf system 11A includes the pre-processing sample shelf 12A and the post-processing sample shelf 15A as a plurality of sample shelves that detect the unique ID of the placed sample box (the lot storage box 19 containing the production sample).
  • Each of the sample shelves is assigned a unique ID
  • each pre-processing sample shelf management personal computer 13A and post-processing sample shelf management personal computer 16A as each shelf management personal computer provided for each sample shelf, and each shelf management personal
  • a host computer 17 as a host device for managing the location information of the sample box via each computer.
  • This sample management shelf system 11A is used in a manual conveyance process without an automated conveyance system, and an RF-ID tag 18 is added to a lot storage box 19 and a unique ID is assigned to each lot storage box 19 to prepare a sample before processing.
  • the standby sample shelf which is the shelf 12A and the processed sample shelf 15A, is equipped with an RF-ID reader 20 as a sample box ID reader means for each section of the shelf, and an operator shelves the sample in the process. It is possible to detect and grasp the inventory position status (real-time location management) of all lots in the process by simply performing a simple operation of placing the sample in the section or taking the sample from the shelf section.
  • the RF-ID reader 20 for each shelf section detects the RF-ID tag 18 of the lot storage box 19 regardless of the section of the standby sample shelf where the lot storage box 19 containing the production sample (lot) is placed.
  • the pre-processing sample shelf management personal computer 13A and the post-processing sample shelf management personal computer 16A recognize what kind of produced sample (lot) has been placed in the section of the standby sample shelf and recognize this in the host computer 17. Then, the sample box management information as the sample management information of the host computer 17 is updated.
  • the location management of all production samples (lots) is performed in real time by the sample management shelf system 11A.
  • the produced sample (lot) is put in the lot storage box 19 to be transported and stored, and the inventory other than the lot storage box 19 which is a storage box is out of management.
  • the host computer 17 updates the location of all samples in the process.
  • the host computer 17 is not a large-scale CIM system, and is triggered by the time when the lot storage box 19 containing the produced sample (lot) is placed on the pre-processing sample shelf 12A and the post-processing sample shelf 15A. Work begins.
  • the pre-processing sample shelf 12A and the post-processing sample shelf 15A as sample shelves include an RF-ID reader 20 as a sample box ID reader means for reading a unique ID of a sample box containing a production sample (lot).
  • the unique ID of the sample box (cassette) read by the RF-ID reader 20 is a host as a host device via the pre-processing sample shelf management personal computer 13A and the post-processing sample shelf management personal computer 16A as a shelf management personal computer. Information is provided to the computer 17 so that the location information of the sample box is updated.
  • the RF-ID reader 20 for each section of the shelf sets the RF-ID tag 18 for each sample box. Based on the read sample box ID information, the location information of the sample box is uploaded in real time from the shelf management personal computers 13A and 16A to the host computer 17 as the host device.
  • FIG. 8 is a block diagram showing a software configuration example of the management personal computers 12A and 16A and the host device in the production management system 11A of FIG.
  • the shelf management personal computer 13A in the production management system 11A of the first embodiment is a CPU (Central Processing Unit) 131A as a control unit that performs overall control, and an input command to the CPU 131A.
  • a display unit 133 for displaying a screen and the like, a ROM 134 as a computer-readable readable recording medium storing a control program and its data, and the control program and its data at the time of startup are read out for each control by the CPU 131.
  • a RAM15 as a storage unit acting as a work memory for reading and storing over data.
  • the configuration of the shelf management personal computer 16A is the same as the configuration of the shelf management personal computer 13A.
  • the host computer 17 in the production management system 11A includes a CPU (Central Processing Unit) 171A as a control unit that performs overall control, and a computer-readable readable record in which a control program and its data are stored.
  • a ROM as a medium, a control program and its data at the time of start-up are read out
  • a RAM as a storage unit that functions as a work memory for reading and storing data for each control by the CPU 171A, and a large amount of worker information and location
  • a database 172 for storing position history information (sample box update information) and the like.
  • the ROM as a readable recording medium may be composed of a portable optical disk, a magneto-optical disk, a magnetic disk, an IC memory, etc. in addition to a hard disk.
  • This control program and its data are stored in the ROM, but this control program and its data may be downloaded to the ROM from another readable recording medium or via wireless, wired or the Internet.
  • the host computer 17 as the host device manages each unique ID information from the RF-ID tag 18 of the sample box (cassette; lot storage box 19) read by the RF-ID reader 20 as the sample box ID reader means.
  • Identification information change detection for detecting a change in the unique ID information of the lot storage box 19 provided from the sample box identification information providing means 136A of the pre-processing sample shelf management personal computer 13A and the post-processing sample shelf management personal computer 16A as a personal computer.
  • the unit 173A and the RF-ID reader 20 for each section of the shelf detect the unique ID of the lot storage box 19, the current location of the lot storage box 19 is determined based on the previous location information of the lot storage box 19.
  • Sample box location determining unit 174 for determining position information
  • the sample box location history storage unit 175A that updates the current location information of the lot storage box 19 determined by the sample box location determination unit 174A as location location history information (sample box update information) and stores it in the database 172. (Work history information acquisition means).
  • the standby sample shelf is where the lot storage box 19 containing the produced sample (lot) is located.
  • the host computer 17 recognizes whether it has been placed in the section of the standby sample shelf via the pre-processing sample shelf management personal computer 13A.
  • the lot storage box 19 containing the produced sample (lot) processed by a predetermined processing apparatus is taken from the standby sample shelf and transported to the standby sample shelf where the next processing is performed.
  • the standby sample shelf detects that the lot storage box 19 containing the processed sample (lot) that has been processed is no longer in the standby sample shelf, and informs the host computer 17 via the processed sample shelf management personal computer 16A. introduce.
  • the standby sample shelf contains the manufactured sample (lot) for the next processing. It is detected where the lot storage box 19 is placed in the section of the standby sample shelf, and information is transmitted to the host computer 17 via the pre-processing sample shelf management personal computer 13A.
  • the lamp at the partition position of the standby sample shelf where the lot storage box 19 is placed is lit.
  • the operator only has to take in the lot storage box 19 at the section where the lamp is lit.
  • the event is triggered by placing the lot storage box 19 containing the production sample (lot) on the standby sample shelf and taking the lot storage box 19 containing the production sample (lot) from the standby sample shelf.
  • the lot location information of the produced sample (lot) is updated by communication with the host computer 17.
  • a unique ID is assigned to each of a plurality of sample shelves that detect the presence or absence of a unique ID of a sample container (sample case) such as a tray 81 or a sample box, and the sample shelf.
  • Each shelf management personal computer that manages the presence or absence of a unique ID of a sample container (sample case) such as a tray 81 or a sample box, and a sample container (sample) such as a tray 81 or a sample box via each shelf management personal computer.
  • a host device host computer 17 for managing location information of the case.
  • the sample shelf is provided with ID reader means (tray ID reader means or sample box ID reader means) for reading the unique ID of a sample container (sample case) such as the tray 81 or sample box.
  • ID reader means such as the tray ID reader means for reading the unique ID of a sample container (sample case) such as the tray 81 or sample box.
  • the location of the sample container (sample case) based on the container ID information read by the ID reader means during the work of placing the (sample case) and the work of the operator taking out the sample container (sample case) from the sample shelf Information is uploaded from the shelf management personal computer to the host device in real time.
  • the shelf management personal computer holds the manufacturing flow and processing device information, and the progress information of the flowing production sample. From the detected unique ID of the sample container (sample case) such as the tray 81 and the sample box, Next, the processing device to process the sample (lot (product material) and wafer here) in the sample container (sample case) is determined, and the transport destination of the sample container (sample case) is displayed on the display screen.
  • the worker instruction management that instructs the worker will be described with reference to FIG.
  • FIG. 9 is a layout diagram showing a state where workers and lots flow through each processing step in the worker instruction management of the production management system of the first embodiment.
  • each processing process includes a photolithographic process, a wet etching process, an inspection process, and an MOCVD process.
  • a standby sample shelf indicated by “IN” and “OUT” is provided for each processing process. ing.
  • the standby sample shelf indicated by “IN” is a pre-processing sample shelf, and the standby sample shelf indicated by “OUT” is a post-processing sample shelf.
  • a sample container such as a tray 81 or a sample box containing a production sample (lot) is placed in a sample shelf (IN sample shelf 12, 12A) of “IN”. Further, in order to perform the next processing, a sample container containing a sample to be produced (lot) is taken from the “OUT” sample shelf (processed sample shelves 15 and 15A), and the “IN” pre-process sample shelf in the next process is taken. Transport to. There is a processing device in each process, and an operator in each process takes a sample container containing a production sample (lot) placed on the pre-processing sample shelf of “IN” and puts the production sample ( Lot) is set and predetermined processing is performed.
  • a sample container containing the processed sample (lot) after processing is placed on the processed sample shelf of “OUT”.
  • the sample container containing the produced sample (lot) is transported to the pre-processing sample shelf of “IN”.
  • the process in this case is divided into a plurality of sections for each process, and an “IN” pre-processing sample shelf and an “OUT” post-processing sample shelf are arranged in each section.
  • the plurality of standby sample shelves are arranged in sections divided for each process, and one or a plurality of pre-processing sample shelves and one or a plurality of post-processing sample shelves are arranged in each section.
  • Employees are assigned full-time workers (for example, photo staff, inspection staff, CVD staff, etc.) distinguished for each section.
  • a dedicated worker for transporting the production sample (lot) between the sections is also arranged.
  • Each worker has a unique skill for each section, and has a skill rank according to their experience.
  • These workers perform in-process work and transfer work according to the instruction content displayed on the display screen of the shelf management computer arranged for each section.
  • the worker has an ID that can identify an individual.
  • a new worker worker of an overseas factory
  • each shelf management computer has a function of counting up the time from instruction to execution in order to monitor the work delay of each worker. The purpose of this is to improve the work efficiency of the worker by counting up the passage of time and to collect information on skill determination and lead to stable production.
  • the calculation of the elapsed time is counted up from the time when the work instruction is performed (the time when the screen is displayed). For this time, for example, the time setting is level 1 for up to 3 minutes, level 2 for up to 5 minutes, and level 3 for up to 10 minutes.
  • the difference from the past average elapsed time is taken as one of the evaluation methods.
  • the number of level 3 is used as one of the evaluation deduction items of the worker. The worker only performs the instructed work without any work mistakes and without delay, and does not require the skill level of the worker.
  • the pre-processing sample shelf management personal computers 13 and 13A and the post-processing sample shelf management personal computers 16 and 16A as the shelf management personal computer have the manufacturing flow and processing device information, and the progress information of the flowing production sample. Then, from the detected unique ID of the sample container (sample case) such as the tray 81 and the sample box, the processing apparatus in which the sample (lot) in the standby sample container (sample case) is to be processed next is determined, and the sample container The transport destination of the (sample case) is displayed on the display screen (navigation screens 13a, 14a and 16a) to instruct the operator.
  • the pre-processing sample shelf management personal computers 13 and 13A and the post-processing sample shelf management personal computers 16 and 16A are operated from the time when the transport destination is displayed on the display screen (navigation screens 13a, 14a and 16a). Is displayed on the display screen (navigation screens 13a, 14a and 16a), and an alarm is displayed as the elapsed time is exceeded.
  • FIG. 10 is a diagram for explaining a count-up function as a means for avoiding in-process work loss.
  • the apparatus management personal computer 14 displays the unloading time on the navigation screen 14a, and the operator Countdown display.
  • the worker puts (or mounts) a sample (lot) that has been processed by the processing apparatus into a sample container (sample case) such as the tray 81 or the lot storage box 19 and carries it from the processing apparatus. It is conveyed to the rear sample shelves 15 and 15A.
  • the time is managed by the timer so that there is no delay in the work of carrying out the sample (lot) from the processing apparatus to the sample shelves 15 and 15A after the transfer processing of “OUT”.
  • sample container such as the tray 81 or the lot storage box 19 containing the produced samples (lots) placed on the sample shelves 15 and 15A after the transfer process of “OUT”
  • the rear sample shelf management personal computers 16 and 16A display the transport time on the navigation screen 16a and instruct the operator to count down.
  • the operator places the sample container (sample case) such as the tray 81 or the lot storage box 19 placed on the sample shelves 15 and 15A after the “OUT” transfer process before the process “IN” in the next process.
  • the sample is transferred to the sample shelves 12 and 12A.
  • the time is managed by the timer so that there is no delay in the operation of transporting the sample (lot) from the sample shelves 15 and 15A after the transfer process of “OUT” to the sample shelves 12 and 12A before the process of “IN”. .
  • the pre-processing sample shelf management personal computer 13, 13A displays the processing start time on the navigation screen 13a and counts down to the worker.
  • the operator takes out a production sample (lot) from a sample container (sample case) such as the tray 81 or the lot storage box 19 placed on the pre-conveyance sample shelves 12 and 12A of “IN”.
  • a production sample (lot) is set in a predetermined processing apparatus. In this way, time management is performed by the timer so that there is no delay in the work of carrying out the sample (lot) from the processing apparatus. In this manner, the time is managed by the timer so that there is no delay in the processing start work of the sample (lot) from the pre-conveyance sample shelves 12 and 12A of “IN” to the set of processing apparatuses.
  • the device management personal computer 14 displays the processing start time on the navigation screen 14a and counts down to the worker.
  • the device management personal computer 14 displays the carrying-out time on the navigation screen 14a. And display the countdown to the worker.
  • the operator puts (or mounts) a sample (lot), which has been processed by the processing apparatus, into a sample container (sample case) such as the tray 81 or the lot storage box 19 from the processing apparatus. Are transferred to the sample shelves 15 and 15A.
  • the time is managed by the timer so that there is no delay in the work of carrying out the sample (lot) from the processing apparatus to the sample shelves 15 and 15A after the transfer processing of “OUT”.
  • the operator works by viewing the navigation screen 14a for the unloading time of the produced sample (lot).
  • FIG. 11A shows the navigation screens 13a, 14a and 16a of FIGS. 3 and 7 as work error prevention screens in addition to the work instruction screen and the delay screen
  • FIGS. 11B and 11C show the work screens.
  • the average work time comparison chart, FIG. 11 (d) is a group-by-group process performance ranking chart.
  • the navigation screen 13a of FIGS. , 14a and 16a of FIGS. 3 and 7 can be used for the work error prevention screen.
  • the gate-type RFID reader 10a and the RF-ID reader 20 of the shelf are replaced with the RFID chip 83 and the lot of the tray 81.
  • the pre-processing sample shelf management personal computer 13 or 13A or the post-processing sample shelf management personal computer detects what kind of produced sample (lot) is placed on this standby sample shelf by detecting the RF-ID tag 18 in the storage box 19.
  • the computers 16 and 16A recognize that it is wrong, a display such as “Lot A; Operation error” is displayed on the navigation screens 13a, 14a and 16a in FIG. Originally, it is designed to display on the screen which shelf or processing device should be transported. Normally, when the produced sample (lot) is placed on the pre-processing sample shelves 12 and 12A of “IN”, the pre-processing sample shelves 12 and 12A detect the produced sample (lot) and a work instruction screen is displayed.
  • the transport delay time for each apparatus and the average daily work time for each day as shown in FIG. 11 (c) are totaled by the host computer 17, and as shown in FIG.
  • the separate processing result ranking is totaled by the host computer 17.
  • the host computer 17 aggregates events for each worker, and displays and outputs navigation information for improving work awareness via the navigation screens 13a, 14a and 16a of the shelf management personal computer. For example, it is possible to give each worker a sense of competition with the best 10 display that can evaluate the processing performance of each section and each worker. Production managers (team leaders and line heads) can visualize the processing results for each work section, and use it as decision-making materials such as personnel increase / decrease and placement. Furthermore, when there is a difference event input with respect to the warehousing instruction and the warehousing instruction, it has a function of checking and a function of displaying this on the display screen.
  • the pre-processing sample shelf 12 as a plurality of sample shelves for detecting the presence or absence of the unique ID of the sample container (sample case) such as the placed tray 81 and / or the lot storage box 19.
  • 12A and post-processing sample shelves 15, 15A, and pre-processing sample shelves 12, 12A and post-processing sample shelves 15, 15A as a plurality of sample shelves are assigned unique IDs, respectively.
  • a sample container such as a lot storage box 19
  • Tray 81 and / or lot storage via each shelf management personal computer Managing location information of the sample container (sample case), such as box 19 and a host computer 17 as the host device.
  • sample container (sample case) such as 81 or the lot storage box 19 is on the shelf is detected by the wireless communication function, and the produced sample (lot) in the sample container (sample case) such as the tray 81 or the lot storage box 19 is detected.
  • Location information can be collected from all shelves by host equipment, and low-investment, on-line management of the entire production sample (lot) in a small-scale line or locally distributed line be able to. As a result, it is possible to achieve work efficiency and prevent work errors by performing navigation for work management and labor saving in a production line with a manual transport / offline device.
  • production lines that are premised on offline processing in an inexpensive labor environment, production lines that minimize the amount of investment without automating small-scale production, and transport automation systems (In a production line or the like that does not include a transfer robot and a lot stocker, navigation for work management and labor saving can be performed to improve work efficiency and prevent work mistakes.
  • the sample management shelf systems 11 and 11A of the first embodiment and the sample management shelf system obtained by mixing them are used on a production line with a manual transport / offline device.
  • a navigation function to prevent work loss and work mistakes and save labor, it is possible to manage pseudo online management even for production lines with offline equipment.
  • Such a production management system will now be described in detail.
  • the host computer 17 as the host device of the first embodiment described above and the host device 3 described below may be entirely different host devices, but here, the same host device controls the different functions.
  • This host device is a sample shelf management personal computer 13, 13A as a sample shelf management personal computer installed at a predetermined location in the process, an apparatus management personal computer 14, and a sample shelf management personal computer 16, 16A, which will be described later.
  • Work history information acquisition means for acquiring work history information and sample location history information by collecting work history information from a management personal computer 2 as an apparatus management personal computer is provided.
  • the host device has a sample location history information acquisition unit and a worker behavior history information acquisition unit described in detail below. The worker information management and the worker behavior management by the worker behavior history information acquisition unit will be described below. This will be described in detail later with reference to FIG.
  • FIG. 12 is a block diagram showing an example of a main configuration of worker information management and worker behavior management in the production management system according to the first embodiment of the present invention and its operation.
  • the lot of production material is accommodated and transported in a lot storage box 19 (sample box) which is a cassette here, but a plurality of relatively small wafers 82 or individual pieces thereof together with or separately from the cassette.
  • It may be a processed object transport container (case) such as the above-described tray 81 in which a plurality of chips, this module, and a package are mounted and accommodated.
  • the workpiece transfer container (case) is a conceptual sample container (sample case) including both the tray 81 and the sample box described above.
  • the production management system 1 includes a plurality of processing devices including offline devices, and each management personal computer 2 to which a unique ID is assigned to each of a plurality of gates where an operator enters and leaves the room.
  • a host device 3 capable of exchanging information with each management personal computer 2 and a worker connected to each management personal computer 2 and having worker information such as a unique worker ID attached to a plurality of workers
  • the card (RF-ID) can be read and a data card (RF-ID) with a unique ID and processing information (flow) attached to each of multiple production works (multiple production lots) Can be given to workers from a device (not shown), and production information for each production work (each worker) can be read from the data card And a card reader 4,.
  • the management personal computer 2 to which the worker card is read and processed by making the worker card approach or contact the card reader 4 of the gate or the card reader 4 of the processing device and the card reader 4 is connected is a worker such as a worker ID.
  • the worker / time verification that is, whether the worker is correct and whether the expected time is met or how late
  • the management personal computer 2 causes the host device 3 to perform work such as worker ID.
  • the verification information including the worker information and the verification result is uploaded, and the host device 3 registers the uploaded verification information including the worker information and the verification result in the database 32 of FIG.
  • the verification information includes not only the verification result but also data such as which gate or which processing apparatus is the correct worker, whether the expected time is reached, or how much is delayed.
  • the worker card has an IC chip mounted with a memory called a tag chip and an antenna embedded therein, a worker ID (name, affiliation group, work band), work area (cleaning, exposure, etching, inspection, transport, CVD and Impurity ion implantation, etc.), work type (management, processing, inspection, transfer and maintenance), work rank (1-5; work skill and work history information) and work point are recorded as worker information.
  • the work point in the worker information in the worker card is the amount of work that can be performed by the worker, and is a numerical value indicating which work (how many work) has been performed per day.
  • the work rank is work skill, and from the worker who performs only the transport, the worker who can perform the transport, perform the predetermined processing work, and perform the inspection work has a high rank. The higher the work point, the higher the work rank.
  • the host apparatus 3 aggregates and updates the work evaluation values by integrating the negative evaluation of how late the work must be finished within the specified time and the positive evaluation such as the work point becoming higher in FIG.
  • a work evaluation value update means 314 is shown.
  • the host device 3 controls the display of a work evaluation value for each worker including these work ranks and work points on a navigation display described later.
  • This work evaluation value can be an index of each worker for improving work efficiency.
  • the data card has an IC chip mounted with a memory called a tag chip and an antenna embedded therein, and "whether the production work of which stocker, which cassette (lot), is manually transported to which processing equipment for work" It is written on the card surface so that the operator can see it visually.
  • the data card is registered in the IC chip so that input errors in the processing device can be avoided and can be easily and reliably read by the card reader 4, or the production conditions are indicated by a barcode.
  • the data can be easily and reliably read by the data.
  • the registration data in the IC chip is data that indicates what kind of lot needs processing and what kind of processing is necessary.
  • the work instruction information of the cassette (lot) as the production work is displayed on the display screen of the management personal computer 2 or the contents of the data card are rewritten by the data card attaching device connected to the management personal computer 2. Is displayed.
  • a management personal computer 2 provided in the vicinity of a processing device such as an offline device is connected to a host device 3 and a card reader 4.
  • the management personal computer 2 uploads production information for each worker to the host device 3, and based on the uploaded production information, the host device 3 downloads work instruction information to the corresponding management personal computer 2.
  • the management personal computer 2 touches (contacts) the card reader 4 with or closes the data card of the worker in which the production lot information (lot ID / flow information) is written at the start / end of the process.
  • the contents of the card are read and transmitted to the host device 3 via the management personal computer 2.
  • the host device 3 grasps the processing status (progress management, check of normal processing) of each lot, and the work instruction according to the lot progress status, An instruction to take out a cassette (lot), selection of a processing apparatus for the next process, and an instruction to carry it are displayed on the display screen of the management personal computer 3, and work history is automatically collected in the database 32 of FIG.
  • FIG. 13 is a block diagram showing a software configuration example of the management personal computer 2 and the host device 3 in the production management system 1 of FIG.
  • the management personal computer 2 in the production management system 1 of the first embodiment includes a CPU (Central Processing Unit) 21 as a control unit that performs overall control, and a keyboard for issuing input commands to the CPU 21.
  • a ROM 24 as a computer-readable readable recording medium storing a control program and its data, and the control program and its data are read out at the time of start-up. Read and store data And a RAM25 as a storage unit which acts as Kumemori.
  • the host device 3 in the production management system 1 includes a CPU (Central Processing Unit) 31 as a control unit that performs overall control, and a computer-readable readable record in which a control program and its data are stored.
  • a ROM as a medium, a control program and its data at the time of start-up are read, and a RAM as a storage unit that functions as a work memory for reading and storing data for each control by the CPU 31, as well as a large amount of worker information and verification
  • a database 32 for storing information, worker behavior history information, work evaluation value update information, and enormous production information.
  • the ROM as a readable recording medium may be composed of a portable optical disk, a magneto-optical disk, a magnetic disk, an IC memory, etc. in addition to a hard disk.
  • This control program and its data are stored in the ROM, but this control program and its data may be downloaded to the ROM from another readable recording medium or via wireless, wired or the Internet.
  • the CPU 21 in the management personal computer 2 has data input means 211 for inputting the worker information and lot ID read by the card reader 4 and the process contents, and the data input means 211 inputs data.
  • the worker information such as the worker ID, the worker / time verification, i.e., verification (verification) whether the worker is correct and whether it is the expected time or how late, and the card reader
  • the flow collation unit 212 for collating whether the lot ID read in step 4 and the process content are correct as production information, the collation result (or verification result) performed by the flow collation unit 212, and the next processing content (processing recipe) Is displayed on the display screen, and the host device 3
  • Worker information / verification information transfer means 214 for uploading worker information such as supplier ID and verification information including a verification result, and a recipe number issuance for issuing a recipe number corresponding to the lot ID if the verification result is correct as a work instruction Means 215, processing end notifying means 216 for notifying the host device 3
  • the verification result display control means 213 displays “warning” and emits a buzzer for a predetermined time. Display control of at least one of the delayed times on the display screen, and if the collation result is not correct as a work instruction, display a “warning” buzzer sound and display the “transport destination” The display is controlled above.
  • the CPU 31 in the host device 3 receives the worker information such as the worker ID from the management personal computer 2 and the verification information including the verification result, records these in the database 32 and works.
  • the destination for each worker is displayed on a navigation display installed at a predetermined location on the flow line of the worker in the process using the worker action history information obtained from the gate passing information for each worker collected in 3.
  • the work evaluation value update means 314 for collecting and updating the work evaluation values based on the quality of the result and the delay time, and the recipe number corresponding to the lot ID of the management personal computer 2 are issued, and the recipe number is supported.
  • the recipe registration means 315 for registering the recipe (process content) in the database 32, and after the recipe content (process content) corresponding to the recipe number is registered by the recipe registration means 315, "processing start" is managed for the processing device.
  • Processing start instruction means 316 for instructing via the personal computer 2 and processing history writing for instructing the management personal computer 2 of the processing apparatus to write the processing history data of the processing apparatus upon receiving the processing end notification
  • the database To scan 32 and process history registration unit 318 for registering a process history data of the processing unit, and a next step the content display instruction unit 319 in the management personal computer 2 performs a display instruction of the next process contents.
  • the work instruction means 313 uses a worker action history information obtained from the gate passing information for each worker collected in the host device 3 and displays it on a navigation display installed at a predetermined location on the flow line of the worker in the process. In addition to displaying the destination for each worker, a unique terminal device that can identify an individual worker in the process may be carried by each worker, and the host device 3 may instruct work to each individual terminal device. .
  • the work evaluation value update unit 314 aggregates and updates the work evaluation values based on increase / decrease of work area, change of work type, improvement of work skill, increase / decrease of work amount, pass / fail of verification result, and magnitude of delay time.
  • the data is transferred so that the work evaluation value for each worker is displayed on a navigation display installed at a predetermined location on the flow line of the worker in the process.
  • FIG. 14 is an image diagram in which workers and lots flow through each processing step.
  • each processing process includes a cleaning process, an exposure process, an etching process, an inspection process, a CVD process, an impurity ion implantation process, and the like.
  • Each entry / exit gate of the entrance / exit gate, cleaning process, exposure process, CVD process and injection process is checked by an operator card.
  • the worker card is touched or brought close to the card reader 4 for entering or leaving, so that the worker is correct and the time is correct.
  • Work analysis information can be obtained regarding the verification time, such as whether or not it is delayed and how much it is delayed.
  • the worker is the person himself / herself at each point moved. For example, the worker's whereabouts information about where the worker is now can be obtained, and it becomes clear whether the worker who is working is the right person to work.
  • the lot is delivered within a specified time or if it is delayed with respect to the specified time information on where and when the lot is to be delivered, information on how late the lot is is obtained. This is an operator tag for a lot tag.
  • the host device 3 receives the gate passage information set at a predetermined place in the process from each management personal computer 2. Collected to obtain worker action history information.
  • Navigation installed at a predetermined location on the flow line of the worker in the process using the worker action history information obtained from the location and time information of the worker information and verification information for each worker collected in the host device 3
  • the destination for each worker is displayed on the display.
  • a unique terminal device that can identify an individual worker in the process is carried by each worker, and work information is instructed from the host device 3 to each unique terminal device.
  • FIG. 15 is a flowchart showing an operation example of the production management system 1 including the worker's work process when the production process is performed using the production management system 1 of FIG.
  • step S ⁇ b> 1 the operator operates the stocker management personal computer 51 constituting the data card giving apparatus 5 to select “card output information”.
  • the “card output information” an operator is instructed which cassette (lot) is taken out from which stocker and to which processing apparatus is manually conveyed.
  • a lot storage box 19 sample box which is a cassette (lot) is targeted, but a tray 81 on which a plurality of wafers 82, chips, modules, and the like are mounted may be used together with or separately from this. .
  • step S2 the operator operates the stocker management personal computer 51 to print out the data card 53 from the data card printer 52.
  • step S3 the worker issues the instructed cassette (lot) from the source stocker 54 in accordance with the contents of the data card 53 printed out.
  • step S4 the operator manually transports the delivered cassette (lot) to a predetermined processing apparatus.
  • step S5 the worker reads the contents of the worker card (worker ID, assigned area, work rank (work skill and work history information)) with the card reader 4. Also, the worker manually conveys the work card.
  • the cassette (lot) is set in the apparatus loader and the contents of the data card 53 are read by the card reader 4. That is, the operator sets the cassette (lot) in the processing apparatus as “set cassette”.
  • the operator executes an event instructed by the stocker management personal computer 51 and the data card 53, and at the same time, the operator's work is to cause the card reader 4 to read the contents of the worker card and the data card 53. It is.
  • step S 6 the management personal computer 2 performs the work in which the data input means 211 inputs the worker information such as the worker ID read by the card reader 4 and the time information at the time of reading by the card reader 4. Based on the worker information and the time information, the flow matching unit 212 verifies the worker / time flow matching, that is, whether the worker is a correct worker and whether it is the expected time or how late. The management personal computer 2 verifies whether the worker is a correct worker from the production flow of the production work and the information of the processing device and the worker information in order to determine whether the worker is correct and whether the time is correct.
  • the collation result (verification result) performed by the flow collation unit 212 is good by the collation result display control unit 213, the content is displayed on the display screen of the management personal computer 2, and the collation result (verification result) is not possible. If there is, a “warning” is displayed on the display screen of the management personal computer 2 and a buzzer sound is emitted for a predetermined time.
  • step S7 the worker information / verification information transfer unit 214 of the management personal computer 2 uploads the worker information such as the worker ID and the verification information including the verification result to the host device 3, and the host device 3
  • the uploaded verification information including the worker information and the verification result is registered in the database 32.
  • step S8 in the management personal computer 2, the data input means 211 inputs data on the lot ID and process contents read by the card reader 4 and processed by the processing apparatus, and the flow matching means 212 performs the processing.
  • the flow collation for each apparatus is performed, “cassette verification, recipe check” is performed, and the collation result display control unit 213 displays the collation result and the next work content on the display unit 23. That is, the management personal computer 2 provided in the processing apparatus confirms whether the lot ID read by the card reader 4 and the process contents are correct as a work instruction. If the lot ID read by the card reader 4 and the process content (flow) are correct, the management personal computer 2 confirms the reception on the display screen with respect to the worker.
  • step S9 the host device 3 accepts the recipe number corresponding to the lot ID, and the recipe registration means 315 of the host device 3 registers the cassette (lot) and recipe (process contents) in the database 32. To do.
  • step S10 after the recipe number corresponding to the lot ID is registered by the recipe registration unit 315 of the host apparatus 3, the process start instruction unit 316 automatically instructs “processing start” to the processing apparatus.
  • step S11 if the lot ID and the process content are not correct as a result of the collation by the flow collating unit 212 (no), the collation result display control unit 213 displays “warning” and “conveyance destination” as its management personal computer. The display is controlled on the display screen 2 and a buzzer sound is generated.
  • steps S8 to S10 are operations performed by the management personal computer 2 and the host device 3.
  • step S11 when a “warning” is issued on the display screen in step S11, the worker removes the cassette (lot) from the processing apparatus, and processes the cassette (lot) as a regular transport destination. Manually transport to the equipment.
  • step S10 the processing device starts processing according to the “processing start instruction” from the processing start instruction means 316, and the processing device ends the processing after a predetermined time.
  • step S12 the processing device notifies the host device 3 that the processing for the cassette (lot) has been completed, and the processing history writing instruction unit 317 of the host device 3 causes the processing device to notify the host device 3 that the processing has been completed.
  • step S13 the management personal computer 2 of the processing device is instructed to write processing history data, and the processing history transfer means 217 of the management personal computer 2 sends the host device 3 to the processing history data.
  • the processing history data of the processing device is transferred to.
  • the processing history registration means 318 of the host device 3 registers the processing history data of the processing device in the database 32.
  • step S14 the host device 3 determines whether or not the processing has been completed for the cassette (lot). If the processing has been completed for the cassette (lot) (YES), the host device 3 In step S15, the next process content display instruction means 319 instructs the management personal computer 2 to display the next process content, and the next process content display control means 218 of the management personal computer 2 displays “ The display of the message “Remove cassette” is controlled, and “Receiving stocker” is displayed on the display screen of the management personal computer 2. In accordance with this instruction, the operator removes the cassette (lot) from the apparatus loader and transports it to a predetermined instruction stocker, and enters the cassette (lot) into the predetermined instruction stocker.
  • next process content display instruction means 319 of the host device 3 sends the next process content to the management personal computer 2 in step S16.
  • the next process content display control means 218 of the management personal computer 2 displays a message “Remove cassette” on the display screen and also displays “Next process” on the display screen of the management personal computer 2. Is displayed.
  • the worker causes the card reader 4 to read the contents of the worker card (worker ID, area in charge, work rank (work skill and work history information).
  • the worker uses the cassette (lot ) Is removed from the apparatus loader and conveyed to the processing apparatus of the next process, and the worker sets the cassette (lot) in the apparatus loader and brings the data card and the worker card closer to the card reader 4 in step S5.
  • the card information is read by the card reader 4.
  • the management personal computer 2 uses the production work flow, the processing device information, and the worker information to determine whether the worker is correct and whether the time is correct. Whether it is a correct worker or downloaded from the host device 3 Progress information of the work, for example, in order to arrive from the transport instruction is issued time within a predetermined time, or delayed much or what if time as the expected are verified.
  • the management personal computer 2 uses the data input means 211 to input the worker information such as the worker ID read by the card reader 4 and the time information at the time of reading by the card reader 4. Based on the information and the time information, the flow matching means 212 verifies the worker / time flow matching, that is, whether the worker is a correct worker and whether it is the expected time or how late. Furthermore, if the collation result (verification result) performed by the flow collation unit 212 is good by the collation result display control unit 213, the content is displayed on the display screen of the management personal computer 2, and the process proceeds to the next step S18. . If the collation result (verification result) is not possible, “Warning” is displayed on the display screen of the management personal computer 2 and a buzzer sound is generated for a predetermined time in the next step S11.
  • step S18 the worker information / verification information transfer means 214 of the management personal computer 2 uploads the worker information such as the worker ID and the verification information including the verification result to the host device 3, and the host device 3
  • the uploaded worker information and verification information including the verification result are registered in the database 32, and the process returns to the next step S4.
  • the above steps S12 to S18 are operations performed by the management personal computer 2 and the host device 3.
  • a lot storage box 19 which is a cassette (lot) is targeted, but a tray 81 on which a plurality of wafers 82, chips, modules and the like are mounted can be used together with or instead of this. .
  • the data input means 211 causes the data input means 211 to input the lot ID read by the card reader 4 and the process contents thereof, and the flow collating means 212 inputs the lot ID and the process contents thereof.
  • the flow verification process for verifying whether the production information is correct, and the verification result display control unit 213 controls the display of the verification result and the next work content performed by the flow verification unit 212 on the display screen.
  • worker information / verification information transfer means 214 uploads worker information such as worker ID and verification information including verification results to the host device 3, and the collation result is the work If it is correct as an instruction, the recipe number issuing means 215 receives the recipe number corresponding to the lot ID.
  • the processing history transfer means 217 transfers the processing history data of the processing apparatus to the host device 3, and the next process content display control means 218 controls the display of a “cassette removal” message on the display screen.
  • it has a next process content display control process for controlling display of the “warehousing stocker” or the “processing apparatus for the next process”.
  • worker information / verification information registration means 311 receives worker information such as a worker ID from the management personal computer 2 and verification information including a verification result, records them in the database 32 and works.
  • Worker information / verification information registration step for updating points and worker behavior history information acquisition means 312 collects gate passage information installed at a predetermined place in the step and acquires worker behavior history information.
  • the history information acquisition step and the work instruction means 313 use the worker action history information obtained from the gate passage information for each worker collected in the host device 3 to obtain a predetermined place on the flow line of the worker in the process.
  • the work instruction process for displaying the destination for each worker on the installed navigation display and the work evaluation value update means 314 are provided to increase / decrease the work area.
  • Work evaluation value update process for collecting and updating work evaluation values based on change of work type, improvement of work skills, increase / decrease of work amount, quality of verification result and delay time, and recipe from management personal computer 2
  • the recipe registration means 315 registers the recipe contents corresponding to the recipe number in the database
  • the processing start instruction means 316 gives the processing device a “processing”
  • a process start instructing step for instructing “start” a process history write instructing step for instructing the management personal computer 2 to write process history data by the process history write instructing means 317 upon receiving a process end notification
  • the processing history registration means 318 receives the transfer processing history data from the management personal computer 2 and stores it in the database 32.
  • an operator who is an operator, circulates a predetermined route by manual conveyance at a predetermined cycle, so that, in addition to verifying the identity of the operator card, After verifying the work delay, it is a processing device that cannot automatically receive a lot with an offline device according to the production information displayed on the display screen of the management personal computer 2 or the work instruction screen of the data card (RF-ID tag).
  • accurate work processing and lot transportation / next process processing can be performed reliably. Thereby, in a production line having a manual transport / offline device, it is possible to reliably realize work efficiency and prevention of work mistakes by giving work instructions by navigation for work management and labor saving.
  • FIG. 16 is a layout diagram of a plurality of processing devices including offline devices, their management personal computer 2 and host device 3 in the production management system 1 of FIG.
  • the offline device 6 is lit so that the processing device can be confirmed to be abnormal (alarm), operation / non-operation (maintenance (forced stop), processing possible, processing in progress, processing end, processing waiting), and the like.
  • a signal tower 61 is provided.
  • the signal tower 61 of the offline device 6 is widely used for detecting the device state such as operation / non-operation, which is the original purpose.
  • a signal tower signal / warning signal hereinafter, simply referred to as a signal tower signal
  • the offline device 6 can be pseudo-online and the device status of the offline device 6 can be obtained in real time. .
  • a decoder device 63 that reads various signals is provided on the signal line 62 connected to the signal tower 61 and is read by an electronic device capable of online communication of the management personal computer 2, so that the device body of the offline device 6 is not modified.
  • the device status information of the offline device 6 is transmitted from the management personal computer 2 to the host device 3 that performs process management. Whether it is this online processing apparatus or an offline processing apparatus, the management personal computer 2 is arranged for each processing apparatus.
  • This production management system 1 includes a host device 3 having a lot process flow progress management function and one or more processing devices including at least one offline device 6 and devices added to the offline device 6.
  • the host device 3 includes at least device status information (abnormality (alarm) and operation / operation) of one or a plurality of processing devices including the offline device 6.
  • Non-operating state information (information on whether or not the device is available) via each management personal computer 2 And outputs the work instruction information of the door.
  • the processing priority of lots, the worker's current location, etc. are comprehensively determined and managed for each offline device 6.
  • the work instruction information is output to the personal computer 2. That is, when a signal requiring work is detected simultaneously from one or a plurality of processing devices including at least the off-line device 6, the host device 3 comprehensively determines the production conditions such as the processing priority of lots and the worker's current location.
  • the work instruction information is output via each management personal computer 2 of at least one processing apparatus including the off-line apparatus 6.
  • the processing end time is predicted from the processing start signal included in the signal tower signal read from the offline device 6 and the process time of the offline device 6 registered in advance, and the work is reserved in the management personal computer 2 for each offline device 6.
  • the host device 3 predicts the processing end time from the processing start signal read from one or a plurality of processing devices including at least the offline device 6 and the process time registered in advance, and includes at least one or more of the offline devices 6 Work reservation instruction information is output via each management personal computer 2 of each of the plurality of processing devices.
  • the lot work instruction information via each management personal computer 2 is displayed and output on the display screen of the display unit 23 of each management personal computer 2 as text or a pattern, or by a buzzer or the like at the time of abnormality (alarm). It is possible to output a voice or output various instructions to the worker.
  • a signal tower signal (including an alarm signal) that informs the operation status of the device attached to the offline device 6 by lighting / non-lighting is read, and the device of the offline device 6 is read.
  • the management personal computer 2 transfers the status information to the host device 3, and the host device 3 outputs work instruction information on the lot of the offline device via the management personal computer 2 based on the device status information of the offline device 6. That is, the production management method of the present embodiment reads at least the offline device 6 by reading a signal tower signal (including an alarm signal) that informs the operation status of the device attached to the offline device 6 by lighting / non-lighting.
  • Each management personal computer 2 transfers the device status information of a plurality of processing devices to the host device 3, and the host device 3 responds based on the device status information of one or more processing devices including at least the offline device 6.
  • work instruction information on lots of one or a plurality of processing apparatuses including at least the off-line apparatus 6 is output.
  • the management personal computer 2 uploads the device status information to the host device 3, and based on the uploaded device status information, the host device 3 downloads the lot work instruction information to each management personal computer 2 corresponding thereto. .
  • a management personal computer 2 capable of communicating with the host device 3 and a card reader 4 (RF-ID reader) connected thereto are installed in the vicinity of the offline device, and worker information is written at the start / end of processing.
  • a card reader 4 RFID reader
  • the worker information and time of the worker card are input from the card reader 4 to the management personal computer 2, and the management personal computer 2 operates from the card reader 4.
  • the worker / time is verified based on the worker information including the worker ID, and the management personal computer 2 uploads the worker information and the verification information including the worker ID to the host device 3.
  • the host device 3 grasps the processing status (progress management, normal processing check) of each lot, and at the same time calculates whether there is a work delay or a pick-up delay in the lot progress for each worker. Is displayed on the corresponding management personal computer 2 and other work instruction screens.
  • the worker's assigned area, work skill, and work ability can be managed as system information by the production management system.
  • the operator circulates a predetermined route at a predetermined cycle, and according to the information displayed on the screen of the management personal computer 2, the offline device can perform accurate processing and lot transportation / next process processing. it can.
  • the work results of each “worker” to the worker it is possible to improve the worker's work skill, work consciousness, and process efficiency.
  • the worker behavior history information acquisition unit 312 of the host device 3 collects gate passage information installed at a predetermined place in the process and acquires the worker behavior history information. By analyzing this worker behavior history information, it can be reflected in further efficiency improvement of the worker in the process.
  • the work instruction means 313 in the host device 3 uses the worker action history information obtained from the gate passage information for each worker collected in the host device 3, the work instruction means 313 in the host device 3 causes the predetermined location on the flow line of the worker in the process.
  • the destination for each worker is displayed on the navigation display 7 installed in the.
  • the large screen of the navigation display 7 allows the worker to constantly check the latest information for each worker, thereby efficiently flowing without waste and always checking the priority of the next work.
  • the work evaluation value update means 314 of the host device 3 is based on increase / decrease of work area for each worker, change of work type, improvement of work skill, increase / decrease of work amount, pass / fail of verification result, and magnitude of delay time. Aggregate and update work evaluation values.
  • the update of the work evaluation value can be displayed on the large screen of the navigation display 7 and can be used as an index for increasing the motivation of a plurality of workers.
  • each management personal computer 2 to which a unique ID is assigned to each of the plurality of processing devices including the offline device and the entrance / exit gate,
  • a card reader 4 connected to each management personal computer 2 and capable of reading the contents of a worker card to which a plurality of workers are attached with worker information including a unique worker ID, and each management personal computer 2 and information
  • a host device 3 that exchanges and manages the process, and each management personal computer 2 includes a flow verification unit 212 that verifies the worker / time based on worker information including the worker ID from the card reader 4;
  • Each management personal computer 2 includes worker information including a worker ID and a worker ID in the host device 3.
  • Worker information / verification information transfer means 214 for uploading the certificate information, and the host device 3 registers the worker information including the uploaded worker ID and the verification information including the verification result.
  • Registration means 311 is included.
  • the worker information is managed online on the production line with the manual transfer / offline device, and the work due to different workers.
  • pseudo on-line management is possible even for production lines with offline equipment. It can be realized efficiently.
  • the host device 3 that performs process management by grasping the operating / non-operating state of the apparatus in real time from the signal tower signal including the apparatus state information (operating / non-operating state information) of the off-line apparatus 6 allows the off-line apparatus 6 to manage the process.
  • An in-process production work (lot) conveyance / processing instruction can be accurately displayed on the display screen of each management personal computer 2. Further, it is possible to reliably notify the operator who is in a position where the signal tower 61 is not visible, by displaying on the display screen of the management personal computer 2 for each offline device 6.
  • the host device 3 that performs the process management determines the priority, and the work priority is determined by a display instruction on the display screen of the management personal computer 2 for each offline device 6. Can be managed. Furthermore, since the process end time can be predicted from the process start time, it is possible to improve the work efficiency of the worker (labor saving) by incorporating a function such as giving a prior (planned) work instruction to the worker. . Further, the host device 3 can automatically collect the device operation status data of the offline device 6, and the operation rate management which has been manually accumulated can be performed in real time and accurately, so that the process such as line balance can be performed. Improvement is possible.
  • the present invention relates to a semiconductor such as a light emitting diode (LED) or a semiconductor laser element using one or a plurality of processing apparatuses including at least an off-line apparatus in a redevelopment to a compound semiconductor factory of an LSI manufacturing factory or a manual factory.
  • a semiconductor such as a light emitting diode (LED) or a semiconductor laser element using one or a plurality of processing apparatuses including at least an off-line apparatus in a redevelopment to a compound semiconductor factory of an LSI manufacturing factory or a manual factory.
  • navigation for work management and labor saving is performed to improve work efficiency and prevent work mistakes. can do.

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Abstract

Le problème à résoudre dans le cadre de cette invention consiste à gérer le travail et à se diriger vers la conservation de la main-d'œuvre, et à rationaliser le travail et prévenir les erreurs professionnelles, sur une ligne de production possédant des dispositifs manuels de transport/hors ligne. La solution proposée comprend : des ordinateurs personnels (13, 16) de gestion d'étagères permettant de gérer si un plateau (81) possède un identifiant unique pour chaque étagère d'une pluralité d'étagères (12, 15) d'échantillons pour détecter si le plateau (81), qui y est placé, possède ou non l'identifiant unique, un identifiant unique étant donné à chacune des étagères (12, 15) d'échantillons ; et un ordinateur hôte (17) permettant de gérer des informations de position d'emplacements sur le plateau (81) au moyen de chacun des ordinateurs personnels (13, 16) de gestion des étagères. Les ordinateurs personnels (13, 16) de gestion des étagères enregistrent un flux de production et des informations de dispositif de traitement ainsi que des informations de progression sur un échantillon de production de flux, déterminent un dispositif de traitement par lequel un échantillon (un lot) dans le plateau (81) doit ensuite être traité à partir de l'identifiant unique du plateau (81) détecté, et exécutent une gestion d'instruction d'opérateur permettant d'afficher une destination de transport pour le plateau (81) sur un écran d'affichage pour en informer l'opérateur.
PCT/JP2013/000920 2012-04-02 2013-02-20 Système de gestion de production WO2013150702A1 (fr)

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