WO2013094246A1 - Procédé de fabrication d'une chemise de refroidissement à circulation liquide - Google Patents

Procédé de fabrication d'une chemise de refroidissement à circulation liquide Download PDF

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Publication number
WO2013094246A1
WO2013094246A1 PCT/JP2012/070196 JP2012070196W WO2013094246A1 WO 2013094246 A1 WO2013094246 A1 WO 2013094246A1 JP 2012070196 W JP2012070196 W JP 2012070196W WO 2013094246 A1 WO2013094246 A1 WO 2013094246A1
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WO
WIPO (PCT)
Prior art keywords
rotary tool
jacket
friction stir
sealing body
stir welding
Prior art date
Application number
PCT/JP2012/070196
Other languages
English (en)
Japanese (ja)
Inventor
慎也 牧田
伸城 瀬尾
堀　久司
雅敬 玉石
Original Assignee
日本軽金属株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日本軽金属株式会社 filed Critical 日本軽金属株式会社
Publication of WO2013094246A1 publication Critical patent/WO2013094246A1/fr

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K20/00—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
    • B23K20/12—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating the heat being generated by friction; Friction welding
    • B23K20/122—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating the heat being generated by friction; Friction welding using a non-consumable tool, e.g. friction stir welding
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K20/00—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
    • B23K20/12—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating the heat being generated by friction; Friction welding
    • B23K20/122—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating the heat being generated by friction; Friction welding using a non-consumable tool, e.g. friction stir welding
    • B23K20/1265—Non-butt welded joints, e.g. overlap-joints, T-joints or spot welds
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K20/00—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
    • B23K20/12—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating the heat being generated by friction; Friction welding
    • B23K20/129—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating the heat being generated by friction; Friction welding specially adapted for particular articles or workpieces
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/48—Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the subgroups H01L21/06 - H01L21/326
    • H01L21/4814—Conductive parts
    • H01L21/4871—Bases, plates or heatsinks
    • H01L21/4878—Mechanical treatment, e.g. deforming
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
    • H01L23/46—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements involving the transfer of heat by flowing fluids
    • H01L23/473—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements involving the transfer of heat by flowing fluids by flowing liquids
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Definitions

  • the present invention relates to a method for manufacturing a liquid-cooled jacket constituted by fixing a sealing body to an opening of a concave portion of a jacket body by friction stir welding.
  • Patent Document 1 discloses a technique in which constituent members are joined to each other by friction stir welding.
  • This liquid cooling jacket includes, for example, a jacket body having a fin housing chamber for housing metal fins, and a sealing body for sealing the fin housing chamber, and seals the peripheral wall of the jacket body surrounding the fin housing chamber.
  • a liquid cooling jacket is manufactured by rotating the rotating tool around the abutting portion with the outer peripheral surface of the stationary body and performing friction stir welding.
  • the sealing body is formed thinner than the jacket main body, and is placed on a support surface including a bottom surface of a step formed in the jacket main body. The rotating tool moves along the abutting portion so that the center thereof is located on the abutting portion, and joins the jacket body and the sealing body.
  • Patent Document 2 discloses a technique in which a cooling plate is attached to a jacket main body that performs friction stir welding and the rotating tool is moved while cooling the jacket main body.
  • an object of the present invention is to provide a manufacturing method of a liquid cooling jacket that can easily perform friction stir welding and can manufacture a liquid cooling jacket having high flatness.
  • the present invention fixes a sealing body for sealing the opening of the recess to the jacket main body having the recess and the flange formed in the recess by friction stir welding.
  • a method for manufacturing a liquid cooling jacket comprising: a support surface comprising a stepped bottom surface formed at a peripheral edge of the opening of the recess of the jacket body and lowering from the surface of the jacket body; and the flange that is flush with the support surface
  • the rotating tool provided with the stirring pin is caused to make a round along the abutting portion between the step side surface of the jacket body and the outer peripheral surface of the sealing body, and is moved along the flange portion on the surface of the sealing body.
  • the joined body is press-corrected after the friction stir welding step, it is not necessary to cool at the time of friction stir welding. Therefore, complication of the friction stir welding operation can be prevented, and the operation can be facilitated.
  • the stirring pin of the rotary tool is inserted into the jacket body from the support surface, the plasticizing region enters into a deep portion inside the jacket body. As a result, stress due to thermal contraction in the plasticized region can be distributed to the jacket body, and deformation of the sealing body can be suppressed.
  • the jacket main body and the sealing body can be joined by the support surface and the collar at the inner portion of the recess even when the recess has a large area, the deformation of the joined body can be suppressed by providing the collar.
  • the invention according to claim 2 is characterized in that the jacket body has a planar rectangular shape, and in the correction step, the joined body is arranged so that the sealing body faces downward, and the joined body The peripheral portion of the jacket is supported from below, and the center portion where the diagonal lines of the jacket body intersect is pressed downward to correct the press.
  • the joined body is supported at both ends as viewed in the cross-sectional direction, and the center is pressed downward.
  • pressing until the central portion is below the both ends allows the joined body to be flattened after pressing. Further, since the central portion is pressed intensively, the pressing load can be reduced.
  • a lower mold and an upper mold having a pressing surface having an area larger than the projected area of the joined body are used, and the gap between the lower mold and the upper mold is used.
  • the bonded body is press-corrected with the entire bonded body positioned.
  • the joined body can be pressed with uniform stress in a stable state, and press correction can be performed with high accuracy.
  • one of the pressing surface of the lower mold and the pressing surface of the upper mold is configured as a convex surface, and the other is configured as a concave surface meshing with the convex surface.
  • the bonded body is arranged so that the sealing body faces the concave surface.
  • the center portion is pressed and deformed to the opposite side from the state where the center portion is initially warped. It can be flat.
  • the invention according to claim 5 is characterized by further comprising a burr cutting step for cutting a burr generated in the friction stir welding after the friction stir welding step and before the correction step.
  • the burrs are not pinched during press correction, preventing the joint from being deformed locally or from being damaged by biting into the surface of the joint. can do.
  • the invention according to claim 6 is characterized in that a width dimension of the support surface is larger than a radial dimension of a shoulder portion of the rotary tool.
  • the plasticizing region can be formed in the support surface when the rotary tool is moved directly above the abutting portion, and the pushing force of the rotary tool is reliably supported by the support surface. be able to.
  • the invention according to claim 7 is characterized in that a width dimension of the flange portion is larger than a diameter dimension of a shoulder portion of the rotary tool.
  • the plasticizing region can be formed in the buttock when the rotary tool is moved directly above the buttock, the pushing force of the rotary tool is reliably supported by the buttock. be able to.
  • the invention according to claim 8 is the spiral ridge portion that spirally surrounds the periphery of the root of the stirring pin on the bottom surface of the shoulder portion of the rotary tool used in the friction stir welding step. Is formed, and a spiral metal reservoir is formed.
  • the invention according to claim 9 is the friction stir welding step, wherein when the rotary tool is moved clockwise with respect to the opening, the rotary tool is rotated to the right, and the rotary tool is moved to the opening. When moving counterclockwise with respect to the part, the rotating tool is rotated counterclockwise.
  • the rotary tool is moved to the outer peripheral side of the plasticized region formed in the first round. It is shifted, The rotation tool is made to make one more round along the said abutting part, The outer peripheral side of the said plasticization area
  • region is re-stirred.
  • a part of the abutting portion is used for temporary joining smaller than the rotary tool. Temporary joining is performed using a rotating tool.
  • the sealing body does not move during friction stir welding (hereinafter sometimes referred to as “main joining”). And it becomes easy to join and the positioning accuracy of a sealing body improves. Further, since the temporary welding rotary tool is smaller than the main welding rotary tool, the main welding can be completed only by moving the main welding rotary tool on the temporary bonding portion and performing frictional stirring.
  • the invention according to claim 12 is characterized in that the abutting portion has a rectangular frame shape, and in the step of temporarily joining the abutting portion with the rotary tool for temporary joining in the friction stir welding step, the abutting is performed. One of the diagonals of the part is temporarily joined first, and then the other diagonal is provisionally joined.
  • the invention according to claim 13 is characterized in that the abutting portion has a rectangular frame shape, and in the step of temporarily joining the abutting portion with the rotary tool for temporary joining in the friction stir welding step, the abutting is performed. It is characterized in that after the intermediate portions of one opposite side of the part are temporarily joined, the intermediate portions of the other opposite side are temporarily joined.
  • the sealing body can be temporarily joined in a balanced manner, and the positioning accuracy of the sealing body with respect to the jacket body is improved.
  • FIG. (A) is a figure for demonstrating the friction stir welding process of the manufacturing method of the liquid cooling jacket which concerns on embodiment of this invention, Comprising: The friction stir welding process (main joining process) following FIG. It is the top view which showed.
  • (A), (b) is a figure for demonstrating the friction stir welding process of the manufacturing method of the liquid cooling jacket which concerns on 1st Embodiment of this invention, Comprising: The friction stir welding process following FIG. 6 was shown. It is a top view. It is a figure for demonstrating the friction stir welding process of another form, Comprising: (a) is the top view which showed the temporary joining process, (b) is the top view which showed this joining process. It is the perspective view which showed the conjugate
  • the liquid cooling jacket is a component of a cooling system mounted on an electronic device such as a personal computer, for example, and is a component that cools a CPU (heat generating body) and the like.
  • the liquid cooling system includes a liquid cooling jacket in which a CPU is mounted at a predetermined position, a radiator (heat dissipating means) that discharges heat transported by cooling water (heat transport fluid) to the outside, and a micropump (heat transport) that circulates the cooling water.
  • Fluid supply means a reserve tank that absorbs expansion / contraction of cooling water due to temperature change, a flexible tube that connects these, and cooling water that transports heat.
  • the cooling water is a heat transport fluid that transports heat generated by a CPU (not shown), which is a heat generator, to the outside.
  • a CPU not shown
  • an ethylene glycol antifreeze is used as the cooling water.
  • a micropump act operates, cooling water will circulate through these apparatuses.
  • a liquid cooling jacket 1 is a sealing body that seals an opening 12 of a recess 11 in a jacket body 10 having a recess 11 that is partially opened while cooling water (not shown) flows. 30 is fixed by friction stir welding (see FIGS. 6 to 8).
  • the liquid cooling jacket 1 has a heat diffusion sheet at a position corresponding to a portion (a portion through which cooling water flows) where the fins 32 are arranged on the upper surface (the surface of the lid plate portion 31 of the sealing body 30) in FIG.
  • a CPU (not shown) is attached via (not shown), and receives heat generated by the CPU and exchanges heat with cooling water flowing inside. Thereby, the liquid cooling jacket 1 transmits the heat received from the CPU to the cooling water, and as a result, the CPU is efficiently cooled.
  • the heat diffusion sheet is a sheet for efficiently transferring the heat of the CPU to the jacket body 10 and is formed of a metal having high thermal conductivity such as copper, for example.
  • the jacket body 10 is a shallow box body that is open on one side (the upper side in FIG. 1 in the present embodiment), and has a rectangular shape in plan view in the present embodiment.
  • the jacket main body 10 is formed with a recess 11 having an opening at the inside thereof, and has a bottom wall 13 and a peripheral wall 14 of the recess 11.
  • Such a jacket main body 10 is produced by die casting, casting, forging or the like, for example.
  • the jacket body 10 is formed from aluminum or an aluminum alloy. Thereby, the liquid cooling jacket 1 has been reduced in weight and is easy to handle.
  • the opening 12 of the recess 11 of the jacket body 10 has a substantially rectangular shape with four corners chamfered in an arc shape.
  • a support surface 15 a is formed on the opening peripheral edge 12 a of the concave portion 11 of the jacket body 10, which is a stepped bottom surface that is lowered by one step on the bottom surface side of the concave portion 11.
  • the flange portion 17 is formed in the recess portion 11.
  • the opening portion 12 of the recess portion 11 has a substantially rectangular shape, assuming that the flange portion 17 is also a part of the recess portion 11.
  • the opening peripheral part 12a of the recessed part 11 is taken as the peripheral part of the recessed part 11 also including the collar part 17.
  • the height difference dimension H1 between the upper surface of the jacket body 10 and the support surface 15a is the same length as the thickness dimension T1 of the sealing body 30.
  • the support surface 15a is a surface which supports the sealing body 30, Comprising: The peripheral part 30a of the sealing body 30 is mounted on the support surface 15a. Further, the width W1 of the support surface 15a (the width of the portion on which the peripheral edge 30a of the sealing body 30 is placed) dimension W1 is set larger than the radial dimension R2 of the shoulder 51 of the rotary tool 50 used for friction stir welding. Has been.
  • the peripheral wall 14 around the recess 11 includes a pair of wall portions 14 a and 14 b positioned at both ends in the longitudinal direction (X-axis direction in FIG. 1) of the jacket body 10, and a short direction (see FIG. 1). 1 and a pair of wall portions 14c and 14d located at both ends in the Y-axis direction).
  • the pair of wall portions 14a and 14b both extend in the Y-axis direction and are formed in parallel to each other with a predetermined distance in the X-axis direction.
  • the pair of wall portions 14c and 14d both extend in the X-axis direction and are formed in parallel to each other at a predetermined distance in the Y-axis direction.
  • a flange 17 is formed inside the recess 11.
  • the flange portion 17 is configured by a wall body raised from the bottom wall 13 of the recess 11.
  • the height of the flange portion 17 from the bottom wall 13 is the same as the height of the support surface 15a from the bottom wall 13. That is, the upper end surface (surface of the flange portion 17) 17 a of the flange portion 17 is flush with the support surface 15 a formed on the opening peripheral edge portion 12 a of the recess 11.
  • the flange portion 17 extends from the central portion of the length in the Y-axis direction of the inner wall surface (the inner peripheral side surface on the concave portion 11 side) of one of the wall portions 14a and 14b toward the other wall portion 14b.
  • the distal end of the flange portion 17 in the extending direction (X-axis direction) is separated from the inner wall surface (the inner peripheral side surface on the concave portion 11 side) of the wall portion 14b by a predetermined distance, and the distal end of the flange portion 17 and the inner wall portion 14b A space through which the coolant flows is formed between the wall surfaces. That is, by forming the flange portion 17 inside the recess 11, a U-shaped groove (substantially recessed portion) is formed in a plan view, and the coolant flows along this U-shape.
  • Through holes 16 and 16 are formed in the wall portions 14a located at both ends of the U-shaped channel in a plan view, respectively, for allowing cooling water to flow through the recess 11.
  • the through holes 16, 16 extend in the X-axis direction, have a circular cross section, and are formed in the intermediate portion in the depth direction of the recess 11.
  • the shape, number, and formation position of the through-hole 16 are not restricted to this, It can change suitably according to the kind and flow volume of cooling water.
  • the sealing body 30 has an outer peripheral shape having the same shape as the step side surface 15b (see FIG. 1) of the jacket body 10 (in this embodiment, a substantially rectangular shape with four corners chamfered in an arc shape). And a plurality of fins 32, 32... Provided on the lower surface of the lid plate portion 31.
  • the fins 32 are provided to increase the surface area of the sealing body 30.
  • the plurality of fins 32, 32... are arranged parallel to each other and orthogonal to the lid plate portion 31, and are configured integrally with the lid plate portion 31. Thereby, heat is transmitted favorably between the cover plate portion 31 and the fins 32, 32.
  • the fins 32, 32... are arranged so as to extend in a direction (X-axis direction in FIG. 1) orthogonal to the wall portion 14a of the peripheral wall 14 in which the through holes 16, 16 are formed. ing. Since the collar part 17 is located in the center part of the Y-axis direction of the cover board part 31 at the time of mounting to the jacket main body 10, the fin is not provided.
  • the fin 32 has a height (depth) dimension (length in the Z-axis direction in FIG. 1) equivalent to the depth dimension of the recess 11 or a height (depth) dimension slightly shorter than the depth dimension of the recess 11.
  • the tip portion of the fin 32 comes into contact with the bottom surface of the recess 11 (the surface of the bottom wall 13), or a minute gap is formed between the tip portion of the fin 32 and the bottom surface of the recess 11.
  • a cylindrical space is partitioned by the cover plate portion 31 of the sealing body 30, the adjacent fins 32 and 32, and the bottom surface of the recess 11.
  • the space functions as a flow path 33 (see FIG. 5A) through which cooling water flows.
  • the fins 32, 32... Have a length dimension (length in the X-axis direction in FIG. 1) shorter than the extension length dimension of the flange portion 17, and one end thereof (the wall portion 14a side) is The inner wall surface of the wall portion 14a is separated from the inner wall surface by a predetermined distance.
  • a space between one end of the fins 32, 32... And the wall 14a is a flow path header section 34 (see FIG. 6) that connects the flow path 33 defined by the fins 32, 32 and the through hole 16. (See (a)).
  • the other end (on the wall 14b side) of the fins 32, 32... Is located at a portion corresponding to the tip of the flange part 17, and the other end of the fins 32, 32.
  • the space between the wall portion 14b constitutes a communication flow channel 35 (see FIG. 6A) that connects the flow channels 33, 33 located on both sides of the flange portion 17.
  • the sealing body 30 is also made of aluminum or an aluminum alloy, like the jacket body 10. Thereby, the liquid cooling jacket 1 has been reduced in weight and is easy to handle.
  • the sealing body 30 is manufactured by forming a cover plate portion 31 and fins 32 by cutting a block formed of aluminum or an aluminum alloy. Note that the manufacturing method is not limited to this, and for example, it may be manufactured by die casting, casting, forging, or the like, or a member having a cross-sectional shape composed of a lid plate portion 31 and a plurality of fins 32, 32. May be formed by extruding or grooving and removing both ends of the fin 32.
  • the sealing body 30 is inserted into the concave portion 11 of the jacket body 10 so that the fins 32 are on the lower side, and the peripheral portion 30a of the sealing body 30 is removed. Then, it is placed on the support surface 15a. Then, the step side surface 15b of the jacket main body 10 and the outer peripheral surface 30b of the sealing body 30 are abutted to form the abutting portion 40.
  • the temporary bonding rotary tool 60 includes a shoulder portion and a stirring pin (not shown) that are smaller in diameter than the rotary tool 50, and the plasticizing region 45 formed by the temporary bonding rotary tool 60 is a later process.
  • the width of the plasticized region 41 (see FIG. 6B) formed by the rotary tool 50 is smaller.
  • region 45 is formed in the position (The position where the center of the width direction of the plasticization area
  • the plasticizing region 45 in the temporary joining is completely covered with the plasticizing region 41, so that the trace of the extraction of the temporary joining rotary tool 60 remaining in the plasticizing region 45 and the trace of the plasticizing region 45 are present. Does not remain.
  • the abutting portion 40 has a substantially rectangular shape (rectangular frame shape) with four corners chamfered in an arc shape.
  • the step of temporarily joining the abutting portion 40 with the temporary joining rotary tool 60 after diagonally joining the one chamfered diagonals 44a and 44b of the abutting portion 40 first, the other chamfered diagonal 44c, 44d is temporarily joined.
  • the sealing body 30 can be temporarily joined to the jacket body 10 in a well-balanced manner, and the positioning accuracy of the sealing body 30 with respect to the jacket body 10 is improved. Deformation can be prevented.
  • the extraction trace 61 (refer FIG.6 (b)) remains, but it leaves in this embodiment. Keep it.
  • the process of temporarily joining the sealing body 30 is not limited to the above procedures, and may be performed by other procedures. That is, in the above procedure, the corners of the rectangular abutting portion 40 are friction stir welded, whereas the intermediate portions of each side are linearly joined by friction stir welding.
  • the abutting portion 40 has a substantially rectangular shape (rectangular frame shape), and in the step of temporarily joining the abutting portion 40 with the temporary joining rotary tool 60, The intermediate portions 46a and 46b of one opposite side 46 and 46 of the part 40 are temporarily joined first, and then the intermediate portions 47a and 47b of the other opposite side 47 and 47 are temporarily joined.
  • the plasticizing regions 48 formed by the temporary bonding rotary tool 60 are linearly formed with the same length. Moreover, the plasticization area
  • the main joining with the rotary tool 50 is performed.
  • a jig (not shown) surrounding the jacket body 10 from four directions is applied in advance to the outer peripheral surface of the peripheral wall 14 of the jacket body 10. According to this, the thickness of the peripheral wall 14 is thin, and the distance (gap) between the outer peripheral surface of the shoulder 51 (see FIG.
  • the rotary tool 50 is made of a metal material that is harder than the jacket body 10 and the sealing body 30, and has a columnar shoulder 51 and a lower end surface of the shoulder 51, as shown in FIG.
  • a projecting stirring pin (probe) 52 is provided.
  • the dimensions and shape of the rotary tool 50 are set according to the material and thickness of the jacket body 10 and the sealing body 30.
  • the stirring pin 52 has a truncated cone shape with a reduced diameter at the lower portion, and the protruding length dimension L1 is equal to or greater than the thickness dimension T1 of the lid plate portion 31 of the sealing body 30. .
  • the tip of the shoulder portion 51 of the rotary tool 50 is pushed a predetermined depth from the surfaces of the jacket body 10 and the sealing body 30, and the tip of the stirring pin 52 penetrates the support surface 15a. Further, the radial dimension R2 of the shoulder portion 51 is smaller than the width dimension H1 of the support surface 15a.
  • the rotational speed of the rotary tool 50 is 500 to 15000 (rpm)
  • the feed speed is 0.05 to 2 (m / min)
  • the pushing force for pressing the abutting portion 40 is about 1 to 20 (kN).
  • the sealing body 30 is appropriately selected according to the material, plate thickness, and shape.
  • a stirring blade 58 is formed in a spiral shape so as to enhance the stirring effect.
  • a spiral ridge 59a is formed on the bottom surface of the shoulder portion 51.
  • the spiral ridge 59a surrounds the periphery of the base of the stirring pin 52 and spreads in a spiral, and a spiral metal reservoir 59b is formed between adjacent spiral ridges 59a.
  • the stirring blade 58, the spiral ridge 59a, and the metal reservoir 59b are illustrated only in FIG. 5, and are not illustrated in FIGS. 3 and 4 to prevent complication of the drawings.
  • the spiral protrusion 59a has a winding direction determined according to the rotation direction of the rotary tool 50, and is a winding direction in which the plastic fluidized metal flows to the stirring pin 52 side. Since the plastic fluidized metal is caused to flow toward the stirring pin 52, the efficiency of friction stirring can be increased. In addition, what is necessary is just to set suitably the length of the spiral protruding item
  • the rotary tool 50 is inserted into the insertion position 53 while rotating.
  • the insertion position 53 of the rotary tool 50 is the upper surface of the peripheral wall 14 that is outside the abutting portion 40.
  • a pilot hole (not shown) may be formed in advance at the insertion position 53 of the rotary tool 50. If it does in this way, the insertion time (pressing time) of the rotation tool 50 can be shortened.
  • the rotating tool 50 is moved while being rotated from the insertion position 53 to a position directly above the abutting portion 40 (a position where the axis of the rotating tool 50 is located on the abutting portion 40).
  • the moving direction is changed so that the center (axial center) of the rotating tool 50 moves along the abutting portion 40, and the rotating tool 50 is moved.
  • the rotary tool 50 is positioned such that the sealing body 30 is positioned on the flow side 50a where the rotary tool 50 rotates in the direction opposite to the moving direction of the rotary tool 50 (see arrow Y1 in FIGS. 6 and 7).
  • the rotation direction (spinning direction) of the rotary tool 50 in the abutting portion 40 is set to be the same direction as the moving direction (revolution direction). That is, in this embodiment, as shown in FIG. 6B, the rotary tool 50 is moved clockwise with respect to the opening 12 of the recess 11 (see FIG. 6A), The tool 50 is rotated clockwise (see arrow Y2 in FIGS. 6 and 7). When the rotary tool 50 is moved counterclockwise with respect to the opening 12 of the recess 11, the rotary tool 50 is rotated counterclockwise.
  • the relative speed of the outer periphery of the rotary tool 50 with respect to the sealing body 30 is a value obtained by subtracting the magnitude of the moving speed from the magnitude of the tangential speed on the outer periphery of the rotary tool 50 (sealing body).
  • 30 is the flow side 50a)
  • the speed is lower than the shear side 50b in which the rotary tool 50 rotates in the same direction as the moving direction of the rotary tool 50.
  • a cavity defect hardly occurs on the sealing body 30 side.
  • the shear side 50b is located in the thick part of the jacket main body 10 near the outer side of the abutting part 40, it does not fall into a metal shortage.
  • the plastically fluidized metal flows toward the stirring pin 52, so that the metal does not run short, and the efficiency of friction stirring can be improved. it can.
  • the stirring pin 52 of the rotary tool 50 has a length dimension L1 longer than the thickness dimension T1 of the sealing body 30.
  • the leading end penetrates through the support surface 15 a and enters the inner side of the jacket body 10.
  • the distal end portion (lower end portion) of the plasticizing region 41 formed by the rotary tool 50 is formed so as to penetrate deeply into the inner side of the jacket main body 10.
  • the “plasticization region” includes both a state in which the rotary tool 50 is heated by frictional heat and is actually plasticized, and a state in which the rotary tool 50 passes and returns to room temperature.
  • the rotation and movement of the rotary tool 50 are continued, and as shown in FIG. 7A, the rotary tool 50 is rotated around the opening portion 12 along the abutting portion 40 to form the plasticized region 41.
  • the rotary tool 50 is rotated around the opening portion 12 along the abutting portion 40 to form the plasticized region 41.
  • the rotary tool along the start end including the start end 54a of the first turn (a portion from the start end 54a to a position advanced by a predetermined length in the moving direction of the rotary tool 50 (the same position as the end end 54b)). 50 is moved by a predetermined length. Accordingly, the start end 54a and the end end 54b in the circumferential movement of the rotary tool 50 overlap each other, and a part of the plasticizing region 41 is configured to overlap.
  • the rotary tool 50 is further rotated once to be referred to as a plasticization region (hereinafter referred to as “second plasticization region”). 43).
  • the rotary tool 50 is shifted to the outer peripheral side of the plasticizing region 41 formed by the movement in the first round from the end 54b of the first round.
  • the shift of the rotary tool 50 moves diagonally so as to move outward in the moving direction, and the inner end of the second movement trajectory (plasticization region 43) of the rotary tool 50
  • the first movement trajectory (plasticization region 41) is located on the center line (butting portion 40) or slightly outside the center line.
  • the rotary tool 50 moves in parallel while maintaining a certain positional relationship with the movement locus (plasticization region 41) of the first round. Therefore, the outer peripheral side portion of the movement track of the first round is re-stirred by the movement of the second round of the rotary tool 50 (see FIGS. 7 and 8).
  • the cavity defect is eliminated because it is re-stirred.
  • the shear side 50b of the rotary tool 50 in the second round of movement is located in the thick part of the jacket body 10 near the outside of the abutting part 40, there is no shortage of metal. Furthermore, even if a cavity defect occurs, there is no problem because the position is away from the abutting portion 40.
  • the second round movement of the rotary tool 50 is the same as the first round rotation direction, rotation speed, movement direction, movement speed, and pushing amount (see arrows Y3 and Y4 in FIGS. 7 and 8). .
  • the rotation speed, movement speed, push-in amount, and the like of the second rotation tool 50 may be changed as appropriate according to the shape and material of the jacket body 10 and the sealing body 30.
  • the stirring pin 52 of the rotary tool 50 has a length dimension L1 (see FIG. 3A) that is a thickness dimension T1 of the sealing body 30. Since the length is longer than that (see (a) of FIG. 3), the tip of the stirring pin 52 enters the inner side of the jacket body 10. As a result, the distal end portion (lower end portion) of the second plasticizing region 43 formed by the second movement of the rotary tool 50 is formed so as to penetrate deeply into the interior of the jacket body 10.
  • the rotary tool 50 is inserted into the insertion position 56 at the distal end of the flange portion 17 while rotating.
  • a pilot hole (not shown) may be formed in advance at the insertion position 56 of the rotary tool 50. If it does in this way, the insertion time (pressing time) of the rotation tool 50 can be shortened.
  • the rotating tool 50 is moved from the insertion position 56 to the outside of the abutting portion 40 while being rotated along the flange portion 17 to form the plasticized region 49.
  • the rotation of the rotary tool 50 advances and frictional stirring is performed up to the inner peripheral side end of the plasticizing region 41, the rotary tool 50 enters the plasticizing region 41 as it is, and then continues from the plasticizing region 41 to the second plasticizing region 43. Move to. Thereafter, the rotary tool 50 is moved from the outer peripheral side end of the second plasticizing region 43 to the upper surface of the peripheral wall 14 that is outside, and the rotary tool 50 is pulled out at that position (pulling position 57).
  • the extraction position 57 of the rotary tool 50 is located outside the abutting portion 40, so that the extraction trace (not shown) of the stirring pin 52 (see FIG. 4A) abuts.
  • the portion 40 is not formed.
  • the rotary tool 50 moves linearly (see arrow Y5 in FIG. 8B) from the insertion position 56 to the pulling position 57 along the flange portion 17.
  • the rotation direction autorotation direction
  • the rotation speed the rotation speed
  • the movement direction the movement direction, and the pushing amount are constant.
  • the rotation direction may be either left rotation or right rotation.
  • the tip of the stirring pin 52 of the rotary tool 50 is the flange portion 17.
  • the inside of the jacket body 10 enters the back side.
  • the distal end portion (lower end portion) of the plasticizing region 49 formed by the rotary tool 50 is formed so as to enter the inner back side of the jacket main body 10.
  • the rotary tool 50 is rotated around the opening 12 of the recess 11 along the abutting portion 40 and friction stir welding is performed to form the plasticized region 41 and the second plasticized region 43. Further, the rotating tool 50 is moved along the flange portion 17 to perform friction stir welding to form the plasticized region 49, and the joined body 1 ′ (see FIG. 8 and FIG. 10) is formed.
  • press correction is performed by placing the joined body 1 ′ on the support base 70 and pressing the central portion 20 downward from above.
  • the support base 70 is manufactured as a mold when the liquid cooling jacket 1 is mass-produced.
  • the support base 70 is a shallow box that is large enough to accommodate the joined body 1 ′ and has an upper opening.
  • the support base 70 has a rectangular shape in plan view.
  • the support base 70 has a recess 71 whose top is open.
  • the opening 72 of the recess 71 has a rectangular shape that is slightly larger than the outer peripheral surface of the joined body 1 ′, and the joined body 1 ′ can be accommodated in the recessed portion 71.
  • a support surface 73 formed of a step bottom surface that is stepped down by one step on the bottom surface side is formed inside the recess 71.
  • the support surface 73 is formed to extend inward from the inner peripheral surface of the recess 71.
  • the support surface 73 has a width capable of supporting the peripheral edge of the joined body 1 ′.
  • the joined body 1 ′ is placed on the support base 70 in a state where the sealing body 30 faces downward (in a state where the central portion is warped upward).
  • the periphery of the joined body 1 ′ is supported from below by the support surface 73. Since the joined body 1 ′ is deformed with the central portion 20 warped upward, at the time when the joined body 1 ′ is installed, depending on the deformed state, the four corners of the joined body 1 ′, or the four corners. It is supported on the support surface 73 at three points.
  • the center portion 20 (see FIG. 11) where the diagonal lines of the jacket body 10 intersect is pressed downward.
  • the central portion 20 of the jacket body 10 is pressed by the pressing body 75, the joined body 1 ′ is deformed and the central portion 20 is lowered downward.
  • the entire joined body 1 ′ is pushed downward to be deformed, so even if it is in a three-point support state before pressing, the transition to four-point support is performed, and the joined body is started from the middle.
  • the support surface 73 is supported over the entire circumference of the 1 ′ outer peripheral surface.
  • the joined body 1 ′ When the joined body 1 ′ is viewed in the cross-sectional direction, the lower surface of both ends is supported by the outer fulcrum, and the inner fulcrum of the upper surface of the central portion is pressed downward, and in principle, the state is similar to that of three-point bending. At this time, since the joined body 1 ′ tries to return to the original shape (the shape warped upward) by the spring back, it is pressed to a position where the central portion 20 warps downward as compared with the flat state (in the figure, two (Indicated by a dotted line).
  • the joined body 1 ′ 10 formed along the steps of the present embodiment has a state in which the central portion 20 is approximately 0.9 mm upward.
  • the vertical axis represents the pressing load and the horizontal axis represents the downward displacement of the joined body 1 ′.
  • the numerical value of the displacement amount is a negative value when the joined body 1 ′ is 0 mm when flat and the central portion 20 is warped upward compared to the peripheral portion, and the central portion 20 warps downward.
  • a pressing load of 25 kN may be applied downward, and the pressing may be stopped when the central portion 20 is deformed downward by 2.65 mm. Note that the pressing load and the amount of displacement at which the joined body 1 ′ returns to the flat state vary depending on the shape of the joined body 1 ′, and thus are determined by performing appropriate tests.
  • the production of the liquid cooling jacket 1 is completed.
  • the manufacturing method of the liquid cooling jacket of the present embodiment since the joined body 1 ′ is press-corrected after the friction stir welding process, deformation during the friction stir welding can be allowed. Therefore, it is not necessary to cool the jacket main body 10 during the friction stir welding. That is, according to the manufacturing method of the liquid cooling jacket of this embodiment, complication of the friction stir welding operation can be prevented, and the operation can be facilitated.
  • the joined body 1 ′ is arranged so that the sealing body 30 faces downward, and the periphery of the joined body 1 ′ is supported from the lower side by the support base 70, and the jacket body 10.
  • the central portion 20 where the diagonal lines intersect with each other downward the jacket body 10 is supported from the lower side at both ends as viewed in the cross-sectional direction, and the central portion 20 is pressed downward.
  • the central portion 20 is pressed downward.
  • the distance from the central pressing point to the support points at both ends becomes equal to the left and right.
  • the pressing load is transmitted to the jacket body 10 and the sealing body 30 in a well-balanced manner, and the left and right are deformed evenly.
  • the joined body 1 ′ is not deformed locally, and the whole can be corrected to be flat. Further, when the central portion 20 is pressed, the flange portion 17 is pressed, so that it becomes easy to transmit a pressing load to the sealing body 30. Even when the flanges are formed in a plurality of rows and the flanges are not located at the center, it is preferable to press the center in consideration of the balance of deformation of the joined body 1 ′.
  • the joined body 1 ′ can be flattened after the pressing is completed.
  • the central portion 20 of the joined body 1 ′ is pressed intensively, so that the press load can be reduced.
  • the rotary tool 50 including the stirring pin 52 having the length dimension L1 larger than the thickness dimension T1 of the sealing body 30 is used. Since the friction stir welding is performed, the tip portions of the plasticized regions 41, 43, and 46 are formed so as to enter the deep part inside the jacket body 10. Thereby, the abutting portion 40 between the jacket main body 10 and the sealing body 30 can be reliably friction stir welded, and a liquid-cooled jacket excellent in water tightness can be manufactured.
  • the width dimension W1 of the support surface 15a is larger than the radius dimension R2 of the shoulder portion 51 of the rotary tool 50, when the first rotation of the rotary tool 50 is moved directly above the abutting portion 40, A plasticized region 41 can be formed in the support surface 15a. Accordingly, since the plasticized region 41 is not exposed on the inner side surface of the concave portion 11, the support surface 15a is not lowered toward the bottom wall 13 of the concave portion 11, and the pushing force of the rotary tool 50 is reliably supported by the support surface 15a. be able to. Therefore, since the sealing body 30 is supported by the support surface 15a, the pressing force of the rotary tool 50 is not applied downward to the sealing body 30, and the sealing body 30 is not deformed.
  • a flange 17 having a surface 17a flush with the support surface 15a is formed inside the recess 11, and a plasticized region 49 is formed along the flange 17, so that the sealing body 30 is By joining to the part 17, even when the recessed part 11 is large area, the sealing body 30 is supported planarly on the support surface 15a and the surface 17a of the collar part 17. FIG. Thereby, the planarity of the sealing body 30 is maintained, and deformation of the sealing body 30 can be suppressed. Furthermore, even if the sealing body 30 is deformed by friction stir welding around the opening 12 of the jacket body 10, the sealing body 30 and the flange portion 17 are joined in a later step. Thereby, the deformation
  • the width dimension W2 of the flange part 17 is larger than the diameter dimension R1 of the shoulder part 51 of the rotary tool 50, when the rotary tool 50 is moved directly above the flange part 17, the plasticizing region 49 is formed. It can be formed in the surface 17 a of the flange 15. Accordingly, since the plasticized region 49 is not exposed on the side surface of the flange portion 17, the surface 17 a of the flange portion 17 does not fall to the bottom wall 13 side of the recess 11, and the pushing force of the rotary tool 50 is surely secured by the flange portion 17. Can be supported. Therefore, since the sealing body 30 is supported by the surface 17a of the flange portion 17, the pressing force of the rotary tool 50 is not applied downward to the sealing body 30, and the sealing body 30 is not deformed.
  • the thin sealing body 30 becomes the flow side 50a, and the sealing body 30 side Is difficult to generate cavity defects.
  • the jacket main body 10 becomes the shear side 50b
  • the jacket main body 10 is thick, even if the relative speed of the outer periphery of the rotary tool 50 with respect to the jacket main body 10 is high, there is no shortage of metal. Therefore, it is possible to prevent the occurrence of cavity defects due to lack of metal in the abutting portion, and it is possible to prevent the bonding strength of the abutting portion 40 from being lowered. And even if a cavity defect should occur, it will occur at a position away from the abutment 40 and away from the flow path of the heat transport fluid. It hardly leaks from the flow path to the outside and does not affect the sealing performance of the joint.
  • a part of the abutting portion 40 is temporarily joined using the temporary joining rotary tool 60.
  • the sealing body 30 does not move, it becomes easy to join, and the positioning accuracy of the sealing body 30 with respect to the jacket body 10 is improved.
  • the temporary joining rotary tool 60 is smaller than the main joining rotary tool 50, the main joining rotary tool 50 is merely moved and frictionally stirred on the plasticized region 45 formed by the temporary joining.
  • the extraction traces of the plasticized region 45 and the rotary tool 60 are covered, and the main joining is finished.
  • the abutting portion 40 has a rectangular frame shape, and after temporarily joining one diagonal 44a, 44b of the abutting portion 40 in the step of temporarily joining the abutting portion 40 with the temporary joining rotary tool 60, Since the other diagonals 44c and 44d are temporarily joined together, the sealing body 30 can be temporarily joined with good balance, and the positioning accuracy of the sealing body 30 with respect to the jacket body 10 is further improved.
  • the plasticizing region 41 since the plasticizing region 41 partially overlaps at the start end 54a and the terminal end 54b in the circumferential movement of the rotary tool 50, the plasticizing region is formed in the opening peripheral portion 12a of the recess 11. There is no portion where 41 is interrupted. Therefore, the peripheral wall 14 of the jacket main body 10 and the sealing body 30 can be favorably joined, and the heat transport fluid does not leak to the outside, so that the sealing performance of the joint can be improved.
  • the manufacturing method of the liquid cooling jacket which concerns on 2nd Embodiment is demonstrated with reference to FIG. 14 and FIG.
  • the manufacturing method of the liquid cooling jacket of the second embodiment is different from the first embodiment in the shape of the press device used in the correction process.
  • the press device 80 includes a lower mold 81 that supports the jacket body 10 to which the sealing body 30 is bonded, and an upper mold 86 that presses the jacket body 10.
  • the lower mold 81 includes a pressing surface 82 having an area larger than the projected area of the jacket body 10
  • the upper mold 86 includes a pressing surface 87 having an area larger than the projected area of the jacket body 10.
  • the pressing surface 82 of the lower die 81 is formed in a concave shape with the central portion recessed downward, and the pressing surface 87 of the upper die 86 protrudes downward in the central portion. It is formed in a convex shape.
  • the joined body 1 ′ is placed on the pressing surface 82 in a state where the central portion is warped upward (a state where the sealing body 30 faces the lower concave surface).
  • the concave surface of the pressing surface 82 and the convex surface of the pressing surface 87 have the same radius of curvature, and have a curvature that meshes with each other.
  • the curvature radius of the convex surface and the concave surface is set so that the numerical value becomes (for example, 2.65 mm in the example of the joined body 1 ′ in the first embodiment).
  • a press apparatus 80 ' as shown in FIG.
  • the pressing surface 82 ′ of the lower mold 81 ′ is formed in a convex shape with the central portion protruding upward, and the pressing surface 87 ′ of the upper mold 86 ′ is recessed upward in the central portion. It is formed in a concave shape.
  • the joined body 1 ′ is placed on the pressing surface 82 ′ in a state where the center part is warped downward (a state where the sealing body 30 faces the upper concave surface).
  • the convex surface of the pressing surface 82 ′ and the concave surface of the pressing surface 87 ′ have the same radius of curvature and have a curvature that meshes with each other.
  • the central portion 20 of the joined body 1 ′ warps upward, but the upward displacement amount is flat when the joined body 1 ′ springs back after releasing the pressing load.
  • the curvature radii of the convex surface and the concave surface are set so that the numerical values are as follows.
  • the jacket main body 10 to which the sealing body 30 is bonded can also be flattened by the press devices 80 and 80 ′ having such a configuration. Furthermore, according to the press devices 80 and 80 ', the jacket main body 10 and the sealing body 30 can be supported in a stable state, and the entire surface thereof can be pressed. Therefore, regardless of the position of the concave portion or the collar portion of the jacket main body 10, even when the concave portion or the collar portion is disposed at a position deviated from the central portion, the press correction can be performed with high accuracy, and the joined body 1 ′ can be Can be flattened. Further, even when the shape of the joined body 1 ′ is different from the rectangle, press correction can be performed, and versatility is improved.
  • the burrs are not sandwiched between the jacket body 10 and the pressing surfaces 87, 87 ′ or the pressing surfaces 82, 82 ′ at the time of pressing, and may be locally deformed. It is possible to prevent the burr from biting into the surface and causing scratches.
  • the joined body 1 ′ has a substantially rectangular shape in plan view, but is not limited thereto, and may be another shape such as a square, a polygon, or a circle. In this case, the shape of the support for supporting the joined body 1 ′ is changed as appropriate.
  • the fin 32 provided in the sealing body 30 may be a separate body from the lid plate portion.
  • the fin 32 may be separately housed in the recess 11 or provided integrally with the jacket body. Yes.
  • the collar part 17 is extended from the one wall part 14a to the other wall part 14b and formed in one place, it is not limited to this, A plurality is formed. You may do it. In this case, a plurality of ridges extending from one wall portion to the other wall portion may be formed, or at least one ridge portion may be formed on each of a pair of wall portions facing each other to cool the ridge portion. You may comprise so that the flow path through which water flows may meander.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Pressure Welding/Diffusion-Bonding (AREA)
  • Straightening Metal Sheet-Like Bodies (AREA)

Abstract

La présente invention concerne un procédé de fabrication d'une chemise de refroidissement à circulation liquide comportant : une étape de mise en place, dans laquelle un corps de fermeture (30) est placé sur une surface de support (15a) comportant la surface inférieure d'une partie étagée qui est formée au niveau de la partie de bord d'ouverture (12a) d'une partie évidée (11) d'un corps principal de chemise (10) et qui est inférieure à la surface du corps principal de chemise (10), et sur la surface (17a) d'une partie à nervure (17) qui est au même niveau que cette surface de support (15a), et la surface latérale (15b) de la partie étagée du corps principal de chemise (10) et la surface périphérique extérieure (30b) du corps de fermeture (30) étant mises en butée l'une par rapport à l'autre ; une étape de soudage par friction malaxage, dans laquelle le corps de fermeture (30) est soudé par friction malaxage au corps principal de chemise (10) pour former un corps soudé (1') en effectuant un circuit avec un outil rotatif (50), comportant une baguette agitatrice (52) ayant une longueur (L1) supérieure à l'épaisseur (T1) du corps de fermeture (30), le long de la partie de mise en butée (40) entre la surface latérale (15b) de la partie étagée du corps principal de chemise (10) et la surface périphérique extérieure (30b) du corps de fermeture (30), et par le déplacement de l'outil rotatif le long de la partie à nervure (17) au niveau de la surface du corps de fermeture (30) ; et une étape de dressage, dans laquelle le corps soudé (1') est dressé à la presse.
PCT/JP2012/070196 2011-12-19 2012-08-08 Procédé de fabrication d'une chemise de refroidissement à circulation liquide WO2013094246A1 (fr)

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JP6484521B2 (ja) * 2015-07-17 2019-03-13 株式会社神戸製鋼所 平面度矯正装置
CN105710163A (zh) * 2016-04-21 2016-06-29 中船黄埔文冲船舶有限公司 一种船体火工矫正辅助工装
CN107716614B (zh) * 2017-08-24 2019-06-28 武船重型工程股份有限公司 一种u肋板单元的机械矫正方法
CN109014743A (zh) * 2018-09-28 2018-12-18 中船黄埔文冲船舶有限公司 一种用于板材的加强排安装辅助工装
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