WO2013053622A1 - Fil de scie - Google Patents

Fil de scie Download PDF

Info

Publication number
WO2013053622A1
WO2013053622A1 PCT/EP2012/069459 EP2012069459W WO2013053622A1 WO 2013053622 A1 WO2013053622 A1 WO 2013053622A1 EP 2012069459 W EP2012069459 W EP 2012069459W WO 2013053622 A1 WO2013053622 A1 WO 2013053622A1
Authority
WO
WIPO (PCT)
Prior art keywords
wire
steel wire
manufacturing
saw according
reduction
Prior art date
Application number
PCT/EP2012/069459
Other languages
English (en)
Inventor
Kurt VAN RYSSELBERGE
Fei Wang
Binhai TAO
Wim Van Vooren
Original Assignee
Nv Bekaert Sa
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nv Bekaert Sa filed Critical Nv Bekaert Sa
Priority to CN201280049991.1A priority Critical patent/CN103874552B/zh
Publication of WO2013053622A1 publication Critical patent/WO2013053622A1/fr

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23D—PLANING; SLOTTING; SHEARING; BROACHING; SAWING; FILING; SCRAPING; LIKE OPERATIONS FOR WORKING METAL BY REMOVING MATERIAL, NOT OTHERWISE PROVIDED FOR
    • B23D61/00—Tools for sawing machines or sawing devices; Clamping devices for these tools
    • B23D61/18—Sawing tools of special type, e.g. wire saw strands, saw blades or saw wire equipped with diamonds or other abrasive particles in selected individual positions
    • B23D61/185—Saw wires; Saw cables; Twisted saw strips
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B21—MECHANICAL METAL-WORKING WITHOUT ESSENTIALLY REMOVING MATERIAL; PUNCHING METAL
    • B21C—MANUFACTURE OF METAL SHEETS, WIRE, RODS, TUBES OR PROFILES, OTHERWISE THAN BY ROLLING; AUXILIARY OPERATIONS USED IN CONNECTION WITH METAL-WORKING WITHOUT ESSENTIALLY REMOVING MATERIAL
    • B21C1/00—Manufacture of metal sheets, metal wire, metal rods, metal tubes by drawing
    • B21C1/003—Drawing materials of special alloys so far as the composition of the alloy requires or permits special drawing methods or sequences
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B21—MECHANICAL METAL-WORKING WITHOUT ESSENTIALLY REMOVING MATERIAL; PUNCHING METAL
    • B21C—MANUFACTURE OF METAL SHEETS, WIRE, RODS, TUBES OR PROFILES, OTHERWISE THAN BY ROLLING; AUXILIARY OPERATIONS USED IN CONNECTION WITH METAL-WORKING WITHOUT ESSENTIALLY REMOVING MATERIAL
    • B21C1/00—Manufacture of metal sheets, metal wire, metal rods, metal tubes by drawing
    • B21C1/02—Drawing metal wire or like flexible metallic material by drawing machines or apparatus in which the drawing action is effected by drums
    • B21C1/04—Drawing metal wire or like flexible metallic material by drawing machines or apparatus in which the drawing action is effected by drums with two or more dies operating in series
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B21—MECHANICAL METAL-WORKING WITHOUT ESSENTIALLY REMOVING MATERIAL; PUNCHING METAL
    • B21C—MANUFACTURE OF METAL SHEETS, WIRE, RODS, TUBES OR PROFILES, OTHERWISE THAN BY ROLLING; AUXILIARY OPERATIONS USED IN CONNECTION WITH METAL-WORKING WITHOUT ESSENTIALLY REMOVING MATERIAL
    • B21C3/00—Profiling tools for metal drawing; Combinations of dies and mandrels
    • B21C3/02—Dies; Selection of material therefor; Cleaning thereof
    • B21C3/04—Dies; Selection of material therefor; Cleaning thereof with non-adjustable section
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B21—MECHANICAL METAL-WORKING WITHOUT ESSENTIALLY REMOVING MATERIAL; PUNCHING METAL
    • B21C—MANUFACTURE OF METAL SHEETS, WIRE, RODS, TUBES OR PROFILES, OTHERWISE THAN BY ROLLING; AUXILIARY OPERATIONS USED IN CONNECTION WITH METAL-WORKING WITHOUT ESSENTIALLY REMOVING MATERIAL
    • B21C9/00—Cooling, heating or lubricating drawing material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B21—MECHANICAL METAL-WORKING WITHOUT ESSENTIALLY REMOVING MATERIAL; PUNCHING METAL
    • B21C—MANUFACTURE OF METAL SHEETS, WIRE, RODS, TUBES OR PROFILES, OTHERWISE THAN BY ROLLING; AUXILIARY OPERATIONS USED IN CONNECTION WITH METAL-WORKING WITHOUT ESSENTIALLY REMOVING MATERIAL
    • B21C9/00—Cooling, heating or lubricating drawing material
    • B21C9/005—Cold application of the lubricant
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23D—PLANING; SLOTTING; SHEARING; BROACHING; SAWING; FILING; SCRAPING; LIKE OPERATIONS FOR WORKING METAL BY REMOVING MATERIAL, NOT OTHERWISE PROVIDED FOR
    • B23D65/00—Making tools for sawing machines or sawing devices for use in cutting any kind of material
    • C—CHEMISTRY; METALLURGY
    • C21—METALLURGY OF IRON
    • C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
    • C21D11/00—Process control or regulation for heat treatments
    • C21D11/005—Process control or regulation for heat treatments for cooling
    • C—CHEMISTRY; METALLURGY
    • C21—METALLURGY OF IRON
    • C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
    • C21D9/00—Heat treatment, e.g. annealing, hardening, quenching or tempering, adapted for particular articles; Furnaces therefor
    • C21D9/52—Heat treatment, e.g. annealing, hardening, quenching or tempering, adapted for particular articles; Furnaces therefor for wires; for strips ; for rods of unlimited length
    • C21D9/54—Furnaces for treating strips or wire
    • C21D9/56—Continuous furnaces for strip or wire
    • C21D9/562—Details
    • C21D9/564—Tension control
    • C—CHEMISTRY; METALLURGY
    • C21—METALLURGY OF IRON
    • C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
    • C21D9/00—Heat treatment, e.g. annealing, hardening, quenching or tempering, adapted for particular articles; Furnaces therefor
    • C21D9/52—Heat treatment, e.g. annealing, hardening, quenching or tempering, adapted for particular articles; Furnaces therefor for wires; for strips ; for rods of unlimited length
    • C21D9/54—Furnaces for treating strips or wire
    • C21D9/56—Continuous furnaces for strip or wire
    • C21D9/573—Continuous furnaces for strip or wire with cooling
    • C21D9/5732—Continuous furnaces for strip or wire with cooling of wires; of rods

Definitions

  • This invention relates to a steel wire for use in a wire saw to cut
  • This invention also provides the method and the apparatus to manufacture high yield strength steel wire for wire saw.
  • Semiconductor wafers are generally prepared from a single crystal ingot, such as a silicon ingot, that is cylindrical in shape.
  • the ingot is sliced in a direction vertical to its longitudinal axis to produce as many as several hundred thin, disk-shaped wafers.
  • the slicing operation may be
  • a wire saw wherein the ingot is contacted with a reciprocating or unidirectional moving wire while liquid slurry containing abrasive grains is supplied to a contact area between the ingot and the wire.
  • liquid slurry containing abrasive grains is supplied to a contact area between the ingot and the wire.
  • silicon crystal chips are removed and the ingot is gradually sliced.
  • the wire saw provides a gentle mechanical method for slicing and makes it ideal for cutting silicon crystal, which is brittle and could be damaged by other types of saws.
  • Prior art US5189897A discloses a method and apparatus for drawing a steel wire.
  • the wire is drawn through a plurality of standard dies in a wire drawing machine.
  • the cross section of the wire is reduced by a constant reduction of about 15% to about 18% at each of the standard dies with the exception of the final two dies.
  • the wire is then reduced by about 10% to about 90% of the typical reduction at the next to last die and the remainder of the reduction at the final die.
  • a substantial concern when slicing semiconductor ingots is maintaining flatness of the wafers that are cut by the wire saw.
  • One key to avoiding thickness variation and saw marks on the wafer surface is controlling the straightness of the steel wire during cutting. Accordingly, improvement on the straightness of the steel wire helps to improve the wafer quality.
  • a high yield strength steel wire for use in a wire saw is characterized in that the ratio of Rp0.2/Rm is no less than 96%, and preferably no less than 97%
  • a high yield strength steel wire for use in a wire saw is characterized in that the ratio of Rp0.05/Rm is no less than 80% and preferably no less than 85%.
  • a high yield strength steel wire for use in a wire saw wherein the residual stress is between -40mm to 40mm, preferably between -20mm to 20mm, and more preferably between -20mm to 0 mm.
  • a method of manufacturing a steel wire for use in a wire saw comprises the steps of:
  • a method of manufacturing a steel wire for use in a wire saw wherein the reduction at the final die is preferably about 17% to about 21 %.
  • a method of manufacturing a steel wire for use in a wire saw wherein the reduction at each of the plurality of standard dies is preferably about 10% to about 18%.
  • a method of manufacturing a steel wire for use in wire saw wherein the angle of the last 5 dies is not larger than 8 degrees.
  • a method of manufacturing a steel wire for use in wire saw wherein the wire is heated to a temperature Tp °C for Tm seconds while being tensioned at between 50% and 85%, and preferably between 60% and 80%, of its breaking load.
  • the temperature Tp and the time Tm for heat treatment comply to following function, 90 ⁇ Tp ⁇ Tm ⁇ 250, and preferably to 100 ⁇ Tp ⁇ Tm ⁇ 180.
  • Tp ⁇ Tm reflects the heat transferred to the wire in the heat treatment. If Tp ⁇ Tm is less than 90, the heat is not enough to maintain the high ratio of Rp0.2/Rm and Rp0.05/Rm. If Tp x Tm is more than 250, the heat is more than needed and will decrease the Rm of the wire.
  • a method of manufacturing a steel wire for use in a wire saw wherein the final wire goes through a wire straightener before the final drive capstan.
  • an apparatus for manufacturing a steel wire for use in wire saw comprises :
  • each of said plurality of standard dies reduces the cross section of the wire by a reduction of about 8% to about 20%; and using one of the following specific methods or combinations thereof : c. (1 ) said final die reduces the cross section of the wire by a final
  • an apparatus for manufacturing a steel wire for use in wire saw wherein the reduction at the final die is preferable about 17% to about 21 %.
  • an apparatus for manufacturing a steel wire for use in wire saw wherein the reduction at each of the plurality of standard dies is preferable about 10% to about 18%.
  • an apparatus for manufacturing a steel wire for use in wire saw wherein a wire straightener is located between the final die and the final drive capstan.
  • an apparatus for manufacturing a steel wire for use in wire saw wherein the final die is located on the interface between the cooling lubricant and the air.
  • FIG 1 is a schematic illustration showing an apparatus for
  • FIG 2 is a schematic illustration showing another apparatus for
  • Figure 3 is a schematic illustration showing the method to test residual stress.
  • Figure 4 is a schematic illustration showing a drawing process in a drawing die.
  • FIG 1 is a schematic illustration showing an apparatus 10 for
  • the apparatus 10 includes a cooling lubricant tank 1 1 filled with a liquid cooling lubricant 1 1 c, multistage drive capstans 12A and 12B disposed in the liquid cooling lubricant 1 1 c, a plurality of drawing dies 14, final drawing die 15 located on the interface between the liquid cooling lubricant 1 1 c and the air, i.e. side wall of the tank 12, and a final drive capstan 16.
  • the process to manufacturing a steel wire for use in a wire saw according to present invention includes following.
  • a brass- coated steel wire 13 is alternately passed between and engaged with each stage of two multistage drive capstans 12A and 12B which are disposed opposite to each other in a liquid cooling lubricant 1 1 c in a cooling lubricant tank 1 1.
  • the wire is drawn by drawing dies 14 in their respective stages.
  • the brass-coated steel wire 13 is processed to a predetermined diameter after pass through the final drawing die 15 driven by the final drive capstan 16.
  • the brass-plated steel wire 13 is drawn into a predetermined wire diameter (0.08mm to 0.4mm) by the use of plurality dies. After that, the finished wire can be wound on a spool on a wire winding unit.
  • FIG. 2 is a schematic illustration showing another apparatus 20 for manufacturing a steel wire for use in a wire saw according to present invention.
  • the apparatus 20 includes a cooling lubricant tank 1 1 filled with a liquid cooling lubricant 1 1 c, multistage drive capstans 12A and 12B disposed in the liquid cooling lubricant 1 1 c, a plurality of drawing dies 14, final drawing die 15 located on the interface between the liquid cooling lubricant 1 1 c and the air, i.e. the surface of liquid cooling lubricant 1 1 c, and a final drive capstan 16.
  • the process to manufacturing a steel wire for use in a wire saw according to present invention includes following.
  • a brass-coated steel wire 13 is alternately passed between and engaged with each stage of two multistage drive capstans 12A and 12B which are disposed opposite to each other in a liquid cooling lubricant 1 1 c in a cooling lubricant tank 1 1.
  • the wire is drawn by drawing dies 14 in their respective stages.
  • the brass-coated steel wire 13 is processed to a predetermined diameter after pass through the final drawing die 15 driven by the drive capstan 16.
  • the brass-plated steel wire 13 is drawn into a
  • the finished wire can be wound on a spool on a wire winding unit.
  • Rp 0.05 respectively Rp0.2
  • the proof strength at non- proportional extension 0.05% is the stress at which a non-proportional extension is equal to 0.05%, respectively 0.2% of the extensometer gauge length
  • Rm the tensile strength
  • the tension in the straightener defining the wire defect filtering level and the wire straightening effect, can be set independently from the tension resulting from the wet wire drawing process (in this case one needs to introduce an additional device to decouple these tensions) or can be the direct result of and thus correlated to the tensions generated by the wet wire drawing process, i.e. a wire straightener between the last die and the drive capstan. In the latter case, the use of a relatively higher reduction in the last die will result in a higher tension in the wire straightener.
  • a method to test the residual stress of the steel wire comprises following steps.
  • (second) (186.7 X wire diameter in mm) - 12.9, wherein the etching solution is made of one part HNO3 and one part demineralized water; j. Water-rinsing for 5 seconds and air dry for 1 minute;
  • Figure 3 schematically illustrates the method to test residual stress.
  • 31 is the bent-over part lacquered with nail paint and is put exactly on its original position.
  • 30 is the original position of the outer end copied on paper. If the outer end moves to 32, the residual stress is compressive and can be indicated as negative, and the value is the distance between 30 and 32 in mm. If the outer end moves to 33, the residual stress is tensile and can be indicated as positive, and the value is the distance between 30 and 33 in mm.
  • Figure 4 is a schematic illustration showing a drawing process in a drawing die.
  • wire 40 is drawn through a drawing die 41 to reduce the diameter from dO to d1.
  • the die angle A is the angle between a line parallel to the axis of the die and the line where wire 40 contacts drawing die 41 and is reducing the diameter.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Metal Extraction Processes (AREA)

Abstract

L'invention porte sur un fil d'acier à haute limite élastique destiné à être utilisé dans une scie à fil, ayant un rapport Rp0,2/Rm non inférieur à 96 %. Un procédé et un appareil pour l'étirage d'un fil d'acier à haute limite élastique comportent l'étirage d'un fil (13) à travers plusieurs filières standard (14), suivies d'une filière finale (15) montées dans une machine à étirer le fil, la réduction de la section transversale du fil (13) par une réduction d'environ 8 % à environ 20 % à chacune des différentes filières standard (14), et la réduction de la section transversale du fil par une réduction d'environ 15% à environ 25% à la filière finale (15). La filière finale (15) est placée sur l'interface entre le lubrifiant de refroidissement (11c) et l'air. La réduction relativement forte du fil à la filière finale (15), combinée au refroidissement intentionnellement réduit, a pour résultat un fil d'acier à haute limite élastique (13) possédant un rapport Rp0,2/Rm plus élevé et une tension interne résiduelle plus faible.
PCT/EP2012/069459 2011-10-09 2012-10-02 Fil de scie WO2013053622A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201280049991.1A CN103874552B (zh) 2011-10-09 2012-10-02 锯丝

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CNPCT/CN2011/080574 2011-10-09
CN2011080574 2011-10-09

Publications (1)

Publication Number Publication Date
WO2013053622A1 true WO2013053622A1 (fr) 2013-04-18

Family

ID=46970292

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2012/069459 WO2013053622A1 (fr) 2011-10-09 2012-10-02 Fil de scie

Country Status (2)

Country Link
CN (1) CN103874552B (fr)
WO (1) WO2013053622A1 (fr)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103343871A (zh) * 2013-07-02 2013-10-09 江苏宝钢精密钢丝有限公司 一种低弹性结构线及其制造方法
WO2020239348A1 (fr) 2019-05-27 2020-12-03 Siltronic Ag Procédé de séparation d'une pluralité de tranches de pièces au cours d'un nombre d'opérations de séparation au moyen d'une scie à fil et tranche de semi-conducteur composée de silicium monocristallin
EP3858569A1 (fr) 2020-01-28 2021-08-04 Siltronic AG Procédé de séparation d'une pluralité de disques à partir de pièces au moyen d'une scie à fil lors d'une séquence de processus de séparation

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4280857A (en) * 1979-11-05 1981-07-28 Aluminum Company Of America Continuous draw anneal system
US4612792A (en) 1981-02-06 1986-09-23 N. V. Bekaert S. A. Method of manufacturing fatigue resistant cables
EP0330752A1 (fr) * 1988-02-29 1989-09-06 Kabushiki Kaisha Kobe Seiko Sho Fil très fin ayant une résistance très élevée et matériaux de renforcement et matériaux composites contenant ce fil
US5189897A (en) 1991-10-15 1993-03-02 The Goodyear Tire & Rubber Company Method and apparatus for wire drawing
JP2001081681A (ja) * 1999-09-09 2001-03-27 Bridgestone Corp ゴム物品の補強に供するスチールワイヤの製造方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1758582A1 (de) * 1967-07-19 1971-03-11 Bekaert Sa Nv Waermebehandlung von Stahl
BE1014394A3 (fr) * 1999-08-12 2003-10-07 Bridgestone Corp Fils d'acier, leur procede de production et pneumatiques utilisant ces fils.
CN1804089A (zh) * 2006-01-19 2006-07-19 江苏兴达钢帘线股份有限公司 一种高强度回火胎圈钢丝
CN201304459Y (zh) * 2008-12-02 2009-09-09 浙江天伦钢丝有限公司 胎圈钢丝校直器
CN101733846A (zh) * 2009-12-18 2010-06-16 张家港市骏马钢帘线有限公司 一种切割用钢丝及其制造方法
CN101927274B (zh) * 2010-09-13 2011-10-05 河南恒星科技股份有限公司 超精细钢丝的生产工艺

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4280857A (en) * 1979-11-05 1981-07-28 Aluminum Company Of America Continuous draw anneal system
US4612792A (en) 1981-02-06 1986-09-23 N. V. Bekaert S. A. Method of manufacturing fatigue resistant cables
EP0330752A1 (fr) * 1988-02-29 1989-09-06 Kabushiki Kaisha Kobe Seiko Sho Fil très fin ayant une résistance très élevée et matériaux de renforcement et matériaux composites contenant ce fil
US5189897A (en) 1991-10-15 1993-03-02 The Goodyear Tire & Rubber Company Method and apparatus for wire drawing
JP2001081681A (ja) * 1999-09-09 2001-03-27 Bridgestone Corp ゴム物品の補強に供するスチールワイヤの製造方法

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103343871A (zh) * 2013-07-02 2013-10-09 江苏宝钢精密钢丝有限公司 一种低弹性结构线及其制造方法
WO2020239348A1 (fr) 2019-05-27 2020-12-03 Siltronic Ag Procédé de séparation d'une pluralité de tranches de pièces au cours d'un nombre d'opérations de séparation au moyen d'une scie à fil et tranche de semi-conducteur composée de silicium monocristallin
EP3858569A1 (fr) 2020-01-28 2021-08-04 Siltronic AG Procédé de séparation d'une pluralité de disques à partir de pièces au moyen d'une scie à fil lors d'une séquence de processus de séparation
WO2021151695A1 (fr) 2020-01-28 2021-08-05 Siltronic Ag Procédé de séparation de plusieurs tranches de pièces au moyen d'un appareil de sciage à fil hélicoïdal pendant une séquence de processus de séparation

Also Published As

Publication number Publication date
CN103874552B (zh) 2016-05-04
CN103874552A (zh) 2014-06-18

Similar Documents

Publication Publication Date Title
JP2017208553A (ja) ワークピースから特に均一な厚さの多数のスライスを同時に切り出すための方法
JP2007061968A (ja) ウエーハの表面のナノトポグラフィを改善する方法及びワイヤソー装置
KR102150407B1 (ko) 연마입자-고정 와이어 및 와이어 쏘 그리고 워크의 절단방법
WO2014108956A1 (fr) Procédé de reprise d'une opération d'une scie à fil hélicoïdal
US20150158098A1 (en) Sawing wire, method and equipment for manufacturing such a wire, and use
WO2013053622A1 (fr) Fil de scie
JP5649692B2 (ja) 円筒形の被加工物から多数のウェハを同時にスライスするための方法
JP6235295B2 (ja) 固定砥粒ワイヤソー装置及びこれを用いたウエハの製造方法
JP4980111B2 (ja) 純ニッケルパイプの製造方法及び純ニッケルパイプ
JP2024522523A (ja) ワークピースから複数のディスクを同時に切り出すための方法
KR101764529B1 (ko) 절단용 파형 모노와이어
TWI286351B (en) Semiconductor wafer and process for producing the semiconductor wafer
JP2000167618A (ja) ワイヤソー用ワイヤの伸線方法及び伸線装置
JP7103305B2 (ja) インゴットの切断方法
JP2005193332A (ja) ソーワイヤ
KR102367641B1 (ko) 워크의 절단방법 및 가공액
JP6627002B1 (ja) ワークの切断方法及びワークの切断装置
JPH11347910A (ja) ワイヤソー用高強力ワイヤ
JP2014070277A (ja) エッチングカット用ワイヤー及びこれを用いた無機性脆性材料のカット方法
TWI853209B (zh) 自半導體材料的圓柱形錠生產晶圓的方法
JP2000328188A (ja) ワイヤソー用鋼線
JP3489530B2 (ja) ワイヤソー用ワイヤの製造方法
JP3923965B2 (ja) ソーワイヤ
SU1000144A2 (ru) Способ изготовлени ленточной спирали
KR100317677B1 (ko) 와이어 소우용 와이어 및 그 제조방법

Legal Events

Date Code Title Description
WWE Wipo information: entry into national phase

Ref document number: 201280049991.1

Country of ref document: CN

121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 12768807

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 12768807

Country of ref document: EP

Kind code of ref document: A1